HOW TO SELECT

MEASUREMENT EQUIPMENT
DISPLACEMENT SENSORS/MEASUREMENT SYSTEMS

1. Types of measurement equipment 5. Example of selecting a displacement sensor or measurement system

2. Information required for selection 6. Examples of improvements made possible by measurement
3. Determining the measurement method 7. KEYENCE Service & Support
4. Product lineup
 1. Types of measurement equipment
The typical types of displacement sensors are the 7 listed below.
The list also summarises the characteristics of each type.

Item LASER 2D LASER INSTANT

OPTICAL EDDY CURRENT
DISPLACEMENT DISPLACEMENT MEASUREMENT
MICROMETER DISPLACEMENT METER
SENSOR SENSOR SYSTEM

Material Any object Any object Any object Any object Metals

Detection Measurement Small Standard

Small Small Small
Object Spot (MIN. ø2 μm) (Twice the OD of head)

Surface
Almost none Almost none Almost none Almost none None
restrictions

Measurement Range 0.2 to 3500 mm 0 to 290 mm 10 μm to 120 mm 0.02 to 200 mm 0 to 10 mm

Repeatability MIN. 0.005 μm MIN. 0.2 μm MIN. 0.03 μm MIN. 0.1 μm MIN. 0.3 μm

Approx. Approx. Approx. Approx.

Sampling Frequency —
MAX. 392 kHz MAX. 64 kHz MAX. 16 kHz MAX. 18 kHz

Environmental Resistance
(Water, Oil, Dust, etc.) ● ● ● ● ●●●

- C an measure any object - C an measure any object - C an measure any object - Easy operation - Superior environmental
resistance
- Small measurement - C an measure uneven - High stability - C an measure complex
spot surfaces and shapes dimensions - High precision
- High precision
Advantages - High precision - High stability - C an measure multiple - High-speed response
spots frequency
- High-speed response
frequency

Characteristics
- Low environmental
resistance
- Low environmental - Limited to projected - Limited to projected - Measures only metals
resistance objects objects
- Small Measurement
- Limited work size range

Disadvantages

Laser displacement sensors are displacement sensors that are of superior quality in terms of the objects that can be measured, measurement accuracy, response frequency, and many other aspects.

● Good, ●● Better, ●●● Best

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2. Information required for selection
There are primarily 5 key points in selecting a measurement system.
The optimal selection can be made by gathering information based on the understanding of each point.

Check the material, size, and shape.

Measurement
Selection is significantly affected by whether the target object is soft (in which case contact-sensors cannot
target object
be used) or has a complex shape (in which case laser measurement systems are suitable).

Measurement Measurement accuracy concerns the sensors’ ability to provide readings that are accurate to desired
accuracy tolerances. A general rule-of-thumb is to get a sensor that is 10x as accurate as the desired tolerance.

Measurement range depends on the type of measurement.

Measurement For 1D displacement sensors, the measurement range defines the maximum part deviations and part travel
range that the sensor can see. 2D displacement sensors would also include a field-of-view such as the width of
a part.

Check the interval with which to perform measurement.

Measurement
To determine this, identify the travel speed of the target object and the number of desired measurements on
speed
the target.

Ambient Check the environment, including ambient temperature, oil, water, and dust.
environment Also, check the space where the measurement system is to be installed.

3. Determining the measurement method

From the above information, you can narrow your options to the optimal measurement method based on overall consideration.
The chart below compares the measurement methods by key point.

Item LASER OPTICAL INSTANT EDDY CURRENT ULTRASONIC

DISPLACEMENT SENSOR MICROMETER MEASUREMENT SYSTEM DISPLACEMENT METER DISPLACEMENT METER

Applicability to
measurement object ●●● ●● ● ● ●

Measurement accuracy ●●● ●●● ●● ●● ●

Measurement range ●● ●● ● ● ●●●

Measurement speed ●●● ●● ● ●● ●

Ambient environment ● ● ● ●●● ●

Overall ●●● ●● ●● ●● ●

We see that each sensor type has its own strengths and weaknesses depending on targets types , environment, and operating conditions. Laser sensors are generally seen to be the most versatile
and should be taken in high consideration when sensor flexibility may be necessary.
● Good, ●● Better, ●●● Best

3
 PRODUCT LINEUP
SENSOR TYPE

1D TRIANGULATION LK-G Series

High-speed As the figures below show, a laser beam emitted from the semiconductor laser is applied to the target. The light reflected
from the target is collected by the receiver lens and focused on the light-receiving element. When the distance to the
Wide range target changes, the light is focused at a different position on the light-receiving element.
12-sensor head connection

Measurement at a reference distance Measurement at a shorter distance Measurement at a longer distance

Semiconductor Light- Semiconductor Light- Semiconductor Light-

laser receiving laser receiving laser receiving
element element element

Transmitter Transmitter
lens lens
Transmitter Receiver Receiver Receiver
lens lens lens lens

Light-receiving Light-receiving Light-receiving

element element element

2D TRIANGULATION METHOD LJ-V7000 Series

2D Multi points
Semiconductor
3D Ultra High-speed Lasers
Cylindrical lens

GP64-Processor
A laser beam that has been expanded into a line is
diffusely reflected from the surface of the target. This
reflected light is formed on the HSE3-CMOS and by
detecting changes in the position and shape of the
reflection, it is possible to measure the position of
various points along the surface of the target. 2D Ernostar lens

HSE 3-CMOS

CONFOCAL PRINCIPLE LT-9000 Series

Film thickness
High-accuracy measurement method uses When focus is NOT obtained When focus is obtained
High accuracy the confocal principle and tuning fork on the target surface on the target surface

Double scan It is possible to know that the object is located

at a focal distance (F) by finding the height of
Semiconductor Semiconductor
the tuning fork (lens) at which the received laser laser
light intensity is the highest. The internal Light-receiving Light-receiving
element element
sensor determines the target height by Pinhole The received light Pinhole The received light
measuring the exact position of the turning Tuning fork intensity is low. Tuning fork intensity is low.

fork (lens) in that moment with an internal

sensor. The LT-9000 Series measures Sensor Sensor
a height without being affected by the
A small amount of received light All of the received light passes
material, colour, or angle of the target. passes through the pinhole. through the pinhole.

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 SENSOR TYPE

LED OPTICAL MICROMETER TM-3000 Series/LS-9000 Series

New method Green-LED light is emitted as a uniform collimated beam. The CMOS detects the position of the edge between
light and dark edges of the received light and calculates measured values.
long life
Monitor CMOS High-intensity Green-LED
High accuracy The Monitor CMOS tracks workpiece High-intensity Green LED lasts longer
inclination to automatically correct for than traditional LED light sources
High-speed tilt errors. while providing high intensity and
evenly-distributed lighting.

High performance condenser

Lens unit efficiently focuses LED light

Target Position CMOS

The CMOS measures the position High-speed exposure CMOS
between the transmitter and receiver. Proprietary designed measurement CMOS
features an integrated amplifier to maximise
performance and speed.

EDDY CURRENT DISPLACEMENT EX-V Series

This system uses a high-frequency magnetic field.

Current is passed through a coil inside the sensor
Detection
head to produce the high-frequency magnetic field. target object High-frequency magnetic field
When the measurement target (metal) comes into
the magnetic field, magnetic flux passes the target’s EX Series
Coil
surface and eddy current flows in the vertical direction
due to electromagnetic induction action, causing High-frequency
a change in the impedance of the sensor coil. The oscillator circuit
eddy current displacement sensor measures distance Eddy current
based on the changes in oscillation caused by this
phenomenon.

CONTACT-TYPE DISPLACEMENT METER GT2 Series

When the measuring rod moves, the scale embedded inside the rod moves. A complicated pattern is written on this
scale. This pattern is used to determine the travel distance and absolute value. The pattern is illuminated with parallel
LED light, and this light is captured at high speed by a CMOS sensor to measure the travel distance and absolute
value.

Parallel LED light

Absolute
Transmitter
value scale
Quartz glass scale

CMOS sensor

CMOS sensor

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 5. Example of selecting a displacement sensor or measurement system
Check the key points and narrow down the options to those that satisfy the required specifications.
Here, we are using an example of a laser displacement sensor specification to find if it meets the given measurement requirement.

MEASUREMENT REQUIREMENT

• Measurement target: Solar cell substrate

• Application: Thickness measurement
• Measurement accuracy: Tolerance decision with ±10 μm read accuracy
• Measurement range: Thickness standard t = 0.7 mm
(Measurement distance should be as far apart as possible)
• Measurement speed: Line speed is 1 m/s. Measurement should be performed in a 0.1 mm interval.
• Ambient environment: Clean environment with air-conditioning system

SPECIFICATIONS

There are 2 items that represent accuracy: repeatability and linearity.

Repeatability indicates the variation when performing the same measurement repetitively.
Linearity expresses the error from the ideal value.
For both, the smaller the value, the greater the accuracy. LINEARITY GRAPH
For example, the accuracy values for LK-H008 would be: Voltage
Linearity
Measurement • Repeatability: 0.005 μm
accuracy • Linearity: ±0.5 μm Measured value

(±0.05% of F.S. = ±0.05% * 1 mm)

If the required accuracy is ±10 μm,

LK-H008 fulfils the measurement accuracy,
which is ±10 μm × 1/10 = 1 μm. Ideal line

Distance

There are 2 items that represent measurement range: reference distance and measurement range.
Measurement range indicates the range width that can be measured.
Reference distance is the distance from the frontal face of the measurement part to
the central position of the measurement range.
Measurement
range • Reference distance: 8 mm
• Measurement range: ±0.5 mm

In conclusion, the measurement range in this case is 7.5 to 8.5 mm, on the basis of the whole face of
the sensor head.

Measurement interval is calculated based on the sampling cycle and line speed.
• Sampling cycle: 392 kHz
Measurement • Measurement interval: Approx. pitch of 2.5 μm
speed (1000 mm/s) / 392 kHz = 2.5 μm)

The minimum requirement of 0.1 mm pitch can be met with this specification.

Assuming a clean environment with a 5 degrees Centigrade fluctuation of air-conditioning,

the temperature drift is calculated below.
Ambient
• Temperature characteristics: 0.2 μm/°C (0.02% of F.S./°C = 0.02% * 1 mm/°C)
environment
• Temperature drift: 1 μm (0.2 μm/°C * 5°C = 1 μm)
1 μm is on the margin of the required accuracy, which indicates that temperature control may be necessary.

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SPECIFICATIONS OF LASER DISPLACEMENT SENSOR LK-H008

Model LK-H008
Installation mode Specular

Reference distance 8 mm

Measurement range*1 ±0.5 mm

Red semiconductor laser

Wavelength 655 nm

Light source IEC60825-1 Class II

Laser class
FDA(CDRH)
Class 1
Part 1040.10
Output 0.3 mW

Spot diameter ø20 μm (LK-H008)

(based on reference distance) 20 μm × 550 μm (LK-H008W)

Linearity*2 ±0.05% of F.S. (F.S. = 1.0 mm)

Repeatability*3 0.005 μm (0.001 μm)

Sampling cycle 2.55/5/10/20/50/100/200/500/1000 μs (variable with 9 levels)

Temperature characteristics 0.02% of F.S./°C (F.S. = 1.0 mm)

Enclosure rating IP67

Ambient operating illuminance Incandescent lamp or fluorescent lamp: 10000 lux max.
Environmental Ambient temperature*4 0 to +50°C
resistance
Operating Ambient humidity 35 to 80% RH (No condensation)
10 to 55 Hz 1.5 mm double amplitude in X, Y,
Vibration resistance
and Z directions, 2 hours respectively
Material Die-cast aluminium

Weight (including cord) Approx. 240 g

*1 Measurement range is for when the sampling cycle is 20 μs is greater.

*2 Value is based on measurement of KEYENCE standard targets (mirrored metal workpiece) in standard mode.
*3 Value is based on measurement of KEYENCE standard targets (mirrored metal workpiece), with an average repeat of 16384 times with reference
distance. Value in parentheses is based on a typical example measuring an average of 65536 times with a sampling cycle of 200 μs.
*4 If the ambient temperature is 40°C or higher, the meter must be installed on a metal plate.

Ultra High-Speed/High-Accuracy
Laser Displacement Sensor
LK-G5000 Series

Sensor head for transparent/

mirror surface
LK-H008

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 6. Examples of improvements made possible by “measurement”
Runout/ Positioning/
Height/Level Vibration/ Outer Position Wave/Curve
Thickness Width difference Eccentricity diameter Shape measurement Flatness

THICKNESS CONVENTIONAL OTHER THICKNESS

MEASUREMENT EX A MPLES

Random inspections were performed

by operators using micrometers.

LK-G Series
Wafer thickness measurement
The non-contact method enables inline measurements
of noodle thickness. Feeding back the results of the
inline measurements to manufacturing leads to reduced
material costs. This also reduces variations in thickness,
which leads to improved noodle texture.

Polymer Web thickness measurement Film thickness measurement

WIDTH CONVENTIONAL OTHER WIDTH

MEASUREMENT EX A MPLES

Inline inspections were performed

with image sensors.

LS-7000 Series
Rolled steel width measurement
The rattling of the sheet led to unstable measured
values, but the LS-7000 Series enables highly accurate
measurements that are not affected by the rattling.

Building material board width measurement

Rubber sheet width measurement

HEIGHT/LEVEL DIFFERENCE CONVENTIONAL OTHER HEIGHT AND LEVEL

DIFFERENCE MEASUREMENT
EX A MPLES
Random inspections were performed
visually by operators.

LJ-V7000 Series

There is no longer any need to perform visual checks, PCB assembly accuracy measurement
which leads to improved processing time and reduced
personnel requirements.

Waterproofing sealant application height measurement Dicing groove depth measurement

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RUNOUT/ VIBRATION CONVENTIONAL OTHER THICKNESS
MEASUREMENT EX A MPLES

No measurement method was available.

LK-G Series
Coating roll runout measurement
Abnormal vibration was a cause of poor yield, but it
conventionally was not possible to notice this problem
until the product inspection stage. With the LK-G Series,
it is possible to check for abnormal vibration in real time,
which leads to improved yield.

Ultrasonic welder vibration measurement Crankshaft runout measurement

OUTER DIAMETER CONVENTIONAL OTHER OUTER DIA METER

MEASUREMENT EX A MPLE

Full inspections were performed by

operators using hand calipers.

LS-9000 Series
Injector nozzle outer diameter measurement
The non-contact method ensures that workpieces
are not damaged and leads to improved inspection
OPTICAL MICROMETER
processing time. TM Series

It is possible to perform
simultaneous measurements of
multiple points!

Motor shaft outer diameter measurement

ANGLE AND RADIUS CONVENTIONAL OTHER ANGLE & R ADIUS

MEASUREMENTS

Profile projector was used to measure Total length: 50.000

each items, but it takes too much time
Outer diameter: 5.000
for inspection.

Point angle: 45.0° Outer diameter:16.000

TM-3000 Series
Needle valve outer diameter and angle
In-Line 2D measurement system TM-3000 can measurements
accomplish 100% inspection by its high speed (5.5 ms)
and position correction function.

Y terminal radius dimension measurement

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 7. KEYENCE Service & Support

DIRECT SALES KEYENCE incorporates direct sales

rather than having distributors or sales
NETWORK agents. Our technically trained sales
engineers have extensive product
knowledge along with application and
industry experience.
Customers can expect on-site support
to quickly solve applications saving
invaluable time.
VALUE ADDED KEYENCE sells a broad range of
products, enabling comprehensive
PRODUCTS support for a wide range of equipment
across all industry sectors.
Find your solution efficiently and avoid
having to consult with multiple vendors.

Other Companies CONVENTIONAL SALES

Solution Providers The Customer

Company [A]
Hours Days Weeks Sensors
?
Company [B]
Laser Marking

Customer Distributor Sales Agent Sensor Company [C]

Manufacturer Barcode Readers

Onsite line operations stall while waiting for support

Company [D]
Vision Systems

You need direct access to the people that can provide you with quick and Consulting with and managing multiple solution providers is troublesome
practical solutions. and time consuming.

KEYENCE KEYENCE

DIRECT SUPPORT JUST ONE COMPANY TO CONTACT

Question
The Customer

Sensors Expert
Customer
Laser Marking Expert
The Right
Barcode Readers Expert
Solution
Vision System Expert
and more.

Quick Response!

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Consult with

2
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Local Machine Local Machine Local Machine

Builder A Builder B Builder C

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