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B. S. Dassanayake1,3
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J Mater Sci: Mater Electron
Varity of methods have been deployed to fabricate CdTe 250 and 300 °C using a resistance heating system.
thin films such as, close-spaced sublimation [13], RF mag- Deposited CdTe thin films were later air-annealed at
netron sputtering [14], electro deposition [15], molecular 400 °C for 20 min, to resemble the state of the absorber
beam epitaxy [16] and thermal evaporation [17]. Out of these, layer of a typical CdTe based solar cell [25]. Structural
thermal evaporation method has benefits such as low level of properties of the thin films were analyzed employing Phi-
impurity presence in the growing layer, low trend of oxide lips X’Pert X-ray diffractometer GIXRD using CuKa
formation and straight-line propagation of vapors from source radiation with k = 1.54184 Å in continuous mode at
to substrate. Therefore, thermal evaporation is considered as generator voltage of 45 kV in 40 mA tube current using
an attractive method of fabrication of thin films such as 0.02 scan step size with the step time of 5 s and 2h in the
cadmium sulfide [18], cuprous oxide [19], cadmium selenide range of 10°–100°. Atomic compositions of CdTe thin
[20], CdTe [21] etc., due to its high deposition rate, low films were analyzed by micro analytical technique of EDX
material consumption as well as low cost of operation [22]. spectroscopy using INCA X-act SN 67217 EDX under
Substrate temperature during the fabrication process can accelerating voltages from 10 to 20 kV. Optical measure-
critically affect the properties of the film. Therefore, opti- ments were conducted at room temperature in the wave-
mizing substrate temperature is essential for fabricating high length range from 200 to 1000 nm using a UV-1800
performance devices. Not only substrate temperature, but Shimadzu double beam UV–Vis spectrophotometer. Mor-
also post deposition treatments such as chemical etching, phological analysis was conducted using ZEISS EVO|LS15
CdCl2 treatment, metal doping and annealing at N2 envi- SEM under a beam current of 30 lA. Electrical charac-
ronment, can also improve the efficiency of the device sig- terizations of the samples were carried out by van der Pauw
nificantly. However, it is challenging to fabricate high method using Keithley 485 Auto-ranging Picoammeter via
quality CdTe thin films when their compositional and forming Au contacts by means of thermal evaporation.
structural properties are not well understood. Therefore, in
this work, the effect of substrate temperature on the struc-
tural properties of the film is extensively studied along with
3 Results and discussion
compositional analysis throughout the cross section of CdTe
thin films, which has been rarely studied. The influence of
3.1 Optical characterizations
substrate temperature on structural properties has been
characterized using grazing incidence X-ray diffraction
Optical measurements are one of the most important tools
(GIXRD) technique and depth profile analysis was carried
of determining the band structure of semiconductors. The
out using energy dispersive X-ray (EDX) spectroscopic
absorption coefficient (a) of CdTe thin films were calcu-
measurements for films deposited under different substrate
lated from the optical transmittance measurements using:
temperatures. Additionally, optical, morphological and
electrical characterizations were conducted using UV–visi- 2:303 1
a¼ log ð1Þ
ble spectroscopy, scanning electron microscopy (SEM) and d T
van der Pauw methods respectively.
where T is the transmittance and d is the thickness of the
film. The absorption coefficient can be written in general
form as a function of incident photon energy as:
2 Experimental details n
aht ¼ A ht Eg ð2Þ
CdTe thermal evaporation was done using an alumina
where A is a constant, h is the Planck’s constant, t is fre-
crucible with commercially available CdTe powder
quency of the incident radiation, Eg is the optical band gap
(Sigma-Aldrich, \250 lm, deposition grade, C99.99 %).
and n = 1/2. Extrapolation of the linear region of (aht)2
The chamber was emptied at a pressure better than
versus ht plot at a = 0 gives the direct energy band gap
2 9 10-5 Torr by combination of rotary and diffusion
[26–28]. The Eg values which were calculated accordingly
pumps. CdTe films of thickness 5 lm were deposited on
are indicated for different substrate temperatures in Fig. 1.
clean soda lime glass substrates using Edwards Vacuum
According to the results, the Eg of the films were found to
Coating Unit, keeping substrates fixed at 12 cm above the
slightly increase with increasing substrate temperature.
crucible. The growth rate was controlled by keeping the
sources temperature constant at 650 °C. Prior to deposition
of CdTe films on soda lime glass substrates, the substrates 3.2 Structural characterization
were cleaned using the standard cleaning procedure
[23, 24]. During the process of deposition, the substrate X-ray diffraction data were analyzed in order to study the
temperatures were maintained constant at 125, 150, 200, effect of substrate temperature on structural properties of
123
J Mater Sci: Mater Electron
123
J Mater Sci: Mater Electron
X-ray diffractograms of as-deposited and annealed the lower side. Such deviations are an indication of a
films, both deposited under a substrate temperature of potential variation of corresponding lattice parameter (a0)
200 °C, are compared in Fig. 4. According to the results, of the film. Lattice parameter related to each peak of the
the as-deposited film is highly textured along (111) direc- GIXRD pattern can be determined using the relation:
tion as seen in Fig. 4b. At higher annealing temperatures, pffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi
ao ¼ d h2 þ k 2 þ l 2 ð4Þ
the atomic, ionic, or molecular species of CdTe formed on
the substrate surface acquire a large thermal energy and where d = k/2 sinh and h, k, l are the Miller indices for the
hence a large mobility giving way to the recrystallization diffraction peaks. The Nelson and Taylor method
process in the film [31]. Due to this recrystallization pro- [6, 11, 33] was used to calculate a0 of the CdTe thin film.
cess and the subsequent formation of planes of cubic zinc In this method the a0 values calculated for different peaks
blende structure of CdTe film, the Bragg reflections of are plotted against cos2h [(sinh)-1 ? h-1)], and the lattice
X-rays at the corresponding planes become possible, as parameter of the thin film is obtained by the intercept of the
seen in Fig. 4a. The emergence of Te peak after annealing graph. Variation of calculated a0 values with respect to
suggests that there is excess Te, which precipitates as a substrate temperature is shown in the Fig. 6. According to
result of the annealing process [32]. The SEM images of the results, highest a0 value of 6.488 Å was recorded for
the CdTe surface before and after annealing are shown in samples fabricated under a substrate temperature of
Fig. 5. The rod-like features in Fig. 5b are seemed to 200 °C.
appear as a result of the annealing process. A considerably high a0 value was obtained for films
According to Fig. 2, the angular positions of the deposited under a substrate temperature of 200 °C, where
diffraction peaks were found to be slightly shifted towards the strong Te peak was seen in Fig. 2c. The existence of the
strong Te peak suggests the presence of excess Te on the
Fig. 5 SEM images of CdTe at 50 K magnification for samples deposited under a substrate temperature of 200 °C a as-deposited, b annealed at
400 °C for 20 min
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J Mater Sci: Mater Electron
123
J Mater Sci: Mater Electron
which were deposited under a substrate temperature of significant difference between Cd and Te atomic percent-
200 °C were found to have the largest crystallite size ages for a film fabricated at a given substrate temperature,
(29.16 nm), which is an increment by 2.85 nm from its as- when analyzed using different electron acceleration
deposited state. This relatively large crystallite size at voltages.
200 °C compared to other substrate temperatures can be a Depending on the critical excitation energy, character-
result of the presence of excess Te in the film. istic X-rays may be generated over a substantial fraction of
the electron interaction volume. In order to predict the
3.3 Electrical properties depth of X-ray production (X-ray range), the Anderson–
Hasler method can be used. The Anderson–Hasler X-ray
Changes in the structural and morphological properties of range (Rx) is given by:
the films with the substrate temperature such as phase 0:064 1:68
change, enlargement of grains and diminishing of grain Rx ¼ ðE0 Ec1:68 Þ ð8Þ
q
boundaries during deposition process have an effect on the
electrical properties of the deposited films [40]. Fabricated where E0 is the accelerating voltage in keV, Ec is critical
thin films were electrically characterized using van der excitation energy in keV and q is the specimen density in
Pauw method to estimate the resistivity. The obtained g cm-3, then Rx has units of lm [42]. According to the
results are shown in Fig. 9. According to the figure, the above relationship, X-ray range for 10 and 20 kV electron
lowest resistivity (5.2 9 104 X cm) was recorded for beams are 0.4 and 1.5 lm respectively. Hence, the differ-
samples fabricated under a substrate temperature of ences between the atomic percentages of Cd and Te in
200 °C, where the largest crystallite size was seen. This Fig. 10a, b directly suggest an existence of a non-uniform
significantly low resistivity value observed at 200 °C can composition inside the film. In addition, the result in
be related with the presence of excess Te in the sample [34] Fig. 10 also suggests that the composition of the film can
as well as the reduction of the number of grain boundaries be influenced by the substrate temperature at which the film
due to the increase of the crystallite size [41]. The presence was fabricated.
of materials in excess can be better understood with a depth
profile analysis of the films.
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J Mater Sci: Mater Electron
In order to understand the variation of the film compo- as high as 250 °C, while it is almost negligible for Cd on
sition, a depth profile analysis was carried out using EDX glass, even for substrate temperatures as low as 26 °C [43].
spectroscopic measurements along the cross-section of a Hence the Te rich nature of the CdTe film close to the
film using a 10 kV electron beam. Measurements were substrate, observed in Fig. 11, can be because of the higher
made for films of 5 lm thickness, deposited under a sub- sticking coefficient of Te on glass compared to Cd at
strate temperature of 200 °C, for both as-deposited and 200 °C.
annealed films. The results obtained are shown in the When comparing Fig. 11a, b, the results suggest that the
Fig. 11. film has become Te rich near the surface as a result of
As seen in Fig. 11a, it can be observed that the as-de- annealing. This observation can be further proven by the
posited samples are Te rich close to the substrate (near X-ray diffractogram shown in Fig. 4, where a Te peak has
5 lm of the figure), while it is almost stoichiometric close emerged at 27.71 after annealing. In addition, the colour of
to the surface (near 0 lm of the figure). The intermediate the as-deposited film was observed to change from typical
region in between surface and the substrate appears slightly dark gray to light gray after annealing. This transformation
Cd rich. Depth profile after the film is subjected to air of colour is considered due to surface of CdTe becoming
annealing is shown in Fig. 11b. According to the result Te rich [44]. Hence, both the above factors confirm that the
after annealing, the region close to the substrate appears Te film surface is, in fact, Te rich.
rich, while intermediate region is Cd rich. The region near The heat of sublimation of atomic Cd and diatomic Te
the sample surface appears to be rich in Te. are 26.7 and 39.2 kcal mol-1 respectively [45]. When
Sticking coefficient of a given material can depend on annealing, CdTe near the film surface can evaporate as
factors such as chemical attachment kinetics and substrate Cd(g) and Te2(g). The Cd vapor pressure is higher than that
temperature. In this experimental work, all the CdTe films of Te2. As a result, when CdTe films are heated, the flux of
were deposited on glass substrates. Experiments on glass Cd atoms escaping from the film surface is higher than the
substrates have reported that the sticking coefficient of Te flux of Te2 molecules. The unequal number of Cd and Te
on glass to be very close to 1.0 for substrate temperatures atoms evaporated from the film originates the formation of
Cd vacancies in the crystalline lattice, making the material
Te rich [46].
4 Conclusion
123
J Mater Sci: Mater Electron
escaping Cd(g) from the CdTe surface compared to Te2(- 17. O. Toma, L. Ion, M. Girtan, S. Antohe, Sol. Energy 108, 51
g) and higher sticking coefficient of Te on glass compared (2014)
18. M.A. Mahdi, J.J. Hassan, S.J. Kasim, S.S. Ng, Z. Hassan, Mater.
to Cd on glass, respectively. Additionally the intermediate Sci. Semicond. Process. 26, 87 (2014)
region of the film was found to become more Cd rich after 19. Z. Zang, A. Nakamura, J. Temmyo, Opt. Express 21, 11448
annealing compared to the as-deposited. This study reveals (2013)
tuning the substrate temperature during the growth of the 20. M. Ali, W.A.A. Syeda, M. Zubair, N.A. Shah, A. Mehmood,
Appl. Surf. Sci. 284, 482 (2013)
film is useful in altering and optimizing the structural, 21. V.V. Brus, M.N. Solovan, E.V. Maistruk, I.P. Kozyarskii, P.D.
compositional, morphological and electrical properties of Maryanchuk, K.S. Ulyanytsky, J. Rappich, Phys. Solid State 56,
CdTe thin films. 1947 (2014)
22. K.S. Rahman, F. Haque, N.A. Khan, M.A. Islam, M.M. Alam,
Acknowledgments Financial assistance from National Science Z.A. Alothman, K. Sopian, N. Amin, Chalcogenide Lett. 11, 129
Foundation of Sri Lanka (NSF, RG/12/BS/03), Prof. S. Sivanan- (2014)
thanthan of University of Illinois at Chicago, USA and the Post- 23. W.G.C. Kumarage, L.B.D.R.P. Wijesundara, V.A. Seneviratne,
graduate Institute of Science of University of Peradeniya, Sri Lanka C.P. Jayalath, B.S. Dassanayake, J. Phys. D Appl. Phys. 49,
are gratefully acknowledged. Prof. M.A.K.L. Dissanayake of National 095109 (2016)
Institute of Fundamental Studies of Sri Lanka and Prof. K. Pre- 24. W.G.C. Kumarage, L.B.D.R.P. Wijesundara, V.A. Seneviratne,
maratne of Department of Physics at University of Peradeniya, Dr. C.P. Jayalath, Procedia Eng. 139, 64 (2016)
C.V. Hettiarachchi of Department of Chemistry at University of 25. N. Romeo, A. Bosio, D. Menossi, A. Romeo, M. Aramini, Energy
Peradeniya, Dr. R. Dhere of Sivananthan Laboratories Inc., Boling- Procedia 57, 65 (2014)
brook, IL, USA, Mr. P.G.S.A. Bandara of University of Mississippi, 26. S. Lalitha, R. Sathyamoorthy, S. Senthilarasu, A. Subbarayan,
Oxford, MS, USA, Mr. R.G.S.A. Perera of Measurement Units, Sol. Energy Mater. Sol. Cells 90, 694 (2006)
Standards and Services Department in Sri Lanka, Mr. M.G.S.P. 27. C. Ding, Z. Ming, B. Li, L. Feng, J. Wu, Mater. Sci. Eng. B Adv.
Amarasinghe and Mr. M.C. Abeysinghe of Department of Physics, 178, 801 (2013)
University of Peradeniya and Dr. M. Nandasiri of Western Michigan 28. D. Geethalakshmi, N. Muthukumarasamy, R. Balasundaraprabhu,
University, USA, are acknowledged for their valuable suggestions, Adv. Mater. Res. 678, 131 (2013)
support and guidance. 29. G. Zoppi, K. Durose, S.J.C. Irvine, V. Barrioz, Semicond. Sci.
Technol. 21, 763 (2006)
30. S. Gupta, K. Munirathnam, Indian J. Pure Appl. Phys. 52, 44
(2014)
References 31. K. Punitha, R. Sivakumar, C. Sanjeeviraja, V. Ganesan, Appl.
Surf. Sci. 344, 89 (2015)
1. A.A.J. Al-Douri, F.Y. Al-Shakily, M.F.A. Alias, A.A. Alnajjar, 32. G.G. Rusu, M. Rusu, Solid State Commun. 116, 363 (2000)
Adv. Condens. Matter. Phys. 2010, 947684 (2010) 33. G.P. Hernandez, X. Mathew, J.P. Enriquez, B.E. Morales, M.M.
2. V. Kolkovsky, T. Wojciechowski, T. Wojtowicz, G. Karczewski, Lira, J.A. Toledo, A.S. Juarez, J. Campos, J. Mater. Sci. 39, 1515
Acta Phys. Pol. A 114, 1173 (2008) (2004)
3. T.H. Myers, J.R. Meyer, C.A. Hoffman, L.R. Ram-Mohan, Appl. 34. N.A. Shah, A. Ali, Z. Ali, A. Maqsood, A.K.S. Aqili, J. Cryst.
Phys. Lett. 61, 1814 (1992) Growth 284, 477 (2005)
4. A.A. Alnajjar, F.Y. Al-Shaikley, M.F.A. Alias, J. Electron 35. M. Birkholz, Thin Film Analysis by X-Ray Scattering (Wiley,
Devices 16, 1306 (2012) Weinheim, 2006), p. 244
5. S. Chun, S. Lee, Y. Jung, J.S. Bae, J. Kim, D. Kim, Curr. Appl. 36. S. Brennan, A. Munkholm, O.S. Leung, W.D. Nix, Phys. B 283,
Phys. 13, 211 (2013) 125 (2000)
6. J.P. Enriquez, N.R. Mathews, G.P. Hernandez, X. Mathew, 37. W. Gissler, H.A. Jehn, Advanced Techniques for Surface Engi-
Mater. Chem. Phys. 142, 432 (2013) neering (Kluwer Academic Publishers, Dordrecht, 1992), p. 286
7. P. Hu, B. Li, L. Feng, J. Wu, H. Jiang, H. Yang, X. Xiao, Surf. 38. M.B. Clemens, J.A. Bain, MRS Bull. 17, 46 (1992)
Coat. Technol. 213, 84 (2012) 39. V.D. Mote, Y. Purushotham, B.N. Dole, J. Theor. Appl. Phys. 6,
8. H.S. Patel, J.R. Rathod, K.D. Patel, V.M. Pathak, Am. J. Mater. 6 (2012)
Sci. Technol. 1, 11 (2012) 40. S.J. Ikhmayies, Modern Aspects of Bulk Crystal and Thin Film
9. S.K. Pandey, U. Tiwari, R. Raman, C. Prakash, V. Krishnab, V. Preparation (InTech, Croatia, 2012), p. 343
Dutta, K. Zimik, Thin Solid Film 473, 54 (2005) 41. J.H. Lee, Y.K. Park, K.J. Yang, Jpn. J. Appl. Phys. 40, 6741
10. S. Chander, M.S. Dhaka, Mater. Sci. Semicond. Process. 40, 708 (2001)
(2015) 42. J.I. Goldstein, D.E. Newbury, P. Echlin, D.C. Joy, C.E. Lyman,
11. J.P. Enriquez, X. Mathew, J. Cryst. Growth 259, 215 (2003) E. Lifshin, L. Sawyer, J.R. Michael, Scanning Electron Micro-
12. I. Polat, S. Yilmaz, E. Bacaksiz, M. Altunbas, M. Tomakin, Turk. scopy and X-Ray Microanalysis (Kluwer Academic Publishers,
J. Phys. 35, 197 (2011) New York, 2003), p. 286
13. M.A.F. Mendoza, R.C. Perez, G.T. Delgado, J.M. Marin, A.C. 43. C.J. Summers, E.L. Meeks, N.W. Cox, J. Vac. Sci. Technol. B 2,
Orea, O.Z. Angel, J. Sol. Energy Mater. Sol. Cells 95, 2023 224 (1984)
(2011) 44. M.M. Tessema, M.Sc. Thesis, University of Toledo (2009)
14. R. Castro-Rodriguez, P.B. Perez, D. Perez-Delgado, F. Caballero- 45. Y.S. Wu, C.R. Becker, A. Waag, K.V. Schierstedt, R.N.B. Tas-
Briones, J.L. Pena, Mater. Lett. 37, 281 (1998) sius, G. Landwehr, Appl. Phys. Lett. 62, 1510 (1993)
15. B. Shan, W. Wu, K. Feng, H. Nan, Mater. Lett. 166, 85 (2016) 46. M. Becerrila, O.Z. Angel, J.R.V. Garcia, R.R. Bon, J.G. Her-
16. J.S. Wang, Y.H. Tsai, C.W. Chen, Z.Y. Dai, S.C. Tong, C.S. nandez, J. Phys. Chem. Solids 62, 1081 (2001)
Yang, C.H. Wu, C.T. Yuan, J.L. Shen, J. Alloys Compd. 592, 53
(2014)
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