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Silicon

https://doi.org/10.1007/s12633-020-00861-z

ORIGINAL PAPER

Improving Short Channel Effects by Reformed U-Channel UTBB FD


SOI MOSFET: A Feasible Scaled Device
Moslem Ghassemi 1 & Ali A. Orouji 1

Received: 5 August 2020 / Accepted: 20 November 2020


# Springer Nature B.V. 2021

Abstract
U-channel ultra-thin body and buried oxide (U-UTBB) Silicon On Insulator (SOI) Metal Oxide Semiconductor Field Effect
Transistors (MOSFETs) present unique features which are simple, high-performance, area efficient, and compatible with CMOS
technology. In this paper, we present the electrical characteristics of a U-UTBB SOI MOSFET with reforming the U-channel.
This proposed symmetrical and planar device is initiated by removing two spacers around the recessed metal gate in the U-
channel MOSFET. Hence, it causes to increase the overall channel length at the firm metal gate space along with saving area. As
it has confirmed by two-dimensional and two-carrier device simulation results, the proposed structure which is termed Reformed
U-UTBB (R-U-UTBB) fully depleted SOI MOSFET exhibits advantages in the device performance focusing on short channel
effects (SCEs) factors including the sub-threshold slope, the drain induced barrier lowering (DIBL), and the threshold voltage
roll-off. Leakage current and on-to-off current ratio are studied as well which all of them show the superiority of proposed
structure compared with the U-UTBB FD SOI MOSFET and a conventional UTBB (C-UTBB) FD SOI MOSFET. In addition,
the effects of process-induced variations have investigated by varying buried oxide thickness, top silicon thickness, channel
thickness, substrate doping, and oxide thickness on threshold voltage, sub-threshold slope, and drain induced barrier lowering
(DIBL).

Keywords U-channel . UTBB . SOI MOSFET . TCAD . Short Channel effects . High-k dielectric

1 Introduction (SOI) technique, which is acceptable and vastly utilized.


Because of lessening parasitic capacitance, SOI-MOSFETs
In the past decades, ongoing demand of Metal Oxide were became faster and offer more benefits, such as higher
Semiconductor Field Effect Transistors (MOSFETs) provid- drive current, lower power characteristics, latch-up current
ing high speed, high packing density, and low power consum- immunity and shorter interconnect length over bulk competi-
ing in VLSI industries for smart and mobile applications, has tors [1–3]. As SOI MOSFETs scaling down to sub 50 nm,
been leading researchers to shrink transistors in size. As these conventional methods to defeat SCEs were inefficient and
basic unit of Integrated Circuits (ICs) are scaled to nanometer many alterations have been applied to lessen degradation ef-
regime, numerous undesirable effects which are named Short fects of channel length shrinkage. Lots of different solutions
Channel Effects (SCEs) arise. Threshold voltage roll-off, have been proposed to overcome these problems [4–13].
Drain Induced Barrier Lowering (DIBL), subthreshold swing, Channel engineering techniques are effective methods to
punch through, Hot Carrier Effect (HCE), are problematic suppress degradation effects of device miniaturization [14],
issues which deeply affect the MOSFET performance. involving U-channel MOSFETs [15, 16]. In the U-channel
Of all the proposed solutions, the most prominent approach scheme, the silicon film is etched to form U-shape grooves,
to overcome these provoking effects was Silicon On Insulator so helps to separate the source and drain depletion region
which reduces punch-through effect. In addition to more gate
control over the channel, this separation also has decreased
* Ali A. Orouji threshold voltage roll-off [16]. One recent promising strategy
Aliaorouji@semnan.ac.ir
on ultra-scaled device which is planar and compatible with the
1
Electrical Engineering Department, Semnan University, bulk silicon CMOS fabrication process, is Ultra-Thin Body
Semnan, Iran and Buried oxide (UTBB) implementation of Fully Depleted
Silicon

(FD) SOI MOSFETs. It has advantages for future low-cost The schematic cross section of U-channel UTBB (U-
energy-efficient applications [15], excellent for short channel UTBB) structure [15] is shown in Fig. 1(b) which is asserted
effect immunity and ideal subthreshold characteristics [17, by moving up the spacers located between gate and source/
18]. In UTBB device, short-channel effects are usually con- drain and adding two vertical channels (Xj) to the horizontal
trolled by a narrow silicon layer, thus this thin silicon body channel (Lg), DIBL and subthreshold slope are enhanced.
enhances the electrostatic qualities [19], reduces the leakage Source and drain regions in these structures have constructed
current [5, 20], increases on-to-off current ratio because of using uniform doping profiles with Gaussian tails. In the pro-
carrier mobility improvement [21], and allows the channel to posed nMOS structure that is shown in Fig. 1(c) and we have
be un-doped [5, 22]. Furthermore, thinning of the BOX has called it as Reformed U-channel UTBB (R-U-UTBB) struc-
been suggested as a good solution to lower self-heating effect ture, the spacers are eliminated entirely, so the Gaussian dop-
and fringing electric fields through the BOX and substrate ing profile with minimum uniform doping part in an intrinsic
[23]. By using intrinsic channel, higher drive current and silicon film is used.
steeper subthreshold slope are attained. Possessing awesome There is a ration of the gate length to the channel
subthreshold swing and DIBL are critical for good overdrive thickness (Lg /Tch) of UTB MOSFETs that short-channel
and hence device switching speed. Moreover, because of re- effects are sufficiently defeated when this ratio is greater
moving the random dopant fluctuation, significant improve- than 4 [5]. So, the gate lengths of structures have chosen
ment of variability control is achieved [24, 25]. 16-nm. Also, the top silicon film has 15-nm thick and
To derive the most forgoing benefits, an innovative U- reaches to 4-nm beneath the metal gate to satisfy Lg/Tch
channel UTBB (U-UTBB) SOI MOSFET has submitted in ratio. For the reason that thin body devices can control
this work which has no fabrication process complexity in short channel effects with only un-doped channel, the
comparison with FinFET and fully compatible with SOI channel of novel structure has left intrinsic. Significant
CMOS technology as well as owing admissible Technology performance enhancements such as improving carrier mo-
Computer-Aided Design (TCAD) analysis. In the proposed bility and high on-to-off current ratio with low change
U-channel MOSFET device, two spacers around the recessed because of random dopant fluctuation can be expected
metal gate are removed. The proposed structure is called [21]. Although, with un-doped channel in UTBB
Reformed U-UTBB (R-U-UTBB) FD SOI MOSFET. Our MOSFETs, threshold voltage adjustment can be attained
results show the superiority of proposed structure compared by gate work function engineering if necessary [5].
with the U-UTBB FD SOI MOSFET and a conventional According to experimental results reported in [29], a prac-
UTBB (C-UTBB) FD SOI MOSFET. The paper is organized tical limit for SiO2 thickness as a gate oxide is 10–12 Å
as follows: In Section 2, the macroscopic novel device tem- for excellent electrical properties, which a 1-nm film of
plate, simulation details, and modeling are described. And in SiO2 as an interfacial layer has used. An aluminum gate
Section 3, the proposed device compares with its conventional with a 2-nm-thick HfO2 dielectric has specified. So the
counterparts and advantages are discussed individually. effective work function is calculated by simulator and is
given by:

Φmeff ¼ E  HIGHK þ S  HIGHK ðWORKF–E  HIGHKÞ ð1Þ


2 Device Structure and Simulation
Methodology where Φmeff is the effective gate work function,
E.HIGHK is the charge neutrality level of the high-k ma-
Figure 1(a) shows schematic cross section of the C-UTBB terial, S.HIGHK is a slope parameter of the high-k mate-
structure with raised drain and source. In the UTBB device, rial, and WORKF is the metal work function in vacuum
the body thickness should be as thin as possible, but the [31]. These default parameters are given in Table 1.
series resistance of the source and drain regions increase Active layer deposited on the 20-nm buried oxide (BOX),
and so affect the transistor current [26–28]. By creating a so heat generated by the hot carriers is delivered smoothly to
raised source and drain structure, the parasitic resistance substrate. Thin BOX devices also become more suitable for
can be diminished. Nevertheless, one downside of this applying back-gate biasing idea used for tuning device char-
structure is growing overlap capacitance. Thus, spacer acteristics like set or modulate threshold voltage [32]. Table 2
widths between the gates and raised source and drain have summarizes the crucial parameters of contemporary formation
located [5]. Also, Hafnium dioxide, HfO2, is used as a which have utilized for the device simulation.
high-k gate dielectric due to its high dielectric constants. A two dimensional ATLAS device simulator [31] is used to
They have thermal firmness when in contact with Si [29]. simulate the device’s electrical behavior. Simulated device
In fact, HfO2 exhibits robust ferroelectricity when it is geometries and structure are close as possible as experimental
doped with Si, Yttrium, or Al [30]. device. In order to achieve more realistic results, several
Silicon

Fig. 1 Schematic cross section of


(a) C-UTBB, (b) U-UTBB, and
(c) R-U-UTBB SOI-MOSFETs

models have activated in simulation. The physical device 3 Results and Discussion
model includes the effects such as band gap narrowing
(BGN) for the carrier statistics, combination of Klaassen 3.1 Output Characteristic and Sub-Threshold Slope
(KLA) and Shiharata (SHI) and parallel electric field depen-
dence are considered for carrier mobility modeling (doping In this paper, we compare the simulation results of R-U-
dependence, high field saturation effects). Also, Shockley– UTBB structure with the U-UTBB and the C-UTBB struc-
Read–Hall (SRH) and Auger (AUG) for recombination as tures. The output characteristics of three structures for two
well as avalanche generation are used. With continued scaling gate-source voltages of 0.4 and 0.8 V are shown in Fig. 2.
into the deep nanometer regime, the energy balance model has
activated (HCTE) to perform accurate simulation. When the
energy balance transport model is applied, the appropriate Table 2 Critical parameters of the proposed structure in the device
impact ionization model is (CONCANNON). This accurate simulation
model calculates the probability of a carrier having sufficient
Device parameter Value
energy to cause impact ionization. In addition, due to take into
account quantum effects, Bohm Quantum Potential (BQP) for Gate length (Lg) 16 nm
quantum modelling has applied. Second interfacial layer (SiO2) thickness (TSio2) 1 nm
high-k gate dielectric (HfO2) thickness (THk) 2 nm
Top silicon thickness (TSOI) 15 nm
Table 1 Dielectric Channel thickness (Tch) 4 nm
parameter defaults Parameter name Value
Buried Oxide (BOX) thickness (TBOX) 20 nm
E·HIGHK 4.81 eV Effective work function (Φmeff) 4.3065 eV
S·HIGHK 0.95 n+ Source & Drain maximum doping 1020 cm−3
WORKF 4.28 eV Substrate doping 1015 cm−3
Silicon

Fig. 3 Compare of R-U-UTBB subthreshold slope to U-UTBB and C-


UTBB SOI-MOSFETs in transfer characteristics for 16 nm gate length of
Fig. 2 The simulated output characteristics of the C-UTBB, U-UTBB,
nMOS device on Vds = 0.05 V
and R-U-UTBB SOI-MOSFETs for Vgs = 0.4 and 0.8 V

However, the R-U-UTBB device has a lower saturation cur- Leff ¼ Lg þ 2X j ð5Þ
rent than the U-channel and conventional UTBB, but it is
more stable than the C-UTBB and U-UTBB structures as it
can be concluded from slope of the graphs. The values of this parameter is 24-nm for the U-UTBB
The sub-threshold slope is one of the important quality of a and 38-nm for the R-U-UTBB structures which are given
MOSFET’s current–voltage characteristic. The drain current in Table 3. However, by increasing Leff in the U-UTBB
behavior in the sub-threshold region is similar to the exponen- and the R-U-UTBB structures, both the Cdep and Cox are
tially decreasing the current of a forward biased diode. The growing, but the effect of rising C o x is dominant.
sub-threshold slope is linked to the depletion capacitance by Consequently, the sub-threshold slope of R-U-UTBB
the equation: structure improved about 8% and 18% in comparison with
  the U-UTBB and the C-UTBB structures, respectively.
KT C dep These values are summarized in Table 3. As transfer char-
S¼ lnð10Þ 1 þ ð2Þ
q C OX acteristics of three structures are shown in Fig. 3, the re-
duction of sub-threshold slope for the proposed R-U-
where T is the temperature, q is the electronic charge, S is the
UTBB device than the C-UTBB and U-UTBB devices
sub-threshold slope, Cdep is the capacitance of depletion re-
are notable. To show the variation of sub-threshold slop
gion, and Cox is the gate-oxide capacitance [33]. It can be seen
versus gate length, this short channel effect has simulated
from Eq. 2 that decreasing the depletion capacitance Cdep, or
for gate length of 8 to 26-nm and plotted in Fig. 4.
increasing Cox will improve the sub-threshold slope.
In fact, with decreasing the gate length, an extra factor is
introduced to account for increasing the sub-threshold slope
Table 3 SCEs parameters of R-U-UTBB SOI-MOSFET compared to
[19], so that:
U-UTBB and C-UTBB devices
 
T OX el X j 3 T dep
EIS ¼ 1þ ð3Þ parameter C-UTBB U-UTBB R-U-UTBB
Lel 2 4 Lel
" sffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi# Xj (nm) 0 4 11
KT C dep εSi V ds Lg (nm) 16 16 16
S¼ lnð10Þ 1 þ þ EIC 1 þ 2 ð4Þ
q C OX εOX φd Leff (nm) 16 24 38
DIBL (mV/V) 137 100 81
where Vds is the source to drain potential and φd is the drain Subthreshold slope (mV/dec) 93 81 76
barrier potential that should be taken to 1 V for simplicity. Threshold voltage (V) 0.27 0.23 0.25
Figure 3 shows the transfer characteristic for Vds = 0.05 V and Threshold voltage roll-off (mV) 46 47 25
subthreshold slope of the R-U-UTBB in comparison with the Ioff (A) 8 × 10−08 2 × 10−08 4.3 × 10−09
U-UTBB and the C-UTBB structures. In fact, in the U-channel Ion/Ioff 4.4 × 103 1.6 × 104 6.4 × 104
structures instead of Lg, Leff should be used as follows [14]:
Silicon

Fig. 4 Sub-threshold slope variation of 8 to 26 nm gate length for the C-


Fig. 6 DIBL variation of 8 to 22 nm gate length for the C-UTBB, U-
UTBB, U-UTBB, and R-U-UTBB SOI-MOSFETs
UTBB, and R-U-UTBB SOI-MOSFETs

3.2 Drain Induced Barrier Lowering (DIBL)


DIBL for 8 to 22-nm range of gate length for the C-
Reduction of threshold voltage of the MOSFET at higher U T B B , th e U - U T B B , a n d t h e R - U - U T B B S O I -
drain voltages is known as DIBL. In practice, the DIBL with MOSFETs. The DIBL variations of three structures are
typical unit of mV/V can be calculated as follows: shown in Fig. 6. Because by drain voltage increasing,
the surface potential in the U-UTBB device is not
Th −V Th
V DD low
DIBL ¼ − ð6Þ changed much near to the source, it has much immunity
V DD −V low
on this effect [14]. In other words, because of increasing
where V DD
Th is the threshold voltage measured at a supply volt-
Leff, the DIBL of R-U-UTBB structure improves 21%
age, and V low than the U-UTBB and 41% than the conventional one.
Th is the threshold voltage measured at a very low
drain voltage, typically 0.05 V. The VDD is the supply voltage The simulated values of three structures are summarize
and Vlow is the low drain voltage. To illustrate DIBL that has in Table 3.
been defined as the difference between the linear threshold
voltage and the saturation threshold voltage, the transfer char- 3.3 Leakage Current and Ion/Ioff Figure of Merit
acteristics of R-U-UTBB for Vds = 0.05 and 1 V shows in
Fig. 5. Leakage current in MOSFETs is classified to three type of
DIBL is also could defined as the gate voltage shift due junction leakage, gate leakage, and off-state leakage, and all
to a drain voltage variation extracted at a constant nor- of them increase when transistors are scaled down. Channel
malized drain current. We use this definition to extract

Fig. 5 Id-Vg curves on linear (Vds = 0.05 V) and saturation (Vds = 1 V) Fig. 7 Ion/Ioff ratio of the C-UTBB, U-UTBB, and R-U-UTBB SOI-
threshold voltage for showing DIBL of R-U-UTBB SOI-MOSFET MOSFETs versus gate length which
Silicon

P ¼ C:V2 :f þ Ioff :V ð7Þ

where f is the frequency, C is the gate-oxide capacitance, and


Ioff is the total leakage current. It is concluded from this equa-
tion that reducing V has a significant effect on power. Scaling
the power supply voltage, reducing threshold voltage.
However, Ioff will increase as a result of decreasing threshold
voltage, which the off-state power will increase, so there is
trade-off in this case.
For an ideal device working as a switch, the off current is
ideally zero. But when MOSFETs is used as switches, it is
very small and equal to current passing in the transistor when
Vg = 0 V and Vds = VDD. The Ioff is simulated and summarized
in Table 3 for the C-UTBB, U-UTBB, and R-U-UTBB SOI-
MOSFETs. As the transistor is scaled down, due to short
Fig. 8 Threshold voltage roll-off due to gate length variation of 8 to channel effects the off current increases. For having high per-
26 nm gate length for the C-UTBB, U-UTBB, and R-U-UTBB SOI-
MOSFETs
formance device, on to off current is defined as a figure of
merit and try to maximize the Ion/Ioff ratio to drop static power
losses. Figure 7 shows Ion/Ioff ratio of the C-UTBB, U-UTBB,
doping is the main reason of junction leakage, which is re- and R-U-UTBB devices versus gate length which outstanding
quired to set threshold voltage, and to defeat SCEs in short enhancement of novel device is considerable.
channel devices [27]. Using un-doped channel can be de-
creased this type of leakage which is employed in our struc- 3.4 Threshold Voltage Roll-off
tures. Device scaling causes gate-oxide thickness is becoming
as thin as about 2-nm, which means reaching the thickness of The relationship between threshold voltage and gate
several SiO2 atoms. In this situation, the gate leakage would length of a MOSFET is traditionally threshold voltage
dominant in comparison with the off-current leakage of tran- roll-off’ which is used to measure the short channel
sistor. Considering this, high-k dielectrics for MOSFET appli- effects. Therefore, for different gate lengths, the electri-
cations has become a suitable solution. It has been reported cal characteristics of the transistor vary. An ideal device
that for the same equivalent oxide thickness, the MOSFET should have electrical parameters that are insensitive
with high-k dielectric has more than four orders of magnitude against geometry fluctuations. As shown in Fig. 8.,
less than gate leakage of transistor which gate oxide made threshold voltage roll-off’ of R-U-UTBB SOI-MOSFET
from SiO2 [27]. Therefore, we have inserted a change in the has improved 46% compared to the U-UTBB and the
proposed MOSFET architecture to include 2-nm HfO2 film to C-UTBB devices. For larger gate lengths three devices
reduce gate leakage and benefit other advantages which is have shown a rather constant threshold voltage, but for
mentioned in the previous section. shorter channel lengths the slope of the threshold volt-
By transistor shrinkage, because of increment of internal age curve is increased. The R-U-UTBB device also
electric field scaling of the power supply voltage is inevitable. shows a much better threshold voltage roll-off for
This means that the power generated by the chip, which is shorter channel lengths because of its longer effective
define as Eq. (7) need to decrease [27]: gate length. The simulation results of threshold voltage

Fig. 9 Effect of BOX thickness


variation on threshold voltage and
sub-threshold slope (a) and DIBL
(b) of R-U-UTBBUTBB SOI-
MOSFET
Silicon

Fig. 10 Effect of SOI thickness


variation on threshold voltage and
sub-threshold slope (a) and DIBL
(b) of R-U-UTBB UTBB SOI-
MOSFET

roll-off UTBB SOI-MOSFETs are documented at 16-nm 7-nm with a step of 1-nm. As shown in Fig. 11(a),
gate length in Table 3. despite the gradually increase and decrease, respectively
in the threshold voltage and the sub-threshold slop,
3.5 Process-Induced Variations DIBL behavior in Fig. 11(b) is different. Because of
Quantum effects [15] and strongly dependence of
Due to variations during the device fabrication process, the SCEs on the body thickness for UTBB SOI-MOSFETs
geometry and different parameters of the R-U-UTBB SOI- [5], the amount of DIBL has increased at channel thick-
MOSFET are subject to uncertainties. Process-induced varia- nesses less than 4 nm. On the other hand, as the chan-
tions have investigated by studying the effect of buried oxide nel thickens, due to deviation of the structure from U-
thickness (TBOX), top silicon thickness (TSOI), channel thick- shape and thus reducing the effect of channel separation
ness (Tch), substrate doping, and oxide thickness (Tox) on in U-channel device [16], a significant increment on
threshold voltage, sub-threshold slope, and DIBL. DIBL has been occurred. Therefore, in the simulation
Figure 9(a) shows the effect of BOX thickness variation from results of 4 nm channel thickness, the lowest value of
10 to 30-nm on threshold voltage and sub-threshold slope of DIBL has been observed.
R-U-UTBB device. However sub-threshold slope become al- However, the ballistic transport has ignored in simulations.
most unchanged for thicknesses more than 20-nm, but thresh- It has reported in a 30-nm gate of UTBB MOSFET, about
old voltage is decreasing constantly due to reducing effect of 20% of electrons arriving to the drain terminal are ballistic.
substrate acceptor dopant. The minimum value of DIBL occur Moreover, it is to be emphasized that the requirement of an
at BOX thickness of 20-nm as demonstrate in Fig. 9(b), while un-doped channel will increase this value [19].
for thin BOX it has significant increase. To reduce the doping concentration of channel and as
Figure 10(a) and (b) shows the effect of silicon film varia- a result the Vth variations in the UTBB SOI-MOSFET,
tion on threshold voltage, sub-threshold slope, and DIBL, re- high-impurity-concentration substrate has been proposed
spectively, which has minor impact on them compared with [25]. The effect of this parameter variation on threshold
other parameters. As shown in Fig. 10(b), the minimum value voltage, sub-threshold slope, and DIBL has been inves-
of DIBL belong to SOI thickness of 16-nm and is about tigated for both donor and acceptor dopant of substrate
80 mV/V. and present measured data in Fig. 12(a), (b), and (c). As
The next geometry parameter of novel device is shown in these figures, if the substrate dopes with donor
channel thickness which has been changed from 2 to dopant with density of 1015 atom/cm3, 48 mV/V will be

Fig. 11 Effect of channel


thickness variation on threshold
voltage and sub-threshold slope
(a) and DIBL (b) of the R-U-
UTBB SOI-MOSFET
Silicon

Fig. 12 Effect of substrate doping


variation (donor and acceptor) on
threshold voltage (a), sub-
threshold slope (b), and DIBL (c)
of the R-U-UTBB SOI-MOSFET

brought for DIBL, 72 mV/dec. for subthreshold slope 4 Conclusion


and 0.19 V for threshold voltage, which is the best re-
sults among all the parameter variations without biasing In this paper a proposed approach for more scaling has pre-
the substrate. sented by reforming the U-channel ultra-thin body and bur-
For the last variation, Tox (SiO2 and HfO2) is changed ied oxide (UTBB) SOI MOSFET. The simulation results
from 21 Å to 39 Å and measured results of threshold volt- have been declared that if the substrate of proposed struc-
age, sub-threshold slope and DIBL have plotted in ture was doped by donor dopant, it offers enhancement in
Fig. 13(a) and (b), respectively. The proposed device is short channel effects (SCEs) such as 50% decrement in
more sensitive to this variation than other parameter varia- DIBL, 10% in sub-threshold slope, and 45% in threshold
tions as illustrated in Fig. 13. To sum up sensitivity of voltage roll-off in comparison with the U-channel structure.
threshold voltage, sub-threshold slope, and DIBL of the Also, by reaching threshold voltage to 0.19 V, VDD can be
proposed structure, the six parameters which are investigat- scaled to 0.8 V. Moreover, the value of Ion/Ioff ratio has
ed latterly are fluctuated ±20% and revealed its results in a quadrupled as a figure of merit for having high performance
bar graph on Fig. 14. device. So this device can be an excellent candidate for

Fig. 13 Effect of gate oxide


thickness variation on threshold
voltage and sub-threshold slope
(a) and DIBL (b) of the R-U-
UTBB SOI-MOSFET
Silicon

4. Ali A. Orouji, M. Jagadesh Kumar (2006) A new symmetrical


double gate nanoscale MOSFET with asymmetrical side gates for
electrically induced source/drain,” Microelectronic Engineering, pp
409–414
5. Chang L, Choi Y-K, Ha D, Ranade P, Xiong S, Bokor J, Hu C,
King T-J (2003) Extremely scaled silicon Nano-CMOS devices.
Proc IEEE 9:1860–1873
6. Abbasi A, Orouji AA (2013) A silicon/indium arsenide source
structure to suppress the parasitic bipolar-induced breakdown effect
in SOI MOSFETs. Mater Sci Semicond Process 16:1821–1827
7. Min BW, Kang L, Wu D, Caffo D, Hayden J, Mendicino MA
(2002) Reduction of hysteretic propagation delay with less perfor-
mance degradation by novel body contact in PD SOI application.
IEEE Int SOI Conf:169–170
8. Zareiee M, Orouji AA (2016) Superior electrical characteristics of
novel Nanoscale MOSFET with embedded tunnel diode,” Super-
lattices and Microstructures 101:57–67
9. Cao J, Li D, Ke W, Sun L, Han R, Zhang S (2006) T-shaped body
silicon-on-insulator (SOI) MOSFET. IEEE:1293–1295
10. Chieh-Lin W, Chikuang Y, Shichijo H, Kenneth KO 2011 I-gate
Fig. 14 Threshold voltage, sub-threshold slope and DIBL fluctuation of body-tied silicon-on-insulator MOSFETs with improved high-
the R-U-UTBB SOI-MOSFET due to various parameter variations at gate frequency performance. IEEE Electron Device Lett:443–445
length of 16-nm 11. Ramezani Z, Orouji AA 2017 Dual gate tunneling field effect tran-
sistors based on MOSFETs: a 2-D analytical approach.
Superlattices Microstruc 113:41–56
digital and mobile application due to low power consump- 12. Aghaeipour Z, Naderi A 2019 Embedding two P+ pockets in the
tion and high switching speed. buried oxide of Nano silicon on insulator MOSFETs: controlled
Short Channel effects and electric field. Silicon 12:26111–2618
13. Naderi A, Heirani F (2018) A novel SOI-MESFET with symmet-
Author Contributions Conceptualization, Methodology, Formal analysis
rical oxide boxes at both sides of gate and extended drift region into
and investigation, and Writing - original draft preparation: [Moslem
the buried oxide. Int J Electron Commun:91–98
Ghassemi].
14. Rajendran K, Schoenmaker W (2001) Modeling of minimum sur-
Writing - review and editing, Funding acquisition, Resources, and
face potential and sub-threshold swing for grooved-gate
Supervision: [Ali A. Orouji].
MOSFETs. Microelectron J 32:631–639
15. Ramachandran Muralidhar, Robert H. Dennard,Takashi Ando,
Data Availability The data that support the findings of this study are Isaac Lauer, Terence ook, “Advanced FDSOI Device Design:
openly available at http:// www.silvaco.com, reference number [31]. The U-Channel Device for 7 nm Node and Beyond,” Electron
Dev Soc, pp. 551–556, 2018, 6
Compliance with Ethical Standards 16. Lenka AS, Mishra S, Mishra S, Bhanja U, Mishra GP (2017) An
extensive investigation of work function modulated trapezoidal
recessed channel MOSFET. Superlatt Microstruct:878–888
Conflict of Interest The Authors declare that there is no conflict of
interest. 17. Kazemi Esfeh B, Kilchytska V, Barral V, Planes N, Haond M,
Flandre D, Raskin JP (2016) Assessment of 28 nm UTBB FD-
SOI technology platform for RF applications: figures of merit and
Ethical Approval This article does not contain any studies with human effect of parasitic elements. Solid State Electron 117:130–137
participants or animals performed by any of the authors.
18. Ben AK (2014) Performance of SOI CMOS technology on com-
mercial 200-mm enhanced signal integrity high resistivity SOI sub-
Informed Consent Informed consent was obtained from all individual strate. IEEE Trans Electron Dev 61:722–728
participants involved in the study. 19. Skotnicki T, Fenouillet-Beranger C, Gallon C, Boeuf F, Monfray S,
Payet F, Pouydebasque A, Szczap M, Farcy A, Arnaud F, Clerc S,
Sellier M, Cathignol A, Schoellkopf J-P, Perea E, Ferrant R,
Mingam H (2008) Innovative materials, devices, and CMOS tech-
References nologies for low-power mobile multimedia. IEEE Trans Electron
Dev 55:96–130
1. Chen J, Luo J, Wu Q, Chai Z, Yu T, Dong Y, Wang X (2011) A 20. Choi Y-K, Asano K, Lindert N, Subramanian V, King T-J, Bokor J,
tunnel diode body contact structure to suppress the floating-body Hu C (2000) Ultra-thin-body SOI MOSFET for deep-sub-tenth.
effect in partially depleted SOI MOSFETs. IEEE Electron Device IEEE Electron Dev Lett 21:254–255
Lett 32:1346–1348 21. Arshad MoMd, Raskin J-P, Kilchytska V, Andrieu F, Scheiblin P,
2. Orouji AA, Anvarifard MK (2014) Novel reduced body charge Faynot O, Flandre D (2012) Extended MASTAR Modeling of
technique in reliable nanoscale SOI MOSFETs for suppressing DIBL in UTB and UTBB SOI MOSFETs. IEEE Trans Electron
the kink effect. Super lattices Microstruct 72:111–125 Dev:247–251
3. Chen J, Luo J, Wu Q, Chai Z, Huang X, Wei X, Wang X (2012) 22. Litty A, Ortolland S, Golanski D, Cristoloveanu S (2015)
Extra source implantation for suppression floating-body effect in Optimization of a high-voltage MOSFET in ultra-thin 14nm
partially depleted SOI MOSFETs. Nuclear Instrum Methods Phys FDSOI Technology. Proceedings of the 27th International
Res 272:128–131 Symposium on Power Semiconductor Devices & IC's, pp 73–76
Silicon

23. Burignat S, Flandre D, Md Arshad MK, Kilchytska V, Andrieu F, Mocuta A, Womack S, Gribelyuk M, Jones EC, Miller RJ, Philip
Faynot O, Raskin J-P (2010) Substrate impact on threshold voltage Wong H-S, Haensch W (2002) Extreme scaling with ultra-thin Si
and subthreshold slope of sub-32 nm ultra thin SOI MOSFETs with channel MOSFETs. IEEE Electron Dev Meeting:267–270
thin buried oxide and un-doped channel. Solid State Electron 54: 29. Wilk GD, Wallace RM, Anthony JM (2001) High-κ gate dielec-
213–219 trics: current status and materials properties considerations. J Appl
24. Sugii N, Tsuchiya R, Ishigaki T, Morita Y, Yoshimoto H, Torii K, Phys 89:5243–5275
Kimura S (2008) Comprehensive study on Vth variability in silicon 30. Trojman L, Vaca A (2018) Luis Miguel Procel, “on the parameter
on thin BOX (SOTB) CMOS with small random-dopant fluctua- extraction of short channel UTBB FD SOI FET’s with high-κ metal
tion: finding a way to further reduce variation. IEEE Electron Dev gate and TCAD Modelling:1–4
Meeting:1–4 31. Device Simulator Atlas User's Manual, Silvaco International
25. Ohtou T, Sugii N, Hiramoto T (2007) Impact of parameter varia- Software, Santa Clara, USA, January (2017) Silvaco
tions and random dopant fluctuations on short-channel fully deplet- International, Santa Clara 〈www.silvaco.com〉
ed SOI MOSFETs with extremely thin BOX. IEEE Electron Device 32. Md Arshad MK, Kilchytska V, Emam M, Andrieu F, Flandre D,
Letters 28:740–742 Raskin J-P (2014) Effect of parasitic elements on UTBB FD SOI
26. Kim S-D, Park C-M, Woo JCS (2002) Advanced model and anal- MOSFETs RF figures of merit. Solid State Electron 97:38–44
ysis of series resistance for CMOS scaling into nanometer regime-
33. Colinge J-P (1991) Silicon-on-insulator technology: materials to
part II quantitative analysis. IEEE Trans Electron Dev:467–472
VLSI. Kluwer Academic Publishers
27. Doyle B, Arghavani R, Barlage D, Datta S, Doczy M, Kavalieros J,
Murthy A, Chau R (2002) Transistor elements for 30 nm physical
gate lengths and beyond. Intel Technol J Semiconduct Technol Publisher’s Note Springer Nature remains neutral with regard to jurisdic-
Manufact:42–54 tional claims in published maps and institutional affiliations.
28. Doris B, Ieong M, Kanarsky T, Zhang Y, Roy RA, Dokumaci O,
Ren Z, Jamin F-F, Shi L, Natzle W, Huang H-J, Mezzapelle J,

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