Scientific / Metrology Instruments

Scanning Electron Microscope

JSM-IT500 Series
 To the next generation
Fast and Easy Analysis!

Features of JSM-IT500
■ Zeromag for fast navigation

■ Live Analysis* real time EDS analysis during observation.

SMILE VIEW Lab for integrated management of image & analysis data
TM
■

■ Guided operation! Specimen Exchange Navi * Standard in the A/LA version.

1 | JSM-IT500 Series JSM-IT500 Series | 2

 Fast and Easy Analysis!
Equipped with Live Analysis software*1, the JSM-IT500 facilitates any analyses

from specimen loading to report generation.

■ Zeromag
■ Zeromag ■ Integrated data
■ Integrated data management
management
You can view a video 　 software
via this QR code.
Main Screen List of captured images
Displays Holder Graphics or CCD Image*2
Integrated report generation
Locate the specimen area or specify analysis Select and review images and analysis results through
positions with Holder Graphics or CCD image.*2 the data management area. Generate a report with a

You can rapidly search the specimen area. It is also easy to single click.

specify positions for multiple-field serial analysis.

Holder Graphics CCD image*1 acquired with

Stage Navigation System
Element

■ Live Analysis
■ Live Analysis
Data
management
Only for A/LA
button
Display of elemental composition and "Alert" on live image

A real time EDS analysis*1 during observation Spectrum

With our Analytical series, the embedded EDS system shows Report example

a real time EDS spectrum during image observation. *1 This function is standard in the A/LA versions.
*2 To take a CCD image, SNS (option: p17) is required.
Display of elemental composition and“Alert”on live image.

Conventional SEM　ー Example using multiple software systems ー

　There were many steps up to report generation using the conventional SEM.

Search the specimen area SEM observation EDS analysis Report generation
Repeat the same
If there are multiple specimens, Find the target area at low magnification step for the number Select the area found by SEM and perform analysis. Paste image or EDS result into Report
take photos or notes. and acquire a high-magnification image. of areas needed. Save each data by naming the data one by one. generation software.

Sample A
Sample 1
Date
□□□□
□□

B-2
□□□

Magnify. Capture
□□□□□

D C
Paste
B-1
one by
A one.

Sample 2

Search the specimen area while Take a photo at high magnification. Area found by SEM Analyzes data by EDS software. PC folder Report generation software
viewing notes.

3 | JSM-IT500 Series JSM-IT500 Series | 4

True Integration of Optical and SEM imaging

True Integration of Optical and SEM imaging

■
■ Zeromag
Zeroma g

New functions to easily search the specimen area

Features of Zeromag
・Seamless transition from optical
Smooth operation up to high magnification observation to SEM image. The JSM-IT500 is a revolutionary SEM that enables observation to high magnification with fewer steps.
・Can pre-select multiple analysis
points across your specimen set. ● Secondary electron image
Zeromag is a function which links the SEM image with the Holder Graphic or CCD
・Displays areas analyzed for
Image* where all are linked to the stage coordinates. This facilitates navigation
1
easy review or fast return for This example shows a high magnification image of iron rust which highlights fine surface morphology of the rust particles.
with seamless transitioning from the optical to SEM image. additional study.

Zeromag
Magnify OM image Magnify SEM image Magnify SEM image

200 μm

10 μm

Specimen : Iron rust. 50 μm

Accelerating voltage : 25 kV 　Magnification：× 50,000
High-vacuum mode. Secondary electron image.
Zeromag image displayed on the main screen. ● Backscattered Option for BU/A
　 electron image Standard for LV/LA

Backscattered electron composition image of a

● Scan system for better image quality at low accelerating voltage

Montage
Montage
cemented carbide cross section. Differences in You can select a scan system, which adopts fast
crystal orientations (channeling contrast) of each frame-accumulation to reduce specimen charging.

Automated simple large-area observation Montage is an effective function to acquire detailed information and tungsten carbide particle can be observed from a Thus, higher-magnification observation of charge-

for identifying foreign materials over large areas. backscattered electron composition image at low susceptible specimens or beam-sensitive specimens is
and analysis*2 can be made using Zeromag. With Zeromag, it is easy to set up one or more montage areas accelerating voltage. facilitated even at low accelerating voltage.

for imaging and analysis. “tilt correction”,“field overlap” and

“Autofocus point setting”functions are built in.

1 μm 1 μm
Specimen : Cemented carbide. Uncoated. Specimen : Hollow fiber. Uncoated.
Accelerating voltage ：5 kV　Magnification：× 10,000 Accelerating voltage：1.5 kV 　Magnification：× 10,000

200 μm High-vacuum mode. Backscattered electron composition image. High-vacuum mode. Secondary electron image.
Montage setup with Zeromag. Montage result. 4 × 4
(Left : Backscattered electron composition image, Right : Ca map) *1 : To take a CCD image, SNS (option) is required.
Specimen : Concrete. Accelerating voltage :15 kV *2 : This function is standard in the A/LA versions.
High-vacuum mode. Area : Approx. 4 mm × 3 mm

5 | JSM-IT500 Series JSM-IT500 Series | 6

True Integration of Optical and SEM imaging

Low
Low vacuum
vacuum mode
mode Only for LV/LA Measurement
Measurement functions
functions

Differential pumping, performed near the objective lens, has greatly improved the image Several measurement functions are built in.
quality in low vacuum mode. With a pressure range up to 650 Pa, a wide variety of sample
types can be studied in their native state.
Measurement
Ultra low vacuum image Option for LV/LA
Low-vacuum
Measured values of
Measurements are performed on the metal particles
observation screen, and their results (distance,
Specimens containing a large amount of water can be secondary electron image angle, area, etc.) can be recorded and saved on
Angle

especially sensitive to vacuum conditions in the SEM

SEM images.
chamber. These types of specimens are traditionally A low-vacuum secondary electron image
challenging to observe in conventional SEM modes without provides shaper details of the specimen
special treatment. With the extended pressure range (up surface even in low vacuum mode.
to 650 Pa) of our JSM-IT500LV/LA series, these types of
specimens are easily observed.
Area of circle Area of
polygon
50 Pa 500 Pa

Specimen : Metal particles.

3D imaging
50 μm 50 μm 1 μm
Specimen : Cement hydrate.　
Specimen : Mildew fungi. Creation of 3D image and analysis options.
Accelerating voltage ：10 kV　Magnification： × 10,000
Accelerating voltage ：15 kV　Magnification： × 200
Low-vacuum mode ：30 Pa
Low-vacuum mode：50 Pa, 500 Pa　Backscattered electron composition image.
Low-vacuum secondary electron image.
● 3D measurement image Option

Dedicated software for 3D measurement. A 3D image

can be created from two SEM images. The topographic
status of the specimen surface can be measured using
the 3D image.

Observation of water droplet

Cool stage* & Vacuum pressure of 650 Pa ● Anaglyph
Step by step guide to collecting images for
When you observe a cooled specimen (0 ℃ with the creation of an anaglyph image.
cool stage) at a pressure of 650 Pa, water droplets
can be observed.

The figure at the right shows an example of a water

droplet on a water-repellent textile using the Aqua
Cover method*.

Section height map

Specimen : Water droplet on a water-repellent textile.

Height
Accelerating voltage ：30 kV　Magnification： × 80
Low-vacuum mode ：650 Pa　Backscattered electron composition image.
200 μm
Specimen : Jumping spider
* Cool stage and Aqua Cover method are options. (salticid) Path length

7 | JSM-IT500 Series JSM-IT500 Series | 8

Seamless SEM and EDS

Seamless SEM and EDS

■ Live Anal
■ Live Analysis
ysis Only for A/LA
Analysis detail display screen
Real time display of elemental analysis results Features of Live Analysis Qualitative and quantitative analysis, collect spectral maps and line scans...through the Analysis Detail display screen. Even
during observation ・ Always displays the characteristic during an analysis, you can generate reports from acquired data (through the Data management screen, p17).
　X-ray spectrum.
With our Analytical series, the embedded EDS system shows a real ・Display of the main
time EDS spectrum during image observation. You will easily find 　constituent elements.
・Alert display of elements of
elements of interest and unexpected elements. Elemental map analysis screen
　interest.

Electron microscope operation screen Periodic Table Superimposition

You can confirm spectra and the main constituent elements during observation.
Each analysis area, linked to the corresponding stage coordinates, is displayed on Holder Graphic image or CCD image.*1

Switch between a composite

Spectrum
map view or periodic table.

Map

You can also switch from“Map”screen

to the Electron microscope operation screen.
Spectral analysis screen

SEM Image Periodic Table

Quantitative
Results

You can also switch between

Spectrum
“Periodic Table”and
“Quantitative Results”.

Element Spectrum
Single-click enables
The main elements existing in the measurement area are The characteristic X-ray
you to switch between
displayed. You can display an“Alert”by specifying an element. spectrum from the
the Electron microscope
measurement area and
operation screen and
automatic qualitative analysis
analysis detail display
results are always displayed.
screen.

● EDS ● Relocating analysis areas ● Pinpoint Navi

The Energy Dispersive X-ray Spectrometer (EDS), an optional attachment The stage position and magnification are linked with the Automatic serial analysis can be made by specifying
to the Scanning Electron Microscope (SEM), performs elemental analysis analysis data. Return to any analysis area for additional multiple areas in advance. Pinpoint Navi detects small
by detecting characteristic-rays generated from a specimen due to electron study. image shifts by probe tracking, for precise repositioning
beam irradiation. of the analysis area.

* To take a CCD image, SNS (option) is required.

9 | JSM-IT500 Series JSM-IT500 Series | 10

Seamless SEM and EDS

Qualitative
Qualitative &
& quantitative
quantitative analysis
analysis

You can directly specify the analysis positions or analysis points in the SEM field by clicking on
the Electron microscope observation screen.
Specifying multiple analysis positions or multiple analysis points on multiple SEM fields with
Zeromag, facilitates automatic serial analysis. Accuracy improvement for qualitative analysis

Identification of elements ● Visual Peak ID (VID)

This function enables you to confirm whether the constituent elements are correctly identified in the qualitative analysis
● Qualitative analysis result. A spectrum is reconstructed based on the X-ray intensity of the elements identified.
Automatic qualitative analysis is performed during observation. Double-clicking on small peaks identifies the corresponding
elements. Identification of elements can be made during the spectral acquisition.

BiMa
BiMa
● Area-specifying types

PbMa

BiMb
BiMb
The peak shape of Re-examination at the Bi peak
To specify the analysis region, various types are Point Whole Area

PbMb
the Bi X-ray lines is position indicated the presence
available. They include “Point”,“Area”, and also Performs spectral Acquires a spectrum from

SnLa
SnLa
found to be different of Pb. When Pb was added to

CdLa
CdLa
analysis of a the whole observation
“Particle”that allows you to specify the analysis area Whole between the acquired the analysis results, the two

CdLb
CdLb

BiMz
BiMz
Point specified point. area and/or a specified
Area

BiMr
BiMr
from the intensity difference in an image. spectrum (green) and peak shapes matched. From this
area.
the calculated spectrum result, Pb was confirmed to be
(white). contained in the specimen.
Particle Polygon Ellipse Free Line
Specifies areas Specifies the inside Specifies an area Specifies an elongated
with the same of an indefinite shape inside a circle. region (grain boundary,
Particle image intensity. Polygon enclosed by a circle. Ellipse Free Line etc.).
Drift compensation built in

● Probe tracking
● Analysis example
With long data acquisitions, the system periodically compares the electron microscope image at analysis start with the
current image, so as to maintain the same analysis area. This capability helps you to monitor any change in a specimen or
003
SiKa

specimen drift during long acquisitions.

001
SiKa
CuLa
OKa

CuLa
OKa
OKa

002
FeLa

0.01
CKa

Line
Line analysis
AiKa

PKa

analysis
CKa

003
CKa

002
10 μ m 001
Specimen : Chrysocolla.　Accelerating voltage ：15 kV 　 Finding the concentration change of elements along a line
Magnification：× 700　High-vacuum mode：C coating.　Backscattered electron composition image.

Line analysis performs elemental analysis along a line set on an electron microscope image. The X-ray intensity of the
specified elements is plotted to show the change in concentration across the line. You can change elements to show during
or after completion of spectral acquisition.

Examination of the element volume

● Standard-less quantitative analysis Oblique

line
When you click the quantitative analysis result tab on the
analysis detail display screen, the quantitative analysis
results will be displayed. ZAF correction is built in and
PRZ method is available. The quantitative analysis result
is displayed as the mass concentration and the ratio of

SiKa
the number of each element.

OKa

CuLa
● Standard quantitative analysis

AIKa
CKa

KKa
The ability to perform quantitative analysis with
standards is also built in.

11 | JSM-IT500 Series JSM-IT500 Series | 12

Seamless SEM and EDS

Elemental
Elemental map
map

The elemental map allows you to acquire the elemental distribution from the
whole observation screen or in an area specified in the observation screen. Since
Whole Real time analysis using elemental map
the spectral information is saved at each pixel, you can acquire map data sets Area
without specifying elements as well as add or modify elements during and after
● Pop-up spectrum
data acquisition. Display of the net map can be made in real time.
Since the stored map has spectral information, you can extract spectra from anywhere within the map data set. If there is
an area that was not displayed in the specified elemental map, spectral display of that area is performed, thus allowing for
Displaying the elemental
confirmation of whether or not you missed elements.
distribution with selected area

● Count map

CdLa
The count map displays the X-ray intensity

PbMb
BiMa
distribution from the specified energy region. The

PbMa

CdLb
whole map enables you to acquire the distribution

CdLb2 SnLa
BiMb
from all the area. The area map allows for

SnLb
CdMz

PbMz

SnLb2
SnMz

BiMz

BiMr

SnLr2
SnLr
OKa
acquisition of an SEM image and elemental maps in
a specified area.
20 μ m Pop-up spectrum enclosed by a Blue square
Backscattered electron
composition image
Specimen : Wood metal.

Backscattered electron composition image and elemental maps

Specimen : Chrysocolla
Locating the positions of an
elemental map on an SEM image

Improved accuracy of elemental map ● Color-overlay display of an elemental map

● Net map
The Net map separates spectral peaks at each
pixel and shows an elemental map with a reduced
effect of close peaks. Compared to the count map
The system allows you to overlay elemental maps on
● Comparison of Intensity map and Quantitative map the SEM image in real time. In the area where multiple
Spectral peaks of Cd-L β (3.313 keV), Cd-L β 2 (3.528 keV) and elements overlap, the area is displayed with a composite
Sn-L α are close to each other. Thus in the intensity map, it is color. Red Cd-L
difficult to separate Cd from Sn. Green Sn-L

which unavoidably reflects the peak intensity of Applying the quantitative map enables you to confirm the inherent Blue Pb-M
Yellow Bi-L
other elements close to a specified element, the Sn distribution.
Net map enables a real-time display of a inherent- Multi-color overlay display
Specimen : Wood metal
intensity elemental map even from a specimen
containing various elements. Cd

Confirming the elemental Ca-K Ca-K

distribution in a short time

● Real-time filter
● Quantitative map The system allows for image processing
The quantitative map, which adds correction 20 μ m during a map acquisition to improve the signal
Cd intensity map Peaks of Cd and Sn
calculations to the Net map, shows a map with to noise ratio. This feature provides fast
10 μ m 10 μ m
quantitative values. confirmation of the element distribution.
Sn Sn
In addition to the Net map that shows the inherent-
Fe-K Fe-K
intensity elemental map, the quantitative values
can be displayed with image contrast.

Specimen : Black ore

Dwell time： 0.1 ms
Number of frames : 4 frames
20 μ m 20 μ m Pixels : 512 × 384 pixels
Sn intensity map Sn quantitative map
10 μ m 10 μ m
Specimen : Wood metal Real-time filter ON Real-time filter OFF
Average（5 × 5）

13 | JSM-IT500 Series JSM-IT500 Series | 14

Seamless SEM and EDS

Particle
Particle analysis
analysis DrySD
DrySDTM Detector
TM
Detector

Automatic analysis for particles and ● Example of automatic analysis (asbestos)
foreign materials The system extracts the target particles from the
specimen and performs automatic EDS analysis of each
particle to determine whether or not the analyzed particle
● Particle analysis　　
is asbestos. In addition, the system identifies the type of
Particle analysis can be performed based on the intensity asbestos from composition, and classifies the particles
difference in a backscattered electron composition image into the type of asbestos and performs statistical
as well as by size and shape. This feature extends to processing.
applications such as inclusions in addition to particles After the analysis completes, you can re-confirm each
collected on filters. particle and analysis results.
Particle analysis conditions 0001
Total 33
Crocidolite 9
Amosite 1
Chrysotile 4
Unknown 19
The DrySDTM Detector (Dry Silicon Drift Detector: SDD) does not require liquid nitrogen, unlike
the conventional Si(Li) type EDS detector. Thus, maintenance is easier along with faster speed
to analysis.
In addition, DrySDTM Detector performs high X-ray count analysis without degrading high energy
resolution. A large detection area DrySDTM Detector provides elemental analysis at small probe
currents. The JSM-IT500 can support multiple DrySDTM Detectors for even higher throughput or
minimization of shadowing with topographic specimens.
Features of DrySDTM Detector
・Fast analysis. Power on and ready for
operation in a few minutes.
・No liquid nitrogen is required.
・Capable of analysis at large probe currents
and high count rates while maintaining
high energy resolution.
・Improved resolution for low energy regions.

Classified asbestos

● Statistical processing
TM
For each particle, EDS analysis results and particle-shape Specifications for DrySD Detector
information (particle diameter, area, etc.) are recorded.
You can create graphs or tables from the information for Detection area Energy resolution Detectable elements
statistical processing.
10 mm , 30 mm
2 2
129.0 eV or less Be to U

60 mm2, 100 mm2 133.0 eV or less B to U

Particle analysis result

20 μ m 10 μm 50 μ m
CKa

CKa

CKa
OKa

OKa

OKa
MgKa

SiKa

SiKa
FeLa

FeLa
MgKa

NaKa
SiKa

MgKa
FeLl

FeLl

Chrysotite Amosite Crocidolite

15 | JSM-IT500 Series JSM-IT500 Series | 16

Seamless data generation

Seamless data generation

Integrated data
■ Integrated data management software 　SMILE VIEWTM
management software TM Lab
User layout
TM
SMILE VIEW Lab is a fully integrated data management software which links the CCD image*1, SEM
images, EDS analysis results*2 and corresponding stage coordinates for fast report generation or re-call of You can create templates for your reports.

sample position for further study.

TM
SMILE VIEW　Lab Data management
TM
Features of SMILE VIEW Lab
screen
・Performs integrated data management of CCD
TM
image*1 data, SEM image data and EDS analysis
SMILE VIEW Lab Data management screen allows you to result*2.
execute integrated management of all the data. This data ・Allows for immediate understanding of the data for
manager saves the data, which links the observation position, each field.
observation & analysis results, and a low magnification image ・Enables various data search.

acquired by Holder Graphic or CCD image*1. You can review or

re-analyze already-acquired data and export them to a report.

Names of each field are displayed. Data search is enabled from specimen Positions of each field are
name, creation time, data type, etc. displayed on Holder Graphic or
CCD image*1. User layout

Automatic layout function

検索
This function performs automatic layout depending on the data type (images, spectra, etc.). If the data set is large,
additional pages are allocated automatically.

Automatic layout

Offline analysis
■ Offline
■ analysis software
software Option

Improving productivity

Offline analysis software is available. You can process all your data offline an generate reports.
Data is displayed in list form, which includes analysis You can create quantitative maps and extract spectrum (Pop-up Spectrum) from elemental mapping.
data, quantitative analysis result of elemental map,
spectra, etc., in the selected fields.

*1 To take a CCD image, SNS (option) is required.

*2 This function is standard in the A/LA versions.
17 | JSM-IT500 Series JSM-IT500 Series | 18
Specimen Exchange Navi & Large analytical chamber

Specimen Exchange Navi & Large analytical specimen chamber

■ Safe
■ Safe and
and easy!
easy! Specimen
Specimen Exchange
Exchange Navi
Navi

Guided operation from sample introduction to observation

■ Specimen exchange
■ Specimen exchange
Maximum specimen size : 200 mm dia.
Maximum specimen height : 90 mm (H)

Draw-out method

The stage is mounted in the chamber which

allows a user to secure large or odd shaped
specimens on the stage and position the area of
interest under the objective lens prior to closing
the door and evacuating the chamber.

Set sample height Navigation flow

● Safe specimen exchange　　 ●  ecipes built in to automatically set observation

When venting chamber, the stage is automatically
set to the exchange position for fast and easy
specimen exchange. Can input a height offset for
tall samples.
R ●“Image
 at designated magnification”of the target
conditions　 area is displayed immediately after the completion Load lock chamber (LLC)
During vacuum evacuation, the navigation flow allows you of chamber evacuation.
Load lock chamber (LLC, pre-evacuation chamber)
to acquire CCD image*, specify the observation field and set a state where :
is available for even faster specimen exchange.
observation conditions using Recipes. ・Target observation area was specified.
・Observation conditions were set. Option
* To take a CCD image, SNS (option) is required. ・Image adjustment was executed.

Specimen Navigation
■ Specimen
■ Navigation Switch between Holder Graphics view,
Stage Navigation System or Chamber
Safety Scope view with a quick swipe on the

Functions to support specimen navigation mechanisms built in

display.
● Chamber scope (CS)
● Holder Graphics ● Stage Navigation System (SNS) ●  ntering specimen
E Camera which displays the
Holder Graphics allows you to immediately confirm the The specimen position can be set by acquiring a color height relationship of the specimen
specimen position by showing the current specimen image of the specimen and double-clicking the image. to the detectors and objective
User can input specimen
position including the specimen tilt and rotation. Displaying the color image on the Zeromag screen allows lens pole piece.
height offset to further
for an easy search of the specimen area.
enhance stage safety limits.
Swiping

Option
Option

CCD image area：

10 × 10 cm
Number of pixels：
5,000,000 pixels
Digital zoom：To × 20
Top view Side view

19 | JSM-IT500 Series JSM-IT500 Series | 20

Specimen Exchange Navi & Large analytical chamber

Maintenance & ヘルプガイド

Maintenance
Multi-purpose chamber
■ Multi-purpose
■ chamber

Filament
Several attachments can be placed
WDS
Filaments are pre-centered and require no centering by
On this multi-purpose chamber with 11 ports, the EDS 1 the operator.
location of each detector is optimized. EDS, EBSD and
WDS can be performed at the same working distance (10
mm).
Multi-purpose
port x2
The two EDS ports and the EBSD port are coaxially LSED port
arranged, perpendicular to stage tilt, thus EDS/EBSD
can be performed simultaneously and the complete Gun alignment
opposing type Dual EDS is available.
Fully automated gun alignment is built in.

EBSD

EDS 2

By simply inserting the filament into the Wehnelt and fixing it,
Example of Multi-purpose chamber with two EDSs,
the filament is automatically aligned to the center axis.
WDS and EBSD

Help guide
■ High-speed,
■ High-speed, high-precision
high-precision motor
motor stage
stage and
and high-speed
high-speed vacuum
vacuum system
system The help guide, makes it easy to understand operation methods of SEM and EDS, as well as maintenance procedures.
With this guide, novice users can quickly achieve results.

High-speed, high-precision motor stage

The JSM-IT500 comes with a 5-axis motor stage that Help guide
accommodates a maximum load of 2 kg.

● High-speed, High-precision
● Maximum load : 2 kg

High-speed evacuation

The specimen chamber evacuation takes approximately

2 minutes and 50 seconds*. The newly designed vacuum
system with the turbo molecular pump and the foreline
trap achieves a clean vacuum.

●  vacuation : Approximately 2 minutes

E
and 50 seconds*

Condition setting Analysis Maintenance

*The evacuation time depends on the room environment and specimen type or shape.

21 | JSM-IT500 Series JSM-IT500 Series | 22

Analysis Examples of Foreign Materials, Comparable to Simple Analysis with Optical Microscope

Analysis Examples of Foreign Materials, Comparable to Simple Analysis with Optical Microscope
Seamless analysis of foreign materials on a filter using JSM-IT500
*1 To take a CCD image, SNS (option) is required.
When you use a JSM-IT500 equipped with a CCD camera*1, the use of Zeromag enables you to search the specimen area from the color image. *2 Standard in the A/LA version.
Live Analysis facilitates determination of foreign materials and also speeds up routine tasks.
Analyzes during observation.

① ② ③

Main element display ⇒ An unexpected foreign material

Foreign material is confirmed.

Alert for an element of interest (yellow-green) ⇒ A foreign
material containing an element of interest is confirmed.

●If an element of interest is not detected. Return to ① .

　Move the SEM field to the next foreign material using Zeromag.
● Maximum load : 2 kg
● If an unexpected foreign material is found. Proceed to ④ .
● If an element of interest is detected.

Acquire a CCD image*1 of the filter mounted on a 3-inch Magnify the CCD image*1 using Zeromag to confirm a
When you double-click the foreign material to move it to the center
holder. foreign material.
of the Main screen, an SEM image is displayed and Live Analysis*2 starts.

④ ⑤ ⑥ ⑦
(A)

(B)

Spc_001 +

(A)　Click the Point icon button. Repeat steps ① to ④ to set positions for analysis of all After the completion of the analysis, click the Data A report is automatically generated.
(B)　Click a foreign material on the SEM image. the foreign materials. When you click the Start button, management button to display the Data management screen. The operator can customize the layout of the report.
These steps set the analysis positions. automated multiple-area serial analysis is performed Select an analysis result from which you intend to generate a
and the analysis results are stored. report and then, click the Report button.

Functions to facilitate observation and analysis

● Recipe function ● Auto functions

This function allows for setting of SEM conditions automatically. Standard recipes enable you to set the conditions depending The automatic functions enable you to observe images with simple operation. Single-click automatically adjusts Focus,
on the specimen type. Custom recipes enable you to save the conditions of routine tasks. Contrast, Brightness and Stigmator.
Photography
Observation example using the standard recipes

Auto
Specimen : Granule　
Accelerating voltage：7 kV
Direct magnification：× 1,000
High-vacuum mode

Select Backscattered electron

composition image
① Select a specimen area. In this ② Select a specimen type from the left screen. ③ Appropriate conditions are automatically 10 μ m 10 μ m
image, plant leaves (biological Next, check the specimen status, etc., in the set and image is displayed.
specimen) is selected. right screen.

23 | JSM-IT500 Series JSM-IT500 Series | 24

 Technical DATA
JSM-IT500 Series　Can be equipped in the following 4 configurations : BU (Base Unit) / A (Analysis) / LV (Low Vacuum) / LA (Low Vacuum & Analysis).
Main Specifications
High vacuum mode
Low vacuum mode* 1
Direct magnification
Displayed magnification
Electron gun
Accelerating voltage
Probe current
LV pressure adjustment* 1
Objective lens aperture
Automatic functions
Maximum specimen size
Specimen stage
Montage function
Measurement-position
coordinate display
Standard recipes
Image mode
Pixels for image acquisition
OS
Observation monitor
EDS functions*2
Measurement functions
Data management function
Report generation function
Language switch
Vacuum system
*1) Standard in JSM-IT500LV/LA.
*2) Standard in JSM-IT500A/LA.
*3) An optional holder is required.
*4) For JSM-IT500A/LA, EDS software is installed on same PC as the
microscope base unit. Thus in this case, a PC dedicated to EDS
is not required.
*5) The optional probe current compensation unit is required.
Automatic monitoring of the probe current is possible only when
EDS is connected to the microscope PC.
25 | JSM-IT500 Series
3.0 nm (30 kV), 15.0 nm (1.0 kV)
4.0 nm (30 kV, BED)
× 5 to × 300,000
(Defined with a display size of 128 mm × 96 mm)
× 14 to × 839,724 (on the monitor)
(Defined with a display size of 358 mm × 269 mm)
W filament, Fully automatic gun alignment
0.3 kV to 30 kV
1 pA to 1 μ A
10 to 650 Pa
3-stage, with XY fine adjustment function
Filament adjustment, Gun alignment,
Focus /Stigmator /Brightness /Contrast
200 mm dia. × 75 mm height*3
200 mm dia. × 80 mm height*3
32 mm dia. × 90 mm height*3
Large eucentric stage
X : 125 mm, Y : 100 mm, Z : 80 mm
Tilt : –10 to 90°, Rotation : 360°
Built-in as standard
200 mm dia.
Built-in (includes EDS condition*2)
Secondary electron image, REF image,
Composition image*1, Topographic image*1,
Stereo-microscopic image*1, etc.
640 × 480, 1,280 × 960,
2,560 × 1,920, 5,120 × 3,840
Microsoft® Windows® 10 64bit
23-inch touch panel
Refer to EDS specifications (p26)
Built-in (distance between 2 points, distance
between parallel lines, angle, diameter, etc.)
SMILE VIEWTM Lab
SMILE VIEW TM
Lab
Operable on UI (Japanese/English)
Fully automatic, TMP : 1
RP : 1 or 2*1
EDS　Applicable to two configurations : A (Analysis) / LA (Low Vacuum & Analysis).
Main Options Main specifications
●：Standard　　　○：Option
Backscattered Electron Detector (BED) *1 Basic Advanced
Low Vacuum Secondary Electron Detector (LSED) Control PC OS：Microsoft®Windows®10 64bit *4 ● ●
Energy Dispersive X-Ray Spectrometer (EDS) * 2
Language Japanese / English ● ●
Wavelength Dispersive X-Ray Spectrometer (WDS) Detector SDD type 　　　　　　　　　Select from the detector list
Electron Backscatter Diffraction Detector (EBSD) Spectral analysis Qualitative analysis (peak identification, automatic qualitative analysis) ● ●
Load Lock Chamber (pre-exchange chamber) Visual Peak ID ● ●
Stage Navigation System (SNS) Standard-less quantitative analysis (ZAF method) ● ●
Chamber Scope (CS) Standard quantitative analysis (ZAF method) * 5
●
Operation Panel PHI-RHO-Z (PRZ) method : quantitative correction method ●
3D Measurement Software Line analysis Line analysis (parallel & arbitrary direction) ● ●
Table Elemental map Elemental map (map with multiple colors, monochrome, multiple-color superimposition) ● ●
Maximum pixel resolution : 4,096 × 3,072 ● ●
Real-time pop-up spectrum ● ●
Installation Requirements
Deconvolution map (net count map, quantitative map) ● ●
Power Single-phase 100 V AC, 50/60 Hz, 3.0 kVA
Real-time net count map ●
Voltage regulation Within ± 10% (voltage drop from 3.0 kVA by 3% or less)
Real-time filter ● ●
Grounding terminal 100 Ω or less
Installation room Room temperature 20 ± 5 ℃ Line profile display ● ●
Humidity 60% or less Probe tracking ● ●
Height 2,000 m or less
Serial analysis Spectral analysis, line analysis, elemental map ● ●
Stray AC field 0.3 μ T or less
Comprehensive analysis of already-analyzed data (qualitative & quantitative analysis) ● ●
(50/60 Hz, Sine wave, WD 15 mm, 30 kV)
Montage Automatic montage (SEM image, elemental map) ● ●
Room dimensions 2,000 mm (W) × 2,500 mm (D) × 1,800 mm (H) or more
Door width 850 mm or more Serial elemental mapping for multiple areas ● ●
W(mm) D(mm) H(mm) Weight(kg） Particle Analysis Software Particle analysis (auto / manual) & EDS analysis ○ ○
EOS column unit 750 1,000 1,470 Approx. 400
Classification of particle analysis data ○ ○
Rotary pump (RP): 1 530 230 320 Approx. 23
Graph display of statistical processed particle analysis data ○ ○
Vibration isolation weight 160 160 122 Approx. 12
RP vibration isolation table (1) 400 180 15 Approx. 2 Wide-area serial particle analysis & EDS analysis ○ ○
EDS unit *
Approx. 5 Report generation Single-click report generation ● ●
SMILE VIEWTM Lab ● ●
Installation Room Example Export to Microsoft Word / Microsoft PowerPoint ● ●
® ® ®
SEM integration Integrated management of observation & analysis data ● ●
2000
Specifying analysis positions on the SEM operation screen (direct analysis on UI for SEM) ● ●
Switchboard Vibration isolation
weight Graphical display of analysis positions ● ●
RP
Help function Help guide ● ●
RP
EDS detector Dual detector Analysis with two detectors ●
Operation unit
Offline function License software for offline data analysis ○ ○
1000
800
2500
800
750
Specifications subject to change without notice.
Microsoft, Windows and PowerPoint are registered trademarks of Microsoft Corporation in USA and other countries.
Entrance 850 mm or more
JSM-IT500 Series | 26
No. 1302F892C Printed in Japan, Kp