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User Manual
Revision A
Part Number 031022-R01
Information in this document is subject to change without notice. No part of this document may
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purpose, without the express written permission of ADE Technologies (except for copies made
as working documents for use with ADE Technolologies-supplied equipment).
Table of Contents
4.0 Troubleshooting
Strategies for Successful High-Resolution Measurements ....................................... 33
Grounding ........................................................................................................................ 33
Example of a Good Probe-Target Ground ................................................................... 33
Example of a Poor Probe-Target Ground .................................................................... 34
Fixturing ........................................................................................................................... 34
Vibration Isolation ........................................................................................................... 34
Data Acquisition System and Ground Loops .............................................................. 35
Properties of a Good Fixture ........................................................................................ 36
Troubleshooting Techniques ......................................................................................... 37
Fixture Check .................................................................................................................. 37
Probe Check .................................................................................................................... 37
Gage Noise Measurement .............................................................................................. 37
Data Acquisition System Check .................................................................................... 38
Power-line Voltage Test ................................................................................................. 39
Multi-Probe Noise Test ................................................................................................... 39
Each Model 6810/6800 module connects to a single capacitive probe and offers high
bandwidth and superior signal-to-noise ratio. The modules are especially suitable for
dynamic measurements such as vibration and high-speed spindle analysis.
The Model 6810 is a portable, lightweight stand-alone instrument. The Model 6800 rack-
mount module fits easily into the Microsense II Model 5300 console and conforms to
standard EuroCard dimensions.
Configuration
The 6810/6800 modules are supplied from the factory with a default configuration. Any
adjustments to this configuration should be made prior to installation. The configurable
items, their default settings, and instructions to change them are described in this manual.
Applications
The 6810/6800 modules provide noncontact measurements suited to a wide variety of
applications. The systems can be used to measure values including thickness, step height,
dynamic diameter variation, concentricity, surface velocity and surface acceleration.
The Model 6810/6800 gaging modules are useful for general purpose industrial applications
such as:
Vibration Analysis
Power Requirements
The 6810/6800 modules must be powered with regulated +15 VDC (+ 0.1 volts) power at
its power pins as tabulated below.
+15 VDC at 0.120 Amp Max P22, pins 9A,9B or 9C P19, pins 6 or 18
Power Common (Ground) P22, pins 10A, 10B, or 10C P19, pins 5 or 17
-15 VDC at 0.120 Amp Max P22, pins 11A, 11B, or 11C P19, pins 4 or 16
NOTE: Only one connection is required for each of the above requirements.
The available pins are interconnected on the printed circuit board inside
the 6810/6800.
The probes are quite rugged, but should be handled with care. Try to avoid
scratching the probe's sensor.
Each probe has been calibrated for use with a particular Gage board, and should be
used with that Gage board for most accurate operation. Most probes have a 3-meter
(10-foot) cable that connects to the Gage board.
The probes are transducers which form a capacitor with the target surface. Because the
area of the formed capacitor is constant, variations in capacitance are related to
variations in the distance between the probe and the target surface.
Note that the system does not measure the absolute distance between the probe and
target surface, but variations from a nominal position known as the probe's Nominal
Standoff. At Near Standoff, the probe is at the smallest probe-to-target distance within
the probe's operating range. At Far Standoff, the probe is at its largest probe-to-target
spacing. The 6810/6800 modules can be set for three different output-voltage scalings as
tabulated below:
Displacement
"Displacement" is the distance change between the probe and a target surface.
Target
Surface variations can be examined by measuring displacement values over the entire surface of a moving
object.
Target
Figure 3: Displacement
Axial Runout
"Radial runout" examines variations in the radius from the axis of rotation to all points on the rotating surface
examined by the probe.
"Axial runout" examines variations in displacement from the probe to a flat surface as it spins around an axis.
"Flatness runout" examines variations in displacement from the probe to a flat surface as it moves parallel
to the probe sensing surface.
Figure 4: Runout
Probe B Probe A
Two probes can be used independently (without adding or subtracting displacement values) to analyze
displacement in one direction with respect to displacement in another direction. This relationship may be
displayed on an oscilloscope.
Displacement A
Displacement B
Velocity
The "surface velocity" of a measured object describes the rate at which the displacement measurement is
changing. This value is equal to the first derivative of displacement with respect to time.
Acceleration
The "surface acceleration" of a measured object describes the rate at which the surface velocity is changing.
This value is equal to the second derivative of displacement with respect to time.
If the change in runout is measured with respect to the change in rotational speed or start up "chatter" of a
spindle, the fullest dynamic range of the probe can be obtained by making a single rotation and/or a single
longitudinal pass along the section to be measured. While doing this, observe the displacement output of the
probe and reposition the probe to balance the positive and negative meter deflections over the surface to be
measured. If the largest positive reading is greater than the largest negative reading, the probe is too far
and should be moved closer. If the largest negative reading is greater than the largest positive reading, the
probe is too close and should be farther away.
The figure shown below illustrates the effects of the datum reference determined by probe position on
runout measurements. When the probe is too far from the examined surface (a), an overrange condition
may result for negative peaks. Similarly, when the probe is too close to the examined surface (b), an
overrange condition may result for positive peaks. The probe should be placed so that the nominal reading
is halfway between the two peaks (c), to allow all measured points on the moving surface to be in range.
Selecting a good datum reference allows "exaggerated" peaks due to axis movement, vibration, or startup
chatter to also remain in range (d).
O/R
Meter
Range Meter
Range
O/R
(a) (b)
Meter Meter
Range Range
(c) (d)
In the figure shown below, the system is set up to provide a zero reading for the displacement to the master
part (Figure a). When the master part is replaced by a sample part (Figure b), the meter indicates a slightly
negative value. The height of the sample surface from the gaging surface is the sum of the known master
height and this negative value, or less than that of the known master height.
Near Standoff
Nominal Standoff
Far Standoff
Master
Reference Surface
(a)
Figure 8: Zero Reading with Master
Near Standoff
Nominal Standoff
Far Standoff
Sample
Reference Surface
(b)
Positioning two probes facing toward each other allows space measurements between two surfaces.
Concentricity is examined by measuring the spacing between circular parts.
(a) (b)
(c)
System Outputs
Refer to pinout charts which follow in this manual.
FAR LIMIT This output is TTL low when the corresponding front
panel LED is lit, and TTL high when the LED is off.
NEAR LIMIT: This output is TTL low when the corresponding front
panel LED is lit, and TTL high when the LED is off.
6810
TECHNOLOGIES TECHNOLOGIES
6800
NR FAR Z SF NR FAR
OUTPUT
PROBE
Figure 11: Front Panels of the Models 6810 and 6800 Gaging Modules
The probe cable and its connectors must not be cut, spliced, or disassembled.
NOTE: The target MUST be at the same potential as analog ground. The
housing of most models of probes are grounded via the probe cable. In
most cases, electrically attaching the target to the probe shell will result
in a well grounded target.
The FAR LIMIT LED lights when the probe-to-target distance is greater than its set
point.
The NEAR LIMIT LED lights when the probe-to-target distance is less than its set
point.
The limit outputs on connector P12 or P18 are TTL low (less than 0.8 VDC) when the
LED is lit and TTL high (greater than 3.5 VDC) when the LED is off.
NOTE: Calibration is done at the factory and should usually not need to be adjusted.
NOTE: Adjusting the Zero pot has no effect on the Scale Factor.
Input/Output Connections
The 6810/6800 gaging modules have three input/output connections to be aware of: P3
and P18 (for the Model 6810 module) and P12 (for the Model 6800 module).
The ARTN connection may be used to reduce noise due to non-uniform grounds between
the 6810/6800 modules and any data collection equipment. ARTN is a separate return
which allows external equipment to float +0.1v from analog ground. This allows the
creation of a “pseudodifferential” connection to external monitoring equipment to prevent
ground loops. See Appendix A for more information on grounding.
NOTE: Probe range is a function of the last three items listed above. These
jumpers are set at the factory for a specific range. Refer to the data
sheet which was included with your unit. Please contact ADE Technologies
for more information.
Bandwidth P4 P5 P6 P7
1 kHz N Y N Y
5 kHz Y Y Y Y
20 kHz * N N N N
100 kHz Y N Y N
*default setting
Output Scaling The analog output level of the Model 6810 and 6800 gaging modules is
configurable. The standard output is +10 volts for the entire probe range.
Shown is a table of other common output voltages that are available.
(W1 - W5 set the scale factor while W10 is an offset jumper for
configuration of bipolar/unipolar output.)
Configuration. P1 P2 P3
+10 V (Bipolar) * N Y N
+ 5 V (Bipolar) N Y Y
0 to 10 V (Unipolar) Y Y Y
*default setting
NOTE: The voltage on -ANALOG OUT will be the negative of +ANALOG OUT. If
you want a negative unipolar output, set up the jumpers as in case 3 above
and use the -ANALOG OUT output. This will give you a 0 to -10V swing.
Chassis GND A jumper has been provided allowing the chassis of the Model 6800
gaging module to be either grounded or ungrounded. See Appendix A for
more grounding information.
Configuration P15
Chassis Grounded * Y
Chassis Ungrounded N
*default setting
Chassis Ground
Bandwidth
P15
P5
P7 P4
P6
P1
P3 P2
Output Scaling
Equipment Needed:
Procedure:
1. Set the probe at near standoff so that the DVM reads -10.000 volts on
+ANALOG OUT output.
2. Move the probe or target so that the gap between them increases by the total
measurement range (i.e., for a +100 um range, increase by 200um). Measure
according to the fixturing equipment.
4. Adjust the pot so that the reading on the DVM (+ANALOG OUT) is:
Example:
If step 3 reading = 9.900 V, adjust pot so that DVM reads 10.050 V.
If step 3 reading = 10.150 V, adjust pot so that DVM reads 9.925 V.
5. Repeat steps 1-4 to check the calibration adjustment. The procedure is complete
when the reading is within a desired tolerance. Iteration may be necessary to
precisely adjust the scale factor.
Range Adjustment
The Model 6810/6800 gaging modules incorporate a flexible architecture which permits you
to perform a full calibration of the system. This will allow you to install a new probe or
change ranges as needed.
The range adjustment feature requires specialized fixturing and is usually done at the
factory. A description of this feature has not been included in this manual. Please contact
ADE Technologies Technical Support for further information.
Grounding
In order to realize the full potential of the gages, there must be a good ground between the
probe(s) and the target. In some cases, a D.C. (sometimes called a galvanic) connection
between probe and target may be impossible. For example, if a probe is used to measure a
motor that uses hydrodynamic bearings, there can be no D.C. connection to the motor shaft.
However, an A.C. (capacitive) ground of approximately 200 pF or higher is sufficient. The best
way to ensure a good ground is to use metallic (electrically conductive) parts to hold the probe
and target. The parts should not be anodized or have other nonconductive coatings. The
ground should connect between the body of the probe and the target.
Ground Wire
This picture shows a good ground–the ground wire is short and goes directly from the target to
the probe. An even better grounding scheme would use a common metal mounting plate on
which the probe holder and target are affixed.
6810
5810 Probe and Holder
Target
Ground Wire
This picture is an example of a poor grounding scheme–the ground wire goes all the way from the
target back to the 6810, and then all the way from the 6810 up to the probe via the probe cable.
Fixturing
At the nanometer level, the world is made of rubber. Even what may seem to be a good fixture
could be inadequate for high-resolution measurements. All components used should be stout
and thick in cross section. Adjustable fixtures pose the most problems. If slides or rotary
components are used, they should be heavily spring loaded or otherwise biased to remove free
play. Using inherently well-damped materials (e.g., Meehanite) can be useful. Base plates used
to mount the probe fixtures and target must also be thick and stiff.
Vibration Isolation
Even measurements made with well-designed fixtures can be plagued by errors from external
vibrations. Designing fixtures to have the highest possible resonant frequency combined with
good damping can reduce the problem, but often the best designs still require some type of
vibration isolation. In broad terms, vibration-isolation equipment can be broken into three
categories. In order of price and efficacy they are, elastomeric isolators, air tables, and active
isolators.
Elastomeric isolators use inexpensive rubber-like components, air tables use air cylinders that
require a source of compressed air, and active isolation units use servo-controlled actuators.
Usually air tables provide sufficient isolation and avoid the very high cost of using active
isolation. A good measure of the isolation ability of an air table is the resonant frequency of its
air suspension-- the lower the better.
One source of vibration that is often ignored is acoustic noise. Sound from radios, and just
conversation often creates enough fixture vibration to cause signals that can be picked up by
high-resolution capacitive gaging equipment. A rigid cover over the measure station is usually
sufficient to eliminate this problem.
A/D-converter noise
Most high-resolution A/D converters have noise of several counts. That is, if one presents a
perfectly quiet D.C signal to them, the digital output will vary by a few counts. For typical
medium-speed 16-bit converters (e.g., 200K samples per second) this converter noise is on
the order of 2 to 4 counts. High-speed 16-bit converters can have much higher noise.
Ground Loops
The capacitance gaging system is inherently grounded to the fixture that holds the probe.
The data-acquisition system has it own ground connection. Differences in potential between
these two grounds can cause measurement noise. Many data-acquisition systems can
operate in three input-connections modes: 1) single-ended, in which the grounds of the signal
and data-acquisition systems are connected, 2) pseudo-differential, in which the ground
from a single-ended device is not connected to the data-acquisition ground, and 3) full differ-
ential. Mode 1 will only be suitable if either the capacitance-gaging system or the data-
acquisition system is electrically floating. In general, mode 2 or mode 3 will be the usual
choice. Testing for ground loops is explained in the "Troubleshooting Techniques" section.
The diagram above is an example of a two-probe application in which both probes look at a
single target such as a rotating motor. Several aspects of the fixture design are important to
obtain reliable, repeatable, low-noise outputs, such as:
1) The mounting base must be rigid enough to reduce errors from mechanical flexing. Using
material or methods to ensure that the base is well damped may also be required. Note that
using a conductive material such as metal is important for good grounding.
2) The probe mounts must be rigid to reduce flexing and vibration. They should be attached
firmly to the mounting base. Using metal or a conductive material is important for good
grounding.
3) The probes should be rigidly held on their mounting area. Split clamps or collets are good
solutions for axial probes.
4) The target must be held firmly to the mounting base. Electrical conductivity between the
base and target is important for good grounding. Note that in some cases motor bearings
may break this ground connection. Given that a good capacitive ground, not a D.C ground is
required, such bearings do not present a problem.
To reiterate, good grounding is required. Note that the arrangement of the fixture’s elements
creates a short ground path between the probes and the target.
Fixture Check
Are there obvious flaws in the fixture? Check to see that the probes are tight and rigidly held in
their holders. Using tape, plastic, or some other soft material to fit a probe into a too-large fixture
is not good practice. Check that the probe holder and target are securely and tightly mounted.
Are the probe holders and target holder stiff and rigid, or are they flimsy?
Probe Ground
Unplug the probe in question from the 6810/6800. Using an ohmmeter, measure the resistance
between the body of the probe and its holder. A reading higher than 1 ohm is suspect, not
because such a good ground is required, but because such a reading probably indicates that the
probe is not intimately held in a metal fixture. High readings may indicate corrosion in the fixture
or a non-conductive or poorly conductive coating on the fixture.
Next, check the resistance between the probe holder and the target holder. For the same
reasons, look for a reading less than 1 ohm. Finally check the resistance between the target
holder and the target. Be aware that if the target surface is the rotor of a motor, a good ohmic
contact may not be possible. Do not worry about this–there is a capacitive connection between
the rotor and stator of a motor.
If the noise level is not good, connect the gage output to an oscilloscope or spectrum analyzer.
Look for discrete frequency noise such as power-line related frequencies (e.g., 60, 120, 180 Hz
for 60 Hz power). If such signals are found, do the following:
2) Disconnect the 6810/6800 from the DAS and short the input to the DAS right at its input
connector. Measure noise again. The reading so obtained represents the base level noise
of the DAS. If this noise is too high, the DAS may have to be re-engineered.
3) If the noise level in the previous step looks good, connect the cable that is used to connect
the DAS to the 6810/6800, and short the cable at the end that connects to the 6810/6800.
Check for noise. It should be the same as the noise found in the previous step. If not, the
interconnection cable is defective or poorly designed.
4) If the noise in the previous step is good, connect a short wire between the shorted DAS input
cable and the ground of the 6810/6800 system. For example, connect a clip lead between
the shell of the 6810/6800’s output connector and the shorted cable. Measure the noise
under this condition. If the noise has gone up, then there is a ground loop between the 6810/
6800 and the DAS. If so, the DAS must be used in the pseudo or full differential input mode.
Target Grounding
The target must be connected to the circuit ground of the gaging system. The Model 6810/
6800 gaging modules have been designed so that the probe housing is grounded. An
electrical connection from the probe shell (or the fixture holding the probe) to the target will
provide the necessary ground. If this is not possible, a wire may be run from the Model
6810/6800 gaging modules directly to the target.
Chassis Grounding
A jumper has been provided (P15) which will explicitly ground the chassis. The default
configuration is with the jumper in place. This will connect the case to ground directly.
For some applications, it may be desirable to remove this jumper to improve noise
performance or remove ground loops caused by the fixtured position of the Model 6810/
6800 gaging modules.
Introduction
The 4800, 4810, 5800, 5810, 6800 and 6810 gages are provided with a calibration interface for
those customers who wish to download calibration information from a system controller to their
ADE gage modules. The interface uses serial, differential connections and a simple protocol.
Any number of modules can be daisy chained, which elminates the problem of increasing the
complexity of the interface as the number of modules to be calibrated increases.
Calibration Methodology
Both the 48XX, 58XX and the 68XX gage modules require two calibration constants, one for
setting the scale factor, and one for adjusting the linearity. These constants are stored as two
12-bit binary numbers by setting six hex switches located on the PC board. However, the out-
puts of these switches are wired-ored with the output from a 24-bit shift register. So, if all the
outputs of the hex switches are set to be open, the shift register can control the calibration
settings. It is this shift register, along with additional circuitry, that implements the remote cali-
bration interface.
Connections
All connections for the calibration interface are provided at the rear-panel connector(s). The
pinouts are as follows:
+Data Out 1A 13
-Data Out 2A 24
+Data In 2C 23
-Data In 2B 11
+Clock In 1C 12
-Clock In 1B 25
+Cal Enable 3B 10
-Cal Enable 3C 22
+5 VDC 5A,B,C 9
GND 4A,B,C 19
The order of the shifted data is as follows: MSB of the scale-factor word first, and LSB of the
linearity word last, so:
Note that although one clock, and one data signal is shown in the example above, these
lines are differential, so each signal comprises two connections. Note also that the
calibration information is not stored in non-volatile memory, and therefore, it must
be downloaded to the board on power-up.
Wiring
The calibration interface can be configured as either a two-wire or three-wire interface. A typical
three-wire scheme is shown below.
48XX/58XX 48XX/58XX
48XX/58XX/68XX
48XX/58XX/68XX
System Controller
Grounding
The differential connections provide two distinct advantages, 1) they offer highly reliable data
transfer, and 2) they eliminate potential ground loops between the gage modules and the
system controller. If the gage’s power supply is referenced to ground along with the system
controller, there should be no need for a ground connection between the gage modules and
the system controller. If the gage modules are not referenced to ground, a ground connection
between the modules and system controller is necessary.
Pseudo Read-back
Although a true data read-back feature is not implemented in this interface, a pseudo read-
back can be easily implemented by connecting the data output lines from the last gage board
in the daisy chain back to an input of the system controller. To read the existing calibration
data stored in the modules, simply issue n*24 clock pulses, where n is the number of modules.
The data stream that comes back to the system controller is the calibration data that was
stored in the modules. The data can then be downloaded back to the modules to restore
the values.
To verify proper data transmission whenever loading new data to the modules, simply
concatenate two complete data sets. The first data set will be clocked through the modules
and returned to the system controller, and the second data set will remain in the modules.
Single-ended connections
If a short connection between the system controller and modules is used, and ground loops
are not a problem, single-ended communications can be implemented by tying either the +
or – input of the signal in question to about 1.5 volts for TTL-compatible outputs, or 2.5
volts for CMOS compatible outputs. This may be readily accomplished by using a resistor
voltage divider from the input in question to +5 VDC and ground. Because the modules’
calibration inputs are CMOS, resistor values need not be low. For example, a 10k resistor
to +5 and a 4.7k resistor to ground would be fine for TTL-compatible outputs. For extra
noise immunity, connect a 0.1 ìF cap from the input to ground.
All inputs have resistors to +5 VDC and ground installed on the gage module as shown below
to ensure proper operating state when the external calibration feature is not used.
VCC
47k
47k
For the 4800 and 4810, set SW6, SW6, and SW8 to 0s, and set SW1, SW2,
and SW3 to Fs.
For the 5800 and 5810, set SW2 through SW7 to Fs.
For the 6800 and 6810, set SW2 through SW7 to Fs.
4.175
6810
5810
TECHNOLOGIES
1.520
NR FAR Z SF NR FAR
TECHNOLOGIES
6800
5800
6800 Dimensions-Unit conforms to Eurocard form factor
3U high, 7T wide, 160mm deep
OUTPUT
LIM NR
LIM FR
ZERO
128.8 SF
LIM NR
LIM FR 106.4
169.8
35.4