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TOP-DOWN APPROACH: The word "top-down" means starting from large pieces of material and
producing the intended structure by mechanical or chemical methods. This situation is shown
schematically in figure. As long as the structure are within a range of sizes that are accessible by
either mechanical tools or photolithography processes, then top-down processes have an unmatched
flexibility in their application.
Top-down is in general an extension of lithography. The principle behind the top-down
approach is to take a bulk piece of the material and then modify it into the wanted nanostructure.
Cutting, grinding and etching are typical fabrication techniques, which have been developed to work
on the nano scale. The sizes of the nanostructures, which can be produced with top-down techniques,
are between 10 to 100 nm.
Day - 8
Topics to be covered: Ball-milling method
3. Explain the ball milling method with neat diagram?
It is one of the simplest ways of making nanoparticles of some metals and alloys in the form of
powder. There are many types of ball mills viz. planetary, vibratory, rod, tumbler etc. A ball mill (a
type of grinder) is a cylindrical device used for grinding (or mixing)
materials to as small as few nanometers.
A ball mill consists of a cylindrical capped container that sits on
two drive shafts (pulleys and belts are used for rotary motion) or
directly connected to motor for rotation. Size of container, of course,
depends upon the quantity of interest. The container is partially filled
with the material to be ground (powder or flakes) plus the grinding
medium (hard spherical balls). Initial material can be of arbitrary size
and shape. Different materials are used as grinding media, including
tungsten carbide balls, ceramic balls, flint pebbles and stainless steel balls.
4. Explain pulsed laser deposition with its schematic layout? List its advantages?
Pulsed laser deposition (PLD) is an efficient method to produce thin films by utilizing a technique
called laser ablation. PLD can be used to deposit a wide range of materials from polymers to metals.
PLD is applicable to almost any material, in particular to compounds (especially multi-element
oxides) that are difficult or impossible to produce in thin-films by other techniques. Examples of such
materials include complex ceramic materials such as hightemperature superconductors and certain
magnetic materials [e.g. yttrium iron garnet (YIG) and ferromagnetic shape-memory (FSM) alloy Ni-
Mn-Ga]. PLD was the first technique used to successfully deposit a superconducting YBa2Cu3O7
thin film.
Typical layout of pulsed laser deposition (PLD) system is as shown in the figure. In general, the
idea of PLD is simple. A high power pulsed laser beam is focused onto the surface of a solid target.
The strong absorption of the electromagnetic radiation by the solid surface leads to rapid evaporation
of the target material. Finally, the evaporated materials get deposited onto the substrate. The
evaporated materials consist of highly excited and ionized species.
Day – 13
Fig.: Photolithography process steps: (1) surface is coated with metal, (2) coating of photoresist
on the substrate, (3) mask placed over upper layer, (4) exposed to UV radiation, (5) resist
development and striping and (6) etching to get final pattern.
Fig. depicts schematically various steps involved in photolithography to transfer a pattern on the
surface of some semiconductor. A thin film coating of a metal (e.g. chromium) is deposited on a
suitable substrate (e.g. glass or silicon). A positive or a negative photo-resist (usually some polymer)
is coated on metal thin film. Positive photo-resist material has the property that, when exposed to the
appropriate radiation it degrades or some chemical bonds are broken. Negative resist on the other
hand is a material, which hardens (cross-links) on exposure to a radiation. A mask is placed between
the resist coated substrate and the source of light. By using a suitable chemical (developer), the
weakened portion is removed (or image is developed). Remaining unexposed part also can be
removed by appropriate chemical treatment. The remaining material can be dissolved in one step and
the hardened material in another step.
Depending on the radiation used like visible light, X-rays, electrons, ions etc. the lithography
name is tagged with it.
It is possible to use visible, ultraviolet, extreme ultraviolet (EUV) or X-rays to perform
lithography and wherever possible lasers are also used. Highest resolution of the generated features
ultimately depends upon the wavelength of radiation used and interaction of radiation with matter as
well as mask and optical elements used. Smaller the wavelength used smaller can be the feature size
which is limited by diffraction limit, λ/2. Depth of focus depends upon the penetration of incident
radiation. For the lithography using electromagnetic radiation, optical elements and masks have to be
used for various purposes. In the visible range (~700 nm to 400 nm) glass lenses and masks can be
used. In the UV range fused silica or calcium fluoride lenses are used. There are three methods (see
Fig.) viz. "proximity", "contact" and "projection" which can be used to pattern a substrate.
Raghu Institute of Technology Dept. of MECH NANOTECHNOLOGY Unit - 2
11
Electrons with high energy (usually larger than ~ 5 keV) are incident on the photo-resist. Here
also positive or negative photo-resists can be used. Common positive resists are poly-methyl
methacrylate (PMMA) and polybutane-l-sulphone (PBS). Negative resist often used in electron beam
lithography is poly-glycidyl-methacrylate co-ethyl-acrylate (COP). Developers used are methyl-isobutyl-
ketone (MIBK) and isopropylalcohol (IPA) in 1:1 ratio.
A focused electron beam in electron beam lithography is used in two modes, viz. 'vector scan' or
'raster scan'. In vector scan, the electron beam 'writes' on some specified region. After one region is
completed the X-Y scanning stage on which the substrate to be patterned is mounted moves. During its
movement electron beam is put off. Then a new region is selected and 'written' with the beam. This is
continued until whole pattern is generated.
In 'raster scan' the beam is rastered or moved continuously over a small area, line by line. The X-
Y stage of the sample moves at right angles to the beam. The beam is turned off or turned on depending
Topics to be covered:
synthesis of bulk poly crystalline and single crystalline materials
11. Explain the synthesis of bulk poly crystalline materials?
Generally various types of techniques employed to synthesis of bulk poly crystalline materials,
which has average diameter typically in few micrometers. But practically solid state reaction route is
adopting for make poly crystalline materials. The important parameters that effects the synthesis
mechanism are
(i) The area of contact between the particles
(ii) The rate of nucleation
(iii) The rate of diffusion
The basic steps in a conventional solid state synthesis technique are the following:
(i) Appropriate starting materials are selected with fine grain size to maximize the surface area.
(ii) The starting materials are weighed and mixed together in an agate mortar using pestle.
(iii) The prepared compound is pelletized and sintering in furnace at high temperature.
For example preparation of high temperature superconductor, YBa2Cu3O7 (YBCO), involve multi
steps.
The step is to mix the powders of the most stable form of the individual cation based compounds.
The most commonly used powders are Y2O3, Ba2CO3 and CuO that are mixed with proper cation
ratio (1:2:3) and then powder mix is heated at 900oC over the 24 hr followed by slow cooling.
The resulting compound powder is again ground and the powder reheated to 925 oC over the 24 hr,
this step is repeated to ensure the homogeneity.
In order to ensure the oxygenation into the lattice the powder sample which compact is heated
following the oxygen 425oC over the 24 hr. at this temperature there is a maximum diffusion of
oxygen in to the lattice.
Finally the obtained product is considered as YBa2Cu3O7.
Topics to be covered:
Realizing the semiconductor nanostructures
Specialized growth techniques for nanostructures
13. Discuss the essentials for realizing the semiconductor nanostructures?
The factors such as size dependence, structure dependence, uniformity, density, confinement
potential are affecting the nanostructures which decide the nature of their applications.
Size and structure dependence:
In most of the semiconductor applications, the electrons and holes are at a lower energy level. The
ratio of the energy separation of the energy states and the thermal energy determine whether the
carriers get thermally excited. The energy level separation should be at least three times of the
thermal energy value (KBT).
As the size of the nanoparticle decreases, the space between energy level increases. This property
determines the optical properties of the nanostructures. Further, the structural properties of
nanostructures determine their optical properties. Most of the radiative processes are diminishes by
the presence of defects in structures, resulting in non radiative processes.
Meanwhile, as the size of the nanostructures increases, the magnetic properties decreases due to
quenching of carrier mobility and consequence surface area.
Uniformity and density of nanostructures:
Uniform nanostructures have small dispersion in shape, size and composition, which are
necessary for semiconductor devices. Besides this the dense nanostructures can increases the
efficiency in certain applications by increasing optical absorption or emission.
Confinement potential
Certain semiconductor applications require effective confinement of electrons and holes in deep
potential wells to avoid the thermal excitation phenomena of carriers at higher temperature. This type
of confinement is found in P-i-N structures. In such structures, a nanostructure is placed with the
intrinsic region of P-i-N structure. This can allow the efficient injection or extraction of carriers.
Fig. V-shaped
grooves with
ZnO nanowires on V-grooved Si- substrate.
1. List any four bottom up approaches for synthesis of nano powders and explain any one of them in
detail? [8], Set 1, March 2017
2. Define Electro deposition method and explain its principle; Write Advantages and disadvantages
of CVD. [8], Set 1, March 2017
3. Explain Electron beam lithography with a neat sketch. [8], Set 1, March 2017