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Different rare earth (Sm, La, Nd) doped magnetron sputtered CdO thin films
for optoelectronic applications

Article  in  Journal of Materials Science Materials in Electronics · April 2019


DOI: 10.1007/s10854-019-01342-9

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Journal of Materials Science: Materials in Electronics
https://doi.org/10.1007/s10854-019-01342-9

Different rare earth (Sm, La, Nd) doped magnetron sputtered CdO thin
films for optoelectronic applications
P. Sakthivel1 · S. Asaithambi1 · M. Karuppaiah1 · S. Sheikfareed1 · R. Yuvakkumar1 · G. Ravi1

Received: 19 December 2018 / Accepted: 15 April 2019


© Springer Science+Business Media, LLC, part of Springer Nature 2019

Abstract
Pure and rare earth elements of samarium (Sm), lanthanum (La) and neodymium (Nd) doped cadmium oxide (CdO) thin films
were deposited on glass substrates by radiofrequency magnetron sputtering at room temperature. The influence of rare earth
dopants on the microstructural, morphological and optoelectronic properties of the CdO thin films were studied elaborately.
The X-ray diffraction studies revealed the polycrystalline with face centered cubic structure of CdO thin films. The structural
defects were increased with increase of dopant’s ionic radii. The presence of the dopants in host CdO thin films was con-
firmed by X-ray photoelectron spectroscopic analysis. The roughness of the films was decreased for the doped samples and
Nd doped CdO thin film has the minimum roughness value of 1.29 nm. All the films exhibited high transmittance in visible
range and well pronounced Moss-Burstein shift was observed in the band gap value. Emission bands of photoluminescence
spectra depicted the presence of oxygen vacancies. Hall Effect measurement showed an increase in carrier concentration
and electrical conductivity of the films with the addition of dopants. The suitable combination of high conductivity (2872
Ω−1·cm−1) with optical transparency (88%) and lower surface roughness of Nd doped CdO thin film, makes it a potential
candidate for the transparent conducting oxide in optoelectronic devices.

1 Introduction chemical and temperature stability, higher mechanical


strength due to its simple cubic structure. Adversely, the
The discovery of transparent conducting oxide (TCO) is the optical band gap of the pristine CdO is narrow (2.5 eV)
mile stone in transparent electronics and has paved way for which affects the transparency in the visible region of elec-
new frontier in the area of optoelectronics. TCOs are the tromagnetic spectrum; consequently it limits the practical
interesting class of materials that have a unique behaviour applications of CdO in optoelectronic devices [6]. This is
of both optically transparent and electrically conducting one of the challenge on which researchers are concentrating.
nature due to which they have been used as key component In TCO thin films, the surface roughness affects the mobility
in many optoelectronic devices such as solar cells, flat panel of charge carriers which in turn reduces the conductivity,
display, thin film transistors, light emitting diodes, electro and also roughness induces the light scattering phenomena
chromic and energy efficient smart windows etc. [1–3]. which results in reduction of optical transparency. This is
Cadmium oxide (CdO) is the first ever discovered transpar- another issue that has to be addressed.
ent conducting oxide [4] and it has n- type semiconduct- There are lots of techniques available for the deposition of
ing nature with electrical resistivity of ­10−2–10−4 Ω·cm and CdO thin films. In the literature, the various techniques such
has moderate transparency (< 70%) in the visible and near as RF/DC Sputtering [7], thermal evaporation [8], pulsed
infra red regions. The fascinating conductivity (­ 102–104 S/ laser deposition [9], electron beam evaporation [10], chemi-
cm) of CdO is strongly attributed to its exceptional carrier cal bath deposition [11], sol gel spin coating [12] and spray
concentration ­(1019 to 1­ 020 ­cm−3) and larger carrier mobil- pyrolysis [13] are reported for the deposition of CdO thin
ity (30–150 c­ m2 ­Vs−1) [5]. Moreover, CdO possesses good films. As far as CdO thin films are concerned, the various
efforts have been taken for tuning the optical band gap and
* G. Ravi visible wavelength transparency, increasing the electrical
gravicrc@gmail.com; raviganesa@rediffmail.com conductivity and reduction of surface roughness by select-
ing the suitable deposition technique and optimizing its para-
1
Department of Physics, Alagappa University, metric conditions [14]. In addition, different elements such
Karaikudi 630 003, TamilNadu, India

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Journal of Materials Science: Materials in Electronics

as In, Sn, Zn, Al, Ce etc. were introduced as dopants in the materials on CdO film properties, the films were deposited
host CdO structure [15–17]. From the review of literature, it by varying the target while keeping the other deposition
has been observed that the optoelectronic properties of CdO parameters such as RF power, substrate temperature and
films can be enhanced by doping of elements having ionic deposition time as 100 W, room temperature and 30 min,
­ d2+. Especially, the rare earth
radii nearly equal to the host C respectively which are based on the experimentation of other
4f-metallic elements may be the most potential candidate for researchers and prior experience with the current sputtering
the above mentioned purpose [18]. Hence, further detailed system.
investigation is needed to understand the effect of rare earth
doping on the physical properties of the CdO thin films. 2.2 Film characterization
From device fabrication point of view, RF sputtering
technique offers many attractive features such as uniform, The thickness measurement was carried out by Mitutoya
well adherent and smooth film deposition, large area coating, SJ-301 surface profilometer equipped with diamond needle.
easy control over growth rate, contaminants free deposition, Structural properties were examined by XPERT-PRO PAN
good reproducibility and suitability of using different sub- analytical diffractometer operated at 40 kV and 30 mA using
strates [19] etc. In author’s earlier work, the CdO thin films the source of CuKα1 radiation (0.154 nm) with the scan-
were deposited by RF sputtering technique and the deposi- ning step size of 0.05°. Morphological analysis was done by
tion parameters were optimized successfully [20]. In order to using field emission scanning electron microscope (FESEM
address the above mentioned problems, in the present work, (ZEISS)). The topography of the films was recorded using
the different rare earth metal ions such as samarium (Sm), atomic force microscope (AFM) (Bruker Innova) in tapping
lanthanum (La) and neodymium (Nd) doped CdO thin films mode. In order to identify the oxidation state of the elements
are deposited on glass substrates by RF sputtering technique present in the sample, the X-ray photoelectron spectroscopy
and the effect of doping elements on structural, morphologi- study was carried out using Axis Ultra 165 instrument with
cal, compositional, optical and electrical properties of the AlKα as the X-ray source with energy up to 1486 eV. Trans-
deposited CdO thin films are elaborately investigated. mittance and reflectance spectra for the films were recorded
using UV–Vis-NIR spectrophotometer (Ocean optics,
USA) in the wavelength range of 300-1000 nm. Photolu-
2 Experimental details minescence spectra were recorded with help of Varian Cary
Eclipse spectrophotometer equipped with xenon flash lamp
2.1 Thin film preparation source excited at 380 nm. The electrical properties of the
films were evaluated by Hall effect measurements (Ecopia-
Pure and rare earths of Samarium (Sm), Lanthanum (La) and HMS 3000) with a magnetic field of 0.57 Tesla in Van der
Neodymium (Nd) doped CdO thin films have been deposited Pauw configuration at room temperature.
in argon atmosphere using pure and rare earth metals mixed
CdO target on pre cleaned microscopic glass substrates with
the help of RF magnetron sputtering unit (HINDHIVAC; 3 Results and discussion
Planar Magnetron RF\DC Sputtering System Model-1200
MSPT). The preparation of target is reported elsewhere [20]. 3.1 Structural characterization
For the preparation of rare earth mixed target, the source
materials were taken in the ratio of 90: 10 wt% of (CdO: The measured thicknesses (t) of all the deposited films were
­Sm2O3), (CdO: ­La2O3) and (CdO: N ­ d2O3). Prior to deposi- constant as 960 nm. The structural properties and crystalline
tion, the substrates were subjected to well cleaning by chro- quality of pure and different rare earth metals doped CdO
mic acid solution for 2 h at 80 °C followed by sequential thin films were investigated through XRD and their diffrac-
cleaning with deionized water, ethanol and acetone. The tion patterns are shown in Fig. 1. From these perspective
substrate to target distance is fixed at 6 cm for all deposition patterns, the diffraction peaks were found at 2θ values of
process. High degree of vacuum in the order of 5 × 10−6 32.88°, 38.00°, 55.24°, 65.44° and 68.94° due to the reflec-
mbar is created in the chamber with the help of diffusion tions of (111), (200), (220), (311) and (222) planes of CdO
pump backed rotary pump. As a result of introduction of respectively. This reveals that the deposited films are poly-
ultra high pure (UHP) argon in the flow rate of 25 sccm into crystalline nature and the relatively stronger intensity peak at
the chamber, the pressure of the chamber rises to 2 × 10−3 2θ = 32.88° indicates the preferential orientation along (111)
mbar, which is maintained as working pressure throughout direction. The obtained XRD patterns are in good agreement
the deposition process. For the removal of contaminations with the standard JCPDS No. 050640 which revealed that
on target surface, pre sputtering was carried out for 10 min. the deposited films are cubic structure, Fm-3 m space group
In order to study the doping effects of different rare earth and the atoms are arranged in face centered lattice pattern

13
Journal of Materials Science: Materials in Electronics

the lattice of CdO is expanded and hence the angle shifts to


the smaller 2θ values [22]. Moreover, it can be explained
that higher charge of dopant can alter the oxygen vacancies
concentration depending on their position in CdO lattice and
can occupy interstitial position for C ­ d2+ in the CdO lattice
[23]. Further, it is clearly seen from the figure that the reflec-
tion peaks intensity of doped CdO films is altered which
represents the reduction of crystalline quality. This may be
due to the effect of strain energy in the CdO lattice by rare
earth dopant incorporation and thereby triggering a change
in nucleation and growth kinetics of CdO films. This similar
effect of doped CdO films was observed in the earlier report
of Velusamy et al. [24]. The interplanar distance between
the two adjacent planes (d), the full width at half maximum
(FWHM) value of pure and rare earth doped CdO films are
measured from the XRD patterns and the structural param-
eters such as lattice constant (a), unit cell volume (V) and
radius of the atoms (r) are calculated using the following
relations [25] and the values are presented in Table 1.

1 (h2 + k2 + l2 )
2
= (1)
d a2

V = a3 (2)

a 2
r= (3)
4
where, h, k, l are the Miller indices of predominant orienta-
Fig. 1  XRD patterns of pure and rare earth metals doped CdO thin tion. The FWHM of (111) plane for pure CdO thin film is
films 0.2952 and this value is increased to 0.3936, 0.3444 and
0.5904 for Sm, La and Nd doped CdO films respectively. It
[21]. Apart from the CdO characteristic peaks, no peak cor- is found that the increment of FWHM of doped films repre-
responding to metallic Cd, Sm, La and Nd or their complex sents the reduction of crystallite sizes.
oxides are seen. It is observed that the peak positions of rare The lattice constant value of pure CdO thin film was esti-
earth elements doped CdO thin films are slightly shifted to mated at 4.717 Å and this is very close to the standard value
lower angle side compared to pure CdO thin films. of bulk CdO (4.697 Å). The lattice constant increases to 4.741,
This peak shift is strongly attributed to the ionic radii of 4.745 and 4.754 Å for Sm, La and Nd doped CdO thin films.
the doping and host elements. The dopant materials such In general, the lattice constants of the semiconducting materi-
as ­Sm3+, ­La3+ and N ­ d3+ have ionic radii value of 0.96 Å, als are strongly associated with the impurity concentration,
1.03 Å, 1.12 Å respectively and the host C ­ d2+ has 0.97 Å. presence of defects, mechanically induced strain in the lattice
The dopants with larger ionic radius induce the structural and different ionic radii with respect to the substituted matrix
strain in the order of 1­ 0−3 in CdO lattice. The structural ions [26]. Here, the increment of lattice constant suggests that
strain has caused by a tensile stress due to the incorporation the introduction of S ­ m3+, ­La3+ and ­Nd3+ into the CdO can
of foreign atoms into the host lattice and as a consequence, promote the lattice distortion, dislocations and natural defects

Table 1  Structural parameters Thin films Peak posi- FWHM d-value (Å) Lattice Unit cell Radius of
of pure and rare earths doped tion (111) (degree) (111) parameter (Å) volume (Å)3 the atom r
CdO thin films (Å)

Sm:CdO 32.713 0.3936 2.737 4.741 106.5 1.676


La:CdO 32.675 0.3444 2.740 4.745 106.8 1.677
Nd:CdO 32.671 0.5904 2.745 4.754 107.4 1.680

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Journal of Materials Science: Materials in Electronics

on the CdO films. The atomic radius and unit cell volume of varies from 4.245 × 1015 to 7.163 × 1015(lines/m2) with the
CdO film increase with the substitution of rare earth elements addition of dopant ions. While adding the dopant material,
(Table 1). It is confirmed that the dopants are successfully the defects such as micro strain and dislocation density are
incorporated into the C ­ d2+ ions and as a consequence unit increased which indicate that the appropriate dopant ions
cell volume and atomic radius of CdO film are increased. In could promote the defect generation in the CdO lattice and
order to attain further detailed information about the crystal- induce lattice imperfections and as a result decrease the
line quality of the films, the various structural parameters such crystallite size. The number of crystallites per unit area was
as crystallite size (D), micro strain (ε), dislocation density (δ) decreased with an increase of crystallite size, which may be
and staking fault probability are calculated and the values are due to the coalition between adjacent small grains to form
presented in Table 2. The crystallite size is the measure of size larger size. The staking fault probability (α) is one of the
of coherently diffracting domains. It was estimated by using major layer defects in crystalline solids that are measured by
Debye Scherer’s relations [27] the variation of observed and standard XRD peak positions.
Further, it is found to vary from 0.122 to 0.507 for pure and
K𝜆
D= (4) rare earth doped CdO thin films. The lower value of 0.122
𝛽 cos 𝜃
was observed for pure CdO thin films due to slight mismatch
where, D is the crystallite size, β is the full width at half with glass substrate and it increases with respect to the ionic
maximum (FWHM), K is the constant called as shape factor radii of dopant material.
(taken as 0.94), θ is the diffracted angle and λ is the wave-
length of incident X-ray. The average crystallite size of pure 3.2 Elemental analysis
CdO was found to be 18.423 nm. The average crystallite
sizes of Sm, La and Nd doped CdO films were found to be X-ray photoelectron spectroscopy (XPS) study was carried
decreased to 16.187, 17.164 and 15.351 nm respectively. out on all the deposited films in order to identify the pres-
This reduction of crystallite size is due to the distortion in ence of elements on the surface of the films and confirm
the lattice by the incorporation of foreign impurities that their oxidation states. The representative wide scan spectra
decrease the growth rate and nucleation of the CdO thin of pure and rare earths doped CdO thin films are shown
films [28]. The micro strain (ε), dislocation density (δ), stak- in Fig. 2. The peak found around 284.6 eV is assigned to
ing fault probability and number of crystallites per unit area carbon in the state of C ­ 1s1/2 due to surface contamination
(N) were calculated by using the following relations [29] by atmospheric air. The narrow scan spectrum of cadmium
(Cd), samarium (Sm), lanthanum (La), neodymium (Nd)
𝛽 cos 𝜃 and oxygen (O) are shown in Fig. 3a–f. The cadmium 3d
𝜀= (5)
4 features of pure CdO thin film consist of main ­Cd3d5/2 and
­Cd3d3/2 spin orbit components located at 405.2 and 411.6 eV
1 respectively splitting with energy of 6.4 eV which is attrib-
𝛿= (6)
D2 uted to the existence of C ­ d2+ and this is exactly matched
with the binding energy of Cd–O bonding, while the peaks
� � of ­Cd3d5/2 and ­Cd3d3/2 of the rare earth doped CdO films
2𝜋 2 Δ2𝜃
𝛼= √ (7) were slightly shifted to the lower energy which indicate the
45 3 tan 𝜃
substitutions of Cd atoms by rare earth atoms in the CdO
lattice. In addition, the peaks located at 617.1 and 651.7 eV
t indicate the presence of ­Cd3p3/2 and ­Cd3p1/2 respectively.
N= (8)
D3 The characteristic peaks of S ­ m3d5/2 and S
­ m3d3/2 at 1080.4
From the Table 2, the micro strain values are increased and 1108.3 eV respectively observed for Sm doped CdO thin
from 2.138 × 10−3 to 2.969 × 10−3 and the dislocation density ­ m3+ ions exist in the
films (Fig. 3c), which indicate that the S
2+
positions of ­Cd ions. The characteristics peaks of L ­ a3d5/2

Table 2  Microstructral Thin films Average crys- Dislocation density Micro Staking fault Number of crystallites per
properties of pure and rare tallite size D δ × 1015 (lines/m2) strain probability α unit area ­(1016 crystallites/
earths doped CdO thin films (nm) ε × 10−3 m2)

Sm:CdO 17.164 4.245 2.969 0.373 27.52


La:CdO 16.187 5.071 2.370 0.325 30.88
Nd:CdO 15.351 7.163 2.678 0.507 32.57

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Journal of Materials Science: Materials in Electronics

substrate. The morphology of pure CdO was slightly modi-


fied by doping of Sm and the grain sizes were decreased to
the value of 34 nm. This may be due to the distortion pro-
duced by Sm atoms inside the Cd-Sm-O lattice [33]. The
La doped CdO thin film shows undefined smaller sized
grains and in the case of on Nd doped CdO film no grains
were appeared. The average grain size calculated from the
FESEM images is greater than that of average crystallite
size calculated from the XRD because FESEM shows only
the agglomerated structures on the surface of the films
[34]. Among the deposited CdO films, pure CdO film has
uniformly distributed nano petal like grains and the grains
sizes were decreased for doped films and a flat surface was
observed for Nd doped CdO film. This change is strongly
attributed to the variation of ionic radii of the dopants.
Increase of ionic radii of dopants leads to increase of lat-
tice distortion in the host lattice as a consequence nuclea-
tion, agglomeration and growth rate of CdO nano petals
were reduced in the order of Sm:CdO > La:CdO > Nd:
CdO thin films.

Fig. 2  Wide scan XPS spectra of pure and rare earth metals doped
CdO thin films 3.3.2 AFM analysis

In order to evaluate the effect of different rare earth


and ­La3d3/2 at 836.6 and 853.8 eV respectively observed for dopants on topography of the CdO films, atomic force
La doped CdO thin films confirm that ­La3+ ions are doped in microscope images were recorded in non contact mode.
the CdO. The less intense binding energy peaks at 980.5 and The three dimensional (3D) and two dimensional (2D)
1002.98 eV observed for Nd doped CdO films corresponding AFM micrographs of pure and rare earths doped CdO thin
to the ­Nd3d5/2 and ­Nd3d3/2 respectively confirm the oxida- films are presented in Fig. 5a–d and a1–d1. From these
tion state of ­Nd3+. Figure 3f shows the measured narrow images, it is obviously found that the topography of the
scan XPS spectra of O1s level, the sharp peak at 528.8 eV films was changed on doping. The pristine CdO thin film
clearly indicates the chemisorbed oxygen in oxide phase shows nano grains that uniformly distributed on the entire
and it denotes the characteristic ­O2− oxidation state. These substrate. The size of the grains decreased with the addi-
observed binding energy values are well matched with the tion of dopants. This is due to dopant assisted inhibition
earlier reports of other researchers [30, 31] and this result in the growth mechanism. The root mean square rough-
suggests that the rare earth ions such as S ­ m3+, ­La3+ and ness ­(Rrms) is used to describe the surface quality, which
3+
­Nd are successfully doped into the CdO lattice. affects the light scattering character of the films and it
is strongly influenced by the degree of aggregation and
3.3 Surface characterization grain size. The ­Rrms of the films were calculated using the
expression [35]
3.3.1 FESEM analysis
N
1∑
The FESEM images of pure and rare earths doped CdO
Rrms = |Z − Zi | (9)
N i=1 m
thin films are shown in Fig. 4. It is found that, all the films
have uniform and smooth morphology. Films are strongly where, N is the number of deviations in height ­Zi from the
adhered to the substrate without any defects like pin holes profile mean value Z­ m. The R
­ rms value is found in the range
and cracks. In addition, the films show variations in sur- of 5.40, 2.96, 2.15 and 1.29 for pure, Sm, La and Nd doped
face morphology with respect to doping of rare earth. The CdO thin films respectively. The R ­ rms decreases with the
variation of morphology may be due to an alteration in introduction of dopant ions and Nd doped CdO film has a
the composition of the films [32]. The pure CdO thin film minimum roughness of 1.29 nm which is more suitable for
consists of nano petal shaped grains with an average size optoelectronic applications.
of 40 nm which are uniformly distributed on the entire

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Journal of Materials Science: Materials in Electronics

Fig. 3  Narrow scan XPS spectra of a Cd3d, b Cd3p, c Sm3d, d La3d, e Nd3d and f O1 s of pure and rare earth metals doped CdO thin films

3.4 Optical characterization transmittance spectra of pure and rare earth doped CdO
thin films which revealed that the deposited films are highly
3.4.1 UV–Vis spectral analysis transparent in the visible region and the average transmit-
tance values are higher than 75% for all films. The average
To investigate the effect of rare earth doping on optical transmittance of pure CdO thin film is 76% and this value
properties of CdO thin films, the transmittance and reflec- increases to 88% for doped CdO thin films. The change in
tance spectra of pure and rare earth doped CdO films were transmittance with the addition of rare earth ions is strongly
recorded using UV visible NIR spectrometer in the wave- attributed to the surface roughness of the films. The sur-
length range from 300 to 800 nm. Figure 6 shows the optical face roughness value decreased with the addition of dopant

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Journal of Materials Science: Materials in Electronics

Fig. 4  FESEM images of a pure b Sm doped c La doped and d Nd doped CdO thin films

which enhances the transparency of the films by reducing ( )( )


1
the light scattering [36]. This hypothesis is well supported 𝛼= 1 − R2 − T (10)
t
by the results obtained from AFM. The interference fringes
are obtained in the examined range of 500–800 nm which where, t is the thickness, T is the transmittance and R is the
indicates that the surface is highly smooth and homogene- reflectance of the deposited thin films. The absorption coef-
ous. The formation of fringes is strongly associated with the ficient is related with energy band gap and is expressed by
path difference and refractive index of the films [37]. The the Tauc’s equation [42]
pure CdO film shows the sharp absorption edge at around
( )n
450 nm which agrees well with the theoretical band gap of 𝛼h𝜈 = A hv − Eg (11)
CdO (2.5–2.7 eV) [38] and the absorption edge of doped
CdO films are slightly shifted towards the lower wavelength where, ‘α’ is the absorption coefficient, ‘A’ is the constant,
region (blue shift) with respect to the dopants ionic radii ‘hν’ is the photon energy, and ‘n’ depends on the type of
value which indicates the widening of optical band gap (Eg) transition (n = 0.5—indirect, n = 2—direct). CdO is an n-
of films. The blue shift of the absorption edge is due to the type degenerate direct band gap semiconducting material
formation of films in nano range, enhancement of crystallin- [43] and hence the Tauc’s plots could be plotted between
ity and increment in carrier concentration [39]. This result the (αhν)2 and photon energy (hν) as shown in Fig. 7. The
is in good agreement with the XRD and Hall measurement extrapolation of the linear region at α = 0 gives the direct
studies and the similar blue shift band gap energy of rare energy band gap (Eg) and is given in Table 3. It is observed
earth doped CdO films was observed in the earlier work of from the table that the energy band gap values increase from
Velusamy et al. [40]. 2.66 eV for undoped CdO to 2.81, 2.86 and 3.01 eV of Sm,
The optical absorption coefficient can be directly calcu- La and Nd doped CdO thin films respectively. This widening
lated from the transmittance spectra using the relation [41] of band gap can be explained by the Burstein-Moss effect

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Journal of Materials Science: Materials in Electronics

Fig. 5  3D (a–d) and 2D


(a1–d1) AFM micrographs of
pure (a, a1), Sm (b, b1), La (c,
c1) and Nd (d, d1) doped CdO
thin films

(B-M) [44]. In degenerate semiconductor, Burstein pointed where, ­Egi is the intrinsic band gap and ­SBGW is the con-
out that lifting of the Fermi level up to the conduction band stant value of 1.35 × 10−18 eV m2 for CdO. It is revealed
by the generation of high carrier concentration (­ Ne) and from the above expression that the variation of band gap is
hence the optical absorption edge shifts to higher energy. directly proportional to the two by third of carrier concen-
This effect can be expressed by the following equation [45] tration values. The pure CdO film has the carrier concentra-
2
tion value of 2.113 × 1019 ­cm−3 and the value is increased
Eg = Egi + SBGW Ne3 (12) to 2.981 × 1020 ­cm−3 for Nd doped CdO films. So, the blue

13
Journal of Materials Science: Materials in Electronics

3.4.2 Photoluminescence spectral analysis

The PL spectra of pure and rare earth doped CdO thin films
are shown in Fig. 8. From the spectra, all the films exhibit
almost same emissions and have two distinct peaks located
at 485 and 519 nm. The obtained peaks are well matched
with the earlier report by Rajesh et al. [46]. The peak at
485 nm ascribed to the near band edge emission (NBE) of
CdO. Further, the NBE of rare earth doped CdO thin films
was widened with respect to their increment of dopant’s
ionic radii. The green emission peak at 519 nm corresponds
to ionized oxygen vacancies called as trap state emission
[47]. In addition, it is worthy to note that the emission inten-
sity of the doped CdO films is higher than pure CdO. This
indicates the increase in defects due to the introduction of
higher ionic radii dopants which causes lattice distortion in
Fig. 6  Transmittance spectra of pure and rare earth doped CdO thin
films the host CdO. This inference is well matched with our XRD
studies.

3.5 Electrical characterization

For gaining in depth understanding on the effect of different


rare earth doping on electrical properties of transparent CdO
thin films, the various electrical properties such as carrier
concentration (n), carrier mobility (μ), resistivity (ρ) and
conductivity (σ) were measured by Hall effect measurement
in Van der Pauw configuration at room temperature and the
measured values are presented in Table 3. The n-type con-
ducting nature of CdO thin films was identified by negative
sign of Hall coefficient. According to the Boltzmann formu-
lation, the conductivity can be expressed as [48]
𝜎 = ne𝜇 (13)
The corresponding electrical resistivity of the films was
Fig. 7  Tauc’s plots of pure and rare earths doped CdO thin films deduced from ρ = 1/σ where, σ is the conductivity of the
deposited films. The pure CdO thin film has the conductiv-
shift of the absorption edge can be reasonably explained by ity of 475 Ω−1·cm−1 and significant increase in conductivity
the B–M effect. is observed for doped films. The values are 1127, 1510 and
2872 Ω−1·cm−1 for Sm, La and Nd doped CdO thin films
respectively. Similarly, the resistivity of 2.105 × 10−3 Ω·cm
is observed for pure CdO thin film and this value decreased
with the addition of rare earth dopants and minimum value of

Table 3  Electrical and optoelectronic properties of pure and rare earth doped CdO thin films
Sample Carrier Mobility ­(cm2/Vs) Resistivity (Ω. cm) Conductivity Band gap (eV) Average transmittance FOM (Ω−1) × 10−3
concentration (Ω−1.cm−1) (% ­Tavg) 500–800 nm
­(cm−3)

CdO 2.113 × 1019 140.03 2.105 × 10−3 475 2.66 76 1.805


Sm:CdO 5.853 × 1019 120.02 8.870 × 10−4 1127 2.81 81 4.565
La:CdO 1.036 × 1020 91.01 6.624 × 10−4 1510 2.86 83 6.265
Nd:CdO 2.981 × 1020 60.12 3.482 × 10−4 2872 3.01 88 12.636

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Journal of Materials Science: Materials in Electronics

these values are increased from 2.113 × 1019 for pure CdO film
to 5.853 × 1019, 1.036 × 1020 and 2.981 × 1020 ­cm−3 for Sm,
La and Nd doped CdO thin films respectively. The increase
of carrier concentration is due to the generation of more free
electrons in doped films which are from the donor sites associ-
ated with oxygen deficiencies, metal interstitials and substitu-
tion of impurities [50]. The metal interstitials as ­Cd2+ and the
rare earth impurities such as S­ m3+, ­La3+ and N­ d3+ substitute
in the ­Cd2+ also creates the donor states between the valence
band and conduction band. In particular, oxygen deficiency is
the most important source of producing free carriers. Accord-
ing to the Kroger-Vink model, each oxygen deficiency acts as
an ionized donor that provides two free electrons. This could
be expressed by the following equation [51]
o 1
OX = Voo + 2e− + O2 (14)
2
Fig. 8  Photoluminescence spectra of pure and rare earth doped CdO
thin films where, OX is the oxygen positioned at lattice site and Voo is
o

the doubly ionized oxygen vacancy with an effective posi-


tive charge. In addition, it is interesting to mention that the
ionic radius of the dopant increases, the lattice defects such
as oxygen vacancies and interstitials are increased by induc-
ing stress in the lattice and hence the increase of carrier
concentration of films. The increase in carrier concentra-
tion and observed blue shift again confirm the shift in band
gap is due to Burstein-Moss effect. On the other side, we
prepared high mobility CdO thin films; the pure CdO thin
film has the mobility of 140.03 cm2/Vs and the mobility was
decreased to 120.02, 91.01 and 60.12 for Sm, La and Nd
doped CdO thin films. The high mobility of the CdO thin
films (60–140 cm2/Vs) associated with high carrier concen-
tration ­(1019–1020) fulfills the desirable quality of the TCO
materials. Thus, it could be used as transparent electrode
for optoelectronic devices [52]. In general, the mobility of
the films is limited by the effect of microscopic and macro-
scopic imperfections present in the lattice. The microscopic
Fig. 9  Variation of resistivity of deposited films with respect to car- imperfections associated with ionized and natural donors
rier concentration could be highlighted by the PL spectra and the macroscopic
imperfections are related to the lattice stress, strain, dislo-
3.482 × 10−4 Ω·cm was recorded for Nd doped CdO thin film. cation density, grain boundaries and surface roughness of
To the best of author’s knowledge, this is the lowest resistiv- the films which could be identified from the XRD, FESEM
ity for Nd doped CdO thin films prepared by RF sputter- and AFM studies. Figure 10 shows the relation between the
ing technique reported to date. This low resistivity and high mobility and carrier concentration of the deposited films.
conductivity of rare earth doped CdO films are mainly due to The mobility of films show reverse trend with carrier con-
non stoichiometric composition. This wide variation of elec- centration which is in good agreement with the theory of
trical resistivity and conductivity of the deposited films are scattering by grain boundaries, ionized impurities, phonons
strongly attributed to their carrier concentration and mobility. and electrons in the doped n-type degenerate semiconduc-
The variation of resistivity of the deposited films as a func- tors. From theoretical point of view, the mobility of semi-
tion of carrier concentration is shown in Fig. 9 [49]. conducting material depends upon the effective mass and
It is noticed from the figure that the electrical resistivity of relaxation time which can be expressed as [53]
the films decrease while the carrier concentration increases
e𝜏
progressively in doped CdO films. The measured carrier con- 𝜇= (15)
m∗
centration values agreed well with the reported values and

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Journal of Materials Science: Materials in Electronics

T10
𝜙TC = (16)
Rs
where, T is the transmittance (500–800  nm) and Rs is
the sheet resistance of the deposited films. According to
this equation, the obtained FOM values are 1.805 × 10−3,
4.565 × 10−3, 6.265 × 10−3 and 12.636 × 10−3 Ω−1 for pure,
Sm, La and Nd doped CdO thin films. It is observed that
all the films have high FOM value and the FOM increases
with the addition of dopant ions and reaches the maximum
value of 12.636 × 10−3 Ω−1 for Nd doped CdO thin films.
This FOM value is greater than the FOM of ITO thin films
(11.9 × 10−3 Ω−1) [62]. The result shows that the Nd doped
CdO thin film has the high optical transmittance in visible
Fig. 10  Mobility and figure of merit value of deposited films as a region, high electrical conductivity and has good figure of
function of carrier concentration merit which implies that Nd doped CdO thin films prepared
by RF sputtering are more suitable for optoelectronic appli-
cations (Table 4).
Here, τ is the relaxation time, m* is the effective mass of
charge carrier, e is the electronic charge and μ is the elec-
tron mobility. The pure CdO thin film is in good crystal- 4 Conclusion
line nature and hence it has less grain boundaries, lattice
distortion and point defects that may reduce the scatter- Pure and rare earth (Sm, La and Nd) doped CdO thin films
ing of electrons as a result enchances the relaxation time were deposited on glass substrates by RF sputtering tech-
as well as electron mobility. Upon introducing the dopant nique. The effect of rare earth doping on microstructral,
materials into the CdO, the crystallinity of the films was morphological, compositional, optical and electrical prop-
reduced with respect to the increment of ionic radii of the erties of CdO thin films were investigated in detail. The
dopants. Also, the grain boundaries and defects of the films thicknesses of all deposited films were around 960 nm. The
are increased. As a consequence, the scattereing of elec- deposited films were polycrystalline in nature with face
trons is increased and the relaxation time, mobilty of the centered cubic structure. The crystallite size of the films
films are reduced. This result is in good agreement with the was decreased and thereby structural defects were increased
XRD studies observed in the present work. From the XRD with the increase of dopant ionic radii. Further, the dop-
analysis, the crystallite size of the films is in the range of ing of rare earth metal ions introduces variations in the
15–18 nm which is much greater than the mean free path of lattice parameter, crystallite size, microstrain, dislocation
the electron (L ~ 1 nm). Thus, the grain boundary scatter- density and unit cell volume. The presence of the elements
ing is expected to be insignificant in this case. At the same in the oxidation states Cd3d, Sm3d, La3d, Nd3d and O1s
time, the carrier concentration of the deposited films is high were confirmed by XPS studies. FESEM images showed
and it lies in the range of 1­ 019–1020 which significantly pro- the smooth and uniform morphological surface. The pure
motes the electron–electron/ionized impurities scattering. CdO thin film has nano petal like morphology with larger
From these results, it is found that the decrease in resitivity grain size and with doping, the grain sizes were found to
and increase in conductivity of the deposited films despite decrease. The roughness of films was decreased with the
a decrease in mobility is due to disproportionate increase of addition of the dopants and reached the minimum value of
carrier concentration following the release of free electrons 1.29 nm for Nd doped CdO thin films. All the films showed
via oxygen vacancies. high transmittance (76–88%) and the band gap value varies
from 2.66 to 3.01 eV with doping. The band edge emission
3.6 Optoelectronic properties analysis was observed at 485 nm and another emission at 519 nm
indicates the presence of oxygen vacancies. The decreased
In order to use the deposited CdO thin films as the TCO resistivity with the increased carrier density was found for
layer in optoelectronic devices, not only resistivity but also the doped films. The resistivity, charge carrier density and
the transmittance of the films should be considered signifi- mobility of the films were in the ranges of ­10−3–10−4 Ω·cm,
cantly. Thus, the optoelectronic performance of the TCO ­1019–1020 ­cm−3 and 140.03–60.12  cm2/Vs respectively.
was evaluated by examining the figure of merit (FOM) value From these results, all the deposited films are highly trans-
using the Haacke formula [61] parent and conducting in nature, of which Nd doped CdO

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Journal of Materials Science: Materials in Electronics

Table 4  Comparison of the electrical and optical properties of the CdO thin films by various researchers

Materials Carrier Mobility Resistivity (Ω cm-−1) Average Band gap (eV) Method Ref
concentration ­(cm2/ transmit-
­(cm−3) Vs) tance (%)

Pure CdO 2.3 × 1020 16.02 3.38 × 10−3 70 2.37 Spray pyrolysis [54]


Copper doped CdO 1.07 × 1020 82.9 7.05 × 10−4 80 2.40 Vacuum evaporation [55]
Manganese doped 2.69 × 1020 20.7 1.11 × 10−3 79 2.27 Spray pyrolysis [56]
CdO
Aluminium doped 1.7 × 1019 46.80 0.78 × 10−3 76 2.35 Dip-coating [57]
CdO
Neodymium doped 6.615 × 1020 18.36 0.55 × 10−3 65 2.42 Spray technique [58]
CdO
Hydrogenated CdO 1.05 × 1020 8.5 69.1 × 10−4 80 2.20 Thermal deposition [59]
Silver doped CdO 1.91 × 1020 52.26 0.63 × 10−3 70 2.25 Spray pyrolysis  [60]
Neodymium doped 2.981 × 1020 60.12 3.482 × 10−4 88 3.01 RF magnetron sput- Present work
CdO tering

thin film has the low resistivity of 3.482 × 10−4 Ω·cm with 9. M. Yan, M. Lane, C.R. Kannewurf, R. Chang, Highly conduc-
high optical transparency of 88% in visible range, high figure tive epitaxial CdO thin films prepared by pulsed laser deposi-
tion. Appl. Phys. Lett. 78, 2342–2344 (2001)
of merit 12.636 × 10−3 Ω−1 with lower surface roughness of 10. A. Purohit, S. Chander, M.S. Dhaka, Impact of annealing on physi-
1.29 nm which makes it preferred material as TCO layer for cal properties of e-beam evaporated polycrystalline CdO thin films
optoelectronic devices. for optoelectronic applications. Opt. Mater. 66, 512–518 (2017)
11. H. Khallaf, C.-T. Chen, L.-B. Chang, O. Lupan, A. Dutta, H.
Acknowledgements  P. Sakthivel gratefully acknowledges UGC, Heinrich, A. Shenouda, L. Chow, Investigation of chemical bath
New Delhi for awarding UGC-BSR fellowship (F.No. 25-1/2014-15 deposition of CdO thin films using three different complexing
(BSR)/7-14/2007(BSR)/13.03.2015.) and G. Ravi greatly acknowl- agents. Appl. Surf. Sci. 257, 9237–9242 (2011)
edges the DST-SERB (File No. EMR/2017/001999), UGC-SAP, DST- 12. S. Duman, G. Turgut, F.Ş. Özçelik, B. Gurbulak, The synthesis
FIST, DST-PURSE and RUSA 2.0 for financial support to carry out and characterization of sol–gel spin coated CdO thin films: As a
this work. function of solution molarity. Mater. Lett. 126, 232–235 (2014)
13. K. Kesavan, A. Kathalingam, H.-S. Kim, A.R.U. Sundari,
Effects of fluorine doping on structural, optical and electri-
cal properties of spray deposited CdO thin films. Superlattices
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