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Nickel Related Optical Centres in Diamond Created by Ion Implantation
Nickel Related Optical Centres in Diamond Created by Ion Implantation
Citation:
Orwa, J.O., Aharonovich, I., Jelezko, F., Balasubramanian, G., Balog, P., Markham, M.,
Twitchen, D.J., Greentree, A.D. and Prawer, S. 2010, Nickel related optical centres in
diamond created by ion implantation, Journal of applied physics, vol. 107, no. 9, 093512,
pp. 1-5.
DOI: http://www.dx.doi.org/10.1063/1.3357374
DRO
Deakin Research Online,
Deakin University’s Research Repository Deakin University CRICOS Provider Code: 00113B
JOURNAL OF APPLIED PHYSICS 107, 093512 共2010兲
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FIG. 1. SRIM prediction of 40 keV Ni and 14 keV N ion profiles in dia- FIG. 2. Typical spectra obtained at 80 K from 1 ⫻ 1013 Ni/ cm2 and 1
mond showing a projected ion range of ⬃195⫾ 44 Å ⫻ 1013 Ni/ cm2 : 4 ⫻ 1013 Ni/ cm2 implanted diamond samples using the
514.5 nm line of an argon-ion laser following annealing at 1000 ° C in
forming gas. Each spectrum was normalized with respect to the diamond
hole, different regions of one main face of the slab were Raman line at 552 nm.
implanted at room temperature to fluences of 1 ⫻ 1011, 1
⫻ 1012, 1 ⫻ 1013, and 1 ⫻ 1015 cm−2 with 40 keV Ni, result-
phonon lines of the NVo and NV− optical centres, respec-
ing in a projected ion range of 195⫾ 44 Å. The opposite
tively. The presence of weak NV peaks in the Ni only im-
face was co-implanted with Ni and N in a ratio of 1:4, with
planted sample suggests that a residual concentration of na-
the Ni doses and energy being identical to those on the Ni
tive nitrogen was present in the sample, consistent with the
only implanted opposite side. The energy of the N atoms was
low N content of the samples. The peak at 738 nm is due to
14 keV, chosen to ensure that the concentration profiles of
the Si-V, which shows that the starting material contained
the two ions coincided as closely as possible at the end of
some low level of Si.
range as shown in Fig. 1. The purpose of the coimplantation
The PL doublet at 883/885 nm is associated with a Ni
of Ni and N was to study possible formation of the NE8
defect. Based on EPR experiments, several possible struc-
centre by ion implantation.
tures for the centre have been proposed including interstitial
The sample was then annealed in forming gas 共4% H2
in Ar兲 at 800, 900, and 1000 ° C for 1 h. Further annealing Ni+ with an associated vacancy,30 interstitial Ni+ with a pos-
was carried out at 1100 and 1400 ° C in vacuum for 1 h and sible nearby B− 共Ref. 31兲 and more recently photoESR stud-
at 2000 ° C for 2 h under a pressure of 8 GPa in a belt press. ies have shown that this centre is an interstitial Ni+ at the
In between each annealing step, full photoluminescence 共PL兲 centre of a divacancy.25 Unlike in HPHT diamond where Ni
characterization at 80 K using a 514.5 nm excitation laser is commonly used as a catalyst, we do not expect the high
was performed. purity CVD diamond samples in this study to contain any
Confocal microscopy on the samples following anneal- native Ni, as proved by the absence of any Ni related peaks
ing at 1100 ° C allowed determination of the brightness and in the PL for the unimplanted sample shown in Fig. 2. In
lifetime of the optical centres. Confocal images for the 883/ addition, it was previously believed that this centre is only
885 nm centre were obtained using a Ti-Sapphire laser tuned formed in the 兵111其 growth sectors, in contrast to the 兵100其
to 710 nm together with an 880–890 nm band pass filter. single sectored CVD samples of this study. The fact that this
This excitation wavelength regime ensured no contribution centre can be produced on implantation into the CVD dia-
from the NV PL. A femtosecond pulse laser operating at 670 mond clearly indicates that its formation is not exclusive to
nm was used for lifetime measurements. The resolution of 兵111其 growth sectors.
lifetime measurements was limited by jitter of detectors 共500 In addition, in the Ni only implanted sample, a new line
ps兲 at 711 nm is observed. That this line was found to be pre-
dominant in the Ni only implanted sample compared to the
sample coimplanted with Ni and N suggests that the 711 nm
III. RESULTS AND DISCUSSION
peak is related to the presence of Ni and not N. This is
Figure 2 shows representative PL spectra obtained discussed in more detail in subsequent paragraphs.
following annealing at 1000 ° C in forming gas for The spectrum for the sample co-implanted with Ni and
an unimplanted diamond sample, a sample implanted N shows strong peaks at 575 and 637, a very weak peak at
with 1 ⫻ 1013 Ni/ cm2 and another coimplanted with 1 883/885 nm and no peaks at 711 and 738 nm. The higher
⫻ 1013 Ni/ cm2 : 4 ⫻ 1013 N / cm2. The spectra were normal- intensity of the two NV peaks in this sample can partly be
ized with respect to the diamond Raman line at 552 nm. accounted for by the coimplantation of Ni and N which gen-
Except for the diamond Raman line, the unimplanted sample erates more vacancies. Further, the additional N atoms intro-
shows no other spectral features in the range 530–900 nm. duced by the implantation provide a larger pool of N which
For the sample implanted with Ni only, prominent peaks are combine with the vacancies, resulting in the increased NV
observed at 711, 738 and 883/885 nm with smaller peaks at intensities observed.
575 and 637 nm. The peaks at 575 and 637 nm are the zero There are two possible explanations for the observed de-
093512-3 Orwa et al. J. Appl. Phys. 107, 093512 共2010兲
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/"# %&
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+-, FIG. 4. High purity CVD diamond sample implanted with Ni to a fluence of
1 ⫻ 1015 cm−2 and annealed in vacuum at 1400 ° C showing a strong peak at
()*+),-*. 0123% 4)-*,5
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883/885 nm but no peak at 711 nm.
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corresponding diamond Raman intensity at 552 nm. As
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shown in Fig. 3共c兲, the intensity of the two peaks increases
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linearly with Ni fluence, suggesting that only one Ni atom is
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involved as suggested in Ref. 31 for the 883/885 nm centre.
!" !# " # $" $# In a recent study, a similar linear increase in intensity with
617+8+)9*: 0);5
fluence was observed for a Xe related optical centre in dia-
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mond and was attributed to the presence of one Xe atom.32
))* #$ %&'( To further characterize the 711 and 883/884 nm centres,
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As shown in Fig. 7共a兲, there is no trace of the 711 nm peak,
which was annealed out at 1400 ° C. Figure 7共b兲 shows the
dependence of the 883/885 nm peak on annealing tempera-
ture together with the peak as observed in a native, unan-
FIG. 6. 共Color online兲 共a兲—Room temperature confocal spectrum of the 1 nealed type Ib Sumitomo HPHT diamond. Some of the spec-
⫻ 1015 cm−2 Ni implanted diamond. The implanted region was defined by tra were multiplied by constants and shifted vertically to
using a 1 mm diameter Al mask. The spectrum in 共b兲 was obtained from the allow for easy comparison of the spectral features. At lower
implanted region of 共a兲 and represents the 883/885 nm peak. 共c兲—decay of
883/885 nm Ni-related peak following excitation with a femtosecond laser annealing temperatures, each of the peaks of the 883/885 nm
pulse at 670 nm. A lifetime of 11.6 ns was deduced for the centre. doublet is broad and slightly shifted to lower wavelengths.
Annealing to higher temperatures results in a narrowing of
the count rate for the centre is very low, making it unlikely the linewidth and a shift to longer wavelengths. Following
that bright single photon sources can be obtained from this annealing at 2000 ° C, the 883/885 nm peak in the Ni im-
centre. planted sample is identical to the same peak in a representa-
From an optical device perspective, the lifetime of an tive HPHT grown Sumitomo unimplanted sample. The nar-
optical centre is one of its most important properties. In ad- rowing of the linewidth with increasing annealing
dition to determining speed with which a device can be op- temperature is an indication of increased residual damage
erated, the lifetime also affects the brightness. Although the repair as the sample is annealed to higher temperatures.
883/885 nm peak has been extensively characterized, the Last we comment on the absence of the NE8 centre in
lifetime of the centre has not been reported. Here, we used a the spectra of the Ni:4N co-implanted samples. None of the
femtosecond laser source operating at 670 nm to excite the annealing procedures undertaken resulted in the formation of
centre at room temperature and monitor the decay rate. Fig- this centre. Although nitrogen is believed to be mobile at
ure 6共c兲 shows a direct excited state lifetime measurement of temperatures above 1400 ° C, this condition is not sufficient
the 883/885 nm emitter. From a single exponential fit, a life- to fabricate the NE8 centre. The mechanism of the NE8 for-
time of 11.6 ns is deduced, which is comparable to that of mation involves placement of a nitrogen atom in a neighbor-
bulk diamond NV− at room temperature. ing lattice position to the Ni atom,24 which requires a sub-
The final annealing of the samples was done at 2000 ° C stantial amount of energy. Additionally, the Ni atom in the
for 2 h using a stabilizing pressure of 8 GPa in a belt press. NE8 complex should occupy a specific lattice site which
093512-5 Orwa et al. J. Appl. Phys. 107, 093512 共2010兲
8
should be possible only under extreme HPHT conditions. A A. Beveratos, R. Brouri, T. Gacoin, A. Villing, J.-P. Poizat, and P.
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detailed study of the formation of this centre will be pre- 9
G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C.
sented elsewhere. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Le-
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IV. SUMMARY 455, 648 共2008兲.
10
J. R. Maze, P. L. Stanwix, J. S. Hodges, S. Hong, J. M. Taylor, P. Cap-
Ni implanted high purity CVD diamond samples were pellaro, L. Jiang, M. V. Gurudev Dutt, E. Togan, A. S. Zibrov, A. Yacoby,
investigated as a function of annealing temperature and im- R. L. Walsworth, and M. D. Lukin, Nature 共London兲 455, 644 共2008兲.
11
G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov,
plantation dose. It was shown that Ni related centres can be N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R.
successfully created in high purity diamond. Among the cen- Hemmer, F. Jelezko, and J. Wrachtrup, Nature Mater. 8, 383 共2009兲.
12
tres created was the well known 883/885 nm zero phonon V. M. Acosta, E. Bauch, M. P. Ledbetter, C. Santori, K.-M. C. Fu, P. E.
line doublet which was found to have a saturation power of Barclay, R. G. Beausoleil, H. Linget, J. F. Roch, F. Treussart, S. Chemer-
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17
This work was supported by the Australian Research F. Jelezko, I. Popa, A. Gruber, C. Tietz, and J. Wrachtrup, Appl. Phys.
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