Add Info B-65270EN 08

ADDITIONAL INFORMATION
Pole Position Detection Function
1. Type of applied documents
Name FANUC AC SERVO MOTOR αi series

FANUC AC SERVO MOTOR βi series
FANUC LINEAR MOTOR LiS series
FANUC SYNCHRONOUS BUILT-IN SERVO MOTOR DiS series
Parameter manual
Spec. No./Ver. B - 65270EN / 08 - 001
2. Summary of Change
Group Name / Outline New, Add Applicable

Correct, Del Date
Basic Function Add direct exciting method to 3.2.1.2 Procedure
for Setting the Initial Parameters (Pole position Add On the day
detection).
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
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Ed. Date Description FANUC CORPORATION 1/14
3.2.1.2 Procedure for Setting the Initial Parameters (Pole position detection) (Option function)
To drive a synchronous built-in servo motor, the pole detection function (option) is required. This section describes pole
detection function.
(1) Outline
The pole detection function (option) detects the pole position of a motor driven when the relationship between the
pole position of the motor and the phase of the encoder is unknown.
WARNING
1. If the correct pole position can’t be detected depending on condition, motor might move unexpectedly. To avoid
this dangerous situation, the following conditions must be satisfied until completion of detection:
1) Torque limit parameter (No.2060) must be kept less than 150% of a rated current (No.2086).
2) The setting of excessive error at stop time must be 100 μm or 0.1 degree or less. The setting of excessive
error at move time must be 120% of the logical positional deviation or less. In case of the direct exciting
method (No.2009#5=1), it must be set to180 degree of the corresponding value.
3) While the detecting operation is in progress and a subsequent move operation is executed, a protection
doors must be closed.
If these conditions are not satisfied and detecting operation is not finished normally, the motor will make an
unpredictable movement with the maximum torque until CNC detects an excessive error alarm. For safety,
please create the following sequence with PMC by using the state signal for pole detection signal:
1) Don’t start detecting operation while the protection doors are opened.
2) If a protection door is opened during detecting operation (Fn158=1), the operation is reset.
3) When detecting operation is uncompleted (Fn159=0), don’t give any command to relevant axes.
4) When detecting operation is uncompleted (Fn159=0), don’t release a brake for the gravity axis. (For brake
operation, please watch not only the SA signal but also the pole detection completion signal (Fn159).)
In general, this function can’t be applied to the following motors and conditions:
1) Linear motor
2) Axis for which control axis detach function is used. (See Item (9))
3) When the joint rigidity between the motor and encoder is low.
4) When axis is completely locked.
When this function is unavoidably applied to linear motor depending on condition, the case using the absolute
encoder and paying attention to safety is only approved the application of this function to linear motor.
2. When encoder is exchanged, detection operation must be executed again after AMR offset (No.2139) is set to
zero.
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CAUTION
1. When two axes are controlled by Tandem control or Feed axis synchronous control, and each axis has rotary
encoder, detecting operation is performed at either axis under making another axis servo-off. In case of Tandem
control, servo alarm two-axis monitor function (No.2007#0) should be turned off during detection.
2. When motor feedback sharing function (No. 2018#7) is used with Tandem control, detecting operation should be
started simultaneously with both axes to avoid incorrect detection.
3. The following encoders are recommended for pole detection.
1) If possible, use an absolute encoder.
2) If incremental encoder is unavoidable, use an incremental encoder with a reference signal.
*1) Detecting method

Direct exciting method
This method excites current at any two different positions and detects pole position from stay position of motor
at that time. Motor is moved maximum 180 degree as electric angle during detection. It takes about 5 seconds
as detecting time. It’s only used for initial starting of motor. (90G0/19.0, 90G3/5.0, 90E1/13.0, 90E3/8.0 or later)
Minute moving method

This method excites current at any plural different positions and detects pole position from movement of motor
at that time. Motor is moved maximum 5 degree as mechanical angle during detection. It takes about 2
seconds as detecting time. It’s only used for starting of motor except initial.
(2) Applicable software
CNC Servo software Remark

series Version
Series 30i/31i/32i/35i-B 90G0 03.0 or later
Power Motion i-A 90G3 01.0 or later
Series 30i/31i/32i-A 90E0 J(10) or later
90E1 01.0 or later
90E3 01.0 or later
Series 30i/31i-A 90D0 J(10) or later HRV4
Series 0i-D 90C5 A(01) or later
90C8 A(01) or later
90E5 A(01) or later
90E8 A(01) or later
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(3) Procedure for pole position detection function
Flowchart
Enable the parameter (No.2213#7=1) for target axis
Set ARM offset No.2139=0

(Always set No.2139=0 before pole position detection is performed)
Set No.2229#0=1 to use AMR offset
Set No.2229#3=0 to watch abnormal movement after detection
Set No.2229#4=1 to use minute moving method
Make target axis Servo-on state
Set request signal (Gn135) to start detection

In-progress signal (Fn158) keeps on “1” during detection
Detection completion signal (Fn159) changes “1” after

completion
Offset from one rotation signal of motor is preserved to No.2139
Absolute detector Incremental detector
Pole position detection isn’t required every power- Pole position detection is required every power-on
on in case of absolute detector because one in case of incremental detector because one
rotation signal is memorized. But when detector is rotation signal isn’t memorized. Besides when
exchanged, it is necessary to perform detection detector is exchanged, it is necessary to perform
after setting No.2139=0. detection after setting No.2139=0.
Remark
• Set parameter (No. 2213#7) to the target axis. Detecting operation is performed by request signal (Gn135). The
request signal is ignored in unavailable axis.
• Set the servo-on state. The brake for vertical axis must not be released until the detection completes (Fn159=1) to
prevent a fall of axis.
• Don’t perform detecting operation in the servo-off state and don’t set the servo-off state during detecting
operation.
• When the pole position detection request signal (Gn135) is set to 1, detecting operation starts and the pole
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position detection in-progress signal (Fn158) is set to 1.
• Once detecting operation starts, it continues even if the request signal is turned off.
• Motor operation during pole detection is not under control of CNC. But CNC performs follow-up operation during
detection.
• If detecting operation terminates abnormally for a mechanical cause, the servo alarm "POLE DETECTION
ERROR SV0454" occurs.
• Turn off the power of CNC because this alarm can’t be released by reset key.
• When a reset is performed during detection, detecting operation is suspended. To restart detection again, set the
pole position detection request signal to 1 after 0.
• Once detection is completed, detecting operation can’t be performed again without power off except detach
operation.
• Always set the parameter (No. 2229#0) to 1. The result of detection is stored in the parameter (No.2139) after
detection is completed and motor gets reference signal. In case of absolute encoder, the detection need not to be
performed every power on.
• In case of MDI, MEM, or EDIT mode, the result of detection is reflected on the screen immediately. In case of REF
or JOG mode, it is reflected on the screen when the reset key is pressed or the mode is switched to MDI mode.
• In order to restart pole detection again, clear the parameter (No. 2139) to 0 and turn off CNC power.
NOTE
• When an absolute encoder is used and the parameter (No. 2229#0) is set to 1, the pole position detection
completion signal (Fn159) is set to 1 immediately after power-on if the parameter (No. 2139) is not set to 0.
• Create logic for confirming the pole position detection completion signal (Fn159) before giving a move
command immediately after power-on.
• If alarm such as count miss alarm of encoder occurs by fault of encoder, the pole position detection
completion signal (Fn159) is returned to 0. In this case, it is necessary to perform pole detection again.
(4) Parameter
If the following parameters are changed, necessarily turn NC power off.
No. #7 #6 #5 #4 #3 #2 #1 #0
2213 OCM
OCM (#7) 0: Pole position detection is ineffective.

1: Pole position detection is effective.
No. #7 #6 #5 #4 #3 #2 #1 #0
2229 FORME WATRA ABSEN
ABSEN (#0) 0: AMR offset isn’t available.

1: AMR offset is available.
Please always set ABSEN=1.
In case of absolute encoder, the result (AMR offset) of pole position detection is memorized to
parameter (No.2139) and it isn’t necessary to execute pole position detection every power on. In
case of incremental encoder, the result of pole position detection is also memorized to parameter
after the reference signal of encoder is caught. In this case it is necessary to execute pole position
detection every power on, but AMR offset memorized to parameter before is applied after
reference signal is caught. In this case it is possible to suppress fluctuation of the torque constant
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by the variation in pole position detection every power on.
WATRA (#3) 0: unexpected motion is watched after detection

1: unexpected motion isn’t watched after detection
When the wrong pole position is detected, it is possible to avoid unexpected motion of motor by this
function. If the motor moved unexpectedly after detection, alarm 454 would occur. Please set
WATRA=1 in case of Vcmd mode.
FORME (#4) 0: Applied Auto select mode (minute moving + stop state mode)
1: Applied Minute moving mode
Please always set FORME=1.
No. #7 #6 #5 #4 #3 #2 #1 #0
2009 PDDDM
*1) PDDDM (#5) 0: Minute moving method

1: Direct exciting method.
Please always set PDDDM=1
When AMR offset (No.2139) is 0, detection is used direct exciting method. In this case, torque is
limited to less than the rated current (No.2086) until reference signal of encoder is caught.
(90G0/19.0, 90G3/5.0, 90E1/13.0, 90E3/8.0 or later)
CAUTION
Pay attention to motor movement because motor might move max.180 degree as electric angle
during detection.
No.
2139 (AMROFS) AMR offset
Data unit degree

Valid data range 1 to 360
Initial setting 0
In case of ABSEN=1 (No.2229#0=1), the result of pole position detection is memorized to this
parameter, which is the electric angle. If it is necessary to detect again, clear this parameter.
CAUTION
After the pole position was detected, you never manually change this value. However if it is
necessary to adjust and to change this value, power must be off after modification.
No.
2182 (DTCCRT_A) Current value A for pole position detection
*1) Data unit 7282 means the maximum current of servo amplifier.
Standard setting 0
Set current for pole position detection. When it is 0, the rated current parameter (No.2086) is
adopted. When alarm “ILLEGAL ROTOR POS DETECT SV0454“ occurs during detection for large
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static friction, this parameter is set to more than the rated current. This parameter is limited by
torque limit parameter (No.2060).
No.
2198 Repetitive number
*1) Data unit Number

Valid data range -1 to 30
Standard setting 0
In minute moving method (No.2229#4=1, No.2009#5=0), the detection is repeated up to number
which adds on 1 to this parameter, and the average of result is calculated.
In direct exciting method (No.2229#4=1, No.2009#5=1), if this parameter is negative, direct
exciting method is used as detection method regardless of the value of No.2139.
(90G0/19.0, 90G3/5.0, 90E1/13.0, 90E3/8.0 or later)
No.
2199 Permissible electric angle
Data unit degree (Electric angle)

*1)
Standard setting 0 (If 0 is set, this parameter is internally handled as 10 degree.)
In direct exciting method (No.2229#4=1, No.2009#5=1), this parameter sets the permissible range
for detecting accuracy. 0 means range from -10 degree to +10 degree. If the detection result is out
of range, “ILLEGAL ROTOR POS DETECT SV0454“ occurs.
(90G0/19.0, 90G3/5.0, 90E1/13.0, 90E3/8.0 or later)
No.
2268 (MFMPMD) Permissible mechanical angle
Data unit %
Valid data range -1000 to 1000 (Positive only)
Standard setting 0 (If 0 is set, this parameter is internally handled as 100%.)
In case of positive value
This parameter sets permissible range for movement during detection. Permissible mechanical
angle is from -5 degree to 5 degree and it’s handled as 100%. If movement during detection
exceeds the permissible range, “ILLEGAL ROTOR POS DETECT SV0454“ occurs. In this case,
this parameter should be set to more than 100%, such as 200%.
In case of negative value
It is possible to change the speed level (detecting sensitivity) for stop & move in minute moving
method or direct exciting method. It is set to under 100% for high sensitivity and over 100% for low
sensitivity. If velocity feedback is noisy, make low sensitivity (from -200 to -500). Meanwhile if the
axis has large inertia, make high sensitivity (from -10 to -20).
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(5) Signals
Pole position detection request signal : Gn135.0 – Gn135.7 (RPREQ1 – RPREQ8)
Classification Input signal
Function Request to execute the pole position detection. A number appended to a signal represents
the
controlled axis number.
Operation CNC starts the pole position detection.
Pole position detecting signal : Fn158.0 – Fn158.7 (RPDET1 - RPDET8)

Classification Output signal
Function These signals indicate that CNC is detecting the pole position of each axis. A number
appended to a signal represents the controlled axis number.
Output Condition These signals turn to “1” when:
CNC is detecting the pole position
These signals turn to 0 when:
The pole position detection completes.
The pole position detection stops illegally.
The pole position detection stops by reset.
Pole position detection completion signal : Fn159.0 – Fn159.7 (RPFIN1 - RPFIN8)

Classification Output signal
Function These signals indicate that the pole position detection of each axis completes.
A number appended to a signal represents the controlled axis number.
Output Condition These signals turn to “1” when:
The pole position detection completes.
These signals do not turn to “0” except power-off.
RPREQ
RPDET
RPFIN
Note
In case of absolute encoder and No.2229#0=1, if once detection completes, Fn158.x=1 is kept even if
CNC power is turned off. Meanwhile if No.2139 =0 and CNC power is turned off, Fn158.x turns into 0.
No. #7 #6 #5 #4 #3 #2 #1 #0
G135 RPREQ8 RPREQ7 RPREQ6 RPREQ5 RPREQ4 RPREQ3 RPREQ2 RPREQ1
F158 RPDET8 RPDET7 RPDET6 RPDET5 RPDET4 RPDET3 RPDET2 RPDET1
F159 RPFIN8 RPFIN7 RPFIN6 RPFIN5 RPFIN4 RPFIN3 RPFIN2 RPFIN1
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(6) Detection alarm
*1) When “ILLEGAL ROTOR POS DETECT SV0454“ occurs, it is possible to confirm the detail No. of alarm by
diagnosis display N352. (90G0/19.0, 90G3/5.0, 90E1/13.0, 90E3/8.0 or later)
Alarm detail
Detail Factor Estimated cause
No.
1 Motor speed doesn’t get to under stop level in Velocity feedback might be noisy.
minute moving method. Decrease detecting sensitivity (No.2268=-200… -500)
2 Motor movement exceeds permissible range Mechanical friction might be small.
even if No.2182 is smaller in minute moving Increase detecting sensitivity (No.2268=-10…-20)
method.
3 Motor speed doesn’t get to over stop level even Motor might be fixed or inertia might be larger.
if No.2182 is larger in minute moving method. If inertia is larger, increase detecting sensitivity
(No.2268=-10…-20)
5 Direction of torque is different from direction of Mistake about conection of motor power line.
motor rotation.
6 Motor speed doesn’t get to under stop level in Velocity feedback might be noisy.
direct exciting method. Decrease detecting sensitivity (No.2268=-200… -500)
7 Direction of torque is different from direction of Mistake about conection of motor power line.
motor rotation.
8 Motor movement exceeds permissible range in Mistake about parameter setting of pole number, or
direct exciting method. motor is fixed, or mechanical friction is larger.
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(7) Countermeasure to trouble
Request Detecting Finish

Phenomenon Detail Cause Measur es
G135 F158 F159
Before detectio n
Detection doesn't Motor doesn't move at all. Request signal OFF Set request signal
0 0 0 (G135=0) (G135=1)
start
Function is invalid Confirm function parameter (No .2213#7) or o ption.
1 0 0
SERVO OFF Set SERVO ON
Detection doesn't Motor seems to move only a little, but Friction is smaller. Decrease current No.2182.
detection doesn't finish 1 1 0
finish
and any alarm do esn't occur. Detection unit of encoder Change detecting sensitivity (negative No.2268).
is rough or fine.
Velocity feedback is Take measures of feedback signal noise.
Excess erro r occurs during detection. i
Friction is smaller. Set excess error to larger.
Excess erro r 1 0 0
fo r stop (SV0410) Or set current No.2182 to less than rated current.
Illegal detection Illegal detection alarm occurs. Friction is larger. Set current N o.2182 to more than rated current.
alarm (SV0454) 1 0 0
Current loop gain is small. Set current loop gain to appropriate value.
After detection
Relation between phase Change phase sequence of motor power line. (*1-2)
sequ ence of motor power
Oscillation - 0 1 line and direction of
sensor is inconsistent.
(*1-1)
Mistake about parameter Set correct detection unit of enco der. (*2-2)
setting fo r encoder. (*2-
1)
Mistake about parameter Set correct po le number of motor. (*3-2)
setting fo r pole of motor.
(*3-1)
High velocity loop gain Tune up velocity loop gain.
Excess erro r in Motor moves unexpectedly, or doesn't Refer to (*1-1) (*2-1) Refer to (*1-2) (*2- 2) (*3-2).
move in spite of giving command. - 0 1 (*3-1).
motio n
scale w ith distanc e- Apply servo software 90D0 , E0/10.0 or later
coded reference marks +
circuit C
AMR offset isn't After detection, detection result isn't No.2229#0=0 Set parameter No.2229#0=1.
written in AMR offset (No.2139 ). - 0 1
updated.
not MDI mode Change MDI mode.
Incremental encoder Ro tate motor over one revolu tion.
Illegal detection Illegal detection alarm occurs. VCMD mode No.2229#3=1
(SV0454) - 0 1->0
alarm
After restart
Motor doesn't move in spite that Incremental encoder Need to detect every pow er-on.
Motio nless in spite command is given and AMR offset
of giving command isn't zero. －－－
Some alarm for sensor Try pole detection again.
Dispersion of Detectio n result has dispersion each Friction is larger. Set current N o.2182 to more than rated current No.2086.
detection result detection. －－－
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(8) Detection of the pole position detection request alarm
The pole position detection function specifies that no torque occurs on an axis where pole position detection is not
completed (servo-off state). So, conventionally, the customer's ladder needs to monitor the pole position detection
completion signal in order to judge whether to release the brake of an axis or to specify a move command for an
axis.
The servo software and CNC software indicated below execute the following processing when pole position
detection is not completed [pole position detection enabled (bit 7 of No. 2213=1) and the pole position detection
completion signal is off (Fn159=0)]:
1) The interlock state is set.
(Interlock is applied onto each axis. "INTER/START LOCK ON" on the diagnosis screen No. 0000 displays 1.)
2) The servo ready signal SA is turned off (the SA signal for all axes is turned off.)
3) Alarm DS0650 is displayed (cleared by a reset).
Safety is thus ensured even if the customer's ladder processing is not performed. [Applicable servo software]
[Applicable servo software]

series version
Series 30i/31i/32i-A 90E0 M(13) or later
90E1 01.0 or later
90E3 01.0 or later
Series 30i/31i-A 90D0 M(13) or later HRV4
90C8 A(01) or later
90E5 A(01) or later
90E8 A(01) or later
[Applicable system software]

CNC System software
series version
Series 30i-A G00C,G01C,G02C 27.0 or later
G004,G014,G024 1.0 or later
Series 31i-A5 G12C,G13C 27.0 or later
G124,G134 1.0 or later
Series 31i-A G103,G113 4.0 or later
Series 32i-A G203 4.0 or later
G204 1.0 or later
Series 0i-MD D4F1 01 or later
Series 0i-TD D6F1 01 or later
Series 0i Mate-MD D5F1 01 or later
Series 0i Mate-TD D7F1 01 or later
Series 30i/31i/32i/35i-B, Power Motion i-A are supported with all version.
The alarm number and message are indicated below.

Number Message Message Description
DS0650 POLE DETECTION REQUEST With an absolute detection axis (bit 5 of No. 1815=1),
pole position detection is not completed (Fn159=0).
With a non-absolute detection axis (bit 5 of No.1815=0),
pole position detection is once completed then the state is
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changed to the pole position detection uncompleted state
(Fn159=0).
With the parameters below, operation to be performed when pole position detection is not completed can be
changed.
No. #7 #6 #5 #4 #3 #2 #1 #0
1809 PAO SAN
[Input type] Parameter input

[Data type] Bit path
#0 SAN
When the pole position detection function is used, pole position detection is enabled (bit 7 of No.
2213=1), and pole position detection is not completed (Fn159=0) with an axis, the servo ready
signal SA <Fn000.6> of the path to which the axis belongs and the servo ready signals SA8 to SA1
<Fn186.7 to Fn186.0> for all axes that belong to the path are:
0: Not set to 0.
1: Set to 0.
CAUTION
When applying pole position detection to a gravity axis, basically release the brake after
confirming pole position detection completion (Fn159=1) and the servo ready signal. When
releasing the brake by checking the servo ready signal alone for an avoidable reason, set this
parameter to 1.
#1 PAO
When the pole position detection function is used, pole position detection is enabled (bit 7 of No.
2213=1), and pole position detection is not completed (Fn159=0) with an axis:
0: Alarm DS0650 (POLE DETECTION REQUEST) is issued.
1: Alarm DS0650 (POLE DETECTION REQUEST) is not issued.
NOTE
1 The issue condition of alarm DS0650 varies, depending on whether the axis in question is an
absolute detection axis, as described below.
- The alarm is issued with an absolute detection
axis (bit 5 of No. 1815=1) when pole position detection is not completed (Fn159=0).
- The alarm is issued with a non-absolute detection axis (bit 5 of No. 1815=0) when pole position
detection is once completed then the state is changed to the pole position detection
uncompleted state (Fn159=0).
2 If this alarm is issued, detect a pole position again. After a pole position is detected again, this
alarm is cleared by a reset.
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(9) Using the pole position detection function
and control axis detach function together
When the pole position detection function is used with an axis of a synchronous built-in servo motor, motor
switching using the detach function is conventionally impossible. However, the servo software and CNC software of
the series and editions indicated below enable the pole position detection function and detach function to be used at
the same time.
[Applicable servo software]

series version
Series 30i/31i/32i-A 90E0 M(13) or later
90E1 02.0 or later
90E3 01.0 or later
Series 30i/31i-A 90D0 M(13) or later HRV4
90C8 A(01) or later
90E5 A(01) or later
90E8 A(01) or later
[Applicable system software]

CNC System software
series version
Series 30i-A G00C,G01C,G02C 27.0 or later
G004,G014,G024 1.0 or later
Series 31i-A5 G12C,G13C 27.0 or later
Series 31i-A G103,G113 4.0 or later
Series 32i-A G203 4.0 or later
G204 1.0 or later
Series 0i-MD D4F1 01 or later
Series 0i-TD D6F1 01 or later
Series 30i/31i/32i/35i-B, Power Motion i-A are supported with all version.
CAUTION
1 When switching is made by using the detach function among those motors that need the pole position
detection function, the motors and encoders need to be of the same type.
2 The detach function is supported only by a combination of the CNC software and servo software indicated
above. When CNC software and servo software not listed above are used, the pole position detection function
and detach function cannot be used at the same time.
When the detach function is used, the relationship of the Z phase of the encoder with the pole position of the motor
may vary. So, pole position detection needs to be performed again or the AMR offset (No.2139) needs to be
rewritten to a proper value. To perform pole position detection again and rewrite the AMR offset, however, the
conventional specification requires that the power be turned off then back on. With the servo software and CNC
software listed above, the power to the CNC need not be turned off then back on to perform pole position detection
again and rewrite the AMR offset.
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When detaching an axis to which pole position detection is applied, use the procedure below.
• Start detach operation with Gn124 or bit 7 of parameter No. 12.
(Pole position detection completion signal Fn159=0)
• Rewrite the AMR offset (No. 2139) to a proper value manually or by using G10 (*1)
• Cancel detach operation.
• Pole position detection request alarm DS0650 is issued (*2).
• If an absolute encoder is used and the AMR offset value is other than 0, the alarm can be canceled by a reset to
enable operation (pole position detection completion signal Fn159=1).
• If an absolute encoder is used and the AMR offset value is 0, the alarm can be canceled by a reset after executing
pole position detection to enable operation (pole position detection completion signal Fn159=0 changed to
Fn159=1 after pole position detection completion).
• If an incremental encoder is used, the alarm can be canceled after pole position detection to enable operation
(pole position detection completion signal Fn159=0 changed to Fn159=1 after pole position detection completion).
*1 : By setting bit 0 of No. 1809 to 1, the servo ready signal SA can be turned off when pole position detection is not
completed.
*2 : By setting bit 1 of No. 1809 to 1, alarm display can be disabled even when pole position detection is not
completed. If the AMR offset is rewritten not during detach operation, a power-off request is issued. When
performing pole position detection with an absolute
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Notice of the Update of Digital Servo Software for Series 30i/ 31i/ 32i/ 35i-B/Power Motion i -A ( 90G0)
1. Update Edition
ROM series New edition Available CNC
90G0 21 .0 Series 30i/ 31i/ 32i/ 35i -B/Power Motion i -A
2. Contents of change
• Servo/Spindle synchronous control (FSSB TYPE)
Servo/Spindle synchronous control (FSSB TYPE) has been supported.
• The smooth backlash compensation to error counter in semi-closed loop

The smooth backlash compensation to error counter in semi-closed loop has been supported when Dual Position
Feedback Function is enabled. Please refer attached file “ About Dual Position Feedback Function with Smooth
Backlash Compensation ” for detail.
TITLE
Notice of the Update of Digital Servo Software for
Series 30i/ 31i/ 32i/ 35i-B/Power Motioni -A (90G0)
DRAW. No. CUST.
A-81017-066 EN
01 13.04.17 Tang Newly designed
Ed. Date Design Description
SHEET 1/2
About Dual Position Feedback Function with Smooth Backlash Compensation
(1) Outline
Dual Position Feedback function has two position control loop. The one is scale position feedback loop
( full-closed loop), the other is PULSECODER potision feedback loop ( semi-closed loop ).
Using Dual Position Feedback Function with Smooth Backlash Function, the conpensation onto
semi-closed side has been supported.
(2) Notice
・ When servo software is not supported ( 90G0/20.0 or former ), semi-full error increases.
(3) Parameter
#7 #6 #5 #4 #3 #2 #1 #0
11601 SBN
SBN (#6) When both of smooth backlash compensation and Dual Position Feedback are enabled,
a smooth backlash compensation value is :
0: Used for compensation on the semi-closed side.
1: Dependent on the settings of bit 4 of No.2206 and bit 5 of No.2010.
TITLE
DRAW. No. CUST.
A-81017-066 EN
SHEET 1/2
Notice of the Update of Digital Servo Software for Series 30i/ 31i/ 32i/ 35i-B/Power Motion i -A ( 90G0)
1. Update Edition
90G0 22 .0 Series 30i/ 31i/ 32i/ 35i –B/ Power Motion i -A
- Feedrate constant type of Servo delay compensation for chopping setting screen (R614)
Chopping feedrate constant type of Servo delay compensation (No.8360#1) has been supported.
For detail please refer TMN11/039
“FANUC Series 30i/31i/32i-MODEL A FANUC Series 30i/31i/32i-MODEL B
Chopping setting screen”
TITLE
DRAW. No. CUST.
A-81017-069 EN
SHEET 1/1
Notice of the Update of Digital Servo Software for Series 0i -D / 0i Mate -D (90C8, 90E8)

PARAMETER MANUAL
Spec. No./Ver. B-65270EN / 08
New, Add Applicable
Group Name / Outline
Correct, Del Date
- Detection of excessive error between the estimated Add 2013.08
position and actual position
Basic Function
- Safe Torque Off (STO) function Add 2013.08
- Smart Backlash Compensation Add 2013.08
- Changes of Standard Parameter Table Add 2013.08
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
TITLE
Notice of the Update of Digital Servo Software
for Series 0i-D / 0i Mate-D ( 90C8,90E8)
DRAW. No. CUST.
B-65270EN/08-004
01 13.08.09 Tsuneki Newly designed
SHEET 1/6
Notice of the Update of Digital Servo Software for Series 0i -D / 0i Mate -D (90C8, 90E8)
1. Update Edition
2.
90C8 06.0 Series 0i-D, 0i Mate-D
90E8 06.0 Series 0i-D ( Series 0i-TD, 2Path System )
- Detection of excessive error between the estimated position and actual position
Detection of excessive error between the estimated position and actual position has been supported. Please refer
“PARAMETER MANUAL (B-65270EN/08)” for detail.
- Safe Torque Off (STO) function

Safe Torque Off (STO) function has been supported. Please refer “FANUC SERVO AMPLIFIER αi series for
30i-B series CNC DESCRIPTIONS (B-65412EN/01)” for detail.
- Smart Backlash Compensation has been supported.

Smart Backlash Compensation has been supported. Please refer the technical report (*) for detail.
(*) The technical report for Smart Backlash Compensation will be released by the end of August, 2013.
- Changes of Standard Parameter Table

Standard parameter table has been changed. Please refer the attached for detail.
3. Attached
- Attached 1: Changes of Standard Parameter Table
TITLE
DRAW. No. CUST.
B-65270EN/08-004
SHEET 2/6
Attached 1. Changes of Standard Parameter Table
(1) Motor models in the following table are added or changed.
Please refer to attached table 1 about the detail of standard parameters.
Motor Model Motor Specification Motor ID Number Added/Changed
βiSc12/3000 0078 496 Added
βiSc12/3000(80A) 0078 497 Added
LiS6000B2/2(400V) 0447-B010 367 Changed
LiS7500B2/2(400V) 0448-B110 373 Changed
βiS40/2000 0089 474 Changed
βiS40/2000HV 0090 475 Changed
βiS22/2000(80A) - 482 Changed
(2) Standard parameter No. 2061(Inertia of motor) is added.

No.2061 is used by Smart Backlash Compensation.
Please refer to attached table 2 about parameter No.2061 value of each motor.
TITLE
DRAW. No. CUST.
B-65270EN/08-004
SHEET 3/6
Table 1 Changes of standard parameter
βiSc12/3000 LiS6000B2/2 LiS7500B2/2 βiS40/2000 βiSc22/2000
Motor Model βiSc12/3000 βiS40/2000
(80A) HV(400V) (400V) HV (80A)
Motor Specification 0078 0078 0447-B010 0448-B110 0089 0090
Motor ID Number 496 497 367 373 474 475 482
Symbol FS0i-D
2003 00001000 00001000 00000000 00001000 00001000 00001000 00001000
2004 00000011 00000011 00000011 00000011 00000011 00000011 00000011
2005 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2006 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2007 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2008 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2009 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2010 00000000 00000000 00000100 00000100 00000000 00000000 00000000
2011 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2012 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2013 00000000 00001110 00000110 00001000 00000010 00000010 00001110
2014 00000000 00001110 00000110 00001000 00000010 00000010 00001110
2210 00000000 00000000 00000100 00000100 00000000 00000000 00000000
2211 00001110 00001110 00001000 00001000 00001010 00001010 00001110
2300 00000000 00000000 10000000 10000000 00000000 00000000 00000000
2301 00000000 00000000 00000000 00000000 00000000 00000000 00000000
PK1 2040 402 804 1469 1123 1624 1624 2368
PK2 2041 -2217 -4434 -9936 -6625 -7197 -7197 -13600
PK3 2042 -1304 -1304 -1330 -2696 -1341 -1341 -1331
PK1V 2043 170 85 7 7 208 208 121
PK2V 2044 -1530 -765 -96 -92 -1870 -1870 -1086
PK3V 2045 0 0 0 0 0 0 0
PK4V 2046 -8235 -8235 -8235 -8235 -8235 -8235 -8235
POA1 2047 4960 9920 -11870 -12391 4057 4057 6992
BLCMP 2048 0 0 0 0 0 0 0
DPFMX 2049 0 0 0 0 0 0 0
POK1 2050 956 956 956 956 956 956 956
POK2 2051 510 510 510 510 510 510 510
RESERV 2052 4200 4200 0 0 2600 2600 2800
PPMAX 2053 21 21 21 21 21 21 21
PDDP 2054 1894 1894 1894 1894 1894 1894 1894
PHYST 2055 319 319 319 319 319 319 319
EMFCMP 2056 0 0 -7680 0 0 0 -5130
PVPA 2057 -5140 -5130 0 0 -3881 -3881 -3598
PALPH 2058 -3500 -1750 0 0 -3732 -3732 -1500
PPBAS 2059 0 0 0 0 0 0 0
TQLIM 2060 7282 3641 4369 4046 6554 6554 3641
EMFLMT 2061 620 620 2073 1986 758 758 880
POVC1 2062 32492 32492 32706 32709 32413 32413 32431
POVC2 2063 3445 3445 774 739 4431 4431 4207
TGALMLV 2064 4 4 4 4 4 4 4
POVCLMT 2065 10250 2562 688 658 13201 13201 3132
PK2VAUX 2066 0 0 0 0 0 0 0
FILTER 2067 0 0 0 0 0 0 0
FALPH 2068 0 0 0 0 0 0 0
VFFLT 2069 0 0 0 0 0 0 0
ERBLM 2070 0 0 0 0 0 0 0
PBLCT 2071 0 0 0 0 0 0 0
SFCCML 2072 0 0 0 0 0 0 0
PSPTL 2073 0 0 0 0 0 0 0
AALPH 2074 16384 0 20480 0 8192 8192 0
OSCTPL 2077 0 0 0 0 0 0 0
PDPCH 2078 0 0 0 0 0 0 0
PDPCL 2079 0 0 0 0 0 0 0
DPFEX 2080 0 0 0 0 0 0 0
DPFZW 2081 0 0 0 0 0 0 0
BLENDL 2082 0 0 0 0 0 0 0
MOFCTL 2083 0 0 0 0 0 0 0
RTCURR 2086 2363 1181 610 596 2154 2154 1309
TDPLD 2087 0 0 0 0 0 0 0
MCNFB 2088 0 0 0 0 0 0 0
BLBSL 2089 0 0 0 0 0 0 0
ROBSTL 2090 0 0 0 0 0 0 0
ACCSPL 2091 0 0 0 0 0 0 0
ADFF1 2092 0 0 0 0 0 0 0
VMPK3V 2093 0 0 0 0 0 0 0
BLCMP2 2094 0 0 0 0 0 0 0
AHDRTL 2095 0 0 0 0 0 0 0
RADUSL 2096 0 0 0 0 0 0 0
SMCNT 2097 0 0 0 0 0 0 0
DEPVPL 2098 0 0 0 0 0 0 0
ONEPSL 2099 400 400 400 400 400 400 400
INPA1 2100 0 0 0 0 0 0 0
INPA2 2101 0 0 0 0 0 0 0
DBLIM 2102 0 0 0 0 0 0 0
ABVOF 2103 0 0 0 0 0 0 0
ABTSH 2104 0 0 0 0 0 0 0
TRQCST 2105 418 836 1768 2261 1503 1503 1384
LP24PA 2106 0 0 0 0 0 0 0
VLGOVR 2107 0 0 0 0 0 0 0
RESERV 2108 0 0 0 0 0 0 0
BELLTC 2109 0 0 0 0 0 0 0
MGSTCM 2110 1814 812 0 0 263 263 1280
DETQLM 2111 7930 7930 0 0 3065 3065 2866
AMRDML 2112 0 0 0 0 0 0 0
NFILT 2113 0 0 0 0 0 0 0
NINTCT 2127 1194 1194 0 0 2712 2712 2459
MFWKCE 2128 3000 6000 0 0 3354 3354 10000
MFWKBL 2129 2056 2056 0 0 1038 1038 562
LP2GP 2130 0 0 0 0 0 0 0
LP4GP 2131 0 0 0 0 0 0 0
LP6GP 2132 0 0 0 0 0 0 0
PHDLY1 2133 5138 5138 0 0 2567 2567 3350
PHDLY2 2134 8990 4382 0 0 8967 8967 4371
DGCSMM 2159 0 0 0 0 0 0 0
TRQCUP 2160 0 0 0 0 0 0 0
OVCSTP 2161 0 0 0 0 0 0 0
POVC21 2162 32765 32765 0 0 32765 32765 32764
POVC22 2163 35 35 0 0 36 36 44
POVCLMT2 2164 6328 1582 0 0 7713 7713 1947
MAXCRT 2165 45 85 85 185 85 45 85
ACCBSLM 2304 0 0 0 0 0 0 0
ACDCEND 2305 0 0 0 0 0 0 0
DCIDBS 2310 0 0 0 0 823 1646 0
* Changed or added parameters are described in the frames.
TITLE
DRAW. No. CUST.
B-65270EN/08-004
SHEET 4/6
Table 2 Parameter No.2061 value of each motor
βiS2 βiS4 βiS8
βiS2 αiF1 βiS2 αiF2 βiS4 βiS8 βiS0.2 βiS0.3
Motor Model 4000 4000 3000
4000HV 5000 4000 5000 4000 3000 5000 5000
40A 40A 40A
Motor ID Number 251 252 253 254 255 256 257 258 259 260 261
EMFLMT 2061 283 482 283 141 551 408 204 598 299 29 27
βiS12
αiS2 αiS2 βiS4 αiS4 αiS4 βiS8 βiS12 βiS12 αC4 βiS12
Motor Model 2000
5000 5000HV 4000HV 5000 5000HV 3000HV 2000 3000HV 3000i 3000
40A
Motor ID Number 262 263 264 265 266 267 268 269 270 271 272
EMFLMT 2061 284 285 409 465 465 601 416 833 618 838 620
αiF4 βiS22 αiF4 αC8 αiF8 βiS22 αiF8 βiS0.4 βiS0.5 βiS1 βiSc8
Motor Model
5000 2000 5000HV 2000i 3000 2000HV 3000HV 5000 6000 6000 3000
Motor ID Number 273 274 275 276 277 278 279 280 281 282 283
EMFLMT 2061 773 880 818 1088 818 884 817 49 48 43 598
βiSc8
αiS2 αiS8 αiS8 αiS2 αiS12 αiS12 αiS8 αC12 αiS8 αiF12
Motor Model 3000
6000 4000 4000HV 6000HV 4000 4000HV 6000 2000i 6000HV 4000
40A
Motor ID Number 284 285 286 287 288 289 290 291 292 293 294
EMFLMT 2061 348 239 248 348 378 381 387 2030 387 1395 299
βiSc12 βiS22 βiS22

αiF12 αC22 αiF22 βiSc12 αiF22 αC30 αiF30 αiF30
Motor Model 2000 1500 1500
4000HV 2000i 3000 2000 3000HV 1500i 4000 4000HV
40A FS0i FS0i, 40A
Motor ID Number 295 296 297 298 299 300 301 302 303 304 305
EMFLMT 2061 1400 1966 1439 834 1430 416 1205 1016 1667 1634 508
βiSc2 βiSc4
βiSc2 αiF40 αiF40 αiF40 βiSc4 βiS22 βiS22 αiS22 αiS22
Motor Model 4000 4000
4000 3000 3000Fan 3000HV 4000 3000 3000HV 4000 4000HV
40A 40A
Motor ID Number 306 307 308 309 310 311 312 313 314 315 316
EMFLMT 2061 283 1388 1388 1387 141 408 204 716 698 499 555
αiS50 αiS60
αiS30 αiS30 αiS40 αiS40 αiS50 αiS50 αiS50 αiS60 αiS100
Motor Model 3000HV 3000HV
4000 4000HV 4000 4000HV 3000 3000Fan 3000HV 3000Fan 2500Fan
Fan Fan
Motor ID Number 318 319 322 323 324 325 326 327 328 329 330
EMFLMT 2061 594 598 670 673 504 504 509 509 500 500 664
αiS100 αiS200
2500Fan 2500 2500HV 2500 2500HV 2000 2000HV 3000HV 2000
Fan Fan
Motor ID Number 331 334 335 336 337 338 339 342 343 344 345
EMFLMT 2061 664 832 664 664 832 832 832 831 831 672 972
αiS500 αiS500 αiS1000 αiS1000

Motor Model
2000HV 3000HV 2000HV 3000HV
Motor ID Number 346 347 348 350
EMFLMT 2061 972 807 1699 1385
DiS22 DiS22 DiS85 DiS85 DiS110 DiS110 DiS260 DiS260 DiS260 DiS260 DiS370
Motor Model 600 600 400 400 300 300 300 300 600 600 300
(200V) (400V) (200V) (400V) (200V) (400V) (200V) (400V) (200V) (400V) (200V)
Motor ID Number 421 422 423 424 425 426 427 428 429 430 431
EMFLMT 2061 514 514 552 552 960 960 754 754 752 752 733
Motor Model 300 250 250 250 250 200 200 150 150 150 150
(400V) (200V) (400V) (200V) (400V) (200V) (400V) (200V) (400V) (200V) (400V)
Motor ID Number 432 433 434 435 436 437 438 439 440 441 442
EMFLMT 2061 733 1613 1613 1634 1634 2740 2740 3631 3226 3331 2960
DiS85 DiS110 DiS260 DiS22

Motor Model 1000 1000 1000 1500
(200V) (200V) (200V) (200V)
EMFLMT 2061 717 960 795 660
TITLE
DRAW. No. CUST.
B-65270EN/08-004
SHEET 5/6
Table 2 Parameter No.2061 value of each motor (continued)
αiS22 αiS22 αiS2000 αiS3000 αiS1000 αiS2000 αiS3000 αiS12 αiS12 αiS1000 αiS4
Motor Model
6000 6000HV 2000HV 2000HV 2000HV 2000HV 2000HV 6000 6000HV 3000HV 6000
Motor ID Number 452 453 454 455 458 459 460 462 463 465 466
EMFLMT 2061 741 741 3648 4984 1736 3648 4984 314 314 1385 569
αiS2000 βiS12
αiS4 αiS50 αiS50 αiS60 αiS60 βiS30 βiS30 βiS40 βiS40
Motor Model 2000HV 3000
6000HV 2000 2000HV 2000 2000HV 2000 2000HV 2000 2000HV
spindle 80A
Motor ID Number 467 468 469 470 471 472 473 474 475 476 477
EMFLMT 2061 569 649 649 764 764 775 777 758 758 3648 620
βiS22 αiF40 βiSc22 βiF4 βiF8 βiF12

βiSc22 βiF4 βiF8 βiF12 βiF22
Motor Model 2000 3000HV 2000 3000 2000 2000
2000 3000 2000 2000 2000
80A FAN 80A 40A 40A 40A
Motor ID Number 478 479 481 482 483 484 485 486 487 488 489
EMFLMT 2061 880 1387 880 880 838 838 1088 1088 2030 2030 1966
βiF22 βiSc12
βiF30 αiF8 αiF8 αiF22 αiF22 βiSc12
1500 4000 4000HV 4000 4000HV 3000
80A 80A
Motor ID Number 490 491 492 493 494 495 496 497
EMFLMT 2061 1966 1205 654 654 1234 1234 620 620
TITLE
DRAW. No. CUST.
B-65270EN/08-004
SHEET 6/6
Specifications for SERVO HRV+ Control
Name FANUC AC SERVO MOTOR i series

FANUC AC SERVO MOTOR i series
PARAMETER MANUAL

Correct, Del Date
+ NEW 2013.09
Basic Function SERVO HRV Control
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
01 13.09.20 S.Ikai Newly designed
SHEET 1/13
FANUC Series 30i/31i/32i/35i-B
Power Motion i-A
Specifications for
SERVO HRV+ Control
Table of contents
(1) FEATURES OF SERVO HRV+ CONTROL ................................................. 3
(2) SERIES AND EDITIONS OF APPLICABLE SERVO SOFTWARE............ 3
(3) DETAILS...................................................................................................... 4
(4) PARAMETERS............................................................................................ 5
(5) TUNING PROCEDURE ............................................................................... 8
(6) EXAMPLES ( HIGHER RESPONSE OF VELOCITY LOOP

/ NOT HIGHER RESPONSE OF VELOCITY LOOP ................................. 9
(7) MOTOR-SPECIFIC PARAMETER FOR SERVO HRV+ CONTROL ......... 12
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 2/13
(1) Features of SERVO HRV+ Control
SERVO HRV+ Control is a function to make response of current loop higher. And as a merit of higher response of
current loop, it becomes possible to set higher velocity loop gain also. As a result, higher cutting surface quality can be
achieved.
+
In the following example, higher path accuracy is achieved with SERVO HRV Control.
Smoother path of motor
Decrease of
protrusion
5m/div 5m/div
(a) SERVO HRV Control (b) SERVO HRV+ Control

Fig. 1 Example of path accuracy
By the way, in case that "response limit of velocity loop is determined not by current loop response, but mechanical
characteristic of the machine", it is difficult to set higher gain of velocity loop gain, even with SERVO HRV+ Control.
(2) Series and editions of applicable servo software
Servo software
CNC
Series Editions
Series 30i /31i /32i /35i -B
90J0,90K0 02.0 and subsequent editions
Power Motion i-A
+
 In order to use SERVO HRV Control, it is necessary to prepare new servo card and corresponding CNC software
+
which support SERVO HRV Control.
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 3/13
(3) Details
SERVO HRV+ Control is a function to make response of current loop higher. And as a merit of higher response of
current loop, it becomes possible to set higher velocity loop gain. As a result, response of velocity loop becomes higher
also.
+
On the other hand, by higher response of current loop by SERVO HRV Control, mechanical vibration at high frequency
(around 1kHz) may occur, until which frequency current loop could not response without SERVO HRV+ Control. In such a
case, please avoid the vibration by using HRV Filters.
Higher response of current loop
HRV Filters - Current control method of higher response
Notch type 2 order low pass - Optimized current loop gain
Velocity loop Torque
command ＋ Velocity command SERVO
loop gain HRV+ Ctrl. Voltage command
-
Velocity feedback Current feedback
Fig. 2 Control block diagram
Two types of HRV Filters are prepared, one is "notch type" filter and the other is "2 order low pass" filter.
In case high gain band is narrow, please set notch type filter.
In case high gain band is broad or plural at high frequency, please set 2 order low pass filter.
Here, in case strong* low pass filter can only eliminate the vibration, response of velocity loop gain can not be improved
by the side effect of the filter.
* Strong filter means that cut-off frequency of low pass filter is low.
Using “notch type” filter Using “2 order low pass” filter

High gain band Gain High gain band
Gain
Is narrow. Is broad.
SERVO HRV+ Control

SERVO HRV+ Control
SERVO HRV Control SERVO HRV Control

Frequency Frequency
Gain Narrow high gain band are plural.
SERVO HRV+
Control
SERVO HRV Control
Frequency
Fig. 3 Example for HRV Filter
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 4/13
(4) Parameters
Function bit parameter
Set the following bit parameter in order to use SERVO HRV+ Control.
#7 #6 #5 #4 #3 #2 #1 #0
2422 HRVPLS
HRVPLS (#4) SERVO HRV+ Control is
0: Not used
1: Used
When this bit parameter is set, SERVO HRV+ Control is enabled on High-speed HRV
current control mode.
No.2283#0 Cutting（G5.4Q1） Cutting Rapid

+
0 SERVO HRV3 Ctrl. SERVO HRV2 Ctrl. SERVO HRV2 Ctrl.
HRV3 Setting
1 SERVO HRV3+ Ctrl. SERVO HRV3+ Ctrl. SERVO HRV2 Ctrl.
HRV4 Setting 0 SERVO HRV4+ Ctrl. SERVO HRV3 Ctrl. SERVO HRV3 Ctrl.
SERVO HRV+ Control is enabled in SERVO HRV3 Control setting or SERVO HRV4
Control setting.
When bit parameter of SERVO HRV+ Control is set to 1 in SERVO HRV2 Control setting,
the alarm SV0417 “illegal digital servo parameter” occurs.( DGN No.352 = 4224.)
Motor-specific parameters
+
2590 Current loop gain for SERVO HRV Control
+
2591 Current loop gain for SERVO HRV Control
+
2595 Gain magnification for SERVO HRV Control
2159 Variable current control loop gain depending on current
2160 Variable current control loop gain depending on current
#7 #6 #5 #4 #3 #2 #1 #0
2560 PK12S2P VOLTFL
PK12S2P (#1) The current control loop gain internally 4 times function in SERVO HRV+ Control is
0: Not used.
1: Used.
VOLTFL (#0) Filter in current control loop is
0: Not used.
1: Used.
+
Motor-specific parameters are mentioned in “(7) MOTOR-SPECIFIC PARAMETER FOR SERVO HRV CONTROL”.
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 5/13
Tuning parameters
By higher response of current loop by SERVO HRV+ Control, mechanical vibration at high frequency (around 1kHz) may
occur. In such a case, please tune the following filters for suppressing the vibration.
■ Resonance elimination filter ( “Notch type” filter with damping )

Resonance elimination filter cuts signals of a particular frequency band. Three parameters are used for this filter
(Attenuation center frequency, Attenuation bandwidth, Damping).
Attenuation center Attenuation

Damping [%]
frequency [Hz] bandwidth [Hz]
Resonance elimination filter 2 No.2360 No.2361 No.2362
Resonance elimination filter 5* No.2640 No.2641 No.2642
* Resonance elimination filter 5 can use for semi-closed system only.

Resonance elimination filter 5 can not use for full-closed system. The alarm SV0417 “illegal digital servo
parameter” occurs(DGN No.352 = 6402) when resonance elimination filter 5 is used for full-closed system.
2360, 2363, 2366,

RE filter 1 to 5 : Attenuation center frequency
2113, 2640
[Unit of data] Hz
[Valid data range] 96 ~ 2000(HRV3), 96 ~ 4000(HRV4)
The vibration frequency is set in this parameter.
When the vibration frequency is larger than valid data range or there are plural vibration
freqeuncy, please use 2 order low pass filter.
2361, 2364, 2367,

RE filter 1 to 5 : Attenuation bandwidth
2177, 2641
[Unit of data] Hz
[Valid data range] 0 ~ attenuation center frequency
2362, 2365, 2368,

RE filter 1 to 5 : Damping
2359, 2642
[Unit of data] %
[Valid data range] 0 ~ 100 ( If it is 0, the attenuation ratio is maximized. )
■ Low pass filter

When it is set to value in No.2643, 2 order low pass filter whose cut-off frequency is setting value in No.2643 is enabled.
+
This low pass filter is enabled only on SERVO HRV Control mode only, and not enabled on other mode.
+
2643 Low pass filter for SERVO HRV Control : Cut-off frequency
[Unit of data] Hz
[Valid data range] 500 ~ 1000
Setting value is set from the 2/3 of vibration frequency to smaller value until the vibration
is disappeared.
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 6/13
When the following function bit is enabled, torque command filter* that is enabled by default setting is disabled on SERVO
HRV+ Control mode. Both in case,
- High frequency vibration(around 1kHz) does not occur when SERVO HRV+ Control is enabled.
- It is necessary to get higher response.
Please set following parameter TFILOF to 1.
+
* On SERVO HRV Control mode, in order not to get too higher response than necessary response, the low pass filter
is enabled in default setting.
#7 #6 #5 #4 #3 #2 #1 #0
2566 TFILOF
TFILOF (#6) Low pass filter on SERVO HRV+ Control in default setting is
0: Enabled
1: Disabled
■ Velocity loop gain magnification

Higher gain by SERVO HRV+ Control is set in velocity loop gain magnification in high-speed HRV control mode.
#7 #6 #5 #4 #3 #2 #1 #0
2202 VGCCR
VGCCRF (#1) Velocity loop gain switching function is
0: Not used.
1: Used.
2335 Velocity loop gain magnification on high-speed HRV control mode

[Unit of data] %
[Valid data range] 100 ~ 800
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 7/13
(5) Tuning procedure
Step 1: Initial setting

Confirmation and setting the following parameters.
+
1. Confirmation of No.2590, No.2591, No.2595 (SERVO HRV Control)
2. Confirmation of No.2159, No.2160 (Variable current control loop gain depending on current)
3. Confirmation of No.2560#1, #0 (4 times bit, filter in current control loop)
4. No.2271#0=1 (Function bit for tuning SERVO HRV+ Control
This bit is enabled SERVO HRV+ Control at all times.)
+
5. No.2422#4=1 (Function bit for SERVO HRV Control)
Step 2: Check vibration

Check whether the high frequency vibration(around 1kHz) occurs or not.
When vibration occurs on SERVO HRV+ Control mode(No.2422#4=1), proceed to Step 3.
+
When vibration does not occur on SERVO HRV Control mode(No.2422#4=1), it is set to 1 in No.2566#6, and default filter
is disabled.
When vibration occurs after setting to 1 in No.2566#6, proceed to Step3.
When vibration does not occur after setting to 1 in No.2566#6, tune velocity loop gain.
When vibration(around 1kHz) occurs at tuning velocity loop gain, proceed to Step3.
When vibration(around 1kHz) does not occur at tuning velocity loop gain, set velocity loop gain magnification in No.2335,
and please proceed to Step 4.
Step 3: Tuning of filters and velocity loop gain

Suppress the high frequency vibration(around 1kHz) with notch type filter or/and 2 order low pass filter.
After suppressing the vibration, tune velocity loop gain and set velocity loop gain magnification in No.2335.
Then please proceed to Step4.
Step 4: Final setting

+
Restore the following parameter for tuning SERVO HRV Control*.
1. No.2271#0=0 (Function bit for tuning SERVO HRV+ Control
This bit to be enabled SERVO HRV+ Control at all times.)
* It is necessary to set to 0 in No.2271#0 after tuning.
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 8/13
Flow chart for tuning
Start
Step1
Confirmation
No.2590, No.2591, No.2595
No.2159, No.2160
No.2560#1, #0
Setting bit for tuning

No.2271#0=1
Setting SERVO HRV+ Control

No.2422#4=1
Step2
Dose vibration* occur? Vibration not occurs Vibration does not occur
* around 1kHz
Default filter OFF
Tuning of velocity loop gain
Vibration occurs No.2566#6=1
Dose vibration* occur?

* around 1kHz
Vibration occurs
Vibration occurs Dose vibration* occur?
* around 1kHz
Vibration does not occur
Step3
Tuning of filter
Tuning of velocity loop gain
Step4
Restore the following bit

No.2271#0=0
end
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 9/13
(6) Examples ( higher response of velocity loop / NOT higher response of velocity loop )
Example for higher response of velocity loop
- No vibration in SERVO HRV+ Control.
SERVO HRV Control SERVO HRV+ Control
Velocity loop gain = 300% Velocity loop gain = 300%
- Tuning of filter
When velocity loop gain is up until 800%, the vibration whose frequency is 1.33kHz occurs.
So 2 order low pass filter is enabled.(No.2643=900(=1330×2/3))
+ +
Low pass filter is OFF(No.2566#6=1) 2 order low pass filter whose cut-off frequency is 900Hz
is enabled(No.2643=900)
- Tuning of velocity loop gain
Tune velocity loop gain and response of velocity loop is higher.
Higher response
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 10/13
Example for NOT higher response of velocity loop
- High frequency vibration(620Hz) occurs in SERVO HRV+ Control
TCMD (measured in 125uSec sampling) FOURIER mode ( by Ctrl + F )
Resonance point
- Tuning of filter
Set lower velocity loop gain,measure velocity loop frequency response and set notch filter to resonance point.
+
Resonance point Resonance point
- Tuning of velocity loop gain

Tune velocity loop gain but the response can not be higher by anti-resonance point’s limit.

Elimination of notch filter Elimination of notch filter
Not higher
response
Anti-resonance point Anti-resonance point
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 11/13
(7) MOTOR-SPECIFIC PARAMETER FOR SERVO HRV+ CONTROL
The following SERVO motor in table has already fixed the motor-specific parameter for SERVO HRV+ Control.
If you use SERVO HRV+ Control with other motor, please contact FANUC.
■ i F Series
αiF4/5000 αiF8/3000 αiF8/4000 αiF12/4000 αiF22/3000 αiF22/4000

Motor No. 273 277 492 293 297 494
No.2013#0 1 1 1 1 1 1
No.2422#4 1 1 1 1 1 1
No.2590 6800 9000 7200 9700 14000 9000
No.2591 -7800 -11000 -10500 -12200 -15500 -13000
No.2595 1528 1532 1939 1944 1239 1734
No.2159 4114 4370 4374 4367 4881 5141
No.2160 5200 5210 5200 2640 5200 5200
No.2560#1 0 0 0 0 0 0
No.2560#0 0 0 0 0 0 0
αiF30/4000 αiF40/3000
Motor No. 303 307
No.2013#0 1 1
No.2422#4 1 1
No.2590 7800 13200
No.2591 -11800 -21500
No.2595 1636 1642
No.2159 2829 3856
No.2160 5210 5210
No.2560#1 0 0
No.2560#0 0 0
αiF4/5000HV αiF8/3000HV αiF8/4000HV αiF12/4000HV αiF22/3000HV αiF22/4000HV

Motor No. 275 279 493 295 299 495
No.2013#0 1 1 1 1 1 1
No.2422#4 1 1 1 1 1 1
No.2590 5200 9500 7200 10700 12000 9200
No.2591 -9000 -14000 -11000 -15500 -14000 -14000
No.2595 1422 1324 1839 1442 1436 1735
No.2159 4369 4371 4375 4627 3601 4114
No.2160 5210 5210 5200 2630 5210 5210
No.2560#1 0 0 0 0 0 0
No.2560#0 0 0 0 0 0 0
αiF30/4000HV αiF40/3000HV
Motor No. 304 309
No.2013#0 1 1
No.2422#4 1 1
No.2590 7000 13000
No.2591 -12000 -24000
No.2595 1839 1540
No.2159 3343 4626
No.2160 5210 5200
No.2560#1 0 0
No.2560#0 0 0
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 12/13
■ i S Series
αiS8/4000 αiS12/4000 αiS22/4000 αiS30/4000 αiS40/4000

Motor No. 285 288 315 318 322
No.2013#0 1 1 1 1 1
No.2422#4 1 1 1 1 1
No.2590 5250 6500 7700 8200 7900
No.2591 -12200 -12200 -12000 -11600 -11600
No.2595 1744 1942 1842 1738 1746
No.2159 10790 5141 4113 3594 2570
No.2160 2615 2630 2640 2630 2560
No.2560#1 0 0 0 0 0
No.2560#0 0 0 0 0 0
αiS8/4000HV αiS12/4000HV αiS22/4000HV αiS30/4000HV αiS40/4000HV

Motor No. 286 289 316 319 323
No.2013#0 1 1 1 1 1
No.2422#4 1 1 1 1 1
No.2590 5250 6500 7700 8200 7900
No.2591 -12200 -12200 -12000 -11600 -11600
No.2595 1744 1942 1842 1738 1746
No.2159 10790 5141 4113 3594 2570
No.2160 2615 2630 2640 2630 2560
No.2560#1 0 0 0 0 0
No.2560#0 0 0 0 0 0
TITLE
Specifications for
SERVO HRV+ Control
DRAW. No. CUST.
B-65270EN/08-005
SHEET 13/13
Specifications for Smart Backlash Compensation

PARAMETER MANUAL

Correct, Del Date
NEW 2013.08
Basic Function Smart Backlash Compensation
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
TITLE
Specifications for
Smart backlash compensation
DRAW. No. CUST.
B-65270EN/08-006
01 13.08.28 Iijima Newly designed
SHEET 1/16
FANUC Series 30i/31i/32i-B
FANUC Series 0i-D
Specifications for
Smart Backlash Compensation
Table of contents
(1) FEATURES ........................................................................................ 3
(2) APPLICABLE SERVO CONTROL SOFTWARE SERIES/EDITION.. 3
(3) DETAILS ............................................................................................ 4
(4) PARAMETERS................................................................................... 5
(5) TUNING PROCEDURE ...................................................................... 7
(6) TUNING WITH SERVO GUIDE ........................................................ 13
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Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 2/16
(1) Features
Smart backlash compensation (SBC) realizes higher precision of the machining at a reverse point using oprimum backlash
compensation based on:
z both the load on the servo motor and the distance between the motor-ball screw coupling and the table,
z the load on the ball screw
Conventional backlash compensation is easy to make slits at reverse points on a circle because of overcorrection shown in Fig. 1(a).
SBC resolves such overcorrection so that such slits cannot be seen (Fig. 1(b)).
(a) (Conventional) backlash compensation (b) Smart backlash compensaiton

Fig. 1 Errors of machining point measured by double ball bar system
(2) Applicable servo control software Series/Edition
CNC Servo control software CNC

Series Edition systerm software
(*1)
90G0 22.0 and later Planned to be released by
Series 30i/31i/32i - B
90J0,90K0 01.0 and later(*1) the end of September 2013
0i - MD/TD : D4F1, D6F1 - 30.0 or later
Series 0i/0i Mate - D 90C8,90E8 6.0 and later
0i Mate - MD/TD : D5F1, D7F1 - 30.0 or later
(*1) Servo software 90G0/23.0 or later, 90J0,90K0/02.0 or later is neccesary to use the following functions,
The setting of the torque constant parameter is increased by a factor of 10 for use in the NC (No.2301#7)
Dual position feedback (No.2019#7)
(*2) Support of calculation for coeficients smart backlash compensation is available on SERVO GUIDE 9.10 or later.
NOTE：Quadrant protrusions and backlash acceleration

z SBC is a function to compensate the position.
z Preadjustment of backlash acceleration to resolve quadrant protrusions is recommended before starting
to tune SBC.
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Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 3/16
(3) Details
Fig. 2 shows a schematic block diagram illustrating SBC. SBC compensates for the position controll loop. Conventional backlash
compensation simply adds constant compensation for the position loop. On the other hand, SBC computes compensation in real time
based on the factors below. This new system allows optimum compensation depending on operating conditions.
z The motor torque and the table position
z The load on the motor and on the reduction mechanism (ball screw etc.).
Fig. 2 Schematic block diagram illustrating smart backlash compensation
CAUTION
Effects of SBC will not directly emerge as feedback data observed with SERVO GUIDE. A measuring
instrument is required to evaluate precision of machining. Major measuring instruments are, for example,
z Double ball bar measurement system (DBB; Renishaw QC20-W etc.)
z Two-dimensional cross grid encoder (Heidenhain KGM 181 etc.)
In this document, tuning method of SBC is described based on Renishaw DBB.
NOTE: Inch-system detection unit is NOT supported

z SBC does NOT support any inch-system detection unit. Please use a metric detection unit.
z NC programme can be wrtten in inch-system demensions.
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Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 4/16
(4) Parameters
#7 #6 #5 #4 #3 #2 #1 #0
2216 SBC
SBC(#0) 0: To disable smart backlash compensation
1: To enable smart backlash compensation
2188 SBC: shape coefficient (KELS)

[Valid data range] 0 to 32767
[Typical setting] This parameter is required to tune based on backlashes measured by an external instrument.
A rotary axis needs to set this parameter to 0.
2189 SBC: torsional coefficient (KTRT)

[Typical setting] This parameter is required to tune based on backlashes measured by an external instrument.
2190 SBC: limit for compensation

[Unit of data] 0.01 um (for a linear axis) / 0.01 mdeg (for a rotary axis)
When setting this parameter to 0, compensation is limitless.
2191 Total inertia of drive system of an axis (ratio of whole drive system to motor)
[Unit of data] %
[Typical setting] Total inertia of drive system (from motor to table)
No.2191 = × 100
Motor inertia
“Total inetia” is a possible value from the standpoint of machine design.
CAUTION
No.2191 requires a positive value. If negative, an illegal servo parameter setting alarm occurs (detail No.1913).
2061 Motor inertia

[Typical setting] Calculate by the following formula using Motor inertia, torque constant and maximum amplifier current
described in FANUC AC SERVO MOTOR DESCRIPTIONs.
2 × Motor inertia [kgm 2 ]
No.2061 = × 2 23
Torque constant [Nm/Arms]× Maximum amplifier current [Ap]
* See the technical report (TMS13/049) about No.2061 value for each motor.
2087 SBC: torque offset

[Unit of data] TCMD unit
[Valid data range] -7282 to +7282
[Typical setting] On a vertical axis, set this parameter to a value of TCMD equivalent to gravity
NOTE
Set parameter No.2087 only for a vertical axis. Set 0 for a horizontal axis. This parameter should NOT exceed
±7282.
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Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 5/16
11811 Machine coordinate at the coupling of motor and ball screw
[Unit of data] mm / inch
[Valid data range] -32768 to 32767
[Example setting] See an example shown in Fig. 3. (Setting value should be machine coodinate out of the stroke limit.)
NOTE
Specif diameter values for any axes for which diameter programming is specifies.
No.11811
Y = -700 Y axis
Machine coordinate
at the coupling
Y = -700
300mm
Machine coordinate
Y = -400
Y axis: range of motion

400mm
X axis
Ball screw
Table
Servo motor
Machine coordinate
at the coupling
X = -50 50 mm
X axis: range of motion
500mm
No.11811
X = -50 Origin of machine
coordinate system
Machine
coordinate
X = +500
Fig. 3 An example of machine configurations and parameter No.11811
TITLE
Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 6/16
(5) Tuning procedure
Step 1: Initial setting

The following parameters are required to set to appropriate values and verify them first.
1. No.2061 (motor inertia: the value defined by the motor specifications)
2. No.2191 (inertia of drive system: the value defined by the machine specifications)
3. No.11811 (position of the coupling: the value defined by the machine specifications)
4. No.2216#0 = 1 (to enable SBC)
Step 2: Adjustment of torque offset for vertical axis

Set parameter No.2087 to steady torque supporting a vertical axis observed with SERVO GUIDE.
1. To observe TCMD of the vertical axis for the excited motor with the following setting.
z Unit：A(p)
z Conv. Coef.：1
z Conv. Base：1
2. To set No.2087 to the observed value.
Step 3: Adjustment of parameter No.2188 (shape coefficient)
NOTE
You can skip Step 3 and go ahead to Step 4 in the case of the machine which is NOT considered to have backlash
depending on the table position or the rotary axis .
The following data are required to mesure with SERVO GUIDE during circular interpolation motion. Fig. 4(a) shows an example of
those data.
SMTTRQ: estimated load torque
SCREWL: length of ball screw between the table and the coupling
Check the obtained data to read both the estimated load torque and the length of ball screw at a reverse point.
On the other hand, measure the precision of machining point motion with an external instrument. Fig. 4(b) shows ans example of
measurement with DBB system.
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Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 7/16
SCREWL
∆SMTTRQ SMTTRQ
(a) Measurement for the motion of X axis
(b) Measurement of machining point motion with DBB

Fig. 4 Measurements for tuning of SBC
NOTE
z A backlash measured by the external instrument (DBB etc.) at a reverse point on a circle must correspond
to the data of SCREWL and SMTTRQ at the same point on the circle.
z Make sure the setting of parameter No.11811 is valid if observed SCREWL data seems wrong.
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Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 8/16
In the case of longer stroke
Evaluate precisions of cicular motions around both ends of the actual machining area with the external instrument as shown in Fig. 5,
measuring backlashes at both Point A and B.
Side view A B
Top view
A B
Table
Actual machining area

Evaluate precisions of circular
motions around both ends of the
actual machining area, measuring
backlases at Point A and B.
Fig. 5 Tuning of parameter No.2188 (longer stroke)
In the case of shorter stroke

Measure backlashes at both end of a circle Point A and B during circular motion around the center of the actual machining area as
shown Fig. 6.
Fig. 6 Tuning of parameter No.2188 (shorter stroke) and No.2189
TITLE
Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 9/16
Parameter No.2188 (shape coefficient) can be calculated using the following fomula and mesurements obtained from SERVO
GUIDE and the external instrument (DBB etc.).
z SCREWL [mm]: the length of ball screw at a reverse point
z ΔSMTTRQ [%]: the change of load torque at the reverse point
z BL [μm]: the backlash at the reverse point
−1
1 ⎛ BL A [μm] BL B [μm] ⎞ 2 2
No.2188 = No.2105 × ⎜⎜ − ⎟ ×
SCREWL A − SCREWL B [ mm] ⎝ ΔSMTTRQ A [%] ΔSMTTRQ B [%] ⎟⎠ 10 4
(suffixes A and B indicates positions shown in Fig. 5 or Fig. 6)
Numerical example for a linear axis
Point A Point B
No.2105 562 (αi S8/4000:)
SCREWL 100 mm 400mm
Backlash 1 μm 2.5 μm
ΔSMTTRQ 2.3% 2.2 %
−1
1 ⎛ 1 2.5 ⎞ 2 2
No.2188 = 562 × ⎜ − ⎟ × = 68
400 − 100 ⎝ 2.3 2.2 ⎠ 10 4
TITLE
Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 10/16
Step 4: Adjustment of No.2189 (torsional coefficient)
Fine adjustment of parameter No.2189 is also important to realize higer precision near the center of the stroke, where actual
machining is carried out. Evaluate precisions of cicular motion around the center of the stroke after setting parameter No.2188,
measuring backlashes. Check the change of SMTTRQ at the reverse point with SERVO GUIDE. Choose either point A or B shown
in Fig. 6 and use the following fomula to calculate the parameter. The unit of a backlash is either um or deg.
BL[μm or deg ]
No.2189 = 1000 2 ×
ΔSMTTRQ[%]
Numerical example for a linear axis
Center of the stroke

SCREWL 250 mm
Backlash 0.6 μm (at point A)
ΔSMTTRQ 2.2 %
0.6
No.2189 = 1000 2 × = 386
2.2
Numerical example for a rotary axis
Center of the stroke

SCREWL (Unnecessary)
Backlash 0.24 deg (at point A)
ΔSMTTRQ 2.7 %
0.24
No.2189 = 1000 2 × = 126
2.7
TITLE
Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 11/16
Example: positions to carry out DBB measurement
(a) (b)
Fig.7 Example of positions to carry out DBB measurement in a machining center
Fig. 7(a) shows an example of machining center with a short width (X-direction) and a long depth (Y-direction).
DBB measurement should carry out in the three point shown in Fig. 7(b).
Adjustment of the shape coefficient (No.2188)

DBB measuement should be done at each end of the diagonal line of the actual machining area. The coordinates
can be adjusted based on dimensions shown in Fig.7(a).
z (X = 100, Y = 100): The most distant position from motors
z (X = 200, Y = 800): The nearest position to motors
Thus, CNC parameters for each axis can be adjusted only by two times measuments.
Adjustment of the torsional coefficient (No.2189)

The stroke of Y-axis is long enough to expect position-dependency of backlash. On the other hand, the stroke of
X-axis is short enough to expect no position-dependency of backlash. In such a case, only measurement at the
center of the actual machining is required to adjust the parameter.
z (X = 150, Y = 450): The center position of the actual machining area
TITLE
Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 12/16
Step 5: Other
Problem Related parameter Solution

Slits occur at reverse points because of No.2188, 2189 1) To decrese values of coefficients
overcorrection No.2190 2) To set compensation limit
Larger backlashes always occur No.1851 To use conventional backlash
regardless of load torque compensation
Irregular circles are measured by DBB No.2087 To verify the torque offset again
because of asymmetiry compensation
(6) Tuning with SERVO GUIDE
Parameter window
The parameter window is avalable to check the parameters related to SBC on SERVO GUIDE. Setting of initial parameters are
supported in the window. Adjustment of conventional backlash compensation is also supported in this window.
TITLE
Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 13/16
Support of calculation for coefficients of smart backlash compensation
The support function to adjust the two coefficients of SBC (No.2188 and No.2189) is available. It shows a clear illustration to match
the position in SERVO GUIDE and that in the real machine. Choose “Tool(T)” > “SmartBacklashComp calc.(K)” in a graph
window.
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Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 14/16
9 In the case where there is a coupling in the negative side of machine coordinate
(i.e. the ball screw will be longer for the positive direction)
Input required measurements,

clicking “Calc coef.” buttons.
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Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 15/16
9 In the case where there is a coupling in the positive side of machine coordinate
(i.e. the ball screw will be longer for the negative direction)
TITLE
Specifications for
DRAW. No. CUST.
B-65270EN/08-006
SHEET 16/16
Notice of the Update of Digital Servo Software for Series 30i/ 31i/ 32i/ 35i-B/Power Motion i -A ( 90J0&90K0)

PARAMETER MANUAL
New, Add Applicable
Correct, Del Date
- About servo soft 90J0,&90K0 series Add 2013.10
( support New servo card B, C）
+
- HRV control Add 2013.10
- Improvement of backlash acceleration by Add 2013.10
Basic Function Tuning Navigator of SERVO GUIDE 2013.10
Add
- 5th resonance elimination filter
Add 2013.10
Add 2013.10
- Improvement of Detection of excessive error between
the estimated position and actual position
Add 2013.10
-Smart Backlash Compensation( for full-closed system)
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
TITLE
Series 30i/ 31i/ 32i/ 35i-B/Power Motion i -A
(90J0&90K0)
DRAW. No. CUST.
B-65270EN/08-008
SHEET 1/21
1. Update Edition
90J0 02.0 Series 30i/ 31i/ 32i/ 35i –B/ Power Motion i -A
90K0 02.0 Series 30i/ 31i/ 32i/ 35i –B/ Power Motion i -A
- About servo soft 90J0&90K0 series( supported by New servo card B, C）

Servo software 90J0 series and 90K0 series are the new servo software for the new servo card A, and B,
respectively. Please refer technical report TMS13/066 “Migration to new servo cards (A-81017-068)” for details of the
servo card specification, CNC software and the limitations of servo card C.
If a not - supported function for servo software 90K0 series with servo card C is chosen, servo alarm “SV 0657
CARD/SV FUNCTION MISMATCH” will occur, and at the same time, the reason of alarm will be displayed as detail
number in diagnosis No.3508. Please refer Attachment 1 for relationship between the reason and the detail number.
+
- HRV control
+ +
HRV control has been added. Please refer technical report (TMS13/064) “Specifications for SERVO HRV ”
for detail.
- 5th resonance elimination filter

5th resonance elimination filter has been added. Please refer Attachment 2 for detail.
- Improvement of backlash acceleration by Tuning Navigator of SERVO GUIDE

Backlash acceleration by Tuning Navigator of SERVO GUIDE has been improved.
Please refer Attachment 3 for detail.

Standard Parameter Table has been changed. Please refer Attachment 4 for detail.
- Improvement of Detection of excessive error between the estimated position and actual position
Alarm Lever of Detection of excessive error between the estimated position and actual position can be set by
physical unit (mm or deg). Please refer attachment 5 for detail.
- Smart Backlash Compensation (for Full-Closed System)

Smart backlash compensation (for Full-Closed System) has been feedback function. Please refer Attachment 6 for
detail.
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(90J0&90K0)
DRAW. No. CUST.
B-65270EN/08-008
SHEET 2/21
3 Attachment
- Attachment 1: About Servo Alarm SV657 CARD/SV FUNCTION MISMATCH

-
- Attachment 2: Improvement of Resonance Elimination Filter
- Attachment 3: Improvement of Backlash Acceleration by Tuning Navigator of SERVO GUIDE
- Attachment 4: Changes of Standard Parameter Table
- Attachment 5: Improvement of Detection of Excessive Error between the Estimated Position and
Actual Position
- Attachment 6: Smart Backlash Compensation (for Full-Closed System)
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(90J0&90K0)
DRAW. No. CUST.
B-65270EN/08-008
SHEET 3/21
Attachment 1: About Servo ALARM SV657 CARD/SV FUNCTION MISMATCH
For Servo soft 90K0 series , when the follows non-supported function’s function bit is seting, the following alarm ocurrs
and the detail of aralm reason number will display Dignose No.3508 . when the alar happens please turn off the function
bit.
Alarm SV0657: CARD/SV FUNCTION MISMATCH
Diagnosis No.3508 : Detail Number for CARD/SV FUNCTION MISMATCH
Table1: Detail number for CARD/SV FUNCTION MISMATCH
DGN No.3508 Parameter Function Name
2125 2212#5 Custumer’s Board option

2754 2275#4 Slide position output
2887 2288#7 Machining point control
2764 2276#4 Analog Monitor unit
2786 2278#6
2765 2276#5
2787 2278#7
3828 2382 Torsion preview control
318 2031 Torque difference alarm function
2731 2273#1
2864 2286#4 Velocity loop integrator copy function
4180 2418#0
191 2019#1 Tandem Disturbance Elimination Control
82 2008#2 Velocity feedback average function

2753 2275#3 Synchronous axes automatic compensation function
2236 2223#6
2235 2223#5 Tandem control
81 2008#1
85 2008#5
2777 2277#7
2776 2277#6 Acceleration sensor
2775 2277#5
2783 2278#3
Servo Check Interface Unit
2782 2278#2
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(90J0&90K0)
DRAW. No. CUST.
B-65270EN/08-008
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Attachment 2. Improvement of Resonance Elimination Filter Function
(1) Overview
5th Resonance Elimination Filter Function with damping for only semi-closed system has been added.
The resonance elimination filter is a filter to cut off the special elimination of a particular frequency band.
Three parameters, the center frequency of a range to be cut, a band width and damping, need to be set.
Attenuation center Attenuation

Damping [%] Refer
frequency [Hz] bandwidth [Hz]
RE filter 1 No.2113 No.2177 No.2359
RE filter 5* No.2640 No.2641 No.2642 NEW (*)
Note
Only semi closed system can use this 5th Resonance Elimination Filter. Full - close system do
not support this function. If the funtion is set at a full closed system, SV 0417 : ILL DGTL SERVO
PARAMETER occurs(diagnosis No.0352 = 6402) .

CNC Servo control software
Series Edition
Series 30i/31i/32i – B 90J0,90K0 02.0 and later
(3) Setting parameters
2360, 2363, 2366,

RE filter 1 to 5: Attenuation center frequency
2113, 2640 (FS30i)
[Unit of data] Hz
[Valid data range] 96 to 2000(HRV3), 96 to 4000(HRV4)
Setting the suppress frequency of the vibration.
If the frequency of the vibration to be suppressed out of the range or multipe frequency
need to supress , then use a low-pass filter.
2361, 2364, 2367,

RE filter 1 to 5: Attenuation bandwidth
2177, 2641 (FS30i)
[Unit of data] Hz
[Valid data range] 0 to attenuation center frequency
2362, 2365, 2368,

RE filter 1 to 5: Damping
2359, 2642 (FS30i)
[Unit of data] %
[Valid data range] 0 to100 (0 attenuation rate is the maximum)
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Attachment 3. Improvement of Backlash Acceleration by Tuning Navigator of SERVO GUIDE
(1) Overview
“Backlash Acceleration by Tuning Navigator of SERVO GUIDE” has been improved and some override patterns are added.
Fig 1. [Applicable override pattern from the previous]

T０（ｍｓ）
acceleration T1(ms)
Coefficient Coefficient
No.2498 No.2471
No.2504 No.2474
Coefficient No.2495
No.2448 No.2472
No.2446 No.2494 No.2501 No.2499 No.2475
No.2452
No.2450 No.2500 No.2505 No.2470 acceleration
acceleration No..2473
acceleration (mm/s^2)
(mm/s^2) (mm/s^2)
acceleration Attenuate coefficient
Coefficient Coefficient
No.2494 No.2496 TZ acceleration
No.2500 No.2502 (mm/s^2)
No.2446 No.2447
No.2450 No.2495 No.2451 No.2506
No.2501 No.2497 Coefficient No.2508
No.2503 No.2507
acceleration
(mm/s^2) acceleration No.2509
(mm/s^2)
Fig 2. [Additional override pattern] (Acceleration , T0, T1, attenuate coefficient are available)
coefficient1＜0
coefficient1＜0
coefficient2＞0
coefficient2＞0
coefficient2＜0
limit limit
base2 base2 base1 base2 coefficient1＞0
limit
base1 base1
acceleration acceleration acceleration
coefficient2＜0 coefficient2＜0
coefficient1＞0
limit
coefficient1＞0
coefficient1＜0
coefficient2
limit limit
base1 base2 base1 base1 base2 ＞0
base2
acceleration acceleration acceleration
Note
・ If unsupported override pattern, which is except for above Fig 1., is used with old servo
software. The backlash acceleration may be changed by changing software version.. In
this case please readjust Quadrant protrusion compensation using Tuning Navigator of
SERVO GUIDE. For servo software 90J0 series, it is possible to select compatible mode
by No.2559#5=1.
・ Please refer the paramter manual (B-65270/08 appendix M) for detail of Quadrant
protrusion compensation using Tuning Navigator of SERVO GUIDE
・ Acceleration coefficient coefficient 1is opposite sign with T0, T1 and attentunt coefficient 1
in Fig2.
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Series Edition
Series 30i/31i/32i – B 90J0,90K0 02.0 and later

Related paramters for “Backlash Acceleration by Tuning Navigator of SERVO GUIDE” are shown in the following
table. And new paremters Base 2 and Override coefficient 2 are added.
Base 1 Override coefficient 1 Base 2 Override coefficient 2 Limited of override

Item ＋→－－→＋＋→－－→＋＋→－－→＋＋→－－→＋＋→－－→＋
Acceleration No2446 No2450 No2494 No2500 No2486 No2488 No2487 No2489 No2495 No2501
Attenuate
No2447 No2451 No2496 No2502 No2530 No2532 No2531 No2533 No2497 No2503
coefficient
Tz No2507 No2509 No2506 No2508
T0 No2470 No2473 No2471 No2474 No2666 No2668 No2667 No2669 No2472 No2475
T1 No2448 No2452 No2498 No2504 No2546 No2548 No2547 No2549 No2499 No2505
T2 No2449 No2453
NEW
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Attachment 4 Changes of Standard Parameter Table
(1) Motor models in the following table are added or changed.
βiSc12/3000 0078 496 Added
βiSc12/3000(80A) 0078 497 Added
LiS6000B2/2(400V) 0447-B010 367 Changed
LiS7500B2/2(400V) 0448-B110 373 Changed
βiS40/2000 0089 474 Changed
βiS22/2000(80A) - 482 Changed
(2) Standard parameter No. 2061(Inertia of motor) is added.

No.2061 is used by Smart Backlash Compensation (for Semi-Closed system).
Please refer to attached table 2 about parameter No.2061 value of each motor.
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(80A) HV(400V) (400V) HV (80A)
Motor ID Number 496 497 367 373 474 475 482
Symbol FS0i-D
2003 00001000 00001000 00000000 00001000 00001000 00001000 00001000
2004 00000011 00000011 00000011 00000011 00000011 00000011 00000011
2005 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2006 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2007 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2008 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2009 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2010 00000000 00000000 00000100 00000100 00000000 00000000 00000000
2011 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2012 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2013 00000000 00001110 00000110 00001000 00000010 00000010 00001110
2014 00000000 00001110 00000110 00001000 00000010 00000010 00001110
2210 00000000 00000000 00000100 00000100 00000000 00000000 00000000
2211 00001110 00001110 00001000 00001000 00001010 00001010 00001110
2300 00000000 00000000 10000000 10000000 00000000 00000000 00000000
2301 00000000 00000000 00000000 00000000 00000000 00000000 00000000
PK1 2040 402 804 1469 1123 1624 1624 2368
PK2 2041 -2217 -4434 -9936 -6625 -7197 -7197 -13600
PK3 2042 -1304 -1304 -1330 -2696 -1341 -1341 -1331
PK1V 2043 170 85 7 7 208 208 121
PK2V 2044 -1530 -765 -96 -92 -1870 -1870 -1086
PK3V 2045 0 0 0 0 0 0 0
PK4V 2046 -8235 -8235 -8235 -8235 -8235 -8235 -8235
POA1 2047 4960 9920 -11870 -12391 4057 4057 6992
BLCMP 2048 0 0 0 0 0 0 0
DPFMX 2049 0 0 0 0 0 0 0
POK1 2050 956 956 956 956 956 956 956
POK2 2051 510 510 510 510 510 510 510
RESERV 2052 4200 4200 0 0 2600 2600 2800
PPMAX 2053 21 21 21 21 21 21 21
PDDP 2054 1894 1894 1894 1894 1894 1894 1894
PHYST 2055 319 319 319 319 319 319 319
EMFCMP 2056 0 0 -7680 0 0 0 -5130
PVPA 2057 -5140 -5130 0 0 -3881 -3881 -3598
PALPH 2058 -3500 -1750 0 0 -3732 -3732 -1500
PPBAS 2059 0 0 0 0 0 0 0
TQLIM 2060 7282 3641 4369 4046 6554 6554 3641
EMFLMT 2061 620 620 2073 1986 758 758 880
POVC1 2062 32492 32492 32706 32709 32413 32413 32431
POVC2 2063 3445 3445 774 739 4431 4431 4207
TGALMLV 2064 4 4 4 4 4 4 4
POVCLMT 2065 10250 2562 688 658 13201 13201 3132
PK2VAUX 2066 0 0 0 0 0 0 0
FILTER 2067 0 0 0 0 0 0 0
FALPH 2068 0 0 0 0 0 0 0
VFFLT 2069 0 0 0 0 0 0 0
ERBLM 2070 0 0 0 0 0 0 0
PBLCT 2071 0 0 0 0 0 0 0
SFCCML 2072 0 0 0 0 0 0 0
PSPTL 2073 0 0 0 0 0 0 0
AALPH 2074 16384 0 20480 0 8192 8192 0
OSCTPL 2077 0 0 0 0 0 0 0
PDPCH 2078 0 0 0 0 0 0 0
PDPCL 2079 0 0 0 0 0 0 0
DPFEX 2080 0 0 0 0 0 0 0
DPFZW 2081 0 0 0 0 0 0 0
BLENDL 2082 0 0 0 0 0 0 0
MOFCTL 2083 0 0 0 0 0 0 0
RTCURR 2086 2363 1181 610 596 2154 2154 1309
TDPLD 2087 0 0 0 0 0 0 0
MCNFB 2088 0 0 0 0 0 0 0
BLBSL 2089 0 0 0 0 0 0 0
ROBSTL 2090 0 0 0 0 0 0 0
ACCSPL 2091 0 0 0 0 0 0 0
ADFF1 2092 0 0 0 0 0 0 0
VMPK3V 2093 0 0 0 0 0 0 0
BLCMP2 2094 0 0 0 0 0 0 0
AHDRTL 2095 0 0 0 0 0 0 0
RADUSL 2096 0 0 0 0 0 0 0
SMCNT 2097 0 0 0 0 0 0 0
DEPVPL 2098 0 0 0 0 0 0 0
ONEPSL 2099 400 400 400 400 400 400 400
INPA1 2100 0 0 0 0 0 0 0
INPA2 2101 0 0 0 0 0 0 0
DBLIM 2102 0 0 0 0 0 0 0
ABVOF 2103 0 0 0 0 0 0 0
ABTSH 2104 0 0 0 0 0 0 0
TRQCST 2105 418 836 1768 2261 1503 1503 1384
LP24PA 2106 0 0 0 0 0 0 0
VLGOVR 2107 0 0 0 0 0 0 0
RESERV 2108 0 0 0 0 0 0 0
BELLTC 2109 0 0 0 0 0 0 0
MGSTCM 2110 1814 812 0 0 263 263 1280
DETQLM 2111 7930 7930 0 0 3065 3065 2866
AMRDML 2112 0 0 0 0 0 0 0
NFILT 2113 0 0 0 0 0 0 0
NINTCT 2127 1194 1194 0 0 2712 2712 2459
MFWKCE 2128 3000 6000 0 0 3354 3354 10000
MFWKBL 2129 2056 2056 0 0 1038 1038 562
LP2GP 2130 0 0 0 0 0 0 0
LP4GP 2131 0 0 0 0 0 0 0
LP6GP 2132 0 0 0 0 0 0 0
PHDLY1 2133 5138 5138 0 0 2567 2567 3350
PHDLY2 2134 8990 4382 0 0 8967 8967 4371
DGCSMM 2159 0 0 0 0 0 0 0
TRQCUP 2160 0 0 0 0 0 0 0
OVCSTP 2161 0 0 0 0 0 0 0
POVC21 2162 32765 32765 0 0 32765 32765 32764
POVC22 2163 35 35 0 0 36 36 44
POVCLMT2 2164 6328 1582 0 0 7713 7713 1947
MAXCRT 2165 45 85 85 185 85 45 85
ACCBSLM 2304 0 0 0 0 0 0 0
ACDCEND 2305 0 0 0 0 0 0 0
DCIDBS 2310 0 0 0 0 823 1646 0
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Table 2 Parameter No.2061 value of each motor
βiS2 βiS4 βiS8
βiS2 αiF1 βiS2 αiF2 βiS4 βiS8 βiS0.2 βiS0.3
Motor Model 4000 4000 3000
4000HV 5000 4000 5000 4000 3000 5000 5000
40A 40A 40A
Motor ID Number 251 252 253 254 255 256 257 258 259 260 261
2061 283 482 283 141 551 408 204 598 299 29 27
βiS12
αiS2 αiS2 βiS4 αiS4 αiS4 βiS8 βiS12 βiS12 αC4 βiS12
Motor Model 2000
5000 5000HV 4000HV 5000 5000HV 3000HV 2000 3000HV 3000i 3000
40A
Motor ID Number 262 263 264 265 266 267 268 269 270 271 272
2061 284 285 409 465 465 601 416 833 618 838 620
αiF4 βiS22 αiF4 αC8 αiF8 βiS22 αiF8 βiS0.4 βiS0.5 βiS1 βiSc8
Motor Model
5000 2000 5000HV 2000i 3000 2000HV 3000HV 5000 6000 6000 3000
Motor ID Number 273 274 275 276 277 278 279 280 281 282 283
2061 773 880 818 1088 818 884 817 49 48 43 598
βiSc8
αiS2 αiS8 αiS8 αiS2 αiS12 αiS12 αiS8 αC12 αiS8 αiF12
Motor Model 3000
6000 4000 4000HV 6000HV 4000 4000HV 6000 2000i 6000HV 4000
40A
Motor ID Number 284 285 286 287 288 289 290 291 292 293 294
2061 348 239 248 348 378 381 387 2030 387 1395 299
βiSc12 βiS22 βiS22

αiF12 αC22 αiF22 βiSc12 αiF22 αC30 αiF30 αiF30
Motor Model 2000 1500 1500
4000HV 2000i 3000 2000 3000HV 1500i 4000 4000HV
40A FS0i FS0i, 40A
Motor ID Number 295 296 297 298 299 300 301 302 303 304 305
2061 1400 1966 1439 834 1430 416 1205 1016 1667 1634 508
βiSc2 βiSc4
βiSc2 αiF40 αiF40 αiF40 βiSc4 βiS22 βiS22 αiS22 αiS22
4000 3000 3000Fan 3000HV 4000 3000 3000HV 4000 4000HV
40A 40A
Motor ID Number 306 307 308 309 310 311 312 313 314 315 316
2061 283 1388 1388 1387 141 408 204 716 698 499 555
αiS50 αiS60
4000 4000HV 4000 4000HV 3000 3000Fan 3000HV 3000Fan 2500Fan
Fan Fan
Motor ID Number 318 319 322 323 324 325 326 327 328 329 330
2061 594 598 670 673 504 504 509 509 500 500 664
αiS100 αiS200
2500Fan 2500 2500HV 2500 2500HV 2000 2000HV 3000HV 2000
Fan Fan
Motor ID Number 331 334 335 336 337 338 339 342 343 344 345
2061 664 832 664 664 832 832 832 831 831 672 972
αiS500 αiS500 αiS1000 αiS1000

Motor Model
2000HV 3000HV 2000HV 3000HV
2061 972 807 1699 1385
Motor Model 600 600 400 400 300 300 300 300 600 600 300
(200V) (400V) (200V) (400V) (200V) (400V) (200V) (400V) (200V) (400V) (200V)
Motor ID Number 421 422 423 424 425 426 427 428 429 430 431
2061 514 514 552 552 960 960 754 754 752 752 733
Motor Model 300 250 250 250 250 200 200 150 150 150 150
(400V) (200V) (400V) (200V) (400V) (200V) (400V) (200V) (400V) (200V) (400V)
Motor ID Number 432 433 434 435 436 437 438 439 440 441 442
2061 733 1613 1613 1634 1634 2740 2740 3631 3226 3331 2960
DiS85 DiS110 DiS260 DiS22

Motor Model 1000 1000 1000 1500
(200V) (200V) (200V) (200V)
2061 717 960 795 660
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Table 2 Parameter No.2061 value of each motor (continued)
αiS22 αiS22 αiS2000 αiS3000 αiS1000 αiS2000 αiS3000 αiS12 αiS12 αiS1000 αiS4
Motor Model
6000 6000HV 2000HV 2000HV 2000HV 2000HV 2000HV 6000 6000HV 3000HV 6000
Motor ID Number 452 453 454 455 458 459 460 462 463 465 466
2061 741 741 3648 4984 1736 3648 4984 314 314 1385 569
αiS2000 βiS12
αiS4 αiS50 αiS50 αiS60 αiS60 βiS30 βiS30 βiS40 βiS40
Motor Model 2000HV 3000
6000HV 2000 2000HV 2000 2000HV 2000 2000HV 2000 2000HV
spindle 80A
Motor ID Number 467 468 469 470 471 472 473 474 475 476 477
2061 569 649 649 764 764 775 777 758 758 3648 620
βiS22 αiF40 βiSc22 βiF4 βiF8 βiF12

βiSc22 βiF4 βiF8 βiF12 βiF22
Motor Model 2000 3000HV 2000 3000 2000 2000
2000 3000 2000 2000 2000
80A FAN 80A 40A 40A 40A
Motor ID Number 478 479 481 482 483 484 485 486 487 488 489
2061 880 1387 880 880 838 838 1088 1088 2030 2030 1966
βiF22 βiSc12
βiF30 αiF8 αiF8 αiF22 αiF22 βiSc12
1500 4000 4000HV 4000 4000HV 3000
80A 80A
Motor ID Number 490 491 492 493 494 495 496 497
2061 1966 1205 654 654 1234 1234 620 620
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Attachment 5: Improvement of Detection of Excessive Error between the Estimated
Position and Actual Position (Dynamic error monitoring)
(1) Overview
Alarm Level of Detection of excessive error between the estimated position and actual position (Dynamic error monitoring)
can be set by physical unit (mm or deg). It is possible to extend the range of alarm level in the case of small detection unit.

Series Edition
Series 30i/31i/32i - B 90J0,90K0 02.0 and later

#7 #6 #5 #4 #3 #2 #1 #0
2428 (FS30i) DYUINT
DYUNIT (#6) Seeting unit of Excessive error detection level is

0: Detection Unit
1: Physical Unit（mm or deg）
2458 (FS30i) Excessive error detection level

[Setting Unit] When No. 2428#6=0 , Detection Unit
When No. 2428#6=1, Physical Unit（mm or deg ） →New
[Valid data range] 0～32767
Related parameters
#7 #6 #5 #4 #3 #2 #1 #0
2419 (FS30i) DYNTQL DYNERR
DYNERR(#0) The detection of excessive error (SV) is:
0: Disabled
1: Enabled
DYNTQL(#1) The detection of excessive error in the torque limit mode is:
0: Enabled.
1: Disabled.
(4) NOTE
・ When an alarm is detected, SV0653, "EXCESS ERROR (SV)" is displayed.
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Attachment 6: Smart Backlash Compensation (for Full-Closed System)
(1) Overview
1.1 Functional Map
Smart backlash compensation (for full-closed sysmte) is one of smart backlash compensation functions.
Overview of smart backlash compensation

Smart backlash For semi-closed system 30i-B (already
compensation Smart backlash compensation for semi-closed system compensates supported)
are functions that elastic behavior between motor and machine. The function 0i-D (already
compensate transmitting compensates commanded position. See Specifications for Smart supported)
error between motor and Backlash Compensation (B-65270EN/08-006).
machine-end in order to
improve processed shape.
For full-closed system 30i-B (newly

Smart backlash compensation for full-closed system compensates supported)
backlash between motor and machine. The function compensates
velocity command when the moving direction inverts in order that
the motor may move quickly in the backlash space, and improve
inversion delay. The function does NOT compensates commanded
position. This document details the function.
Acceleration depending on backlash
length and motor position in backlash
space for quick velocity reversal.
Scale position
Scale
Backlash factor Backlash length
Motor position
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1.2 Functional Overview
Smart backlash compensatoin (for full-closed system) is a function that measures length of backlash between motor and
machine automatically, and executes optimal backlash compensation for full-closed or dual position feedback controlled
machine. The function improves circularity (or decreases error) when used for machines with large torsion or long
backlash. The function updates the backlash length using motor attached sensor (or pulse coder) and machine attached
sensor (linear scale etc.) when axis moving. Below figures show control block diagram and an example of compensation
effect of quadrant protrusion.
Motor position in backlash
Backlash end position
in moving direction
+ - space (SFERR) -
+
Kps Comp. gain
Move command + ERR + VCMD ABS POSF

∑ PG 1/s
- +
Backlash
Machine speed
s
Control block diagram: the function hastens the motor to contact with backlash-end of moving direction by feeding back
the SFERR which represents motor positoin in backlash space when moving direction inverts in order to compensate
quadrate protrusion.
Large quadrant Small quadrant

protrusion protrusion
Function OFF Function ON
An example of function’s effect: the function applied to an axis with long backlash (of 100 μm) decreases quadrant
protrusion.

Series Edition
Series 30i/31i/32i - B 90J0, 90K0 02.0 and later
(3) Notice
• The function can NOT applied to a semi-closed axis.
• The function can NOT applied to an axis that have mechanical slips between motor and full-closed sensor.
• The function is NOT effective in some mode such as reference position return or manual feed.
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Turn on the function bit of smart backlash compensation (for full-closed system) No.2567#2.
When applying the function to dual position feedback (No.2019#7) axis, turn on sub-function “semi-closed loop
automatic backlash compensation for dual position feedback (No.2567#4)” and set the backlash compensation (No.1851)
to be 0 or small value.
#7 #6 #5 #4 #3 #2 #1 #0
2567(FS30i) SBFSPOS SBF
SBF (#2) Smart backlash compensation (for full-closed system) is
0: off
1: on
Smart backlash compensation (for full-closed system) measures length of

backlash between motor and machine automatically, and execute optimal
backlash compensation.
SBFSPOS (#4) Semi-closed loop automatic backlash compensation for dual position feedback is
0: off
1: on
Turn on smart backlash compensation (for full-closed system)
No.2567#2 = 1. Set backlash compensation No.1851 to 0 or small value.
Set gain of smart backlash compensation (for full-closed system) in the ten’s and the one’s place of No.2619 (as 1 to 99).
Set compensation length ratio of smart backlash compensation (for full-closed system) in the thousand’s and the
hundred’s place of No.2619 (as 100 to 9900).
Set duration of smart backlash in the ten thousands’ place of No.2619 (as 0, 10000 or 20000).
2619 (FS30i) Duration of / Compensation length ratio of / Gain of smart backlash compensation (for full-closed)
Gain of smart backlash compensation (for full-closed)
[units] 0.1 times
[range] 1 to 99 (the ten’s and the one’s place in decimal)
[default] 0
Set smart backlash gain (for full-closed) in 0.1 times. Vcmd compensation
(remaining distance to the backlash end) * 0.1 * No.2619 (the two lower
digits) * position gain
will be executed until the motor meet the backlash end of moving direction.
Compensation length ratio of smart backlash compensation (for full-closed)

[units] %
[range] 0, 100 to 9900 (the thousand’s and the hundred’s place in decimal)
[default] 100
[recommended] 0 or 90 to 99
Generally, set to 0 (which means 100%). If cutting occurs, lower gain or
shortend compensation length may improve the cutting.
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Duration of smarat backlash compensation (for full-closed)
[range] 0, 10000 or 20000 (the thousands’ place in decimal)
Set duration shown in table below. Set 0 at first.
Value Duration
0 3×time const.*
10000 5×time const.
20000 7×time const.
* Time constant is the inverse number of smart backlash compensation (for
full-closed system) gain multiplied by position gain.
(Examples of parameter set)

[Example 1 (full-closed axis)]
Full-closed control No.1815#1 = 1
Not dual position feedback controlled No.2019#7 = 0
Smart backlash compensation (for full-closed system) is on. No.2567#2 = 1
Semi-closed loop automatic backlash compensation for dual position feedback is off. No.2567#4 = 0
Gain of smart backlash compensation (for full-closed system) is 3.0 * PG. No.2619 = 30
Compensation length ratio of smart backlash compensation (for full-closed) is 100 %.
Duration of smarat backlash compensation (for full-closed) is 3τ.
[Example 1 (dual position feedback controlled axis)]

Full-closed control No.1815#1 = 1
Dual position feedback controlled No.2019#7 = 1
Smart backlash compensation (for full-closed system) is on. No.2567#2 = 1
Semi-closed loop automatic backlash compensation for dual position feedback is on. No.2567#4 = 1
Gain of smart backlash compensation (for full-closed system) is 2.5 * PG. No.2619 = 19625
Compensation length ratio of smart backlash compensation (for full-closed) is 96 %.
Duration of smarat backlash compensation (for full-closed) is 5τ.
Backlash compensation is 0. No.1851 = 0
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(4) Tuning
Please tune from Tuninig procedure 1 if dual position feedback axis (No.2019#7), and from Tuning procedure 2 if
full-closed axis. Tune the position gain before executing this section.
Tuning prodeuder 1 (if dual position feedback axis)

For dual position feedback axis, a sub-function of smart backlash compensation (for full-closed system), “semi-closed
loop automatic backlash compensation for dual position feedback” is recommended. Set parameters as follows:
- Backlash compensation No.1851 = 0 (or 1)
- Smart backlash compensation (for full-closed system) No.2567#2 = 1
- Semi-closed loop automatic backlash compensation for dual position feedback No.2567#4 = 1
- Smart backlash compensation (for full-closed system) gain etc. No.2619 = 0
Evaluate sub-function “semi-closed loop automatic backlash compensation for dual position feedback (No.2567#4)” by
circular move. Confirm that the sub-function improves quadrant protrusion.
Function OFF Function ON
Quadrant protrusion 71μm 28μm
20μm/div 20μm/div
Tuning procedure 2 (Common tunings of dual position feedback / full-closed axis hereafter)
Turn on the smart backlash compensation (for full-closed system), set gain to 2 (No.2619 = 2), and compare the result
of circular move with that with gain 0 (data hereafter are acuired with full-closed setting, and therefore the quadrant
protrusion amplitune of following data differs from those of Tuning procedure 1).
Smart backlash comp. gain 0

gain 2: 38μm
Quadrant protrusion 50μm
20μm/div 20μm/div
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To acuire time domain data, set Servo Guide channels as shown below.
CH1: POS3D (for POSF and ERR display)
CH2: ABS
CH3: SFERR (motor position in backlash space)
CH4: compensation value
CH4’s settings listed below.
Kind: POSF
Conv. Coef. and Base: same as POSF

*
Extended address : 1355 + 4096 * mod (No.1023, 8)
where mod(x, y) is the reminder after division x/y.
*The extended address is subject to change without
notice.
Display POSF and ERR from POS3D channel.
Display each of the other channels.
Comparison between time domain data of gain 0 and 2 are shown below.
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Gain 0 Gain 2
machine position (POSF) 100ms/div

motor acceleration at direction inverse
quadrant protrusion 100μm/div decreases quadrant protrusion
position error (ERR)
motor position (ABS)

Machine doesn’t move velocity comp. (ERR comp.) is
until motor contact executed depending on motor
position in backlash space.
motor position in backlash space (SFERR)
comp. value of smart backlash
Tuning procedure 3
Increase gain stepwise with confirmation of circular execursion and time domain data when moving direction inverts.
machine position (POSF)
Gain 10: 18μm
20μm/div
Gain 20: 12μm
20μm/div
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machine position(POSF)
Gain 30: 9μm
20μm/div
Tuning procedure 4
As the gain increases, and therefore the time constant becomes shorter, the compensation may end before the motor
contact to the machine in moving direction. In this situation, extend the duration (by the ten thousands’ place of
No.2619).
Gain 40: 7μm

Duration 3τ
No.2619=40
compensation ends before contact
20μm/div
Gain 40: 7μm

Duration 5τ
No.2619=10040
compensation lasts till the contact
20μm/div
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machine position(POSF)
motor position(ABS)

Gain 50: 5μm
Duration 5τ
No.2619=10050 motor position in backlash space
(SFERR)
Tuning procedure 5
Too high gain will generate cutting. Decrease the gain or shorten the compensation length (by the thousand’s and
the hundred’s place of No.2619).
Cutting(11μm)
Gain 60: -11μm

Comp. length 100%
Duration 5τ
No.2619=10060
3. Confirm the decreased quadrate protrusion

Cutting ceased
and end the tuning.
Gain 60: 4μm 2. Realization of the machine

Comp. length 98% move in almost commanded
Duration 5τ excursion
No.2619=19860
1. Acceleration of motor in
backlash space
Tuning ends when sufficient high gain is achieved which enables motor to move in the backlash space quickly when
the moving direction inverts, and sufficiently suppressed quadrate protrusion is confirmed.
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Notice of the Update of Digital Servo Software for Series 0i Mate-D (90H0)

PARAMETER MANUAL
New, Add Applicable
Correct, Del Date
Basic Function - Modification of feed-forward timing adjustment function Add 2014.01
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
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for Series 0i Mate-D (90H0)
DRAW. No. CUST.
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SHEET 1/2
Notice of the Update of Digital Servo Software for Series 0i Mate-D (90H0)
1. Update Edition
90H0 03.0 Series 0i Mate-D
- Modification of feed-forward timing adjustment function
The compatible mode with Series 0i-D is added to the feed-forward timing adjustment function.
No.2415#1=0: The compatible mode with Series 0i-D.
No.2415#1=1: The compatible mode with Series 90H0/02.0 or earlier.
Please set No.2415#1=0 generally. Only if timing adjustment coefficient (No.2095) has been adjusted
by using 90H0/02.0 or earlier software, please set No.2415#1=1,
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for Series 0i Mate-D (90H0)
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PARAMETER MANUAL
New, Add Applicable
Correct, Del Date
- Supported high precision measurement mode for the Add 2014.02
Basic Function frequency response
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
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SHEET 1/2
1. Update Edition

Series 30i/ 31i/ 32i/ 35i –B/ Power Motion i -A
90J0 03.0
(Servo card B)
Series 30i/ 31i/ 32i/ 35i –B/ Power Motion i –A
90K0 03.0
(Servo card C)
- Supported High precision measurement mode for the frequency response measurement
High precision measurement mode for the frequency response measurement has been supported.
For detail please refer the technical report TMS14/002 " Notice of the update of Servo Tuning Tool
FANUC SERVO GUIDE (edition 9.20)."
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Notice of the Update of Digital Servo Software for Series 30i/ 31i/ 32i/ 35i-B/Power Motion i -A (90G0)

PARAMETER MANUAL
New, Add Applicable
Correct, Del Date
Basic Function - Changes of Standard Parameter Table Add 2014.02
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
TITLE
Series 30i/ 31i/ 32i/ 35i-B/Power Motion i -A (90G0)
DRAW. No. CUST.
B-65270EN/08-011
SHEET 1/4
Notice of the Update of Digital Servo Software for Series 30i/ 31i/ 32i/ 35i-B/Power Motion i -A (90G0)
1. Update Edition
90G0 24.0 Series 30i/ 31i/ 32i/ 35i –B/ Power Motion i -A

Standard Parameter Table has been changed. Please refer Attachment 1 for detail.
3 Attachment
- Attachment 1: Changes of Standard Parameter Table
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Attachment 1 Changes of Standard Parameter Table
Motor models in the following table are added or changed.
βiSc12/3000 0078 496 Added
βiSc12/3000(80A) 0078 497 Added
LiS6000B2/2(400V) 0447-B010 367 Changed
LiS7500B2/2(400V) 0448-B110 373 Changed
βiS40/2000 0089 474 Changed
βiS22/2000(80A) - 482 Changed
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(80A) HV(400V) (400V) HV (80A)
Motor ID Number 496 497 367 373 474 475 482
Symbol FS0i-D
2003 00001000 00001000 00000000 00001000 00001000 00001000 00001000
2004 00000011 00000011 00000011 00000011 00000011 00000011 00000011
2005 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2006 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2007 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2008 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2009 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2010 00000000 00000000 00000100 00000100 00000000 00000000 00000000
2011 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2012 00000000 00000000 00000000 00000000 00000000 00000000 00000000
2013 00000000 00001110 00000110 00001000 00000010 00000010 00001110
2014 00000000 00001110 00000110 00001000 00000010 00000010 00001110
2210 00000000 00000000 00000100 00000100 00000000 00000000 00000000
2211 00001110 00001110 00001000 00001000 00001010 00001010 00001110
2300 00000000 00000000 10000000 10000000 00000000 00000000 00000000
2301 00000000 00000000 00000000 00000000 00000000 00000000 00000000
PK1 2040 402 804 1469 1123 1624 1624 2368
PK2 2041 -2217 -4434 -9936 -6625 -7197 -7197 -13600
PK3 2042 -1304 -1304 -1330 -2696 -1341 -1341 -1331
PK1V 2043 170 85 7 7 208 208 121
PK2V 2044 -1530 -765 -96 -92 -1870 -1870 -1086
PK3V 2045 0 0 0 0 0 0 0
PK4V 2046 -8235 -8235 -8235 -8235 -8235 -8235 -8235
POA1 2047 4960 9920 -11870 -12391 4057 4057 6992
BLCMP 2048 0 0 0 0 0 0 0
DPFMX 2049 0 0 0 0 0 0 0
POK1 2050 956 956 956 956 956 956 956
POK2 2051 510 510 510 510 510 510 510
RESERV 2052 4200 4200 0 0 2600 2600 2800
PPMAX 2053 21 21 21 21 21 21 21
PDDP 2054 1894 1894 1894 1894 1894 1894 1894
PHYST 2055 319 319 319 319 319 319 319
EMFCMP 2056 0 0 -7680 0 0 0 -5130
PVPA 2057 -5140 -5130 0 0 -3881 -3881 -3598
PALPH 2058 -3500 -1750 0 0 -3732 -3732 -1500
PPBAS 2059 0 0 0 0 0 0 0
TQLIM 2060 7282 3641 4369 4046 6554 6554 3641
EMFLMT 2061 620 620 2073 1986 758 758 880
POVC1 2062 32492 32492 32706 32709 32413 32413 32431
POVC2 2063 3445 3445 774 739 4431 4431 4207
TGALMLV 2064 4 4 4 4 4 4 4
POVCLMT 2065 10250 2562 688 658 13201 13201 3132
PK2VAUX 2066 0 0 0 0 0 0 0
FILTER 2067 0 0 0 0 0 0 0
FALPH 2068 0 0 0 0 0 0 0
VFFLT 2069 0 0 0 0 0 0 0
ERBLM 2070 0 0 0 0 0 0 0
PBLCT 2071 0 0 0 0 0 0 0
SFCCML 2072 0 0 0 0 0 0 0
PSPTL 2073 0 0 0 0 0 0 0
AALPH 2074 16384 0 20480 0 8192 8192 0
OSCTPL 2077 0 0 0 0 0 0 0
PDPCH 2078 0 0 0 0 0 0 0
PDPCL 2079 0 0 0 0 0 0 0
DPFEX 2080 0 0 0 0 0 0 0
DPFZW 2081 0 0 0 0 0 0 0
BLENDL 2082 0 0 0 0 0 0 0
MOFCTL 2083 0 0 0 0 0 0 0
RTCURR 2086 2363 1181 610 596 2154 2154 1309
TDPLD 2087 0 0 0 0 0 0 0
MCNFB 2088 0 0 0 0 0 0 0
BLBSL 2089 0 0 0 0 0 0 0
ROBSTL 2090 0 0 0 0 0 0 0
ACCSPL 2091 0 0 0 0 0 0 0
ADFF1 2092 0 0 0 0 0 0 0
VMPK3V 2093 0 0 0 0 0 0 0
BLCMP2 2094 0 0 0 0 0 0 0
AHDRTL 2095 0 0 0 0 0 0 0
RADUSL 2096 0 0 0 0 0 0 0
SMCNT 2097 0 0 0 0 0 0 0
DEPVPL 2098 0 0 0 0 0 0 0
ONEPSL 2099 400 400 400 400 400 400 400
INPA1 2100 0 0 0 0 0 0 0
INPA2 2101 0 0 0 0 0 0 0
DBLIM 2102 0 0 0 0 0 0 0
ABVOF 2103 0 0 0 0 0 0 0
ABTSH 2104 0 0 0 0 0 0 0
TRQCST 2105 418 836 1768 2261 1503 1503 1384
LP24PA 2106 0 0 0 0 0 0 0
VLGOVR 2107 0 0 0 0 0 0 0
RESERV 2108 0 0 0 0 0 0 0
BELLTC 2109 0 0 0 0 0 0 0
MGSTCM 2110 1814 812 0 0 263 263 1280
DETQLM 2111 7930 7930 0 0 3065 3065 2866
AMRDML 2112 0 0 0 0 0 0 0
NFILT 2113 0 0 0 0 0 0 0
NINTCT 2127 1194 1194 0 0 2712 2712 2459
MFWKCE 2128 3000 6000 0 0 3354 3354 10000
MFWKBL 2129 2056 2056 0 0 1038 1038 562
LP2GP 2130 0 0 0 0 0 0 0
LP4GP 2131 0 0 0 0 0 0 0
LP6GP 2132 0 0 0 0 0 0 0
PHDLY1 2133 5138 5138 0 0 2567 2567 3350
PHDLY2 2134 8990 4382 0 0 8967 8967 4371
DGCSMM 2159 0 0 0 0 0 0 0
TRQCUP 2160 0 0 0 0 0 0 0
OVCSTP 2161 0 0 0 0 0 0 0
POVC21 2162 32765 32765 0 0 32765 32765 32764
POVC22 2163 35 35 0 0 36 36 44
POVCLMT2 2164 6328 1582 0 0 7713 7713 1947
MAXCRT 2165 45 85 85 185 85 45 85
ACCBSLM 2304 0 0 0 0 0 0 0
ACDCEND 2305 0 0 0 0 0 0 0
DCIDBS 2310 0 0 0 0 823 1646 0
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ADDITIONAL INFORMATION

Pole Position Detection Function

1. Type of applied documents

Name FANUC AC SERVO MOTOR αi series

Group Name / Outline New, Add Applicable

DRAW. No. CUST.

DRAW. No. CUST.

*1) Detecting method

Minute moving method

(2) Applicable software

CNC Servo software Remark

DRAW. No. CUST.

Enable the parameter (No.2213#7=1) for target axis

Set ARM offset No.2139=0

Set No.2229#0=1 to use AMR offset

Set No.2229#3=0 to watch abnormal movement after detection

Set No.2229#4=1 to use minute moving method

Make target axis Servo-on state

Set request signal (Gn135) to start detection

Detection completion signal (Fn159) changes “1” after

Absolute detector Incremental detector

DRAW. No. CUST.

OCM (#7) 0: Pole position detection is ineffective.

ABSEN (#0) 0: AMR offset isn’t available.

DRAW. No. CUST.

WATRA (#3) 0: unexpected motion is watched after detection

*1) PDDDM (#5) 0: Minute moving method

Data unit degree

DRAW. No. CUST.

*1) Data unit Number

Data unit degree (Electric angle)

DRAW. No. CUST.

Pole position detecting signal : Fn158.0 – Fn158.7 (RPDET1 - RPDET8)

Pole position detection completion signal : Fn159.0 – Fn159.7 (RPFIN1 - RPFIN8)

F158 RPDET8 RPDET7 RPDET6 RPDET5 RPDET4 RPDET3 RPDET2 RPDET1

F159 RPFIN8 RPFIN7 RPFIN6 RPFIN5 RPFIN4 RPFIN3 RPFIN2 RPFIN1

DRAW. No. CUST.

DRAW. No. CUST.

Request Detecting Finish

Some alarm for sensor Try pole detection again.

DRAW. No. CUST.

[Applicable servo software]

[Applicable system software]

The alarm number and message are indicated below.

DRAW. No. CUST.

[Input type] Parameter input

DRAW. No. CUST.

[Applicable servo software]

[Applicable system software]

DRAW. No. CUST.

DRAW. No. CUST.

90G0 21 .0 Series 30i/ 31i/ 32i/ 35i -B/Power Motion i -A

• The smooth backlash compensation to error counter in semi-closed loop

Backlash Compensation ” for detail.

a smooth backlash compensation value is :

0: Used for compensation on the semi-closed side.

1: Dependent on the settings of bit 4 of No.2206 and bit 5 of No.2010.

90G0 22 .0 Series 30i/ 31i/ 32i/ 35i –B/ Power Motion i -A

1. Type of applied documents

- Changes of Standard Parameter Table Add 2013.08

90C8 06.0 Series 0i-D, 0i Mate-D

90E8 06.0 Series 0i-D ( Series 0i-TD, 2Path System )