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www.PDHcenter.com PDH Course M143 www.PDHonline.

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15) Makeup air volumes are largely dictated by the amount of process exhaust and to

maintain room pressurization and adequate ventilation to avoid excessive worker

exposure to fumes and the like.

16) Makeup (outside) air handler is generally provided with pre-filter assembly and cooling

coil to take care of sensible & humidity load of outside air. The dehumidification

essentially takes place in the outside air handler.

17) The dehumidified air is forced into the re-circulation AHU’s, which are provided with the

cooling coil to primarily, cater for the internal sensible load.

18) Minimum 95% ASHRAE atmospheric dust test efficiency filters are used to avoid a high

dust load on the HEPA filters.

19) A properly designed, installed, and maintained gaseous air cleaning system must be

considered if the outdoor air is contaminated or the internal processes release gaseous

contaminants that may be toxic, corrosive, irritants or have strong odors. The toxic

removal is usually accomplished by chemical filtration consisting of absorbers such as

carbon or potassium permanganate impregnated with alumina or zeolite technically

known as ‘Activated carbon or chemical filtration’.

20) In semiconductor clean rooms, the air stream sometimes contains acid, solvent, toxic

fumes, and process heat, and therefore requires careful consideration of the material

used in the ducts. The fiberglass reinforced plastic (FRP) ducts are sometimes used for

corrosive fume exhaust systems.

21) The fans and conditioning of makeup air due to the clean room exhaust and

pressurization are two key areas that offer huge potential of energy saving. These shall

be designed and selected for optimal results.

22) The auxiliary equipment and facilities include changing rooms, air showers, hand-

washing equipment, emergency eyewash and showers, Jet towel, pass box etc.

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