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Keivan Davami a,1, Mehrdad Shaygan a,1, Nazli Kheirabi a,1, Jiong Zhao b,1,
Daria A. Kovalenko c,d, Mark H. Rümmeli b,e, Joerg Opitz c,d, Gianaurelio Cuniberti a,c
,
Jeong-Soo Lee a,*, M. Meyyappan f,*
a
Division of IT Convergence Engineering, Pohang University of Science and Technology, Pohang, Republic of Korea
b
IFW Dresden, 01069 Dresden, Germany
c
Technical University of Dresden, Dresden, Germany
d
Fraunhofer Institute for Non-Destructive Testing, Dresden Branch, 01109 Dresden, Germany
e
Center for Integrated Nanostructure Physics, Institute for Basic Science, Department of Energy Science, Sungkyunkwan University,
Republic of Korea
f
NASA Ames Research Center, Moffett Field, CA 94035, USA
A R T I C L E I N F O A B S T R A C T
Article history: A radio frequency plasma enhanced chemical vapor deposition system was used for the
Received 28 April 2013 successful growth of thin vertical carbon nanowalls, also known as vertical graphene, on
Accepted 8 February 2014 various substrates. Transmission electron microscopy studies confirmed the presence of
Available online 13 February 2014 vertical graphene walls, which are tapered, typically consisting of 10 layers at the base
tapering off to 2 or 3 layers at the top. The sides of the walls are facetted at quantized
angles of 30 and the facetted sides are usually seamless. Growth occurs at the top open
edge which is not facetted. Hydrogen induced etching allows for nucleation of branch walls
apparently involving a carbon onion-like structure at the root base. Characterization by a
superconducting quantum interference device showed magnetic hysteresis loops and weak
ferromagnetic responses from the samples at room temperature and below. Temperature
dependence of the magnetization revealed a magnetic phase transition around T = 50 K
highlighting the coexistence of antiferromagnetic interactions as well as ferromagnetic
order.
Published by Elsevier Ltd.
* Corresponding authors: Address: NASA Ames Research Center, Moffett Field, CA 94035, USA. Fax: +1 650 604 5244 (M. Meyyappan).
E-mail addresses: ljs6951@postech.ac.kr (J.-S. Lee), m.meyyappan@nasa.gov (M. Meyyappan).
1
These authors contributed equally.
http://dx.doi.org/10.1016/j.carbon.2014.02.025
0008-6223/Published by Elsevier Ltd.
CARBON 7 2 (2 0 1 4) 3 7 2–38 0 373
received attention; this type of carbon is also called carbon avoid this problem, the chamber was cleaned before each
nanowalls (CNWs) or vertical graphene (VG) wherein the car- growth using oxygen plasma for 90 min with a sample stage
bon nanoflakes with their sharp edges and perpendicular to temperature of 750 C and plasma power of 900 W. Thus, the
the substrate are distinctive from other carbon structures. growth conditions for all the samples were the same. A vari-
Consistent with the terminology used in the literature, the ety of substrates including copper, Si, and Si covered with a
terms VG and CNW are used here interchangeably. These 150 nm film of either Ni or Au (thermally deposited) were
structures can be useful for catalyst support in fuel cells, con- used. The substrates were cleaned first using sonication in
ductive electrodes in photovoltaics and energy storage de- isopropyl alcohol solution and rinsed with de-ionized water,
vices such as lithium ion batteries and supercapacitors. followed by drying using nitrogen gas. The substrates were
CNWs can be readily synthesized using low temperature placed on a sample stage (chuck) with resistive heating capa-
plasmas including DC, RF and microwave discharges [10–18]. bility, and the chuck was positioned 50 mm below the quartz
A variety of different source gases, diluents or etchants, and window using an automatic control system. Vertical graphene
substrates have been investigated to assess the impact on can be grown in a wide range of temperatures from 600 C to
growth results. The main advantage realized in many of these 1100 C at different growth pressures between 103 Torr and
studies on plasma enhanced chemical vapor deposition atmospheric pressure. Pressure, temperature, flow rates and
(PECVD) of vertical graphene is the non-catalytic growth other parameters were varied to identify the impact on
process [10]. This makes the synthesis possible on any kind growth characteristics. Some of these parametric effects are
of substrates including Si, Ni, Ti, Pt, Cu, Ge, W, Ta, Mo, SiO2, known from previous studies [11,15]. Here the focus is on
Al2O3 and stainless steel [15,18]. Thus PECVD enables the the morphology of the vertical graphene and magnetic prop-
use of diverse substrates, low temperature growth and is erties and therefore, the results presented below are for iden-
catalyst-free, which are advantages compared to other tech- tical optimized conditions. For the growth of samples here, a
niques. Each type of substrate can influence applications of pressure of 1 Torr was maintained and the sample stage was
vertical graphene in some domain, for example, copper would warmed up to 680 C with a rate of 22 C/min using a current
be useful as a potential substrate in energy storage devices. In of 60 A. Plasma was ignited using a mixture of methane and
addition, most of the substrates mentioned above are com- hydrogen at an RF power of 900 W for a fixed deposition time
monly used in microelectronics. A review of the current sta- of 20 min.
tus of PECVD of graphene and unanswered questions at this A scanning electron microscope (JEOL JSM-7401F) operat-
stage can be found in [19–21] which include growth mecha- ing at 5.00 kV was used for imaging and studying the mor-
nism, nature of vertical growth and substrate-independent phology of the vertical graphene. A JEOL JEM-2010F
growth characteristics. In this work we report the synthesis transmission electron microscope (TEM) retrofitted with two
of vertical graphene structures by radio-frequency PECVD CEOS third-order spherical aberration correctors for the
on various substrates along with thorough characterization objective lens (CETCOR) and the condenser system (CESCOR)
including the magnetic properties and discuss the growth was used to characterize the grown material. The TEM was
mechanisms. Microstructural characterization by transmis- operated using an acceleration voltage of 80 kV. Micrograph
sion electron microscopy (TEM) allows us to put forward a image simulations were obtained using JEMS electron micros-
growth mechanism. Raman spectroscopy allows character- copy software. The samples were also investigated on disper-
ization of the number of walls comparing samples grown on sive Raman microscope Bruker Senterra with a green laser
various substrates. Finally, the graphene samples have been (excitation wavelength 532 nm) at an intensity of 20 mW. An
magnetically characterized. Various magnetic characteristics exposure time of 10 s per single spectrum was used with 10
from diamagnetism to ferromagnetism have been theoreti- accumulations per each point. Lateral resolution of 2 lm on
cally predicted or experimentally observed from different car- the sample surface was reached by the use of the 100· objec-
bon allotropes [7–9]. In carbonaceous materials the electronic tive. Spectral resolution varied between 3 and 9 cm1 depend-
structure and magnetic properties are sensitive to the crystal ing on the diffraction grating used in recording the spectra in
orientation, edge termination and structural defects. In the the wavenumber range of 80–4400 cm1. The Raman spectra
case of graphene, the number of layers, sample area and edge of the vertically grown graphene were measured with illumi-
states of non-bonding electrons can affect magnetic proper- nation parallel to the substrates. Illumination perpendicular
ties as well as the electronic structure [7]. The characteriza- or almost perpendicular to the plane of the nanowalls was
tion reveals intrinsic ferromagnetic behavior at room also attempted but the edges are believed to affect the results
temperature, an attribute desirable for magneto-resistive and interpretation of the number of layers.
and magnetic memory devices. Magnetic characterization was performed using the super-
conducting quantum interference device (SQUID) magnetom-
eter (MPMS XL Quantum Design) operating from 2 K to 300 K.
2. Experimental work The scratched graphene powder from the samples with a
mass of 1 mg was loaded into the machine chamber and the
The synthesis was conducted in a radio-frequency plasma en- changes in magnetization as a function of the external mag-
hanced chemical vapor deposition (RF-PECVD) system. An netic field were detected at different temperatures. The sam-
amorphous carbon layer usually accumulates on the chamber ple container itself did not have significant effect on the
walls when the PECVD apparatus is used for the deposition of measured magnetization. The scan X-ray photoelectron
carbon materials. This semi-insulating layer can affect the spectroscopy (XPS) measurements were recorded with VG
plasma conditions, and as a result, the CNWs. In order to scientific (Escalab 220ixl) spectrometer, equipped with
374 CARBON 7 2 ( 2 0 1 4 ) 3 7 2 –3 8 0
monochromatic Al Ka radiation (hm = 1486.58 eV) with a locations for new carbon atoms [10]. As a result of this pro-
1 · 1 m2 spot size. The fixed analyzer was employed with pass cess, CNWs show a cabbage shape as seen in Fig. 1(f).
energies of 100 and 50 eV for the survey and high-resolution Several growth mechanisms for CNWs have been sug-
spectra, respectively. XPS analysis is useful to investigate gested based on the early stages of the synthesis process
the purity of graphene grown on different substrates. [11,14,16–18] with the type of the substrate material affecting
the growth in the initial nucleation stages. A significant differ-
3. Results and discussion ence between the graphite and the substrate material lattice
will cause formation of an amorphous carbon layer [10]. Car-
Fig. 1(a–d) show SEM images of as-grown sheets of carbon bide forming substrate materials form an intermediate car-
nanowalls on Si, Si/Au, Si/Ni, and Cu substrates respectively bide layer instead of amorphous carbon [16]. After the
and Fig. 1(e) shows a cross-section SEM image of CNWs on formation of this intermediate layer, the growth is indepen-
the Si substrate, all indicating vertical graphene structures. dent of the substrate type. In general, the growth mechanism
The height of the CNWs is around 1 lm for a growth period includes three stages. First, a thin base layer is formed due to
of 20 min, with a growth rate somewhat lower than that of the adsorption of the carbon containing radicals onto the
microwave PECVD [12,16]. Note that the microwave plasma intermediate layer [11]. The base layer is not completely
is a high density discharge compared to conventional smooth and uniform but has a large amount of graphitic do-
13.56 MHz rf discharges. While CNWs on different substrates mains with random cracks and dangling bonds [10]. In the
have some differences, their general morphologies are quite second stage, the growth direction changes from parallel to
the same. In general, CNWs on Si substrates are denser and perpendicular when the growing edges curl upward to release
thinner compared to those on Si/Ni and Si/Au substrates. the stress that accumulates when the growth of graphitic do-
CNWs on Cu substrates are much finer than all other sub- mains continue parallel to the substrate and they encroach
strates. The graphene sheets have leaf shape morphologies upon one another [16]. In the last stage, rapid growth of
in all the samples. The CNWs appear similar to the blade of graphene layers continues from the perpendicular edges
a knife where the base of the layers is thicker compared to due to radical accumulation at these sites. The high rate of
the top. CH4 was used without a diluent in the growth of accumulation at these sharp edges is due to strong bonds
the above samples as the precursor gas. In contrast, Fig. 1(f) on the graphene planes compared to weak bonds in other
shows CNWs on a Si substrate grown with CH4/H2 (19:1) directions, i.e. stacking direction, and also due to diffusion
where the basal plane of graphene becomes eroded due to of radicals in the direction of the plasma sheath which is per-
hydrogen-induced etching. New branches grow out of the pendicular to the substrate [11,17]. Detailed microstructure
main wall from the eroded areas, which act as nucleation characterization below provides further insight into the
growth mechanism, along with differences in morphology
due to the underlying substrates.
Fig. 2 – Selection of TEM images showing the typical carbon nanostructures obtained from the PECVD for the following
substrates (top to bottom): Si/Ni, Cu, Si and Si/Au. Insets in panels b, f and k show the Fourier transform of the corresponding
image. Panels a–c, g and h show petal-like graphene flakes. Panels e, f, i, j, k and l show graphene flakes. Panel d shows
graphene shells.
layers show a spacing of 3.5 ± 0.05 Å concomitant with graph- at zigzag or armchair positions [22]. This is evidenced by mea-
ite (e.g. panel i of Fig. 2). Closer inspection of the flakes and surements of the angles between folds nearly always having
the petals show them to taper off at their outer edge; typically angles divisible by 30. In other words, the folding is quan-
the base has 10–20 graphene layers, whilst the tips have 2–3 tized at angles of 30 along armchair and zigzag edges (see
layers. Fig. S1 in Supplementary information). Typically changes in
Both the flakes and the petals show facetted sides as can contrasts on the graphene wall are also observable due to
be seen in panels a and b of Fig. 3. Panel b of Fig. 3 shows a thickness change from the folded flaps (see Fig. S1). However
carbon nanowall directly rooted to its Au substrate, and sim- in some cases no such changes in contrast are observed even
ilar to the petals one sees that the sides leading to the sub- though after inspection of the diffraction patterns at the
strate are facetted. The edge contrast of the facetted edges edges, armchair or zigzag axis terminations are confirmed.
though differs from the facetted edges of petal structures. Pe- For example, the diffraction pattern (inset) of micrograph k
tal structures tend to have curved graphene that can be ob- in Fig. 2 confirms the edge to be armchair. At times it is not
served as facets in a 2D micrograph, while folded graphene possible to trace a graphene flap from a fold (i.e. no changes
has clear facets and edges formations. Two types of facetted in contrast due to thickness changes from a flap are ob-
edges exist in this form, either as folded graphene or seam- served), suggesting pairs of edges may have closed, viz. seam-
less graphene edges as discussed below. Closer inspection less edges. Seamless edges look very similar to folded edges
shows faceting of the edges closely matching that from folded [23]. To better determine if seamless edges are truly present,
graphene where the lowest energy configurations are to fold a variety of facetted edges were investigated in greater detail.
376 CARBON 7 2 ( 2 0 1 4 ) 3 7 2 –3 8 0
Fig. 4 – Panel a: TEM micrograph of a tri-layer graphene wall with two layers bound seamlessly at the edges. Panel b shows
the intensity profiles across the dashed lines across the edges in panels c (red profile), d (blue profile) and e (green profile).
Panel c shows the real TEM image taken from the highlighted square in panel a, panel d is an image simulation of tri-layer
graphene with two layers bound to form a seamless edge (see inset) and panel e shows a folded strip of graphene two yield
one folded edge and open edge (see inset). (A colour version of this figure can be viewed online.)
Fig. 5 – Schematic showing growth history of a graphite flake with quantized folds. (A colour version of this figure can be
viewed online.)
the Raman spectra of the samples on the Si/Au and Si/Ni sub- nanowalls synthesized on Si/Au and Si/Ni substrates could
strates (Figs. S5 and S6 in Supplementary Information). How- be comprised of mono- or bi-layered graphene. This corre-
ever, well defined 2D-band at 2698 cm1 in the Raman spectra sponds well with results of TEM investigations, confirming
of these two samples points to the graphitic structure. Such bi-layered graphene structure with rotational stacking.
shape, width (FWHM) and relative intensity of the 2D-band
are peculiar for mono- or bilayer graphene [33,34]. 3.3. Magnetic properties
According to the above results, the three samples of CNWs
grown on Si, Si/Au and Si/Ni substrates include graphitic One important characteristic of any material is its behaviour
structures, however, the structure is highly disordered. It in response to external magnetic field. It would be specifically
can be caused by random orientation of the graphene sheets interesting to discover that CNWs are potentially capable of
and their finite size [29]. Carbon nanowalls obtained on the Si demonstrating ferromagnetic behaviour even in room tem-
substrate tend to have more crystalline character than the perature, since organic magnets are highly desirable and have
CNWs grown on Si/Au and Si/Ni. At the same time, according always been searched for, however they mostly tend to oper-
to the shape, width and relative intensity of the 2D-band, ate at very low temperatures.
378 CARBON 7 2 ( 2 0 1 4 ) 3 7 2 –3 8 0
Fig. 6 – Raman spectra of carbon nanowalls grown on Fig. 8 – Temperature dependence of the magnetization of the
different substrates: Si, Si/Au, Si/Ni. (A colour version of this graphene powder scratched from Si substrate at H = 500 Oe.
figure can be viewed online.) (A colour version of this figure can be viewed online.)
Graphene powder scratched from the silicon substrate susceptibility saturation for temperatures above 100 K was
exhibits magnetic hysteresis loops at room temperature and reported before for nano-graphite samples [38]. A hump is
lower. Fig. 7 shows the magnetization curve obtained at seen around T = 50 K; such anomalies in the susceptibility
T = 300 K in the field intensity range of 1000 Oe < - curve are related to magnetic phase transitions. The esti-
H < 1000 Oe. The magnetization is about 0.013 emu/g for a mated negative Curie–Weiss temperature as well as a local
magnetic field of H = 1000 Oe. The remanent magnetization maximum in the magnetization curve at low temperatures
and coercive field can be estimated to be Mr = 0.002 emu/g were also reported before for graphene prepared by various
and Hc = 30 Oe, respectively from the hysteresis curve. Simi- methods in Ref. [9] where such magnetic behavior was attrib-
lar room temperature weak ferromagnetic responses have uted to the coexistence of antiferromagnetic interactions be-
been reported before from many carbon based nanostruc- sides the ferromagnetic order.
tures such as carbon nanospheres grown by CVD [35], and car- Ferromagnetism in organic carbon based materials has
bon nanosheets slowly synthesized by the RF-PECVD [36]. been a controversial issue, particularly, if the reported magne-
Wang et al. [37] attributed the ferromagnetic behavior of tism is an intrinsic property or if it originates from magnetic
graphene to the existence of various kinds of defects. impurities and contaminations. Our VG samples show ferro-
Temperature dependence of the magnetization at a con- magnetic response at room temperature and below, providing
stant field intensity of H = 500 Oe shown in Fig. 8 reveals that experimental support for the hypothesis of the existence of
magnetization saturates to about 7 · 103 emu/g, and is intrinsic ferromagnetism in pure carbon based materials.
almost independent of the temperature for T > 70 K. Magnetic Moreover they suggest the possibility of considering CNWs
as organic magnets at room temperature.
Finally, the C1s spectra from the XPS analysis of three VG
samples grown on different substrates (Fig. 9) contain only
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