EG High Accuracy Positioning Sensors

Repeatability of 1 µm 0.04 Mil

High Accuracy
The EG Series incorporates a highly stable amplifier circuit,
providing a repeatability of 1 µm 0.04 Mil. This sensor is ideal for
detecting slight differences in shape or for confirming die closure.

Positioning Sensors Stable detection in wide temperature range

EG Series KEYENCE’s original built-in compensator circuit minimizes
temperature-oriented sensitivity fluctuation. Once set, the sensitivity
does not require adjustment.

0.39" x 0.39" x 0.04"

Detecting distance Y (mm inch)

SH-110 (Typical) Target : 10 x 10 x 1 (mm inch) iron

1.2 0.05"

1.0 0.04"

0.8 0.03"

-10 0 10 20 30 40 50 60 (°C)
14 32 50 68 86 104 122 140 (°F)
Temperature

Heat-resistant sensor head

(SH-809, 816, and 822)
Heat-resistant sensor heads are available which withstand
temperatures up to 200°C (392°F).

Oil-resistant cable
EG Series sensor heads employ oil-resistant cable to ensure
extended usage.

Detection of tolerances with single sensor head

(EG-547)
A single sensor can be used to
detect missing/loose screws or
washers. NG GO NG

Missing washer Normal Loose screw

For standard certification and conformance list, see our website.

www.keyence.com/products/certified/

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1-888-KEYENCE
www.keyence.com/ASKG

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Selection Chart

PROXIMITY SENSORS
EM
Sensor head ES
ET
Type Size Appearance Detecting distance Model
TA
2.8 mm dia.
0.11"
0.6 mm 0.02" SH-302 EG
DD
3.8 mm dia.
0.8 mm 0.03" SH-303A
0.15"
Cylindrical
5.4 mm dia.
1 mm 0.04" SH-305
0.21"

8 mm dia.
2 mm 0.08" SH-308
0.31"
Shielded

M10 2 mm 0.08" SH-110

Threaded

M14 5 mm 0.20" SH-114

t=4.8 mm
Thin 5 mm 0.20" SH-614A
0.19"

Threaded/Oil-resistant M8 2 mm 0.08" SH-108

14.5 mm dia. New Products

6 mm 0.24" SH-416
0.57"

Fiberoptic
22 mm dia.
9 mm 0.35" SH-422 Sensors
0.87"
Cylindrical/Threaded
Non-shielded

30 mm dia. Photoelectric
12 mm 0.47" SH-430
1.18" Sensors

40 mm dia. 18 mm Proximity
SH-440
1.57" 0.71"
Sensors

90 mm dia. 35 mm
Cylindrical SH-290 Safety
3.54" 1.38"
Equipment
9.4 mm dia.
Cylindrical/Heat-resistant
0.37"
0.5 to 2 mm 0.02" to 0.08" SH-809 Flow/
Shielded

Pressure/
Temperature
Threaded/Heat-resistant M16 1 to 4 mm 0.04" to 0.16" SH-816
Measurement
Sensors
shielded

Cylindrical/Heat-resistant/ 22 mm dia.
Non-

2 to 8 mm 0.08" to 0.31" SH-822

Threaded 0.87"
Controls
Amplifier
Appearance Power supply Features Output mode Model Static
Eliminators

N.O./ N.C. selectable

EG-520
11 to 30 VDC DC-driven
NPN
EG-520 Vision
Systems

Marking
Equipment
DC-driven with disconnection
N.O./ N.C. selectable
12 to 24 VDC Alarm output EG-530
EG-530

NPN
DIN-rail mountable
Code Readers

Handheld Mobile
NPN Computers
110/120,
EG-540
AC-driven SPDT 250 VAC 2A EG-540 1.
220/240 VAC
relay

Microscopes

NPN Projector/
110/120, AC-driven 3D Measurement
EG-545
SPDT 250 VAC 2A EG-5451.
220/240 VAC Adjuster dial included
relay Systems

SPST-NO 250 VAC

110/120, AC-driven 0.5A relay
EG-5472.
EG-547

220/240 VAC Tolerance setting capability Analog voltage

monitoring output

1. This product does not comply with the EMC directive.

2. Please contact KEYENCE for information on products that comply with the EMC directive.

CAD DATA DOWNLOAD: www.keyence.com/CADG 263

EV
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EG High Accuracy Positioning Sensors

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EM
PROXIMITY SENSORS Specifications
ES Sensor head
ET
Standard Oil-resistant 2.
TA Type Shielded Shielded
EG Cylindrical Threaded Thin Threaded
DD Model SH-3021. SH-303A SH-305 SH-308 SH-110 SH-114 SH-614A SH-108
Stable detecting range 0 to 0.6 mm 0.02" 0 to 0.8 mm 0.03" 0 to 1 mm 0.04" 0 to 2 mm 0.08" 0 to 5 mm 0.20" 0 to 2 mm 0.08"
Maximum detecting distance 1.6 mm 0.06" 2 mm 0.08" 3 mm 0.12" 5 mm 0.20" 10 mm 0.39" 3.5 mm 0.14"
Detectable object Ferrous metal (see Characteristics for nonferrous metals)
Standard target (iron, t=1 mm 0.04") 5 x 5 mm 0.20" 10 x 10 mm 0.39" 15 x 15 mm 0.59" 10 x 10 mm 0.39"
Repeatability 0.001 mm 0.00004" 0.002 mm 0.00008"
Hysteresis 0.03 mm 0.001" 0.05 mm 0.002" 0.01 mm 0.0004" 0.015 mm 0.0006" 0.05 mm 0.002"
Temperature fluctuation 0.3%/°C 0.08%/°C 0.04%/°C 0.2%/°C
Enclosure rating IP67 —
Ambient temperature -10 to +60°C (14 to 140°F), No freezing
Relative humidity 35 to 85%, No condensation
Vibration resistance 10 to 55 Hz, 1.5 mm 0.06" double amplitude in X, Y, and Z directions, 2 hours respectively
Weight (including nuts
Approx. 30 g Approx. 35 g Approx. 45 g Approx. 55 g Approx. 63 g Approx. 60 g Approx. 45 g
and 3-m 9.8' cable)
Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance.
1. The SH-302 cannot be used in combination with the EG-547.
2. Not designed for immersed use.

Standard Heat-resistant 2.
Type Non-shielded Shielded Non-shielded
Cylindrical &
Cylindrical & Threaded Cylindrical Cylindrical Threaded
Threaded
New Products
Model 1. SH-416 SH-422 SH-430 SH-440 SH-290 SH-809 SH-816 SH-822
0.5 to 2 mm 1 to 4 mm 2 to 8 mm
Stable detecting range 0 to 6 mm 0.24" 0 to 9 mm 0.35" 0 to 12 mm 0.47" 0 to 18 mm 0.71" 0 to 35 mm 1.38"
0.02" to 0.08" 0.04" to 0.16" 0.08" to 0.31"
Fiberoptic
Maximum detecting distance 15 mm 0.59" 22 mm 0.87" 30 mm 1.18" 40 mm 1.57" 70 mm 2.76" —
Sensors
Detectable object Ferrous metal (see Characteristics for nonferrous metals)
150 x 150 mm
Standard target (iron, t=1 mm 0.04") 20 x 20 mm 0.79" 25 x 25 mm 0.98" 30 x 30 mm 1.18" 40 x 40 mm 1.57" 15 x 15 mm 0.59" 20 x 20 mm 0.79" 30 x 30 mm 1.18"
Photoelectric 5.91"
Sensors Repeatability 0.005 mm 0.0002" 0.008 mm 0.0003" 0.01 mm 0.0004" 0.015 mm 0.0006" 0.03 mm 0.001"
0.002 mm
0.005 mm 0.0002" 0.008 mm 0.0003"
0.00008"
Hysteresis 0.015 mm 0.0006" 0.02 mm 0.0008" 0.03 mm 0.001" 0.05 mm 0.0002" 0.1 mm 0.004" 0.04 mm 0.002"
Proximity
Temperature fluctuation 0.08%/°C 0.2%/°C
Sensors
Enclosure rating IP67 —
Ambient temperature -10 to +60°C (14 to 140°F), No freezing -10 to +200°C (14 to 392°F), No freezing
Safety Relative humidity 35 to 85%, No condensation
Equipment Vibration resistance 10 to 55 Hz, 1.5 mm 0.06" double amplitude in X, Y, and Z directions, 2 hours respectively
Weight (including nuts and
Flow/ 3-m 9.8' cable)
Approx. 73 g Approx. 195 g Approx. 225 g Approx. 280 g Approx. 650 g Approx. 55 g Approx. 83 g Approx. 170 g
Pressure/
Temperature Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance.
1. The EG-547(W) cannot be used in combination with SH-422, 430, 440, 290, 809, 816 and 822.
Measurement 2. Precautions when using heat-resistant sensor head:
• Use the sensor within the stable detecting range.
Sensors • The heat-resistant sensor head is not waterproof; do not use this sensor head in a location directly exposed to liquid or steam.

Controls Amplifier
Type DC AC AC adj-dial AC, tolerance setting
Model EG-520 EG-530 EG-540 3. EG-545 3. EG-547 1.4.
Static
External synchronization,
Eliminators N.O./N.C. switch-selectable
Operation mode N.O./N.C. (switch-selectable) analog voltage
(contact output only)
switch-selectable
Vision Sensitivity adjustment 15-turn trimmer 10-turn potentiometer dial
Systems 200 mA max.
Transistor 2.
(40 V max.) Residual 100 mA max. (40 V max.) Residual voltage: 1 V max.
(NPN)
Control voltage: 1 V max.
Marking output DPST (N.O.), 250 VAC,
Equipment Relay contact — SPDT, 250 VAC, 2 A max. (resistive load) 0.5 A max.
(resistive load)
100 mA max.
Disconnection alarm output
— (40 V max.) Residual —
Code Readers (NPN)
voltage: 1 V max.
Response Transistor 1 ms
time Relay contact — 10 ms 3 ms
Handheld Mobile
OFF delay time — 65 ms (contact output only) —
Computers
Power supply 11 to 30 VDC: 10% max. 12 to 24 VDC: 10% max. 110/120/220/240 VAC ±10%, 50/60 Hz
Power/current consumption 100 mA max. 5 VA max.
Microscopes Temperature fluctuation 0.08%/°C
Ambient temperature 0 to 50°C (32 to 122°F)
Relative humidity 35 to 85%, No condensation
Projector/
3D Measurement Vibration resistance 10 to 55 Hz, 1.5 mm 0.06" double amplitude in X, Y, and Z directions, 2 hours respectively
Systems Weight Approx. 110 g Approx. 75 g Approx. 330 g Approx. 350 g Approx. 390 g

Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance.
1. The EG-547(W) cannot be used in combination with SH-422, 430, 440, 290, 809, 816 and 822.
2. NPN output can easily be converted to PNP output by connecting the optional OP-5148 PNP Output Converter.
3. This product does not comply with EMC directives.
4. Please contact KEYENCE for information on products that comply with the EMC directive.

264 ASK KEYENCE: 1-888-KEYENCE

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Dimensions

PROXIMITY SENSORS
Unit: mm inch
EM
Sensor heads ES
SH-110 SH-614A ET
SH-302
TA
12 18 3000 3000
3000
0.71" 118.11" 0.16" 118.11" EG
0.47" 118.11" 4
14 ø0.13"
DD
ø2.8 ø2 coaxial cable 0.55" ø3.2 coaxial cable
ø0.13" 3
ø0.11" ø0.08" ø3.2 coaxial cable
0.12" 7 10 10
2-ø3.3 ø0.13"
Across-flats: 14 0.55" 0.28" 0.39" 0.39" mounting hole
M10 x P1 t=3 t=0.12" 30
1.18"
SH-303A Detecting surface 6 0.24"6 0.24"
18 3000
SH-114 0.19"
0.71" 118.11" 4.8 2.7
18 3000 1.6 0.06" 0.11"
ø3.8 ø3.2 coaxial cable 0.71" 118.11"
ø0.15" ø0.10"

ø0.13"
SH-305
ø3.2 coaxial cable SH-430
Across-flats: 19 0.75" t=3.5 t=0.14"
M14 x P1 25 20 3000
18 3000 0.98" 0.79" 118.11"
0.71" 118.11"

ø5.4 ø3.2 coaxial cable ø30

ø0.21" ø0.13" ø1.18"
SH-416 ø5.4 coaxial cable
ø0.21"
0.24"6 M12, P=1
14 3000
Across-flats: 19 0.75" New Products
SH-308 0.55" 118.11" t=3.5 t=0.14"

18 3000 ø14.5 Fiberoptic

0.71" 118.11"
ø0.57" ø3.2 coaxial cable Sensors
ø0.13" SH-440
ø8 ø3.2 coaxial cable Across-flats: 21, t=4
ø0.13" M16 x P1 30 Photoelectric
ø0.31" 0.83", t=0.16" 25 3000
1.18" 0.98" 118.11" Sensors

Proximity
SH-108 SH-422 Sensors
ø40
25 3000 20 15 3000 ø1.57" ø0.21"
0.98" 118.11" 0.79" 0.59" 118.11" ø5.4 coaxial cable
Safety
M12, P=1 Equipment
ø22 Across-flats: 19 0.75"
ø0.12" ø3 coaxial cable ø0.87" t=3.5 t=0.14"
ø5.4 coaxial cable Flow/
Across-flats: 12, t=3 ø0.21"
M8 x P1 Across-flats: 19 0.74"
Pressure/
0.47", t=0.12" M12, P=1 Temperature
t=3.5 t=0.14" SH-809 3000
118.11"
ø9.4 Measurement
SH-290 SH-816 Across-flats: 21, t=4 ø0.37" ø2.5 Sensors
0.83", t=0.16" 18 ø0.10"
90 3000 M16, P=1 0.71"
3.54" 118.11"
Controls
76
2.99"
Amplifiers
ø2.5
ø0.10" EG-520 Static
90
3.54" Eliminators
20 3000 2-ø5 ø0.20" 0.16" 4
76 0.79" 118.11" mounting hole
2.99" ø0.21"
ø5.4 coaxial cable Vision
Systems
SH-822 0.14"
3.5
Across-flats: 19, t=3.5
4-ø5.5 ø0.22" 0.75", t=0.14"
Detecting surface mounting hole M12, P=1 90
Marking
82 3.54" 80 Equipment
ø22 3.23" 3.15"
30 ø0.87"
1.18" ø0.17"
10 ø4.4
Code Readers
2 0.08" 0.39"
20 15 3000
0.79" 0.59" 118.11" 1.02"
26 2.68" Handheld Mobile
37 68 Computers
1.46"
EG-530 EG-540/545/547
2-ø4.5 ø0.18" 4-ø5 ø0.20" 0.16" 4
Microscopes
mounting hole
mounting hole 24
0.94"
Projector/
3D Measurement
Systems
80 90 35.4 82 90 80
3.15" 1.39" 3.23" 3.54" 3.15"
3.54"

4 1.22" 2.20" EG-540 has no dial.

0.16"
1.02" 26 31 56 2.68" EG-545 has one dial.
37 35 67 68 EG-547 has two dials.
1.46" 1.38" 2.64"

CAD DATA DOWNLOAD: www.keyence.com/CADG 265