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Optical system design of aberration-corrected Czerny–Turner imaging


spectrometer with high resolution

Shucheng Li, Weiqian Zhao, Hexuan Xu, Lirong Qiu, Yun Wang

PII: S0030-4018(19)31068-5
DOI: https://doi.org/10.1016/j.optcom.2019.125015
Reference: OPTICS 125015

To appear in: Optics Communications

Received date : 20 August 2019


Revised date : 22 October 2019
Accepted date : 24 November 2019

Please cite this article as: S. Li, W. Zhao, H. Xu et al., Optical system design of
aberration-corrected Czerny–Turner imaging spectrometer with high resolution, Optics
Communications (2019), doi: https://doi.org/10.1016/j.optcom.2019.125015.

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© 2019 Published by Elsevier B.V.


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Optical system design of aberration‐corrected Czerny‐
Turner imaging spectrometer with high resolution 
Shucheng Li, Weiqian Zhao, Hexuan Xu, Lirong Qiu, Yun Wang * 
Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute 
of Technology, Beijing 100081, China 

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*Corresponding author: alotrabbits@163.com  
Received XX Month XXXX; revised XX Month, XXXX; accepted XX Month XXXX; posted XX Month XXXX (Doc. ID XXXXX); published XX Month XXXX 

Abstract 

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Czerny–Turner spectrometers have large and difficult to correct aberrations resulted from off-axis spherical mirrors, which affects the
quality of spectrometer imaging and limits its further application in the field of analysis. In this paper, a method to suppress
systematical aberrations at low cost for high-resolution Czerny–Turner spectrometers is proposed. It corrects the coma at the scanning
center wavelength by the Shafer equation and reduces the coma over a wide spectral range, and corrects the field curvature by
optimizing the raster position. It corrects the astigmatism at the scanning center wavelength by adding a cylindrical lens between the
converging mirror and the CCD, and suppresses the astigmatism over the wide spectral range by tuning the relative angle between the
cylindrical lens and the image plane. It improves the image quality and resolution of the conventional spectrometer. An instrument
re-
based on the proposed method is developed. Simulation analyses and experimental results indicate that the proposed method can
significantly suppress the aberration of the spectrometer, and compress the spot width by 91.4% and reach the resolution of 0.0192 nm
which is 15.8% higher than that of a unmodified spectrometer. Therefore, the proposed method and the corresponding instrument can
meet the requirements of high-resolution detection such as Raman spectrum.

Keywords: aberration-corrected; cylindrical lens; Czerny-Turner imaging spectrometer; high resolution


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1. INTRODUCTION 
As an important tool, spectrometers have wide use in
Raman [1, 2], infrared [3, 4], and fluorescence [5] spectral
detection. In most cases, the Czerny–Turner (C–T)
spectrometer has the best structure for high-resolution spectral
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detection, such as the Raman spectrum, because its structure


and adjustment are simple, and its resolution depends on the
system focal length and the groove interval of the grating.
As shown in Fig.1, the traditional C-T spectrometer
consists of an entrance slit, a spherical collimating mirror, a
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plane diffraction grating, a spherical converging mirror, and a (a)


detector. The traditional C-T spectrometer has a low resolution
because of short focal length of converging mirror and small
number of the diffraction grating grooves. In order to improve
the resolution of C-T spectrometer, a long focal length of
converging mirror and large number of the diffraction grating
grooves are used in high-resolution C-T spectrometers, which
results in a small single scan range. So, a rotating platform is
used in the high-resolution C-T spectrometer to rotate the
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diffraction grating, thereby achieving the spectrum over a wide


spectral range. Although the resolution of the C-T spectrometer
can be improved by increasing the focal length, but the
aberrations due to the off-axis spherical mirrors increase as the
focal length increases, which seriously affect the imaging
quality and reduce the resolution of the spectrometer. The main (b)
aberrations include coma, field curvature and astigmatism.
Therefore, how to suppress the aberrations of the high- Fig. 1 Optical schematic diagram of (a) high-resolution C-T
resolution C–T spectrometer is an urgent problem to be solved. spectrometer and (b) traditional C-T spectrometer
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In the 1960s and 1970s, many methods were studied to high resolution C-T spectrometers. So, the astigmatism
suppress aberrations of a spectrometer. Shafer first used the correction can be performed entirely according to the
asymmetric structure to correct the coma for a specific geometric relationship in Lee’s paper,. while the high-
wavelength, and proved that this method can also suppress the resolution C-T spectrometer should correct the field curvature
coma over a wide spectral range [6]. Rosendahl and Shafer first, and then correct the astigmatism using the optimal image
theoretically demonstrated that the astigmatism can be plane position and tilt angle obtained from the field curvature
suppressed by using a compensating lens [7] or a toroidal correction. Therefore, it is necessary to study the application of
mirror [8]. Dalton used a convex diffraction grating to achieve tilted cylindrical lens in high-resolution C-T spectrometer.
the divergent illumination to correct astigmatism [9]. On this In order to reduce the large and difficult-to-correct
basis, Mcdowell used the direct-divergence illumination of the aberrations of a high-resolution C–T spectrometer with low
plane diffraction grating to correct the astigmatism [10]. cost, a method is proposed in this paper to suppress the
However, these methods have not been studied in depth multiple aberrations and an instrument is built based on this

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because of the limitations of mechanical and optical processing. method. The proposed method uses the Shafer equation to
Since the 21st century, with the developing of processing correct the coma of the scanning center wavelength and reduce
technology, the aberration correction methods proposed by the coma of the wide spectral range. It corrects the field
predecessors have been gradually applied to actual curvature by calculating the optimal raster position. It corrects
spectrometers. Austin et al. achieved the divergent illumination astigmatism at the central wavelength by adding a cylindrical

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of the planar diffraction grating by adjusting the relative lens between a converging mirror and a CCD, and suppresses
position between the slit and the collimating mirror, and the astigmatism over the wide spectral range by tuning the
achieved astigmatism correction in a spectrometer with a focal relative angle between the cylindrical lens and the image plane.
length of 100 mm or less [11-14]. Chrystal placed a frosted Thereby, the proposed method increases the image quality of
glass in front of the slit to achieve the divergent illumination at the spectrometer and improves the resolution. Compared with
the slit position, with a focal length of 0.67 m in a spectrometer the present correction method of the aberration of
[15]. Voropai used a tilted plane-parallel plate to correct the spectrometers, the proposed method suppresses the
astigmatism in a spectrometer with a focal length of 105 systematical aberrations at low cost, and is easy to process and
mm[16]. However, these methods can only be used for the adjust. So, this method can be used to comprehensively correct
astigmatism correction over a narrow spectral range. Goto
re- the aberrations of C–T spectrometers to achieve high resolution. 
placed a compensation structure in front of the slit, and used
the astigmatism generated by the compensation structure to 2.  THE  PRINCIPLE  AND  METHOD  OF  ABERRATION 
compensate for the spectrometer with a focal length of 1.33 m
[17]. However, this method makes the spectrometer structure CORRECTION 
more complicated. Katakura et al. used concave toroidal The structure of the modified C–T spectrometer presented
mirrors or freeform mirrors to correct the astigmatism, which in this paper is shown in Fig. 2. Unlike the unmodified C–T
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is useful for any focal length [18-22]. Although the principle of spectrometer, the modified spectrometer adds a cylindrical lens
this method is very simple, it requires extremely high in front of the image plane, and the cylindrical lens and the
mechanical precision, and the toroidal mirror is extremely detection surface are both at an angle to the sagittal plane.
expensive [23]. In addition, the focal length of the toroidal
mirror in the sagittal direction depends on the central
wavelength of the incident light, which results in the poor
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astigmatism correction performance over a wide spectral range.


In order to better correct astigmatism and reduce the cost,
many methods have been studied. Some researchers added
spherical mirrors [24] or cylindrical mirrors [25-27] in the C–T
spectrometer to correct the astigmatism, but this method
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increases the size of the spectrometer and makes it too bulky


for large long focal-length spectrometer. Zhong implemented an
astigmatism correction by adding two lenses [28], but this
method also made the structure more complicated by
increasing the optical components. Xue and Xia achieved
astigmatism correction over a wide spectral range by adding a Fig. 2 Optical schematic diagram of the modified high-resolution C-T
wedge-shaped cylindrical lens [29] or a free-form cylindrical spectrometer
lens [30]. But these methods required the high precision for
The following sections discuss each aberration corrections
processing and adjustment, which means poor feasibility. Lee
in detail.
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used a tilted cylindrical lens to suppress the astigmatism over a


wide spectral range[23]. Compared with toroidal mirrors,
cylindrical mirrors, wedge-shaped cylindrical lens and free- A. Coma 
form cylindrical lens, the tilted cylindrical lens has a simple The coma can be corrected by the Shafer equation, as
structure and a low cost and does not need high adjusting shown in equation (1) [6]:
accuracy. But it had a good effect on the traditional C-T 2 3
sin  1  r1   cos  cos 1  , (1)
spectrometer with a short focal length of 150 mm, and achieved    
a resolution of 0.1 nm. The influence of field curvature on sin  2  r2   cos i cos  2 
spectral resolution is negligible because of low resolution, but where α1 and α2 are the off-axis angles of the collimating mirror
the effect of on the spectral resolution must be considered in and the converging mirror, respectively, i is the incident angle
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of the diffraction grating, θ is the diffraction angle of the j2


diffraction grating, and r1 and r2 are the radius of the S4  (6)
collimating mirror and the converging mirror. In general, both r2 / 2
angles α1 and α2 are less than 10°. Therefore, cosα1≈cosα2≈1. where x is the horizontal distance from the diffraction grating
According to the grating dispersion equation shown in to the converging mirror.
equation (2), i and θ can be obtained. According to the equations (4), (5) and (6), we can obtain
d sin i  sin    m ,
(2) the relationship shown in equation (7).
x  0.8452 r2 / 2 , (7)
where d is the groove interval of the diffraction grating, m is the
diffraction order, and λ is the diffraction wavelength. First- In addition, the angle, β, between the Gaussian image plane
order diffracted light is generally used to ensure the highest and the actual image plane at the tangential direction can be
light intensity for detecting the spectrum, which means m=1. calculated according to equation (8)[31].

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The incident and diffracted light of the system should be  3 x 
  1  1     2 , (8)
kept as parallel as possible to reduce the size of the high-
 2 r2 
resolution C–T spectrometer. As a result, the angle φ between
the incident angle and the diffraction angle of the diffraction The correction of the field curvature can be achieved by
grating is constant, as shown in equation (3). the equations (7) and (8).

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  1   2    i ,
(3)
C. Astigmatism 
Normally, φ is in the range of 10–13°. Therefore, the coma at a
specific wavelength can be corrected with the given φ, λ, r1, and
a). Astigmatism at the center wavelength序号乱了 
r2.
A spherical mirror has different focal lengths in the sagittal
B. Field curvature  direction and the tangential direction, as shown in equations (9)
and (10).
Because of the presence of the image-field curvature, the actual

f T  rT 2 cos  n ,  (9)
image plane of the system does not coincide with the Gaussian
re- n n

image plane, but is a cylinder with a certain distance from the f S n  rS n 2 cos  n  , (10)
Gaussian image plane, as shown in Fig. 3.
Two off-axis spherical mirrors used in the C–T
spectrometer resulted in a focal-length difference, as shown in
equation (11). In other words, the astigmatism is inherent in
the spectrometer and cannot be corrected by the spherical
mirrors themselves.
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  
f  f T1  f S1  f T2  f S 2 
, (11)
R R
 1 sin 1 tan 1  2 sin  2 tan  2
2 2
In order to correct the astigmatism, a cylindrical lens is
added in front of the imaging surface. The optical path diagrams
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Fig. 3 Schematic diagram of the actual image plane and Gaussian image
plane of the tangential view and the sagittal view are shown in Figs.
4(a) and (b).
CCD detectors are commonly used in the spectrometer. A
cylindrical surface causes an unfocused image on the CCD
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surface, which reduces spectral resolution. Therefore, it is


necessary to correct the field curvature.
According to the aberration theory, since the numerical
aperture of the spectrometer is small, only the primary
aberration of the system needs to be considered. So, the radius
of the actual image plane can be calculated according to
equation (4)[31].
j2 (4)
Rm  ,
3S3  S 4
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where j is the Lagrange–Helmholtz invariant, and S3 and S4 are
Fig. 4 Astigmatism correction by a cylindrical lens in (a) tangential
the primary astigmatism and primary field curvature of the
view and (b) sagittal view before the detector
system, respectively. S3 and S4 can be calculated by the
equations (5) and (6). Equation (12) shows the relationships for the cylindrical
2
j2  x lens structure in Fig. 4.
S3   1   (5)
r2 / 2  r2 
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lTC   lTC  t  n  1 n
1 1 1
  
l 
 SC SC l f 
SC
, (12)
  f  l 
TC  lTC  l SC  l SC

 
lSC f SC n 1
  lSC   t
 l SC  f 
SC n
 LC  f S2  lSC  t  
where lTC is the tangential object distance, and lTC is the Fig.  5    Astigmatism  correction  over  a  wide  spectral  range  by  a  tilted 
tangential image distance of the cylindrical lens. lSC is the cylindrical lens in the tangential view before the detector   

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sagittal object distance, and l’SC is the sagittal direction image
distance of the cylindrical lens. t is the center thickness of the In order to ensure that the astigmatism over a wide
cylindrical lens, n is the refractive index of the cylindrical lens, spectral range can be corrected, equation (14) must be satisfied.
f’SC is the focal length of the cylindrical lens, and LC is the
R R 
distance from the cylindrical lens to the converging mirror. d  1 sin  1 tan  1  2 sin  2 tan  2 
df  2 2 

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By equations (11) and (12), we obtain: 
d d  df ,
lSC
1
  ,
 P  P 2  4 Pf SC  (13)  l f
d  l SC  SC SC 
n 1 
t

 d
 0

2
 
l SC  f SC n 
where P  f  n  1  t . The specific position of the cylindrical 
d
n (14)
lens in the optical path in the case of correction of the
astigmatism of the scanning center wavelength can be obtained The first differential equation of equation (14) can be
from equation (13). converted to equation (15).
re- df df d 2 d ,
 (15)
b). Astigmatism over the wide spectral range  d d 2 d d
As shown in Fig. 5, different wavelength λ corresponds to The first factor at right of equation (15) can be obtained by
different diffraction angle θ. A change in the diffraction angle θ differential of equation (11).
of the main beam causes a change of the incident angle α2 of the The second factor at right of equation (15) can be obtained
converging mirror. In addition, Δf changes with the incident by a geometric relationship. As shown in Fig. 5, G is the
angle α2 of the converging mirror according to equation (9). intersection of the diffraction grating and the chief ray, O is the
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Therefore, it is necessary to correct the astigmatism over a spherical center of the converging mirror, M and M' are the
wide spectral range. Lee proposed to set the angle between the intersections of the chief rays with different wavelength after
cylindrical lens and the image plane to eliminate the diffraction on the converging mirror. Lgm is the distance
astigmatism of the non-scanning spectrometer with a wide between G and M, while Lgm’ is the distance between G and M’. i
spectral range[23]. For high resolution spectrometers, long is the incident angle of the diffraction grating, θ and θ' are
focal length and large number of the grating grooves are usually diffraction angles of different wavelength, α2 and α'2 are the
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used, which result in a small single spectral acquisition range. incident angles of the converging mirror, and γ is the angle of
In the process of spectral detection, the diffraction grating rotation of the diffraction grating. Their geometric relationship
should be at different angles according to the different is shown in equation (16).
acquisition range, which is different from the short-focus
spectrometer analyzed by Lee. The incident angle i is fixed GM  Lgm cos   , sin    

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when the detected spectrum is a certain range, and varies when  cos    , sin     
GM   Lgm , (16)
the detected spectrum is in different ranges. In addition, Lee's 
method was based entirely on the geometric relationship and OM  R2 cos      2 , sin      2 
dispersion principle, without considering the bending and 
OM '  R2 cos       2 , sin       2 
tilting of the actual image plane, and cannot be applied to high
resolution spectrometers directly. Therefore, it is necessary to Calculating x and y in equation (16) and taking θ’=θ+dθ,
study the astigmatism correction method of high resolution α'2=α2+dα2, the relationship shown in equation (17) can be
spectrometers with a wide spectral range. Based on Lee's obtained.
method for short-focus spectrometer, an astigmatism d 2 Lgm
 1 , (17)
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correction method over a wide spectral range suitable for high


d R2 cos  2
resolution scanning spectrometer is deduced in this paper.
It can be seen from equation (17) that the change in angle
γ of the diffraction grating does not affect the differential result.
And Lgm can be obtained by the horizontal distance from the
diffraction grating to the converging mirror, as shown in
equation(18).
Lgm  x / cos2 2  , (18)
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The incidence angle i is fixed when the detected spectrum which were used as the collimating mirror and the converging
is a certain range. Therefore, the third factor at right of mirror were selected to reduce the spherical aberration of the
equation (15) can be obtained from the differential of equation spectrometer.
(2). In this case, the structural parameters of the aberration-
d 1 , (19) corrected C–T imaging spectrometer were obtained as shown
 in Table 1.
d d cos
The second differential equation of equation (14) can be Table 1. Spectrometer Basic Parameters
converted to equation (20). Parameter Value
df df dl SC dH , (20) α1(°) 2.915

d dl SC dH d α2(°) 2.085

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where H is the diffusion distance of diffracted light of different x(mm) 676.16
wavelength on the image plane.
LC(mm) 782.4892
The first factor at right of equation (20) can be obtained by
differentiating of equation (13). δ(°) 9.3048
The third factor at right of equation (20) can be derived β(°) 0.2792

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from the line dispersion rate, as shown in equation (21).
The layout of the modified high-resolution C–T
dH R2 , (21) spectrometer with structural parameters of Table 1 was

d 2 d cos  obtained by Zemax, as shown in Fig. 6.
The incident angle of the diffraction grating i is determined
by the center wavelength of the diffraction grating at its current
position. Therefore, the curve of the diffraction angle of the
grating θ is not a continuous function but a piecewise function.
Fortunately, it can be seen from equations (15), (19), (20) and
re-
(21) that in the calculation of astigmatism over a wide spectral  
range, the influence of the change in θ can be eliminated. Fig. 6 Layout of the modified C-T spectrometer
According to Fig.5, the second factor at right of equation
(20) can be given by a geometric relationship, which is shown Here, the x + y size of the spot at 600 nm was set as the
in equation (22)._ optimization condition. The distances between the converging
mirrors and the cylindrical lens LC, and between the cylindrical
dl SC
 tan   tan     , (22) lens and the detector distance lSC, were optimized. The
dH
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optimized parameters obtained were LC = 780.94 mm and lSC =
where ξ is the angle between the cylindrical lens and the image 18.06 mm. The difference between the optimized values and
plane, and δ is the angle between the cylindrical lens and the the theoretical values was caused by treating each aberration
sagittal plane. The angle ξ can be obtained by equation (13), separately in the modeling of the aberration correction.
and the angle β between the image plane and the tangential Spot diagrams at 595 nm, 600 nm, and 605 nm with a
plane should be obtained by equation (8) to ensure the wavelength interval of 0.015 nm were obtained to verify the
coincidence of image plane and detection plane. This allows us image quality and resolution when the grating was placed at
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to obtain the angle δ between the cylindrical lens and the the spectral detection position of 600 nm. The spot diagrams
sagittal plane. are shown in Fig. 7.

3. ANALYSIS  
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This section further specifies the parameters that were


chosen for the proposed spectrometer according to the
previously established aberration-corrected C–T spectrometer
model.
In order to meet spectral-detection requirements of high-
resolution, a large number of grooves per millimeter of the
diffraction grating were necessary, and the system needed to
increase the focal length while minimizing aberrations. As a
result, two spherical mirrors with a radius of curvature of 1600
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mm were used as the collimating mirror and the converging Fig. 7 Spot diagrams of the modified C-T spectrometer
mirror, and a diffraction grating of 1800 g/mm was selected as
the dispersive element. The cylindrical lens used for calibration As seen in Fig. 7, the spectrometer can clearly distinguish
of astigmatism had a focal length of 100 mm and a center the incident light at intervals of 0.015 nm in the range of 595–
thickness of 3.2 mm, and was made of K9 material. 605 nm. The spot width at central wavelength is about 10 μm,
and the spot width at edge wavelength is about 16 μm.
According to the Rayleigh criterion, it was necessary to
Therefore, the spectrometer can achieve a resolution of 0.015
ensure that the spherical aberration of the spectrometer was
nm in the vicinity of 600 nm, and the image quality of the
less than λ/4.
spectrometer is significantly well.
Accordingly, a diffraction grating with the aperture of 68
mm and two spherical mirrors with the diameter of 75 mm
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For the imaging optical systems, the modulation transfer


function (MTF) and the enclosed energy circles are very
important parameters for evaluating qualities. The MTF is
defined as the modulus of the optical transfer function
(OTF).The MTF curve and the enclosed energy circles for an
incident light wavelength of 600 nm are shown in Fig. 8(a) and
(b).

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(a) Fig. 9 The RMS radius of spot diagrams at 400nm, 500nm, 600nm,
700nm and 800nm

As shown in Fig. 9, the spectrometer has a RMS radius of


11 μm in the range of 400–800 nm. The RMS radius gradually
increases as the wavelength departs from 600 nm. This is
re- because that the system only eliminates the coma at the 600 nm
position, and it is the coma that causes the RMS radius to
increase. The RMS radius varies with relative wavelength over
a range of wavelengths because the astigmatism was corrected
but not considering other aberrations.
Comparing the modified C–T spectrometer with a
unmodified C–T spectrometer and a C–T spectrometer with a
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toroidal mirror from a simulation perspective, cylindrical lens
(b) is used to further prove the effect and superiority of the current
Fig.8 The (a) MTF Curve and (b) encircling energy diagram of the method of aberration corrections.
modified C-T spectrometer
A. The unmodified C–T spectrometer  
As shown in Fig. 8 (a), the MTF curve is close to the Spot diagrams of incident light with a wavelength interval
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diffraction limit, which is a significant improvement in image of 0.015 nm near the 600 nm position, the MTF curve, and the
quality, it can be seen from Fig. 8 (b) that 90% of the total enclosing circular energy diagram at 600 nm incident-light for a
energy is within 20 μm of the chief ray, which is close to the unmodified C–T spectrometer were obtained. The results are
ideal value. shown in Fig. 10.
The image quality of the spot for the wide spectral range of As shown in Fig. 10(a), the spot is stretched in the sagittal
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400–800 nm was analyzed as well. The root mean square (RMS) direction with a poor focusing effect. The spot width of the
radii of the spot diagrams in a range of ±5 nm near the center wavelength is close to 520 μm, which is much higher
positions of 400 nm, 500 nm, 600 nm, 700 nm, and 800 nm than the 10 μm obtained using a cylindrical lens. In addition,
were obtained. The resulting curves are shown in Fig. 9. the tangential boundaries of the spots of different wavelengths
are not obvious. It can be seen from Fig. 10(b) that the MTF
curve differs greatly from the diffraction limit, and the image
quality is poor. And it can be seen from Fig. 10 (c) that 90% of
the total energy is in the range of 100 μm of the chief ray, and is
worse than the ideal value.
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and the radius of curvature of the collimating lens in the sagittal


and the tangential directions are determined, as shown in
equations (9)–(11). Therefore, this method requires an
extreme-high precision for the curvature radius of the toroidal
mirror. For the aberration-corrected C–T spectrometer with a
focal length of 800 mm, the radius of curvature of the toroidal
mirror in the sagittal direction needs to be 1587.2343 mm.
The accuracy of the radius of curvature of a flat-concave
mirror with a large radius of curvature can usually only be
controlled to ±0.2%. In this paper, the radius of the surface of
the cylindrical lens and the radius of the toroidal mirror in the
sagittal direction and tangential direction are used as variables

of
to simulate the shape of the dot-column with an incident light
of 600 nm when the error of the radius of curvature is ±0.20%.
The results are shown in Fig. 11.
(a)

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re-
Fig. 11 (a) Spot diagrams when the error is in the radius of curvature
(b) of (a)the cylindrical lens, (b) the toroidal mirror only in the sigittal
direction, (c) the toroidal mirror only in the ,tangential direction, and (d)
in the sigittal direction with an error of +0.10% in the ,tangential
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direction.

As can be seen from Fig. 11 (a), excellent image quality can


be achieved by fine-tuning the distance from the converging
mirror to the cylindrical lens, and the distance from the
cylindrical lens to the image plane, even when there is a certain
error in the radius of curvature of the surface of the cylindrical
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lens. In contrast, optimizing the distance between the


converging mirror and the imaging surface does not result in a
good imaging spot, and the system still has a large astigmatism,
(c) when there is a certain error in the radius of curvature of the
toroidal mirror in the sagittal direction or tangential direction,
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Fig. 10 (a) Spot diagrams, (b) MTF Curve and (c) encircling energy as shown in Fig. 11 (b) and (c). The astigmatism can be
diagram of the unmodified C-T spectrometer suppressed only when the errors of the radius of curvature of
the toroidal mirror in the sagittal direction and the tangential
We can see that the spot width of the modified high-
direction are the same, as shown in Fig. 11(d). Therefore, it is
resolution C–T spectrometer with a cylindrical lens can be
difficult to use only a toroidal mirror to achieve astigmatism
compressed by 96.2% compared with the unmodified C–T
correction in practice.
spectrometer. Therefore, the proposed method can significantly
improve the imaging quality over unmodified spectrometers.
4. EXPERIMENT 
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B. The modified C–T spectrometer with a toroidal mirror   According to the simulation results given above, a


Using a toroidal mirror is the most common method to schematic diagram of a spectrometer system was developed, as
correct astigmatism in high-resolution C-T spectrometer. The shown in Fig. 12. The system consisted of a converging lens, an
toroidal mirror has a different radius of curvature in the entrance slit, a shutter, two flat mirrors, a collimating mirror, a
sagittal and tangential directions. So, it can replace the diffraction grating, a converging mirror, a cylindrical lens, and a
spherical converging mirror in Fig. 1 to compensate for the CCD. The computer controlled the electronics board and CCD
focal length difference of the system. separately. The board controlled the slit motor, the grating
switching motor, the grating rotating motor and the shutter.
The radius of curvature of the toroidal mirror in the
When the shutter opened, the control signal was transmitted to
sagittal direction is uniquely determined when the radius of
the computer, then the computer transmitted an image
curvature of the converging mirror in the tangential direction
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acquisition command to the CCD, and closed the shutter after to further verify the performance of the system proposed in this
acquiring the image signal. Finally, the computer processed the paper.
acquired spectral information.

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Fig. 13 Schematic diagram of spectrometer

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A. Detector spot experiment 
A mercury lamp was used as a light source. The CCD
images in the incident light of 546nm for the C–T spectrometer
Fig. 12 The system schematic diagram system of spectrometer without cylindrical lens and with cylindrical lens are as shown
The collimating mirror and converging mirror are silver- in Fig. 14.
plated spherical mirrors with a curvature radius of 1600 mm
and a reflectance of 98%, which can reduce the loss of optical
signals.
The grating rotation system used a sinusoidal mode of
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operation, which had the advantage that the distance the slider
moved on the sinusoidal screw was linear with the diffraction
wavelength of the grating. Therefore, it was an effective method
for rotating the grating turret.
To meet wide, multifunctional detection requirements, and Fig. 14 The spot on the CCD (a) without cylindrical lens and (b) with
avoid "ghost" images, three ion-etching blazed holographic cylindrical lens
gratings produced by HORIBA were used to form a grating
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switching system. The number of the groove of different It is clear that the spot size is significantly smaller by
gratings was 1800 g/mm, 1200 g/mm and 600 g/mm, with the adding a cylindrical lens. The spot width exceeds 256 pixels
blazed wavelength of 400 nm, 750 nm, and 750 nm. The grating without the cylindrical lens while it is only 22 pixels with the
system could achieve a spectral scan range of 250-1500 nm. In cylindrical lens. The spot width reduction exceeds 91.4%.
addition, these gratings have very high diffraction efficiency to
ensure the signal-to-noise ratio of the system. B. Resolution experiment  
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Grating rotation and switching control of the electric slit Here, the full width at half maximum (FWHM) is used to
and shutter were controlled by Advantech's PCI-1245L board. characterize the resolution of the spectrometer. In order to test
And the detector used is the Andor iDus 416 CCD with 2000×256 the spectral resolution of the modified C–T spectrometer, the
pixels and a pixel size of 15μm, which enable spectral detection of spectrum of the mercury lamp in the 400-600 nm bands was
10 nm wavelength range at 800 nm. Its quantum efficiency in the collected with an incident slit width of 10 μm and a spectrum
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wavelength range of 400~950nm exceeds 40%, and in the acquisition time of 0.03s. The test result was compared with a
wavelength range of 550~850nm exceeds 70%, which can meet the unmodified C–T spectrometer without aberration correction, as
needs of spectral detection. shown in Fig. 15.
A modified C–T spectrometer was built, as shown in Fig. 13.
The detector spot and resolution experiments were carried out
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Fig. 15 The spectrum of the mercury lamp from 400nm to 800nm by using (a) the modified C-T spectrometer and (c) the unmodified C-T
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spectrometer, and the FWHM as resolution of (b) the modified C-T spectrometer and (d) the unmodified C-T spectrometer.

The resolution of the modified C–T spectrometer based on resolution of a modified C–T spectrometer can be improved by
the proposed method is 0.0192 nm, while the resolution of the 15.8%. The proposed method is effective to improve the
unmodified C–T spectrometer is 0.0228 nm. As a result, the resolution.
Table 2. The resolution of the modified spectrometer and the unmodified spectrometer
Wavelength(nm) 404.67 435.88 546.11 576.93 579.08 Average value
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Resolution of the modified spectrometer(nm) 0.019 0.020 0.016 0.021 0.020 0.0192
Resolution of the unmodified spectrometer
0.020 0.023 0.023 0.025 0.023 0.0228
(nm)
Improvement 5% 13% 30% 16% 13% 15.8%
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C. Spectral image experiment  
In order to verify the imaging ability of the spectrometer, a
confocal microscope is used in conjunction with the
spectrometer to constitute a confocal Raman spectroscopy
system. A standard step with homogeneous reflectivity
(TGXYZ02, Mikro Masch) is used as the experiment sample. The
excitation wavelength was 532 nm, the scanning pixel is 64×64,
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and the horizontal scanning step is 0.4 μm. The Raman


characteristic peak at 520 cm-1 of silicon was used for spectral Fig. 16 The Raman intensity spectral image of (a) 2D and (b) 3D
intensity imaging. The obtained spectral intensity image is
shown in Fig. 16. The Raman peak intensity of Si on the sample Therefore, when this spectrometer is combined with a
surface can be seen from Fig. 16, which can be considered as confocal microscope, a Raman spectrum image can be obtained,
the distribution of Si. which means that the spectrometer is an imaging spectrometer.

5. CONCLUSIONS 
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This paper proposed an effective method of eliminating 14. Y. An, Q. Sun, Y. Liu, C. Li, and Z. Q. Wang, “The design of astigmatism‐free 


aberrations for C–T spectrometer system to achieve high crossed Czerny–Turner spectrometer,” Optik 124, 2539–2543 (2013). 
resolution, and constructed the corresponding system. The 15. C. Chrystal, K. H. Burrell, and N. A. Pablant, “Straightforward correction 
system suppresses coma aberration by using the Shafer for the astigmatism of a Czerny–Turner spectrometer,” Rev. Sci. Instrum. 
equation, eliminates field curvature by setting the optimal 81, 023503 (2010). 
grating position, and corrects the astigmatism by a cylindrical 16. E. S. Voropai, I. M. Gulis, and A. G. Kupreev, "Astigmatism correction for a 
lens. It suppresses systematical aberrations of the spectrometer large‐aperture  dispersive  spectrometer,"  J.  Appl.  Spectrosc.  75(1),  150‐
at low cost, and is easy to process and adjust. 155 (2008). 
Simulation analyses and experimental results indicate that 17. M.  Goto  and  S.  Morita,  “Spatial  distribution  measurement  of  atomic 
the established spectrometer could significantly improve image radiation  with  an  astigmatism‐corrected  Czerny–Turner‐type 

of
quality. In comparison with the unmodified C–T spectrometer, spectrometer in the Large Helical Device,” Rev. Sci. Instrum. 77, 10F124 
(2006). 
the spot width was compressed by 91.4%, and the resolution
18. M.  Futamata,  T.  Takenouchi,  and  K.  Katakura,  “Highly  efficient  and 
achieved 0.0192 nm, which is improved by 15.8%. This
aberration‐corrected  spectrometer  for  advanced  Raman  spectroscopy,” 
modified C–T spectrometer can meet the requirements of high-
Appl. Opt. 41, 4655–4665 (2002). 
resolution detection and spectral imaging, such as Raman

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19. Q. Xue, S. Wang, and F. Lu, “Aberration‐corrected Czerny‐Turner imaging 
spectrum.
spectrometer with a wide spectral region,” Appl. Opt. 48, 11–16 (2009). 
  20. L. Xu, K. Chen, Q. He, and G. Jin, “Design of freeform mirrors in Czerny–
Turner  spectrometers  to  suppress  astigmatism,”  Appl.  Opt.  48,  2871–
Funding   2879 (2009). 
National Key R&D Program of China (2018YFF01012001) 21. J. Dong, H. Chen, Y. Zhang, S. Chen, and P. Guo, “Miniature anastigmatic 
spectrometer  design  with  a  concave  toroidal  mirror,”  Appl.  Opt.  55, 
National Science Foundation (NSF) (51825501, 51535002)
1537–1543 (2016). 
22. X.  Ge,  S.  Chen,  Y.  Zhang,  H.  Chen,  P.  Guo,  T.  Mu,  J.  Yang,  and  Z.  Bu, 
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