2018/1/16 Vibration Criterion (VC) curves | Minus K

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Vibration Criterion (VC) Curves

Amplitude1 Detail
Curve Criterion μm/s Size2 Description of Use
(μin/s) μm

Distinctly perceptible vibration. Appropriate to workshops and

Workshop (ISO) 800( 32,000) N/A
non-sensitive areas.
Perceptible vibration. Appropriate to offices and non-sensitive
Office (ISO) 400 (16,000) N/A
areas
Barely perceptible vibration. Appropriate to sleep areas in most
instances. Usually adequate for computer equipment, hospital
Residential Day (ISO) 200 (8000) 75
recovery rooms, semiconductor probe test equipment and
microscopes less than 40x.
Vibration not perceptible. Suitable in most instances for surgical
Op. Theatre (ISO) 100 (4000) 25 suites, microscopes to 100X and for other equipment of low
sensitivity.
Adequate in most instances for optical microscopes to 400X,
VC-A 50 (2000) 8 microbalances, optical balances, proximity and projection
aligners, etc.
Appropriate for inspection and lithography (including steppers) to
VC-B 25 (1000) 3
3 μm line widths..
VC-C 12.5 (500) 1-3 Appropriate standard for optical microscopes to 1000X,

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2018/1/16 Vibration Criterion (VC) curves | Minus K

inspection and lithography inspection equipment (including

moderately sensitive electron microscopes) to 1 μm detail size,
TFT-LCD stepper/scanner processes.
Suitable in most instances for the most demanding equipment
VC-D 6.25 (250) 0.1 - 0.3 including electron microscopes (TEMs and SEMs) and E-Beam
systems..
A challenging criterion to achieve. Assumed to be adequate for
the most demanding of sensitive systems including long path,
VC-E 3.12 (125) < 0.1 laser-based, small target systems, E-Beam lithography systems
working at nanometer scales, and other systems requiring
extraordinary dynamic stability.
Appropriate for extremely quiet research spaces; generally
VC-F 1.56 (62.5) N/A difficult to achieve in most instances, especially cleanrooms. Not
recommended for use as a design criterion, only for evaluation.
Appropriate for extremely quiet research spaces; generally
VC-G .78 (31.3) N/A difficult to achieve in most instances, especially cleanrooms. Not
recommended for use as a design criterion, only for evaluation.
NIST-A criterion is identical to the VC-E curve at frequencies
above 20 Hz, but maintains constant displacement at frequencies
NIST-A
below this. 0.025 μm or 25 nm between 1 and 20 Hz; 3.1 μm /s
(125 μ in /s) between 20 and 100 Hz
NIST-A1 criterion requires an RMS velocity of 3 μm/sec (118
NIST-A1 μin./sec) for frequencies less than 4 Hz, and 0.75 μm/sec (29.5
μin./sec) velocity for frequencies 4 Hz < f < 100 Hz
Appropriate for extremely quiet research spaces; generally
VC-H .39 (15.63) N/A difficult to achieve in most instances, especially cleanrooms. Not
recommended for use as a design criterion, only for evaluation.
Appropriate for extremely quiet research spaces; generally
VC-I .195 (7.81) N/A difficult to achieve in most instances, especially cleanrooms. Not
recommended for use as a design criterion, only for evaluation.
Appropriate for extremely quiet research spaces; generally
VC-J .097 (3.9) N/A difficult to achieve in most instances, especially cleanrooms. Not
recommended for use as a design criterion, only for evaluation.
Appropriate for extremely quiet research spaces; generally
VC-K .048 (1.95) N/A difficult to achieve in most instances, especially cleanrooms. Not
recommended for use as a design criterion, only for evaluation.
Appropriate for extremely quiet research spaces; generally
VC-L .024 (0.98) N/A difficult to achieve in most instances, especially cleanrooms. Not
recommended for use as a design criterion, only for evaluation.
Appropriate for extremely quiet research spaces; generally
VC-M .012 (0.49) N/A difficult to achieve in most instances, especially cleanrooms. Not
recommended for use as a design criterion, only for evaluation.
1As measured in one-third octave bands of frequency over the frequency range 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C
through VC-G)
2The detail size refers to line width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and
pharmaceutical research, etc. It is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.
The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone
knowledgeable about applications and vibration requirements of the equipment and processes be sought.
This table is a reference of Colin Gordon Associates ,except (3&4).3Vibro-Acoustic Consultants,4Purdue University Libraries.

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