ECE3038 MEMS AND NANOSENSORS L T P J C

3 0 0 0 3
Pre-requisite ECE 2023 - Principles of Sensors and Data Acquisition Version : 1.1
Course Objectives:
The course is aimed at
[1] Introducing and discuss the historical background of evolution of MEMS and Microsystems
and their applications as miniaturized sensors and actuators
[2] Educating on the rudiments of various materials used in MEMS fabrication and discuss scaling
effects in miniaturizing devices.
[3] Comprehendingvarious modern Micro-Nano fabrication techniques, device integration,
packaging and bonding and highlight the applications of MEMS and Nano sensors to disciplines
beyond Electrical and Mechanical engineering.
Expected Course Outcome:
At the end of the course, the student should be able to
[1] Understand the historical background of evolution of MEMS and Microsystems to the students.
(CAT1, FAT)
[2] Comprehend the various micro sensing and actuating unitswere provided to the students.
(CAT1, FAT)
[3] Discuss about scaling effects in different Physical domains on miniaturizing devices was done
with the students. (CAT2, FAT)
[4] Rudiments of silicon and various polymer materials for MEMS fabrication was discussed with
students. (A1, CAT2, FAT)
[5] Explore latest micromachining techniques for complete device integration, packaging and
bonding. (A2,CAT2, FAT)
[6] Acquaint the students with Basics of Nanotechnology and its approaches towards nano-device
realization. (A2, FAT)
Student Learning Outcomes (SLO): 2,5
Module:1 Introduction to Microsystems 7 hours
Overview of microelectronics and Microsystems technology, Microsystems and Miniaturization,
The multi disciplinary nature of MEMS, Smart materials, Structures and Systems, RF MEMS,
MOEMS, BioMEMS, Applications of MEMS in various industries.
Module:2 Micro Sensors and Actuators 6 hours
Working principle of Microsystems - micro actuation techniques - micro sensors – types – Micro
actuators – types – micropump –Electrohydrodynamics- micromotors – micro – valves – micro
grippers – micro accelerometers.
Module:3 Scaling Laws in Miniaturization 6 hours
Introduction to scaling, Scaling in Mechanical Domain, Electrostatic Domain, Magnetic Domain
and Thermal Domain
Module:4 Materials for Mems and Microsystems 6 hours
Substrates and wafers, Silicon and Silicon compounds, Gallium Arsenide, Piezoelectric materials,
Polymers
Module:5 Fabrication Process 6 hours
Photolithography – Ion implantation – Diffusion – Oxidation – Chemical Vapour Deposition
(CVD) - Physical vapor deposition - Deposition epitaxy - etching process.
Module:6 Micro System Manufacturing 6 hours
Etching – isotropic and anisotrophic, Wet and Dry Etching of Silicon – Plasma Etching – Deep
Reaction Ion Etching (DRIE), Bulk Micro manufacturing - surface micro machining – LIGA –
SLIGA - Micro system packaging materials - die level - device level - system level - packaging
techniques – die preparation – surface bonding - wire bonding - sealing.
Module:7 Nano Sensors 6 hours
Introduction to nanotechnology, Future requirements and opportunities of nanotechnology in
sensing, CNT based sensors, Nano electronics and nano photonics.
Module:8 Contemporary issues: 2 hours
Total Lecture hours: 45 hours
Text Book(s)
1.Tai-Ran Hsu,MEMS and Microsystems Design and Manufacture, 2017, 1 st edition, Tata
McGraw-Hill Publishing Company Ltd., India.
Reference Books
1. Chang Liu, Foundation of MEMS, 2011, 2 nd ed., Pearson Education India.
2. Rai Choudhury, MEMS and MOEMS Technology and Applications, 2013, PHI Learning Private
Limited, India.
3. Zheng Cui, Nanofabrication, Principles, Capabilities and Limits,2016, 2 nd ed., Springer(India)
Pvt. Ltd., India

Mode of Evaluation:Continuous Assessment Tests, Quiz, Digital Assignment, Final Assessment

Test
Recommended by Board of Studies 28/02/2017

Approved by Academic Council 47th AC Date 05/10/2017