Designation: E 986 – 97
AMERICAN SOCIETY FOR TESTING AND MATERIALS
100 Barr Harbor Dr., West Conshohocken, PA 19428
Reprinted from the Annual Book of ASTM Standards. Copyright ASTM
Standard Practice for
Scanning Electron Microscope Beam Size Characterization1
This standard is issued under the fixed designation E 986; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1 This practice provides a reproducible means by which
one aspect of the performance of a scanning electron micro-
scope (SEM) may be characterized. The resolution of an SEM
depends on many factors, some of which are electron beam
voltage and current, lens aberrations, contrast in the specimen,
and operator-instrument-material interaction. However, the
resolution for any set of conditions is limited by the size of the
electron beam. This size can be quantified through the mea-
surement of an effective apparent edge sharpness for a number
of materials, two of which are suggested. This practice requires
an SEM with the capability to perform line-scan traces, for
example, Y-deflection waveform generation, for the suggested
materials. The range of SEM magnification at which this
practice is of utility is from 1000 to 50 000 3 . Higher
magnifications may be attempted, but difficulty in making
precise measurements can be expected.
1.2 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica-
bility of regulatory limitations prior to use.
2. Referenced Documents
2.1 ASTM Standards:
E 7 Terminology Relating to Metallography2
E 766 Practice for Calibrating the Magnification of a Scan-
ning Electron Microscope2
3. Terminology
3.1 Definitions: For definitions of terms used in this prac-
tice, see Terminology E 7.
3.2 Definitions of Terms Specific to This Standard:
3.2.1 Y-deflection waveform—the trace on a CRT resulting
from modulating the CRT with the output of the electron
detector. Contrast in the electron signal is displayed as a
change in Y (vertical) rather than brightness on the screen. This
operating method is often called Y-modulation.
1
This practice is under the jurisdiction of ASTM Committee E-4 on Metallog-
raphy and is the direct responsibility of Subcommittee E04.11 on X-Ray and
Electron Metallography.
Current edition approved Oct. 10, 1997. Published December 1997. Originally
published as E 986 – 84. Last previous edition E 986 – 92.
2
Annual Book of ASTM Standards, Vol 03.01.
1
4. Significance and Use
4.1 The traditional resolution test of the SEM requires, as a
first step, a photomicrograph of a fine particulate sample taken
at a high magnification. The operator is required to measure a
distance on the photomicrograph between two adjacent, but
separate edges. These edges are usually less than one millime-
tre apart. Their image quality is often less than optimum.
Operator judgment is dependent on the individual acuity of the
person making the measurement and can vary significantly.
4.2 Use of this practice results in SEM electron beam size
characterization which is significantly more reproducible than
the traditional resolution test using a fine particulate sample.
5. Suggested Materials
5.1 SEM resolution performance as measured using the
procedure specified in this practice will depend on the material
used; hence, only comparisons using the same material have
meaning. There are a number of criteria for a suitable material
to be used in this practice. Through an evaluation of these
criteria, two samples have been suggested. These samples are
nonmagnetic; no surface preparation or coating is required;
thus, the samples have long-term structural stability. The
sample-electron beam interaction should produce a sharply
rising signal without inflections as the beam scans across the
edge. Two such samples are:
5.1.1 Carbon fibers, NIST—SRM 2069B.3
5.1.2 Fracture edge of a thin silicon wafer, cleaved on a
(111) plane.
6. Procedure
6.1 Inspect the specimen for cleanliness. If the specimen
appears contaminated, a new sample is recommended as any
cleaning may adversely affect the quality of the specimen edge.
6.2 Ensure good electrical contact with the specimen by
using a conductive cement to hold the specimen on a SEM
stub, or by clamping the specimen on the stage of the SEM.
Mount the specimen rigidly in the SEM to minimize any image
degradation caused by vibration.
6.3 Verify magnification calibration for both X and Y direc-
tions. This can be accomplished by using Practice E 766.
6.4 Use a clean vacuum of 1.33 by 10− 2 Pa (10− 4 mm Hg)
or better to minimize specimen contamination resulting from
3
Available from National National Institute of Standards and Technology,
Gaithersburg, MD 20899.
 E 986
electron beam and residual hydrocarbons interacting during
examination. The presence of a contamination layer has a
deleterious effect on image-edge quality.
6.5 Allow a minimum of 30 min for stabilization of elec-
tronic components. The selection of optimum SEM parameters
is at the discretion of the operator.4
6.6 Select electron gun voltage within the desired range of
operating conditions.
NOTE 1—The performance measurement must be repeated for each kV
setting used.
6.7 Saturate the filament and check both filament and gun
alignment for any necessary adjustment.
6.8 Set all lens currents at a resettable value with the aid of
a suitable digital voltmeter, if available.
6.9 Cycle lens circuits OFF-ON two to three times to
minimize hysteresis effects. An alternate procedure may be
used to drive the lens through a hysteresis loop—increase
current above operating current, decrease below operating
current, then back up to operating current.
6.10 Adjust lens apertures and stigmator for optimum reso-
lution (minimum astigmatism). Because of its higher resolu-
tion, the secondary electron imaging mode is most commonly
used. This procedure may also be used to characterize SEM
performance in the backscattered electron imaging mode.
6.11 Locate a field on the chosen specimen that shows the
desired edge detail. (See Fig. 1.)
6.12 Select the highest magnification that is sufficient to
allow critical focusing of the image and shows image-edge
transition from white to black contrast (for example, fuzziness)
of at least 5-mm horizontal width in the photographed image.
4
Newbury, D. E., “Imaging Strategy for the SEM–A Tutorial,” SEM, Vol. 1,
1981, pp. 71–78.
FIG. 1 Edge of Graphitized Natural Cellulose Fiber Used to
Produce Line Traces (Fig. 3)
2
6.13 Rotate the specimen, not the scan, and shift the field of
view on the specimen so that the desired edge is oriented
perpendicular to the horizontal scan direction near the center of
the CRT.
6.14 Make sure that no gamma or derivative processing is
employed.
6.15 Obtain a line-trace photograph across the desired edge
using a recording time of at least 2 s and a bandwidth of 4 kHz
(if SEM is equipped with bandwidth control). (See Fig. 2.)
6.15.1 Caution—Slow scan rates in the line-trace mode
may cause burning of the CRT-screen phosphor for improperly
adjusted SEM-CRT screens.
6.16 Locate the maximum and minimum Y-axis deflections
across the edge of the specimen in the line-trace photograph.
(See Fig. 2.)
6.17 The difference between these values is the full-edge
contrast produced in the line trace. From this contrast value,
compute the Y-axis positions that correspond to contrast levels
of 20 and 80 % of the full-contrast value.
20 % level 5 0.2 3 ~gmax 2 gmin ! 1 gmin (1)
80 % level 5 0.8 3 ~gmax 2 gmin ! 1 gmin (2)
6.17.1 These levels are illustrated schematically on Fig. 2.
Locate these positions in the line-trace photograph and mea-
sure the horizontal distance (D) in mm on the photograph
between these points. The slope of the line trace should have a
ratio (Y/D) of 2 to 4. The distance (D) should range between 2
to 4 mm. The performance parameter (P), expressed in
nanometres, is then defined as follows:
P 5 ~D 3 106!/M (3)
where M is the SEM calculated and corrected magnification
using an acceptable standard.
6.18 Photograph the field selected for later reference to aid
in the location of the image edge used for the performance
measurement.
6.19 Repeat the line-trace photograph and measurement
process outlined in 6.15 through 6.17 at two additional edges in
the material studied. Three waveform traces using a graphite-
fiber edge are shown in Fig. 3.
6.20 Average the three results to produce the performance
parameter (P).
FIG. 2 Typical Waveform With 20 and 80 % Contrast Levels
Illustrated
 E 986
value for the precision and bias of the performance test based
on extensive experience. However, the sources of error and
their best estimates of uncertainties at a SEM magnification of
80 to 100 000 3 under controlled operating conditions and
with experienced operators, are as follows:
Source Uncertainty, %

SEM magnification (M) 610

Measurement variation between 62
operators
Measurement of waveform (D) 62
Approximate overall uncertainty 11

8. Reproducibility
8.1 Reproducibility of the performance parameter may be
determined by repeating the steps in Section 6 at intervals
determined by the user’s requirements. Measurement of per-
formance is recommended after repair or realignment of the
electron optical functions or after major changes in instrument-
operating parameters, for example, beam voltage or lens
settings, or both. A listing of instrument parameters that
influence the performance is included in the Annex of Practice
FIG. 3 Set of Waveforms Measured to Determine Performance E 766.
Parameter (P) (Eq 1)
9. Keywords

@P 5 ~P1 1 P2 1 P3!#/3 (4)

9.1 edge sharpness; electron beam size; E766; graphite
fiber; magnification; NIST–SRM 2069B; performance; SEM;
7. Precision and Bias specimen interaction; waveform
7.1 At the present time, it is not possible to give a specific

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views known to the ASTM Committee on Standards, 100 Barr Harbor Drive, West Conshohocken, PA 19428.

3
 SI QUICK REFERENCE GUIDE:
International System of Units (SI)
The Modernized Metric System*
UNITS
The International System of Units (SI) is based on seven fundamental (base) units:
Base Units
Quantity Name Symbol
length metre m
mass kilogram kg
time second s
electric current ampere A
thermodynamic temperature kelvin K
amount of substance mole mol
luminous intensity candela cd

and a number of derived units which are combinations of base units and which may have special
names and symbols:
Examples of Derived Units
Quantity Expression Name Symbol
acceleration
angular rad/s2
linear m/s2
angle
plane dimensionless radian rad
solid dimensionless steradian sr
area m2
Celsius temperature K degree Celsius °C
density
heat flux W/ m 2
mass kg/m3
current A/ m2
energy, enthalpy
work, heat N•m joule J
specific J/ kg
entropy
heat capacity J/ K
specific J/ (kg•K)
flow, mass kg/s
flow, volume m3 /s
force kg • m/s2 newton N
frequency
periodic 1/s hertz Hz
rotating rev/s
inductance Wb/A henry H
magnetic flux V •s weber Wb
mass flow kg/s
moment of a force N•m
potential,electric W/A volt V
power, radiant flux J/s watt W
pressure, stress N/ m2 pascal Pa
resistance, electric V/A ohm Ω
thermal conductivity W/(m • K)
velocity
angular rad/s
linear m/s
viscosity
dynamic (absolute)(µ) Pa • s
kinematic (ν) m2 /s
volume m3
volume, specific m3 / kg

*For complete information see IEEE/ASTM SI-10.

 SI QUICK REFERENCE GUIDE

SYMBOLS
Symbol Name Quantity Formula
A ampere electric current base unit
Bq becquerel activity (of a radio nuclide) 1/s
C coulomb electric charge A• s
°C degree Celsius temperature interval °C = K
cd candela luminous intensity base unit
F farad electric capacitance C/ V
Gy gray absorbed dose J / kg
g gram mass kg / 1000
H henry inductance Wb/A
Hz hertz frequency 1/s
ha hectare* area 10 000 m2
J joule energy, work, heat N•m
K kelvin temperature base unit
kg kilogram mass base unit
L litre volume m3/1000
lm lumen luminous flux cd • sr
lx lux illuminance lm /m 2
m metre length base unit
mol mole amount of substance base unit
N newton force kg • m /s2
Ω ohm electric resistance V/A
Pa pascal pressure, stress N/m2
rad radian plane angle m/m (dimensionless)
S siemens electric conductance A/ V
Sv sievert dose equivalent J/ kg
s second time base unit
sr steradian solid angle m 2 /m 2 (dimensionless)
T tesla magnetic flux density Wb / m 2
t tonne, metric ton mass 1000 kg; Mg
V volt electric potential W/A
W watt power, radiant flux J/s
Wb weber magnetic flux V •s
*allowed with SI

Use of Symbols Exception: No space is left between the numerical value

The correct use of symbols is important because an incorrect sym-
bol may change the meaning of a quantity. Some SI symbols are
listed in the Symbol table.
SI has no abbreviations—only symbols. Therefore, no periods
follow a symbol except at the end of a sentence.
Examples: A, not amp; s, not sec; SI, not S.I.
Symbols appear in lower case unless the unit name has been taken
from a proper name. In this case the first letter of the symbol is
capitalized.
Examples: m, metre; Pa, pascal; W, watt
Exception: L, litre
Symbols and prefixes are printed in upright (roman) type regard-
less of the type style in surrounding text.
Example: . . . a distance of 73 km between . . .
Unit symbols are the same whether singular or plural.
Examples: 1 mm, 100 mm; 1 kg, 65 kg
Leave a space between the value and the symbol.
Examples: 115 W, not 115W; 0.75 L, not 0.75L
88 °C, not 88°C or 88° C
and symbol for degree of plane angle.
Examples: 73°, not 73 °
Note: Symbol for for coulomb is C; for degree Celsius it is °C
Do not mix symbols and names in the same expression.
Examples: radians per second or rad /s
not radians /second; not radians /s
m/s or metres per second,
not metres /second; not metres /s
J/kg or joules per kilogram,
not joules /kilogram; not joules /kg
Symbol for product—use the raised dot ( • )
Examples: N • m; mPa • s; W/(m2 • K)
Symbol for quotient—use one of the following forms:
Examples: m/s or m s or use negative exponent
Note: Use only one solidus ( / ) per expression and parentheses to
avoid any ambiguity.
Do not use modifying terms such as electrical, alternating
current, etc.
Examples: kPa (gage); MW (e); V (ac)
 SI QUICK REFERENCE GUIDE

PREFIXES Exponential Powers. An exponent attached to a symbol containing

a prefix indicates that the multiple (of the unit with its prefix) is
Most prefixes indicate orders of magnitude in steps of 1000 and raised to the power of 10 expressed by the exponent.
provide a convenient way to express large and small numbers and to
Examples: 1 mm3 = (10 -3 m) 3 = 10 -9 m3
eliminate nonsignificant digits and leading zeros in decimal fractions.
1 ns-1 = (10 -9 s) -1 = 10 9 s -1
Examples: 64 000 watts is the same as 64 kilowatts* 1 mm2 /s = (10 -3 m)2/s = 10 -6 m2/s
0.057 metre is the same as 57 millimetres
16 000 metres is the same as 16 kilometres*
*except for intended accuracy
Prefix Symbol Represents
NUMBERS
yotta Y 1024 International practice separates the digits of large numbers into
zetta Z 1021
exa E 1018 groups of three, counting from the decimal to the left and to the
peta P 1015 right, and inserts a space to separate the groups. In numbers of four
tera T 1012 digits, the space is not necessary except for uniformity in tables.
giga G 109
mega M 106 Examples: 6.358 568; 85 365; 51 845 953; 88 000;
kilo k 103 0.246 113 562; 7 258
hecto h* 102
deka da* 101 Small Numbers. When writing numbers less than one, always put
deci d* 10-1 a zero before the decimal marker.
centi c* 10-2 Example: 0.046
milli m 10-3
micro µ 10-6 Decimal Marker. The recommended decimal marker is a dot on
nano n 10-9 the line (period). (In some countries, a comma is used as the
pico p 10-12
decimal marker.)
femto f 10-15
atto a 10-18 Because billion means a million million in most countries but a
zepto z 10-21
thousand million in the United States, avoid using billion in
yocto y 10-24
technical writing.
To realize the full benefit of the prefixes when expressing a quan-
tity by numerical value, choose a prefix so that the number lies be-
tween 0.1 and 1000. For simplicity, give preference to prefixes rep-
resenting 1000 raised to an integral power (i.e., µm, mm, km). DO’S AND DON’TS
*Exceptions: The units in the international system of units are called SI units—
In expressing area and volume, the prefixes hecto, deka, not Metric Units and not SI Metric Units.
deci, and centi may by required; for example, cubic
decimetre (L), square hectometre (hectare), cubic Non-SI units in the US are called Inch-Pound units (I-P units)—not
centimetre. conventional units, not U.S. customary units, not English units, and
not Imperial units.)
Tables of values of the same quantity.
Comparison of values. Treat all spelled out names as nouns. Therefore, do not capitalize
the first letter of a unit except at the beginning of a sentence or in
For certain quantities in particular applications. For example,
capitalized material such as a title.
the millimetre is used for linear dimensions in architectural
and engineering drawings even when the values lie far Examples: watt; pascal; ampere; volt; newton; kelvin
outside the range of 0.1 mm to 1000 mm; the centimetre is Exception: Always capitalize the first letter of Celsius.
usually used for anatomical measurements and clothing Do not begin a sentence with a unit symbol—either rearrange the
sizes. words or write the unit name in full.
Compound units. A compound unit is a derived unit expressed with Use plurals for spelled out words when required by the rules of
two or more units. The prefix is attached to a unit in the numerator. grammar.
Examples: V/m not mV/mm
MJ/kg not kJ/g Examples: metre—metres; henry—henries;
kilogram—kilograms; kelvin—kelvins
Compound prefixes formed by a combination of two or more pre- Irregular: hertz—hertz; lux—lux; siemens—siemens
fixes are not used. Use only one prefix.
Do not put a space or hyphen between the prefix and unit name.
Examples: 2 nm not 2 mµm
6 m3 not 6 kL Examples: kilometre not kilo metre or kilo-metre;
6 MPa not 6 kkPa milliwatt not milli watt or milli-watt
 SI QUICK REFERENCE GUIDE

When a prefix ends with a vowel and the unit name begins with a Multiply By To Obtain
vowel, retain and pronounce both vowels. ft lbf (work)
• 1.36 J
Example: kiloampere ft • lb f / lb (specific energy) 2.99 J/kg
Exceptions: hectare; kilohm; megohm ft • lb f / min (power) 0.0226 W
gallon, US (*231 in 3) 3.785 L
When compound units are formed by multiplication, leave a space gph 1.05 mL/s
between units that are multiplied. gpm 0.0631 L /s
gpm /ft 2 0.6791 L /(s • m2 )
Examples: newton metre, not newton-metre; gr /gal 17.1 g /m3
volt ampere, not volt-ampere horsepower (550 ft • lbf / s) 0.746 kW
inch *25.4 mm
Use the modifier squared or cubed after the unit name. in of mercury (60°F) 3.377 kPa
Example: metre per second squared in of water (60°F) 248.8 Pa
in •lbf (torque or moment) 113 mN • m
Exception: For area or volume the modifier may be placed
in2 645 mm2
before the units. in3 (volume) 16.4 mL
Example: square millimetre; cubic metre in3 (section modulus) 16 400 mm3
in4 (section moment) 416 200 mm4
When compound units are formed by division, use the word per, not km / h 0.278 m/ s
a solidus ( / ). kWh *3.60 MJ
Examples: metre per second, not metre / second; watt per kip / in2 (ksi) 6.895 MPa
square metre, not watt / square meter litre *0.001 m3
micron (µm) of mercury (60°F) 133 mPa
Do not use modifying terms such as electrical, alternating current, mil (0.001 in.) *25.4 µm
etc. after the symbol. mile 1.61 km
mile, nautical 1.85 km
Examples: kPa (gage); MW (e); V (ac) mph 1.61 km/ h
mph 0.447 m /s
millibar *0.100 kPa
mm of mercury (60°F) 0.133 kPa
mm of water (60°F) 9.80 Pa
SELECTED CONVERSION FACTORS ounce (mass, avoirdupois) 28.35 g
ounce (force of thrust) 0.278 N
CAUTION: These conversion values are rounded to three or four significant
ounce (liquid, US) 29.6 mL
figures, which is sufficiently accurate for most applications. When making
ounce (avoirdupois) per gallon 7.49 kg/m 3
conversions, remember that a converted value is no more precise than the
original value. Round off the final value to the same number of significant pint (liquid, US) 473 mL
figures as those in the original value. See ANSI SI 10 for additional conver- pound
lbm (mass) 0.4536 kg
sions with more significant figures.
lbm (mass) 453.6 g
lbf (force or thrust) 4.45 N
Multiply By To Obtain lbm / ft (uniform load) 1.49 kg/m
acre 0.4047 ha lbm /(ft • h) (dynamic viscosity, µ ) 0.413 mPa •s
atmosphere, standard *101.325 kPa lbm / (ft • s) (dynamic viscosity, µ) 1490 mPa •s
bar *100 kPa lbf • s / ft2 (dynamic viscosity, µ) 47 880 mPa •s
barrel (42 US gal, petroleum) 159 L lbm /min 0.00756 kg/s
Btu, (International Table) 1.055 kJ lbm / h 0.126 g/s
Btu / lb •°F (specific heat, c p ) 4.184 kJ/(kg • K) lbf / ft2 47.9 Pa
bushel 0.03524 m3 lbm / ft2 4.88 kg/m 2
calorie, kilogram (kilocalorie) 4.187 kJ lbm / ft3 (density, ρ) 16.0 kg/m 3
candle, candlepower *1.0 cd lbm / gallon 120 kg/m 3
centipoise, dynamic vicosity, µ *1.00 mPa •s ppm (by mass) *1.00 mg/kg
centistokes, kinematic viscosity, ν *1.00 mm2/s psi 6.895 kPa
ft *0.3048 m quad (1015 Btu) 1.06 EJ
ft *304.8 mm quart (liquid, US) 0.946 L
ft / min, fpm *0.00508 m/ s rpm 0.105 rad / s
ft / s, fps *0.3048 m /s tablespoon (approx.) 15 mL
ft of water 2.99 kPa teaspoon (approx.) 5 mL
ft 2 0.09290 m2 therm (100,000 Btu) 105.5 MJ
ft 2/s, kinematic viscosity, ν 92 900 mm2 /s ton, short (2000 lb) 0.907 Mg; t (tonne)
ft 3 28.32 L yd *0.9144 m
ft 3 0.02832 m3 yd2 0.836 m2
ft 3/h, cfh 7.866 mL/s yd3 0.7646 m3
ft 3/min, cfm 0.4719 L/s
ft3 /s, cfs 28.32 L/s
footcandle 10.76 lx *Conversion factor is exact.
ft • lb f (torque or moment) 1.36 N •m Note: In this list the kelvin (K) expresses temperature intervals.
The degree Celsius symbol (°C) may be used for this purpose as well.