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Date of publication xxxx 00, 0000, date of current version xxxx 00, 0000.
Digital Object Identifier 10.1109/ACCESS.2017.Doi Number

2-D Design of Double Gate Schottky


Tunnel MOSFET for High-Performance
Use in Analog/RF Applications
SHAZIA RASHID1, FAISAL BASHIR1, FAROOQ A. KHANDAY1, Senior Member, IEEE, M.
RAFIQ BEIGH2, FAWNIZU AZMADI HUSSIN3, Senior Member, IEEE
1
Department of Electronics and Instrumentation Technology, University of Kashmir, Srinagar, India
2
Department of Electronics, Govt. Degree College Sumbal, J&K, India
3
Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, Seri Iskandar 32610, Malaysia

Corresponding author: Farooq A. Khanday (e-mail: farooqkhanday@kashmiruniversity.ac.in), Fawnizu Azmadi Hussin (e-mail:
fawnizu@utp.edu.my).

ABSTRACT In this work, a new structure of Schottky tunneling MOSFET has been designed and simulated.
The proposed device structure uses floating gates and dual material main gates to counter short channel effects
and to improve RF/Analog figures of merit for low power design applications. The use of floating gates
modulates the Schottky barrier width, hence improves the ON state and RF/Analog figures of merit
performance of the proposed device in comparison to a conventional device. A significantly high I ON
(1.231×10-4A/µm) and ION/IOFF ratio (2.52×105) is achieved in the proposed ST-MOSFET in comparison to
conventional ST-MOSFET having ION (1×10-7A/µm) and ION/IOFF ratio (1×102). It has been observed that
there is more than 100 times improvement in cutoff frequency (fT), transconductance frequency product
(TFP), gain frequency product (GFP), gain transconductance frequency product (GTFP), gain bandwidth
product (GBP) and max oscillation frequency (fmax) in comparison to conventional ST-MOSFET. In addition,
there are reductions of 98% and 33.33% in switching ON and OFF delays respectively in the proposed device-
based inverter circuit in comparison to conventional ST-MOSFET based inverter circuit. Furthermore, the
proposed ST-MOSFET device does not require any highly doped regions, hence does not have any doping
related issues.

INDEX TERMS 2D devices, Multiple Gate Devices, RF Applications, Schottky MOSFET, Tunnel FET

I. INTRODUCTION The SB-MOSFET [14], [15] has been considered as an


The performance characteristics of MOSFET are directly alternative solution, but controlling such a device below
related to the device dimensions. The down scaling in MOS 32nm technology node to have high performance is very
device dimensions has shown a significant improvement in difficult. Hence, an alternative solution is needed.
speed, packaging density, power dissipation and cost [1-2]. In this paper, we propose and simulate a new structure of
However, the scaling of such devices below 32/22nm double gate with dual material gates and floating gate ST-
technology node becomes difficult due to gate oxide MOSFET to address above-mentioned issues. The main
tunneling, parasitic and short channel effects (SCE) [3]. objective of this study is to improve the ON current, ON-
Various solutions have been put forward to overcome such OFF ratio and sub-threshold slope by incorporating the
difficulties [4-5]. Planar structure with an ultra-thin body floating gates, dual material gates and HfO2 as the dielectric.
SOI MOSFET, tri-gate structures etc. have suppressed short The floating gates of length 3 nm have been incorporated
channel effects [6]; however it has significantly increased the above and below the channel adjacent to the source contact;
source drain (S/D) series resistance and fabrication the top and bottom gates consist of dual material. The use of
complexity. The metal S/D has provided a solution to series floating gates with metal work function engineering [16-20]
resistance problem [7-11] and has reduced off leakage induces the charge carrier concentration below the floating
current [9], [10] but degrades the ON state performance. gates in the silicon film. This increase in charge carrier
However, the ON state performance can be improved by concentration modulates the barrier width and enhances the
using dopant segregated layer (DSL) [12], [13] but performance of the proposed device. The incorporation of
incorporating a thin doped layer results in the complexity in floating gates and dual material main gates not only makes it
device fabrication process and increases the thermal budget. immune to short channel and parasitic effects, but it also

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improves the other device parameters such as The schematics of DGM-FG-ST-MOSFET and
transconductance, cut-off frequency and other analog/RF conventional ST-MOSFET studied in this work are shown in
figure of merits of the proposed device. The high dielectric Fig. 1. In DGM-FG-ST-MOSFET structure, the floating gates
constant oxide (HfO2) is responsible for high gate of length (LFG=3nm) and low metal work function are
capacitance which in turn leads to higher ION/IOFF in the incorporated under gate 1 and below gate 2 inside the oxide at
proposed device. Using high-k oxide gives the flexibility of distance 0.1 nm away from silicon material adjacent to the
using thicker oxide layer for the same value of capacitance source. The main gate has been split into two gates with two
which reduces gate leakage current caused due to direct different metal work functions of 4.9eV and 4.65eV.
tunneling of electrons through the oxide. This also reduces Moreover, the oxide used in the proposed device is Hafnium
the power dissipation. Besides, the sub-threshold slope is oxide of 2nm thickness. The simulation parameters used in the
improved with the increase in dielectric constant. The study are listed in the Table I.
performance of the proposed named as “Double Gate Fig.1(c) shows the process flow for the fabrication of
Material Floating Gate Schottky Tunnelling MOSFET proposed DGM-FG-ST-MOSFET. The process flow starts
(DGM-FG-ST-MOSFET)” and conventional ST-MOSFET with the deposition of Hafnium oxide (HfO2) on the Si wafer.
HfO2 thin films are deposited on Si substrates by remote
has been analyzed by using Atlas device simulator [21] at a
plasma Atomic Layer Deposition (RP-ALD) followed by a
gate length of 20nm. All the performance characteristics of
rapid thermal annealing [22]. This step is followed by etching
both the devices have been compared and it has been
the oxide layer for the deposition of floating gate. The
observed that the proposed DGM-FG-ST-MOSFET
oxidation is again done in the pit upto 0.1 nm followed by the
outperforms the conventional ST-MOSFET in all
floating gate implantation in the area above the oxide layer and
performance measuring parameters. The ON current (I ON) then the oxidation is done on the floating gate. After that, gate
and ION/IOFF of the proposed DGM-FG-ST-MOSFET have 1 and gate 2 deposition is done followed by the etching of
both increased by ~103 times to that of the conventional oxide and silicidation using ErSi1.7 [23]. ErSi1.7 thin films are
device. Moreover, the cut-off frequency (fT) has been grown on Si substrate in <100> orientation [24]. ErSi1.7 is used
obtained by doing the ac analysis of both the devices and it as source and drain because of its low Schottky barrier height.
has been observed that fT of the proposed device has In the next step, the device is flipped and all the above steps
increased by 5×102 times as compared to the conventional are repeated. At last, the oxidation is done and the oxide is
device. A dopant segregation layer (DSL) has been realized etched out from the gates.
by using a low metal workfunction floating gates in the
proposed device. Therefore, since no conventional doping
technique has been used to realize DSL, it is thus expected
that proposed device is free from random doping fluctuations
(RDF) and doping control issues and most importantly, it can
be processed at low temperature.
This paper is organized as follows. Section II introduces
physical structure used in the simulation. Section III
provides comparative results and analysis. The paper is
concluded in Section IV.

II. Models and Methods

The proposed device structure consists of dual gate material (a)


and a floating gate with appropriate work functions. The
ATLAS device simulator [21] has been used to carry out
simulations of conventional ST-MOSFET and proposed
DGM-FG-ST-MOSFET. The different models used in the
simulations are drift diffusion, conmob, fldmob, srh, fermi,
consrh and ust. The drift diffusion model mainly governs
transport of carriers in the channel. The tunneling across the
metal semiconductor junction is captured by Universal
Schottky tunneling model, fldmob and conmob mobility
models have been used to capture the field and concentration
dependent mobilities.
(b)

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TABLE I
SIMULATION PARAMETERS OF CONVENTIONAL ST-MOSFET
AND PROPOSED DGM-FG-ST-MOSFET
Proposed
Conventional
Parameters DGM-FG-ST-
ST-MOSFET
MOSFET
Gate length (nm) 20 20
Length of channel (nm) 20 20
Substrate thickness (nm) 8 8
Oxide thickness (nm) 2 2
Length of floating gate (nm) NA 3

Oxide thickness under


NA 0.2
floating gates (nm)

Oxide SiO2 HfO2


Dielectric constant
3.9 22
of oxide
Band gap
9 5.8
of oxide (eV)

Doping concentration
1×1016 1×1016
of channel (cm-3)
Work function of
4.5 4.5
Source/Drain(eV)
Gate1 & Gate2 work 4.72
4.9
function (eV) (Rhodium)
(Platinum)
Gate3 & Gate4 work 4.65
NA
function (eV) (Copper)

Floating gate work


NA 2.5(Barium)
function (eV)

The transfer characteristics of both conventional ST-


MOSFET and proposed DGM-FG-ST-MOSFET are shown
in Fig. 3. It is clear from the graph that there is significant
(c)
FIGURE 1. Schematic diagrams of (a) Conventional ST-MOSFET (b) improvement in ION, ION/IOFF Sub-threshold Swing (SS) of
Proposed DGM-FG-ST-MOSFET (c) Process flow of proposed DGM-FG- the proposed device. The ION (calculated at VDS=VGS=0.5V)
ST-MOSFET.
of the proposed device is 1.231×10-4A/µm and that of the
III. Results and Analysis conventional device is 6.247×10-8A/µm. Also, the IOFF
The energy band diagrams of conventional ST-MOSFET and (calculated at VDS=0.5V,VGS=0V) of the proposed device is
proposed DGM-FG-ST-MOSFET in OFF and ON-states are 4.88×10-10A/µm and that of the conventional device is
shown in Figs. 2(a) and 2(b) respectively. The improvement 4.559×10-10A/µm. Hence,the ION/IOFF ratio of the proposed
in performance characteristics of the proposed DGM-FG- and the conventional device is 2.52×105 and 1.37 ×102,
respectively. The enhancement in ION and reduction in IOFF in
ST-MOSFET can be understood from the energy band
the proposed device can be attributed to low metal work
diagram of both the devices. By using floating gates of work
function floating gates and dual-material main gates. The use
function 2.5eV in the proposed device, high electric field is
of low metal work function floating gates modulates the
created which is responsible for the reduction of barrier barrier width at the source side and enhances the ON state
height. Moreover, a significant increase in quantum band to performance, whereas the use of dual material main gate
band tunneling is evident from the energy band diagram of improves the OFF state performance of the proposed device
the proposed device. Due to these effects, a prominent as can be seen from Fig. 2(a). There is 45.5% decrease in SS
increase in ON current and ION/IOFF ratio of the proposed of the proposed device (83.34mV/decade) to that of the
DGM-FG-ST-MOSFET is observed. conventional one (153mV/decade). The decrease in SS is
because of the use of HfO2 in the proposed device.
The output characteristics of the proposed and the
conventional devices are shown in Fig. 4. In the output
characteristics of the proposed DGM-FG-ST-MOSFET, the

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drain current shows some dependence on drain voltage is attributed to the efficient modulation of the source channel
because of the channel length modulation effect. Moreover, barrier due to low work function of floating gates and higher
the output characteristics show offset for lower drain voltage oxide capacitance because of high dielectric constant oxide.
due to the asymmetry in the proposed device. 7x10
-8
Conv. ST-MOSFET
-8
6x10
-8
5x10 VGS=0.2V

ID(A/µm)
4x10
-8 VGS=0.3V

-8
VGS=0.4V
3x10 VGS=0.5V
-8
2x10
-8
(a)
1x10
0
0.0 0.1 0.2 0.3 0.4 0.5
VDS(V)
(a)
-4
1.4x10
-4 Prop. ST-MOSFET
1.2x10
-4
1.0x10
VGS=0.2V
-5
ID(A/µm)

(b) 8.0x10
VGS=0.3V
FIGURE 2. Energy band diagrams of: (a) conventional ST-MOSFET and -5
proposed DGM-FG-ST-MOSFET in OFF state, and (b) conventional ST-
6.0x10 VGS=0.4V
MOSFET and proposed DGM-FG-ST-MOSFET in ON state. -5
4.0x10 VGS=0.5V
10-3 -5
Conv. ST-MOSFET 2.0x10
1.2x10-4
Prop. ST-MOSFET 0.0
Log(ID(A/µm))

10-5
9.0x10-5 VDS=0.5V
ID(A/µm)

0.0 0.1 0.2 0.3 0.4 0.5


6.0x10 -5 10-7 VDS(V)
(b)
3.0x10-5 10-9 FIGURE 4. Output characteristics of (a) Conventional ST-MOSFET and (b)
Proposed DGM-FG-ST-MOSFET.
0.0 The transconductance generation factor (gm/ID) signifies
10-11
how efficiently current (ID) is used to obtain a particular
0.0 0.1 0.2 0.3 0.4 0.5
VGS(V) value of transconductance (gm). The benefit of high
FIGURE 3. Transfer characteristics of the proposed DGM-FG-ST- transconductance generation factor is to realize the circuits
MOSFET and conventional ST-MOSFET. operating at low voltage. gm/ID is the change in
transconductance with a change in drain current. It should be
The output conductance (gd) of both the conventional ST- high so that higher ac power gain could be extracted from the
MOSFET and the proposed DGM-FG-ST-MOSFET is input dc power [25]. Fig. 7 shows that the proposed ST-
shown in Fig. 5. It is clear from the graph that the proposed MOSFET has large transconductance generation factor
DGM-FG-ST-MOSFET has higher output conductance than (gm/ID) in comparison to the conventional ST-MOSFET. The
the conventional ST-MOSFET. The higher conductance is efficient barrier modulation, because of using floating gates
due to higher driving capability of the proposed device. The and HfO2 as dielectric, results in the higher transconductance
higher driving capability is because of the use of floating in the proposed device.
gates in the proposed device. Fig. 8 shows the variation of gate source capacitance (CGS)
The variation of transconductance (gm) with gate voltage and gate drain capacitance (CGD) with respect to gate voltage
(VGS) is shown in Fig. 6. It is evident from Fig. 6 that higher of both conventional and proposed ST-MOSFET. It has been
gm is achieved in the proposed DGM-FG-ST-MOSFET in observed that higher value of capacitance in the proposed
comparison to the conventional ST-MOSFET. A device is due to the use of high dielectric constant material.
significantly higher transconductance of the proposed device The variation of CGG(= CGS + CGD) with respect to gate

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voltage for different oxides has been shown in Fig. 9. It can -2


be seen that as the dielectric constant of oxide increases, the 10
capacitance also increases.
Prop. ST-
The higher transconductance in the proposed ST- -4
10 MOSFET
MOSFET leads to the improvement in cut-off frequency (fT)
in comparison to the conventional ST-MOSFET. Fig. 10(a)

gm(A/V)
shows the cut-off frequency plot of the proposed DGM-FG- 10
-6
ST-MOSFET (1.988×1011Hz) is ~103 times higher than the
conventional ST-MOSFET (3.92×108Hz). The cut-off
frequency has been calculated by using equation (1) -8 Conv.ST-
10
g𝑚 MOSFET
𝑓𝑇 = (1) VDS=0.5V
2∗𝜋∗𝐶gg
-10
10
where Cgg is the total gate capacitance.
0.0 0.1 0.2 0.3 0.4 0.5
The maximum oscillation frequency of both the devices
VGS(V)
has been ploted as shown in Fig. 10(b) by using equation (2).
FIGURE 6. Transconductance (gm) of the proposed DGM-FG-ST-MOSFET
and Conventional ST-MOSFET.
|𝑦21 −𝑦12 |2
𝑓𝑚𝑎𝑥 = 𝑓0 × √ (2)
4[(y11 y22 )−(y12 y21 )]
60 VDS=0.5V

where f0 is the small signal frequency used in the ac analyses 50


of both the devices, which has been taken as 106 Hz. fmax is
-1
) Prop. ST-MOSFET
the maximum frequency of oscillation calculated by using Y- 40
gm/ID(V

matrix. The maximum oscillation frequencies of both the


30
devices have been compared and it is evident from the Fig.
10(b) that fmax of the proposed DGM-FG-ST-MOSFET 20
(3.5×108Hz) is 10 times higher than the conventional ST- Conv. ST-MOSFET
MOSFET(1.8×107Hz). 10

-3
10 0.0 0.1 0.2 0.3 0.4 0.5
VGS(V)
-4
10 Prop.ST-MOSFET FIGURE 7. Transconductance generation factor (gm/ID) vs. VGS.
Log(gd)(A/V)

-5 Prop. ST-MOSFET
10 8x10-16
4.2x10-16 Conv. ST-MOSFET
-6
10 3.5x10-16 6x10-16
Conv. ST-MOSFET

CGD(F/µm)
CGS(F/µm)

-7
10 2.8x10-16
5x10-16
VGS=0.5V -16
-8
10 2.1x10
3x10-16
0.0 0.1 0.2 0.3 0.4 0.5 1.4x10-16
VDS(V) 7.0x10-17 2x10-16
FIGURE 5. Logarithmic form of output conductance (gD) of the proposed
DGM-FG-ST-MOSFET and Conventional ST-MOSFET. 0.0 0.1 0.2 0.3 0.4 0.5
VGS(V)
FIGURE 8. Variation of CGS and CGD with respect to VGS of the proposed
DGM-FG-ST-MOSFET and Conventional ST-MOSFET.

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product (GFP), gain transconductance frequency product


(GTFP) and gain bandwidth product (GBP). These
-7.0x10-16 parameters are significantly higher in the proposed DGM-
-1.4x10-15 FG-ST-MOSFET as compared to conventional ST-
MOSFET. All these parameters are plotted against gate
CGG(F/µm)

-2.1x10-15 voltage and shown in Figs. 11 and 12. The intrinsic gain is
SiO2 Al2O3
-2.8x10-15 HfO2 TiO2 higher in the proposed DGM-FG-ST-MOSFET because of
-15 the higher value of transconductance in the proposed device.
-3.5x10
The TFP (product of gm/Id and fT) represents a compromise
-4.2x10-15 between power and bandwidth and is used for moderate to
high-speed designs. GTFP includes both the switching speed
0.0 0.1 0.2 0.3 0.4 0.5 and gain of the device and is very useful for circuit design.
VGS(V) The higher TFP and gain in the proposed device has resulted
FIGURE 9. Variation of CGG with respect to VGS for different oxides of
in higher GTFP. GFP is also plotted against gate voltage for
proposed DGM-FG-ST-MOSFET . both the devices and the proposed ST-MOSFET outperforms
12 because of high gain and high cut off frequency. GBP is
10 higher in the proposed ST-MOSFET as compared to the
11 conventional ST-MOSFET because of the significant
10 Prop.ST- improvement in gm of the proposed device.
10 MOSFET
10 18
fT(Hz)

Conv.ST-
9
10 MOSFET 15 Prop.ST-MOSFET
Intrinsic gain

8
10 12
7
10 VDS=0.5V 9

0.0 0.1 0.2 0.3 0.4 0.5 6


VGS(V) Conv. ST-MOSFET
3
(a)
0
10
9
Prop. ST-MOSFET 0.0 0.1 0.2 0.3 0.4 0.5
VGS(V)
(a)
8
10
fmax(Hz)

12
3.0x10
VDS=0.5V 12
2.5x10
7
10 12
2.0x10
TFP(Hz/V)

Prop. ST-
12
1.5x10 MOSFET
6
10 Conv. ST-MOSFET
12
1.0x10
Conv. ST-
0.0 0.1 0.2 0.3 0.4 0.5 5.0x10
11
MOSFET
VDS=0.5V
VGS(V)
(b)
0.0
FIGURE 10. Variation of (a) Cut-off frequency (fT), and (b) maximum
oscillation frequency (fmax) of the proposed DGM-FG-ST-MOSFET and 0.0 0.1 0.2 0.3 0.4 0.5
conventional ST-MOSFET w.r.t. VGS.
VGS(V)
To analyze the analog/RF performance for the proposed (b)
FIGURE 11. Variation of (a) Intrinsic gain (b) TFP of the proposed DGM-
DGM-FG-MOSFET and conventional ST-MOSFET, it is FG-ST-MOSFET and conventional ST-MOSFET w.r.t. VGS.
necessary to have knowledge of intrinsic gain,
transconductance frequency product (TFP), gain frequency

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gates is shown in Fig. 13. Besides this, the different


10 12 Prop. ST-MOSFET performance measuring parameters such as ION, ION/IOFF, fT
and SS show dependence on the metal work-function used
1011 on the floating gates. Fig. 13 shows all these parameters
1010 degrade with the increase in work function of floating gates.
GFP(Hz)

109 10-2 ΦFG=2.5eV ΦFG=4.3eV


108 ΦFG=3.1eV ΦFG=4.9eV
107 10-4 ΦFG=3.7eV

IDS(A/µm)
106 Conv. ST-MOSFET 10-6
105
0.0 0.1 0.2 0.3 0.4 0.5 10-8
VGS(V)
(a)
10-10

1017 10-12
0.0 0.1 0.2 0.3 0.4 0.5
Prop. ST-MOSFET VGS(V)
GTFP(Hz/V)

1013 (a)

ΦFG=2.5eV
1x10-4
109 ΦFG=3.1eV
9x10-5 ΦFG=3.7eV
IDS(A/µm)

Conv. ST-MOSFET ΦFG=4.3eV


105 6x10-5 ΦFG=4.9eV
0.0 0.1 0.2 0.3 0.4 0.5
VGS(V) 3x10-5
VGS=0.5V
(b)
0
11
10
0.0 0.1 0.2 0.3 0.4 0.5
VDS(V)
Prop.ST- (b)
9 VDS=0.5V
10 1.4x10-4
GBP(Hz)

MOSFET 150
1.2x10-4 VGS=VDS=0.5V
140
1.0x10-4 130
SS(mV/dec)
ION(A/µm)

7
10 8.0x10-5 120
6.0x10-5 110
Conv.ST-MOSFET 4.0x10-5 100
5 2.0x10-5 90
10
0.0 80
0.0 0.1 0.2 0.3 0.4 0.5
VGS(V) 2.5 3.0 3.5 4.0 4.5 5.0
(c) ΦFG(eV)
FIGURE 12. Variation of (a) GFP (b) GTFP (c) GBP, of the proposed DGM-
FG-ST-MOSFET and conventional ST-MOSFET w.r.t. VGS. (c)

The use of floating gates plays important role for obtaining


higher performance from the proposed device. The transfer
and the output characteristics of the proposed DGM-FG-ST-
MOSFET with the variation of work function of floating

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106 180
2x10 11 93
170
105
11 90
1x10

SS(mV/dec)
160

Vth(mV)
104
ION/IOFF

87

fT(Hz)
8x1010 150
103 84
4x1010 140
10 2 81
VGS=VDS=0.5V
VGS=VDS=0.5V 0 130
78
101
2.5 3.0 3.5 4.0 4.5 5.0 1 2 3 4 5
ΦFG(eV) LFG(nm)
(d) (b)
FIGURE 13. Effect of floating gate work function (ΦFG) on (a) Transfer FIGURE 14.Effect of floating gate length on (a) Transfer characteristics
characteristics (b) Output characteristics (c) ION and SS (d) On-off current (b) SS and threshold voltage(Vth) of the proposed DGM-FG-ST-MOSFET.
ratio and cut-off frequency of the proposed DGM-FG-ST-MOSFET. Fig. 15 shows the effect of channel length on the
performance of the DGM-FG-ST-MOSFET and
To explain the role of floating gates in the performance of conventional ST-MOSFET. With decrease in channel length,
the proposed device, the following notations are made. ION/IOFF, and SS degrades but these parameters are better in
φs = work function of channel(Si) the proposed device than in conventional device at each gate
φf = work function of floating gate length. Thus, the severity of the short channel effects is very
Δφ = φs − φf less in the proposed device as compared to the conventional
The significant performance characteristics at minimum device due to the use of dual gate material, which keeps
φf can be attributed to the maximum Δφ which is responsible barrier height higher in the OFF state as seen from the Fig.
for the highest electric field. As electric field decreases with 2(a).
the decrease in Δφ, the concentration of charge carriers under
floating gates decreases which in turn increases the Schottky 106
Conv. ST-MOSFET 1013
barrier width, thereby degrading the performance Prop. ST-MOSFET
105
characteristics of the proposed device. 1012
The effect of change in the length of floating gates on the
104 1011
ION/IOFF

fT(Hz)
transfer characteristics, SS and threshold voltage has been
shown in Fig. 14. It has been observed that the optimum 1010
103
results are obtained at the length of 3nm. The length of 109
floating gates makes a significant effect on the performance 10 2
of the proposed device. As can be seen from the Fig. 14 (b) 108
VGS=VDS=0.5V
that with increase in length of floating gates, SS degrades and 101 107
threshold voltage decreases. This is because the increase in 14 15 16 17 18 19 20
length of floating gates leads to the increase of charge LG(nm)
carriers in the un-doped silicon film and smaller length of (a)
Silicon film is left for the gate voltage to be inverted. 270

10-1 240
LFG=1nm LFG=4nm
210 Conv. ST-MOSFET
SS(mV/decade)

10-3 LFG=2nm LFG=5nm


LFG=3nm 180
IDS(A/µm)

10-5
150
-7
Prop. ST-MOSFET
10 120

90 VDS=VGS=0.5V
10-9
14 15 16 17 18 19 20
10-11 LG(nm)
0.0 0.1 0.2 0.3 0.4 0.5
(b)
VGS(V) FIGURE 15. Effect of gate length on the (a) On-Off ratio and cut off
(a) frequency (b) SS of both the devices.

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Fig. 16 shows the effect of silicon film thickness on cut off dielectric constant of the oxide, ION/IOFF and SS improve.
frequency (fT) and SS of both the devices. As can be seen Higher ION/IOFF can be attributed to high gate capacitance
from the graph that cut-off frequency of the proposed device because of the high dielectric constant and the decrease in SS
decreases with increase in the thickness of silicon film and with the increase in dielectric constant can be governed by
sub-threshold slope degrades (increases) with increase in the equation (3). Also, it has been observed that with the
silicon film thickness. However, in conventional ST- increase in dielectric constant, there is negligible decrease in
MOSFET, it is highly degraded. The increase in SS with the ION and fT of the proposed device.
increase in silicon film thickness can be justified by equation
(3) [26]. 7x105 VDS=VGS=0.5V 130
−d
∈ 120
𝐾𝑇 √ Si tSi tox 5x105
𝑆𝑆 ≈ ln(10) (1 − 𝑒 ∈ox ) (3)

SS (mV/dec)
𝑞 110

ION/IOFF
3x105
100
VGS=VDS=0.5V 270
180
240 2x105 90
150
120
Prop. ST- 210 SS (mV/dec) 0 80
MOSFET
fT(Hz)

180 70
90
150 SiO2 Al2O3 HfO2 TiO2
60 Conv.ST- Oxide
120
30 MOSFET FIGURE 18. Variation of On-off current and SS of the proposed DGM-
90 FG-ST-MOSFET with respect to oxide.
0
60
8 9 10 11 12 13 14 Fig. 19 shows the comparison of transfer characteristics
Silicon Film Thickness(nm) of single material (SM) gates with oxide and dual material
FIGURE 16. Effect of silicon film thickness on fT and SS. (DM) with HfO2 of the proposed DGM-FG-ST-MOSFET.
The result shows that there is a reduction of Off current with
Fig. 17 shows the variation of SS of both the devices with the combination of dual material gates and HfO2. Fig. 20 (a)
respect to the temperature. It is observed from the figure that and (b) show the optimization of the work function of gates
with an increase in temperature, SS degrades (increases). SS of the proposed DGM-FG-ST-MOSFET. It has been
increases linearly with the increase in temperature which can observed that the optimum results are obtained at gate1,
be justified by equation (3), however, the increase is seen less gate2 work function (ΦG1= ΦG2) equal to 4.9eV and gate3,
in the proposed device. For a good turn on characteristics of gate4 work function (ΦG3= ΦG4) equal to 4.65eV.
the device, SS should be as small as possible which can be
obtained at lower operating temperatures.
280 VDS=0.5V
Conv. ST-MOSFET
240 10-5
Prop. ST-MOSFET
IDS(A/µm)

200
SS(mV/decade)

160
VDS=VGS=0.5V 10-7
120
80 10-9 SM Gates with SiO2
40
DM Gates with HfO2

0
10-11
240 260 280 300 320 340 360
0.0 0.1 0.2 0.3 0.4 0.5
o VGS(V)
Temperature( K)
FIGURE 17. Variation of SS of both the devices with respect to FIGURE 19. Comparison of transfer characteristics of Single
temperature. material(SM) gates with SiO2 and Dual material(DM) gates with HfO2 of
the Proposed DGM-FG-ST-MOSFET.
Fig. 18 shows the variation of SS and On-Off current ratio
of the proposed DGM-FG-ST-MOSFET with respect to the
oxide. It is observed from the figure that with the increase in

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better. The work in [30] uses same gate length and higher
25 ΦG1=ΦG2=4.9eV 85.5 supply voltages, but still the performance of the device is
85.0 comparable. Even the SS performance of the proposed
20
ION/IOFF(×10 )

device is better. The work in [31] seems to offer better


4

SS(mV/dec)
15
84.5 performance but the authors have carefully chosen the
supply voltages to achieve this performance. If the same
84.0
10 scheme is applied to the proposed device, the device shall
83.5 offer much better performance than [31].
5 As the proposed device works on the lower technology
83.0
node, one of the SCEs such as DIBL has been calculated and
4.50 4.55 4.60 4.65
is shown in Fig. 21. It is clear from the Fig. 21 that as the
ΦG3 & ΦG4(eV)
node technology lowers, DIBL becomes prominent. The
(a)
performance of DGM-FG-ST-MOSFET and conventional
26 ION/IOFF(×104) 83.4 ST-MOSFET based inverter has been analyzed using mixed
24 SS(mV/dec)
mode feature of ATLAS device simulator. Fig. 22 shows the
83.2
22 transient analysis of both the device-based inverters. The
ION/IOFF(×104)

SS(mV/dec)
83.0 delay is calculated and it has been observed that there is a
20
18 82.8 reduction of 98% and 33.33% in switching ON and OFF
16 82.6 delays respectively in the proposed device based inverter
14 circuit in comparison to the conventional ST-MOSFET
82.4
12 ΦG3=ΦG4=4.65eV based inverter circuit. The smaller delay observed in the
82.2 inverter designed using the proposed DGM-FG-ST-
4.75 4.80 4.85 4.90
MOSFET as compared to the one designed using the
ΦG1 & ΦG2 (eV)
conventional ST-MOSFET is because of the high driving
(b)
FIGURE 20. Optimization of the work function of gates of the proposed capability of the proposed ST-MOSFET.
DGM-FG-ST-MOSFET. The process-induced variations in the proposed DGM-FG-
The performance of the proposed device was compared ST-MOSFET after the introduction of floating gates is
with the previously published works on SB-MOSFET and is analysed by estimating the change in the electrical
summarized in Table II. From the table, it can be seen that parameters such as ON current, Subthreshold Swing and
the proposed device presents comparatively a very good threshold voltage by the change in the physical parameters
performance considering the employed gate length and of the floating gates. The variation has been calculated by
supply voltages. The references [12], [14] and [15] use the changing one of the physical parameters of the floating gates,
same supply voltage but higher gate length (50 nm); keeping all the other physical parameters of the device
nevertheless, the proposed device still has a comparable constant. It has been observed that there is slight variation in
performance even after employing the gate length of only the electrical parameters of the proposed device with the
20nm. The work in [27-29] use higher gate length and supply change in the physical parameters of the floating gates as can
voltages, but still the performance of the proposed device is be depicted from Fig. 23.
TABLE II
COMPARISON OF OUR WORK WITH THE PREVIOUS PUBLISHED WORKS.
VDS/VGS
Ref. LG (nm) ION (µA/µm) ION/IOFF fT (GHz) SS(mV/dec)
(V/V)
[12] 50 0.5/0.5 0.2 9.3×104 230 74.5
5
[14] 50 0.5/0.5 45 2.6×10 200 72.53
[15] 50 0.5/0.5 1200 106 290 77.76
[27] 30 -1.1/-2.6 314 1870 280 117
6
[28] 50 1.0/2.0 319 3.19×10 - 125
5
[29] 500 1.2/5.0 900 10 - 180
[30] (WSE) 20 0.6/1.4 2380 1.85×106 - 96.5
[30] (WSDE) 20 0.6/1.4 2040 5.6×108 - 93.3
8
[31] 10 0.1/2.0 - 10 - 66
This work 20 0.5/0.5 123.1 2.52×105 198.8 83.34

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400 300
350
ION(µA/µm)

electrical parameters
250
300 VTH(mV)
DIBL(mV/V)

250 200 SS(mV/dec)

Variation in
200
150 150
100
50 100
0
50
14 16 18 20
LG(nm)
0
FIGURE 21. Analysis of DIBL of the proposed DGM-FG-ST-MOSFET.
1.4 -2 -1 0 1 2
ON-delay=3.6ps, OFF-delay= 80ps Lateral displacement of FG
1.2 ON-delay=180ps, OFF-delay=120ps (c)
1.0 240
and V (V)

Input ION(µA/µm) SS(mV/dec)


O

electrical parameters
0.8 200 VTH(mV)
Conv. ST-
0.6 160

Variation in
MOSFET
IN

0.4 Prop. ST- 120


V

0.2 MOSFET
80
0.0
40
0.0 0.5 1.0 1.5 2.0
Time(nS) 0
FIGURE 22. Transient analysis of the proposed and conventional ST-
0 1 2 3 4
MOSFET.
Vertical displacement of FG
(d)
FIGURE 23. Variation in electrical parameters with change in physical
parameters such as (a) Thickness (b) Length (c) Lateral displacement (d)
250 Vertical displacement of floating gates(FG) of the proposed DGM-FG-ST-
ION(µA/µm) VTH(mV) MOSFET.
electrical parameters

200 SS(mV/dec)
IV. CONCLUSION
Variation in

150 In this paper, a double gate structure of Schottky tunneling


MOSFET has been designed and simulated. The proposed
100
device structure uses gate engineering technique to enhance
the performance of the proposed device. The use of floating
50
gates modulates the Schottky barrier width, hence improves
the ON state and RF/Analog figures of merit performance of
0
the proposed device in comparison to the conventional device.
0.1 0.2 0.3 0.4 0.5
TFG(nm) The use of dual material main gates improves the short
(a) channel performance and the OFF-state behavior of the
420 proposed device in comparison to conventional device.
ION(µA/µm) Further, there is a significant improvement in ION, IOFF, SS, fT,
360
electrical parameters

VTH(mV) fmax, etc. in the proposed device. In addition to that, the doping
Variation in

300 related issues like random dopant fluctuations and doping


SS(mV/dec)
240 control issues are absent in the proposed device, since a dopant
segregation layer has been realized by using floating gates. In
180 future, the proposed device can be analyzed for the detection
120 of various biomolecules. In addition, as we have seen that the
60 proposed device has good analog figure of merits and hence
will be used in various RF applications.
0
1 2 3 4 5
LFG(nm)
(b)

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[30] P. Kumar, B. Bhowmick, “Source-Drain Junction voltage analog integrated circuit design, Hardware Neural Network,
Engineering Schottky Barrier MOSFETs and their Mixed Quantum Computing, Stochastic Computing and Biomedical Circuit
Design. Dr. Khanday is the author or co-author of more than 100
Mode Application”, Silicon 12: 821-830,2020. publications in peer reviewed indexed International and National
[31] P. Kumar, B. Bhowmick, “Scaling of dopant segregation journals/conferences of repute and seven book chapters. Dr. Khanday has
Schottky barrier using metal strip buried oxide MOSFET and authored one book on “Nanoscale Electronic Devices and Their
its comparison with conventional device”, Silicon 10: 811- Applications” in CRC Press and edited three books on “Fractional Order
820,2018. Systems_ Mathematics, Design, and Applications for Engineers” in
Elsevier. Dr. Khanday is the Management Committee (MC) Observer of
the COST Action CA15225 (Fractional-order systems - analysis, synthesis
and their importance for future design) of European Union. He is the senior
SHAZIA RASHID received the B.E. in member of IEEE and member of several professional societies. Dr.
Electronics and communication engineering Khanday is serving as a reviewer for many reputed International and
from university of Jammu and M.Tech in National scientific journals in Electronics. He has successfully guided many
VLSI design from Abdul Kalam Technical Ph. D, M. Phil scholars and M. Tech thesis. Dr. Khanday also has
University, Lucknow, under the scholarship completed/ongoing funded research projects to his credit and has established
from All India Council for Technical laboratories with state of the art facilities for pursuing research in the field
Education (AICTE), Government of India. of IC design, Nanoelectronics, fractional-order systems etc.
She is currently pursuing the Ph.D. degree
from the department of Electronics and M. RAFIQ BEIGH has been with Govt. Degree
Instrumentation technology, University of Kashmir, under the research College, Sumbal J&K India since May 2016. He
fellowship from the University Grants Commission (UGC), Ministry of completed his Masters in Electronics from
Education, Government of India. Her research interests include University of Kashmir, Srinagar, India in 2000 and
semiconductor devices and modeling, tunneling devices and their his M. Phil in Electronics in 2012. He went on to
biosensing applications. complete a Ph.D from University of Kashmir,
Srinagar in 2015. Dr. Beigh is a prolific researcher
FAISAL BASHIR completed M.Sc., M.Phil. and has published more than 24 research papers in
in Electronic Science from University of various Journals and Conference proceedings. He is
Kashmir and PhD in Electronic Science from a member of International Association of Engineers
Jami Millia Islamia, New Delhi, India. Besides (IAENG), Hong Kong as well as reviewer of multiple international journals.
this, he has qualified National Eligibility Test Dr. Beigh has also taught at University of Kashmir and at multiple
in Electronic Science for Assistant undergraduate institutions prior to joining GDC Sumbal.
Professorship conducted by university grants
commission. His research interests include
Semiconductor devices and modeling, VLSI FAWNIZU AZMADI HUSSIN (Senior Member,
design and Nano-electronics. Dr. Faisal is currently teaching in the IEEE) received the bachelor’s degree in electrical
Department of Electronics and IT University of Kashmir, Srinagar. He is the engineering from the University of Minnesota, Twin
reviewer of the various reputed journals like IEEE transaction on Electron Cities, Minneapolis, MN, USA, in 1999, under
Devices, IEEE Nanotechnology etc. Dr. Faisal is the recipient of best paper PETRONAS Scholarship, the M.Eng. Sc. degree in
award in World Congress on Engineering held at Honk Kong 2014 and systems and control from the University of New
recipient Merit Scholarship at M. Phil level from University of Kashmir. He South Wales, Sydney, NSW, Australia, in 2001,
has published more than 25 research papers and three book chapters in the under UTP Scholarship, and the Ph.D. degree in
field of Semiconductor devices and VLSI in reputed international journals core-based testing of system-on-a-chip (SoCs) from
and conferences. the Nara Institute of Science and Technology, Ikoma, Japan, in 2008, under
the scholarship from the Japanese Government (Monbukagakusho). He was
FAROOQ A. KHANDAY (M’15, SM’19) the Program Manager of Master by coursework program from 2009 to 2013,
(Senior Member, IEEE) received B.Sc., M.Sc., M. the Deputy Head of the Electrical and Electronic Engineering Department
Phil. and Ph.D. Degrees from University of from 2013 to 2014, and the Director of Strategic Alliance Office from 2014
Kashmir in 2001, 2004 2010 and 2013 to 2018 with UTP. He spent one year as a Visiting Professor with Intel
respectively. From June 2005 to Jan. 2009, he Microelectronics (Malaysia)’s SOC DFx Department, from 2012 to 2013.
served as Assistant Professor on contractual basis He is currently an Associate Professor of electrical and electronic
at University of Kashmir, Department of engineering with Universiti Teknologi PETRONAS. He is also a Visiting
Electronics and Instrumentation Technology. In Professor with the Malaysia-Japan International Institute of Technology
2009, Dr. Khanday joined to Department of Higher (MJIIT-UTM). He has been actively involved with the IEEE Malaysia
Education J&K and Department of Electronics and Vocational Studies, Section as a Volunteer, since 2009. He was the 2013 and 2014 Chair of the
Islamia College of Science and Commerce Srinagar, as Assistant Professor. IEEE Circuits and Systems Society Malaysia Chapter. He is currently
In May 2010, he joined as Senior Assistant Professor in the Department of serving as the Chair for the IEEE Malaysia Section, in 2019 and 2020.
Electronics and Instrumentation Technology, University of Kashmir. His
research interests include Fractional-order Circuits, Nano-Electronics, Low-

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