Professional Documents
Culture Documents
org
15) Makeup air volumes are largely dictated by the amount of process exhaust and to
16) Makeup (outside) air handler is generally provided with pre-filter assembly and cooling
coil to take care of sensible & humidity load of outside air. The dehumidification
17) The dehumidified air is forced into the re-circulation AHU’s, which are provided with the
18) Minimum 95% ASHRAE atmospheric dust test efficiency filters are used to avoid a high
19) A properly designed, installed, and maintained gaseous air cleaning system must be
considered if the outdoor air is contaminated or the internal processes release gaseous
contaminants that may be toxic, corrosive, irritants or have strong odors. The toxic
20) In semiconductor clean rooms, the air stream sometimes contains acid, solvent, toxic
fumes, and process heat, and therefore requires careful consideration of the material
used in the ducts. The fiberglass reinforced plastic (FRP) ducts are sometimes used for
21) The fans and conditioning of makeup air due to the clean room exhaust and
pressurization are two key areas that offer huge potential of energy saving. These shall
22) The auxiliary equipment and facilities include changing rooms, air showers, hand-
washing equipment, emergency eyewash and showers, Jet towel, pass box etc.
Page 59 of 61