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Design and dynamic optimization of an ultraprecision diamond flycutting


machine tool for large KDP crystal machining

Article  in  The International Journal of Advanced Manufacturing Technology · October 2013


DOI: 10.1007/s00170-013-5020-z

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Int J Adv Manuf Technol (2013) 69:237–244
DOI 10.1007/s00170-013-5020-z

ORIGINAL ARTICLE

Design and dynamic optimization of an ultraprecision


diamond flycutting machine tool for large KDP
crystal machining
Yingchun Liang & Wanqun Chen & Qingshun Bai &
Yazhou Sun & Guoda Chen & Qiang Zhang & Yang Sun

Received: 23 August 2012 / Accepted: 16 April 2013 / Published online: 4 May 2013
# Springer-Verlag London 2013

Abstract This paper presents the design and dynamic opti- electro-optical properties. It is mainly used as a harmonic
mization of an ultraprecision diamond flycutting machine frequency converter in modern high-energy solid-state la-
tool for producing flat half-meter-scale optics. A novel tool sers, polarization rotators in Pockels cells, and laser fusion
holder is designed, which can achieve micron-level axial system in the Inertial Confinement Fusion (ICF) program
feeding and tool angle accurate adjustment, and new tech- [1–3]. The KDP crystal has extremely harsh requirements of
nology is also used to allow alignment of the spindle axis to the topography in ICF program not only for the root mean
the horizontal-slide travel. The design and characteristic square (RMS) but also for the power spectral density (PSD).
analyses of this machine tool are presented, including the The specific indexes for KDP crystal are shown in Fig. 1. It
static, modal, harmonic, and rotor dynamic analysis for requires roughness values less than 3 nm in 0.01~0.12 mm,
predicting its static and dynamic performance. A prototype RMS of no more than 4.2 nm and PSD2 better than 15 nm2
is built based on the analysis and FE model considering the mm in 0.12~2.5 mm, the RMS less than 6.4 nm and PSD1
joint parameters. The machining test shows that this ma- better than 15 nm2 mm in 2.5~33 mm, and gradient root
chine tool can successfully produce 415×415-mm surfaces mean square gradient better than 11 nm/cm in the range over
on aluminum and crystalline optics, with 1.3-μm flatness 33 mm.
and 2.4-nm rms roughness. Moreover, the differences of However, this material is extremely soft, fragile, gyro-
design concepts are discussed between the ultraprecision scopic, and thermally sensitive. As a result, the traditional
machine tool for optical parts machining and the conven- grinding and polishing methods are not suitable for process-
tional machine tool. ing this kind of material. Moreover, the KDP crystal is a
negative single-axis crystal and belongs to a tetragonal
Keywords Design method . Optical parts . Machine system, which has strong anisotropy in terms of physical
dynamics . Flycutting and mechanical properties. The coupling effect of vibration
due to machine tool and cutting force will lower the surface
quality of machining KDP crystal, which is difficult to
1 Introduction eliminate. Therefore, flying cutting format is usually applied
to machining KDP crystal, by which the influence of mate-
Potassium dihydrogen phosphate (KDP) crystal is a kind rial anisotropy on surface quality is reduced by its single
of crystal material with good nonlinear optical and cutting direction. With the increasing requirements for large-
sizes KDP crystals, it is urgently needed to develop an
ultraprecision diamond flycutting machine tool for pro-
Y. Liang : W. Chen (*) : Q. Bai : Y. Sun : G. Chen : Q. Zhang : ducing a flat surface on half-meter-scale optics. In 1999,
Y. Sun
Lawrence Livermore National Laboratory developed a
Center for Precision Engineering, Harbin Institute of Technology,
Harbin 150001 Heilongjiang, People’s Republic of China vertical-axis diamond flycutting machine based on
e-mail: chwq@hit.edu.cn Moore Tool Company #5 Jig Boring Machine for
238 Int J Adv Manuf Technol (2013) 69:237–244

2 Design and analysis of machine structure

2.1 Configuration design

Proper modeling and analysis of the mechanical structures


are critical since the mechanical structure not only provides
Fig. 1 Band designations of the evaluation index for optical lens
the support and accommodation for all of the machine’s
components but also contributes to dynamics performance
producing flat half-meter-scale optics, which can be [9–12]. Hence, configuration design is an important stage of
used to realize the precision machining of KDP crystals the machine tool design. An appropriate configuration can
[4]. However, little reports have been found on the improve the strength and stiffness of the machine tool,
design of this kind of machine tool used for minimizing the deformation caused by thermal effects and
ultraprecision machining. In this paper, the design and its own gravity.
dynamic optimization of an ultraprecision diamond In this design, to improve the accuracy of the machine
flycutting machine tool for producing a flat surface on tool, the axial size of each component should be minimized
half-meter-scale optics are presented. to shorten the cantilever and reduce the deformation error.
Machining dynamics play an essential role in the Besides, it must be noted that the direction perpendicular to
performance of machine tools and machining processes, the tool tip and the workpiece is the sensitive direction,
which directly affects the material removal rate, work- which determines the machining accuracy. A tiny movement
piece surface quality, as well as dimensional and form of the tool tip will directly be copied on the surface of the
accuracy [5]. In actual machining, various forces from workpiece in single-point diamond turning.
the cutting process, the drive system, and the outside Based on the earlier analysis, two typical configura-
influence will affect the machine–workpiece–tool elastic tions, an open-frame structure and a closed one, are pro-
system [6–8]. However, despite its obvious technical posed in Fig. 2. In order to reduce the stowing distortion,
and economic importance and tremendous progress in the vacuum chuck is used in both designs. The configu-
machining technology during the last few decades, ma- ration in the left graph is horizontal open type, and the
chining dynamics still remains as one of the least un- one to the right is gantry closed type. The structure loop
derstood manufacturing science topics. Therefore, it is of each machine tool is given by the white line. The
usually believed that the machining performance is pro- structure loop of the first scheme is open frame (G type),
portional to the dynamic characteristics. In other words, which is compact, short, easy to assemble, and can access
it is generally believed that higher dynamic stiffness the work zone but sensitive to thermal and mechanical
causes better machining results, but in this research deformation. It is suitable for machining small parts,
the opposite conclusion is obtained. The unqualified whereas a large size (415×415 mm) workpiece is required
optical lens is found to be caused by higher stiffness. in this design.
Reducing the stiffness appropriately can yield a better The second one is closed frame (portal type) and has a
machining result. This paper elaborates the structural symmetric structure, which can improve the rigidity of the
design and the rational allocation dynamic stiffness of machine tool and reduce thermal deformation. Heat from
an ultraprecision machine tool for machining the KDP the spindle bearing and motor creates a symmetrical tem-
crystals. perature profile in the bridge when the spindle is centered,

Fig. 2 Two typical machine configurations: a open frame and b closed frame
Int J Adv Manuf Technol (2013) 69:237–244 239

Fig. 3 Feed mechanism in Z


direction: a spindle proceeding
equipment and b tool holder
proceeding equipment

reducing squareness errors caused by thermal distortion of table, tool holder, feed shaft and cutter tool in Fig. 3b.
the bridge. Centering the spindle in the bridge also pro- This device can achieve micron-level feeding in axial
vides a stiffer structural loop between the tool and the direction as well as precise adjustment of tool angle in
workpiece and a lower rotational inertia about the long circumferential direction. Moreover, the arbor telescopic
axis of the bridge. It is suitable for machining larger-size travel is larger than 30 mm. This design not only sim-
workpieces. Therefore, gantry type is adopted in this plifies the structure and reduces the number of moving
design. parts but also shortens the length of structure loop
and improves the dynamic performance of the machine
2.2 Design of the feed mechanism in Z direction tool.

The feed of the cutting tool is driven by a slide in traditional 2.3 Detail design
design, it will inevitably cause the complexity of structure
and increase the length of kinematic chain from the perspec- The configuration of the flycutting machine is shown in
tive of kinematics and dynamics. Lu and Slocum designed a Fig. 4. A bridge supports a vertical-axis spindle and flycutter
hydrostatic spindle to achieve both rotary motion for cut- over a horizontal-axis slide. Mounted to the horizontal slide
ting and millimetric range linear motion along the axial is a vacuum chuck which fixes the workpiece by vacuum
direction for feeding as shown in Fig. 3a. The advantages power. The surface to be machined lies in a horizontal plane.
of such rotary–axial spindles include stiffer structure The aerostatic bearings are used in the vertical-axis spindle
loops, fewer components, higher accuracy and resolution, due to its inherent advantages of high positioning accuracy
and less heat generation [13], but it is difficult to manu- and smoothness of motion [14]. A large support surface is
facture. In this design, a novel tool holder is designed and used to improve the axial stiffness. The hydrostatic bearings
used to realize the axial feeding which consists of rotary are also employed in the horizontal axis slide to improve the

Fig. 4 The flycutting machine


tool and main components: a
flycutting machine tool, b
aerostatic spindle, c leveling
device, d vacuum chuck, e
hydrostatic slideway, f tool
holder
240 Int J Adv Manuf Technol (2013) 69:237–244

but in this paper, the junctions are modeled as far as metic-


ulous matrix27 elements are introduced to represent the
aerostatic, hydrostatic bearing, and linear motors. Elements
conta173 and targe170 are applied to the contact pairs of the
adjustment pad and spherical pad, respectively. Besides, the
link element and coupling constraints element are used to
simulate the bolt joint. The FE model of the whole machine
is shown in Fig. 6; the 3D-integrated modeling aims to
accurately evaluate and optimize the dynamic performance
of the overall machine.
Fig. 5 The leveling device
3.2 Spindle simulation analysis and performance prediction

stiffness. Both of them improve the stiffness of the sensitive The spindle is the key element of the machine tool; its static
direction in machining. and dynamic characters directly affect the machining accu-
The structure of the machine tool consists of a machine racy. A larger area thrust disc is used to improve the axial
tool bed, a column, adjustment pads, spherical pads, and a stiffness. However, it is easy to cause the vibration of the
beam. Furthermore, a novel technology is used to ensure rotor system, resulting in lowering the mechanical efficiency
that the axis of the spindle is perpendicular to the workpiece, and reducing the service life [18–20]. Therefore, rotor dy-
as shown in Fig. 5. In this technology, three pairs of spher- namic analysis and harmonic analysis considering the gyro-
ical supports are adopted, two in the right side and one in the scopic effects are used to analyze the aerostatic spindle. The
left side, forming an isosceles triangle distribution, by re- Campbell diagram and the result of the harmonic analysis
vising the screws to align the spindle axis to the horizontal- are shown in Fig. 7. It shows that the critical speed of the
slide travel. spindle is 1,450 rpm, which is three times larger than the
maximum operating speed (400 rpm), completely meeting
the design requirement. Besides, there are only two natural
3 Finite element modeling and dynamic analysis frequencies which occurred in the frequency range of 0–
1,000 Hz; the biggest amplitude is 0.1 μm occurring in
3.1 Finite element modeling of the whole machine tool 263 Hz, which shows that the spindle has a good dynamic
performance.
The joint characteristics of the machine tool such as the bolt
joint and the bearing connection have great impact on the 3.3 Dynamic analysis of the machine tool
dynamic performance [15–17]. Therefore, the modeling ap-
proach of the junction directly determines the accuracy of Modal and harmonic analyses are carried out on the FE
the finite element (FE) model of the machine tool. However, model. The results in Fig. 8 show that the first mode of
junction modeling is difficult. Therefore, in the past model- the machine tool is the column swing from side to side
ing process, the junctions are often simplified or ignored, (230 Hz; Fig. 8a), the second mode is the turning of the

Fig. 6 FEM models of


mechanical structure. a The FE
model of the whole machine
tool. b FE model of spindle. c
Contact element. d Link
element and coupling
constraints element
Int J Adv Manuf Technol (2013) 69:237–244 241

Fig. 7 Rotor dynamic analysis


of the spindle. a Campbell
diagram. b Harmonic analysis

beam (240 Hz; Fig. 8b), and the third mode is the spindle 4 Dynamic performance test and optimization
swing (270 Hz; Fig. 8d). Higher-order vibration shapes from
the fourth to the sixth modes in Fig. 8e, f, h are regarded as The ultraprecision diamond flycutting machine tool has
combined shapes and are difficult to describe. It shows that been built based on the preceding analysis and the design
the spindle and the slide have higher stiffness than the method in Fig. 9. The main specifications of this machine
column, and the whole machine has good dynamic stiffness. tool are summarized in Table 1.

Fig. 8 Dynamic analysis and test of the machine tool. a, b, d, e, f, h and simulation frequency response after adjustment. c, g New natural
The first six-order natural frequency of the machine tool. i Experimental frequency after adjustment
and simulation frequency response of initial state. j Experimental
242 Int J Adv Manuf Technol (2013) 69:237–244

Fig. 9 Experimental setup of


the whole machine. a The
ultraprecision flycutting
machine tool. b Accelerometer
distribution

The modal test is carried out to determine the dynamic where d denotes the diameter of the flyhead (d=630 mm), n0
characteristics of the machine tool. Eight accelerometers are denotes the speed of spindle (n0=300 rpm), θ denotes the
staggered radially from each other on the fly cutting head, maximum angle of the tangent direction in the cutting pro-
and the exciting point is near the cutting tool. Good corre- cess (θ=0o), and TD denotes the period of the vertical stripes
lation has been found between the experimental and simu- (TD=17.3 mm).
lation, as shown in Fig. 8i. The machine tool has good According to Eq. (1), ωn equals to 572 Hz, which ac-
dynamic stiffness (the lowest frequency is 230 Hz). Then, cords with the sixth-order natural frequency 580 Hz. There-
the machining test is carried out. It indicates that this ma- fore, the vertical stripes are mainly generated by the sixth-
chine tool can successfully produce 415×415-mm surfaces order natural frequency. The solution to deal with the period
on aluminum and crystalline optics, with 1.3-μm flatness of vertical stripes affecting the PSD1 is discussed as fol-
and 2.4-nm rms roughness. It also shows stable machining lows: reducing the stiffness of the machine tool to forward
characteristics. However, the vertical stripes whose period is the dominant resonant frequency which affects the period of
about 17.3 mm and amplitude of about 15 nm are found in the vertical stripes. It will make the period of the vertical
the laser interferometer in Fig. 10. The vertical stripes are in stripes increase and go to the evaluation range of the RMS
the evaluation range of the PSD1 (2.5–33 mm), as shown in gradient rather than PSD1. According to the structure loop
Fig. 1; they can lead to nonlinear amplification of the beam of the machine tool shown in Fig. 2b, the overall stiffness of
and attenuate the intensity of light which does not meet the machine tool kall can be given as:
requirement of the optical lens.
1
In order to keep a better accuracy of PSD1, the period of kall ¼ ð2Þ
1
þ kcon
1
þ k1s þ k1g þ k1t þ k1c
vertical stripes on the crystal surface should not be less than kb

33 mm. The surface of the workpiece accurately records any where kb, ks, kg, kt, kc, and kcon are the stiffness of the beam,
vibration of the tool–workpiece structural loop, so vertical spindle, guideway, tool, column, and contact stiffness of the
stripes reflect the natural dynamic characteristics of the beam and the column respectively. kcon can be obtained as:
ultraprecision machine tool. It is generated by the cyclical
reciprocating motion between the tool tip and the work- dpn p1m
kcon ¼ ¼ n ð3Þ
piece. The relationship between the period of the vertical dl cm
stripes and natural frequency of a certain order can be where Pn is the average pressure of the joint surface deter-
expressed by Eq. (3), which is as follows: mined by the preload and contact area, and c and m are
pd  n0  cos θ constants determined by the combination conditions. It is
wn ¼ ð1Þ easy to see that kb, ks, kg, kt, kc, and kc are much larger than
60TD
the contact stiffness kcon, so decreasing the kcon is the most
effective way to reduce the stiffness of the whole machine
Table 1 Specifications of the ultraprecision flycutting machine tool
compared with the other stiffness coefficients. The kcon can
Concrete axis be decreased by reducing the preload of the bolt. Detailed
pictorial descriptions of the dynamic characteristic of the
Spindle Axis
machine tool for initial and adjusted state are shown in
Type Air bearing Oil bearing Fig. 11. The first-order frequency decreases from 230 to
Stroke 100–400 rpm 600 mm 150 Hz, the second-order frequency decreases from 240 to
Motion accuracy Axial runout <0.016 μm 0.1 μm/100 mm
170 Hz, and the third-order frequency reflects the stiffness
Drive system DC brushless torque motor Brushless linear motor
of the spindle with the unchanged value (270 Hz). A new
Stiffness 3,754 N/μm 3,513 N/μm
natural frequency (193 Hz) occurs between the second- and
third-order frequency; the mode of vibration is that the
Int J Adv Manuf Technol (2013) 69:237–244 243

Fig. 10 The test result of the initial state

spindle goes up and down with the beam. The fourth-, fifth-,
and sixth-order frequency decrease from 330, 250, and 580
to 250, 272, and 380 Hz, respectively, and a new frequency
occurs between the fifth- and sixth-order frequency. The
adjusted machine tool is used to machining the same work-
piece, which is measured by a laser interferometer. The
measured results are shown in Fig. 12. It shows that the
period of the vertical stripes are increased from 17.3 to
52.1 mm. It can be noted that the vertical stripes are detected
by the third frequency after the adjustment. The influence of
the vertical stripes is changed from PSD1 to the RMS
gradient.
Due to the special requirement of the optical compo-
nents, the stiffness of ultraprecision machine tool is not the
higher the better under the same damping condition. The
design concepts of the ultraprecision machine tool used to
Fig. 11 Comparison of the natural frequency about initial state and optical parts is different from the traditional machine tool
adjustment because the optical lens have strict functional requirements
on the surface morphology. Therefore, the reasonable ratio
of the stiffness and damping is very important in the
design of the ultraprecision machine tool for optical parts
machining.

Fig. 12 The test result of the adjusted state


244 Int J Adv Manuf Technol (2013) 69:237–244

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