Probe Selection Procedure Series 5000 Probes

Microsense II Active Capacitive Probes

Steps Guidance
Summary
Identify Target Shape and Minimum
Minimum
Minimum Target Dimension Target Minimum Microsense Series 5000 Microsense II Probes are capacitive sensors

Sensor
Target

Sensor

Sensor
Dimension Target
by observing item to be Dimension designed to make non-contact, high resolution displacement
Dimension
1 measured and comparing with
the guidance illustrations.
measurements in high dynamic applications. These applications
include measurement of spindles, motors and rotating shafts where
Dia. Dia. high bandwidth, sub-nanometer measurements are required.

FLAT CYLINDRICAL SPHERICAL The Series 5000 Microsense II Probe family has been designed to
accommodate an extensive range of target dimensions and motion
envelopes as well as a variety of fixturing and target-access
limitations.
Calculate Maximum Sensor
Minimum Target Dimension X Shape Constant = Maximum Sensor Diameter
Diameter This product description is to be used in conjunction with Microsense

(Note: This dimension is less
2 than the minimum target
dimension because all of the
“spreading” electric field needs
to be on the target surface.)
{ }
0.60 for Flat Target
5000series gauging modules, including the 5810, 5800 and 5300.
___________ X 0.25 for Cylindrical Target = ___________
Microsense II System : Series 5000 Probes with Gauging Console
0.20 for Spherical Target
Probe Description

Features Series 5000 Microsense II Probes are offered in a variety of sizes and shapes.
Determine Optimum Sensor Size - SENSORS SENSOR OUTPUTS Every probe in this product description is supplied with a 3-meter cable that plugs
from step 2 answers
For best overall performance
A B C Capacitive sensing element into the front panel of the mating module or gauge board.
select the larger sensor size Compact
3
option. However, smaller sensor Detachable cable
sizes may be preferred if surface
profile or flatness of a textured Stainless steel housing
Target Surface CABLE
surface is being measured, or if Wide variety of sizes available
5800 MODULE
measurements are being made Sensor ‘A’ Sensor ‘B’ Sensor ‘C’
near a target edge.

Benefits

Select Probe Style Non-contact design

Correct Standoff
Axial style is usually preferred,
Axial Right Angle No probe wear
however other styles are Incorrect
available to facilitate target Easily fixtured
Standoff
4 access. Refer to the probe High resolution - < 1 nanometer PROBE
diagrams on the preceding pages. Lo-Profile High frequency response
30o
Axial Displacement
SENSOR
Measurement &
Sensing Applications INSULATOR RING

STANDOFF
Hard disk drive motor testing (SHOWN EXAGGERATED)
Determine Probe Ordering Use with Microsense gauging module models 5810, 5800 and 5300. High sprred air bearing test TARGET
Information
5 Use answers 2,3, and 4 above for Note: On special request, probes can be custom designed to suit specific customer needs.
Spindle runout measurement
probe and sensor size. Consult Consult the factory. Rotating shaft test
sensor drawings. Usage Diagram for Non-Contact Series 5000 Probes
Research & development
Vibration analysis
Headquarters:
Microsense LLC
80Industrial
70 WilsonAveWayE. Servo control
Fast Tool Servo
Lowell, MA. 01852
Westwood,
Main MA 02090
Tel (978)843-7670 USA
Phone: (978)856-3375
Fax (781) 467-3500
ADE Technologies,
Microsense LLC. Inc. Fax: (781) 467-0500

Microsense LLC(specifications subject to change without notice) REV 092804

www.microsense.net www.adetech.com
www.microsense.net
 Axial Probes Blade Probes
NOTES:
DIMENSIONS SHOWN AS FOLLOWS; 25.4
[1.000]
MILLIMETERS [INCHES]
19.304
[.760]
16.51
[.650] 1.016
Model - 5504 [0.040 ]x 45° chamfer

0.5 mm diameter sensor

10.16
[.400 ]
RMS distance noise in nanometers [microinches]* 21.59
[.8500] ø3.175
2.54
[0.100] typ [ø0.125] thru typ
Total distance range: 50 µm [2.0 mils] Total distance range: 100 µm [4.0 mils]
Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz
0.5 [0.02] 0.5 [0.02] 0.7 [0.03] 1.9 [0.07] 1.1 [0.05] 1.5 [0.06] 2.2 [0.09] 6.7 [0.27]
12.7
[.500] 57.15
[2.250]
2.54
[0.100]

0.001 [0.0254]

Model - 5501 57.15

[2.250]

1 mm diameter sensor
RMS distance noise in nanometers [microinches]*
Total distance range: 100 µm [4.0 mils] Total distance range: 250 µm [10.0 mils]
Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz
1.1 [0.05] 1.1 [0.05] 1.3 [0.06] 2.7 [0.12] 10.2 [0.40] 10.3 [0.41] 10.8 [0.43] 17.9 [0.70]

Model - 5502
Detail: Side-looking sensors

2 mm diameter sensor
0.4826 ø1.6764 0.254
0.635 x 3.175 [ø0.019] ø[0.066] 0.254
[0.025 x 0.125] sensor [0.010] [0.010]
sensor
sensor

RMS distance noise in nanometers [microinches]*

Total distance range: 250 µm [10.0 mils] Total distance range: 500 µm [20.0 mils] 0.4572 0.7366
1.2192
[0.018] [0.029]
[0.048]
Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz
1.7 [0.07] 2.1 [0.09] 2.7 [0.12] 5.8 [0.23] 4.6 [0.18] 5.7 [0.23] 7.6 [0.30] 22.3 [0.88] Model Model Model
5602 5604 5603

0.127 0.127
Model - 5503 [0.005] [0.005]

0.635 x 3.175 0.508 x 2.54

[0.025 x 0.125] sensor [0.020 x 0.100] sensor

5 mm diameter sensor Model Model

5601 5605
RMS distance noise in nanometers [microinches]*
Sensor Dimension: .025 x .125 RMS distance noise in nanometers [microinches]*
Total distance range: 500 µm [20.0 mils] Total distance range: 1.0 mm [40.0 mils]
Total distance range: 100 µm [4.0 mils] Total distance range: 250 µm [10.0 mils]
Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz
Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz Bandwidth: 1 kHz 5 kHz 20 kHz 100 kHz
2.9 [0.12] 2.9 [0.12] 3.4 [0.14] 5.3 [0.21] 5.7 [0.23] 6.5 [0.26] 9.0 [0.36] 20.1 [0.79]
0.7 [0.03] 0.7 [0.03] 0.8 [0.03] 1.6 [0.07] 1.5 [0.06] 2.0 [0.08] 3.6 [0.14] 10.7 [0.42]

Shaded area = Recommended clamping area

* at maximum probe-to-target spacing

www.adetech.com
www.microsense.net