Professional Documents
Culture Documents
net/publication/332566337
Different rare earth (Sm, La, Nd) doped magnetron sputtered CdO thin films
for optoelectronic applications
CITATIONS READS
0 120
6 authors, including:
P. Sakthivel S. Asaithambi
Alagappa University Alagappa University
23 PUBLICATIONS 57 CITATIONS 18 PUBLICATIONS 50 CITATIONS
Some of the authors of this publication are also working on these related projects:
Preparation of Transparent conducting oxide thin films for opto electronic applications View project
All content following this page was uploaded by P. Sakthivel on 24 April 2019.
Different rare earth (Sm, La, Nd) doped magnetron sputtered CdO thin
films for optoelectronic applications
P. Sakthivel1 · S. Asaithambi1 · M. Karuppaiah1 · S. Sheikfareed1 · R. Yuvakkumar1 · G. Ravi1
Abstract
Pure and rare earth elements of samarium (Sm), lanthanum (La) and neodymium (Nd) doped cadmium oxide (CdO) thin films
were deposited on glass substrates by radiofrequency magnetron sputtering at room temperature. The influence of rare earth
dopants on the microstructural, morphological and optoelectronic properties of the CdO thin films were studied elaborately.
The X-ray diffraction studies revealed the polycrystalline with face centered cubic structure of CdO thin films. The structural
defects were increased with increase of dopant’s ionic radii. The presence of the dopants in host CdO thin films was con-
firmed by X-ray photoelectron spectroscopic analysis. The roughness of the films was decreased for the doped samples and
Nd doped CdO thin film has the minimum roughness value of 1.29 nm. All the films exhibited high transmittance in visible
range and well pronounced Moss-Burstein shift was observed in the band gap value. Emission bands of photoluminescence
spectra depicted the presence of oxygen vacancies. Hall Effect measurement showed an increase in carrier concentration
and electrical conductivity of the films with the addition of dopants. The suitable combination of high conductivity (2872
Ω−1·cm−1) with optical transparency (88%) and lower surface roughness of Nd doped CdO thin film, makes it a potential
candidate for the transparent conducting oxide in optoelectronic devices.
13
Vol.:(0123456789)
Journal of Materials Science: Materials in Electronics
as In, Sn, Zn, Al, Ce etc. were introduced as dopants in the materials on CdO film properties, the films were deposited
host CdO structure [15–17]. From the review of literature, it by varying the target while keeping the other deposition
has been observed that the optoelectronic properties of CdO parameters such as RF power, substrate temperature and
films can be enhanced by doping of elements having ionic deposition time as 100 W, room temperature and 30 min,
d2+. Especially, the rare earth
radii nearly equal to the host C respectively which are based on the experimentation of other
4f-metallic elements may be the most potential candidate for researchers and prior experience with the current sputtering
the above mentioned purpose [18]. Hence, further detailed system.
investigation is needed to understand the effect of rare earth
doping on the physical properties of the CdO thin films. 2.2 Film characterization
From device fabrication point of view, RF sputtering
technique offers many attractive features such as uniform, The thickness measurement was carried out by Mitutoya
well adherent and smooth film deposition, large area coating, SJ-301 surface profilometer equipped with diamond needle.
easy control over growth rate, contaminants free deposition, Structural properties were examined by XPERT-PRO PAN
good reproducibility and suitability of using different sub- analytical diffractometer operated at 40 kV and 30 mA using
strates [19] etc. In author’s earlier work, the CdO thin films the source of CuKα1 radiation (0.154 nm) with the scan-
were deposited by RF sputtering technique and the deposi- ning step size of 0.05°. Morphological analysis was done by
tion parameters were optimized successfully [20]. In order to using field emission scanning electron microscope (FESEM
address the above mentioned problems, in the present work, (ZEISS)). The topography of the films was recorded using
the different rare earth metal ions such as samarium (Sm), atomic force microscope (AFM) (Bruker Innova) in tapping
lanthanum (La) and neodymium (Nd) doped CdO thin films mode. In order to identify the oxidation state of the elements
are deposited on glass substrates by RF sputtering technique present in the sample, the X-ray photoelectron spectroscopy
and the effect of doping elements on structural, morphologi- study was carried out using Axis Ultra 165 instrument with
cal, compositional, optical and electrical properties of the AlKα as the X-ray source with energy up to 1486 eV. Trans-
deposited CdO thin films are elaborately investigated. mittance and reflectance spectra for the films were recorded
using UV–Vis-NIR spectrophotometer (Ocean optics,
USA) in the wavelength range of 300-1000 nm. Photolu-
2 Experimental details minescence spectra were recorded with help of Varian Cary
Eclipse spectrophotometer equipped with xenon flash lamp
2.1 Thin film preparation source excited at 380 nm. The electrical properties of the
films were evaluated by Hall effect measurements (Ecopia-
Pure and rare earths of Samarium (Sm), Lanthanum (La) and HMS 3000) with a magnetic field of 0.57 Tesla in Van der
Neodymium (Nd) doped CdO thin films have been deposited Pauw configuration at room temperature.
in argon atmosphere using pure and rare earth metals mixed
CdO target on pre cleaned microscopic glass substrates with
the help of RF magnetron sputtering unit (HINDHIVAC; 3 Results and discussion
Planar Magnetron RF\DC Sputtering System Model-1200
MSPT). The preparation of target is reported elsewhere [20]. 3.1 Structural characterization
For the preparation of rare earth mixed target, the source
materials were taken in the ratio of 90: 10 wt% of (CdO: The measured thicknesses (t) of all the deposited films were
Sm2O3), (CdO: La2O3) and (CdO: N d2O3). Prior to deposi- constant as 960 nm. The structural properties and crystalline
tion, the substrates were subjected to well cleaning by chro- quality of pure and different rare earth metals doped CdO
mic acid solution for 2 h at 80 °C followed by sequential thin films were investigated through XRD and their diffrac-
cleaning with deionized water, ethanol and acetone. The tion patterns are shown in Fig. 1. From these perspective
substrate to target distance is fixed at 6 cm for all deposition patterns, the diffraction peaks were found at 2θ values of
process. High degree of vacuum in the order of 5 × 10−6 32.88°, 38.00°, 55.24°, 65.44° and 68.94° due to the reflec-
mbar is created in the chamber with the help of diffusion tions of (111), (200), (220), (311) and (222) planes of CdO
pump backed rotary pump. As a result of introduction of respectively. This reveals that the deposited films are poly-
ultra high pure (UHP) argon in the flow rate of 25 sccm into crystalline nature and the relatively stronger intensity peak at
the chamber, the pressure of the chamber rises to 2 × 10−3 2θ = 32.88° indicates the preferential orientation along (111)
mbar, which is maintained as working pressure throughout direction. The obtained XRD patterns are in good agreement
the deposition process. For the removal of contaminations with the standard JCPDS No. 050640 which revealed that
on target surface, pre sputtering was carried out for 10 min. the deposited films are cubic structure, Fm-3 m space group
In order to study the doping effects of different rare earth and the atoms are arranged in face centered lattice pattern
13
Journal of Materials Science: Materials in Electronics
1 (h2 + k2 + l2 )
2
= (1)
d a2
V = a3 (2)
√
a 2
r= (3)
4
where, h, k, l are the Miller indices of predominant orienta-
Fig. 1 XRD patterns of pure and rare earth metals doped CdO thin tion. The FWHM of (111) plane for pure CdO thin film is
films 0.2952 and this value is increased to 0.3936, 0.3444 and
0.5904 for Sm, La and Nd doped CdO films respectively. It
[21]. Apart from the CdO characteristic peaks, no peak cor- is found that the increment of FWHM of doped films repre-
responding to metallic Cd, Sm, La and Nd or their complex sents the reduction of crystallite sizes.
oxides are seen. It is observed that the peak positions of rare The lattice constant value of pure CdO thin film was esti-
earth elements doped CdO thin films are slightly shifted to mated at 4.717 Å and this is very close to the standard value
lower angle side compared to pure CdO thin films. of bulk CdO (4.697 Å). The lattice constant increases to 4.741,
This peak shift is strongly attributed to the ionic radii of 4.745 and 4.754 Å for Sm, La and Nd doped CdO thin films.
the doping and host elements. The dopant materials such In general, the lattice constants of the semiconducting materi-
as Sm3+, La3+ and N d3+ have ionic radii value of 0.96 Å, als are strongly associated with the impurity concentration,
1.03 Å, 1.12 Å respectively and the host C d2+ has 0.97 Å. presence of defects, mechanically induced strain in the lattice
The dopants with larger ionic radius induce the structural and different ionic radii with respect to the substituted matrix
strain in the order of 1 0−3 in CdO lattice. The structural ions [26]. Here, the increment of lattice constant suggests that
strain has caused by a tensile stress due to the incorporation the introduction of S m3+, La3+ and Nd3+ into the CdO can
of foreign atoms into the host lattice and as a consequence, promote the lattice distortion, dislocations and natural defects
Table 1 Structural parameters Thin films Peak posi- FWHM d-value (Å) Lattice Unit cell Radius of
of pure and rare earths doped tion (111) (degree) (111) parameter (Å) volume (Å)3 the atom r
CdO thin films (Å)
13
Journal of Materials Science: Materials in Electronics
on the CdO films. The atomic radius and unit cell volume of varies from 4.245 × 1015 to 7.163 × 1015(lines/m2) with the
CdO film increase with the substitution of rare earth elements addition of dopant ions. While adding the dopant material,
(Table 1). It is confirmed that the dopants are successfully the defects such as micro strain and dislocation density are
incorporated into the C d2+ ions and as a consequence unit increased which indicate that the appropriate dopant ions
cell volume and atomic radius of CdO film are increased. In could promote the defect generation in the CdO lattice and
order to attain further detailed information about the crystal- induce lattice imperfections and as a result decrease the
line quality of the films, the various structural parameters such crystallite size. The number of crystallites per unit area was
as crystallite size (D), micro strain (ε), dislocation density (δ) decreased with an increase of crystallite size, which may be
and staking fault probability are calculated and the values are due to the coalition between adjacent small grains to form
presented in Table 2. The crystallite size is the measure of size larger size. The staking fault probability (α) is one of the
of coherently diffracting domains. It was estimated by using major layer defects in crystalline solids that are measured by
Debye Scherer’s relations [27] the variation of observed and standard XRD peak positions.
Further, it is found to vary from 0.122 to 0.507 for pure and
K𝜆
D= (4) rare earth doped CdO thin films. The lower value of 0.122
𝛽 cos 𝜃
was observed for pure CdO thin films due to slight mismatch
where, D is the crystallite size, β is the full width at half with glass substrate and it increases with respect to the ionic
maximum (FWHM), K is the constant called as shape factor radii of dopant material.
(taken as 0.94), θ is the diffracted angle and λ is the wave-
length of incident X-ray. The average crystallite size of pure 3.2 Elemental analysis
CdO was found to be 18.423 nm. The average crystallite
sizes of Sm, La and Nd doped CdO films were found to be X-ray photoelectron spectroscopy (XPS) study was carried
decreased to 16.187, 17.164 and 15.351 nm respectively. out on all the deposited films in order to identify the pres-
This reduction of crystallite size is due to the distortion in ence of elements on the surface of the films and confirm
the lattice by the incorporation of foreign impurities that their oxidation states. The representative wide scan spectra
decrease the growth rate and nucleation of the CdO thin of pure and rare earths doped CdO thin films are shown
films [28]. The micro strain (ε), dislocation density (δ), stak- in Fig. 2. The peak found around 284.6 eV is assigned to
ing fault probability and number of crystallites per unit area carbon in the state of C 1s1/2 due to surface contamination
(N) were calculated by using the following relations [29] by atmospheric air. The narrow scan spectrum of cadmium
(Cd), samarium (Sm), lanthanum (La), neodymium (Nd)
𝛽 cos 𝜃 and oxygen (O) are shown in Fig. 3a–f. The cadmium 3d
𝜀= (5)
4 features of pure CdO thin film consist of main Cd3d5/2 and
Cd3d3/2 spin orbit components located at 405.2 and 411.6 eV
1 respectively splitting with energy of 6.4 eV which is attrib-
𝛿= (6)
D2 uted to the existence of C d2+ and this is exactly matched
with the binding energy of Cd–O bonding, while the peaks
� � of Cd3d5/2 and Cd3d3/2 of the rare earth doped CdO films
2𝜋 2 Δ2𝜃
𝛼= √ (7) were slightly shifted to the lower energy which indicate the
45 3 tan 𝜃
substitutions of Cd atoms by rare earth atoms in the CdO
lattice. In addition, the peaks located at 617.1 and 651.7 eV
t indicate the presence of Cd3p3/2 and Cd3p1/2 respectively.
N= (8)
D3 The characteristic peaks of S m3d5/2 and S
m3d3/2 at 1080.4
From the Table 2, the micro strain values are increased and 1108.3 eV respectively observed for Sm doped CdO thin
from 2.138 × 10−3 to 2.969 × 10−3 and the dislocation density m3+ ions exist in the
films (Fig. 3c), which indicate that the S
2+
positions of Cd ions. The characteristics peaks of L a3d5/2
Table 2 Microstructral Thin films Average crys- Dislocation density Micro Staking fault Number of crystallites per
properties of pure and rare tallite size D δ × 1015 (lines/m2) strain probability α unit area (1016 crystallites/
earths doped CdO thin films (nm) ε × 10−3 m2)
13
Journal of Materials Science: Materials in Electronics
Fig. 2 Wide scan XPS spectra of pure and rare earth metals doped
CdO thin films 3.3.2 AFM analysis
13
Journal of Materials Science: Materials in Electronics
Fig. 3 Narrow scan XPS spectra of a Cd3d, b Cd3p, c Sm3d, d La3d, e Nd3d and f O1 s of pure and rare earth metals doped CdO thin films
3.4 Optical characterization transmittance spectra of pure and rare earth doped CdO
thin films which revealed that the deposited films are highly
3.4.1 UV–Vis spectral analysis transparent in the visible region and the average transmit-
tance values are higher than 75% for all films. The average
To investigate the effect of rare earth doping on optical transmittance of pure CdO thin film is 76% and this value
properties of CdO thin films, the transmittance and reflec- increases to 88% for doped CdO thin films. The change in
tance spectra of pure and rare earth doped CdO films were transmittance with the addition of rare earth ions is strongly
recorded using UV visible NIR spectrometer in the wave- attributed to the surface roughness of the films. The sur-
length range from 300 to 800 nm. Figure 6 shows the optical face roughness value decreased with the addition of dopant
13
Journal of Materials Science: Materials in Electronics
Fig. 4 FESEM images of a pure b Sm doped c La doped and d Nd doped CdO thin films
13
Journal of Materials Science: Materials in Electronics
(B-M) [44]. In degenerate semiconductor, Burstein pointed where, Egi is the intrinsic band gap and SBGW is the con-
out that lifting of the Fermi level up to the conduction band stant value of 1.35 × 10−18 eV m2 for CdO. It is revealed
by the generation of high carrier concentration ( Ne) and from the above expression that the variation of band gap is
hence the optical absorption edge shifts to higher energy. directly proportional to the two by third of carrier concen-
This effect can be expressed by the following equation [45] tration values. The pure CdO film has the carrier concentra-
2
tion value of 2.113 × 1019 cm−3 and the value is increased
Eg = Egi + SBGW Ne3 (12) to 2.981 × 1020 cm−3 for Nd doped CdO films. So, the blue
13
Journal of Materials Science: Materials in Electronics
The PL spectra of pure and rare earth doped CdO thin films
are shown in Fig. 8. From the spectra, all the films exhibit
almost same emissions and have two distinct peaks located
at 485 and 519 nm. The obtained peaks are well matched
with the earlier report by Rajesh et al. [46]. The peak at
485 nm ascribed to the near band edge emission (NBE) of
CdO. Further, the NBE of rare earth doped CdO thin films
was widened with respect to their increment of dopant’s
ionic radii. The green emission peak at 519 nm corresponds
to ionized oxygen vacancies called as trap state emission
[47]. In addition, it is worthy to note that the emission inten-
sity of the doped CdO films is higher than pure CdO. This
indicates the increase in defects due to the introduction of
higher ionic radii dopants which causes lattice distortion in
Fig. 6 Transmittance spectra of pure and rare earth doped CdO thin
films the host CdO. This inference is well matched with our XRD
studies.
3.5 Electrical characterization
Table 3 Electrical and optoelectronic properties of pure and rare earth doped CdO thin films
Sample Carrier Mobility (cm2/Vs) Resistivity (Ω. cm) Conductivity Band gap (eV) Average transmittance FOM (Ω−1) × 10−3
concentration (Ω−1.cm−1) (% Tavg) 500–800 nm
(cm−3)
13
Journal of Materials Science: Materials in Electronics
these values are increased from 2.113 × 1019 for pure CdO film
to 5.853 × 1019, 1.036 × 1020 and 2.981 × 1020 cm−3 for Sm,
La and Nd doped CdO thin films respectively. The increase
of carrier concentration is due to the generation of more free
electrons in doped films which are from the donor sites associ-
ated with oxygen deficiencies, metal interstitials and substitu-
tion of impurities [50]. The metal interstitials as Cd2+ and the
rare earth impurities such as S m3+, La3+ and N d3+ substitute
in the Cd2+ also creates the donor states between the valence
band and conduction band. In particular, oxygen deficiency is
the most important source of producing free carriers. Accord-
ing to the Kroger-Vink model, each oxygen deficiency acts as
an ionized donor that provides two free electrons. This could
be expressed by the following equation [51]
o 1
OX = Voo + 2e− + O2 (14)
2
Fig. 8 Photoluminescence spectra of pure and rare earth doped CdO
thin films where, OX is the oxygen positioned at lattice site and Voo is
o
13
Journal of Materials Science: Materials in Electronics
T10
𝜙TC = (16)
Rs
where, T is the transmittance (500–800 nm) and Rs is
the sheet resistance of the deposited films. According to
this equation, the obtained FOM values are 1.805 × 10−3,
4.565 × 10−3, 6.265 × 10−3 and 12.636 × 10−3 Ω−1 for pure,
Sm, La and Nd doped CdO thin films. It is observed that
all the films have high FOM value and the FOM increases
with the addition of dopant ions and reaches the maximum
value of 12.636 × 10−3 Ω−1 for Nd doped CdO thin films.
This FOM value is greater than the FOM of ITO thin films
(11.9 × 10−3 Ω−1) [62]. The result shows that the Nd doped
CdO thin film has the high optical transmittance in visible
Fig. 10 Mobility and figure of merit value of deposited films as a region, high electrical conductivity and has good figure of
function of carrier concentration merit which implies that Nd doped CdO thin films prepared
by RF sputtering are more suitable for optoelectronic appli-
cations (Table 4).
Here, τ is the relaxation time, m* is the effective mass of
charge carrier, e is the electronic charge and μ is the elec-
tron mobility. The pure CdO thin film is in good crystal- 4 Conclusion
line nature and hence it has less grain boundaries, lattice
distortion and point defects that may reduce the scatter- Pure and rare earth (Sm, La and Nd) doped CdO thin films
ing of electrons as a result enchances the relaxation time were deposited on glass substrates by RF sputtering tech-
as well as electron mobility. Upon introducing the dopant nique. The effect of rare earth doping on microstructral,
materials into the CdO, the crystallinity of the films was morphological, compositional, optical and electrical prop-
reduced with respect to the increment of ionic radii of the erties of CdO thin films were investigated in detail. The
dopants. Also, the grain boundaries and defects of the films thicknesses of all deposited films were around 960 nm. The
are increased. As a consequence, the scattereing of elec- deposited films were polycrystalline in nature with face
trons is increased and the relaxation time, mobilty of the centered cubic structure. The crystallite size of the films
films are reduced. This result is in good agreement with the was decreased and thereby structural defects were increased
XRD studies observed in the present work. From the XRD with the increase of dopant ionic radii. Further, the dop-
analysis, the crystallite size of the films is in the range of ing of rare earth metal ions introduces variations in the
15–18 nm which is much greater than the mean free path of lattice parameter, crystallite size, microstrain, dislocation
the electron (L ~ 1 nm). Thus, the grain boundary scatter- density and unit cell volume. The presence of the elements
ing is expected to be insignificant in this case. At the same in the oxidation states Cd3d, Sm3d, La3d, Nd3d and O1s
time, the carrier concentration of the deposited films is high were confirmed by XPS studies. FESEM images showed
and it lies in the range of 1 019–1020 which significantly pro- the smooth and uniform morphological surface. The pure
motes the electron–electron/ionized impurities scattering. CdO thin film has nano petal like morphology with larger
From these results, it is found that the decrease in resitivity grain size and with doping, the grain sizes were found to
and increase in conductivity of the deposited films despite decrease. The roughness of films was decreased with the
a decrease in mobility is due to disproportionate increase of addition of the dopants and reached the minimum value of
carrier concentration following the release of free electrons 1.29 nm for Nd doped CdO thin films. All the films showed
via oxygen vacancies. high transmittance (76–88%) and the band gap value varies
from 2.66 to 3.01 eV with doping. The band edge emission
3.6 Optoelectronic properties analysis was observed at 485 nm and another emission at 519 nm
indicates the presence of oxygen vacancies. The decreased
In order to use the deposited CdO thin films as the TCO resistivity with the increased carrier density was found for
layer in optoelectronic devices, not only resistivity but also the doped films. The resistivity, charge carrier density and
the transmittance of the films should be considered signifi- mobility of the films were in the ranges of 10−3–10−4 Ω·cm,
cantly. Thus, the optoelectronic performance of the TCO 1019–1020 cm−3 and 140.03–60.12 cm2/Vs respectively.
was evaluated by examining the figure of merit (FOM) value From these results, all the deposited films are highly trans-
using the Haacke formula [61] parent and conducting in nature, of which Nd doped CdO
13
Journal of Materials Science: Materials in Electronics
Table 4 Comparison of the electrical and optical properties of the CdO thin films by various researchers
Materials Carrier Mobility Resistivity (Ω cm-−1) Average Band gap (eV) Method Ref
concentration (cm2/ transmit-
(cm−3) Vs) tance (%)
thin film has the low resistivity of 3.482 × 10−4 Ω·cm with 9. M. Yan, M. Lane, C.R. Kannewurf, R. Chang, Highly conduc-
high optical transparency of 88% in visible range, high figure tive epitaxial CdO thin films prepared by pulsed laser deposi-
tion. Appl. Phys. Lett. 78, 2342–2344 (2001)
of merit 12.636 × 10−3 Ω−1 with lower surface roughness of 10. A. Purohit, S. Chander, M.S. Dhaka, Impact of annealing on physi-
1.29 nm which makes it preferred material as TCO layer for cal properties of e-beam evaporated polycrystalline CdO thin films
optoelectronic devices. for optoelectronic applications. Opt. Mater. 66, 512–518 (2017)
11. H. Khallaf, C.-T. Chen, L.-B. Chang, O. Lupan, A. Dutta, H.
Acknowledgements P. Sakthivel gratefully acknowledges UGC, Heinrich, A. Shenouda, L. Chow, Investigation of chemical bath
New Delhi for awarding UGC-BSR fellowship (F.No. 25-1/2014-15 deposition of CdO thin films using three different complexing
(BSR)/7-14/2007(BSR)/13.03.2015.) and G. Ravi greatly acknowl- agents. Appl. Surf. Sci. 257, 9237–9242 (2011)
edges the DST-SERB (File No. EMR/2017/001999), UGC-SAP, DST- 12. S. Duman, G. Turgut, F.Ş. Özçelik, B. Gurbulak, The synthesis
FIST, DST-PURSE and RUSA 2.0 for financial support to carry out and characterization of sol–gel spin coated CdO thin films: As a
this work. function of solution molarity. Mater. Lett. 126, 232–235 (2014)
13. K. Kesavan, A. Kathalingam, H.-S. Kim, A.R.U. Sundari,
Effects of fluorine doping on structural, optical and electri-
cal properties of spray deposited CdO thin films. Superlattices
References Microstruct. 100, 76–88 (2016)
14. B. Saha, R. Thapa, K.K. Chattopadhyay, Wide range tuning of
electrical conductivity of RF sputtered CdO thin films through
1. C.P. Liu, C.Y. Ho, R.D. Reis, Y. Foo, P.F. Guo, J.A. Zapien, W. oxygen partial pressure variation. Sol. Energy Mater. Sol. Cells
Walukiewicz, K.M. Yu, Room-temperature-synthesized high- 92(9), 1077–1080 (2008)
mobility transparent amorphous CdO–Ga2O3 alloys with widely 15. B.J. Zheng, J.S. Lian, L. Zhao, Q. Jiang, Optical and electrical
tunable electronic bands. ACS Appl. Mater. Interfaces. 10, 7239– properties of Sn-doped CdO thin films obtained by pulse laser
7247 (2018) deposition. Vaccum 85(9), 861–865 (2011)
2. R. Chandiramouli, B.G. Jeyaprakash, Review of CdO thin films. 16. T.K. Pathak, J.K. Rajput, V. Kumar, L.P. Purohit, H.C. Swart,
Solid State Sci. 16, 102–110 (2013) R.E. Kroon, Transparent conducting ZnO-CdO mixed oxide thin
3. S.C. Dixon, D.O. Scanlon, C.J. Carmalt, I.P. Parkin, n-Type doped films grown by the sol-gel method. J. Colloid Interface Sci. 487,
transparent conducting binary oxides: an overview. J. Mater. 378–387 (2017)
Chem. C 4, 6946–6961 (2016) 17. A.A. Dakhel, Effect of cerium doping on the structural and opto-
4. M. Grundmann, Karl Badeker (1877–1914) and the discovery of electrical properties of CdO nanocrystallite thin films. Mater.
transparent conductive materials. Phys. Status Solidi. 212, 1409– Chem. Phys. 130, 398–402 (2011)
1426 (2015) 18. P. Velusamy, R.R. Babu, K. Ramamurthi, M.S. Dahlem, E. Elan-
5. S. Calnan, A.N. Tiwari, High mobility transparent conducting govan, Highly transparent conducting cerium incorporated CdO
oxides for thin film solar cells. Thin Solid Films 518(7), 1839– thin films deposited by a spray pyrolytic technique. RSC Adv.
1849 (2010) 5, 102741–102749 (2015)
6. R.K. Gupta, K. Ghosh, R. Patel, S.R. Mishra, P.K. Kahol, Struc- 19. W.-M. Cho, G.-R. He, S. Ting-Hong, Y.-J. Lin, Transparent
tural, optical and electrical properties of In doped CdO thin films high-surface-work-function Al-doped CdO electrodes obtained
for optoelectronic applications. Mater. Lett. 62, 3373–3375 (2008) by RF magnetron sputtering with oxygen flow. Appl. Surf. Sci.
7. P. Dhivya, A.K. Prasad, M. Sridharan, Magnetron sputtered nano- 258(10), 4632–4635 (2012)
structured cadmium oxide films for ammonia sensing. J. Solid 20. P. Sakthivel, R. Murugan, S. Asaithambi, M. Karuppaiah, S.
State Chem. 214, 24–29 (2014) Rajendran, G. Ravi, Radio frequency magnetron sputtered CdO
8. N. Wongcharoen, T. Gaewdang, T. Wongcharoen, Electrical prop- thin films for optoelectronic applications. J. Phys. Chem. Solids
erties of Al-doped CdO thin films prepared by thermal evapora- 126, 1–10 (2019)
tion in vacuum. Energy Proc. 15, 361–370 (2012)
13
Journal of Materials Science: Materials in Electronics
21. M. Bououdina, A.A. Dakhel, Creation of RT-FM in CdO 41. L.C.S. Murthy, K.S.R.K. Rao, Thickness dependent electrical
nanocrystalline powder by codoping with Cu and Gd: effect of properties of CdO thin films prepared by spray pyrolysis method.
annealing in hydrogen atmosphere. J. Alloys Compd. 601, 162– Bull. Mater. Sci. 22(6), 953–957 (1999)
166 (2014) 42. H.H. Ahmed, Variation of the structural, optical and electrical
22. L.L. Pan, G.Y. Li, J.S. Lian, Structural, optical and electrical prop- properties of CBD CdO with processing temperature. Mater. Sci.
erties of cerium and gadolinium doped CdO thin films. Appl. Surf. Semicond. Process. 66, 215–222 (2017)
Sci. 274, 365–370 (2013) 43. D.A. Cristaldi, S. Millesi, I. Crupi, G. Impellizzeri, F. Priolo,
23. A.A. Dakhel, Study of high mobility carriers in Ni-doped CdO R.M.J. Jacobs, R.G. Egdell, A. Gulino, Structural, electronic, and
films. Bull. Mater. Sci. 36(5), 819–825 (2013) electrical properties of an undoped n-type CdO thin film with high
24. P. Velusamy, R.R. Babu, K. Ramamurthi, E. Elangovan, J. Viegas, electron concentration. J. Phys. Chem. C 118(27), 15019–15026
Effect of La doping on the structural, optical and electrical prop- (2014)
erties of spray pyrolytically deposited CdO thin films. J Alloys 44. S. Munir, S.M. Shah, H. Hussain, R.A. Khan, Effect of carrier
Compd. 708, 804–812 (2017) concentration on the optical band gap of T iO2 nanoparticles.
25. M. Anitha, K. Saravanakumar, N. Anitha, L. Amalraj, Influence Mater. Des. 92, 64–72 (2016)
of a novel co-doping (Zn + F) on the physical properties of nano 45. K. Jeyadheepan, M. Thamilselvan, K. Kim, J. Yi, C. Sanjeeviraja,
structured (111) oriented CdO thin films applicable for window Optoelectronic properties of R-F magnetron sputtered cadmium
layer of solar cell. Appl. Surf. Sci. 443, 55–67 (2018) tin oxide (Cd2SnO4) thin films for CdS/CdTe thin film solar cell
26. J.H. Lim, S.M. Lee, H.-S. Kim, H.Y. Kim, J. Park, S.B. Jung, applications. J. Alloys Compd. 620, 185–191 (2015)
G.C. Park, J. Kim, J. Joo, Synergistic effect of Indium and Gal- 46. N. Rajesh, J.C. Kannan, G. Neri, T. Krishnakumar, Microwave
lium co-doping on growth behavior and physical properties of Irradiation effect on structural, optical, and thermal properties of
hydrothermally grown ZnO nanorods. Sci Rep. 7, 41992 (2017) cadmium oxide nanostructure. Acta Phys. Pol., A 125(4), 1229–
27. T. Marimuthu, N. Anandhan, R. Thangamuthu, S. Surya, Influence 1235 (2014)
of solution viscosity on hydrothermally grown ZnO thin films for 47. A.V. Moholkar, G.L. Agawane, K.-U. Sim, Y. Kwon, D.S. Choi,
DSSC applications. Superlattices Microstruct. 98, 332–3419 (2016) K.Y. Rajpure, J.H. Kim, Temperature dependent structural, lumi-
28. S. Dhanapandian, A. Arunachalam, C. Manoharan, Highly nescent and XPS studies of CdO:Ga thin films deposited by spray
oriented and physical properties of sprayed anatase Sn-doped pyrolysis. J. Alloys Compd. 506, 794–799 (2010)
TiO2 thin films with an enhanced antibacterial activity. Appl. 48. S. Major, A. Banerjee, K.L. Chopra, Highly transparent and con-
Nanosci 6(3), 387–397 (2016) ducting indium-doped zinc oxide films by spray pyrolysis. Thin
29. S. Thiagarajan, M. Thaiyan, R. Ganesan, Physical property explo- Solid Films 108(3), 333–340 (1983)
ration of highly oriented V2O5 thin films prepared by electron 49. B. Saha, S. Das, K.K. Chattopadhyay, Electrical and optical prop-
beam evaporation. New J. Chem. 39, 9471–9479 (2015) erties of Al doped cadmium oxide thin films deposited by radio
30. P. Velusamy, R.R. Babu, K. Ramamurthi, J. Viegas, E. Elango- frequency magnetron sputtering. Sol. Energy Mater. Sol. Cells
van, Structural, microstructural, optical and electrical properties 91(18), 1692–1697 (2007)
of spray deposited rare-earth metal (Sm) ions doped CdO thin 50. R.N. Chauhan, N. Tiwari, R.S. Anand, J. Kumar, Development
films. J. Mater. Sci. 26, 4152–4164 (2015) of Al-doped ZnO thin film as a transparent cathode and anode for
31. S. Kundu, N. Sutradhar, R. Thangamuthu, B. Subramanian, application in transparent organic light-emitting diodes. RSC Adv.
A.B. Panda, M. Jayachandran, Fabrication of catalytically active 6, 86770–86781 (2016)
nanocrystalline samarium (Sm)-doped cerium oxide ( CeO2) thin 51. K. Jeyadheepan, M. Thamilselvan, K. Kim, J. Yi, C. Sanjeeviraja,
films using electron beam evaporation. J. Nanopart. Res. 14, 1040 Optoelectronic properties of R-F magnetron sputtered cadmium
(2012) tin oxide (Cd2SnO4) thin films for CdS/CdTe thin film solar cell
32. X. Han, S. Wahl, P.A. Russo, N. Pinna, Cobalt-assisted morphol- applications. J. Alloys Compd. 620, 185–191 (2015)
ogy and assembly control of Co-doped ZnO nanoparticles. Nano- 52. J.K. Rajput, T.K. Pathak, V. Kumar, L.P. Purohit, Influence of sol
materials 8(4), 249 (2018) concentration on CdO nanostructure with gas sensing application.
33. A.A. Dakhel, Transparent conducting properties of samarium- Appl. Surf. Sci. 409, 8–16 (2017)
doped CdO. J. Alloys Compd. 475(1–2), 51–54 (2009) 53. S. Calnan, A.N. Tiwari, High mobility transparent conducting
34. A.A. Mosquera, J.M. Albella, V. Navarro, D. Bhattacharyya, J.L. oxides for thin film solar cells. Thin Solid Films 518(7), 1839–
Endrino, Effect of silver on the phase transition and wettability of 1849 (2010)
titanium oxide films. Sci. Rep. 6, 32171 (2016) 54. M. Ramamurthy, M. Balaji, P. Thirunavukkarasu, Characterization
35. W.R. Phillips, Atomic force microscopy for thin film analysis. of jet nebulizer sprayed CdO thin films for solar cell application.
Surf. Coat. Technol. 68–69, 770–775 (1994) Optik Int. J. Light Electron. Opt. 127, 3809–3819 (2016)
36. Y. Shihui, H. Zheng, L. L, Siliang Chen, Highly conducting and 55. A.A. Dakhel, Optical and electrical properties of copper-doped
transparent antimony doped tin oxide thin films: the role of sput- nano-crystallite CdO thin films. Solid State Sci. 31, 1–7 (2014)
tering power density. Ceram. Int. 43(7), 5654–5660 (2017) 56. K. Sankarasubramanian, P. Soundarrajan, T. Logu, S. Kiruthika,
37. K. Punitha, R. Sivakumar, C. Sanjeeviraja, V. Ganesan, Influence K. Sethuraman, R.R. Babu, K. Ramamurthi, Influence of Mn dop-
of post-deposition heat treatment on optical properties derived ing on structural, optical and electrical properties of CdO thin
from UV–vis of cadmium telluride (CdTe) thin films deposited films prepared by cost effective spray pyrolysis method. Mater.
on amorphous substrate. Appl. Surf. Sci. 344, 89–100 (2015) Sci. Semicond. Process. 26, 346–353 (2014)
38. M. Thambidurai, C. Dang, Structural, morphological and optical 57. A.A. Ziabari, F.E. Ghodsi, G. Kiriakidis, Correlation between
properties of CdO nanostructures synthesized by chemical bath morphology and electro-optical properties of nanostructured CdO
deposition method. Mater. Lett. 221, 244–247 (2018) thin films: influence of Al doping. Surf. Coat. Technol. 213, 15–20
39. C.E. Kim, P. Moon, S. Kim, J.-M. Myoung, H.W. Jang, J. Bang, (2012)
IYun, Effect of carrier concentration on optical bandgap shift in 58. M. Ravikumar, R. Chandramohan, K.D.A. Kumar, S. Valanarasu,
ZnO: Ga thin films. Thin Solid Films 518(22), 6304–6307 (2010) V. Ganesh, M. Shkir, S. Alfaify, A. Kathalingam, Effect of Nd
40. R.K. Gupta, K. Ghosh, R. Patel, P.K. Kahol, Bandgap engineering doping on structural and opto-electronic properties of CdO thin
of rare earth element doped nanostructured cadmium oxide thin films fabricated by a perfume atomizer spray method. Bull. Mater.
films. Physica E 44(1), 163–167 (2011) Sci. 42, 8 (2019)
13
Journal of Materials Science: Materials in Electronics
59. A.A. Dakhel, Electro-optical properties of hydrogenated Si-doped Publisher’s Note Springer Nature remains neutral with regard to
CdO. J. Electron. Mater. 47(1), 773–777 (2018) jurisdictional claims in published maps and institutional affiliations.
60. M.R. Alam, M.M. Rahman, A.M.M.T. Karim, M.K.R. Khan,
Effect of Ag incorporation on structural and opto-electric prop-
erties of pyrolized CdO thin films. Int. Nano Lett. 8(4), 287–295
(2018)
61. G. Haacke, New figure of merit for transparent conductors. J.
Appl. Phys. 47(9), 4086 (1976)
62. M. Nisha, M.K. Jayaraj, Influence of RF power and fluorine dop-
ing on the properties of sputtered ITO thin films. Appl. Surf. Sci.
255(5), 1790–1795 (2008)
13