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Materials Science and Engineering A354 (2003) 140 /145

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Effect of peak load on the determination of hardness and Young’s


modulus of hot-pressed Si3N4 by nanoindentation
Jianghong Gong *, Hezhuo Miao, Zhijian Peng, Longhao Qi
Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, PR China

Received 5 August 2002; received in revised form 6 December 2002

Abstract

The indentation load /displacement curves of a hot-pressed silicon nitride were measured under different peak load levels. The
unloading segments of these curves were analyzed using the widely adopted Oliver /Pharr method. It was found that both the
hardness, H , and the Young’s modulus, E , exhibit significant peak-load-dependence. Empirical approaches were then proposed to
determine the load-independent hardness and modulus. The hardness and modulus deduced from these empirical approaches were
proven to be comparable with the literature reported data measured with conventional methods.
# 2003 Elsevier Science B.V. All rights reserved.

Keywords: Nano-indentation; Hardness; Young’s modulus; Silicon nitride; Ceramics

1. Introduction where hmax is the displacement measured at peak load


and the second term in the right-hand side of the
During the past several decades, nanoindentation equation represents the displacement of the specimen
techniques have been developed [1 /4] and widely used surface at the perimeter of the contact at peak load. S
to determine various mechanical properties, such as ( /dP /dh ) is the initial unloading stiffness, i.e. the slope
hardness, modulus [5,6] and the properties of thin films of the unloading segment of the experimentally recorded
and coatings [7,8]. Most of the previous studies con- load /displacement curve at the peak load. To determine
cerning the determination of hardness and modulus S , Oliver and Pharr [2] proposed following empirical
were based on the analysis of the indentation load / expression to describe the unloading portion of the
displacement curves resulting from the nanoindentation load /displacement curve,
test with the method developed by Oliver and Pharr [2].
P a(hhf )m ; (3)
In general, the hardness, H, is defined as the ratio of the
peak load, Pmax, to the project area of the indentation where P is the indentation load, h is the indenter
impression, Ac, i.e. displacement, a and m are empirically determined
fitting parameters, and hf is the final displacement after
Pmax Pmax
H  ; (1) complete unloading and also determined by curve
Ac 24:5h2c fitting. Once the parameters a , m and hf are obtained
where hc is contact depth at the peak load. According to by curve fitting, the initial unloading stiffness, S , can be
the analysis of Oliver and Pharr [2], hc can be established by differentiating Eq. (3) at the maximum
determined with the following equation depth of penetration, h/hmax.
Nanoindentation tests have been conducted on sev-
Pmax eral types of ceramics [2,3,6,9/11]. In most of these
hc hmax 0:75 ; (2)
S tests, however, only one or two peak load levels were
used for the determination of hardness and modulus
from the analysis of the load /displacement curves. In
* Corresponding author. Fax: /86-10-62771160. fact, analyses [1 /4] aiming at extracting hardness and
E-mail address: gong@mse.tsinghua.edu.cn (J. Gong). modulus from the load /displacement curves usually
0921-5093/03/$ - see front matter # 2003 Elsevier Science B.V. All rights reserved.
doi:10.1016/S0921-5093(02)00940-1
J. Gong et al. / Materials Science and Engineering A354 (2003) 140 /145 141

assumed that the hardness can be treated as a constant, containing seven loading/unloading cycles, were ob-
although several authors [12,13] have pointed out that tained.
there may be an indentation size effect (ISE) in the Some of the resultant indentation impressions were
nanohardness, i.e. the nanohardness may vary with the observed under the atomic force microscopy and typical
peak load. AFM image are shown in Fig. 2. As can be seen, no
In order to gain a basic knowledge of the ISE in the indentation-induced cracking occurs in the vicinity of
nanohardness of brittle ceramics, nanoindentation tests the indentation. In fact, the critical load for Vickers
were performed on a hot-pressed silicon nitride at indentation-induced microcracking for hot-pressed
different peak load levels and the resultant load / Si3N4 has been determined to be about 3 N [14,15].
displacement curves were analyzed using Oliver /Pharr The maximum peak load used in the present study is
method. Then the effect of peak load on the determina- only 0.5 N. There is reason to believe that the effect of
tion of hardness and Young’s modulus was examined. microcracking on the determination of hardness and
Young’s modulus by nanoindentation is insignificant.

2. Experimental 3. Results

Commercial hot-pressed silicon nitride (FD-05, Typical load /displacement curves obtained in the
Found Corp., China) was selected as the test material. present study are shown in Fig. 3. As can be seen, the
According to the information provided by the supplier, unloading and reloading curves are nearly the same.
the test material has a density of 3.28 g cm 3 and a This suggests that, during the unloading half-cycle, the
microhardness of 16/18 GPa measured using Vickers deformation in the test material is almost entirely elastic,
indenter in the load range from 1 to 10 kg. implying that the peak load hold period, 30 s, in the
The test specimen was received with machined sur- loading sequence is enough to allow the possible time-
faces. The surface machining damage was removed dependent plastic effects to diminish.
mechanically by polishing, ultimately with 0.5 mm Studies [16 /18] have suggested that, during the
diamond paste, to produce an optical finish. loading half-cycle in the recording microhardness test,
The nanoindentation tests were conducted with a a linear relationship exists between P /h and h. Similar
Berkovich indenter using a fully calibrated Nano phenomenon was also observed in the nanoindentation
Indenter XP (Nanoinstruments Innovation Center, test conducted here, see Fig. 4. According to the analysis
MTS systems, TN, USA). Experiments were performed of Fröhlich et al. [16], the slope, b, of the P /h/h
using a load /time sequence like that shown in Fig. 1. straight line may be considered as a measure of the so-
During the test, a personal computer collected and called load-independent hardness, H0, i.e. H0 /kb ,
stored data for the load and displacement as the where k is a constant dependent only on the indenter
indenter was driven into the sample (loading segment) geometry and k /1/24.5 for the Berkovich indenter. A
and then withdrawn from it (unloading segment). The linear regression analysis of the plot shown in Fig. 4
raw data were then used to construct the load / yields b/2.968 mN nm 2 which gives a load-indepen-
displacement plot. Three indentations were made and,
correspondingly, three load /displacement curves, each

Fig. 1. The load /time sequence used in the experimental procedure.


Loading and unloading for each cycle lasted 15 s, respectively, and a
dwell time of 30 s at each peak load was used. Fig. 2. AFM image showing the indentation in the specimens surface.
142 J. Gong et al. / Materials Science and Engineering A354 (2003) 140 /145

unloading cycles have little effect on the loading


portions of the resultant load /displacement curves.
The unloading segment of each loading/unloading
cycle was analyzed using the Oliver /Pharr method [2]
and the results are summarized in Table 1.

4. Discussion

4.1. Hardness

Using the best fit-values of the contact depth, hc, the


Fig. 3. Typical load /displacement curves obtained on the hot-pressed hardness was calculated with Eq. (1) and the results are
silicon nitride. plotted as a function of the peak load in Fig. 5. Each of
the data points represents an average of measurements
from three tests and the error bars represent 9/one
standard deviation. Although there was a large scatter in
the hardness determined at lower peak loads, a sig-
nificant indentation size effect was observed, that is, as
the peak load increases, the hardness decreases dis-
tinctly.
The indentation size effect has been examined exten-
sively for the microhardness testing of ceramics [19 /23].
It was suggested that the indentation load, P , and the
resultant indentation size, d , can be correlated with an
empirical equation
P a?0 a?1 d a?2 d 2 ; (4)
where a?0 ; a?1 and a?2 are descriptive parameters derived
Fig. 4. The experimental data in the loading segments of the load /
from the curve fitting of the experimental results.
displacement curves shown in Fig. 2 were re-plotted in a P /h versus h
scale. Note that the indentation size, d, can be determined
to be proportional to the contact depth at the peak load,
dent hardness of about 12 GPa. This hardness value is hc, based on the indenter geometry. Thus, an expression
unacceptably small compared with the microhardness of similar to Eq. (4) can be obtained for the nanoindenta-
the test materials, 16 /18 GPa. Such a small hardness tion test, i.e.
value can be attributed to the fact that the displacement, Pmax  a0 a1 hc a2 h2c ; (5)
h , used to construct the plot in Fig. 4 is not the real
where a0, a1 and a2 are constants. Especially, following
contact depth. Rather, h is the sum of the real contact
the previous analyses [19 /23], the parameter a2 was
depth and the displacement of the specimen surface at
considered as a measure of the load-independent hard-
the perimeter of the contact [2]. However, it should be
noted that the regression analysis returned a correlation
coefficient of 0.999, implying that the repeated loading/

Table 1
Best-fit results for the unloading segments of measured load /
displacement curves

Pmax (mN) hmax (nm) m S (mN nm 1) hc (nm)

7.9 146.09/9.5 1.689/0.04 0.1789/0.017 112.49/8.9


16.0 215.29/8.2 1.669/0.15 0.2639/0.023 169.39/14.9
31.9 308.59/7.9 1.659/0.07 0.3759/0.018 244.79/7.9
63.3 442.99/8.8 1.659/0.08 0.5289/0.029 352.99/4.9
127.0 638.09/4.5 1.659/0.09 0.7499/0.026 510.79/6.6
253.2 915.49/9.4 1.649/0.03 1.0469/0.036 733.89/4.0
505.9 1298.79/7.4 1.719/0.07 1.5269/0.033 1049.99/9.6
Fig. 5. Variation of the hardness with the peak load.
J. Gong et al. / Materials Science and Engineering A354 (2003) 140 /145 143

ness, H0, and both quantities can be related with should be revised as
H0 ka2 ; (6) Ac 24:5(hc j)2 : (7)
The constant j is a correction factor for the penetration
where k is a constant dependent only on the indenter
depth and defined based on the indenter tip radius.
geometry. For the Berkovich indenter used in the
Substituting Eq. (7) into Eq. (1) and making some
present study, k /1/24.5.
transformation, one would obtain
The application of Eq. (5) to the experimental results
given in Table 1 is now illustrated in Fig. 6. The solid Pmax  24:5H(j2 2jhc h2c ): (8)
line in the plot was obtained by a conventional poly-
Although Eq. (8) has the same form as Eq. (5), it seems
nomial regression according to Eq. (5). Clearly, Eq. (5)
to be unreasonable to explain the experimental fact
is proven sufficiently suitable for the representation of
shown in Fig. 6 based only on the indenter tip correction
the experimental data. Using the best-fit value of the
because the regression analysis of the experimental data
parameter a2, 4.3 /104 mN nm 2, the load-indepen-
according to Eq. (5) yielded a negative a0-value whereas
dent hardness, H0, was calculated with Eq. (6) to be 17.6
Eq. (8) requires a positive a0-value.
GPa, being a reasonable estimation for the hardness of
hot-pressed silicon nitride whose microhardness lies in
the range 16 /18 GPa. 4.2. Modulus
The physical meaning of Eq. (5) has been analyzed
based on both energy balance consideration [20,22] and It has been suggested that S is an increasing function
proportional specimen resistance (PSR) model [19,21]. of the project area of the elastic contact, A , [2]
Undoubtedly, similar analysis may also be suitable for dP 2 pffiffiffiffi 2 pffiffiffiffiffiffiffiffiffi
the nanoindentation test. In other words, the existing S  pffiffiffi Er A  pffiffiffi Er 24:5hC ; (9)
dh p p
energy balance consideration and PSR model can be
used to explain the indentation size effect in the where Er is the reduced modulus defined as
measured nanohardness.
1 1  y2 1  y2I
There were several other explanations for the ISE   ; (10)
observed in nanoindentation test, including the surface Er E EI
pile-up or sinking-in [3,24,25] and the indenter tip where E and y are Young’s modulus and Poisson’s ratio
correction [2,26,27]. Analysis [3] has confirmed that, of the test material and EI and yI are the same
for brittle ceramics, it is surface sinking-in, rather than parameters for the indenter.
pile-up, that usually occurs during nanoindentation. On Eqs. (9) and (10) are the basic equations for the
the other hand, the effect of sinking-in on the hardness determination of Young’s modulus by nanoindentation.
determination has been eliminated by using Eq. (2) to Using the experimentally determined S and hc (Table 1),
calculate the contact depth. Therefore, there is reason to the Young’s modulus of the hot-pressed Si3N4 examined
believe that surface pile-up or sinking-in is not the main was calculated and the results are shown in Fig. 7 as a
source of the ISE shown in Fig. 5. The effect of indenter function of the peak load. In these calculations, the
tip rounding on the hardness determination was ana- Young’s modulus and the Poisson’s ratio of diamond
lyzed by several authors and it was suggested that, (indenter) are 1411 GPa and 0.07 [2], respectively, and
considering the existence of a non-perfect indenter tip, the Poisson’s ratio of Si3N4 is assumed to be 0.23 [28].
the area term used in hardness calculation, Eq. (1),

Fig. 7. The Young’s modulus extracted from the analysis of the load /
Fig. 6. Contact depth, hc, versus the peak load, Pmax. displacement curves as a function of the peak load.
144 J. Gong et al. / Materials Science and Engineering A354 (2003) 140 /145

Clearly, the extracted Young’s modulus exhibits a effect of indenter tip radius on the contact depth
strong peak-load-dependence. Therefore, one can con- measurement.
clude that the Young’s modulus cannot be extracted In continuation of the above analysis, it can be
from the load /displacement curves resulting from only inferred that the peak-load-dependence of the extracted
one peak load. modulus shown in Fig. 7 may be attributed to the effect
As can be seen from Eq. (9), there exists a linear of the indenter tip rounding.
relationship between the initial unloading stiffness, S ,
and the contact depth at peak load, hc, and the reduced
Young’s modulus can be obtained directly from the 5. Summary and conclusions
slope of the best-fit line. In Fig. 8, the experimentally
determined S is plotted as a function of the contact The nanohardness, H , and the Young’s modulus, E ,
depth at peak load, hc. Clearly, a good linear relation- of a hot-pressed silicon nitride were deduced by analyz-
ship exists between these two quantities. Least-square ing the unloading segments of the nanoindentation
regression analysis yielded a slope of 0.0014 mN nm 2 load /displacement curves using the widely adopted
and an intercept in S -axis of 0.021 mN nm 1. Oliver /Pharr method. The variations of the resultant
From the slope of the best-fit line, the Young’s H and E with the peak load employed to conduct the
modulus was determined to be 304 GPa. This value nanoindentation tests were examined and the following
lies in the typical range of the Young’s modulus of conclusions were obtained:
conventional hot-pressed silicon nitride ceramics, 300/ (1) The nanohardness, H, decreases with increasing
330 GPa [28], implying that the least-square regression peak load, from 26 GPa at 8 mN to 19 GPa at 500 mN.
analysis method is suitable for the determination of the The peak-load-dependence of the nanohardness can be
Young’s modulus. well described with an empirical equation previously
Note that the best-fit value of intercept in S -axis, established for the description of the ISE observed in
0.021 mN nm 1, is so large that it cannot be reasonably microhardness testing. The value of the load-indepen-
neglected when compared with the smallest value of S dent hardness deduced by analyzing the experimental
used in the regression analysis. This conflicts with Eq. data according to the empirical equation is similar to
(9), which predicts that the S/hc line would pass that of the microhardness measured in the load range
through the origin. Such a conflict can be explained from 1 to 10 kg.
based on the consideration of the indenter tip rounding. (2) The Young’s modulus, E , extracted directly using
The best-fit results of the straight line shown in Fig. 8 the conventional stiffness equation, Eq. (9), also exhibits
can be described as a peak-load-dependence. As peak load increases from 8
to 500 mN, E decreases from 360 to 320 GPa. Such a
S 0:0014hc 0:0210:0014(hc 15): (11) peak-load-dependence may be attributed to the effect of
indenter tip rounding. In order to obtain a reasonable,
Eq. (11) means that, in order to make sure that the
peak-load-independent modulus, a new method was
straight line between S and hc passes through the origin,
proposed in which the modulus is determined directly
a correct factor for the contact depth should be
from the slope of the best-fit straight line between the
incorporated. Such a correction factor has a small value,
initial unloading stiffness, S , and the contact depth at
15 nm, and can be considered as a rough measure of the
peak load, hc.

Acknowledgements

The support from the High-Tech Research and


Development Program of China (863 Program) under
grant 2001-AA-339010 is appreciated.

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