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1-10 1016@j Optcom 2019 125015
1-10 1016@j Optcom 2019 125015
Shucheng Li, Weiqian Zhao, Hexuan Xu, Lirong Qiu, Yun Wang
PII: S0030-4018(19)31068-5
DOI: https://doi.org/10.1016/j.optcom.2019.125015
Reference: OPTICS 125015
Please cite this article as: S. Li, W. Zhao, H. Xu et al., Optical system design of
aberration-corrected Czerny–Turner imaging spectrometer with high resolution, Optics
Communications (2019), doi: https://doi.org/10.1016/j.optcom.2019.125015.
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Optical system design of aberration‐corrected Czerny‐
Turner imaging spectrometer with high resolution
Shucheng Li, Weiqian Zhao, Hexuan Xu, Lirong Qiu, Yun Wang *
Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute
of Technology, Beijing 100081, China
of
*Corresponding author: alotrabbits@163.com
Received XX Month XXXX; revised XX Month, XXXX; accepted XX Month XXXX; posted XX Month XXXX (Doc. ID XXXXX); published XX Month XXXX
Abstract
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Czerny–Turner spectrometers have large and difficult to correct aberrations resulted from off-axis spherical mirrors, which affects the
quality of spectrometer imaging and limits its further application in the field of analysis. In this paper, a method to suppress
systematical aberrations at low cost for high-resolution Czerny–Turner spectrometers is proposed. It corrects the coma at the scanning
center wavelength by the Shafer equation and reduces the coma over a wide spectral range, and corrects the field curvature by
optimizing the raster position. It corrects the astigmatism at the scanning center wavelength by adding a cylindrical lens between the
converging mirror and the CCD, and suppresses the astigmatism over the wide spectral range by tuning the relative angle between the
cylindrical lens and the image plane. It improves the image quality and resolution of the conventional spectrometer. An instrument
re-
based on the proposed method is developed. Simulation analyses and experimental results indicate that the proposed method can
significantly suppress the aberration of the spectrometer, and compress the spot width by 91.4% and reach the resolution of 0.0192 nm
which is 15.8% higher than that of a unmodified spectrometer. Therefore, the proposed method and the corresponding instrument can
meet the requirements of high-resolution detection such as Raman spectrum.
In the 1960s and 1970s, many methods were studied to high resolution C-T spectrometers. So, the astigmatism
suppress aberrations of a spectrometer. Shafer first used the correction can be performed entirely according to the
asymmetric structure to correct the coma for a specific geometric relationship in Lee’s paper,. while the high-
wavelength, and proved that this method can also suppress the resolution C-T spectrometer should correct the field curvature
coma over a wide spectral range [6]. Rosendahl and Shafer first, and then correct the astigmatism using the optimal image
theoretically demonstrated that the astigmatism can be plane position and tilt angle obtained from the field curvature
suppressed by using a compensating lens [7] or a toroidal correction. Therefore, it is necessary to study the application of
mirror [8]. Dalton used a convex diffraction grating to achieve tilted cylindrical lens in high-resolution C-T spectrometer.
the divergent illumination to correct astigmatism [9]. On this In order to reduce the large and difficult-to-correct
basis, Mcdowell used the direct-divergence illumination of the aberrations of a high-resolution C–T spectrometer with low
plane diffraction grating to correct the astigmatism [10]. cost, a method is proposed in this paper to suppress the
However, these methods have not been studied in depth multiple aberrations and an instrument is built based on this
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because of the limitations of mechanical and optical processing. method. The proposed method uses the Shafer equation to
Since the 21st century, with the developing of processing correct the coma of the scanning center wavelength and reduce
technology, the aberration correction methods proposed by the coma of the wide spectral range. It corrects the field
predecessors have been gradually applied to actual curvature by calculating the optimal raster position. It corrects
spectrometers. Austin et al. achieved the divergent illumination astigmatism at the central wavelength by adding a cylindrical
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of the planar diffraction grating by adjusting the relative lens between a converging mirror and a CCD, and suppresses
position between the slit and the collimating mirror, and the astigmatism over the wide spectral range by tuning the
achieved astigmatism correction in a spectrometer with a focal relative angle between the cylindrical lens and the image plane.
length of 100 mm or less [11-14]. Chrystal placed a frosted Thereby, the proposed method increases the image quality of
glass in front of the slit to achieve the divergent illumination at the spectrometer and improves the resolution. Compared with
the slit position, with a focal length of 0.67 m in a spectrometer the present correction method of the aberration of
[15]. Voropai used a tilted plane-parallel plate to correct the spectrometers, the proposed method suppresses the
astigmatism in a spectrometer with a focal length of 105 systematical aberrations at low cost, and is easy to process and
mm[16]. However, these methods can only be used for the adjust. So, this method can be used to comprehensively correct
astigmatism correction over a narrow spectral range. Goto
re- the aberrations of C–T spectrometers to achieve high resolution.
placed a compensation structure in front of the slit, and used
the astigmatism generated by the compensation structure to 2. THE PRINCIPLE AND METHOD OF ABERRATION
compensate for the spectrometer with a focal length of 1.33 m
[17]. However, this method makes the spectrometer structure CORRECTION
more complicated. Katakura et al. used concave toroidal The structure of the modified C–T spectrometer presented
mirrors or freeform mirrors to correct the astigmatism, which in this paper is shown in Fig. 2. Unlike the unmodified C–T
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is useful for any focal length [18-22]. Although the principle of spectrometer, the modified spectrometer adds a cylindrical lens
this method is very simple, it requires extremely high in front of the image plane, and the cylindrical lens and the
mechanical precision, and the toroidal mirror is extremely detection surface are both at an angle to the sagittal plane.
expensive [23]. In addition, the focal length of the toroidal
mirror in the sagittal direction depends on the central
wavelength of the incident light, which results in the poor
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of
The incident and diffracted light of the system should be 3 x
1 1 2 , (8)
kept as parallel as possible to reduce the size of the high-
2 r2
resolution C–T spectrometer. As a result, the angle φ between
the incident angle and the diffraction angle of the diffraction The correction of the field curvature can be achieved by
grating is constant, as shown in equation (3). the equations (7) and (8).
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1 2 i ,
(3)
C. Astigmatism
Normally, φ is in the range of 10–13°. Therefore, the coma at a
specific wavelength can be corrected with the given φ, λ, r1, and
a). Astigmatism at the center wavelength序号乱了
r2.
A spherical mirror has different focal lengths in the sagittal
B. Field curvature direction and the tangential direction, as shown in equations (9)
and (10).
Because of the presence of the image-field curvature, the actual
f T rT 2 cos n , (9)
image plane of the system does not coincide with the Gaussian
re- n n
image plane, but is a cylinder with a certain distance from the f S n rS n 2 cos n , (10)
Gaussian image plane, as shown in Fig. 3.
Two off-axis spherical mirrors used in the C–T
spectrometer resulted in a focal-length difference, as shown in
equation (11). In other words, the astigmatism is inherent in
the spectrometer and cannot be corrected by the spherical
mirrors themselves.
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f f T1 f S1 f T2 f S 2
, (11)
R R
1 sin 1 tan 1 2 sin 2 tan 2
2 2
In order to correct the astigmatism, a cylindrical lens is
added in front of the imaging surface. The optical path diagrams
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Fig. 3 Schematic diagram of the actual image plane and Gaussian image
plane of the tangential view and the sagittal view are shown in Figs.
4(a) and (b).
CCD detectors are commonly used in the spectrometer. A
cylindrical surface causes an unfocused image on the CCD
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where j is the Lagrange–Helmholtz invariant, and S3 and S4 are
Fig. 4 Astigmatism correction by a cylindrical lens in (a) tangential
the primary astigmatism and primary field curvature of the
view and (b) sagittal view before the detector
system, respectively. S3 and S4 can be calculated by the
equations (5) and (6). Equation (12) shows the relationships for the cylindrical
2
j2 x lens structure in Fig. 4.
S3 1 (5)
r2 / 2 r2
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lTC lTC t n 1 n
1 1 1
l
SC SC l f
SC
, (12)
f l
TC lTC l SC l SC
lSC f SC n 1
lSC t
l SC f
SC n
LC f S2 lSC t
where lTC is the tangential object distance, and lTC is the Fig. 5 Astigmatism correction over a wide spectral range by a tilted
tangential image distance of the cylindrical lens. lSC is the cylindrical lens in the tangential view before the detector
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sagittal object distance, and l’SC is the sagittal direction image
distance of the cylindrical lens. t is the center thickness of the In order to ensure that the astigmatism over a wide
cylindrical lens, n is the refractive index of the cylindrical lens, spectral range can be corrected, equation (14) must be satisfied.
f’SC is the focal length of the cylindrical lens, and LC is the
R R
distance from the cylindrical lens to the converging mirror. d 1 sin 1 tan 1 2 sin 2 tan 2
df 2 2
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By equations (11) and (12), we obtain:
d d df ,
lSC
1
,
P P 2 4 Pf SC (13) l f
d l SC SC SC
n 1
t
d
0
2
l SC f SC n
where P f n 1 t . The specific position of the cylindrical
d
n (14)
lens in the optical path in the case of correction of the
astigmatism of the scanning center wavelength can be obtained The first differential equation of equation (14) can be
from equation (13). converted to equation (15).
re- df df d 2 d ,
(15)
b). Astigmatism over the wide spectral range d d 2 d d
As shown in Fig. 5, different wavelength λ corresponds to The first factor at right of equation (15) can be obtained by
different diffraction angle θ. A change in the diffraction angle θ differential of equation (11).
of the main beam causes a change of the incident angle α2 of the The second factor at right of equation (15) can be obtained
converging mirror. In addition, Δf changes with the incident by a geometric relationship. As shown in Fig. 5, G is the
angle α2 of the converging mirror according to equation (9). intersection of the diffraction grating and the chief ray, O is the
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Therefore, it is necessary to correct the astigmatism over a spherical center of the converging mirror, M and M' are the
wide spectral range. Lee proposed to set the angle between the intersections of the chief rays with different wavelength after
cylindrical lens and the image plane to eliminate the diffraction on the converging mirror. Lgm is the distance
astigmatism of the non-scanning spectrometer with a wide between G and M, while Lgm’ is the distance between G and M’. i
spectral range[23]. For high resolution spectrometers, long is the incident angle of the diffraction grating, θ and θ' are
focal length and large number of the grating grooves are usually diffraction angles of different wavelength, α2 and α'2 are the
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used, which result in a small single spectral acquisition range. incident angles of the converging mirror, and γ is the angle of
In the process of spectral detection, the diffraction grating rotation of the diffraction grating. Their geometric relationship
should be at different angles according to the different is shown in equation (16).
acquisition range, which is different from the short-focus
spectrometer analyzed by Lee. The incident angle i is fixed GM Lgm cos , sin
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when the detected spectrum is a certain range, and varies when cos , sin
GM Lgm , (16)
the detected spectrum is in different ranges. In addition, Lee's
method was based entirely on the geometric relationship and OM R2 cos 2 , sin 2
dispersion principle, without considering the bending and
OM ' R2 cos 2 , sin 2
tilting of the actual image plane, and cannot be applied to high
resolution spectrometers directly. Therefore, it is necessary to Calculating x and y in equation (16) and taking θ’=θ+dθ,
study the astigmatism correction method of high resolution α'2=α2+dα2, the relationship shown in equation (17) can be
spectrometers with a wide spectral range. Based on Lee's obtained.
method for short-focus spectrometer, an astigmatism d 2 Lgm
1 , (17)
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The incidence angle i is fixed when the detected spectrum which were used as the collimating mirror and the converging
is a certain range. Therefore, the third factor at right of mirror were selected to reduce the spherical aberration of the
equation (15) can be obtained from the differential of equation spectrometer.
(2). In this case, the structural parameters of the aberration-
d 1 , (19) corrected C–T imaging spectrometer were obtained as shown
in Table 1.
d d cos
The second differential equation of equation (14) can be Table 1. Spectrometer Basic Parameters
converted to equation (20). Parameter Value
df df dl SC dH , (20) α1(°) 2.915
d dl SC dH d α2(°) 2.085
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where H is the diffusion distance of diffracted light of different x(mm) 676.16
wavelength on the image plane.
LC(mm) 782.4892
The first factor at right of equation (20) can be obtained by
differentiating of equation (13). δ(°) 9.3048
The third factor at right of equation (20) can be derived β(°) 0.2792
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from the line dispersion rate, as shown in equation (21).
The layout of the modified high-resolution C–T
dH R2 , (21) spectrometer with structural parameters of Table 1 was
d 2 d cos obtained by Zemax, as shown in Fig. 6.
The incident angle of the diffraction grating i is determined
by the center wavelength of the diffraction grating at its current
position. Therefore, the curve of the diffraction angle of the
grating θ is not a continuous function but a piecewise function.
Fortunately, it can be seen from equations (15), (19), (20) and
re-
(21) that in the calculation of astigmatism over a wide spectral
range, the influence of the change in θ can be eliminated. Fig. 6 Layout of the modified C-T spectrometer
According to Fig.5, the second factor at right of equation
(20) can be given by a geometric relationship, which is shown Here, the x + y size of the spot at 600 nm was set as the
in equation (22)._ optimization condition. The distances between the converging
mirrors and the cylindrical lens LC, and between the cylindrical
dl SC
tan tan , (22) lens and the detector distance lSC, were optimized. The
dH
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optimized parameters obtained were LC = 780.94 mm and lSC =
where ξ is the angle between the cylindrical lens and the image 18.06 mm. The difference between the optimized values and
plane, and δ is the angle between the cylindrical lens and the the theoretical values was caused by treating each aberration
sagittal plane. The angle ξ can be obtained by equation (13), separately in the modeling of the aberration correction.
and the angle β between the image plane and the tangential Spot diagrams at 595 nm, 600 nm, and 605 nm with a
plane should be obtained by equation (8) to ensure the wavelength interval of 0.015 nm were obtained to verify the
coincidence of image plane and detection plane. This allows us image quality and resolution when the grating was placed at
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to obtain the angle δ between the cylindrical lens and the the spectral detection position of 600 nm. The spot diagrams
sagittal plane. are shown in Fig. 7.
3. ANALYSIS
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mm were used as the collimating mirror and the converging Fig. 7 Spot diagrams of the modified C-T spectrometer
mirror, and a diffraction grating of 1800 g/mm was selected as
the dispersive element. The cylindrical lens used for calibration As seen in Fig. 7, the spectrometer can clearly distinguish
of astigmatism had a focal length of 100 mm and a center the incident light at intervals of 0.015 nm in the range of 595–
thickness of 3.2 mm, and was made of K9 material. 605 nm. The spot width at central wavelength is about 10 μm,
and the spot width at edge wavelength is about 16 μm.
According to the Rayleigh criterion, it was necessary to
Therefore, the spectrometer can achieve a resolution of 0.015
ensure that the spherical aberration of the spectrometer was
nm in the vicinity of 600 nm, and the image quality of the
less than λ/4.
spectrometer is significantly well.
Accordingly, a diffraction grating with the aperture of 68
mm and two spherical mirrors with the diameter of 75 mm
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(a) Fig. 9 The RMS radius of spot diagrams at 400nm, 500nm, 600nm,
700nm and 800nm
diffraction limit, which is a significant improvement in image of 0.015 nm near the 600 nm position, the MTF curve, and the
quality, it can be seen from Fig. 8 (b) that 90% of the total enclosing circular energy diagram at 600 nm incident-light for a
energy is within 20 μm of the chief ray, which is close to the unmodified C–T spectrometer were obtained. The results are
ideal value. shown in Fig. 10.
The image quality of the spot for the wide spectral range of As shown in Fig. 10(a), the spot is stretched in the sagittal
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400–800 nm was analyzed as well. The root mean square (RMS) direction with a poor focusing effect. The spot width of the
radii of the spot diagrams in a range of ±5 nm near the center wavelength is close to 520 μm, which is much higher
positions of 400 nm, 500 nm, 600 nm, 700 nm, and 800 nm than the 10 μm obtained using a cylindrical lens. In addition,
were obtained. The resulting curves are shown in Fig. 9. the tangential boundaries of the spots of different wavelengths
are not obvious. It can be seen from Fig. 10(b) that the MTF
curve differs greatly from the diffraction limit, and the image
quality is poor. And it can be seen from Fig. 10 (c) that 90% of
the total energy is in the range of 100 μm of the chief ray, and is
worse than the ideal value.
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to simulate the shape of the dot-column with an incident light
of 600 nm when the error of the radius of curvature is ±0.20%.
The results are shown in Fig. 11.
(a)
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Fig. 11 (a) Spot diagrams when the error is in the radius of curvature
(b) of (a)the cylindrical lens, (b) the toroidal mirror only in the sigittal
direction, (c) the toroidal mirror only in the ,tangential direction, and (d)
in the sigittal direction with an error of +0.10% in the ,tangential
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direction.
Fig. 10 (a) Spot diagrams, (b) MTF Curve and (c) encircling energy as shown in Fig. 11 (b) and (c). The astigmatism can be
diagram of the unmodified C-T spectrometer suppressed only when the errors of the radius of curvature of
the toroidal mirror in the sagittal direction and the tangential
We can see that the spot width of the modified high-
direction are the same, as shown in Fig. 11(d). Therefore, it is
resolution C–T spectrometer with a cylindrical lens can be
difficult to use only a toroidal mirror to achieve astigmatism
compressed by 96.2% compared with the unmodified C–T
correction in practice.
spectrometer. Therefore, the proposed method can significantly
improve the imaging quality over unmodified spectrometers.
4. EXPERIMENT
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acquisition command to the CCD, and closed the shutter after to further verify the performance of the system proposed in this
acquiring the image signal. Finally, the computer processed the paper.
acquired spectral information.
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Fig. 13 Schematic diagram of spectrometer
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A. Detector spot experiment
A mercury lamp was used as a light source. The CCD
images in the incident light of 546nm for the C–T spectrometer
Fig. 12 The system schematic diagram system of spectrometer without cylindrical lens and with cylindrical lens are as shown
The collimating mirror and converging mirror are silver- in Fig. 14.
plated spherical mirrors with a curvature radius of 1600 mm
and a reflectance of 98%, which can reduce the loss of optical
signals.
The grating rotation system used a sinusoidal mode of
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operation, which had the advantage that the distance the slider
moved on the sinusoidal screw was linear with the diffraction
wavelength of the grating. Therefore, it was an effective method
for rotating the grating turret.
To meet wide, multifunctional detection requirements, and Fig. 14 The spot on the CCD (a) without cylindrical lens and (b) with
avoid "ghost" images, three ion-etching blazed holographic cylindrical lens
gratings produced by HORIBA were used to form a grating
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switching system. The number of the groove of different It is clear that the spot size is significantly smaller by
gratings was 1800 g/mm, 1200 g/mm and 600 g/mm, with the adding a cylindrical lens. The spot width exceeds 256 pixels
blazed wavelength of 400 nm, 750 nm, and 750 nm. The grating without the cylindrical lens while it is only 22 pixels with the
system could achieve a spectral scan range of 250-1500 nm. In cylindrical lens. The spot width reduction exceeds 91.4%.
addition, these gratings have very high diffraction efficiency to
ensure the signal-to-noise ratio of the system. B. Resolution experiment
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Grating rotation and switching control of the electric slit Here, the full width at half maximum (FWHM) is used to
and shutter were controlled by Advantech's PCI-1245L board. characterize the resolution of the spectrometer. In order to test
And the detector used is the Andor iDus 416 CCD with 2000×256 the spectral resolution of the modified C–T spectrometer, the
pixels and a pixel size of 15μm, which enable spectral detection of spectrum of the mercury lamp in the 400-600 nm bands was
10 nm wavelength range at 800 nm. Its quantum efficiency in the collected with an incident slit width of 10 μm and a spectrum
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wavelength range of 400~950nm exceeds 40%, and in the acquisition time of 0.03s. The test result was compared with a
wavelength range of 550~850nm exceeds 70%, which can meet the unmodified C–T spectrometer without aberration correction, as
needs of spectral detection. shown in Fig. 15.
A modified C–T spectrometer was built, as shown in Fig. 13.
The detector spot and resolution experiments were carried out
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Fig. 15 The spectrum of the mercury lamp from 400nm to 800nm by using (a) the modified C-T spectrometer and (c) the unmodified C-T
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spectrometer, and the FWHM as resolution of (b) the modified C-T spectrometer and (d) the unmodified C-T spectrometer.
The resolution of the modified C–T spectrometer based on resolution of a modified C–T spectrometer can be improved by
the proposed method is 0.0192 nm, while the resolution of the 15.8%. The proposed method is effective to improve the
unmodified C–T spectrometer is 0.0228 nm. As a result, the resolution.
Table 2. The resolution of the modified spectrometer and the unmodified spectrometer
Wavelength(nm) 404.67 435.88 546.11 576.93 579.08 Average value
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Resolution of the modified spectrometer(nm) 0.019 0.020 0.016 0.021 0.020 0.0192
Resolution of the unmodified spectrometer
0.020 0.023 0.023 0.025 0.023 0.0228
(nm)
Improvement 5% 13% 30% 16% 13% 15.8%
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C. Spectral image experiment
In order to verify the imaging ability of the spectrometer, a
confocal microscope is used in conjunction with the
spectrometer to constitute a confocal Raman spectroscopy
system. A standard step with homogeneous reflectivity
(TGXYZ02, Mikro Masch) is used as the experiment sample. The
excitation wavelength was 532 nm, the scanning pixel is 64×64,
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5. CONCLUSIONS
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quality. In comparison with the unmodified C–T spectrometer, spectrometer in the Large Helical Device,” Rev. Sci. Instrum. 77, 10F124
(2006).
the spot width was compressed by 91.4%, and the resolution
18. M. Futamata, T. Takenouchi, and K. Katakura, “Highly efficient and
achieved 0.0192 nm, which is improved by 15.8%. This
aberration‐corrected spectrometer for advanced Raman spectroscopy,”
modified C–T spectrometer can meet the requirements of high-
Appl. Opt. 41, 4655–4665 (2002).
resolution detection and spectral imaging, such as Raman
pro
19. Q. Xue, S. Wang, and F. Lu, “Aberration‐corrected Czerny‐Turner imaging
spectrum.
spectrometer with a wide spectral region,” Appl. Opt. 48, 11–16 (2009).
20. L. Xu, K. Chen, Q. He, and G. Jin, “Design of freeform mirrors in Czerny–
Turner spectrometers to suppress astigmatism,” Appl. Opt. 48, 2871–
Funding 2879 (2009).
National Key R&D Program of China (2018YFF01012001) 21. J. Dong, H. Chen, Y. Zhang, S. Chen, and P. Guo, “Miniature anastigmatic
spectrometer design with a concave toroidal mirror,” Appl. Opt. 55,
National Science Foundation (NSF) (51825501, 51535002)
1537–1543 (2016).
22. X. Ge, S. Chen, Y. Zhang, H. Chen, P. Guo, T. Mu, J. Yang, and Z. Bu,
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