Specification 

and Product Description for Scanning Electron Microscope (EM‐30AXN)

Specification Qty Product Description

1 Scanning Electron Microscope (EM-30AXN)
Magnification x15 ~ x150,000 (Free scale Magnification)
S/W : NS 4.1.2
DP Secondary Electron Detector
Detector
DP Back Scattered Electron Detector
- Retractable Type
Accelerating Voltage 1-30KV
Resolution 5.0 nm at 30kV
Electron Gun W (Tungsten), Pre-Align Cartridge Filament
2 Step Condenser lens
Lens System
1 Step Objective lens
Objective Aperture 4 Levels Variable Aperture
Image Shift +/-40um
X (35mm), Y (35mm), T (0 ~ 45°)
- Auto Step Motor Stage
Stage
Beam Rotation (360°), Z (5 ~ 50mm)
- Manual Stage
Special Holder(32mm x 32mm x 43mm)
7 Load Stub(8mm x 8mm x 3mm)
Specimen
Section Stub(25mm x 25mm x 10mm)
Tilt Stub(25mm x 25mm x 10mm)
Focus Mode (160 x 120 pixels)

Reduced Mode (320 x 240 pixels) TV Mode (640 x 480 pixels)

Slow Screen Scan Mode (800 x 600 pixels) Photo Screen

Scanning Mode
Capture Mode I
(1280 x 960 pixels)
Photo Screen Capture Mode II (2560 x 1920 pixels)
Photo Screen Capture Mode III (5120 x 3840 pixels)
Image Format JPG, TIFF, BMP,PNG
Imange Display 49" QLED Curved Monitor
Auto Filament Saturation
Auto Focus
Auto Contrast/Brightness in a sec Duplex
Convenient Function
Navigation(CCD+MiniMap) OneSec Auto Brightness and
SE+BSE Image Merge
SE/BSE Image Split
Max height : 5 ~ 50mm
Working Distance General height : 7~25mm
- Use by special holder
Fully Automation
Vacuum System - Roughing : Diaphragm Pump
- High Vacuum : Turbo Molecular Pump
 Joystick (X,Y Move, Focus, Magnification)
Mouse and Keyboard
Control System
PC Controlled by USB
Operating System : Windows 10
S/W Measuring
Length, Angle, Area, Panorama(Ver 1.0)
Functions
AC220V +/-10%, 50/60Hz, 1.5kVA
Power
- 3kVA with EDS
Equipment
Gun Unit
configuration
HV Tank Unit
1 set - HV unit : Output : 30Kv
Column Unit
Chamber & Stage Unit
Detector Unit
1 set - PMT : Bar type
Control Unit
1 set - Computer system
1 set - Image manager software
Vacuum Unit
1 set - Rotary Pump 100 L
1 set - Turbo Molecular Pump : 80 Liter/sec
8 pcs Tungsten Filament & Cartridge
1 set EM & Plus Holder set
1 ea Carbon Tape
Spare Parts 1 ea Carrier Box(Accessories & tools included)
1 set Wrench
1 ea Blower
1 ea User Manual
Detectable element : Be(5) - U(92)
Resolution: 133eV or better at 5.89keV Mn, 60eV Fluorine
EDS[Oxford] 1
Detector Type: SDD Sensor Size :30mm2
Cooling Type : Peltier
- Dimension; 420(W)ｘ220(D)ｘ230mm, 10Kg
- Gold/Platinum Target : 50.8 mm X 0.1mm
- Operating Vacuum; About 0.1 Torr
SPT-20 1 - Maximum Ion Voltage; ~ 3KV
- Ion Current; 1 ~ 9 mA
- Coating Time; 10 ~ 500 sec
- Rotary Pump

Include :
1 UPS 5 KVA & Stabilizer