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R. Ryan Vallance
Abstract
This article describes an instrument to measure the error motion of rolling element
axial preload must be applied to seat the rolling elements in the bearing races. Second,
one of the races must spin under the influence of an applied torque. Third, rotation of
the remaining race must be prevented in a way that leaves the radial, axial/face, and tilt
displacements free to move. Finally, the bearing must be fixtured and measured without
introducing off-axis loading or other distorting influences. In the design presented here, an
air bearing reference spindle with error motion of less than 10 nm rotates the inner race
of the bearing under test. Non-influencing couplings are used to prevent rotation of the
bearing outer race and apply an axial preload without distorting the bearing or influencing
the measurement. Capacitive displacement sensors with 2 nm resolution target the non-
rotating outer race. The error motion measurement repeatability is shown to be less than
25 nm. The paper closes with a discussion of how the instrument may be used to gather
data with sufficient resolution to accurately estimate the contact angle of deep groove ball
bearings.
1
1 Introduction
Rolling element bearing performance improves over time as a result of ongoing metallurgical,
tribological and manufacturing research and development. However, one of the remaining
The instrument described in this article measures and characterizes the error motion of
bearings intended for precision applications. Error motion is movement in the five rigid body
degrees of freedom other than pure rotation. These five components of error motion are de-
scribed with radial, tilt (angular), and axial measurements. However, most applications use
at least two bearings to provide tilt stiffness. Accordingly, the radial and axial error motion
Measurements made on the bearing under test reflect the combined contributions of errors
in the bearing and the errors of the reference spindle. Figure 2 shows the decomposition
of the measurement [4] separating these errors. The left-hand column of polar plots shows
the synchronous and asynchronous components of a single radial measurement [15, 23]. The
revolutions. Asynchronous error motion is the remaining error representing the revolution-by-
revolution deviation from the synchronous component. The synchronous and asynchronous
components have an intuitive interpretation in the frequency domain. Given some integer
number of revolutions of data (greater than one), the synchronous component is contained in
the frequency bins associated with integer multiples of the number of revolutions (or integer
values of cycles per revolution or cpr ). The asynchronous component appears in the remaining
frequency bins, as illustrated in Figure 2. Rolling element bearings generally have proportionally
greater asynchronous error motion because of the non-integer relationship between input shaft
speed and rolling element rotation. For example, the cage rotation of a 6204 ball bearing is
An error separation method may be applied to distinguish the synchronous error motion
of the ball bearing under test from the reference air bearing spindle error. However, the
synchronous error of the reference spindle is small compared to most rolling element bearings
and is ignored in the results presented here. This is also true of the asynchronous component,
2
which is about 1 nm for the reference spindle while typically 100 nm for rolling element bearings.
Asynchronous error motion presents an additional challenge to the metrologist in that not
all of the apparent motion between the displacement sensor and target should be assigned to the
bearing under test because of test stand vibration, environmental influences, and other instru-
mentation or sensor noise. One of the biggest challenges in accurately measuring ball bearings
error is achieved.
The instrument presented here benefits from previous work in the techniques used to accu-
rately quantify the performance of axes of rotation [10, 14, 16]. Precision engineering pioneers
such as Tlusty and Donaldson inspired four decades of work to reduce axis of rotation measure-
ment uncertainty through clever hardware and analytical developments [5, 6, 7, 22]. Sensors
and data acquisition systems also advanced to the point where hardware design is often the
2 Background
Rolling element bearing measurement techniques may be broadly categorized by whether data
are collected in situ or off-line on a dedicated instrument. In situ approaches have received
the most interest for condition-based monitoring of mission-critical components. However, the
with its surrounding structure and environment [9, 11, 13, 21].
Off-line testing is the best way to reliably isolate a bearing from environmental and structural
influences [10]. Properly designed instrumentation also offers a practical means of providing
data for bearing model development. The last 30 years have seen several significant improve-
ments in off-line bearing testing equipment and practice. One of the earliest commercially
three frequency ranges in units dubbed Anderons (1 Anderon is 1 micro-inch per radian of
rotation). The low measurement range is from 1.67 to 10 times the shaft speed, medium is 10
to 60 times the shaft speed, and the high range is 60 to 300 times the shaft speed. A bearing
3
In unpublished work, Professional Instruments Co. began designing custom instrumentation
for measuring bearing error motion in the early 1980’s in an effort led by Gene Dahl. The signif-
icant contribution of their work was the integration of high resolution capacitive displacement
sensors with an ultra-precision air bearing spindle to enable accurate measurements with sev-
eral kHz bandwidth. This approach represented a significant departure from the Anderometer
in both design and implementation; the PICo instruments allowed data collection over many
revolutions and at thousands of data points per revolution, as triggered by optical encoders.
Bouchard, Lau, and Talke measured asynchronous radial errors for both ball and fluid
bearing spindles in the time and frequency domains using spindles mounted on a vibration
isolation table [5]. They also used a capacitive displacement sensor to measure error motion.
The asynchronous component was calculated by eliminating the repeatable signal from the time-
varying displacement signal between the stationary probe and the rotating spindle. Statistical
methods were used to calculate the asynchronous component in both the time and frequency
domains.
McFadden and Smith developed an experimental test rig to measure the vibration produced
by a defect on the inner race of a ball bearing under a constant radial load [17]. Their instrument
used an accelerometer to measure vibrations that were later correlated to the shaft rotation
frequency.
Noguchi et al. returned to the reference spindle-type instrument layout to measure the
radial motion of the outer race of a bearing with the inner race rotated by an aerostatic
spindle [20]. Load cells measured the axial load and torque while two orthogonal displacement
sensors measured the radial error; a rotary encoder triggered data sampling.
With the benefit of modern computing and data acquisition hardware, it is now practical
to implement the PICo/Noguchi-style instrument with higher usable bandwidth and accuracy.
Such a design improves resolution in both the time and frequency domains along with precisely
controllable operating conditions to explore the effects of geometric and manufacturing problems
such as misalignment and out-of-round components. Furthermore, issues such as bearing load,
4
3 Bearing Analyzer
The bearing analyzer instrument is shown in Figure 3 and Figure 4. Components chosen for
the instrument allow testing at axial loads up to 100 N and speeds up to 10 kRPM. An ultra-
precision air bearing spindle (Professional Instruments BLOCK-HEAD spindle with Heidenhain
ERO 1221 rotary encoder) spins the inner race of the bearing under test. The radial error motion
of this spindle is less than 10 nm and the axial error motion is less than 5 nm. In most cases,
it is reasonable to neglect the small contribution of this error to the bearing measurement.
However, it is possible to accurately remove the reference spindle’s contribution using an error
Capacitive displacement sensors with 10 µm range and 2 nm resolution (Lion Precision C1-
C capacitance probe with a DMT10 driver) measure the relative motion between the reference
spindle’s stator and the outer race. Capacitive sensors require that the target electrode be
grounded. In this instrument configuration, the target electrode is the steel bearing retaining
The inner race of the bearing under test is secured to the reference spindle on a lapped
spherical carbide pilot sized with a light drive interference (FN) fit. The outer bearing race
has a locational interference (LN) fit within the steel bearing retaining cup. The retaining cup
also has a torque arm that prevents rotation of the outer race while enabling measurement of
the torque. The torque arm prevents rotation but the remaining five degrees of freedom are
This decoupling is achieved with a steel pin with lapped, carbide hemispherical ends that
fit into lapped conical features. The axial preload is applied with a similar pin to minimize the
transmission of off-axis loads to the bearing. The result is axial load and rotation constraint
with the five remaining degrees of freedom almost completely unconstrained and uninfluenced
by the test apparatus. A load cell is placed in line with the torsional restraint to allow torque
Data acquisition and analysis is carried out using a National Instruments DAQ board (PCI-
6110E) and software written in LabWindows/CVI. Analog anti-alias filtering is done prior to
digitization with a Krohn-Hite 3360 tunable filter. All error motion computations are made
5
in accordance with the procedures set by ANSI/AFBMA Standard 13-1987, Rolling Bearing
Vibration and Noise (Methods of Measuring) and ANSI/ASME B89.3.4M Axes of Rotation,
Methods for Specifying and Testing [3, 4]. The software provides integrated motor control, ther-
mal drift compensation, and data acquisition of the displacement and force sensors synchronized
4 Results
Sample measurement results are shown in Figure 5 from single-row, deep groove ABEC 3 6204
Rolling element bearings exhibit significant asynchronous error motion because of the
planetary-type kinematics of the inner race, outer race, and rotating balls that lead to non-
integer relationships between shaft speed and the key rotational frequencies. Consecutive ro-
tations will not yield identical error motion results even in the absence of measurement errors.
However, a series of tests show similar overall characteristics, especially when averaged over
multiple revolutions for the purpose of computing the error motion values specified in the
The number of revolutions included in a test is chosen by the metrologist [4]. Experience
shows that the shape of the synchronous error motion takes quite a few revolutions to emerge,
especially for frequency components near, but not precisely equal to, integer multiples of the
input (e.g., inner bearing race) speed. In general, averaging additional revolutions of data
reduces the synchronous error motion and increases the asynchronous. In the results that
follow, 512 revolutions were used in all computations. This number of revolutions was found to
give stable results while providing sufficient frequency domain resolution within a reasonable
Table 2 shows data from consecutive measurements taken on a 6204 ball bearing at 1000 RPM
for 512 revolutions under 100 N of axial preload. The tabulated motion and torque values have
a standard deviation of approximately 15 to 20% of the mean. In the case of the 6204 bearing,
6
the repeatability is better than 100 nm for the overall magnitude of the radial error motion,
The most significant (i.e., largest) frequency component in the data tabulated in Table 2
occurs at the cage rotation frequency at 38.5% of the shaft rotation frequency. This component
is below the range included in the three frequency bands of the Anderometer. For this reason,
the low-medium-high band results, which start at 1.67 times the shaft rotation speed, do not
share the same general magnitude as the asynchronous component, which includes all non-
The instrument repeatability is also apparent in the frequency domain. Figure 6 shows
four FFT plots of the radial error motion calculated from 512 revolutions of data sampled
1024 times per revolution. As before, the results show little variation in consecutive tests.
Furthermore, the frequency components associated with particular geometric defects of the
ball bearing occur at identical frequencies and similar amplitudes for all tests, as summarized
in Table 3. The high consistency in the frequency domain data suggests that the bearing
frequency components combine in somewhat different patterns in the time domain because of
the non-integer frequencies at which they occur. As a result, the FFTs are very similar while
Testing was carried out to investigate the instrument performance with various axial loads
applied to the bearing. Figure 7 shows the synchronous and asynchronous error motion values
of a 6204 bearing at axial preload increasing in steps of 10 N. As before, these error motion
values are computed from 512 revolutions of data taken at 1000 rpm. Axial loads above 30 N
result in consistent values of synchronous error motion in the bearing. The asynchronous
component also reaches a roughly constant value above 30 N until it jumps to a second plateau
above 80 N. Table 4 shows additional information from the same testing. It is important that
the axial load be sufficient to hold the bearing races in proper contact with the rotating rolling
elements. The table shows an abrupt transition in error motion and bearing torque between 30
and 40 N. The bearing balls and races are loaded sufficiently to achieve proper contact above
7
30 N for the 6204 deep groove bearing.
5 Discussion
The previous section demonstrates the repeatability and resolution of the proposed bearing error
interest to end users of rolling element bearings as well as the bearing modeling community.
An interesting facet of ball bearing analysis is the precise determination of the contact angle
between the balls and the inner and outer races. The contact angle tends to vary somewhat
with axial load because of the Hertzian contact deformation between the races and the rolling
elements. In practice it is difficult to infer the contact angle from error motion data because
of finite resolution in the frequency domain. The use of a single measured bearing defect
frequency, such as the cage rotation frequency, can be less accurate than simply using the
nominal contact angle calculated from the standardized bearing geometry. This is because
bearing defect frequencies are not particularly sensitive to contact angle. Despite this challenge,
the computation of the effective contact angle is critical in bearing modeling and troubleshooting
applications.
First, consider the measured cage rotation frequency as a means of estimating the effective
contact angle of a ball bearing. The cage rotation frequency fcage is typically slightly less than
half the inner race (shaft) rotational frequency fs and is a function of ball diameter b, pitch
fs b
fcage = 1 − cos α (1)
2 p
Linearizing the cage rotation frequency with respect to the nominal value of the contact
angle α0 leads to an equation for the sensitivity of contact angle to small changes in cage
frequency.
fs b
∆fcage = sin α0 ∆α (2)
2 p
or
2p ∆fcage
∆α = (3)
b sin α0 fs
8
The sensitivity of the contact angle to the measured cage rotation frequency is limited by
the number of revolutions captured in the data sample. For example, 512 revolutions of data
yield a frequency resolution of 1/512 of the shaft speed fs . For the 6204 bearing, with a nominal
contact angle of 15 degrees, the computed correction in contact angle is nearly two degrees over
half the width of one frequency bin. This is insufficient for accurate estimation of the actual
Therefore, we use several spectral peaks to improve the accuracy of the calculated contact
angle. The bearing instrument is well suited for this because the measured spectral peaks
may be relied upon to represent bearing harmonics and not other environmental influences.
Furthermore, the peaks are sharp and easily identified because the data sampling is triggered
by an optical encoder measuring shaft orientation angle, rather than relying on constant-speed
A number of spectral peaks appear in the FFT of the error motion and may be matched to
integer combinations of the basic bearing defect frequencies. In addition to the cage rotation
frequency, there is the cage rotation relative to the inner race fci that is typically a little more
fs b
fci = 1+ cos α (4)
2 p
The ball pass frequencies of the inner and outer races are computed from fc age and fci
2 !
fs p b
fr = 1− cos α (7)
2 b p
9
Finally, a ball defect will appear at twice its rotational frequency fr because the defect will
These frequencies may be calculated using standardized bearing geometry data with typical
error of 0.2% or less, as demonstrated here for a 6204 bearing. To use a set of experimentally-
measured defect frequencies to improve our estimates of the bearing geometry, the defect fre-
quency equations are linearized in terms of small deviations of ball diameter b, pitch diameter
p and contact angle α. This yields a set of equations relating the predicted defect frequencies f¯
(using the nominal geometry values b0 , p0 , and α0 , plus a small correction fˆ, to the measured
defect frequencies f .
f ≈ f¯ + fˆ (9)
where
f¯cage
1− b0 cos α0
p0
f¯ci 1 + b0 cos α0
p0
fs
f¯ = p0 − b0 cos2 α0
f¯r = (10)
2 0
b p 0
f¯bpo
n − b0 n pcos α0
0
¯
b0 cos α0 n
fbpi n+
p0
fˆcage
.. .. ..
fˆci
. . .
∆b
fˆ =
fˆr = ∂f i ∂f i ∂f
∂α ∆p
i = A∆x
∂b ∂p
.. .. ..
fˆbpo
. . . ∆α
ˆ
fbpi
10
− b10 1
p0 tan α0
1
− p10
b0 − tan α0
∆b
fs b0 cos α0
− cos α0 − p20 cos α0 p0
= + 2 sin α0
∆p (11)
2p0 b0 b30 cos α0 p0 b20 cos α0
− bn0 n
n tan α0 ∆α
p0
n
b0 − pn0 −n tan α0
These linearized equations may be used to compute the small deviation of the ball and
pitch diameters along with the contact angle by matching the predicted and measured defect
and predicted error frequencies for a sample 6204 ball bearing measured under a 100 N axial
load. The frequencies are listed as multiples of the shaft rotation speed fs .
fˆ = f − f¯ = TA∆x (12)
The matrix A is 5 × 3 and relates the frequency corrections to the geometry corrections.
The matrix T is of dimension l × 5 and contains the integer values relating the 5 bearing
defect frequencies to the l spectral peaks identified in the experimental data and listed in the
second column of Table 5. Sixteen spectral peaks were used to improve the estimate of bearing
geometry under load. Matching 16 peaks allows better correction of the contact angle as well as
the effective ball and pitch diameters, both of which are affected by the Hertzian-type contact
of the bearing.
1 2 3 4 0 0 −1 1 −1 0 1 −1 0 1 −3 −1
0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0
TT =
0 0 0 0 1 0 2 2 3 0 3 4 4 4 5 5
(13)
0 0 0 0 0 1 0 0 0 2 0 0 0 0 0 0
0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0
singular value decomposition (SVD) solution. There are 16 equations and just three unknowns
(the pitch diameter correction ∆p, ball diameter correction ∆d, and the contact angle correction
11
∆α). In this example, the singular values are 3.264, 0.491, and 0.
The SVD solution eliminates the singularity and solves the problem with a numerically
stable algorithm. The correction values are ∆b = −4 µm, ∆p = 1 µm, and ∆α = −0.8 degrees
6 Conclusion
This paper presents an instrument designed to measure error motions of precision rolling el-
ement bearings at various loads and speeds. The results are repeatable to the 100 nm level
and may be used to identify bearing characteristics without the influence of the dynamics of
a larger, compliant environment. Sample tests under varying axial load show that the error
motion results are stable once sufficient load is applied to properly seat the rolling elements
in the raceways. Additional testing of the effective contact angle shows that a significantly
improved estimate of bearing geometry is obtained by comparing the predicted bearing fault
frequencies with the measured values. This is important in contact angle calculations because
without multiple spectral peaks to compare, the contact angle will be inaccurate.
12
References
[1] Aini, R., Rahnejat, H., and Gohar, R. International Journal of Machine Tools &
[2] Aini, R., Rahnejat, H., and Gohar, R. Proceedings of the Institution of Mechanical
[3] ANSI/AFBMA. Standard 13-1987, rolling bearing vibration and noise, methods of mea-
[4] ANSI/ASME. Standard B89.3.4M, axes of rotation; methods for specifying and testing.
[5] Bouchard, G., Lau, L., and Talke, F. E. IEEE Transactions on Magnetics MAG-23,
5 (1987), 3687–3689.
[6] Deeyiengyang, S., and Ono, K. Journal of Information Storage and Processing Sys-
[8] Grejda, R. D., Marsh, E. R., and Vallance, R. R. Precision Engineering 29, 1
(2005), 113–123.
[9] Gupta, P. Advanced dynamics of rolling elements. Springer-Verlag, New York, 1984.
[10] Harris, T. A. Rolling bearing analysis, 4 ed. John Wiley and Sons, NY, 2001.
[14] Lim, T., and Singh, R. Journal of Sound and Vibration 139, 2 (1990), 201–225.
13
[15] Marsh, E., Couey, J., and Vallance, R. Journal of Manufacturing Science and
[16] Martin, D. L., Tabenkin, A., and Parsons, F. International Journal of Machine
[17] McFadden, P. D., and Smith, J. D. Journal of Sound and Vibration 96, 1 (1984),
69–82.
[18] Noguchi, S., Hiruma, K., Kawa, H., and Kanada, T. Precision Engineering 29, 1
(2005), 11–18.
[19] Noguchi, S., and Ono, K. Precision Engineering 28, 4 (2004), 409–418.
[20] Noguchi, S., Tanaka, K., and Ono, K. IEEE Transactions on Magnetics 35, 2 (1999),
845–50.
[21] Tandon, N., and Choudhury, A. Journal of Sound and Vibration 205, 3 (1997), 275–
292.
[23] Vigliano, V. C. Computer control for precision bearing analysis. Master’s thesis, The
14
Bore diameter 20 mm
Outer diameter 47 mm
Ball diameter, b 7.9375 mm
Pitch diameter, p 33.5 mm
Ball count, n 8
Contact angle, α 15◦
15
Error motion (nm) RMS error motion (nm) RMS torque (mN-m)
Synch Asynch Asynch Low Med High Low Med High
Test P-V P-V 4σ 1.7-10 10-60 60-300 1.7-10 10-60 60-300
1 31 556 292 36 15 2 1.2 1.9 0.2
2 35 514 283 46 16 3 1.5 2.4 0.2
3 26 718 440 43 15 3 2.1 2.2 0.2
4 31 630 382 50 19 3 1.7 3.0 0.2
5 35 588 316 47 17 3 1.7 2.9 0.2
mean 32 601 343 45 16 3 1.7 2.5 0.2
σ 4 78 67 5 2 0 0.3 0.5 0.0
Table 2: Repeatability results for radial error motion and torque. The low, medium, and high
ranges are multiples of the input shaft speed, as reported in Anderometer-style measurements.
16
Error motion amplitude at bearing defect frequencies (nm)
fc 2fc fbp fbpo fbpi
Test (0.385fs ) (0.771fs ) (2.000fs ) (3.084fs ) (4.916fs )
1 58 27 3 10 1
2 56 28 4 9 1
3 56 28 3 9 1
4 59 29 3 9 1
mean 57 28 3 9 1
σ 1 1 0 0 0
17
Total error motion (nm) RMS error motion (nm) RMS torque (mN-m)
Synch Asynch Asynch Low Med High Low Med High
Test P-V P-V 4σ 1.7-10 10-60 60-300 1.7-10 10-60 60-300
10 31 532 283 46 17 3 1.61 2.96 0.23
20 35 536 311 43 15 2 1.50 2.08 0.19
30 30 527 283 48 17 3 1.67 2.96 0.23
40 16 149 106 18 4 3 0.73 0.12 0.22
50 16 145 93 17 4 3 0.75 0.12 0.23
60 16 152 99 18 5 3 0.71 0.15 0.24
70 15 155 97 18 5 3 0.72 0.17 0.22
80 15 220 124 17 5 3 0.70 0.18 0.38
90 15 244 126 16 6 3 0.73 0.21 0.25
100 15 224 121 16 6 3 0.75 0.23 0.21
Table 4: Radial error motion and bearing torque with varying axial preload.
18
Error Frequency Measured Predicted Corrected Predicted Corrected
amplitude (nm) component frequency frequency frequency error (%) error (%)
58.5 fcage 0.385 0.386 0.385 -0.2 -0.1
26.8 2fcage 0.770 0.771 0.770 -0.2 -0.1
13.7 5fr − 3fcage 8.838 8.842 8.843 0.0 -0.1
9.6 fbpo 3.082 3.085 3.082 -0.1 0.0
9.3 2fr − fcage 3.615 3.614 3.614 0.0 0.0
9.2 2fr + fcage 4.387 4.385 4.385 0.0 0.0
6.2 4fr + fcage 8.387 8.384 8.384 0.0 0.0
4.0 4fr 8.000 7.999 7.999 0.0 0.0
3.8 3fr + fcage 6.385 6.385 6.385 0.0 0.0
3.0 4fcage 1.541 1.542 1.541 -0.1 0.0
2.8 fr 2.000 2.000 2.000 0.0 0.0
2.7 2fbpo 6.162 6.169 6.163 -0.1 0.0
2.4 3fr − fcage 5.615 5.614 5.614 0.0 0.0
2.4 5fr − fcage 9.617 9.613 9.614 0.0 0.0
2.2 4fr − fcage 7.617 7.613 7.614 0.1 0.0
2.1 3fcage 1.156 1.157 1.156 0.0 0.1
19
Captions
Figure 1. Axial (a) and radial (b) error motion associated with a rolling element bearing. The
proposed instrument can also be used to measure the remaining rigid body motion (tilt) when
appropriate.
of rolling element bearing error motion and artifact form error (cpr is cycles per revolution; a
two-lobe error will appear in the cpr = 2 frequency bin). Note that the 1 cpr bin (eccentricity)
Figure 5. Sample polar plot and FFT results from a 6204 bearing. The synchronous error
is quite small (33 nm) but the asynchronous error motion has a total excursion of 289 nm
during the 512 revolutions of the test. However, 95% of the error motion values fall within a
160 nm band as suggested by the nearly normal distribution. The FFT allows identification of
Figure 6. Repeatability results from four consecutive tests on a single 6204 bearing.
20
600
532
229
40 150
32
16 15
0 0
10 20 30 40 50 60 70 80 90 100
Axial Load (N)
Preload force
A
Measurement Axial preload pin
locations Torque arm
Bearing retainer cup
Bearing
Pilot
Chuck adapter
Spacer
Spindle rotor
Spindle stator
Mounting flange
Frameless motor
Rotary encoder
Section A-A A
Non-rotating components are hatched
Axial load piston
(a) (b)
Non-rotating components are cross-hatched
75 75
fc fc
Radial error (nm)
0 1 2 cpr 4 5 6 0 1 2 cpr 4 5 6
75 75
fc fc
Radial error (nm)
0 1 2 cpr 4 5 6 0 1 2 cpr 4 5 6
nm nm
80 80
40 40
0 2 4 6 8 cpr 0 2 4 6 8 cpr
FFT FFT
Initial
Raw probe data Error separation
processing
(requires at least one
additional measurement)
Ball Asynchronous:
bearing non-integer Fourier Synchronous
components spindle error motion
FFT FFT
Reference nm nm
spindle 80 80
40 40
0 2 4 6 8 cpr 0 2 4 6 8 cpr
125 nm
fcage
Synch
33 nm
Asynch
fballpass
-250 nm 250
P-V 289 nm 2fcage
4σ 160 nm
fouter
0
0 2 4 cpr 6 8 10