SL-700 SERIES

COSENSE INC

Point/Continuous Level Sensors

The Model SL-700 Series Ultrasonic
Point/Continuous Micromeasurement System is an ideal solution
for the detection and measurement of ultra pure
chemical fluids in the semiconductor industries
Level Sensors For using very small sensor (VSS) technology.
Measuring a fluid level accurately and reliably in
Semi Conductor the chemical vapor deposition process is of the
utmost importance to the semiconductor wafer
Process fabrication process. The Cosense SL-700 Series
provides a single/ multiple discrete point level as
well as a continuous transmitter with a very high
degree of precision. The SL-700 Series ultrasonic
system is well suited for high viscosity liquids
such as DMAH, Titanium precursors and copper
precursors.

❏ 316LSS sensor material

❏ Miniature sensor size reduces liquid volume displace-
ment
❏ Works with the following chemicals independent of
dielectric, viscosity, color, density and opacity of
chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS,
TEOS, DCE, TCA
❏ No calibration or special installation requirements
Discrete Point Level

❏ No moving parts
❏ Sensor material finish 10 UIN RA electropolished
❏ High pressure vessel application up to 250 psig (1724
KPA) (consult factory for high pressure application)
Through Liquid Transmitter

❏ 316LSS sensor with VCR® metal gasket face seal fitting

will provide all-metal seal
❏ Discrete multipoints on single sensor body with inte-
gral electronics
❏ Accuracy of discrete point level±2mm
❏ Continuous through liquid - bottom-up transmitter,
dead zone less than 0.25” (6.35mm)
❏ Continuous through air - top-down transmitter starting
with 0.375” (9.53mm) diameter sensor
❏ Accuracy on continuous level transmitter ±0.01”
(.25mm) or better
❏ Continuous transmitter output, 4-20mA, 0-10V, RS-
232, Remote unit with digital display

Through Air Transmitter

HOW TO ORDER ___ ___ ___ ___ ___ ___ ___

SL-7:
Type Cable Length (Remote)
0 - Point Level 10-10 ft.(standard) (3 meters)
1 - Through liquid - Bottom-up 50-50 ft.(optional) (15 meters)
2 - Through air - Top-down
No. Of Discrete Point Level Sensor Dimension
Point Level
1 - One Specify: A——— Inches/mm
2 - Two B——— Inches/mm
3 - Three C——— Inches/mm
0 - Continuous Continuous Bottom-Up
Power Input L——— Inches/mm
1 - 115V AC, 50/60 Hz
2 - 230V AC, 50/60 Hz Sensor Diameter
3 - 24V DC 1 - 7/8” O.D. (22.23mm)
4 - 12V DC 2 - 1/2” O.D. (12.70mm)
3 - 3/8” (9.53mm) O.D.
Point Level Output (Point Level Gap Sensor)
1 - Five Amp Relay N.O. Continuous Output
2 - Five Amp Relay N.C. 1 - 4-20mA, RS-232
3 - TWO WIRE (4-20mA) Loop Power 2 - 0-10 volt, RS-232
4 - NPN (250mA Sink) 3 - RS-232

155 Ricefield Lane, Hauppauge, New York 11788-2007 • 631-231-0735 Fax: 631-231-0838
website: www.cosense.com • e-mail: sales@cosense.com
 SL-700 SERIES
DIMENSIONAL DRAWINGS

OPERATION:
The sensor is mounted on the top of the vessel
through VCR® metal gasket face seal fitting for
through air transmitter, through liquid transmitter,
Point/Continuous Level Sensors

and single/multiple discrete point level. For the

continuous transmitter, the electronics generate an

Active Region Of Sensor

Electronic Middle
electrical signal that is converted by the sensor to A
ultrasonic energy, is reflected back to the sensor

0.375” Vent Hole

which is then converted back to an electrical signal.

Electric Crystals
The electronics calculate the level in the vessel.

Typical Piezo
Density variation of different chemical fluids is com-
pensated through a reflected pin for bottom-up
L
sensor. Temperature variation of air inside the vessel
for top-down sensor is compensated by measuring L
air temperature. For discrete point level, the sensor
is mounted in the liquid medium. The electronics B
generate a continuous wave ultrasonic signal that
completely illuminates the liquid sensing area. The
absence of liquid in the sensing area causes the
ultrasonic signal to dissipate, which the electronics C 0.5”
0.25” (12.70mm)
sense as a “dry” condition. When liquid is present, (6.35mm)
the amplitude of the ultrasonic signal increases
which the electronics sense as a “wet” condition. Through Liquid

1-1/4”
SPECIFICATIONS: 0.5”
(31.75mm)
(12.70mm)
Range: 1” to 10” (25.4mm to 254mm) (consult factory for
longer range)
Repeatability: ±0.005” (.127mm) (typical) .375”
Discrete Point Level (9.53mm)
Input Power: 24VDC, 115VAC/230VAC 50/60 Hz (optional) Through Air
Compensation: Automatic over full range of sensor oper-
ating temperature
Output: Continuous: 4-20mA or 0-10Volt, RS 232 p.c. PERFORMANCE GUARANTEE
compatible Discrete Point Level: Relay output or two wire
loop power or NPN (250mA sink) If within 30 days of delivery the unit does not
Sensor Material: 316LSS, Standard perform according to our claims and was prop-
erly installed in an application that does not
Temperature Range: Sensor -20˚F to +200˚F (-29˚C to
exceed our stated performance specifications,
93˚C), Electronics -20˚F to +170˚F (-29˚C to 77˚C)
the unit may be returned for full credit.
Pressure: Operating: Up to 250 psig (1724 KPA)
Mounting: Cajon VCR® SS-12VCR-P Standard, specify spe- WARRANTY
cial requirement Cosense equipment is warranted against intrin-
Housing: Nema-4X Stainless Steel (remote) sic defects for a period of eighteen months
from the date of shipment.
Specifications to change without notice.

155 Ricefield Lane

Hauppauge, New York 11788-2007
COSENSE INC 631-231-0735 Fax: 631-231-0838
SL-700 12/99