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Varian ICP-OES

Varian 700-ES Series spectrometers

Service Manual

Installation category II
Pollution degree 2
Safety Class 1 (EN 61010-1)

NOTICE: This document contains references to Varian.


Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.

Varian Australia Pty. Ltd.


679 Springvale Road, Mulgrave
Victoria 3170, Australia Revision 1.0 October 2006
Publication number 85 102375 00
The information contained in this publication is intended for the
use of Varian-trained, Varian-qualified and Varian-authorised
Customer Service representatives only.

Varian Australia Pty. Ltd is the owner of copyright on this


document and any associated software. Under law, the written
permission of Varian Australia Pty. Ltd. must be obtained before
either the documentation or software is copied, reproduced,
translated or converted to electronic or other machine readable
form, in whole or in part.
Copyright 2006 Varian Australia Pty. Ltd A.C.N 004 559 540 All
rights reserved
ICP-OES
Main Index
Section 1 General information
Section 2 Pre-installation instructions
Section 3 Installation
Section 4 Preventative maintenance
Section 5 Peripherals
Section 6 Spare parts and test equipment
Section 7 Diagnostics and troubleshooting
Section 8 Error messages
Section 9 Sample introduction
Section 10 Gas control
Section 11 Plasma generation
Section 12 Optics
Section 13 Command control electronics
Section 14 Power supplies
Varian 700-ES Series instruments

User documentation
This publication supplies information to help Varian-qualified
Customer Support Representative (CSR) to set up, install and
operate the Varian 700-ES Series spectrometer. It also
contains technical information that allows the CSR to
maintain and service the Varian 700-ES Series spectrometer
systems.
Site preparation is described in the Varian 700-ES Series
instrument Pre-installation manual (p/n 85 102337 00). The
Pre-installation manual is also included as Section 2 of this
manual.
The operation manual supplies information to help customers
set up and operate the Varian 700-ES Series spectrometer and
supplies information on: Safety practices and hazards
information, instructions for finding information about
installing and maintaining the Varian 700-ES Series
spectrometer and a brief operation overview.
There is also extensive information in the online Help
containing context-sensitive Help, step-by-step instructions
for frequently performed operations and instructions for using
the accessories.

Finding information
There is a table of contents at the front of the manual. You
can find a particular section by using the quick reference on
the inside front cover.
Electronic and mechanical schematics and layouts are
included in the last section of this manual.
Ordering information for spare parts is located in the Spare
parts section. Part numbers are shown in lists of spares for
sub-assemblies. Components are listed on layout drawings for
identification.
Service manual updates will be provided by Varian when
necessary. Updates may be in these forms:
software README file
Service Alert or Service Note.

Conventions
The following conventions have been used throughout this
documentation:
• Menu items, menu options and field names (e.g., select Copy from
the Edit menu) have been typed in bold. Bold is also used to
signify the pushbuttons appearing throughout the software (e.g.,
click OK).
• ALL CAPITALS indicate keyboard and mouse commands (e.g.,
press the F2 key) and text you must type in from the keyboard (e.g.,
type SETUP at the prompt).

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Varian 700-ES Series instruments

• References to the Varian 700-ES Series spectrometer are applicable


to all models (Varian 710, 720 and 730) unless otherwise stated.
• References to the Varian 7X0-ES Series spectrometer are
applicable to the Varian 7X0 and Varian 7X5 instrument models.
Where X = 1, 2 or 3.

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Varian 700-ES Series instruments

Safety practices and hazards


General
Operation of a Varian 700-ES Series Inductively Coupled
Plasma-Optical Emission Spectrometer (ICP-OES) involves
the use of compressed gases, high voltage radio frequency
energy and hazardous materials including corrosive fluids and
flammable liquids. Careless, improper or unskilled use of this
spectrometer can cause death or serious injury to personnel,
and/or severe damage to equipment and property.
The spectrometer incorporates interlocks and covers that are
designed to prevent inadvertent contact with any potential
hazards. If the instrument is used in any manner not specified
by Varian, this protection may be impaired. It is good practice
to develop safe working habits that do not depend upon the
correct operation of the interlocks for safe operation.
It is essential that no interlock or cover is bypassed, damaged
or removed and all covers are properly installed when
operating the instrument.
The instrument and accessory covers must not be removed by
the operator except as permitted for routine maintenance
tasks as detailed in the relevant Operation Manual or in the
Varian supplied software help files.
Service is to be performed only by Varian-trained, Varian-
qualified or Varian-authorized Customer Service
Representatives.
All users of a Varian 700-ES Series spectrometer system must
be familiar with the correct operating procedures. The safety
practices described below are provided to help the user
operate the instrument safely. Read each safety topic
thoroughly before attempting to operate the instrument and
ALWAYS operate the spectrometer in accordance with these
safety practices.
This product is designed for internal use only. If the product is
used in a manner not specified by Varian, the safety
protection that is inherent in the design may be impaired

Plasma
The plasma is extremely hot (about 10 000 K) and radiates
dangerous levels of radio frequency (RF) and ultraviolet (UV)
energy. The work coil operates at 1 500 V RMS and about 40
MHz. Exposure to the RF and UV energy can cause severe
skin damage and cataracts of the eyes, while close contact
with the operating plasma can result in severe heat burns to
the skin, and an electrical discharge which can jump a
considerable distance and may cause death, severe electric
shock or sub-surface skin burns.
The plasma must NEVER be operated unless:
• the torch compartment door is closed, with the locking lever fully
latched; and
• the space above the chimney is clear of objects.

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Varian 700-ES Series instruments

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Varian 700-ES Series instruments

The shielding around the torch compartment is designed to


reduce UV, visible and RF radiation to safe levels while still
permitting easy access to, as well as installation and viewing
of, the torch. The spectrometer has an interlock system that is
designed to extinguish the plasma if either the mains supply
fails or the handle on the torch compartment door is opened.
DO NOT attempt to bypass the interlock system.
Before opening the torch compartment door, ALWAYS
extinguish the plasma by pressing F4 on the keyboard or by
clicking the Plasma Off icon on the software Toolbar.
The plasma must never be operated unless
• The plasma compartment door is closed and the handle
latched.
• The chimney of the instrument is unobstructed and
positioned below an extraction system.
• The polychromator pre-optics assemblies are correctly
fitted
• All RF oscillator and high voltage assembly covers are
correctly fitted.
• The instrument’s air cooling system is in operation.
The torch and its surroundings remain hot for up to five
minutes after the plasma is extinguished. Touching this area
before it has cooled sufficiently may result in burns. Allow the
torch and torch compartment to cool before carrying out any
work in this area, or wear heat-resistant gloves.
The plasma system has been carefully designed to operate
safely and effectively when using torches and related
components that conform to Varian’s design criteria. Use of
non-approved components in the plasma compartment may
render the system inoperative and/or hazardous. It may also
invalidate the warranty on the instrument. Use only torches
and related components supplied or authorized by Varian.

Heat, vapors and fumes


Heat, ozone, vapors and fumes generated by the plasma can
be hazardous, and must be extracted from the instrument by
means of an exhaust system. Ensure that an exhaust system
of the appropriate type is fitted (as specified in the Pre-
installation manual). The system must be vented to the
outside air in accordance with local regulations and never
within the building. Regularly check the exhaust system by
smoke test to ensure that the exhaust system is functioning
correctly. The exhaust fan must always be switched on
BEFORE igniting the plasma.

Compressed gas hazards


All compressed gases (other than air) can create a hazard if
they leak into the atmosphere. Even small leaks in gas supply
systems can be dangerous. Any leak (except that of air) can
result in an
oxygen---deficient atmosphere which can cause asphyxiation.

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Varian 700-ES Series instruments

The area in which cylinders are stored and the area


surrounding the instrument must be adequately ventilated to
prevent such gas accumulations.
Gas cylinders must be stored and handled strictly in
accordance with local safety codes and regulations. Cylinders
must be used and stored only in a vertical position and
secured to an immovable structure or a properly constructed
cylinder stand. Move cylinders only by securing them to a
properly constructed trolley.
Use only approved regulator and hose connectors (refer to the
gas supplier’s instructions). Keep gas cylinders cool and
properly labelled. (All cylinders are fitted with a pressure
relief device that will rupture and empty the cylinder if the
internal pressure is raised above the safe limit by excessive
temperatures.) Ensure that you have the correct cylinder
before connecting it to the instrument.
The primary gas to be used with the spectrometer is argon,
which is the conductive gas for the plasma. Argon or nitrogen
can be used as the polychromator purge gas. Other gases may
be required for future options and accessories. Use only
‘instrument grade’ gases with your spectrometer.
If using cryogenic gases (for example, liquid argon) prevent
severe burns by wearing suitable protective clothing and
gloves.
When the instrument is not in use for extended periods of
time, ensure that the gas supply is turned off at the cylinder
or tank.

Electrical hazards
The Varian 700-ES Series spectrometer system and some
accessories contain electrical circuits, devices and components
operating at dangerous voltages. Contact with these circuits,
devices and components can cause death, serious injury or
painful electric shock. Panels or covers which are retained by
screws on the spectrometer and accessories may be opened
ONLY by Varian-trained, Varian-qualified or Varian-
approved customer support representatives (unless specified
otherwise). Consult the manuals or product labels supplied
with your PC, monitor, printer/plotter and water-cooling
system to determine which parts are operator-accessible.
Always ensure that the torch compartment door is closed
before attempting to ignite a plasma or operating the plasma
igniter. The igniter assembly generates a high voltage spark
used to begin plasma ionization. The ignite spark generates
an electrical discharge which can jump a considerable
distance and cause electric shock or sub-surface skin burns
that will not burn.
Consult the manufacturing literature supplied with your PC,
monitor, printer/plotter and water cooling system to
determine which parts are operator-accessible.
Always ensure that the instrument is turned off and
disconnected from the mains supply before attempting any
fuse replacement. Replace blown fuses with ones of the size

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Varian 700-ES Series instruments

and rating shown in the text near to the fuse holder or in the
Service Manual.

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Varian 700-ES Series instruments

RF power tubes
The power tube operates at high voltages. Contact with it or
its circuitry can cause death or serious injury. Appropriate
warning labels attached to the instrument in clearly visible
places warn you of the dangers in that area. The equipment
has been designed to prevent electric shock through the use of
interlocks and covers.

Warning Never attempt to override or disable the interlocks and


operate the high voltage supply. Failure to observe this
warning can cause death or serious injury.

Customer Service Representatives must always disconnect the


mains power inputs and discharge high voltage capacitors and
circuitry with the discharge wand provided when direct access
to the tube is necessary.

Radio frequency radiation


Exposure to high levels of RF radiation can cause severe
injury.
Never override or disable the interlocks provided. Ensure that
all RF covers and shields are screwed into position before RF
circuitry is activated. Ensure that the torch compartment door
is closed before RF circuitry is activated.

UV radiation
The plasma emits high levels of UV radiation. Although the
spectrometer has been designed to reduce the level of radiated
UV to a safe level during normal operation, always wear
approved UV absorbing safety glasses when operating the
plasma with instrument covers and the pre-optics assembly
cover is removed.

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Varian 700-ES Series instruments

Hazardous materials
Before attempting any work on the sample compartment area
and sample introduction components you must know exactly
what matrix of solutions have been running through the
instrument and particularly what types of solvents have been
used.
Before touching any parts, always ensure that the sample
introduction system has been thoroughly flushed with
distilled water and that the contents of the drain or waste
container are known and disposed of if necessary
Wash your hands and gloves frequently when working with
sample introduction hardware and avoid touching your eyes
Hydrofluoric acid (HF) is a common matrix component used in
the analysis of refractory materials, steels and alloys and
geochemical samples. HF is dangerous and should not be
handled by Customer Service Representatives
The Varian 700-ES Series spectrometer system and
accessories may use materials, solvents and solutions which
are flammable, corrosive, toxic or otherwise hazardous.
Careless, improper or unskilled use of such materials, solvents
and solutions can cause explosions, fire, toxicity and other
hazards which can cause death, serious personal injury
and/or damage to equipment and property.
Always ensure that laboratory safety practices governing the
use, handling and disposal of such materials are strictly
observed. These safety practices should include wearing of
appropriate safety clothing and safety glasses.

Other
Air flow to the cooling fans of the Varian 700-ES Series
spectrometer and accessories must be unobstructed. Do not
block the ventilation grills on the spectrometer and
accessories. Consult the manufacturers literature supplied
with your PC, monitor, printer/plotter and water cooling
system for their ventilation needs.
Care should be taken when working with glass parts to avoid
breakage and cuts. Use caution when attaching plastic tubing
to glass barbs or removing and replacing pieces of a broken
torch or bonnet.
The Varian 700-ES Series spectrometer weighs approximately
203 kg
(448 lb). Use only appropriate mechanical lifting equipment
and proper manual handling practices when moving the
instrument.

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Varian 700-ES Series instruments

‘Warning’ and ‘Caution’ messages


A ‘Warning’ message indicates that failure to observe
instructions or precautions could result in death or personal
injury.
A ‘Caution’ message indicates that failure to observe
instructions could result in damage to equipment or property.

Warning symbols
A triangular symbol indicates a warning. The following is a
list of the symbols that offer in conjunction with warnings in
the text, or on the spectrometer.

Electric shock UV light Ozone Hot surfaces

RF radiation Heavy object Broken glass Chemical


burn

The following symbol may be used on warning labels attached


to the instrument. When you see this symbol, refer to the
relevant operation or service manual for the correct procedure
referred to by that warning label.

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Varian 700-ES Series instruments

Information symbols
The following symbols appear on the instrument for your
information:

I Mains power ON
0 Mains power OFF

Fuse
Single phase alternating current

Direct current

When attached to the rear of the


instrument, indicates that the
product complies with the
requirements of one or more EU
Directives.
‘OUT’ position of a bi-stable push
switch
‘IN’ position of a bi-stable push
switch

Plasma ON

Plasma OFF

‘ON’ for part of equipment

‘OFF’ for part of equipment

Colour coding
The various indicator lights appearing on the instrument and
any associated accessories have been colour coded to represent
the status of the instrument or accessory:
• A green light indicates the instrument is in normal
standby condition.
• An orange light indicates that a potential hazard is
present.
• A blue light indicates that operator intervention is
required.
• A red light warns of danger or an emergency.

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Varian 700-ES Series instruments

US Federal Communications Commission advisory statement


This Varian 700-ES Series spectrometer generates, uses and
can radiate radio frequency energy, and if not installed and
operated in accordance with the instruction manual may
cause interference to radio communications. It has been tested
and found to comply with the limits for a Class A computing
device pursuant to Subpart J of Part 15 of Federal
Communications Commission (FCC) Rules, which are
designed to provide reasonable protection against such
interference when operated in a commercial environment.
Operation of this equipment in a residential area may cause
interference, in which case the user will be required to take
whatever measures may be necessary to correct the
interference at his or her expense.

Spurious and Harmonic Radiation Compliance


Your Varian 700-ES Series spectrometer complies with the
requirements of FCC rules and Regulations part 18, subpart
H------Miscellaneous Equipment, at the date of manufacture.

CE Compliant Products
Your Varian 700-ES Series spectrometer has been designed to
comply with the requirements of the Electromagnetic
Compatibility (EMC) Directive and the Low Voltage (electrical
safety) Directive (commonly referred to as the LVD) of the
European Union. Varian has confirmed that each product
complies with the relevant Directives by testing a prototype
against the prescribed EN (European Norm) standards.
Proof that a product complies with these directives is
indicated by:
• the CE Marking appearing on the rear of the product, and
• the documentation package that accompanies the product
containing a copy of the Declaration of Conformity. The
Declaration of Conformity is the legal declaration by Varian that
the product complies with the directives listed above, and shows
the EN standards to which the product was tested to demonstrate
compliance. It is also signed by Varian’s Authorized
Representative in the EU, and by the representative of the
manufacturing plant.

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Varian 700-ES Series instruments

Field service policy


The Varian 700-ES Series spectrometer is designed to be
serviced in the field by Varian-trained and authorized
Customer Service Representatives only.
Down time will be minimized through the use of remote
diagnostics and board or module replacement techniques. It is
the policy to complete trouble-shooting and repairs at the
instrument location.
The Varian 700-ES Series spectrometer includes multi-layer,
circuit mounted component, printed circuit boards. A faulty
surface mounted circuit board will be replaced and returned to
the factory for evaluation. The current service plan does not
provide for the repair of these assemblies in the field.
The Varian 700-ES Series spectrometer also includes non-
multi-layer circuit boards, electro-mechanical mechanical and
optical assemblies. These circuit boards and other major
functional assemblies can be repaired at a workshop or
returned to the factory for evaluation or repair.
Given the relatively high cost nature for high level module
and board replacement techniques, a service and repair
exchange program will be provided as a part of Varian 700-ES
Series spectrometer field service spare parts program.

Note Only engineers who have been trained to specialist level on


the Varian ICP-OES instruments are able to perform repairs
or service on the plasma generating system or major optics
system work.

Spare parts policy


Proprietary items and parts that are unique to the Varian
700-ES Series spectrometer should be sourced from service
kits or from a Varian Service Center. Common range items
may be sourced locally and equivalent parts may be used
unless otherwise specified.
Operational spare parts for all Varian ICP-OES instruments
and major accessories are available for a period of five years
after manufacture of the final production unit. Operational
spare parts may not be provided after this period unless
available. Varian will affect functional repair to any of their
products during the five years following manufacture of the
final production unit.
Operational spare parts are defined as:
Individual electrical or mechanical parts susceptible to failure
through wear and tear during their normal operation.
General hardware (for example, sheet metal parts, structural
members, assemblies and castings) will normally outlast the
useful life of an instrument and therefore will only be supplied
if available after the final production unit is manufactured.

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Varian 700-ES Series instruments

Spare parts exchange programs


The factory spare part exchange program will include
• A selection of OSI-manufactured assemblies
• A selection of OEM assemblies internal to the
instrument
The factory exchange program will not include
• Locally supplied OEM assemblies or peripherals

OSI manufactured exchange parts should be returned to the


OSI factory for repair assessment. Assemblies assessed to
have a repaired value equal to or less than the exchange
resale value will be repaired and returned to exchange stock
locations.
OEM exchange assemblies included internally in the
instrument should be returned by the field directly to the
OEM manufacturer for repair. The repaired assembly should
then be returned to the Varian exchange parts storage
location that supports the region of the part’s origin.
Locally supplied peripherals, water coolers, computers,
modems, printers and OEM accessories will not be repaired by
Varian. Given the relatively high cost nature of these parts, a
locally operated service and repair exchange program should
be provided through the supplier of these products.

Warranty
Varian OSI warranty covers any defect in materials and
workmanship, but not against consequential damages. Full
details relating to the terms of warranty are available from
any Varian Sales and Service Office or Agency. No other
warranty is expressed or implied.
Consumable items such as (but not limited to) nebulizers,
light sources and other glassware items, temperature probes
and graphite components are subject to a limited or pro-rated
warranty.
The Varian warranty provides for specific legal rights. There
may also be other rights that vary from country to country or
region to region. The warranty applies only to the correctly
installed Varian equipment and cannot be extended to cover
the associated miscellaneous installations. The warranty does
not cover defects that may be caused by users of the
equipment, inappropriate applications, unauthorized service,
etc.

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Varian 700-ES Series instruments

Preventative maintenance
Varian 700-ES Series spectrometer systems require
preventative maintenance visits to ensure they perform at the
highest level. These maintenance actions are required by
design and should be performed periodically.
Preventative maintenance visits will involve the replacement
of argon gas filters and other consumable items. The
consumable items used as a part of the preventative
maintenance action should be included as a part of a local
service contract or service agreement.
Customers who do not wish to participate in a local service
agreement, should be offered a fixed price preventative
maintenance visit. The consumable items replaced during the
visit should be provided at customer expense or included in
the fixed price agreement.
Through routine preventative maintenance the life of the
instrument will be extended, monitored and documented. The
regular replacement of consumable items that protect the
optical system and detector will safeguard the customer’s
investment in a Varian ICP-OES instrument.
The use of only Varian trained personnel and factory standard
parts will ensure the instrument is maintained at the highest
level of performance throughout its entire operating life.
The typical preventative maintenance procedure should take
between two to four hours on site.
The instrument operating software will inform the customer
that preventative maintenance is required. When
maintenance is due warnings will be displayed daily or
anytime an operator starts the instrument software. As part
of the visit the software timers will be reset and the software
will display when the next visit is required.

Contract maintenance
Quotations for contract maintenance may be obtained from
any Varian Sales or Service Office.

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General information
About the manual
The Varian 700-ES Series spectrometer can be described in
terms of its major functional assemblies. The Service information
contained in this manual is organized by function and is
presented in fourteen sections.

Section 1 General information


This section provides an overview of the Varian 700-ES Series
spectrometer system. It also contains important information on:
• The manual
• Instrument types
• Fundamentals of the Varian 700-ES Series spectrometer
• Service access
• Identification of all major functional assemblies

Section 2 Pre-installation
This section provides information on the laboratory
requirements for the installation and operation of the Varian
700-ES Series spectrometers.

Section 3 Installation
This section provides information on the installation of the
Varian 700-ES Series spectrometers.
• Instrument installation
• Personal computer setup
• Software installation
• Water cooler connection
• Optics system preparation
• Instrument commissioning
• Basic customer training

Section 4 Preventative maintenance


This section provides information on required routine
maintenance of the Varian 700-ES Series spectrometer.

Section 5 Peripherals
This section contains specific information on the water cooling
systems that are factory recommended for use with Varian 700-
ES Series spectrometers.
Varian 700-ES Series instruments

Section 6 Spare parts and test equipment


This section contains information about:
• Factory supplied spare parts
• Special fixtures
• Test equipment required for fault detection, alignments and
calibrations.

Section 7 Diagnostics and troubleshooting


This section provides information about:
• Instrument memory based diagnostics
• PC software diagnostics
• Hardware troubleshooting
• Tele diagnostics

Section 8 Error messages


This section provides an index of software based Error messages.

Section 9 Sample introduction


This section contains information about:
• Torches
• Spraychambers
• Nebulizers

Section 10 Gas control


This section provides information about:
• Gas control unit manifold
• Peristaltic pump and pump drive motor
• Argon pressure switch
• Plasma igniter
• Regulators
• Mass flow controller
• Electronics

Section 11 Plasma generation


This section contains information about:
• Plasma generation
• Plasma generation control circuits

Section 12 Optics
This section contains information about:
• Theory of operation
• Electronics
• Polychromators
• Removal / replacement procedures
• Alignment procedures

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Varian 700-ES Series instruments

Section 13 Command control electronics


This section contains information about:
• Acquisition and processing of the photometric signal
• Communications between the instrument and computer
• Communications and control within the instrument

Section 14 Power supplies


This section contains information about:
• High voltage DC supply
• Mains supply and unregulated low voltage DC supplies
• Power tube filament supply
• Instrument power supply and peltier control circuits

Section 15
This section is reserved for future use

Section 16
This section is reserved for future use

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Varian 700-ES Series instruments

Instrument models/types
There are three models of the Varian 700-ES Series spectrometer
and there are two types for each model. All the models and types
are listed below;

Varian 710-ES spectrometer


Part number 00-100871-0X
axial view, Argon purged purged polychromator based
instrument
capable of analysis from 177 nm up to 785 nm
Varian 715-ES spectrometer
Part number 00-100870-0X
radial view, Argon purged purged polychromator based
instrument
capable of analysis from 177 nm up to 785 nm

Varian 720-ES spectrometer


Part number 00-100873-0X
axial view, Argon purged polychromator based instrument
capable of analysis from 166.8 nm up to 784.3 nm
Varian 725-ES spectrometer
Part number 00-100872-0X
radial view, Argon purged polychromator based instrument
capable of analysis from 166.8 nm up to 784.3 nm

Varian 730-ES spectrometer


Part number 00-100875-0X
axial view, Argon or Nitrogen purged polychromator based
instrument
capable of analysis from 166.8 nm up to 784.3 nm
productivity package
Varian 735-ES spectrometer
Part number 00-100874-0X
radial view, Argon or Nitrogen purged polychromator based
instrument
capable of analysis from 166.8 nm up to 784.3 nm
productivity package

Note An axial ICP-OES offers improved detection limits from the


radial instrument
Note Substitute the applicable country code for suffix ‘0X’
('00' = Australia, '01' = USA, '02' = Europe, ‘04’ = Japan).

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Varian 700-ES Series instruments

Operator interface
The Varian 700-ES Series spectrometer is controlled by a
Personal Computer. Communications between the PC and the
spectrometer are handled by a standard IEEE-488 link. Internal
processor to processor based communications are handled via
two bi-directional RS-422 serial links.
The Varian 700-ES Series spectrometer software allows the
operator to change instrument parameters and tailor analytical
programs for customer specific analysis.
The packaged software system provides flexibility with the user-
friendly advantages of the Windows XP operating systems. The
software also provides the flexibility and benefits of local and
network capabilities. See the Operation Manual or Varian
supplied Help software for more information.

Instrument Options
The following options are available for the Varian 700-ES Series
spectrometer systems.

Main Instrument Part number


Manual regulator and three channel pump 02 102075 00
(standard on Varian 710 Series instruments)
Mass flow control and three channel pump 02 102076 00
Manual regulator and four channel pump 02 102077 00
Mass flow control and four channel pump 02 102078 00
(standard on Varian 730 Series instruments)
Kit, Nitrogen purge (factory fitted) 98 100378 0X
(standard on Varian 730 Series instruments)

Sample Introduction for Radial instruments


Kit, Sturman/Masters s/c + ‘V’ Groove neb 98 100394 00
Kit, Twister s/c + Seaspray neb 98 100395 00

Sample Introduction for Axial instruments


Kit, Twister s/c + Seaspray neb 98 100396 00
Kit, Cyclone s/c + Seaspray neb 98 100397 00
Kit, Cyclone s/c + K-style neb 98 100398 00

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Varian 700-ES Series instruments

Instrument Accessories
The following accessories and sample introduction components
are available for the Varian 700-ES Series spectrometer systems.

Accessories Part number


Auto Sampler (SPS3) 00 100822 00
Auto Sampler and diluter (SPS3D) 00 100823 00
Vapor Generation Accessory (VGA-77P) 00 100884 XX
AGM-1 (oxygen addition assembly) 00 100559 00
Argon saturation assembly 02 101286 90
Organics sampling kit (axial) 99 101275 00
Organics sampling kit (radial) 99 101276 00
Inert sampling kit (axial) 99 101260 00
Inert sampling kit (radial) 99 101261 00
Inert sampling kit (radial with sm and v-groove) 99 101262 00
Kit, Nitrogen purge (field fitted) 98 100369 0X

Sample introduction components Part number


Cyclonic spraychamber 20 100817 00
Twister spraychamber + adapter 79 100437 00
Sturman/Masters spraychamber (Ertalyte) 01 105931 90
Sturman/Masters spraychamber (polypropylene) 01 104236 90
Cooled spraychamber kit 99 100704 00

Seaspray glass concentric nebuliser 20 100964 00


‘K’ style glass concentric nebuliser 20 101068 00
‘V’ Groove nebuliser kit 99 100574 00
Ultrasonic nebuliser (115 V 60 Hz) 79 100143 00
Ultrasonic nebuliser (220 to 240 V 50 Hz) 79 100144 00
Micromist nebuliser (ICP-MS) 20 101021 00

Publication date: 15/08/2006 6


Varian 700-ES Series instruments

Torch, Standard radial 20 100696 90


Torch, ICP-ES high solids radial 20 100950 00
Torch, Standard axial 20 100904 00
Torch, ICP-ES high solids axial 20 100948 00
Semi demountable torch kit - Radial 99 100568 00
Semi demountable torch kit - Axial 99 100847 00
Fully demountable torch kit - Radial 99 101064 00
Fully demountable torch kit - Axial 99 101063 00
Torch ICP-ES axial - 0.8 injector 20 101047 00
Torch ICP-ES axial - 1.4 injector 20 101048 00
Torch icp-es radial organics - 0.8 injector 20 101174 00
Torch icp-es radial organics – 1.4 injector 20 101175 00

Transfer tube FEP radial cyclone s/c 79 100512 90


Transfer tube FEP radial Sturman/Masters s/c 79 100514 90
Transfer tube FEP axial cyclone s/c 79 100515 90

Associated publications

Item description Part number


Varian 700-ES Series spectrometer Pre-installation 85 102337 00
instructions

7 Publication date: 15/08/2006


Varian 700-ES Series instruments

Fundamentals of the Varian 700-ES Series spectrometer

Figure 1 Varian 700-ES Series instrument


A Simultaneous inductively coupled plasma optical emission
spectrometer is comprised of four major functional areas.
• Sample introduction system
• Excitation source
• Polychromator assembly
• Detection system

The sample introduction system generates and delivers an


aerosol to the excitation source, which causes the atoms to emit
characteristic radiation.
The polychromator assembly separates the characteristic
radiation emissions into wavelengths of interest.
The radiant intensities of the selected wavelengths and orders
are measured by the detection system.
A quantitative determination is made by the comparison
between the radiant intensity of a known concentration of
analyte standard and the radiant intensity of the analyte in the
sample that are analysed.

Figure 2. The fundamental blocks of the Varian 700-ES Series spectrometer.

Publication date: 15/08/2006 8


Varian 700-ES Series instruments

The major components include:


• Plasma generating system
• Gas control system
• Sample introduction system
• Optics system
• Power supplies
• Control electronics
• Personal computer (PC)

Plasma generation
The plasma generating system produces a high power, high
frequency source of RF energy to create and maintain the
plasma

See section 11.

Gas control
The gas control system supplies and regulates all gas flows in
the spectrometer system.
Argon is used for
• The plasma
• Sample introduction system
• Optics purge system
• Camera purge system (Varian 720/730-ES Series only)
• Interface purge system

The polychromator of the Varian 700-ES Series spectrometer


may be purged with instrument grade Nitrogen gas if fitted with
the optional Nitrogen Purge Kit (standard on Varian 730 series
instruments).
See section 10.

Sample introduction
The sample introduction system conditions and transports the
sample into the plasma.
See section 9.

Optics
The optics system of the spectrometer accepts light radiated from
the plasma and separates it into discrete wavelengths.
See section 12.

9 Publication date: 15/08/2006


Varian 700-ES Series instruments

Power supplies
• Provides low power DC to internal assemblies
• Provides low power AC to internal assemblies
• Provides high voltage to RF system
• Provides low power, high current to RF system
• Provides mains to optics heaters

See section 14

Control electronics
The command control electronics provide for the operation of the
following functions:
• Internal instrument communications
• Instrument to PC communications
• Shutter solenoid operation
• Selects parts of detector made active
• Converts the radiant emission energy on activated parts of
the detector into stored electrical charges
• Converts the stored electrical charges into serial data suitable
for data processing by the instrument control electronics and
PC software

See section 13.

Personal computer
The PC controls the spectrometer system operation including:
• Operator interface
• Instrument operating parameters
• Data collection
• Data display
• Data and method storage
• Printing

See the Varian 700-ES Series spectrometer Operation Manual or


Varian-supplied software help files.

Publication date: 15/08/2006 10


Varian 700-ES Series instruments

Figure 3 Operational block diagram of the Varian 700-ES Series


spectrometer systems

11 Publication date: 15/08/2006


Varian 700-ES Series instruments

Access to major assemblies


You must remove one or more of the instrument covers to gain
access to major assemblies and components.

Removal of right front cover


1. Loosen the two M4 retaining screws located at the bottom of
the panel approximately one and a half turns.

Two retaining screws

2. Pull the bottom of the cover out to clear the retaining bracket
3. Pull the cover down off the two mounting tabs.

Two mounting tabs

Publication date: 15/08/2006 12


Varian 700-ES Series instruments

Removal of top cover


Note To remove the top cover, you must first remove the right front
cover (see previous page). This will allow access to a thumbscrew
located in the upper left side, behind the front right cover.
1. Loosen the thumbscrew located behind the front right cover
approximately one and a half turns.

Thumbscrew

2. If your customer has a fixed extraction hood, you can remove


the back of the chimney for easier removal of the top cover. To
do this you must remove the six M4 screws shown below.

3. Remove the two screws marked ‘X’ and loosen the seven
remaining screws on the top of the instrument cover

Note The remaining screws are captive and will remain in the cover
(they should not be removed).

13 Publication date: 15/08/2006


Varian 700-ES Series instruments

4. Lift the top cover free of the instrument.


(Note, the front edge of the cover is held by leaf springs)

Removal of left side cover

1. Loosen the three screws on the top of the left side cover
Note These screws are captive and will remain in the cover (they
should not be removed).

2. Remove the two M4 retaining screws of the left side cover


located at the back of the instrument.

3. Lift the left side cover off the three leaf springs.

Three leaf
springs

Publication date: 15/08/2006 14


Varian 700-ES Series instruments

Removal of left front cover

Note To remove the left front cover, you must first remove the left side
cover (see above). This will allow access to the four retaining
screws located behind the left front cover.

1. Loosen the four M4 retaining screws on the back of the left


hand top cover approximately one and a half turns.

Four retaining
screws

2. Loosen the thumbscrew located behind the front left cover.

3. Open the torch compartment door to allow space for the left
front cover to clear the door bracket.

15 Publication date: 15/08/2006


Varian 700-ES Series instruments

4. Slide the left front cover to the left to disengage the six leaf
springs located on the right side and bottom edge of the cover.

Removal of upper right side cover

Note To remove the upper right side cover, you must first remove the
front right cover (see above). This will allow access to a
thumbscrew located in the upper left side, behind the front right
cover.

1. Remove the thumbscrew located behind the front right cover.

Thumbscrew

2. Loosen the screw on the top of the upper right side cover

Note This screw is captive and will remain in the cover (it should not
be removed).

Publication date: 15/08/2006 16


Varian 700-ES Series instruments

3. Remove the M4 retaining screw of the upper right side cover


located at the back of the instrument. Also remove the two
M4 screws located near the edge of the top cover.

Captive screw

Retaining screw

Retaining screws

4. Loosen the three M4 retaining screws located at the bottom of


the panel approximately one and a half turns. Pull the cover
out to clear the retaining brackets and lift the cover up off the
instrument.

Removal of lower right side cover

1. Loosen the three M4 retaining screws on the back of the lower


right side cover approximately one and a half turns.
2. Pull the cover towards yourself to clear the instrument rear
panel.
3. Slide the cover toward the rear of the instrument to clear the
locating tabs and remove from the instrument.

17 Publication date: 15/08/2006


Varian 700-ES Series instruments

Torch compartment door adjustments

Note To adjust the torch compartment door, you must first remove the
front right cover (see above), top cover (see above) and the left
front cover (see above). This will allow access to the adjustment
screws at either side of the torch compartment door. It is better
to set the door position, then adjust the microswitches.
1. Open the torch compartment door
2. Loosen the four M4 retaining screws (through the access
holes) that secure the door micro-switch bracket
approximately one and a half turns.

3. Loosen the four M4 retaining screws (through the access


holes) that secure the door hinges approximately one and a
half turns.

4. Close the torch compartment door, ensuring that it is firmly


seated in position.

5. Re-tighten all eight M4 retaining screws to hold the correct


position of the torch compartment door.

Publication date: 15/08/2006 18


Varian 700-ES Series instruments

Instrument cover alignments


The heights of the left side cover and the top cover is set by the
mounting bracket (shown below). In order to facilitate easy re-
installation of these covers, they should not be moved.

Mounting
bracket

The heights of the upper right side cover and the top cover is set
by the thumbscrew located behind the front right cover (shown
below).

Thumbscrew

Align the upper right side cover and the top cover before
tightening the thumbscrew.

19 Publication date: 15/08/2006




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DPSSPTJPOSFTJTUBOUBOEJNQFSWJPVTUPMJRVJETQJMMBHF'PSDPNGPSUBCMF
XPSLJOHDPOEJUJPOTBOEFBTZBDDFTTUPUIFJOTUSVNFOUTBNQMF
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1VCMJDBUJPOEBUF  
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5IF7BSJBO&44FSJFTTQFDUSPNFUFSTZTUFNTIPVMEOPUCFMPDBUFE
DMPTFUPBOBDDFTTEPPS XJOEPXPSBOZPUIFSBSFBXIFSFESBGUTNBZ
DBVTFVOTUBCMFUFNQFSBUVSFDPOEJUJPOT

5IFGPMMPXJOHEJBHSBNTTIPXUIFSFMBUJWFEJNFOTJPOTPGUIFNBJO
JOTUSVNFOUJODMVEJOHUIFTQBDFOFFEFEGPSTFSWJDFBDDFTT5IFTF
EJNFOTJPOTTIPVMECFDPOTJEFSFEEVSJOHUIFQSFQBSBUJPOGPS
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JOUIFMBCPSBUPSZ5IF7BSJBOGJFME4BMFTBOE4FSWJDF0GGJDFTXJMMCF
BCMFUPBTTJTUJOUIFUBTLPGSFDPNNFOEJOHBUIJSEQBSUZUIBU
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NJOJNVNEPPSXJEUISFRVJSFEGPSUIFTQFDUSPNFUFSJOJUTTIJQQJOH
DSBUF

1BSUJDVMBSBUUFOUJPOTIPVMECFNBEFUPUIFDMFBSBODFPGBOZEPPSTJO
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1VCMJDBUJPOEBUF  
7BSJBO&44FSJFT*$10QUJDBM&NJTTJPO4QFDUSPNFUFST

Minimum door dimension


1800 mm

C
Ins rated
trum
ent

Minimum turning dimension


2200 mm

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• "DPQZPGBOZEBNBHFSFQPSUNVTUCFGPSXBSEFEUPUIF7BSJBO
4BMFT0GGJDFEFBMJOHXJUIUIFTVQQMZPGUIFFRVJQNFOU

7BSJBO&44FSJFTTQFDUSPNFUFSTZTUFNTBSFJOIFSFOUMZSPCVTU BOE
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QBDLBHFTTIPVMECFIBOEMFEBDDPSEJOHMZ*OUSBOTJU TIBSQKPMUTBOE
TIPDLTNVTUCFBWPJEFEBOEUIFQBDLBHFTNVTUOPUCFJOWFSUFEPS
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JOEJDBUFUIFSFRVJSFEPSJFOUBUJPOPGUIFDBSUPO

 6OQBDLJOHUIFJOTUSVNFOU
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JOTUSVNFOUBOEQMBDFJUPOUIFXPSLCFODI BMPOHXJUI
SFDPNNFOEBUJPOTPOFRVJQNFOUSFRVJSFEUPQFSGPSNUIJTUBTL.PSF
EFUBJMFEJOTUSVDUJPOTPOVOQBDLJOHUIFJOTUSVNFOUBSFTVQQMJFEXJUI
UIFEPDVNFOUBUJPOTIJQQFEXJUIUIFJOTUSVNFOU

 /PUF 5IF7BSJBOGJFMETFSWJDFFOHJOFFSDBOOPUTUBSUUIFJOTUBMMBUJPOVOUJMUIF
JOTUSVNFOUJTGJOBMMZQMBDFEPOUIFJOUFOEFEXPSLCFODI

5PVOQBDLUIFJOTUSVNFOU

 3FNPWFUIFUPQXPPEFODPWFSXIJDIJTTFDVSFECZUXFMWF
˜JODICPMUT

 3FNPWFUIFCPYFTDPOUBJOJOHUIFJOTUSVNFOUDPNQPOFOUT

1VCMJDBUJPOEBUF  
7BSJBO&44FSJFT*$10QUJDBM&NJTTJPO4QFDUSPNFUFST

 3FNPWFUIFXPPEGSBNFEDBSECPBSETJEFT XIJDIBSFTFDVSFE
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IPMMPXUVCJOHJOTFSUFEUISPVHIIBUTFDUJPOCSBDLFUTXFMEFEUP
UIFCBTFPGUIFJOTUSVNFOU5IFTFTRVBSF IPMMPXUVCFTBSF
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TIJQQJOHDSBUF

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5PBWPJEJOKVSZUPQFSTPOOFMPSEBNBHFUPFRVJQNFOU 
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UIFJOTUSVNFOU

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5PQSFWFOUEFBUIPSQFSTPOOFMJOKVSZGSPNBDDJEFOUBMDPOUBDUXJUI
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JOTUSVNFOUDPWFST%POPUDPOOFDUUIFJOTUSVNFOUUPUIFNBJOT
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• &YIBVTUTZTUFN

• &MFDUSJDBMQPXFSTVQQMZ

• (BTTVQQMJFT

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5IF7BSJBO&44FSJFTTQFDUSPNFUFSNVTUCFMPDBUFEVOEFSBGMVF
UIBUJTWFOUFECZBOFYIBVTUGBOBOEEVDUFEUPBOFYUFSOBMWFOU5IF
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GPSDPOUSPMPGGBDJMJUJFTBOEGJYUVSFTJOUIFXPSLQMBDF

5IFFYIBVTUGBOTIPVMECFMPDBUFEBUMFBTUNFUSFT GFFUBOE
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QPTJUJPOXIFSFUIFJOTUSVNFOUPQFSBUPSDBOWJFXUIFJOEJDBUPSBOE
BDDFTTUIFDPOUSPMTXJUDI

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PGGJSFBMBSNT TQSJOLMFSIFBETBOEPUIFSIFBUTFOTJUJWFEFWJDFT

5IFFYUFSOBMWFOUNVTUCFGJUUFEXJUIBCBDLESBGUEBNQFSBOEUIF

1VCMJDBUJPOEBUF  
7BSJBO&44FSJFT*$10QUJDBM&NJTTJPO4QFDUSPNFUFST

PVUMFUMPDBUJPONVTUCFDMFBSPGEPPST XJOEPXTBOEIFBUFSPSBJS
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Fan Motor

Red wire
Black wire
Active Black wire
connection Termination
Termination
Neutral
connection
Red wire

Capacitor 

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Varian ICP-OES spectrometer

3. Installation

3.1 Introduction 1

3.2 Safety information 2


3.2.1 Electrical shock hazard 2

3.3 Installation Check-list 3

3.4 Hardware Installation 5


3.4.1 Mains connection 5
3.4.2 Gas connection 7
3.4.3 Water cooler connection 10

3.5 Software installation 13


3.5.1 PC Hardware requirements 13
3.5.2 Installing the ICP Expert software 13
3.5.3 PCI-GPIB driver installation 14
3.5.4 Installing the PCI-GPIB communications card 15
3.5.5 Software registration: 18
3.5.5 Polychromator software (PolyAlign.exe) 20
3.5.6 Printer configuration 20
3.5.7 ICPExpert II Help system 20

3.7 Instrument operation 21


3.7.1 Sample compartment setup 21
3.7.2 Turning on the instrument 21
3.7.3 Start a plasma 24
3.7.4 RF check 25
3.7.5 Nebulizer setup 26
3.7.6 Argon ratio adjustment (Varian 720/730-ES Series instruments only) 26

3.8 Instrument Calibrations 28


3.8.1 Dark Current Scan 28
3.8.2 Wavelength Calibration 29
3.8.3 Drift Compensation 30
3.8.4 Hardware Calibration (For Varian 710-ES Series instruments only) 31
3.8.5 Torch Align 32

3.9 Performance testing 34


3.9.1 Test solutions 35
3.9.2 Performance tests 35
3.9.3 Resolution test 45
3.9.4 Analytical Tests 46
3.9.5 Detection limit test 51

3.11 Customer training 53

Appendix 58
A.1 Additional performance tests (optional) 58
Varian ICP-OES spectrometer

3.1 Introduction
This section provides installation information for the
Varian 700-ES Series ICP Optical Emission Spectrometers (ICP-
OES), accessories and peripherals. This information is for the
use of Customer Service Representatives (CSRs) who have
successfully completed a Varian ICP-OES service training course
and are employed or otherwise authorized by the Varian Sales
and Service Organization.
The installation procedures check all the factory specified
performance characteristics of the Varian 700-ES Series ICP-
OES in a progressive testing sequence. There are separate
procedures for radial and axial systems. These sequences must
be followed to confirm that the instrument’s performance meets
specification. Only those parts which are not applicable to the
type of system being installed may be omitted.
 Note: The Varian 700-ES Series ICP-OES require a minimum of two
hours of purge time before running the analytical test in this
section.
 Note: For best results, the polychromator of the Varian 700-ES Series
ICP-OES spectrometer should be allowed to thermally stabilize at
+35°C. This may take up to four hours.
If there are any faults during the installation and testing
sequence, you must take corrective action before repeating the
steps or going on to the next step of the installation.
Before attempting installation, you must confirm that the site has
been prepared in accordance with the Varian 700-ES Series Pre-
installation manual, Varian publication number 85 102337 00.
 Note: You should not attempt instrument installation until the instrument
has been unpacked and placed on its intended workbench. This
is your customer’s responsibility.
You must check the equipment for any sign of damage during
transit and remove all packaging material. Record any
irregularities on the Installation Service Report and inform the
customer of any necessary actions. If required, postpone the
installation until corrective action has been taken.

Standard installation times


Standard installation times for the Varian 700-ES Series ICP-
OES systems are:
• Instrument 10 hours
• SPS 3 1 hour
• VGA 1 hour
• Ultrasonic nebulizer 2 hours

This includes:
• Instrument installation
• Water cooler connection/commissioning
• Commissioning/ testing/handover
• Basic customer training

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Varian ICP-OES spectrometer

3.2 Safety information


You must read and understand the safety information presented
in this section before you start an installation or you may expose
yourself or others to danger.
For more information on safety practices see the Safety Practices
and Hazards section at the start of this manual.

3.2.1 Electrical shock hazard

Warning Avoid spilling water during installation and routine


maintenance of the water cooling system. Spills over
active electrical circuits could cause death or severe
electrical shock. Check that power sources are
disconnected before working on the instrument, its
accessories or peripherals.

Warning Installation by unauthorized personnel is not permitted


and will immediately void the instrument warranty.
Unskilled, improper or careless installation can create the
risk of fire, explosion, electric shock and various other
hazards that can cause death or serious injury to
personnel. All users of these systems must be familiar
with correct operating procedures and safety practices as
explained in this manual and in the Varian 700-ES Series
ICP-OES Operation Manual.

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Varian ICP-OES spectrometer

3.3 Installation Check-list


Following is an outline of the order of tasks you should perform
during installation, detailed explanation of procedures follow later
in the chapter:
8 Set the correct voltage tapping on the transformer in the
instrument and change the indicator to match.
8 Connect power to the instrument and turn on both mains
switches. The instrument firmware will turn on the
polychromator heaters automatically and it may take up to
4 hours to stabilize at +35°C.
8 Connect the argon supply to the instrument.
For the Varian 720/730-ES Series instruments, check that
there is approximately 0.1 lt/min supplied to the camera. Do
not connect cooling water to the instrument until this purge
gas has been running for at least 20 minutes.
The Varian 710-ES Series instruments do not have a
camera purge, so this 20 minute delay is not required.
8 Connect the water cooler to the instrument.
For the Varian 720/730-ES Series instruments do not turn
the cooler on until you have allowed a minimum of 20
minutes since the argon supply was connected to the
instrument.
8 Install the sample compartment components.
8 Install the Varian ICPExpert II software and PCI GPIB card.
8 Complete the Varian software registration requirements.
8 Switch on the instrument and check that the instrument
initialises correctly.
8 Perform an RF check
8 Optimize nebulizer pressure, or nebuliser flow (MFC).
8 For the Varian 720/730-ES Series instruments, check the
Argon Ratio and adjust if required.
This adjustment is not required on the Varian 710-ES Series
instruments.
8 Perform a Dark Current Scan.
8 Perform a Wavelength Calibration
8 For the Varian 710-ES Series instruments,
perform a Hardware Calibration (shutter and attenuator).
This calibration is not required on the Varian 720/730-ES
Series instruments.
8 Perform a torch scan.
8 Run the performance tests to check the instrument:
Resolution
SBR and Read-back
Precision
Stray Light
8 For the Varian 720/730-ES Series instruments, re-check the
Argon Ratio with the polychromator stabilized at +35°C.
Ensure it is the same as the factory setting and adjust if

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Varian ICP-OES spectrometer

required.

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Varian ICP-OES spectrometer

3.4 Hardware Installation


The instrument should already be positioned on its workbench.
You will have to connect the available services and peripherals.

3.4.1 Mains connection


A separate connection receptacle should be provided for each
unit in the system. Do not use double adaptors or extension
cords.
We recommend that separate mains circuits, (individually
protected by fuses or circuit breakers) are used where possible.
Avoid using power supplies from a source that may be subject to
electrical interference from other services (large electric motors,
elevators, welders and air conditioning units etc).
The Varian 700-ES Series ICP-OES system draws a maximum of
27 A RMS at 187 volts with a power factor of approximately 0.70.
In areas where 208 to 240 VAC single phase supplies are not
available at the required rating, a 380/415 volt phase-to-phase to
220 volt single phase transformer may be installed.
All Varian 700-ES Series ICP-OES systems have the mains
cable hardwired to the rear of the instrument. Local regulations in
several European countries do not permit the use of a breakable
wall mounted power supply connection for high current single
phase mains supplies. In these areas, the mains power supply to
the instrument is hard-wired to the wall. To allow the instrument
to be isolated from the mains supply in these areas, an in-line
connector must be fitted to the mains supply cable. These
connectors are available in kit part number, 99 100762 00.
In Canada, local regulations require the high current mains power
supply cable to be wired with a UL/CSA approved cable and
connector. For Canada only, the power cable shipped from the
factory must be replaced with a locally-sourced UL/CSA cable
such as Carol 02720.

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Varian ICP-OES spectrometer

Setting the supply voltage tap


You must set the tap on transformer 1TR1 to match the power
supply voltage. Three settings are available - 208, 220 or 240
volts. Select the one closest to your mains supply.
To set the supply voltage tap on 1TR1:
1. Remove the left side panel
2. Locate the single yellow wire, labelled “voltage tapping” on
the larger of the two transformers, 1TR1. The transformer
tapings are labelled 208, 220 or 240V. The instrument is
shipped from the factory configured for 240V, so the yellow
wire is connected to the 240V tap.
3. Connect the yellow wire to the appropriate voltage tapping
for your local supply.
4. Locate the voltage indicator panel on the instrument’s left
side panel (removed at step 1).
5. Move the voltage indicator panel so that the visible label
represents the voltage for which you have just set the
instrument.
6. Replace the panel.

Mains connection
The Varian 700-ES Series ICP-OES system comes with a single
inlet cable which is wired into the input power compartment at the
rear of the instrument. It does not have a mains power connector
fitted.
1. Find the country adaptor kit supplied with the instrument (the
same kit as the gas adapters).
The kit for your region is labelled with one of these part numbers:
• Australia 89 100007 00 Contains 32A Wilco plug
• North America 89 100007 01 Contains 50A plug
• Europe 89 100007 02 No plug is included
• Japan 89 100007 04 No plug is included

The European and Japanese kits do not contain an electrical


plug. This must be supplied locally.

2. Connect the mains power connector supplied in this kit to the


mains input cable. If the supplied connector is not suitable to
your installation, you will need to supply the appropriate
connector locally. The plug should be wired as follows:
• Brown Active
• Blue Neutral (active on floating supply)
• Green and yellow Earth (ground)

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Varian ICP-OES spectrometer

The polychromator has heater pads installed which warm the


polychromator casting up to a temperature of +35°C. For precise
readings, you should allow the temperature to stabilize. This will
take around 35 minutes from standby and may take up to 4 hours
from cold. However, the instrument will run satisfactorily while it is
stabilizing and will still give adequate results. The instrument
firmware will turn on the polychromator heaters automatically
when the instrument power switch is switched on.
3. Plug the mains connector into the power recepticle.
4. To turn on the spectrometer,
a) set the RF supply circuit breaker located on the rear right-
hand side of the instrument to the ‘On’ (up) position.
b) Set the instrument power switch, located at the front left of
the instrument, to ‘|’ (the green power indicator should light).
5. Observe the instrument start-up sequence and that the air
cooling fan turns on.

3.4.2 Gas connection


There is a single argon gas inlet for the Varian 700-ES Series
ICP-OES instrument. This argon gas will supply both the plasma
and polychromator purge.
If Nitrogen is required for the polychromator purge, you will have
to install the Nitrogen purge kit. This allows the flexibility of using
nitrogen for the polychromator purge, while keeping argon for the
plasma and camera purge.
The Nitrogen Purge kit can be fitted at the factory (p/n
981003780X) or in the field (p/n 981003690X). If the Nitrogen
Purge kit is fitted, then there are two gas inlet supply lines coming
out from the instrument. Connect the polychromator purge line to
the nitrogen supply, and the other inlet supply to the argon
supply.
If nitrogen is not required for the polychromator purge, connect
argon to the single inlet supply as follows:
1. Find the country adaptor kit supplied with the instrument.
The kit for your region is labelled with one of these part numbers:
• Australia 89 100007 00
• North America 89 100007 01
• Europe 89 100007 02

This kit contains a short piece of hose and two adapters which
can be used to adapt the connector fitted to the instrument’s
argon/nitrogen inlet hose with the most common gas fittings used
in your region. If the adaptor is not suitable, the hose fitting must
be removed. Fit the hose to the gas supply with locally sourced
fittings.

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Varian ICP-OES spectrometer

2. Connect the gas adaptor kit to the argon supply outlet.


3. Before connecting the instrument to the argon supply, turn
on the supply and purge any air or dirt from the gas lines. If
the gas supply lines are very long, allow enough purge time.
4. Connect the teflon argon inlet hose from the instrument to
the adaptor fitted to the argon outlet.
5. Turn the argon supply on and set the supply regulator
between 400 and 700 kPa, preferably 650 kPa
6. Leave the argon turned on to purge the camera and
polychromator lines.
For the Varian 720/730-ES Series instruments do not turn
on the water cooler until this purge has been on for at least
20 minutes (to prevent the Peltier from cooling the camera).
The Varian 710-ES Series instruments do not have a
camera purge, so this 20 minute delay is not required.

Detector purge gas line


(Varian 720/730-ES Series instruments only)
You must ensure that all the air in the camera purge gas lines
has been purged with clean, dry argon before the camera Peltier
is turned on. The camera purge line takes 50 ml/min, and there
are three filters that require purging (the Varian 710 Series
instruments do not use camera purging, and has only one argon
filter, for the polychromator). This will take a minimum of 20
minutes.
The camera Peltier is interlocked with the gas pressure sensor
and the water flow sensor. Therefore, to ensure the Peltier does
not begin cooling until all the air is purged - do not connect the
water cooler until the gas lines have been fully purged with argon.

Caution Do not allow the camera Peltier to turn on and begin


cooling the camera until the camera gas line has been
fully purged with clean, dry argon. Failure to do this may
cause condensation in the camera assembly and result in
destruction of the camera.

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Varian ICP-OES spectrometer

How to check camera purge gas


Once you have connected the argon supply to the instrument and
turned on the gas supply, argon gas will flow through to the
camera - there are no solenoids on the camera purge line. You
should check that argon for the camera purge is coming from the
gasbox. Following is the procedure to do this:
1. Remove the gasbox access cover at the rear of the
instrument to gain access to the gas box.
2. Disconnect the small teflon hose that is the camera purge
gas line from the gasbox manifold. The connection point is at
the end of the manifold near the polychromator, and it is held
there with some extra tubing.
3. Use an extra piece of tubing (you will need to supply this)
and connect it to the camera purge outlet on the gasbox
manifold.
4. Place the other end of the replacement tubing in a beaker of
water and check that bubbles of argon are coming out of this
tube.
5. Replace the camera purge gas line on the gasbox exactly
the way it was and check there are no leaks. Be sure that
you insert the camera purge line all the way into the orifice
housing on the gasbox manifold, and that it is correctly
sealed with the additional tubing on the outside of the orifice
housing and gas line.

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Varian ICP-OES spectrometer

3.4.3 Water cooler connection


The connection of a water cooling system may take considerable
time and should be the first major task accomplished.
The functions of the water cooling system are:
• To circulate water that cools the work coil in radial
instruments and the work coil and cooled-cone interface in
axial instruments.
• To circulate water which cools the camera Peltier.
• To maintain the water temperature within the operational
limits of the spectrometer.
Additional information on the specifications, unpacking, and
installation of the water cooling system are covered in the
manufacturer’s literature supplied with the water cooler or
recirculator. Information on the Lytron and Van der Heijden series
coolers are contained in chapter 5 of this manual.
The Varian 700-ES Series ICP-OES instrument is shipped from
the factory with some fittings for connecting the spectrometer to
the water cooler in kit form. Each kit provides the hardware to
connect the 1/4” i.d. and 3/8” i.d. cooling hoses to the water
coolers. The kit does not provide the PTFE tape that is required
to fit the parts.
The part number for the kit is 99 100886 00. The kit includes:
Description Part number Qty
Tridon clamp 08 100417 00 1
Jubilee clamp 08 100468 00 1
Adaptor barb 16 100468 00 2
Connector, 1/2” NPT to swagelok 16 101159 00 1
Connector, 1/2” NPT to barb 16 101160 00 1
Connector, 3/8” NPT to barb 16 101161 00 2

Water cooling system


Specifications, unpacking, and installation of the water cooling
system are covered in the manufacturer’s literature supplied with
the water cooler/recirculator.
 Note The unpacking of the water cooling system, required power
connections and water cooling positioning is your customer’s
responsibility.
In Australia, the water cooler’s mains connector must be replaced
with the 15A plug supplied in the country kit,
89 100007 00.

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Varian ICP-OES spectrometer

Connection to the spectrometer


1 Cut the water hoses to remove the plastic bungs from the
end of the hoses.
2 Locate the water cooling plumbing kit supplied with each unit
and remove the appropriate fittings and clamps. Ensure the
Swagelok nut, ferrule and seat on the 1/2” NPT to Swagelok
fitting is finger tight.
3 Fit the 1/4” barb into the Swagelok and tighten the nut 1 1/4
turns.
4 Using PTFE tape, completely cover the threads of both NPT
fittings with three full turns of tape.
5 Using care to ensure that the fittings mounted in the cooler
are held stationary, fit the 1/2” NPT to Swagelok/barb
assembly to the water cooling system port labelled ‘coolant
in’.
6 Using care to ensure that the fittings mounted in the cooler
are held stationary, fit the appropriate 3/8” barb assembly to
the water cooling system port labelled ‘coolant out’.
7 Loop a small length of tube from inlet to outlet.
8 Remove the access cover to the fill reservoir. Remove the
filler cap. Fill the water cooler with distilled water. Replace
the filler cap and turn-on the water cooler.
9 Clamp the small length of tube closed, so that the cooler is at
maximum pressure. Adjust the bypass valve, located near
the fill reservoir, so that the pressure gauge on the front of
the water cooler reads 45 psi. This ensures that 45 psi is the
maximum pressure attainable.
10 Remove the small length of tube from the water cooler
11 Connect the instrument inlet hose to the cooler outlet and the
instrument outlet hose to the cooler inlet
 Note Fitting the water hoses to the cooler is easier if you soften them
in a beaker of very hot water.
12 Slide a clamp over each hose and push the hose over the
appropriate sized barb of the water cooler. Tighten the
clamps and turn on the water cooler.
 Note Some coolers have pumps that require priming. Consult the
manufacturer’s information for instructions.

Warning For the Varian 720/730-ES Series instruments, do not


turn the water cooler on unless the camera and
polychromator have been purged with gas for at least 20
minutes

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Varian ICP-OES spectrometer

13 Turn on the cooler and allow the system to cycle for about
five minutes and turn it off.
14 Disconnect the instrument return hose from the water cooler
and drain the distilled water from the system.

Caution Operation of a water cooler without water for an extended


period of time may damage the pump seals.

15 Refill the reservoir with distilled water and replace the cap.
 Note The Varian 700-ES Series ICP-OES instrument requires the
expulsion of all air pockets from the cooling system. Air pockets
in the system may cause intermittent water cooling pressure
sensing interlock errors. Allow the cooler five to fifteen minutes of
operating time to purge all the air from the cooling system.
16 Turn-on the cooler and allow it to cycle for two to five
minutes. Turn-off the cooler, remove the filler cap and check
the water level. Top up if required.
17 Replace the filler cap and access covers.
This completes the water cooler installation.

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Varian ICP-OES spectrometer

3.5 Software installation


This section assumes that the required operating system
software is loaded on the PC.
Installation instructions for Windows® are supplied with the
personal computer.
Installation instructions for the GPIB card are in section 3.5.2.

 Note When doing a 'first time' installation, it is very important to make


sure that the software driver for the GPIB card is installed before
plugging the GPIB card into the slot. The software driver for the
GPIB card is automatically installed during ICP Expert II software
installation.

3.5.1 PC Hardware requirements


The recommended and minimum PC specifications are listed in
the Varian 700-ES Series ICP-OES Specifications sheet and Pre-
Installation Manual (p/n 8510233700). They can also be found on
Varian’s Web site at www.varianinc.com. The minimum
configuration represents the absolute minimum that is required to
run the software. This PC configuration may be out of
manufacture, but you may want to use a PC you already have.
The recommended configuration should be followed when buying
a new PC.

3.5.2 Installing the ICP Expert software


To install the ICP Expert software:
1. Insert the ICP Expert II Software CD-ROM in your CD-
1
ROM drive. The software will automatically start .
2. Follow the instructions on the screen. During the
installation you will also be asked to install the provided
Microsoft® .NET Framework 2.0 and Microsoft® SQL
Server 2005 Express Edition programs (if you do not
already have these on your PC), plus the Varian
Spectroscopy Database Administration (VSDA) program.
This is necessary for the software's database storage
capability.
3. When prompted, remove the ICP Expert II software CD-
ROM from the CD-ROM drive and insert the ICP Expert
II Help CD-ROM. Follow the instructions on the screen.

4. If you are using 21 CFR 11 software, remove the ICP


Expert II Help CD-ROM from the CD-ROM drive and
insert the Varian Configuration Manager (CM) CD-ROM.
Follow the instructions on the screen, in conjunction with
your software installation instruction sheet (publication
number 8510233500).

1
If you have turned off the auto-start capability of your CD-ROM drive, you will need to run the setup.exe file
on the
CD-ROM.

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5. If you are using the Productivity Package, remove any


CD-ROMs from the CD-ROM drive and insert the Varian
Productivity Package CD-ROM. Follow the instructions
on the screen.

6. If there are Patches available for the ICP Expert II


software, remove any CD-ROMs from the CD-ROM drive
and insert the Varian Patches CD-ROM. Follow the
instructions on the screen.

7. After successful installation of the software, shut down


the PC and install the National Instruments PCI-GPIB
card into the PCI slot. Refer to section 3.5.4 for
instructions on how to do this.

333 Hot Tip To familiarize yourself with the ICP Expert II software, after
installation, click the Windows® Start button and choose
Programs > ICP Expert II > ICP Expert II Help. When the
ICP Expert II Help appears, click the How to link to view
step-by-step instructions on how to use the Varian 700-ES
series.

 Note The PCI-GPIB driver is automatically installed during ICP


Expert II software installation. When installing the ICP Expert II
software for the first time, it is very important to make sure that
the PCI-GPIB card driver is installed BEFORE plugging the
PCI-GPIB card into the slot. Therefore, do not plug the PCI-
GPIB card into the slot before installing the ICP Expert II
software.

3.5.3 PCI-GPIB driver installation


The installation of the PCI-GPIB driver occurs automatically
during software installation. After installing the software, you only
need to install the PCI-GPIB card (refer to section 3.5.4) to
complete setting up the GPIB.
At the end of the installation, a dialog box will prompt you to
configure the driver. The dialog asks if you already have a PCI-
BPIB card on your PC.
If you have a PCI-GPIB card in your computer:

1. Click Yes.

2. Follow the instructions in the Notepad window displayed


(GPIB_Install.txt) to complete the installation.
If you do not have a PCI-GPIB card in your computer:

1. Click No.

2. Once you have installed the PCI-GPIB communications


card, (refer to section 0 for details), you can configure the
PCI-GPIB card at any time. To do this, click the
Windows® Start button and choose Programs > ICP
Expert II > Config GPIB_PCI, then follow the prompts.

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3.5.4 Installing the PCI-GPIB communications card


The National Instruments PCI-GPIB card
(part number 9910102100) must be installed in your PC to
interface the PC and the Varian ICP-OES instrument.

The components on the communications card and in the PC are


Caution highly static-sensitive. To avoid damaging these components you
must drain any static charges from your body before installing the
board, and prevent the generation of any new static charges
during the installation. This can be done by wearing an ESD
(electrostatic discharge) wrist strap attached to a grounding point.
You can obtain a disposable ESD strap from Varian (part number
7910031300); or you can obtain one from your local electronics
supplier.

To install a National Instruments PCI-GPIB communications card:


1. Turn off and unplug the computer.

2. Remove the cover, following the instructions in the manual


provided with the computer.

Figure 3. Removing the PC cover

3. Attach one end of the ESD strap to a bare metal part of the
PC chassis and wrap the other end around your wrist.

Figure 4. Attaching the ESD strap to a metal part of the PC

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Remove a blanking plate from one of the empty slots in the


computer.

Figure 5. Removing a blanking plate from an empty PC slot

4. Remove the card from its static-shielded packaging. Do not touch


the gold edge connectors.

Figure 6. Incorrect and correct way to handle the card

5. Press the card firmly into the empty PC slot. The gold edge
connectors should slide firmly into the matching sockets of the
PC slot. Secure the card with the screw.

Figure 7. Sliding the card into an empty slot

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Varian ICP-OES spectrometer

6. Replace the computer cover.

Figure 8. Replacing the PC cover

7. Connect the cable between the instrument and the computer


(one end plugs into the interface board in the computer, and the
other plugs into the socket in the rear of the instrument).

8. Connect the computer to the mains power.

9. Turn the computer on.

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3.5.5 Software registration:


The ICPExpert II software licence now requires you to register
the ICPExpert II software before you may use it. The license
does allow you to ‘trial’ the software before registering for a
period of up to 60 days.
If you have not registered the software within this time, you will
be locked out of the ICPExpert II software preventing you from
opening it.
If this occurs, the ICPExpert II software will only allow you to
register the software. It will not allow you to register later.
When you first load the ICPExpert II software the following pop-
up screen will be displayed.

If you select “Register Later”, you can open the ICPExpert II


software and operate the instrument normally. However, you
must register the software within 60 days.
If you wish to register the software, select the “Register now”
button and fill in the customer and instrument details as
requested.

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After you have entered all the required data, you can register the
software via
the Internet (recommended)
Email or
Fax.

 Note: You must make an entry in all fields labeled with an asterisk ‘*”.

When you register the software, the entered information along


with some PC specific information is sent to Varian Melbourne in
the form of two files (values.xml and licence.lic). A returned file
from Melbourne (“product key.lic”) must be copied to the
ICPExpert II 7XX\Run directory for Email or Fax registrations –
for Internet registrations the returned file is copied to the
ICPExpert II 7XX\Run directory automatically.
After the returned “product key.lic” file is copied to the ICPExpert
II 7XX\Run directory, the Varian software registration process is
complete and the Varian software now complies with the Varian
software licence.
If you register the software via the Internet, the above process is
carried out automatically. If you register the software via email or
fax, the above process must be carried out manually.

 Note: This “product key.lic” file is specific to the customers PC and


the ICPExpert II software. The “product key.lic” file or the
ICPExpert II software cannot be transferred to other PC’s.

 Note: The Varian software licence allows for the ICPExpert II software
to be registered a total of two times – one on the PC controlling
the instrument and another PC that is not controlling the
instrument. If the ICPExpert II software is required on more
PC’s, a separate software package must be purchased,
installed and registered.

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3.5.5 Polychromator software (PolyAlign.exe)


The Poly Align functions are separate from the main ICPExpert II
software.
During the installation of the ICPExpert II software, the PolyAlign
software is automatically installed.
To start the poly Align software, click on the Poly Align short cut
located on the ICPExpert II program group.

 Note The Poly Align software requires Internet Explorer v6 or higher


(IE6). This requirement is due to XML technology use for
reporting Poly Align data.

 Note If you do not have have IE6, you can install the necessary IE
files by running the Setup.exe located in ..\run\MXML.

 Note You can not run the Poly Align software and the ICPExpert II
software at the same time. You must close one and open the
other.

3.5.6 Printer configuration


All non-network printers should use a parallel interface and be
connected to the LPT1 connection. The printer must be of a
model and make supported by Windows. Varian recommends
the use of the Windows Print manager. Follow the normal
Windows printer installation procedures.
• Click on the start button
• Point to settings and click on printers
• Double click on Add Printer

Follow the instructions on the screen to install the printer driver(s)


required. Both network printers and local printers can be installed
with this method.
Windows includes a printer troubleshooter in Help. For more
information refer to “print troubleshooting” in the Windows Help
index.

3.5.7 ICPExpert II Help system


The ICPExpert II Help system contains instructions on how to use
the ICPExpert II software as well as step-by-step instructions on
how to remove and install the various instrument components.

1. Click on the Windows “Start” button and select Programs f


ICP Expert II f Help.
2. When the ICP Expert II Help software appears, click on the
Hardware link or the How to link

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Varian ICP-OES spectrometer

3.7 Instrument operation

3.7.1 Sample compartment setup


The Varian 700-ES Series ICP-OES instruments will have had
the sample introduction components that was ordered with the
instrument packed for safe transportation.
For the latest instructions on how to set up and install these
components, please refer to the online help.
Specifically:

1. Click the Windows Start button and choose Programs > ICP
Expert > ICP Expert Help.
2. When the ICP Expert Help software appears, click the
Hardware link to view step-by-step instructions (including
videos) on how to remove and install the various instrument
components.Below are some instructions on how to set up
the most common types of sample introduction components.

3.7.2 Turning on the instrument


From Shutdown mode (or for the first time)
1. Check that all tubing on the torch, spraychamber, nebulizer
and peristaltic pump is correctly connected.
2. Close the torch compartment door, ensuring that the locking
lever is fully latched.
3. Switch on the computer, monitor and printer.
4. Turn on the argon gas supply.
5. If the nitrogen purge option is fitted, turn on the nitrogen gas
supply.
6. Switch on the water cooler.
7. Connect the IEEE cable between the PC and instrument.
8. Check that both the high power circuit breaker on the back
of the instrument and the low power switch on the front of
the instrument are in the OFF position.
9. Plug the mains connector into the wall.
10. To turn on the spectrometer,
a) set the RF supply circuit breaker located on the rear right-
hand side of the instrument to the ‘On’ (up) position.
b) Set the instrument power switch, located at the front left
of the instrument, to ‘|’ (the green power indicator should
light).
11. Observe the instrument start-up sequence:
-The pre-optics vertical and horizontal position stepper
motors drive to their home positions.
-The air cooling fan turns on.

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12. Switch on the laboratory exhaust system.

Warning
The plasma emits heat, ozone and fumes, which can be hazardous.
Always switch on the exhaust system before lighting the plasma.

13. Start the ICP Expert II software,


Click the Windows Start button and then choose Programs
> ICP Expert II > ICP Expert II
The Main Index window will appear.

333 Hot Tip: To familiarize yourself with the ICP Expert II software, you
should now click on the Windows Start button and select
Programs fICP Expert IIf Help. When the ICP Expert II Help
appears, select the How to link to view step-by-step instructions
on how to use the Varian 700-ES Series spectrometer and
software.

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From Standby mode

1. Check that all tubing on the torch, spraychamber, nebulizer


and peristaltic pump is correctly connected.
2. Close the torch compartment door, ensuring that the locking
lever is fully latched.
3. Switch on the computer, monitor and printer (if they are off).
4. Switch on the water cooler (if it is off).
5. The Peltier will switch on automatically. If for some reason it
has been turned off, switch on the Peltier by choosing Peltier
on from the Analyze menu.
 Note You can check if the Peltier is on by looking at the Instrument
Setup window Status page. It may take some time to reach
operating temperature. It is recommended that you wait three to
five minutes before starting an analysis.

6. If you have accessories fitted, switch them on.


7. Switch on the laboratory exhaust system.

Warning
The plasma emits heat, ozone and fumes which can be
hazardous. Always switch on the exhaust system before lighting
the plasma.

8. Start the ICP Expert II software,


Click the Windows Start button and then choose Programs
> ICP Expert II > ICP Expert II
The Main Index window will appear.

333 Hot Tip: To familiarize yourself with the ICP Expert II software, you
should now click on the Windows Start button and select
Programs fICP Expert IIf Help. When the ICP Expert II Help
appears, select the How to link to view step-by-step instructions
on how to use the Varian 700-ES Series spectrometer and
software.

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Varian ICP-OES spectrometer

3.7.3 Start a plasma


1. Close the plasma compartment door, ensuring that the
locking lever is fully latched and turn on the power to the
instrument (if you have not already done so).
2. Place the sample tubing from the peristaltic pump into the
wash solution and the drain tubing into the drain vessel.
3. Turn on the plasma by clicking the plasma on icon on the
Main toolbar or pressing SHIFT+F4 on the keyboard. The
instrument will turn on the peristaltic pump and the nebulizer.
At the completion of the full purge the nebulizer gas solenoid
will turn off. The igniter should start to spark and a plasma
should form.

 Note The plasma may not form on the first ignition attempt if the argon
purge has not fully expelled all the air from the torch
compartment.

Tip The plasma will take between 10---30 seconds to ignite.


If it fails to ignite, see Plasma not lighting details in the Help for
further information.
Tip The plasma needs to be turned on 10 minutes prior to analysis to
allow it to stabilize. See Stabilization time details in the Help for
further information.

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4. Adjust the pressure bars on the peristaltic pump for even


sample flow.
See Adjusting the pressure on the pump tubing in the Help
for further information.
5. Check that the Polychromator Boost purge is on.
To do this, click on the Main toolbar to bring up the
Instrument Setup window. Click the Status tab and check
that under the Polychromator listing Poly Boost is ’On’.

If the Poly boost purge is ’Off’ you should turn it on.


To do this:
Choose Poly Boost On from the Analyze menu in the main
window.
Reopen the Instrument Setup window.
Under Polychromator, Poly Boost should now say ’On’.
Leave the poly boost purging for at least 20 minutes prior to
performing the wavelength calibration.
Tip It is highly recommended that the Poly Boost purge be on when
performing a wavelength calibration.

 Note: If you do not intend to measure wavelengths under 190 nm you


may wish to turn the Poly boost purge off. To do this, follow the
procedure outlined in step 5 but select Poly Boost Off. Note
that the calibration may not cover the entire wavelength range.

Tip You can elect to have the Poly Boost purge turned on each time the
instrument is started up.
To do this, on the Options menu, click Preferences and then click
the General tab. Under Instrument, select On startup turn
Polychromator Boost on.

3.7.4 RF check
6. Open the Instrument Setup window (if it is not already open),
by clicking on the Main toolbar.
7. Go to Extended Diagnostics (refer to section 7.4 for details)
and select the Gasbox tab. Increase plasma flow to 18.0
L/min.
8. Go to the RF diagnostics page. Set the power value to 0.8
kW. Increment the power levels in units of 0.1 kW to 1.8 kW.
Check that there are no audible noises from the plasma at
any power setting and that there are no Error messages
reported. Return the RF power to 1.2 kW.
9. Go to the Gasbox page and set the plasma flow to 15 L/min.

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3.7.5 Nebulizer setup


The required conditions to set up the nebulizer are now present.

10. For Radial Instruments


Aspirate 1000 ppm solution of yttrium and adjust the
nebulizer pressure regulator, or the MFC flow, so that the
top part of the red colored center channel is slightly above
the top of the torch, about 1 mm.
The preferred nebulizer optimization sample for radial
instruments is 1000 ppm yttrium. 1000 ppm NaCl can be
used if necessary.
11. For Axial Instruments
Aspirate the standard solution and adjust the nebulizer
pressure for maximum net intensity for Mn at 257.610nm.

3.7.6 Argon ratio adjustment


(Varian 720/730-ES Series instruments only)
The Argon ratio is the ratio of Ar 617 to Ar 594 lines which are on
adjacent DLAs. The ratio is set for each instrument at the factory
and during installation the instrument should be adjusted for the
same argon ratio that it had when it left the factory.
The actual figure will be between 2 and 4, and will be included
with the instrument performance figures as well as inside the
polychromator, near the focus mirror DLA adjustment screw.
Because the Argon ratio is a fine measurement of camera
alignment, it will change as the polychromator temperature
stabilizes. Therefore final adjustment of the Argon ratio should be
done when the polychromator has stabilized at +35 degrees
Celsius. This may take up to 4 hours if the instrument has just
been switched on. However, the instrument will run satisfactorily
while it is stabilizing and will still give adequate results.

1. Close the ICPExpert II software and start the PolyAlign


application software (if you have not already done so).
2. Enter the Extended Diagnostics (refer to section 7.4 for
details).
3. Place the sample tubing from the peristaltic pump into the
standard solution and the drain tubing into the drain vessel.
4. Turn on the plasma by clicking on the Main toolbar or
pressing SHIFT+F4 on the keyboard and wait 10 minutes for
the plasma to warm-up and stabilise.
5. Select the Set Focus folder.
6. Check the Argon Ratio value and adjust if necessary.

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To adjust the Argon ratio;


1. Remove the polychromator access cover at the rear of the
instrument.
2. Reach into the instrument through the access hole and pull
back the “flap” of insulation material covering the focus
mirror adjustment screws.
You will find the factory adjusted Argon ratio in here.
3. Make very small adjustments to the, the top rightmost screw
(DLA screw), while watching the PC screen, until the Argon
ratio value is the same as the factory adjusted ratio, +/- 0.1.

 Note: More detail on optical alignment is covered in Section 12 of this


manual.

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3.8 Instrument Calibrations


Before starting the instrument performance tests, the dark current
scan, wavelength calibration and torch scan MUST be
completed. These can be found on the Wavelength Calibration
and Torch Align pages of the Instrument Setup window.

3.8.1 Dark Current Scan


A dark current scan is a "scan" of the detector to quantify its dark
current characteristics (that is the signal level in total darkness).
You must perform a dark current scan before performing a
wavelength calibration. To do this;

1. Start the ICPExpert II software and open the Instrument


Setup window (if it is not already open).
2. Turn on the plasma by clicking the Plasma ON icon in the
Main toolbar or pressing SHIFT+F4 on the keyboard.
3. Aspirate the blank solution.
4. Select the W/L Calib tab.
5. Perform a dark current scan
For the Varian 720/730-ES Series instruments click on the
Dark Current Scan button.
For the Varian 710-ES Series instruments click on the
Calibrate Detector button.

 Note: It will take roughly 1 to 2 minutes to calibrate the detector. Once


completed, a message will appear indicating the dark current
measurement has been completed.

6. Store the dark current results


For the Varian 720/730-ES Series instruments click on the
Store Dark Current button. .
For the Varian 710-ES Series instruments click on the
Store Detector Calib button.

This operation stores the results of the dark current scan as a


text file. These results will be saved to a text file entitled
"Dark Current.txt" located in the Program Files\Varian\ICP Expert
II 7xx\Run\Log directory on the drive on which the ICP Expert II
software is installed. You can choose to rename this file when
you save it.
For example:
C:\Program Files\Varian\ICPExpert II 725\Run\Log
The text file containing the results of the dark current scan is tab
delimited, and therefore suitable for importing into a spreadsheet.
This file contains a value for every pixel on the detector. This is
the only file which contains data for every pixel.

 Note: You will not be prompted if you overwrite a previously saved


Dark Current.txt file with a file of the same name.

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Varian ICP-OES spectrometer

3.8.2 Wavelength Calibration


The Varian 700-ES Series instrument uses an echelle image
generated by the optical system. The wavelength calibration
maps this image to the detector such that the actual wavelengths
are mapped to their corresponding region on the detector.
A wavelength calibration needs to be performed the first time the
instrument is run and when new software is loaded. It is
recommended that a wavelength calibration be performed
monthly thereafter.
A wavelength calibration must also be performed when you
change the polychromator purge gas. The gases that can be
used are either Ar or N2.
1. Start the ICPExpert II software and open the Instrument
Setup window (if it is not already open), by clicking on the
Main toolbar.
2. Turn on the plasma by clicking on the Main toolbar or
pressing SHIFT+F4 on the keyboard.
3. Aspirate the wavelength calibration solution.
4. Check that the Polychromator Boost purge is on.
To do this, click on the Main toolbar to bring up the
Instrument Setup window. Click the Status tab and check
that under the Polychromator listing Poly Boost is ’On’.
If the Poly boost purge is ’Off’ you should turn it on.
To do this: Choose Poly Boost On from the Analyze menu
in the main window. Reopen the Instrument Setup window.
Under Polychromator, Poly Boost should now say ’On’.
Leave the poly boost purging for at least 20 minutes prior to
performing the wavelength calibration.
5. Select the W/L Calib tab.
6. Perform a wavelength calibration
For the Varian 720/730-ES Series instruments click on the
Calibrate button.
For the Varian 710-ES Series instruments click on the
Calibrate wavelength button.

 Note: After a short while, a message will appear stating that the
wavelength calibration is complete, as well as indicating the
wavelength calibration range.

This operation stores the results of the wavelength calibration as


a text file. These results will be saved to a text file entitled
"Wavelength Calibration.txt" located in the Program
Files\Varian\ICP Expert II 7xx\Run\Log directory on the drive on
which the ICP Expert II software is installed.
For example:
C:\Program Files\Varian\ICPExpert II 725\Run\Log

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7. If the calibration fails prepare a new wavelength calibration


solution and try again, or you can examine the Wavelength
Calibration.txt file and determine which elements failed the
calibration.

 Note: The Wavelength Calibration.txt file is appended with the new


calibration results every time a wavelength calibration is
performed.

Tip It is highly recommended that the Poly Boost purge be on when


performing a wavelength calibration.
Tip If you do not intend to measure wavelengths under 190 nm you
may wish to turn the Poly boost purge off. To do this, follow the
procedure outlined in step 5 but select Poly Boost Off. Note that
the calibration may not cover the entire wavelength range.
Tip You can elect to have the Poly Boost purge turned on each time the
instrument is started up. To do this, on the Options menu, click
Preferences and then click the General tab. Under Instrument,
select On startup turn Polychromator Boost on.

 Note: By default a wavelength calibration uses the Wavelength


Calibration worksheet.

 Note: The Wavelength Calibration page allows for the Wavelength


Calibration file to be browsed. For example, for the Varian
720/730-ES Series instruments that run oils (or non-aqueous
solutions) a different wavelength calibration is available. The
worksheet is called “S21 Organic matrix wavelength calibration”
and allows the system to be calibrated using Canostan Metalo-
organic standard S21 (5ppm (wt)).

3.8.3 Drift Compensation


This is a regular monitoring process to correct for any wavelength
drift due to varying environmental factors such as temperature
and pressure. It involves monitoring the positions of five argon
and one carbon wavelengths in the plasma at the end of the rinse
function. Data collected is used to correct any wavelength drift to
better than 0.1 pixel. The pixel offset derived from monitoring is
used to offset the wavelengths when displaying and analyzing
spectra.

1. Click on the Calculate Drift button.

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3.8.4 Hardware Calibration


(For Varian 710-ES Series instruments only)
A hardware calibration consists of the shutter calibration and
attenuator calibration on your instrument. This procedure only
needs to be performed every 6 to 12 months.

 Note: If the Extended diagnostics are enabled, the Calibrate


Hardware button is separated into a Shutter Calibration
button and Attenuator Calibration button, so that each
calibration can be performed individually. Also, the “Calculate
drift” option is made available.

1. Start the ICPExpert II software and open the Instrument


Setup window (if it is not already open).
2. Turn on the plasma by clicking on the Main toolbar or
pressing SHIFT+F4 on the keyboard.
3. Aspirate the standard solution.
4. Check that the Polychromator Boost purge is on.
To do this, click on the Main toolbar to bring up the
Instrument Setup window. Click the Status tab and check
that under the Polychromator listing Poly Boost is ’On’.
If the Poly boost purge is ’Off’ you should turn it on.
To do this: Choose Poly Boost On from the Analyze menu
in the main window. Reopen the Instrument Setup window.
Under Polychromator, Poly Boost should now say ’On’.
Leave the poly boost purging for at least 20 minutes prior to
performing the wavelength calibration.
5. Select the W/L Calib tab.
6. Perform a hardware calibration by clicking the Calibrate
Hardware button.
Or alternatively, under Extended Diagnostics,
Click the Calibrate Shutter button.
Then Click the Calibrate Attenuator button.

 Note: After a short while, a message will appear stating that the
hardware calibration is complete.

This operation stores the results of the shutter calibration and


Attenuator calibration as text files. These results will be saved to
a text file entitled "Shutter Calibration.txt" and “Attenuator
Calibration.txt” respectively and are located in the Program
Files\Varian\ICP Expert II 71x\Run\Log directory on the drive on
which the ICP Expert II software is installed.
For example:
C:\Program Files\Varian\ICPExpert II 715\Run\Log

7. If the calibration fails prepare a new wavelength calibration


solution and try again, or you can examine either the Shutter
Calibration.txt file and/or the Attenuator Calibration.txt file
and determine which elements failed the calibrations.

 Note: The Shutter Calibration.txt file and the Attenuator Calibration.txt


files are appended with the new calibration results every time a
calibration is performed.

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3.8.5 Torch Align


The Torch Align allows you to set the pre-optics by optimizing the
horizontal or vertical position(s) so that it is looking at the
optimum part of the plasma.
The scan displays the signal (Intensity or SRBR) as a function of
the torch viewing position. The highest point in the scan is
identified by the software, and the corresponding viewing position
value is stored and used for all subsequent measurements.
The appearance of this page depends on the type of instrument
you are using. If you are using an Axial instrument, the page
displays the horizontal and vertical viewing positions of the torch.
If you are using a Radial instrument, the page will only display the
horizontal viewing position of the torch. For these instruments,
the torch’s vertical viewing position setting is stored in the
worksheet. However, if the Extended diagnostics are enabled,
the vertical viewing position can also be scanned for these
instruments.
It is recommended that you perform a torch alignment scan using
the default worksheet provided, as the software will then
determine the optimum viewing positions.
The default worksheet for torch scans is TorchAlignment.
The worksheet displayed in this field sets the operating conditions
for the torch alignment scan. If the method selected contains
more than one line then the first line is used. This file is in the
\Supplied Worksheets directory on the drive the ICP Expert II
software is installed on. It consists of a single line, 257.610 nm
Mn, which is recommended because it gives a representative
viewing range scan for most elements.

 Note: If the Extended diagnostics are enabled, the Calibrate


Hardware button is separated into a Shutter Calibration
button and Attenuator Calibration button, so that each
calibration can be performed individually. Also, the “Calculate
drift” option is made available.

1. Start the ICPExpert II software and open the Instrument


Setup window (if it is not already open), by clicking on the
Main toolbar.
2. Turn on the plasma by clicking on the Main toolbar or
pressing SHIFT+F4 on the keyboard.
3. Aspirate the standard solution.
4. Select the Torch Align tab.
5. Select the Graph Type as follows;
Intensity for high precision results
SRBR for best detection limit results.
6. Select the Horizontal for the Orientation and then press the
Torch Scan button.

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Varian ICP-OES spectrometer

 Note: The signal (Intensity or SRBR) as a function of the torch


viewing position will be displayed. The highest point in the scan
is identified by the software, and the corresponding viewing
position value is stored and used for all subsequent
measurements.

7. Select the Vertical for the Orientation and then press the
Torch Scan button.

 Note: If necessary, it is possible to change the parameters in the


default TorchAlignment file to suit your particular requirements.
However, this is not recommended as the worksheet has been
designed to produce the optimum viewing positions for the
plasma. Instead, if you need to change any of the parameters in
the TorchAlignment file, you should create another worksheet
file, which can then be selected using the Browse button in the
Scan Method. But beware if you change TorchAlignment file
parameters, as some lines (on an axial instrument) do not
exhibit a single peak.

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Varian ICP-OES spectrometer

3.9 Performance testing


The installation performance tests provided in this section are
identical to those used at the factory. The torch, spraychamber
and nebulizer that were used in final test are shipped with the
instrument. This allows comparison of analytical performance at
installation to analytical performance at the factory.

Axial Instruments - Sample Introduction Options


Option # Description Part Number
ACK Cyclone spray chamber + 98-100398-00
K Style Nebuliser
ACS Cyclone spray chamber + 98-100397-00
SeaSpray Nebuliser
ATS Twister Spray Chamber + 98-100396-00
SeaSpray Nebuliser
All tests are run using regular one-piece torch &
‘White–White’ pump tubes

Radial Instruments - Sample Introduction Options


Option # Description Part Number
RSMV S/M spray chamber + 98-100394-00
V Groove Nebuliser
RTS Twister Spray Chamber + 98-100395-00
SeaSpray Nebuliser

All tests are run using regular one-piece torch &


‘Grey–Grey’ pump tubes

 Note The factory test results are attached to the instrument, inside the
lower right side panel. They should be filed in the instrument’s log
book.
A multi-element test solution has been chosen which provides a
selection of wavelengths (both visible and ultraviolet) including
hard and soft atomic and ionic lines.

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Varian ICP-OES spectrometer

3.9.1 Test solutions


Sample/standard solution.
This multi-element test solution includes the elements required
for all installation tests, and is the same as used for the
Wavelength Calibration. The Standard/sample solution should be
made from pure distilled, de-ionized water with 1% analytical
reagent grade nitric acid (HNO3).

Element Varian 710-ES Varian 720/730-ES


Series Series
Al 5 ppm 5 ppm
As 5 ppm 5 ppm
Ba 5 ppm 5 ppm
Cd 5 ppm 5 ppm
Co 5 ppm 5 ppm
Cr 5 ppm 5 ppm
Cu 5 ppm 5 ppm
K 50 ppm 50 ppm
Mn 5 ppm 5 ppm
Mo 5 ppm 5 ppm
Ni 5 ppm 5 ppm
Pb 5 ppm 5 ppm
Se 5 ppm 5 ppm
Sr 5 ppm 5 ppm
Zn 5 ppm 5 ppm

Blank
This solution should be prepared from pure distilled, de-ionized
water with 1% analytical reagent grade nitric acid (HNO 3).

Stray light test solution


10,000 ppm Ca.

Rinse
This solution should be prepared from pure distilled, de-ionized,
acidified water or use the Blank solution.

3.9.2 Performance tests


The performance of the instrument is determined by four tests:
1. Resolution test
2. Analytical tests - Net intensity, SBR, short term precision,
calibration accuracy.
3. Detection limit test
4. Stray light - Not required for installation

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Varian ICP-OES spectrometer

Notes:-
• All tests should be run under stable ambient environmental
conditions.
• Make sure torch, nebulizer, spraychamber, pump tubes etc....
are clean and in good working condition before starting up the
instrument.
• Polychromator heater and boost gas purge should be turned
on for at least 2 hours before running all tests.
• Plasma should be on for at least 10 minutes before testing.
• The peltier cooling should be on for at least 5 minutes before
testing.
• A Dark Current scan should be completed before testing.
• A valid Wavelength Calibration must be run before testing.
• For Varian 720/730-ES Series instruments, the Argon ratio
should be measured and be within ±0.5 of the factory setting.
• Vertical and horizontal pre-optics positions should be
optimised with the Mn 257.610 nm line for net intensity

 Note Nebulizer optimization should be done only after the instrument


has been set to these operating conditions.
- Horizontal - 0 +/-1mm (axial & radial)
- Vertical - 0 +/-1mm (axial only)
- Vertical 10 +/- 2 mm (radial only)
• Nebulizer
Axial:- Set (either manually for MFC or pressure regulator, or
automatically using AutoMax for MFC) for maximum net
intensity of Mn 257.610
Radial:- Set manually by aspirating 1000ppm Y solution.
Adjust nebulizer flow until the red bullet just protrudes above
the top of the torch (about 1 mm).

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Varian ICP-OES spectrometer

Instrument conditions
All tests use the following conditions unless otherwise stated.

Power 1.2 kW
Plasma gas 15 l/min
Auxiliary gas 1.5 l/min
Nebulizer flow setting # see 5 below
Pump tubing White-White (inlet - axial),
Grey-Grey (inlet - radial),
Blue-Blue (outlet)
Pump speed 12 rpm
Horizontal and vertical position Optimized for Mn257
Points/peak 2
Replicate read time 3 sec (10 sec for DL test)

(Varian 710-ES series 10 sec (15 sec for DL test)


instruments only)
Replicates 10 (5 for DL test)
Background correction None
Sample delay 25s
Stabilization time 15s
Rinse time 60s
Polychromator boost purge ON
Snout purge ON (radial only)

The spraychamber and nebulizer are assumed to be clean and


well wetted.
In order to perform these tests a full sample introduction system
must be installed and a plasma must be ignited.
1. Ignite a plasma.
The instrument will turn on the peristaltic pump and the
nebulizer. At the completion of the full purge the nebulizer
gas solenoid will turn off. The igniter should start to spark and
a plasma should form. Leave the plasma running and allow
the instrument to warm up for 10 minutes before moving on
to the next step.
2 Go to Extended Diagnostics and select the Gasbox page.
Increase plasma flow to 18.0 L/min.

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Varian ICP-OES spectrometer

3 RF check
Go to the RF diagnostics page. Set the power value to 0.8
kW. Increment the power levels in units of 0.1 kW to 1.8 kW.
Check that there are no audible noises from the plasma at
any power setting and that there are no Error messages
reported. Return the RF power to 1.2 kW.
4 Go to the Gasbox page and set the plasma flow to 15 L/min.
5 Nebulizer setup - Radial
Aspirate 1000 ppm solution of yttrium and adjust the
nebulizer pressure regulator, or the MFC flow, so that the
top part of the red colored center channel is slightly above
the top of the torch, about 1 mm.
The preferred nebulizer optimization sample for radial
instruments is 1000 ppm yttrium. 1000 ppm NaCl can be
used if necessary.
Nebulizer setup - Axial
Aspirate the standard solution and adjust the nebulizer
pressure for maximum net intensity for Mn at 257.610nm.

Performance Test Procedure:


1. Turn on the PC and start the ICPExpert II software.
2. When the ICPExpert II software has loaded,
select the Instrument button
3. Enter the Extended Diagnostics password.

4. Select the WINDOW pull-down menu.


After you enter the password above, this will now display a
selection called ‘Instrument Tests’

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Varian ICP-OES spectrometer

5. Select ‘Instrument Tests‘.


This will now show the Instrument Tests Wizard as shown
below.

6. Press ‘Create new instrument test worksheets’.

This will create a new directory in the SQL database that is


date stamped and copy the appropriate performance test
worksheets into this directory.

For example, a performance test carried out on the 3rd of


February, 2006 will show as follows

JINTERLANDI-
WXP\VARIAN|VAIMDB_SuppliedWorksheets(000)|Instrume
nt Tests\3_02_2006 5_30_40 PM

This will also create a new directory on the PC that is date


stamped as follows.

C:\Program Files\Varian\ICPExpert II 725\Run\Instrument


Tests\3_02_2006 5_30_40 PM

ES_PerformanceResults.xml

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Varian ICP-OES spectrometer

7. Press Run the latest test worksheets.

This will open the newly created test worksheets in the ICP
Expert II software.

This will also open an Instrument Setup dialog box


Select the Sample Introduction system that you have on
your Instrument

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Varian ICP-OES spectrometer

8. Run the test worksheets and collect the required data.


At the end of the analysis – save each worksheet.

9. Go back to the instrument test wizard using the Window pull-


down menu.

10. Press Generate instrument test reports.

11. You will be asked if you would like to generate a report using
the data in this directory.
Press ‘Yes’ if the directory is correct.
Press ‘No” and select the appropriate directory.

12. Enter the appropriate instrument data in the Information


page of the Instrument Tests Form.

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Varian ICP-OES spectrometer

13. To print the report select the ‘File’ pull-down menu and
select ‘Print…’

14. Select the data you want to display in the report by ticking
the box.

15. Select OK and this will generate the Instrument test report
as normal. (About 4 or 5 pages)

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Varian ICP-OES spectrometer

16. Alternately you can save a copy of the Instrument Test


Report and store it on the PC.
To save the report select the ‘File’ pull-down menu and
select ‘Save’

This will save a file called


ES_PerformanceResults.xml
Under the date stamped directory that was created earlier
on the PC

For example
C:\Program Files\Varian\ICPExpert II 725\Run\Instrument
Tests\3_02_2006 5_30_40 PM

To view the Instrument test report created above


(ES_PerformanceResults.xml), you need to run the
Instrument Test Viewer software.
To do this, double click on the file called
instrumenttestviewer.exe
that is located in the directory:
C:\Program Files\Varian\ICPExpert II 725\Run\Tests
Then Select the ‘File’ pull-down menu and select ‘Open’
Select the appropriate file and Select OK.

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Varian ICP-OES spectrometer

Performance Test descriptions:


This section details the analytical performance tests for the
Varian 700-ES Series instruments fitted with any of the allowable
pump/nebuliser control options. Specifications for different
sample introduction options are provided as required.
Performance of the Switching Valve supplied with Varian 730-ES
Series instruments is not included.
The document covers test methods and solutions together with
acceptable analytical performance limits. The tests assume all
checks & alignment procedures required during instrument
testing are complete.
Abbreviations for the different sample introduction options are
detailed below;
Option # Description
ACK Cyclone spray chamber + K Style Nebuliser
ACS Cyclone spray chamber + SeaSpray Nebuliser
ATS Twister Spray Chamber + SeaSpray Nebuliser
RSMV S/M spray chamber + V Groove Nebuliser
RTS Twister Spray Chamber + SeaSpray Nebuliser

All tests are run using the regular one-piece torch


‘White–White’ pump tubes (Axial instruments)
‘Grey–Grey’ pump tubes (Radial instruments)

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Varian ICP-OES spectrometer

3.9.3 Resolution test


This test measures the peak width of a suite of analytical lines
distributed over the surface of the chip and compares them to a
specification. This test requires an analysis to be run using the
worksheet ‘ICP-OES 71x_Resolution' or
‘ICP-OES 72x_Resolution' and the multielement standard and
blank solutions. The Instrument Test software will use the data
from this worksheet to calculate the Full Width at Half Maximum -
FWHM (that is, the width of the peak at half its height). Results
are generated and displayed in the Installation Performance tests
results.

Resolution specification
The spectral resolution (FWHM) should be less than or equal to
the following:

Wavelength Varian 710-ES Varian 720/730-ES


(nm) Series (pm) Series (pm)
Al 167.019 9.7
N 174.213 9.4
As 188.980 10.5 8.2
C 193.027 11.5
Mo 202.032 8.2
Cr 206.158 13.4
Zn 213.857 11.5 8.7
Pb 220.353 9.5
Co 228.615 17.2
Ba 230.424 9.4
Mn 257.610 13.3
Mn 260.568 20.3
Cr 267.716 11
Cu 324.754 25
Cu 327.395 14.2
Sr 338.071 42 33.5
Ba 455.403 55 44
Sr 460.733 36
Ba 493.408 36
Ba 614.171 42
Ar 675.283 88 74
K 766.491 101 80

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Varian ICP-OES spectrometer

3.9.4 Analytical Tests


This test completes an analytical calibration by running the
multielement standard and blank, then runs the standard as a
sample. This test requires an analysis to be run using the
worksheet ‘ICP-OES 71x_QC' or ‘ICP-OES 72x_QC' and the
multielement standard and blank solutions.
The data obtained from the calibration is used to calculate SBR
and also measures short term precision and calibration accuracy.

Notes;
Check that the viewing height (radial) and nebulizer flow are
set to the optimum values in the worksheet.
Ensure adequate delay time for each solution before
pressing READ.
Ensure adequate rinsing (60 sec) after the standard solution.
The V groove nebuliser may take longer to wash-out than
the glass concentric type
(particularly for sensitive lines like Ba and Mn).

SBR specification -
Signal to background ratio (SBR) for each line is calculated as
follows:
SBR = (Total intensity - blank intensity) / blank intensity
SBR measured should be greater than or equal to the following:

Varian 710-ES Series Instruments


Note – For radial instruments (715-ES) the UV results should be
ignored if the optional snout is not fitted

Element Varian 710-ES Varian 715-ES


Pb 182.143 7.2 2.7
As 188.980 13 6
Se 196.026 7.5 3.8
Zn 206.200 60 11
Pb 220.353 12 3.4
Co 228.615 49 15
Ni 231.604 34 11
Cu 327.395 15 9
K 766.491 37.5 2.3

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Varian ICP-OES spectrometer

Varian 720-ES and Varian 730-ES Instrument


Element S’Intro ACK,ACS S’Intro ATS
Al 167.019 300 265
Pb 182.143 11 9
As 188.980 15 12
As 193.696 7.5 6
Se 196.026 9 7
Zn 206.200 115 90
Zn 213.857 190 150
Cd 214.439 260 210
Pb 220.353 15 12
Mn 257.610 375 300
Cr 267.716 52.5 45
Cu 324.754 22.5 19
Al 396.152 7.5 6
Ba 493.408 75 60
K 766.491 30 24

Varian 725-ES and Varian 735-ES Instrument


Element Customer Customer
S’Intro. RSMV S’Intro. RTS
Al 167.019 75 112
Pb 182.143 6 8
As 188.980 7.5 11
As 193.696 6 9
Se 196.026 4.5 6.5
Zn 206.200 15 22
Zn 213.857 110 150
Cd 214.439 56.5 85
Pb 220.353 3.8 6
Mn 257.610 150 225
Cr 267.716 22.5 34
Cu 324.754 19 26
Al 396.152 3.8 6
Ba 493.408 75 112
K 766.491 2.3 4

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Varian ICP-OES spectrometer

Typical Intensities
The following typical intensity values are provided for diagnostic
purposes. They do not form part of the specification.

Varian 710-ES Instrument


Line Standard Blank
Intensity Intensity
Pb 182.143 1200 70
As 188.980 2600 100
Se 196.026 2100 140
Zn 206.200 14000 80
Zn 213.857 110000 330
Pb 220.353 10000 400
Co 228.615 55000 525
Ni 231.604 25000 340
Cu 327.395 150000 4000
K 766.491 2800000 27000

Varian 715-ES Instruments


Line Standard Blank
Intensity Intensity
Pb 182.143 60 7
As 188.980 120 11
Se 196.026 100 13
Zn 206.200 260 8
Zn 213.857 6400 30
Pb 220.353 300 35
Co 228.615 2000 50
Ni 231.604 700 30
Cu 327.395 12000 350
K 766.491 35000 4000

Note – For radial instruments (715-ES) the UV results should be


ignored if the optional snout is not fitted

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Varian ICP-OES spectrometer

Varian 720-ES and Varian 730-ES Instruments


fitted with ACK & ACS
Line Standard Blank
Intensity Intensity
Al 167.019 100000 75
Pb 182.143 5500 200
As 188.980 12000 300
Se 196.026 8000 400
Zn 206.200 60000 250
Cd 214.439 400000 600
Pb 220.353 30000 1000
Mn 257.610 1900000 2500
Cr 267.716 350000 3000
Cu 324.754 350000 6500
Al 396.152 300000 17000
Ba 493.408 11000000 50000
K 766.491 3500000 50000

Varian 725-ES and Varian 735-ES Instruments


fitted with RSMV
Line Standard Blank
Intensity Intensity
Al 167.019 1800 7
Pb 182.143 250 15
As 188.980 450 20
Se 196.026 370 30
Zn 206.200 900 20
Cd 214.439 7000 50
Pb 220.353 700 65
Mn 257.610 70000 200
Cr 267.716 12000 200
Cu 324.754 30000 700
Al 396.152 15000 1500
Ba 493.408 800000 5000
K 766.491 37000 6000

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Varian ICP-OES spectrometer

Short-term precision specification


The precision for the 10 replicates of sample readings on the
multielement standard should be less than the following:

Varian 710-ES Instruments


Element Specification
As, Se & K 1 % RSD
Co, Ni, Pb, Zn (206) 1.6 % RSD
All other lines 2% RSD

Varian 715-ES Instruments


Element Specification
As, K, Se, 2.6 %RSD
All other lines 1.5 %RSD

Varian 720-ES and Varian 730-ES Instruments


Element Specification
All lines 1.5 %RSD

Varian 725-ES and Varian 735-ES Instruments


Element Specification
Al167, As, Pb & Se 2.6 %RSD
All other lines 1.5 %RSD

Calibration accuracy
The individual concentration read back value of the multielement
standard measured as a sample immediately after a calibration
should be within the following limits:

Varian 700-ES Series Instruments


Specification
Limits ±3%

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Varian ICP-OES spectrometer

3.9.5 Detection limit test


This test requires an analysis to be run using the worksheet
‘ICP-OES 71x_DL' or ‘ICP-OES 72x_DL' and the multielement
standard and blank solutions, and rerunning the blank as five
separate samples.
The data obtained from this worksheet is used to calculate the
Detection Limit (ppb) as 3000 times the average of the standard
deviation of the five samples (Rerun of Blank).

Notes:
* Check that the viewing height (radial) and nebulizer flow are
set to the optimum values in the worksheet.
* Ensure adequate delay time for each solution before
pressing READ
* Ensure the Blank solution is not contaminated.
* Ensure that sufficient rinse time is allowed after the standard
solution.
This is important when using the V groove nebuliser as it
requires a longer rinse time than the glass concentric type,
especially for sensitive lines like Ba and Mn.
* This test uses only 10 sec. sample measurement time and
compromised conditions for all lines, thus whilst it provides
acceptable confirmation of performance, detection limits
measured with these conditions cannot be directly compared
with those achieved/published using optimised conditions.

Detection limits (ppb) must be less than or equal to the following:

Varian 710-ES Detection limit (10 sec.) specification


Line Specification
(10 Sec.)
As 188.980 10
Pb 220.353 6.5
Mn 257.610 0.2

Varian 715-ES Detection limit (10 sec.) specification


Line Specification
As 188.980 65
Pb 220.353 65
Mn 257.610 0.9

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Varian ICP-OES spectrometer

Varian 720-ES and Varian 730-ES


Detection limit (10 sec.) specification
Line Sample Intro. Sample Intro.
ACK, ACS ATS
Al 167.019 2 2
As 188.980 10 10
Se 196.026 13 13
Mo 202.032 2 2
Cd 214.439 0.5 0.5
Pb 220.353 6.5 6.5
Mn 257.610 0.2 0.2
Cr 267.716 2 2
Cu 324.754 2 2
Al 396.152 6.5 6.5
Ba 493.408 0.7 0.7
K 766.491 20 20

Varian 725-ES and Varian 735-ES


Detection limit (10 sec.) specification
Line Sample Intro. Sample Intro.
RSMV RTS
Al 167.019 13 9
As 188.980 65 45
Se 196.026 80 50
Mo 202.032 11 8
Cd 214.439 5.5 4
Pb 220.353 65 45
Mn 257.610 0.9 0.6
Cr 267.716 5.5 5.5
Cu 324.754 5.5 5.5
Al 396.152 13 13
Ba 493.408 0.9 0.9
K 766.491 265 265

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Varian ICP-OES spectrometer

3.11 Customer training


This section provides a checklist which can be used as a guide
when conducting preliminary customer training.
It is not intended as formal applications training.

8 Provide the customer with a basic system overview.


Point out the major functional blocks of the system
including the spectrometer PC, any accessories and
water cooler.
8 Provide the customer with a basic overview of the
support facilities.
Point out and explain the operation/requirements of the
electrical connections, gas supply and filters, extraction
system and waste container.
8 Show the customer how to assemble the sample
introduction system.
This should include a demonstration on torch height,
transfer tube, snout fitting and alignment, pump tubing
setup, peristaltic pump pressure bar adjustments,
spraychamber setup. Discuss the importance of dead
volume reduction in the sample introduction system.
Discuss aspects of the nebulizer, ASA (if required) and
spraychamber maintenance.
8 Turn the instrument and PC on.
Provide a brief explanation of the instrument’s start-up
routine.
8 Start the ICPExpert II software and explain the three
buttons on the welcome screen.
8 Provide a brief explanation of the general layout of the
ICPExpert II software.
Indicate the way to obtain built in support help.
8 Show how to set the Preferences, specifically
highlighting the Polychromator purge option.
8 Select Instrument Setup and show the customer the
Status folder. State that you will refer back to this page
as you go along. Point out the RF, peristaltic pump,
polychromator, plasma and gas box status.
8 Go to the W/L Calib folder and use the Calibrate button.
Show the other functions in this folder. Press f1 and
show the help for the folder.
8 Go to the Torch Align folder. Perform a torch alignment
using Mn 257.610.
8 Go to the Autosampler folder. Show the functions on
this page
8 Close Instrument Setup window

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Varian ICP-OES spectrometer

8 Go to the general Diagnostics Window.


8 Go to the Ignition folder, briefly explain that the ignition
values are optimized and can not be changed. Ignite
the Plasma. Show the customer the delay values and
Press f1.
8 Go to the Status folder. Point out the changes
8 Aspirate de-ionized water and demonstrate optimization
of sample aerosol into spraychamber and drain from
spraychamber.
8 Select Torch alignment. Aspirate the multi-element test
solution and perform a horizontal scan using Mn 257
nm. Explain the limits of this function. For radial
instruments include an explanation of the need to
establish program condition prior to performing viewing
height alignments. For axial instruments include vertical
alignment.
8 Close the Diagnostics window.
8 Select the Worksheet button.
8 Select the NEW button and name it Demo.
Click on “save”.
8 Select the Edit method button

Method editor

8 Select Al 167 (you will require full polychromator purge


for this line), Ba 455, and Cu 324 as analytes. Select B
182 as an interferent to Cu. Select Mn as an Internal
Std element. Explain these actions while performing
tasks.

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Varian ICP-OES spectrometer

8 Select the Conditions folder. Aspirate the multi-element


test solution. Select Cu, and show how to change the
wavelength.
8 On Radial instruments, note the Viewing height value.
Perform a torch scan (from the Instrument Setup
window) by SBR and Intensity and note the change in
Viewing height values.
8 Show how to set the nebulizer pressure using Yttrium
on a radial instrument, and Mn 257 on an axial
instrument.
8 Show the AutoMax feature and the theory of
optimization in the Help.
8 Aspirate the multi-element solution and perform a Time
scan. Press F1 and review the Conditions folder
options.
8 Select the Interelement Corrections folder from the icon
on the toolbar and Press F1. Show the customer how to
determine the Interference factor for B on Cu

8 Select the Corrections folder. Select fitted correction.


Explain the setting of Offpeak BC correction points.
Close corrections folder.

8 Select the Standards folder and enter 5 ppm for each


line. Explain all fields and use of numbered standards.

8 Enter the Calibration Parameters window and tick force


curve “thru blank” for each line. Explain all fields.

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Varian ICP-OES spectrometer

8 Select the QC Test folder. Select one of the QC Tests


and tick the QC Test checkbox. Discuss the options
and show the F1 Help for this section. Leave the rest of
the tests for the customer to investigate on their own.

8 Save the program. Explain storage of program.


Store program as “DEMO”.
8 Close the Method editor and go to the Sequence folder.
8 Select Manual Sample source and left click on Sample
Label, then right click to show how to increment sample
labels and weight and volume corrections. Highlight the
use of Manual Sample source to customers with and
without SPS accessories.
8 Save the program.
8 Open the Analysis folder. Explain the toolbar icons and
highlight the dialogs. Show the various column and cell
selections. Run standard, blank and standard as a
sample.
8 Change the views as the instrument runs. Explain the
Reports settings. Show the Print preview and print the
report.
8 Go to Export settings and explain the different
extensions.
8 Explain to the customer how to leave instrument at the
end of the day. Aspirate de-ionized water for five
minutes. Release the pump tube tension. Turn the
instrument off.
8 Have the customer leave the Argon turned on so that
for the 720/730-ES series instruments, the camera is
continually purged.

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Varian ICP-OES spectrometer

8 Provide the customer with an overview of the


maintenance requirements for the system.
This should include:
• Weekly cleaning of the snout and torch.
• Regular inspection of sample introduction tubing
for wear and possible air leaks (particularly
stretching of pump tubes).
• Weekly Inspection of cooling air fan filter at rear of
instrument for build up of dust/lint.
• Weekly checking of water level in the water cooler
and monthly inspection/cleaning of water cooler air
filter.
• Review the Details tab in the software and show
where the filter hours are located.
• Review the replacement of policy of the
polychromator purge charcoal filter every 1200-
1500 hours. Show the customer how it is attached
to the rear of the instrument and highlight the
Swagelok fittings.
• Review the cleaning of the inlet water particulate
filter. Show the customer where it is located and
how it is disassembled and re-assembled.

8 Discuss the requirement for professional preventative


maintenance of the Varian 700-ES Series system on a
yearly basis.
8 Instruct the customer on use of the Instrument Log
Book.

Publication date: 7/02/2007 57


Varian ICP-OES spectrometer

Appendix
A.1 Additional performance tests (optional)
The following tests are not required during installation but may be
useful in further characterizing instrument performance.
A.1.1 Stray light test
This test requires an analytical calibration with the multielement
standard and blank solutions, then measuring the 10,000 ppm
Ca solution and the multielement standard as Samples. The
stray light is reported as the As concentration measured from the
10000 ppm Ca solution.

Procedure
1. Select ’Open’ worksheet ICP-OES 7XX_Stray in the
Supplied Worksheets folder. Keep the same name and save
it to the appropriate \instrument Tests\date stamped sub-
directory.
2. Check that the viewing height (radial) and nebulizer flow are
set to the optimum values in the worksheet.
3. Go to Analysis page and ensure adequate delay time
between every sample before pressing OK.
4. Aspirate the multielement standard solution, select
STANDARD 1 and press OK.
5. Aspirate the blank solution, select BLANK and press OK.
6. Aspirate the 10,000 ppm Ca solution, select SAMPLE 1 and
press OK.
7. Aspirate the multielement standard, select SAMPLE 2 and
press OK.
8. Ensure adequate rinsing (60 sec.) after each solution
(except blank).
9. If the read back value of the multielement standard is less
than or greater than 2% of its original concentration, repeat
the test.

Stray Light specification


The stray light should be less than or equal to the following:

Varian 710-ES

Element ppm
As 188.980 1.5

Varian 715-ES

Element ppm
As 188.980 3.0

Varian 720/730-ES series

Element ppm
As 193.696 2

Publication date: 7/02/2007 58


Varian ICP-OES spectrometer

Publication date: 7/02/2007 59


Varian ICP-OES spectrometer

A.1.2 Long term precision specification (Optional)

This test is optional.


Use the Analytical tests method and data to check this.
The precision of Mn 257.610 line measured at any time during
the hour after an analytical calibration should be less than the
following:

Long term precision 5 %RSD

Publication date: 7/02/2007 60


4 Preventative
maintenance
4.1 Introduction
The Varian 700-ES Series instruments require regular
maintenance to ensure continued optimum performance. This
section provides a preventative maintenance plan to be
completed at intervals of 12 months for the system by a Varian-
trained service representative.
The maintenance plan includes a procedure and checklist. The
procedure has been designed to provide a logical sequence of
events, allowing the engineer to proceed from one item to the
next with a minimum of delay.
Upon completion of the maintenance visit both engineer and
customer should sign the checklist. Any notable observations
(e.g. corrosion, inoperative facilities, etc) or any corrective action
not completed should be included in the comment section. The
completed checklist, printouts and archived files should be stored
in a safe place for future reference. These will form the basis of
the instrument’s history and act as a valuable reference for future
preventative maintenance actions.

4.2 Maintenance overview


The best performance indicators for the Varian 700-ES Series
instruments are the installation performance tests described in
section 3 of the service manual. These tests quantify the
performance of the sample introduction system, optics and
plasma generation system.
A shortened version of the analytical performance test is
conducted first. This provides a bench mark of the instrument’s
performance before any work has been started. A second
analytical performance test is done in its entirety to ensure that
the instrument is performing satisfactorily at the end of the
preventative maintenance procedure.
Maintenance requirements for the water cooler are available in
the manufacturer’s literature.
Note: Some of the items inspected/replaced during the preventative
maintenance visit are considered by Varian to be consumable
items. Consumable items are highlighted on the checklist. If the
consumables are not covered by local maintenance contract they
will only be replaced at the customer’s expense.
Varian 700-ES Series Spectrometer

4.3 Initial performance test


1. Turn on the spectrometer system and ignite plasma.
2. Enable service diagnostics and ensure the poly boost
purge and snout/cone purge is enabled.
3. Go to the Details tab in the Instrument Setup window
and print this screen
- press Alt & PrintScreen,
- open “Paint”,
- press Ctrl & V,
- select File,
- select Print).
Date the print-out and place in log book.
4. Allow 20 minutes warm up time, if the argon purges were
not turned on.
Allow 5 minutes warm up time if the purges were on.
5. Aspirate the multi-element test solution.
6. Go to the W/L Calib tab in the Instrument Setup window
and perform a Dark Current Scan
- click the Dark Current Scan button.
The message “Dark Current Measurement completed.”
is displayed on completion.
- Click “Store Dark Current” to save the results.
The file name is Dark Current.txt and is stored under
C:\ProgramFiles/Varian/IcpExpert/Run/Log.
- View this file and ensure that the values within the file
are as expected.
7. Perform a wavelength calibration
- click the Calibrate button with the multi-element test
solution aspirating.
The message "Wavelength Calibration completed…”
is displayed.
The results will be automatically stored in a file named
WavelengthCalibration.txt and is located under
C:\ProgramFiles/Varian/IcpExpert/Run/Log.
- View this file and ensure that the values within the file
are as expected.
8. Perform a Calculate Drift
- click the Calculate Drift button.
When the test is complete, the button will again be
active.

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4-2
Varian 700-ES Series Spectrometer

9. For the Varian 710-ES Series instruments only.


Perform a Shutter Calibration.
- click the Calibrate Shutter button with multi-element test
solution aspirating.
The message "Hardware Calibration completed”
is displayed.
The results will be automatically stored in a file named
ShutterCalibration.txt and is located under
C:\ProgramFiles/Varian/IcpExpert/Run/Log.
- View this file and ensure that the values within the file
are as expected.
10. For the Varian 710-ES Series instruments only.
Perform an Attenuator Calibration.
- click the Calibrate Attenuator button with the
multi-element test solution aspirating.
The message "Hardware Calibration completed”
is displayed.
The results will be automatically stored in a file named
AttenuatorCalibration.txt and is located under
C:\ProgramFiles/Varian/IcpExpert/Run/Log.
- View this file and ensure that the values within the file
are as expected.
11. Click the Torch Align tab on the Instrument Setup window.
Perform torch scan.
- click the Torch Scan button while aspirating the
multi-element test solution.
For axial instruments perform a vertical and horizontal
scan.
For radial instruments perform a horizontal scan only
(for more information refer to the Operation Manual.)
12. Optimize the nebulizer using 1000 ppm yttrium (radial) or
the Mn SBR using the multi-element solution (axial).
13. Open the Vista 7XX_QC worksheet
(from the Supplied Worksheets directory) and save it in
the My Results directory.
14. Aspirate the multi-element test solution and read it as a
sample.
15. Print-out the sample intensities.
These intensities will bench mark the light throughput
before and after the replacement of the pre-optics window.
Save the print-out for future use.

Publication date: 2/7/2007


4-3
Varian 700-ES Series Spectrometer

4.4 Water cooling system


1. Refer to the manufacturer’s service instructions for details.
2. Turn the water cooler off.
3. Disconnect the instrument return hose from the water
cooler and allow it to drain into an appropriate container.
4. Turn-on the water cooler and drain the water into a waste
container.
5. Turn off the water cooler and disconnect it from the mains
supply.
6. Remove the water cooler’s condenser fins’ protective
screen, front and top cover.
7. Clean condenser fins and protective screen.
8. If the water cooler is equipped with an air filter on the
condenser, clean or replace as necessary.
9. If the water cooler is equipped with a water filter, clean or
replace as necessary.
10. Remove the pump strainer and clean it by rinsing with tap
water. Replace if necessary.
11. Lubricate the water cooler pump motor bearings according
to manufacturer’s specification.
12. Re-install covers on water cooler.
13. Remove top filler plate (fill plug cover).
14. Fill water cooler with coolant as recommended by the
water cooler manufacturer.
15. Reconnect the water cooler to the mains supply and turn-
on the water cooler.
Allow five minutes to purge the air through the system.
16. Turn-off water cooler and remove fill plug.
17. Check that the water level is at top of the fill plug.
Top up if necessary and re-install top filler plate.
18. Turn-on the water cooling system.
19. Check that the water cooler set temperature is at 25°C
(77 °F).
20. Check that the pressure gauge on the cooler (if fitted)
reads 240 kPa, (35 psi).
Note: The maximum pressure of the water cooler system should not
exceed 310 kPa (45 psi).

Publication date: 2/7/2007


4-4
Varian 700-ES Series Spectrometer

4.5 Instrument
1. Remove right front panel.
Clean or replace the pre-optics window as required.
2. Check the scanning mirror shaft for free movement;
lubricate shaft with Fomblin grease if required.
3. Inspect the cables and connectors for wear and signs of
overheating.
4. Clean air inlet filter on top of instrument.
5. Remove left front panels.
Remove the tube that connects from fan to the base of RF
triode.
6. With a vacuum cleaner clean out honeycomb screen
below RF triode socket.
7. Inspect the water cooling hoses from the water cooling
system to the water cooling manifold for cracks and leaks.
8. Turn-on the extraction system and using a soft tissue (or
similar), ensure that the flow of the extraction system is
adequate.
9. Enable extended service diagnostics.
10. Go to Instrument Diagnostics RF page.
11. Turn-on the filament power supply.
12. Check operation of water flow switch by turning-off the
water cooling system and observing that the PC displays a
‘Low water flow’ error message.
13. Turn-on the water cooling system.
14. Reduce the argon inlet supply to 450 kPa (60 psi).
15. Ignite a plasma.
Note: If the error message ‘Low argon flow’ is displayed during
torch ignition this indicates that the argon inlet sintered
filter assembly is partially blocked and requires replacing.
If this happens follow steps 19 to 22.
16. Turn-off the argon supply.
17. Remove the argon supply hose from the argon inlet filter
assembly.
Access to the gas control unit is from the right side rear of
the instrument behind the panel underneath the
polychromator purge filter.

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4-5
Varian 700-ES Series Spectrometer

18. Remove the argon inlet sintered filter assembly. Clean or


replace as necessary.

Caution Replacing the argon inlet sintered filter assembly requires


the use of Loctite 569. When installing the new assembly,
apply a small amount of Loctite to the threads of the
brass nipple and ensure the adhesive does not come into
contact with the sintered filter. Loctite will cure in the
absence of oxygen and can restrict argon flow.
19. Inspect the gas hoses for cracks and wear.
20. Replace all gasbox filters.
The gas filters must be replaced at least every 12 months.
Under certain circumstances it may be necessary to
change the gas filters sooner. These circumstances are as
follows:
Drie-rite filter – replace it if it is more than 25% pink.
Charcoal filters – replace if they have been run for
more than 1500 hours.
0.1 micron molecular sieve filter – replace if run for
more than 1500 hours.

Note 1. You can also bake the crystals in a laboratory


oven until they turn blue again.

Note 2. Go to the DETAILS tab in the Diagnostics or


Instrument Setup page to determine the operating hours.
21. Re-install the argon supply hose.
22. Set the argon inlet supply to 550 kPa (80 psi).

4.6 Accessories
1. Inspect accessories according to checklist*.
Perform any actions as required.

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4-6
Varian 700-ES Series Spectrometer

4.7 Sample introduction system


1. Inspect tubing according to checklist*.
2. Radial instruments only:
Inspect torch and bonnet.
Clean if necessary.
Inspect snout for salt build-up around viewing slot.
Clean if necessary.
3. Axial instruments only:
Remove cooled cone interface and inspect plastic
insulator for signs of arcing or degradation.
Replace if necessary.
4. Remove the nebuliser from the spraychamber.
5. Inspect nebuliser for chips/cracks.
Clean/replace if necessary*.
6. Go to Service Diagnostics – Quick page and turn the
Nebulizer gas supply to ‘On’.
7. Set Pump speed to 15 rpm.
8. Aspirate water and observe that the spray from the
nebuliser is delivered uniformly and in a conical pattern.
9. Turn off the Nebulizer gas supply and the peristaltic pump.

Caution Do not touch the sand blasted surfaces of the


spraychamber.
10. Disassemble and inspect spraychamber.
Clean if necessary.
11. Inspect spraychamber O-rings to ensure they are in a
satisfactory condition.
Replace if necessary*.
12. Re-assemble spraychamber.
13. Disassemble ASA (if required) and using a mild detergent
clean the bowl.
14. Inspect ASA (if required) O-rings to ensure that a
satisfactory seal will be made.
Replace if necessary*.
15. Fill the ASA (if required) with 100 mL of de-ionized/distilled
water.
16. Go to Gasbox Diagnostics page and turn Nebulizer gas
supply to ‘On’.
17. Disconnect nebuliser gas supply hose from ASA and
ensure that there is no argon gas escaping.
18. Disconnect ASA from nebuliser gas outlet and ensure
water does not retreat up ASA gas supply hose.
19. Turn off the Nebulizer gas supply and reconnect ASA
hoses.

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4-7
Varian 700-ES Series Spectrometer

4.8 Performance tests


1. Enable extended service diagnostics
2. Ignite plasma.
3. Increment RF power from 0.7 kW to 1.8 kW in 0.1 kW
steps, ensuring plasma operates without an audible buzz,
and/or does not display a “power unobtainable” error
message.
4. For the Varian 720/730-ES Series instruments only.
Start the PolyAlign software and record the Argon Ratio
value.
Compare this value to the factory setting and adjust if
necessary.
5. Start the ICPExpert II software and aspirate the multi-
element test solution
6. Go to the W/L Calib tab in the Instrument Setup window
and perform a Dark Current Scan
- click the Dark Current Scan button.
The message “Dark Current Measurement completed.”
is displayed on completion.
- Click “Store Dark Current” to save the results.
The file name is Dark Current.txt and is stored under
C:\ProgramFiles/Varian/IcpExpert/Run/Log.
- View this file and ensure that the values within the file
are as expected.
7. Perform a wavelength calibration
- click the Calibrate button with the multi-element test
solution aspirating.
The message “Wavelength Calibration completed…”
is displayed.
The results will be automatically stored in a file named
WavelengthCalibration.txt and is located under
C:\ProgramFiles/Varian/IcpExpert/Run/Log.
- View this file and ensure that the values within the file
are as expected.
8. Perform a Calculate Drift
- click the Calculate Drift button.
When the test is complete, the button will again be
active.
9. For the Varian 710-ES Series instruments only.
Perform a Shutter Calibration.
- click the Calibrate Shutter button with multi-element test
solution aspirating.
The message “Hardware Calibration completed”
is displayed.
The results will be automatically stored in a file named
ShutterCalibration.txt and is located under
C:\ProgramFiles/Varian/IcpExpert/Run/Log.
- View this file and ensure that the values within the file
are as expected.

Publication date: 2/7/2007


4-8
Varian 700-ES Series Spectrometer

10. For the Varian 710-ES Series instruments only.


Perform an Attenuator Calibration.
- click the Calibrate Attenuator button with the
multi-element test solution aspirating.
The message “Hardware Calibration completed”
is displayed.
The results will be automatically stored in a file named
AttenuatorCalibration.txt and is located under
C:\ProgramFiles/Varian/IcpExpert/Run/Log.
- View this file and ensure that the values within the file
are as expected.
11. Click the Torch Align tab on the Instrument Setup window.
Perform torch scan.
- click the Torch Scan button while aspirating the
multi-element test solution.
For axial instruments perform a vertical and horizontal
scan.
For radial instruments perform a horizontal scan only
(for more information refer to the Operation Manual.)
12. Optimize the nebulizer using 1000 ppm yttrium (radial) or
the Mn SBR using the multi-element solution (axial).
13. Perform installation tests in accordance with section 3 of
this service manual.

Note: The Varian 715 instruments (radial) without the snout


fitted and without the snout purge switched on will not
pass the performance tests in the UV region using the
ICPExpert II v1.0 software. This is expected behaviour
and must be explained to the customer.
14. Archive the error.log and Debug.txt files to an appropriate
storage location.
These files maybe required in the future for analysis.
15. Update all the relevant “maintenance” fields in the
DETAILS page in the Diagnostics software.
16. Exit software.

4.9 Instrument condition


1. Assess the over-all condition of the instrument, taking into
account corrosion, cleanliness, and overall performance of
the instrument after the checklist has been completed.
2. Record observations, recommendations, comments and
any corrective actions completed or that could not be
completed in the space provided on the checklist.
3. Obtain the customer’s signature and place the checklist in
the instrument log book.

Publication date: 2/7/2007


4-9
Varian 700-ES Series Spectrometer

4.10 Preventative maintenance requirements


Resources required
Personnel required: 1 Trained service engineer
Time to complete: 4 hours

Customer supplied parts


10 litres clean, distilled water
Vista multi-element test solution
Blank solution
Anti-algaecide solution
(as recommended by the water cooler manufacturer)

Consumable items*
Tubing and connector kit 99 100558 00
Torch tubing kit 99 100571 00
Sample compartment O-ring kit 99 100572 00
Kit torch fittings "GazFit" 6mm ID Pkt 4 99 101071 00
Tube Transfer FEP Radial – S/M 79 100514 90
Tube Transfer FEP Axial - Cyclone 79 100515 90
Silicon tubing 3/16" ID x 5/16" OD 24 100238 00
Torch Radial Quartz ICP-OES 20 100696 90
Bonnet quartz for radial torch ICP-OES 20 100707 90
Torch Axial Quartz ICP-OES, w/ logo 20 100928 00
Torch Axial Quartz ICP-OES 20 100904 00
Tube Nalgene ¼”ID X 1/16” WALL 37 100334 00
Argon inlet sintered filter 01 103216 90
Cooling air filter 01 105942 90
Pre-optics window 20 100709 90
Filter Inline Acro50 0.2 M 20 100795 00
Filter, Argon charcoal(13x) 68 100060 00
Filter, Argon charcoal(13x - small) 68 100086 00
Filter, 0.1 micron (Vista camera) 68 100080 00
Filter Drie-rite (small) 68 100087 00

Publication date: 2/7/2007


4-10
Varian 700-ES Series Spectrometer

4.11 Preventative Maintenance Checklist

Customer Name:
Address:
Instrument Serial Number: Date:
System ID Number:
Incident Number (North America Only):

Place a Tick in the “Checked” section when you have performed the check.
Add descriptive comments in the “Comments” section when either,
corrective action is performed or
if a minor discrepancy is observed and no corrective action was taken.
If more space is required, write the comments on extra pages and include the extra pages to this checklist.

Initial performance test

Item Procedure Checked Comments

4.3.3 Print Details page

4.3.6 perform a Dark Current Scan

4.3.7 Perform a Wavelength


calibration

4.3.8 Perform a Calculate Drift

4.3.9 For the Varian 710-ES Series


instruments only.
Perform a Shutter Calibration.

4.3.10 For the Varian 710-ES Series


instruments only.
Perform an Attenuator
Calibration.

4.3.11 Optimize the torch position.

4.3.12 Optimize the nebuliser flow.

4.3.14 Record the QC solution


intensities
These intensity values will
bench mark the light
throughput before and after the
preventative maintenance
schedule.

Publication date: 2/7/2007


4-11
Varian 700-ES Series Spectrometer

Water cooling system

Item Procedure Checked Comment

4.4.4 Drain water cooler

4.4.7 Clean condenser fins and


protective screen.

4.4.8 If the water cooler is equipped


with an air filter on the
condenser, clean or replace as
necessary

4.4.9 If the water cooler is equipped


with a water filter, clean or
replace as necessary.

4.4.10 Remove the pump strainer and


clean it by rinsing with tap
water. Replace if necessary.

4.4.11 Lubricate the water cooler pump


motor bearings according to
manufacturer’s specification

4.4.14 Fill water cooler with coolant as


recommended by the water
cooler manufacturer.

4.4.19 Check that the water cooler set


temperature is at 25°C
(77 °F).

4.4.20 Check that the pressure gauge


on the cooler (if fitted) reads 240
kPa,
(35 psi).
Max. pressure 310 kPa (45 psi)

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4-12
Varian 700-ES Series Spectrometer

Instrument

Item Procedure Checked Comment

4.5.1 Clean or replace the pre-optics


window as required.

4.5.2 lubricate the scanning mirror


shaft with Fomblin grease if
required

4.5.3 Inspect the cables and


connectors for wear and signs of
overheating.

4.5.4 Clean the air inlet filter on top


of instrument

4.5.6 Clean the honeycomb screen


below RF triode socket.

4.5.7 Inspect the water cooling hoses


from the water cooling system to
the water cooling manifold for
cracks and leaks.

4.5.8 Check that the flow of the


extraction system is adequate.

4.5.9 Check the operation of water


flow switch

4.5.15 Check the operation of argon


inlet supply switch

4.5.18 Clean or replace the argon inlet


sintered filter assembly as
necessary.

4.5.19 Inspect the gas hoses for cracks


and wear.

4.5.20 Replace all gasbox filters.

4.5.22 Set the argon inlet supply to 550


kPa (80 psi).

Publication date: 2/7/2007


4-13
Varian 700-ES Series Spectrometer

Accessories

VGA
Refer to the VGA 77 service manual for further details

Item Procedure Checked Comment

Inspect VGA gas supply hose

Check VGA gas supply


(set to 325 kPa 46 psi)

Inspect/replace VGA pump


tubing*

Autosampler
Refer to the SPS3 service manual for further details

Item Procedure Checked Comment

Inspect/replace Autosampler
tubings*

Inspect/adjust the x-axis and z-


axis timing belts for cracks,
splits or colour deterioration and
belt tension.

Check the lubrication of the x-


axis shaft.

Check the calibration of the


autosampler.

Ultrasonic Nebuliser
Refer to the manufacturer’s literature for further details

Item Procedure Checked Comment

Inspect/replace USN pump


tubing*

Inspect/replace USN drain


tubing*

Check coolant level of USN bath,


top-up if necessary*

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4-14
Varian 700-ES Series Spectrometer

Sample introduction system

Item Procedure Checked Comment

4.7.1 Inspect/replace pump tubing*

Inspect/replace drain tubing*

Inspect/replace torch tubing*

Inspect/replace nebulizer
tubing*

4.7.2 Inspect/clean torch

Inspect/clean torch bonnet

Inspect/clean snout

4.7.3 Inspect/clean torch

Inspect plastic insulator.


Replace if necessary.

4.7.8 Inspect/clean nebulizer

4.7.10 Inspect/clean spraychamber

4.7.11 Inspect/replace spraychamber


O-rings*

4.7.13 Inspect/clean ASA

4.7.14 Inspect/replace ASA O-ring*

4.7.16 Check ASA for leaks and non-


return valve operation

Publication date: 2/7/2007


4-15
Varian 700-ES Series Spectrometer

Performance tests

Item Procedure Checked Comment

4.8.3 Check the operation of the


plasma from 0.7 kW to 1.8 kW
(0.1 kW steps)

4.8.4 For the Varian 720/730-ES


Series instruments only.
Record the instrument Argon
Ratio value.
Argon Ratio value before …………
adjustment
…………
Argon Ratio value after
adjustment

4.8.6 perform a Dark Current Scan

4.8.7 Perform a wavelength


calibration

4.8.8 Perform a Calculate Drift

4.8.9 For the Varian 710-ES Series


instruments only.
Perform a Shutter Calibration.

4.8.10 For the Varian 710-ES Series


instruments only.
Perform an Attenuator
Calibration.

4.8.11 Optimize the torch position.

4.8.12 Optimize the nebuliser flow.

4.8.13 Perform the installation tests

4.8.14 Archive the error.log and


Debug.txt files to an appropriate
storage location.

4.8.15 Update all the relevant


‘‘maintenance’’ fields in the
DETAILS page in the
Diagnostics software.

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4-16
Varian 700-ES Series Spectrometer

Instrument condition

8 Good 8 Fair 8 Poor

Comments and recommendations


____________________________________________________
____________________________________________________
____________________________________________________
____________________________________________________
____________________________________________________
____________________________________________________
____________________________________________________
____________________________________________________
____________________________________________________
____________________________________________________
____________________________________________________
____________________________________________________

Signatures

.......................................................... ……………………….
Varian Service Engineer Date

.......................................................... …… .........................
Customer Date

Place this checklist and a copy of all tests in the instrument log book.

• * These are consumable items and as such are not covered under this preventative
maintenance plan. These items may be covered under local maintenance contracts or
agreements.

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4-17
Varian 700-ES Series Spectrometer

This page is intentionally left blank

Publication date: 2/7/2007


4-18
5. Peripherals
5.1 Water cooling system
The Varian 700-ES Series instruments rely on water circulation to
remove heat generated within the spectrometer system. The
water cooling system for radial instruments is used to circulate
cooling water through the work coil and detector assembly. On
axial instruments the water is circulated through the work coil,
detector assembly and cooled cone interface.
Because mains power supply voltages and frequencies differ
around the world, several different models of water coolers can
be used with the Varian 700-ES Series instrument range.
Refer to Chapter 2 of this manual for details and specifications on
water coolers.
The information contained in this section is suitable for most
water cooling systems which meet the general specifications
listed in section 5.2. Information relating to the assembly,
operation and maintenance requirements of a specific type of
cooling system can be found in the literature supplied by the
manufacturer.
Varian 700-ES Series Spectrometer

5.2 System description and specifications


The function of the water recirculating coolers is to provide a
continuous supply of cooling water at a constant temperature and
pressure. They are a self contained unit consisting of a reservoir,
temperature controller, recirculating pump, and can be either an
air cooled or refrigerated (heat pump based) system.

5.2.1 Cooling requirements

Cooling capacity 950 watts (Axial)


200 watts (Radial)
Flow rate Greater than 1.1 L/min (0.3 gpm)
minimum
Water purity 20 k Ω
Water temperature 25 °C (77 °F)
(30 °C (86 °F) maximum
for Varian 720/730-ES Series)
(45 °C (113 °F) maximum
for Varian 710-ES Series)
Inlet pressure 310 kPa (45 psi) maximum
55 kPa ( 8 psi) minimum

Recommended water cooling systems and pressure regulators


are available from

Lytron Van der Heijden


Main Office Main Office
55 Dragon Court Van der Heijden-Labortechnik GmbH
Woburn, MA 01801 Chiller, Special builds
USA P.O. Box 1153 · D-32690 Dörentrup
Brüderstraße 10 · D-32694 Dörentrup
Phone 781-933-7300 Germany
Fax 781-935-4529
Phone: 0 52 65 - 2 18/-2 28
Fax: 0 52 65 - 17 50
Website Website
http://www.lytron.com http://www.van-der-heijden.de

Publication date: 2/7/2007 5-2


Varian 700-ES Series Spectrometer

5.3 Important information


It is important that the information and methods provided in this
section are used when assembling, connecting and servicing the
water cooling system. All of the following points should be read
and understood. Failure to do so may result in permanent
damage to the instrument or exposure of personnel to potentially
dangerous situations.
When unpacking the water cooling systems, ensure that all
assembly and mounting hardware are present, before the
packing material is discarded.
It is essential that the instruction booklet supplied with the water
cooler is carefully read, particularly the sections on unpacking,
warranty, routine maintenance and after sales support.

5.3.1 Water cooling system location


The water cooling systems require cool air to circulate around
and through the unit to function properly. Any restrictions which
prevent the circulation of specified volumes of air will cause a
reduction in cooling capacity and/or complete shutdown of the
water cooler. Excessively dusty areas should be avoided and a
periodic cleaning procedure instituted.
Select a clean environment for the water cooling system, where
the ambient temperature is stable (refer to the manufacturer’s
specification for the operating temperature range). If the
environment exceeds the maximum operating temperature
specification, it will fail to cool the instrument satisfactorily. This
will void the instrument warranty. You must consider the
environmental conditions when selecting a water cooling system.
Room temperature also influences the water cooling systems
ability to remove the heat from the instrument. When operating in
O
an environment warmer than 25 C, or if the location of the water
cooling system is more than three metres from the instrument, a
larger capacity water cooling system may be required. Refer to
the manufacturer’s specifications and ensure that the selected
water cooling system is capable of removing the required amount
of heat from the instrument when operating at its intended
location.
All hose connections should be securely clamped. If the hoses
are substantially lengthened, avoid running lines near radiators,
hot water pipes or outside in cold climates. If these conditions
cannot be avoided, it may be necessary to insulate the lines.

5.3.2 Anti-algae requirements


The Varian 700-ES Series instrument water cooling system
consists of copper, brass, PTFE and nylon. To prevent growth of
aerobic bacteria in the instrument cooling system, add an
algaecide as recommended by the water cooler manufacturer.
Note that different manufacturers may recommend different
algaecides.

Publication date: 2/7/2007


5-3
Varian 700-ES Series Spectrometer

5.4 Installation hints


This section provides information which may assist in the
installation of the water cooler.
If the location of the water cooling system is more than three
metres from the instrument, a larger capacity water cooling
system may be required. For every 1 metre that the cooling
hoses are lengthened, an extra 300 mL of cooling water will be
required to fill the cooling system.
To minimize pressure build up in the water cooling system when
lengthening the cooling hoses, do not use hose/pipe which is
smaller in diameter than the standard cooling hose supplied with
the instrument. Avoid sharp, restricting turns and angles (<90°) in
all fittings and connections used.
The maximum vertical rise from the water cooler to the
instrument is 4.5 metres (15 feet). The limiting factor is the
cooling water flow interlock switch in the instrument.
At installation or re-commissioning, air may be introduced in the
water cooling system lines. Using lines longer than 4.5 metres
may allow the introduction of large volumes of air into the system.
These trapped air pockets may cause the centrifugal pump to
intermittently lose flow. This may cause the flow switch to shut off
the plasma during operation.
High ambient temperatures in a laboratory and high system water
pressure can cause the electrical current drawn by the water
coolers to be higher than the typical figures quoted by the
manufacturer. Mains outlet supply connections should be as
recommended in section 2 of this manual.

5.4.1 Assembly and commissioning


Thoroughly inspect the water cooler for any visible sign of
damage. If the unit shows any sign of damage then steps should
be taken to alert the customer who should notify the freight
forwarder, carrier or the local agent to lodge a transit damage
claim.
Refer to the water cooler operation manual and check that all of
the components listed are supplied with the water cooling system.
Visually determine from the label fitted on the back of the water
cooler that the water cooler is configured for 50 Hz or 60 Hz as
required.

Publication date: 2/7/2007 5-4


Varian 700-ES Series Spectrometer

5.4.2 Assembling the water cooling system


Using the water cooler operation manual as a reference,
complete the assembly of the water cooler.
Note The Varian 700-ES Series instrument systems have a maximum
water cooling inlet pressure of 310 kPa (45 psi). When using
water cooling systems with a Positive Displacement pump, a
water pressure regulator should be fitted. These are often
included within the cooler, but some models may not have these
regulators installed. Therefore an external pressure regulator
should be fitted. The water pressure regulator should always be
set below 310 kPa (45 psi) before attaching the water cooler to
the Varian 700-ES Series instrument system.

5.4.3 Connection to the spectrometer


Locate the water cooling plumbing kit supplied with each
instrument and remove the appropriate fittings and clamps.
Ensure the Swagelok nut, ferrule and seat on the 1/2” NPT to
Swagelok fitting is finger tight.
Fit the 1/4” barb into the Swagelok and tighten the nut 1 1/4
turns.
Using PTFE tape, completely cover the threads of both NPT
fittings with three full turns of tape.
Using care to ensure that the fittings mounted in the cooler are
held stationary, fit the 1/2” NPT to Swagelok/barb assembly to
the water cooling system port labelled ‘coolant in’, (‘return’).
Using care to ensure that the fittings mounted in the cooler are
held stationary, fit the appropriate 3/8” barb assembly to the
water cooling system port labelled ‘coolant out’ (‘supply’).
Note Fitting the water hoses to the cooler is easier if you soften them
in a beaker of hot water.
Ensure the water cooling external pressure regulator is set to 310
kPa (45 psi).
The spectrometer is shipped from the factory with black plastic
plugs in the water hoses. In the case where these plugs are
present, cut approximately 25 mm (1") from the end of each
hose.
Slide a clamp over each hose and push each hose over the
appropriate sized barb of the water cooler. Tighten the clamps.

Publication date: 2/7/2007


5-5
Varian 700-ES Series Spectrometer

5.4.4 Power connection


Connect the water cooler to a suitable mains outlet.

Warning Application of the wrong supply voltage, connection of the


water cooler to an incorrectly wired supply outlet, or lack
of proper electrical grounding can create electric shock or
fire hazards. These can cause death, serious injury, or
serious damage to equipment.

Always use a three wire outlet with ground connection which is


adequately rated for the load.
The installation must comply with local, state and federal safety
regulations.
Do not connect the water cooler to the mains power supply until
you have made sure that the voltage, current and frequency
rating are correct for the mains supply in the laboratory.

5.4.5 Pre-conditioning the water cooling system


Preparation of the cooling system prior to the operation of the
instrument is essential. Installation of the water cooling system
can be a time consuming activity and should be given priority.

Caution Please read the manufacturer’s operation manual for


suitable cooling fluids for use with the water cooler. The
use of automobile antifreeze or some other cooling fluids
may void the manufacturer’s warranty.

Warning Maintenance of the water cooling system can involve the


spillage of water. Care should be exercised to avoid spills
over any electrical circuits as this could cause death or
severe electrical shock. Always ensure that the power
source is disconnected before working on the cooling
system.

Locate the water reservoir as described in the manufacturer’s


operation manual supplied with the water cooler.
Fill the reservoir of the water cooler with water.

Caution Do not run the pump without fluid in the system. If after a
few seconds of turning on the water cooler, water does
not start to circulate through the system, turn the unit off
and consult the manufacturer’s manual for details on how
to prime the pump.

Publication date: 2/7/2007 5-6


Varian 700-ES Series Spectrometer

Turn the water cooler on and set the operating temperature to


25 °C. Leave the water cooler running for 30 minutes. A quick
inspection of all the plumbing should be made to check for any
water leaks.
Turn the water cooler off and remove the return hose from the
barb of the water cooler. Direct the removed hose into a suitable
empty container and turn the water cooler on allowing all of the
water to pump out of the water cooler. Turn off the water cooler
when the water has been expelled. When this is done, reconnect
the hose to the water cooler.
Note: After a refrigerated water cooler has been turned off, allow at
least 5 minutes before restarting. In some types of water coolers,
the compressor may short cycle if the refrigerant pressures have
not had sufficient time to equalize.
Refill the water cooler reservoir.
Turn the water cooler on and top up the system. To overcome air
locks when filling, it may be necessary to turn the water cooler off
and on several times.
With the water cooler turned off, check that the coolant is at the
correct level and does not overflow from the filler.
Replace and tighten filler plug.
The water cooler is now completely operational.

Note The operating temperature of a refrigerated water cooler should


be set to 25 °C at all times.

5.5 Leak testing


After assembling and connecting the water cooler to the
instrument, it is recommended that all hose connections are
checked for leaks.
Turn the water cooler on.
Inspect all water cooling connections, including inside the cooler.
Inspect all hose connections for leaks.

Publication date: 2/7/2007


5-7
Varian 700-ES Series Spectrometer

5.6 Routine maintenance


5.6.1 Cleaning
Substantial amounts of air are pulled through the front panel and
across a finned refrigerant/air heat exchanger. A build up of dust
or debris on the protective screen or heat exchanger fins will
interfere with the transfer of heat and cause loss of cooling
capacity. Periodic cleaning of the condenser fins is necessary.
Use a vacuum cleaner to remove the build up of dust or debris. In
some environments it may be necessary to loosen adhering dust
with a brush.

5.6.2 Pump strainer


Most water coolers include a wire mesh strainer to prevent any
debris drawn into the system from damaging the pump. These
strainers should be cleaned every 6 months and at each
Preventative Maintenance visit:
Disconnect the return hose at the water cooler.
Turn the water cooler on; empty the water into a suitable
container and dispose of it.
Turn the water cooler off and disconnect from mains supply.
Locate and remove the strainer. Refer to the water cooler
operator instruction booklet for further details on the location of
the strainer.
Rinse the strainer in clean water and refit to the water cooler.
Connect the return supply hose to the water cooler and fill with
cooling water.

5.6.3 Lubrication of the pump motor


The motors used to drive the water pump within the water cooler
are manufactured by several companies. Two basic lubrication
systems are incorporated. Sleeve type bearings with large oil
reservoirs, and felt transfer types for systems without bearings.
Lubrication should be performed every 3 to 6 months for sleeve
bearing systems and each month for felt transfer types. Refer to
the instruction booklet supplied with the water cooler or use the
following procedure as a lubrication guide:
Turn water cooler off and disconnect from mains supply.
Remove covers from water cooler to gain access to pump motor.
Refer to water cooler operator instruction booklet for further
details on the location of the pump motor.
Oiling instructions are generally posted on each motor. In the
absence of legible lubrication instructions, add approximately 10
to 15 drops of SAE 20 oil (SAE 20 = 142 CS viscosity) to each
bearing for sleeve bearing systems and 5 to 10 drops into the
filler ports for felt transfer types.

Publication date: 2/7/2007 5-8


6 Spares and test
equipment
6 SPARES AND TEST EQUIPMENT 1

6.1 Introduction 2

6.2 Spares Information 3


6.2.1 Covers 3
6.2.2 PWB assemblies 5
6.2.3 Looms 6
6.2.4 Gas control unit and Peristaltic pump 7
6.2.5 Sample introduction 10
6.2.6 Optics system 13
6.2.7 RF generating system 14
6.2.8 Chassis 19
6.2.9 Cooling Water Flow 21
6.2.10 Air Flow 22
6.2.11 Miscellaneous 23
Miscellaneous (continued) 25
Miscellaneous (continued) 26
6.2.12 Publications 26

6.3 Test Equipment and service tools 27


6.3.1 Factory Sourced 27
6.3.2 Locally Sourced 27
Varian 700-ES Series Spectrometer

6.1 Introduction
This section contains information on spares that are available to
support the instrument in the field and test equipment required for
fault detection, alignment and calibration.
Spare part availability from the factory is consistent with the
service policy stated in section 1 of this manual. The information
in this section is presented in groups consistent with how the
component or assembly is used in the instrument.
Information for all test equipment, calibration equipment and
alignment jigs necessary to fully service the instrument in the field
is provided in this section. Some of the calibration equipment
required by field service engineers is not available from the
factory. In these cases, full specifications are provided to allow
the engineer to source this equipment locally.

Publication date: 12/21/2007


6-2
Varian 700-ES Series Spectrometer

6.2 Spares Information


6.2.1 Covers

Part Number Description 710 715 720/730 725/735


01 105942 90 Assy Air filter ÿ ÿ ÿ ÿ
01 107880 90 Assy cover LH Top ÿ ÿ ÿ ÿ
01 107881 90 Assy cover RH front ÿ ÿ ÿ ÿ
01 107882 90 Assy cover upper RH side ÿ ÿ ÿ ÿ
01 107883 90 Assy cover Door trim ÿ ÿ ÿ ÿ
01 107885 90 Assy cover LH Front ÿ ÿ ÿ ÿ
01 107906 90 Assy cover RH top ÿ ÿ ÿ ÿ
01 107920 90 Assy cover Chimney centre ÿ ÿ ÿ ÿ
04 102819 00 Bracket water filter ÿ ÿ ÿ ÿ
04 104230 90 Bracket access cover (rear of chimney) ÿ ÿ ÿ ÿ
09 101048 00 Cover air inlet filter frame ÿ ÿ ÿ ÿ
09 101322 00 Cover 386 Control pwb ÿ ÿ ÿ ÿ
09 101463 00 Plate Voltage selection ÿ ÿ ÿ ÿ
09 102504 90 Cover LH Side ÿ ÿ ÿ ÿ
09 102512 90 Cover Rear inspection ÿ ÿ ÿ ÿ

15 102193 00 SCREW M4 X 8 CAP 316 STN ST ÿ ÿ ÿ ÿ


(used in RF door handle casting)
15 102517 00 Screw s/tap PT dia 4 pan 12 lg ÿ ÿ ÿ ÿ
(used in plastic mouldings)
15 102667 00 Screw 4.8 OD x 13.9 lg fast lead ÿ ÿ ÿ ÿ
(used with 15 102669 00)
15 102668 00 Nut clip on receptacle stainless ÿ ÿ ÿ ÿ
15 102669 00 Washer retainer 3.6 ID x 12.7 OD ÿ ÿ ÿ ÿ
(used with 15 102667 00)

25 100348 00 Knob screw M4 x 13LG ÿ ÿ ÿ ÿ

31 101458 00 Label Varian 710 ÿ


31 101459 00 Label Varian 720 ÿ
31 101460 00 Label Varian 730 ÿ
31 101462 00 Label Varian 715 ÿ
31 101463 00 Label Varian 725 ÿ
31 101464 00 Label Varian 735 ÿ
31 101465 00 Label Channel inside front door ÿ ÿ ÿ ÿ
31 101466 00 Label plasma door trim ÿ ÿ ÿ ÿ

43 100515 00 RF door mask ÿ ÿ ÿ ÿ

45 100019 00 Tape adhesive VHB double coated ÿ ÿ ÿ ÿ


18mm wide (for RF door window)

46 100381 00 Leaf Spring (to secure covers) ÿ ÿ ÿ ÿ

62 101125 00 Upper LH front moulding ÿ ÿ ÿ ÿ


62 101126 00 Lower LH front moulding ÿ ÿ ÿ ÿ
62 101127-00 RF door cover moulding ÿ ÿ ÿ ÿ
62 101128 00 RF door window moulding ÿ ÿ ÿ ÿ
62 101129 00 RH front moulding ÿ ÿ ÿ ÿ
62 101131 00 RF door handle casting ÿ ÿ ÿ ÿ

Publication date: 12/21/2007


6-3
Varian 700-ES Series Spectrometer

Publication date: 12/21/2007


6-4
Varian 700-ES Series Spectrometer

6.2.2 PWB assemblies

Part Number Description 710 715 720/730 725/735 Ref


02 101099 90 Gasbox interconnect pwb ÿ ÿ ÿ ÿ 1
02 101125 90 Opto sensor pwb ÿ ÿ ÿ ÿ
02 101489 90 Current sensor pwb ÿ ÿ ÿ ÿ
02 101498 90 RF interface pwb ÿ ÿ ÿ ÿ 2
02 101689 90 386EX Control pwb ÿ ÿ ÿ ÿ 5
02 101697 90 Power pwb (710-ES series) ÿ ÿ 4
02 101570 90 Power pwb (720/730-ES series) ÿ ÿ 4
02 101595 90 Gas control pwb ÿ ÿ ÿ ÿ 3
02 101670 90 Camera pwb (710-ES series) ÿ ÿ
02 102029 90 Peristaltic pump control pwb ÿ ÿ ÿ ÿ
79 100429 00 Camera pwb (720/730-ES series) ÿ ÿ
79 100209 00 Switching power supply, 5,12V ÿ ÿ ÿ ÿ
99 101021 00 PCI GPIB Card National Instruments ÿ ÿ ÿ ÿ

1 4

3 5
2

Publication date: 12/21/2007


6-5
Varian 700-ES Series Spectrometer

6.2.3 Looms

Part Number Description 710 715 720/730 725735


01 104035 00 Assy cable earthing rod ÿ ÿ ÿ ÿ
01 106008 00 Assy loom current sensor/fibre optic ÿ ÿ
01 106013 00 Assy cable HV ÿ ÿ ÿ ÿ
01 106014 00 Assy loom door interlock ÿ ÿ ÿ ÿ
01 106015 00 Assy loom door interlock - extension ÿ ÿ ÿ ÿ
01 106019 00 Assy Loom High Current Input ÿ ÿ ÿ ÿ
01 106023 00 Assembly Mains Cable 30A ÿ ÿ ÿ ÿ
01 106416 00 Assy loom ICP mains Varistor ÿ ÿ ÿ ÿ
01 106417 00 Assy loom ICP mains Filter ÿ ÿ ÿ ÿ
01 106438 00 Cable ribbon processor power. ÿ ÿ
01 106439 00 Loom Power Supply +5/+12V ÿ ÿ ÿ ÿ
01 106440 00 Assy - Cable Pre-Optics ÿ ÿ ÿ ÿ
01 106441 00 Loom Simul Power PWBs ÿ ÿ ÿ ÿ
01 106444 00 Loom ICP Simul - Power Tx ÿ ÿ ÿ ÿ
01 106446 00 Loom ICP Simul - coms loom ÿ ÿ ÿ ÿ
01 106447 00 Loom ICP Simul - Serial Loom ÿ ÿ ÿ ÿ
01 106453 00 Assy loom ICP Simul – filament ÿ ÿ ÿ ÿ
01 106454 00 Assy loom ICP igniter (red/black) ÿ ÿ ÿ ÿ
01 106459 00 Assy loom ICP Simul – filament ÿ ÿ ÿ ÿ
resistor
01 106462 00 Cable Ribbon Mains Indicator ÿ ÿ ÿ ÿ
01 106497 00 Cable ICP Simul Camera ÿ ÿ ÿ ÿ
01 106499 00 Assy loom ICP simul polychromator
01 106500 00 Assy loom ICP simul - BOX
01 106506 00 Cable IEEE ÿ ÿ ÿ ÿ
01 106507 00 Assy loom ICP simul Poly RTD
01 106512 00 Assy loom RF cabinet interlock ÿ ÿ ÿ ÿ
01 106516 90 Assy, solenoid and loom, poly shutter
01 106575 00 Assy loom ICP simul Poly casting
01 106848 00 Assy cable ribbon 10 way
01 106849 00 Ribbon Cable Camera
01 107614 00 Assy loom attenuator motor (30-102)
01 107660 00 Assy loom current sensor ÿ ÿ ÿ ÿ
(axial - 6 pin)
01 107766 00 Assy loom SV10 & P-Switch
01 107767 00 Assy loom ignitor kit ICP-ES ÿ ÿ ÿ ÿ
(all looms inside igniter)
01 107773 00 Loom Mains Input Wiring ÿ ÿ ÿ ÿ
01 107799 00 Assy loom ICP simul - main (SSR) ÿ ÿ ÿ ÿ
01 107800 00 Loom ICP Mains Heaters ÿ ÿ ÿ ÿ
01 107810 00 Assy loom current sensor ÿ ÿ
(radial - 6 pin)
01 107811 00 Assy loom HVPS mains ÿ ÿ ÿ ÿ
01 107812 00 Loom HVPS Control ÿ ÿ ÿ ÿ
01 107964 00 Assy Loom ICP with Peri-Pump Pwb ÿ ÿ ÿ ÿ
01 107967 00 Assy Loom Water Flow Sensor ÿ ÿ ÿ ÿ
12 100876 00 Kit Fitting IEEE ÿ ÿ ÿ ÿ
12 100947 00 IEEE extender plug
59 100438 00 IEEE Cable (2mt) ÿ ÿ ÿ ÿ
79 100198 00 IEEE Cable-(4mt)

Publication date: 12/21/2007


6-6
Varian 700-ES Series Spectrometer

6.2.4 Gas control unit and Peristaltic pump

Part Number Description 710 715 720/730 725/73 Ref


5
01 107772 90 Assy, Gas Box 72X, 73X complete ÿ ÿ 1
01 107779 90 Assy , Gas Box 71X complete ÿ ÿ 2

01 107766 00 Assy loom SV10 & P-Switch ÿ ÿ ÿ ÿ 5


01 107771 90 Assy manifold 72X, 73X ÿ ÿ 3
01 107774 90 Assy manifold 71X ÿ ÿ 4
03 100530 00 Bush - adaptor ÿ ÿ ÿ ÿ 7
12 100742 00 Connector IDP F CBL 12 2,54 24G T ÿ ÿ ÿ ÿ 8
16 100209 00 Nipple Brass ÿ BSP x ÿ BSP ÿ ÿ ÿ ÿ 9
16 100269 00 Connector ML ¼ Tube x ÿ BSPT ÿ ÿ ÿ ÿ 10
16 100270 00 Elbow ML Brass ÿ BSP x ¼ Tube ÿ ÿ ÿ ÿ 11
16 100701 00 Barb ML Brass ÿ BSP x ¼ Hose ÿ ÿ ÿ ÿ 12
16 100723 00 TEE FML ÿ BSP ÿ ÿ ÿ ÿ 13
16 100847 00 Insert Barbed for plastic tubing ÿ ÿ ÿ ÿ 14
16 100849 00 Elbow ML Brass ¼ BSPT x ¼ Tube ÿ ÿ ÿ ÿ 15
16 100855 00 Coupling body ¼” flow (neb connector) ÿ ÿ ÿ ÿ 16
16 101339 00 Barb – restrictor – filter ÿ ÿ ÿ ÿ 19
16 101369 00 Elbow ML modified ¼ Tube x ¼ BSPT. ÿ ÿ ÿ ÿ 18
20 100795 00 Filter Inline Acro50 0.2 M ÿ ÿ 31
29 100050 00 Gauge pressure NORGREN O O O O 21
36 100041 00 Orifice-DIA 0.029” ÿ ÿ ÿ ÿ 22
36 100042 00 Orifice DIA 0.007” ÿ ÿ ÿ ÿ 23
36 100044 00 Orifice DIA 0.010” ÿ ÿ ÿ ÿ 24
36 100045 00 Orifice-DIA 0.015” ÿ ÿ ÿ ÿ 25
36 100046 00 Orifice-DIA 0.020” ÿ ÿ ÿ ÿ 26
36 100069 00 Orifice-DIA 1,20 MM ÿ ÿ ÿ ÿ 27
36 100113 00 Restrictor, porous mtl ÿ ÿ 28
38 100052 00 Pump peristaltic 3 channel Spetec O O O O 29
38 100053 00 Pump peristaltic 4 channel Spetec O O O O 30
37 100315 00 Tube NALGENE ÿID X ¼OD ÿ ÿ ÿ ÿ 32
37 100376 00 Tubing NAPE TFE ÿ”ID X 0,06” wall ÿ ÿ ÿ ÿ 33
37 100475 00 Tubing PFA ÿ” id x 0.060” wall ÿ ÿ ÿ ÿ 34
57 100102 00 Regulator NORGEN (“neb” with knob) O O O O 35
57 100112 00 Regulator PRESSURE OXIDANT ÿ ÿ ÿ ÿ
57 100124 00 Regulator Wilkerson RB3-01-W000 ÿ ÿ ÿ ÿ 36
68 100054 00 Filter sintered metal grade 2 ÿ ÿ ÿ ÿ 37
68 100060 00 Filter gas charcoal /13x ÿ ÿ ÿ ÿ 38
68 100086 00 Filter gas charcoal /13x - small ÿ ÿ 39
68 100087 00 Filter drierite - small ÿ ÿ 40
68 100089 00 Filter, sintered metal Ø9 x 6, grade 2 ÿ ÿ ÿ ÿ 41
48 100287 00 SOLENOID VALVE 24VDC 2WAY ÿ ÿ ÿ ÿ 42
48 100303 00 SWITCH PRESSURE 6 TO 65 PSI ÿ ÿ ÿ ÿ 43
48 100383 00 Solenoid valve 12V ÿ ÿ ÿ ÿ 44
48 100384 00 Solenoid valve, 24VDC ÿ ÿ ÿ ÿ 45
69 100012 00 O Ring ¼ ID x OD x 1/16IN NIT ÿ ÿ ÿ ÿ 46
69 100103 00 O Ring 1¼ ID x 1 OD x 1/16IN NIT ÿ ÿ ÿ ÿ 47
69 100159 00 O Ring 9/16 ID x 11/16 ODx 1/16IN NIT ÿ ÿ ÿ ÿ 48
69 100446 00 O-Ring STD size # 032 nitrile compo ÿ ÿ ÿ ÿ 49
69 100447 00 O-Ring STD size # 037 nitrile compo ÿ ÿ ÿ ÿ 50
69 100448 00 O-Ring STD size # 048 nitrile compo ÿ ÿ ÿ ÿ 51
79 100183 00 Mass Flow Controller, Sierra O O O O 52

Publication date: 12/21/2007


6-7
Varian 700-ES Series Spectrometer

48 47

51 50 49

46

21 35

20

52

17

29 or 30

43 34

36 45 44 42

Publication date: 12/21/2007


6-8
Varian 700-ES Series Spectrometer

Peristaltic pump kits


Part Number Description
02 102075 90 Kit upgrade 3Ch pump and REG
complete
02 102076 90 Kit upgrade 3Ch pump and MFC
complete
02 102077 90 Kit upgrade 4Ch pump and REG
complete
02 102078 90 Kit upgrade 4Ch pump and MFC
complete
99 101289 00 Kit upgrade 3Ch Spetec pump only
99 101290 00 Kit upgrade 4Ch Spetec pump only

Nitrogen purge kit


Part Number Description
98 100369 00 Kit nitrogen purge Australia
98 100369 01 Kit nitrogen purge USA
98 100369 02 Kit nitrogen purge Europe

01 104376 00 Assy adaptor filter


57 100121 00 Regulator Norgen

Publication date: 12/21/2007


6-9
Varian 700-ES Series Spectrometer

6.2.5 Sample introduction


Torch
Part Number Description 710 715 720/730 725/735
01 107752 00 Assy Torch Clamp Universal ÿ ÿ ÿ ÿ
16 100856 00 Coupling insert ¼” flow (auxilary)
20 100904 00 Torch Axial Quartz ICP-OES ÿ ÿ
20 100928 00 Torch Axial Quartz ICP-OES, w/ logo ÿ ÿ
20 100696 90 Torch Radial Quartz ICP-OES ÿ ÿ
20 100707 90 Bonnet quartz for radial torch ICP-OES ÿ ÿ
24 100238 00 Silicon tubing 3/16" ID x 5/16" OD ÿ ÿ ÿ ÿ
37 100334 00 Tube Nalgene ¼”ID X 1/16” WALL ÿ ÿ ÿ ÿ
99 101071 00 Kit torch fittings "GazFit" 6mm ID Pkt 4 ÿ ÿ ÿ ÿ

ACK – (Axial, Cyclone spraychamber, ‘K’ Style nebuliser)


Part Number Description
01 106652 00 Holder Cyclonic Spraychamber
20 101068 00 Concentric 'K' Style Nebulizer
Complete
20 100817 00 Spraychamber Cyclone Axial
79 100515 90 Tube Transfer FEP Axial - Cyclone

ACS – (Axial, Cyclone spraychamber, Seaspray nebuliser)


Part Number Description
01 106652 00 Holder Cyclonic Spraychamber
20 100964 00 Seaspray Nebulizer Complete
20 100817 00 Spraychamber Cyclone Axial
79 100515 90 Tube Transfer FEP Axial - Cyclone

ATS – (Axial, Twister spraychamber, Seaspray nebuliser)


Part Number Description
01 106652 00 Holder Cyclonic Spraychamber
20 100964 00 Seaspray Nebulizer Complete
79 100437 00 Twister Spraychamber with Adaptor
79 100515 90 Tube Transfer FEP Axial - Cyclone

RSMV – (Radial, Sturman/Masters spraychamber, V-groove nebuliser)


Part Number Description
01 105931 90 Assy Spraychamber Ertalyte Complete
04 102984 00 Holder Spraychamber
79 100514 90 Tube Transfer FEP Radial
- S/M Chamber
99 100574 00 Kit V-Groove Nebulizer

Publication date: 12/21/2007


6-10
Varian 700-ES Series Spectrometer

RTS – (Radial, Twister spraychamber, Seaspray nebuliser)


Part Number Description
01 106117 00 Holder Cyclonic Spraychamber
20 100964 00 Seaspray Nebulizer Complete
79 100437 00 Twister Spraychamber with Adaptor
79 100512 90 Tube Transfer FEP Radial - Cyclone
16 101364 00 Connector Sample Tube

Sturman Masters spraychamber spares


Part Number Description
01 104236 90 Assy S/M spraychamber (poly)
01 104238 00 Assy drain/nipple spraychamber – Poly
08 101033 90 Nebulizer holder – Poly
16 100890 00 Top spraychamber – Poly
16 100891 00 Baffle spraychamber – Poly
16 100892 00 Base spraychamber – Poly
16 100893 00 Centre Spraychamber – Poly

01 105931 90 Assy S/M spraychamber (ertalyte)


01 105930 00 Assy drain/nipple s/c – Ertalyte
08 101281 00 Nebulizer holder – Ertalyte
16 101145 00 Top spraychamber – Ertalyte
16 101146 00 Baffle spraychamber – Ertalyte
16 101147 00 Base spraychamber – Ertalyte
16 101148 00 Centre spraychamber – Ertalyte

15 101881 00 Screw, s/steel spraychamber


15 101882 00 Nut, s/steel spray chamber
69 100060 00 O-ring 11/16ID x 13/16OD x 1/16IN
NIT
(used on Centre &
Drain)
69 100174 00 O-ring 2-3/16ID x 2-3/8OD x 3/32IN
NIT
(used on Base)
69 100198 00 O-ring 7/16ID x 5/8OD x 3/32IN NIT
(used on Base for neb)

Publication date: 12/21/2007


6-11
Varian 700-ES Series Spectrometer

Argon Saturation Accessory spares


Part Number Description
02 101286 90 Argon saturation accessory ICP-OES
01 104553 00 Assy bubble tube, ASA
01 104554 00 Assy orifice, ASA
01 104555 00 Assy inlet nipple, ASA
08 101032 00 Herbie clamp TYPE AA 7.3 - 8.2 DIA
09 100722 00 Bowl transparent (without drainlock)
09 100820 00 Cover check valve barb
16 100853 00 Coupling insert 1/8IN flow
16 100940 00 Coupling body 1/8 X 1/4 NPT
3710008200 Tube NYLON ¼IN OD 1000 PSI
3710031500 Tube NALGENE 1/8ID x ¼OD
57 100108 00 Inlet nipple non-return valve
69 100003 00 O-ring 5/16ID x 7/16 OD x 1/16IN NIT
69 100012 00 O-ring 1/4ID x 3/8 OD x 1/16IN NIT
69 100098 00 O-ring 3/16ID x 5/16 OD x 1/16IN NIT
69 100104 00 O-ring 1-1/8ID x 1-1/4 OD x 1/16IN NIT
6910017500 O-ring 7/64ID x 15/64 OD x 1/16IN
NIT
6910020200 GASKET BOWL

Publication date: 12/21/2007


6-12
Varian 700-ES Series Spectrometer

6.2.6 Optics system

Polychromator

Part Number Description 710 715 720/730 725/735


02 102063 90 Assy poly 710 series (no pre-optics) ÿ ÿ
02 102080 90 Assy poly 720/730 series ÿ ÿ
(no pre optics)

01 106499 00 Assy loom ICP simul polychromator ÿ ÿ ÿ ÿ


01 106500 00 Assy loom ICP simul - BOX ÿ ÿ ÿ ÿ
01 106507 00 Assy loom ICP simul Poly RTD ÿ ÿ ÿ ÿ
01 106516 90 Assy, solenoid and loom, poly shutter ÿ ÿ
01 106575 00 Assy loom ICP simul Poly casting ÿ ÿ ÿ ÿ
01 106855 90 Assy, slit and shutter (710 series) ÿ ÿ
01 106877 90 Assy grating/prism spare ÿ ÿ
01 107890 90 Assy grating/prism spare (710 series) ÿ ÿ
01 108062 90 Assy CCD Detector - 71X Series ÿ ÿ
03 100307 90 Ball Race 16x5x5mm ÿ ÿ
08 100085 00 C/Clip Ext 0.125 Shaft Plated ÿ ÿ
14 100952 00 DIODE 6A4 RECTIFIER 400V/6A ÿ ÿ
16 101341 00 Plug 1/8 IN B.S.P.T UNBRAKO Z/P ÿ ÿ ÿ ÿ
20 100768 90 Assy mirror, pilot, (M3) ÿ ÿ ÿ ÿ
21 100211 00 Insulator protector camera ribbon ÿ ÿ ÿ ÿ
24 100619 00 PTFE TBE 0.068 IDX0.016 IN WLL ÿ ÿ
37 100475 00 Tubing NAPE TFE 1/8"ID x 0,06" Wall ÿ ÿ ÿ ÿ
46 100199 00 Spring Compression 7,8ID X 25LG ÿ ÿ ÿ ÿ
46 100228 00 Spring Tension 6 OD X 36LG ÿ ÿ
46 100250 00 Spring compression 09.7OD ÿ ÿ
46 100258 00 Spring compression 10,2OD x 13,7LG ÿ ÿ
46 100284 00 Spring Mirror ÿ ÿ
46 100314 00 Spring compression tapered 10.4ID ÿ ÿ
48 100297 00 Switch Thermal 67'c 10a/250v ÿ ÿ ÿ ÿ
62 100933 00 Moulding - Plug 50 position ÿ ÿ ÿ ÿ
69 100377 00 Grommet Flexible cooling water ÿ ÿ ÿ ÿ
69 100378 00 Grommet HOLLOW ARGON PURGE ÿ ÿ
69 100379 00 Grommet BLIND ÿ ÿ ÿ ÿ
79 100298 90 Varian 72X/73X series camera assy ÿ ÿ
79 100300 00 Assy slit polychromator ÿ ÿ

Publication date: 12/21/2007


6-13
Varian 700-ES Series Spectrometer

Pre-Optics

Part Number Description 710 715 720/730 725/735 Ref


02 101587 90 Assy Pre-Optics 720/730 - Axial ÿ 1
02 101592 90 Assy Pre-Optics 725/735 - Radial ÿ 2
02 101704 90 Assy Pre-Optics 710 - Axial ÿ 3
02 101715 90 Assy Pre-Optics 715 - Radial ÿ 4
01 103817 90 Assy pre-opt step mtr vert/horiz ÿ ÿ ÿ ÿ 5
01 106349 90 Mirror, flat, pre-opt. (M1) ÿ ÿ ÿ ÿ 6
01 106350 90 Mirror, toric, pre-opt. (M2) Axial ÿ ÿ 7
01 106478 90 Mirror, toric, pre-opt. (M2) Radial ÿ ÿ 8
01 106843 90 Assy, Attenuator disk ÿ ÿ 9
01 107614 00 Assy loom attenuator motor (30-102) ÿ ÿ 10
02 101125 90 Assy PWB opto - 3 pin header ÿ ÿ ÿ ÿ 11
15 100949 00 Scrw Adjusting Mirror ÿ ÿ ÿ ÿ
15 101604 00 Scrw Holding M 5 Mirror ÿ ÿ ÿ ÿ
15 101704 00 Scrw Adj M 5 X 20 Special End ÿ ÿ ÿ ÿ
15 102269 00 Poly mounting nut, special, M20 ÿ ÿ ÿ ÿ
16 100269 00 Swagelock fittings, argon purge ÿ ÿ ÿ ÿ 12
20 100709 90 Window VUV Dia 58 X 3 TK ÿ ÿ ÿ ÿ 13
30 100102 00 MOTOR STEPPER/12V/1.8DEG ÿ ÿ 14
46 100199 00 Spring Compression 7,8ID X 25LG ÿ ÿ ÿ ÿ 15
46 100232 00 Spring Tension 6.8OD X 25LG ÿ ÿ ÿ ÿ 16
46 100306 00 Spring Compression 9.0 OD X 99LG ÿ ÿ ÿ ÿ 17
48 100205 00 Sw Optical Slotted Trw Optron ÿ ÿ ÿ ÿ
69 100352 00 Seal, Pre-optics boot ÿ ÿ ÿ ÿ 18
69 100371 00 Seal, Window ÿ ÿ ÿ ÿ 19

7 Ax or
8 Rad
11
18
5
12
19
9
6
14

13

Publication date: 12/21/2007


6-14
Varian 700-ES Series Spectrometer

Polychromator heater box

Part Number Description 710 715 720/730 725/735


08 100553 00 Clamp cable S/Adh ÿ ÿ ÿ ÿ
08 100726 00 Clamp cable 4,8 S/Adh ÿ ÿ ÿ ÿ
12 100789 00 Mkit Cnctr FML Screwslocks ÿ ÿ ÿ ÿ
15 100060 00 Grommet hollow 12,7 ID ÿ ÿ ÿ ÿ
15 102316 00 Insert Swagelok ÿ ÿ ÿ ÿ
(for 6mmOD x 4mmID tube)
15 180397 00 Grommet edging ÿ ÿ ÿ ÿ
(Suits 1.55-2.51mm Thick panel)
16 100980 00 CNCTR UNION B/HEAD B-400-61 ÿ ÿ ÿ ÿ
S/LOK
16 101035 00 Elbow ML ¼ Tube - 1/8 NPT ÿ ÿ ÿ ÿ
16 101198 00 Ferrule Swagelok (for 6MM OD Tube) ÿ ÿ ÿ ÿ
17 100122 00 Heater pad 300 x 119 ÿ ÿ ÿ ÿ
21 100130 00 PAD ROUND FOAM SELF ADHESIVE ÿ ÿ ÿ ÿ
37 100431 00 Tube polyurethane Ether Based ÿ ÿ ÿ ÿ
(6mm OD x 4mm ID)
69 100380 00 Grommet - Ribbon cable ÿ ÿ ÿ ÿ

6.2.7 RF generating system

Part Number Description 710 715 720/730 725735


02 102048 90 Assy RF amp 7X5 Series (Radial) ÿ ÿ
02 102049 90 Assy RF amp 7X0 Series (axial) ÿ ÿ

01 104035 00 Assy cable earthing rod ÿ ÿ ÿ ÿ


01 106014 00 Assy loom door interlock ÿ ÿ ÿ ÿ
01 106015 00 Assy loom door interlock - extension ÿ ÿ ÿ ÿ
01 106453 00 Assy loom ICP Simul – filament ÿ ÿ ÿ ÿ
01 106459 00 Assy loom ICP Simul – filament resistor ÿ ÿ ÿ ÿ
01 106512 00 Assy loom RF cabinet interlock ÿ ÿ ÿ ÿ
02 101739 90 Assy High Voltage Power Supply ÿ ÿ ÿ ÿ
X2 101739 90 Exchange High Voltage Power Supply ÿ ÿ ÿ ÿ

Publication date: 12/21/2007


6-15
Varian 700-ES Series Spectrometer

Torch compartment
Part Number Description 710 715 720/730 725735 Ref
01 106526 90 Assy snout for Radial ÿ ÿ 1
01 106659 90 Assy Cooling Plate - Axial ÿ ÿ 2
01 107752 00 Assy Torch Clamp Universal ÿ ÿ ÿ ÿ 3
01 107894 90 Assy RF box door handle - 7XX Series ÿ ÿ ÿ ÿ 4
01-106014-00 Assy Loom RF door microswitches ÿ ÿ ÿ ÿ 5
08 101379 00 Hsg, pre-opt. L/D axial ÿ ÿ 6
08 101884 00 Mount RF coil grounded swagelock ÿ ÿ ÿ ÿ 7
plated
08 101886 00 Mount RF coil live swagelok plated ÿ ÿ ÿ ÿ 8
09 101001 00 Plate PTFE work coil Radial ÿ ÿ 9
09 101901 00 Plate PTFE work coil Axial ÿ ÿ 10
12 101096 00 Strip Contact ÿ ÿ ÿ ÿ 11
(RF door channel – 406mm)
15 102202 00 NUT Finger Axial Cone ÿ ÿ 12
15-102209-00 Screw (for insulator/cooling plate axial) ÿ ÿ 13
20 100864 00 Window RF box ÿ ÿ ÿ ÿ 14
21 100215 00 Insulator (for axial) ÿ ÿ 15
36 100073 00 Cone Pre-optics for Axial ÿ ÿ 16
59 100495 00 Cable fibre optic ÿ ÿ ÿ ÿ 17
99 101111 00 Kit Coil Resonant ÿ ÿ 18
99 101279 00 Assy work coil Axial ÿ ÿ 19
99 101280 00 Assy work coil Radial ÿ ÿ 20

18
20
1
15

9
2

3
16

19 10 12

Publication date: 12/21/2007


6-16
Varian 700-ES Series Spectrometer

Current sensor compartment


Part Number Description 710 715 720/730 725735 Ref
01 106989 00 Assy current sensor Axial (complete) ÿ ÿ 1
01 107009 00 Assy current sensor Radial (complete) ÿ ÿ 2

01 106008 00 Assy loom current sensor/fibre optic ÿ ÿ ÿ ÿ 3


01 107660 00 Assy loom current sensor ÿ ÿ 4
(axial - 6 pin)
01 107810 00 Assy loom current sensor ÿ ÿ 5
(radial - 6 pin)
12 100794 00 EMI feed-thru 10 A RF ÿ ÿ ÿ ÿ 6

1 Ax or 4 Ax or
2 Rad 5 Rad

Anode compartment
Part Number Description 710 715 720/730 725735 Ref
56 101327 00 Vacuum tube 3CX1500D3 ÿ ÿ ÿ ÿ 1
01 105969 00 Assy Choke (top) ÿ ÿ ÿ ÿ 2
01 105970 00 Assy choke, RF grid (bottom) ÿ ÿ ÿ ÿ 3
05 100405 00 Capacitor CR 200pF 5% 15KV ÿ ÿ ÿ ÿ 4
05 100406 00 Capacitor CR 75pF 5% 15KV ÿ ÿ ÿ ÿ 5
08 101271 00 Hose Clamp, 95.25x71.44 mm ÿ ÿ ÿ ÿ 6
12 101098 00 RF Contact Strip ÿ ÿ ÿ ÿ 7
(for RF box top – 406mm)

2 3

1 4

Publication date: 12/21/2007


6-17
Varian 700-ES Series Spectrometer

Grid compartment
Part Number Description 710 715 720/730 725735 Ref
05 100363 00 Capc MI 1nF/500V ÿ ÿ ÿ ÿ 1
05 100393 00 Capc CT 25pF/5kV/5% ÿ ÿ ÿ ÿ 2
43 100434 00 Screen mesh "Honey comb"- Ø107mm ÿ ÿ ÿ ÿ 3
44 100083 00 Assy power tube socket ÿ ÿ ÿ ÿ 4
99 101034 00 Kit, Grid Resistor Network ÿ ÿ ÿ ÿ 5
(Resistor 2k2/50W & 4k7/50W)

4 2

1
5

Filter compartment
Part Number Description 710 715 720/730 725735 Ref
01 106013 00 Assy cable HV ÿ ÿ ÿ ÿ 1
05 100327 00 Capc Ct 1nF/7.5kV ÿ ÿ ÿ ÿ 2
12 100795 00 Emi Filter Feed-Thru 25A ÿ ÿ ÿ ÿ 3
21-100167-00 Insulator Bush 6ID ÿ ÿ ÿ ÿ 4
21-100173-00 Insulator Pad PTFE ÿ ÿ ÿ ÿ 5
53 100097 00 Choke 1.8 uH ÿ ÿ ÿ ÿ 6
69-100198-00 O-ring 7/16ID x 5/8OD x 3/32IN NIT ÿ ÿ ÿ ÿ 7
74 100047 00 Ferrite bead 3.2OD 1.3ID 3.0L ÿ ÿ ÿ ÿ 8

1 2

3 8

Publication date: 12/21/2007


6-18
Varian 700-ES Series Spectrometer

Igniter compartment
Part Number Description 710 715 720/730 725735 Ref
01 106496 90 Assy ignitor box complete ÿ ÿ ÿ ÿ 1

01 106454 00 Assy loom ICP igniter (red/black) ÿ ÿ ÿ ÿ 2


01 107767 00 Assy loom ignitor kit ICP-ES ÿ ÿ ÿ ÿ 3
(all looms inside igniter)
05 100128 00 Capc EL 100U 35V ÿ ÿ ÿ ÿ 4
12 100794 00 EMI filter feed-thru 10A ÿ ÿ ÿ ÿ 5
14 100016 00 Diode IN4007 Rectifier ÿ ÿ ÿ ÿ 6
15 102612 00 M6 Nylon Nut ÿ ÿ ÿ ÿ 7
16 100793 00 Barb elbow ML Nylon ÿ BSP ¼ Hose ÿ ÿ ÿ ÿ 8
16 101336 00 Argon Igniter Barb ÿ ÿ ÿ ÿ 9
39 101286 00 Resistor 27E/5%/5W ÿ ÿ ÿ ÿ 11
49 100092 00 Latching clip ADH.CBL ÿ ÿ ÿ ÿ 12
51 100103 00 Terminal block 4WAY/10A ÿ ÿ ÿ ÿ 13
79 100287 00 Igniter gas 1.5VDC ÿ ÿ ÿ ÿ 14

11 6
14
13 5

8 7

Miscellaneous
Part Number Description 710 715 720/730 725735
48 100206 00 Micro switch, RF Interlocks ÿ ÿ ÿ ÿ
03 100003 00 Ball St St 0.25 Aisi 420c (door) ÿ ÿ ÿ ÿ
12 100965 00 Contact fingers RFI/EMI ÿ ÿ ÿ ÿ
14 180165 00 Diode Zener In4740a ÿ ÿ ÿ ÿ
15 101672 00 Screw S/Tap Special 7 X 25 ÿ ÿ ÿ ÿ

Publication date: 12/21/2007


6-19
Varian 700-ES Series Spectrometer

6.2.8 Chassis

Sample compartment
Part Number Description 710 715 720/730 725735 Ref
15 101795 00 Stud, spraychamber mount ÿ ÿ ÿ ÿ 1
15 102385 00 Screw stud ASA, S/CH mount ÿ ÿ ÿ ÿ 2
16 100854 00 Coupling body 1/8” flow (Neb) ÿ ÿ ÿ ÿ 3
(mating coupling 16 100853 00)
16 100855 00 Coupling body ¼” flow (Aux) ÿ ÿ ÿ ÿ 4
(mating coupling 16 100856 00)

4 2

Mains power compartment


Part Number Description 710 715 720/730 725735 Ref
01 107773 00 Loom Mains Input Wiring ÿ ÿ ÿ ÿ 1
05 100333 00 Capacitor 22000µf ÿ ÿ ÿ ÿ 2
05 100359 00 Capacitor PP 840 400V ÿ ÿ ÿ ÿ 3
08 101155 00 Gland cable black (for mains cable) ÿ ÿ ÿ ÿ 4
12 101095 00 Filter RFI Schaffner FN686-25-23 ÿ ÿ ÿ ÿ 5
14 101061 00 Diode Bridge Rectifier ÿ ÿ ÿ ÿ 6
14 101311 00 Varistor Mo275VAC ÿ ÿ ÿ ÿ 7
19 100085 90 Fuse Holder (qty 2) ÿ ÿ ÿ ÿ 8
19 100088 00 Circuit Breaker 30A ÿ ÿ ÿ ÿ 9
19 100092 00 Fuse 6.3A ÿ ÿ ÿ ÿ 10
35 100067 00 Lamp Neon Green ÿ ÿ ÿ ÿ 11
39 100091 00 Resistor 3K3 ÿ ÿ ÿ ÿ 12
39 101075 00 Resistor OR1 ÿ ÿ ÿ ÿ 13
39 101265 00 Resistor 7k0 5%/30w W/wound ÿ ÿ ÿ ÿ 14
51 100065 00 Lug Solderless ÿ ÿ ÿ ÿ 15
53 100198 00 Filament Transformer Type 4204 ÿ ÿ ÿ ÿ 16
53 100210 00 Transformer Power Type 4432 ÿ ÿ ÿ ÿ 17
48 100348 00 Switch Rocker Mains ÿ ÿ ÿ ÿ 18
48 100386 00 Switch Push Button Illuminated Led ÿ ÿ ÿ ÿ 19
48 100389 00 Relay Solid State 280 VAC 18A ÿ ÿ ÿ ÿ 20
79 100209 00 Power Supply +5/+12Vdc ÿ ÿ ÿ ÿ 21

19 18 11

21

Publication date: 12/21/2007


6-20
Varian 700-ES Series Spectrometer

15

12

16
2

17

5
1 20

Publication date: 12/21/2007


6-21
Varian 700-ES Series Spectrometer

6.2.9 Cooling Water Flow

Part Number Description 710 715 720/730 725735 Ref


01 107971 90 Assy, Water flow sensor (complete) ÿ ÿ ÿ ÿ 1

01 107967 00 Assy Loom Water Flow Sensor ÿ ÿ ÿ ÿ 2


08 100417 00 Hose clamp (for ¼” hose) ÿ ÿ ÿ ÿ 3
08 102063 00 Hose clamp (for 3/8” hose) ÿ ÿ ÿ ÿ 4
15 101458 00 Grommet hollow 15,87 ID ÿ ÿ ÿ ÿ 5
15 102315 00 Camera cooling water stud ÿ ÿ ÿ ÿ 6
15 102317 00 Camera cooling water washer ÿ ÿ ÿ ÿ 7
16 100424 00 Cnctr ML/run 'T' s/lock ÿ ÿ ÿ ÿ 8
16 100701 00 Barb ML brass 1/8 BSP to ¼ hose ÿ ÿ ÿ ÿ 9
16 101001 00 Barb ML,Brass straight ¼BSP 3/8 hose ÿ ÿ ÿ ÿ 10
16 101197 00 Camera cooling water connector ÿ ÿ ÿ ÿ 11
16 101244 00 Fitting ¾-10 nut/tail plastic ÿ ÿ ÿ ÿ 13
16 101340 00 Adaptor 15 Dia to 1/8 BSP ÿ ÿ ÿ ÿ 14
16 101382 00 Tee ¼" tube, FML ¼" NPT ÿ ÿ ÿ ÿ 15
37 100082 00 Tube Nylon ¼IN OD 1000 PSI ÿ ÿ ÿ ÿ 16
37 100297 00 Hose ortac ¼ ID ÿ ÿ ÿ ÿ 17
37 100298 00 Hose ortac 3/8 ID ÿ ÿ ÿ ÿ 18
37 100376 00 Water cooling hose NAPE TFE ÿ ÿ ÿ ÿ 19
37 100431 00 Tube polyurethane 4id x6 od ÿ ÿ ÿ ÿ 20
(for camera)
68 100067 00 Filter liquid 3/4 body ÿ ÿ ÿ ÿ 21
99 100886 00 Kit, plumbing, water coolers ÿ ÿ ÿ ÿ 22
99 101088 00 Kit camera cooling water hoses ÿ ÿ ÿ ÿ 23

6
13
7

11

21

14 & 8
14 & 9

15
21

Publication date: 12/21/2007


6-22
Varian 700-ES Series Spectrometer

6.2.10 Air Flow

Instrument
Part Number Description 710 715 720/730 725735 Ref
01 105886 90 Cooling Fan Assy complete ÿ ÿ ÿ ÿ 1

01 105942 90 Assy filter cooling air ÿ ÿ ÿ ÿ 2


01 105947 00 Assy blower mtr & connections (only) ÿ ÿ ÿ ÿ 3
08 100995 00 Cushion mount for cooling fan ÿ ÿ ÿ ÿ 4
16 101143-00 Elbow Rubber cooling duct ÿ ÿ ÿ ÿ 5
18 100028 00 Fan impellor counter-clockwise ÿ ÿ ÿ ÿ 6
37-100246 00 Tube Nalgene 0.12” ID x 0.062” wall ÿ ÿ ÿ ÿ 7
48 100373 00 Switch, pressure MPL 9300, N/O ÿ ÿ ÿ ÿ 8
99 101133 00 Kit, MK3 Air flow sensor upgrade ÿ ÿ ÿ ÿ 9

8
5
7

Laboratory
Part Number Description
18 100001 00 Exhaust fan 240VAC/50Hz
18 100002 00 Exhaust fan 115VAC/60Hz
55 100012 00 Exhaust flue
99 100565 00 Kit extraction 115VAC/60Hz
99 100566 00 Kit extraction 240VAC/50Hz
89 100007 00 Kit gas/mains connection AUS
89 100007 01 Kit gas/mains connection USA
89 100007 02 Kit gas/mains connection EUR

Publication date: 12/21/2007


6-23
Varian 700-ES Series Spectrometer

6.2.11 Miscellaneous

Part Number Description


08 100553 00 Clamp Cable S/Adh
08 100884 00 Herbie clamp, 20.8 to 23.6 mm
08 100945 00 Clamp Hose Jubilee Size # 000
08 101032 00 Clamp, herbie 7.7 to 8.2 mm
(nebulizer)
08 101320 00 Cooled s/ch mounting

12 100384 00 Cnctr Socket (Crimp)


12 100385 00 Contact Male 2.36mm/Tin Plated
12 100602 00 Cnctr Receptacle 6 Way
12 100606 00 Cnctr Receptacle 15 Way
12 100609 00 Tmnl 1.58 Mm Male/Crimp/
12 100610 00 Tmnl 1.58mm Crimp/Female/
12 100613 00 Contact Utilux H9007/R6000
12 100614 00 Cnctr Socket Crimp
12 100622 00 Cnctr Recept 5 Way Fml
12 100623 00 Housing Plug/5way/Molex
12 100629 00 Cnctr Recept. Tab/Q.C./6,3mm
12 100632 00 Housing 6way Socket/2,5mm
12 100701 00 Housing 2way Socket/2,5
12 100709 00 Cont. Fem 28-22awg/1.0-1.7mm
12 100723 00 Cnctr Idpf Cbl 12 3,96 18g T
12 100736 00 Cnctr Idp F Cbl 8 3,96 18g T
12 100738 00 Cnctr Idp F Cbl 3 3,96 18g T
12 100742 00 Cnctr Idp F Cbl 12 2,54 24g T
12 100743 00 Cnctr Idp F Cbl 6 2,54 24g T
12 100745 00 Header Ps M Pwb 12 2,54
12 100747 00 Header 3way Idc/Male/2,54/Pwb
12 100748 00 Key Cnctr Idp 2,54 P-Duit
12 100754 00 Contact fingers RFI/EMI97-515
(used on snout & RF box .610m)
12 100760 00 Housing Mlx R 6way
12 100761 00 Housing Mlx R 3 M3191-3r1/10
12 100790 00 Cover White/ 3 Way/Suits 2.54 Idc
12 100791 00 Cover White/ 6 Way/Suits 2.54 Idc
12 100792 00 Cover White/ 8 Way/Suits 2.54 Idc
12 100793 00 Cover White/12 Way/Suits2.54 Idc
12 100878 00 Cnctr Header Ml Pcb 26 Way L&E

15 100997 00 Screw M 4 X 8 Set Black


15 101064 00 Screw M 4 X 5 Set Black
15 101072 00 Screw M 3 X 8 Pan Xylan
15 101073 00 Screw M 3 X 10 Pan Z/Plt
15 101074 00 Screw M 3 X 12 Pan Xylan
15 101076 00 Screw M 3 X 20 PAN Z/PLT
15 101082 00 Screw M 4 X 12 Pan Captive W.
15 101090 00 Screw M 4 X 8 Csk Xylan
15 101100 00 Nut M 3 Hex
15 101101 00 Nut M 4 Hex
15 101189 00 Screw M 3 X 10 Csk Z/Plt
15 101209 00 Screw M 4 X 16 Pan Xylan
15 101233 00 Screw M 3 X 8 CAP Black
15 101303 00 Nut M 6 Hex
15 101857 00 Stud M4x20 St Steel
15 102612 00 Nut M16 – nylon

Publication date: 12/21/2007


6-24
Varian 700-ES Series Spectrometer

15 102674 00 Screw s/tap type AB 6 x 0.5 pan s/s

Publication date: 12/21/2007


6-25
Varian 700-ES Series Spectrometer

Miscellaneous (continued)

Part Number Description


15 180295 00 WASHER SPRING 3.1 ID SS
15 180297 00 Washer Spring 4.1 ID Stn St

16 100268 00 Elbow Ml Brass 1/4 Bsp 1/4 tube


16 100424 00 Cnctr Male, swage, “T”
16 100894 00 Elbow Male 1/4 Npt 1/4 Tube
16 100468 00 Cnctr Adaptr Cajon B-4-Hc-A401
16 100578 00 Elbow Ml/Fem Brass 1/8 Bsp X 1/8
16 100719 00 Cnctr 3 Way Tee Barb 1/4 Tube
16 100855 00 Coupling Body 1/4in Flow
16 100929 00 Cnctr Barb 1/16 Tube X 10-32 Rad
16 100980 00 Cnctr Union B/Hd B-400-61 S/Lok
16 100995 00 Elbow Male Nylon 1/4 Npt 1/4
16 101001 00 Barb Male, Brass Str 1/4 Bsp 3/8

20 100695 00 Glass concentric K neb, Axial


20 100765 00 C type conc. glass neb. - hi salts
20 100812 00 Torch, quartz, axial
20 100816 00 Hi-flow glass concentric K neb, Axial

21 100064 00 Ins Terminal Clr Utilux H1135

24 100110 00 Grommet Sectn .187 In (Blck Nylx)


24 100238 00 Tubing, rubber 0.187" od
(Plasma/auxiliary to side wall)
24 100314 00 Plfns Slvg 4.7 Black Mm
24 100320 00 Nylon Tube 6.0x4.0 Bk Mm, Rad
24 100619 00 Camera purge PTFE tubing.
(068OD x 0.016 IN)

3110008700 Label High Voltage


3110092000 Label protective Earth 19mm DIA
3110092100 Label Earth 19mm DIA

37 100066 00 Tubing pvc 6 mm id


37 100246 00 Waste tubing aqueous pvc
37 100248 00 Tube Tef .062 Odx .016in w,Rad
37 100272 00 Pump tubing aqueous black,
50 rpm = 2 ml/min, 12 per pack
37 100273 00 VGA pump tubing (purple/black)
37 100291 00 Tubing, samp flr, pvc 12.5 mm id
37 100315 00 Tubing, nalgene 1/8 id X 1/4" od Argon
to nebulizer
37 100334 00 Tubing, nalgene 1/4 id X 5/15" od -
torch, plasma, auxiliary
37 100337 00 Tubing, pvc 0.030" id
37 100339 00 S’chamber drain to pump tubing PVC
37 100344 00 Pump tubing aqueous (white)
30 rpm = 2 ml/min, 12 per pack
37 100345 00 Pump tubing aqueous (grey)
15 rpm = 2 ml/min, 12 per pack
37 100346 00 Pump tubing aqueous (blue)
15 rpm = 3.6 ml/min

Publication date: 12/21/2007


6-26
Varian 700-ES Series Spectrometer

Publication date: 12/21/2007


6-27
Varian 700-ES Series Spectrometer

Miscellaneous (continued)

Part Number Description


37 100348 00 Pump tubing aromatic (black)
15 rpm = 0.64 ml/min
37 100350 00 Pump tubing aromatic (white)
15 rpm = 1.2 ml/min
37 100352 00 Pump tubing aromatic (grey)
37 100353 00 S’chamber drain tube aromatic
37 100354 00 Drain tubing aromatic
37 100357 00 Drain tubing ketone (repl drain)
37 100359 00 Pump tube ketone (repl samp)

40 100128 00 Carton 140x140x 40 Kit


49 100036 00 Tie Cable Panduit Plt1m-Dtp
49 100086 00 Tie Cable

69 100012 00 O Ring 1/4 Idx3/8odx1/16in Nitrile


69 100060 00 O ring, s’chamber drain poly
69 100082 00 O Ring s/ch Rad
69 100159 00 O Ring 9/16x11/16x1/16in Nitrile
69 100174 00 O-ring, s’chamber, top/bottom
69 100198 00 O-ring, outer nebulizer holder

82 100282 00 Sealant Loctite 569 50ml

99 100558 00 Tubing and connector kit


99 100568 00 Inert demountable torch kit
99 100570 00 Quartz injector tube kit
99 100571 00 Spraychamber/torch tubing kit
99 100572 00 Sample compartment O-ring kit
99 100573 00 Torch injector tube holder kit
99 100609 00 Kit, tubing ketone drain
99 100610 00 Kit, tubing ketone sample
99 100720 00 Kit, Liberty organics
99 100816 00 Kit O-rings, organics s’chamber
99 100975 00 Kit tubing ICP-OES
99 100844 00 Kit, inert sample introduction - V groove
neb., S-M spraychamber

6.2.12 Publications

Part Number Description


Operation manual
Pre-installation manual
Service manual
ICP Expert II software

Publication date: 12/21/2007


6-28
Varian 700-ES Series Spectrometer

6.3 Test Equipment and service tools


6.3.1 Factory Sourced

Part Number Description Ref


72 100211 00 Pre-optics alignment target
72 100314 00 Torch clamp alignment tool
72 100275 00 “C” spanner, 34 mm diameter,
(for poly removal)
72 100309 00 “C” spanner, 55 mm diameter,
( for pre-optics window removal)
72 100283 00 Laser Backlighting tool,
72 100288 00 Pilot mirror target - Pre-optics 2
72 100289 00 Alignment Slit “Big”
72 100307 00 Pre-Optics target and setting guide 1
72 100308 00 Tool, nut , 2 pin adapter
(for poly box holding screws)
72 100326 00 Tool, nut, 2 pin adapter
(for RF box holding
screws)
72 100311 00 Modified spintight for focus mirror
adjustment
99 100587 00 Tool, gas calibration/flow
99 100750 00 Kit, tools
2 Pozidriv scrwdrivers (#1,2),
2 wire insertion tools

1 2

6.3.2 Locally Sourced

Description
Oscilloscope (with 100 MHz Bandwidth)
Multimeter (with True RMS Reading)
Spintight 7 mm A/F (nut driver)
for camera removal
(maximum O.D. 11mm)

Publication date: 12/21/2007


6-29
7 Diagnostics and
troubleshooting
7.1 Introduction
This section contains diagnostic information including:
• Instrument initialization
• EPROM-resident diagnostics
• PC software diagnostic folders
• Error log
• Windows Registry
• Information required when requesting assistance

7.1.1 Important information


You must use the methods described in this section when
working with the diagnostic facilities provided with the Varian 700-
ES Series instrument. All of the following points should be read
and understood to avoid the risk of damage to the instrument or
abnormal operation.
The DIP switches on the 80C32 controlled pwbs will alter the
operation of the instrument. Before attempting to use the
instrument for normal operation, ensure that all DIP switches are
set to normal run position and the instrument power switch is
turned off and on.

7.2 Instrument initialization


This section provides information about instrument initialization
routines which are started when the low power switch is turned
on or when a system reset is generated.

7.2.1 386EX Control Board (02 101689 90)


Application of low power to the 80C32 microprocessor on the
386EX control pwb produces an instrument system reset signal.
This signal resets the gas control and RF interface pwbs.
A system reset can be forced by pressing a switch on the 386EX
control pwb. During the reset, the 80C32 samples the state of
DIP switches SW2-2 to SW2-6, turns LEDs D20, D21, and D22
on and then performs a four second RAM test.
When the 386EX control pwb has initialized, all LEDs are turned
off, except for D20 which is flashed periodically. This indicates
that the RS-422 serial communications link is working properly.
Varian 700-ES Series instruments

When the instrument has finished initializing the seven-segment


LED will flash the firmware version to the first significant digit.

386EX control board: Normal startup sequence


LED Duration Comment
(Boot Block)
Decimal point only 1-2s Reset
1 < 1s Flash memory CRC test (boot block only).
2 < 1s RAM test (all of RAM).
3 2-3s Flash memory CRC tests
(main instrument firmware).
4 2s All OK - waiting for PC-initiated flash
download. (FWUpdate.exe)
6 3s Attempting to home the pre-optics mirror M1
X,Y (alternating) forever X, Y are the firmware version X.Y (eg. 1.0) X
will display while the pre-optics is initialized,
then the display will alternate X then Y to
show version number. X will be on longer than
Y.

386EX control board: Startup sequence if FWUpdate.exe running


LED Duration Comment
(Boot Block)
Blank 1-2s Reset
1 < 1s Flash memory CRC test (boot block only).
2 < 1s RAM test (all of RAM).
Switch diagnostics 1, 2 and 11 (the normal
boot sequence is interrupted at this point).
3 2-3s Flash memory CRC tests
(main instrument firmware).
4 < 2s All OK - waiting for PC-initiated flash
download.
7 indefinite In download mode, waiting for command from
the PC,
or returning version information to the PC.
8 < 60s Erasing flash memory and downloading new
program.
9 < 3s CRC test on new program.
0 (flashing rapidly) until reset All OK
Special Cases
6 (instead of 4) indefinite Main program CRC is bad: program cannot
execute.
Note: Following a successful download, the firmware will generate a reset and the
normal startup sequence will begin.

7-2 Publication date: 10/16/2006


Varian 700-ES Series instruments

Startup error codes:


386EX control board:
Boot block error codes (same as satellite board codes)
LED Duration Comment
0 (flashing rapidly) until reset OK – download completed
1 (flashing rapidly) until reset Boot block CRC failure
2 (flashing rapidly) until reset RAM test failure
5 (flashing rapidly) until reset Flash memory access failure
6 (flashing rapidly) until reset Incompatible F/W (boot block or main
instrument) and H/W
7 (flashing rapidly) until reset Flash memory programming failure
8 (flashing rapidly) until reset Unable to execute instrument program
(internal F/W fault)

7.2.2 External Satellite Board (Boot Block Programmer)


The Boot Block Programmer is not part of the instrument. It is
used only to program the Boot Block of the flash memory on the
386EX control Board - see Section 13 for full details. The
sequence during initialization and the error codes are contained
in the following charts.

Satellite Board: Normal Programming Sequence


LED (satellite board) Duration Comment
- < 1s Reset
1 < 1s Flash memory CRC test (satellite board copy
program only)
2 < 1s RAM test (all of RAM)
6 < 1s Flash memory CRC test (boot block image to
be copied)
7 1-2s Erasing, programming and verifying boot
block
0 (flashing rapidly) until reset All OK

Publication date: 10/16/2006 7-3


Varian 700-ES Series instruments

Satellite Board: Error Codes


LED (satellite board) Duration Comment
0 (flashing rapidly) until reset All OK - programming complete
1 (flashing rapidly) until reset Satellite board copy program CRC failure
2 (flashing rapidly) until reset RAM test failure
4 (flashing rapidly) until reset Boot block program image CRC failure
5 (flashing rapidly) until reset Flash memory access failure
6 (flashing rapidly) until reset Incompatible F/W (boot block or main
instrument) and H/W
7 (flashing rapidly) until reset Flash memory programming failure

7.2.3 Gas control pwb (02 101595 90)


The gas control pwb is reset by the system reset signal from the
386EX control pwb. During a reset, the 80C32 samples the state
of DIP switches SW1-2 to SW1-6, momentarily turns LEDs D4,
D5, D6 and D7 on and does a four second RAM test. The 80C32
then reads the state of the argon inlet pressure switch.
When the gas control pwb has initialized, all LEDs are turned off,
except for D4 which is flashed periodically. This indicates that the
RS-422 serial communications link is working properly.

7.2.4 RF interface pwb (02 101498 90)


The RF interface pwb is reset by the system reset signal from the
386EX control pwb. During a reset, the 80C32 samples the state
of DIP switches SW1-2 to SW1-6, momentarily turns LEDs D4
and D5 on and does a four second RAM test.
IC9 is reset to ensure both the high voltage anode supply and
filament supplies are disabled during initialization.
When the RF interface pwb has initialized, D4 is flashed
periodically. This indicates that the RS-422 serial
communications link is working properly.

7.2.5 Peristaltic pump pwb (02 102029 90)


The Peristaltic pump pwb is reset by the system reset signal from
the 386EX control pwb via the Gas control pwb. A reset switch is
also provided to reset the device. During a reset, the MCU
samples the state of the jumpers to provide access to the various
diagnostic modes.

7-4 Publication date: 10/16/2006


Varian 700-ES Series instruments

7.3 EPROM diagnostics


All four of the microprocessor-based pwbs (386EX control, gas
control, RF interface and Peristaltic pump pwbs) are fitted with
diagnostic switches/jumpers and LED’s.
The diagnostic tests invoked by the diagnostic switches/jumpers
test various functions of the instrument and should be used to
help you find and fix faults.
All switch driven, EPROM diagnostic tests will work when the pwb
has been removed from the instrument for bench testing. All that
is needed is the power supply connections to run the pwb. This
feature allows you to run the full range of diagnostic tests while
bench-testing the pwbs.
To run any of the diagnostic tests, select the required switch
combination and enable the reset function (turn on the low
voltage). Apply +5 VDC to the 80C32 microprocessor (if bench
testing), or create an instrument system reset at the 386EX
control pwb to start the test.
The tests will continue to cycle until the switches are returned to
the normal operating position and the pwb is re-intialized by a
system reset.

7.3.1 386EX control pwb


DIP switch settings are defined as:
• Open = logic 1 = High = O
• Closed = logic 0 = Low = CL
Switch SW1 generates a system reset on the 386EX control
board which resets all boards.
SW3 is a rotary switch which is normally set to zero and is
reserved for future use.
DIP switch SW2 on the 386EX control pwb performs two tests:
SW2 6 5 4 3 2 1 Operation
X CL CL CL CL O Normal operation
Test X CL CL CL CL O/CL IEEE communications time out

Note Check that SW1-1 on the gas control pwb is set to closed (normal
operating mode) upon the completion of all tests.

Publication date: 10/16/2006 7-5


Varian 700-ES Series instruments

Communications Test
The 386EX control pwb and PC software communicate by the
IEEE RS 488 parallel link. With SW2-1 set to open, the plasma is
automatically extinguished if the PC fails to communicate with the
instrument for a period of more than ten seconds. Set SW2-1
closed before power up to disable this feature. Setting SW2-1
closed will allow the plasma to stay on if the PC does not
communicate with the instrument for extended periods of time.

Note Ensure that switch SW2-1 is set open when you have finished
testing.

Camera PWB simulator


The 386EX control pwb includes circuitry that simulates the
camera assembly. The simulator has been designed as a stand-
alone test circuit that simulates camera pwb data and control
functions. The simulator tests the control board, including the
plug, the interconnecting cable, and the PC interface.
To connect and run the camera simulator:
1. Turn off the instrument and remove the covers from the right
side of the instrument to allow access to the camera and
386EX control board.
2. Disconnect the cable connecting the 386EX control board to
camera board at the camera board end.
3. Plug the now disconnected cable into the test plug, PL4, on
the 386EX control board. You may need to swing the 386EX
control board out to gain access.
4. Turn on the instrument.
5. Check LED’s D13 and D15 to D19 are lit. They indicate
relevant signals are passing through the camera cable and
can be used as a quick check of the cable and supplies.
6. Run the Varian 700-ES Series instrument PolyAlign software
and select the Location folder.
7. Press the “Read spectrum” button and view the echellogram.
8. If everything is working properly you should see a ramp
across both the left and right side of each DLA for the Varian
720/730-ES Series instruments, or a set of nested diamonds
for the Varian 710-ES Series instrument as shown below.

7-6 Publication date: 10/16/2006


Varian 700-ES Series instruments

Varian 720/730-ES series loopback echellogram

Varian 710-ES series loopback echellogram

Publication date: 10/16/2006 7-7


Varian 700-ES Series instruments

7.3.2 Gas control pwb


The diagnostic tests are selected by the DIP switch SW1.
O = switch open
CL = switch closed
X= switch open or closed (don’t care)

Test SW1 Switch Positions Test Description


1 2 3 4 5 6
* CL O O O O X System reset disable (normal operation)
1 O O O O O X System reset enable
2 CL O O CL O X LED D4-D7 Gray code test
3 CL O O O CL X 8031 serial port test
4 CL CL O CL CL X SV1 to SV7 & igniter simultaneous
5 CL O CL O CL X SV1 to SV6 sequence
6 CL O CL CL CL X SV9-10-8-11 sequence
7 CL CL CL O O X Peristaltic pump at 25RPM & MFC at 1SLPM
8 CL O O CL CL X RAM test
9 CL CL O CL O X 8031 Ports 1&3
10 CL CL O O CL X IC14 input latch - HI nibble
11 CL O CL O O X IC14 input latch - LO nibble
12 CL O CL CL O X Peristaltic pump & MFC ramp

Test 1 - System reset enable


Allows the Gas Control pwb to be reset externally, via OP1, from
the 386EX control pwb.

Test 2 - LED D4-D7 Gray code test


Cycles LEDs D4 to D7 in a Gray code pattern

Test 3 - 8032 serial port test


IC7 outputs a pulse train on pin 11 (TXD)

Test 4 - SV1 to SV7 & igniter simultaneous


Simultaneously activates the solenoid valves controlling plasma
and auxiliary gas flows (SV1 to SV7) and the igniter.
LEDs D4 to D7 on the Gas Control pwb, and LEDs D1 to D8 on
the Gas Box Interconnect pwb, are ON when the solenoid valves
and igniter are ON.

Test 5 - SV1 to SV6 sequence


Activates the solenoid valves SV1 to SV6 in sequence. Each
solenoid is activated for around 1 second, at which time the
corresponding LED (D1 to D6) on the Gas Box Interconnect pwb,
is ON. LEDs D4 to D7 on the Gas Control pwb are ON for 6
seconds, OFF for 1 second.

7-8 Publication date: 10/16/2006


Varian 700-ES Series instruments

Test 6 - SV9-10-8-11 sequence


Activates solenoid valves SV9-SV10-SV8-SV11, in sequence.
Each solenoid is activated for around 1 second, at which time the
corresponding LED (D9 to D12) on the Gas Box Interconnect
pwb is ON. LEDs D4 to D7 on the Gas Control pwb are ON for 3
seconds, OFF for 1 second.

Test 7 - Peristaltic pump at 25RPM & MFC at 1SLPM


Sets the peristaltic pump speed to 25rpm (TP13=2.45V) and the
MFC flow rate to 1SPLM (TP18=3.3V). LED D5, D6 & D7 reflect
MFC status.

LED D4 ON pwb is 02.10595.00


LED D5 ON MFC not connected
LED D6 ON MFC HIGH FLOW (TP19 ≥ 4V)
LED D7 ON MFC LOW FLOW (TP19 ≤ 2.7V)

Test 8 - RAM test


Performs a simple test of the RAM, IC12. All LEDs OFF indicates
that the RAM is OK

Test 9 - 8031 Ports 1&3


Writes a series of test value to ports P1 (P1.0 to P1.7) and P3
(P3.0 to P3.5) of IC7. Data sequence is 00, 55, AA, FF at 1/2
second intervals. Note that the LEDs D4 to D7 are driven by port
P1.

Test 10 - IC14 input latch - HI nibble


Continuously reads input latch IC14 and displays the high four
bits on LEDs D4-D7. A high logic level at the input of IC14 turns
the corresponding LED ON.

LED D4 ON IC14 pin6 HI LOW argon pressure


LED D5 ON IC14 pin7 HI LOW nebuliser pressure
LED D6 ON IC14 pin8 HI MFC HIGH FLOW
LED D7 ON IC14 pin9 HI MFC LOW FLOW

Publication date: 10/16/2006 7-9


Varian 700-ES Series instruments

Test 11 - IC14 input latch - LO nibble


Continuously reads input latch IC14 and displays the low four bits
on the LEDs D4-D7. A high logic level at the input of IC14 turns
the corresponding LED ON.

LED D4 ON IC14 Pin2 HI MFC not connected


LED D5 ON IC14 Pin3 HI VAC sense (PL4 Pin6)
LED D6 ON IC14 Pin4 HI ?
LED D7 ON IC14 Pin5 HI VAC option (PL4 Pin1)

Test 12 - Peristaltic pump & MFC ramp


The peristaltic pump slowly ramps down from full speed to zero
speed, as TP13 ramps down from 4.9V to 0V (10 seconds). The
MFC slowly ramps up from 0 SLPM to 1.5 SLPM, as TP18 ramps
up from 0V to 5.0V (in 10 seconds).

7.3.3 RF interface pwb


There are three functions assigned to DIP SW1 on the RF
interface pwb:
0= Open, 1= Closed
SW1 123456 Operation
000000 Normal operation
Test 1 111111 Local reset
Test 2 101111 LED test
Test 3 110111 80C32 serial port test

RF Interface Test 2
This test is included in all microprocessor-driven pwbs. When it is
enabled, the test cycles LEDs D3, D4, D5 and D6 in a Gray code
pattern.

RF Interface Test 3
This test is included in all microprocessor driven pwbs. When it is
enabled, the 80C32 outputs a pulse train at the TXD output. Set
DIP switch 3 closed position and use an oscilloscope to sample
TXD on pin 11 of IC1.

7-10 Publication date: 10/16/2006


Varian 700-ES Series instruments

7.3.4 Peristaltic pump pwb


There is a major and a minor set of diagnostic modes for the
Peristaltic pump pwb. The major diagnostic mode is sensed from
the jumper settings immediately after hard reset (or power up)
and locked in until the next reset (or power down).
The minor diagnostic mode is continuously sensed and acted on
in the context of the major diagnostic mode.
During diagnostics, the LEDs may be used differently from
normal operation as described below.

Major Mode Minor Mode Mode Description

Jumper 2 Jumper 1 Jumper 2 Jumper 1


Normal Operation.
open open open open 00
Normal Indications.
Normal Operation.
open open open inserted 01 Supply Voltage
(3 digits) shown on red LED.
Normal Operation.
Control Frequency
open open inserted open 02
(up to 3 digits) shown on red
LED.
Normal Operation.
open open inserted inserted 03
Normal Indications.

open inserted x x 1X not implemented, don’t use

Motor Drivers off,


inserted open open open 20
PWM operating
60sec @ 15 RPM,
inserted open open inserted 21
40sec @ 50RPM
40sec @ 15 RPM,
inserted open inserted open 22
60sec @ 50RPM
4sec @ 15 RPM,
inserted open inserted inserted 23
6sec @ 50RPM

inserted inserted open open 30 Motor Speed = 15rpm


inserted inserted open inserted 31 Motor Speed = 50rpm
inserted inserted inserted open 32 Motor Speed = 5rpm
Motor Drivers off,
inserted inserted inserted inserted 33
PWM operating

Operating Indicators
LED’s on the Peristaltic pump pwb are provided for diagnostic
purposes. The jumpers share the IO pins with the LEDs. The
jumpers are scanned in turn and monitored to detect the
presence of a jumper.

Publication date: 10/16/2006 7-11


Varian 700-ES Series instruments

Below is a description of LED’s during normal operation (not in


diagnostics mode).
Red LED
After reset, the red LED flashes the Firmware Version
once and then remains off.
If the red LED keeps flashing an error has been
detected and the flashing represents a 2 digit error
code which is cycled continuously.
Yellow LED
Intensity:
With the frequency input below the turn-on threshold,
the LED is dimly illuminated (25% duty cycle) – this
indicates that the motor is off and the µC's timer
function works properly. With the frequency input above
the turn-on threshold, the LED is brightly lit and the
motor is energized and running.
Flicker:
If the LED shows a single flicker, approx once per
second, then the firmware has detected the small motor
(3-channel pump). If the Led shows a double flicker,
approx once per second, then the firmware has
detected the large motor (4-channel pump). The single
or double flicker is present regardless of the intensity.
Green LED
This is the Water Flow Indicator. The actual flow
detection and reporting is done in hardware without any
MCU involvement. The MCU merely indicates the state
of the Water Flow through the green LED.
No water flow detected:
If the LED flashes briefly once every 2 seconds
(approx) then no water flow has been detected and the
brief flash indicates that the LED and µC function
correctly.
Water flow adequate:
If the LED flickers quickly and brightly then water flow
has been detected. In this state, the flicker indicates
that the LED and MCU function correctly. The flicker
rate has no relationship to the rate of water flow – the
flicker rate is fixed in firmware.
Serial Port
If Jumper 3 was present at reset, then the Firmware
Version, Motor detection ADC counts, calculated Motor
Inductance values and subsequent motor selection
(“M1” or “M2”) are sent to the serial port.
Serial port settings:
1 start, 8 data, 1 stop bits, no parity, 38400 bps.

7-12 Publication date: 10/16/2006


Varian 700-ES Series instruments

Error Codes
Identifier Code Description
ERROR_PB2_STUCK_LOW 12 PUMP_EN stuck in logic low
ERROR_PB2_STUCK_HIGH 13 PUMP_EN stuck in logic high
ERROR_PD3_STUCK_LOW 14 phase-2 (cosine) stuck in logic low
ERROR_PD3_STUCK_HIGH 15 phase-2 (cosine) stuck in logic high
ERROR_PD5_STUCK_LOW 16 phase-1 (sine) stuck in logic low
ERROR_PD5_STUCK_HIGH 17 phase-1 (sine) stuck in logic high
ERROR_PD6_STUCK_LOW 18 phase-3 stuck in logic low
ERROR_PD6_STUCK_HIGH 19 phase-3 stuck in logic high
ERROR20_NO_MOTOR 20 no motor detected
ERROR21_PHASE1_OPEN_CIRCUIT 21 no current in winding 1 detected
ERROR22_PHASE2_OPEN_CIRCUIT 22 no current in winding 2 detected
ERROR23_PHASE3_OPEN_CIRCUIT 23 no current in winding 3 detected
ERROR25_PHASE_IMBALANCE 25 current difference exceeds 50% of current
average
ERROR26_PHASE1_SHORT_CIRCUIT 26 excessive current in winding 1 detected
ERROR27_PHASE2_SHORT_CIRCUIT 27 excessive current in winding 2 detected
ERROR28_PHASE3_SHORT_CIRCUIT 28 excessive current in winding 3 detected

Morse Code
The Firmware Version, error codes and some other numeric
indications are given in international Morse code. This minimises
the number of flashes that need to be counted, allows for multi
digit indications and is quite easy to learn.
Morse code digits always consist of 5 flashes per digit. There are
short and long flashes, the pause between flashes within a digit
are the same as the duration of a short flash. The pause between
digits is longer.
Hint: It is only necessary to either count the short or the long
flashes and to remember if the short flashes were before or after
the long ones.

Morse Code Digit


• 1
• • 2 Example: Error Code “17”
• • • 3 would be idicated in Morse
• • • • 4 code like this:
• • • • • 5 •     ‡‡‡

• • • • 6 1 7
• • • 7
• • 8
• 9
0

Publication date: 10/16/2006 7-13


Varian 700-ES Series instruments

7.4 PC software diagnostics


This section contains information on the diagnostic facilities
provided in the Varian 700-ES Series instrument software.
The software diagnostics are grouped as:
• General access folders - the same as Instrument setup
• General diagnostics folders
• Service-only diagnostic folders

The general access folders are common with the Instrument


Setup page, and all users have access to these folders from the
Instrument setup page. They include the
Status folder,
Details folder,
Wavelength Calibration folder,
Ignition folder,
Echelle folder,
Torch Align folder
Autosampler folder and
Log folder.
No password is required for these folders. These folders have
been made available to all users to aid in instrument fault
diagnosis over the phone.

7-14 Publication date: 10/16/2006


Varian 700-ES Series instruments

The general diagnostic folders include all the general access


folders, which are not password-protected, and three additional
folders,
Quick folder,
Gasbox folder and
Optics folder,

These folders are password-protected. They are accessible from


the Instrument Setup page. To enable them, click on the
flashlight icon and enter the password wallaby.

Publication date: 10/16/2006 7-15


Varian 700-ES Series instruments

The Service-only diagnostic folder (or extended diagnostics)


includes all the general access folders, which are not password-
protected, and the three additional general diagnostics folders as
well as the
RF folder.

The RF folder is further password-protected. To enable this


folder, click on the key icon in the top right corner of the
diagnostics screen and enter the password virgil.

7-16 Publication date: 10/16/2006


Varian 700-ES Series instruments

7.4.1 Diagnostics toolbar


The diagnostics page has a toolbar with various functions:

1 2 3 4 5
6 7 8 9 10

Functions:
1. Continuous refresh.
The status of the instrument is cyclically updated. Many
parameters will be greyed out and inaccessible when in this
mode.
2. Single update.
The status of the instrument is updated once when you click
on this icon.
3. Apply.
The instrument is updated with any changed parameters
when you click on this icon. Any time you change parameters
on the diagnostics folders you must click on this icon to
implement the change.
4. Torch On or Torch Off.
These icons turn the torch on and off.
5. Pump On, Pump Off, Pump fast.
These icons turn the peristaltic pump on or off, and the fast
pump icon makes the pump run at 50 rpm.
6. Gasbox Power Down.
This removes power to all solenoids, and disables the igniter
and peristaltic pump.
7. RF Power Down.
This removes the RF drive to the power tube, filament and
high voltage supplies.
8. ICB, GB and RF “LEDS”.
These icons are indicators showing when each of the three
boards are communicating. The boards are the 386EX control
Board, the Gasbox board, and the RF interface board.
9. Theoretical wavelength positions.
This icons turns the wavelength calibration offsets on (button
“depressed”) or off (button “out”).
10. The “key”.
This is the Password entry icon. Entering the correct
password allows you access to the extended service-only
diagnostics.

Publication date: 10/16/2006 7-17


Varian 700-ES Series instruments

7.4.2 Status folder


The Status folder is the first folder displayed when entering the
service diagnostics. Depending on the mode of entry (general or
extended) up to twelve folders are displayed.
The Status folder displays:
1. The firmware revision of all EPROMs and flash memory in the
instrument.
2. Plasma status
3. RF, high voltage and filament status
4. Polychromator temperatures and purge status
5. Argon pressure switch status and flows
6. Peristaltic pump rate
7. Water flow status
8. Argon filter usage

Note This information is available only if the PC is connected to the


instrument and the IEEE communication is working.

Status folder

7-18 Publication date: 10/16/2006


Varian 700-ES Series instruments

7.4.3 Details folder


The Details folder shows serial numbers, installation and
maintenance dates, and hours of running of the filament, shutter
and filters. The software analyses the contents of the EEPROM
on the 386EX Control Board and reports the relevant values. To
change any of the fields you will need to enter the service
password.

Details folder

7.4.4 Wavelength Calibration folder


The Wavelength Calibration folder shows the results from the last
successful wavelength calibration. It also allows reading and
storage of the Dark Current, and calculation of the electrical
offset.
Additionally, for Varian 710-ES Series instruments only, this
folder also allows you to calibrate the shutter and the attenuator.

For the Varian 720/730-ES Series instrument

Publication date: 10/16/2006 7-19


Varian 700-ES Series instruments

Dark current scan


Click here to initiate a “read spectrum” of the camera to quantify
the dark current characteristics. You must do this before
performing a wavelength calibration. The results are stored and
subtracted from all subsequent readings. This will also take
readings and average them to produce an average offset of the
camera.

Calibrate
Click here to initiate a wavelength calibration. The results will be
updated when the spectrum has finished. The results will also be
appended to a file called “Wavelength Calibration.txt” in the
C:\Program Files\Varian\ICPExpert II 7XX-ES\Run\Log
subdirectory.

Calculate drift
This action will calculate the drift since the last calibration and
display the result. Excessive drift may suggest recalibration.

Stop (F12)
This action will stop any of the actions above.

Store Dark Current


This exports the results of the dark current scan to a text file
which is tab delimited, suitable for importing into a spreadsheet.
This file contains a value for every pixel on the camera. This is
the only file which contains data for every pixel.
You have the option for naming this file when you save it, but it
does not prompt you to overwrite if you have a previously saved
file with the same name.

For the Varian 710-ES Series instruments

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Varian 700-ES Series instruments

Calibrate Detector
Click here to initiate a “read spectrum” of the camera to quantify
the dark current characteristics. You must do this before
performing a wavelength calibration. The results are stored and
subtracted from all subsequent readings. This will also take
readings and average them to produce an average offset of the
camera.
Calibrate Wavelength
Click here to initiate a wavelength calibration. The results will be
updated when the spectrum has finished. The results will also be
appended to a file called “wavelengthcalibration.txt” in the
C:\Program Files\Varian\ICPExpert II 71X-ES\Run\Log
subdirectory.

Calculate drift
This action will calculate the drift since the last calibration and
display the result. Excessive drift may suggest recalibration.

Calibrate shutter
This will cause the instrument to take photometric measurements
which characterize the camera exposure time errors caused by
the mechanical inertia and reproducibility variation of the shutter.
Typically, the shutter delay will be in the range ±2 mS. Results of
this test can be found in the ShutterCalibration.txt file located in
the C:\Program Files\Varian\ICPExpert II 7XX-ES\Run\Log
subdirectory.

Calibrate Attenuator
The attenuator calibration task is designed to characterize the
light transmission of the attenuator across the wavelength range
of the instrument. It will generate a pass/fail message as
compared against expected values. The results of this test can be
found in the AttenuatorCalibration.txt file located in the
C:\Program Files\Varian\ICPExpert II 7XX-ES\Run\Log
subdirectory.

Note The Calibrate Shutter and Calibrate Attenuator options are


available independently if the service diagnostics password has
been entered. If the service password is not entered, these two
options are combined under a single option called Calibrate
Hardware.

Publication date: 10/16/2006 7-21


Varian 700-ES Series instruments

Store Dark Current


This exports the results of the dark current scan to a text file
which is tab delimited, suitable for importing into a spreadsheet.
This file contains a value for every pixel on the camera. This is
the only file which contains data for every pixel.
You have the option for naming this file when you save it, but it
does not prompt you to avoid overwriting if you have a previously
saved file with the same name.

7.4.5 Ignition folder


This folder shows the parameters for plasma ignition.
The un-shaded parameters may be modified; however, the
parameters chosen (as defaults) are the best compromise for
both axial and radial ignition under normal operating conditions.

The shaded parameters are not adjustable. They can only be


altered in the Windows Registry.

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Varian 700-ES Series instruments

7.4.6 Torch Alignment

The torch alignment folder allows you to set the position of the
pre-optics scanning mirror (M1) so that it is looking at the
optimum part of the plasma. In an axial instrument there are two
settings - horizontal and vertical - while on a radial instrument
there is only the horizontal setting (the vertical setting - called
viewing height - is stored in the worksheet).

Note For Radial instrument, if the service password has been entered,
the vertical setting can also be monitored.
To perform the alignment you aspirate a 5 ppm Mn solution and
perform a horizontal and then a vertical torch scan (if it is an axial
instrument), using the supplied torch alignment worksheet.
Unless the vertical scan is very close to the home position, you
should do another vertical scan. When the instrument scans the
torch, it sets the pre-optics to the optimum position for viewing
the plasma.

Publication date: 10/16/2006 7-23


Varian 700-ES Series instruments

7.4.7 Autosampler (SPS) folder


The Autosampler folder allows you to control the SPS3
autosampler. You can:
• Align the probe
• Perform a rinse
• Set the probe height
• Send the probe to any sample or standard position, simply
by clicking on the visual position.
• Park the probe, either to the left or the right.

You can change the Rack Type by Right Clicking on any rack
position and selecting the appropriate rack.

7-24 Publication date: 10/16/2006


Varian 700-ES Series instruments

7.4.8 Log folder


The Varian 700-ES Series instrument software records all error
messages that occur when operating the instrument.
The errors in the log can be viewed using this folder. The errors
are also recorded in a file called error.log and stored in the
C:\Program Files\Varian\ICPExpert II 7XX-ES\Run\Log
subdirectory.

7.4.9 Graphs
Although this is not a separate folder, graphs form part of the
next four diagnostics folders. The same graph information and
stored files are displayed on these folders:
• Quick
• Gasbox
• RF
The graphs (spectrums) are visual representation of signals from
the camera, and there are several varieties on the types of
graphs available. Individual or multiple DLA responses, either the
right or left side, can be displayed and they can be read
repetitively or singly.
Collections of pre-defined spectrums can be stored and retrieved
from the registry, using the “Save” and “Load” buttons.
Note For the Varian 720/730-ES series only. If you position the cursor
over the “Save” button and hold down the <Ctrl> and <Shift>
keys together, with at least one graph in the list, you can
generate a list of graphs which covers every DLA, and it will be
saved to the registry as “all”.

Publication date: 10/16/2006 7-25


Varian 700-ES Series instruments

Graph of 6 DLAs using an echellogram for the Varian 720/730-


ES series instrument.

7.4.10 Graphs Toolbar


The graphs section has its own toolbar with various functions:

1 5 8
7
2 4 9
3 6 10

Functions:
1. Read Spectrum.
This initiates a single read of the specified graph(s).
2. Read Continuous Spectrum.
This initiates a cyclic, or continuous, read of the specified
graph(s).
3. Stop.
This icon becomes active (red) once a read spectrum has
begun. It STOPS the read.
4. New Graph.
This opens a new graph and pops up the graph parameters
pages:

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Varian 700-ES Series instruments

On these pages you can choose to specify the DLA, left or


right side, or the element and wavelength. You can also
specify the integration time to increase or decrease the
“gain”. Instead of a wavelength read you can specify a time
scan.
5. Edit.
This icon allows you to edit the graph parameters.
6. Delete.
This deletes the specified spectrum.
7. Move.
These will move the focus up or down the list of spectra.
8. Multiple Graphs.
Selecting this icon will display the spectrum as a series of
graphs (instead of an echellogram):

9. Single Graph.
Selecting this icon will display each graph singly.
10. Echelle.
Selecting this icon will display the camera’s response as an
echellogram.

Publication date: 10/16/2006 7-27


Varian 700-ES Series instruments

7.4.11 Quick Folder


The Quick folder is a collection of the most commonly accessed
items from all the other diagnostics folders. It is probably the
folder that you will use the most in a diagnostics session.

7.4.12 Gasbox folder


The Gasbox folder allows testing, monitoring and control of the
gas control unit including the igniter. A tick in the checkbox
indicates selection.

Gasbox folder

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Varian 700-ES Series instruments

Plasma flow
The plasma flow field allows plasma gas flow to be turned ON
within allowable limits. The field also confirms selection. As the
smallest increment of plasma flow is 1.5 L/min, all settings are
rounded up or down to the nearest multiple of 1.5 L/min.

Auxiliary flow
The auxiliary flow field allows the auxiliary gas flow to be turned
ON within allowable limits. The field confirms selection. The
smallest increment of auxiliary flow is 0.75 L/min, all settings are
rounded up or down to the nearest multiple of 0.75 L/min.

Pump Rate
The pump rate field allows the peristaltic pump to be set to any
allowable rpm between 0 and 50 rpm. The field then confirms the
selection.

Auxiliary boost
The auxiliary boost field allows auxiliary gas flow to be turned on
or off. The ‘&‘ in the field confirms selection. The auxiliary boost
flow is rated at 26 L/min.

Snout/Cone purge
The snout/cone purge field allows the snout/cone purge to be
turned on or off. The ‘&‘ in the field then confirms selection. It
cannot be turned off while the plasma is on.

Poly purge (boost)


The poly purge field allows the poly boost purge solenoid to be
turned ON or OFF. The field confirms selection of ON by the use
of a ‘&‘.

Nebulizer (instruments fitted with a pressure regulator)


The nebulizer field allows the nebulizer solenoid to be turned ON
or OFF. The field confirms the selection of ON by the use of a ‘&‘.

MFC flow (instruments fitted with a mass flow controller)


The MFC flow field allows the nebulizer flow to be set to any
allowable flow rate between 0 and 1.5 L/min. The field then
confirms the selection.

Publication date: 10/16/2006 7-29


Varian 700-ES Series instruments

Argon pressure OK
This is a read only field which displays the current state of the
argon inlet pressure switch. ‘&‘ symbolizes closed (pressure OK)
and o symbolizes open (pressure low).

Igniter
The igniter field allows the igniter to be turned ON to continuously
generate a spark. The field confirms the selection of ON by the
use of ‘&‘.
To allow the spark to discharge through the torch, set the plasma
flow greater than 15 L/min.

Warning Contact with the high voltage spark from the igniter can cause
electric shock. To avoid electric shock, always check that the
torch compartment door is closed when the igniter module is
operating.

7.4.13 Optics folder


This folder allows control of the Pre-optics, temperature and
polychromator.

Pre-optics
You can drive the pre-optics stepper motors independently to
arbitrary positions or to the home sensor. A tick, ‘&‘, will appear in
At Home check box when the opto sensor detects the mirror is
“home”.

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Varian 700-ES Series instruments

Temperature Control
The Peltier cooling on the camera and the heater can be turned
on by entering a tick, ‘&‘, in the adjacent box. You must click on
the “apply” button on the toolbar to effect the change.
The Peltier and casting temperatures can also be monitored.

Polychromator
Camera supplies - A tick, ‘&‘, in this box will turn the +/- 15V
supplies on.
Shutter open - A tick, ‘&‘, in this box will open the shutter,
and a blank will close the shutters.
Full illumination LED - A tick, ‘&‘, in this box will turn on the LED
which floods the detector with light.

7.4.14 RF folder
The RF folder allows testing, monitoring and control of the RF
generating system. This folder is accessible only in extended
service diagnostics (password protected).

RF interlocks
These are all read only fields. When the monitor column is ‘&‘, the
interlock is being actively monitored. During normal plasma
operation all of the interlock states should be ‘&‘.

RF status lines
These are all read only fields. The status lines reflect the current
condition of each function. As each is enabled, the monitor field
will display a ‘&‘.

Publication date: 10/16/2006 7-31


Varian 700-ES Series instruments

Filament (stage 1)
The Set field allows the filament supply to be turned ON ‘&‘
without application of the high voltage anode supply to the power
tube. The field confirms selection.

HV (stage 2)
The Set field allows the high voltage anode supply to be applied
to the power tube. The ‘&‘ field confirms selection.

Note The software will not allow the HV supply to be turned ON unless
the filament supply (stage 1) is ON and has warmed the filament
of the power tube for a minimum of 30 seconds.

RF power
The Set field allows the level of RF power produced by the RF
generator to be changed. The Actual field confirms selection.

Note This field allows the RF power output to be set to a maximum of


2.0 kW (keyboard) which is higher than allowed in normal
operating mode (1.5kW – axial and 1.7 kW – radial).

Filament turn-on time


This is a read only field which logs the time the filament supply
was turned-on. This value is stored in the EEPROM on the
386EX control board.

Filament Low Voltage


There are two voltages that the filament uses, 6.3 volts RMS and
5.9 volts RMS. After the filament has accumulated 200 hours of
operation, the filament voltage drops from 6.3 volts to 5.9 volts.
This box is an indication of which filament voltage is being used.
If the box is ticked, ‘&‘, this indicates it is running on the lower
voltage, 5.9 volts RMS.

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Varian 700-ES Series instruments

7.5 Polychromator Align software


There is a special function software program provided called
PolyAlign.exe (polychromator alignment). This software gives the
CSR direct feedback of the camera response to allow accurate
alignment of the polychromator and camera. The software is
available in the
C:\Program Files\Varian\ICPExpert II 7XX-ES\Run subdirectory.
To access this software, double click on the file called
PolyAlign.exe in the run subdirectory or select Polychromator
Align from the START>PROGRAMS>ICP EXPERT II menu.
The Polychromator Align Password pop-up will appear.

Enter the service password ‘virgil’.

Note The software displays the same information in a different way for
the Varian 710-ES Series instrument as it does for the Varian
720/730-ES Series instrument. This is because of the different
camera geometry.

Publication date: 10/16/2006 7-33


Varian 700-ES Series instruments

7.5.1 Location folder


The location folder allows you to view the echellogram in different
areas and to locate specific peaks. Use this folder to perform
DLA and wavelength screw adjustments on the focussing mirror -
see Optics chapter.

Location folder for the Varian 720/730-ES Series instruments

Location folder for the Varian 710-ES Series instruments

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Varian 700-ES Series instruments

7.5.2 Set Focus folder


The Set Focus folder concentrates on the Argon 617 and Argon
594 nm doublet and resolution of the Zinc 213.856 peak. Use this
folder to adjust the focus of the polychromator using the three
screws on the focussing mirror.

Set Focus folder for the Varian 720/730-ES Series instruments

Set Focus folder for the Varian 710-ES Series instruments

Publication date: 10/16/2006 7-35


Varian 700-ES Series instruments

7.5.3 Focus Check folder


The Focus Check folder shows a spectrum of lines across the
CCD to check that the focus across the whole detector meets
specification.

Focus Check folder for the Varian 720/730-ES Series instruments

Focus Check folder for the Varian 710-ES Series instruments

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Varian 700-ES Series instruments

7.5.4 Rotation folder


The Rotation folder displays the ratio of two argon lines on DLA
21 that span three DLAs. Both lines should have the same ratio
when the CCD is aligned correctly.

DLA 20
DLA 21
DLA 20

Ratio of
DLA 20
and
DLA 22

Rotation folder for the Varian 720/730-ES Series instruments

Rotation folder for the Varian 710-ES Series instruments

Publication date: 10/16/2006 7-37


Varian 700-ES Series instruments

7.5.5 Registration folder


The Registration folder shows the intensity of a set of elements
alongside the Argon ratio. This page is used to establish the
optimum setting for the Argon ratio.

Registration folder for the Varian 720/730-ES Series instruments

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Varian 700-ES Series instruments

7.6 Error log and Debug log


The Varian 700-ES Series instrument software reports all the
operational and user errors in the Operations log contained in
each worksheet. These can be viewed using the Varian 700-ES
Series instrument software.
The Varian 700-ES Series instrument software records all error
messages that occur when operating the instrument, in a text file
called ‘error.log’.
The error log is a file in the
C:\Program Files\Varian\ICPExpert II 7XX-ES\Run\log
subdirectory. It can be viewed and printed using any text editor.
When the Varian 700-ES Series instrument software starts it
renames the existing ERROR.LOG as ERROR.~LO and begins a
new ERROR.LOG. This means that the old error log,
ERROR.~LO is continually overwritten. To keep this error log you
will need to rename it before starting the Varian 700-ES Series
instrument software.
Varian 700-ES Series instrument error messages are classified in
three ways:
• Warnings (W)
• Terminal (T)
• Fatal (F)
The error log automatically traps and records only fatal messages
which are flagged in the error log with ‘F’.
Each record in the error log file is date and time stamped. The
error log date is updated only when the Varian 700-ES Series
instrument software is started.
There is another log file in the same \log subdirectory, the
DEBUG.LOG. This file is appended to constantly and just keeps
getting bigger. However, the information in the debug file is only
useful to software engineers and is not readable without the
appropriate software knowledge. It may be needed in some
circumstances by Varian software engineers to help diagnose
problems.

Publication date: 10/16/2006 7-39


Varian 700-ES Series instruments

7.7 Windows Registry

Warning Before you consider altering anything in the Windows Registry you
must backup the registry files. Alterations to the registry can cause
catastrophic failure to the PC’s operating system and software.

The simplest way to backup the registry is to “export” the registry


as a registry file using Windows Registry Editor. It can be later
“imported” using the same program. See below for a way to
restore the registry if you do not have a back up.
The Varian 700-ES Series instrument software uses the Windows
registry extensively for setting and storing various functions.
Many settings within the registry are integral to the Varian 700-
ES Series instrument software and should not be changed.
Incorrect settings could cause the software or the Windows
operating system to malfunction.
There are some “User settings” which can be altered under
direction from people experienced with the registry settings. The
majority of those settings are contained in the registry under the
tree:
HKEY_LOCAL_MACHINE\Software\Varian\ICP\ES\ICP-OES 7XX
Within the registry, the variable settings are referred to as “keys”,
and they can be changed by double-clicking with the left mouse
button.
To make changes in the registry you must run the registry editor
program, Regedit.
To do this select “Run” from the start menu and enter “regedit” in
the entry box:

If you need to restore the default settings for Varian 700-ES


Series instrument software in the registry, you must re-install the
software, or “import” a valid registry file.

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Varian 700-ES Series instruments

Restoring the Registry


If the registry becomes corrupted you can restore it from
Windows automatically stored backup from the last successful
restart:
1. Start or Restart your computer.
After your computer starts, Windows displays the following
text:
Starting Windows
2. While the text is on your screen, press and release the F8
key. A menu appears.
3. Choose the Command Prompt Only option.
4. At the command prompt, change to your Windows directory.
For example, if your Windows directory is C:\Windows, you
would type the following:
cd c:\windows
5. Type the following commands, pressing ENTER after each
one. (Note that System.da0 and User.da0 contain the number
zero.)
attrib -h -r -s system.dat
attrib -h -r -s system.da0
attrib -h -r -s user.dat
attrib -h -r -s user.da0
6. Then type:
copy system.da0 system.dat
copy user.da0 user.dat
7. Restart your computer.

Publication date: 10/16/2006 7-41


Varian 700-ES Series instruments

7.8 Contacting Technical Support


If you confront problems that you cannot repair without
assistance, you should send an email to:
osi_tech.support@varianinc.com

7.7.1 Information required


When requesting assistance you must include:
1. Instrument serial number
2. Instrument Model, include options.
3. Software product and version and build number
(see ..Help...About)
4. EPROM versions (firmware versions)
5. Computer brand, type and speed, and unusual features.
For instance, network adapters, sound cards, RAM, software
applications.
6. Detailed problem description
7. Copies of related files for diagnosis
8. Accessories involved
9. Applications, methodology, types of samples.
10. Details of what has been done so far to fix the problem
11. General lab conditions. Include power supply outlets, is it a
“clean room”, other instruments in the room.

7.7.2 Related files


When sending files to tech support for review you should include:
1. A copy of the affected worksheet
2. A copy of the error.log
3. A copy of the wavelengthcalibration.txt file
4. For the Varian 710-ES Series instrument
A copy of the AttenuatorCalibration.txt and
ShutterCalibration.txt files
5. A copy of the stored dark current file
6. You should include the debug log only if asked by
osi_tech.support@varianinc.com

7-42 Publication date: 10/16/2006


8 Error Messages
200 Internal Error Varian Reference - GPIB function not implemented
201 Internal Error Varian Reference - GPIB bus not initialized
202 Internal Error Varian Reference - GPIB bus already initialized
203 Internal Error Varian Reference - GPIB bus invalid address format
204 Internal Error Varian Reference - GPIB bus address already claimed 0x%02X
205 Internal Error Varian Reference - GPIB bus write timeout
206 Internal Error Varian Reference - GPIB bus read timeout
210 Error No GPIB card detected
211 Internal Error Varian Reference - GPIB object does not support this operating
platform
820 Internal Error Varian Reference - GPIB VStd received packet checksum error
821 Internal Error Varian Reference - GPIB VStd received packet length mismatch
822 Internal Error Varian Reference - GPIB VStd send packet too large
840 Internal Error Varian Reference - GPIB Vis received packet checksum error
841 Internal Error Varian Reference - GPIB Vis received packet length mismatch
842 Internal Error Varian Reference - GPIB Vis invalid packet format detected
900 Internal Error Varian Reference - SPS function not implemented
901 Internal Error Varian Reference - SPS not initialized
902 Internal Error Varian Reference - SPS already initialized
903 Internal Error Varian Reference - SPS software bus connection not made
904 Internal Error Varian Reference - SPS software bus connection already made
905 Error SPS offline
906
907 Internal Error Varian Reference - SPS not locked
908 Internal Error Varian Reference - SPS locked
909 Internal Error Varian Reference - SPS lock code mismatch
910 Error SPS busy
911 Internal Error Varian Reference - SPS command timeout
915 Internal Error Varian Reference - SPS checksum error
916 Internal Error Varian Reference - SPS packet length mismatch
930 Internal Error Varian Reference - SPS no error
931 Internal Error Varian Reference - SPS unable to respond to DAP interrupt in time
932 Internal Error Varian Reference - SPS unable to respond to TMSHR interrupt in
time
933 Internal Error Varian Reference - SPS unable to respond to motor intrpt in time
STPR slip
934 Internal Error Varian Reference - SPS no error
935 Internal Error Varian Reference - SPS GPIB interrupt detected but not expected
936 Internal Error Varian Reference - SPS DPA interrupt detected but not expected
937 Internal Error Varian Reference - SPS TMSHR interrupt detected but not
expected
938 Internal Error Varian Reference - SPS STPR interrupt detected but not expected
939 Internal Error Varian Reference - SPS RST [0] executed power up assumed
940 Internal Error Varian Reference - SPS cold start was executed
941 Internal Error Varian Reference - SPS warm start was executed
942 Internal Error Varian Reference - SPS invalid vectored interrupt or invalid RST
called
Varian 700-ES Series Spectrometer

943 Internal Error Varian Reference - SPS exit from interrupt task due to following
error
944 Internal Error Varian Reference - SPS param stack underflow
945 Internal Error Varian Reference - SPS return stack underflow
946 Internal Error Varian Reference - SPS error stack underflow
947 Internal Error Varian Reference - SPS error stack over flow
948 Internal Error Varian Reference - SPS forth informative error
949 Internal Error Varian Reference - SPS undefined symbol
950 Internal Error Varian Reference - SPS divide by zero
951 Internal Error Varian Reference - SPS invalid stepper number
952 Internal Error Varian Reference - SPS stepper tried to exceed range limit
953 Internal Error Varian Reference - SPS STPR disconnected Unable to reset
954 Internal Error Varian Reference - SPS STPR disconnected or STPR reset
required
955 Internal Error Varian Reference - SPS numeric overflow error
956 Internal Error Varian Reference - SPS invalid mask bit
957 Internal Error Varian Reference - SPS GPIB command device code error
958 Internal Error Varian Reference - SPS GPIB command parameter error
959 Internal Error Varian Reference - SPS GPIB command parameter count error
960 Internal Error Varian Reference - SPS attempt to send text from non-system task
961 Internal Error Varian Reference - SPS invalid limit or limits reversed
962 Internal Error Varian Reference - SPS invalid tag in GPIB command
963 Internal Error Varian Reference - SPS text tag expected Message ignored
964 Internal Error Varian Reference - SPS unable to add new sequence routine
965 Internal Error Varian Reference - SPS invalid rack number
966 Internal Error Varian Reference - SPS invalid tube number
967 Internal Error Varian Reference - SPS invalid rack type
968 Internal Error Varian Reference - SPS system failure
969 Internal Error Varian Reference - SPS main arm failed to locate opto on reset
970 Internal Error Varian Reference - SPS alt arm failed to locate opto on reset
971 Internal Error Varian Reference - SPS up down drive failed to locate opto on
reset
972 Internal Error Varian Reference - SPS syringe failed to locate opto on reset
973 Error SPS final tube has insufficient volume
974 Error SPS invalid height specified
975 Error SPS syringe disconnected
976 Internal Error Varian Reference - SPS command busy Unable to execute new
command ignored
977 Internal Error Varian Reference - SPS bad position for park command
978 Internal Error Varian Reference - SPS unable to call new sequence routine
1000 Internal Error Varian Reference -ICP-OES function not implemented
1001 Internal Error Varian Reference -ICP-OES not initialized
1002 Internal Error Varian Reference -ICP-OES already initialized
1003 Internal Error Varian Reference -ICP-OES software bus connection not made
1004 Internal Error Varian Reference -ICP-OES software bus connection already
made
1005 Error ICP-OES offline
1006 Error ICP-OES online
1007 Internal Error Varian Reference -ICP-OES not locked
1008 Internal Error Varian Reference -ICP-OES locked
1009 Internal Error Varian Reference -ICP-OES lock code mismatch
1010 Error ICP-OES busy please wait
1011 Internal Error Varian Reference -ICP-OES command timeout
1015 Internal Error Varian Reference -ICP-OES checksum Error
1016 Internal Error Varian Reference -ICP-OES packet length mismatch
1017 Internal Error Varian Reference -ICP-OES invalid packet format
1030 Internal Error Varian Reference - No Error
1031 Internal Error Varian Reference - Invalid directive code received

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Varian 700-ES Series Spectrometer

1032 Internal Error Varian Reference - Instruction data length is incorrect check PC
and instrument software version numbers
1033 Internal Error Varian Reference - The read setup parameters are out of
sequence
1034 Internal Error Varian Reference - Instruction parameter not within the specified
range Check PC and instrument software version numbers
1035 Error Vertical or horizontal viewing optics initialization has failed
1036 Internal Error Varian Reference - Unable to write or read from the instrument
setup PROM
1037 Internal Error Varian Reference - Camera has failed to return the data within the
time limit
1038 Internal Error Varian Reference - Incorrect limits for the segment set up were
received
1039 Error Fault with temperature of peltier cooling for detector
1040 Error Fault with temperature of polychromator heaters
1041 Internal Error Varian Reference - Invalid camera data
1042 Internal Error Varian Reference - Invalid status return
1100 Internal Error Varian Reference –ICP-OES Ws function not implemented
1101 Internal Error Varian Reference -ICP-OES worksheet not initialized
1102 Internal Error Varian Reference -ICP-OES worksheet already initialized
1103 Internal Error Varian Reference -ICP-OES worksheet software bus connection
not made
1104 Internal Error Varian Reference -ICP-OES worksheet software bus connection
already made
1105 Error ICP-OES worksheet offline
1106 ICP-OES worksheet online
1107 Internal Error Varian Reference -ICP-OES worksheet not locked
1108 Internal Error Varian Reference -ICP-OES worksheet locked
1109 Internal Error Varian Reference -ICP-OES worksheet lock code mismatch
1110 Error ICP-OES worksheet busy
1111 Internal Error Varian Reference -ICP-OES worksheet command timeout
1115 Internal Error Varian Reference -ICP-OES worksheet checksum error
1116 Internal Error Varian Reference -ICP-OES worksheet packet length mismatch
1117 Internal Error Varian Reference -ICP-OES worksheet invalid packet format
1177 Error Plasma not detected Ensure the plasma is ignited
1178 Internal Error Varian Reference - Instrument parameter out of range
1179 Internal Error Varian Reference - Instrument command unknown
1180 Internal Error Varian Reference - Instrument command has incorrect number of
parameters
1181 Internal Error Varian Reference - Instrument command sequence error
1182 Internal Error Varian Reference - Instrument ready signal
1183 Internal Error Varian Reference - Instrument busy signal
1184 Internal Error Varian Reference - Instrument timeout signal
1185 Internal Error Varian Reference - Instrument fault occurred
1198 Internal Error Varian Reference - Gasbox reserved
1199 Internal Error Varian Reference - Gasbox RAM failure
1200 Internal Error Varian Reference - Gasbox ROM checksum failure
1201 Internal Error Varian Reference - Reserved
1202 Error Low Argon pressure Check argon supply and pressure
1203 Internal Error Varian Reference - No liquid trap (unused)
1204 Error Nebulizer flow too low Check method parameters, gas
connections, nebulizer and torch
1205 Error Nebulizer flow too high Check method parameters, gas
connections, nebulizer and torch
1233 Error Cannot turn off cone purge while torch is on
1234 Internal Error Varian Reference - Gasbox not ready
1235 Internal Error Varian Reference - Gasbox not Ok to send
1236 Internal Error Varian Reference - Gasbox command timeout

Publication date: 2/7/2007 8-3


Varian 700-ES Series Spectrometer

1237 Internal Error Varian Reference - Failed locking gasbox


1239 Internal Error Varian Reference - RF reserved
1240 Internal Error Varian Reference - RF RAM failure
1241 Internal Error Varian Reference - RF ROM checksum failure
1242 Internal Error Varian Reference - RF reserved
1243 Internal Error Varian Reference - High voltage supply failure
1244 Error Plasma compartment door is open or emergency RF-off button is
depressed
1245 Internal Error Varian Reference -Plasma has gone out
1246 Error Plasma compartment door is open or emergency RF-off button is
depressed
1247 Error Water conductivity too high Check ion-exchange filters on cooler,
flush system and change water
1248 Error Insufficient water flow Check water cooler and regulator
1249 Error Water temperature too high Check water cooler
1250 Error RF power tube air flow failure
1251 Error RF power tube voltage failure
1252 Internal Error Varian Reference -Power unattainable
1253 Internal Error Varian Reference - Maximum power timeout failure
1254 Internal Error Varian Reference - Over current failure
1255 Internal Error Varian Reference - RF Failure
1256 Error Plasma compartment door is open or emergency RF-off button is
depressed
1275 Internal Error Varian Reference - RF not ready
1276 Internal Error Varian Reference - RF not Ok to send
1277 Internal Error Varian Reference - RF command timeout
1278 Internal Error Varian Reference - Failed locking RF
5550 Internal Error Varian Reference - Critical section object already initialized
5551 Internal Error Varian Reference - Critical section object not initialized
5552 Internal Error Varian Reference - Critical section object not locked
5600 Internal Error Varian Reference - Event object already initialized
5601 Internal Error Varian Reference - Event object not initialized
5602 Internal Error Varian Reference - Event object error
5603 Internal Error Varian Reference - Event object already exists
5650 Internal Error Varian Reference - Mutex object already initialized
5651 Internal Error Varian Reference - Mutex object not initialized
5652 Internal Error Varian Reference - Mutex object not locked
5653 Internal Error Varian Reference - Mutex object already exists
6050 Internal Error Varian Reference - Heap NULL pointer specified
6051 Internal Error Varian Reference - Heap allocation failed
6052 Internal Error Varian Reference - Heap re-allocation failed
6100 Internal Error Varian Reference - Invalid parameter specified
6101 Internal Error Varian Reference - Too many heap descriptors Specified
6102 Internal Error Varian Reference - Heap offset out of range
6103 Internal Error Varian Reference - Heap pointer out of range
6104 Internal Error Varian Reference - Heap descriptor not found
6105 Internal Error Varian Reference - Heap unblock event was set
6106 Internal Error Varian Reference - Heap descriptor table overflow
6107 Internal Error Varian Reference - Heap memory unavailable
6108 Internal Error Varian Reference - Heap object already initialized
6109 Internal Error Varian Reference - Heap NULL pointer specified
6110 Internal Error Varian Reference - Heap object not initialized
6111 Internal Error Varian Reference - Heap allocation failed
6112 Internal Error Varian Reference - Heap was created instead of opened
6113 Internal Error Varian Reference - Heap event error
6114 Internal Error Varian Reference - Heap memory leaks detected
6115 Internal Error Varian Reference - Heap cannot commit memory
6116 Internal Error Varian Reference - Heap cannot de-commit memory

Publication date: 2/7/2007 8-4


Varian 700-ES Series Spectrometer

6117 Internal Error Varian Reference - Invalid size of heap specified


6118 Internal Error Varian Reference - Invalid number of heap descriptors specified
6150 Internal Error Varian Reference - Heap object already initialized
6151 Internal Error Varian Reference - Heap object not initialized
7501 Internal Error Varian Reference - Single lock object already initialized
7502 Internal Error Varian Reference - Single lock object not initialized
7503 Internal Error Varian Reference - Null ptr for lock object
7504 Internal Error Varian Reference - Single lock object not locked
8501 Internal Error Varian Reference - Close
8502 Internal Error Varian Reference - Event create
8503 Internal Error Varian Reference - Event open
8504 Internal Error Varian Reference - Event
8505 Internal Error Varian Reference - Null pointer
8506 Internal Error Varian Reference - Mutex create
8507 Internal Error Varian Reference - Mutex
8508 Internal Error Varian Reference - Create file mapping
8509 Internal Error Varian Reference - Map file view
8510 Internal Error Varian Reference - Unmap file view
8511 Internal Error Varian Reference - Event 1
8512 Internal Error Varian Reference - Event 2
8513 Internal Error Varian Reference - Event 3
8514 Internal Error Varian Reference - Event 4
8515 Internal Error Varian Reference - Event 5
8516 Internal Error Varian Reference - Event 6
8517 Internal Error Varian Reference - Abandoned
8518 Internal Error Varian Reference - Wait failed
8519 Internal Error Varian Reference - Flush error
9001 Internal Error Varian Reference - Object not initialize
9002 Internal Error Varian Reference - Object already initialized
9003 Internal Error Varian Reference - Null pointer
9004 Internal Error Varian Reference -Value already set
9005 Internal Error Varian Reference - Create failed
9006 Internal Error Varian Reference - Read failed
9007 Internal Error Varian Reference - Write failed
9008 Internal Error Varian Reference - File pointer error
10501 Internal Error Varian Reference - Insufficient memory
10502 Internal Error Varian Reference - Invalid buffer
10503 Internal Error Varian Reference - Null pointer in buffer
11001 Internal Error Varian Reference - Callback manager not present
11002 Internal Error Varian Reference - Invalid call context
11003 Internal Error Varian Reference -Post message failed
11004 Internal Error Varian Reference - Message leaks detected
11005 Internal Error Varian Reference - Null pointer given
11006 Internal Error Varian Reference - An invalid parameter was given
11050 Internal Error Varian Reference - Invalid message group given
11051 Internal Error Varian Reference - Invalid call type given
11052 Internal Error Varian Reference - The message Id has already been claimed
11100 Internal Error Varian Reference - The event Id has already been claimed
12001 Internal Error Varian Reference - Worksheet file not initialized
12002 Internal Error Varian Reference - Worksheet file already initialized
12011 Internal Error Varian Reference - Unknown error
12012 Internal Error Varian Reference - A worksheet write operation has been
truncated
12013 Internal Error Varian Reference - A worksheet read operation has been
truncated
12014 Internal Error Varian Reference - The worksheet is already open
12015 Internal Error Varian Reference – Error in reading from worksheet
12016 Internal Error Varian Reference – Error in writing to worksheet

Publication date: 2/7/2007 8-5


Varian 700-ES Series Spectrometer

12017 Internal Error Varian Reference - Insufficient memory for requested operation on
worksheet
12018 Internal Error Varian Reference - Invalid pointer for worksheet
12019 Internal Error Varian Reference - Invalid handle for worksheet
12020 Internal Error Varian Reference - Access to the worksheet is denied
12021 Internal Error Varian Reference - Worksheet file not found
12022 Internal Error Varian Reference -Path to worksheet not found
12550 Internal Error Varian Reference - File not open
12551 Internal Error Varian Reference - Invalid tag
12552 Internal Error Varian Reference - Invalid operation
12553 Internal Error Varian Reference - Incorrect version
12554 Internal Error Varian Reference - Table not found
12555 Internal Error Varian Reference - File error
15001 Internal Error Varian Reference - Illegal call
15002 Internal Error Varian Reference - Invalid type
15050 Internal Error Varian Reference - Invalid cell type
15501 Internal Error Varian Reference - Index out of range
15502 Internal Error Varian Reference - Invalid operation
15503 Internal Error Varian Reference -Length mismatch
15504 Internal Error Varian Reference - Already initialized
15505 Internal Error Varian Reference - Not initialized
15506 Internal Error Varian Reference - Null pointer
16501 Internal Error Varian Reference - Invalid parameter
16550 Internal Error Varian Reference - Must override
16551 Internal Error Varian Reference - Invalid parameter
16552 Internal Error Varian Reference - Invalid SPS command
16600 Internal Error Varian Reference - Invalid RF command
16601 Internal Error Varian Reference - Invalid gasbox command
16602 Internal Error Varian Reference - Invalid ICB command
16603 Internal Error Varian Reference - Argon purge not ready
16604 Internal Error Varian Reference -Peltier not ready
16650 Internal Error Varian Reference - Not supported
16700 Internal Error Varian Reference - Sequencing error
16701 Internal Error Varian Reference - Invalid parameter
16702 Internal Error Varian Reference - Not supported
16703 Internal Error Varian Reference -Plasma not ignited
16750 Internal Error Varian Reference - Sequencing error
16751 Internal Error Varian Reference - Invalid parameter
16752 Internal Error Varian Reference - Not supported
16800 Internal Error Varian Reference - Invalid parameter
16801 Internal Error Varian Reference - Sequencing error
18550 Internal Error Varian Reference - Object not initialized
18551 Internal Error Varian Reference - Already open
18552 Internal Error Varian Reference - Not open
18553 Internal Error Varian Reference -Length mismatch
18554 Internal Error Varian Reference - Invalid operation
19501 Internal Error Varian Reference - An invalid sample introduction type was
specified
19550 Internal Error Incorrect number scan regions
19551 Internal Error Incorrect DLA number
19552 Internal Error Invalid wavelength
19601 Internal Error Varian Reference - Must override this function
19602 Internal Error Varian Reference -Value already set
19603 Internal Error Varian Reference -Value not set
19650 Internal Error Varian Reference - Invalid SPS rack type specified
19651 Internal Error Varian Reference - Invalid SPS rack position specified
19652 Internal Error Varian Reference -Load string failed to find the resource string
19653 Internal Error Varian Reference - Change Racks

Publication date: 2/7/2007 8-6


Varian 700-ES Series Spectrometer

19700 Internal Error Varian Reference - Function not implemented


19750 Internal Error Varian Reference - Function not implemented
19800 Internal Error Varian Reference - Function not implemented
19850 Internal Error Varian Reference - Function not implemented
19900 Internal Error Varian Reference - Invalid value encountered during a run
19950 Internal Error Varian Reference - Invalid value encountered during a run
19951 Internal Error Varian Reference - Measurements cannot be made until argon
pressure has stabilized
19952 Error Measurements cannot be made until the polychromator
thermostatting temperature has stabilized
19953 Error Measurements cannot be made until the polychromator boost
purge gas flow has stabilized
19954 Error Measurements cannot be made until the peltier has reached the
required temperature
19955 Error Measurements cannot be made with the peltier turned off
19956 Internal Error Varian Reference - Internal error
19957 Internal Error Varian Reference - Measurements cannot be made with the torch
off
19958 Internal Error Varian Reference -Low water flow
20100 Error Torch off, plasma not detected
20101 Internal Error Varian Reference -ICP-OES is busy
20102 Error Plasma compartment door is open or emergency RF-off button is
depressed
20103 Error Plasma compartment door is open or emergency RF-off button is
depressed
20104 Error Low water flow Check water cooler
23501 Error Worksheet load error
23502 Internal Error Varian Reference - Request exceeds iterations
23503 Internal Error Varian Reference - Request exceeds replicates
23504 Internal Error Varian Reference - Request exceeds scan regions
23505 Internal Error Varian Reference - Scan region not found
23506 Internal Error Varian Reference - Mismatch between QC sol type and QC test
type
23507 Internal Error Varian Reference - QC validation record missing
23508 Internal Error Varian Reference - Cell record missing
23510 Internal Error Varian Reference - Request exceeds QC tests
23511 Internal Error Varian Reference - Request exceeds standards
23512 Internal Error Varian Reference - Request exceeds SPS racks
23513 Internal Error Varian Reference - Scan record missing
23514 Error Inter-element corrections matrix incomplete
23515 Error Inter-element corrections calculation doesn’t converge
23516 Error No method present in worksheet
23517 Internal Error Varian Reference - Missing defined concentration record
23518 Internal Error Varian Reference - Replicate record missing
23519 Internal Error Varian Reference - Worksheet lock attempted when already locked
23520 Internal Error Varian Reference - Worksheet unlock attempted when it is not
locked
23521 Internal Error Varian Reference - A zero weight or volume supplied
23522 Internal Error Varian Reference - QC test record missing
23523 Error No Sequence present in worksheet
23524 Internal Error Varian Reference - Missing calibration curve or column definition
record
23550 Internal Error Varian Reference - Invalid scan region in method
23551 Error Missing FACT model for blank
23552 Error Missing FACT model for analyte
23553 Error No FACT models present
23554 Internal Error Varian Reference - Missing primitive record
23600 Internal Error Varian Reference -Index out of range

Publication date: 2/7/2007 8-7


Varian 700-ES Series Spectrometer

23601 Internal Error Varian Reference -Null pointer


23650 Internal Error Varian Reference -Index out of range
23651 Internal Error Varian Reference -Item not found
23652 Internal Error Varian Reference -Invalid handle
23750 Internal Error Varian Reference -Incorrect number IEC records
23751 Internal Error Varian Reference -Incorrect blank record location
23752 Internal Error Varian Reference -Primitive Id not found
26001 Internal Error Varian Reference - Index out of range
28501 Internal Error Varian Reference - Incompatible standard types
28502 Internal Error Varian Reference - Inconsistent rack positions
28503 Internal Error Varian Reference - Run failed to stop in expected time
28504 Internal Error Varian Reference - Dilution tubes not available when expected
28505 Internal Error Varian Reference - Count exceeds trigger
28506 Internal Error Varian Reference - Block signature exceeds max solutions
28507 Internal Error Varian Reference - Missing concentration definition
28508 Internal Error Varian Reference - Invalid insert mode
28509 Internal Error Varian Reference - Standard definition missing
28510 Internal Error Varian Reference - QC test definition missing
28511 Error The plasma has gone out
28512 Internal Error Varian Reference - The worksheet run experienced a memory
access violation
28513 Internal Error Varian Reference - Calibration standards and samples can’t be
associated with QC error actions
28514 Internal Error Varian Reference - (WS) Asynchronous error
28515 Error Instrument (WS) offline
28516 Internal Error Varian Reference - (ICB) Asynchronous error
28517 Error Instrument (ICB) offline
28518 Internal Error Varian Reference - (SPS) Asynchronous error
28519 Error SPS offline
28520 Internal Error Varian Reference - (WS) Bus connection error
28521 Internal Error Varian Reference - (ICB) Bus connection error
28550 Internal Error Varian Reference - SPS tube logger not initialized
28551 Internal Error Varian Reference - Invalid value for SPS tube logger
28552 Internal Error Varian Reference - Invalid rack number
28553 Internal Error Varian Reference - Invalid tube number
28554 Internal Error Varian Reference - Invalid tube range
28555 Internal Error Varian Reference - Invalid rack position
29001 Error Fitted background calculations have failed Varian Reference -
calculations do not converge
29002 Error Fitted background calculations have failed Varian Reference -
insufficient data to perform a background fit
29003 Error Fitted background calculations have failed Varian Reference -
fitted background region is incorrect
29050 Internal Error Varian Reference - Index out of range
29051 Internal Error Varian Reference - Zero sigma
29100 Internal Error Varian Reference - Blank FACT model missing
29101 Internal Error Varian Reference - Generate curve failed
29501 Internal Error Varian Reference - Invalid parameter value given
29502 Internal Error Varian Reference -Parameter value already set
29503 Internal Error Varian Reference - Operation out of sequence
29504 Internal Error Varian Reference - Invalid operation requested
30001 Internal Error Varian Reference - Invalid value specified for a scan range
30501 Internal Error Varian Reference - Operation out of sequence
30502 Internal Error Varian Reference - Invalid parameter value given
30503 Internal Error Varian Reference - Invalid operation requested
31001 Internal Error Varian Reference - Wrong number of replicates given
31002 Internal Error Varian Reference - The column is not a singleton
31003 Internal Error Varian Reference - Scan exceeds regions boundaries

Publication date: 2/7/2007 8-8


Varian 700-ES Series Spectrometer

31004 Error No analyte FACT model defined


31005 Error No blank FACT model defined
31006 Internal Error Varian Reference - Incorrect points per peak specified
31007 Internal Error Varian Reference - Zero total read time
32001 Error Calibration curve not present
32050 Error Incorrect number of regions
32051 Error Insufficient data for wavelength calibration calculation
32100 Error Can’t delete when measured solutions are present
32101 Error Can’t insert within measured solutions
32102 Internal Error Varian Reference - Solution Id missing from worksheet
32103 Internal Error Varian Reference Replicate Id missing from worksheet
32104 Error The SPS diluter is not connected
33501 Internal Error Varian Reference - Exception in event handler
34001 Internal Error Varian Reference - Integer divide by zero
34002 Internal Error Varian Reference - Integer overflow
34003 F %d: Internal Varian Reference - Float divide by zero
Error
34004 Internal Error Varian Reference - Inexact float result
34005 Internal Error Varian Reference - Invalid float operation
34006 Internal Error Varian Reference - Float overflow
34007 Internal Error Varian Reference - Float stack check failed
34008 Internal Error Varian Reference - Float underflow
34009 Internal Error Varian Reference - Integer exception
34010 Internal Error Varian Reference - Unknown structured exception
34011 Internal Error Varian Reference - Unknown math exception
34012 Internal Error Varian Reference - Structured exception
34013 Internal Error Varian Reference - Float exception
34014 Internal Error Varian Reference - Access violation
34101 Internal Error Varian Reference - No memory
34102 Internal Error Varian Reference - Failed to create file ’darkcurrent dat’
34201 Internal Error Varian Reference - Electoffset, low DLA Number
34202 Internal Error Varian Reference - Electoffset, high DLA Number
34203 Internal Error Varian Reference - Electoffset, scan contains zero reads
34301 Internal Error Pixel conversion, wrong DLA number
34302 Error Pixel conversion, pixel out of range
34303 Error Pixel conversion, wavelength out of range
34304 Error Pixel conversion, invalid wavelength

Publication date: 2/7/2007 8-9


9. Sample introduction
9.1 Introduction
This section provides information on the sample introduction
system including
• System description
• Theory of operation
• Specifications
• Removal and replacement procedures
• Maintenance
This information is applicable to all Varian 700-ES Series
instrument types.

9.2 System description


The function of the liquid sample introduction system is to deliver
a uniform amount of sample to the plasma for excitation to
atomic/ionic emission states.
The liquid sample introduction system forms an aerosol by
combining a sample together with an argon carrier gas. The
aerosol is then transported to the plasma’s preheating zone.

Figure 1. Sturman-Masters sample introduction system


Varian 700-ES Series instruments

As the aerosol passes through the pre-heated zone and into the
plasma, it rapidly changes state by
• Desolvation
• Vaporization
• Atomization
• Excitation to emission (atomic and ionic)

Figure 2 Axial sample introduction system

9.3 Theory of operation

Figure 3. Sample introduction system block diagram

Publication date: 18/08/2006


9-2
Varian 700-ES Series instruments

The sample introduction system consists of


• Nebulizer
• Spraychamber
• Peristaltic pump
• Torch

Model
Options 710 715 720 725 730 735
Peristaltic 3 Channel S S O O - -
Pump 4 Channel - - O O S S
Nebuliser Pressure Regulator
S S O O - -
gas control
Computer controlled
- - O O S S
Mass Flow Controller
Sample Inert double-pass
introduction cyclone spraychamber
- S - O - O
and V-groove nebulizer
(radial only)
Glass, double-pass
cyclone spraychamber
- - O O O O
and SeaSpray nebulizer
(radial or axial)
Glass single-pass
cyclone spraychamber
S - O - O -
and Conikal nebulizer
(axial only)
Glass, single-pass
cyclone spraychamber
- - O O O O
and SeaSpray nebulizer
(axial only)
Snout Radial only - O - S - S
torch one-piece quartz torch S S S S S S
semi and fully-
demountable torches
O O O O O O
with choice of quartz or
ceramic injector tubes

‘S’ = Standard ‘O’ = Factory fitted Option


‘-‘ = Not Available

Note The peristaltic pump is driven by electronics which are described


in section 10 gas control.

Publication date: 18/08/2006


9-3
Varian 700-ES Series instruments

9.3.1 Nebulizers
The uniform delivery of an aerosol into the plasma involves
breaking up a stream of liquid into small aerosol particles which
are then swept to the plasma by a carrier gas. The liquid and
carrier gas are combined to form an aerosol in a device known as
a nebulizer.
The flow of the liquid sample into a nebulizer is controlled by
tubing fitted on a peristaltic pump. The pump rotates at user
specified speeds. The speed of the pump and the internal
diameter of the tubing that supplies the sample to the nebulizer
regulate the amount of sample that is aspirated.
Two basic types of nebulizers may be used with the
Varian 700-ES Series instruments to form an aerosol
• Pneumatic (standard)
• Ultrasonic (optional)
There are two types of factory-fitted pneumatic nebulizers
typically used with the Varian 700-ES Series instruments.
• V-groove
• Glass concentric

V-groove
The V-groove nebulizer is typically used with the Varian radially
viewed instruments.

Figure 4. V-groove nebulizer

Most V-groove nebulizers are made from inert plastic materials


(PEEK).
Sample is pumped through a small hole.
Carrier gas is fed through a second hole which is located below
the sample output hole.
The sample and carrier gas holes are positioned so that the
output of each is aligned on the same axis in a V-shaped trough.
The sample flows along the V-shaped channel where it is
captured by the venturi effect created by the carrier gas. The
carrier gas and sample combine to form an aerosol.
Note The V-groove nebulizer is non-free aspirating. This means that
there is no natural uptake and requires a peristaltic pump to
deliver the sample solution.

Publication date: 18/08/2006


9-4
Varian 700-ES Series instruments

Glass Concentric

Figure 5 Glass concentric nebulizer

Sample solution is drawn through a central capillary that is


surrounded by an outer channel through which a carrier gas is
fed. The carrier gas is forced through the outer channel, passes
by the end of the sample capillary and lowers the pressure
surrounding the tip of the capillary, extracting the sample.
The glass concentric nebulizers that can be used with the Varian
instruments are;
• Conikal ‘K’ type, nebulizer
• Seaspray - high dissolved solids nebulizer

The Conikal ‘K’ type nebulizer is used for high precision, routine
aqueous and organic applications.
• Material: Borosilicate glass
• High physical reproducibility ~ 1%
• TDS tolerance, typically up to 10%
• High tolerance to particulates, typically up to 75um
• Low RSD’s due to highly accurate construction
• Free uptake: 3mL/min
• Gas flow: 0.7L/min at 30psi

The SeaSpray nebulizer is used for trace level analyses. It has


better nebulization efficiency and resists clogging with most
mineral salts.
• Material: Borosilicate glass
• High physical reproducibility ~ 1%
• TDS tolerance, typically up to 20%
• High tolerance to particulates, typically up to 75um
• Low RSD's due to highly accurate construction
• Free uptake: 2mL/min.
• Gas flow: 0.7L/min at 30psi

Publication date: 18/08/2006


9-5
Varian 700-ES Series instruments

Ultrasonic
An ultrasonic nebulizer is offered with the Varian 700-ES Series
instruments as an accessory.
A typical ultrasonic nebulizer uses the vibration of a piezo-electric
transducer to form an aerosol.

coolant
out
coolant
in

desolvated heated
aerosol condenser (140°C)
to ICP U-tube

drain Argon in
aerosol
RF chamber
1.4 MHz

sample inlet
transducer
drain

Figure 6 Ultrasonic nebulizer

The sample flows over a glass plate fixed to the transducer


where ultrasonic vibrations cause the aerosol to form. The carrier
gas sweeps the sample aerosol into a desolvator and the dried
sample is then introduced into the plasma.

9.3.2 Spraychambers
The combined carrier gas and sample aerosol generated by the
nebulizer are introduced into the spraychamber.
The aerosol must be injected into the plasma at a uniform rate
without causing plasma destabilisation. In addition to this, the
aerosol that is injected into the torch must also contain a
sufficient number of small droplets that are reproducible and
representative of the sample. A spraychamber is used to remove
the larger droplets from the aerosol while providing a uniform flow
of aerosol to the torch. The spraychamber provides an interface
to pass the aerosol to the torch. The design transports a fine
spray to the torch, while larger droplets coalesce, fall to the
bottom and are removed through the spraychamber drain by the
pump and pump tubing.
Typical spraychambers used with the Varian 700-ES Series
instruments include
• Inert double-pass cyclone (Sturman-Masters)
• Glass single-pass cyclone (Cyclonic)
• Glass double-pass cyclone (Twister)

Publication date: 18/08/2006


9-6
Varian 700-ES Series instruments

Sturman-Masters
The Sturman-Masters double pass cylindrical spraychamber,
shown below, is typically used on radial instruments. It must be
used if the V-groove nebulizer is required. However, it canalso be
used with the glass concentric nebulisers if an adapter is used.

Figure 7 Sturman-Masters spraychamber (cross-section)

The Sturman-Masters spraychamber is made from Ertalyte and


its inner surface has been treated (sand-blasted) to ensure even
drainage of waste solution. A polypropylene version of the
Sturman-Masters spraychamber is also available for use with
aggressive solvents.

Note Do not touch the inner surface as its properties may be altered.

Single pass glass cyclonic

Figure 8 Glass cyclonic spraychamber

Publication date: 18/08/2006


9-7
Varian 700-ES Series instruments

Double-pass glass cyclonic (Twister) - reduces solvent load


The Twister cyclonic spray chamber features a central transfer
tube which is more efficient in removing larger aerosol droplets
compared to the single-pass glass cyclonic spraychamber. This
reduces solvent load in the plasma making it better suited to
more difficult sample types, such as those containing higher
dissolved solids (>5%) and low volatility organic solvents.
• Material: Borosilicate glass
• Volume: 50ml
• Physical reproducibility ~1%
• Low RSD’s - highly accurate construction.
• Application uptake range 0.2 to 3.0ml/min

Note All these spraychambers above are suitable for use with aqueous
and organic solvents. High concentrations of xylene may cause
the Sturman-Masters spraychamber material to swell. This effect
is generally reversible by cleaning and drying.

9.3.3 Argon saturation assembly


Humidification of the argon carrier gas is essential when
aspirating samples with high levels of dissolved solids. The
additional moisture in the argon minimizes deposit formation in
the nebulizer and injector tube of the torch.

Figure 9. Argon saturation assembly (ASA)

The argon saturation assembly (ASA) is recommended when


aspirating high level dissolved solids (>5%) through a standard
glass concentric nebulizer. The ASA is also recommended when
aspirating higher level dissolved solids (>20%) through the V-
groove nebulizer.
Note The ASA must not be used when the sample matrix includes
organic solvents.

Publication date: 18/08/2006


9-8
Varian 700-ES Series instruments

9.3.4 Peristaltic pump

Figure 10. Peristaltic pump assembly

The sample flow into the glass concentric nebulizer must be


starve-fed to overcome variations in the natural uptake rate of the
nebulizer.
The sample flow into a V-groove nebulizer requires the pump to
regulate the flow of liquid to the wetted surface of the nebulizer.
The flow of liquid into the nebulizer is controlled by a peristaltic
pump (figure 10).
The Varian 710-ES Series instruments are configured with a
three channel peristaltic pump.
The Varian 720-ES Series instruments can be configured with
either a three channel or four channel peristaltic pump.
The Varian 730-ES Series instruments are configured with a four
channel peristaltic pump.
One channel of the peristaltic pump is used to feed sample into
the selected nebulizer. A second channel pumps the drain liquid
from the spraychamber. The two channel introduction / extraction
technique improves the analytical precision of the instrument.
Remaining channels can be used for the introduction of an
internal standard or ionization buffer solution or to pump the fast
rinse solution when using the switching valve system (SVS1).
Note The standard pump and drain tubing supplied with the instrument
are suitable for aqueous solutions only. Tubing recommended
for use with organic solvents can be purchased and fitted.

Publication date: 18/08/2006


9-9
Varian 700-ES Series instruments

9.3.5 Torches
The torch confines ionized argon gas in the RF field of the
induction coil and introduces the fine sample aerosol from the
spraychamber to the plasma preheating zone.

One piece Torch


The one piece torch assembly supplied with Varian 700-ES
Series instruments consists of three fused concentric quartz
tubes.
• Plasma (outer wall)
• Auxiliary (intermediate tube)
• Sample (injector)

Figure 11. One piece torch (radial)

The outer wall forms the channel that carries the plasma gas
flow. The plasma flow keeps the plasma from overheating the
torch.

Figure 12 Plasma gas flow

Publication date: 18/08/2006


9-10
Varian 700-ES Series instruments

The intermediate tube separates the auxiliary flow from the


plasma gas flow. The auxiliary gas flow provides a positive
pressure at the base of the plasma which lifts the plasma and
keeps it from interacting with the top of the auxiliary and injector
tubes.

Figure 13 Auxiliary gas flow

The injector tube is the inner-most tube and carries the sample
aerosol to the plasma. The flow of the sample aerosol is
determined by the carrier gas flow rate.

Figure 14 Injector tube gas flow

One piece torches are available for different applications and with
different injector sizes.
Axial
High dissolved solids torch (patented)
Extended high dissolved solids torch (full length outer tube)
One piece torch with 0.8mm ID injector (volatile organics)
One piece torch with 1.4mm ID injector (common organics)
Radial
High dissolved solids torch with 1.8mm ID injector
Annealed one piece torch with 0.8mm ID injector
Annealed one piece torch with 1.4mm injector

Note Annealed torches provide improved torch lifetimes when running


organic samples.

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Varian 700-ES Series instruments

Demountable Torch
Optional torch designs are available
1. Semi-demountable (with removable injector tubes) and
2. Fully demountable (with removable plasma, auxiliary and
injector tubes).

Figure 15 Semi-demountable and Fully-demountable torch

These demountable torches offer the ability to replace separate


parts at less than the cost of a complete torch assembly. They
also allow operators the ability to customize the size, material and
location of the torch injector tube to suit specific applications.
Performance benefits of the demountable torch include
• Larger internal diameter of the injector tube. The standard
one piece radial torch has an internal diameter of 1.4 mm for
the injector tube which is ideal for most organics and normal
aqueous work. The standard demountable torch injector
tubes are 1.8 mm internal diameter. This allows the torch to
handle samples with higher dissolved solids and some types
of interferences, for example the effect of high phosphate
levels on calcium, are minimized or eliminated. A 0.8 mm
inner diameter injector tube is offered to handle some other
volatile organic solvents such as gasoline.
• Adjustable injector tube height relative to the central torch
tube. For samples with high dissolved solids, the injector
tube can be lowered which will make it run cooler and thus
be less subject to blockage.
• Optional alumina and quartz injector tubes. An alumina
injector tube is required for samples containing hydrofluoric
acid. This type of injector is resistant also to fusion samples
which can corrode quartz injectors. Quartz injector tubes can
be used when a larger internal diameter is needed or for
applications which tend to wear out the injector much faster
than the rest of the torch.

Note A demountable torch fitted with an alumina injector tube must be


used when aspirating samples containing hydrofluoric acid.

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Varian 700-ES Series instruments

Bonnet
The bonnet on radial instruments minimizes plasma arc-over to
the induction coil during ignition.

Bonnet

Figure 16 The bonnet fitted on a radial instrument

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Varian 700-ES Series instruments

9.4 Important information


It is essential that the methods described in this section are used
when performing service on the sample introduction system. All
of the following points should be read and understood. Failure to
do so may result in permanent damage to the instrument or
exposure of personnel to potential danger.

Warning Always determine what types of samples and solvents are in use before
starting any work on the sample introduction system of an installed
instrument, Hydrofluoric acid (HF) burns may cause loss of limbs. Ensure
that your customer flushes the system and removes the drain bottle
contents.

Warning Some solutions can cause eye damage, loss of limbs, severe burns or
skin irritation. Always wear eye protection and protective gloves when
working with acid solutions and seek medical treatment if any solutions
contact the skin.

Always release the pump pressure bars and tubing tension when
you have finished an analytical sequence or when the pump is
not being used for long periods. Peristaltic pump tubing can lose
its elasticity quickly.

Warning The torch and glass (quartz) components of the sample introduction
system are fragile. Handle them with care

Wet all mating surfaces with a dilute solution of Triton-X100 or


similar detergent to provide an easier fit when inserting the
nebulizer into into the body of the spraychamber,
Do not touch the sandblasted surface of the spraychamber
nebulizer bung or V-groove nebulizer. These have been specially
treated to ensure even drainage of the waste solution. Traces of
oil or grease from hands can affect the performance of the
spraychamber or V-groove and cause poor analytical stability.

Warning The torch, bonnet, work coil, and snout or sample cone become
very hot during plasma operation. Always wear protective gloves
or let these parts cool before you handle them.

The position of the torch must be set correctly. If the torch is


mounted too far into the work coil, it may melt.

Caution Do not clean a concentric glass nebulizer in an ultrasonic bath.


The fine central capillary of the nebulizer may crack or break.

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Varian 700-ES Series instruments

9.5 Removal and replacement procedures


This section provides procedures for access to and removal of
field serviceable components and assemblies in the sample
introduction system of the Varian 700-ES Series instruments.
Replacement procedures are the reverse, unless otherwise
stated.
For the latest instructions on how to set up and install these
components, please refer to the online help.
Specifically:

1. Click the Windows Start button and choose Programs > ICP
Expert > ICP Expert Help.
2. When the ICP Expert Help software appears, click the
Hardware link to view step-by-step instructions on how to
remove and install the various instrument components.

Below are some simple instructions on how to set up the most


common types of sample introduction components.

9.5.1 Nebulizers
Note You must optimize the nebulizer gas flow after changing a
nebulizer.

Glass concentric
Disconnect the argon gas nebulizer supply from the quick
disconnect connector on the right hand side of the sample
compartment or the ASA (if fitted).
Remove the EZYLOK connection from the nebulizer gas inlet
tube.
Carefully pull the nebulizer from the bung or spraychamber with a
twisting action.

Warning Glass concentric nebulizers and other glass parts in the


sample introduction system are prone to chipping, cracking,
and breakage as they age or if they are mishandled. Take
care when handling quartz or glass assemblies.

Note For nebulisers without EZYLOK connections, carefully cut off the
nebulizer gas inlet tube with a sharp knife. You may break the
nebulizer if you try to remove the tube. To refit the tube, immerse
the nebulizer gas tubing in hot water to make connection easier.
Replace the nebulizer sample inlet tubing. To minimize dead
volume, check that the EZYFIT connection is pushed into the
sample inlet of the nebulizer as far as it will go. Wetting the
nebulizer with water will make this easier.

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Varian 700-ES Series instruments

A large dead volume affects throughput because there is a larger


amount of residual sample which must be flushed through when
a new sample is introduced. It also may allow bubbles to form
which may result in a sudden drop in signal as a bubble is
aspirated, affecting analytical accuracy.
Refit the nebulizer into the spray chamber.
For radial instruments, adjust the nebulizer gas flow by aspirating
1000 ppm yttrium and adjusting the nebulizer gas flow until the
red bullet is approximately 1 mm above the torch – see figure 17.
For axial instruments, adjust the nebulizer gas flow by optimizing
net intensity of a Mn sample.
Note Nebulizer gas flow can be optimized for a particular analytical
line. Setting the yttrium bullet gives you a good starting point and
a standardized analytical position for doing the installation tests.

Figure 17 Optimizing nebulizer gas flow by aspirating 1000 ppm yttrium

V-groove
Note The V-groove nebulizer is made from inert material (PEEK) which
resists most solvents, including hydrofluoric acid. High dissolved
solids and slurries can also be successfully used.
This nebulizer can only be used with a Sturman / Masters
spraychamber
Disconnect the gas and sample tubes from the instrument.
Using a twisting motion pull the nebulizer out of the
spraychamber.
To re-assemble, insert the V-groove nebulizer into the spray
chamber with the sample inlet at the bottom.

Caution Do not touch the nebulizer’s sandblasted front surface which


protrudes into the spraychamber.

Connect the gas and sample tubes.

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Varian 700-ES Series instruments

For a radial instrument, aspirate a 1000 ppm yttrium sample and


adjust the nebulizer gas regulator knob or mass flow controller
flow rate until the red bullet is 1 mm above the top of the torch.
For an axial instrument, adjust the nebulizer gas flow by
optimizing net intensity of a Mn sample.
Note For some samples you may need to select different pump tubes
and/or pump speeds to optimize performance.
The sample orifice must be clear of obstructions and the front
surface must be clean and easily wettable. The nebulizer should
be rinsed thoroughly between samples and washed regularly with
a 0.1% solution of Triton X100 or similar inert non-ionic detergent
in an ultrasonic bath.

9.5.2 Argon saturation assembly (ASA)


Disconnect the ASA from the nebulizer gas outlet at the sample
compartment wall.
Disconnect the nebulizer inlet tubing from the ASA connector.
Slide the ASA from its bracket and remove it from the sample
compartment.
Check that the ASA contains approximately 100 mL of distilled
deionized water.

9.5.3 Pump tubing


The type of sample to be analyzed will determine the correct type
of pump tubing that should be selected. There are four types of
pump tubing solutions offered by Varian for the following three
types of liquid samples
• Aqueous
• Common organics (kerosene, white spirit, methanol,
ethanol)
• Other organics (gasoline, xylene)
• Ketones (MIBK, DIBK)
Solvent flexible PVC tubing (yellow) is recommended for aqueous
and common organic samples. Viton tubing is recommended for
other types of organics not suited to PVC (solvent flexible).
Ketone resistant tubing must be used when analyzing ketone
solutions. Refer to pump tubing manufacture’s literature for
further details on pump tubing and sample compatibility.
Pump tubing can be selected in various sizes and materials to
suit most samples and uptake rates.
Note The drain tubing volume must always be greater than the sample
channel or the combined volume of the sample and internal
standard channels.

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Varian 700-ES Series instruments

Ensure that the plasma and the peristaltic pump are not in use.
Disconnect the nebulizer capillary and sample capillary from the
sample pump tubing.
Disconnect the drain tubing and the spray chamber tubing from
the drain pump tubing.
Release the peristaltic pump tubing clamps.
Replacement tubing is available in kits. Refer to the operations
manual or software on-line help for more information.
Note Pump tubing is considered consumable and should be replaced
at customer expense unless expressly included in a specific
service agreement or contract.
Pump tubing should be fitted to the sample and drain lines as
shown in the instruction sheet in the kit. Stretch the pump tubing
over the pump rollers. The sample pump tubing should be in the
front channel and the drain tubing in the rear channel.
Note As the pump tubing beds in and wears it will stretch and flatten
and may require re-adjustment or replacement to maintain
optimum instrument performance.

9.5.4 Pressure bar adjustment


The pressure exerted by the peristaltic pump pressure bars on
the pump tubing is set by the knurled retaining nuts on the bottom
of the pump.

Caution Before disconnecting or optimizing the pump tubing ensure that


all tubing has been flushed with distilled deionized water to
remove any corrosive or toxic solutions.

When using the glass concentric nebulizer


Turn on the pump.
Turn off the nebulizer gas, or disconnect the capillary to the
nebulizer.
Turn the sample tubing pressure bar knurled knob counter-
clockwise until the distilled deionized water stops flowing. If the
water begins to recede, the pump tubing may require
replacement.
Turn the sample tubing pressure bar knurled knob clockwise
1/2 to 3/4 of turn.
Turn on the nebulizer gas, or reconnect the capillary to the
nebulizer.
Aspirate rinse solution (containing 0.1% Triton X-100 or similar
detergent)
Adjust the drain tubing pressure bar knurled knob until you see a
close-packed array of bubbles forming in the drain tubing from
the spraychamber.

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Varian 700-ES Series instruments

When using the V-groove nebulizer


Turn on the pump.
Aspirate distilled water or any other readily available clean
solution. Remove the nebulizer from the spray chamber and
observe the sample aerosol.
Release the sample tubing pressure bar knurled knob clockwise
until the pressure bar exerts enough force to stop the sample
aerosol forming.
Gradually tighten the tension on the pressure bar counter-
clockwise until the sample aerosol reappears then tighten the
knob another 1/2 turn counter-clockwise.
Replace the nebulizer in the spraychamber.
Set the drain tubing pressure bar as described for the glass
concentric nebulizer.
Note Correct pressure bar force on the sample and drain tubing is
essential for best analytical performance.
Correct drain operation is essential for correct instrument
operation. If the drain is not working, or if the nebulizer is able to
‘free uptake’ with the pump off, the spray chamber will begin to fill
with liquid which will eventually force the sample up into the torch.
This will extinguish the plasma.

9.5.5 Transfer tube


Remove the transfer tube from the spraychamber by gently
rotating the tube with minimal upward force.
Note Excessive upward force will put undue stress on the plasma
torch. Alternatively, unclamp the torch from its position before
disconnecting the transfer tube from the spraychamber, making
sure the torch does not move excessively within the plasma coils.
While gently rotating the transfer tube, apply minimal downward
force to disconnect the transfer tube from the plasma torch (while
clamped).
To refit the transfer tube:
Install the plasma torch in the torch compartment and clamp it
into position.
With the spraychamber bracket mounted but the spraychamber
removed, pass the transfer tube into the torch compartment via
the entry hole located above the spraychamber and bracket.
Inside the torch compartment, gently connect the transfer tube to
the sample inlet of the plasma torch making sure that a good seal
is formed.
Note Excessive upward force will put undue stress on the plasma
torch. If it is difficult to connect the transfer tube to the torch, try
rotating the tube while attempting to connect it.

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Varian 700-ES Series instruments

Locate the spraychamber onto the bracket and connect the


transfer tubing to the spraychamber. If the position of the transfer
tube is too low making installation of the spraychamber or
connection of the transfer tube difficult, move the transfer tube
higher up on the sample inlet of the plasma torch.
Note If it is difficult to move the transfer tube higher up on the torch, try
rotating the tube while applying upward force.
Check that no undue force is being applied to the plasma torch
when unclamped and that it is positioned centrally within the
plasma coils.
Align the torch as described in the ICP Expert II Help.

9.5.6 Spraychambers

Remove the nebulizer.

Warning Glass concentric nebulizers and other glass parts in the sample
introduction system are prone to chipping, cracking, and breakage
as they age and if they are mishandled. Take care when handling
glass or quartz assemblies.

Disconnect the torch transfer tube at the top of the


spraychamber.
Disconnect the drain tube from the bottom of the spraychamber.
The spraychamber is mounted on a polycoated bracket which
hangs on keyed slots from three plastic knobs protruding from the
wall of the sample compartment. Lift the spraychamber and
bracket up and lift away from the wall.
Remove the spraychamber from the bracket.

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Varian 700-ES Series instruments

9.5.7 Torches

Radial bonnet and torch assembly

Figure 18 Radial torch compartment

Open the torch compartment door.


Disconnect the torch auxiliary gas inlet tubing from the torch by
removing the Gazfit connection.
Disconnect the torch plasma gas inlet tubing from the torch by
removing the Gazfit connection.
Disconnect the spraychamber/torch transfer tube.

Warning Torches, bonnets, and other quartz parts in the sample


introduction system are prone to chipping, cracking, and breakage
as they age and if they are mishandled. Take care when handling
quartz assemblies.

Lower the torch and raise the snout to allow the bonnet to be
removed.
Hold the torch and open the torch clamp assembly on the torch
compartment wall.
Carefully remove the torch from the torch compartment.
Reverse this procedure to refit the torch.

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Varian 700-ES Series instruments

Replace the bonnet after the torch height is set.


The torch must be accurately positioned in the torch clamp.
Position the torch so that the intermediate tube of the torch is
about 2 mm below the bottom of the work coil – see figure 19.

Figure 19 Radial torch position

Adjust the snout.

Axial torch assembly

Figure 20 Axial torch compartment

Open the torch compartment door.


Disconnect the torch auxiliary gas inlet tubing from the torch by
removing the Gazfit connection.
Disconnect the torch plasma gas inlet tubing from the torch by
removing the Gazfit connection.
Disconnect the spraychamber/torch transfer tube.

Warning Torches, nebulizers, and other quartz parts in the sample introduction
system are prone to chipping, cracking, and breakage as they age
and if they are mishandled. Take care when handling quartz
assemblies.

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Varian 700-ES Series instruments

Carefully hold the torch, open the torch clamp locking knob and
lift the torch from the clamp bed.

Reverse this procedure to refit the torch.

Position the torch so that the intermediate tube is about 3 mm to


the left of the work coil.

Figure 21 Axial torch placement

Demountable torch assembly


Wet the inside of the injector tube holder with water.
Carefully insert the injector tube through the plastic injector tube
holder, twisting if necessary.
Insert the injector tube and injector tube holder into the torch
body.
Adjust the height of the injector tube until it is approximately 3
mm below the central tube of the torch body.

Note A very light smear of vacuum grease between the plastic injector
tube holder and the torch body will ensure a tight seal.

The injector tubes should be cleaned regularly to ensure good


analytical performance. Rinsing with water is generally be
sufficient for salts. For more difficult stains or deposits on internal
surfaces a strong acid mixtures of HCl and HNO3 (20-50%) or a
pipe cleaner dipped in the acid solution should be used.

Warning Torches, bonnets and other quartz parts in the sample introduction
system are prone to chipping, cracking, and breakage as they age
and if they are mishandled. Take care when handling quartz
assemblies.

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Varian 700-ES Series instruments

Snout assembly
Follow these steps when installing the snout on a radial
instrument.
Ensure the torch has been removed from the unit or lowered to a
height where the top outer sleeve of the torch is below the top of
the work coil.
Ensure the bonnet has been fitted on top of the work coil.

Warning Torches, bonnets and other quartz parts in the sample introduction
system are prone to chipping, cracking, and breakage as they age
and if they are mishandled. Take care when handling quartz
assemblies.

Carefully slide the snout in toward the pre-optics viewing


aperture.
Rotate the snout until the prongs on the ceramic end are
horizontal and approximately in the correct place to insert the
torch between them.
Note Ensure the snout is fitted so that the slot in the snout is vertical.
Rest the snout on the bonnet
Insert the torch in correct position and fit the snout against it by
gently moving the snout face towards the torch.
Note Removal and replacement of the snout may affect the torch
horizontal scan profile. Perform a horizontal torch alignment scan
to check that the torch is properly centered. The profile must
peak within ±1.5 mm of the center position.

9.5.8 Torch clamps

Radial torch clamp assembly


Remove the torch

Warning Torches bonnets, and other quartz parts in the sample


introduction system are prone to chipping, cracking, and
breakage as they age and if they are mishandled. Take care
when handling quartz assemblies.

Remove the two retaining bolts, nuts and washers from the
alodined brackets that retain the ertalyte clamp.
Remove the assembly from the instrument.
Note Removal and replacement of the torch clamp may affect the torch
horizontal scan profile. Perform a horizontal torch alignment scan
to check that the torch is properly centered. The profile must
peak within ±1.5 mm of the center position.

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Varian 700-ES Series instruments

Axial torch clamp assembly


The axial torch clamp assembly can be adjusted to center the
torch in the work coil.
Note The alignment of this assembly requires the use of an alignment
tool (p/n 72 100314 00).
Remove the torch.

Warning Torches spraychambers, and other quartz parts in the sample


introduction system are prone to chipping, cracking, and breakage
as they age and if they are mishandled. Take care when handling
quartz assemblies.

Remove the two retaining bolts, nuts and washers from the
alodined brackets that retain the ertalyte clamp.
Remove the assembly from the instrument.
Replace the clamp and torch clamp assembly in reverse order
leaving the retaining bolts finger tight.
Remove the cone and fit the base of the alignment tool to the
pre-optics barrel.
Insert the shaft of the alignment tool through the work coil and
install it to the base of the alignment tool.
Clamp the torch clamp on the shaft and observe that the
orientation of the clamp is square to the base of the torch
compartment.
Lock the clamp into position by tightening the retaining screws
Note Removal, replacement and adjustment of the torch clamp will
affect the torch scan profiles. Perform a vertical and horizontal
torch alignment to check that the torch is properly centered.

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Varian 700-ES Series instruments

9.6 Maintenance
This section provides information for cleaning and maintenance
of the sample introduction system.

9.6.1 Nebulizers
Check that the nebulizer is clean before connecting it to the
instrument. Routine flushing with clean rinse liquid between
samples and after a run will help prevent deposits from forming
on the nebulizer which might interfere with the sample or
nebulizer gas flow.

Glass concentric nebulizer


The glass concentric nebulizer is easily blocked by particulate
matter present in analytical solutions. Solid matter may become
lodged in the fine central capillary through which the sample
passes, preventing the flow of gas and/or sample through the
nebulizer.
Note To minimize contamination which can cause blockages, always
cover the sample from dust and filter it if necessary.
Obstructions in the sample uptake system can usually be
detected by a change in the flow rate or analytical signal when
compared with similar previous analyses. You may be able to see
the obstruction with a 30 X magnifier.
To clear a blocked nebulizer
• Pump rinse solution through it. If this does not clear the
blockage remove the nebulizer.
• A blockage in the central capillary or carrier gas channel
can sometimes be removed by applying a gas or liquid flow
through the nebulizer in the reverse direction to the normal
sample flow. Place the tip of the nebulizer in clean water or
rinse solution and apply a vacuum to the sample inlet end
with a syringe.
• If this does not clear the blockage, soak the nebulizer
overnight in concentrated nitric acid or 1:1 mix of nitric and
HCl. Check that air is not trapped in the central capillary
and that the nebulizer is completely submerged in the acid.
After overnight soaking, rinse the nebulizer thoroughly in
distilled deionized water and re-install it.

Caution Do not try to clean a glass concentric nebulizer in an ultrasonic


bath. The capillary will almost certainly break or chip and must
then be replaced.

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Varian 700-ES Series instruments

V-Groove nebulizer
V-groove nebulizers should be used for samples containing high
solid content or hydrofluoric acid. Routine flushing with clean
rinse liquid between samples will help prevent sample deposition
on the nebulizer tip.

Warning V-Groove nebulizers are often used when analyzing samples that
contain hydrofluoric acid. Always determine what types of
samples and solvents are in use before starting any work on the
sample introduction system. Hydrofluoric acid (HF) burns may
cause loss of limbs. Ensure that your customer flushes the
sample introduction system, cleans the nebulizer and removes the
drain bottle contents before attempting to service the system.

If nebulizer optimization requires an abnormally high pressure the


gas orifice may be partially blocked.
To clean a blocked gas orifice:
• Remove the gas hose
• Carefully clean the carrier gas hole (smaller hole) using the
tungsten cleaning wire supplied.

Note If the hole is damaged or enlarged the nebulizer performance will


be permanently degraded.

• Wash it thoroughly and refit it.


• To clean a blocked sample orifice/tube:
• Remove the PTFE nut, fitting and tubing assembly.
• Carefully clean the sample hole (larger hole) with a
suitable wire.
• If the sample capillary tubing looks visibly blocked or
damaged, remove it from the nut and fitting.
• Insert the replacement tubing through the PTFE nut.
• Flare a new sample capillary tube slightly to allow the small
end fitting to enter the tubing.
• Screw the nut into the nebulizer body. Check that it is
completely home to prevent dead volume in the sample
line. This will minimize the volume or possible leakage of
samples.

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Varian 700-ES Series instruments

9.6.2 Argon saturation assembly (ASA)


The Varian 700-ES Series instruments are not fitted with an
argon saturation assembly in series with the nebulizer argon
supply. In cases where high solids are being used the ASA
should be fitted to reduce blockages of the nebulizer and torch
injector tube.
The water level in the ASA bowl should be checked regularly and
refilled with distilled deionized water when necessary:
• Remove the argon saturation assembly.
• Unscrew the plastic bowl, empty it and refill with 100 mL of
distilled deionized water.
• Refit the assembly.

Note Use only distilled, deionized water in the ASA.

9.6.3 Pump tubing


The pump tubing has special elastic properties which allow it to
deliver a constant volume of sample to the nebulizer.
Pump tubing which has lost its elasticity will not deliver the
sample to the nebulizer correctly. When the pump tubing appears
deformed, or is loose around the pump rollers, you should
replace it.

9.6.4 Spraychambers

Glass spraychambers
The spraychamber will require cleaning if you see droplets
collecting on the internal surfaces of the spraychamber. This may
cause signal instability problems and even plasma flickering
problems.
Rinsing the spray chamber by aspirating a mildly-acidic blank
solution for several minutes will clean the spraychamber and
ensure that sample deposits will not form inside a spray chamber
when the spraychamber dries out after use.
If the spraychamber becomes contaminated with sample
deposits, it should be soaked overnight in a cleaning solution
such as 10% Decon 90. If this doesn’t remove the contamination,
stronger acidic baths can be used, but not solutions of
hydrofluoric acid.
HF (hydrofluoric acid) should not be used with glass or quartz.
Using any amount of HF will cause damage.
Do not wash glass spray chambers in an ultrasonic bath.

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Varian 700-ES Series instruments

Sturman / Masters spraychamber


The inner surface of the Sturman-Masters spray chamber has
been treated to ensure even drainage of waste solution. Do not
touch this surface as its properties may be altered.

Note If the instrument has been running organic solutions, the


spraychamber should be flushed with a solvent which is miscible
with both the organic solution and water, for example ethanol.
Rinse with distilled water before cleaning
• Remove and dismantle the spraychamber assembly.
• Place the spraychamber in an ultrasonic bath containing a
mild detergent like Triton-X 100.
• Rinse the spraychamber with distilled water and allow it to
dry before reassembly.
• Re-install the spraychamber and run the plasma with a
0.1% Triton-X100 distilled water solution for several
minutes to re-wet the internal surfaces.
Note O-rings may swell after use with some organic solvents, for
example xylene. They should be inspected regularly and replaced
if necessary. A kit of spraychamber o-rings can be supplied - see
section 6 Spare parts and test equipment.

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Varian 700-ES Series instruments

9.6.5 Torches
The torch must be kept clean and free of deposits to ensure good
analytical performance and to prolong the life of the torch.
Deposits which form on the torch may interfere with the normal
operation of the instrument and the salts embedded in the quartz
outer tube devitrifies when the torch is exposed to the heat of the
plasma. Fragments may also lodge in the injector tube and
obstruct sample introduction to the plasma.

To clean the torch:


• Switch off the instrument and allow the torch to cool.
• Remove the torch.
• Deposits left by concentrated (>0.5%w/v) salt solutions can
be removed by rinsing the torch in clean water.
• Remove other deposits or stains by soaking the torch
overnight in aqua regia (concentrated nitric
acid/concentrated hydrochloric acid, 1:3 by volume).
Rinse thoroughly with water.

Warning Nitric, hydrochloric and hydrofluoric acids and aqua regia are
very corrosive and can cause severe burns. Protective clothing
must be used when handling these acids. Strong rubber gloves
and a face shield must always be worn when using hydrofluoric
acid. Only chemists should handle these acids. Obtain help
from a chemist if you need to clean sample introduction system
components.

• Organic solutions can form carbon deposits on the injector


and intermediate tubes of the torch. These may be
removed by scraping the deposits gently with a fine metal
spatula and acid soaking, then rinsing.
Take care to avoid scratching the torch.

Note Always dry the torch before replacing it or the plasma will not
ignite. Preferably rinse the torch with methanol and dry it with a
stream of air or nitrogen.

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Varian 700-ES Series instruments

9.6.6 Bonnet
Deposits which may develop on the torch bonnet can be removed
by the same procedures described for the torch.

9.6.7 Transfer tube


The transfer tube is made of FEP (fluorinated ethylene-
propylene) material and is inert to most chemicals providing long
life and making it virtually maintenance-free. If cleaning is
required, simply rinse with distilled water and dry before installing.
The ends of the transfer tube are mechanically fragile and should
not be squeezed or twisted. When not installed, the transfer
tubes should be stored in a PVC bag to prevent electrostatic
attraction of dust and contamination.

9.6.8 Cooled sample cone – axial only


For best instrument performance, the cooled cone should be
routinely cleaned.
• Remove the torch assembly.
• Remove the three nickel thumbscrews which retain the
cone.
• Rinse the cone with water and dry it with a stream of air or
nitrogen. This will normally be the only action required.
• However, if this does not remove the stain, dampen a soft
cloth with tap water and load with stainless steel cleaning
powder (Esteele stainless steel and copper cookware
cleaner or equivalent). Scour the outer side of the sample
cone working the surface in a circular motion. Dampen and
reload the cloth as required until the cone is clean. Rinse
well with water and dry it with a stream of air or nitrogen.
• Dampen a clean soft cloth with some ethanol or methanol.
• Wipe clean the internal parts of the cooled cone interface
paying close attention to the insulation spacer.

Note The cooled cone interface insulating spacer should be replaced


at the first sign of melting. While cleaning the spacer inspect the
inner surface of it and replace it if necessary.

• Refit the cone to its mounting base.


Be sure that the retaining knurled knobs are tight.

Publication date: 18/08/2006


9-31
10. Gas control
10.1 Introduction
The Varian 700-ES series spectrometer gas control systems are
electromechanical assemblies controlled by PC software via the gasbox control
pwb. The gas control system regulates all gas flows internal to the instrument.

10.2 System description


The Varian 700-ES series spectrometer gas control system
• Monitors the argon inlet pressure
• Controls plasma gas flows to the torch
• Controls auxiliary gas flows to the torch
• Controls the supply of argon to the nebulizer gas controller
• Controls the peristaltic pump
• Controls the plasma ignition spark generator
• Controls and condition gas purge flows to the polychromator
• Controls snout or sample cone gas flow
• Provides the camera purge gas flow (Varian 720/730-ES series only)

10.3 Theory of operation


The Varian 700-ES series spectrometer gas control system is comprised of the
following functional areas
• Gas control manifold assembly
• Optics purge filter
• Camera purge filters (Varian 720/730-ES series only)
• Igniter assembly
• Nebulizer gas control options
• Gas control pwb
• Peristaltic pump drive pwb
Figures 1 and 2 shows the gas schematics of the different gas control systems.
Varian 700-ES series spectrometer

Figure 1 Varian 720/730-ES series gas control schematic

Publication date: 7/02/2007


10-2
Varian 700-ES series spectrometer

Figure 2 Varian 710-ES series gas control schematic

Publication date: 2/7/2007


10-3
Varian 700-ES series spectrometer

Gas control manifold assembly


The gas control manifold assembly is mounted in the lower, rear part of the
instrument. It is accessed through the rear access cover mounted on the rear
panel.

Gas control
manifold

Varian 710-ES series Varian 720/730-ES series


Figure 3 Gas control manifold

The gas control manifold assembly consists of


• Argon inlet frit filter
• Gas inlet manifold and argon pressure sensor
• Nitrogen purge regulator (optional on Varian 710/720-ES series)
• Gas control manifold supply solenoid
• Gas control supply regulator
• Gas control manifold
• Nebulizer supply solenoid
• Gasbox interconnection pwb

Argon supply
For the Varian 710/720-ES series instruments, the gas control manifold
assembly has only one gas supply hose. Argon gas is used to purge the
polychromator as well as in the plasma. A Nitrogen Purge kit is available that
allows you to purge the polychromator with nitrogen instead of argon (refer to
the Nitrogen Purge option later in this section).
The Nitrogen Purge kit is fitted as standard on the Varian 730-ES series
instruments. For the Varian 710/720-ES series instruments, this kit can be
fitted to the instrument either as a factory fitted option or field fitted option.
The Argon supply requires a regulated argon gas source of less than 700 kPa
(100 psi). The gas flows from the regulated source into the gas inlet manifold
through the argon inlet frit filter.

Publication date: 7/02/2007


10-4
Varian 700-ES series spectrometer

The gas inlet manifold is made from a machined aluminium block. Gas
pressure from the argon supply hose is monitored by a pressure sensor switch
mounted on the inlet manifold at the output of the argon inlet frit filter. This
switch is factory set, and connected to the gasbox interconnect pwb. If the
filtered argon inlet pressure drops below 345 ± 5 kPa (58 psi) the sensor will
open. The open switch will trigger the gas control pwb to generate the PC
software error
‘low argon pressure’.
The argon gas then flows in two paths - one directly to the nebuliser gas
supply, the other to the gas control manifold regulator. This gas control
manifold supply regulator is adjusted to 220 ± 5 kPa (32 psi) at the factory and
regulates the pressure supplied to the gas control manifold. The gas supply
manifold contains a series of jewelled orifices selected by solenoids as
appropriate to control the argon flow to the;
• Plasma gas
• Auxiliary gas
• Snout or cone purge gas
• Polychromator boost purge gas
There are two flows that are not solenoid controlled and therefore provide a
continuous flow.

• The Camera purge (Varian 720/730-ES series only)


• Polychromator purge gas

Camera purge (Varian 720/730-ES series only)


The camera purge outlet provides argon to the three camera purge filters. The
flow of gas through the filters is set by a porous metal flow restrictor and the
argon supply pressure set by a 220 kPa regulator in the gas box. This allows a
0.1 L/min flow to be delivered to the camera.
The Varian 710-ES series instrument camera is a sealed assembly and has no
camera purge.
The PC software includes a warning message that indicates when filter
replacement is required. This message is triggered by timers located in the
Windows data registry and must be reset when the filters are replaced.
The camera purge filters include
• Camera purge drying Drierite filter
• Camera purge molecular sieve filter
• Camera purge 0.2 micron particulate filter

Drierite filter

molecular
sieve filter

particulate
filter

Publication date: 2/7/2007


10-5
Varian 700-ES series spectrometer

Plasma
The selected plasma flow passes through a combination passage and the
igniter assembly to the torch. During an ignition sequence the plasma gas
carries the spark discharge from the igniter assembly to the torch. The plasma
orifice jewels are sized to deliver 1.5 l/min, 3 l/min, 6 l/min, and 12 l/min flows
to provide a maximum flow of 22.5 l/min when all solenoids are open.

Solenoid Function Flow l/min


SV1 - SV4 Controls the plasma gas flow to the torch 1.50 - 22.5

Igniter assembly
The igniter assembly is mounted on the right hand wall of the torch
compartment.

The active low plasma ignite signal from the gas control pwb drives an
electronic high voltage spark generator. The spark generator is mounted with
its discharging electrode protruding into the main plasma gas line. Argon
ionized by the spark flows to the torch and in the presence of an active RF
work coil field establishes the plasma.

Auxiliary
The selected auxiliary flow passes through a combination passage to the torch.
The auxiliary gas flow orifice jewels are sized to produce 0.75 l/min, 1.5 l/min
and 26 l/min. In regular operation, auxiliary flows of 0, 0.75, 1.5 or 2.25 l/min
may be selected.
The 26 L/min flow is used only during ignition. The instrument will not be able
to sustain a plasma if 26 L/min of auxiliary gas flow is left on after ignition.

Solenoid Function Flow l/min


SV5, SV6 Controls the auxiliary gas flow to the torch 0.75 – 22.5
SV11 Controls the auxiliary boost flow to the torch 26

Publication date: 7/02/2007


10-6
Varian 700-ES series spectrometer

Snout or cone purge


Argon flow from the gas supply manifold to the snout or cone is controlled by
solenoid SV7. The flow rate for the cone or snout purge is about 3 l/min. PC
software controls this purge through the gas control and gasbox interconnect
pwbs.
The cone purge for axial instruments is “on” whenever the plasma is on and it
is not operator controlled.
The snout purge for radial instruments may be turned “on” or “off” through the
PC software.

The instrument software allows the use of the snout purge when analysis of
lower wavelength vacuum ultra violet analytical lines is required. The control
solenoid is turned on from the PC instrument software through the gas control
and gasbox interconnect pwbs when the extra polychromator boost preference
is enabled.

Solenoid Function Flow l/min


SV7 Controls the argon purge to the snout/cone 3

Publication date: 2/7/2007


10-7
Varian 700-ES series spectrometer

Polychromator purge
Gas flow to the polychromator from the gas supply manifold is in two stages.
The standard flow of 0.75 l/min is unswitched and provides a continuous
polychromator purge gas on all Varian ICP-OES instruments. The flow may be
increased by the polychromator boost purge when required (solenoid SV8
enabled).
The boost purge is required when analysis of lower wavelength vacuum ultra
violet analytical lines is required. The boost control solenoid is turned-on from
the PC software through the gas control and gasbox interconnect pwbs.
The polychromator purge and the polychromator boost purge are connected in
parallel through a molecular sieve / charcoal filter. The polychromator purge
maximum gas flow is approximately 3.75 l/min with the polychromator boost
purge enabled.
Note The filter is directional in design and the flow of gas through this cartridge must
be in the direction indicated on the label fixed to the filter. This filter is fitted to
the rear of the instrument. The flow direction arrow must point up.

Molecular sieve /
charcoal filter

The gas from the gas supply hose flows through an inlet frit filter, through a
regulator (set to 220kPa) to the polychromator molecular sieve/ charcoal filter.

Solenoid Function Flow l/min


SV8 Controls the polychromator boost purge 3

10.4 Nitrogen purge option (98 100369 0X)


To purge the polychromator with nitrogen instead of argon, a Nitrogen Purge
Kit must be fitted to the instrument. The Nitrogen Purge kit is fitted as standard
on the Varian 730-ES series instruments. For the Varian 710/720-ES series
instruments, this kit can be fitted to the instrument either as a factory fitted
option or field fitted option. Instructions on installing this kit in the field are
provided in instruction sheet part number 85 102226 00.
When fitted the nitrogen purge gas supply hose requires a regulated nitrogen
gas supply of 250 kPa (36 psi).
With the Nitrogen purge option, the gas from the nitrogen source flows through
an inlet frit filter to a diaphragm driven non-relieving regulator. This regulator is
set to 220 kPa (32 psi) and regulates the pressure supplied to the
polychromator molecular sieve / charcoal filter.

Publication date: 7/02/2007


10-8
Varian 700-ES series spectrometer

The polychromator purge orifice and polychromator boost purge orifice sets the
flow through the filter. The polychromator purge flow is not switched and is
always on. The polychromator boost purge flow is switched and controlled by
the PC software through the gas control pwb.
Note The gas pressure from the nitrogen supply is not monitored for pressure or
flow.
Note It is permissible to use argon if the nitrogen gas supply is temporarily
unavailable.

Caution The Varian ICP-OES spectrometer gas control unit supplies an


uninterrupted gas purge to the polychromator assemblies and
camera assembly (Varian 720/730-ES series only). These purge
flows are needed to prevent moisture from accumulating on the
surface of the camera assembly. It is strongly recommended that
the gas supplies are left on at all times except during long periods
of non-use or during service activities.
Always turn-off the camera peltier before turning off the
instrument gas supply or when performing service on the
instrument gas control assembly
Always ensure instrument software indicates the peltier is off prior
to turning off the instrument gas supply

10.5 Nebulizer gas supply


The supply of argon to all of the Varian ICP-OES instrument nebulizer options
is controlled by the nebulizer supply solenoid SV10. The supply solenoid is
turned on by the PC software and the gasbox control pwb through the gasbox
inter connect pwb.
The Varian ICP-OES instrument factory nebulizer gas supply options are
• Manual nebulizer regulator and pressure gauge
• Nebulizer mass flow controller

Solenoid Function Flow l/min


SV10 Controls flow of argon to the nebulizer supply

Publication date: 2/7/2007


10-9
Varian 700-ES series spectrometer

Manual nebulizer regulator and pressure gauge option

The nebulizer regulator is a diaphragm type, manually operated, relieving


regulator that is manually set by the instrument operator as required for
optimum analytical measurements. By varying the pressure of the carrier gas,
the operator can selectively increase or decrease the flow of argon through the
nebulizer and hence spraychamber, and torch injector tube.
Argon from the nebulizer supply regulator is monitored by a pressure gauge,
which indicates the output pressure of the regulator. This gauge is located on
the front, lower right hand side instrument panel and can be monitored by the
operator.

Nebulizer mass flow controller option

The mass flow controller used in the Varian ICP-OES instruments is a device
which accurately supplies a specified flow of argon gas. It is set by an analog
voltage from the gasbox control pwb. This assembly can not be serviced and
must be replaced at module level.
The argon gas flow can be set from 0 to 1.3 l/min.
The mass flow controller also provides an output voltage proportional to the
actual flow achieved. This signal is applied to a window comparator circuit
located on the gas control pwb. The circuitry compares the requested flow
voltage with the set voltage (requested flow rate). If the voltage is too low or
too high for the requested flow rate, the gasbox control pwb will cause the PC
instrument software to generate an appropriate error message.

Publication date: 7/02/2007


10-10
Varian 700-ES series spectrometer

10.6 Gas control pwb

Gas control
pwb

The gas control pwb is located on the upper, left hand side of the instrument
next to the RF interface pwb on the Instrument power pwb service bracket.
The gas control pwb is controlled by IC7, an 80C32 microprocessor, operating
at a clock frequency of 12 MHz. The 80C32 has three, 8 bit parallel I/O ports.
P1-7 on Port 1 is used by the main program store to recognize which part
number gas control pwb is being used. In the case of the Varian 710/720 and
730 series gas control pwb pin 8 is hardwired to signal earth which will be read
as a logic low when the 80C32 reads port 1.

Port 0 (pins 32–39) Low address/data byte


Port 1 (pins 1–8) Status monitoring, data direction flow,
pump enable/step controls/Liberty or
Varian 7XX ID
Port 2 (pins 21–28) High address byte
Pin 9 Reset
Pins 10, 11 Serial communications
Pins 12-15 Diagnostics
Pins 16,17 Read/write lines
Pins 18, 19 Clock

Table 2 80C32 pin outs

Note This Gasbox pwb is also used in the Varian Liberty Series II instrument.

Memory
Multiplexed address/data information is separated by IC8 (74HCT573) which
latches the low address byte on the falling edge of ALE. The program store
enable (PSEN) output of the microprocessor selects program memory or data
memory and I/O functions.
IC9, a 27C256 32 kilobyte EPROM, is the main program store and is accessed
when PSEN is low. IC12, a 6264 8 kilobyte RAM, is the dynamic data store
and is accessed when A15, RD and WR are all low.

Publication date: 2/7/2007


10-11
Varian 700-ES series spectrometer

I/O Address decoding


IC 10 is a 3 to 8 line decoder for I/O control. It is selected when A15 and A11
are high and A3 is low.
IC 10 output low I/O device selected
Y0 (pin 15) IC 15 output latch
Y1 (pin 14) IC 16 output latch
Y2 (pin 13) IC 13 DAC (pump drive)
Y3 (pin 12) IC 14 input latch
Y4 (pin 11) IC 13 DAC (MFC)

Table 3 Address selects

Communications
Serial communications between the gas control pwb and the communications
portion of the 386ex-control pwb is buffered by IC3, an RS-422 bi-directional
bus transceiver. The direction of data through this device is controlled by the
state of output port P1-6 of IC7. When pin 7 of IC7 is low the microprocessor is
in transmit mode.
The conversion from RS-422 serial format data to parallel bus format data is
performed internally in the 80C32 microprocessor through its RXD and TXD
ports, pins 10 and 11.

Reset
The gas control pwb can be reset by a system reset signal from the 386ex
control pwb which de-activates opto-isolator OP1 and produces a logic high at
pin 9 of the 80C32

Gas supply manifold and igniter control


IC15 is an 8 bit D-type latch, which control the signals for the plasma, auxiliary
and snout/cone gas solenoids. IC15 also latches the control signal for the
igniter assembly. A low to high transition of the clock input latch captures the
information from the data bus and presents it to the input of IC 24. IC 24
outputs are active low and directly drive the solenoids and power the igniter
relay coil.

Plasma ignition control


The Q7 output of IC15 is buffered by a 9667 Darlington driver IC 25 which
generates an active low /IGNITE signal. This drives the igniter spark generator
module.

Publication date: 7/02/2007


10-12
Varian 700-ES series spectrometer

Control solenoids, polychromator boost purge and Auxiliary boost


IC16 is an 8 bit D-type latch that controls the signals for the delivery of gas to
the gas supply manifold assembly, the nebulizer, the polychromator boost
purge, and the auxiliary boost solenoid. A low to high transition at the clock
input transfers the information from the data bus to its outputs Q0 - Q7.
When Q0 is high, transistors TR4 and TR 9 are turned on and drive the gas
control manifold supply solenoid SV9.
When Q1 is high, Darlington driver IC 25 outputs a logic low which turns on
transistor TR6 connecting the +28 VDC supply across the selected solenoid.
Q1 is briefly held high when any solenoid is driven. When Q1 goes low, the
+12 V supply holds the selected solenoid in the open position.
When Q2 is high, transistors TR7 and TR8 are turned on and drive the
nebulizer control solenoid SV10.
When Q3 is high, Darlington driver IC 25 drives the polychromator boost purge
solenoid SV8.
When Q4 is high, Darlington driver IC 25 drives the auxiliary boost solenoid.

Nebulizer mass flow controller assembly


The nebulizer mass flow controller assembly is an OEM assembly. It cannot be
serviced by Varian CSR’s and must be replaced at module level.

Mass flow controller drive


The mass flow control is supplied with a variable DC voltage, proportional to
the nebulizer flow selected through PC software control. The PC software is
used to set the argon gas flow rate by the gas control 80C32 microprocessor
and the mass flow control circuitry.

Mass flow controller circuitry


IC 13 is a two channel 8 bit D/A converter. The DAC is loaded with the MFC
flow rate data from the 80C32 at IC 13 pins 7-14 when pins 15 and 16 are
active high and pin 6 is active low. The MFC setpoint from A/D converter
channel B (IC 13 pin 20) is buffered by IC 18A and resistor R 67 to pin 9 of PL
9. A voltage of 5 volts at TP18 corresponds to a setpoint of 1.5 litres per
minute.

MFC enable
When the MFC enable signal is low the MFC setpoint is zero. A logic high on
PL 9 pin 7 enables the MFC.

Publication date: 2/7/2007


10-13
Varian 700-ES series spectrometer

MFC feedback
The mass flow controller monitors the argon flow rate and provides a voltage at
pin 8 of PL 9.
5 VDC corresponds to a flow of 1.5 l/min. This voltage is connected to a
window comparator formed by IC 19A and IC 19B. Under normal operation,
both IC 19B pin 7 (HIGH FLOW) and IC 19A pin 1 (LOW FLOW) will output a
low.
In a fault condition where the provided voltage exceeds the setpoint voltage at
TP 18 by more than 0.6 VDC then IC 19B pin 7 will go high generating the
error of nebulizer high flow.
In a fault condition where the feedback voltage is less than the setpoint voltage
at TP 18 by more than 0.6 VDC then IC 19A pin 1 will go high generating the
error of nebulizer low flow.

10.7 Gasbox interconnect pwb


The gasbox interconnect pwb is in the gas control unit. It distributes signals
between the Gas control pwb and
• Solenoid valves SV1 through SV11
• The igniter
• The argon pressure switch
Solenoid valve status is indicated by LEDs D1 to D12 on this pwb.
See Table 4.

LED number Solenoid Gas Flow rate


l/min (Ar)
LED D1 SV1 Plasma 1.5
LED D2 SV2 Plasma 3.0
LED D3 SV3 Plasma 6.0
LED D4 SV4 Plasma 12.0
LED D5 SV5 Auxiliary 0.75
LED D6 SV6 Auxiliary 1.5
LED D7 SV7 Snout/cone 3.0
LED D8 RELAY Igniter Assembly N/A
LED D9 SV9 Gas On N/A
LED D10 SV10 Nebulizer N/A
LED D11 SV8 Polychromator 3.0
boost
LED D12 SV11 Auxiliary boost 26

Table 4 Gasbox interconnect LED identification

Publication date: 7/02/2007


10-14
Varian 700-ES series spectrometer

10.8 Three and Four channel peristaltic assembly


The Varian ICP-OES instruments may be fitted with one of two basic peristaltic
pump configurations.
• Three channel pump
• Four channel pump
Both the three channel and four channel peristaltic pumps are capable of
operator selected speeds of up to 50 rpm.
The peristaltic pump drive system consists of two basic functional areas
• Three channel or four channel stepper motor peristaltic pump assembly
• Pump drive circuitry
The pump assemblies are OEM modules that can not be serviced and
therefore must be replaced at module level.

10.9 Peristaltic pump pwb

Peristaltic
pump pwb

All of the electronics required to drive and control the speed of the stepper
motor peristaltic pump assembly are located on the Peristaltic pump control
pwb. The Peristaltic pump control PWB accepts the control signals from the
gasbox pwb and controls the stepper motor peristaltic pump assembly.
The Peristaltic pump control board consists of a single chip microprocessor
control unit (MCU) that interfaces the controlling signals from the instrument to
the motor drive system. The stepper motors are microstepped using a pulse
width modulation scheme. At slow pump rates the motor is microstepped with
64 microsteps per step. As the motor speed increases, the number of
microsteps is reduced. At a high pump rate, the drive is performing half-
stepping of the motor. The microstepping at lower pump rates results in
smoother running of the pump. The microcontroller also provides soft-start
(ramping) for the pump.
Power is provide to the board from the instrument unregulated power supply.
The voltage can vary from approximately 18V up to 40V, depending on the
load. Linear regulators reduce this voltage to more useable levels (12V and
5V) suitable for use on the PWB. LED’s and associated test points are
provided for convenient monitoring of the voltage rails.

Publication date: 2/7/2007


10-15
Varian 700-ES series spectrometer

The MCU is a single chip device containing 16k bytes of flash, 1k bytes of
RAM, and 512 bytes of EEPROM. It also contains three timer/counters, six
Pulse Width Modulation (PWM) channels, an eight channel 10bit analogue to
digital converter (ADC), universal synchronous/asynchronous receiver
transmitter (USART), and watchdog circuitry.
The MCU executes a firmware program that controls the operation of the
circuit board. This firmware is installed when the circuit board is produced and
resides in the Flash memory. Programming is accomplished through the In
Service Programming (ISP) connector P6. This is performed when the PCBs
are manufactured.
The clock frequency for the device is determined by a ceramic resonator (Y1).
Its frequency should be 10MHz ± 30kHz.
U8 provides a voltage reference (2.5 V) to the internal ADC to enable accurate
voltage measurements to be made.
A reset switch is provided to reset the device and – with the jumpers – provides
access to the various diagnostic modes for the device.
The digital, analogue and serial links provide a means to control the pump rate,
depending on the instrument that is controlling the pump.
i) The Motor Speed is controlled by an external frequency input. Digital
pulses on P7 pin 4 can control the rate of the pump.
A rate of 333Hz gives a pump speed of 50rpm.
A rate of 67Hz gives a pump speed of 10rpm.
Other pulse rates result in proportionally adjusted pump speeds.
A Pump Enable signal (Pin 9) must be low for the pump to turn.
2
ii) A serial command on the Inter-IC buss (I C) can set the pump speed to
the desired level.
LEDs are provided for diagnostic purposes:
The jumpers share the IO pins with the LEDs. The jumpers are scanned in
turn and the line PB3 monitored to detect the presence of a jumper.
The motor windings are powered from the unregulated supply which is
monitored by the firmware. The firmware keeps the motor current roughly
constant by adjusting the PWM parameters as needed.
Diagnostics are provided by 3 LEDs (red, yellow, green) which are under
firmware control. The diagnostic error codes consist of 2 digit numbers which
are flashed as international Morse code sequences on the Red LED. See
“Error Codes” later in this section.

Publication date: 7/02/2007


10-16
Varian 700-ES series spectrometer

10.9.1 Water Flow


Water flow sensing is provided by a vane-type sensor attached to the water
manifold. Pulses are produced by the sensor in response to the flow rate
through the device. If the flow rate pulses arrive at TP10 at less than 19ms
intervals (corresponding to 0.8 litres per minute) the output of U10 will pulse
high, charging capacitor C2. A high value on C2 results in the output of U2C
going low, that will indicate low water flow to the RF Control PWB and Power
PWB. This signal is also fed into the MCU to enable monitoring the status of
the water flow, via LED.

10.9.2 Startup Sequence


The start up sequence includes diagnostics and hardware detection. The
sequence is as follows:
• Initialises the I/O ports with appropriate Data Direction, pullups, state.
• Initialises the serial port for 1 start, 8 data, 1 stop bits, no parity, and
38,400bps.
• Tests that the MCU outputs which are used to drive the half-bridges
can be controlled by the firmware and are not stuck in a high or low state.
• Reads the initial state of the diagnostic jumpers and checks if a factory
test harness is connected.
• If all 3 diagnostic jumpers are present and if the test harness is
connected, then the factory test sequence is run.
• The state of jumpers are sensed at this time which sets the major and
minor diagnostic modes.
See “Diagnostic Modes”.
• Detect which motor is present (3 channel or 4 channel).
See “Motor Detect”.

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10-17
Varian 700-ES series spectrometer

• Initialise the appropriate timers in the MCU for PWM.


• Commence indicating the Firmware Version
2 digits of Morse code on the Red LED.
See “Error Codes”.
The firmware now enters the main loop and will respond as required by the
diagnostic modes and the external frequency input.
• During normal operation (major diagnostic mode = 0), the LEDs are used
by the firmware to indicate a number of conditions.
See “Operating Indicators”.

10.9.3 Diagnostic Modes


There is a major and a minor diagnostic mode. The major diagnostic mode is
sensed from the jumper settings immediately after hard reset (or power up)
and locked in until the next reset (or power down).
During diagnostics, the LEDs may be used differently from normal operation as
described below.

Diagnostic Mode Functions

Mo
Major Mode Minor Mode Description
de

Jumper 2 Jumper 1 Jumper 2 Jumper 1


open open open open 00 Normal Operation. Normal Indications.
Normal Operation.
open open open inserted 01 Supply Voltage (3 digits) shown on red
LED.
Normal Operation.
open open inserted open 02 Control Frequency (up to 3 digits) shown
on red LED.
open open inserted inserted 03 Normal Operation. Normal Indications.

open inserted x x 1X not implemented, don’t use

inserted open open open 20 Motor Drivers off, PWM operating


inserted open open inserted 21 60sec @ 15 RPM, 40sec @ 50RPM
inserted open inserted open 22 40sec @ 15 RPM, 60sec @ 50RPM
inserted open inserted inserted 23 4sec @ 15 RPM, 6sec @ 50RPM

inserted inserted open open 30 Motor Speed = 15rpm


inserted inserted open inserted 31 Motor Speed = 50rpm
inserted inserted inserted open 32 Motor Speed = 5rpm
inserted inserted inserted inserted 33 Motor Drivers off, PWM operating

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10-18
Varian 700-ES series spectrometer

10.9.4 Motor Detect


Motor detection is performed after the firmware has determined that it is not
connected to the factory test harness.
The detection drives the phases of the stepping motor in parallel with 12 cycles
of a 640Hz square wave. This produces a short audible “beep” in the motor
which is expected behaviour. During the last cycle, the voltage across the
sense resistors is measured.
The firmware then checks for several error conditions:
1. Short circuits.
2. Open circuits (no motor connected).
3. Phase imbalance (current difference exceeds 50% of current average).

The first error detected will terminate the sequence and cause the firmware to
continuously flash the error code on the red LED.
If no fault was detected, then the firmware calculates the Winding inductance
and selects the appropriate drive parameters for the motor.

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10-19
Varian 700-ES series spectrometer

10.9.5 Operating Indicators


This is a description of Operating Indicators during normal operation
(not diagnostics, not factory test).
Red LED
After reset, the red LED flashes the Firmware Version once and then
remains off.
If the red LED keeps flashing an error has been detected and the
flashing represents a 2 digit error code which is cycled continuously.
Yellow LED
Intensity:
If the peristaltic pump motor is off and the µC's timer function works
properly, this LED is dimly illuminated. If the peristaltic pump motor is
energized and running, the LED is brightly lit.
Flicker:
If the LED shows a single flicker, approx once per second, then the
firmware has detected the small motor (3-channel pump). If the Led
shows a double flicker, approx once per second, then the firmware
has detected the large motor (4-channel pump). The single or double
flicker is present regardless of the intensity.
Green LED
This is the Water Flow Indicator. The actual flow detection and
reporting is done in hardware without any MCU involvement. The
MCU merely indicates the state of the Water Flow through the green
LED.
No water flow detected:
If the LED flashes briefly once every 2 seconds (approx) then no
water flow has been detected and the brief flash indicates that the
LED and µC function correctly.
Water flow detected:
If the LED flickers quickly and brightly then water flow has been
detected. In this state, the flicker indicates that the LED and MCU
function correctly. The flicker rate has no relationship to the rate of
water flow – the flicker rate is fixed in firmware.

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10-20
Varian 700-ES series spectrometer

10.9.6 Error Codes


Identifier Code Description
ERROR_PB2_STUCK_LOW 12 PUMP_EN stuck in logic low
ERROR_PB2_STUCK_HIGH 13 PUMP_EN stuck in logic high
ERROR_PD3_STUCK_LOW 14 phase-2 (cosine) stuck in logic low
ERROR_PD3_STUCK_HIGH 15 phase-2 (cosine) stuck in logic high
ERROR_PD5_STUCK_LOW 16 phase-1 (sine) stuck in logic low
ERROR_PD5_STUCK_HIGH 17 phase-1 (sine) stuck in logic high
ERROR_PD6_STUCK_LOW 18 phase-3 stuck in logic low
ERROR_PD6_STUCK_HIGH 19 phase-3 stuck in logic high
ERROR20_NO_MOTOR 20 no motor detected
ERROR21_PHASE1_OPEN_CIRCUIT 21 no current in winding 1 detected
ERROR22_PHASE2_OPEN_CIRCUIT 22 no current in winding 2 detected
ERROR23_PHASE3_OPEN_CIRCUIT 23 no current in winding 3 detected
ERROR25_PHASE_IMBALANCE 25 current difference exceeds 50% of current
average
ERROR26_PHASE1_SHORT_CIRCUIT 26 excessive current in winding 1 detected
ERROR27_PHASE2_SHORT_CIRCUIT 27 excessive current in winding 2 detected
ERROR28_PHASE3_SHORT_CIRCUIT 28 excessive current in winding 3 detected

Morse Code
The Firmware Version, error codes and some other numeric indications are
given in international Morse code. This minimises the number of flashes that
need to be counted, allows for multi digit indications and is quite easy to learn.
Morse code digits always consist of 5 flashes per digit. There are short and
long flashes, the pause between flashes within a digit are the same as the
duration of a short flash. The pause between digits is longer.
Hint: It is only necessary to either count the short or the long flashes and to
remember if the short flashes were before or after the long ones.

Morse Code Digit


• 1
• • 2
• • • 3
• • • • 4
• • • • • 5
• • • • 6
• • • 7
• • 8
• 9
0

Example: Error Code “17” would be indicated in Morse code like this:
•     ‡‡‡

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10-21
Varian 700-ES series spectrometer

•     ‡‡‡

1 7

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10-22
Varian 700-ES series spectrometer

10.10 Important information


It is essential that the methods described in this section are used when
servicing the gas control unit. All of the following points should be read and
understood.

The spark generator produces high voltage.


Warning
Always disconnect the mains power supply to the spark generator
assembly before dismantling it. If you do not, you may be exposed to
electric shock hazard.

Caution Never attempt to clear a blocked orifice jewel by probing. These


are precision-bored components, which should be cleared only by flushing
with pressurized gas.

Instrument grade gases are the only gases that should be used with the Varian
700-ES series spectrometers.

Note Always check that all tubing connections from the torch assembly to the
sample compartment wall are correctly seated. Any air leaks in the argon gas
lines may prevent plasma ignition or may produce imprecise analytical results.

10.11 Specifications

General
Recommended input pressure 650 kPa
Maximum input pressure 700 kPa
Low pressure interlock 345 ±5 kPa
Input manifold pressure 220 ±5 kPa
Maximum argon flow 66.8 l/min

Plasma gas
Plasma flow range 0 to 22.5 l/min
Plasma flow (±15%) SV1 1.5 l/min
SV2 3 l/min
SV3 6 l/min
SV4 12 l/min

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10-23
Varian 700-ES series spectrometer

Auxiliary gas
Auxiliary flow range 0 to 2.25 l/min
Ignition 26 l/min boost
Auxiliary flow (±15%) SV5 0.75 l/min
SV6 1.5 l/min
Auxiliary boost flow SV11 26 l/min

Nebulizer gas
Regulator pressure range 0 to 400 kPa
Mass flow controller range 0 to 1.3 l/min
Accuracy ±15%

Purge
Polychromator purge range 0.75 or 3.75 l/min
Unswitched polychromator purge (±15%) 0.75 l/min
Polychromator boost purge (±15%) SV8 3 l/min
Snout or cone purge (±15%) SV7 3 l/min
Note The Polychromator purge flow rates listed above are for argon gas.
These flow rates will be different if nitrogen gas is used when the nitrogen
purge option is fitted to the instrument.

Peristaltic pump
Number of rollers 12
Effective rotor diameter 69 mm
Maximum speed 50 rpm
Drive type stepper motor

Igniter assembly
Voltage 15 kV (approximately)
Spark frequency 3/sec
Spark duration 80 µsec
Spark energy 50 mJ

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10-24
Varian 700-ES series spectrometer

10.12 Removal and replacement procedures


This section provides removal and replacement procedures for parts and
assemblies in the gas control unit. Replacement procedures are the reverse
unless otherwise stated.
Note All sealing threads must be sealed with Loctite 270
You may need to calibrate the gas control unit after removing and replacing
some of these assemblies. Any required calibration is highlighted in the
remove and replace procedure.
Access to the gas control unit is from the right side rear of the instrument
behind the panel holding the polychromator purge filter.

Caution The gas control unit supplies an uninterrupted gas purge to the
camera (Varian 720/730-ES series only) and polychromator
assemblies. These purge flows are required to prevent moisture
from accumulating on the surface of the camera assembly. It is
strongly recommended that gas supplies are left on at all times
except during long periods of non-use or during service activities.
Always turn-off the camera peltier before turning off the
instrument gas supply or when performing service on the
instrument gas control assembly
Always ensure PC instrument software indicates the peltier is off
before turning off the instrument gas supply

Gas control pwb assembly


The gas control pwb assembly is on the upper left-hand side of the instrument
on the instrument power pwb service bracket
Turn off the instrument and disconnect the mains power cable
Remove the left-hand instrument cover
Remove the connections and pwb from the instrument
Replace all items in reverse order

Gas control manifold assembly


Turn off argon gas supply at source
Turn off nitrogen gas supply at source (if required)
Remove the retaining screws from the gas control access panel at the rear of
the instrument and swing out the panel.
Disconnect and remove the supply hoses to the input gas manifold
Disconnect and remove the purge hoses to the purge filter assembly at the gas
supply manifold
Disconnect the auxiliary and igniter tubing from the gas supply manifold
assembly
Disconnect the tubing between the nebulizer option and the nebulizer supply
solenoid (SV10)

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10-25
Varian 700-ES series spectrometer

Disconnect the loom connectors from the gasbox interconnect pwb at 20 PL 6,


20 PL 4 and from the gasbox control pwb labeled 19 SK 7
Remove the mounting screws from the base of the gas control assembly
Remove the assembly

Gasbox interconnect pwb assembly


Turn off the instrument and disconnect mains power cable
Remove the retaining screws from the gas control access panel at the rear of
the instrument and swing out the panel.
Remove the gasbox interconnect pwb from the pwb clips.
Replace the pwb and then re-assemble in reverse order.

Peristaltic pump motor assembly


Turn off the instrument and disconnect the mains power cable
The peristaltic pump motor assembly is on the front panel of the gas control
unit.
To gain access to the peristaltic pump motor assembly, remove the lower right
hand side panel from the instrument and remove the cage that contains the
386 control pwb.
Remove the peristaltic pump assembly by removing the six screws located on
the front of the assembly.
Pull the peristaltic pump assembly forward out of the instrument slightly.
Remove the connection from the peristaltic pump control pwb to the motor
Remove the peristaltic pump rotor assembly using a flat blade screw driver
Remove the four motor mounting screws and lift motor from the bracket.
Re-assemble in reverse order.

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10-26
Varian 700-ES series spectrometer

Nebulizer pressure regulator


The nebulizer pressure regulator is behind the front panel of the gas control
unit
To gain access to the nebulizer pressure regulator, remove the lower right
hand side panel from the instrument and remove the cage that contains the
386 control pwb.
Remove the six 7 mm nuts and washers holding the front panel
Completely unscrew the regulator knob and remove it
Disconnect the tubing from the nebulizer pressure regulator
Unscrew the 7 mm nuts holding the pressure regulator bracket to the front
panel
Remove the two screws from the bracket to remove the regulator.
Re-assemble in reverse order.

Nebulizer pressure gauge


The nebulizer pressure gauge is on the front panel
To gain access to the nebulizer gauge regulator, remove the lower right hand
side panel from the instrument and remove the cage that contains the 386
control pwb.
Remove the six mounting nuts and washers holding the front panel
Disconnect the tubing from the nebulizer pressure gauge and remove the T
piece connector
Unscrew the two mounting nuts holding the gauge bracket to the front panel.

Nebulizer mass flow controller


The nebulizer mass flow controller is located on a removable bracket on the
base of the instrument behind the front panel
To gain access to the mass flow controller, remove the lower right hand side
panel from the instrument and remove the cage that contains the 386 control
pwb.
Disconnect the tubing from the mass flow controller
Unscrew the two screws holding the bracket to the base
Re-assemble in reverse order.

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10-27
Varian 700-ES series spectrometer

Inlet frit filters


Remove the inlet fitting at the argon inlet manifold. The filter is a press fit into
the fitting and is not removable. You must replace the entire fitting / filter
assembly and replace the Loctite 270 seal
Turn off the argon supply to the instrument
Turn-off the nitrogen supply to the instrument
Remove the retaining screws from the gas control access panel at the rear of
the instrument and swing out the panel.
Remove the argon and nitrogen (if connected) supply hoses from the inlet
supply manifold

Caution Ensure that no particles of Loctite thread sealant are left in


the threads which could migrate into and block downstream orifices.

Remove the inlet fitting/filter assembly from the inlet supply manifold and clean
off any remaining Loctite left behind
Replace the fitting/filter using Loctite 270

Polychromator purge filter

Caution The gas control unit supplies an uninterrupted gas purge to the camera
(Varian 720/730-ES series only) and polychromator assemblies. These
purge flows are required to prevent moisture from accumulating on the
surface of the camera assembly. It is strongly recommended that gas
supplies are left on at all times except during long periods of non-use or
during service activities.
Always turn-off the camera peltier before turning off the instrument gas
supply or when performing service on the instrument gas control assembly
Always ensure PC instrument software indicates the peltier is off prior to
turning off the instrument gas supply

The external molecular sieve argon filter has a nominal service life of 1200-
1500 hours. It should be replaced as indicated by the use of the instrument
Note The charcoal filter is directional and should be mounted with the arrow on the
label pointing up.
Turn off the argon (or nitrogen) supply to the instrument
Remove the filter assembly at the connections
Fit the replacement filter
Enter the service and extended diagnostics passwords
Reset the timer for the poly purge filter on the Instrument/Details page
Under the maintenance dates fields modify as required

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10-28
Varian 700-ES series spectrometer

Camera purge filters (Varian 720/730-ES series only)

Caution For the Varian 720/730-ES series instruments the gas control unit
supplies an uninterrupted gas purge to the camera and
polychromator assemblies. These purge flows are required to
prevent moisture from accumulating on the surface of the camera
assembly. It is strongly recommended that gas supplies are left on
at all times except during long periods of non-use or during service
activities.
Always turn-off the camera peltier before turning off the
instrument gas supply or when performing service on the
instrument gas control assembly
Always ensure the instrument operating software indicates the
peltier is off prior to turning off the instrument gas supply

The detector purge must be instrument-grade argon that is free of moisture,


particulate matter and other contaminants. The presence of moisture or
particulate matter in the purge may result in condensation or surface damage
to the camera assembly. For the Varian 720/730-ES series, the camera purge
flows through a three-stage filter process to protect the detector from possible
damage occurring.
The first is a Drierite filter that is blue in color. The filter is designed to remove
any moisture in the argon camera purge gas. The Drierite material will turn
pink in color when replacement is required. If 25% of the filter has turned pink
then all three of the filters in the system should be replaced.
The second stage of the detector purge filtering process is a molecular sieve
filter that removes any hydrocarbons in the argon purge gas. This filter should
be replaced after 1200-1500 hours of use.
The third stage of the filtering process is a particulate filter that will filter out
particulate matter in the gas system. You should replace this filter every 12
months.
After replacing any or all of the filtering system, the installation tests must be
run to verify that the camera has not been damaged.

Turn off the argon supply to the instrument


Open the gas box assembly access door on the back of the instrument
Remove the filters at their connections
Fit the replacement filters
Note The molecular sieve filters are directional and should be mounted with the
arrow on the label pointing up
Enter the service and extended diagnostics passwords
Reset the timer for the detector purge filter
Reset the timer for the mono purge filter on the Instrument/Details page
Under the maintenance dates fields modify as required

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10-29
Varian 700-ES series spectrometer

Igniter assembly

The igniter assembly is located under the pre-optics assembly.

Warning The igniter assembly generates 15 kV sparks. Contact with


these sparks could cause death or electric shock. Always
disconnect the mains supply to the igniter or to the instrument
before working on the igniter assembly.

Turn off the instrument and disconnect the mains power cable
Remove the instrument top right hand covers
Open the torch compartment door and disconnect the plasma gas supply to
the torch.
Open the quick release clips and remove the tubing from the igniter assembly
Disconnect 20 PL 6 from gasbox interconnect pwb
Unscrew the six screws that retain the igniter assembly
Replace the assembly in reverse order

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10-30
Varian 700-ES series spectrometer

10.13 Measurements and calibrations


Argon inlet pressure switch
The argon inlet pressure switch should operate at 345 ± 5 kPa. The adjustment
of this device consists of an adjustment at a pressure of 345 kPa with a typical
gas flow. The switch is then checked under conditions of falling supply
pressure to ensure that the hysteresis is within the quoted specification.
In the case where the original switch adjustment does not produce the result
specified, the switch should be re-adjusted to ensure the pressure switch
opens under a falling and rising pressure between 340 to 450 kPa.
Set the argon supply pressure to 550 kPa (80 psi)
Go to the gasbox diagnostics page
Set the plasma gas flow to 12 l/min
Reduce the argon supply pressure to 345 kPa (50 psi)
Adjust the inlet pressure sensor switch until an error is generated at the PC
Set the argon supply pressure to 450 kPa (65 psi)
Note The switch should open at approximately 410 kPa (59 psi).
Reduce the argon supply slowly and ensure the that an error is generated at
the PC at a pressure of 345 ± 5 kPa (50 ± 1 psi)
Re-adjust the switch to suit (if required)
Check that the gas control unit pressure interlock is functioning.
Set the supply pressure to 340 kPa and try to ignite a plasma.
This attempt to turn on the gas control unit should cause error message
“Low argon flow” to be displayed on the PC screen.

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10-31
Varian 700-ES series spectrometer

Manifold regulator
Connect the 0–250 kPa gauge to the outlet of the 0–40 l/min rotameter of the
gas calibration kit.

Figure 14. Manifold regulator adjustment

Connect the 0–40 l/min rotameter to the auxiliary gas outlet in the upper right
corner of the sample compartment.
Apply an auxiliary boost gas flow from the gasbox diagnostic page.
Adjust the manifold regulator to 220 ± 5 kPa.
Turn-off the auxiliary boost gas flow and remove the pressure gauge.
Turn-on the auxiliary boost gas flow and check the flow is correct.
The Auxiliary boost gas flow should be 26 l/min ± 15% (22 to 30 l/min).

Manifold gas flows


Connect the 0–40 l/min rotameter to the plasma outlet in the upper right corner
of the torch compartment, (see figure 3).
Check that each increment of the plasma flow (1.5, 3, 6 and 12 l/min) is within
the tolerances specified in this section
Connect the 0–40 l/min rotameter to the auxiliary outlet in the upper right
corner of the sample compartment
Check that the auxiliary boost gas flow 26 l/min is within the tolerance specified
in this section
Connect the auxiliary output to the 0-4 l/min rotameter
Check the remain auxiliary flows (0.75 and 1.5 l/min) are within the tolerance
specified in this section
Remove the upper right hand cover from the instrument

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Varian 700-ES series spectrometer

Remove the snout / cone purge line from the Swagelok fitting mounted on the
viewing aperture
Connect the 0-4 l/min rotameter to the cone / snout purge line
Check that the cone / snout purge flows are within the tolerance of this section.
Return the instrument to operating conditions.

Note Any combination of gas flows should be within ±15% of the desired flow.

Figure 15 Manifold gas flow measurement

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10-33
Varian 700-ES series spectrometer

Nitrogen purge regulator (if fitted)

Caution The gas control unit supplies an uninterrupted gas purge to the
camera (Varian 720/730-ES series only) and polychromator
assemblies. These purge flows are required to prevent moisture
from accumulating on the surface of the camera assembly. It is
strongly recommended that gas supplies are left on at all times
except during long periods of non-use or during service activities.
Always turn-off the camera peltier before turning off the
instrument gas supply or when performing service on the
instrument gas control assembly
Always ensure the instrument software indicates the peltier is off
before turning off the instrument gas supply

Turn off the polychromator gas purge supply to the instrument


Connect the 0–250 kPa gauge to the outlet of the 0–4 l/min rotameter of the
gas calibration kit, part number 99 100587 00.

Note In cases where the polychromator purge is configured for nitrogen gas, a
compatibility factor of 1.44 must be used to determine the actual gas flow rate.
To calculate the correct flow of nitrogen gas through the ICP calibration
rotameters, measure the nitrogen flow rate as normal and multiply the flow rate
as measured by 1.44.

Figure 16. Polychromator purge regulator adjustment


Connect the 0–4 l/min rotameter input to the polychromator purge filter output
in the gas filter compartment.
Turn on the polychromator gas supply
Adjust the polychromator purge regulator to 220 ± 5 kPa.
Turn off the polychromator gas supply to the instrument
Remove the pressure gauge
Check the polychromator gas flows

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Varian 700-ES series spectrometer

Polychromator purge flows


Turn off the polychromator gas purge supply to the instrument

Figure 17. Polychromator purge regulator adjustment


Connect the 0–4 l/min rotameter input to the polychromator purge filter output
in the gas filter compartment.
Turn on the polychromator gas supply
Check the polychromator gas flows (0.75 unswitched and 3.75 l/min with SV 8
turned on).
All gas flows should be within ±15% of the desired flow.

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Varian 700-ES series spectrometer

Camera purge gas flows (Varian 720/730-ES series only)

Caution The gas control unit in the Varian 720/730-ES series instruments
supply an uninterrupted gas purge to the camera and
polychromator assemblies. These purge flows are required to
prevent moisture from accumulating on the surface of the
instrument camera assembly. It is strongly recommended that gas
supplies are left on at all times except during long periods of non-
use or during service activities.
Always turn-off the camera peltier before turning off the
instrument gas supply or when performing service on the
instrument gas control assembly
Always ensure the operating software indicates that the peltier is
off prior to turning off the instrument gas supply

Ensure the camera peltier is off


Disconnect the output of the camera purge at the gas control manifold.
The camera purge comes out from the manifold position labeled “B”
Install suitable tubing that will reach from the output nipple of the camera purge
gas to a bath of water
Obtain a 100 ml graduated measuring cylinder and submerge it in a bath of
water
Pinch off the tubing fitted to camera purge output of the gas manifold
Invert the measuring cylinder in the water bath so that it is completely full of
water
Insert the tubing into the inverted measuring cylinder
Release the pinched off tubing and ensure the purge gas displaces 50 ml / min
of water from the measuring cylinder
Return the instrument to operating conditions.

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10-36
Plasma generation
Introduction
This section provides information on the plasma generating system
including

• System description
• Theory of operation
• Important Information
• Specifications
• Removal and replacement procedures
• Measurement and calibration procedures

This information is applicable to all Varian ICP-OES spectrometer


systems.

System description
The Varian ICP-OES spectrometer RF system is capable of delivering a
maximum of 2.0 kW of power from a 40 MHz free-running oscillator.
The plasma generating system consists of two major functional areas.
• RF power oscillator
• Microprocessor control system

RF power oscillator

The RF power oscillator uses a single stage air-cooled triode electron


tube which can generate up to 2.0 kW of RF power by selection through
the Varian ICP-OES spectrometer diagnostics software interface.
Maximum RF power selectable through the Varian ICP-OES
spectrometer user software interface is 1.7kW for Axial and 1.5kW for
Radial instruments.

The RF power developed at the output of the triode passes into an


induction coil which completes the main oscillator tuned circuit. The high
energy alternating RF fields produced by the RF current in the induction
coil generates and maintains the plasma.

The triode driven oscillator is supplied with a high current low voltage AC
filament supply and a high voltage DC anode supply.
Note The filament heater supply for the RF oscillator is generated externally
to the plasma generating system. Information relating to the operation of
this supply can be found in section 14 of this manual.
Varian ICP-OES spectrometer

Figure 1. Plasma generating system block diagram

Microprocessor control system


The plasma generating system is controlled by the microprocessor
controlled RF interface pwb. The microprocessor-based interface is
controlled by PC software. The software interface is linked to it by an
IEEE-488 parallel to RS-422 serial link.
The plasma generating system contains a circuit that samples the RF
output. This circuit monitors the RF current in the induction coil and
converts the current into a proportional voltage. The proportional voltage
is compared to a target voltage that represents the desired RF power
setting. The error voltage produced by this comparison is fed through
the Automatic Level Control (ALC) circuit to adjust the high voltage DC
supply level at the anode of the RF power oscillator. This changes the
RF power output of the oscillator and stabilizes the RF power delivered
to the induction coil.
The triode oscillator tube is air cooled by a dual centrifugal fan blower.
A circulating water cooling system is attached to the Varian ICP-OES
spectrometer. The cooling water dissipates the heat generated by the
induction coil and the cooled cone interface on axial viewed models.

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Varian ICP-OES spectrometer

Theory of operation
The radial and axial plasma generation systems are free-running
oscillators that operate at a frequency of about 40 MHz delivering up to
1.8 kW of radio frequency energy into a plasma.
This section includes information on both radial and axial designs. All
variations in operation or construction are highlighted.

Figure 2 Plasma generation circuit diagram

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Varian ICP-OES spectrometer

RF power oscillator assembly


The RF power oscillator assembly is enclosed in a shielded box and
mounted in the top left hand part of the instrument.
The RF oscillator has five isolated mechanical compartments which
house various chassis-mounted components:
• Grid compartment
• Anode compartment
• Filter compartment assembly
• Torch compartment
• Current sense compartment
The filament supply enters the RF power oscillator assembly through
four low pass filters mounted on the outer wall of the filter compartment.
The input voltage is further filtered by inductors L6, L7 and capacitors
C1, C9, C10, C16, C17, and C18. The supply passes into the grid
compartment and is terminated at pins 1 and 5 on the triode tube socket.
The filament draws about 22A at 6.3 VAC +/- 5% from the filament
transformer.
The high voltage anode supply passes into the RF power oscillator
assembly through the filter compartment. Capacitors C13, C14, and C15
with RF chokes RFC4 and RFC5 form an RF by-pass network that
prevents RF leakage from the oscillator assembly into the high voltage
DC supply. Ferrite beads positioned on the HVDC input line to the power
oscillator and the by-pass network components provide additional RF
suppression. The anode DC supply passes into the anode compartment
through RFC1 and tank coil L1.

Power oscillator
The power oscillator uses a 3CX1500D3 triode in a tuned
anode/untuned grid class C oscillator. The anode tuned circuit consists
of tank coil L1 in series with the parallel combination of the matching
inductor L3 and the work coil. The anode circuit is resonated at
approximately 40 MHz by the internal capacitances of the triode and the
stray capacitances of the anode enclosure.
The anode circuit is inductively coupled to the grid inductor L2 to provide
positive feedback which initiates and sustains oscillation.
The high voltage direct current is applied to the anode of the triode. As
the triode begins to conduct, the tank circuit formed by L1 and the
capacitance of the triode begins to oscillate. The current through L1
generates a magnetic field which is coupled to grid coil L2. The voltage
across L2 is then applied to the grid circuit in the appropriate phase to
sustain oscillation.
As the anode voltage swings to its minimum level around 350 volts, the
grid of the triode is driven positive and causes grid current to flow. Grid
current establishes a large negative bias voltage across the grid return
resistors R1 and R4. The grid voltage waveform shifts negative and
causes anode current to flow for only one-third of the oscillation cycle
(class C operation) - see figure 3

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Varian ICP-OES spectrometer

Capacitors C3 and C4 provide a return path for the RF current in the


grid inductor L2. RF Choke RFC2 and capacitors C5 and C19 form a
filter that reduces the level of RF voltage across resistor R4. R4
connects to a filter network of C11, RFC3 and C12. The filter network
connects to R2 and resistor R3 which is in parallel with diode D1 . Diode
D1 is reversed bias forcing current across resistor R3 which produces a
voltage that is monitored by circuitry on the RF Interface pwb.

Figure 3. Triode current timing chart

RF Current transformer
The RF current in the induction coil is monitored by a 40:1 current
transformer located between the return lead of the induction coil and
ground. The secondary winding of the transformer is made from a ferrite
toroid with a 40 turn winding. The secondary winding is installed on an
insulated pillar of the water-cooled housing which forms a single primary
winding. The secondary winding is terminated in a 4.125 Ω load
comprising R1-R8 in a series-parallel configuration.
The RF voltage across the load resistor formed by the current sensor
transformer’s secondary winding and R1 - R8 is doubled in amplitude by
transformer T1 on the current sensor pwb. T1 also isolates the signal
return to the RF interface pwb from the chassis ground on the RF
oscillator. Diode D1 with R10 and C2 generate a DC voltage
proportional to the RF current of the work coil. Diode D2 is connected in
series with the power level stepping voltage from the RF interface pwb
to provide temperature compensation of the forward voltage drop of
diode D1.
Note Diodes D1 and D2 are a matched pair of Schottky diodes and must
always be replaced as a pair.
L1, L2, C3 and C4 are filter components that remove RF energy from
the compensating diode output lines.

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Varian ICP-OES spectrometer

Figure 4 RF oscillator schematic

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Varian ICP-OES spectrometer

RF interface pwb
The RF interface pwb controls and monitors the plasma generating
system. These functions include:
• RF power level control (ALC)
• Cooling fan monitoring
• Cooling water flow
• Plasma ON
• Safety interlocks
• High voltage supply status
• Filament supply status
• Power oscillator grid current
• Microprocessor circuits
The RF interface pwb is controlled by IC5, an 80C32 microprocessor
operating at a clock frequency of 12 MHz. The 80C32 has four 8 bit
parallel I/O ports:
Port 0 (pins 32-39) Low address/data byte
Port 1 (pins 1-8) Status monitoring ALC high/low gain, RF watchdog
output, serial communications data direction control.
Port 2 (pins 21-28) High address byte.
Port 3 (pins 10-17) Serial communications, RF watchdog interrupt,
HVDC power fail interrupt, read/write lines.

Memory
Multiplexed data/address information is separated by IC6 (74HCT573)
which latches the low address byte on the falling edge of ‘ALE’.
The active low program store enable (PSEN) output of the
microprocessor selects the EPROM IC 7.
IC7, a 27C256 32 kB electronic programmable read only memory chip is
the main program store and is accessed when PSEN is low. IC8, an 8
kB 6264 static random access memory chip, is the dynamic data store
and is accessed when signals RD or WR are low and A15 is high.
IC9, an UPD71055 input/output controller device, is selected when A15,
RD and WR are all low.

Communications
Communications between the RF interface pwb and the 386EX Control
pwb is handled by IC3, a dedicated RS-422 bidirectional bus
transceiver. TX and RX data flow through this device is controlled by the
state of output port P1-6 of IC1, pin 7. When pin 7 is low, the
microprocessor is in transmit mode. The conversion from RS-422 serial
format data to parallel bus format data is performed internally in the
80C32 microprocessor through its dedicated RX and TX ports, pins 10
and 11.

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Varian ICP-OES spectrometer

Reset
The RF interface pwb can be reset by a system reset signal from the
386EX Control pwb. The falling edge at pin1 de-activates opto-isolator
IC1 and produces a high at pin 9 of the 80C32. Resetting the 80C32
also resets the UPD71055.

Interlock monitoring and status LEDs


Two I/O ports of IC9 are dedicated to status monitoring of the plasma
generating system interlocks. The 80C32 reads the state of these two
ports when address lines A0 and A1 are low.
RF interface pwb LED state indicators are:
D6 ON = Plasma running (yellow)
D7 ON = Water Flow OK (green)
D8 ON = Cooling Fan OK (green)
D9 ON = Filament Supply OK (green)
D13 ON = Plasma/HV interlock OK (green)
D14 ON = ALC fail (red)

Plasma/HV interlock
PA1 monitors the state of the high voltage compartment access cover
interlock, plasma compartment door interlock and the PLASMA OFF
emergency push button on the front panel. All conditions OK produces a
high at pin 3 of IC9. An open interlock switch or operation of the
PLASMA OFF button will inhibit plasma ignition.

Filament sense
The filament control circuit located on the instrument power pwb
produces the signal FIL SENSE which indicates that the filament power
supply is operating and applied to the RF power triode. This status
signal is used by the RF interface pwb at port PA-4, IC9 to guarantee
that the filament supply is operating before the high voltage anode
supply is applied to the triode. If the filament supply fails during plasma
ignition, the error message ‘No Filament Voltage’ or ‘Filament Voltage
Failure’ is displayed on the PC.

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Varian ICP-OES spectrometer

Water flow monitoring


Water flow monitoring is provided by a vane-type sensor attached to the
water manifold. Pulses are produced by the sensor in response to the
flow rate through the device. These pulses are fed to the Peristaltic
Pump Control PWB at pin 2 of P9. The Peristaltic Pump Control PWB
monitors the pulse rate which is proportional to flow rate.
19ms intervals = 0.8 litres/min
If the flow rate pulses are less than 19ms intervals at TP10, the output at
pin 4 of U10 will pulse high, charging capacitor C2. A high value on C2
results in the output at pin 6 of U2C going low, signalling low water flow
to the RF control PWB and Power PWB alerting the microprocessor of
the fault condition. This causes the error message ‘Low water flow’ to be
displayed on the PC. This fault condition will inhibit plasma ignition and
force a shut down if detected during plasma operation.
This signal is also fed into the Microprocessor U1 which provides a
Water Flow OK indication using LED D8 (green) on the Peristaltic Pump
Control PWB.

Cooling fan monitoring


Cooling fan operation is determined by an air pressure switch which is
connected to the RF power oscillator input air duct. Fan failure causes
the air pressure switch to open and alert the 80C32 of the condition by a
low logic level at port PA3 of IC9. This causes the error message
‘Insufficient air flow’ to be displayed on the PC. This fault condition will
inhibit plasma ignition.

Grid bias monitoring


Grid current is monitored on the RF interface pwb to determine the state
of the RF triode. When the anode voltage of the RF power oscillator
triode swings to its minimum level the grid voltage of the triode is driven
positive causing grid current to flow.
The grid current in the RF power oscillator produces a voltage drop that
is monitored at pin 10 of IC15. In normal operation this voltage is more
negative than -1.123 VDC forcing the output at IC15 pin 7 and port PA5,
pin 39 of IC9 both high.
In the case where the RF power oscillator does not oscillate, the grid
current fails to flow and the output of IC15 pin 7 will be low. This low at
port PA5 of IC9 causes the error message ‘F1285 RF failure’ to be
displayed on the PC. This fault condition will inhibit plasma ignition and
force a shut down if detected during plasma operation.

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Varian ICP-OES spectrometer

Plasma ignition logic


Figure 5 shows a simplified diagram of all the conditions needed for
plasma ignition.

Figure 5 Simplified interlock logic diagram

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Varian ICP-OES spectrometer

Plasma ON monitoring
An optical fibre in the torch compartment is positioned to look at the
plasma. When the plasma is on, the light sample from the fibre turns on
photo-transistor TR1 resulting in a higher voltage at pin 5 of comparator
IC14B than the 1 Vdc produced at pin 4 by the voltage drop across
resistors R18, R19 and R20. The higher voltage at pin 5 drives the
output at pin 2 of IC14B high.
If the plasma goes out, TR1 turns off, setting pin 5 lower than pin 4
which drives IC14B output low. This alerts the 80C32 of the condition
through port PA6 of IC9 and causes the error message ‘Plasma has
gone out’ to be displayed on the PC. If this fault condition is detected
while the plasma is on, the RF generator and the gas control unit are
shut down.

RF control watchdog
IC13B monitors the ability of the 80C32 on the RF interface pwb to
control the plasma generating system. If the 80C32 loses control of the
system, this circuit disables the high voltage supply and shuts down RF
power.
The retriggerable monostable IC13B has a time constant of 220 ms
(R11 and C7). A positive edge on the A input, (pin 1) toggles the Q
output from low to high for 220 ms.
When an HV ON command is sent from output port P1-5 of the 80C32
output port P1-7 generates a pulse train with a period of 65 ms. The
generation of the pulse train by the 80C32 is an indication that it is
operating correctly and has control of the circuit. The period of the pulse
train provides the A input to the IC13B monostable circuit with a positive
edge every 65 ms, causing the Q output to maintain a high state.
If the 80C32 software fails, the pulse train will not be generated. This will
allow the Q output of IC13B to toggle low and reset the 80C32 through
interrupt 0 (port P3.4).

High voltage power supply failure


An overload condition detected by the HVDC power supply will alert the
80C32 through port P1.1. This fault condition will inhibit ignition of the
plasma or, if a plasma is already running, will cause the 80C32 to shut
down RF power. If the power supply generates a logic high signal -
OLOAD IC12 pin 2 will go low and P1.1 will generate an HVDC power
supply fail.

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Varian ICP-OES spectrometer

Auto Level Control


RF output power level is selected by keying in the desired power in
kilowatts through the software interface. This causes a DC voltage
proportional to the requested power to be produced from a DAC circuit
on the RF interface pwb (IC17, IC18 and IC19). A calibration control
RV1 is provided to set the ALC reference voltage at pin 7 of IC19.
The output of the DAC circuit passes through the ALC reference diode
circuit on the RF current sensor pwb and then to pin 2 of error amplifier
IC19.
The sample voltage produced by the RF sampling circuit on the current
sensor pwb is summed with the reference voltage returning from thermal
compensation diode D2. The sum of the two voltages is applied to the
inverting side of error amplifier IC19 pin 2. The output is the amplified
voltage representing the difference between the keyboard power level
and the sampled power level.
The output at pin 1 of IC19 drives the HVDC power supply. A +10 VDC
output from the error amplifier sets the HVDC supply to its maximum
output of 7kV. To ensure that the maximum HVDC output is not
exceeded, the error amplifier output at IC19 pin 1 is compared with the
+10 volt reference voltage. IC19 pins 12, 13 and 14 is configured to
clamp the output at pin 14 to +10 volts by feeding current into pin 2 of
IC19 through TR5 and R55.
The ALC sample voltage and the keyboard generated DAC voltage are
also used to monitor the ability of the ALC circuit to control the RF power
level. This is done by comparator IC15 which monitors the output
voltage at pin 14 of the clamping amplifier IC19. In normal operation the
output at IC19 pin 14 is -12 to -15 volts. If the positive voltage from the
power oscillator current sensor circuit, through resistors R54 and R51 is
unable to match the negative voltage of the power set point through R49
and R50, the output of error amplifier IC19 pin 1 attempts to exceed +10
volts. The output of IC19 pin 14 swings positive forcing the output of
comparator IC15 low and alerting the 80C32 of the error at port PA-7 of
IC9. This fault condition causes the error message, ‘Power unattainable’
to be displayed on the PC.

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Varian ICP-OES spectrometer

Ignition
The Varian ICP-OES spectrometers use the PC software to control the
instrument hardware at the ignition of the plasma. The ignition software
routine is designed in four stages.
• Purge
• Delay
• Light
• Run

Purge
The Purge stage is used to remove unwanted air and moisture from the
gas supply lines and the sample introduction system. It also provides a
clean supply of argon through the torch. The default settings for the
purge stage are:
Plasma Auxiliary Boost Neb Power Time Pump
22.5 2.25 Off 0.9 0.00 15 0
lt/min lt/min lt/min kW sec rpm

Delay
The geometry of the torch provides gas flows that enhance the
generation of a plasma and allow for the introduction of samples into the
plasma once it has formed.
The flow of the sample and carrier gas at ignition through the center of
the torch changes the geometry of the argon gases that pass through
the work coil. The aerosol from the injector tube forces the auxiliary and
plasma gases from the center of the torch to the outer walls. The
resulting cylindrical shaped gas flow is difficult to use for plasma ignition.
By turning off the nebulizer both the auxiliary and plasma flows converge
in the center of the torch as it passes through the work coil. The Delay
stage allows the nebulizer to shut off. The default values for the delay
stage are as follows:
Plasma Auxiliary Boost Neb Power Time Pump
22.5 2.25 Off 0.0 0.00 10 0
lt/min lt/min lt/min kW sec rpm

Ignite
The Ignite stage is where the RF is enabled and the argon in the torch is
seeded with electrons from the igniter spark. Plasma and auxiliary flows
are reduced to a minimum and a 26 l/min auxiliary boost gas flow is
enabled. The auxiliary boost provides a source of argon through the
center of the work coil.
This stage also includes an 11 to 13 second warm-up of the High
Voltage DC power supply.
The High Voltage DC power supply has an internal hardware delay line
that disables the control voltage supplied to it from the RF interface pwb.
The voltage from the ALC circuitry provides level control for the output of
the power supply.

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Varian ICP-OES spectrometer

The boost gas flowing through the torch provides adequate positive
pressure to force the forming plasma away from the intermediate and
injector tubing of the torch.
The auxiliary boost solenoid is turned on prior to turning on the High
Voltage DC power supply. This allows the auxiliary boost to provide
positive pressure during the 11 to 13 seconds the High Voltage DC
power supply needs to warm-up.
The events of the ignite stage are
• Set auxiliary flow for the light stage
• Set plasma flow for the light stage
• Turn on the auxiliary boost solenoid
• Wait 11 to 13 seconds for the High Voltage DC power supply to
warm-up
• Start igniter and set RF power to 2 kW
• When plasma is detected as lit then begin the run stage
• The default settings for the ignite stage are:

Plasma Auxiliary Boost Neb Power Time Pump


1.5 1.5 On 0.0 2.00 5 50
lt/min lt/min lt/min kW sec rpm

The ignite stage will continue until it times out or the fiber optics driven
plasma sensor on the RF interface pwb detects a plasma.

Run
The run stage is used for the transition between plasma ignition and the
introduction of the sample and carrier gas from the sample introduction
system. The plasma must be stable before the nebulizer flow is turned
on.
Run stage is enabled by correct operation of the plasma sensor on the
RF interface pwb., which permits these actions -
• Set auxiliary flow for the run stage
• Set plasma flow for the run stage
• Turn off the auxiliary boost solenoid
• Delay for the run stage delay time
• Turn on the nebulizer solenoid
• Set the auxiliary flow to zero
• Delay for 2.5 seconds
• Set the auxiliary flow to the run stage value
The default settings for the run stage are:

Plasma Auxiliary Boost Neb Power Time Pump


15.0 1.5 Off 0.9 1.20 3 7
lt/min lt/min lt/min kW sec rpm

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Varian ICP-OES spectrometer

Auxiliary to off
During the run stage the auxiliary gas supply is temporarily set to zero in
order to eliminate any capillary plasma that may form during ignition.
The lack of the auxiliary argon flow starves any capillary plasma
(streamers) that may form.
The PC software sets the auxiliary flow to zero for 2.5 seconds.

Cooled cone interface (Axial only)


The cooled cone interface protects the pre-optics window and absorbs
the heat into the body of the cone and the cooling sleeve. Circulating
water through the cooling sleeve removes the heat.
The large horizontally-mounted coil above the pre-optics barrel is the
resonator coil. It is connected from the cooling sleeve to ground. Its
primary purpose is to form a circuit that resonates when coupled in
parallel with the capacitance formed by the cone, cooling water sleeve
and the polypropylene isolator. If the cone is resonant, arc-over effects
from the plasma to the cone are minimized.

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Varian ICP-OES spectrometer

Important information
It is essential that the methods described in this section are used when
you service this assembly. All of the following points should be read and
understood. Failure to do so may expose you or others to danger or
cause permanent damage to surrounding facilities or the instrument.

Warning The Varian ICP-OES spectrometer plasma generating systems


contain components and assemblies operating at high voltage,
high RF power levels and high temperatures. You must
always follow the instructions below to avoid death, shock or
burns.

Always disconnect the instrument mains from the laboratory mains


supply before working on the plasma generation system.
Always use the high voltage discharging wand provided with the
instrument to ensure that the RF supply is de-energized and all power
supply capacitors discharged before attempting any work inside the RF
amplifier assembly.
Always replace all covers correctly and secure all screws tightly to
ensure good RF shielding is maintained in the plasma generating
system.
Only properly equipped and trained Customer Service Representatives
may service the plasma generating system.
Always ensure that the RF finger stock around the torch compartment
door is in good condition. Replace damaged strips whenever necessary
to maintain effective RF shielding.

Caution You must always follow the instructions below to avoid


damage to the instrument or poor analytical performance:

Avoid unnecessary handling of the silver-plated components in the


oscillator box. Excessive contamination of these components can
change the operating characteristics of the oscillator.
Always exercise care when working in the RF power oscillator
assembly. Components which are accidentally bent or moved can alter
the operation of the RF oscillator. Any changes to the physical
construction of the oscillator may affect the assembly’s ability to
generate full power.
Always ensure that water-cooling hoses are positioned and secured
well away from hot or energized surfaces in the current sensor
compartment. The hose material can burn quickly by absorbed heat or
RF energy when in contact with these surfaces.
Never replace diodes D1 and D2 on the current sensor pwb individually.
They are a matched pair and must be replaced as a pair to ensure that
accurate RF power level settings are maintained.

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Varian ICP-OES spectrometer

Specifications
Power tube CPI EIMAC 3CX1500D3
Output 1800 W maximum
Frequency 40 MHz (+/- 200 kHz)
Anode voltage 6 kV max (operating)
7kV max (during ignition)
Anode current 460 mA max.
Grid current 50 mA (typical) at max power
Power stability Better than ± 0.04% per oC
Output matching Series tuned network
Induction coil 3 turns 1/8" OD gold plated over silver
platied copper tubing

Removal and replacement procedures


This section provides procedures for access to and removal of field
serviceable components and assemblies of the plasma generating
system. Replacement procedures are the reverse, unless otherwise
stated.
See section 1.5 ‘Access to major assemblies’ which provides information
for removal of outer covers and identification of the RF power oscillator
assembly.

Access to the RF power oscillator


There are two versions of the RF power oscillator assembly, one for
radial instruments and one for axial instruments. They are functionally
identical and differ only in the physical layout of the torch compartment
and the dimensional length of the matching coil.
The location of the components in the oscillator compartments can be
determined from the schematic diagram of the RF power oscillator in the
Schematics section of this manual.
Note The schematic diagram indicates the boundaries of each of the
compartments by a broken line.

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Varian ICP-OES spectrometer

Warning Components in the RF power oscillator assembly operate at


high voltages, high RF power levels and high temperature. To
avoid death, burns or shock, always switch off the instrument
and disconnect the power before removing panels.
Never override or disable the interlocks on the RF power
oscillator assembly.
Never operate the RF power oscillator assembly unless all
panels are in place and secured. Contact with components
within the RF power oscillator assembly box which operate at
dangerous RF power levels and temperatures can cause
death or serious injury.

Note Access to all RF compartments is through the top of the oscillator


assembly.

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Varian ICP-OES spectrometer

Turn off the instrument and disconnect the mains cable from the
instrument.
See section 1.5 Access to major assemblies which provides information
for the removal of outer covers and identification of the RF power
oscillator assembly.
Remove all Pozidriv screws which hold the outer top panel to the
amplifier assembly. Remove the top panel.
Remove all Pozidriv head screws securing the inner top cover of the
assembly and lift the cover clear.
Use the high-voltage discharging wand to discharge all the exposed
components in the oscillator before working on the assembly.

Warning Contact with components within the RF power oscillator


assembly box which operate at dangerous RF power levels
and temperatures, can cause death or serious injury. Before
removing any panels, always switch off the instrument and
disconnect it from the mains supply.

Access to the torch compartment


Access to the torch compartment is through the top covers or the front
door of the amplifier assembly.

Access to the grid compartment


See section 1.5 Access to major assemblies which provides information
for the removal of outer covers and identification of the RF power
oscillator assembly.
Remove the top RF power oscillator covers in accordance with section
11.6.1.

Warning Contact with components within the RF power oscillator


assembly box which operate at dangerous RF power levels
and temperatures, can cause death or serious injury. Before
removing any panel, always switch off the instrument and
disconnect it from the mains supply.

Remove the M4 screws holding the access cover in place on the filter
assembly.
Unsolder the bottom two connections (coated copper wire and white
insulated wire) that pass from the filter compartment into the grid
compartment.
Remove the two M4 screws located in front of the filter compartment that
pass through the outer box and into the top cover of the grid
compartment.
Loosen the worm clamp around the anode of the RF triode and carefully
remove the triode.

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Varian ICP-OES spectrometer

Remove the worm clamp from the bracket at the top of the tank coil L1.
Remove the PTFE cooling-air transfer sleeve from the top of the triode
socket.
Remove the M6 nut and washer from the top of the PTFE stand off and
triode anode/L2 bracket.
Remove the three M4 screws from capacitors C6, C7, C8 and L1.
Remove L1 from the assembly.
Remove the two M4 screws from the top of the grid compartment panel
and remove the grid compartment.

Access to filter compartment


See section 1.5 Access to major assemblies which provides information
for the removal of outer covers and identification of the RF power
oscillator assembly.
Loosen the worm clamp retaining the exhaust cooling air transfer duct
above the filter compartment. The clamp is located on the circular
retaining clamp on the bottom of the inner RF oscillator top cover.

Warning Contact with components within the RF power oscillator


assembly box which operate at dangerous RF power levels
and temperatures, can cause death or serious injury. Before
removing any panel, always switch off the instrument and
disconnect it from the mains supply.

Remove the alodined exhaust transfer duct and rubber moulding from
the instrument by lowering the duct through the instrument top tray.
Remove the twenty two M4 screws from the front cover of the filter
compartment.
Use the high-voltage discharging wand to discharge all the exposed
components in the filter compartment before working on the assembly.

Removal of the RF power oscillator assembly


Turn off the instrument and water cooler. Disconnect the mains cable
from the instrument.
Remove the pre-optics assembly as described in section 12 and store it
in a safe place.
Disconnect the optic fibre at the RF interface pwb.
Disconnect plugs SK3, SK5, SK6 from the RF interface pwb.
Disconnect plugs at 1TR2 for the filament.
Remove the four M4 screws and the High Voltage DC power supply
access panel on the back of the instrument.
Disconnect the supply water cooling hose from the water flow sensing
switch manifold to the RF power oscillator at the manifold.
Disconnect the return water cooling hose at the water cooler.
Remove the torch and bonnet from the torch compartment, (if required).

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Varian ICP-OES spectrometer

Remove the igniter assembly from the end panel of the RF oscillator.

Warning Contact with components within the RF power oscillator


assembly which operate at dangerous, RF and DC voltages
can cause death or injury.
Before removing any panel, always switch off the instrument
and disconnect it from the mains supply

Remove the four special mounting screws which hold the amplifier
assembly to the instrument chassis. These are accessed on the
underside of the top tray in the HVDC compartment.
Note If you remove and replace the oscillator assembly you may need to
realign the pre-optics. See section 12.4.9 for details on how to check the
alignment of the pre-optics.
Note Ensure the four securing screws are fully tightened when the RF box is
re-installed into the instrument. These screws ensure correct grounding.

Removal of the RF interface pwb


Removal of the RF interface pwb is straightforward. See section 1 for
the location of the RF interface pwb.

Replacement of RF power triode


See section 1.5 Access to major assemblies which provides information
for the removal of outer covers and identification of the RF power
oscillator assembly.
Remove the top RF power oscillator covers in accordance with section
11.6.1.
Remove the two M4 screws located in front of the filter compartment that
pass through the outer box and into the top cover of the grid
compartment.
Loosen the worm clamp around the anode of the RF triode and carefully
remove the triode.

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Varian ICP-OES spectrometer

RF power triode socket


See section 1 Access to major assemblies which provides information
for the removal of outer covers and identification of the RF power
oscillator assembly.
Remove the top RF power oscillator covers in accordance with section
11.6.1.

Warning Contact with components within the RF power oscillator


assembly box which operate at dangerous RF power levels
and temperatures can cause death or serious injury. Before
removing any panel, always switch off the instrument and
disconnect it from the mains supply.

Remove the M4 screws holding the access cover in place on the filter
assembly.
Unsolder the bottom two connections (coated copper wire and white
insulated wire) that pass from the filter compartment into the grid
compartment.
Remove the two M4 screws located in front of the filter compartment that
pass through the outer box and into the top cover of the grid
compartment.
Loosen the worm clamp around the anode of the RF triode and carefully
remove the triode.
Remove the worm clamp from the bracket at the top of the tank coil L1.
Remove the PTFE cooling air transfer sleeve from the top of triode
socket.
Remove the M6 nut and washer from the top of the PTFE stand off and
triode anode/L2 bracket.
Remove the three M4 screws from capacitors C6, C7, C8 and L1.
Remove L1 from the assembly.
Remove the two M4 screws from the top of the grid compartment panel
and remove the grid compartment.
Unsolder connections to the socket.
Remove the four socket retaining screws and spacers.

Replacement of the work coil


The induction coil is located in the torch compartment.
Switch the instrument off and disconnect the mains cable.
Switch the water cooler off.

Warning The torch becomes extremely hot when the plasma is


running and will remain hot for at least five minutes after the
plasma has been extinguished. Always allow the torch to
cool before attempting to remove the coil.

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Varian ICP-OES spectrometer

Remove the torch assembly.


Remove the old coil.
Fit the new coil using the torch alignment tool to set the coil location.
(72-100211-00 for Radial and 72-100214-00 for Axial)
Tighten the induction coil nuts by hand then use a wrench to tighten the
Swagelok nuts by 1/4 to 1/2 turn to achieve a water-tight seal. Check
that the coil does not distort during this process.

Caution Misalignment between the torch clamp and the induction coil
will place the torch off-center. This may melt the torch.

Turn on the water cooler and check for water leaks around the induction
coil connections.
Check the vertical and horizontal torch alignments as they may have
been affected. See section 12.4.5.

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Varian ICP-OES spectrometer

Measurements and calibrations

Warning To prevent death or injury from contact with hazardous


components or radiation, never operate the instrument
unless both inner safety panels are screwed in place.
Perform measurements and calibrations only as described.

This section provides a reference list of test points for making


measurements on the plasma generating system at the safest and most
accessible locations.

RF power oscillator measurements

Warning The RF power oscillator assembly contains components


operating at high voltages (7 kVDC), high RF power levels
(1.8 kW, 40 MHz) and high temperatures.
To prevent death, electric shock, RF/heat burns or radiation
damage to the body, all covers and panels must be in
position.
Measurements or calibration must not be performed unless
all the inner panels are in place and secured. Never disable
any plasma generating system interlocks.

Anode and grid current


The anode and grid current measurement test points are located on the
RF interface PWB (connector PL8).
The anode current can be calculated by measuring the voltage between
TP20 and TP18 (10 volts = 1 A anode current). For a keyboard setting of
2.0 kW, anode current is typically 400 to 430 mA. The voltage measured
from TP20 to TP18 will be typically 4.0 to 4.3V.
The grid current can be calculated by measuring the voltage between
TP16 and TP18 (1 V = 10 mA grid current). For a keyboard setting of 2.0
kW, grid current is typically -6 to -7 volts.

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Varian ICP-OES spectrometer

Filament voltage
The filament voltage can be measured across the secondary terminals
of filament transformer TR2. It should be approximately 6.35 VAC RMS.
Voltage drop across the wiring to the power tube results in the nominal
6.25 VAC RMS at the triode socket which is required for normal
operation.
Note You must use a true-RMS voltmeter for this measurement as the
filament power supply is phase-controlled.

Filament current
Note You must use a true-RMS ammeter rated for a minimum of 25 A RMS
for this measurement.
You can measure the filament current in two ways:
A clamp meter around one of the wires from the filament transformer to
the RF amplifier assembly
Break the circuit and place a current meter in series with the supply.
Remove a spade connector from a secondary terminal. Connect the
meter between the open transformer terminal and the spade connector.
Use 12 AWG (or equivalent) wire for meter interconnection if necessary.
The internal resistance of the meter will reduce the current slightly. To
avoid excessive voltage drop, keep the leads of the meter short and all
connections tight. The current measured by either method should be
about 22 amps.

RF power level calibration


The RF power oscillator has no internal adjustments.
An adjustment is provided on the RF interface PWB assembly to set the
ALC control voltage at TP13 (on connector PL9). This calibration
procedure should be performed whenever an RF interface PWB is
replaced. The calibration is different for radial and axial instruments.
Connect a digital multimeter from TP13 to TP 2 (signal ground).
On the RF diagnostics screen, set a power of 1.8 kW and turn on the
RF supply.
Adjust RV1:
Radial instruments
-5.302 volts
Axial instruments
-5.715 volts.

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Varian ICP-OES spectrometer

Typical RF test point values


These are not specification numbers – they are included as guides for a
typical instrument.

Plasma ON conditions

Power Anode Anode Grid Mod Calibration


level voltage current current voltage point
(kW) 1VDC = 1000V 10 VDC = 1A 1 VDC=10 mA 0 to 10VDC 5.3V or 5.7V
@ 1.8kW
TP19 TP20 TP16 TP21 TP13
0.6 4.15 2.23 -3.50 5.32 -3.56
4.41
0.8 2.60 -4.04 6.15 -4.03
1.0 4.83 3.02 -4.50 6.74 -4.42
1.2 5.22 3.31 -4.96 7.29 -4.79
1.4 5.60 3.54 -5.36 7.80 -5.12
1.5 5.84 3.65 -5.52 8.03 -5.29
1.7 6.15 3.94 -5.92 8.48 -5.71
1.9 6.20 4.05 -6.25 8.87 -5.89
2.0 6.53 4.22 -6.41 9.09 -5.99

Plasma OFF conditions

Power Anode Anode Grid Mod Calibration


level voltage current current voltage point
(kW) 1VDC = 1000V 10 VDC = 1A 1 VDC=10 mA 0 to 10VDC 5.3V or 5.7V
@ 1.8kW
TP19 TP20 TP16 TP21 TP13
0.6 4.15 2.23 -3.50 5.32 -3.56
4.41
0.8 2.60 -4.04 6.15 -4.03
1.0 4.83 3.02 -4.50 6.74 -4.42
1.2 5.22 3.31 -4.96 7.29 -4.79
1.4 5.60 3.54 -5.36 7.80 -5.12
1.5 5.84 3.65 -5.52 8.03 -5.29
1.7 6.15 3.94 -5.92 8.48 -5.71
1.9 6.20 4.05 -6.25 8.87 -5.89
2.0 6.53 4.22 -6.41 9.09 -5.99

TP18 is chassis earth


TP2 is signal earth

Publication date: 8/15/2006 26


12. Optics
12.1 Introduction
This section provides information on the optics system of the Varian
700-ES Series spectrometer instruments including
• System description
• Theory of operation
• Important information
• Specifications
• Removal and replacement procedures
• Alignment
The Varian 700-ES Series spectrometer systems use two types of optics
assemblies.
• Purged, radial view plasma (models 715, 725 and 735)
• Purged axial view plasma (models 710, 720 and 730)
The Varian 720/730-ES Series instruments are capable of analyzing
emissions from 166.798nm to 784.307nm, and the Varian 710-ES
Series instruments are capable of 177 nm to 784.307 nm.
Radial view instruments provide operators with computer control of all
major instrument parameters. This flexibility allows instrument
parameters to be optimized for applications that are expected to involve
complex matrices or high solution concentrations.
Axial view instruments use an axial torch configuration to extend the
length of the emission source. The design limits the image to the central
channel of the plasma providing lower background signals, higher
sensitivity and lower detection limits.

Figure 1 Varian 720/730-ES Series optics


Varian 700-ES Series Spectrometer

12.2 System description


The Varian 700-ES Series spectrometer optical system consists of
• Polychromator outer box
• Pre-optics assembly
• Echelle polychromator assembly
• Camera assembly
The polychromator outer box assembly is located directly behind the RF
oscillator on the top, rear of the spectrometer frame assembly. It is an
insulated, thermostatted housing that contains the echelle polychromator
casting and camera assembly.
The pre-optics assembly is located at the top right hand side of the
spectrometer behind the top, front right hand access cover. It contains a
stepper motor driven, computer controlled, flat scanning mirror and a
fixed toric mirror. The pre-optics casting is purged. The pre-optics
assembly gathers the incident light from the plasma and transfers the
light into the polychromator assembly.
The echelle polychromator assembly is located inside the polychromator
outer box. It is a purged, thermostatted optics module designed to
separate incident light into diffraction orders. The polychromator uses an
echelle grating with a cross-dispersing prism to form a two-dimensional
diffraction pattern across its focal plane.
The camera assembly is mounted in the polychromator casting in the
focal plane of the optics. It is a peltier cooled, charged coupled device
used to detect wavelengths of interest as selected by the instrument
operator.
The camera in the Varian 720/730-ES series instruments consist of
70,908 pixels, arranged in 70 non-linear arrays. The size, position and
orientation of the arrays ensure full wavelength coverage across the
specified wavelength range.
The camera in the Varian 710-ES series instruments consist of
1,157,120 pixels, arranged in 904 columns and 1280 rows. The 904
columns are arranged to represent the diffraction orders while the 1280
rows are used to represent wavelength positions across each order.

Publication date: 10/16/2006 12-2


Varian 700-ES Series Spectrometer

12.3 Theory of operation


The Varian 700-ES Series spectrometer optical systems feature a
temperature controlled, purged optics assembly used for simultaneous
analysis over a full range of wavelengths between 166.798 nm (Varian
720/730-ES series) or 177 nm (Varian 710-ES series) through 784.307
nm.

Figure 2 Varian 720 and 730 optical layout

Publication date: 10/16/2006 12-3


Varian 700-ES Series Spectrometer

Polychromator outer box


The echelle polychromator is housed in an insulated, temperature
controlled, aluminum box. Two thermal sensors provide feedback to the
instrument power pwb for the control of heater pads fixed to the outer
box assembly. One sensor is fixed to the outer box while the second
sensor is fixed to the polychromator casting. The feedback is used to
maintain a stable casting temperature of 35 degrees Celsius.
There are two heater pads fixed to the outer polychromator box. The
heat from the pads and outer box is transferred to the polychromator
casting across an air gap. The air gap acts as a low pass filter that
attenuates any sharp temperature variations that occur between ambient
room temperature, the outer box and the casting. For more details on
the temperature control system refer to section 14 in this manual.

Figure 3 Complete polychromator on instrument base


The temperature regulation of the casting minimizes any effects the
internal and external temperature changes may have on optical
components.

Pre-optics assembly
The pre-optics assembly is computer controlled and used to gather light
from the plasma. The radiated emissions from the plasma pass through
a snout (radial) or cone (axial) assembly and are collected by the pre-
optics and passed into the polychromator.
The pre-optics consists of
• Entrance window
• Pre-optics casting
• Stepper motor positioned flat mirror
• Toric mirror
• Attenuator assembly (Varian 710-ES series instruments only)

Publication date: 10/16/2006 12-4


Varian 700-ES Series Spectrometer

Entrance window
The entrance of the pre-optics is a removable brass mounting that is
screwed into the casting. The brass mounting contains a silicon molding
that provides a seal for the entrance window. The entrance window is
made from a material that has good transmission properties in the
vacuum ultra-violet region.

Pre-optics casting
The pre-optics casting houses a toric mirror and a scanning flat mirror.
Mounted on the outside of the casting are the horizontal drive, vertical
drive and two home sensors.
The polychromator purge gas enters through a swagelok fitting mounted
on the top of the polychromator casting and purges the polychromator
and pre-optics assemblies. The purge gas exhaust is through the center
mounting screw hole of toric mirror M2. The pressure relief through the
pre-optics casting ensures full coverage by the purge of the entire
optical path.

Figure 4 Varian 710-ES Series pre-optics assembly

Publication date: 10/16/2006 12-5


Varian 700-ES Series Spectrometer

Flat mirror (M1)


The flat scanning mirror (M1) transfers the light from the selected region
of the plasma to the toric mirror (M2).
Two stepper motor drive assemblies are used to drive the flat scanning
mirror. Motor 7M1 drives a gearbox and cam assembly. The vertical
drive motor, gearbox and cam assemblies rotate the scanning mirror in a
vertical direction.
Motor 7M2 drives a gearbox and pinion assembly. The motor gearbox
and pinion move the scanning mirror across the horizontal viewing axis
of the plasma.
Motors 7M1 and 7M2 are step positioned by the PC software and the
stepper motor drive electronics located on the 386EX-control pwb. Refer
to Section 13 of this manual for more information on the pre-optics
stepper motor drives.
In normal operation the position of the flat scanning mirror is optimized
by a software routine. The “torch align” software and instrument
electronics, drive the scanning mirror across the plasma emission. At the
completion of the torch scan, M1 is then positioned at the point of
highest raw intensity or best signal to background ratio for any given
analytical line. The analytical line used by the torch align software is the
Mn257.610 line. At the completion of the torch scan, the position is
stored by the torch align software module for use when performing
analysis.
Note The last horizontal and vertical values displayed on the torch align folder
are applied to all methods in axial instruments
In radial instruments, the vertical position (or Viewing Height) can be
optimized for all lines in a method or for each line in a method. A radial
instrument can be set to perform worksheet analysis sequentially.
Operators can select specific viewing heights for each analytical line in a
method to take advantage of the plasma temperature gradient or to
lessen interference effects. This is done in the method editor module
with the options commands.
When operating the instrument sequentially, the first wavelength in the
method will be measured at the selected instrument parameters. After
analyzing the first line in the method, the instrument parameters,
(including viewing height), for the next line in the method will then be set
and the line will then be analyzed. This pattern will continue until all the
chosen lines of interest have been analyzed.

Publication date: 10/16/2006 12-6


Varian 700-ES Series Spectrometer

Toric mirror (M2)


The toric mirror (M2) focuses the incident light transferred from mirror
M1. The light from M1 is magnified X 0.94 along the vertical axis and
X 1.06 along the horizontal axis and is focused on the entrance slit of the
polychromator.
For the Varian 720/730-ES Series instruments, the converging light from
toric mirror (M2) passes through the polychromator shutter and is
relayed by pilot mirror M3 through the entrance slit.
For the Varian 710-ES Series instruments the converging light from toric
mirror (M2) passes through an attenuator assembly and is relayed by
mirror M3 through a shutter and slit assembly.

The Varian 710-ES Series instruments attenuator assembly


The Varian 710-ES Series instruments attenuator assembly consists of
a stepper motor, disk and casting. The assembly is mounted between
the pre-optics and polychromator. The disk has three PC software
selected positions and is driven directly by stepper motor 7M3.
The closed position is used to stop the transfer of light from the plasma
into the polychromator when calculating the camera assembly dark
current and noise offsets. The closed position is also used to reduce the
exposure of the pilot mirror to UV energy created by the plasma.
The open position on the attenuator disk allows for the transmission of
all wavelengths into the polychromator when the Varian 710-ES Series
instruments shutter is open.
The attenuate position is used to reduce the amount of energy
transferred into the polychromator. The position is selected by software
when a photometric signal saturates the camera system at a wavelength
of interest.

Publication date: 10/16/2006 12-7


Varian 700-ES Series Spectrometer

Echelle polychromator assembly


The polychromator assembly uses an echelle-ruled grating with a cross-
dispersing prism to form a two-dimensional diffraction pattern across its
focal plane. The resulting utilized image consists of many diffraction
orders dispersed in a series of skewed vertical lines.
The polychromator has a focal length of 400 mm with a f6.7 aperture.
Each individual line consists of incrementing wavelengths with the
lowest wavelength of each diffracted order being positioned at the
bottom of the image and the highest wavelength in each order at the top.

Left

DLA 88
784.238 nm

Red
UV

166.798 nm
DLA 19

Right

Figure 5 Varian 700-ES Series instruments Detector and image positions

The resulting image consists of a spectrum where the highest


wavelength of interest is located at the top left hand side and the lowest
wavelength of interest is located at the bottom right hand side. The
lowest diffracted order produce the red region of the image and the
highest diffracted order produces the ultra violet region of the image.

Publication date: 10/16/2006 12-8


Varian 700-ES Series Spectrometer

The echelle polychromator assembly consists of


For the Varian 710-ES Series instruments
• Varian 710-ES Series instruments shutter and slit assembly
• Pilot mirror
• Collimating mirror
• Varian 710-ES Series instruments fused silica prism
• Echelle ruled grating
• Camera mirror
• Full illumination LED

For the Varian 720/730-ES Series instruments


• Varian 720/730-ES Series instruments shutter
• Pilot mirror
• Varian 720/730-ES Series instruments entrance slit
• Collimating mirror
• Varian 720/730-ES Series instruments CaF2 prism
• Echelle ruled grating
• Camera mirror
• Full illumination LED

Figure 6 Varian 700-ES Series instruments Polychromator

Varian 720/730-ES Series instrument shutter


For the Varian 720/730-ES Series instruments, the collected incident
light from the pre-optics assembly passes through a mechanical shutter.
This shutter is solenoid driven and controlled through electronics on the
instrument power pwb by the instrument software.
The shutter is used to stop the transfer of light from the plasma into the
polychromator when calculating camera assembly dark current and
establishing camera assembly electronic noise offsets.
When closed the shutter reduces the exposure of the pilot mirror to UV
energy created by the plasma. Over time the UV energy may cause
discoloration of the pilot mirror surface coating. By closing the shutter
when measurements are not being made, the effects of the UV energy
are reduced.

Publication date: 10/16/2006 12-9


Varian 700-ES Series Spectrometer

Pilot mirror
The pilot mirror assembly consists of a flat pilot mirror mounted on a
bracket designed specifically for the polychromator. The pilot mirror (M3)
is used to transfer the converging light from the pre-optics assembly to
the entrance slit.

Varian 710-ES Series instruments shutter and slit assembly


For the Varian 710-ES Series instruments, the collected incident light
from the pre-optics assembly passes through the attenuator assembly
and transferred by mirror M3 to the shutter and slit assembly. The
shutter mechanism is a piezo-ceramic device driven by an electronic
circuit located on the Varian ICP-OES 710 series instrument power pwb.
The Varian 710-ES Series instruments shutter controls the exposure
time for the camera assembly. When the shutter is open light travels
through the polychromator to the camera assembly. When the shutter is
closed the charge is transferred off the camera assembly to camera pwb
and 386-EX control pwb.
The piezo-ceramic shutter is mounted on a custom shaped pwb. One
end of the piezo-ceramic is fixed and the opposite end has a flag
mounted on it. The pwb, piezo-ceramic shutter flag and associated loom
are fixed in a machined cavity of the slit housing. The shutter assembly
is glued in place and can not be repaired.

Varian 720/730-ES Series instruments entrance slit


The entrance slit of the polychromator is in the shape of a parallelogram.
The slit is positioned 15° off center axis. The slit allows for a
parallelogram shaped image at the plasma that is .029 mm high and
.051 mm wide.

Collimating mirror
Collimating mirror (M4) is an off axis parabolic mirror. The geometry of
the mirror is used to reduce spherical aberrations. The mirror is made
from aluminum, and coated with MgF2 to enhance transmission of ultra
violet energy. The reflective surface is masked down to reduce stray
light and to set the entrance aperture.
There are no field alignment adjustments for this collimator mirror.

Publication date: 10/16/2006 12-10


Varian 700-ES Series Spectrometer

Prism
The cross-dispersing prism and echelle grating are mounted on a single
assembly. The assembly consists of a casting on which the grating and
prism are mounted in fixed positions. The prism is mounted in a bracket
that is screwed on to the grating casting. A baffle that reduces stray light
surrounds the prism, prism mount and face of the grating.

Figure 7 Grating and prism assembly

The Light from mirror M4 passes through the prism and on to the
grating. The refracted light of the prism is then diffracted by the grating
and passed through the prism again.
The prism refracts light in the horizontal axis across the focal plane.
For the Varian 710-ES Series instruments, the prism is made of UV
grade fused silica with an apex angle 6° 30’.
For the Varian 720/730-ES Series instruments, the prism is made of
CaF2 with an apex angle 9° 48’.

Publication date: 10/16/2006 12-11


Varian 700-ES Series Spectrometer

Grating
The grating is an aluminum echelle ruled grating that is replicated on a
fused silica plate. It has a groove density of 94.74 grooves / mm at a
blaze angle of 44.77°.
The grating is mounted on an anodized plate that is fixed to the grating
and prism casting. The casting with the grating and prism is then
mounted to the top of polychromator casting.

Figure 8 Echelle grating and prism mounted on grating and prism casting

The angle that the grating is positioned on the grating and prism casting
is factory set and is not adjustable in the field. When the grating and
prism assembly is installed in the polychromator, the grating is
positioned at the same angle as the grating blaze.
The ruling of the grating is horizontal in respect to the polychromator
focal plane. The grating then diffracts the refracted light from the prism
across the vertical axis of the focal plane.

Camera mirror
Camera mirror (M5) is an off axis parabolic mirror. The geometry of the
mirror is used to reduce spherical aberrations. The mirror is made from
aluminum, and coated with MgF2 to enhance transmission of ultra violet
energy.
The camera mirror focuses dispersed light onto the detector assembly.
This mirror is adjustable to allow the image to be focused and centred
on the detector.

Publication date: 10/16/2006 12-12


Varian 700-ES Series Spectrometer

Full illumination LED


The polychromator assembly includes a full illumination LED that is
mounted into the top of the polychromator casting between the camera
mirror and the camera assembly. The LED provides a light source for
diagnostics. The LED is controlled by the instrument software through
the 386EX-control pwb. Refer to section 13, command control in this
manual for more information. The full-illumination LED is not currently
used diagnostically for the Varian 710-ES Series instruments.
The LED provides a means to illuminate the camera directly with an
incident light source without having to remove the camera assembly
from the polychromator casting. When the LED is turned on an operator
can perform simple functional checks on the camera assembly, camera
pwb and the data handling functions of the instrument.

Varian 720/730-ES Series instrument camera assembly


The Varian 720/730-ES Series instrument camera assembly is an
application specific, solid-state detector, designed for use in the Varian
ICP-OES echelle polychromator. It is a peltier cooled, charge-coupled
device, (CCD), which is made up of 70,908 pixels spread across 70 non-
linear arrays. The size, position and orientation of the arrays ensure full
wavelength coverage across the specified range of 166.798 nm to
784.307 nm.

Figure 9 Varian 720/730-ES Series instrument camera assembly

The Varian 720/730-ES Series instrument camera assembly consists of


• Charge Coupled Device (CCD)
• Camera bus and bias resistors
• Water cooled peltier
• Field correction lens

Publication date: 10/16/2006 12-13


Varian 700-ES Series Spectrometer

Charge coupled device (CCD)


The CCD used in the Varian 720/730-ES Series instrument camera
assembly is a solid state device that is made of light-sensitive
semiconductor picture elements, or pixels. The function of the pixels is to
convert photons into a quantifiable charge. This charge is stored in
metal-oxide semiconductor (MOS) capacitors. The stored charges are
then gated through shift registers to the output circuit regions.

Pixels
Each pixel consists of a semitransparent gate electrode overlying an
insulating epitaxy layer and substrate layer. The gate electrode forms
one plate of the capacitor and the epitaxy and substrate layers form the
second plate of the capacitor.

Figure 10 CCD pixel structure.

An electrical potential is applied to the gate electrode and generates


electric fields used to collect and shift photo-generated charges.
The light from the polychromator falls on the chip causing photons to
pass through the gate electrode and liberate electrons from the epitaxy
to be stored in the substrate. These electrons accumulate in the
depletion layer of the substrate.
The accumulated charge from the collected electrons is proportional to
the number of photons that pass through the gate electrode.

Figure 11 Simplified pixel configuration.

The charges are gated through masked regions of the substrate by


transfer electrodes. The mask covers the area of the chip between pixel
arrays. By masking off these regions, the area in between arrays can be
used as shift registers.

Publication date: 10/16/2006 12-14


Varian 700-ES Series Spectrometer

Mask
The mask is used to prevent photons from passing through the chip
layers and releasing more electrons in the transfer regions. This is done
to allow the charge accumulated in the pixel area substrate to be
transferred through the substrate of the transfer regions without further
photo-generated charges accumulating.

Shift registers
The stored electron charges in the pixel areas are transferred by shift
and transfer gates generated on the camera pwb.

Figure 12 Pixel and transfer region structure

Each pixel and transfer region is arranged in a diagonal linear array,


(DLA). Each DLA is further divided in two sections. The end of each
transfer section of each DLA is connected to an output transfer register.

Figure 13 Simplified pixel, transfer and output regions configuration

The charges placed into the output transfer register are shifted
sequentially through a readout amplifier. The end of the output register
is connected to a readout amplifier. The readout amplifier consists of a
floating capacitor and source follower.

The readout amplifier circuit produces a voltage at the output of the


source follower that is proportional to the charge in the final location of
the output register. The readout amplifier output is then clocked to the
camera pwb for analog to digital conversion and then parsing to the
386EX-control pwb.

Publication date: 10/16/2006 12-15


Varian 700-ES Series Spectrometer

CCD layout
The CCD is 20 mm wide by 15 mm high. It is masked to present pixel
arrays in positions along the focal plane of the cross-dispersed spectrum
of the Varian 700-ES Series echelle polychromator. The resulting arrays
are diagonal lines, skewed across the width of the detector at varying
spaces.

DLA 35 - 88
The diagonal linear arrays (DLAs) of pixels are numbered from 19 to 88
inclusively. DLAs 35 through 88 consist of 12.5 µm wide pixels, 12.5 µm
wide storage registers and 25 µm wide shift registers.
In order to transfer 12.5 µm wide storage registers into 25 µm wide shift
registers, the odd numbered storage registers are transferred into the
shift registers through the DLA and off the detector to the camera pwb.
Then the charge from the even number pixels are transferred and
shifted off the chip.

DLA 19 - 34
DLAs 19 through 34 consist of pixels and shift registers that are 25 µm
wide. The diffraction pattern from the image in orders 19 through 34
result in the spacing of adjacent arrays being very close together. The
locations of adjacent arrays result in one C register to two A registers.
Charge transfer is done directly from the pixels of the odd numbered
DLA to C register, then the charges from the even number DLAs to the
C register are shifted out to be measured.

Publication date: 10/16/2006 12-16


Varian 700-ES Series Spectrometer

Varian 710-ES Series instrument camera assembly


The Varian 710-ES Series instrument camera assembly is a customised
commercial solid-state detector. It is a peltier cooled, charge-coupled
device (CCD) that is made up of 1,129,000 pixels in a rectangular array
of 15 x 15 micron pixels. The specified wavelength range is 177 nm to
784 nm.

Figure 14 Varian 710 Series instrument camera assembly

The Varian 710 Series instrument camera assembly consists of


• Charge Coupled Device
• Water cooled Peltier

Charge coupled device (CCD)


The charge-coupled device used in the Varian 710-ES Series instrument
camera assembly is a solid state device that is made of light-sensitive
semiconductor picture elements, or pixels. The function of the pixels is to
convert photons into a quantifiable charge. This charge is stored in
metal-oxide semiconductor (MOS) capacitors. The stored charges are
then gated through shift registers to the output circuit regions.

Publication date: 10/16/2006 12-17


Varian 700-ES Series Spectrometer

Pixels
Each pixel consists of a semitransparent gate electrode overlying an
insulating epitaxy layer and substrate layer. The gate electrode forms
one plate of the capacitor and the epitaxy and substrate layers form the
second plate of the capacitor.

Figure 15 CCD pixel structure.

An electrical potential is applied to the gate electrode and generates


electric fields used to collect and shift photo-generated charges.
The light from the polychromator falls on the chip causing photons to
pass through the gate electrode and liberate electrons from the epitaxy
to be stored in the substrate. These electrons accumulate in the
depletion layer of the substrate.
The accumulated charge from the collected electrons is proportional to
the number of photons that pass through the gate electrode.

Figure 16 Simplified pixel configuration

Publication date: 10/16/2006 12-18


Varian 700-ES Series Spectrometer

12.4 Important information


You must follow the procedures described in this section when servicing
an optics chassis. All of these points should be read and understood -
failure to do so may result in permanent damage to the instrument:
• All optical mirror surfaces are MgF2 coated. Do not clean any of the
components with water
• Do not attempt to clean the grating
• Do not attempt to clean the prism
• Do not attempt to clean the field correction lens or camera surface
• Do not touch the surface of the optical components
• Do not attempt any alignment or calibration without the correct
equipment and tools
• The polychromator requires a transparent optical path. Do not use
unauthorized lubricants or glues that may out-gas
• Cover exposed optical components. Settling dust and airborne
contaminants can degrade performance
• Always allow adequate purge time for the 720/730 polychromator
before turning on the peltier of the detector.

Publication date: 10/16/2006 12-19


Varian 700-ES Series Spectrometer

12.5 Specifications

Polychromator
Type Echelle with cross dispersing prism
Focal length 400 millimetre
Collimating mirror 75 mm diameter off-axis parabolic
(masked to suit f6.7 aperture)
Focusing mirror 87 mm diameter off axis parabolic
Dispersing element 94.74 line/mm Echelle diffraction grating
Grating orders 19 through 88 inclusive (720/730 series)
Wavelength range Varian 710-ES Series instruments
177 nm through 784 nm
Varian 720/730-ES Series instruments
166.798 nm through 784.307 nm
Cross-dispersing element Varian 710-ES Series instruments
UV grade fused silica prism
Varian 720/730-ES Series instruments
CaF2 prism
Entrance slit (fixed) 51 µm wide x 29 µm high 15° off axis
parallelogram
Stray light 10,000 ppm Ca solution gives equivalent
concentration of
< 2 ppm of As @ 193.696 nm
(720/730 series)
< 2 ppm of As @ 188.980 nm
(710 series)
Pre-optics
Horizontal scan +3.0 mm to -3.0 mm in 0.1 mm
increments
Vertical scan 0 to 25 mm (Radial)
in 1 mm increments
-4.0 mm to +4.0 mm (Axial)
in 0.1 mm increments

Publication date: 10/16/2006 12-20


Varian 700-ES Series Spectrometer

12.6 Removal and replacement procedures


This section provides procedures for access to and removal of field
serviceable components and assemblies of the optics system.
Replacement procedures are the reverse, unless otherwise stated.
See section 1.5 ‘Access to major assemblies’ which provides information
for removal of outer covers and identification of the optics assembly.

Pre-optics assembly
Removal of the pre-optics assembly requires the removal of
the instrument outer covers.
1. Turn off the instrument at the low power mains switch
2. Disconnect the vertical stepper motor drive at 7SK1
3. Disconnect the vertical home opto at 7SK2
4. Disconnect the horizontal stepper motor drive at 7SK3
5. Disconnect the horizontal opto at 7SK4
6. Remove the black rubber molding that provides a purge seal
between the pre-optics casting and the RF oscillator.
7. Remove the M5 screw and bracket mounted on the pre-optics
mounting tube.
8. Pull back the insulating collar that covers the screws mounting
the pre-optics to the polychromator.
9. Remove the four M5 hex head screws and spring washers from
the mounting bracket
10. Carefully remove the pre-optics casting away from the mounting
on the polychromator casting being sure to gain clearance from
the locating pins in the collar.
11. Return the instrument to normal operating conditions by
replacing all parts in reverse order.
12. Check the pre-optics alignment as detailed in section 12.7.

Publication date: 10/16/2006 12-21


Varian 700-ES Series Spectrometer

Polychromator assembly
Removal of the Polychromator assembly requires the removal of
the instrument outer covers
Instrument gas filter assembly
Pre-optics assembly

1. Turn off the instrument at the low power mains switch


2. Turn off the instrument water cooler

Caution Installations where the water cooling system is shared


between the Varian 700-ES Series instruments and other
devices, the water cooling supply may be configured in
parallel. Secure both supply and return water-cooling lines at
the instrument before servicing instrument.

3. Open the water cooling filter assembly to release residual line


pressure from the water cooling system.

Caution Varian 700-ES Series instruments require water-cooling


systems that use positive displacement pumps. Before the
water-cooling filter is opened place a site supplied bucket
beneath it to catch any water that may spill.

 Note Periodic cleaning of the Varian 700-ES Series instruments water-


cooling filter is required.
Remove the filter mesh element and clean it by running it under a
tap before re-sealing the system.

4. Turn-off all gas supplies to the instrument


5. Disconnect the camera pwb from the 386ex to camera pwb
cable
6. Remove the outer cover on the camera pwb assembly and
disconnect the ribbon cable to the polychromator
7. Remove the camera pwb from the instrument
8. Disconnect the mains heater input labeled PL1
9. Disconnect the shutter control,
full illumination LED supply and
Peltier supply connector labeled PL4
10. Disconnect the outer box temperature sensor labeled SK3
11. Disconnect the casting temperature sensor labeled SK5
12. Unscrew the water cooling supply and return lines at the
Swagelok fittings into the polychromator outer box
13. Using 34 mm C-spanner remove poly mounting nuts holding

Publication date: 10/16/2006 12-22


Varian 700-ES Series Spectrometer

polychromator outer box to the instrument base assembly


14. Disconnect the camera purge gas line from the gas manifold
15. Disconnect the poly purge gas line at the gas manifold
16. Remove the polychromator assembly from the instrument base
assembly
17. Return the instrument to normal operating conditions by
replacing all parts in reverse order

Polychromator access
Access to the polychromator is through the insulated polychromator
outer box. The appropriate instrument covers must be removed to allow
access to the outer box assembly.

 Note The polychromator camera mirror can be adjusted without removing


any of the polychromator outer box panels. Access to the camera
mirror adjustment screws is through the access panel on the rear of
the instrument.

The polychromator outer box has five access panels.


• Top cover
• Pilot mirror cover
• Camera cover
• Collimator cover
• Focus mirror cover

Pilot Mirror
Collimator

Slit plug

Focus
Camera

Figure 17 Polychromator access.

Publication date: 10/16/2006 12-23


Varian 700-ES Series Spectrometer

Top cover
Removal of the polychromator outer box top cover provides access to:
• Shutter assembly
• Entrance slit plug
• Grating and prism casting assy
• Back lighting fixture access cover
• Polychromator and camera purge gas lines
• Camera rotation adjustment screws access plugs
• Full illumination LED
1. Remove the screws that secure the top cover assembly.
2. Remove the cover.

Pilot mirror cover


Removal of the polychromator outer box pilot mirror cover provides
access to the polychromator casting pilot mirror access cover.
1. Place the camera pwb in the service position
2. Remove the screws through outer box top cover that hold the pilot
mirror access cover
3. Remove insulation covering outer box pilot mirror and camera
access covers
4. Remove screws holding outer box pilot mirror access cover

Camera cover
Removal of the polychromator outer box camera cover provides access
to
• Polychromator casting, camera access cover.
• Camera purge gas line (720/730 series only)
• Camera pwb to Camera connection
• Access to camera rotation hex screws
• Access to camera mounting nuts
• Access to the camera water cooling fittings

1. Remove the screws through outer box top cover that hold the
pilot mirror access cover
2. Remove insulation covering pilot outer box mirror and camera
access covers
3. Remove screws holding outer box camera access cover

Publication date: 10/16/2006 12-24


Varian 700-ES Series Spectrometer

Collimator cover
Removal of the polychromator outer box collimator cover provides
access to the collimator mirror M4.

1. Remove the screws through the outer box top cover that hold
the collimator access cover
2. Remove insulation covering collimator outer box and focus
access covers
3. Remove screws holding outer box collimator access cover

Focus mirror cover


Removal of the polychromator outer box focus cover provides access to
focus mirror M5.

 Note For normal adjustments the adjustment screws can be accessed


through holes that are provided in this cover.

1. Remove the screws through the outer box top cover that hold
the focus access cover
2. Remove insulation covering collimator outer box and focus
access covers
3. Remove screws holding outer box focus access cover

Pilot mirror
Access to the pilot mirror and entrance slit, require the removal of the
associated outer box cover. The appropriate instrument covers must be
removed to allow access to the outer box assembly.
1. Place the camera pwb in the service position
2. Remove the outer box pilot mirror cover
3. Remove the pilot mirror casting access cover
4. Remove the three screws retaining the pilot mirror alignment
bracket
5. Using a small allen key remove the pilot mirror from the spring
clips and mounting blocks
6. Install a new pilot mirror under the spring clips
7. Return the instrument to normal operating conditions by
replacing all covers in reverse order

Publication date: 10/16/2006 12-25


Varian 700-ES Series Spectrometer

Entrance slit
Access to the entrance slit requires the removal of the pilot mirror outer
box cover, top cover and slit access plug. The appropriate instrument
covers must be removed to allow access to the polychromator outer box
assembly.
The entrance slit must be replaced with the alignment slit when
performing a pre-optics alignment. Care should be taken to ensure the
instrument slit assembly is returned before replacing polychromator
covers.

Caution The entrance slit is located between the polychromator casting


and pilot mirror M3. Care must be exercised when removing
the slit assembly to ensure that the slit assembly does not
strike the pilot mirror.

Caution Do not unplug the camera pwb while power is applied. Failure
to do this will result in damage to the camera pwb.

1. Place the camera pwb in the service position


2. Remove the outer box top cover
3. Remove the outer box pilot mirror cover
4. Remove the pilot mirror casting access cover
5. Remove the slit access plug
6. Remove the two screws retaining the entrance slit assembly
7. Using the locating pins fitted in the casting remove the slit
assembly away from the casting and through the slit access in
the top of the casting
8. Replace the slit assembly with the required part
9. Return the instrument to normal operating conditions by
replacing all parts in reverse order

Publication date: 10/16/2006 12-26


Varian 700-ES Series Spectrometer

Camera assembly
Access to the camera assembly requires the removal of the camera
outer box cover. The appropriate instrument covers must be removed to
allow access to the outer box assembly.

Caution The camera assembly is an ESD-sensitive part. Proper ESD


handling precautions should be taken before removing
assembly from the instrument.

1. Turn off the instrument at the low power mains switch


2. Turn off the instrument water cooler

Caution Installations where the water cooling system is shared


between the instrument and other devices, the water cooling
supply may be configured in parallel. Secure both supply and
return water-cooling lines at the instrument before servicing
the instrument.

3. Open the water cooling filter assembly to release residual line


pressure from the water cooling system.

Caution Varian 700-ES Series instruments require water-cooling


systems that use positive displacement pumps. Before the
water-cooling filter is opened place a site supplied bucket
beneath it to catch any water that may spill.

 Note Periodic cleaning of the Varian 700-ES Series instruments water-


cooling filter is required. Remove the filter mesh element and clean it
by running it under a tap before re-sealing the system.

4. Place the camera pwb in the service position


5. Turn-off the argon gas supply to the instrument
6. Remove the outer box top cover
7. Remove the outer box camera cover, center plate and ribbon
cable
8. Unplug the ribbon cable that is connected from the camera pwb
to the D-range connector on the camera casting access cover
9. Remove the three camera plate seal plugs from the camera
casting access cover

Publication date: 10/16/2006 12-27


Varian 700-ES Series Spectrometer

Camera plate 1

Rotation

Camera plate 3 Camera plate 2

Figure 18 Camera casting access plate

10. Remove the two 8 mm stainless steel water fittings and the
water cooling hoses
11. Disconnect the camera purge gas line from the gas manifold
12. Cut the wire ties holding the camera purge line on to the
polychromator purge line
13. Pull the camera purge gas line through the polychromator
assembly using care not to damage the Teflon hose (720/730
series only).
14. Remove the power input to the peltier from the spade
connectors.
15. Remove the screws retaining the camera casting access plate
16. Using a 7 mm nut driver, remove the three nyloc nuts that hold
the camera assembly in the casting.
17. Remove the camera assembly from the casting
18. Return the instrument to normal operating conditions by
replacing all parts in reverse order

Publication date: 10/16/2006 12-28


Varian 700-ES Series Spectrometer

12.7 Optical alignment


The Varian 700-ES Series instrument optical system alignment has
been divided in two field alignment procedures.
• Pilot mirror and pre-optics alignment
• Polychromator and camera alignments
The alignments are performed as a part of corrective maintenance. The
polychromator and camera alignment requires a plasma source. Before
aligning the polychromator and camera, the pilot mirror and pre-optics
must be aligned.

Pilot mirror and pre-optics


The alignment of the pilot mirror and pre-optics require the following
tools
• Alignment slit
• Pilot mirror target
• Radial pre-optics alignment tool
• Pre-optics target / set gauge
• Laser back lighting fixture
• Ruler in mm units (radial)
• Axial torch (axial)

Warning
The Laser back lighting fixture uses a laser operating in the
visible region at 635 nm. The laser is a Class 2 laser product,
powerful enough to warrant caution in its use. Do not stare
into the beam.

Pilot mirror alignment


Alignment of the pilot mirror requires the removal of the pre-optics
casting assembly. Refer to section 12.6 for pre-optics removal
instructions.
The entrance slit must be replaced with the alignment slit when
performing a pilot mirror and pre-optics alignment.

 Note Care should be taken to ensure the instrument slit assembly is


returned before replacing polychromator covers.

Access to the entrance slit and pilot mirror requires the removal of the
pilot mirror outer box cover, top cover and slit access plug.
Refer to section 12.6 for removal instructions.
The appropriate instrument covers must be removed to allow access to
the polychromator outer box assembly.

Publication date: 10/16/2006 12-29


Varian 700-ES Series Spectrometer

1. Remove the pre-optics assembly


2. Replace the instrument entrance slit with the alignment slit
3. Install the pilot mirror target-pre-optics, using two screws to fit in
place
4. Install the laser back lighting fixture
5. Connect the brown wire labeled + 5 VDC from the laser back lighting
fixture to P1 on the 386ex control pwb
6. Connect the blue wire labeled GND from the laser back lighting
fixture to P3 on the 386ex control pwb
7. Turn-on the instrument low power mains switch
8. Turn-on the laser back lighting fixture
9. Manually open the shutter solenoid (720/730 series only).
10. Adjust the three M2.5 screws on the back of the pilot mirror
mounting bracket so that the laser beam passes through the
mounting plate target hole and is aligned on the center of the outer
target
11. Turn-off the laser
12. Turn-off the instrument low power mains switch
13. Re-fit the pre-optics assembly
14. Remove the pre-optics top cover from the pre-optics
15. Using the pre-optics target / set gauge, set the three toric adjusting
screws to default positions
16. Install the pre-optics target / set gauge in the mounting point in front
of the toric mirror
17. Turn-on the laser and site that the image is positioned correctly on
target

 Note If the image is not centered on the target, the pre-optics casting may
be improperly seated. Check the pre-optics casting is installed
properly and mounted in place. If the image is still misaligned and
the pre-optics are correctly installed, repeat the pilot mirror
alignment.

Pre-optics alignment
The pilot mirror must be properly aligned before beginning a pre-optics
alignment.
The entrance slit must be replaced with the alignment slit when
performing pilot mirror and pre-optics alignments. Care should be taken
to ensure the instrument slit assembly is returned before replacing
polychromator covers.
Access to the entrance slit and pilot mirror requires the removal of the
pilot mirror outer box cover, top cover and slit access plug. Refer to
section 12.6 for removal instructions. The appropriate instrument covers
must be removed to allow access to the polychromator outer box
assembly.

Publication date: 10/16/2006 12-30


Varian 700-ES Series Spectrometer

Alignment of the pre-optics requires the instrument to be operating with


the pre-optics assembly and laser back lighting fixture fitted. Power must
be applied to the pre-optics stepper motors. The pre-optics scanning
mirror should be in the horizontal and vertical home positions as set by
the instrument diagnostics software.
The final adjustments on axial instruments require an axial torch. The
final vertical adjustments on radial instruments should correspond to 55
mm above the top of a fully fitted and aligned torch clamp. The final
horizontal alignment adjustment should correspond to the centerline on
the radial pre-optics alignment tool

1. Remove the pre-optics top cover from the pre-optics


2. Using the pre-optics target / set gauge, set the three toric adjusting
screws to default positions
3. Install the pre-optics target / set gauge in the mounting point in front
of the toric mirror
4. Manually open the shutter solenoid and turn-on the laser
5. Check that the laser image is positioned correctly on target
6. Remove the target / set gauge from the casting
7. Using the pre-optics target / set gauge, set the depth of mirror M1 in
respect to the shaft bearing, ensuring the face of the mirror is flat by
securing the mirror with the hex head M3 screw on the adjustment
arm
8. Remove the tension spring that holds the flat scanning mirror
adjustment arm from the stepper motor bracket. Position the flat
scanning mirror upward to allow access to the target pad. Place the
target / set gauge in position.
9. Adjust the toric mirror adjustment screws to position the laser image
on the center of the target.
10. Remove the target, reposition the flat scanning mirror in normal
operating position and replace the tension spring.
11. Adjust the flat scanning mirror nod adjustment screw so that the
laser image passes through the injector tube of an axial torch or 55
mm above a radial torch clamp and in the center of a radial pre-
optics alignment tool.
12. Turn-off the back lighting laser
13. Remove the alignment slit and replace it with the instrument
entrance slit
14. Turn-on the back lighting laser
15. Confirm the image from the back lighting laser is in the correct
position of the torch compartment
16. Turn-off the back lighting laser and remove the back lighting fixture,
torch alignment tool and close all optics covers.
17. Verify the pre-optics alignment with the torch align software.

Publication date: 10/16/2006 12-31


Varian 700-ES Series Spectrometer

Polychromator and camera


Alignment of the camera in the polychromator assembly uses these tools

• 8 mm Spintite or modified 8 mm Spintite
(hex socket driver <11mm OD)
• 3/16” Allen key
• 2 X 2 mm Allen keys
• Wavelength calibration and blank solutions
Access to the camera rotation adjustments is made by removing the
camera assembly outer box cover, top cover and camera rotation
access plugs. Refer to section 12.4.3 and 12.4.5 for removal
instructions. The appropriate instrument covers must be removed to
allow access to the polychromator outer box assembly.
Access to the focus mirror adjustment screws does not require removal
of any polychromator outer box covers. To access the focus mirror
adjustment screws remove the polychromator access cover at the rear
of the instrument.
Note Polychromator and camera alignment will change as the polychromator
temperature stabilizes. Adjustment to the polychromator and camera
assemblies should only be done when the polychromator temperature is
35°C as reported by Varian 700-ES Series instrument software.
Varian 700-ES Series instrument software includes a polychromator
alignment package called PolyAlign.exe. The polychromator alignment
pages are accessed through extended diagnostics password ‘virgil’.
These pages are slightly different for Varian 710-ES Series and the
Varian 720/730-ES Series instruments. For further information on each
of the diagnostic polychromator alignment pages refer to Section 7
(Diagnostics) for more details.

Location
Location adjustment aligns the polychromator focus plane with the
instrument camera assembly. Focus mirror DLA and wavelength
adjustment screws are set to position the dispersed orders and
wavelengths to correspond with the theoretical pixel positions on the
camera assembly.

Focus DLA

Wavelength

Figure 19. Focus mirror adjustments

Publication date: 10/16/2006 12-32


Varian 700-ES Series Spectrometer

The location adjustments are made using a simple spectra produced by


the plasma. Characteristic argon peaks are identified and properly
positioned on the camera and then the focus mirror is adjusted by
properly positioning a zinc peak.
Note In the case of severe misalignment of the focus mirror, the optical image
may not fall on any of the camera pixels. If the image is not displayed on
the location page the following corrective actions should be taken.
• Check that the shutter assembly is in the open position when
reading
• Set the backing plate of the focus mirror square to the
polychromator casting by a distance of about 5mm
• Return to the optics page of diagnostics. Use the full
illumination LED and the diagnostics graph function to verify
correct camera assembly operation
1. Ignite the plasma and aspirate blank solution
2. Remove the polychromator access cover from the rear of the
instrument
3. Access the focus mirror adjustment screws by lowering the
insulation flap on the polychromator outer box insulation
4. Go to the Location page of the Polychromator alignment software.
5. On the location page under Intensity Map tick Ar
6. Under Defaults set INT to 30 msec and pixel spread to 55 pixels
7. Under Echelle tick Active,
8. For the Varian 710-ES Series instruments
tick all four quadrants
For the Varian 720/730-ES Series instruments
tick Left side, Right side
9. Press read

Location adjustments for the Varian 720/730-ES Series instruments


There are seven major peaks in the simple spectra that are used to
begin a location adjustment. The major peaks are emitted by oxygen
and argon in the plasma and should occupy DLAs 19 through 22.
The focus mirror should be adjusted so that the left side of the location
screen displays the three major peaks and the right side of the location
screen displays the remaining four major peaks -see figure 20.

Adjustment screw Direction Image movement


DLA Clockwise Increase DLA number
Wavelength Clockwise Decrease pixel number

Publication date: 10/16/2006 12-33


Varian 700-ES Series Spectrometer

3 Majors 4 majors
Left side Right side

DLA 24
Pixels 190 and 205 DLA 35
DLA 25 Pixels 409 and 444
Pixel 177

Figure 20 Location echellogram- 720/730 series instruments

10. Turn the DLA adjustment screw to position the major peaks on the
correct DLAs
11. Turn the wavelength adjustment screw to position three major
peaks on the left of the display and four major peaks on the right of
the display
12. Verify coarse location adjustments are correct by identifying the
argon doublet peaks at DLA 35 pixels 409 and 444
13. Under Echelle turn-off left side and right side

Note The coarse location adjustment will position argon 617.310nm,


617.018nm and 592.868nm on the Intensity map display. A fine
adjustment of the focus mirror will position Argon 617.310nm and
617.018nm on the horizontal axis equal distances from the vertical axis
line.

14. Fine tune the location adjustment by positioning the argon


617.018nm peak at the last red line on the echellogram, (DLA 24)
pixel 205

Publication date: 10/16/2006 12-34


Varian 700-ES Series Spectrometer

Location adjustments for the Varian 710-ES Series instruments


Because the Varian 710-ES Series instrument camera has a regular
x-y array of small pixels rather than a custom array of large curvilinear
pixels as used in the Varian 720/730-ES Series instrument camera, the
location adjustments a much simpler and less critical.
• Check all check boxes in the Topographical control group
• Check Argon in the Intensity Map control group
• You may need to change the “Int time” slider to develop good
intensity and contrast for the argon constellation spots in the
intensity map
The coarse location adjustment will position argon 617.310nm,
617.018nm and 592.868nm on the Intensity map display. A fine
adjustment of the focus mirror will position Argon 617.310nm and
617.018nm on the horizontal axis equal distances from the vertical axis.

Figure 21 Location echellogram - 710 series instruments

You can zoom on the Guide and Instrument Scan display windows to
show any errors between the theoretically-ideal argon constellation spot
positions shown in the Guide, compared with the actual positions shown
in the Instrument Scan

Figure 22 Zoom of Location echellogram - 710 series instruments

Publication date: 10/16/2006 12-35


Varian 700-ES Series Spectrometer

Focus
Focus adjustments position the focus mirror the correct distance from
the camera assembly. By moving the focus mirror in or out the focal
length is set to the distance where the best resolution for all elements is
achieved. DLA, focus and wavelength adjustment screws are used
together to move the mirror.
Note Polychromator and camera alignment will change as the polychromator
temperature stabilizes. Adjustment to the polychromator and camera
assemblies should only be done when the polychromator temperature is
35°C as reported by the Varian 700-ES Series instrument software.
Access to the focus mirror adjustment screws does not require removal
of any polychromator outer box covers. To access the focus mirror
adjustment screws remove the polychromator access cover at the rear
of the instrument.
Note Location adjustments should be complete before attempting focus
adjustments. The optimum nebulizer and pre-optics positions should be
determined and set on the diagnostics Quick page before using the Set
Focus page.
The focus alignment of the polychromator and camera assembly is
based on the Zn 213.856 nm emission line. The half height full width
resolution at this wavelength should routinely be less than 8.5 pm.

1. Remove the gasbox/polychromator access cover from the rear of


the instrument
2. Access the focus mirror adjustment screws by lowering the
insulation flap on the polychromator outer box insulation
3. Go to the Set Focus page in the polychromator alignment software
folder
4. Ignite the plasma (if required) and aspirate wavelength calibration
solution
5. Under Defaults set INT to 50 msec for axial view instruments and
100 msec for radial instruments.
6. Press Read (if required)

Note The intensity map will display the positions of argon 617.310nm,
617.018nm and 592.868nm peaks. While adjusting the focus mirror
always position Argon 617.310nm and 617.018nm on the horizontal axis
equal distances from the vertical axis. The intensity map provides a
software tool to maintain location alignment while adjusting focus.

7. Using the wavelength adjustment screw position Zn 213,856 at DLA


69 pixel 421, marked by the short yellow vertical line in the Intensty
window

Publication date: 10/16/2006 12-36


Varian 700-ES Series Spectrometer

8. Using the DLA screw maximize the Zn 213.856 nm peak for the
highest intensity
9. Record the half height full width of the Zn peak as indicated in the
width field at the top of the window
10. Adjust the focus adjustment screw clockwise ¼ of a turn
11. Adjust the wavelength adjustment screw clockwise ¼ of a turn
12. Adjust the DLA adjustment screw clockwise ¼ of a turn
13. Using the wavelength adjustment screw position Zn 213,856 at
theoretical wavelength position (DLA 69 pixel 421)
14. Using the DLA screw maximize the Zn 213.856 nm peak for the
highest intensity
15. Record the half height full width of the Zn peak as indicated in the
width field at the top of the window
16. Compare the half height full width current value with recorded value

If the current value is less than the recorded value then continue to turn
the adjustment screws clockwise.
If the current value is larger than the recorded value then turn the
adjustment screws anti-clockwise to improve Zn resolution.
As the resolution improves and approaches minimum, smaller
adjustments will be required to the adjustment screws. Adjust the mirror
through the minimum resolution and then return to the best-recorded
value.

17. Repeat steps 10 through 16 until the best resolution is achieved


18. The computed yellow line at the center of the zinc peak should align
with the reference yellow marker, and the Zn peak intensity should
be maximized
19. Go to the Check Focus page
20. Under update set image
21. Under focus lines set charts
22. Under integration time set slow, medium and fast
23. Under defaults set int time to 50 msec for axial instruments and 100
msec for radial instruments
24. Set charts icon in display section
25. Press Read (if required)

Verify resolution for all specified element lines are satisfactory with the
Check focus page. All specified lines should have a resolution of 100%
or less as measured. The blue line in the center of the charts display
indicates 100% resolution.

Publication date: 10/16/2006 12-37


Varian 700-ES Series Spectrometer

Rotation
The rotation adjustment is used to position the camera assembly
diagonal linear arrays in the proper axis. The skewed arrays are
positioned at the correct angle by rotating the camera chip in the camera
assembly housing.
The rotation software page is based on two argon wavelengths that are
positioned at the left and right extremes of DLA 21. The selected
wavelengths are Ar 706.722 and Ar 696.543.
Access to the camera assembly locking screws, camera rotation access
plugs and camera assembly rotation adjustment screws requires the
removal of the camera assembly outer box cover and polychromator top
cover. Refer to section 12.6 for removal instructions. The appropriate
instrument covers must be removed to allow access to the
polychromator outer box assembly.
Note Polychromator and camera alignment will change as the polychromator
temperature stabilizes. Adjustment to the polychromator and camera
assemblies should only be done when the polychromator temperature is
35°C as reported by the Varian 700-ES Series instrument software.

Figure 23 CCD DLA rotation structure

Publication date: 10/16/2006 12-38


Varian 700-ES Series Spectrometer

Camera rotation for the Varian 720/730-ES Series instruments


The rotation page samples DLAs 20 and 22 above and below the
theoretical positions of the two primary argon wavelengths. The raw
intensity from the pixels above and below the primary wavelengths are
then used to calculate ratios. The ratios are displayed on the rotation
page. When both displayed ratios are 1.00 (+\- 0.1) the rotation is set
correctly

1. Remove the polychromator access cover from the rear of the


instrument
2. Access the focus mirror adjustment screws by lowering the
insulation flap on the polychromator outer box insulation
3. Remove the polychromator outer box camera cover and
polychromator outer box top cover
4. Remove the camera rotation access plugs
5. Remove the rubber plugs from the camera access plate and loosen
the four hex head screws
6. Go to the Rotation page in the Polychromator alignment software

Figure 23 Varian 720/730-ES Series instruments Rotation folder

7. Ignite the plasma (if required) and aspirate blank solution


8. Under Default set the integration time to 10 msec for axial
instruments or 20 msec for radial instruments
9. Using the DLA focus mirror adjustment screw and the intensity map,
position the Ar 706.722nm peak on the horizontal red line
10. Using the wavelength focus mirror adjustment screw and intensity
map, position the Ar 706.722nm peak on the cross hair

Publication date: 10/16/2006 12-39


Varian 700-ES Series Spectrometer

11. Using the DLA focus mirror adjustment screw adjust the
Ar 706.722nm peak to a ratio of 1.00 (+/- 0.1)
12. Using two 2mm allen keys adjust the camera rotation screws until
both ratio figures are equal (+/- 0.1)
13. Re-position the Ar 706.722nm peak with the DLA and wavelength
focus mirror adjustment screws
14. Repeat steps 10 to 13 until both displayed ratios are equal and the
red horizontal bar in between the intensity maps is horizontal
15. Gently tighten the four hex head screws that retain the camera and
verify that no further rotation adjustments are required
16. Tighten the screws completely and verify alignment
17. Replace the rubber plugs in the camera access plate
18. Replace all polychromator outer box covers
19. Verify location and focus adjustments are correct.
Adjust as necessary
Proceed to the Varian 720730-ES Series instrument argon ratio
adjustment

Camera rotation for the Varian 710-ES Series instruments


The rotation page samples two primary argon wavelengths, Ar 706.722
and Ar 696.543.
1. Remove the polychromator access cover from the rear of the
instrument
2. Access the focus mirror adjustment screws by lowering the
insulation flap on the polychromator outer box insulation
3. Remove the polychromator outer box camera cover and
polychromator outer box top cover
4. Remove the camera rotation access plugs
5. Remove the rubber plugs from the camera access plate and loosen
the three hex head screws
6. Go to the Rotation page in the Polychromator alignment

Publication date: 10/16/2006 12-40


Varian 700-ES Series Spectrometer

Figure 24. Varian 710-ES Series instruments Rotation folder

7. Ignite the plasma (if required) and aspirate blank solution


8. Adjust the integration time to display bright spots of light on the
crosshair target windows
9. Using the DLA focus mirror adjustment screw and the intensity map,
position the green Ar 706.722nm peak on the horizontal yellow line
10. Using the wavelength focus mirror adjustment screw and intensity
map, position the white Ar 706.722nm spot on the white cross hair
11. Using two 2mm Allen keys adjust the camera rotation screws until
the Ar 706 and Ar 696 green peaks are on the horizontal yellow line
12. Re-position the Ar 702.722nm peak with the DLA and wavelength
focus mirror adjustment screws
13. Repeat steps 10 to 12 until the Ar 706 and Ar 696 green peaks are
on the horizontal yellow line and the Ar 706 and Ar 696 white spots
are on the white cross hairs
14. Gently tighten the three hex head screws that retain the camera and
verify that no further rotation adjustments are required
15. Tighten the screws completely and verify alignment
16. Replace the rubber plugs in the camera access plate
17. Replace all polychromator outer box covers
18. Verify location and focus adjustments are correct

Video clips of the camera alignment procedures can be found on the


Service Training CD, part number 85 101844 00.

Publication date: 10/16/2006 12-41


Varian 700-ES Series Spectrometer

Varian 720/730-ES Series instrument Argon ratio adjustment


The software tool used to align the polychromator argon ratio for the
Varian 720/730-ES Series instruments is the registration page. Argon
ratio is not used in the Varian 710-ES Series instruments. The argon
ratio adjustment positions the focus mirror at the correct position for the
wavelengths of the image to overlay the camera DLA locations. By
moving the focus mirror across the camera DLAs to the position where
the best flat response for all elements is achieved. The DLA adjustment
screw is the only adjustment made to during the argon ratio adjustment.
Note Polychromator and camera alignment will change as the polychromator
temperature stabilizes. Adjustment to the polychromator and camera
assemblies should only be done when the polychromator temperature is
35°C as reported by the Varian 700-ES Series instrument software.
Access to the focus mirror adjustment screws does not require removal
of any polychromator outer box covers. To access the focus mirror
adjustment screws remove the polychromator access cover at the rear
of the instrument.
Note Location adjustments should be complete before attempting focus
adjustments. The optimum nebulizer and pre-optics positions should be
determined and set on the diagnostics quick page before using the set
focus page.
The argon ratio adjustment is the final adjustment in any alignment. The
argon ratio is also set at installation.

1. Remove the polychromator access cover from the rear of the


instrument
2. Access the focus mirror adjustment screws by lowering the
insulation flap on the polychromator outer box insulation
3. Go to the Set Focus page in the polychromator alignment software
4. Ignite the plasma (if required) and aspirate wavelength calibration
solution
5. Under Defaults set INT to 50 msec for axial view instruments and
300 msec for radial instruments.
6. Press Read (if required)
7. Adjust the DLA screw for max intensity at 300 msec int
8. Record argon ratio as displayed
9. Go to the registration page
10. Press read

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Varian 700-ES Series Spectrometer

The registration page will record 100 % intensity for 12 lines


11. Adjust DLA screw until (normally anti-clockwise) until argon ratio is
equal to 0.5
12. Adjust DLA screw in the opposite direction from step 11 until the
argon ratio equals 4.5 to 5.0 Adjust the screw in 0.2 increments
allowing the normalized intensity graphs to update until a flat
response is met. (All 12 elements are displayed at approximately
90% intensity or better).
13. Record the argon ratio when the registration graph shows the best
response for all 12 elements and continue adjusting DLA through to
4.5 or 5.0
14. Reverse the DLA screw adjustment back to the position of best
argon ratio and fine tune the adjustment for best response.
15. Replace all polychromator access plugs and covers
16. Go to the instrument module and perform a dark current scan
17. Perform a wavelength calibration
18. Go to the Torch align page and perform vertical and horizontal torch
scan

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13. Command control
13.1 Introduction
This section provides information on the command control system of
Varian 700-ES Series Spectrometer systems including
• System description
• Theory of operation
• Important information
• Specifications
• Removal and replacement procedures
This information is applicable to all Varian ICP-OES Spectrometer
systems.

13.2 System description


The Varian 700-ES Series spectrometer command and control system
consists of
• 386EX control pwb
• Camera pwb assembly

13.2.1 386EX control pwb


The 386EX control pwb links the PC software to the instrument. The PC
is linked to the instrument through a single IEEE 488 connection to two
on-board processors.
• 12 Mhz 80C32 processor
• 25 Mhz 386EX processor

12 Mhz 80C32
The 12 MHz 80C32 processor and support logic is used to provide an
IEEE 488 to RS 422 serial link for control of the RF interface and gas
control pwbs.
The communications link between the 80C32 on the 386EX control pwb
and the other 80C32 based control pwbs is a 375 kilobits / second,
bi-directional, half-duplex, communications link.
The 80C32 processor supports two types of on-board memory.
• 1 Mb (128kBytes) static random access memory of which only the
first 16k words are addressed.
• 512kb (64kBytes) of ultra violet erasable read only memory.
The UV-EPROM device is configured with an eight-bit data bus
path. This device can not be electronically erased.
Varian 700-ES Series instruments

Figure 1 386EX control pwb basic block diagram

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Varian 700-ES Series instruments

25 Mhz 386EX processor


The 25 Mhz, 386EX processor is used for control and data translation.
The 386EX and its support logic handle communication and control of
the instrument power pwb, pre-optics scanning mirror position,
polychromator functions and the camera pwb.
The 386EX system clock is the 50Mhz crystal OSC1. The OSC1 signal
input at IC7 pin 115 is used by the processor on-chip, clock generation
circuit to provide fundamental timing. The processor’s CLK2 input
divides the 50mhz signal by two to generate the processors operating
clock of 25mhz
The 386EX processor supports three types of on-board memory as well
as a satellite pwb boot block UV-EPROM.
• 8 x 4M bit, (4M Bytes of 8 bits), 70 nsec, Static Random access
memory. The memory integrated circuits are hardwired to support a
16 bit wide data bus path. This memory is used for dynamic data
storage.
• 1 x 4M bit, (256K Words of 16 bits), flash memory.
The flash memory device is connected to a 16 bit wide data bus
path. It can be electronically erased and reprogrammed on a block
by block or byte by byte basis.
• 1 x 2048 bit serial EEPROM.
The serial memory device is programmed on a bit by bit basis and
used for the storage of instrument operating statistics.
• 2 x 512K bit, (64 Kbytes of 8 bits), UV erasable, electronically
programmable, read only memory device.
This memory is located on a satellite pwb.
The 64 KB UV-EPROM’s contain the 386EX boot block kernel and the
supporting hardware and code required to load the 386EX kernel into
the flash memory of the main board.

13.2.2 Camera pwb


The camera pwb links the 386EX-control pwb to the camera detector
assembly. The circuitry includes clock generators and drivers, bias
setting logic for the camera detector, A to D conversion and circuitry for
the parallel to serial conversion of the digitized spectral data from the
detector in preparation for transmission to the 386EX-control pwb.

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Varian 700-ES Series instruments

Figure 2 386EX control pwb data and address paths

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Varian 700-ES Series instruments

13.3 Theory of operation


The Varian 700-ES Series spectrometer systems use the 386EX control
and camera pwb’s for command control of the spectrometer system. The
personal computer to instrument interface is through an IEEE 488 bus,
which provides parallel data transfer at speeds of greater than
1M Byte per second.
The IEEE input is through a single connector on the rear of the
instrument and is directly linked to the two processors located on the
386EX control pwb.

13.3.1 80C32 processor


Communications between the PC and the 80C32 based control pwbs is
controlled on the 386EX control pwb by IC26, an 80C32 microprocessor
operating at a clock frequency of 12 MHz.
The 80C32 has four 8 bit parallel I/O ports.

Port 0 (pins 36-43) Low address/data byte


Port 1 (pins 2-9) Diagnostics and status indicators
Port 2 (pins 24-31) High address byte
Port 3 (pins 10-17) Serial communications, system reset
interrupts and read/write lines

80C32 Memory
Multiplexed data/address information is separated by IC27, which
latches the low address byte on the falling edge of ALE.
Main program storage is provided by:
• IC28, a 27C512 64 kB EPROM
which is accessed when PSEN is low
• IC29, 16 kB static RAM
which is accessed when RD, WR and A15 are low and A14 is high

Communications
Serial communications between this pwb and the slave pwbs is handled
by IC24, an RS-422 bi-directional bus transceiver. The direction of data
through this device (either transmit or receive), is controlled by the state
of output port T0 of IC26, pin 16. When pin 16 is low the microprocessor
is in transmit mode. The conversion from RS-422 serial format data to
parallel bus format data is performed internally in the 80C32
microprocessor through its RXD and TXD ports, pins 11 and 13.
IEEE communication is handled by IC31 a 7210 IEEE controller. This
device handles all IEEE protocol transactions. Two eight bit data
transceivers buffer data flow (IC32) and handshake lines (IC33).
Receive transactions are interrupt driven on presentation of external
data to the 7210. The 7210 chip select is the low state of A14. The 7210
uses a 6 MHz clock generated from a counter on CPLD IC19, pin 38.

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Varian 700-ES Series instruments

Reset
The 80C32 processor and 7210 controller can be manually reset by
switch SW1 and IC5. Closing switch SW1 places a high at IC26 pin 10
and IC31 pin 4 holding the controller and processor in a reset state until
the switch is released. A high at IC6 pin 9 is inverted at pin 8 turning on
LED D10 for the duration of the reset.
IC5 also monitors +5 VDC and resets the processor and controller if the
supply drops below 4.75 VDC.
When the 80C32 is reset it generates a low system reset signal at output
port T1 pin 17. The system reset signal turns off transistor TR4 which
resets the 80C32 on the RF interface and gas control pwbs by turning
off an opto-isolator on each of them.

Power fail
The low power fail signal from the instrument power pwb interrupts the
80C32 microprocessor at INT1, pin 15. This alerts the processor that
there is insufficient power to maintain instrument operation.

13.3.2 386EX processor


The 386EX based processor has eight basic functional blocks
• 386EX memory
• PC to 386EX IEEE communications
• Instrument power pwb control
• Pre-optics scanning mirror control
• Polychromator functions
• Camera assembly power supplies
• Camera simulator test circuitry
• Camera assembly pwb communications
Communications between the PC and 386EX controlled assemblies is
controlled by IC7, a 386EX microprocessor operating at a clock
frequency of 25 MHz. The 386EX is a 32 bit CPU with a 16-bit external
data bus path and 26-bit external address path.

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Varian 700-ES Series instruments

386EX memory
Data and address information are transferred to and from the processor
on separate buses
Main program storage is provided by
• Temporary Data Storage - IC47 - IC 54, 8 x 4 Mbit SRAM which are
accessed through data buffer IC11 and address buffers IC14 and
IC15 when A20 - A22, CS6, BLE or BHE, RD or WR are low.
• Main Program - IC10, 1 x 4 Mbit flash memory which is accessed
when UCS, and OE or WE are low and RP is high.
• Non Volatile Parameter Storage - IC 37, 1 x 2048 bit serial EEPROM
which is accessed through input and output controller IC 36. The
EEPROM is written to on the rising edge of SCK with WP active high
and CS active low. A read is performed on the falling edge of SCK
and CS active low.
The 386EX processor uses a fly by mode of DMA transfer to write data
directly from CPLD IC8 to memory locations. Digitized camera data is
re-converted to parallel format then held in FIFO storage inside IC 8 until
it is transferred to the temporary data storage RAM of IC’s 47-54 by
means of a Fly By Mode (single cycle) DMA transfer.

Figure 3 386EX control pwb memory map and chip selects

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Varian 700-ES Series instruments

Static random access memory


The static RAM devices are configured into four banks of 1 MB each.
Each bank is further divided into two 8 bit data paths. For a given
memory address one chip will store the upper eight bits of a word and
the other IC in the same bank will store the lower eight bits of a word.
Each eight bit byte can be accessed separately or both bytes can be
accessed together as a 16 bit word.
Selection of SRAM banks is through the high and low byte selects
generated by IC8, an in system programmable complex programmable
logic device, (ISP CPLD) (The CPLD is a reprogrammable device based
on flash memory. It is programmed at the factory.)
SRAM selection by IC 8 requires an active low CS6 to pin 2, an active
low WR or RD, and an active BLE or BHE from the processor IC 12
buffers the address lines required to generate the appropriate memory
bank select for correct access.
A read or write and chip select signal together with an active low BLE
from IC7 pin 37 will generate an active low CS at IC8 for the lower byte
of the address selected by the processor. In the case of an active low
BHE from IC7 pin 39, an active low CS for the upper byte of the address
selected will be generated by IC8. When both BHE and BLE are active
low then the entire 16 bit word will be accessed.

A20 Bank 1
A21 Bank 2
A20, A21 Bank 3
A22 Bank 4

The 386EX processor has been designed with a two channel DMA and
bus arbiter unit. One of the DMA channels is implemented for use on the
386EX-control pwb.
A DMA function provides for a fly-by transfer of data from IC8 to the
SRAM address selected by the processor. This feature provides the
ability to write data from the CPLD directly to memory without having to
load the data into the processor first.
The DMA write cycle control signals are the same as a 386EX write
cycle. The processor provides chip selects, address information and a
WR control signal. A NEWDATA signal from IC8 pin 78 requests the
start of the DMA process. The processor DMA unit responds with an
active high DACK0 at IC7 pin 128. The high at IC7 pin 128 indicates the
start of the DMA write cycle. Data from IC8 at pins 92-114 is placed on
the data bus for transfer to memory.

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Varian 700-ES Series instruments

Flash memory
The flash memory device is designed with seven memory blocks.
• 1 x 8 Kword boot block
• 2 x 4 Kword of parameter blocks
• 1 x 48 Kword of main block
• 3 x 64 Kword of main blocks
The boot block contains the 386EX processor kernel and is hardware
interlocked. The kernel contains the configuration data required to ‘boot’
up the 386EX control pwb.
Write and erase access of boot block flash memory locations is limited to
when the 386EX control pwb is powered up with a boot block
programmer module attached to connector SK12.
The boot block programmer module pulls SK12 pin C16 low. This
initiates a sequence at 386EX power up which allows the BOOT BLOCK
programmer module UV-EPROM to load the 386EX kernel into the boot
block flash memory. Once loaded, the programming module can be
removed and the 386EX system re-booted from the flash memory boot
block.
The instrument parameter blocks of the flash memory module are not
used.
The main blocks of the flash memory contain the firmware code required
for routine instrument power up, functional checks and all operational
386EX processor based instrument functions.
The main blocks of the flash memory can be updated as required by PC
software through the IEEE connection. This enables remote updating of
the 386EX control pwb firmware.

Serial EEPROM
IC37 the 386EX control pwb serial EEPROM is used as an instrument
statistics store. The EEPROM is used by the 386EX processor through
IC36 to store and monitor instrument statistics. The statistics can be
viewed through PC diagnostics software.
• Instrument serial number
• Instrument installation date
• 386EX control pwb installation date
• Last preventative maintenance date
• Filament operating hours
• Plasma on hours
• Polychromator shutter open hours
• Hours since last replacement of each gas filter
• Camera board serial number
• Camera board installation date
• Camera serial number
• Camera installation date.
These values are entered and tracked by the PC instrument software.
The values are then loaded into the EEPROM on the 386EX control
pwb.

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Varian 700-ES Series instruments

PC to 386EX IEEE Communications


Parallel IEEE data is buffered by IC34.
A 7210 GPIB controller IC44 handles IEEE 488 parallel communications
between the 386EX processor and the PC. This device handles all IEEE
to 386EX protocol transactions. Two eight bit data transceivers buffer
the data flow (IC45) and handshake lines (IC46). Receive transactions
are interrupt driven on presentation of external data to the 7210. The
7210 chip select is the low state of ICS2 from IC8 pin 14. The 7210 uses
a 6 MHz clock from a counter created in CPLD IC 19 and output at pin
38.

Reset
The 386EX processor, 7210 GPIB controller and two I/O controllers can
be manually reset by switch SW1 and IC5. Closing switch SW1 places a
high at IC7 pin 110 holding the controllers and the processor in a reset
state until the switch is released. IC5 also monitors +5 VDC and resets
the processor and controller if the supply drops below 4.75 VDC.
The active high reset signal from IC5 pin 5 through IC6 pin 6 turns on
TR3 and sets flash memory IC10 pin 44 low. The low at IC10 pin 6
protects the flash against unwanted command writes due to invalid bus
conditions during reset or power down.
IC5 also contains a 1200 msec watchdog timer. IC7 pin 40 is the
address strobe signal set by 386EX firmware code. If IC5 pin 7 is not
toggled within the 1.2 second time interval, IC5 will reset the 386EX
control pwb. A reset under this condition indicates the processor has
stopped functioning.
A reset condition at IC5 pin 5 will result in re-booting the 386EX control
pwb.

Diagnostics switch and LED readout


D25 is a seven segment LED display that indicates the status of the
386EX control pwb. If a fault occurs at power-on, while loading the flash
memory or during normal operation the LED will display an error code.
Failure of the 386EX processor will result in the display remaining blank.
IC36 will not be intialized. Pins 41 and 42 will be high and LED D25 will
have all segments turned off.
The decimal point on D25 is turned on by the +5 VDC power supply. If
the LED display is clear and the decimal point off, the +5 volt supply may
have failed.
SW3 is a 16 position rotary switch used to select various diagnostics.
The 386EX processor only reads the switch status at power-on. Select
position 0 for normal operation. Refer to section 7, Diagnostics, of this
manual for more information on switch positions and diagnostic tests.

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Varian 700-ES Series instruments

Instrument power pwb


The 386EX processor provides control signals to and receives data from
the Instrument Power pwb. All the instrument power pwb related control
and data signals pass through a single connector located on the 386EX
control pwb labeled PL7.

Instrument Power pwb inputs


Power fail PL7 pin 14 5 VDC (Active power failure)
PLL input PL7 pin 32 1 kHz squarewave
Casting temperature PL7 pin 16 -0.7 VDC to 5.7 VDC
Peltier temperature PL7 pin 24 -0.7 VDC to 5.7 VDC

Instrument Power pwb outputs


PLLFB PL7 pin 30 50 Hz mains
60 Hz mains
Shutter drive PL7 pin 2 0 VDC
(Active shutter drive)
Shutter direction PL7 pin 4 5 VDC (+12 VDC to solenoid)
0 VDC ( -12 VDC to solenoid)
Filament volt PL7 pin 6 5 VDC (Filament 6.3 VRMS)
0 VDC (Filament 6.1 VRMS)
Peltier on PL7 pin 8 5 VDC (Peltier OFF)
0 VDC (Peltier ON)
Heater enable PL7 pin 12 5 VDC (Poly box heater OFF)
0 VDC (Poly box heater ON)
Temp A PL7 pin 20 6.1 VDC to 7.6 VDC
Temp K PL7 pin 22 0 VDC

PLL input
The PLL 1 kHz input at PL7 pin 32 is a squarewave input used to
synchronize camera integration times. The 386EX processor uses the
PLL input to determine when to begin each integration.
The instrument power pwb circuitry generates the 1 KHz signal in a
Phase Locked Loop (PLL) circuit. The 386EX board divides the 1 KHz
signal by either 17 or 20, (for either 60 or 50Hz mains frequency
respectively), and returns the 50/60Hz signal to the power board to
complete the feedback loop.
The signal is used to start each integration at the same mains phase
angle. The processor then begins each integration at the same count of
the 250 Hz input.

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Varian 700-ES Series instruments

Casting temperature
The casting temperature is input to the 386EX-control pwb as a
differential analog voltage at PL7 pins 16 and18. The voltage at the
connector is input into DAC IC40, (pin 3 sig+, pin 4 sig-), and is
proportional to the temperature of the polychromator casting. The
temperature voltage from the instrument power pwb is between -0.7
VDC to 5.7 VDC.
IC40 is an eight bit serial A/D converter configured with two differential
and 4 single ended input channels. The A/D converter has multiplexed
data output. The DAC is used to convert the analog casting temperature
voltage from the instrument power pwb into an eight bit serial data
stream that is clocked into the 386EX processor through I/O controller
IC36 for use by the PC software..
The appropriate channel of the A/D converter is selected by a five bit
serial input at DI (pin 17). The 5 bit command is clocked into the on-chip
register by the rising edge of the CLK input and the low going edge of
CS. This initiates the conversion process and the serial output to pin 14,
(DO) of the 8 bit digital data.

Peltier temperature
The PLLFB signal is a 50 or 60Hz signal generated by IC8 on the
386EX-control pwb and output through IC30 pin 11 to the instrument
power pwb at PL7 pin 30. The PLLFB signal is used by the power PWB
as the feedback it requires to complete the PLL closed loop. The
50/60Hz signal is derived from the 1KHZ input (1KHZ INT) by a circuit
that divides by 17 if the input ‘50/60’, IC8 pin 15, indicates a 60Hz mains
input frequency (LOW), or by 20 if the input indicates 50HZ mains
frequency (HIGH).
Refer to section 14 of this manual for more details on the mains zero
crossing circuitry.

PLLFB
The PLLFB signal is generated by IC8 on the 386EX control pwb and
output through IC30 pins 11, 12 and 13 to the instrument power pwb at
PL7 pin 30. The PLLFB signal is used to synchronize the instrument
zero mains crossing with the 1 kHz INT counters on the 386EX control
pwb. The two signals are synchronized differentially by a voltage
controlled oscillator circuit on the instrument power pwb. The PLLFB
signal is also used by the 386EX processor to ensure the instrument
mains zero crossing signal is in phase with the 386EX counting circuits.
CPLD IC8 counts the 1 kHz INT squarewave input transitions and
outputs a variable mark / space ratio signal output at IC8 pin 57 to IC30
pins 12 and 13. The output at IC30 pin 11 is inverted and provides a
digital reference to the 386EX processor and instrument power pwb
VCO.
Refer to section 14 of this manual for more details on the mains zero
crossing circuitry.

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Varian 700-ES Series instruments

Shutter drive (Varian 720/730-ES Series instruments only)


Shutter drive is generated by IC7 through IC41 pin 20. The active high
shutter drive signal is inverted by IC 39 and output to the instrument
power pwb at PL7 pin 2. The signal powers the shutter drive circuitry on
the instrument power pwb.
Refer to section 14 of this manual for more details on the shutter drive
circuitry.

Shutter dir (Varian 720/730-ES Series instruments only)


Shutter dir is generated by IC7 through IC41 pin 26. The active shutter
dir signal is inverted by IC 39 and output to the instrument power pwb at
PL7 pin 4. The signal provides directional shutter information to the
shutter drive circuitry on the instrument power pwb.
Refer to section 14 of this manual for more details on the shutter drive
circuitry.

Filament volts
Filament volts is a select signal generated by IC7 through IC41 pin 21.
The filament volts signal is inverted by IC 39 and output to the
instrument power pwb at PL7 pin 6. The signal is used to select the
filament voltage power supply output level on the instrument power pwb.
The filament volts signal at IC39 pin 11 is set active low when the PC
software has recorded 200 hours of filament operation.
An active low filament volts will reduce the filament voltage power supply
output from 6.3 volts true RMS to 6.1 volts true RMS.
Refer to section 14 of this manual for more details on the filament
voltage power supply circuits.

Peltier ON
Peltier On is generated by IC7 through IC41 pin 22. The active high
peltier on signal is inverted by IC 39 and output to the instrument power
pwb at PL7 pin 8. The signal enables the peltier drive circuitry on the
instrument power pwb.
Refer to section 14 of this manual for more details on the peltier drive
circuitry.

Heater enable
Box heater enable is generated by IC7 through IC41 pin 25. The active
Box heater enable drive signal is inverted by IC 39 and output to the
instrument power pwb at PL7 pin 12. The signal enables the
polychromator box heater circuitry on the instrument power pwb.
Refer to section 14 of this manual for more details polychromator outer
box heater circuitry.

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Varian 700-ES Series instruments

50/60 Hz indicator to CPLD IC8


The 386EX processor generates the 50/60 Hz signal on the 386EX
control pwb at IC41 pin 28.
This input to IC8 is used to determine the divider ratio used to generate
the PLLFB signal.

Pre-optics vertical and horizontal drives and home positions


The pre-optics stepper motors are software driven by the Darlington
drivers on IC42 and IC43 which buffer the Drive signals from IC 41.
Home position for the horizontal pre-optics stepper motor is detected
when a flag mounted on the horizontal pinion passes through an opto
sensor mounted on the pre-optics casting. The state of the sensor is
monitored by IC36. When the flag passes through the edge of the
aperture, the software removes the stepper motor drive signals.
Any further repositioning of the mirror is then accomplished by counting
the number of steps taken from the home flag in the direction desired.
The number of steps taken to position the mirror in the desired location
is determined by PC software.
The horizontal home position on a RADIAL instrument is a pre-optics
height of 20 mm.
The horizontal home position on an AXIAL instrument is a pre-optics
height of 0 mm.
Home position for the vertical pre-optics stepper motor is detected when
a flag mounted on the vertical camshaft passes through an opto sensor
mounted on the pre-optics casting. The state of the sensor is monitored
by IC36. When the flag passes through the edge of the aperture, the
software removes the stepper motor drive signals.
Any further repositioning of the mirror is then accomplished by counting
the number of steps taken from the home flag in the direction desired.
The number of steps taken to position the mirror in the desired location
is determined by PC software.
The vertical home position on both AXIAL and RADIAL instruments is
0 mm.

Polychromator output
The 386EX control pwb provides on and off control of the Full
illumination LED that is mounted in the polychromator assembly.

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Varian 700-ES Series instruments

Full illumination LED


The LED is used as a basic diagnostics tool to verify the simple
operation of the camera assembly, camera pwb and 386EX control pwb
interface.
The LED is located directly in front of the camera assembly and supplies
a broad band source of light that illuminates the entire camera
assembly. When turned-on all the camera pixels are illuminated with
light. The active state of the camera assembly can be viewed through
the PC interface software.
The LED is activated by an active high at IC36 pin 11. IC39 pins 1 and
16 invert the high. The output of IC39 is connected to the LED through
PL6 pin 1 and provides a current path for the + 5 VDC supply at PL6 pin
16.

386EX Camera assembly


The 386EX control pwb provides regulated power supplies and control
signals to the camera pwb. The 386EX control pwb also receives control
signals and serial data from the camera pwb. All the camera pwb inputs
and outputs pass through a single connector located on the 386EX
control pwb labeled PL3.

Camera assembly power supplies


Relay RLA is a 12 VDC relay with a coil that is driven by transistor TR5.
The coil controls contacts that when closed supply the camera assembly
with ± 15 VDC. LED D8 on the 386EX control pwb indicates that the +15
VDC relay contacts are closed. LED D7 on the 386EX control pwb
indicates that the -15 VDC relay contacts are closed.
The relay controlled supplies are connected to the camera pwb through
SK3 pins 14 and 32 as well as pins 16 and 34. The relay is controlled by
the PC software through IC41 pin 27. An active high at pin 27 is inverted
by IC25 pins 8 and 9 turning on TR5. When TR5 is on, the relay coil on
RLA is active and the relay contacts are closed.

Temp Amp+ & Amp-


The camera assembly temperature is sensed by measuring the voltage
drop across a temperature sensing diode that is part of the camera
assembly. An amplifier circuit on the camera PWB amplifies the diode
voltage drop. The output signal is passed through the processor board
and on to the power pwb where it is used by the peltier control circuitry.
The peltier control circuit uses the temperature feedback signal to
maintain a constant camera temperature of 35 C.
The temp Amp - signal is the earth reference between the temperature
sensing diode amplifier and the power board.
Temp Amp+ is input to the 386EX-control pwb at SK3 pin 11 and output
to the instrument power pwb at PL7 pin 20.

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Varian 700-ES Series instruments

Camera pwb simulator


The 386EX control pwb includes circuitry that forms a camera assembly
simulator. The simulator has been designed as a stand-alone test circuit
that simulates camera pwb data and control functions. For details on the
implementation of the simulator circuits refer to the diagnostics and
troubleshooting section of this manual.
The simulator replaces the camera and camera board of the instrument
for test purposes. The simulator when combined with the PC software
tests the camera assembly power supplies, socket SK3, the
interconnecting cable, and 386EX control pwb.

Caution The instrument power switch must be turned off before


disconnecting or connecting the 386EX to camera pwb cable.

Running the simulator requires a CSR to remove the cable connection


from camera board and then plug the cable connector into test plug PL4
on the front of 386EX control board.
The simulator generates all the data clocks and handshaking required to
clock data from the PC, store it temporarily, and then clock it back out to
the PC as though the camera and camera pwb were in place.
+ 5 VDC from IC1 pin 3 is connected to SK3 pins 18 and 36. When the
camera interconnecting cable is connected from SK3 to SK4, + 5 VDC is
supplied to pin 8 of IC19. An active high on this pin enables the 12 MHz
clock output to the simulator circuit at IC20 pin 12.
Using the PC software, a word is sent from the PC through the IEEE
interface to storage in the FIFO RAM (IC17 and IC18). Handshaking
protocols are then simulated to convert the data to into a serial stream
and transmit the data through IC22 to the camera simulator receiver
IC21.
The data is then clocked into a shift register on CPLD IC19. The
simulated camera word is then held by IC19 for a period of 15 clock
pulses and clocked serially back through transmitter IC20 to receiver
IC23. The data is then converted back to parallel format and transferred
to system memory.
The simulator offers obvious advantages as it allows the service
engineer to test the complete hardware functionality of the processor
board without removing anything from the instrument.

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Varian 700-ES Series instruments

13.3.3 Camera pwb


The camera pwb is different between the Varian 710-ES Series
instruments and the Varian 720/730-ES Series instruments. For details
on the operation and function of the camera assembly refer to the optics
section of this manual.

13.3.3.1 Camera pwb for the Varian 720/730-ES Series instruments


The camera pwb module for the 720/730 series instruments has been
designed to provide the camera assembly with
• bias voltages
• serial input and output data
• data buffers
• analog to digital conversion of camera voltage levels
• decoding support for 386EX control pwb command and control
signals

386EX to Camera pwb


The PC sends parallel commands for the camera assembly through the
IEEE 488 connection. The 386EX processor retrieves the parallel
command and generates instructions for the camera assembly. The
handshake process begins as a result of this command.
The 386EX processor generates a 16 bit data word for use by the
camera pwb. The 16 bit word is placed on the data bus and loaded into
FIFO registers IC17 and IC18. The presence of data in the FIFO signals
IC8 by setting the active low Empty Flag (IC17, pin 24) high. The
conversion and transfer cycle begins from this trigger.
The first, 16 bit word is then transferred read from FIFO memory by an
active going high at IC8 pin 143.
These commands are then converted to a 16 bit serial stream for
transmission to the camera board. The parallel to serial converter that
performs this task is implemented in IC8.
One clock after RDFIFO goes active high; data from the FIFO registers
is transferred into IC8 via the C bus. When RDFIFO goes high, the
internal BUSY and the external EXECUTE signals go active. EXECUTE
is the signal to the camera pwb requesting that the camera assembly
execute a function.
One clock later RDFIFO goes inactive and the EXECUTE signal is seen
by the camera pwb. The camera pwb CPLD responds by driving the
signal CMDLD active low. CMDLD signals IC8 to load an internal 16 bit
shift register with the now latched parallel command.
The shift register in IC8 is continuously clocked with the signal CLK_IN
and clocks out the serial data on the output line SCMD. SCMD is the
serial output line to the camera board.

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Varian 700-ES Series instruments

The camera board counts the input data stream and when the camera
pwb recognises 16 bits have been transferred the camera CPLD sets
the signal DONE active low. An active low DONE at IC8 on the 386EX
control pwb resets IC8’s internal parallel to serial converters and clears
the EXECUTE signal.
CMDLD is released by the camera board after EXECUTE falls. The
DONE signal from the camera pwb returns inactive and clearing IC8’s
internal BUSY signal.

Camera pwb to 386EX control pwb


Serial to parallel conversion is performed on the incoming camera data.
Data is clocked into the receiving register on the SDATA line using the
bit clock, CLK_IN. The input register is an internal serial in, parallel out,
8-bit shift register located on IC8. Two of these registers are chained
together to provide 16 bit storage.
The camera board handshakes the data in with a DATA_WR signal.
DATA_WR clocks the parallel output of the shift registers into a 16 bit D
FF output register. The output register is connected to the output bus,
TRI_DATA via an on-chip tri-state buffer. This buffer is enabled when
requested by the TRI_EN signal. TRI_EN is the DATA_EN output from
IC8 pin 153 delayed by IC35.
Nonsense data is continually clocked from the camera assembly to the
input registers on IC8 through the SDATA line. After transmitting16 bits
of real data into the input registers the DATA_WR signal is pulsed active
low. The DATA_WR signal acts as the clock for the storage register.
Upon DATA_WR going active low IC8 generates the signal NEW_DATA
to indicate externally that converted data is available in the parallel
output register.
The processor controls the output from IC8 into memory through a fly-by
DMA transfer cycle. The NEW_DATA signal is connected physically to
the processor DRQ0 input. An active high signal here causes the
processor to initiate a DMA cycle is commenced with the processor
driving DACK0 low.
When DACK0 is low, the TRI_DATA output bus is connected to the data
bus by TRI_EN. The IO_DATA_EN is used to drive the TRI_EN active
high. This operation clears the NEW_DATA flag.
As the DMA cycle is really a memory write operation, data on the data
bus is written to the addressed SRAM location. As the cycle is a Fly By
one, the register access and the memory write all occur in the one cycle.

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Varian 700-ES Series instruments

13.3.3.2 Camera interface pwb for the Varian 710-ES Series instruments
The Camera Interface PWB (ASSY 02-101670-00) is the interface
between the PWB Camera CCD Daughterboard and the PWB 386
Control. The PWB Camera Interface generates bias and clock signals
for the CCD, and performs signal conditioning and analog-to-digital
conversion of the CCD video outputs. The PWB Camera Interface
receives instructions from the PWB 386 Control, generates the
appropriate clock sequences, and returns CCD image data (if
requested).

Details of cables to/from the PWB Camera Interface


A 37-way shielded cable is connected between P2 on the PWB Camera
Interface and SK3 on the PWB 386 Control. This 37-way cable carries
the following signals:
• 16Mbit/s serial I/O (Differential PECL logic)
• +5V logic supply for PWB Camera Interface
(excluding PECL serial I/O)
• ±15V analog supply for PWB Camera Interface
• CCD thermistor connection (2 wires)
The +5V logic supply is provided by a 5V linear regulator on the PWB
386 Control, from the +12V OEM switching supply. The ±15V analog
supplies are provided by linear regulators on the PWB 386 Control from
the instrument ±20V supplies. Unlike the Vista instrument, the ±15V
analog supplies are not switched via relay.
A 10-way ribbon cable is connected between P3 on the PWB Camera
Interface and PL14 on the PWB 386 Control. This 10-way cable carries
the following signals:
• XILINX gateware download (performed automatically, after
instrument power-up)
• +5V supply for PECL serial I/O on PWB Camera Interface
A 50-way ribbon cable is connected between J6 on the PWB Camera
Interface and J3 of the PWB Camera CCD Daughterboard. This 50-way
cable carries the following signals:
• CCD supply voltages and bias voltages
• CCD video output
• CCD parallel and serial clocks
• CCD temperature thermistor
• Daughterboard Serial EEPROM I/O
• CCD analog ground

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Varian 700-ES Series instruments

A 15-way ribbon cable is connected between P1 on the PWB Camera


Interface and the PWB Power/Control Board. This 15-way ribbon cable
carries the following signals:
• +26V supply (used to generate CCD supply voltages and bias
voltages)
• Control lines for shutter & Full-illumination LED drivers, on PWB
Power/Control.
The following sub-headings refer to the sheet titles of the PWB Camera
Interface circuit diagram.

Analogue & ADC


There are four Analogue & ADC circuits (channels), one for each of the
four CCD quadrants A, B, C & D. Each Analogue & ADC circuit is
identical, so only channel A will be described here. The function of the
Analogue & ADC circuit is to take the CCD quadrant video output and
subject it to signal conditioning and amplification, prior to 16-bit Analog-
to-Digital conversion. The op-amps U101 to U104 and the analog
switches in U105 are powered by the ±15V supplies. The linear
regulator U107, provides 5V, from the +15V supply, to power the 16-bit
Analog-to-Digital Converter (ADC), U106.
The voltage at VIDEO_A1, during CCD readout, is depicted below:

During the 7.5us clamp period, i.e when CLAMP ≈3V, the analog switch
U105B is closed and the video clamp level (15.5V in the diagram) is
stored across C105. U101 has a gain of +11 and U102 and U103 each
have a gain of +1. Shortly after CLAMP goes low, and U105B opens, the
voltage at VIDEO_A2 settles to a voltage equal to the magnitude of the
video signal (0.03V to 0.65V) x 11, i.e. in the range of -0.33V (video
black level) to -7.2V (video white level). 1.5us after CLAMP goes low,
SAMPLE goes high (≈ 3V), closing switch U105D, and charging the
sample capacitor, C137, via R109 (SAMPLE_RST is low, and U105A is
open). SAMPLE is high for 7.5us, during which time the voltage across
at U103 Pin6, approaches the voltage at VIDEO_A2 (i.e. in the range
-0.33V to -7.2V). U104 has a gain of -1.42, giving a voltage at
VIDEO_A3 in the range of +0.5V (black level) to +10V (white level).
Shortly before U105D is opened, U106 acquires the voltage present at
VIDEO_A3, and begins a conversion. Shortly after U105D is opened,
SAMPLE_RST goes high (≈ 3V), closing U105A and discharging the
sample capacitor, C137, via R111 (SAMPLE_RST is high for 10.5uS).
Some operations are overlayed, to achieve 50kPixels/second/quadrant
read rate. For example: ADC conversion and SAMPLE_RST for one
pixel take place, while clamping is performed on the next pixel.

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Varian 700-ES Series instruments

Analogue & ADC Test Points


*These voltages are valid only when CCD read not taking place

TP Name Function Voltage TP number


Video_1 CCD video output 15 – 16 V 101, 201, 301, 401
Video_2 Sample cap drive ~0V* 102, 202, 302, 402
Video_3 ADC input voltage ~0.04V* 103, 203, 303, 403
CLAMP Clamp sw Ctrl ~3V 614
SAMPLE Sample sw Ctrl ~0V 616
SAM_RST Sample reset Ctrl ~3V 615

Bias Voltages & Power Supplies


The linear regulator, U701 provides +23.5V from the +26V input from the
PWB Power/Control. LED10 is ON when the +23.5V supply is ON. The
+23.5V supply is enabled, only when the +15V supply is on, via Q741,
which pulls U701 Pin3 low to enable. Two 10V references (U791 and
U792) are connected in series to give a 20V reference for U705 and
U710, which supply the CCD Output Drains (20VDC). Resistive dividers
formed by R720/R721 and R730/R731 provide reference voltages for
U706A and U706B which supply the CCD Reset Drain (12VDC) and
Output Gate (3.5VDC), respectively.

Test points related to CCD bias voltages and power supplies


TP name Function Voltage TP number
+26V Inp from Power pwb +26V approx 550
+23.5V Output from U701 +23.5V approx 721
+15V +15V supply +15V approx 1
AGND Analog ground 0V 4, 903
-15V -15V supply -15V 5
OD_A Output drain (QA) +20V 706
OD_B Output drain (QB) +20V 709
OD_C Output drain (QC) +20V 710
OD_D Output drain (QD) +20V 711
RD Reset drain +12V 707
OG Output gate +3.5V 708
+V_CLK Serial/Parallel clk + +11.7V 704
-V_CLK Serial/Parallel clk - -11.7V 703
+5V_AS 5V analog switch rail +5V 705

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Varian 700-ES Series instruments

The linear regulator, U703 provides a 5V output from the +15V input.
The +5V_AS power supply is used by the analog switches controlling
the CCD parallel and serial clocks. U704 generates a +11.7V output
from +15V, and U707 generates a -11.7V output from -15V. The ±11.7V
supplies are used to power the op-amps which drive the CCD parallel
and serial clocks.
U708 is a 10V reference for U709, an 8-channel, 8-bit Digital-to-Analog
Converter (DAC). Each of the eight DAC outputs (OUT0 to OUT7)
provide voltages in the range 0-10V; the actual voltage levels are
programmed from software. The DAC outputs are set-up from the
XILINX via the 3-wire serial interface on U709 pins 9,10 & 15. The DAC
output voltages determine the amplitude of the CCD parallel and serial
clocks.

386 PWB interface


Communications between the PWB 386 Control and the PWB Camera
Interface take place over the serial interface on the 36-way shielded
cable. The serial interface uses Positive Emitter Coupled Logic (PECL),
enabling operation at a data rate of 16Mbits/second. PECL transmitter,
U502, and PECL receiver, U501 send and receive the serial hardware
handshaking communications between the PWB 386 Control and the
PWB Camera Interface. When the PWB 386 Control issues a command
to the PWB Camera Interface, the latter immediately echoes back the
command, and then executes the command. The results of any analog-
to-digital conversion taking place on the CCD video outputs, are also
returned to the PWB 386 Control, via this communications link. Both
U501 and U502 are powered from the +5V_386 supply, which is from
PWB 386 Control 5V logic supply.

U503 is a buffer for downloading the XILINX gateware from the PWB
386 Control via the 10-way ribbon cable. The Jumpers JP501 & JP502
are not loaded.

386 PWB interface Test Points


TP Name Function Voltage TP number
+5V_386 +5V PECL supp +5V 6
GND_386V GND 0V 7

XILINX control
U603 is a 3.3V Xilinx Spartan Field Programmable Gate Array (FPGA).
It is re-programmed, from the PWB 386 Control via the 10-way ribbon
cable, each time the instrument is turned on. Once programmed, the
XILINX performs the following functions:
• Serial communications to/from PWB 386 Control
• CCD parallel and serial clock timing
• Setting of CCD parallel and serial clock amplitudes (via U709 DAC)
• Analog switch and ADC timing for each Analog & ADC channel
• Status LEDs (LEDs 1 to 4 and LEDs 5 to 8)

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Varian 700-ES Series instruments

• Instrument Shutter & Full-illumination LED control


• Programming of Serial EEPROM on PWB Camera CCD
Daughterboard

Status LED operation


(Note: All LEDs are ON until the XILINX is programmed)
LED9:On when shutter open LED4 reserved
LED7:On when full illum LED ON LED2 reserved
LED6:On when XILINX running LED1 reserved
LED8 LED3 reserved

The linear regulator, U601 provides the +3.3V XILINX supply from the
+5V supply. LED5 is ON when the +3.3V supply is ON. The +3.3V
supply is enabled, only when the +15V supply is present, via U601 Pin5.

XILINX control Test Points


TP name Function Voltage TP number
+5V +5V logic (not PECL) +5V 2
+3.3V +3.3V XILINX supply +3.3V 610
+15V +15V supply +15V 1
GND Digital ground 0V 641
The jumper JP621 is not loaded

Parallel Clocks
The three CCD parallel clocks, P1V_IM, P2V_IM and P3V_IM are used
to shift charge towards the serial registers during CCD readout, and to
minimise charge blooming during integration. The amplitudes of the
parallel clocks are determined by the outputs of the 8-channel DAC,
U709. As the DAC outputs are uni-polar (i.e. in the range 0 to 10V),
U801B, U802A & U803B, each have a gain of -1, to provide negative
clock rails (adjustable from 0 to -10V). U801A, U803A have a gain of +1,
to provide the positive clock rails (adjustable from 0 to +10V). The
analog switches, U804, U806, and U808 are used to select which clock
rail is switched to the input of the HA9P5002 buffers, which drive the
CCD parallel clocks. P1V_IM and P2V_IM are tri-level clocks, whereas
P3V_IM is a bi-level clock. P3V_IM will be at -8V during integration,
whereas P1V_IM & P2V_IM are toggled during integration. At all other
times, all parallel clocks are active: to either read the CCD, or clear the
CCD. The low-pass filter networks formed by the 2k2 resistor and 1nF
capacitor, prior to the HA9P5002 buffers, are used to shape the clock
waveforms, to minimise peak current required to drive the CCD.

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Varian 700-ES Series instruments

Parallel Clock Test Points (clock rails)


Name Function Voltage Number
V_P12_H High for P1V and P2V 5V typ 801
V_P12_L Low for P1V and P2V -8V 821
V_P12_M Med for P1V and P2V 0V 841
V_P3_H High for P3V 5V typ 861
V_P3_L Low for P3V -8V typ 881

Note that parallel clocks P1V_ST, P2V_ST and P3V_ST are not used,
and components associated with these clocks are not loaded on the
PWB.

Serial Clocks
The parallel clocks move charge toward the serial registers, and the
serial clocks move charge towards the output amplifiers. The amplitudes
of the serial clocks are determined by the outputs of the 8-channel DAC,
U709. As the DAC outputs are uni-polar (i.e. in the range 0 to +10V),
U902A and U902B have a gain of -1, to provide negative clock rails
(adjustable from 0 to -10V). U901A has a gain of +1, and provides the
positive clock rail (adjustable from 0 to +10V). The analog switches,
U903 and U904 are used to select which clock rail is switched to the
input of the HA9P5002 buffers, which drive the CCD serial clocks. The
low-pass filter networks formed by the 1k or 1k2 resistor and 100pF
capacitor prior to the HA9P5002 buffers, are used to shape the clock
waveforms, to minimise peak currents required to drive the CCD.
Serial Clock Test Points (clock rails)
Name Function Voltage Number
V_PXH_H High for all serial clocks 6V 920
V_PXH_L Low for all serial clocks -8V 960
(except RG)
V_RG_L Low for RG 0V 980

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Varian 700-ES Series instruments

13.3.3.3 Camera CCD Daughterboard


for the Varian 710-ES Series instruments
The PWB Camera CCD Daughterboard (ASSY 02-101690-00) is
mounted in the polychromator. It provides physical support for the 28-pin
CCD package, and connects to the PWB Camera Interface via a 50-way
ribbon cable, and DB50 socket, J3. Other electrical connections to the
PWB Camera CCD Daughterboard are via QC connectors, providing
power to the 2-stage peltier device within the 28-pin CCD package, and
a CCD package gournd. The 2-stage peltier cooler is used to cool the
CCD to -30°C during operation.
The 50-way ribbon cable carries clock and bias signals to the CCD and
returns 4 video outputs (one video output per quadrant), from the CCD.
The video outputs are buffered by emitter followers Q1 to Q4, providing
a low impendence video output to drive the inputs on the PWB Camera
Interface. The 50-way ribbon cable also connects the CCD temperature
sensor (thermistor) to the PWB Camera Interface -> PWB 386 Control -
> PWB Power/Control, where it is used to control the 2-stage peltier
device. If the polarity of the peltier supply is accidently reversed, D1
becomes forward biased, and prevents the peltier from accidentally
heating the CCD. D2 to D10 provide some ESD protection for certain
CCD inputs, however anti-static precautions must be observed when
handling the Daughterboard to prevent damage to the CCD .
U2 is a 2K*8 serial EEPROM which is used to store the CCD serial
number, and may be used to store other relevant data. The various
capacitors on the PWB are used for filtering of power supplies and bias
voltages.

13.4 Important information


It is essential that the methods described in this section are used when
servicing these assemblies.
Ensure that the two screws securing the IEEE connector to the
instrument chassis are fully tightened when installing or replacing
the IEEE plug on the rear of the instrument.
Carefully route the ribbon cable from the IEEE connector. Poor routing
can cause corrupted data or communications control information.
Carefully route the ribbon cable from the camera pwb to the camera
assembly. Poor routing can cause corrupted data or
communications control information if the bias resistors mounted on
the ribbon cable at the camera assembly make contact with
polychromator casting or outer box.
Carefully route the ribbon cable from the camera pwb to the camera
assembly. The cable is brittle in nature and kinks or folds in this
cable may damage the cable and camera assembly.
Ensure that the cabling from the 386EX control pwb to the camera pwb
is reconnected correctly after working with the camera simulator, or
replacing the 386EX control pwb or camera pwb. A loose
connection may cause damage to modules. Also ensure that you
route the camera cable as far as possible from the igniter box, to
avoid any electrical interference from the spark generator.

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Varian 700-ES Series instruments

13.5 Specifications
Communications
IEEE-488 Between PC and instrument
RS-422 375 k Baud serial link between the five
microprocessor-based pwb assemblies

13.6 Removal and replacement procedures


Access to and removal of the 386EX control pwb and camera pwb
assemblies is not difficult and no detailed information is needed to
remove either of the assemblies.

Upgrading 386EX control flash memory


Flash memory can be updated via the IEEE communications port on the
main instrument control board using a PC and a download utility
program.
The firmware program is structured in two parts:
1. Boot block - located in a protected part of Flash memory
2. Instrument operating block - easily accessed in the Flash memory
The Boot block is a core set of commands which allows minimal
operation of the electronics. The Boot block is not likely to change.
The instrument operating block is the major part of the firmware which
controls the instrument operation. This block may change as new
hardware or software features are added.

Updating the Boot Block


For the rare occasions when the Boot Block requires updating to a later
version, a Boot Block Programmer module, part number 02 101500 90 is
needed. The Boot Block Programmer contains two IC sockets which
hold the UV-EPROMs containing the 386EX kernel to be programmed.
The Flash memory boot block is automatically reprogrammed with a
block of code stored in the Programmer Module UV-EPROMs.
The Programmer Module when plugged in, causes the remap the Flash
memory chip select pins so that the processor executes code from the
Programmer UV-EPROMs at power-on.
To upgrade the Boot Block of a board:
1. Turn off the instrument and remove the lower right hand side cover
2. Plug the Boot Block Programmer (BBP) into plug SK12 on the
386EX control pwb.
3. Check the UV-EPROMs on the Boot Block Programmer are the
required revision level.
4. Turn on the instrument.
5. When the instrument has finished initializing, after approximately two

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Varian 700-ES Series instruments

to three minutes, the Boot Block will be programmed and the LED
on the BBP will be flashing ‘.0’.

Updating the Instrument Operating Block


To update the Instrument Operating Block of firmware requires
• A PC connected to the IEEE port on the instrument
• The firmware Download Utility program, DLFW.exe, which is
available on the SpectrAA intranet site
• The updated patch or version of firmware code

Procedure
1. Check that the Instrument and PC are connected via the IEEE
cable.
2. Turn on the PC and Run Firmware Download software,
FWUpdate.exe.
This Firmware Download software can be found on the instrument
software CD under the FirmWare subdirectory.
3. Turn on the instrument.
4. The Firmware Download software will present you with a menu of
options. Select the required action from the menu options.
5. The program will take about 2 minutes to upgrade the firmware.
When it finishes, turn the instrument off and exit the Firmware
Download software on the PC.
6. Turn the instrument back on and check that the firmware has been
updated to the appropriate version.

Figure 4 FWUpdate.exe

Publication date: 8/15/2006 13-27


14. Power supplies
14.1 Introduction
This section provides information on all the power supply
assemblies in the Varian 700-ES Series instruments. The
spectrometer includes
• Mains power supply
• Power distribution
• 9 volt AC supply
• 24-0-24 volt AC supply
• + 26 volt DC camera supply
• + 28 volt DC unregulated supply
• Instrument power pwb
• + 5 / +12 DC OEM supply
• High Voltage DC power supply

14.2 System description


The Varian 700-ES Series instruments power system provides
all power supplies required to operate the internal electrical,
electronic and electro-mechanical assemblies of the instrument.
The instrument requires a single phase 187 to 264 volt AC, 49 to
61 Hz mains supply for correct operation.
The single phase mains supply input is filtered and supplied to
two separate internal mains circuits.
• Low power mains circuit
• High power mains circuit
The low power and high power mains circuit are separately
filtered and can be isolated internally.
• Low power 1SW2
• High power 1SW1

The low power mains transformers 1TR1 and 1TR2 are


protected by fuses 1FS1 and 1FS2.
The HVDC power supply is protected by a 30 amp circuit breaker
(1SW1) located on the power input panel on the rear of the
instrument.
The Varian 710-ES Series instruments have different power pwb
assemblies to the Varian 720/730-ES Series instruments.
Separate circuit descriptions for both assemblies are included in
this section.
Varian 700-ES Series instruments

The power supply functions are


Power Supply Application
Low power Provides transformer 1TR1 and indicator 1LP1
mains circuit with filtered mains voltage through switch
1SW2.
High power Filtered mains input to the HVDC power supply
mains circuit through instrument circuit breaker 1SW1
240 volt AC From primary winding of 1TR1. Supply to the
filament supply transformer 1TR2
220 volt AC From primary winding of 1TR1. Supply to fan, +
5 / + 12 VDC OEM switch mode supply and
polychromator heaters through the Solid State
Relay
25 volt AC From secondary winding of 1TR1. Supplies
1DB1 for +28 VDC unregulated supply and 20
volt regulated supply
22 volt AC From secondary winding of 1TR1. Supplies
Varian 710-ES Series power pwb camera
peltier power circuit
+ 28 VDC From 1DB1 and 1C1 to instrument power pwb
(unregulated) for 20 volt regulated supplies and camera
peltier supply for the Varian 720/730-ES
Series. To the RF interface PWB for the HVDC
power supply contactor coil and gas control
pwb for the gas control solenoids
24-0-24 VAC From secondary winding of 1TR1. Supplies
instrument power pwb with 24 VAC rails for -
20 volt regulated supplies
+ 5 volts DC From OEM switching supply to pwb analog and
regulated digital supplies
+12 VDC From OEM switching supply to pwb analog and
regulated supply digital supplies
+20 VDC From the instrument power pwb. For locally
regulated supply regulated +15 VDC supplies
-20 VDC From the instrument power pwb. For locally
regulated supply regulated -15 VDC supplies
Filament supply From secondary winding of 1TR2. Regulated
high current 6.3 VAC, 25 A supply for the
vacuum power tube
High voltage From HVDC power supply. Regulated +0 to
supply +7000 VDC, 460 mA anode supply for the RF
triode

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Varian 700-ES Series instruments

14.3 Theory of operation


Varian 700-ES Series instruments have two separate internal
mains circuits
• Low power for filament, igniter, fan, logic, control and signal
processing electronics
• High power for the HVDC supply in the plasma generating
system.

Low power mains input


Note The selected low power 50 or 60 Hz mains input voltage is
factory set to 240 volts. The selected input voltage at the primary
winding of transformer 1TR1 is indicated on the lower, left hand
side cover panel. The appropriate site specific input low power
voltage should be set at installation by a Varian trained customer
service representative. The high power input voltage does not
need any input voltage selection.
The primary winding of transformer 1TR1 supplies
• +5/+12 VDC OEM Switching power supply
• Fan
• Filament transformer 1TR2
• Solid State Relay (filament)
The secondary windings of 1TR1 supply
• +28 VDC unregulated
• 24 VAC center-tapped
• 22 VAC to Varian 710-ES Series power pwb
All of the components for these circuits are located in the low
power mains input compartment. The 22 VAC winding is used by
Varian 710-ES Series instruments only.

+ 28 VDC Unregulated supply


The 25 VAC secondary winding of chassis mounted transformer
1TR1 is full wave rectified by diode bridge 1DB1 and filtered by
capacitor 1C1. The resulting +28 VDC unregulated voltage is
supplied to both Varian 710-ES Series and Varian 720/730-ES
Series instrument power pwbs at PL 1.
The +28VDC unregulated supply is used by the HVDC power
supply contactor, gas control solenoids, +20VDC supply on both
instrument power pwbs and the peristaltic pump pwb. The
+28VDC also supplies the Varian 720/730-ES Series power pwb
peltier.

24-0-24 VAC supply


The center tapped secondary winding of transformer 1TR1 is
connected to PL1 (P1) of the instrument power pwb. Fuses FS3
(F4) and FS4(F5) on the instrument power pwb protect the 24
VAC windings.
The 24-0-24 VAC supply is used on both instrument power pwbs

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14-3
Varian 700-ES Series instruments

for the -20VDC supply.

14.3.1 Instrument power pwb


The Varian 710-ES Series and the Varian 720/730-ES Series
instruments use two separate power supply pwbs. The two
circuit boards share several of the same circuits and functions.
Functions specific to the Varian 710-ES Series or Varian
720/730-ES Series power supply pwb are stated as such. Where
component designations differ, the Varian 710-ES Series
component is bracketed.

Instrument power pwb inputs


• 24 VAC center tapped
• 22 VAC
• + 5 VDC
• + 12 VDC
• + 28 VDC unregulated
• Filament transformer sample voltage
• Detector temperature diode voltage (thermistor)
• Heater pad control signals
• Peltier control signals
• Outer polychromator compartment temperature
• Polychromator casting temperature
• Water flow status
• Argon gas pressure status
• Shutter control signals
• Full illumination LED control signals
• Attenuator control signals (Varian 710-ES Series only)

Instrument power pwb functions


• Generate and distribute + 20 VDC regulated supplies to the
386-EX control pwb, RF interface pwb and gas control pwb
• Generate and distribute - 20 VDC regulated supplies to the
386-EX control pwb, RF interface pwb and gas control pwb
• Control and monitor all heater pads and polychromator
compartment temperatures
• Provide polychromator shutter solenoid drive (shutter bimorph
drive)
• Control, monitor and generate detector peltier current supply
• Generate instrument power failure signal
• Distribute +26 VDC for the camera pwb (Varian 710-ES
Series)
• Distribute +28 VDC unregulated supplies to RF interface and
gas control pwb
• Distribute +5 VDC regulated supplies to the 386-EX control
pwb, RF interface pwb, gas control pwb
• Distribute +12 VDC regulated supplies to the 386-EX control
pwb, RF interface pwb, gas control pwb
• Generate the Solid State Relay trigger for low voltage, high
current filament supply
• Generate and monitor filament sense voltage from sample
voltage
• Generate the attenuator drive signals

Publication date: 8/15/2006 14-4


Varian 700-ES Series instruments

(Varian 710-ES Series only)


• Control the Full illumination LED

+20 VDC Supply


The +20 VDC supply is developed from the +28 VDC
unregulated supply by a switching regulator. It is locally regulated
to +15 VDC on the 386-EX control, RF interface and gas control
pwbs. The supply is over-voltage protected by a crowbar circuit
made from CSR1 (SCR3) and fuse FS2 (F3).
A step-down switching regulator generates the + 20 VDC
instrument supply from the + 28 VDC unregulated input on PL1
(P1) pins 1, 2, 5 and 6. (U2) IC1 incorporates a 100 kHz
oscillator, error amplifier, pulse width modulator, and a 6.5A
current-limited power switch. The voltage at IC1 (U2) Pin 4 is a
100 kHz square wave with an amplitude of approximately that of
the unregulated input voltage at IC1 (U2) pin 5.
(U2) IC1 adjusts the duty cycle of the square wave to obtain + 20
VDC at the junction of L1 and R197 (R15). A sample of this
voltage fed back to IC1 (U2), via pin 1, to allow the duty cycle to
be adjusted. When the internal power switch of (U2) IC1 is on,
(U2) IC1 pin 4 is approximately equal to the positive unregulated
input voltage at (U2) IC1 pin 5, diode D2 (D7) is reverse biased
and current flows through L1 supplying C8 (C19), L2 (L4), and
C9 (C20).
When the internal switch of (U2) IC1 turns off, (U2) IC1 pin 4 flies
negative due to the flyback action of L1. Diode D2 (D7) conducts
clamping (U2) IC1 pin 4 to -0.7 VDC. The current through L1
ramps down. Inductor L2 (L4) and capacitor C9 (C20) provide
further filtering to minimize switching noise at the output.
Resistors R197 (R15), R198 (R22) and R10 (R16) provide a
feedback voltage of 2.21 VDC at IC 1 (U2) Pin 4 when the
voltage at the junction of L1 and C8 (C19) is + 20 VDC.
R7 (R19) and C3 (C9) provide compensation for the internal
error amplifier of IC1 (U2). Transistor TR1 (Q1) imposes a rising
ramp voltage on IC1 (U2) Pin 2 at power-up. as C2 (C3) charges
through R5 (R4). The ramp voltage delays regulator start-up by 5
msec, and slows the regulator output voltage to 5 msec,
reducing surge current through FS2 (F3).
Output over-voltage protection is provided by CSR1 (SCR3). If
the + 20 VDC supply voltage at TP2 (TP12) exceeds + 27 VDC,
zener D1 (D10) conducts and CSR1 (SCR3) turns on drawing
current through R1 (R28) and FS2 (F3). The current opens FS2
(F3) disabling the +20 VDC power supply.
IC2 (U4) is a linear regulator for the +15 VDC on-board power
supply. D4 (LED1) is illuminated when the + 15 VDC supply is
present indicating that the + 20 VDC supply is working.

Publication date: 8/15/2006


14-5
Varian 700-ES Series instruments

-20 VDC Supply


This supply is developed from the 24-0-24 VAC supply by
regulator IC3 (U3). It is locally regulated to -15VDC on the gas
control, RF Interface and 386-EX control pwbs and is over-
current protected by fuses FS3 (F1), FS4 (F4) and FS5 (F5).
A negative step-down switching regulator generates the -20 VDC
instrument voltage from the 24-0-24 VAC input from the center
tapped winding of transformer 1TR1 through PL1 (P1) pins 3, 4
and 7. Diodes D6, (D3), D7, (D4) and capacitor C12 (C17) rectify
and filter the AC input providing an unregulated voltage of
between -28 and -37 VDC at fuse FS5 (F1).
IC 3 (U3) incorporates a 40 kHz oscillator, error amplifier, pulse
width modulator, and an 8A current limited power switch. The
voltage at IC 3 (U3) Pin 4 is a 40 kHz squarewave with an
amplitude approximately equal to that of the unregulated input
voltage at IC3 (U3) pin 3.
IC3 (U3) adjusts the duty cycle of the squarewave to obtain -
20VDC at the junction of L3 and C20 (C21). A sample of this
voltage is fed back to IC3 (U3) pin 2 to allow the duty cycle to be
adjusted.
When the internal power switch of IC3 (U3) is on, IC3 (U3) pin 4
is approximately equal to the negative voltage at IC3 (U3) pin 3.
Diode D10 (D8) is reverse biased and current flows through L3
from C20, (C21) L4, (L5) and C21 (C22).
When the internal switch turns off, IC3 (U3) pin 4 flies positive
due to the flyback action of L3 until D10 (D8) is brought into
conduction clamping IC3 (U3) pin 4 to +0.7 VDC. The current
through L3 ramps down. L4 (L5) and C21 (C22) provide further
filtering, to minimize switching ripple at the output.
R20, (R12), TR3, (Q3), R21 (R29) and R22 (R13) level shift the
output voltage giving a feedback voltage of - 1.24 VDC across
IC3 (U3) pins 2 and 3. Under normal operating conditions the
voltage at the base of TR3 (Q3) is -19.8 VDC and the voltage at
the collector of TR3 (Q3) is -19.1V, giving 0.95 mA through R21
(R29) and R22 (R13).
TR2 (Q2) imposes a rising ramp voltage on IC3 (U3) Pin 1 at
power-up. C16 (C4) charges through R16 (R11). The ramp
voltage delays regulator start-up by 5 msec and slows the rise
time of the regulator output voltage to 5 msec, reducing the start
up surge current through FS5 (F1).
Output over-voltage protection is provided by D8 (SCR2). Should
the -20 VDC supply voltage at TP 3 exceed - 27 VDC, zener D9
(D15) conducts, producing -1.5 VDC at the junction of R13 (R30)
and R14 (R31). The gate voltage triggers D8 (SCR2) and draws
current through R12 (R27) and FS5 (F1). The current opens FS5
(F1) disabling the -20 VDC power supply.
IC4 (U5) is a linear regulator for the -15 VDC on-board power
supply. D12 (LED2) is lit when the -15 VDC supply is present,
also indicating that the -20 VDC supply is present.

Publication date: 8/15/2006 14-6


Varian 700-ES Series instruments

Polychromator temperature control


The optics assembly is temperature controlled by a servo
controller circuit that is located on the Instrument power pwb.
The circuit is software enabled and controls heaters that can
produce up to 146 watts of heat to maintain a casting
temperature of 35°C.
The optics assembly consists of a casting enclosed in an
insulated aluminium outer box. Fixed to the inside of the
polychromator outer box are two heater pads.
Each pad is 886Ω and wired in a parallel combination. Total
resistance of the circuit is 442Ω. The heater pads produce up to
110W of heat. The pads are supplied with 220 VAC through the
solid state relay IC1. A bi-metallic thermal switch 5SW1 is wired
in series with the heater pads. The switch opens if the outer box
temperature exceeds 67° C.
Fixed to the outside of the polychromator outer box is a layer of
thermal insulation. The thermal insulation reduces overall heat
loss from the assembly and minimizes the thermal differences
between the heated and unheated surface areas of the outer
box. The outer box is thermally coupled to the polychromator
casting across an air gap. The low pass filter action of the air gap
attenuates temperature variations that occur at the heater pads.
The polychromator temperature controller circuitry uses two
resistance temperature detectors (RTD). The outer box
temperature is sensed by RTD 5R1 and casting temperature is
sensed by RTD 6R1. The temperature sensors have a
resistance of 100Ω (+/- 0.1Ω) at 0° C with a temperature
coefficient of 0.385 Ω per ° C.
The casting temperature sensor outputs a proportional voltage at
PL5 (P5) pins 16 and 18. The sensor voltage is level shifted and
clamped on the instrument power pwb for use on the 386-EX
control pwb. The resulting digital information provides the casting
temperature to the PC software.
Casting temperature sensor 6R1 is connected to PL 7 (P7) pins
1 and 2. The polychromator outer box temperature sensor 5R1 is
connected to PL 7 (P7) pins 4 and 5.
Box Heater En from the 386-EX control pwb at PL 5 pin 12
provides independent software control of the temperature
controller. When Box Heater En is low, TR 8 (Q12) turns on LED
D62 (LED6).
The temperature controller circuit will then toggle the heaters to
deliver the required average heater power to maintain a casting
temperature of 35° C. An active high, 6.5 VDC Box Heater +
output on PL8 (P8) pin 3 controls solid state relay IC1. Relay IC1
is used to switch the 220 VAC supply to the polychromator outer
box heater pads.

Publication date: 8/15/2006


14-7
Varian 700-ES Series instruments

Temperature control
RTD sensor 5R1 forms one arm of a resistance bridge with R72,
(R209), R73, (R207), R74, (R204) and R75 (R208). The bridge
is balanced for a voltage of 0 VDC at TP31 (TP37) when the
outer box temperature is 35°C (5R1 = 113.61Ω). R78 (R175)
sets the gain of IC11B (U28A) a bridge error amplifier. C49
(C111) provides low pass filtering. R79 (R174) provides the input
positive feedback. R76 (R177) and C48 (C109) provide RF
filtering R87 (R163) is used for isolation.
The relationship between the outer box temperature, (Tb), and
the voltage at TP31 (P17 PIN 2) is
• TP31 (VDC) = (Tb-35) / 5 volts
VDC
5 125
4
3 120
2
1 115 TP31
0 PL5 pin 16
-1 110 RTD, 5R1

-2
-3 105
-4
RTD 5R1 (ohms)
-5 100

10 15 20 25 30 35 40 45 50 55 60
Casting temperature (deg. C)

RTD sensor 6R1 forms one arm of a resistance bridge with R51,
(R210), R52, (R205), R53, (R206) and R54, (R211). The bridge
is balanced for a voltage of 0 VDC at TP30 (TP31) when the
outer box temperature is 35°C (6R1 = 113.61Ω). R57 (R129)
sets the gain of bridge error amplifier IC10B (U24A). C43 (C100)
provides low pass filtering. R58 (R130) provides the input
positive feedback. R55 (R133) and C42 (C94) provide RF
filtering.
IC10A (U24B) is an error amplifier configured with a gain of –100
by resistors R64 (R181) and R59 (R179). C46 (C106) provides
low pass filtering. Diode D23 (D57) with resistors R61 (R149)
and R63 (R183) reduce the gain of IC10A (U24B) when pin 1
output is less than –7.8 VDC. Diode D22 (D56) and resistors
R60 (R178) and R65 (R180) reduce amplifier gain for outputs of
greater than 7.8 VDC at IC10A (U24B) pin 1.
TR6 (Q9) limits the maximum output voltage from IC10A (U24B)
at PL12 (P17) pin 2. The +15 volt supply and the voltage divider
formed by R85 (R121) and R84 (R122) supply 0.48 VDC at the
base of TR6 (Q9). TR6 (Q9) and D29 (D39) clamp the output at
PL12 (P17) pin 2 to around 1.8 VDC. A positive limit of 1.8V
corresponds to a maximum outer box setpoint of 44° C.

Publication date: 8/15/2006 14-8


Varian 700-ES Series instruments

IC12B (U18B) is a comparator. R89 (R132) provides ±50 mV


positive feedback at IC12 (U18B) pin 5. R201 (R148) is a pull up
resistor for the open collector output. When IC12B (U18B) pin 7
is 15 VDC, TR7 (Q13) is off. When IC12B (U18B) pin 7 is -15
VDC, RN2 pin 8 (R127 and R128) is 3 VDC due to the voltage
drop across D11 (D47) and TR7 (Q13) is on. The active low, box
heater enable turns on TR8 (Q12) enables Box Heater + at PL8
(P8) pin 3.
The on/off limits of the box heater are variable. This variation
depends on the output of the casting temperature error amplifier
IC10A (U24B).
The output of IC12B (U18B) goes low (outer box heater on)
when pin 5 is more than 50 mV below pin 6. In terms of
temperature this means the outer box heater will turn off when its
temperature exceeds the box setpoint by 0.25° C and turn on
when its temperature is more than 0.25° C below the box
setpoint.

Normal operation
In normal operation with the Box Heater En low and a casting
temperature of 34.95° C. TP30 (TP31) is -10 mVDC, box
setpoint is 1 VDC. The polychromator outer box is 40.1° C and
TP 31 (TP37) is 1.02 VDC. IC12B (U18B) pin 7 is +15 VDC and
TR7 (Q13) is off.
The outer box heater will turn off when the outer box exceeds
40.25°C and will turn on when the outer box falls below 39.75°C.
The casting temperature will stay relatively constant at 34.95°C.
If the outer box temperature falls to 39.74° C, TP 31 (TP37) is
0.948 VDC, TP30 (TP31) is –10mVDC, box setpoint is 1 VDC.
IC12B (U18B) pin 7 is –15 VDC, TR7 (Q13) is on and the
polychromator outer box heaters will turn on.

Varian 720/730-ES Series polychromator shutter driver


The Varian 720/730-ES Series polychromator shutter is driven
by a latching solenoid, which requires a 250 msec, ±12 VDC
pulse of 1 amp to change position.
Note The Varian 710-ES Series and the Varian 720/730-ES Series
instruments use two different shutter mechanisms and shutter
drive circuits. The following circuit descriptions apply only to the
Varian 720/730-ES Series instruments and power supply pwb.
IC8 is a dual full bridge driver which drives the solenoid via PL6
pins 3 and 4. Two open collector outputs on the 386-EX control
pwb drive the circuit. The control signals from the 386-EX control
pwb are connected to the instrument power pwb through PL5
pins 2 and 4.
Shutter Drive turns on the solenoid pulse
Shutter Dir selects the polarity of the solenoid pulse

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14-9
Varian 700-ES Series instruments

Shutter Drive
The Shutter Drive signal on PL5 pin 2 is from an open collector
output on the 386-EX control pwb. R45 is a pull up resistor for
this input. When Shutter Drive goes low, TR18 turns on,
producing a logic high at IC24 pins 9 and 10 which enable the
outputs of IC8 to the shutter solenoid. When Shutter Drive is
high, IC24 pin 10 is low and the outputs of IC8 are inactive.
The shutter drive solenoid only draws current during the 250
msec that Shutter Drive is low. C34 prevents the solenoid from
drawing current continuously. the active low Shutter Drive signal
begins to charge C34 through RN5 pins 7 and 8. As C34
charges the voltage across it increases reducing the base
current of TR18. At 0.8 seconds the voltage at RN5 pin 7
reaches 4 VDC. TR18 turns off and disables the output of IC8 to
the solenoid. When Shutter Drive goes high C34 discharges
through D17 and R45.

Note IC 8 outputs are active only for the period that the shutter drive
transistor TR 18 is on.

Shutter direction
The Shutter Dir input on PL5 pin 4 is from an open collector
output on the 386-EX control pwb. R44 is a pull up resistor for
this input. This input determines the polarity of the voltage pulse
at PL6 pins 3 and 4.
IC24 pins 4 and 12 provide out of phase signals for the inputs of
IC8. Table 2 shows the solenoid voltage, measured from PL6 pin
3 to PL6 pin 4.

SHUTTER DIR IC24 IC24 solenoid voltage


(TP35) pin 4 pin 12
<1V 0V 5V +12V
5V 5V 0V -12V

Table 2 SHUTTER DIR operation

With a solenoid current of 1 A, IC8 drops 2.6 VDC, R49 and R50
drop 0.4 VDC supplying 12 VDC to the solenoid. D18, D19, D20
and D21 clamp solenoid turn-off transients.

Publication date: 8/15/2006 14-10


Varian 700-ES Series instruments

Varian 710-ES Series shutter drive


The Varian 710-ES Series instrument needs a shutter assembly
to control the amount of time the camera assembly is exposed to
the light from the plasma. The shutter also prevents the further
exposure of the camera during the time that the accumulated
charges are transferred from the camera to the camera pwb.

Caution The Varian 710-ES Series shutter assembly can be


damaged by voltage spikes. Do not plug the shutter
assembly in or unplug the shutter assembly from the
instrument power pwb without first powering down the
instrument and allowing one minute for the shutter circuit to
discharge.

The Varian 710-ES Series instruments use a piezoelectric


shutter mechanism. The bimorph piezoceramic element is
mounted in a cantilever configuration inside the Varian 710-ES
Series slit mechanism. One end of the bimorph is fixed to the top
of the slit assembly and the opposite end has a metal flag fixed
to it. The flag covers the entrance slit to stop light from the
plasma entering the polychromator.
The shutter element opens when approximately +75 VDC is
applied to pin 1 of P12 allowing light to pass through the
entrance slit of the polychromator. The shutter element blocks
the light from the plasma when +75 VDC is applied to pin 3 of
P12.
The Shutter drive is a waveform made from the combination of a
squarewave with sinewave shaped edges. The bimorph consists
of two layers of piezoceramic material bonded to a thin substrate
such that when a voltage is applied across the device, one side
increases in length and the other shortens. The bimorph thus
bends one way or the other depending upon the drive voltage
polarity. The elements are connected in parallel with the output
of the drive circuit and present a capacitive load of 10nF.

Varian 710-ES Series bimorph shutter assembly

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14-11
Varian 700-ES Series instruments

The shutter command is a TTL level signal that comes directly


from the camera board for timing accuracy. Pull up resistor R89
provides a current source. R90/C66 filter noise.
U12A is a comparator that is used to buffer and shape the
Shutter command signal (TP14). The qualifying input threshold
levels are set by R63 and R69. R65 provides positive feedback
for hysterysis. Capacitor C48 charges as current flows across
R63 providing protection from switching transients damaging the
bimorph shutter when power is first applied.
The square wave at TP14 drives integrator U12B. R64 and C73
set a 3.8ms rise time for the shutter drive. The output of U12B is
clamped to ±10.7 volts by diodes D40, D41, D42, and D43. This
provides a trapezoidal waveform at TP28 to drive the sine
shaper circuit.
A transition interlock circuit removes any spurious shutter
commands during shutter movement which could damage the
shutter. The shutter drive signal from U12B is differentiated by
C54 and fed to amplifier U13A. The output of U13A is summed
with the voltage at U12A pin3 through diode D33. The voltage on
U12A pin 3 sets the input threshold levels for the shutter drive.
Any spurious shutter drive signals at U12B will be blocked
through this circuit when the shutter is moving.
The sine shaper consists of U13B along with Q4, Q5, Q6 and
Q7. Q4 and Q6 form a current mirror while Q5 and Q7 form an
emitter degenerated differential amplifier. The transistors are
overdriven past their linear region to the verge of cutoff, the non-
linearity providing the "sine" shaping. U13B converts the current
into the virtual earth of U136 pin 6 into a voltage at TP21.
Voltage swing at this point is approximately 125mV. R73 and
zener D34 together with R111 and zener D38 provide stable
supplies to the differential amplifier.
The voltage at TP21 is level shifted by R152 and R91 at the
input of U21B pin 5. U21B and Q16 form a voltage to current
converter. The voltage at the junction of U21B pin 6 and R184
results in a current through R153 to provide up to 75 volts swing
at pin 1 of P12. The collector of Q16 also connects to the bases
of transistors Q17 and Q18 forming voltage followers. The
emitters are connected together to eliminate any current spikes
in the bridge when switching.
U21A and Q20 provide level shifting and phase inversion for the
other half of the bridge. The voltage at the junction of U21A pin 2
and R185 results in a current through R154 to provide up to 75
volts at pin 3 of P12. The collector of Q20 also connects to the
bases of transistors Q21 and Q22 forming voltage followers. The
emitters are connected together to eliminate any current spikes
in the bridge when switching.

Publication date: 8/15/2006 14-12


Varian 700-ES Series instruments

The voltage at the emitter of Q16 is balanced against the voltage


at the emitter of Q20. As the current in the emitter of Q16 falls
the voltage at junction of R184 and R169 also falls, the current
through R185 and Q20 increases. R109 and R110 provide
0.8125 VDC at U21A pin 3 to set the total current. Diodes D55
and D61 provide junction protection for transistors Q16 and Q20.
Power on transient protection for the bimorph shutter from the
bridge is provided by U22. The circuit monitors the status of the
+15 VDC and –15 VDC supplies. If they are not within
specification, U22 pins 1 and 7 are low, C105 discharges. R166
limits discharge current. Q19 and K2 are turned off. R212 in
series with the shutter (10nF shutter capacitance) has a time
constant of approximately 50ms, dampening the response of the
shutter from the bridge and preventing damage to the shutter
bimorph.
A low from the power fail signal forward biases D37 and disables
U22 on power down.
At power up when U22 has all its input voltages within
specification and the power fail line is high (inactive), U22 pins 1
and 7 are both high at TP32 and D48 is reverse biased.
Capacitor C105 charges through R165 and R166. The emitter of
Q19 increases in voltage. As the emitter of Q19 rises, current
begins to flow in R167 and K2 turns on. When the current
through R167 exceeds 0.45mA, relay K2 bypasses resistor
R212, allowing full speed response from the drive bridge to the
shutter.
The +80 VDC supply for the Varian 710-ES Series shutter drive
is provided by a flyback converter. U14 provides a 120 kHz
square wave to the gate of Q8. When U14 pin 3 is high Q8 is on
and current ramps up through L7 and R98. When U14 pin 3
goes low Q8 turns off, L7 and R98 flyback providing a forward
bias for D44, charging capacitor C91. This cycle repeats until the
voltage on C91 is sufficiently high to turn on the zeners D51 and
D54 to produce a voltage of 80 VDC at TP30.

Peltier controller
The Varian 700-ES Series camera assemblies are cooled to
reduce the amount of dark current signal produced by the
detector. The reduction in dark current levels leads to lower
analytical backgrounds and lower noise which results in better
sensitivity.
The Varian 720/730-ES Series camera assembly has a 3-stage
peltier module. The Varian 710-ES Series camera assembly has
a 2-stage peltier module. Each peltier module is permanently
attached to their respective camera assembly housing. The heat
generated by the peltier is removed by cooling water that is
recirculated by a water chiller.

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14-13
Varian 700-ES Series instruments

The peltier is powered by a closed loop servo system that


adjusts the peltier voltage according to the output voltage of a
thermistor on the camera for the Varian 700-ES Series
instrument and a temperature sensing diode on the camera for
the Varian 720/730-ES Series instruments. All of the servo
control circuitry is contained on the instrument power pwb.
The Varian 720/730-ES Series peltier controller output stage
uses the unregulated 28 VDC supply to provide an output
voltage between 2.7 VDC and 12.9 VDC. The 28 VDC supply to
the peltier controller is over-voltage and over current protected
by fuse FS1.
The Varian 710-ES Series peltier controller output stage uses
the 22 VAC supply from 1TR1 to provide an output voltage
between 3.2 VDC and 10.1 VDC. The supply to the peltier
controller is over-voltage protected by SCR1 and over current
protected by fuse F2. If U1 fails short circuit, C25 will charge and
forward bias D2. The voltage will gate SCR1, drawing enough
current to open F2. Resistor R1 limits the current to sensible
levels.
IC 13 (U1) incorporates a 100 kHz oscillator, error amplifier,
pulse width modulator, and a 6.5 A current limited power switch.
The voltage at IC13 (U1) Pin 4 is a 100 kHz squarewave. IC 13
(U1) adjusts the duty cycle of the squarewave to obtain at the
required output at the junction of L5 (L2) and R95 (R17). The
output is summed with the feedback from IC 14 pin 1 (U8B pin 7)
to provide 2.21 VDC to IC 13 (U1) pin 1 across the voltage
divider formed by resistors R95 (R17) and R96 (R8).
When the internal power switch of IC13 (U1) is on, IC13 (U1) pin
4 is approximately equal to the positive unregulated input voltage
at IC13 (U1) pin 5. D32 (D6) is reverse biased and a rising
current flows through L5 (L2), supplying C62 (C23). When the
internal switch of IC13 (U1) turns off, IC13 (U1) pin 4 flies
negative due to the flyback action of L5 (L2). D32 (D6) is brought
into conduction, clamping IC13 (U1) pin 4 to -0.7 VDC. The
current through L5 (L2) continues to flow in the same direction
but now ramps down. Inductor L6 and capacitor C63 (C26) along
with resistor R97 (R25) and C64 (C25) provide further filtering to
minimize switching noise at the output.
R93 (R6) and C59 (C1) provide compensation for the internal
error amplifier of IC 13 (U1).
IC13 (U1) adjusts its switching duty cycle, and therefore the
peltier supply output voltage, to maintain 2.21V at IC13 (U1) pin
1.
When IC14 pin 1 (U8B pin 7) is at 2.21 VDC, then the current
through R99 (R21) is zero. The current through R96 (R8) and
R95 (R17) is 1.105 mA so the voltage at the junction of L5 (L2)
and C2 (C23) must be
2.21V + 1.105 mA x 4.12KΩ (4.42KΩ) = 6.76 VDC (7.09VDC)

Publication date: 8/15/2006 14-14


Varian 700-ES Series instruments

As IC14 pin 1 (U8B pin 7) voltage falls to less than 2.21 VDC
then current increases through IC14 pin 1 (U8B pin 7) via R99
(R21). IC13 (U1) increases the peltier supply output voltage to
maintain 2.21V at IC13 (U1) pin 1.
As IC14 pin 1 (U8B pin 7) rises above 2.21 VDC then IC13 (U1)
must reduce the peltier supply output voltage to maintain IC13
(U1) pin 1 at 2.21 VDC.
The voltage at IC14A pin 1 (U8B pin 7) controls the output
voltage of the peltier supply. The voltage at IC14A (U8B) is
limited to between -10.7 VDC (-9.5 VDC) by diodes D37 (D31)
and D38 (D32) and +10.7 VDC (12.0 VDC) by diodes D35 (D27)
and D36 (D28).

IC14A pin 1 L5/C62 TP13 Peltier current


(U8B pin 7) (L2/C23) (TP6)
-10.7V 12.9V 11.7V 2.3A
(-9.5 V) (11.4 V) (10.3V) (3.6A)
-5V 10.2V 9.1 1.8A
(9.8V) (8.9V) (3.1A)
0V 7.8V 7.1 1.4A
(7.9V) (2.5A)
5V 5.4V 4.9 1A
(6.1V) (5.5V) (1.9A)
10.7V 2.7V 2.5 0.5A
(12.0V) (3.5V) (3.2V) (1.1A)

Table 3 TP13 (TP6) and Peltier current with RLA on

Note The Varian 710-ES Series and the Varian 720/730-ES Series
instruments use different separate power supply pwbs and
different camera assemblies that provide different detector
temperature feedback voltages. The peltier feedback and peltier
interlock and enable control for the two instruments are different.

Publication date: 8/15/2006


14-15
Varian 700-ES Series instruments

Varian 720/730-ES Series Peltier enable and soft start


The active low Peltier En input signal on PL5 pin 8 is from an
open collector output on the 386-EX control pwb. R210 is a pull
up resistor for this input. On the power supply pwb Peltier En is
used to enable/disable both the output relay RLA and the output
of IC13. When Peltier En is 15 VDC TR20 is off and the base of
TR9 is 0 VDC. IC13 pin 2 is 0.65 VDC turning the output at IC13
pin 4 off.
The active low Peltier En turns on TR20. The base of TR9 ramps
up to 3.6 VDC as C56 charges through R91. As the voltage at
IC13 pin 2 rises the voltage at the junction of L5 and C62 ramps
up to its working voltage.
LED D48 is turned on by the output of IC13 when the contacts of
relay, RLA, are closed.
Under normal operating conditions the voltage at the base of
TR17 is 1.3 VDC due to the forward voltage drop of D33 and
D34. Providing 0.65 VDC across R136, and a current of 0.65 mA
through R136 and D48. The current through D48 is held
constant when the Peltier voltage is in the expected range of 2.5
VDC to 12.9 VDC.

Varian 720/730-ES Series Peltier feedback circuitry


The camera temperature diode and the diode amplifier on the
camera pwb provide the input to the peltier controller circuitry
through the 386-EX control pwb. The output impedance of the
temperature diode amplifier is 5.1kΩ.
The amplifier is connected to the instrument power pwb through
PL 5 at pins 20 and 22. Capacitors C72 and C73 form an RF
filter in conjunction with the 5.1kΩ output impedance of the
temperature diode amplifier. The voltage of Temp Diode + is
typically 6.8 VDC at 0°C and increases by +20 mV/°C as the
camera temperature decreases. The Temp Diode - input is 0
VDC.
The differential amplifier, IC15B, has a gain of -1. RV1 is
adjusted to remove the offset voltage at IC15 pin 7 -6.8 VDC with
a camera temperature of 0°C, producing voltage at IC15 pin 1 of
0 volts. The voltage at PL11 pin 6 is
PL11 pin 6 = -TCAMERA/10 volts.
Where TCAMERA is the camera temp. in °C

Publication date: 8/15/2006 14-16


Varian 700-ES Series instruments

R123 and R124 level shift the camera temperature voltage at


PL11 pin 6. The level shifted voltage is buffered by IC16B, for
monitoring by the 386-EX control pwb. D39, D40 and D41 clamp
the voltage at PL5 pin 24 to between -0.7 and 5.7 VDC.

5 -6

4 -6.2

PL11 Pin6 / IC16 Pin7 (volts)


3 -6.4

2 -6.6

TP15 (volts)
1 -6.8 PL11 Pin6
0 -7 IC16 Pin7
TP15
-1 -7.2

-2 -7.4

-3 -7.6

-4 -7.8

-5 -8
-40

-30

-20

-10

10

20

30

40
CCD temperature (deg. C)

Figure 2. PL11 Pin6, IC16 Pin7 & TP15 vs camera temperature

IC 16 pins 1, 2 and 3 invert the output of IC 15 pin 1 and provide


lead compensation for transient response.
Peltier current through R98 generates a voltage across R98 of
approximately 0.1 VDC per amp. IC14B inverts this voltage
providing a voltage of -0.1 VDC per amp at IC14 pin 7. This
voltage provides peltier current feedback into error amplifier
IC14A.
Resistors R101 and R102 determine the camera operating
temperature. Under normal operating conditions IC14 pin 2 is a
virtual earth producing a current of 716 µA through R101. At a
peltier current of 1 amp, the voltage at IC14 pin 7 will be -0.1
VDC and the current through R103 will be 5 µA. A current of
711µA must flow through R102 for IC14 pin 2 to remain be at 0
volts. The voltage at IC16 pin 1 is will be -3.55 VDC, (0 volts -
(711µA x 4.99kΩ) = -3.55 volts)
A voltage of -3.55 volts corresponds to a camera temperature of
-35.5°C.
As the temperature of the camera rises, the voltage at PL5 pin
20 and PL11 pin 6 fall (see Figure 2) and the voltage at TP15
and IC16 pin 1 rise. As the voltage at IC16 pin 1 rises, the
voltage at IC14 pin 2 also rises and the voltage at IC14 pin 1
falls. The falling voltage at IC14 pin 1 causes the peltier voltage
to increase which lowers the camera temperature.

Publication date: 8/15/2006


14-17
Varian 700-ES Series instruments

Varian 720/730-ES Series Peltier control


Comparator IC 17B provides interlock protection for the camera
assembly. The interlocks ensure that the peltier can not be
turned on in conditions that may cause damage to detector in the
camera assembly.
If any of the peltier interlock inputs go high, the voltage at IC17
pin 5 will exceed the voltage at IC17 pin 5 and the output at IC17
pin 7 will go high. The output at IC 17 pin 7 will turn off TR 11
and the relay contacts of RLA will open, interrupting the voltage
supply to the peltier module.
IC 17 monitors
• Argon gas pressure switch
• Cooling water flow switch
• Peltier controller voltage output is less then 16 VDC
• Temperature diode input voltage is within range
• +15 VDC supply is present
• -15 VDC supply is present
A water flow sensor is connected to the instrument power pwb at
PL8 pin 12. The sensor produces a low signal at the loss of
water flow.
The flow switch generates 4.6 VDC at PL8 pin 12, TR10 is ON,
TP16 is at 0 volts and D43 is not conducting. At the loss of water
flow PL8 pin 12 is 0 volts, TR10 turns off and R129 forward
biases D43. IC17 pin 5 is more than the 0.5 VDC reference at
pin 6, relay RLA turns off and power to the peltier module is
removed.
PL8 Pin 12 TP16
Water OK ≈4.6V ≤0.2V
Water FAIL 0V ≥3.55

An argon pressure sensor is connected through the gas control


pwb to the instrument power pwb at PL9 pin 3. The sensor
produces a high signal at the loss of argon gas pressure.
In normal operation PL9 pin 3 is 0 volts and D45 is not
conducting. At the loss of argon pressure, PL9 pin 3 goes high
which forward biases D45 taking IC17 pin 5 above 0.5 VDC.
IC17 pin 7 turns off relay RLA removing the power to the peltier
module.

TP17
Argon OK 0V
Argon FAIL ≥11.35V

Publication date: 8/15/2006 14-18


Varian 700-ES Series instruments

The peltier supply output voltage is designed to be in the range


of 2.5 VDC to 12.9 VDC. R133 and R132 form a voltage divider
from the peltier voltage, providing a voltage in the range of 1.8
VDC to 9.3 VDC at PL11 pin 1.
A peltier voltage of greater than 16 VDC produces a voltage at
PL11 pin 1 greater than 11 VDC. This will forward bias D46 and
D47 producing more than 0.5 VDC at IC17 pin 5. IC17 pin 7
goes high turning off the relay RLA and removing power from the
peltier module.
R111, R112 and D44 will disable relay RLA should the voltage at
TP15 be more positive than -2.6 VDC. This function disables the
relay if PL5 pin 20 becomes open or short circuit or if the -15
VDC supply is not present.
The active low Peltier En input signal on PL5 pin 8 is from an
open collector output on the 386-EX control pwb. R210 is a pull
up resistor for this input. Peltier En is used to enable / disable
both the output relay, RLA, and the output of IC13. When Peltier
En is 15 VDC, TR12 is off and RLA cannot be enabled.
RLA can only be enabled if PELTIER EN is low (<1V) and all
interlocks on the power/control pwb are OK.

Varian 710-ES Series Peltier feedback circuitry


A thermistor on the Camera assembly provides the input to the
peltier controller circuitry through the 386-EX control pwb. The
thermistor is a negative temperature coefficient (NTC) device
that increases in resistance as the temperature falls. The
thermistor is connected to the instrument power pwb through P5
at pins 20 and 22. C53 along with R42 and C35 provide RF
filtering for the input.
The thermistor forms part of a voltage divider with R67 and R44.
R44 is provided to linearize the temperature curve in the
operating region (<-10° C).

Vout of Thermistor

1.8

1.6

1.4

1.2
Voltage

1
Series1
0.8

0.6

0.4

0.2

0
-40 -30 -20 -10 0 10 20 30 40
Temperature (C)

Graph of the Varian 710-ES Series camera temperature vs voltage.

Publication date: 8/15/2006


14-19
Varian 700-ES Series instruments

The voltage provided by the thermistor is buffered by the voltage


follower U8A. U8B is a combined error amplifier and integrator.
The temperature setpoint of the peltier controller is set by the
voltage divider formed by R54 and R55 from the +5 VDC
reference diode D35. A voltage of 1.31 volts on U8B pin 6
corresponds to a camera temperature setpoint of -30° C.
U8B compares the setpoint voltage to the buffered voltage from
U8A, integrating the difference on its output. This voltage
modulates the peltier regulator U1 to provide control of the
temperature.
The output voltage of U8B is limited to between 11.96 and -9.44
volts by diodes D27, D28, D31, and D32.
Rate feedback is provided to allow faster control loop response.
This is achieved by sampling the regulator output voltage with
the voltage divider R41 and R40. C33 is a low pass filter. The
voltage is differentiated by C27 and summed with the
temperature input at U8B pin 5. This effectively reduces the error
signal whilst the output of the peltier drive is slewing, reducing
overshoot.
The peltier supply and control system are "floating" from the
normal analog earth on the instrument power pwb. The power
supply for U8 is decoupled from the ±15 V supplies by R53/C36
and R43/C38. The connection between system earth and peltier
earth occurs at the camera. This reduces capacitive coupling of
noise into the camera at the detector. A safety earth is provided
by R3 if the earth chain to the camera is removed.

Varian 710-ES Series Peltier temperature monitoring


The voltage from the thermistor is amplified and fed to the 386-
EX control pwb for temperature reporting purposes. The voltage
between the voltage follower U8a output (TP3) and its reference
earth (TP11) is fed to a differential amplifier formed by U6a and
its associated components. The thermistor voltage is amplified
by a gain of 2.5 and passed to the A/D converter on the 386-EX
control pwb. R35 and D64 limit the voltage to within acceptable
levels.
Currents and voltages within the peltier control circuit have been
set to ensure the camera cannot be inadvertently overheated
due to a cooling system fault. If the peltier drive were switched
off with the water above 60° C, the camera would eventually rise
to that temperature, exceeding its specified temperature limit.
As water temperature increases, peltier drive voltage and current
are increased to maintain -30° C camera temperature. If the
water temperature rises above 55° C the voltage limit for the
peltier drive is reached so no additional cooling can be provided.
As the water temperature rises further, so does the camera
temperature. With the camera peltier on, if the camera
temperature warms above -27.5° C the software flags the
problem and extinguishes the plasma, removing the major heat
input to the system.

Publication date: 8/15/2006 14-20


Varian 700-ES Series instruments

Varian 710-ES Series Peltier control


On the instrument power supply pwb the active low Peltier En
input signal P5 pin 8 is used to turn-on relay K1.
Comparator U27B provides interlock protection for the camera
assembly. The interlocks ensure that the peltier can not be
turned on in conditions that may cause damage to detector in the
camera assembly.
If any of the peltier interlock inputs go high, the voltage at U27B
pin 5 will exceed the voltage at U27B pin 6 and the output at
U27B pin 7 will go high. The output at U27B pin 7 will turn off
Q24 and the relay contacts of K1A will open, interrupting the
voltage supply to the peltier module.
U27B monitors
• Argon gas pressure switch
• Cooling water flow switch
• +15 VDC supply is present
• -15 VDC supply is present
A water flow sensor is connected to the instrument power pwb at
P8 pin 12. The sensor produces a low signal at the loss of water
flow.
The flow switch generates 4.6 VDC at P8 pin 12, Q14 is ON,
TP29 is at 0 volts and D43 is not conducting. At the loss of water
flow P8 pin 12 is 0 volts, Q14 turns off and R187 forward biases
D60. U27B pin 5 is more than the 0.5 VDC reference at pin 6,
relay K1 turns off and power to the peltier module is removed.

P8 Pin 12 TP29
Water OK ≈4.6V ≤0.2V
Water FAIL 0V ≥3.55

An argon pressure sensor is connected through the gas control


pwb to the instrument power pwb at P9 pin 3. The sensor
produces a high signal at the loss of argon gas pressure.
In normal operation P9 pin 3 is 0 volts and D53 is not
conducting. At the loss of argon pressure, P9 pin 3 goes high
which forward biases D53 taking U27B pin 5 above 0.5 VDC.
U27B pin 7 turns off relay K1 removing the power to the peltier
module.

TP35
Argon OK 0V
Argon FAIL ≥11.35V

Publication date: 8/15/2006


14-21
Varian 700-ES Series instruments

The active low Peltier En input signal on P5 pin 8 is from an


open collector output on the 386-EX control pwb. R233 is a pull
up resistor for this input. Peltier En is used to enable/disable both
the output relay, K1. When Peltier En is 15 VDC, Q23 is off and
K1 cannot be enabled.
K1 can only be enabled if PELTIER EN is low (<1V) and all
interlocks on the power/control pwb are OK.

Power fail signal


A power fail detector circuit on both the instrument power pwbs
generates an active low PWR FAIL signal which tells the IEEE
80C32 processor on the 386-EX control pwb that there is
insufficient power to operate the system. The power fail signal
also controls the Varian 710-ES Series shutter drive protection
circuit.
The 24-0-24 VAC winding of 1TR1 keeps C24 (C72) charged via
D14 (D16) and D15 (D17). The voltage at comparator IC5 pin 5
(U17 pin 3) is greater than the voltage at IC5 pin 6 (U17 pin 2)
qualifying IC5 pin 7 (U17 pin 7).
At the loss of the mains supply to 1TR1 or the loss of 24-0-24
VAC supply, C24 (C72) will quickly discharge via R33 (R88) and
R34 (R95). When the voltage at IC5 pin 5 (U17 pin3) falls below
5 VDC, IC5 pin 7 (U17 pin7) will go low.

Zero mains crossing


The zero mains crossing circuit is not implemented on the Varian
700-ES Series instruments.

Publication date: 8/15/2006 14-22


Varian 700-ES Series instruments

Varian 700-ES series filament supply

Note The Varian 710-ES Series and the Varian 720/730-ES Series
instruments use two separate instrument power supply pwbs.
The two circuit boards share several of the same circuits and
functions. Functions specific to the Varian 710-ES Series or
Varian 720/730-ES Series instrument power supply pwb are
stated as such. Where component designations differ the Varian
710-ES Series components are highlighted in brackets.

The RF triode needs a low voltage, high current power supply to


heat its filament. This supply is stabilized by a phase-controlled
regulator in the primary circuit of filament transformer 1TR2. The
circuitry for the filament supply is on two pwb assemblies:
• Instrument power pwb
• Filament Solid State relay (SSR)
The Instrument power pwb contains the circuitry that controls the
firing of the Filament SSR. The Filament SSR completes the
primary circuit of the filament transformer 1TR2.

Figure 2. Filament supply block diagram

Filament control
Two diode pairs full wave rectify the 24-0-24 VAC supply to the
instrument power pwb to produce two independent rectified
voltages.
Diodes D53 (D18) and D54 (D19) and the voltage divider formed
by R168 (R107) and R167 (R108) deliver a rectified voltage with
a peak value of about 9.5 VDC to pin 6 of IC21 (U15B).

Publication date: 8/15/2006


14-23
Varian 700-ES Series instruments

Diodes D51, (D20), D52, (D21), capacitor C98 (C71) and a


voltage divider formed by R163 (R83) and R164 (R84) deliver a
filtered voltage of 3 VDC at pin 5 of IC21 (U15B). The output of
comparator IC21B (U15B) toggles to +15 VDC when the voltage
at pin 6 is higher than the voltage at pin 5. This produces a pulse
train at pin 7 with on / off times of
8.4 msec at +15 VDC and 1.6 msec at 0 VDC at 50 Hz
7.0 msec at +15 VDC and 1.33 msec at 0 VDC at 60 Hz
The detailed description of this electronics assumes 50 Hz
operation - see figure 3 for timing information.
Each 1.6 msec zero volt pulse at the output of IC21 (U15B) pin 7
turns on transistor TR 15 (Q11) which charges capacitor C101
(C96) through resistor R171 (R137) and diode D175 (D49).
When the output of IC21 (U15) swings to +15 VDC, TR 15 (Q11)
turns off and C101 (C96) discharges through resistors R174
(R139) and R175 (R142). The periodic charging and discharging
of C101 (C96) produces a ’step and ramp’ waveform at pin 6 of
comparator IC23 (U25A).
The voltage across the secondary winding of the filament
transformer 1TR2, is applied to input of the differential amplifier
IC18D (U26A) through PL10 pins 1 and 2 (P10 pins 1 and 2).
IC18D (U26A) has a gain of 0.79. It outputs to IC19 (U19), an
RMS to DC converter, which outputs a DC voltage proportional
to the RMS input. The output of IC19 (U19) to pin 5 of buffer
IC18 (U26B), is through the switched voltage divider formed by
R204, (R135), R205, (R146), R150 (R136) and MOSFET TR14
(Q15). The switched voltage divider is used to select a filament
voltage of either 6.3 VRMS or 6.1 VRMS (see Filament Voltage
Selection).

Publication date: 8/15/2006 14-24


Varian 700-ES Series instruments

Figure 3 Filament supply timing diagram

The output of IC18B (U26B) forms an input to the integrator


IC18A (U26D). Under normal operating conditions TR16 (Q27) is
off, and the voltage at IC18 pin 3 (U26 pin 12) is 5 VDC. The
integrator IC18A (U26D) compares the voltage at TP20 (TP25)
to 5 VDC. The system has been designed so that the voltage at
TP20 (TP25) is 5 VDC when the voltage across the filament of
the RF power triode is 6.3 VRMS (or 6.1 VRMS).
IC23B (U25A) compares the output of integrator IC18B (U26D)
with the “step and ramp” voltage at IC23 pin 6 (U25A pin 2).
When the ramp voltage at pin 6 (pin 2) falls below the integrator
voltage at IC23 pin 5 (U25A pin 3), pin 7 (pin 1) toggles high.
This rising edge triggers monostable IC22A at pin 4 (U20A pin 4)
and outputs a high pulse about 2 msec long at pin 6. The pulse
from (U20A) IC22A pin 4 turns-on transistor TR13 (Q26). TR13
(Q26) turns on the filament SSR.

Publication date: 8/15/2006


14-25
Varian 700-ES Series instruments

The filament SSR is in series with the primary circuit of the


filament transformer, 1TR2. Phase-controlled current then flows
in the filament of the RF power triode.
When the filament SSR fires, the voltage at TP20 (TP25)
increases, discharging the integrating capacitor C105 (C104)
which reduces the voltage at TP24 (TP46). This lower integrator
voltage extends the period to the next monostable triggering
edge from IC22A (U20A) which delays the next firing cycle of the
filament SSR. When the filament voltage drops, the integrator
voltage increases which causes the monostable trigger pulse to
be generated earlier in the firing cycle.
The filament supply generates an active high status signal Fil
Sense which tells the RF interface pwb that the filament voltage
is within acceptable limits. Fil Sense is required to be at a logic
high level for the plasma ignition sequence.
Comparators IC20A (U29A) and IC20B (U29B) detect whether
the filament voltage is too high or too low. If the voltage at TP20
(TP25) is greater than +5.6 VDC then IC20 pin 1 (U29A) will
toggle low. If the voltage at TP20 (TP25) is less than 4.5 VDC,
then the IC20 pin 7 (U29A) will toggle low. In either case, a
filament voltage failure will be signalled to the RF interface pwb.

Missing mains cycle detector


IC22B (U20B) inhibits SSR trigger pulses on PL8 (P8) pin 6 and
resets the filament supply slow start circuit if it detects a missing
mains cycle. This is designed to avoid the possible saturation of
the filament transformer, 1TR2.
IC22 (U20B) is a dual retriggerable monostable. A rising edge at
the A input, starts the timer period, and the Q output goes high.
When the timer period ends, the Q output goes low. The timer
period is set by the resistor and capacitor connected to the RTR
and CTC pins. The CD input can be used to override the timer
period. If CD goes low, the Q output will go low.
IC22B, (U20B) has a 12 msec. timer period set by C102 (C92)
and R178 (R138). A positive edge at pin 12 toggles the Q output
from low to high. 12 msec later, the Q output will toggle low,
unless a retriggering positive edge is detected.
The pulse output of IC21 (U15B) pin 7 is referenced to the mains
frequency, and under normal operating conditions has a positive
edge every 10 msec at mains frequency of 50 Hz or every 8
msec at a mains frequency of 60 Hz. This positive edge at IC21
pin 7 (U15B) retriggers the monostable IC22B (U20B). If a mains
cycle is missed, IC22B (U20B) will time out and its Q output will
toggle low. This clears the Q output of IC22A (U20A) which
inhibits the SSR firing pulses at PL8 (P8) pin 6. A logic low at
IC22 (U20B) pin 10 also turns on FET TR16 (Q27) which
discharges C104, (C120) grounding the 5V reference input to
IC18 pin 3 (U26D pin 12).

Publication date: 8/15/2006 14-26


Varian 700-ES Series instruments

Soft starting the supply


The filament supply is soft started by IC22B (U20B).
When power is applied to the instrument power pwb, C104,
(C120) is discharged and IC18 pin 3 (U26D pin 12) is at 0 volts.
When IC22 pin 10 (U20B) goes high, TR16 (27) turns off and
C104 (C120) charges through R184 (R218). As C104 (C120)
charges, the voltage at IC18 pin 3 (U26D pin 12) rises slowly to 5
VDC and the voltage at TP24 (TP46) rises slowly to its working
voltage.
The effect of the slowly rising voltage at TP24 (TP46) is to
initially trigger the SSR late in the mains cycle. As the voltage at
TP24 (TP46) rises, the SSR is triggered progressively earlier in
the mains, and the filament voltage rises slowly. This soft start
procedure limits the inrush current into the filament of the RF
power triode, at turn-on.

Filament supply enable input


The Q output of the missing mains cycle detector, IC22B, (U20B)
can be overridden by the voltage at its CD input, pin 13. When
the CD input goes low, the Q output (pin 10) goes low, which
inhibits the filament SSR trigger pulses and discharges C104
(C120) via TR16 (Q27). The CD input of IC22B (U20B) is
controlled by active high Fil Ctrl input on PL9 (P9) pin 2.
The filament supply is enabled by the active high control line Fil
Ctrl from the RF interface pwb. When Fil Ctrl is low, IC23 pin 1
(U25B) is logic low, IC18 pin 8 (U26C) is -15 VDC, and IC22 pin
13 (U20B) is a logic low. IC22 pin 13 (U20B) inhibits the filament
SSR trigger pulses from IC22 pin 4 (U20A) turning on TR16
(Q27) and grounding the 5 VDC reference input into IC18 pin 3,
(U26D). When the supply is to be activated, Fil Ctrl goes high,
which toggles IC23 pin 1 (U25B pin 7) and IC18 pin 8 (U26C)
high, allowing IC22B (20B) to function normally. IC22 pin 10
(U20B) goes high, TR16 (Q27) turns off, and the filament voltage
supply begins to soft start.

Filament voltage selection


The Filament Volts input signal on PL5 (P5) pin 6 is from an
open collector output on the 386-EX control pwb. R148 (R99) is
a pull up resistor for this input. The Filament Volts input is used
to select one of two filament operating voltages. When Filament
Volts is high (12 VDC) the filament voltage of the RF power
triode will be 6.3 VRMS. When Filament Volts is low the filament
voltage of the RF power triode will be 3% less or 6.1 VRMS.
The 386-EX control pwb monitors the RF power triode filament
on time and reduces the filament voltage from 6.3 VRMS to 5.9
VRMS after 200 hours of operation. This 6% reduction in
filament voltage is recommended by the manufacturer to improve
the RF power triode operating lifetime.

Publication date: 8/15/2006


14-27
Varian 700-ES Series instruments

When Filament Volts is high (12Vdc), TR14 (Q15) is on, which


shorts out R150 (R136). Under normal operation, the voltage at
TP20 (TP25) is 5 VDC. IC18B (U26B) is a buffer and the voltage
across R205 (R146) is 5 VDC. The current through R205 (R146)
is 1mA. The same current flows through R204 (R145), producing
a voltage of 5.20 VDC at TP33 (TP24). A voltage of 5.20 VDC at
TP33 (TP24) corresponds to a voltage of 5.20 VRMS at TP19
(TP22) and a voltage of 6.58 VRMS between PL10 (P10) pins 1
and 2.
When Filament Volts goes low, TR14 (Q15) is off and R150
(R136) conducts current. The voltage at IC18B (U26B) is 5VDC
as before and the voltage across R205 (R146) and R150 (R136)
in series is 240 µA. The same current flows through R204,
(R135) giving a voltage of 5.05 VDC at TP33 (TP 24).

FILAMENT TP33 1TR2 Filament


VOLTS secondary voltage at RF
(TP24)
power triode
12V 5.20 VDC 6.58 VRMS 6.3 VRMS
<1V 4.89 VDC 6.18 VRMS 5.9 VRMS

The voltage across PL10 (P10) pins 1 and 2 is equal to the


voltage across the secondary of 1TR2. The voltage at the
filament of the RF power triode is lower than the voltage at the
secondary winding of 1TR2, due to the voltage drop across the
interconnecting cables.

Varian 710-ES Series optical attenuator drive


The Varian 710-ES Series attenuator assembly is directly driven
by a stepper motor. During instrument initialization the attenuator
assembly is moved to its home position which is the closed
position. The closed position is determined by driving the
attenuator a fixed number of steps to its mechanical stop. After
initialization, one of three positions is software selected by
driving the assembly a fixed number of motor steps away from
the home position.
The attenuator drive circuitry is located on the Varian 710-ES
Series instrument power pwb. Two open collector input signals
from the 386-EX control pwb are used to drive the attenuator.
The attenuator stepper motor is driven by the 4 bit shift register
U11 and Darlington driver sets on U16.
At instrument power-up, R59 and C59 provide a pulse to reset
the shift register to 0. With a pattern of 0000, U16 has all phases
OFF.

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Varian 700-ES Series instruments

R77, C60, R51 and C42 provide low pass filters for the
DIRECTION and STEP inputs. When the STEP input is high for
>100ms, the voltage at TP7 will drop at a rate controlled by R78
and C52. This force both of the outputs at U10B pin 4 and U10C
pin 10 to go high. S0 and S1 inputs at U11 pin 9 and pin 10 are
high. When the STEP voltage goes low, a rising clock edge at
pin 11 of shift register U11 loads the parallel input data at D0-D3
(pattern = 0001). The voltage at TP7 will then rise and U10B and
U10C will be ready for stepping. R52 and D26 speed the rise
time required for C52.
Under normal operation, a 5ms high pulse at TP52 will drive the
attenuator disc one step in the direction set by the DIRECTION
signal at TP49 or the trailing edge of the pulse. A DIRECTION
high signal will shift the register left and DIRECTION low will shift
it right.
Bits 0 and 3 are fed back to U11 pins 2 and 7 to form a circular
register. Q3 output at pin 12 is connected through R58 and C55
and the on-chip inverter Dsr to the input of Q0. Q0 output at pin
15 is connected through R60 and C56 to and the on-chip inverter
Dsl at pin 7 to the input of Q3.
The pattern in the register is buffered by Darlington drivers on
U16. U16 supplies the motor current for each phase. Flyback
diodes for the motor windings are provided internally. In normal
operation only one phase of the stepper motor will be driven at
any one time.

14.3.2 Solid State Relays


There are two Solid State Relays located in the power supply
compartment
• Filament SSR
to supply phase controlled 240 VAC mains power to the
primary of filament transformer 1TR2. The SSR is triggered
by current pulses on PL8, from the power/control pwb.
• Polychromator heater SSR
for supplying 220 VAC mains power to the polychromator
outer box heater. The switching of the SSR is controlled by
inputs on PL8, from the power/control pwb.

14.3.3 +5VDC and +12 VDC Power supply assembly


An OEM (original equipment manufacturer) switching power
supply delivers regulated +5 VDC and +12 VDC supplies to the
instrument power pwb. This assembly is connected to the 220
VAC tap on the primary winding of 1TR1. No schematic or repair
information is supplied because component-level repair is not
economic. If the power supply fails, it should be replaced.

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Varian 700-ES Series instruments

14.3.4 High voltage DC (HVDC) power supply


The high voltage DC power supply provides anode power for the
RF power triode. The mains input supply line to the HVDC power
supply is isolated by circuit breaker 1SW1 and a contactor that is
an internal to the assembly. The power supply is a 0 to 7000 volt
switching supply. The high voltage output is set by the control
voltage generated on the RF interface pwb.
The supply consists of self contained module that is not field
repairable and in the case of failure of this power supply, it
should be replaced as a unit.
For information on the testing and monitoring of the HVDC
power supply refer to ‘Measurements’ in Section 11 of this
manual.

14.4 Important information


It is essential that the methods described in this section are used
when performing service on any of the power supply assemblies.
Failure to do so may result in permanent damage to the
instrument or expose personnel to potential danger.

Warning There are high voltages in the mains input compartment.


Contact with these circuits will result in electric shock which
can cause death or serious personal injury.

Always disconnect the mains cable when disconnecting or


removing any of the power supply assemblies
Always use the test points described in section 14.7
Measurements and calibrations. Do not directly probe high
voltage supplies

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Varian 700-ES Series instruments

14.5 Specifications
14.5.1 Mains input

Input Non-removable single phase high


current flex cable
Fusing 5 X 20 mm IEC 127 sheet 5 T6.3 A H
250 V in both lines
Voltage 208, 220, 240 VAC - low power mains
inputs are selected at 1TR1
Frequency 49 to 61 Hz

14.5.2 Low voltage supplies

+5V and +12V


Manufacturer Computer Products
Model NFS110-7602P
Output +5V ± 2% @ 8 A
+12 V +3% @ 4.5 A
+20 VDC
Input voltage 26 VDC to 39 VDC
Voltage +20 V ± 0.5 V
Maximum current 2.5 A
Regulation 0.5% worst case
Switching freq. 100 kHz
Current limit 2 A continuous
-20 VDC
Input voltage 20 VRMS to 27 VRMS
Voltage -19.5 VDC ± 0.7 VDC
Regulation 1.5% worst case
Switching freq. 40 kHz
Current limit 1.3 A continuous
+ 28 VDC
unregulated
Voltage range 26 VDC to 39 VDC
24-0-24 VAC
Voltage range 20 VRMS to 27 VRMS per winding
22 VAC
Voltage range 18 VAC to 27 VAC

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Varian 700-ES Series instruments

14.5.3 Varian 710-ES Series camera supply

DC input voltage +20 ±0.5 V


Output voltage + 25 to +27.1 VDC
Maximum current 50 mA

14.5.4 Varian 710-ES Series camera peltier supply

AC input voltage 22 VAC to 30 VAC


Voltage output 3.0 VDC to 9.5 VDC
Maximum current 3.6 A (continuous)

14.5.5 Varian 720/730-ES Series camera peltier supply

DC input voltage 26 VDC to 39 VDC


Voltage output 2.5 VDC to 12.9 VDC
Maximum current 2.5 A (continuous)

14.5.6 RF Power tube

Filament voltage 6.3 V or 5.9 VRMS (software selected)


Filament current 22.3 A RMS
Mains input 187 to 264 VRMS

14.5.7 Heater supplies (outer box)

Input voltage 220 VAC


Power out 110 watts (outer box)
Current 0.5 A to 0.66 A (total)

14.5.8 High voltage DC supply

DC output voltage 0 to +7000 VDC ± 2% V


Output current 460 mA maximum
Ripple 2% RMS of output voltage
Response time about 5 msec
constant
Overshoot Less than 15%

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Varian 700-ES Series instruments

14.6 Removal and replacement procedures


This section provides procedures for removing field serviceable
components and modules in the power supply assemblies.
Replacement procedures are the reverse unless otherwise
stated. You will need to remove instrument covers to remove
these assemblies - see section 1 for details on removal of covers
and identification of assemblies.

14.6.1 Input power compartment


Turn-off the low and high power to the instrument and unplug the
mains cable before starting work.
Removal of the input power compartment assemblies is straight
forward and does not need any instructions.

Warning There are high voltages in the input power compartment.


Electric shock from contact with these circuits can cause
death or serious personal injury.

14.6.2 High voltage power supply compartment


Removal of the high voltage power supply requires access to
both the front and rear of the instrument. Disassembly re-
assembly is straight forward and does not need any instructions.

Warning There are high voltages in the high voltage supply


compartment. Electric shock from contact with these circuits
can cause death or serious personal injury.

14.6.3 Instrument power pwb assembly


The instrument power pwb is mounted on the instrument power
pwb mounting bracket. The bracket has two mounting positions
on the instrument:
Removal of these assemblies does not need any special
instructions.

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Varian 700-ES Series instruments

14.7 Measurements and calibrations


This section contains a reference list of safe, accessible test
points for power supply measurements and the calibration of the
peltier temperature offset.

14.7.1 +28 V unregulated supply


+28 V unreg Voltage across 1R2
Varian 710-ES Series Instrument power pwb
LED 1 on
Varian 720/730-ES Series Instrument power
pwb LED D4 on

14.7.2 24-0-24 VAC supply


A24 VAC Remove SK1 connected to the instrument
power pwb pins 3 and 7
Varian 710-ES Series Instrument power
pwb LED 2 on
Varian 720/730-ES Series Instrument power
pwb LED D12 on
B24 VAC Remove SK1 connected to the instrument
power pwb pins 4 and 7
Varian 710-ES Series Instrument power
pwb LED2 on
Varian 720/730-ES Series Instrument power
pwb LED D12 on

14.7.3 +5 VDC and +12 VDC supplies


+5 VDC Voltage between TP 16 and TP 18 on the
Varian 710-ES Series Instrument power
pwb (LED 4 on)
Voltage between TP 27 and TP 28 on the
Varian 720/730-ES Series Instrument power
pwb (LED D61)
+12 VDC Voltage between TP 13 and TP 18 on the
Varian 710-ES Series Instrument power
pwb (LED 3 on)
Voltage between TP 26 and TP 28 on the
Varian 720/730-ES Series Instrument power
pwb (LED D60)

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Varian 700-ES Series instruments

14.7.4 + 5 VDC reference


+5 VDC Voltage between TP34 and TP18 on the
Varian 710-ES Series Instrument power
pwb
Voltage between TP 10 and TP 28 on the
Varian 720/730-ES Series Instrument power
pwb

14.7.5 +20 VDC and -20 VDC supplies


+20 VDC Voltage between TP12 and TP 2 on the
Varian 710-ES Series Instrument power pwb
(LED 1 on)
Voltage between TP 2 and TP 1 on the
Varian 720/730-ES Series Instrument power
pwb (LED D4 on)
-20 VDC Voltage between TP17 and TP2 on the
Varian 710-ES Series Instrument power pwb
(LED 2 on)
Voltage between TP 3 and TP 1 on the
Varian 720/730-ES Series instrument power
pwb (LED D12 on)

14.7.6 Filament supply


6.3 VRMS Between secondary winding taps on 1TR2
Current Use a clip on, true RMS tong
(clamp) ammeter on wiring to filament
RF interface LED D9 on

Note The voltage at the secondary winding of 1TR2 should be


6.58VRMS when TP 32 (TP 26) on the instrument power pwb is
a logic high or 6.18 when TP 32 (TP 32) on the instrument power
pwb is a logic low.

14.7.7 Outer box heater supply


Enabled Varian 710-ES Series Instrument power pwb
LED 6 on
Varian 720/730-ES Series Instrument power
pwb LED D62 on

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Varian 700-ES Series instruments

14.7.8 Peltier power supply


Enabled Varian 710-ES Series Instrument power pwb
LED 5 on
Varian 720/730-ES Series Instrument power
pwb LED D48 on

14.7.9 High voltage supply

Warning There are high voltages in the mains input compartment.


Contact with these circuits will result in electric shock which
can cause death or serious personal injury.

Always disconnect the mains cable when disconnecting or


removing any of the power supply assemblies
Always use the test points described in section 14.7
Measurements and calibrations. Do not directly probe high
voltage supplies

HVDC Monitoring voltage between TP19 and TP18


on the RF interface pwb. 1 VDC equals
1000 VDC from the HVDC supply.
Current monitoring voltage between TP20
and TP18 on the RF interface pwb. - 10 V
equals 1 A HVDC supply current.

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Varian 700-ES Series instruments

14.7.10 Peltier temperature offset

Note The Varian 710-ES Series and Varian 720/730-ES Series


instruments use two separate power supply pwbs and camera
assemblies that provide different detector temperature feedback
voltages. The peltier feedback and peltier interlock and enable
control for the two instruments are different. The peltier circuit for
the Varian 720/730-ES Series has an adjustable temperature
offset voltage. The temperature offset is fixed in Varian 710-ES
Series temperature and is not adjustable.
The Varian 720/730-ES Series peltier temperature offset voltage
is used to ensure accurate regulation of the camera assembly
temperature and to ensure the correct camera temperature is
displayed by the PC software. RV1 on the instrument power pwb
is adjusted to null the offset.
Use the PC diagnostics to turn off the peltier controller
Set the water cooler to 20° C
Wait 5 minutes for thermal conduction to bring the camera
assembly to the temperature of the water cooler
Place a voltmeter between PL11 and AE
Adjust RV1 for + 2 VDC
Restore the instrument to operating conditions and use
diagnostics to turn on the peltier controller
Check the readout of the voltmeter for -3.55 VDC.

Note 1 VDC = 10 °C

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