COMPLIMENTS OF:

Eastern PA (Corporate)
1969 Clearview Road Basic
Vacuum
Souderton, PA 18964

Western PA
30 Industrial Road
Hermitage, PA 16148

California
8606 Live Oak Lane
Fontana, CA 92335 Practice
Southeast
108 Progressive Court
Greenville, SC 29611

Third Edition
1983 Clearview Road
Souderton, PA 18964

Reprinted with permission

from Varian / Agilent
174 Keystone Drive
Telford, PA 18969

VACUUM PUMP
SERVICES CORP.
2299 Amber Drive, Suite 130
Hatfield, PA 19440
varian
Vacuum Products
Training Department
Varian Associates, Inc.
121 Hartwell Avenue
Lexington, MA 02173
1-800-882-7426
Contents

--
Chapter 1 Vacuum Fundamentals
Introduction 2
1

The Nature of Vacuum 2

Large and Small Numbers 6
Temperature 9
Pressure 10
Gas Laws 20
Gas Flow 24
Measuring Work Performed
by Vacuum Systems 31
Summary 35

Chapter 2 Roughing Pumps 39

Introduction 40
Pressure Ranges of Pumps 40
How Pumps Are Teamed Up 42
Roughing Pumps 42
Rotary Piston Mechanical Pump 43
Rotary Vane Mechanical Pump 45
- Dry Vacuum Pump 49
Sorption Pump 54
Venturi Pump 59
Blower /Booster Pump 61

Chapter 3 High Vacuum Pumps 63

Introduction 64
Oil Diffusion Pump 65
Baffles and Traps 77
Turbomolecular Pump 81
Cryopump 93

Chapter 4 Ultrahigh Vacuum Pumps 107

Introduction 108
Titanium Sublimation Pump 109
Non-Evaporable Getter Pump 113
Review of the Nature of Gases 115
Ion Pump 116
Summary 122