Micro Electronic Mechanical Systems (MEMS)

Micro Electro Mechanical Systems (MEMS) are devices that have static or movable components
with some dimensions of the order of microns.

MEMS combine microelectronics and micromechanics.

MEMS refer to miniature mechatronic systems bulk fabricated using VLSI (Very Large Scale
Integration) technology

MEMS deals with:

1) Miniaturization and batch processing of Sensors, Actuators & micro structures

2) Integration of mechanical components with electronics
Batch Processing:
 Cost Reduction
 Reliability & Reproducibility
Miniaturization
 Low Power operation
 Biomedical & Aerospace applications

MEMS benefits
 Micro size sensors and actuators: Integration with electronics on single chip (system or lab on
chip)
 Decreased cost of production: bulk processing
 Many new features and products previously unthought-of of can be possible.
 Combination of MEMS with other branches:
Example optical MEMS, Bio-MEMS – futuristic devices
Silicon Micromachining
 Suitable for batch processing similar to fabrication of ICs
 Production cost independent of the number of components fabricated
 Miniaturization with finest details in the range of 0.1 to 10 microns possible based on
photolithography
Classification of MEMS
 Passive structures (non-moving) -- microtips
 Sensors --- pressure sensors
 Actuators – Pump, valve
Micro-systems integrate both sensors and actuators for functional uses
MEMS Categories & Application Domains
 MEMS structures
Transportation – Infrared imagers
Communications – Optical & RF signal guides, Field emission arrays
Analytical & Medical – Micro filters, micro channels and mixers

 MEMS Sensors

Transportation – Pressure and acceleration sensors

Communications – Acoustic sensors

Analytical & Medical – Gas sensors

 MEMS Actuators
Transportation – Aerodynamic flow control
Communications – Displays, Optical switches, RF switches & Filters
Analytical & Medical – Micro pumps and valves
Transducers
 Sensors – convert measured quantities into electrical signals
Examples: Pressure sensors, accelerometer, gyro, temperature sensor, flow sensor and gas sensor
 Actuators – convert different type of energy into mechanical energy
Examples: Micro pump, RF switches, Resonators, micro mirror, ES comb drive
 Structures
AFM tip, Field emission arrays, Micro fluidic channels
MEMS Materials
Silicon
 Stronger than steel
 Light as aluminium
 Can be coated with varieties of materials
Other Materials
 Polycrystalline silicon (polysilicon)
 Silicon dioxide (SiO2)
 Silicon nitride (Si3N4)
 Aluminum (thin film)
 Gold (thin film)
 Many more including polymers now a days
 Doping of silicon