No.

Product
1 Scanning Electron Microscope (CX-200PLUS)
* EMC and CE Certified.
1.Resolution : 3.0nm (30KV, SE Image), 4.0nm (30kV, BSE Image)
2. Magnification : x15 ~ x300,000 (Free scale Magnification)
3. Image : Secondary Electron Image(SEI)
4. Accelerating Voltage : 1KV ~ 30KV
5. Electron gun : W (Tungsten), Pre-Align Cartridge Filament
6. Lens system : 3 LEVELs Reducing System
7. Objective Iris : 4 LEVELs Variable Aperture
8. Image shift : +/-50um
9. Full Auto Stage(5-axis)/
: X (40mm), Y (60mm), R (360°), Tilt (-20° ~ 90°), Z (5 ~ 60mm)
10. Specimen Size(Max) : 160mm
11. Scanning Mode
- Reduced Window (320 x 240 pixel)
- TV Mode (640 x 480 pixel)
- Slow Screen Scan Mode (800 x 600 pixel)
- Photo Screen Capture Mode I(1280 x 960 pixel)
- Photo Screen Capture Mode II(2560 x 1920 pixel)
- Photo Screen Capture Mode III(5120 x 3840 pixel)
12. Image Format : JPG, TIFF, BMP, PNG
13. Image Display : 23" LCD Monitor (or 49" QLED curved monitor when EDS is ordered)
14. Processing Mode :
- SE / BSE Dual Mode
- SE + BSE Signal Mixing
- Compo/Topo Mode
- Navigation Mode
- Panorama Shot
- Chamber Scope
Automatic Control
- Auto Start
- Auto Focus
- Auto Zoom-in, Zoom-out with Mouse wheel
- Image automatically move to the Center with mouse double click on any point of the image screen
15. Working Distance : 5 ~60mm
16. Vacuum System : Fully Automation
- Roughing: Rotary Pump
- High Vacuum : Turbo Molecular Pump

CXF-721-2(0) COXEM Co., Ltd A4(297×210)

 17. Control System : PC Controlled by USB
- Operating System : Windows 10
18. S/W Measuring Functions
- Length, Angle, Area, Etc.

19. Power: AC220V +/-10%, 50/60Hz

20. Dimension : 640(W) * 682(L) * 1430(H)mm, 230kg

* Equipment Configuration

a. Gun Unit
b. HV Tank Unit
- HV unit : Output : 30Kv 1set
c. Column Unit
d. Chamber & Stage Unit
e. Detector Unit
- PMT : Bar type 1set
f. Control Unit
- Computer system 1set
- Image manager software 1set
g. Vacuum Unit
- Rotary Pump Set : 100L/min 1set
- Turbo Molecular Pump: 300 Liter/sec 1set
* Spare Parts

1) Tungsten Filament with Cartridge 8 PCS

2) CX-Plus Holder 1 SET

3) Carbon Tape 1 EA

4) Carrier Box (Accessories & tools included) 1EA

5) Wrench 1 SET

6) Blower 1 EA

7) User Manual 1 EA

* BSE (Back Scattered Electron) Detector

- Type : 4 CH Semiconductor Detector
- Resolution : 30nm
- Ideal Working Distance : 5mm
- Total Diameter : 25mm, Center hole : 5mm
- Composition Analysis
* Low Vacuum
- 100Pa to 1Pa

CXF-721-2(0) COXEM Co., Ltd A4(297×210)

2 EDS (Oxford)
Detectable element : Be(5) - U(92)

Resolution: < 129eV at Mn Ka, < 57eV at C Ka, < 67eV at F Ka

Detector Type: SDD

Sensor Size :10mm2

Cooling Type : Peltier

CXF-721-2(0) COXEM Co., Ltd A4(297×210)