Professional Documents
Culture Documents
environmental activities
1 Quality control
1-1 Quality control system
1-2 Product reliability
1-3 For your safety
2 Environmental activities
1
Quality control and
environmental activities
[Figure 1-1] Quality assurance chart
1. Quality control Division Sales
Customer manager Design, Quality
development Manufacture Inspection control Purchasing Shipment Supplier
Quality manual, division procedures, document control
Quality system
Opto-semiconductor products from Hamamatsu Photonics Education, training
Business policy Sales/equipment/human resource planning
are used in a wide range of fields including medical diagnosis, Quality policy Quality objectives
measurement, industrial instrumentation, automobiles, Marketing research Catalog product proposal
Receiving inspection
Photonics is to “take responsibility as an opto-semiconductor No Good OK
Production Calibration
manufacturer to establish a quality control system that
Nonconforming Inspection
provides products the customer needs and to contribute to product control OK
Product storage
the progress of industry and science.” To achieve this policy,
Delivery Shipment
we are making continuous efforts to supply products that
Complaint Reception Confirmation
Complaint
are even better, cheaper, faster, and gentle on the earth to Root cause investigation, recurrence prevention
satisfy customers. Acceptance Answer Report
Customer Customer
satisfaction satisfaction report
Management review
Quality standardization
Improvement
Corrective/preventive action
Internal quality audits
ISO committee ISO promotion meeting QC meeting PQC meeting
The Solid State Division employs the ISO 9001 Quality
Evaluation of the quality objectives
Management System to standardize quality. In this system,
KOTHC032EC
items that are basic requirements are formalized in a “Quality
Manual” and rules for design, materials, manufacture,
inspection, shipping, and equipment management are placed Design and development
in document form as “Standards” to create a consistent
quality assurance system. On the basis of the requirements from our customers
Figure 1-1 shows a quality assurance chart. and marketplace, we start investigating the possibility of
production in terms of a new or custom-order product’s
functions, reliability, cost, and so forth.
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(2) Output from design and development
Process management
The designers outline appropriate information regarding
the input requirements, purchasing, and production The production process is supervised based on QC process
as well as safety and environmental requirements and charts and work standards to ensure that quality and
create an output document. reliability are at levels planned in the product design. Main
production processes for opto-semiconductors include
(3) Design review
oxidation, photolithography, ion implantation, diffusion,
The output from design and development is reviewed to electrode-forming, and etching in the front end process
determine whether the input requirements can be satisfied. (wafer process), as well as wafer dicing, die bonding, wire
bonding, and sealing in the back end process (assembly
(4) Design and development verification
process).
The output from design and development is inspected To verify that the products meet the required specifications,
to ensure that the input requirements can be satisfied. Hamamatsu performs process inspections and product
This is conducted in the prototype stage of product inspections that check the product electrical/optical
development. characteristics and external appearance. The inspection
(5) Design and development validity verification items, methods, and test criteria are established in the
product specifications. Destructive testing and lot evaluations
The validity of design and development is verified to
are done by product sampling inspections.
ensure that the product meets the requirements of the
Control to prevent contamination of light receiving/emitting
intended application. This includes reliability tests. This
surfaces is essential for opto-semiconductor products. The
is conducted in the mass production stage of product
packing process requires use of special packing materials
development.
and techniques to safeguard light receiving/emitting surfaces
(6) Product authorization from contamination as well as countermeasures to vibration,
impact, temperature/humidity, and electrostatic charges.
Meetings to discuss design (e.g., product specifications),
Table 1-1 shows a QC process chart example.
process (manufacturing and inspection), product (reliability),
Evaluation is made on statistical process control (SPC)
and purchasing (subcontractors and suppliers) are held,
using control charts and the like to determine whether a
and then the product is authorized.
process is stable or is in a controlled state as well as process
capabilities. If the control chart indicates an abnormal
tendency or if the process capabilities are insufficient,
the cause of the problem is investigated and fed back to
maintain and improve the relevant process.
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Dealing with process errors Product identification and traceability
Figure 1-2 shows a system chart for error handling. To establish traceability for determining the production
lot and material lot for the individual products delivered
[Figure 1-2] System chart for error handling
to our customers, records of each process contain columns
Corrective for entering used materials, devices, and production
Fault finder Supervisor Quality control action dept. Purchasing Supplier
information. These records are stored securely as product
Trouble report Confirm details at history information.
location and on items
When necessary, as shown in the following example, the
No
Close Action needed? type number, production year and month, production serial
Yes
In-house process
number, and so on are indicated on the product.
Where problem
occurred?
Not in-house • Example
process
In-house Corrective action
Confirmation
action action
Recurrence
Confirmation
Progress/
prevention check
Purchasing management
Close
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Purchasing management of parts and materials has a large
effect on product quality, so we use a system that judges
When a problem occurs in the production process, which and then registers both the suppliers and the parts and
might cause defects that exceed preset process standards materials for purchasing.
or might adversely affect the product quality, then the We carry out an inspection of the suppliers to check
problematic lot is immediately identified and separated compliance with the quality system, environment system,
from other semi-finished parts. At the same time, the cause green purchasing policy, business continuity capability, and
of the problem is investigated, and the corrective action other factors. We then register those suppliers who meet
that should be taken is decided. Along with confirming the our standards and also make new and periodic supplier
corrective action was effective, we take measures to prevent audits mainly by the purchasing, quality control, and design
the problem from reoccurring. departments.
The semiconductor wafers, electrode materials, chemicals,
Equipment and work environment management gases, and the like used to produce opto-semiconductor
products must be of high purity and high quality. The metal
The work environment in the manufacturing process and ceramic materials, printed circuit boards, and mold
greatly affects product quality and reliability of opto- resin used for packages must be of high precision and high
semiconductor products. Cleanliness, temperature, and quality. These types of purchased items undergo strict
humidity in particular must be strictly controlled. Opto- individual testing and are then registered before they can
semiconductors are produced in clean rooms where be used in our products.
cleanliness is controlled at a high level. To maintain An incoming inspection of those purchased items is then
and control the cleanliness level in clean rooms, strict made based on the required specifications to verify their
control standards are established for factors such as quality. After acceptance, these purchased items are stored
cleanliness, entry/exit methods, work clothing, carry-in in properly controlled locations that meet storage conditions
items, and work procedures. Damage caused by electro- specified in the design standards, and a high level of
static discharge (ESD) can be a serious problem as purchased item quality is maintained [Figure 1-3].
process geometry shrink and diverse packages become
available, so electrostatic countermeasures are enforced.
The department dealing with products requiring
ESD countermeasures sets up special areas that must
comply with ESD control standards and gives workers
instructions in equipment and work site supervision,
work clothing, and handling methods.
Production equipment is verified after modifications or
expansions and also given regular maintenance. Specific
methods for making start-up and periodic equipment
inspections are established to perform preventive
maintenance, and constant efforts are made to prevent
quality problems and keep stable production.
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[Figure 1-3] Purchasing control chart [Figure 1-4] Measuring equipment traceability
Design Quality control Purchasing/subcontractor management Supplier National standard
AIST, NIST*
Public calibration laboratory
Supplier registration
KOTHC0033EB
Acceptance inspection Invoice
Inspection sheet
Judgment [Figure 1-5] Measuring equipment inspection example
No Good (for photodiode)
Fault investigation request Cause investigation
Examination, acceptance Solution response Standard (calibrator) Measuring equipment (source meter)
Investigation, answer Material special Material special
acceptance control form acceptance application
investigation report
system chart
Monthly purchasing report ISO registration
certificate
Site investigation plan,
result report
KOTHC0039EC
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[Figure 1-8] Complaint action chart
Change control
Correspondence section, Division manager,
Customer Sales related section Quality control the responsibility
(design, manufacture) of a management
Changes such as in designs, purchased items, production
Complaint Reception Contents confirmed
methods, and equipment are made in order to improve Information Returned product
product quality, function, reliability, and productivity. confirmation action ledger recorded
Returned product Put on the
action form article card
Change planning is first drawn up, the job schedule from
change setup to completion is clarified, and the planning First report Report Quality judgment/correlativity investigation/making first report
Revised standards
Instruction and training
Change implementation
The Solid State Division provides worker instruction and
Customer
First sample confirmation First sample control/initial production control
training as an active promotion to maintain and improve
confirmation
product quality as well as upgrade employee skills. Employee
Follow-up skills are periodically reviewed, and instruction/training
plans are then drawn up and performed as needed. When a
Close particular job requires obtaining qualifications, then those
KOTHC0026EB are clearly specified, and a system is then set up to certify
employees who meet the requirements of the job.
Complaint handling The types of instruction span many areas including new
employee education, on-the-job training, and safety and
At Hamamatsu we work to speedily resolve customer health instruction. Positive efforts are also made to collect
complaints by way of our complaint handling system. information outside our company in order to upgrade
The contents of the complaint are first checked, and an employee knowledge and skills.
investigation made to find the cause. Besides notifying the
customer of these results, we also use them as feedback in
the design and production processes to prevent a recurrence
of the trouble. If we decide, based on those investigation
results, that the quality control system must be overhauled,
then corrective action is taken and results from that action
are verified [Figure 1-8].
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(3) Reliability testing
1-2 Product reliability
We make reliability tests to verify that a product meets the
specified reliability requirements. In reliability testing for
Reliability product authorization, long-term stress tests are performed to
verify that wear-out failures do not occur under the assumed
(1) Definition of reliability usage environment and within the assumed usage period.
Reliability tests are performed by selecting typical products
In the Glossary of Terms Used in Reliability of JIS, reliability
from among a group of structurally similar products. If
is defined as “the capability of an item to perform a required
needed, this testing is performed individually. For a portion
function under specified conditions for a specified period
of mass-produced products, to verify that the quality set
of time.” We define the term as “the capability to withstand
at the development stage is maintained even after mass
operation under the customer’s usage environment over the
production, mass-produced products are sampled and
warranty period (or longer than the warranty period).”
subjected to reliability tests once a year. Reliability test
(2) Failure region of opto-semiconductor products methods conform to JIS, JEITA, IEC, MIL standards, and
The failure region of opto-semiconductor product can be the like. Some products are also tested according to their
divided into initial failure, random failure, and wear-out product application. For example, optical communication
failure. The curve indicating the change in each failure devices are tested according to the Telcordia GR-468
rate over time is called a bathtub curve. standards. Products including automotive devices are also
subjected to testing specified by the customer.
[Figure 1-9] Bathtub curve example Table 1-2 shows typical reliability tests.
• Initial failure
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Initial failures occur at a relatively early period after starting
the use of a product. It is caused by a design or manufacturing
defect, incompatible usage environment, and so on. Initial
× Acceleration factor
failure rate decreases as time passes. Screening inspections 1
after the initial failure period but before the wear-out failure
period. Failures occur sporadically, and the failure rate is
Failure analysis
nearly constant but never zero.
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[Figure 1-11] Flow chart of typical failure analysis Failure analysis examples
Failure occurrence (1) Leakage between terminals
Collection of failure data Side face observation: reaction areas verified with an
IR-OBIRCH microscope
Verification of the failure phenomenon
Electrical characteristics measurement: semiconductor parameter analyzer and the like
Appearance observation: optical microscope and the like
Feedback
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Cross section observation: cracks verified in the TSV
insulation film (electron microscope; cross section 1-3 For your safety
polisher)
Crack Crack
Handling precautions
Ceramic area
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Damage to the image sensor scintillator (2) Examples of problems caused by the environment
An example in which the surface of the scintillator on
Resin peeling caused by moisture absorption
a chip is damaged due to physical contact with a jig or
An example in which the resin peels off the chip surface
other tool, causing adverse effects on the captured image
due to moisture absorption by the package resin during
soldering, causing degradation in sensitivity due to the
increased reflectance from the photosensitive area surface
caused by the peeling
Electrical and optical characteristics may deteriorate if dust, contamination, or scratches are on
the product. When handling the product, remember to work in a clean place, not apply strong
Metal, ceramic
friction to the window material, and use tweezers and/or gloves. Standard Si photodiode
plastic package
Product deterioration is especially faster at high temperature and humidity than at normal Photo IC
product
temperature and humidity. Avoid storage or usage in an unnecessary high temperature and
humidity environment.
Storage conditions
Unopened product: temperature: 15 °C to 35 °C, humidity: 45% to 75%, up to 3 months
Opened product: temperature: 15 °C to 35 °C, humidity: 5% or less, up to 20 days
Bare chip Open the bag and mount the product in a clean room (class 10000 or better). Chip product
Be careful not to physically damage or contaminate the chip, and exercise extreme caution
when handling.
Evaluate and verify the effects of your mounting method and packaging material on the reliability.
Storage conditions
Unopened product: temperature: 15 °C to 35 °C, humidity: 45% to 75%, up to 3 months
Opened product: temperature: 15 °C to 35 °C, storage in a low-humidity desiccator (no
condensation), up to 3 months
Unsealed Open the bag and mount the product in a clean room (class 10000 or better).
Windowless product
product Be careful not to physically damage or contaminate the chip, and exercise extreme caution
when handling.
Do not make contact with wiring. As a general rule, use an air blower to remove contamination.
Pay attention to contamination and condensation when sealing or bonding a scintillator.
When soldering, pay attention to the solder iron tip temperature, soldering time, and splashing flux.
Pay attention to prevent wiring errors to thermoelectric coolers or thermistors as errors can
TE-cooled damage the devices. Do not use the devices at current or power exceeding their ratings. Product with built-in
type Use heatsink with sufficient heat dissipation capacity for cooling. Keep the thermal resistance thermoelectric cooler
between the element and heatsink as small as possible (use heat dissipation sheets or silicon grease).
Apply measures to workplace and facilities according to the extent of deterioration that may
Electrostatic occur. Such measures include using a conductive mat and grounding the equipment. Compound semiconductor
sensitive type When handling the product, apply measures according to the extent of deterioration that may occur. Image sensor
Such measures include using an ionizer to remove static electricity and wearing a grounded wrist strap.
For UV light Avoid unnecessary exposure to UV light or X-rays as long-term exposure to them cause Radiation detector
and X-ray deterioration (e.g., increased dark current and sensitivity deterioration) in the product X-ray image sensor
measurement characteristics. Flat panel sensor
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Sensitivity degradation caused by high-energy UV light
An example in which the sensitivity of the light incident 2. Environmental activities
area degrades as a result of KrF excimer laser striking and
damaging the Shottky film
Environmental idea
Environmental auditing
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[Figure 2-2] Infrared detectors used in greenhouse
Activities to reduce environmental risks gases observing satellite “Ibuki”
(a) InGaAs PIN photodiode (b) InGaAs linear image sensor
The Solid State Division constantly makes improvements
that takes into account the burden on the living environment
including the atmosphere, water quality, and noise and
strives to prevent environmental pollution.
The Solid State Division furnishes manuals for handling (2) Environmentally conscious products
accidents and disasters and regularly performs emergency
As part of our global environmental conservation efforts
training according to each department’s business operation.
and reduction of burden on the environment, we apply
environmental measures on the products, develop new
Environmental impact of business activities products and new technologies, and promote the sales of
environmentally conscious products.
We assess the impact on the environment by our business
activities and engages to reduce greenhouse gas, drainage, Example: CCD area image sensor S12071
waste, and other burden placed on the environment. With CCD area image sensor S12071, dark current noise
has been suppressed to 1/20 of that in previous products.
Addressing environmental issues through products This has allowed the cooling temperature of the built-in
thermoelectric cooler to be increased, which has reduced
We work to make our products more compact, power the power consumption to 1/7 of that in previous products.
efficient, long lasting, energy efficient, and so on according Moreover, the incorporation of new packaging technology
to their applications so that the burden placed on the has significantly increased the air tightness and moisture
environment is reduced. proof reliability and prolonged the service life of the product.
(1) Products contributing to the environment [Figure 2-3] CCD area image sensor S12071
Hamamatsu manufactures products that contribute to
environmental measurement of atmosphere, water quality,
and the like, content analysis of environmental management
substances, and energy reduction of ordinary electric
equipment.
1/7
1.2
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Conforming to regulations regarding the chemicals (2) Waste reduction, separation, and recycling
contained in our products From the standpoint of reducing the burden on the
environment and using resources effectively, the Solid
Hamamatsu Photonics has established an “Environmental State Division is promoting 3Rs (reduce, reuse, and recycle)
Control Substance Management Standard” to control the and proper treatment as its fundamental policies and is
chemical substances contained in products. We are actively engaged in activities under the slogan “Zero Emission.” In
engaged in complying with the EU RoHS directives and addition, to enforce separation of waste produced, a waste
regulations on chemical substances contained in products. separation database has been established and is running
on our company’s intranet.
(1) Chemical substances regulated by RoHS
(3) Energy saving and reduction of carbon-dioxide emissions
For each product, we control the amount of substances that
are specified in IEC62474 including the six substances (lead, We at the Solid State Division are expanding our energy
mercury, cadmium, hexavalent chromium, polybrominated saving activities in an aim to reduce the energy used by
biphenyl, and polybrominated diphenyl ether) regulated by business operations by at least 1% per unit of sales compared
RoHS directives. to the previous year. In order to prevent global warming, we
Judgment on whether a product will comply with RoHS are also actively working to reduce the greenhouse gases,
directives is clearly specified in the quotation sheet when such as non-energy source carbon-dioxide, that are used in
drawing up an estimate. the manufacturing process .
Green purchasing
Examples
· Management of usage quantity of chemical substances
subject to the PRTR Law
· Collection of SDS information and disclosure within our
company
· Activities to reduce VOC emissions
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