High Precision Positioning and Motion Control

on Silicon Photonics Alignment Applications

Hevin Yu
SURUGA SEIKI Taiwan Branch / Senior manager
Agenda

• Applications and Market Trends on Silicon Photonics

• Why Silicon Photonics

• Alignment Solutions
Company Profile

Corporate Name: SURUGA SEIKI CO., LTD.

Headquarter: Shizuoka City, Japan
Established: May, 1964
Global Sales Revenue:10 Billion JPY in FY16
Employees: Over 1,000 employees globally in FY16

Business Summary
Development, Manufacture and Sale of
• Electric, Electronic, Communication and Industrial Machinery and
Equipment
• Optical Equipment
• Parts for Industrial Machinery

Core Technology: High Performance Precise Positioning Technology

 Global Network
■Sales Branch
■Technical Center
■Production

Xi’an, Beijing Branch are

under the construction.

Shanghai Branch■ ■Korea

■Silicon Valley
China Design Technical Center■
■ ■ ■ Shizuoka Headquarter
Shanghai Factory■
Wuhan Branch ■ ■Tokyo Branch
Shenzhen Branch■ ■
Taiwan Branch
■
Vietnam Factory■

SURUGA Seiki China Taiwan San Jose Shanghai Vietnam Korea

Headquarter
 SURUGA Product Lineup

Mechanical Parts・Components Complex Units・Solutions Fusion Equipment System

Element Parts Unitization Controller Precision optics System Integration

Mechanism Technology Combination technique Application Development Measurement technology Compound Technology

• Main components are produced

100% in-house
• Hi Accuracy、Low Cost
Precise Ball Screw Slide Guide Cross Roller Guide R Guide
High Precision Positioning Motorized Stages
X-axis stages XY-axis stages Z-axis stages
Linear system

Move to one direction(to the X axis) type of

stage.
Motion guide has 3 types of linear ball guide,
crossed roller guide and slide guide.
Move vertically(to the Z axis) type of stage.
Move to two directions(to the X and Y axis)
Horizontal Z axis means table surface goes up
type of stage.
and down.

Rotation stages 1-axis Goniometer stages 2-axis Goniometer stages

Rotation system

Rotary motion type Tilt around a stage surface space Biaxial combination.
There are type of 360°rotation and tiny angle Perfect for angle control. There are two types It is possible to control angle variously with 2
rotation type of worm gear and ball screw. axes.
Silicon Photonics Applications
Applications and Market trends on Silicon Photonics
Applications and Market trends on Silicon Photonics
Why Integrated Photonics

• Telecom applications
– WDM introduces need for highly integrated optical circuits

• Datacom applications
– Increasing need for bandwidth between chips

– Single channel solutions will no longer fulfill requirements

– Need for densely integrated electronics + optics

• Embedded sensors
– Imagine millimeter size spectrometer with source included

– Embed in tissue (glucose sensing, structural health monitoring…)

From: ICPlatform Course on Silicon Photonics, Xiamen 2017

 Why Silicon

• Silicon is transparent for l>1.1um

• Silicon process technology is
– Mature

– Good for high volume manufacturing

• High refractive index contrast -> compact circuits

• Passive and active functionality
– Thermo-optic

– Carrier plasma dispersion

– Integration with other material: Ge, III-V,…

From: ICPlatform Course on Silicon Photonics, Xiamen 2017

New Solution, New Market

• Si photonics in existing markets

– If radical improvement in cost/power/space efficiency
• e.g. 10 transceivers on the same chip size, on-chip optical interconnects

– Or is new functionality
• e.g. enabler for >40Gbps line speed communication

• New solutions for novel markets

– Ubiquitous sensing smart city

– Implantable medical devices

From: ICPlatform Course on Silicon Photonics, Xiamen 2017

Silicon Photonics Platform

Graphics from GF, IBM, IME, GLOBALFUNDRIES

Fiber Coupling
Fiber coupling - Silicon
1. Grating coupled

Challenge: Fiber coupling to

sub-micron waveguide
2. Edge coupled

From: Packaging and Integration Technologies for Silicon Photonics, SEMICON 2013
Grating Coupling example
Grating Coupling example
Edge Coupling example
Edge Coupling example
Alignment Solution
 Fiber Array Rotations
• Fiber array tilt angles influence maximize optical coupling.

• Vertical fiber alignment stage is designed to support 6 axes of

freedom with center rotations around the fiber array.

• This feature saves time by allowing small optimizations to be made

without moving the fiber away from the chip.
q

Fiber Array

Fiber Array

Y
Y

Y
Stage Z X Stage
Ty Z X
Tx
Z
Tz X
 Motorized Vertical Type Fiber Alignment Stage

• Our vertical type fiber alignment stage

provides 6axes of motion.

• General spec

– Sub-mm XYZ positioning with 70, 100mm

or more XY and 30mm Z

– +/- 5。Tx, +/- 6。Tz, +/- 6。Ty

– Center of rotations around fiber array tip

• Chip stage

– Optional for rotation (360。),

– Gonio (tilt +/- 6, 8。),

– Linear XY (13~300mm),

– Linear Z (4~30mm)
 Motorized Edge Type Fiber Alignment Stage

• Our edge type fiber alignment stage also

provides multi axes of motion.

• General spec (ES-6701)

– <0.5um XYZ positioning with 50mm XZ

and 10mm Y

– +/- 6。Tx, +/- 8。Tz, +/- 8。Ty

– Center of rotations around fiber array tip

• Optional for manual or motorized

Alignment Stage Module
System Configuration
• SURUGA combines
– Customized hardware stages (applications like vertical type fiber
alignment, edge type fiber alignment, and electrical probes)
– Intelligent software to automate silicon photonic device testing
• The diagram below is a schematic representation of how SURUGA
might integrate with your existing instruments.
 Alignment software (IROHA)
Easy Operation, Easy Control
Main Function
• JOG
(Stage drive with PC mouse operation)
• Automated Alignment Control
(XY, XYZ, and XYZθz Alignment)
• Contact Sensing
(Automatic control GAP each devices)
• Automated Face Alignment (Patent)
(Automatic control parallelism each devices)
• External Equipment Control
(GP-IB, Serial, IO)
• Profiling
(Beam Profile Measurement and Result
Display / Save)
• Input / Output Display / Save
(Optical Power, Analog Display)
• Driving Program
(Macro Sequences Free Writing Function）
 High Resolution Stages

New positioning stage for photonics application.

X0576D-X X0576D-XYZ

Stroke 30mm
Resolution (Linear
4.88nm
Scale)
Unidirectional
3μm
accuracy
Positioning X0576D Series
±10nm
Repeatability
Lost Motion 20nm
Pitching 20"
Yawing 15"
Rated Load 10kgf 5kgf(On Z axis)
Max Speed 20mm/sec
Linear Scale Feedback
Precision Linear Guide and Ball Screw

XYZ 3 axis type available.

Thanks for your listening

Q&A