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22nm Details Presentation
22nm Details Presentation
22 nm Transistor Technology
May, 2011
1
Key Messages
• Intel is introducing revolutionary Tri-Gate transistors on its
22 nm logic technology
2
Intel Technology Roadmap
Lithography 45 nm 32 nm 22 nm 14 nm 10 nm
3
Traditional Planar Transistor
Gate
Drain
High-k
Dielectric
Source
Oxide
Silicon
Substrate
4
22 nm Tri-Gate Transistor
Drain
Gate
Source
Oxide
Silicon
Substrate
Gate
Oxide
Silicon
Substrate
6
22 nm Tri-Gate Transistor
Gate
Oxide
Silicon
Substrate
7
22 nm Tri-Gate Transistor
Gates Fins
8
32 nm Planar Transistors 22 nm Tri-Gate Transistors
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Intel Transistor Leadership
2003 2005 2007 2009 2011
90 nm 65 nm 45 nm 32 nm 22 nm
SiGe SiGe
Strained Silicon
High-k Metal Gate
Tri-Gate
10
Std vs. Fully Depleted Transistors
Bulk Transistor
Gate
Gate Inversion
Oxide Layer
Source Drain
Depletion
Region
Silicon Substrate
Gate
Floating
Body
Source Drain
Oxide
Silicon Substrate
Gate
Extremely thin
Source Drain
silicon layer
Oxide
Silicon Substrate
Gate
Silicon
Oxide Fin
Silicon Substrate
“On”
Current
Planar
Channel
Current
(normalized) Threshold
Voltage
“Off”
Current
Operating
Gate Voltage (V) Voltage
15
Transistor Operation
Planar
Channel
Current Tri-Gate
(normalized)
Reduced
Leakage
Channel
Current Tri-Gate
(normalized)
Reduced Operating
Gate Voltage (V) Voltage
32 nm
Transistor Slower Planar
Gate Delay
(normalized)
Lower Voltage
32 nm
Transistor Planar
Gate Delay
(normalized)
22 nm
Planar
37%
Faster 32 nm
Transistor Planar
Gate Delay
(normalized)
22 nm 18%
Faster
Tri-Gate
32 nm
Transistor Planar
Gate Delay
(normalized)
-0.2 V
22 nm
Tri-Gate
22
22 nm Tri-Gate Circuits
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22 nm Manufacturing Fabs
D1D Oregon
24
On-Time 2 Year Cycles
90 nm 65 nm 45 nm 32 nm 22 nm
2003 2005 2007 2009 2011
Research
Development
Manufacturing
Pathfinding
Copy Exactly!
26
Key Messages
• Intel is introducing revolutionary Tri-Gate transistors on its
22 nm logic technology
27