Professional Documents
Culture Documents
Motion Control
• State-of-the-Art
Nanopositioning Stages
• Motor and Piezo Actuators
and Controllers
• Automated Alignment
Systems
• Solutions for Photonics,
Microscopy, and
Bioscience Applications
• Wide Range of Tools and
Accessories
Testing a TravelMax™ Stage
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Motion Control
Selection Guide
MOTORIZED MULTI-AXIS
MANUAL STAGES STAGES PLATFORMS ACTUATORS CONTROLLERS
Pages 479 - 505 Pages 506 - 540 Pages 541 - 588 Pages 589 - 614 Pages 615 - 659
Manual Stages
Selection Guide
Flexure-Based Translation Stages
Pages 480 - 483
Lab Jacks
Page 499
Goniometers
Pages 504 - 505
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Motion Control
M SECTIONS
single axis. The manual adjustment screw Through Hole 1 Place
0.39"
offers 0.25 mm of travel per revolution, and 4-40 Through Hole
(10 mm)
SMC Piezo Indicated "B" (5 Places)
Linear Translation Connector the piezoelectric actuator provides 25 nm Typical
resolution. The stage can be driven by the 0.28"
1.94"
(49.4 mm)
Rotation TPZ001 controller, which is sold separately (7.0 mm)
as well as bundled with the stage (see below).
Goniometers 0.49"
(12.5 mm)
Features Specifications
I Steel Construction, I Travel: 0.06" (1.5 mm)
Black Paint Finish* I Horizontal Load Capacity: 1.1 lbs (0.5 kg)
I Flexure Design, No Static I Vertical Load Capacity: 0.55 lbs (0.25 kg)
C C C 0.39" (10 mm)
I
or Kinetic Friction Typical
Piezo Travel: 25 µm
I
C C
I
Thumbscrew and Piezo Resolution: 25 nm
Fine Adjustment
0.10" (0.25 mm)/Rev.
Piezo Adjustment
I
C
I
Coarse Adjust: 0.25 mm per Revolution M2 Tap
All Cables Included of Thumbscrew Indicated "C"
I
*The NF15P1 and NF15P2 Accessories
are Anodized Aluminum Piezo Drive Voltage: 0 - 75 V
NF15AP25 Accessories
The NF15P1 base plate provides a
convenient way to attach the stages NF15P2
to an optical system or table.
The NF15P2 angle bracket allows our
NanoFlex™ compact stages to be NF15P1
integrated into XY, XZ, and XYZ systems.
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Motion Control
CHAPTERS M
Manual Stages
Motorized Stages
Actuators
Controllers
MicroBlock
(For more details, see page 545) SECTIONS M
Goniometers
MBT616D
3-Axis NanoMax
(For more details, see pages 546 - 549)
Interchangeable Actuators
• Thumbscrew Drive
• Differential Micrometers
(Open- or Closed-Loop)
MAX311D
6-Axis NanoMax
(For more details, see pages 564 - 571)
Interchangeable Actuators
• Thumbscrew Drive
• Differential Micrometers
(Open- or Closed-Loop)
MAX603D
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Motion Control
When stability is of the utmost importance, these NanoFlex™ stages provide Counterbore for
1/4"-20 UNC (M6 x 1.00)
8-32 (M4)
ultra-smooth translation for applications that are intolerant to the errors 8 Places
Screw, 2 Places
inherent in linear bearings. The compound linear flexure design ensures true
linear motion over the full range of translation.
2.95" (75 mm)
Typ.
The NF5 series stages are supplied with a differential micrometer drive. An
optional internal piezo drive is available, with or without strain gauge
feedback. This stage is ideal for a variety of applications, including #6-32 UNC (M3)
Through, 4 Places 1/4"-20 UNC (M6)
interferometry, microscopy, and other precise nanopositioning applications. Through Hole, 2 Places
The extra stability offered by these stages means that they are suitable for
stacking in XY, XZ, and XYZ configurations when precise planar movement is
1.18"
required. The NF5 series stages can be mounted in an XYZ configuration 0.65"
(17 mm) (30 mm)
using the base plate (NF5P1) and angle bracket (NF5P2) featured below.
5.28"
(134 mm)
Nom
5 mm NanoFlex™ Stages
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
NF5D NF5D/M $ 795.00 £ 572.40 € 691,65 ¥ 6,336.15 Differential Adjuster Single-Axis Stage 5 mm Travel
Differential Adjuster and 20 µm Piezo
NF5DP20 NF5DP20/M $ 985.00 £ 709.20 € 856,95 ¥ 7,850.45
Single-Axis Stage, 5 mm Travel
Differential Adjuster and 20 µm Closed-Loop Piezo
NF5DP20S NF5DP20S/M $ 1,379.00 £ 992.88 € 1.199,73 ¥ 10,990.63
Single-Axis Stage, 5 mm Travel
NF5P2
NF5P1
5 mm NanoFlex™ Accessories
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
NF5P1 NF5P1/M $ 46.60 £ 33.55 € 40,54 ¥ 371.40 Mounting Plate for the 5 mm NanoFlex™ Series
NF5P2 NF5P2/M $ 94.10 £ 67.75 € 81,87 ¥ 749.98 Angle Bracket for the 5 mm NanoFlex™ Series
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Motion Control
control of Thorlabs’ I Closed-Loop Operation with T-Cube Strain Gauge Reader Unit
T-Cube Hub
open-loop, piezo- I Voltage Ramp/Waveform Generation Capability
actuated NF5D series
for up to 6
stage. The controller is controllers
TPZ001 Piezo Driver capable of delivering up to 150 V of drive voltage at 7.5 mA, thereby allowing an operating bandwidth
(For Complete Details,
up to 1 kHz when using a piezo element with 1 µF of capacitance.
See Pages 636 – 637)
Page 620
Features
I Nanometer-Level Position Resolution with I Provides Closed-Loop Operation with
Thorlabs’ NF5D Stage TPZ001 Cube Piezo Driver Shown Above
I Strain Gauge AC Bridge Signal Input I Position, Force, or Voltage Readout
The TSG001 T-Cube Strain Gauge Reader is a single-channel reader designed to measure, condition,
and display the feedback signal derived from the AC bridge strain gauge system contained within the
NF5DP20S stage. TSG001
Strain Gauge Reader
(For Complete Details,
TPZNF5 Bundle 5 mm NanoFlex™ Stage, Open-Loop Piezo and Driver Bundle See Pages 638 – 639)
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
TPZNF5 TPZNF5/M $ 1,580.00 £ 1,137.60 € 1.374,60 ¥ 12,592.60 NF5DP20 5 mm Travel Stage and TPZ001 Piezo Driver
TPS002 TPS002* $ 105.00 £ 75.60 € 91,35 ¥ 836.85 Dual T-Cube ±15 V/5 V Power Supply
TSGNF5 Bundle: 5 mm Travel, NanoFlex™ Stage, Strain Gauge Feedback and Driver Bundle
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
TSGNF5 TSGNF5/M $ 2,519.00 £ 1,813.68 € 2.191,53 ¥ 20,076.43 NF5DP20S 5 mm Travel Stage, TPZ001 Piezo Driver,
and TSG001 Stain Gauge Reader
TPS002 TPS002* $ 105.00 £ 75.60 € 91,35 ¥ 836.85 Dual T-Cube ±15 V/5 V Power Supply
*Both Imperial and Metric parts are equivalent.
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Motion Control
M SECTIONS
Specifications
I
Linear Translation
Maximum Stage Travel: 1/4" (6 mm)
I Angular Deviation: <150 µrad
Rotation
I Horizontal Load (Max): 7 lbs (3.2 kg)
Goniometers Features I Vertical Load (Max): 2.5 lbs (1.1 kg)
I Compact and Lightweight I Orthogonality: <2 mrad with Alignment Pins
I Lockable Design I Bearing Type: Ball Bearing
I Modular Construction I Material: Aluminum Body with Hardened Steel Linear Guides
I Good Performance at an I Adjuster: M3 x 0.25 Fine Adjustment Screw Provides 250 µm/rev
Economical Price I Mounting Holes: 8-32 (M4 x 0.7)
Mounting Options
The photographs below show the MS3 with two different 0.50"
accessory mounts. The upper photo shows the MS3 with a 360° (12.7 mm)
0.45"
rotation mount for Ø1/2" optics, while the lower application (11 mm) Locking Plate
photo shows it holding an objective using the CT01 Ø1" optic 8-32 (M4 x 0.7) Tap
(5 Places)
mount and an adapter.
0.50" 1.17"
4-40 Tap (13 mm) (29.7 mm)
(2 Places)
2.31"
4-40 C-bores (58.7 mm)
for Stacking
CT102
CT101
250 µm/Rev
1.17" Adjustment Screw
(30 mm)
0.60"
(15.2 mm)
MS101
MS103
CT104
CT103
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Motion Control
Moving Deck
1/2" (12.7 mm) Travel Specifications
I
All Three Axis
2.4" Travel Range: 0.5" (12.7 mm)
(61 mm) I Maximum Load
• Horizontal: 2.5 lbs (1.2 kg)
8-32 (M4)
Mounting Hole • Vertical: 0.55 lb (0.25 kg)
I Actuator Travel: 0.014"
2.0" (0.35 mm) per Revolution DT12 Mounted Directly
Back View
I
(51 mm) to an RC1 (See Page 217)
Construction: Aluminum with
Rail Carrier
1/2" Miniature Dovetail Stages Precision-Steel Leadscrew
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
DT12 DT12/M $ 74.00 £ 53.28 € 64,38 ¥ 589.78 0.5" Dovetail Translation Stage, Base Sold Separately
DT12XY DT12XY/M $ 176.00 £ 126.72 € 153,12 ¥ 1,402.72 0.5" XY Dovetail Translation Stage, Base Included
DT12XZ DT12XZ/M $ 214.50 £ 154.44 € 186,62 ¥ 1,709.57 0.5" XZ Dovetail Translation Stage, Base Included
DT12XYZ DT12XYZ/M $ 288.50 £ 207.72 € 251,00 ¥ 2,299.35 0.5" XYZ Dovetail Translation Stage, Base Included
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Motion Control
T12XYZ
Right-Handed Precision
Configuration Linear rail
T12B
provides smooth,
low-friction
motion over the T12X
entire range.
0.35"
(8.9 mm)
2.67" Stability
T12B (67.8 mm)
Compact XY stage
Adapter Base
is built from just
three main
components.
T12XY
2.67"
(67.8 mm) Counterbored Slots
2.00" for 1/4"-20 (M6 x 1.0) Socket Rigidity
(50.8 mm) Head Cap Screw
One-piece
construction of
1.77" 1.10" vertical support
(45 mm) (28 mm)
maximizes rigidity T12XZ
while minimizing
drift.
Counterbore for Holes for 2 mm
8-32 (M4 x 0.7) Screw to Alignment Pins
Mount T12-Series Stage 4 Place
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Motion Control
SECTIONS M
Mounting Holes 0.50" Mounting Hole
(4 Places) (12.7 mm)
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
T12X T12X/M $ 265.00 £ 190.80 € 230,55 ¥ 2,112.05 Miniature 1/2" Linear Translator Linear Translation
T12B* T12B* $ 26.50 £ 19.08 € 23,06 ¥ 211.21 T12 Base Plate
* Both Imperial and Metric parts are equivalent. Rotation
0.42" 0.42"
(10.7 mm) (10.7 mm) T12XY
2-56 (M2 x 0.4) 2.53"
Mounting Holes (64.3 mm) 8-32 (M4 x 0.4)
(4 Places) Mounting Hole
T12B
2.89"
(73.3 mm)
T12XZ
2.01" 0.42"
(51 mm) (10.7 mm)
T12XYZ
0.28"
(7.1 mm)
2-56 (M2 x 0.4)
Mounting Holes
2.39" (4 Places)
(60.6 mm) 0.42"
3.26" (10.7 mm)
(82.8 mm)
1.16"
(29.5 mm)
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Motion Control
M CHAPTERS 1/2" (13 mm) Travel Translation Stage, Modular Design (Page 1 of 2)
Manual Stages
MT3
Motorized Stages Specifications Features
I I
Right-Handed
Multi-Axis Configuration Travel Range: 1/2" (13 mm) Hardened Steel, Linear Bearings
Platforms I Vertical Load (Max): I Modular Design for XYZ
20 lbs (9 kg) Configuration
I
Actuators
Horizontal Load (Max):
90 lbs (41 kg)
I
Controllers
Orthogonality: <2 mrad
M SECTIONS
with Alignment Pins
I Angular Deviation: 150 µrad
Linear Translation I Bearing Type: Ball on
Hardened V-Grooves
Rotation
Goniometers
MT1
Micrometer Drive: The MT Series of Translation Stages, which offers a 1/2" (13 mm)
0.025" per rev translation range, features hardened steel linear bearings for precise motion
(0.001" per Graduation) and long life. They are available as single-axis or preconfigured XYZ
stages. Each stage includes 1/4"-20 (M6) and 8-32 (M4) mounting holes.
The two counterbores in the middle of the MT1 stage accept 1/4"-20
(M6) screws and can be used for direct mounting to a breadboard.
otorized Stage
See Our M hese Speci s Chapter for
t alized Pro MT1 (MT1/M) 1/2" (13 mm) Micrometers
Details on ducts
ges Mot
l Sta oriz STAGE TRAVEL GRADUATION SPACING BARREL
nua See Page 510 ed
Ma Sta
ges MT1 0.025"/rev 0.001" Ø3/8"
MT1/M 500 µm/rev 10 µm Ø3/8"
Motorized Stages
Alternative Actuators
I DRV304 (Page 601): Differential Micrometer
I DM10 (Page 602): Differential Micrometer
I ZST13 with ZST13B (Page 609): Stepper Motor
I Z812B (Page 608): DC Motor
Locking
Screw
2.40" 1.00" 0.50" (12.7 mm)
(61.0 mm) (25.4 mm)
4.42"
(112.3 mm)
1/4"-20 Clearance Hole for
(7 Places) 1/4"-20 Cap Screw
(2 Places)
Alignment Pin
(2 Places)
4-40 Locking Cap Screw
Micrometer with for Micrometer
1/2" Travel
MT1
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Motion Control
Motorized Stages
1. MT401- MT Series Base Plate: This base plate provides mounting flanges with 1" (25 mm)
Multi-Axis
centers that can be used to fasten the MT series stages to an optical breadboard. This is ideal Platforms
MT401
for XY or XYZ configurations where the standard mounting couterbores in the middle of the
stages are obstructed. Actuators
Controllers
2. MT402- MT Series Right-Angle Bracket: This bracket allows two stages to be mounted
SECTIONS ▼
perpendicular to each other and is required when constructing a custom XYZ configured stage.
MT402
Alignment pins that ensure that the stages are orthogonal are included.
Linear Translation
Rotation
3. MT405- Side-Mounted Actuator Bracket: The MT405 repositions the actuator from the rear
of the stage to the side, as shown for one of the actuators in the XYZ configuration below. Goniometers
This kit is necessary when space constraints do not allow for the actuator to protrude from the
MT405 rear of the stage. The actuator conveniently mounts to the side of the stage with four cap
screws.
4. MT406(/M)- Flexure Stage Accessories Adapter Plate: The MT406(/M) fastens directly to
the top of the MT series stage with two 1/4"-20 (M6) cap screws. It is compatible with our
current full range of 3 mm wide alignment key MBT and MAX series flexure stage accessories
(see pages 572 - 588). This adapter plate is ideal for creating basic fiber coupling solutions as
MT406 shown in the application image below.
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Motion Control
The MVS005 Vertical-Axis Positioning Stage has been developed to meet 2.36"
(60.0 mm)
the stringent requirements associated with aligning optical components. 1/4"-20
Tapped Hole 1.00"
It provides 13 mm (0.5") of height adjustment and a working height range (13 Places) (25.0 mm)
of 61.0 to 74.0 mm (2.4" to 2.9"). 8-32 Tapped Hole
(12 Places)
The platform surface has an array of thirteen 1/4"-20 (M6) and twelve 1.00"
8-32 (M4) tapped mounting holes. The top platform of the stage can be (25.0 mm)
0.24" 2.36"
(6.0 mm) (60.0 mm)
MVS005
Fitted with the Optional
MMP1 Mounting Plate
(See Page 588) 2.73" ± 0.25"
(69.3 mm ± 6.4 mm)
3.28"
(83.3 mm)
2.40"
(61.0 mm)
0.99"
(25.2 mm)
1.98"
(50.4 mm)
Ø0.85"
(21.5 mm)
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Motion Control
Specifications
■ Travel Range: 1.0"
■ Maximum Load: 5.0 lbs (2.4 kg)
■ Actuator Travel: 0.04" (1 mm)
per Revolution
■ Construction: Aluminum with
Precision Steel Leadscrew
DT25A
The DT25A should not be used to mount the DT25 stage vertically. When mounted to an
optical table, this plate increases the deck height by 0.31" (8 mm).
Holes for 3 mm
Alignment Pins
(4 Places)
1" 4.81"
(25 mm) (122.2 mm)
CL6
(See Page 96)
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Motion Control
M SECTIONS
bolted together in XY, XZ, or XYZ configurations for applications
where movement is required in more than one axis.
Stage Specifications
Linear Translation
LNR25M I Travel: 1" (25 mm)
All Steel Construction I Horizontal Load Capacity: 44 lbs (20 kg)
I
Rotation
Vertical Load Capacity: 17.6 lbs (8 kg)
Goniometers I Runout Over Full Range: ±1.5 µm (0.000059")
I Angular Deviation: ±1.5 µm
I Weight with Drive
• LNR25M: 1.34 lbs (0.61 kg)
• LNR25D: 1.26 lbs (0.57 kg)
ADJUSTMENT GRADUATION
Motorized SPECIFICATIONS RANGE SPACING TRAVEL BARREL STAGES
Imperial Micrometer Drive (150-811ST) 1.0" 0.001" 0.025"/rev Ø3/8" LNR25M
Actuators Metric Micrometer Drive (150-801ST) 25 mm 10 µm 500 µm/rev 10 mm LNR25M/M
for the LNR 25mm Coarse – 0.5 mm/rev
Differential Micrometer Drive (DM12) Ø3/8" LNR25D, LNR250/M
Stage 250 µm/rev Fine 1µm Fine 25 µm/rev
LNR25D
0.73"
(18.4 mm)
2.36"
(60.0 mm)
2.6" 1.00"
(66.1 mm) (25.0 mm)
Nominal 1/4"-20 (M6)
Tapped Holes
(3 Places)
2.36"
(60.0 mm)
1.00" 2.48"
(25.0 mm) (63.0 mm)
1/4"-20 (M6)
Tapped Holes
(7 Places)
1/4" (M6) 0.79"
1.18" (20.0 mm)
(30.0 mm) Counterbore Locking 0.50"
Screw (12.7 mm)
3.07" 1.00"
(78.0 mm) (25.0 mm)
Alignment Pins Ensure Alignment as Stages are Assembled into Multiaxis Systems
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Motion Control
Two clearance holes are present in the top platform to allow Controllers
the stage to be bolted directly to the work surface using the
counterbored 1/4" (M6) holes in the base of the stage. The SECTIONS M
position of the actuator mounting blocks is easily reconfigured to
allow left- or right-handed use. Linear Translation
Rotation
XYZ Configurable
The LNR25P1 Base Plate and LNR25P2 Angle Bracket allow XYZ Assembly of LNR25 Stages using an Goniometers
the stages to be configured in left- or right-handed XY, XZ, or LNR26PZ Angle Bracket and an LNR50P1
XYZ configurations. Base Plate (LNR25D with a Differential Drive
for the Z-Axis and Two LNR25M Stages with
Base Plate Micrometer Drives for the X and Y Axes)
LNR25P1
The LNR25P2 angle bracket (shown in the photo to the left) allows
the LNR stage to be mounted vertically. When combined with the
LNR25P2/M LNR50P1 described above, it can be used to build an XZ, YZ, or
XYZ configuration.
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Motion Control
Specifications
■ Travel Range: 1" (25 mm) ■ Orthogonality: <5 mrad PT101
■ Vertical Load (Max): 20 lbs (9 kg) ■ Angular Deviation: <250 µrad
■ Horizontal Load (Max): 90 lbs (41 kg) ■ Bearing Type: Ball on Hardened
V-Grooves
otorized Stage
See Our M hese Speci s Chapter for 1/4"-20 (M6)
t alized Pro
Details on ducts Mounting Hole PT1
ges Mot
l Sta oriz (16 Places)
nua See Page 511 ed
Ma Sta
ges
PT1 PT102
8.51"
Motorized Stages (216.1 mm)
PT1
PT1
The motorized version of the
PT1-Series stage can be found in our 1.96"
(49.8 mm)
Motorized Stages chapter.
6.53" 7.30"
(165.9 mm) (185.4 mm)
PT101
ADJUSTMENT GRADUATION
SPECIFICATIONS RANGE SPACING TRAVEL BARREL STAGES
Imperial Micrometer Drive
1.0" 0.001" 0.025"/rev Ø3/8" PT1, PT3
(150-801ST)
Metric Micrometer Drive
25 mm 10 µm 500 µm/rev 10 mm PT1/M, PT3/M
(150-811ST)
Differential Micrometer 25mm Coarse – 0.5 mm/rev PT1A, PT1A/M
Ø3/8"
Drive (DM12) 250 µm/rev Fine 1µm Fine 25 µm/rev PT3A, PT3A/M
XYZ Stages
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
PT3 PT3/M* $ 1,085.00 £ 781.20 € 943,95 ¥ 8,647.45 XYZ 1" (25 mm) Travel Stage, Micrometer Drive
PT3A PT3A/M* $ 1,085.00 £ 781.20 € 943,95 ¥ 8,647.45 XYZ 1" (25 mm) Travel Stage, Differential Adjuster
*All prices include micrometers as noted in the description box.
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Motion Control
The LT Series of translation stages feature a large mounting surface with a Controllers
generous array of 24 1/4"-20 (M6 x 1.0) tapped mounting holes and precision
alignment holes for dowel pins that allow the individual stages to be assembled SECTIONS M
LT102 into multi-axis systems. These stages are intended for general purpose laboratory
applications that often benefit from a high degree of adaptability. A dual-action Linear Translation
LT1
coarse/fine actuator design provides both rapid motion via a coarse pitch
Rotation
leadscrew (18 TPI) and high-resolution motion via an ultrafine leadscrew
(100 TPI) that is placed in series with the coarse adjuster. The coarse adjuster Goniometers
position can be fixed using the locking nut.
LT1
Specifications
I Travel: 2.0"
I Vertical Load (Max): 40 lbs (18 kg)
I Horizontal Load (Max): 70 lbs (32 kg)
I Coarse Adjustment: 0.055"
LT3 I Coarse Thread: 18 TPI (1.4 mm/rev)
LT1
I Fine Adjustment: 0.010"
I Fine Thread: 100 TPI (0.25 mm/rev)
I Fine Adjustment Range:
LT101 0.5" (12.7 mm)
I Orthogonality: <2 mrad
I Angular Deviation: <150 µrad
Combined Coarse
and Fine Adjustment LT3 3.75" Length 3.75" Width
1.0" Thickness
LT1
Coarse Adjuster The LT series translator is easily configured into XY, XZ, YZ, or XYZ assemblies.
Fine Adjuster The LT101 Base Plate and LT102 Angle Bracket both use 1/4"-20 (M6 x 1.0)
mounting screws. All the necessary mounting hardware is included with the
accessories.
XYZ Translator
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
LT3 LT3/M $ 1,214.00 £ 874.08 € 1.056,18 ¥ 9,675.58 XYZ Travel Translation Stage
Single-Axis Translator
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
LT1 LT1/M $ 358.00 £ 257.76 € 311,46 ¥ 2,853.26 Single-Axis Translation Stage
LT101 LT101/M $ 48.00 £ 34.56 € 41,76 ¥ 382.56 LT Series Base Plate
LT102 LT102/M $ 92.00 £ 66.24 € 80,04 ¥ 733.24 LT Series Angle Bracket
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Motion Control
M SECTIONS
2" (50 mm) Travel
ideal conditions. The rigidity of the all-stainless-steel Translation Stage with
construction, along with the heavy-duty cross roller Cross Roller Bearing
Linear Translation bearings, provides uniform performance Guides
over the entire 2" (50 mm) range of
Rotation
motion.
Goniometers Two drive options are available to suit an
array of application requirements. The lockable
standard micrometer supplied with the LNR50M provides
a 2" (50 mm) translation range with a thread pitch of 0.1 mm.
The vernier provides graduations every 10 µm. The LNR50DD is
equipped with a differential drive. The coarse adjustment provides
0.5 mm per revolution while the fine adjustment provides 50 µm
per revolution. Static Pin or Optional Piezo
(See Next Page)
Stage Specifications
I Travel: 2"
I Horizontal Load Capacity:
66 lbs (30 kg) DRV8
I Vertical Load Capacity: 22 lbs (10 kg) Differential
I
Adjuster
Weight with Drive: 4.2 lbs (1.9 kg)
I Angular Deviation: ±10 µm Fine
I
Travel
Repeatability: 0.8 µm
Coarse
Travel
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Motion Control
Goniometers
LNR50P2/M
LNR50DD
LNR50P1/M
otorized Stage
See Our M hese Speci s Chapter for
t alized Pro
Details on ducts
TravelMax™ Angle Bracket ges Mot
l Sta oriz
nua See Page 514 ed
Ma Sta
ges
Motorized Stages
The LNR Series stages are also offered
with high-performance stepper or DC
LNR50P2/M motors. Complete specifications for
our TravelMax™ stages outfitted with
TravelMax™ Base Plate stepper and DC motors can be found
on pages 514 - 516.
LNR50P1/M
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Motion Control
Actuators
Controllers
▼ SECTIONS
Linear Translation
Features
Rotation ■ Hand-Operated Translation TBB1212
■ Fine Adjustment Using Hex Key
Goniometers ■ 0.5" (12.7 mm) Deck Height
■ Two Sizes Available Specifications
■ Travel Range
• TBB0606: 2.4"; TBB1515/M: 60 mm
This Large-Area Translation Stage is available in two imperial • TBB1212: 4.8"; TBB3030/M: 120 mm
sizes, 6" x 7.66" (TBB0606) and 12" x 13.66" (TBB1212), ■ Working Height: 0.5" (12.7 mm)
and two metric sizes, 150 mm x 191.7 mm (TBB1515/M) ■ Adjuster Pitch: 1.23" (31.4 mm) per Rev of Hex Screw
and 300 mm x 341.4 mm (TBB3030/M). It has been ■ Max Load Capacity: 44 lbs (20 kg)
designed for use in applications requiring adjustable ■ Rack and Pinion Load Capacity: 22 lbs (10 kg)
positioning of a complete experiment. ■ Run Out Over Full Travel Range: <50 µm
■ Outer Dimensions (W x D)
The TBB0606 provides 2.5" (60 mm) of travel, whereas • TBB0606: 6" x 7.66"; TBB1515/M: 150 mm x 191.7 mm
the TBB1212 provides 5" (120 mm) of travel. Coarse • TBB1212: 12" x 13.66"; TBB3030/M 300 mm x 341.4 mm
1/2" Vertical positioning is achieved simply by pushing the moving ■ Moving Platform Dimensions (W x D)
platform. Fine positioning over the full range of travel is • TBB0606: 6" x 5.95"; TBB1515/M: 150 mm x 147.6 mm
Translation achieved by rack and pinion adjustment using a hex key as • TBB1212: 12" x 11.92"; TBB3030/M: 300 mm x 297.5 mm
Stage shown below. ■ Weight
• TBB0606: 1.7 lbs; TBB1515/M: 0.78 kg
The working height of the breadboard is 0.5" (12.7 mm), • TBB1212: 6.7 lbs; TBB3030/M: 3.06 kg
making it compatible with the mating height of our standard ■ Construction: Solid Aluminum
MB series of breadboards (see page 3). They are tapped ■ Finish: Black Anodized
with 1/4"-20 (M6 x 1.0) threaded holes in the standard
1" (25 mm) offset hole pattern.
Page 490
Translation Fine
Adjustment
TBB0606
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Motion Control
Height (Inches)
1.75
1.50 Motorized Stages
1.25 Multi-Axis
1.00 Platforms
L200 Mini Lab Jack
0.75 Actuators
0 5 10 15 20 25 30
L200 Turns Controllers
■ Compact Design The L200 Mini Lab Jack offers the same highly rigid, dual-pantograph design
■ Compatible with Mini-Series Breadboards as the L490 Lab Jack below but in a smaller package size. The adjustment SECTIONS ▼
and Components mechanism provides smooth, vertical motion while supporting loads up to
■ 1.03" (26.2 mm) Total Height Adjustment Linear Translation
50 lbs (22 kg). The top and bottom plates are each equipped with an array of
with 1/8" Balldriver (Included) tapped holes and counterbored slots for added mounting flexibility. Rotation
■ 1/4"-20 (M6 x 1.0), 8-32 (M4 x 0.7),
and 4-40 (M3 x 0.5) Tapped Holes
Goniometers
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
L200 L200/M $ 397.80 £ 286.42 € 346,09 ¥ 3,170.47 Mini Lab Jack
Lab Jack
The L490 Lab Jack utilizes a dual-pantograph design, which offers ■ Heavy-Duty Design Supports Over 75 lbs (34 kg)
excellent rigidity. The adjustment mechanism uses a leadscrew to ■ 4.00" x 7.00" (101.6 x 177.8 mm) Mounting Surface Motorized
close the angle between the opposing pairs of supporting struts. ■ 1/4"-20 (M6 x 1.0) Mounting Holes, 19 Locations Version!
Stainless steel axles and connecting rods allow loads up to 75 lbs ■ Mounting Slots on Top and Bottom Surfaces
(34 kg) to be smoothly elevated over the full range of the L490.
The top and bottom plates each have an array of nineteen 1/4"-20 L490 Displacement
(M6 x 1.0) tapped mounting holes on 1.00" (25.0 mm) centers. 4.50
Height (Inches)
Additionally, mounting slots have been added to both the top and 4.00
bottom plates. 3.50
3.00 Please see our
2.50 Motorized Stages
L490 Heavy-Duty Lab Jack
L490 2.00 Chapter for the
0 10 20 30 40 50 60 70 80 90
Stepper Motor-Driven
Turns
Version of the L490.
Removable Adjustment
Knob Included See page 526
METRIC
4.4" (111.8 mm) ITEM # ITEM # $ £ € RMB DESCRIPTION
Fully Extended 2.2" (55.9 mm) Height
Fully Retracted L490 L490/M $ 558.00 £ 401.76 € 485,46 ¥ 4,447.26 Heavy-Duty Lab Jack
Height
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Motion Control
M SECTIONS
precision and backlash-free rotation. Rotation is actuated via a stainless adjuster (Not Included)
knob located on the side of the unit. The rotating platform contains an array of
8-32 (M4), 6-32, and 4-40 tapped holes for general mounting requirements.
Linear Translation 8-32
Two radially shaped 1/4" (M6) slots machined in the base provide flexibility (M4 x 0.7)
4 Places
Rotation when fastening to an optical table. 4-40
(4 Places)
The easy-to-read radial scale is marked in 2° increments and labeled every 10°. A
Goniometers Ø1.70" 2.11"
side-located vernier scale improves resolution to 10 arcmin. The added ability to (43.2 mm) (53.6 mm)
stack small translation stages, such as our T12 Series on the rotation platform, 6-32 Tap 1.00"
(25.4 mm)
(8 Places)
and its 25 pound vertical load capacity, make this stage useful in any laboratory.
The CR1A Rotation Stage Adapter is designed to enhance mounting 1/4" (M6) Slot
0.61"
The RP01 Rotation Platform provides 110 lbs (50 kg). Once the desired position (15.5 mm)
a solution for applications requiring is achieved, a balldriver-actuated setscrew 1.23" 8-32 (M4 x 0.7)
smooth, backlash-free rotation. This locks the platform into place. (31.2 mm) Mounting Hole
I
(50.8 mm)
360° rotation, has a radial scale with 2° Increments
I
2.45" 8-32 (M4 x 0.7)
markings every 2°, and is capable Horizontal or Vertical Mounting (62.2 mm) Tapped Holes on
I
0.50" (12.7 mm)
of accepting vertical loads up to Double Thrust Bearing Design Centers (4 Places)
1/4"-20 (M6 x 1.0)
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION Mounting Hole
RP01 RP01/M $ 89.00 £ 64.08 € 77,43 ¥ 709.33 Rotation Platform RP01
500 www.thorlabs.com
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Motion Control
Rotation
1/4"-20 (M6), 4-40, PM4
and 6-32 (M4) Locking Screw (Sold Separately)
Tapped Holes Goniometers
(Optic Sold
1.00" Separately)
(25.4 mm)
PR01A
Adapter
1/4"-20 (M6 x 1.0) 0.25" Plate
Mounting Hole 1.75" PM3
(44.5 mm) (6.4 mm)
(2 Places)
3.50"
(88.9 mm)
Please refer to our website for
complete models and drawings.
PM4
METRIC
ITEM #* ITEM #* $ £ € RMB
PM3 PM3/M $ 18.00 £ 12.96 € 15,66 ¥ 143.46
PM4 PM4/M $ 22.00 £ 15.84 € 19,14 ¥ 175.34
PR01 *Description: Prism Mounting Hardware
SM1RR
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
PR01* PR01/M* $ 318.00 £ 228.96 € 276,66 ¥ 2,534.46 Precision Rotation Platform
PR01A PR01A/M $ 28.00 £ 20.16 € 24,36 ¥ 223.16 PR01 Solid Adapter Plate
SM1RR** SM1RR** $ 4.50 £ 3.24 € 3,92 ¥ 35.87 Additional Ø1" Retaining Ring
*One SM1RR Included with Each Rotation Mount **Imperial and Metric Compatible
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Motion Control
1.50"
(38.1 mm)
4.42"
(112.3 mm) 6.10"
Clearance Bore (154.9 mm)
for use with
1/4"-20 (M6) Cap Screw
(4 Places)
2.45"
(62.2 mm)
Rotation
Locking Screw
1.08" Please refer to our
(27.4 mm) website for complete
models and drawings.
6.33" Bottom Surface has Four
(160.8 mm) #4 Tapped Holes
on 60 mm Centers
XY Translation Plus Z-Axis Rotation Stage
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
XYR1 XYR1/M $ 568.00 £ 408.96 € 494,16 ¥ 4,526.96 XY Linear Translation Stage with Z-Axis Rotation Stage
502 www.thorlabs.com
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Motion Control
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Motion Control
Point of
Rotation Small (GN Series) Goniometer Specifications
■ Distance to Point of Rotation from Top Surface
Angle of • 0.50" (12.7 mm) for GN05 and GN2
GN05 Rotation
• 1.00" (25.4 mm) for GN1
■ Rotation
• ±15° for GN05
• ±10° for GN1
• ±10°/±15° for GN2
■ Accuracy: 10 arcmin (0.167°)
■ Load Capacity: 0.25 lbs (0.11 kg)
■ Stackable Design: Easily Assemble into a 2-Axis System
GN1
0.50" 0.50"
(12.7 mm) (12.7 mm)
GN05 GN2 Point
of Rotation
GN2
GN05 Point 0.50" 0.50"
of Rotation (12.7 mm) 0.50" 1.00"
1.00" (12.7 mm)
(12.7 mm) (25.4 mm)
(25.4 mm)
0.70"
(17.8 mm) GN1 Point 1.00"
of Rotation 1.00" (25.4 mm)
(25 mm)
Locking Screw 1.00" Removable
Removable (25.4 mm) Base Plate
8-32 (M4)
Mounting Hole Base Plate
LOCK
0.70" 0.20"
(17.8 mm) (5.1 mm)
504 www.thorlabs.com
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Motion Control
The GNL series of large goniometers provide a generous array of tapped holes including 4-40 (M2.5) and 6-32 (M3) for mounting Goniometers
(see the schematic on the previous page for details). This series can be either post mounted via an 8-32 (M4) tap or mounted to a
mini series breadboard (see page 74) via the slotted mounting holes.
otorized Stage
See Our M hese Speci s Chapter for
t alized Pro
Details on ducts
Large (GNL Series) Goniometer Specifications ual
Manometers
M
Gon otoriz
ni iom ed
Go See Page 540 ete
■ Distance to Point of Rotation ■ Rotation rs
from Top Surface • GNL10: ±10°
• GNL10: 1.00" (25.4 mm) • GNL20: ±5°/±10° Motorized
• GNL20: 1.00" (25.4 mm) • GNL18: ±5° Goniometers
• GN18: 1.75" (44.5 mm) ■ Accuracy: 10 arcmin (0.167°)
■ Stackable Design: Easily Assembles into ■ Load Capacity: 1.0 lbs (0.45 kg)
2-Axis System
GNL10 Point
of Rotation GNL20
GNL20 Point
GNL18 Point of Rotation
3.09" (78 mm) of Rotation
Nominal
0.75"
1.00" (19.1 mm)
(25 mm)
1.50"
(38.1 mm) 1.00"
(25.4 mm)
1.50"
1.75" (38.1 mm)
5 0.75" 3.09" (78 mm) (44 mm)
MITUTOYO
LOCK
3
0
2
1
(19.1 mm) Nominal
24
23
22
21
20
1.50"
(38.1 mm)
1.50"
#6 Locking Screw (38.1 mm)
0.20"
(5.1 mm) LOCK 0.75"
GNL10 (19.1 mm)
Removable
Mounting Plate
#6 Locking Screw
Please refer to our website for 1.85" 0.20"
complete models and drawings. 0.20" (47.0 mm) (5.1 mm)
GNL18 (5.1 mm)
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Motion Control
M SECTIONS
LNR50SE 516 50 mm 8 mm/s 0.2 µm <6 µm 50 nm <2 µm
NRT100 518 100 mm 10 mm/s 1 µm <3 µm 100 nm <1.2 µm
Definition of Characteristics
I Maximum Velocity
Specifications for the maximum velocity are stated for the stages without load and in a horizontal configuration.
I Bidirectional Repeatability
Repeatability is a measure of the ability of a stage to return to an exact commanded position. Bidirectional repeatability
is an average of the repeatability when the commanded position is approached from both directions. In the above table,
the bidirectional repeatability is measured with the backlash correction feature in the control software enabled.
I Backlash
Backlash is a mechanical phenomenon caused by the lead screw mechanism. When the direction of travel of a lead screw
is reversed it will take up some slack in the system before actually moving the stage, however the position feedback in the
motor will observe the screw to have rotated, leading to a discrepancy between commanded position and absolute position.
All Thorlabs controllers can compensate for backlash.
I Minimum Incremental Movement
This is the actual minimum incremental motion that a stage can make, otherwise known as the minimum step size. It is not
usually repeatable.
I Home Location Accuracy
Measurement of how accurately the stage returns to home after power cycling the controller.
I Maximum On-Axis Load Capacity
The maximum weight that can be mounted on the center of the stage and be actuated repeatedly without damage to the
stage or it’s actuators.
I Absolute On-Axis Accuracy
This is defined as the maximum discrepancy between the command position and the absolute position over the full travel of the
stage. Absolute on-axis accuracy is measured over the full travel range of the un-calibrated stage using an interferometer. Note that
all NRT and LTS stages are calibrated, and a calibration file sent with the unit. Calibrated accuracy is provided for these stages.
I Maximum Percentage Accuracy
This is the maximum discrepancy between command position and absolute position expressed as a percentage of the
commanded position. The advantage of expressing this as a percentage is that the performance of the stage can be
compared to stages with different maximum travel ranges.
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Motion Control
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Motion Control
2.46"
(62.5 mm)
General Specifications
I XYZ Travel:* 0.16" (4 mm) I Bidirectional Repeatability:* 0.5 µm
I Max Velocity:* 2.5 mm/s I Home Location Accuracy:* ±1.5 µm
I Max Acceleration:* 4 mm/s2 I Piezo Travel:** 20 µm
I Backlash:* <7.0 µm I Piezo Resolution:** 20 nm
I Min Achievable Incremental Movement:* 0.06 µm I Thermal Stability: 1 µm/°C
I Absolute On-Axis Accuracy* I On-Axis Load Capacity: 2.2 lbs (1 kg)
• X-Axis: 43 µm I Resonant Frequency (±10%):
• Y-Axis: 66 µm 375 Hz (No Load), 200 Hz (275 g Load), 150 Hz (575 g
• Z-Axis: 278 µm Load)
I Max Percentage Accuracy* I Weight: 2.2 lbs (1 kg)
I
• X-Axis: 4.2%
• Y-Axis: 4.35% Deck Height: 2.46" (62.5 mm) from the Bottom Surface of
• Z-Axis: 10.4% the Moving Platform. The Accessory Beam Height is 2.95"
(75 mm) from the Bottom Surface of the Stage
*Using stepper motor actuators **For MAX341 Stage: All measurements related to the performance of the piezoelectric actuators are
made with the Thorlabs model BPC203 piezo driver, which can be found on pages 642 – 643
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
MAX343 MAX343/M $ 2,345.00 £ 1,688.40 € 2.040,15 ¥ 18,689.65 NanoMax™ Stage with Stepper Motor Drives
MAX341 MAX341/M $ 3,530.00 £ 2,541.60 € 3.071,10 ¥ 28,134.10 NanoMax™ Stage; Stepper, Piezoelectric Actuator, & Sensor
508 www.thorlabs.com
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Motion Control
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Motion Control
Save 10% When Purchasing Complete Package Stage Plus Motorized Actuators
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
MT1-Z8 MT1/M-Z8 $ 686.70 £ 494.42 € 597,43 ¥ 5,473.00 Motorized Translation Stage, 0.5" (12.7 mm of Travel)
MT3-Z8 MT3/M-Z8 $ 2,100.60 £ 1,512.43 € 1.827,52 ¥ 16,741.78 XYZ Motorized Translation Stage, 0.5" (12.7 mm of Travel)
MT401 MT401 $ 22.00 £ 15.84 € 19,14 ¥ 175.34 Base Plate
MT402 MT402 $ 48.00 £ 34.56 € 41,76 ¥ 382.56 Angle Mounting Bracket
Manual Stages
Manual versions of the MT-Series stage can be found back in the Manual Stages chapter of this section.
Many applications require a combination of motorized and manually-driven stages,. The MT3 platform
supports the easy mixing-and-matching of various drive options.
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Motion Control
The PT1-Z8 and the PT3-Z8 motorized stages provide a 1" (25.4 mm) total This motorized translation Controllers
travel range for each axis. The PT3-Z8 is assembled from three single axis stages
SECTIONS M
stage is based on our
using the PT102 (/M) bracket. Each stage comes with two mounting dowels to popular PT-Series
manually-driven stages.
ensure orthogonality when stacking multiple stages. The motorized actuators
The manually-driven
allow sub-micron control and provide position feedback via an optical encoder. version of this stage utilizes Linear Translation
A 12 VDC servo motor and gear head rotate the 1.0 mm pitch leadscrew that micrometer drives; this
product is featured in our Microscopy Stages
drives the stage; built-in limit switches provide overdrive protection.
Manual Stages chapter.
Thorlabs’ motorized actuators are some of the smallest that are commercially Rotation
available. Combining these actuators with our compact high-precision
translation stages results in an extremely compact sub-micron translator. Goniometers
Specifications
I Travel Range: 1" (25.4 mm)
PT1-Z8 I Recommended Controller: TDC001
I Max Velocity: 3 mm/s
I Stage Bearing Construction: Aluminum/Ball Bearing
I Bidirectional Repeatability: 1.5 µm
I Backlash: <12 µm
I Min Achievable Incremental Movement: 100 nm
I Max On-Axis Load Capacity (vertical): 10 lbs (4.5 kg)
I Max On-Axis Load Capacity (horizontal): 20 lbs (9 kg)
PT102
I Absolute On-Axis Accuracy: 130 µm
I Max Percentage Accuracy: 0.52%
I Home Location Accuracy: <2 µm
I Pitch: 0.006°
I Yaw: 0.013°
I Platform
PT3-Z8 • 3.00" x 4.00" (76.2 mm x 101.6 mm)
• 1/4"-20 (M6 x 1.0) Tapped Holes, 16 Places
Linear Displacement per Encoder Count: There are 512 encoder
counts per revolution of the motor. The output shaft of the motor
goes into a 67:1 planetary gear head. This requires the motor to
rotate 67 times in order to rotate the 1.0 mm pitch leadscrew one
revolution. The end result advances the stage by 1.0 mm. To
calculate the linear displacement of the actuator per encoder count:
Save 10% When Purchasing Complete Package Stage Plus Motorized Actuators
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
PT1-Z8 PT1/M-Z8 $ 683.10 £ 491.83 € 594,30 ¥ 5,444.31 Single-Axis Motorized Translation Stage, 1" (25.4 mm) Travel
PT3-Z8 PT3/M-Z8 $ 2,094.30 £ 1,507.90 € 1.822,04 ¥ 16,691.57 Three-Axis Motorized Translation Stage, 1" (25.4 mm) Travel
PT101* PT101* $ 22.00 £ 15.84 € 19,14 ¥ 175.34 Base Plate
PT102 PT102/M $ 71.00 £ 51.12 € 61,77 ¥ 565.87 Angle Mounting Bracket
*Imperial and Metric parts are equivalent.
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Motion Control
Linear Translation
The compact, motorized MTS Series stages feature a dual set of
Specifications
I
Microscopy Stages linear rails with a continuously recirculating ball bearing on a
Travel Range
• MTS25: 25 mm moveable carriage. This mechanism provides smooth, low-friction
Rotation movement. The minimum achievable movement is 50 nm.
• MTS50: 50 mm
I Recommended Controller: TDC001 Limit switches on the stage ensures controlled motion within the
I
Goniometers
Max Velocity: 3 mm/s parameters of the unit and prevents overdriving in both directions.
I Stage/Bearing Construction: Aluminum/Recirculating Ball
Two travel ranges are available: 25 mm and 50 mm. The stages are
Bearing
I
configurable in XY, XZ, and XYZ in both left- and right-handed
Bidirectional Repeatability: 1.6 µm
I
configurations using the Angle Brackets and Spacer Plates. Base
Backlash: <6 µm
I
plates are also available allowing them to be bolted directly to an
Min Achievable Incremental Movement: 50 nm
I
optical table. The MTS25-Z8 and MTS50-Z8 stages can be
Max On-Axis Load Capacity (Vertical): 10 lbs (4.5 kg)
I
attached to a MTS25A-Z8 or MTS50-Z8 base, respectively, using
Max On-Axis Load Capacity (Horizontal): 26.4 lbs
(12 kg) the four included M3 x 1.0 caphead screws and dowel pins. For
I Absolute On-Axis Accuracy added flexibility, multi-axis configuration can be made using a
• MTS25: 145 µm mixture of 25 mm and 50 mm stages.
• MTS50: 290 µm The MTS bundles include a TDC001 Controller, power supply,
I Max Percentage Accuracy and necessary cables for fast out-of-the-box setup and operation.
• MTS25: 0.3%
• MTS50: 0.7% A complete technical description of the TDC001 T-Cube™
I Home Location Accuracy: ±4% servo driver is found on pages 626 – 627, in the Controllers
I Pitch chapter.
• MTS25: 0.04°
• MTS50: 0.05°
I Yaw
• MTS25: 0.05°
• MTS50: 0.06°
I Weight: 0.75 lbs (0.34 kg)
I Platform
• 1.50" x 1.69" (38.1 mm x 43.0 mm)
• 4-40 (M3 x 0.5) Tapped Holes, 18 Places
• 8-32 (M4 x 0.7) Tapped Holes, 1 Place
Linear Displacement per Encoder Count: There are 512 encoder
counts per revolution of the motor. The output shaft of the motor
goes into a 67:1 planetary gear head. This requires the motor to rotate
67 times in order to rotate the 1.0 mm pitch leadscrew one
revolution. The end result advances the stage by 1.0 mm. To calculate
the linear displacement of the actuator per encoder count:
• 512 x 67 = 34,304 encoder counts per revolution of the leadscrew
• 1.0 mm/34,304 counts = 2.915 x 10-5 mm (29 nm) linear
displacement of the leadscrew per encoder count.
512 www.thorlabs.com
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Motion Control
Motorized Stages
MTS25-Z8
Multi-Axis
Platforms
Actuators
Controllers
XYZ Configuration Built with
MTS25A-Z8, MTS25B-Z8, SECTIONS M
MTS25C-Z8
and MTS25C-Z8 Adapters
Linear Translation
Microscopy Stages
MTS25-Z8
Rotation
MTS25B-Z8
Goniometers
MTS25-Z8
Each adapter plate comes with the required dowel pins to ensure MTS25A-Z8
Mounting Hardware
Thorlabs offers Adaptive Optics Kits that incorporate a
MEMS-based deformable mirror (either gold or aluminum
coated), a Shack-Hartmann wavefront sensor, all necessary AOK1UM01
Adaptive Optics Kit
imaging optics and mounting hardware, fully functional stand-
(Breadboard not Included)
alone control software for immediate control of the system, and a
support library to assist with tailored applications authored by the end
user. In addition, since the kit ships as three pre-aligned optomechanical
sections, our adaptive optics kits provide a near out-of-the-box solution for real-time
wavefront compensation.
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Motion Control
Microscopy Stages
Goniometers
Motorized TravelMax Cross-Roller-Bearing Stage
Combining the TravelMax stage with our DRV014 high-performance stepper motor based actuator provides true nanopositioning
capability. The stepper motor actuator uses a trapezoidal-shaped 1 mm/rev pitch leadscrew that provides a high load carrying capability.
When used with the BSC101 stepper motor driver a step size of 50 nm is achievable.
The exceptional performance of the LNR50S is a result of the rigid all steel construction of the stage combined with the sophisticated
design of the DRV014 actuator. The high-quality, cross-roller-bearing rails can carry loads up to 10 times larger than equivalent-sized ball
slides. The precision-ground shafts provide excellent straight line accuracy and the alternately crossed rollers can handle force in any
direction. The performance is further enhanced by using thermally matched materials that ensure stability and uniform performance over
the entire 2" (50 mm) range of motion.
The modular design of the LNR50 family of stages allows optional elements (such as piezo actuators – see page 605) to be added to the
platform within minutes. The top and bottom surfaces of the LNR series stages are equipped with an array of 1/4"-20 (M6 x 1.0) tapped
holes to maximize the mounting flexibility of components. The LNR50P1 baseplate and LNR50P2 angle bracket allow the LNR series
of stages to be configured in left- or right-handed orientations in XY, XZ, or XYZ systems – see page 493.
1/4"-20 (M6)
Mounting Holes
1/2" (12.5 mm) Centers 3.94"
(13 Places) (100 mm)
LNR50S (LNR50S/M) Specifications
■ Travel Range: 2" (50 mm)
■ Recommended Controller: BSC101
■ Max Velocity: 8 mm/sec
3.94"
■ Stage/Bearing Construction: (100 mm)
Steel/Crossed Roller Bearing 5.42"
■ Bidirectional Repeatability: 0.5 µm (138 mm)
■ Backlash: <6 µm
■ Min Achievable Incremental Movement: 50 nm
■ Max On-Axis Load Capacity (Vertical): 22 lbs
(10 kg)
■ Max On-Axis Load Capacity (Horizontal): 1.12"
(28 mm)
66 lbs (30 kg)
Stepper Motor
■ Absolute On-Axis Accuracy: 10 µm 0.98"
■ Max Percentage Accuracy: 0.02% (25 mm)
■ Home Location Accuracy: <2 µm
■ Pitch: 0.03°
■ Yaw: 0.015°
■ Weight: 6.2 lbs (2.82 kg)
7.68
(195.0 mm)
10.73"
(273 mm)
Nominal
2" (50 mm) TravelMax Stage with Stepper Motor Actuator
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
LNR50S LNR50S/M $ 1,820.00 £ 1,310.40 € 1.583,40 ¥ 14,505.40 2" (50 mm) TravelMax, Stepper Motor Drive
514 www.thorlabs.com
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Motion Control
Multi-Axis
Platforms
Actuators
Controllers
LNR50K1
SECTIONS ▼
Linear Translation
Microscopy Stages
Rotation
apt™ System: Stepper Motor Controller
Goniometers
The BSC series apt stepper-motor controllers (see pages 632 - 633) are designed to drive larger framed
2-phase bipolar stepper motors, with and without encoder feedback. The BSC101 is capable of
delivering powers up to 48 V/50 W peak (25 W average).
The controller combines high-speed digital signal processors (DSP) with low-noise analog electronics
and ActiveX® software technology for effortless one, two, or three-axis motion. Additional axes can be
driven by connecting one or more benchtop units via a standard USB hub. The controller is supplied
with a full suite of software support tools. An intuitive graphical instrument panel allows immediate
control and visualization of the operation of the stepper controllers, and any other apt™ controllers that
are installed. See pages 654 - 656 for a full description of the apt system software.
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Motion Control
Motorized Stages
Multi-Axis
Platforms
Actuators
▼ SECTIONS LNR50SE
LNR50SE (LNR50SE/M) Specifications
Linear Translation Overview Motorized TravelMax™ Stage
■ Travel Range: 2" (50 mm)
The LNR50SE is a 2" (50 mm) TravelMax™ Stage with an optical
■ Recommended Controller: BSC101
Microscopy Stages linear encoder and stepper motor. The actuator uses a trapezoidal-
■ Max Velocity: 8 mm/s
shaped leadscrew with 1 mm/rev pitch that provides a high load
Rotation ■ Stage/Bearing Construction:
carrying capability.
Stainless Steal/Crossed Roller Bearing
Goniometers The exceptionally high performance of the LNR50SE is a result ■ Bidirectional Repeatability: 0.2 µm
of the combination of rigid all-steel construction, optical linear ■ Backlash: <6 µm
encoder, and the sophisticated design of the DRV014 actuator. When ■ Max On-Axis Load Capacity (Vertical): 22 lbs (10 kg)
driven with a BSC series stepper motor controller (see pages 632 - ■ Max On-Axis Load Capacity (Horizontal): 66 lbs (30 kg)
633) a true micro-stepping resolution of 50 nm and positional ■ Absolute On-Axis Accuracy: ±3 µm
absolute accuracy of ±3 µm can be achieved. ■ Min. Achievable Incremental Movement: 50 nm
Accuracy and Repeatability ■ Encoder Resolution: 100 nm
Furthermore, the ability to automatically control and set the absolute ■ Grating Pitch: 20 µm
position of the stage with accuracies and repeatabilities in the range of ■ Max Percentage Accuracy: 0.02%
±3 µm and 0.2 µm, respectively, means that the LNR50SE stage can ■ Home Location Accuracy: <0.5 µm
be used in a wide variety of automated analytical scanning ■ Pitch: 0.03°
characterization and test applications. ■ Yaw: 0.015°
The optically encoded stage comes with a control unit that can ■ Weight: 6.2 lbs (2.82 kg)
be connected directly to a BSC series stepper motor controller, which The LNR50SE features a high, sub-micron resolution linear scale
then allows the fast development of sophisticated automated routines that is directly attached to the moving platform of the stage. This
via the comprehensive ActiveX® programming environment. See linear optical encoder provides the necessary feedback to the drive
pages 632 - 633 for more details on the BSC series controllers. electronics to ensure true nanopositioning capabilities. This means
Linear Position Encoder that mechanical positioning errors can be removed as the encoder
Combining the TravelMax™ all-stainless steel stage with an provides a direct readout of the absolute position.
integrated linear optical encoder provides the ideal solution for when The glass scale encoder system has a resolution of 100 nm and
stability, long travel, and high load capacity also need to be coupled to provides absolute position accuracies on the order of ±3 µm over
absolute position accuracy. When combined with the Thorlabs BSC the full 2" (50 mm) of travel. The bidirectional repeatability is on
series stepper motor controller, the high resolution encoder helps the order of 0.2 µm.
ensure a fully operational solution out of the box.
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
LNR50SE LNR50SE/M $ 3,520.00 £ 2,534.40 € 3.062,40 ¥ 28,054.40 2" (50 mm) Linear Encoded TravelMax™ Stage, Stepper Motor Drive
LNR50SEK1 LNR50SEK1/M $ 4,324.50 £ 3,113.64 € 3.762,32 ¥ 34,466.27 2” (50 mm) Linear Encoded TravelMax™ Stage,
Stepper Motor Drive, and BSC101 Controller
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Motion Control
Controllers
LNR50 TravelMax™ Mounting Plate
The LNR50P1 provides additional mounting options for the TravelMax™ series stages. The plate is 0.47" (12 mm) thick by SECTIONS M
3.94" (100 mm) wide by 7.68" (195.1 mm) long. Tapped holes match up to the two mounting counterbored clearance holes of the
LNR50 stage. The set of four slots located in the middle of the plate allow the angle bracket shown below to be directly attached to this Linear Translation
plate; these four slots are counterbored for either 1/4" or M6 socket head screws.
Microscopy Stages
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
LNR50P1 LNR50P1/M $ 68.00 £ 48.96 € 59,16 ¥ 541.96 0.47" (12 mm) Thick TravelMax™ Series Adapter Plate Rotation
Features
This right-angle mounting bracket allows the I Designed to Support the
TravelMax™ family of stages to be mounted Construction of XYZ Stage Assemblies
vertically. This right-angle bracket is useful for I Attaches Directly to an Optical Table
building XYZ stage assemblies; it can also be for Applications Requiring One Axis
of Vertical Translation
used to build an XZ configuration.
I Reconfigurable for Right- or
Left-Handed Applications
I Assortment of Mounting Screws Included
LNR50P2
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Motion Control
Motorized Stages The NRT series of positioning stages are ideally suited for supported by four recirculating ball carrier bearings mounted to
applications that require long travel, high precision, and high-load precisely aligned linear guide rails. A minimal backlash leadscrew
Multi-Axis
Platforms
capacity, such as measurement and produces smooth translation. It is directly driven with a two-phase
inspection. The main stepper motor capable of 25,600 microsteps per revolution
Actuators platform is (minimum step size of 100 nm). Magnetic limit switches allow
homing and overdriving protection in both forward and reverse
Controllers
directions.
M SECTIONS Mechanical and Electrical Data
Stepper Motor-Based Actuator
I Step Angle: 1.8º (50 Poles and ±2
Linear Translation
NRT100 Phases for 360º Divided by 200)
I Step Accuracy: 5%
Microscopy Stages 100 mm Travel
14.28"
(363.0 mm) 13.0"
(330.0 mm)
3.94"
(100.0 mm)
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Motion Control
NRT150P1
BSC103
3-Channel Stepper Motor Controller
For more details, see pages 632 - 633
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Motion Control
Motorized Stages
Multi-Axis
Platforms
Actuators
Controllers
▼ SECTIONS
Linear Translation
The LTS Series of stages are stepper motor driven long travel stages with
Microscopy Stages ranges of 150 mm and 300 mm. They feature an integrated electronic
controller that can be controlled remotely using a PC or manually via the
Rotation buttons and velocity potentiometer on the control key pad. Parameter
settings can be adjusted on the PC and stored in non-volatile memory
Goniometers
within the unit itself. When the unit is next powered up these settings are Features
applied automatically. This is particularly useful when the stage is being ■ Low-Profile, Long Travel Stages
used in the absence of a PC and USB link. ■ X, XY, XYZ Configurable
The stages are lightweight, compact, and robust with excellent ■ Stepper Motor Driven
performance characteristics over the full travel range. The long travel ■ Integrated APT Controller with USB Interface
range makes them ideal for applications such as interferometry and M2 ■ 150 mm and 300 mm Travel Ranges
measurements, while the 33 lbs (15 kg) load capacity make the stage
practical for most applications that fit on the large 3.54" x 3.54"
platform. They are compatible with our range of optomechanical and
translation stages. The aluminum construction and low profile design
make these stages ideal for applications where space is limited. Integrated
magnetic limit switches allow homing and provide overdriving protection 1.58"
(40.1 mm)
in both directions. A precision ball screw delivers smooth virtually noise
free movement. 1/4"-20 UNC (M6)
Tapped Hole
(16 Places)
Specifications
■ Travel Range:
• LTS150: 150 mm (5.91")
3.54"
• LTS300: 300 mm (11.81") (90.0 mm)
■ Maximum Velocity: 15 mm/s
■ Stage/Bearing Construction:
5.9" Length L*
Aluminum/Recirculating Ball Bearing (150.0 mm)
■ Bidirectional Repeatability: 2 µm Total Travel
■ Backlash: 2 µm
■ Min Achievable Incremental Movement: 100 nm
■ Max On-Axis Load Capacity (Vertical): 8.8 lbs (4 kg)
■ Max On-Axis Load Capacity (Horizontal): 33 lbs (15 kg)
■ Absolute On-Axis Accuracy: 50 µm 4.1"
(105.0 mm)
■ Calibrate Accuracy: 5 µm
■ Max Percentage Accuracy LTS150: 0.18 %
■ Max Percentage Accuracy LTS300: 0.20%
■ Home Location Accuracy: <6 µm 3.94"
1.56"
(100.0 mm)
■ Pitch: (39.5 mm)
• LTS150: 0.016° *Overall Length
• LTS300: 0.022° LTS150: 14.2" (360.0 mm)
■ Yaw: LTS300: 19.7" (500 mm)
• LTS150: 0.05°
• LTS300: 0.06°
■ Weight:
• LTS150: 4.2 lbs (1.9 kg)
• LTS300: 5.5 lbs (2.5 kg)
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Motion Control
Motorized Stages
Driver Flexibility Multi-Axis
The LTS series of stages feature an integrated apt™ Platforms
compatible controller, that is fully configurable Actuators
(parameterized) with key settings that can be made
by using the included software. Jog step sizes can Controllers
be selected, phase currents can be limited to
suitable peak powers as required, and limit SECTIONS ▼
switch configuration is accommodated
Linear Translation
through flexible logic settings. Moreover,
relative and absolute moves can be initiated
Microscopy Stages
with move profiles set using velocity profile
parameters (including acceleration and Rotation
deceleration). Similarly, homing (zero
position datum) sequences have a full set of Goniometers
associated parameters that can be adjusted for
a particular application. For simplicity of
operation, the apt™ software incorporates pre-configured
settings for the LTS series stages. For convenience and ease of use,
adjustment of all key parameters is possible through direct interaction with
intuitive software graphical panels. For example, a move to the next position can be initiated by
clicking directly on the position display and entering a new value. Note that all such settings and
parameters are also accessible through the ActiveX® programmable interfaces for automated alignment sequences.
Full Software GUI Control Suite and ActiveX® Controls Included
A full and sophisticated software support suite is supplied with the LTS series stages. The suite includes a number of out-of-the-box user
utilities to allow immediate operation of the unit without any detailed pre-configuration. All operating modes can be accessed manually,
and all operating parameters may be changed and saved for future use. For more advanced custom motion control applications, a fully
featured ActiveX® programming environment is also included to facilitate custom application development in a wide range of
programming environments. Note that all such settings and parameters described above are also accessible through these ActiveX®
programmable interfaces.
The ActiveX® apt™ system software shipped with the LTS stages is also compatible with other apt™ family controllers including our
multi-channel rack-based system and smaller optical table mountable T-Cube controllers. This unified software package allows seamless
mixing of the LTS stages with any apt™ benchtop, table top, and rack based controllers so that the user can build a single software
interface for an application utilizing multiple stages of different types.
LTS Stages (See Next Page for XZ Angle Brackets and a XY Spacer Plate)
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Motion Control
Controllers
These adapter plates are designed to allow the LTS series of stages to
be mounted in multi-axis configurations. Although they ship with
▼ SECTIONS
the dowels situated to ensure orthogonality in a right-handed
Linear Translation configuration, the dowels are easily repositioned to enable left-
handed configurations. Simply follow the installation instructions
Microscopy Stages included.
Rotation
The LTSP1(/M) is a spacer plate, allowing any two stages to be
mounted in an XY configuration as shown below. When assembled
Goniometers as shown below, the working height of the upper stage is 3.15" LTSP3
(80 mm). The LTSP2(/M) and LTSP3(/M) are angle brackets used
with the LTS150 and LTS300, respectively. They allow the stages to
be mounted in a vertical (Z-axis) orientation.
LTSP1
TO-Packaged Pigtail See pages 1252 - 1253 Pigtailed Laser Diode Alignment
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Motion Control
axis accuracy. This backlash-free operation coupled with high-resolution, closed-loop Features Rotation
optical feedback ensures a minimal bidirectional repeatability of ±0.25 µm. Characterized I Low Profile, Long Travel Design
I
by high-speed translation and high-positional accuracy, the DDS220 stage is well-suited Integrated, Brushless DC Linear Goniometers
for surface mapping and characterization applications where there is a need to move a Servo Motor Actuators
camera or probe at constant velocity while simultaneously capturing data. I Linear Optical Encoders
Dual-Axis Configuration I High-Quality, Precision-
For dual-axis applications, two stages can be directly bolted together in an XY Engineered Linear Bearings
I High Velocity (300 mm/s) Stage
configuration without the need for an adapter or spacer plate, thereby keeping the vertical
profile to a minimum. Furthermore, end users can choose to bolt the upper stage on
centrally or off center as shown to the right.
Please note that these stages are not suitable for operation in a vertical (Z-axis) orientation.
Controller Options
The recommended controller for the DDS220 direct-drive, linear translation stage is the
BBD101 single-axis or BBD102 dual-axis Brushless DC Motor Controller. These
controllers provide a user-configurable, S-curve acceleration/deceleration profile that
enables fast, smooth positioning without vibration or shock. See pages 628 – 629 for the
full presentation for these Brushless DC Motor Controllers.
Joystick Option
An optional 2-axis joystick console (MJC001) is also available for remote positioning
XY Configuration
applications. See pages 628 – 629 for more details.
Specifications
I Travel Range: 220 mm (8.6")
I Recommended Controller: BBD101 or BBD102
I Max Velocity: 300 mm/s
I Bidirectional Repeatability: ±0.25 µm
I Backlash: None*
I Minimum Achievable Incremental Movement: 0.1 µm
I Max On-Axis Load Capacity: 6.6 lbs (3.0 kg)
I Absolute On-Axis Accuracy: ±2.0 µm
I Straightness/Flatness: ±5 µm
I Pitch/Yaw: ±0.01º
I Home Location Accuracy: ±0.25 µm
I Continuous Motor Force: 7.0 N
I Peak Motor Force (2 sec): 15 N BBD102
I Weight: 5.3 lbs (2.4 kg)
I Dimensions: 370 mm x 90 mm x 45 mm Specifications for the BBD101
(14.6" x 3.5" x 1.77") and BBD102 single- and dual-channel
*This stage does not exhibit backlash since there is no lead screw. controllers can be found on pages 628 – 629.
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Motion Control
Microscopy Stages
Rotation
Goniometers
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Motion Control
Motorized Stages
Kit Components Multi-Axis
I
Platforms
Direct Drive, Linear Translation Stage (DDS220, See Page 523)
I Benchtop 3 Phase Brushless DC Servo Controller Actuators
(BBD101, See Pages 628 – 629)
Controllers
I Two Ultra Stable Kinetic Mirror Mounts
SECTIONS M
DDS220 STAGE*
(POLARIS-K1, See Pages 244 – 246) Travel Range 220 mm (8.6")
I Periscope Assembly (RS99, See Page 262) Speed (Max) 300 mm/s
I
Linear Translation
Six 1" Protected Silver Mirrors (PF10-03-P01, See Page 772) Acceleration (Max) 5000 mm/s2
I Custom V-Block Bidirectional Repeatability ±0.25 µm Microscopy Stages
I Thorlabs Software Included Backlash** N/A
Rotation
Incremental Movement (Min) 0.1 µm
Absolute On-Axis Accuracy ±2.0 µm Goniometers
Home Location Accuracy (Unidirectional) ±0.25 µm
Bearing Type Precision Linear Bearing
Motor Type Brushless DC Linear Motor
370 mm x 90 mm x 45 mm
Dimensions
(14.6" x 3.5" x 1.77")
*See page 523 for more information.
**The stage does not exhibit backlash since it does not utilize a leadscrew.
BBD101 CONTROLLER*
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Motion Control
Motorized Stages
Multi-Axis
Platforms
Actuators
Features
I Integral apt™ Controller with
Controllers
USB Interface
I
M SECTIONS Rugged, Dual Pantograph
I Large Array of Mounting Holes
Linear Translation I Power Supply Included
7.00"
(177.8 mm)
Microscopy Stages Specifications
1.00" Typ. I Maximum Velocity:
Rotation (25.4 mm)
• 1 mm/s at Loads <5.5 lbs (2.5 kg)
• 0.5 mm/s at Loads <33 lbs (15 kg)
I
Goniometers
Max Load Capacity: 33 lbs (15 kg)
I
4.83" 4.00"
(122.6 mm) (101.6 mm) Repeatability: 10 µm
1.00" Typ. I Travel Range: 2.04" (52 mm)
(25.4 mm) I Deck Parallelism: <250 µm Over Full
Range of Travel
I
1.40"
(35.6 mm) 1/4"-20 (M6) Deck Pitch: 0.04°
Mounting Holes
1/4" (M6) Clearance Slots (19 Places) Controller Specifications
I Voltage: 24 VDC
I Power: 30 W (Peak)
4.35"
(110.5 mm) Maximum Extended Position
2.30"
(58.5 mm) Maximum Retracted Position
10.66"
(270.7 mm)
The L490MZ is a stepper motor driven lab jack. It features an integrated electronic controller that can be controlled remotely using a PC
with apt software suite (included) or manually via the buttons and velocity potentiometer on the control key pad. Parameter settings can
be adjusted on the PC and stored in non-volatile memory within the unit itself. The next time the unit is powered up these settings are
applied automatically. This is particularly useful when the unit is being used manually in the absence of a PC and USB link.
These motorized lab jacks provide a rugged, height adjustable platform ideal for mounting optomechanical sub-assemblies requiring
height adjustment. Based upon the dual pantograph design of the manual L490, the L490MZ Motorized Lab Jack offers excellent rigidity
and platform parallelism. The large 7" x 4" (180 mm x 100 mm) mounting platform supports up to 33 lbs (15 kg) with a smooth vertical
adjustment range of 2" (50 mm). Both the top and bottom plates offer an array of 1/4"-20 (M6 x 1.0) tapped holes and clearance slots
for general mounting requirements.
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Motion Control
Selection Guide
MOTORIZED MULTI-AXIS
MANUAL STAGES STAGES PLATFORMS ACTUATORS CONTROLLERS
Pages 479 - 505 Pages 506 - 540 Pages 541 - 588 Pages 589 - 614 Pages 615 - 659
Microscopy Stage
Selection Guide
XY Microscopy Stage and Controller
Pages 528 - 529
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Motion Control
▼ CHAPTERS
XY Microscopy Stages
Manual Stages Thorlabs’ MLS203 series of stages have been designed for use with select microscopes from Olympus, Nikon, and Zeiss. Various slide and
multiwell plate adapters are available separately, as is a joystick for remote operation. We recommend driving this stage with our BBD102
Motorized Stages
Dual-Channel Brushless DC Servo Controller presented on the next page.
Multi-Axis
Platforms SPECIFICATIONS
XY Microscopy Stages
ITEM # $ £ € RMB DESCRIPTION
MLS203-1 $ 6,799.00 £ 4,895.28 € 5.915,13 ¥ 54,188.03 Fast XY Scanning Stage*
MLS203-2 $ 6,799.00 £ 4,895.28 € 5.915,13 ¥ 54,188.03 Fast XY Scanning Stage for Zeiss Microscopes
*Currently compatible with Olympus and Nikon microscopes when purchased with the appropriate bracket/adapter on page 530.
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Motion Control
SECTIONS M
releases. For greater flexibility, communication with a PC is supported using either a USB or RS232 serial interface. The controller
comes with a software development kit (SDK) in order to support automated PC control of the stage. This is useful to system
integrators and other automation specialists who need to combine operation of the stage with other microscopy automation
Linear Translation
accessories. The fully documented SDK supports all major development languages running on Windows and comes in the form
of ActiveX libraries or a conventional dynamic link library (DLL). Microscopy Stages
USB connectivity provides easy plug-and-play PC operation. Multiple units can be connected to a single PC via standard USB hub
Rotation
technology for multi-axis motion control applications. Combining this feature with the user-friendly apt™ software allows the user to
program and carry out complex move sequences in a short period of time. See below for specifications and pages 628 – 629 for more details. Goniometers
XY Stage Controller
ITEM # $ £ € RMB DESCRIPTION
BBD102 $ 2,949.28 £ 2,123.48 € 2.565,87 ¥ 23,505.76 2-Channel Benchtop 3-Phase Brushless DC Servo Controller
Joystick Console
ITEM # $ £ € RMB DESCRIPTION
MJC001 $ 995.00 £ 716.40 € 865,65 ¥ 7,930.15 2-Axis Microscopy Joystick Console
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Motion Control
▼ CHAPTERS
Mounting Brackets/Adapters for XY Microscopy Stages
Manual Stages These mounting brackets and adapters
allow the MLS203-1 XY Microscopy
Motorized Stages
Stage to be mounted to various upright
Multi-Axis and inverted microscopes from Nikon
Platforms
and Olympus. Please refer to the table
MLSA02
Actuators below for specific information on
compatibility. The MLS203-2 XY
Controllers microscopy stage is directly compatible
with Zeiss Axio Observer and Axiovert 40
▼ SECTIONS microscopes and does not MLSA05
Linear Translation
require the purchase of
additional mounting brackets.
Microscopy Stages
Rotation
Goniometers MLSA03
M5 x 12 Bolt
(8 Places) MLSA06
UPRIGHT/ MOUNTING
MICROSCOPE TYPE
INVERTED BRACKET
The mounting brackets attach to the Nikon TE2000 and Eclipse Ti Inverted MLSA03
MLS203 stage using M5 x 12 bolts.
Mounting of the MLSA02 is shown above. Nikon 80i and 90i Upright MLSA06
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Motion Control
Multi-Axis
Platforms
Multiwell Plate Adapter Slide/Petri Dish Holder Actuators
Close Up Controllers
of Clip
SECTIONS ▼
Linear Translation
Microscopy Stages
MLS203P2 Rotation
Goniometers
MLS203P1
■ Compatible with Standard Microscope Slides
and Ø30 mm to Ø60 mm Petri Dishes
■ Compatible with Standard Well Plates ■ Can be used with Imperial or Metric Accessories
■ Clip Holder to Secure Well Plates in Place
MLS203P3
MLS203P4
Optional Accessories
ITEM # $ £ € RMB DESCRIPTION
MLS203P1 $ 400.00 £ 288.00 € 348,00 ¥ 3,188.00 Multiwell Plate Adapter
MLS203P2 $ 450.00 £ 324.00 € 391,50 ¥ 3,586.50 Slide/Petri Dish Holder
MLS203P3 $ 150.00 £ 108.00 € 130,50 ¥ 1,195.50 Blank Adapter Plate
MLS203P4 $ 200.00 £ 144.00 € 174,00 ¥ 1,594.00 Breadboard Plate, M6 x 1.0 Taps
MLS203P5 $ 200.00 £ 144.00 € 174,00 ¥ 1,594.00 Breadboard Plate, 1/4"-20 Taps
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Motion Control
▼ CHAPTERS
Z-Axis Piezo Scanning Stage with Controller
Manual Stages
Thorlabs’ MZS500-E Low-Profile, Piezo-Driven Stage provides 500 µm of travel in
Motorized Stages the Z direction for visualizing samples in applications such as confocal microscopy
and 3D imaging. The MZS500-E stage includes the BPC301 single-channel,
Multi-Axis
Platforms closed-loop, piezo controller and everything needed for computer-controlled, Z-axis
positioning and active location feedback.
Actuators
The MZS500-E stage is fully compatible with the MLS203 series of XY stage
Controllers systems (see page 528). By combining an XY Stage with this Z-Axis Stage, one
obtains a versatile 3D solution for translating samples over a long travel range or
▼ SECTIONS scanning across a sample with high precision.
Linear Translation The closed-loop, active feedback ensures correct positioning with submicron
repeatability and 25 nm resolution, making this stage ideal for applications that
Microscopy Stages require highly accurate focus control.
Rotation
MLS203/MZS500 XYZ Stage System shown with an MZS500 Specifications
Goniometers Olympus Inverted Microscope ■ Travel: 500 µm
■ Resolution (Closed Loop): 25 nm
MZS500 Features
■ Capacitive Closed-Loop Feedback ■ Load Capacity: 0.25 kg (0.5 lb)
■ Provides XYZ Control when Paired
with an MLS203 XY Travel Stage ■ Accurate Sample Positioning ■ Settling Time: 30 ms (for 25 µm Step)
■ Directly Compatible with ■ Can be Operated On or Off ■ Resonant Frequency: 100 Hz (±10%)
Multiwell Plates (Other Adapters Microscope ■ Dimensions: 140 mm x 226 mm x 25 mm
on Facing Page) ■ Includes Controller (5.5" x 8.9" x 0.98")
■ Controller: BPC301 (Included)
Controller Features
■ High Current Output
LabVIEW™
■ Closed-Loop PID Position or Compatible
Capacitive Feedback Circuit
■ Quiet High-Resolution Position Control MZS500-E
■ Voltage Ramp/Waveform Generation Capability Z-Axis Piezo Scanning Stage Kit
including BPC301 Controller
■ Open-Loop High Bandwidth Piezo Positioning
■ Full Software Control Suite Supplied
■ Extensive ActiveX® Programming Interfaces
■ 3 m (9.75') Cable Included
532 www.thorlabs.com
02_ MicroscopyStages_527-533.qxd.P:527-533 7/23/11 1:42 PM Page 533
Motion Control
Multi-Axis
Slide/Petri Dish Holder Blank Adapter Plate Platforms
Actuators
Controllers
SECTIONS ▼
Linear Translation
MZS500P2 MZS500P3
Microscopy Stages
Rotation
■ Compatible with Standard Microscope Slides ■ Ideal for Custom or Non-Standard Applications
and Ø30 mm to Ø60 mm Petri Dishes ■ Easily Drilled and Tapped Goniometers
■ Can be used with Imperial or Metric Accessories
Breadboard Plates
Joystick Console
Thorlabs’ MZF001 joystick console is designed for
microscope users to provide intuitive, tactile, manual
positioning of an MZS500 stage. It is used in conjunction
with the BPC301 single-channel controller included with
the stage. Up to three joysticks can be connected to each
other, interfacing neatly into a multi-channel control
application. Furthermore, if the parameter settings are
saved (persisted) to the controller, it is necessary to have
the controller connected to a host PC, thereby allowing
MZF001 Joystick
(Available Separately) remote operation.
www.thorlabs.com 533
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Motion Control
Selection Guide
MOTORIZED MULTI-AXIS
MANUAL STAGES STAGES PLATFORMS ACTUATORS CONTROLLERS
Pages 479 - 505 Pages 506 - 540 Pages 541 - 588 Pages 589 - 614 Pages 615 - 659
Rotation Stage
Selection Guide
Continuous Rotation Stages: DC Motor Driven
Pages 535 - 537
534 www.thorlabs.com
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Motion Control
Rotation
Goniometers
CR1-Z7
Motorized rotation stage only. See price box. Also
available with a manual drive. See page 500.
The CR1-Z7 motorized rotation stage offers high-precision, continuous motion in a sturdy, compact package. The backlash-free
worm-gear design, coupled with a high-resolution optical encoder, provides the rotational precision required in optical laboratories.
The high-torque 12 VDC Servo Motor supplies ample power for rotating vertical loads up to 25 lbs (11.3 kg). The CR1A(/M)
attaches to the CR1-Z7 using the included 6-32 (M3) cap screws. The array of tapped holes in the CR1A(/M) adapter plate allow
for the mounting of a large variety of optics and components.
1 5
8-32 Tap 0.45" 1.00" 6 10
0.18" (5.0 mm) (11.0 mm) (25.4 mm) 11 15
Deep (4 Places)
6-32 Tap
0.25" (6.0 mm) Pin Description Pin Description
Deep (8 Places) 0.53" 1.00" 1.27" 2.00" Ø1.70" 2.76" 1 Ground 9 39K Identification Resistor
(13.0 mm) (25.0 mm) (32.0 mm) (51.0 mm) (Ø43.2 mm) (70.1 mm) 2 Not Connected 10 5 V Encoder Supply
4.26" 3 Not Connected 11 Encoder Channel A
(108.2 mm) 4 Not Connected 12 Not Connected
4-40 Tap
0.18" (5.0 mm) 5 Motor - 13 Encoder Channel B
Deep (4 Places) 6 Not Connected 14 Not Connected
Mounting Slot for Use with
1/4"-20 (M6) Cap Screws 7 Motor + 15 Not Connected
(2 Places) 8 Not Connected Core Ground
CR1-Z7
Motor Connector Pin Out
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
CR1-Z7 CR1/M-Z7 $ 813.60 £ 585.79 € 707,83 ¥ 6,484.39 Motorized Rotation Stage
CR1-Z7E* CR1/M-Z7E* $ 1,349.10 £ 971.35 € 1.173,72 ¥ 10,752.33 Rotation Stage with DC Servo Motor Controller
CR1A CR1A/M $ 24.00 £ 17.28 € 20,88 ¥ 191.28 Rotation Stage Adapter
*Price includes a 10% discount on the TDC001 drive module. Package Contents: CR1-Z7 Stage, TDC001 DC Motor Controller, and TPS001 Power Supply for the TDC001.
www.thorlabs.com 535
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Motion Control
▼ CHAPTERS
Motorized High-Precision Rotation Mount for Ø1" Optics
Manual Stages
With a depth of only 23 mm (0.91"), the PRM1Z8 is a small, compact,
Motorized Stages motorized rotation stage and mount that accepts Ø1" optics and is based on
our popular PRM1 Rotation Mount (see page 292). Rotation is driven via
Multi-Axis
Platforms a DC servo motor that is equipped with a 67:1 gearbox and a rotary
encoder for accurate closed-loop position control. The user can measure PRM1Z8
Actuators
the angular displacement by using the Vernier dial in conjunction with
Controllers the graduation marks that are marked on the rotating plate in 1°
increments. The precision DC motor actuator provides 1 arcsecond of
▼ SECTIONS resolution over the entire 360° of rotation.
This rotation stage/mount is also equipped with a precision home limit switch
Linear Translation
to facilitate automated rotation to the zero datum position, thus ensuring
Microscopy Stages absolute angular positioning thereafter. The limit switch is designed to allow
continuous rotation of the stage over multiple 360° cycles.
Post Assembly
Rotation
For complete flexibility, the stage can be mounted either vertically on a post or Sold Separately
Goniometers
horizontally using the PRM1SP2 adapter plate featured on the next page.
Specifications
■ Range: 360° Continuous Rotation
8-32 (M4 x 0.7)
■ Bidirectional Repeatability: ±0.1° Tap for Post Mounting
■ Backlash: ±0.3° 4-40 Tap
(4 Places)
■ Rotational Velocity (Max): 25 Degrees/s
■ On-Axis Load Capacity (Horizontal): 1.5 kg
■ On-Axis Load Capacity (Vertical): 0.5 kg* Ø3.26" 8-32
(Ø83.0 mm) (M4 x 0.7)
■ Achievable Incremental Motion (Min): 25 arcsec 4 Places
■ Absolute On-Axis Accuracy: 0.1%
■ Percent Accuracy (Max): 0.08% SM1 (1.035"-40)
1/4" (M6)
Internal Thread
■ Home Location Accuracy: ±0.2° Through Clearance
2 Places
* Measured centrally on axis, 50 mm off the platform
Features
8-32 (M4 x 0.7) 8-32 (M4 x 0.7)
■ 1° Graduations on Main Dial Mounting Hole Angled Mounting
■ 25 Degrees/s Rotational Velocity Hole
■ Compact Design is Only 23 mm Thick 0.91"
■ Home Limit Switch (23.0 mm)
■ Can be Used as a Stage or Rotation Mount 5.18"
■ SM1 (1.035"-40) and 30 mm Cage Compatible (131 mm)
■ Accepts Ø1" Optics up to 0.50" (12.5 mm) Thick Cable Length
19.6" (0.5 m)
536 www.thorlabs.com
03_RotationA_534-539.qxd.P:534-539 7/23/11 1:54 PM Page 537
Motion Control
The PRM1SP1 Adapter Plate is fixed to the rotating top Motorized Stages
plate of the PRM1Z8 stage using the two included 6-32
(M3 x 0.5) bolts, allowing any of Thorlabs' standard Multi-Axis
Platforms
3 mm tongue & groove accessories (i.e., any of our
flexure stage accessories presented on pages 572 - 588) Actuators
Shown with
PRM1Z8 to be used. The total deck height with this adapter plate
Controllers
attached is 1.08" (28 mm). PRM1SP1
SECTIONS ▼
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
PRM1SP1 PRM1SP1/M $ 42.00 £ 30.24 € 36,54 ¥ 334.74 Grooved Adapter Plate Linear Translation
Microscopy Stages
Horizontal Mounting Plate
Rotation
Goniometers
OSA201, OSA203
The peak and total optical power of the 1550 nm laser diode.
See pages 1600 - 1603
www.thorlabs.com 537
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Motion Control
M SECTIONS
The main body of the stage is made from an aluminum alloy and
can attach to the work surface using the NR360SP1 mounting
plate (available separately). Alternatively, it can be post mounted at any
Linear Translation
orientation via the nine mounting holes provided along four surfaces of the device. A worm gear assembly is used to transfer the rotary
Microscopy Stages motion of the stepper motor into rotary motion of the carriage. There is a mechanical reduction in this gear assembly that causes one
revolution of the carriage for every 66 turns of the stepper motor.
Rotation
The hybrid stepper motor used in the NR360S actuator is ideally suited for microstepping applications that require high resolution. The
rotor, with 50 individual magnetic teeth, ensures smoother low-speed motion by allowing the discrete 1.8° step size associated with
Goniometers
vibrational noise to be reduced to much smaller steps with inherently lower resultant vibrational noise.
When used with the apt™ Series BSC101 Stepper Motor Controller (see pages 632 – 633), the stepper motor provides 25,600 microsteps
per revolution, resulting in a platform rotation of (0.213 x 10-3)° [3.7 µrad] per microstep.
7.34"
Please refer to our website for (186.4 mm)
Features complete models and drawings.
I
3.94"
High Load Capacity (100.0 mm)
I Manual Control of the Rotating Carriage
I Preloaded Worm Gear Drive Mechanism
with Minimal Backlash
I Origin Indicating Switch Every 360°
Specifications
I Travel: 360º of Continuous Rotation 3.98"
I On-Axis Load Capacity: 110 lbs (50 kg) (101.0 mm)
I Bidirectional Repeatability: 10 arcsec
I Min Achievable Incremental Motion: <1 arcsec
I Max Accuracy (over 10º Range): 5 arcmin* Ø1.97" (Ø50.0 mm)
I
Clear Aperture.
Eccentricity (Run-Out) of Top Plate: <50 µm SM2 (Ø2.035-40)
I Max Speed: 20 Degrees/s* Counterbore for 1/4"-20 (M6) Internal Thread
I
Cap Screw (4 Places)
Max Torque: 0.9 Nm 8-32 Tapped Hole
I
Equispaced (4 Places)
Construction: Black Anodized Aluminum 3.86"
Body and Platform (98.0 mm)
I Weight: 3.1 lbs (1.4 kg)
I Recommended Controller: BSC101 1.34" 1.65"
(34.2 mm) (42.0 mm)
*If used with the BSC101
M6 x 1.0 Tapped Hole
2 Places per Side Face
Rotation Stage with Stepper Motor Drive 4 in Total
538 www.thorlabs.com
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Motion Control
SECTIONS M
ITEM # $ £ € RMB DESCRIPTION
NR360SP8 $ 48.00 £ 34.56 € 41,76 ¥ 382.56 SM1-Compatible Adapter Plate for the NR360S Stage Linear Translation
Rotation
NR360SP9 This adapter plate is used to provide a
number of different mounting options when Goniometers
attaching devices to our NR360S rotation
stage. The carriage has 17 1/4"-20 (M6 x 1.0)
through holes. The four counterbores for #8
(M4) cap screws allow the plate to be attached
to the NR360S (NR360S/M) Stage. NR360SP9
NR360SP2
METRIC
ITEM # ITEM # $ £ € RMB DESCRIPTION METRIC
Vertical ITEM # ITEM # $ £ € RMB DESCRIPTION
NR360SP2 NR360SP2/M $226.00 £162.72 € 196,62 ¥ 1,801.22 Mounting Bracket NR360SP5 NR360SP5/M $ 89.00 £ 64.08 € 77,43 ¥ 709.33 Mounting Adapter Plate
www.thorlabs.com 539
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Motion Control
Z8 Actuator Specifications
I Travel Range of Z812: 0.5" (12 mm)
I Maximum Velocity: 3 mm/s
I Bidirectional Repeatability: <1.5 µm
I Backlash (with Preload) of Z812: <8 µm
I Min Achievable Movement: 0.05 µm
I Home Location Accuracy: <2 µm
I Leadscrew Pitch: 1 mm
I Encoder Lines: 512 GNL18 Point of Rotation
I Planetary Gear Head Ratio: 67:1 GNL10 Point of Rotation
I
1.75"
Recommended Controller: TDC001, See Pages 626 – 627 1.00" (44.5 mm)
(25.4 mm)
2.50"
(63.5 mm)
GNL20-Z8
540 www.thorlabs.com
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Motion Control
Selection Guide
MOTORIZED MULTI-AXIS
MANUAL STAGES STAGES PLATFORMS ACTUATORS CONTROLLERS
Pages 479 - 505 Pages 506 - 540 Pages 541 - 588 Pages 589 - 614 Pages 615 - 659
Multi-Axis Platforms
Selection Guide
Three-Axis Roller Bearing Platforms
Pages 542 - 543
Flexure Accessories
Pages 572 - 588
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Motion Control
6.5"
Differential Drive RollerBlock™ (165.1 mm)
assemblies that ensure low stiction for I Deck Height: 2.46" (62.5 mm)
true submicron resolution. An adjustable I Load Capacity: 9.7 lbs (4.4 kg)
preload virtually eliminates all unwanted
side play.
Accessory
Beam
Height
Moving Deck
RBL13D Moving Deck
13 mm Travel
0.5" All Three Axes
(12.5 mm) 3.82"
(97 mm)
2.46"
(62.5 mm)
542 www.thorlabs.com
01_3AxisRollerBlockPlatforms_541-543.qxd.P:541-543 7/23/11 2:02 PM Page 543
Motion Control
Motorized Stages
Multi-Axis
RB13M Platforms
RollerBlock™ with Simple
Micrometer Drives Actuators
Controllers
SECTIONS ▼
RollerBlock™
with Piezo Assisted
3-Axis Roller
Micrometers Bearing Platforms
A nswer Yes! As shown in the picture to the left, you can build
a complete fiber launch system using the RollerBock™
translator. You will need the parts from the list below.
Parts List
Item # Description/Function Page #
RBL13D 13 mm Translation Stage 543
HFV001 Optical Fiber Clamp 580
HCS013 Microscope Objective Holder 575
AMA025 Fixed Height Platform 574
RMS10X Microscope Objective 960
www.thorlabs.com 543
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Motion Control
Selection Guide
MOTORIZED MULTI-AXIS
MANUAL STAGES STAGES PLATFORMS ACTUATORS CONTROLLERS
Pages 479 - 505 Pages 506 - 540 Pages 541 - 588 Pages 589 - 614 Pages 615 - 659
544 www.thorlabs.com
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Motion Control
CHAPTERS ▼
4 mm Travel, Three-Axis MicroBlock™ Flexure Platform
Manual Stages
The smooth, continuous motion provided by the MicroBlock™
3-axis platform makes this device ideally suited for almost any Motorized Stages
micropositioning application. An innovative flexure design MBT616D Multi-Axis
provides three orthogonal directions of linear travel without the Patent 6,186,016 Platforms
severe limitations of kinetic or static friction that are found in Actuators
traditional bearing based stages.
The use of nested flexure plates allows the platform to operate Controllers
indefinitely without needing any lubricant, which is one of the
SECTIONS ▼
primary sources of drift within positioning devices. In addition,
the flexure spring design allows considerable tolerance to shock 3-Axis Roller
Bearing Platforms
and vibration, even when fully loaded.
3-Axis Flexure
The central keyway that extends across the surface of the moving Platforms
top plate allows rapid system reconfiguration while maintaining 75 mm x 75 mm x 62.5 mm 4-Axis Flexure
alignment. An extensive selection of accessories for the Platforms
MicroBlock™ system can be found on pages 572 - 588. Features 5-Axis Flexure
■ Flexure Design Ensures Smooth, Continuous Motion Platforms
The platform is offered preconfigured with a choice of two 6-Axis Flexure
■ Compact Design: 62.5 mm from the Table to the Moving
actuator options. The differential Platform, and 75 mm from the Table to the Optical Axis of Platforms
adjusters (MBT616D) provide the Accessories Flexure Accessories
50 nm resolution over the ■ No Sliding Parts to Minimize Friction
300 µm fine adjustment ■ Flexure Design Enhances Long-Term Stability
range. The thumbscrew
drives (MBT602) provide
0.5 mm of travel per
revolution of the screw, RB13P1 Adapter
giving a calculated Plate: This replacement
MBT602
positional resolution of top plate has an array of
around 0.5 µm. both 1/4"-20 (M6 x 1.0)
and 8-32 (M4 x 0.7)
mounting holes to adapt the stage for
general purpose optical table applications.
Specifications
■ XYZ Travel: 4 mm ■ High Resolution Actuators See Page 588 for Details
■ Deck Height: 62.5 mm (MBT616D): 50 nm Over the 300
■ Optical Axis Height:* 75 mm µm Fine Adjustment Range
■ Thumbscrew Drives (MBT602): MBT616D Shown
■ Crosstalk: <20 µm/mm with RB13P1
0.5 mm/rev
■ Thermal Stability: 1 µm/°C Adapter Plate
■ Mechanical Stability: Flexure
■ Differential Adjusters: Design Utilizes Nested Flexure Plates
• Coarse Adjust 0.5 mm/rev to Minimize Mechanical Drift
• Fine Adjust 50 µm/rev ■ Load Capacity: 2.2 lbs (1 kg)
*When using Flexure Stage Accessories (See Pages 572 - 588)
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Motion Control
Specifications
I XYZ Travel: 4 mm I Load Capacity: 2.2 lbs (1.0 kg)
I Thermal Stability: 1 µm/°C I Weight: 1.65 lbs (0.75 kg)
I Differential Adjusters: I Deck Height: 62.5 mm From the
• Coarse Adjust: 0.5 mm/rev Bottom Surface of the Stage to the
• Fine Adjust: 50 µm/rev Moving Platform.
I High Resolution Manual Drives: The Accessory Beam Height
Drive Design Provides 50 nm is 75 mm from the Bottom
of Fine Control Resolution Over a Total of the Stage
Range of 300 µm
I Crosstalk (Max): 20 µm/mm Preconfigured Fiber Launch Systems
of Travel
The 3 Axis NanoMax™ stages are ideal for fiber
I Repeatability: 500 nm RMS
coupling applications, to save time, we have
Bidirectional
assembled complete launch systems that are
configured to meet many of the most common
laboratory applications (see pages 550 – 557).
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
MAX313D MAX313D/M $ 1,542.03 £ 1,110.26 € 1.341,57 ¥ 12,289.98 NanoMax™ Stage Differential Drives, No Piezo
546 www.thorlabs.com
02_3AxisFlexrPlatforms_544-559.qxd.P:544-559 7/25/11 3:51 PM Page 547
Motion Control
www.thorlabs.com 547
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Motion Control
548 www.thorlabs.com
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Motion Control
ScienceDesk™ Series
of WorkStations
Ergonomic Workplace Systems for Manufacturing and Scientific Research
Modular Design and Accessory Line Allows for Customization of Your Work Space
Welded Steel Frame for Excellent Strength and Durability
Passive- and Active-Air Isolation Available (Rigid Frames Also Available)
Faraday Enclosure (FAR01) Also Available to Shield from
ScienceDesks and
accessories can be
configured to satisfy
Electromagnetic/Electrostatic Interference (See Page 44) almost any workspace
requirement.
Thorlabs’ ScienceDesk™ Series of Workstations offer high-quality, ergonomic, modular solutions to reduce
vibrations common to the lab environment. They are ideally suited for vibration-sensitive microscopy applications,
such as those typically found in the fields of high-resolution microscopy, confocal microscopy, scanning probe
microscopy, and electrophysiology. Thorlabs now also offers a Faraday enclosure system as an optional accessory in
order to shield from electromagnetic interference.
Panels are held in by magnets, allowing
them to be quickly removed for access
inside the cage.
For more details, see pages 27 - 45
www.thorlabs.com 549
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Actuators
NanoMax™ Free-Space to PM
Launch System with Variable
Force Rotator, See Page 554
NanoMax™ Free-Space to SM
Fiber Launch Systems with Auto-
Alignment Controller, See Page 556
550 www.thorlabs.com
02_3AxisFlexrPlatforms_544-559.qxd.P:544-559 7/25/11 3:52 PM Page 551
Motion Control
Actuators
System Includes
I MBT616D High-Resolution Flexure Stage Controllers
with 4 mm of Travel, See Page 545
SECTIONS M
MBT612D
I Three High Performance Adjusters Provide
300 µm of Fine Travel with 50 nm Resolution 3-Axis Roller
I HFF003 Fiber Clamp, See Page 580 Bearing Platforms
I AMA009 Large Fixed Platform, See Page 573 3-Axis Flexure
I
Platforms
High Performance HCS013 Microscope Objective Mount,
4-Axis Flexure
Drives: 50 nm See Page 575 Platforms
Resolution I HFS001 Cable Strain Relief, See Page 580 5-Axis Flexure
Platforms
6-Axis Flexure
Specifications
I
Platforms
This MicroBlock™ launch system features our high-resolution differential Travel: 4 mm
adjusters that are ideal for optimizing the coupling of a free-space laser into a I Crosstalk: <20 µm/mm Flexure Accessories
single mode fiber, even at visible wavelengths where the mode field diameter of I Load Capacity: 2.2 lbs (1 kg)
the fibers are as small as 3 µm. The addition of a cable strain relief helps to I Thermal Stability: 1 µm/°C
prevent inadvertent disruption of the system, which can be a great time saver. I Differential Adjusters
This preconfigured fiber launch is an ideal starter system that can be quickly • Coarse Adjustment: 0.5 mm/rev
adapted to many uses. Additional accessories are available that enhance the • Fine Adjustment: 50 µm/rev
flexibility of this platform. Please see pages 572 – 588 for details.
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
MBT612D MBT612D/M $ 1,182.87 £ 851.67 € 1.029,10 ¥ 9,427.47 MicroBlock™ Fiber Launch System w/ Quick-Release Clamp
release fiber holder provides six mounting surfaces, each one designed to accept a
different size fiber. The addition of a cable strain relief helps to prevent
inadvertent disruption of the system, which can be a great time saver.
This preconfigured system is an ideal starter system and can be quickly adapted to
other applications using our extensive line of accessories. MBT610D
Please see pages 572 – 588 for details.
www.thorlabs.com 551
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Motion Control
USB Interface
Temperature Stability
Thorlabs’ 4-Channel, Fiber-Coupled Laser Source provides easy access to multiple wavelengths of single
mode (SM) fiber-coupled light. The laser source is configured to accept any combination of four SM fiber-pigtailed laser diodes;
choose from the following wavelengths: 405, 406, 473, 488, 635, 638, 642, 658, 670, 675, 785, 808, 850, 852, 904, 980, 1064,
1310, and 1550 nm.
Each fiber-pigtailed laser diode is operated from an independent, high-precision, low-noise, constant-current source and
temperature control unit. An intuitive front-panel interface allows the user to view and set operating parameters for each laser. The
display indicates the selected channel number, output wavelength, operating power, and operating temperature of the laser diode.
This device includes a microcontroller to monitor the system for fault conditions and to fully control the laser’s optical power and
temperature. The laser source includes a USB connection that allows remote adjustment of power, temperature, and enabling. On
the rear panel, analog inputs are available to modulate
the lasers with an external signal.
552 www.thorlabs.com
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Motion Control
mode field diameter of the fibers are as small as 3 µm. The 5-Axis Flexure
Specifications
I
Platforms
rotary fiber holder provides smooth rotation with negligible Travel: 0.16" (4 mm) I Differential Adjusters 6-Axis Flexure
run-out. When using polarization maintaining fibers, this I Crosstalk: <20 µm/mm • Coarse Adjustment: Platforms
I
system provides an easy means of optimizing the extinction Load Capacity: 0.5 mm/rev
Flexure Accessories
ratio of the signal being coupled through the PM fiber. 2.2 lbs (1 kg) • Fine Adjustment:
I
Thorlabs offers a number of five- and six-axis systems for 50 µm/rev
Thermal Stability:
applications that require more advanced capabilities. Please 1 µm/°C
see pages 563 – 571.
www.thorlabs.com 553
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Motion Control
Motorized Stages
Specifications
Multi-Axis I Travel: 4 mm
Platforms I Thermal Stability: 1 µm/°C
Actuators I Differential Adjusters
• Coarse Adjustment: 0.5 mm/rev
Controllers
• Fine Adjustment: 50 µm/rev
I
M SECTIONS
High Resolution Manual Drives:
When Performance Matters Provides 50 nm of Fine Control
3-Axis Roller When long-term stability and Resolution Over a Total Range of
Bearing Platforms 300 µm
Patents 6,186,016 ease-of-use are of paramount
3-Axis Flexure and 6,467,762 importance, we recommend this I Repeatability: 500 nm RMS
Platforms
series of NanoMax launch systems. Bidirectional
I
4-Axis Flexure
Platforms NanoMax™ Model MAX355D Load Capacity: 2.2 lbs (1 kg)
5-Axis Flexure One of the most challenging alignment tasks in a photonics laboratory is the launching of I Accessories: Mounted on the Top Deck
Platforms light from a free-space laser into a single mode optical device or fiber, especially when the of the Stage
6-Axis Flexure laser is operating in the visible range and the mode field diameter of the device is less than • Large Fixed Bracket (AMA009)
Platforms
4 µm. This MAX350 series of fiber launch systems have been redesigned to perform this task • Grin Lens Mount (HGI003)
Flexure Accessories with ease. From the patented high-resolution, dual-stage adjusters (coarse range of 4 mm • FC Optical Fiber Cable Holder
with <1 µm resolution, and fine range of 300 µm with <50 nm resolution) to the patented (HFB004)
flexure design that forms the foundation of the system, this three-axis translator provides • Cable Strain Relief (HFS001)
both the stability and the resolution required to hit submicron targets.
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
MAX355D MAX355D/M $ 1,633.80 £ 1,176.34 € 1.421,41 ¥ 13,021.39 NanoMax™ Fiber Launch System for FC Cables
554 www.thorlabs.com
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Motion Control
I Crosstalk: 20 µm/mm of Travel (Max) When long-term stability and ease-of- and 6,467,762 6-Axis Flexure
Platforms
I Resonant Frequency (±10%):
use are of paramount importance, we
recommend this series of NanoMax Flexure Accessories
375 Hz (No Load) 200 Hz launch systems.
(275 g Load) 150 Hz (575 g Load)
I Load Capacity: 2.2 lbs (1 kg)
I Deck Height: 62.5 mm from the Base NanoMax™ Stage with High Resolution Manual Adjusters and
of the Stage to the Mounting Surfaces of Piezoelectric Actuators
the Moving Platform, the Accessory Beam The MAX373D Fiber Launch System is built from our MAX311D three-axis
Height is 75 mm from the Bottom Surface translation stage; for details on this stage, please see page 547. This stage and
of the Stage accessory package are ideally suited for use with our NanoTrak™ auto-alignment
I Accessories: Mounted on the Top Deck system (see pages 646 – 651 for details). The 20 µm of piezoelectric travel
of the Stage provides sufficient electrical control of the position of the optical fiber to ensure
• Large Fixed Bracket (AMA009) rapid ‘first-light’ detection as well as automatic optimization of the coupling
• Microscope Objective Mount (HCS013) efficiency.
• Adjustable Force Fiber Clamp (HFF001)
• Cable Strain Relief (HFS001) The MAX373D utilizes three strain gauge displacement sensors to provide a
I Recommended Controller: BPC203 voltage signal that is linearly proportional to the displacement of the piezoelectric
(See Pages 642 – 643) element. Using this signal, it is possible to compensate for hysteresis, creep, or
thermal drift that is inherent to all piezoelectric elements. Additionally, the use of
Note: All measurements related to the performance of the the displacement sensor in combination with our NanoTrak™ auto-alignment
piezoelectric actuators are made with Thorlabs’ model BPC203
piezo driver, which can be found on pages 642 – 643. system allows one to precisely optimize the coupling efficiency of an optical
system; then, once aligned, the displacement sensors can be used to stabilize the
position of the system while subsequent operations are performed.
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Motion Control
M SECTIONS
needing any tools.
Simply choose the base platform
3-Axis Roller from the models below and add
Bearing Platforms
the required actuators from the
3-Axis Flexure
Platforms facing page.
4-Axis Flexure
Platforms
5-Axis Flexure
Platforms
6-Axis Flexure
Platforms NanoMax™ Platform, Piezoelectric Actuators, and Sensors
Flexure Accessories
Adding strain gauge displacement sensors to the internal
piezoelectric elements of the NanoMax™ platform enhances the Displacement Sensor
resolution performance of the system by a factor of four.
Additionally, it improves the linearity and drift performance of the
stage while allowing the system to be operated in a closed- loop
system. For complete details on the performance of the
NanoMax™ platform with internal piezos and strain gauge
LEMO Connector
displacement sensors please, refer to the MAX311D on page 547.
MAX301
Use this base unit if your application does not require piezoelectric actuators. Please note that
while the external drives can be easily changed in the field, internal piezoelectric actuators are
incorporated directly into the platform and cannot be added later. If your needs change and
you subsequently require piezoelectric actuators, the piezo extenders shown on the next page
can be used along with our other drive options.
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Motion Control
3-Axis Roller
ITEM # $ £ € RMB
Bearing Platforms
DRV3 $ 308.70 £ 222.26 € 268,57 ¥ 2,460.34 3-Axis Flexure
Platforms
4-Axis Flexure
Stepper Motor Platforms
5-Axis Flexure
The complete presentation for this stepper motor drive Platforms
is on page 610. When used with an apt™ series 6-Axis Flexure
stepper motor driver, it provides 25,600 microsteps per Specifications in Stage
I
Platforms
revolution. Travel: 0.16" (4 mm)
I
Flexure Accessories
Resolution: 39 nm
I Holding Torque: 23.1 N·cm
DRV001
ITEM # $ £ € RMB
DRV001 $ 585.00 £ 421.20 € 508,95 ¥ 4,662.45
Thumbscrew
Specifications*
This thumbscrew drive is often used in applications or I Travel: 0.16" (4 mm)
I
positioning tasks that require a high degree of stability,
Resolution: 1 µm
yet have lower resolution requirements. (500 µm Thread Pitch)
*When incorporated into a NanoMax Stage, please note
that the travel of the DRV004 is limited by the stage.
Piezoelectric Extenders
These piezoelectric extenders provide 20 µm or 80 µm of high-resolution travel to any of the modular drives shown above. The
modular design allows these extenders to be attached in series with any of Thorlabs’ modular drives. These extenders are ideal for
applications that require high-resolution movements over a small range. Coarse adjustments are made using any one of our modular
drives shown above.
ITEM # $ £ € RMB
DRV120 $ 995.00 £ 716.40 € 865,65 ¥ 7,930.15
DRV181 $ 995.00 £ 716.40 € 865,65 ¥ 7,930.15
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Motion Control
An example showing fiber to fiber alignment with a 3-axis flexure platform and MBT402.
3.58"
(91 mm)
2.36"
(60 mm)
Vertical
0.49" (12.5 mm) Accessory The use of nested flexure elements ensures
Optical Axis Height smooth, continuous motion for both
rotational axes, making this device ideally
Horizontal
suited for high resolution optical applications.
3.74" Yaw Aside from its low profile, the key feature that
(90 mm)
this particular stage offers is the easy
2.46"
(62.5 mm) accessibility of the moving platform. As can be
seen from the photograph above, the moving
Pitch platform is accessible from three of the four
sides; this feature maximizes the free space
6.34" (161 mm) 5.47" (139 mm)
available for additional equipment that your
Please refer to our website for complete models and drawings. setup may require.
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Motion Control
6.88" Nom
1.18" (175 mm)
(30 mm)
3.54"
(90 mm)
2.2"
(56 mm)
2.24"
Moving Platform We recommend this narrow platform
(57 mm)
Pitch
positioning system for applications that
require a device to be positioned between
Center of Rotation two coupling stages. The extensive selection
Pitch and Yaw Vertical
5.6" Nom 5.6" Nom of accessories presented at the end
(142 mm) (142 mm)
of this section (see pages 572 - 588) are all
Horizontal compatible with our 4-axis platform stages.
Given the large array of possible solutions to
2.95"
(75 mm) any particular alignment challenge, Thorlabs
2.46" Yaw
(62.5 mm) recommends that you contact one of our
regional offices for expert technical assistance
3.58" (91 mm) in configuring a system that is ideally suited
to your specific needs.
Please refer to our website for complete models and drawings.
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Motion Control
6.3"
(160 mm)
Yaw
4.43"
(112.5 mm)
Pitch
Horizontal
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Motion Control
6.27" Yaw
(159 mm)
4.43"
(112.5 mm) Pitch
Horizontal
Optical Axis
5.59"
(142 mm) 6.87"
7.48" (175 mm)
(190 mm)
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Selection Guide
MOTORIZED MULTI-AXIS
MANUAL STAGES STAGES PLATFORMS ACTUATORS CONTROLLERS
Pages 479 - 505 Pages 506 - 540 Pages 541 - 588 Pages 589 - 614 Pages 615 - 659
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Motion Control
CHAPTERS ▼
NanoMax™ 600 6-Axis Manual Stages
Motorized Stages
3-Axis Roller
Common Pivot
Point "P"
DRV3 Differential
Adjuster (6 Places)
5.79"
4.92" (147.0 mm)
(125.0 mm)
6.34"
10.37" (161.0 mm)
MAX601D
(271.0 mm)
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▼ CHAPTERS
NanoMax™ 600 Six-Axis Parallel Flexure Platform (Page 1 of 2)
Manual Stages
Patented
Features
0.16" (4 mm) of X, Y, Z Translational Motion and 6° (θx, θy, θz)
Motorized Stages 6,186,016 MAX603D
■ 6,467,762
Multi-Axis of Rotational Motion
Platforms
■ Optional Piezoelectric Actuators for Closed-Loop Operation
Actuators
■ High Resolution (up to 10 nm)
Controllers ■ Thermal Stability <100 nm/ºC from 15-30 °C
■ High Resonant Frequency
▼ SECTIONS ■ Active Thermal Compensation
■ Patented Parallel Flexure Mechanism with Fixed Drives
3-Axis Roller
Bearing Platforms ■ Common Pivot Point for All Degrees of Freedom
3-Axis Flexure
Simplifies Alignment
Platforms ■ Low-Maintenance Design
4-Axis Flexure
Platforms
particularly pronounced for a six-axis stage, where the
5-Axis Flexure What Makes the NanoMax™ 600 Better?
mechanism providing the sixth degree of freedom is
Platforms For complex, multi-axis positioning, parallel flexure platforms that
stacked atop five other stages. All of the errors in the
6-Axis Flexure incorporate three or more degrees of freedom into a single, compact unit
Platforms preceding stages combine to make the overall volumetric
provide significantly improved performance over serialized stacks of
accuracy of the complete stack far worse than the errors
Flexure Accessories translation stages. Thorlabs’ patented parallel flexure technology lies at the
associated with any individual stage.
heart of the NanoMax™ family of nanopositioning platforms. The starting
point for the conceptual design is the observation that the motion of a rigid Our Superior Patented Parallel Flexure Design
body has six unique degrees of freedom. Each actuator should subtract one The NanoMax 600 series has been at the forefront of
degree of freedom from the body, thereby fully constraining the body with six nanopositioning technology for a number of years. The
actuators. This contrasts with serial designs that use a stack of single-degree- parallel flexure design of the platform provides an
of-freedom mechanisms to achieve the same result. unmatched combination of high stability and resolution
in a six-axis nanopositioner. The mechanical stiffness is
Reduced Part Count Improves Performance
an order of magnitude higher than traditional serial
The beauty of our parallel flexure approach is its simplicity. Designers and
flexure designs. In addition to those already mentioned,
users of nanopositioning equipment know that to transmit motion accurately
there are several other intrinsic advantages of the parallel
it is preferable to have as few moving parts acting in series as possible. At each
flexure design: a much lower working height compared to
interface between parts, microscopic friction can occur. Such friction tends to
stacked axis stages, additional resistance to external forces,
be unpredictable and uncontrollable, making it the most undesirable element
and significant improvements to damping capabilities.
of any high-performance design. Parallel flexure platforms have very few
Also, since there are fewer moving parts, there is a
moving parts and can transmit motion very precisely.
reduction in the inertia of the moving platform, leading
Tests performed over 30 µm in 1 µm steps have yielded root-mean-squared to excellent dynamic performance, making this product
bidirectional repeatability of 30 nm, or 0.1% of full range for the NanoMax ideal for fast, automated alignment.
600 series of stages. These results are made possible by the inherent superior
A parallel platform design solves the problem of error
performance of the parallel flexure
buildup. The enabling design step was to conceive the
mechanism that eliminates static and
flexure as a rigid rod that has a flexible coupling at each
Specifications kinematic friction within the platform.
end, leading to exactly two rotational degrees of freedom.
■ Stiffness Flexure Design: 1 N/µm in Stacked Systems Versus Inherently This rod structure constrains the motion of the top plate
X and Z, 0.5 N/µm in Y Parallel Multi-Axis Platform Design by connecting it to the base. Six such rods provide the six
■ Optical Axis Height: 4.92" (125 mm) Multi-axis systems are traditionally built independent constraints needed to restrain the stage,
by connecting together a series of single- neither over- nor under-constraining it.
■ Deck Height: 4.43" (112.5 mm)
axis mechanisms, as shown in
Diagram A to the right. As the
number of axes increases, the Diagram A
design grows in complexity and becomes cumbersome. In addition,
stacking drives reduces stiffness and can introduce a host of
positioning errors.
All traditional designs of multi-axis stages (e.g., roller bearings, ball
bearings, or flexures) suffer from the buildup of errors as stages are
stacked. For a simple stacking of two stages, two main errors must
be considered: cosine and Abbe errors. The cosine error arises when
the axes of two stages are not aligned orthogonal to each other. The
Abbe error arises from the finite height of the upper stage. Any
angular roll, pitch, or yaw errors in the lower stage will be amplified
by the overall height of the stacked system. The situation is
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Motion Control
CHAPTERS ▼
NanoMax™ 600 Six-Axis Parallel Flexure Platform (Page 2 of 2)
Manual Stages
To actuate movement in the top plate, the ends of optical components since optical beams rarely propagate collinearly with the axes of
the flexure rods not attached to the top plate are any stage to better than the scale of the arcuate motion. Furthermore, when using a Motorized Stages
connected to linear actuators. Linear translation NanoTrak™ Auto-Alignment Controller (see pages 648 - 649), these effects are
occurs by moving the appropriate pairs of flexure automatically compensated for by the controller itself. However, if arcuate motion is Multi-Axis
Platforms
rods in the same direction, whereas rotation a defining parameter of a particular alignment or positioning application, its effects
occurs by moving the appropriate pairs of rods in can also be compensated for with software. Actuators
opposite directions. Modular Actuators Allow a System to be Quickly Adapted Controllers
All Actuators are Attached to the Base Designed for ease of use, the platform has a selection of modular actuators that may
This six-axis parallel flexure design has all of the be used in any combination of stepper motor, external piezoelectric actuators, SECTIONS ▼
benefits of a high-performance flexure stage with manual differential micrometers, and thumbscrew drives. However, the NanoMax 600
3-Axis Roller
the added benefit of improved volumetric Series of nanopositioning platforms also includes a number of versions that have Bearing Platforms
accuracy. This accuracy is better than traditional internal piezoelectric actuators giving 30 µm of ultrafine travel, either open-loop or 3-Axis Flexure
designs. As a secondary advantage, the actuators with strain gauge position feedback. For increased performance and stability, the Platforms
are connected to the base rather than the moving drive voltages are then also controlled by built-in circuitry to compensate for 4-Axis Flexure
Platforms
top plate. Consequently, during manual thermal variations.
5-Axis Flexure
operation, operators can achieve a higher The moving top plate of the NanoMax 600 stage offers a 125 mm optical axis Platforms
resolution with less skill. In motorized and height when used with any of the standard tongue and groove style accessories. 6-Axis Flexure
automated applications, actuator vibration and Details of these optics and optical fiber holders can be found in the same accessory Platforms
shocks have little effect on the moving top plate. section as for the MicroBlock™, NanoMax™ 300, and RollerBlock™ on pages Flexure Accessories
A Common Pivot Point Simplifies any 572 - 588. Additionally, a range of accessory adapter plates and riser blocks allow
Alignment Challenge the stage to be used together with all of the
A unique mechanical feature of the NanoMax 600 other nanopositioning stages.
Series is that there is a single common pivot point Low Maintenance and Long Life
for all three of the rotation axes. In practical terms Thumbscrew Drive
During operation, the NanoMax 600
this means that the need for compensating lateral DRV004
series of platforms do not suffer
movement is nearly eliminated when making See Page 603
appreciably from wear and tear due to the
rotational alignment movements. For complex minimal number of moving parts.
alignments of planar optical devices this can vastly Since there are no bearings in the
reduce the time required for optimizing a system. moving parts, there is no degradation Stepper Motor Drive
It is worth remembering that parallel flexures, like of positioning performance with time. DRV001
serial flexures, exhibit crosstalk or arcuate motion. This also reduces the maintenance costs See Page 610
As a stage is moved to either side of its central since the only parts that may require
position, transverse arcuate displacements of servicing are the drive actuators. Moreover,
approximately 10 µm per millimeter of travel setups do not need to be completely Differential Micrometer Drive
occur. If several axes are moved at once, the disturbed for stage maintenance. Drives DRV3
combined effect can be greater; however, unlike can be very easily and quickly swapped See Page 603
the random positioning errors found in over, minimizing system down time and
traditional stages, this crosstalk is highly inconvenience.
predictable and hence can be corrected via small Sophisticated Drive Electronics Ideally Suited for Automated Assembly Systems
adjustments. Although these arcuate Thorlabs offers a diverse selection of stepper motor, piezoelectric actuator, and
displacements are sometimes of concern, they auto-alignment systems supported with advanced software packages that
rarely hinder the alignment of fibers or other significantly ease the task of building complete alignment systems. Please see our
chapter on motion control drive electronics that
Application of a Parallel
starts on page 612.
Flexure Stage
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Motion Control
▼ CHAPTERS
NanoMax™ 600 Manual Six-Axis, Parallel Flexure Platform
Manual Stages
These NanoMax™ six-axis platforms, fully detailed on the previous two pages,
Patented
Motorized Stages have all the high-stability features inherent in our patented parallel flexure 6,186,016 MAX601D
design. The three most important practical results of this completely new 6,467,762
Multi-Axis design approach are the following:
Platforms
• The common point of rotation is located on the optical axis defined by the
Actuators
accessory beam height; this feature simplifies, and consequently increases, the
Controllers speed with which alignment tasks can be performed
• Increased stiffness of the backlash-free flexure mechanism that provides the
▼ SECTIONS stage’s movement, a direct result of significantly fewer linkages being required
3-Axis Roller to implement our parallel flexure design and thus providing greater stability
Bearing Platforms and immunity to vibration as well as improved resistance to external forces
3-Axis Flexure that may arise in the assembly or bonding process
Platforms
4-Axis Flexure • All six actuators are stationary and held firmly to the base by the system’s
Platforms rigid frame. This ensures that the mass of the actuators does not add to the
5-Axis Flexure inertia of the moving platform and isolates the system from the disturbances induced by the operator using the touch controls.
Platforms
6-Axis Flexure
These features, plus many more, make this stage ideal for fiber alignment and positioning tasks, particularly those involving multi-channel
Platforms optical waveguides and complex optical circuits. All models shown below are also available in a left-handed configuration; please call for details.
Flexure Accessories
Specifications
■ Travel ■ Resolution and Repeatability General Data
• Coarse Travel: • Coarse Travel: Load Capacity: 2.2 lbs (1 kg)
0.16" (4 mm) (X, Y, Z), 6° (θx, θy, θz) 1 µm (X, Y, Z), 4 arcsec (θx, θy, θz)
■
■ Optional Piezoelectric Drive Voltage:
• Fine Travel: • Fine Travel:
300 µm (X, Y, Z), 18 arcmin (θx, θy, θz) 50 nm (X, Y, Z), 0.3 arcsec (θx, θy, θz)
0 - 75 VDC
■ Moving Top Plate Size:
• Optional Piezo Actuator Travel: • Optional Piezoelectric Actuators:
30 µm (X, Y, Z), 1.8 arcmin (θx, θy, θz) 30 nm (X, Y, Z), 0.1 arcsec (θx, θy, θz)
2.75" x 2.36" (70.0 mm x 60.0 mm)
NanoMax 603D: Differential Manual Drives, Piezoelectric Actuators, and Displacement Sensors
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
MAX603D MAX603D/M $ 11,855.11 £ 8,535.68 € 10.313,95 ¥ 94,485.23 NanoMax™ 6-Axis Manual Stage with Piezos and Sensors
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Motion Control
▼ CHAPTERS
NanoMax™ 600, Customer-Configured, Patents
Manual Stages Six-Axis Platform (Page 1 of 2) 6,186,016 and 6,467,762
Motorized Stages
Thorlabs has designed a complete set of actuators that are
Multi-Axis modular and connect to the mating platform within seconds,
Platforms
without needing any tools.
Actuators
To configure your own platform, simply choose the
Controllers NanoMax™ bare unit from below and the number and type
of actuators from the facing page.
▼ SECTIONS
3-Axis Roller
Bearing Platforms
3-Axis Flexure MAX608
Platforms
4-Axis Flexure NanoMax™ Platform Only, No Piezos
Platforms
5-Axis Flexure
Platforms
6-Axis Flexure Use this base unit if your application does not require piezoelectric actuators. Please
Platforms
note that while the drives can be easily changed in the field, the piezoelectric actuators
Flexure Accessories are built directly into the body of the stage. If your needs change and you later require
piezoelectric actuators, they can be added using the modular piezoelectric extenders
shown on the next page.
MAX607
Adding internal piezoelectric elements to the basic NanoMax™ 600 platform provides
30 µm of high-resolution motion control (0 to 75 V). The typical resolution of these
piezo actuators is 30 nm.
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Motion Control
CHAPTERS ▼
NanoMax™ 600, Customer-Configured,
Six-Axis Platform (Page 2 of 2) Manual Stages
Motorized Stages
High-Resolution Differential Micrometer Specifications*
Multi-Axis
■ Travel: Platforms
This high-resolution differential micrometer • Coarse: 0.16" (4 mm)
drive with 50 nm positional resolution is • Fine: 300 µm Actuators
matched in performance to the capabilities ■ Resolution:
of the NanoMax™ series platforms. • Coarse: 1 µm Controllers
• Fine: 50 nm
Full details on this drive can be found on *When incorporated into a NanoMax Stage, please note SECTIONS ▼
DRV3 page 603. that the travel of the DRV3 is limited by the stage.
3-Axis Roller
Bearing Platforms
3-Axis Flexure
ITEM # $ £ € RMB
Platforms
DRV3 $ 308.70 £ 222.26 € 268,57 ¥ 2,460.34
4-Axis Flexure
Platforms
stepper motor driver, it provides 25,600 microsteps per Specifications in Stage Flexure Accessories
revolution. ■ Travel: 0.16" (4 mm)
■ Resolution: 39 nm
■ Holding Torque: 23.1 N·cm
DRV001
ITEM # $ £ € RMB
DRV001 $ 585.00 £ 421.20 € 508,95 ¥ 4,662.45
Thumbscrew
Specifications*
This thumbscrew drive is often used in applications or ■ Travel: 0.16" (4 mm)
positioning tasks that require a high degree of stability, ■ Resolution: 1 µm
yet have lower resolution requirements. (500 µm Thread Pitch)
*When incorporated into a NanoMax Stage, please note
that the travel of the DRV004 is limited by the stage.
Piezoelectric Extenders
These piezoelectric extenders provide 20 µm or 80 µm of high-resolution travel to any of the modular drives shown above. The
modular design allows these extenders to be attached in series with any of Thorlabs’ modular drives. These extenders are ideal for
applications that require high-resolution movements over a small range. Coarse adjustments are made using any one of our modular
drives shown above.
ITEM # $ £ € RMB
DRV120 $ 995.00 £ 716.40 € 865,65 ¥ 7,930.15
DRV181 $ 995.00 £ 716.40 € 865,65 ¥ 7,930.15
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Selection Guide
MOTORIZED MULTI-AXIS
MANUAL STAGES STAGES PLATFORMS ACTUATORS CONTROLLERS
Pages 479 - 505 Pages 506 - 540 Pages 541 - 588 Pages 589 - 614 Pages 615 - 659
Flexure Accessories
Selection Guide
Fixed Platforms
Pages 573 - 574
Optics Mounts
Pages 575 - 576
LD Mount
Page 577
Waveguide Mounts
Page 578
Fiber Mounts
Pages 579 - 582
Fixed Platforms
Page 586
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Motion Control
Package of 15 SECTIONS M
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
3-Axis Roller
AMA010 AMA010/M $ 35.60 £ 25.63 € 30,97 ¥ 283.73 Accessory Clamp, Package of 15 with Hex Wrench Bearing Platforms
3-Axis Flexure
Fixed Angle Brackets Platforms
4-Axis Flexure
Platforms
These two angle brackets mount directly to the fixed portion
5-Axis Flexure
of the NanoMax™ and MicroBlock™ stages. The smaller Platforms
bracket is often used for fiber launch systems that utilize our 6-Axis Flexure
aspheric lenses in place of much longer microscope Platforms
objectives. The larger bracket is used in the Thorlabs’ Flexure Accessories
preconfigured fiber launch systems (see pages 550 – 557).
AMA003
3.74" (95 mm) Long
AMA005
4.13" (105 mm) Long
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Motion Control
Motorized Stages
Multi-Axis
This free-standing, stationary table platform,
Platforms which has a standard slotted top surface that
attaches directly to the optical table, is
Actuators
designed to match the platform height of the
Controllers NanoMax™ and MicroBlock™ series of
stages. In addition to the standard slot and
▼ SECTIONS tapped-hole pattern on the top surface, there
are tapped holes on the sides, which can be
3-Axis Roller
Bearing Platforms used to mount other accessories or positioning
3-Axis Flexure AMA025 stages.
Front mounting holes on the table platform allow
Platforms 2.46" (62.5 mm) Deck Height,
extended platforms to be built from the angle bracket
4-Axis Flexure 0.98" (25 mm) Wide (AMA007, AMA009, and AMA011).
Platforms
5-Axis Flexure
Platforms
6-Axis Flexure
Platforms ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
25 mm Wide Table Mounting Platform
Flexure Accessories AMA025 AMA025/M $ 97.00 £ 69.84 € 84,39 ¥ 773.09 62.5 mm Deck Height
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Motion Control
3-Axis Roller
ITEM # $ £ € RMB DESCRIPTION Bearing Platforms
HCS013* $ 63.00 £ 45.36 € 54,81 ¥ 502.11 Microscope Objective Holder 3-Axis Flexure
*Universal Design, Imperial and Metric Compatible.
Platforms
4-Axis Flexure
RMS Retaining Rings and Adapter Platforms
5-Axis Flexure
Platforms
The RMSNT locking nut has internal RMS threading and can be used to lock RMS- 6-Axis Flexure
threaded components into place. The knurled external surface provides improved grip Platforms
for tightening into position.
Flexure Accessories
The RMSRR retaining ring has external RMS threading and can be used to lock
RMS-threaded components into place.
RMSRR This SM05RMS adapter allows any SM05-compatible products to be used in mounts
with RMS threads. The adapter has an SM05 internal thread and an RMS external
RMSNT SM05RMS thread. (Use SPW603 spanner wrench, see page 446).
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Motion Control
AMA093
The AMA093 Shim Block fits under all flexure stage
Thorlabs’ accessories and increases the optical axis
height to 0.7" (18 mm) to match the HCS031. The
shim block includes two mounting cleats with extended
screws to fasten accessories to the top deck of the stage.
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Motion Control
6-Axis Flexure
Slow Fading, Constant Emission for Viewing CW Beams Platforms
Ideal Alignment Aid for use with Threaded Mounts
Flexure Accessories
d
– VRC2SM1: External SM1 Thread (1.035" - 40)
Phosphor Emiss
– VRC2RMS: External RMS Thread (0.800" - 36)
The VRC2SM1 and VRC2RMS viewing and alignment disk are
Relative
VRC2RMS photosensitive disks made from a slow fading phosphor that is
designed to simplify the alignment of visible (400 – 640 nm) and
ion Band
infrared (800 – 1700 nm) beams. The alignment disk contains a
target that clearly marks the center of the disk.
NIR Absorption Band
These disks require charging in visible light. See page 466 for
additional alignment disks and cards.
VRC2SM1
ITEM # $ £ € RMB DESCRIPTION
VRC2RMS* $ 80.00 £ 57.60 € 69,60 ¥ 637.60 VIS and IR Viewing Disk with RMS Thread (400 - 640 nm, 800 - 1700 nm)
VRC2SM1* $ 76.50 £ 55.08 € 66,56 ¥ 609.71 VIS and IR Viewing Disk with SM1 Thread (400 - 640 nm, 800 - 1700 nm)
*Universal Design, Imperial and Metric Compatible
RMSRR SM05RMS
Thorlabs’ RMSRR retaining ring can be
used to lock RMS-threaded components
This Microscope Objective mount is comprised of the
HMM001 Flexure Mount and a HMA001 Adapter into the HMA001 Adapter Plate shown
Plate. The adapter plate is threaded with RMS threads,
HMA001 HMM001 and HMA001 above, whereas the SM05RMS adapter
which accept standard microscope objectives. Microscope Objective Sold Separately allows the adapter plate to be used with
SM05-threaded components.
ITEM # $ £ € RMB DESCRIPTION
HMM001* $ 125.00 £ 90.00 € 108,75 ¥ 996.25 Pitch and Yaw Flexure Mount for Multi-Axis Stages See page 575
HMA001* $ 27.90 £ 20.09 € 24,27 ¥ 222.36 RMS Adapter Plate for Pitch and Yaw Flexure Mount
www.thorlabs.com 577
*Universal Design, Imperial and Metric Compatible
06_Flexure Access_572-588.qxd.P:572-588 7/23/11 2:16 PM Page 578
Motion Control
Waveguide Mounts
The top surface of these waveguide mounts is 0.12" (3.0 mm) below the
■ Available in Two Lengths: 0.39" (10.0 mm) and standard 0.5" (12.5 mm) optical axis height for flexure accessories. The
1.26" (32.0 mm) smooth top surface is ideal for bonding waveguides to, via either tape or glue.
■ Width of Both Mounts: 1.26" (32.0 mm)
■ Height of Both Mounts: 0.37" (9.5 mm)
0.59"
HWM003 (15 mm)
0.59" Ø0.10" (Ø2.5 mm)
(15 mm) 0.24" (6 mm) Deep
0.37"
(9.5 mm) (2 Places)
0.12" 0.37" 1.38"
(3 mm) Typ (9.5 mm) (35 mm)
0.12"
(3 mm) Typ
Ø0.10" (Ø2.5 mm)
0.57" 1.26" 1.26" 0.24" (6 mm) Deep
(15 mm) (32 mm) (32 mm) (2 Places)
3 mm Wide 3 mm Wide 0.57"
Alignment Tab HWM001 Alignment Tab (15 mm)
578 www.thorlabs.com
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Motion Control
Multi-Axis
Platforms
17.1
(0.67) 82.5 (3.25)
Actuators
HFA001
Controllers
12.6 Dimensions in mm (in.)
(0.5)
11.5 (0.45) SECTIONS ▼
Please refer to our website for complete models and drawings.
3-Axis Roller
Bearing Platforms
■ Accepts Rectangular Fiber Arrays up to 12 mm Wide 3-Axis Flexure
■ Easy Loading with a Actuator Knob Controlling the Clamping Platforms
Mechanism 4-Axis Flexure
■ Angled Contact Pads Ensure that the Optical Element Sits Flat on the Platforms
Support Surface Open the Jaws 5-Axis Flexure
Platforms
■ Generally Useful for Mounting Rectangular Shaped Optics
6-Axis Flexure
■ 1/2" (12.7 mm) Optical Axis Height Platforms
Flexure Accessories
The HFA001 fiber array holder is part of our extensive line of accessories
that serve to enhance our multi-axis flexure stages. As can be seen from the Load the
drawing to the right, the operation of this device is achieved via a single Fiber Array
actuator knob. This knob simultaneously moves both sides of the clamping
mechanism to ensure that the device being mounted is centered on the
support surface of the HFA001. The three angled clamping rods make
contact and provide a slight downward pressure on the optical element; the Close the Jaws
three points of contact guarantee stability. The third clamping rod is Just Until the Fiber
mounted at the end of a flexure arm that provides for some spring loading Array is Gripped
of the element being clamped.
HFB001
The SMA-connectorized fiber holder HFB001 can be used
to secure multimode fiber cables to our family of flexure-
based nanopositioners and accessories. The SMA-style
connector is almost exclusively used for multimode optical
fibers. The fiber tip is positioned 0.5" (12.7 mm) above the
platform.
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Motion Control
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Motion Control
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Motion Control
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Motion Control
Controllers
SECTIONS ▼
3-Axis Roller
Bearing Platforms
This force sensing cell is used specifically to position a bare optical fiber with respect 3-Axis Flexure
to another device in the direction of the optical axis. When the fiber makes contact Platforms
with the device, a force arises that is detected by a strain gauge. An electrical signal is
T-Cube apt™ USB 4-Axis Flexure
generated that enables the controller to indicate when the desired position has been Strain Gauge Reader Platforms
5-Axis Flexure
reached. The TSG001 T-Cube Strain Gauge Reader (see pages 638 - 639) is an ideal See Pages 638 - 639 Platforms
reader for this sensor. 6-Axis Flexure
Platforms
ITEM # $ £ € RMB DESCRIPTION
FSC102* $ 685.00 £ 493.20 € 595,95 ¥ 5,459.45 V-Grooved Fiber Holder Axial Force Sensor Flexure Accessories
TSG001* $ 545.00 £ 392.40 € 474,15 ¥ 4,343.65 T-Cube Strain Gauge Reader
TPS002* $ 105.00 £ 75.60 € 91,35 ¥ 836.85 ±15 V/5 V Power Supply for Two T-Cubes
*Universal Design, Imperial and Metric Compatible
0.16" FSC103
3 mm Mounting Slot (4.0 mm)
0.98"
(25.0 mm)
Input
Connector
1.26" 3 mm Mounting Tab
FSC103 (32.0 mm)
AMA034
Please refer to our website for complete models and drawings.
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
FSC103 FSC103/M $ 675.00 £ 486.00 € 587,25 ¥ 5,379.75 Axial Force/Touch Sensor Grooved Mounting Platform
AMA034* AMA034* $ 57.30 £ 41.26 € 49,85 ¥ 456.68 Mounting Post for FSC103 Axial Force/Touch Sensor, 75 mm Optical Height
AMA035* AMA035* $ 170.00 £ 122.40 € 147,90 ¥ 1,354.90 Mounting Post for FSC103 Axial Force/Touch Sensor, 125 mm Optical Height
TSG001* TSG001* $ 545.00 £ 392.40 € 474,15 ¥ 4,343.65 T-Cube Strain Gauge Reader
TPS002* TPS002* $ 105.00 £ 75.60 € 91,35 ¥ 836.85 ±15 V/5 V Power Supply for Two T-Cubes
*Universal Design, Imperial and Metric Compatible
www.thorlabs.com 583
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Motion Control
M SECTIONS
APY002
Complete with
Base and Post
3-Axis Roller The APY001 and APY002 platforms provide pitch and yaw adjustment about the
Bearing Platforms
optical axis. Designed for use with our NanoMax™, MicroBlock™, or RollerBlock™
3-Axis Flexure MBT616
families of three-axis stages, they provide an upgrade path to five-axis positioning. The APY001
Platforms
4-Axis Flexure
APY001 thumbscrew drives allow adjustment up to ±4° per axis with an accuracy of
Platforms 10 arcsec. The APY002 micrometer drives offer precise control: 1° of pitch rotation
5-Axis Flexure corresponds to 0.03" (0.86 mm) micrometer movement (1 mm = 1.16°) while
Platforms 1° of yaw rotation corresponds to 0.035" (0.91 mm) of micrometer movement
6-Axis Flexure (1 mm = 1.1°).
Platforms
The mounting post produces an optical height of 75 mm (62.6 mm post plus
Flexure Accessories
12.5 mm accessory height). The photo shows the APY001 mounted in front of our
MicroBlock 3-axis flexure stage.
Alternatively, the pitch and yaw platform can be removed from the post and fixed directly to the
stage in place of the standard top plate. This allows components mounted on the stage to be
adjusted in roll and pitch and raises the optical axis height by 15 mm, from 75 mm to 90 mm.
Angle bracket and spacer block kits are available separately (see below), which raise components on
stages without an APY series platform to the same height as stages with an APY series platform.
AMA027
Complete Assembly as
Shown in the Photograph
584 www.thorlabs.com
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Motion Control
Controllers
The APR001 provides pitch and roll adjustment about the optical SECTIONS M
APR001
axis. It was designed for use with our NanoMax™, MicroBlock™, 3-Axis Roller
or RollerBlock™ families of three-axis stages (see pages 542 – 559) Bearing Platforms
and provides a cost efficient upgrade to five-axis positioning. The 3-Axis Flexure
thumbscrew drives allow adjustment up to ±4° per axis with a Platforms
Alternatively, the pitch and roll platform can be removed from the post
and fixed directly to the stage in place of the standard top plate. This
allows components mounted on the stage to be adjusted in pitch and roll
and raises the optical axis height by 15 mm (from 75 mm to 90 mm).
Angle bracket and spacer block kits are available separately (see page 574),
which raise components on stages without an APR001 to the same height.
www.thorlabs.com 585
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Motion Control
Controllers
0.24"
▼ SECTIONS (6 mm) 2.36"
(60 mm)
3-Axis Roller
Bearing Platforms
3-Axis Flexure
Platforms
4-Axis Flexure
Platforms
Deck
5-Axis Flexure
Ø1.00" Height
Platforms
(25.4 mm)
6-Axis Flexure
Platforms
NanoMax™ 6-axis Flexure Stage
Flexure Accessories (Details on Pages 564 - 571) with
Fixed Platform Assemblies
3.00"
(76.2 mm)
AMA029C AMA029D
AMA029A
AMA029A 2.46" (62.5 mm) Standard Deck Height for RollerBlock™, MicroBlock™, and NanoMax™
AMA029C 3.21" (81.5 mm) Matches 3-Axis Stage and 19 mm Tilt Stage
AMA029D 4.43" (112.5 mm) NanoBlock™ and MAX 4-, 5-, and 6-Axis Stages with 112.5 mm Deck Height
586 www.thorlabs.com
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Motion Control
The AMA554 Height Adapter Shown with Our 3-Axis Flexures. MicroBlock™
3-Axis Stage
AMA554 This simple height adapter accessory can be used to See Page 545
increase the working height of the NanoMax™,
and MircoBlock™ family of stages. The
1.96" (50.0 mm) thickness increases the
deck height from 2.46" (62.5 mm) to AMA554 NanoMax™
4.43" (112.5 mm), resulting in an increased 3-Axis Stage
optical axis height of 4.9" (125 mm). See Page 558
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Motion Control
▼ CHAPTERS 1/4"-20 (M6 x 1.0) and 8-32 (M4 x 0.7) Adapter Plates
Manual Stages
■ Converts the Three-Axis Stages into a General
RB13P1 Purpose Optical Table Translator RB13P1 Adapter Plate Shown
Motorized Stages
Mounted on a 3-Axis Flexure Stage
Multi-Axis ■ Easily Replaces Slotted Top Plate via
Platforms Four Mounting Screws
Actuators ■ RB13P1 Adds 2 mm to the MMP1
Deck Height
Controllers
This optional replacement mounting plate has an array of both 1/4"-20 (M6 x 1.0) and 8-32
▼ SECTIONS (M4 x 0.7) mounting holes to adapt the NanoMax™, MicroBlock™, or RollerBlock™ stage
into a general purpose optical table translation stage.
3-Axis Roller
Bearing Platforms The MMP1 replacement top plates allow older NanoMax™, MicroBlock™ or RollerBlock™
3-Axis Flexure stages to be updated to the latest ‘crossed groove’ design. They also allow imperial stages to be
Platforms Deck Height Increases to
converted to metric variants and vice versa. 64.5 mm with Plate
4-Axis Flexure
Platforms
5-Axis Flexure ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
Platforms RB13P1 RB13P1/M $ 48.40 £ 34.85 € 42,11 ¥ 385.75 1/4"-20 (M6 x 1.0) 8-32 (M4 x 0.7) Adapter Plate
6-Axis Flexure MMP1 MMP1/M $ 68.00 £ 48.96 € 59,16 ¥ 541.96 Replacement Top Plate for Flexure Stages
Platforms
(LFW90)
See page 401
588 www.thorlabs.com
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Motion Control
Selection Guide
MOTORIZED MULTI-AXIS
MANUAL STAGES STAGES PLATFORMS ACTUATORS CONTROLLERS
Pages 479 - 505 Pages 506 - 540 Pages 541 - 588 Pages 589 - 614 Pages 615 - 659
Micrometers
Pages 599 - 603
Piezoelectric Actuators
Pages 604 - 607
Motorized Actuators
Pages 608 - 611
Tutorials
Pages 612 - 614
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Motion Control
Motorized Stages
Multi-Axis
Platforms DK2
Actuators
Controllers
Specifications
■ 115-Piece Drill Bit Set
▼ SECTIONS • Steel Carrying Case
• 60 Number-Sized Drill Bits
Adjustment Screws • 26 Letter-Sized Drill Bits
• 29 Fractional-Sized Drill Bits
Micrometers
■ Molded Black Carrying Case with Latch
Piezoelectric Provides Orderly Storage This 115-piece drill set comes in a molded
Actuators ■ Numbered-Size Drill Bits Ranging from #1 Bit - #60 Bit black carrying case with etched nameplates
Motorized ■ Fractional-Size Drill Bits Ranging from 1/16" – 1/2" to denote the various drill sizes and decimal
Actuators
■ Covers Lettered-Size Drill Bits Ranging from Letter A Bit Through Letter Z Bit equivalents. These drill bits are constructed
Tutorials from the finest quality high-speed steel for
long life.
Special Taps
Metric Taps
ITEM # $ £ € RMB THREAD TAP DRILL USE
99946 $ 35.70 £ 25.70 € 31,06 ¥ 284.53 3 mm - 0.25 2.7 mm F3SS, MAS Screws
Specialty
99833 $ 31.60 £ 22.75 € 27,49 ¥ 251.85 4.5 mm - 0.5 4.0 mm" N250L3, MAS Nuts
plug taps
97368 $ 26.40 £ 19.01 € 22,97 ¥ 210.41 6 mm - 0.5 5.5 mm 6 mm-0.5 Threaded Aspheric Lens Housing that are not
71498 $ 25.20 £ 18.14 € 21,92 ¥ 200.84 6 mm - 1.0 5.0 mm M6-1.0 Mounting Holes readily available
48443 $ 30.50 £ 21.96 € 26,54 ¥ 243.09 8 mm - 0.5 7.5 mm 8 mm-0.5 Threaded Aspheric Lens Housing from tooling
98109 $ 32.60 £ 23.47 € 28,36 ¥ 259.82 9 mm - 0.5 8.5 mm 9 mm-0.5 Threaded Aspheric Lens Housing suppliers are
43122 $ 46.30 £ 33.34 € 40,28 ¥ 369.01 10 mm - 0.5 9.5 mm 10 mm-0.5 Threaded Aspheric Lens Housing provided to aid in
98110 $ 47.40 £ 34.13 € 41,24 ¥ 377.78 11 mm - 0.5 10.5 mm 11 mm-0.5 Threaded Aspheric Lens Housing the integration of our
46152 $ 44.20 £ 31.82 € 38,45 ¥ 352.27 12 mm - 0.5 11.5 mm 12 mm-0.5 Threaded Aspheric Lens Housing components with
45283 $ 55.70 £ 40.10 € 48,46 ¥ 443.93 14 mm - 0.5 13.5 mm E12RMS Tube External Thread custom-built devices.
99925 $ 135.00 £ 97.20 € 117,45 ¥ 1,075.95 25 mm - 0.75 24.0 mm M25 Threaded Microscope Objective
590 www.thorlabs.com
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Motion Control
High-Precision Actuators
CHAPTERS ▼
Manual Stages
Motorized Stages
OEM Multi-Axis
Application Platforms
Support Actuators
Controllers
SECTIONS ▼
Adjustment Screws
Micrometers
Piezoelectric
Actuators
Motorized
Actuators
Tutorials
All of our adjuster screws feature extremely tight tolerances; the adjusters provide a great deal of flexibility when building
Thorlabs has developed a set of specifications that exceed the precision mechanical assemblies. All screws with the exception of
industry class 3 standard. Each screw is individually tested with a the MAS15 and MAS20 are made of 303 series stainless steel and
master gauge set that ensures the interchangeability of our adjuster have an exceptionally smooth feel when used with our
screws and threaded sleeves. If you are incorporating any of these corresponding phosphor bronze bushings. All locking nuts (with
components into larger optomechanical systems, we recommend the exception of LN2580) are made of 510 phosphor bronze,
that you contact our technical support group to ensure that the which is vacuum rated for 10-6 Torr. To support the production of
specifications for any mating parts you are manufacturing have the custom mating parts, Thorlabs carries a line of specialty taps, which
appropriate tolerances. are available for all of our actuators except the 0.2 mm pitch screws
Use these screws to build custom mounts or to replace existing (i.e., M2.5-0.2 mm and M3-0.2 mm). The 0.2 mm pitch internal
adjusters with higher resolution screws. A series of matching threads must be machined on a high-precision CNC turning
phosphor bronze bushings, removable knobs, and locking nuts for center to ensure adequate control of the tolerances.
www.thorlabs.com 591
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Motion Control
Micrometers LN25M20
Piezoelectric F2D5ESN1P
Actuators
Motorized 0.35"
Actuators (9 mm)
Ø0.28"
(Ø7 mm)
1.5 mm Ball
Thread Depth
0.15" (3.8 mm)
Integrating Fine Adjustment Screws into For our own production needs, we use a permanent anaerobic
Optomechanical Systems: adhesive that provides excellent long-term performance. We
The assembly process begins by producing the appropriate- recommend using Loctite™ Anaerobic Adhesive product
sized mating hole for the threaded bushing. Given the close fit number 680 or equivalent. In order to ensure maximum
between the threaded bushing and the mating adjuster screw, strength between the bonded parts, we strongly urge the user
we caution against using a press fit to assemble these products. to follow carefully the instructions provided by Loctite, which
specify the amount of clearance between the threaded bushing
and the mounting plate. The most common source of failure
Example
is not allowing for the proper clearance between the parts
Bushing
being bonded since this clearance provides for the proper
volume of adhesive.
As shown in Figure 1, the flange on the mating bushing is
designed to support the axial load of the screw and bushing
Axial
Load assembly.
When assembling, apply a small amount of the Loctite
adhesive to both threaded bushings and the mounting plate to
ensure a uniform distribution of the adhesive around the
perimeter of the parts before assembly. After insertion, remove
Figure 1 any excess adhesive from around the part.
592 www.thorlabs.com
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Motion Control
F3ESN1P 0.35"
(9 mm) Adjustment Screws
Ø0.28" Piezoelectric
(Ø7 mm) Actuators
Motorized
2 mm Ball Actuators
Thread Depth
Please refer to our website for complete 0.14" (4 mm) Tutorials
models and drawings.
LN3M25 F3SSN1P
Better than Class 3 Fit 0.35"
(9 mm)
Ø1.5 mm Hex
Ø0.28"
(Ø7 mm)
1/16" Ball
Thread Depth
0.20" (5 mm) Min.
Please refer to our website for complete models and drawings.
ITEM # $ £ € RMB DESCRIPTION LENGTH (L) MATERIAL
F3SS8 $ 8.20 £ 5.90 € 7,13 ¥ 65.35 M3-0.25 mm Adjuster Screw 8 mm 303 Stainless Steel
F3SS10 $ 9.60 £ 6.91 € 8,35 ¥ 76.51 M3-0.25 mm Adjuster Screw 10 mm 303 Stainless Steel
F3SS12 $ 9.80 £ 7.06 € 8,53 ¥ 78.11 M3-0.25 mm Adjuster Screw 12 mm 303 Stainless Steel
F3SS15 $ 10.20 £ 7.34 € 8,87 ¥ 81.29 M3-0.25 mm Adjuster Screw 15 mm 303 Stainless Steel
F3SS20 $ 14.00 £ 10.08 € 12,18 ¥ 111.58 M3-0.25 mm Adjuster Screw 20 mm 303 Stainless Steel
F3SS25 $ 18.50 £ 13.32 € 16,10 ¥ 147.45 M3-0.25 mm Adjuster Screw 25 mm 303 Stainless Steel
F3SSN1P $ 7.60 £ 5.47 € 6,61 ¥ 60.57 M3-0.25 mm Threaded Bushing 7 mm Phosphor Bronze
F3SSK1 $ 8.50 £ 6.12 € 7,40 ¥ 67.75 M3-0.25 mm Removable Adjuster Knob 9 mm 303 Stainless Steel
LN3M25 $ 8.20 £ 5.90 € 7,13 ¥ 65.35 M3-0.25 mm Lock Nut 3.2 mm Phosphor Bronze
www.thorlabs.com 593
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Motion Control
Actuators
Ø0.28"
(Ø7 mm)
Controllers
2 mm Hex 6 mm M4.5-0.5 mm
M SECTIONS
N250L3P Hex M3-0.25 mm Thread 1/16" Ball
Socket
Thread
Please refer to our website for complete models and drawings.
Adjustment Screws ITEM # $ £ € RMB DESCRIPTION LENGTH (L) MATERIAL
N250L3P $ 9.70 £ 6.98 € 8,44 ¥ 77.31 Adjuster Nut 5 mm Phosphor Bronze
Micrometers
MAS15 $ 17.20 £ 12.38 € 14,96 ¥ 137.08 M3-0.25 mm 15 mm 304 Stainless Steel*
Piezoelectric MAS20 $ 18.30 £ 13.18 € 15,92 ¥ 145.85 M3-0.25 mm 20 mm 304 Stainless Steel*
Actuators *The thumbscrew knobs on the MAS screws are made from 303 Stainless Steel
Motorized
Actuators
6-80 Fine Hex Adjusters
Tutorials
F6SS Screws 6-80 hex adjusters are great for miniature mounts that require fine
F6SSK1
(0.0125" per revolution) resolution. Mating parts can be made using a
tap (Item # 99943 featured on page 590) or the F6SSN1P threaded
bushing. Also available for use with the 6-80 hex adjusters are
removable knobs and vacuum-compatible (10-6 Torr) lock nuts.
0.35"
F6SSN1P ( 9 mm)
5/64" Hex
LN680 F6SSN2P L
Ø0.28"
( Ø7 mm)
Ø0.09" Ball
Thread Depth 0.20" (5 mm)
Please refer to our website for complete models and drawings.
ITEM # $ £ € RMB DESCRIPTION LENGTH (L) MATERIAL
F6SS045 $ 7.90 £ 5.69 € 6,87 ¥ 62.96 6-80 mm Adjuster Screw .45" 303 Stainless Steel
F6SS058 $ 8.60 £ 6.19 € 7,48 ¥ 68.54 6-80 Adjuster Screw 0.58" 303 Stainless Steel
F6SS088 $ 9.70 £ 6.98 € 8,44 ¥ 77.31 6-80 Adjuster Screw 0.88" 303 Stainless Steel
F6SS113 $ 10.80 £ 7.78 € 9,40 ¥ 86.08 6-80 Adjuster Screw 1.13" 303 Stainless Steel
F6SSN1P $ 7.60 £ 5.47 € 6,61 ¥ 60.57 6-80 Threaded Bushing 0.25" Phosphor Bronze
F6SSN2P $ 6.80 £ 4.90 € 5,92 ¥ 54.20 6-80 Threaded Bushing 0.375" Phosphor Bronze
F6SSK1 $ 8.50 £ 6.12 € 7,40 ¥ 67.75 6-80 Removable Adjuster Knob 0.35" 303 Stainless Steel
LN680 $ 8.20 £ 5.90 € 7,13 ¥ 65.35 6-80 Lock Nut 0.13" Phosphor Bronze
594 www.thorlabs.com
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Motion Control
F19SS
3/16"-100 TPI adjusters provide a resolution of 0.01" per revolution. Motorized Stages
Screws
The 0.006" thread depth, while shallow, does allow the use of a tap Multi-Axis
(Item # 74580 featured on page 590) to make mating parts. Platforms
F19SSK1 Alternatively, F19SSN1P, F19SSN2P or N100B2P threaded bushings
Actuators
can be used. Also available for use with the 3/16"-100 TPI adjusters are
removable knobs and vacuum-compatible lock nuts. Controllers
SECTIONS ▼
F19SSN1P 0.38"
Adjustment Screws
LN19100 (10 mm)
Micrometers
0.12"
UFS075 (3 mm)
0.38" Removable Nut
(9.5 mm) 7/16" Hex
3/8" 0.10"
UFS100 Hex 5/16"-32 Thread (2.5 mm)
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Motion Control
Adjustment Screws
Fine Hex Adjuster
0.45"
Locking Nut
Micrometers 0.02" (11.4 mm)
(0.4 mm)
■ Compatible with Any
Piezoelectric
Thorlabs 1/4"-80
Actuators Adjusters
Ø0.36" Ø0.340" Ø0.58"
Motorized (Ø9.1 mm) (Ø8.6 mm) (Ø14.7 mm) ■ Make any Mount
Actuators with 1/4"-80
Adjusters Lockable
Tutorials 3/16" Ball 5/64" Hex
Thread Depth See following page
0.18" (4.6 mm)
Please refer to our website for complete models and drawings.
ITEM # $ £ € RMB DESCRIPTION LENGTH MATERIAL
F25SS038 $ 6.50 £ 4.68 € 5,66 ¥ 51.81 1/4"-80 Adjuster Screw L1 = 0.375" 303 Stainless Steel
F25SS050 $ 7.00 £ 5.04 € 6,09 ¥ 55.79 1/4"-80 Adjuster Screw L1 = 0.50" 303 Stainless Steel
F25SS075 $ 7.60 £ 5.47 € 6,61 ¥ 60.57 1/4"-80 Adjuster Screw L1 = 0.75" 303 Stainless Steel
F25SS085 $ 7.80 £ 5.62 € 6,79 ¥ 62.17 1/4"-80 Adjuster Screw L1 = 0.85" 303 Stainless Steel
F25SS100 $ 8.10 £ 5.83 € 7,05 ¥ 64.56 1/4"-80 Adjuster Screw L1 = 1.00" 303 Stainless Steel
F25SS116 $ 8.60 £ 6.19 € 7,48 ¥ 68.54 1/4"-80 Adjuster Screw L1 = 1.16" 303 Stainless Steel
F25SS150 $ 9.70 £ 6.98 € 8,44 ¥ 77.31 1/4"-80 Adjuster Screw L1 = 1.50" 303 Stainless Steel
F25SS200 $ 11.30 £ 8.14 € 9,83 ¥ 90.06 1/4"-80 Adjuster Screw L1 = 2.00" 303 Stainless Steel
F25SS300 $ 16.90 £ 12.17 € 14,70 ¥ 134.69 1/4"-80 Adjuster Screw L1 = 3.00" 303 Stainless Steel
F25SS400 $ 19.40 £ 13.97 € 16,88 ¥ 154.62 1/4"-80 Adjuster Screw L1 = 4.00" 303 Stainless Steel
F25SSN1P $ 8.60 £ 6.19 € 7,48 ¥ 68.54 1/4"-80 Threaded Bushing L2 = 0.63" Phosphor Bronze
F25SSN2P $ 8.60 £ 6.19 € 7,48 ¥ 68.54 1/4"-80 Threaded Bushing L2 = 0.57" Phosphor Bronze
F25SSK1 $ 6.50 £ 4.68 € 5,66 ¥ 51.81 1/4"-80 Removable Knob 0.45" Aluminum
LN2580 $ 8.00 £ 5.76 € 6,96 ¥ 63.76 1/4"-80 Lock Nut 0.15" Phosphor Bronze
Our high-precision 1/4"-80 Fine Adjustment Screws are a convenient drop-in replacement
for our F25SS-series of hex adjusters. The knurled Delrin® knob improves adjustment
sensitivity. The convenient brass sleeve, complete with a removable nut, is precision-
machined for a fit 30% better than the tightest industry standard (Class 3 Fit). The 1/2"
hex head adjuster nut is equipped with a side-located nylon-tipped setscrew to lock the
N80L6P
adjuster to the screw without causing damage to the threads.
0.75"
0.15" (19.1 mm)
(3.8 mm)
Ø0.49"
(Ø12.4 mm)
596 www.thorlabs.com
01_Adjust Screws_589-598.qxd.P:589-598 7/25/11 4:53 PM Page 597
Motion Control
Actuators
Hole to Tighten
Down with 5/64" Controllers
(2 mm) Balldriver
4 Places KM100 with LN2580 SECTIONS ▼
KM100 Sold Separately
1/4"-80 Tap Thru Adjustment Screws
Ø0.49" Chamfer 0.020
LN2580 (Ø12.4 mm) 0.15"
Over Major (3.8 mm)
Class 3 Fit Please refer to our website for complete models and drawings. Micrometers
0.45"
F25USN1P (11 mm)
LN25100
Ø0.45"
(Ø15 mm)
F25USN2P
3/16" Ball
5/64" Hex
Thread Depth
0.18" (4.6 mm)
Please refer to our website for complete models and drawings.
www.thorlabs.com 597
01_Adjust Screws_589-598.qxd.P:589-598 7/23/11 2:21 PM Page 598
Motion Control
Adjustment Screws
Used in Polaris Mirror Mounts
L2 P25B075V See Pages 244 - 246
Micrometers
L1
Piezoelectric The matched 100 TPI adjusters and bushings are manufactured to tighter tolerances
Actuators 0.60"
(15.2 mm)
than the ASME/ANSI Class 3 UTS standard so that very little adjuster lubricant is
Motorized
Actuators needed. Typical adjuster/bushing pairs require a large amount of lubricant and room
Ø0.349" for play in the pair. For these pairs, actuator adjustments cause the lubricant to be
Tutorials (Ø8.9 mm) squeezed out of some spaces and built up in others. With time, this nonequilibrium
lubricant distribution will relax slowly back into an equilibrium state. This may
1/4"-100 Thread
cause the adjuster screw to move.
For the P25SB Series of Mounted Adjuster/Bushing Pairs, the minimal lubrication and tight tolerances result in alignments that can
be extremely stable, even after being adjusted. In addition, the P25SB Series adjusters have an extremely smooth feel that allows the
user to make small repeatable adjustments. See the test data for the POLARIS-K1 kinematic mirror mount online at
www.thorlabs.com.
The P25SB100L includes an unmounted ball bearing, providing the option to freely mount the ball or to secure it with epoxy to
the tip of the screw. The P25SB075 and P25SB100 are sold with the ball mounted using our 353NDPK High-Temperature Epoxy
(see page 423), which provides constant performance up to 200°C, while the P25SB075V and P25SB100V use the TS10 Vacuum
Epoxy (see page 450), which provides a reliable seal of leaks in vacuum equipment down to 10-9 Torr.
Specifications
■ Highly Durable and Scratch Resistant
■ Ideal for Thermally Demanding Applications
■ Diameter: 0.160"±0.001"
■ Thickness: 0.020"±0.001"
P25SK2 Sapphire Contact Pads are used in our Polaris mirror mounts ■ Flatness: 5 Fringes/Inch
because they improve the adjustment precision and durability of the ■ Surface Polish: 80-50 Scratch-Dig
mount. Sapphire is the material of choice for very demanding applications ■ Parallelism: ≤ 3.5 arcmin
that require reliability and strength at both high and low operating ■ Hardness
temperatures. A sapphire-to-steel interface has a very low coefficient of • 9 Mohs
friction, which allows for very smooth movement. With exceptional surface • 1800 Knoop Parallel to C-Axis
hardness, sapphire can be scratched by only a few substances other than • 2200 Knoop Perpendicular to C-Axis
itself. It is chemically inert and insoluble to water, common acids, or alkalis ■ Coefficient of Friction: 0.15 Against Steel
for temperatures up to ~1,000 °C.
Set of 2
ITEM # $ £ € RMB DIAMETER THICKNESS DESCRIPTION
P25SK2 $ 6.40 £ 4.61 € 5,57 ¥ 51.01 0.160" 0.020" A Pack of 2 Sapphire Contact Pads
598 www.thorlabs.com
02_Micrometers_599-603.qxd.P:599-603 7/23/11 2:23 PM Page 599
Motion Control
Piezoelectric
■ Metric Micrometer Actuators
■ Spherical Tip Motorized
2.34" Actuators
■ 0 to 13.00 mm Range (59 mm)
■ 10 µm per Division 1.06" Tutorials
Ø3/8" (27 mm)
■ 500 µm/rev (Ø9.5 mm) 0.69"
■ Ø3/8" Barrel (18 mm)
(Ø0.51")
(Ø13 mm)
148-801ST
Ø0.20"
(Ø5.0 mm) 148-801ST
150-811ST Ø0.71"
(18 mm)
■ Range:
150-811ST
• 150-811ST: 0 to 1.000", 0.001"/div, 0.025"/rev B
• 150-801ST: 0 to 25 mm, 10 µm/div, 500 µm/rev Please refer to our website for complete models and drawings.
These micrometer heads offer 1" ITEM # $ £ € RMB RANGE B (Barrel Diameter)
(25 mm) of travel and spherical spindle 150-811ST $ 51.00 £ 36.72 € 44,37 ¥ 406.47 0 - 1.000" Ø3/8"
tips. 150-801ST $ 51.00 £ 36.72 € 44,37 ¥ 406.47 0 - 25 mm Ø10.00 mm
Ø0.32" 151-411ST
151-411ST (Ø8 mm)
This micrometer head offers 50 mm of travel and a spherical ITEM # $ £ € RMB RANGE
spindle tip. 151-411ST $ 240.00 £ 172.80 € 208,80 ¥ 1,912.80 0 - 50 mm
www.thorlabs.com 599
02_Micrometers_599-603.qxd.P:599-603 7/23/11 2:23 PM Page 600
Motion Control
Micrometers
Ø0.25" 2.32"
Piezoelectric (Ø6 mm) (59 mm)
Actuators
Motorized 1.89"
PT1 (48 mm)
s
Actuators
ld
et
Ab
Ho
es
/
ro
Pr
1" Travel Translation
Ze
m
Stage with DM713
m
Tutorials
in/
See Page 494
Please refer to our website for complete models and drawings.
ITEM # $ £ € RMB DESCRIPTION
DM713 $ 342.00 £ 246.24 € 297,54 ¥ 2,725.74 Imperial/Metric Digimatic Micrometer Head, Spherical Tip
■ 0 - 10 mm Range
■ 5 µm per Division 146-200
■ 250 µm/rev
■ Calculated Resolution Better than 1 µm
■ Standard 3/8" Barrel Diameter 0.95" 0.85"
(24 mm) (22 mm)
0.60"
Application Idea (15.2 mm)
MT1 146-200
Ø0.375" Ø0.69"
(Ø9.525 mm) (Ø18 mm)
Locking Screw
600 www.thorlabs.com
02_Micrometers_599-603.qxd.P:599-603 7/23/11 2:23 PM Page 601
Motion Control
Please refer to our website for complete models and drawings. Piezoelectric
Actuators
Motorized
Actuators
DRV304
Tutorials
The DRV304 Differential Micrometer has a unique mechanism that converts a relatively large displacement into a comparatively small
displacement of the center fine adjustment spindle. The design has the additional benefit of providing a uniformly smooth feel that is
largely independent of loading.
Coarse adjustment is via a knurled knob, while the differential adjuster features a large rubber grip which adds to the overall sensitivity of
the unit. The coarse adjustment knob provides 0.5" (13 mm) of total travel with 1 µm resolution, while the differential knob provides
300 µm of total travel with 50 nm resolution. The Ø3/8" (Ø9.5 mm) mounting barrel is compatible with a host of standard mounting
equipment and is used in our 3 axis RollerBlock Stage (pages 542 - 543).
graduation of the fine control knob is 0.5 µm; the calculated resolution
for the DM22 is approximately 50 nm. When performing fine
adjustment, the coarse adjustment mechanism can be locked by means
of a small locking collar.
Fine Adjustment
Coarse Rotation Adjuster 0.15" ■ 250 µm Range
(3.8 mm)
1/4" External Thread ■ 25 µm/rev
Class 3 Fit
Ø0.69" Coarse Adjustment
(Ø17.5 mm)
■ 0.72" Long 1/4"-80 Threads
■ 0.012"/rev (80 TPI)
0.86"
(21.8 mm)
2.10"
(53.3 mm)
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Motion Control
▼ CHAPTERS 0.5" (12.7 mm) and 1.0" (25.4 mm) Travel Differential Adjusters
Manual Stages for Translation Stages
Motorized Stages
The DM12 and DM10 use the same internal mechanism as the
DM22 described on previous page, but these models are designed
Multi-Axis specifically for use in our 1" (25.4 mm) translation stages
Platforms
(see pages 492 - 494). The coarse adjustment can be locked using
Actuators the thumbscrew located on the actuator barrel.
Ø3/8" Barrel
Controllers 2.65"
(67.3 mm)
Lock
▼ SECTIONS
DM10
Adjustment Screws 12.7 mm of Travel Movable Spindle
Ø0.125" (Ø3.18 mm)
Spherical Tip Ø0.69"
Micrometers (Ø17.5 mm)
Piezoelectric 0.14" Nominal
Actuators (3.6 mm)
0.15" DM12
Motorized Ø3/8" Barrel (3.8 mm)
Actuators (Ø9.525 mm)
0.76"
Tutorials (19.3 mm) Please refer to our website
Ø3/8" Barrel
for complete models
and drawings.
Features
■ Non-Rotating Tip
■ Ø1/2" (Ø12.7 mm) Interchangeable
Brass Mounting Bushing
■ 1 µm Graduations on Fine Drive
DRV8
Specifications
■ Coarse Adjustment 128.1 mm
(5.04")
• Leadscrew: 500 µm/rev
• Range: 2.0" (50 mm) 25.4 mm ± 25.0 mm
• Pitch: 0.5 mm (1.00" ± 0.98")
■ Fine Adjustment
• Leadscrew: 50 µm/rev
• Range: 300 µm
• Pitch: 0.05 mm
602 www.thorlabs.com
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Motion Control
Micrometers
0.60" 0.20" Fine Thread
(15 mm) Lock Ring
(5 mm) Thumbscrew Piezoelectric
When used with the modular, quick-connect adapters nom. Drive Actuators
(MCA1 and MCA2), the DRV004 can also be fitted to Motorized
components with a standard Ø3/8" (Ø9.5 mm) or Ø10 mm Actuators
DRV004 Shown with
(Ø0.39") mounting clamp as shownin the image to the right. MCA1 Tutorials
MCA1 Quick-Connect
Adapter Creates a Ø3/8"
Mounting Barrel
Please refer to our website for complete models and drawings.
ITEM # $ £ € RMB DESCRIPTION
DRV004 $ 96.50 £ 69.48 € 83,96 ¥ 769.11 Modular NanoMax™ Thumbscrew Drive, 8 mm Travel
MCA1 $ 18.90 £ 13.61 € 16,44 ¥ 150.63 Modular Quick-Connect Adapter for Ø3/8" Mounting
MCA2 $ 18.90 £ 13.61 € 16,44 ¥ 150.63 Modular Quick-Connect Adapter for Ø10 mm Mounting
MCA1
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Motion Control
Controllers These Piezoelectric Actuators are designed to enhance the travel range
Piezo Output
and control of Thorlabs’ NanoMax 300 and NanoMax 600 Series of
▼ SECTIONS flexure stages (see pages 558 – 559 and 570 – 571, respectively). The DRV120 Piezo Input
Adjustment Screws
actuator, which is directly compatible with these stages, provides a travel range of
20 µm with 5 nm resolution. The positional feedback is provided by a strain gauge
Micrometers mounted directly to the piezo element. The DRV181 offers 80 µm of travel without
feedback and provides a convenient electrical feedthrough for daisy chaining mulitple
Piezoelectric
Actuators piezo extenders together using a single controller, if bandwidth is not a significant
factor. DRV181
Motorized
Actuators
Tutorials
604 www.thorlabs.com
03_PiezoelectricActutrs_604-607.qxd.P:604-607 7/25/11 5:04 PM Page 605
Motion Control
Removable Tip
1.87"
(47.5 mm)
PAZ009 Actuator with Ø0.50"
(Ø12.7 mm)
See pages
Included PAA001 Tip 636 - 645
0.30" 1.26"
(7.5 mm) (32 mm)
The PAZ series of piezoelectric actuators provides a wide
selection of travel ranges (20 to 100 µm), the flexibility of (Without Tip)
replaceable tips, and feedback via a 7-pin LEMO connector that can
be used in conjunction with our apt™ series of piezo controllers (see
pages 636 – 645). The Ø1/2" (Ø12.7 mm) mounting barrel provides
compatibility with standard Ø1/2" (Ø12.7 mm) mounting bores. A ITEM # TRAVEL LENGTH L RESOLUTION CAPACITANCE
PAA001 (shown above) tip comes standard with each actuator. When PAZ005 20 µm 2.24" (57 mm) 5.0 nm 3.6 µF
used the PAA001 tip adds 3 mm to the overall length of the actuator. PAZ009 40 µm 3.66" (93 mm) 10.0 nm 7.2 µF
It can be removed and replaced with a PAA005 ball tip actuator.
PAZ015 100 µm 7.91" (201 mm) 25.0 nm 18 µF
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Motion Control
Applying a Drive Voltage in Excess of the 100 V can Cause the Actuator to Fail
DISPLACEMENT CLAMPING CAPACITANCE RESONANT
ITEM # $ £ € RMB @ 100 V FORCE @ 1 kHz, 1 V RMS FREQUENCY
AE0505D18F $ 196.00 £ 141.12 € 170,52 ¥ 1,562.12 15 µm ± 10% 192 lbs (853 N) 1.6 µF 69 kHz
606 www.thorlabs.com
03_PiezoelectricActutrs_604-607.qxd.P:604-607 7/25/11 5:05 PM Page 607
Motion Control
incorporated into OEM products to form a tightly first be connected to a pre-amplification circuit like the AMP002 Tutorials
controlled, high-speed, closed-loop actuator. listed below.
Specifications TLK-PZT1
■ Mounted AE0505D08F Actuator
■ Drive Voltage: 150 V
■ Max Displacement: 9.1 µm
The TLK-PZT1 is an AE0505D08F piezo actuator in
■ M12 x 1.25 Threaded Housing
a M12 x 1.25 threaded mount. Although it has been designed for use with our
■ BNC Controller Connector Tunable Laser Kits (see pages 1286 – 1299), its housing allows it to be integrated
into a number of applications.
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04_MotorizedActutrs_608-611.qxd.P:608-611 7/26/11 3:05 PM Page 608
Motion Control
Adjustment Screws
Specifications Features
I
I Travel Range Compact 12 VDC Servo Actuator
Micrometers
• Z806: 0.24" (6 mm) I New High-Speed Design
Piezoelectric • Z812: 0.47" (12 mm) I High Resolution via Precision Rotary Encoder
Actuators
• Z825: 0.98" (25 mm) I Planetary Reduction Gearbox for High Loads
Motorized
I Recommended Controller: TDC001 I Compatible with Thorlabs' Range of Positioning Stages
I
Actuators
I Max Velocity: 3 mm/s Limit Switches for Zero Position and Actuator Protection
Tutorials I
I
Compatible with Thorlabs' TDC001 T-Cube Controller
Bidirectional Repeatability: <1.5 µm
I High-Precision Rotary Encoder (512 Encoder counts/rev and 67:1
I Backlash (with Preload): <8 µm Gear Head Yields 34,304 Encoder counts/rev of the Leadscrew)
I Min Incremental Movement: 0.05 µm Ø0.59" Ø0.38"
I Max On-Axis Load Capacity (Vertical): (Ø15.0 mm) Spherical Tip Ø4 mm (Ø0.16") (Ø9.5 mm)
10 lbs (4.5 kg)
I Max On-Axis Load Capacity
(Horizontal): L1
20 lbs (9 kg) L2
I
L3
Home Location Accuracy: <2 µm Travel
I
Range
Leadscrew Pitch: 1 mm
I Encoder Lines: 512 Note: It is recommended that the leadscrews of the Z8 motors be lubricated
I Planetary Gear Head Ratio: 67:1 every 50,000 cycles or 6 months. The GKZ8 Greasing Kit is suitable for both
standard and vacuum compatible Z8 actuators. See page 448 for more details.
I
L2
Ø3/8" or 1/4"-80 Mounting Barrel
I
L3
Same Specifications as the Z8 Series Above Travel
Range
Please refer to our website for complete models and drawings.
ITEM # $ £ € RMB L1 inch (mm) L2 inch (mm) L3 inch (mm) DESCRIPTION
Z806V $ 675.00 £ 486.00 € 587,25 ¥ 5,379.75 4.05 (103.0) 4.40 (112.0) 4.48 (114.0) 6 mm Vacuum-Rated Actuator w/ 1/4"-80 Threaded Barrel
Z812V $ 685.00 £ 493.20 € 595,95 ¥ 5,459.45 4.48 (113.9) 4.83 (122.9) 5.03 (127.9) 12 mm Vacuum-Rated Actuator w/ 1/4"-80 Threaded Barrel
Z812BV $ 685.00 £ 493.20 € 595,95 ¥ 5,459.45 4.48 (113.9) 4.83 (122.9) 5.03 (127.9) 12 mm Vacuum-Rated Actuator w/ Ø3/8" Barrel
Z825BV $ 695.00 £ 500.40 € 604,65 ¥ 5,539.15 5.48 (139.3) 6.07 (154.3) 6.19 (157.3) 25 mm Vacuum-Rated Actuator w/ Ø3/8" Barrel
GKZ8 $ 14.00 £ 10.08 € 12,18 ¥ 111.58 N/A N/A N/A Grease Kit for Z8 and ZST Series Actuators
608 www.thorlabs.com
04_MotorizedActutrs_608-611.qxd.P:608-611 7/26/11 3:07 PM Page 609
Motion Control
Travel 0.41"
Range (10 mm)
A ZSTxx
1/4"-80 Thread
0.80"
(20 mm)
www.thorlabs.com 609
04_MotorizedActutrs_608-611.qxd.P:608-611 7/23/11 2:28 PM Page 610
Motion Control
*When using a compatible controller like the BSC203 (pages 642 - 643) Please refer to our website for complete models and drawings.
ScienceDesk™ Workstations
Thorlabs’ ScienceDesk™ is a modular workstation with a versatile selection
of frames and optional accessories that allows you to build a customized,
ergonomic work space for your specific application. New to the line is an
active-air frame and 5' x 6' (1500 mm x 1800 mm) breadboard designed to
accommodate a multiphoton imaging setup.
Rigid, Passive, and Active-Air Welded Steel Frames
Stainless Steel Tabletop (With or Without Holes; Nonmagnetic Options
610 www.thorlabs.com
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Motion Control
Motorized Stages
These stepper motor drives have a trapezoidal screw
thread for clean, wear-resistant operation. The DRV013 Multi-Axis
Platforms
drive offers 1" (25 mm) of travel while the DRV014 drive
offers 2" (50 mm). Both units, which are compatible with Actuators
our TravelMax series of manual stages (see pages 492 –
493 and 496 - 497). When used with one of our stepper DRV013 Controllers
SECTIONS M
motor controllers, such as the BSC101, they can achieve
better than 50 nm resolution, a maximum speed of SPECIFICATION DRV013 DRV014
8 mm/s, and less than 1 µm bidirectional repeatability. Travel 1" (25 mm) 2" (50 mm)
Adjustment Screws
The DRV013 and DRV014 are capable of driving loads Load Capacity 48 lbs (22 kg) 66 lbs (30 kg)
as high as 48 lbs (22 kg) and 66 lbs (30 kg) respectively. Main Screw 1 mm Pitch Trapezoid Micrometers
The LNR50S is a motorized version of our TravelMax
Limit Switches Ceramic Tipped, Electro-Mechanical Piezoelectric
series of stages that features our TravelMax stage with a Actuators
Motor Type 2 Phase Stepper
DRV014 stepper motor attached (see page 514 for more Motorized
Minimum Incremental Movement 50 nm*
details). Actuators
Microsteps per Revolution 25,600
Tutorials
Bidirectional Repeatability <1 µm 0.5 µm
See Our Single-Channel,
Max Speed 8 mm/s
Stepper Motor Controller
Full Step Angle 1.8º
Rated Phase Current 1A
Phase Resistance 4.6 Ω
Phase Inductance 0.6 mH
Holding Torque 23.1 N.cm
Detent Torque 1.7 N.cm
Pages
Rotor Inertia 32 g.cm2
BSC101 632 – 633
*Measured performance using an LNR50M (pages 496 – 497) Stage and BSC101 Controller
6.67"
(169.5 mm) DRV013
Ø0.47"
(Ø12 mm)
Ø0.98"
(Ø25 mm)
1.66"
(42.2 mm)
0.35"
(9 mm) 0.17" (4.2 mm)
0.49" Mounting Holes Cable Entry
(12.5 mm)
Ø0.98"
(Ø25 mm)
1.66"
(42.2 mm)
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Motion Control
D
On A
D
On
Voltage Voltage
Source Source
Z8 Series DC Servo
Motor Actuator. (See Page
Current flows through 608 for Details)
For Our Stepper Motors Actuators,
Please See Page 609 the coil via the sliding brushes,
which are connected to the voltage source. The
Although the schematic only shows 4 stator coils, in reality a stepper coil is positioned within a magnetic field, the direction of which is
motor will contain numerous tooth-like poles on both the rotator indicated by the blue arrows. At 0° rotation, the brushes are in
and the stator resulting in small positional increments (steps). For contact with the voltage source and current is flowing. The current
example, our ZST Series achieves incremental steps of 1.8° i.e. that flows through the wire from A to B interacts with the magnetic
200 steps/rev. If the current through one coil is increased as it is field and produces a downward force. The current that flows from
decreased in another, the new rotor position is somewhere between C to D has a similar effect, but because the flow is in the opposite
the two coils and the step size is a defined fraction of a full step (a direction with respect to the magnetic field, the force is in the
microstep). When used with an apt™ benchtop or rack-based upward direction. Both forces are of equal magnitude. At 180°, the
stepper motor controller, the smallest angular adjustment is 0.014°, same phenomenon occurs, but segment A-B is forced up and C-D is
resulting in a resolution of 25,600 microsteps per revolution for a forced down. In the 90° and 270° positions, the brushes are not in
200 full step motor. contact with the voltage source and no force is produced. In these
two positions, the rotational kinetic energy of the motor keeps it
Advantages of Stepper Motors spinning until the brushes regain contact. In reality, DC motors
■ Operates in open loop with precise microstep positioning
have several such coils, wound onto an armature, which produces a
without an encoder. more even torque. The magnetic field is provided by an
■ The motor does not contain brushes and hence does not electromagnet.
suffer from wear like brushed DC motors do. This leads
Advantages of DC Servo Motors
to a long operating lifetime. ■ Encoder determines accuracy and resolution
Disadvantages of Stepper Motors ■ Optimized to run at high speeds
■ A current is required to hold the position of the motor.
Disadvantages of DC Servo Motors
When the controller is turned off the motor relaxes to ■ Requires encoder and suitable controller for closed-loop
the nearest full step. positioning.
■ If the applied load is too high, the motor will not step ■ Shorter lifetime due to wear on brushes
and the actuator can lose position. ■ Motor will stall and possibly burn out if the applied
load is greater than the motor’s capacity
612 www.thorlabs.com
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Motion Control
Acceleration (Slope) A
Micrometers
Stage Limit Switches Datum Switch Piezoelectric
Time Actuators
Graph of a Trapezoidal Velocity Profile
Motorized
Actuators
the inertia and friction of the parts it drives. The motion employed is Tutorials
described by a trapezoidal velocity profile, reflecting the shape of the Negative Limit Switch Positive Limit Switch
velocity vs. time graph (shown above). This drives the stage to its (or Stop)
destination as quickly as possible without causing it to stall or lose Linear Stage
Rotary Stage
steps. The stage is ramped at acceleration “A” to a maximum velocity
“V.” As the destination is approached, the stage is decelerated at “-A”
so that the final position is approached slowly in a controlled
manner.
Home Position
Precision Motion Control for
Each motor in the system has an associated electronic counter, which
keeps a record of the current position in microsteps (for stepper
Research, Industrial R&D, and
motors), or encoder counts (for brushed DC motors). If the control
PC is requested to report the position, the value of this counter is
High-Precision Manufacturing
converted back into position units. When the system is powered up,
the counters in the controller are all set to zero, and consequently,
the system has no way of knowing the position of the stage in
relation to any physical datum. A datum can be established by
sending all the motors to their home positions which are set during
manufacturing; the motor is initialized by driving the motor until
the negative limit switch is reached and then driving positively a
fixed distance (zero offset). When at the home position, the counters
are reset to zero thereby establishing a fixed datum.
Note: During a manual move, (i.e. if the motor shaft is turned by
hand) no signal is sent to the motor, the counter is not updated, and
any subsequent position reporting will be false until the motor is See Pages 548 – 549 for Details
returned to the home position via the initialization procedure.
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Motion Control
by varying the strength of the electric field. If a cyclical voltage is applied to the Hysteresis
Piezoelectric materials have, for many years, actuator, the positions reached on the
formed the basis of very high-precision actuators upward sweep are smaller than those
Closed-Loop Control
capable of atomic scale resolution. In fact, the achieved on the downward sweep. If
Real Position
resolution of these actuators is typically limited by position is plotted against voltage, the
the noise and stability of the drive electronics used graph exhibits a classic hysteresis loop
to generate the electric fields, hence the noise as shown in the plot (above right).
specifications of any potential piezoelectric Position Sensing and Feedback
controller should be carefully evaluated against the Hysteresis can be eliminated by using a
requirements of the application. Moreover, the position sensor and feedback loop; the
force generated by the expansion of a piezoelectric sensor measures the position, the
material is typically very large, often reaching into circuit subtracts the measured position Demand Position
the range of hundreds of Newtons. from the demand position to obtain a
Perhaps the most useful property of these measure of the error, and a feedback loop adjusts the voltage to the actuator until
actuators is their ability to produce high speed the error is driven to zero. This servo-loop feature is standard with all of our apt™
repetitive motion, which is usually limited by the family of piezoelectric controllers.
mechanical system that is being driven rather than Some piezoelectric nanopositioning actuators have position sensing, others do
by the piezoelectric material itself. This high-speed not. The apt™ piezoelectric controller fully supports both types, the photograph
response of a piezoelectric actuator is used to above shows one of our piezoelectric actuators that incorporates a strain gauge
considerable advantage in the NanoTrak™ displacement sensor.
control system (see pages 646 - 651). Open- and Closed-Loop Control
One of the drawbacks of piezoelectric materials is The result of using closed-loop control is a linear relationship between the
that the electric field gradient needed to produce a requested position and the actual position (see the plot entitled Closed-Loop
useful amount of expansion is quite large. To Control), in contrast to open loop control (see the plot entitled Open-Loop
reduce the required drive voltage, the actuator can Control).
Piezoelectric Stack Diagram Piezoelectric System Schematic Diagram
Expansion Open-loop Control Moving
Part
Piezoelectric
Material Input Amp Actuator
+Ve Voltage
Drive Voltage
Moving
Closed-loop Control Part
-Ve
Demand Amp
Circuit Actuator
Position
Electrodes
Photograph of a Piezoelectric Stack (shown right):
20 mm long with 17 µm of displacement at 150 V. See our Sensor
Real Position
complete selection of piezoelectric stacks on pages 604 - 607.
614 www.thorlabs.com
01_T-cube Overview_615-621.qxd.P:515-621 7/25/11 5:16 PM Page 615
Motion Control
Selection Guide
MOTORIZED MULTI-AXIS
MANUAL STAGES STAGES PLATFORMS ACTUATORS CONTROLLERS
Pages 479 - 505 Pages 506 - 540 Pages 541 - 588 Pages 589 - 614 Pages 615 - 659
DC Servo Controllers
Pages 626 - 629
Solenoid Controller
Pages 652 - 653
Tutorials
Pages 657 - 659
www.thorlabs.com 615
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Motion Control
▼ CHAPTERS
T-Cube Controller Family Overview (Page 1 of 4)
Manual Stages
616 www.thorlabs.com
01_T-cube Overview_615-621.qxd.P:515-621 8/18/11 12:02 PM Page 617
Motion Control
Multi-Axis
Features Platforms
■ Supports DC Brushed ■ Auto-Configure Function ■ Easy-to-Use Manual
for All Thorlabs’ Z8- Controls with Velocity Actuators
Motors up to 12 V
■ Encoder Feedback for Equipped Stages/Actuators Slider and Jog Buttons
■ Fully Flexible Software Controllers
Closed-Loop Positioning
Control Modes
SECTIONS ▼
The TDC001 T-Cube DC Driver is a compact, single-channel DC servo controller that provides manual and automated control of low- T-Cube Overview
power (up to 15 V/2.5 W), DC-brushed servo motors equipped with encoder feedback. Although ideally suited to drive Thorlabs’ family
Benchtop
of Z8 DC motor-equipped optomechanical products, the TDC001 offers highly flexible software settings and closed-loop tuning, making Overview
it compatible with a wide range of third-party DC servo motor actuators. Rack System
Overview
Stepper Motor Driver TST001 – See Pages 630 - 631
DC Servo
The TST001 T-Cube Stepper Driver is a compact, single-channel controller that provides manual and automated control of small, apt Control
Software
2-phase, low-power (up to 15 V/5 W), bipolar stepper motors. The controller incorporates a powerful DSP controller, giving this compact
unit high-resolution microstepping capability. Although ideally suited to drive Thorlabs’ ZST stepper motor series, the TST001 is fully Tutorials
Features
■ Drive Voltage Digital ■ Low-Voltage Monitor ■ Voltage Ramp/Waveform
Display Output (SMA) Generation Capability
■ Low-Voltage Driver Input ■ Closed-Loop Operation
(SMA) with T-Cube Strain Gauge
Reader Unit
The TPZ001 T-Cube Piezo Driver is a very compact, single-channel controller that provides manual and automated nanometer-level
motion control of Thorlabs’ open-loop, piezo-actuated nanopositioning actuators and stages. The controller is capable of delivering up to
150 V of drive voltage at 7.5 mA, thereby allowing an operating bandwidth up to 1 kHz when using a piezo element with 1 µF of
capacitance. When operated together with the T-Cube Strain Gauge Reader (TSG001), high-precision, closed-loop operation is possible
using our line of feedback-equipped piezo actuators.
Features
■ Auto-Alignment for ■ Replacement Si ■ Operating Mode Select via
Optimum Coupling Photodiode Available Top Panel Buttons
Efficiency Separately ■ Operates with TPZ001
■ Integrated InGaAs ■ Power Range and Signal T-Cube Piezo Controllers
Photodiode with FC/PC Level LED Displays
Fiber Connector
The TNA001/IR NanoTrak Auto-Alignment Controller generates the feedback required to position an optical element in two
dimensions for the highest possible optical power throughput. The advanced algorithms used in this standard footprint T-Cube, make
it ideal for low-volume assembly, characterization, and mapping applications. Since the TNA001/IR only provides the piezo position
demand voltage outputs, the TPZ001/IR piezo controllers are required to drive the piezo actuators of the beam steering element or
stage of the system being aligned.
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01_T-cube Overview_615-621.qxd.P:515-621 8/18/11 12:02 PM Page 618
Motion Control
▼ CHAPTERS
T-Cube Controller Family Overview (Page 3 of 4)
Manual Stages
Solenoid/Shutter Controller TSC001 – See Pages 652 - 653
Motorized Stages
Multi-Axis
Platforms Features
Actuators
■ Operating Modes, Manually Selectable ■ Safety Interlock Input
• Manual: User-Controlled On/Off ■ Removable On/Off Key
Controllers • Single: DSP Programmed On/Off ■ Controlled Device State Indicator
• Auto: DSP Programmed On/Off Cycle
• Triggered: Externally Triggered On/Off
▼ SECTIONS
T-Cube Overview
The TSC001 T-Cube Solenoid Controller can be used to control 15 V solenoid-actuated devices like the SH05 shutter (see page 361).
Benchtop The solenoid controller applies a potential of 10 V across the solenoid to hold the solenoid-actuated device in place and provides a 15 V
Overview
pulse to switch the state of the device.
Rack System
Overview
Strain Gauge Reader TSG001 – See Pages 638 - 639
DC Servo
apt Control
Software The TSG001 T-Cube Strain Gauge Reader is a single-channel reader designed to measure, condition (rectify and filter), and display the
feedback signal derived from AC bridge strain gauge systems. The unit is compatible with Thorlabs’ strain gauge-equipped piezo stacks,
Tutorials
actuators, stages, and force sensors. In addition, closed-loop control of a piezo element with a strain gauge can be achieved using the
TSG001 in combination with a TPZ001 T-Cube piezo controller.
Features
■ Digital Position Reading System for our ■ Open-Loop Mode for Position
Quadrant and Lateral Effect Detectors Measurement
■ Closed-Loop Mode for Auto Alignment ■ Loop Mode Select Using Top Panel Button
■ LED Cross Hairs Position Indication Display
The TQD001 T-Cube Position Sensing Reader interfaces with PDQ80A and PDQ30C Quadrant Detector sensors or a PDP90A Lateral
Effect Sensor. The TQD001 can either be used to measure the position of the beam on the sensor or to generate a signal that can be used
as the feedback input for an automated beam steering element. The signal generated can be used to steer the beam to the center of the
position sensor.
Features
■ FC/PC Optical Output ■ Extended Modulation Input
■ 635 or 1550 nm Wavelengths Available ■ Interlock Safety Circuit
■ Five-Digit Digital Display ■ Removable On/Off Key
The TLS001 T-Cube laser sources are stand-alone modules that combine a pigtailed laser diode and laser diode driver into one compact
package. The pigtail is a single mode fiber that is cleaved at an 8° angle on the laser diode end in order to minimize intensity noise. The
other end of the pigtail connects to an FC/PC mating connector on the TLS001 housing. The T-Cube laser source is available in two
versions: the TLS001-635 emits light at 635 nm and the TLS001-1550 emits light at 1550 nm. The TLS001 unit has a doublewide
footprint and will take up two ports when used with the TCH002 T-Cube hub.
618 www.thorlabs.com
01_T-cube Overview_615-621.qxd.P:515-621 7/23/11 2:34 PM Page 619
Motion Control
Features Multi-Axis
Platforms
■ Constant Current and Constant ■ Removable On/Off Key
Power Modes ■ External Modulation Input Actuators
■ Enable Laser Button ■ Compatible with TTC001 T-Cube TEC
■ Five-Digit Digital Display Controller Controllers
■ Safety Interlock Input
SECTIONS ▼
The TLD001 T-Cube is a full-featured, compact, stand-alone laser diode and LED controller for use with devices that have a compliance T-Cube Overview
voltage of 10 V or less. The output connector is a 9-pin D-type connector that is compatible with Thorlabs’ entire line of laser diode Benchtop
mounts (see pages 1481 - 1492). The TLD001 unit is double the width of the standard T-Cube footprint. As a result, the TLD001 will Overview
take up two ports when used with the T-Cube hub. Rack System
Overview
Stepper Motor
Features
■ Microcontroller-Based PID Temperature ■ Five-Digit Digital Display Piezo/Strain
Gauge
Control ■ Temperature and Current Limit Setpoints
■ 4 W Output Drive Power ■ Compatible with TLD001 T-Cube Laser Auto-Alignment
■ Operates with Thermistor and IC Temperature Driver
Sensor Solenoid
apt Control
Software
The TTC001 T-Cube TEC Controller is designed to monitor and precisely control the temperature of small thermally sensitive
components like laser diodes and CCD arrays. The unit is capable of supplying a maximum current of ±1 A (4 W max) to a Peltier effect Tutorials
thermoelectric heater/cooler or a resistive heating cartridge while simultaneously monitoring the signal from a standard thermistor or IC
temperature sensor in order to provide closed-loop temperature regulation.
Features
■ Operating Modes: ■ Adjustable Output Intensity
• Constant Current ■ External Modulation Input
• Modulation Mode ■ Current Limit Adjustable
• Trigger Mode
The LEDD1B T-Cube Controller is a compact, variable-output power supply intended to power LEDs.
The controller has a standard T-Cube footprint and is shipped with a cable that has a connector compatible
with the LEDD1B on one end and bare wires that can be attached to the LED or LED socket on the other
end. In addition, all of the Mounted LEDs sold by Thorlabs can be plugged directly into the LEDD1B.
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Motion Control
Motorized Stages
Multi-Axis
Platforms Do More in Less Space with the T-Cube™ Controller Hub
The TCH002 T-Cube Controller Hub is designed to significantly reduce the number of
Actuators
cables required to automate multiple devices and to support large scale implementation of
Controllers the T-Cube family of device drivers. The power and USB connectivity for each T-Cube is
provided by the hub, which eliminates the need for each T-Cube to have individual power
▼ SECTIONS and USB cables.
In addition, the T-Cube controller hub provides a compact mounting surface for up to six
T-Cube Overview
standard or three doublewide footprint T-Cubes. The hub itself can be secured to an optical
Benchtop table either horizontally or vertically using the AP90 bracket (see page 119). Each hub must
Overview
be connected to its own power supply (included). Furthermore, the fully compliant,
Rack System
powered USB 2.0 circuit in each hub
Overview
allows multiple hubs to be connected
DC Servo in series so that only a single USB
cable needs to be connected to the Features
Stepper Motor
controlling PC when computer ■ Compact USB 2.0 Platform
Piezo/Strain control of the T-Cubes is desired. ■ Provides Power and USB Connectivity
Gauge to T-Cubes
Mix and match any combination of
Auto-Alignment ■ Compatible with All T-Cubes
T-Cube™ Controllers to build your
■ Horizontal or Vertical Mounting
own custom, multichannel driver to Optical Tables
Solenoid
arrangement in an extremely ■ Reduced Cable Management –
apt Control compact footprint.
Software
Single USB Communication and Power
Cable
Tutorials ■ USB Input/Output for Connecting
Multiple Controller Hubs Together
■ Six T-Cube Ports
■ Standard Footprint T-Cubes
TCH002
Require One Port
Mounted Vertically with an
AP90 Bracket ■ Doublewide Footprint T-Cubes
All T-Cubes Sold Separately Require Two Ports
0.85"
(21.5 mm)
14.82"
(376.5 mm)
1.85"
(47.0 mm)
3.39" 4.61"
(86.0 mm) 2.36" (117.0 mm)
(60.0 mm)
620 www.thorlabs.com
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Motion Control
CHAPTERS ▼
T-Cube™ apt™ USB Controller Hub (Page 2 of 2)
Manual Stages
The controller hub circuitry provides a number of internal, flexible,
digital and analog interconnect lines for deterministic multi-cube Specifications Motorized Stages
synchronized operation. This feature is particularly advantageous ■ USB Hub: Fully USB2.0 Compliant Multi-Axis
when operating the Piezo Controller (TPZ001, see pages 636 – ■ Enclosure: Rigid, Slim-Profile Baseplate Construction Platforms
637) and Strain Gauge Reader (TSG001, see pages 638 – 639) ■ T-Cube™ Bays: Six Actuators
T-Cubes together on a controller hub. Similarly, the NanoTrak™ ■ Table Mounting
controller (see pages 646 – 647) and piezo controllers (see pages • Orientation: Horizontal, Edge, or Vertical Using Controllers
636 – 645) can be operated together in closed-loop mode on the Thorlabs’ AP90 Brackets
hub to facilitate auto-alignment applications. They can be • Universal Metric (M6 x 1.0) or Imperial (1/4"-20) SECTIONS ▼
configured to operate as a coupled pair allowing closed-loop control Design
of the wide number of piezo actuators available from Thorlabs. The ■ Input Power Requirements T-Cube Overview
controller hub also provides a rigid mechanical mounting platform • PSU: 100 - 250 VAC, 47 - 63 Hz Benchtop
for carrying the T-Cubes. • Hub Unit: +15 V (6 A), -15 V (1 A), Overview
+5 V (5 A) Rack System
Imperial and metric mounting holes incorporated into the hub Overview
■ Housing Dimensions (W x D x H):
allow for a variety of mounting orientations. In this way, the 14.82" x 3.39" x 0.85"
controller hub can be mounted flat to the table surface (much like DC Servo
(376.5 mm x 86 mm x 21.50 mm)
the individual T-Cubes), edge mounted, or vertically mounted to ■ Weight: 20 oz (575 g) Stepper Motor
allow vertical stacking of up to 6 T-Cube™ controllers, thereby
reducing the optical table footprint to an absolute minimum. One Piezo/Strain
Gauge
AP90 Right-Angle Bracket is needed to mount the hub vertically or
two brackets are needed to edge mount. Auto-Alignment
Solenoid
apt Control
Software
Tutorials
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Motion Control
Actuators
These benchtop motion controllers are designed to meet the performance requirements for a wide range of applications. The apt™
benchtop controllers, together with Thorlabs’ wide range of precision mechanical stages and actuators, are suitable for multi-axis
Controllers positioning and alignment needs, including those frequently necessary when testing or processing semiconductors, operating
micro-electrical mechanical systems, or working in the fields of fiber optics, high-resolution microscopy, or nanotechnology.
▼ SECTIONS This series of benchtop controllers has been designed around the latest digital and analog electronics technologies. Each controller
T-Cube Overview
combines high-speed, digital signal processors (DSPs), with low-noise analog electronics and ActiveX® software technology for flexible
one-, two-, or three-channel control (depending on the specific controller). In alignment applications, it is often crucial that timing of
Benchtop motion control is guaranteed (e.g., in scan and acquisition operations). The embedded DSP is responsible for ensuring this deterministic
Overview
operation on a per-channel basis.
Rack System
Overview
One- and Three-Channel Piezoelectric Controllers -
DC Servo
See Pages 642 - 643
Stepper Motor
■ High Drive Power of 75 V, 500 mA Continuous
Piezo/Strain
Gauge ■ Closed-Loop PID Position via Strain Gauge Feedback
■ Quiet, High-Resolution Position Control
Auto-Alignment
■ Voltage Ramp/Waveform Generation Capability
Solenoid (for Scanning)
■ High Bandwidth (10 kHz) Piezo Positioning (Open Loop)
apt Control
Software ■ Optional Handset Controller (PHS101, See Pages 642 - 643)
BPC203
Tutorials
The apt™ system piezoelectric controller incorporates the latest high-speed digital signal
processing technology and low-noise analog electronics to provide up to three high-voltage
(0 - 75 V) output channels. It has been designed to drive a wide range of Thorlabs’
piezo-driven stages and actuators at high bandwidths.
The apt™ system stepper motor controllers use the latest high-speed digital signal
processors (DSP) to ensure accurate positioning and velocity control of the connected
stepper motor. These controllers are compatible with the complete family of Thorlabs
stepper-motor-equipped, high-precision motion control products (DRV Series, see pages
610 - 611). They are available in one-channel (BSC101), two-channel (BSC102), and
three-channel (BSC103) versions.
622 www.thorlabs.com
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Motion Control
T-Cube Overview
BBD103 Benchtop
Overview
Rack System
Overview
DC Servo
Stepper Motor
The apt™ system brushless DC motor controllers are ideal for motion Piezo/Strain
BBD101 control applications demanding operation at high speeds (hundreds of Gauge
mm/s) and with high encoder resolution (<100 nm). These controllers Auto-Alignment
offer up to three channels of high-precision motion control for a wide
range of applications, particularly microscopy sample manipulation if Solenoid
paired with our MLS203 Series of Dual-Axis Scanning Stages (see pages
apt Control
528 - 531). With the latest digital and analog techniques and high- Software
bandwidth, high-power servo control circuitry, these controllers
Tutorials
have been designed to drive Thorlabs' range of 3-phase, brushless DC
servo motor products with peak coil currents up to 5 A.
BBD102
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Motion Control
Stepper Motor
Building Larger Scale Systems
The two-channel apt™ stepper motor (see page 634), piezoelectric actuator driver
Piezo/Strain (see pages 644 - 645), and NanoTrak™ controllers (see pages 650 - 651) all have
Gauge
functionally identical benchtop and rack-module equivalents. The unrestricted
Auto-Alignment configuration flexibility offered by the apt™ rack-based products allows any combination
of modules to be fitted for specific nanopositioning and alignment applications. For
Solenoid
example, a system configured to operate our MAX606 (see page 569) nanopositioning
apt Control stage that has six stepper motors and six piezoelectric actuators with displacement
Software
sensors, would require 12 channels of motion control. Using three stepper motor
Tutorials modules, each with two channels, the motor control necessary can be provided; using
two piezoelectric controller modules and one NanoTrak™ controller module would
power all 6 of the piezoelectric actuators while also taking advantage of the position
sensors. Additionally, the NanoTrak™ module would provide the full range of features Stepper Motor Driver
offered by a fully operational auto-alignment system. All this functionality fits into the See Page 634
rack chassis that measures just 4U (7") in height.
624 www.thorlabs.com
03_RackSyst Overview_624-625.qxd.P:624-625 7/23/11 2:39 PM Page 625
Motion Control
MMR601
Rear Panel
Modules Sold
Separately
Specifications
■ Standard 19" Rack, 4U High
■ Power Input:
• Voltage: 85 - 264 VAC
• Frequency: 47 - 63 Hz
• Power: 800 W
• Fuse: 15 A
■ Dimensions (W x D x H):
19.0" x 17.6" x 7.0"
(480 mm x 448 mm x 183 mm)
■ Weight:
MMR601: 24.2 lbs (11.0 kg)
MMR602: 30.8 lbs (14.0 kg)
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04_DC Servo_626-629.qxd.P:626-629 7/23/11 2:41 PM Page 626
Motion Control
Motorized Stages
Features
Multi-Axis ■ USB Plug-and-Play Allows Easy Multi-Axis Expansion
Platforms
■ Full apt™ Software Control Suite Supplied
Actuators ■ Differential Encoder Feedback for
Closed-Loop Positioning
Controllers ■ Auto-Configure Function for all Thorlabs
Z8 DC Servo Motors
▼ SECTIONS ■ Easy-to-Use Manual Controls with Velocity Slider
and Jog Buttons
T-Cube Overview
■ Extensive ActiveX® Programming Interfaces
Benchtop ■ Fully Software Integrated with Other apt™
Overview Family Controllers
Rack System
Overview
DC Servo
TDC001
Compact Housing Specifications
Stepper Motor
■ Motor Drive Connector (15-Way D-Type):
Piezo/Strain
Gauge • Motor +15 V and -15 V Drive Outputs
The TDC001 T-Cube™ USB DC Servo Motor Driver is a • Quadrature Encoder (QEP) Input (Single Ended)
Auto-Alignment
compact, single-channel controller for easy manual and automatic • Forward, Reverse Limit Switch Inputs
Solenoid
control of DC servo motors. This driver has been designed to (+ Common Return)
operate with a variety of low-powered, DC-brushed motors (up to • 5 V Encoder Supply
apt Control 15 V/2.5 W operation) equipped with encoder feedback. The ■ Front Panel Controls:
Software
TDC001 has been optimized for out-of-the-box operation with • Potentiometer Slider: 4-Speed Bidirectional
Tutorials Thorlabs’ range of Z8 DC motor-equipped optomechanical Velocity Control
products (see page 608). The highly flexible software settings and • Dual Buttons: Forward/Reverse Jogging or Position
closed-loop tuning also support operation with a wide range of Presets
third-party DC servo motors and associated stages and actuators.
■ Motor Drive Voltage: ±10 V to ±12 V
Depending on Supply
USB connectivity provides easy plug-and-play, PC-controlled ■ Motor Drive Current: 150 mA (Cont), >250 mA (peak)
operation. The TDC001 also includes the user-friendly apt™ ■ Motor Drive Type: 8-Bit Sign/Magnitude PWM
software, which allows the user to quickly set up complex moving ■ Control Algorithm: Digital PID Filter (16-bit)
sequences. For example, all relevant operating parameters are set ■ Position Feedback: Quadrature Encoder (QEP)
automatically by the software for Thorlabs' stage and actuator Input, 5 V Single Ended
products. Advanced custom motion control applications and ■ Encoder Feedback Bandwidth: 750 kHz
sequences are also possible using the extensive ActiveX® ■ Position Counter: 32-bit
programming environment. ■ Operating Modes: Position, Velocity
For added convenience, multiple units can be connected to a single ■ Velocity Profile: Trapezoidal
PC via standard USB hub technology or by using the T-Cube™ ■ Input Power Requirements: 15 V Regulated DC,
500 mA (Peak)
Controller Hub (TCH002) for multi-axis motion control
applications (see pages 620 - 621 for further details).
■ Dimensions (W x D x H): 2.36" x 2.36" x 1.87"
(60.0 mm x 60.0 mm x 47.5 mm)
■ Weight: 5.5 oz (160 g)
626 www.thorlabs.com
04_DC Servo_626-629.qxd.P:626-629 7/25/11 5:52 PM Page 627
Motion Control
5 1 Stepper Motor
10 6
15 11
Piezo/Strain
Gauge
Auto-Alignment
Pin Description Pin Description
1 Ground 9 Not Connected Solenoid
2 Forward Limit Switch 10 5 V Encoder Supply
3 Reverse Limit Switch 11 Encoder Channel A apt Control
4 Not Connected 12 Not Connected Software
5 Motor - 13 Encoder Channel B
6 Not Connected 14 Not Connected Tutorials
7 Motor + 15 Not Connected
8 Not Connected
2.36" 2.10"
(60.0 mm) (53.0 mm)
3.66" VELOCITY
POWER
TDC001 0.25"
Connector View Please refer to our website for complete models and drawings. (6.4 mm)
Z8 Actuators
6, 12, or 25 mm of Travel Compact 12 VDC Servo Motor
1/4"-80 Thread Fitting 3/8" Barrel Fitting Maximum Speed of 3 mm/s
Our Z8 Series of Motorized Actuators are designed specifically for use with optical positioning devices
such as mirror mounts and stages. With two barrels options, the Z8 motors can be used to replace
See page 608 manual actuators when the need to automate one or more axes arises.
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Motion Control
Auto-Alignment
Solenoid
apt Control
Software
Tutorials
See pages 654 - 656 for more information on the apt™ software
included with the BBD Series Controllers.
The BBD Series of Brushless DC Motor Controllers are ideal for motion control The image above shows a typical system,
applications demanding operation at high speeds (hundreds of mm/s) and with high comprising of the BBD103 brushless DC
encoder resolution (<100 nm). These controllers offer up to three channels of high- motor controller, an MJC001 joystick console,
precision motion control for a wide range of applications, particularly microscopy sample and an MLS203 (see page 528) XY stage
manipulation if paired with our MLS203-E Series of Dual-Axis Scanning Stages. With mounted to an Olympus XI71 microscope.
the latest digital and analog techniques and high-bandwidth, high-power servo control
circuitry, these controllers have been designed to drive Thorlabs' range of rotary and
linear 3-phase, brushless DC servo motor products with continuous coil currents up to 5 A.
Integrated into the apt family of products, these controllers offer Thorlabs’ standard control and programming
Compatible Motors interface, allowing for easy integration into automated motion control applications. These units are capable of
being reprogrammed in-field, allowing the option of upgrading the units with future firmware releases as soon
■ 3-Phase DC Brushless Motors
as new programming interfaces (such as microscopy standard command sets) are added.
■ Peak Power: 100 W
■ Coil Resistance: 0.1 to 100 Ω USB connectivity provides easy plug and play PC operation. Multiple units can be connected to a single PC
■ Coil Inductance (Nominal): via standard USB hub technology for multi-axis motion control applications. Coupling this with the user-
1 to 100 mH friendly apt™ software allows the user to get reasonably complex move sequences up and running in a short
■ Rated Phase Currents (Nominal): space of time. For example, all relevant operating parameters are set automatically for Thorlabs stage and
100 mA to 5 A actuator products. Advanced custom motion control applications and sequences are also possible using the
extensive ActiveX® programming environment described in more detail on the Software tab.
628 www.thorlabs.com
04_DC Servo_626-629.qxd.P:626-629 7/25/11 5:49 PM Page 629
Motion Control
We have ensured that the software interfaces Rear Panel USER IO Rear Panel AUX I/O Motorized Stages
to the BBD series are highly integrated with Connector Pin Out Connector Pin Out Multi-Axis
all other apt™ family controllers, providing
1 2 3 4 5 6 7 8
Platforms
easy system integration and reduced learning 8 7 6 5 4 3 2 1
curve. As one of the newest members of the Actuators
apt™ family of controllers, these units are 9 10 11 12 13 14 15 15 14 13 12 11 10 9
Controllers
PIN Description PIN Description
backed up by the fully featured apt™ suite of
1 5V 1 Digital O/P 1
PC software tools for immediate and easy out- SECTIONS ▼
of-the-box configuration and usage. 2 Axis In 2 Digital O/P 2
3 Axis Out 3 Digital O/P 3
4 Ground
T-Cube Overview
4 Digital O/P 4
This controller is designed for use with high
5 Ground 5 Digital Ground
power, brushless DC servo motors. For control Benchtop
15 Ground
Female
■ Feedback Connector: 15-Pin D-Type 15 5 V Supply Output Auto-Alignment
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Motion Control
Motorized Stages
Multi-Axis Features
Platforms ■ High-Resolution Microstepping
Actuators
■ Supports 2-Phase, Bipolar, Low-Power Stepper Motors
■ Compact Footprint
Controllers ■ Auto-Configure Function for Thorlabs' ZST Actuators
■ USB Plug-and-Play PC-Controlled Operation
▼ SECTIONS ■ Easy-to-Use Manual Controls with Velocity Slider and
Jog Buttons
T-Cube Overview ■ Full Software Control Suite Supplied
Benchtop ■ Extensive ActiveX® Programming Interfaces
Overview ■ Software Integrated with Other apt™
Rack System Family Controllers
Overview
TST001
DC Servo
The T-Cube™ USB apt™ Stepper Motor Controller (TST001) Thorlabs range of ZST stepper motor actuators (see pages 609 -
Stepper Motor
is a very compact, single channel controller for easy manual and 611); however, its highly flexible parameterization also supports
Piezo/Strain automated control of small, 2-phase, bipolar stepper motors. This operation with a wide range of third party stepper motors and
Gauge
driver has been designed to operate with a variety of low-power associated stages and actuators.
Auto-Alignment motors (up to 15 V/5 W operation). Although targeted at low- USB connectivity provides easy plug-and-play PC controlled
power operations, this product offers full control features with a operation. Multiple units can be connected to a single PC via
Solenoid
highly flexible and powerful DSP controller providing a unique standard USB technology or by using the T-Cube™ Controller
apt Control high resolution microstepping capability in a compact unit. The Hub (TCH002) for multi-axis motion control applications
Software TST001 is optimized for out-of-the-box operation with the (see pages 620 - 621).
Tutorials
Specifications
■ Motor Drive Connector 2.36" 2.10"
(15-Way, High-Density D-Type Female): (60.0 mm) (53.0 mm)
• Phase A and B Drive Outputs
• Differential Quadrature Encoder (QEP) A and B Inputs apt - stepper motor controller
630 www.thorlabs.com
05_Stepper Motor_630-635.qxd.P:630-635 7/23/11 2:42 PM Page 631
Motion Control
DC Servo
Stepper Motor
Piezo/Strain
Gauge
Auto-Alignment
For Future Use
Solenoid
apt Control
Software
Tutorials
See pages 654 - 656 for more information on the apt™ software
TST001 included with the TST001 Stepper Controller.
Rear Connector View
Power Supply not Included. Please See Page 256 for Power Supply Option Descriptions
ITEM # $ £ € RMB DESCRIPTION
TST001 $ 595.00 £ 428.40 € 517,65 ¥ 4,742.15 T-Cube™ Single Channel USB Stepper Motor Controller/Driver
TPS001 $ 25.00 £ 18.00 € 21,75 ¥ 199.25 15 V Power Supply Unit for a Single T-Cube
TPS008 $ 175.00 £ 126.00 € 152,25 ¥ 1,394.75 15 V Power Supply Unit for up to 8 T-Cubes
TCH002 $ 726.90 £ 523.37 € 632,40 ¥ 5,793.39 T-Cube™ Controller Hub and Power Supply Unit
www.thorlabs.com 631
05_Stepper Motor_630-635.qxd.P:630-635 7/23/11 2:42 PM Page 632
Motion Control
Driver Functionality
Stepper motors give excellent low-speed performance
and positioning stability. A wide range of 2-phase
bipolar stepper motors and associated actuators are
commercially available, each with its own characteristics
such as step resolution, peak phase current or voltage,
and leadscrew pitch. For this reason the apt™ stepper
unit operation is fully configurable with key settings
exposed through the associated graphical interface
panels.
Motor step resolution and leadscrew pitch can be set for
a particular motor/actuator combination, phase currents
can be limited to suitable peak powers as required, and
limit switch configuration is accommodated through a
flexible set of limit switch logic settings.
Moreover, relative and absolute motion can be initiated
with motion profiles that are set using velocity profile
parameters. Similarly, home sequences have a full set of
See pages 654 - 656 for more information on the apt™ software included
associated parameters that can be adjusted for a particular
with the BSC Series Controllers.
stage or actuator.
For simplicity of operation, the apt™ software incorporates preconfigured settings for each of our stages and actuators, while also allowing the
user to enter each parameter for use with other stepper motor driven systems. For convenience and ease of use, adjustment of many key
parameters is possible through direct interaction with the graphical panel. For example, movement to the next position can be initiated by
clicking directly on the position display and entering a new value. Note that all such settings and parameters are also accessible through the
ActiveX® programmable interfaces for automated motion control sequences.
632 www.thorlabs.com
05_Stepper Motor_630-635.qxd.P:630-635 7/23/11 2:44 PM Page 633
Motion Control
apt Control
Software
15 14 13 12 11 10 9
www.thorlabs.com 633
05_Stepper Motor_630-635.qxd.P:630-635 7/23/11 2:44 PM Page 634
Motion Control
Piezo/Strain Features
Gauge ■ Dual (Synchronized) Drive Channels
Auto-Alignment ■ Supports 2-Phase Bipolar Steppers up to 50 W
■ Differential Encoder Feedback (QEP Inputs)
Solenoid ■ Maximum 128 Microsteps per Full Step
apt Control ■ 25,600 Microsteps per Rev (200 Step Motor)
Software ■ User Controlled Digital I/O Port
Tutorials ■ Motor Control I/O Port
■ Full Software GUI Control Suite
■ ActiveX® Graphical Panel Controls
■ ActiveX® Programming Interfaces
■ Seamless Software Integration with apt™
Family
Specifications
■ Input/Output: ■ Compatible Motors: Motor Drive
• Motor Drive Channel • Peak Powers: 5 - 50 W
(15-Pin, D-Type Female for Each Channel) • Average Power (Max): 25 W Connector Pin Out
– 2-Phase Bipolar Motor Drive Output • Max Drive Voltage: 48 V
8 7 6 5 4 3 2 1
– Differential Quadrature Encoder Interface • Step Angle Range: 20°-1.8°
– Forward, Reverse Limit Switch Inputs • Coil Resistance (Nom): 4 - 15 Ω
15 14 13 12 11 10 9
• Motor Control (15-Pin, D-Type Female) • Coil Inductance (Nom): 4 - 15 mH
– Jog Forward • Rated Phase Currents (Nom): Pin Description Pin Description
634 www.thorlabs.com
05_Stepper Motor_630-635.qxd.P:630-635 7/23/11 2:44 PM Page 635
Motion Control
Specifications
■ Standard 19" Rack, 4U High
■ Power Input:
• Voltage: 85 - 264 VAC
• Frequency: 47 - 63 Hz
• Power: 800 W
• Fuse: 15 A
■ Dimensions (W x D x H):
19.0" x 17.6" x 7.0"
(480 mm x 448 mm x 183 mm)
■ Weight:
MMR601: 24.2 lbs (11.0 kg)
MMR602: 30.8 lbs (14.0 kg)
www.thorlabs.com 635
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/25/11 5:31 PM Page 636
Motion Control
▼ CHAPTERS
T-Cube™ Piezo Controller (Page 1 of 2)
Manual Stages
Auto-Alignment
The T-Cube™ Piezo Controller, (TPZ001), is a compact single-
Solenoid
channel controller/driver for manual and automatic control of a
apt Control wide range of piezo stacks and actuators. This driver is capable of
Software delivering up to 150 V of drive voltage at 7.5 mA. The TPZ001 can
Tutorials be used to operate the complete range of bare piezo stacks, piezo-
TPZ001
equipped actuators, and piezo-driven mirror mounts supplied by Input View
Thorlabs. Furthermore, when operated together with the T-Cube™
Strain Gauge Reader unit (TSG001), high-precision, closed-loop
operation is possible using a feedback-equipped piezo actuator
(see pages 604 - 607). To support a wide variety of piezo devices, the output range can
All manual controls are located on the top face of the unit be user selected to 75, 100, or 150 V, and the resolution is easily
for manual adjustment of piezo position using the digitally altered to provide very accurate positioning control. Direct
encoded adjustment pot and easy-to-read (adjustable brightness) hardware control of the high voltage output can be facilitated using
voltage display. the low-voltage input connector.
A low-voltage output connector allows for monitoring of the HV
output (for example, using an oscilloscope). As a useful feature, a
Specifications programmable waveform generation capability makes this unit
particularly well suited for use in piezo scanning applications.
■ Piezoelectric Output (SMC Male)
• Drive Voltage: 0 - 150 V USB connectivity provides easy PC-controlled operation. Advanced
(Selectable: 75, 100, or 150 V) custom motion control applications and sequences are also possible
• Drive Current (Max): 7.5 mA Continuous using the extensive ActiveX® programming environments.
• Stability: 100 ppm over 24 hours
(After 30 Minutes Warm-up Time)
• Noise: <2 mVRMS
• Typical Piezo Capacitance: 1 - 10 µF
• Bandwidth: 1 kHz (1 µF Load, 1 Vp-p)
■ External Input (SMA Male): 0 to 10 V
■ Output Monitor (SMA Male): 0 to 10 V
■ USB Port: Version 1.1 Mini
■ Power Requirements
• Voltage: 15 V @ 200 mA,
-15 V @ 100 mA, 5 V @ 400 mA
■ Housing Dimensions (W x D x H): Standard Width
2.4" x 2.4" x 1.8" (60.3 mm x 60.3 mm x 47.5 mm)
■ Weight: 5.5 oz (160 g)
636 www.thorlabs.com
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/23/11 2:45 PM Page 637
Motion Control
For closed-loop applications, the TPZ001 can be used in conjunction T-Cube Overview
with the TSG001 strain gauge reader T-Cube™ (see pages 638 - 639).
Benchtop
This combination can be used to control a variety of closed-loop piezo Overview
products such as our PAZ series feedback piezo actuators (page 605). Rack System
Overview
DC Servo
Stepper Motor
2.36" 2.10" Power Supply Options
(60.0 mm) (53.0 mm)
The TPZ001 T-Cube™ requires a 5 V, 15 V, or -15 V Piezo/Strain
Gauge
power supply depending on the current. Thorlabs offers the
apt - piezo controller
TPS002, which is a compact, two-way power supply unit, Auto-Alignment
VOLTS
Alternatively, the TCH002 USB Controller Hub (see pages apt Control
(60.0 mm) Software
POWER
620 - 621) provides power for up to six T-Cubes.
Furthermore, the controller hub contains a fully USB2.0 Tutorials
www.thorlabs.com 637
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/25/11 5:31 PM Page 638
Motion Control
▼ CHAPTERS
T-Cube™ Strain Gauge Reader (Page 1 of 2)
Manual Stages
638 www.thorlabs.com
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/25/11 5:31 PM Page 639
Motion Control
Piezo/Strain
Gauge
www.thorlabs.com 639
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/23/11 2:46 PM Page 640
Motion Control
▼ CHAPTERS
Open-Loop Piezoelectric Controller: 1 and 3 Channels
Manual Stages
RS-232 Interface
MDT694A
640 www.thorlabs.com
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/23/11 2:46 PM Page 641
Motion Control
Benchtop
Our MDT630A kit comes with our MAX312D flexure stage and MDT693A 3-channel piezoelectric controller. The NanoMax™ Flexure Overview
Stage has 4 mm of coarse travel and 300 µm of fine travel controlled by the differential drives. Additionally, the unit has three Rack System
piezoelectric actuators built into the housing to give an additional 20 µm at a resolution of 20 nm. The flexure design of the MAX312D Overview
ensures low crosstalk, high stability, and long-term reliability. The 3-channel controller offers a way to control the piezoelectric actuators DC Servo
with high stability and accuracy. The controller can be adjusted from the front panel or with the included, easy-to-use software through
the RS-232 interface. Stepper Motor
All the cables required to connect the stage to the controller are included in the kit. For more information on the MAX312D, Piezo/Strain
please see page 547. Gauge
Auto-Alignment
ITEM # METRIC ITEM # $ £ € RMB DESCRIPTION
MDT630A* MDT630A/M* $ 3,248.75 £ 2,339.10 € 2.826,41 ¥ 25,892.54 Complete Piezoelectric Flexure Stage and Driver Solenoid
*Power Requirements 100 - 120 VAC, 50 - 60 Hz; user switchable to 220 - 240 VAC, 50 - 60 Hz operation.
apt Control
Software
Piezoelectric Kinematic Mount with Controller Package
Tutorials
Piezoelectric Driver
■ Output Current: 60 mA per Channel
■ Frequency Response: DC - 10 kHz
(1.4 µF Capacitance Load)
■ 3 Independent Voltage Displays
■ Very Low Noise Electronics
KC1-T-PZ
■ Turnkey System Complete with PZ630 Mirror Mount
All Cables Complete System Includes Drive Electronics
Mechanical Base and Mirror Sold Separately
See Page 102 and 767, Respectively
■ 10 arcsec Angular Resolution
■ ±4° Mechanical Angular Range
■ ±3 mm Translational Range The PZ630 and PZ631 kits combine our KC1 Series 30 mm cage system kinematic See page
Electro-Mechanical mirror mount with piezoelectric stacks and our MDT693A 3-channel piezoelectric 190
controller. This combination offers precise control of the angular orientation of the
■ 0.06 arcsec Angular Resolution
mirror. The manual thumb screws control the coarse angular adjustment while the
■ 30 arcsec Angular Range
piezoelectric stacks, mounted between the screw and the housing, allow for fine
■ ±4 µm Translational Range
angular control. The combination allows for ±4° of motion with 0.06 arcsec of
angular resolution. The controller can be adjusted from the front panel or with the
included, easy-to-use software through the RS232 interface.
The mirror mount in both the PZ630 and PZ631 packages is compatible with Thorlabs’ 30 mm cage system (starting on page 167). The
PZ630 is bundled with the KC1-PZ mirror mount, which has a Ø1.05" smooth bore hole to fit Ø1" optics and a nylon-tipped set screw
to hold it securely in place. The PZ631 is sold with the KC1-T-PZ mirror mount, which has an SM1 (Ø1.035"- 40) threaded aperture
for mounting Ø1" optics using the two included SM1RR retaining rings to hold the optic in place. The SM1 thread allows many of our
mechanical parts to be easily attached to the mount, such as our lens tubes (see pages 127 - 139) and our laser diode mounts (see pages
1481 - 1492). Both kits come with all of the cables required to connect the mount to the controller.
www.thorlabs.com 641
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/26/11 3:21 PM Page 642
Motion Control
Piezo/Strain
Gauge
The BPC203 apt™ high-power, three-axis piezo controller
Auto-Alignment
has been designed to drive the full range of open- and
Solenoid closed-loop piezo-equipped nanopositioning actuators and
stages offered by Thorlabs. Flexible software settings make
apt Control
Software the BPC203 highly configurable and therefore also suitable
for driving a wide range of piezo elements in third-party
Tutorials
products. A waveform generation capability combined
with triggering outputs make this unit particularly well
suited for piezo scanning applications.
Controls are located on the front face of the unit to allow manual
adjustment of the piezo position using the digitally encoded
adjustment potentiometer. The display is easy to read and can be set See pages 654 – 656 for more information on the apt™
to show either applied voltage or position in microns. Open- or software included with the BPC203 Controller.
closed-loop control and zeroing of the voltage applied to the piezo
can also be selected from the front panel.
USB connectivity provides easy plug-and-play PC operation. Multiple units can be connected to a single PC via standard USB hub
technology for multi-axis applications. Coupling this with the user-friendly apt™ software allows it to quickly get running in a short time
frame. For example, all relevant operating parameters are set automatically for Thorlabs’ piezo actuator products. Advanced custom
motion control applications and sequences are also possible using the extensive ActiveX® programming environment. The ActiveX®
programming environment is described in more detail on pages 654 – 656.
642 www.thorlabs.com
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/23/11 2:46 PM Page 643
Motion Control
CHAPTERS ▼
Benchtop Closed-Loop Piezo Controller (Page 2 of 2)
Manual Stages
Strain Gauge Connector Pin Out User I/O Connector Pin Out Motorized Stages
5 4 3 2 1 8 7 6 5 4 3 2 1 Multi-Axis
Platforms
9 8 7 6 15 14 13 12 11 10 9
Actuators
Pin Description Pin Description Return
1 Digital O/P 1 5, 9, 10 Controllers
1 Strain Gauge Excitation
2 +15 V Out* 2 Digital O/P 2 5, 9, 10
3 -15 V Out* 3 Digital O/P 3 5, 9, 10 SECTIONS ▼
4 Ground 4 Digital O/P 4 5, 9, 10
5 AC Feedback IN 5 Digital Ground T-Cube Overview
6 Ground 6 Digital I/P 1 5, 9, 10
7 Actuator ID Signal** 7 Digital I/P 2 5, 9, 10 Benchtop
8 Reserved for Future Use 8 Digital I/P 3 5, 9, 10 Overview
9 Reserved for Future Use 9 Digital Ground Rack System
10 Digital Ground Overview
Notes: 11 For Future Use (Trigger Out) 5, 9, 10
* Power supply for the piezo actuator 12 For Future Use (Trigger IN) 5, 9, 10 DC Servo
feedback circuit. It must not be used to 13 Digital I/P 4 5, 9, 10
drive any other circuits or devices. 14 5 V Supply Output 5, 9, 10 Stepper Motor
** This signal is applicable only to Thorlabs 15 5 V Supply Output 5, 9, 10
actuators. It enables the system to identify Piezo/Strain
the piezo extension associated with the actuator. Gauge
Auto-Alignment
Solenoid
apt Control
Specifications (Per Channel) Software
■ Piezoelectric Output (SMC Male) Tutorials
• Voltage (Software Control): 0 - 75 VDC
• Current: 500 mA Max Continuous
• Stability: 100 ppm Over 24 Hours
(After 30 min Warm-Up Time)
• Noise: <3 mVRMS
• Typical Piezo Capacitance: 1 - 10 µF
■ External Piezo Control Input (BNC)*
• ±11.74 VDC
• 2 BNC Inputs (Non-Inverting and Inverting)
■ Bandwidth: 10 kHz (1 µF Load, 1 Vp-p)
■ USB Port: Version 1.1
■ Position Feedback (9-Pin D-Type Female)
■ Power Input
• Feedback Transducer Type: Strain Gauge • Voltage: 85 - 264 VAC
• Detection Method: AC Bridge (18 kHz Excitation) • Power: 200 W
• Fuse: 3 A
Six Axis
• Typical Resolution: 5 nm (for 20 µm Actuator;
e.g., PAZ005) ■ Housing Dimensions (W x D x H): Stages
• Auto-Configure: Identification Resistance in Actuator 9.5" x 14.2" x 5.2" (240 mm x 360 mm x 133 mm)
■ User Input/Output (15-Pin D-Type Female)
■ Weight:
14.75 lbs (6.7 kg)
• 4 Digital Inputs: TTL Levels
• 4 Digital Outputs: Open Collector
*Differential inputs allow the user to eliminate unwanted
• Trigger Input/Output: TTL common mode signals. By using just one of the inputs, the
• Trigger Input Functionality: Triggered Voltage user can control the piezo actuator with a single signal. See pages
Ramps/Waveforms
• Trigger Output Functionality: Trigger Generation
565 - 571
During Voltage Ramp Output
• User 5 V (Max, with Ground): 250 mA
www.thorlabs.com 643
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/23/11 2:46 PM Page 644
Motion Control
▼ CHAPTERS
Modular Rack System Piezo Driver with Feedback
Manual Stages
Motorized Stages
Features
Multi-Axis ■ Two Piezo-Actuator ■ Full Software GUI Control Suite
Platforms
Output Channels ■ ActiveX® Graphical
Actuators ■ Open- and Closed-Loop Panel Controls
Operation ■ ActiveX® Programming
Controllers ■ Strain Gauge Interfaces
Feedback Connections ■ Seamless Software
▼ SECTIONS ■ USB Plug-and-Play Connectivity Integration with
■ User Controlled Digital I/O Port apt™ Family MPZ601
T-Cube Overview
Benchtop
Overview
Rack System
Overview Modular apt™ Piezoelectric Controller
DC Servo
This modular apt™ piezoelectric controller, compatible with the apt™ rack
(pages 624 - 625), incorporates the latest high-speed digital signal processing (DSP),
Stepper Motor low-noise analog electronics, and ActiveX® software technology to provide two low
noise, fully software controlled, high-voltage (0-75 V) output channels. These modular
Piezo/Strain
Gauge controllers are designed for use in larger scale critical alignment applications where
nanometer-level motion control is required. The modular apt™ piezo controller is
Auto-Alignment
supplied with a full suite of software support tools. An intuitive graphical instrument
Solenoid
panel allows immediate control and visualization of the operation of the piezo
controllers. See pages 654 - 656 for a full description of the apt™ system software, and
apt Control
Software
the next page for details on the apt™ modular rack system that houses this module. See pages 654 - 656 for more information
on the included apt™ software.
Tutorials Easily Configured Closed-Loop
Operation
Module operation is fully configurable Specifications Displacement Sensor Input
(parameterized) with key settings exposed ■ Piezoelectric Output: Connector Pin Out
through the associated graphical interface • Two Output Channels:
panel. Open-loop or closed-loop operating SMC Male Connector
modes can be selected quickly. In both – Voltage Output: 0 - 75 VDC/Channel
modes, the display can be changed to show – Voltage Stability: 100 ppm Over 24 Hrs
drive voltage or position (in microns). In – Noise: <3 mVRMS
– Output Current (Max): 500 mA/Channel
the closed-loop operation mode, both the
P and I (proportional and integral) ■ Differential Analog Inputs (BNC):
0 - 10 VDC
components of the feedback control loop
can be altered to adjust the servo-loop ■ Position Feedback
response. Adjustment of all key parameters (9-Pin D-Type Connector)
– Strain Gauge Feedback
is possible through direct interaction with
– Voltage Feedback: 0 - 10 VDC
the graphical panel or through the ActiveX®
■ User Input/Output
programmable interfaces that are included
(26-Pin D-Type Connector):
with each instrument. This allows the user • Two Output Monitors: 0 - 10 VDC
to build automated alignment routines in • Two Potentiometer Inputs:
almost any programming language. 10-Turn Pots
• Trigger Input/Output: TTL
Software Developers Support CD
• Digital I/O Lines: Opto-Isolated
A developers’ kit is shipped with all of our
■ General:
apt™ Series controllers. This additional
• One Slot apt™ Rack
software is intended for use by software • Dimensions (W x D x H):
developers working on large system 7.5" x 10.6" x 1.97"
integration projects that incorporate apt™ (190 mm x 270 mm x 50 mm)
products. The kit contains an extensive • Weight: 3.3 lb (1.5 kg) See pages 624 - 625 for more
selection of useful code samples as well as information on the apt™
tutorial information. rack enclosure.
644 www.thorlabs.com
06_PiezoStrain Gauge_636-645.qxd.P:636-645 7/23/11 2:46 PM Page 645
Motion Control
The rack system architecture, hardware, and software has been DC Servo
engineered to provide an efficient solution for complex, high-channel-count
Stepper Motor
nanopositioning applications. Whether these applications are found in a modern high- Features
volume optoelectronic component manufacturing facility or in a leading R&D facility, Piezo/Strain
■ Supports up to 12-Channels Gauge
the MMR601 or MMR602 system is easy to implement and can be adapted to rapidly of Operation in a Single Chassis
changing requirements. ■ Three Plug-In Modules: Auto-Alignment
The rack presents a clean, uncluttered front panel with six rear mounting bays for the • Dual-Channel Piezoelectric
plug-in modules. This arrangement greatly simplifies the cable management issues that Controller with 75 V of Low-Noise Solenoid
Output (See Pages 644 - 645)
arise as the number of channels expands. apt Control
• Dual-Channel Stepper Motor Software
Each module is equipped with an on-board digital signal processor (DSP), which Controller with Peak Power
allows processing power to be increased as modules (channels of operation) are of 50 W per Channel (See Page 634) Tutorials
added. This way, the system is able to maintain maximum operating efficiency, even • Dual-Channel NanoTrak™
when fully loaded. Auto-Alignment System
(See Pages 650 - 651)
Furthermore, additional racks can be added to the USB bus as required, thus allowing
■ 6 Module Slots per Chassis,
multiple, fully automated, 6-axis positioning stages to be combined into a single unified Access from Rear Panel
motion control system. ■ Advanced ActiveX®
The PC-based software that drives the rack system operates from the same kernel of PC Control Software Suite
ActiveX® multi-threaded server code used to drive the stand-alone benchtop controllers ■ USB Plug-and-Play
and includes the same collection of high-level user applications. All of our ActiveX® ■ USB Interface Allows Multiple Systems
software is rigorously engineered using modern object-oriented techniques, which to be Connected and Controlled via
ensures independence of programming environment and compatibility with a large One PC
number of third-party development tools. See pages 654 - 656 for more details on the
apt™ software suite.
Specifications
■ Standard 19" Rack, 4U High
■ Power Input:
• Voltage: 85 - 264 VAC
• Frequency: 47 - 63 Hz
• Power: 800 W
• Fuse: 15 A
■ Dimensions (W x D x H):
19.0" x 17.6" x 7.0"
(480 mm x 448 mm x 183 mm)
■ Weight: 35.2 lbs (16 kg)
www.thorlabs.com 645
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Motion Control
▼ CHAPTERS
T-Cube™ NanoTrak™ Auto-Alignment Controller (Page 1 of 2)
Manual Stages
The T-Cube™ NanoTrak™ Controller with USB computer interface represents the latest
Motorized Stages developments in automated optical alignment technology. It is designed for use in entry-level
photonics devices and fiber alignment applications and is ideal for low-volume device assembly,
Multi-Axis
Platforms characterization, and mapping.
Actuators
This auto-alignment T-Cube™ unit is used together with a pair of external piezo amplifier
channels (TPZ001 T-Cube™ Piezo Drivers, see pages 636 - 637) to provide a complete
Controllers solution for manipulating piezo-actuated nanopositioning stages. The complete system is
capable of aligning the device position down to the 10 nm regime. Equipped with a direct
▼ SECTIONS FC/PC PIN photodiode input fed to a high-gain, multi-range, transimpedance amplifier,
this unit uses the same advanced auto-alignment algorithms pioneered on our high-end,
T-Cube Overview higher bandwidth, benchtop NanoTrak™ Controller (BNT001/IR). For information on
Benchtop how the NanoTrak™ is used in auto-alignment applications, see the BNT001/IR on
Overview pages 648 - 649. For an explanation of the NanoTrak™ theory of operation, please visit
Rack System our website or see the tutorial on pages 657 - 659.
Overview
TNA001/IR Operator interaction can be accomplished using either the manual control panel or via the intuitive apt™
DC Servo software interface provided with the unit. This powerful controller in a miniature package can be mounted
to an optical table directly with the included mounting plate so it is in close proximity to the device it controls.
Stepper Motor
Tabletop operation also allows minimal drive cable lengths for easier cable management. All manual controls are located on the top face of the
Piezo/Strain unit, making it convenient to adjust the piezo positions manually and to monitor the alignment via the easy-to-read target display.
Gauge
Auto-Alignment
Specifications Features
Solenoid
■ Optical Power Measurement: ■ Other Input/Output: ■ Compact Footprint
apt Control • PIN Photodiode: 30 nA to 10 mA • Feedback Signal In: 0 - 10 V (SMA)
Software ■ Front Panel or PC Readout
Photocurrent • Dual Piezo Position Demand
Tutorials • InGaAs Detector: FC/PC Fiber Outputs: 0 - 10 V (SMA)
■ Active Fiber Alignment
Input • USB Port: Version 1.1 Mini ■ Maintain Optimum Power
• Signal Phase Compensation: Connector Throughput to Fiber
-180° to 180° ■ Input Power Requirements ■ InGaAs Detectors and Pin
■ NanoTraking: (DIN Connector): Current Options
• Circle Scanning Frequency: • Voltages: 15 V (100 mA), ■ NTA009 Si Detector
17.5 - 87.5 Hz -15 V (100 mA), Available Separately
• Circle Diameter Makes Adjustment: or +5 V (400 mA) ■ USB Plug-and-Play
Automatic and Manual Connectivity
■ Full Software Control Suite
Included
■ Extensive ActiveX®
Programming Interfaces
Screenshot of the GUI that comes with the NanoTrak™ controller. Once in the tracking mode, the unit controls the piezo drivers, which adjust the
stage’s position in order to locate the position of maximum power.
The diameter of the circle shown in the screen shot represents the amplitude of the fiber oscillation, while the center of the circle indicates the
current horizontal and vertical position of the piezo actuators.
646 www.thorlabs.com
07_AutoAlignment_646-651.qxd.P:646-651 7/26/11 3:25 PM Page 647
Motion Control
a single USB connection to the Controller Hub is all that is required for (60.0 mm)
SECTIONS M
SIGNAL
PC control. POWER
DC Servo
apt™ NanoTrak™ For higher speed auto-alignment, please
see our powerful benchtop NanoTrak™ Stepper Motor
Controller
unit. This controller combines an Piezo/Strain
intelligent active feedback alignment Gauge
control system and a two-channel, high-
Auto-Alignment
current piezoelectric controller into a
single benchtop unit.
Solenoid
See Following Page
TNA001/IR apt Control
Back View Software
ITEM # $ £ € RMB DESCRIPTION
Tutorials
TNA001/IR* $ 1,895.00 TNA001
£ 1,364.40 € 1.648,65 ¥ 15,103.15 T-Cube™ NanoTrak™ Controller with InGaAs Detector
NTA009 $ 295.00 £ 212.40 € 256,65 ¥ 2,351.15 Silicon Detector for NanoTrak™
TPS002 $ 105.00 £ 75.60 € 91,35 ¥ 836.85 ±15 V/5 V Power Supply Unit for up to 2 T-Cubes™
TCH002 $ 726.90 £ 523.37 € 632,40 ¥ 5,793.39 T-Cube™ Controller Hub and Power Supply Unit
*Power Supply not included
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Motion Control
▼ CHAPTERS
Benchtop NanoTrak™ Controller (Page 1 of 2)
Manual Stages
Motorized Stages
Multi-Axis Features
Platforms
■ Tracking Feature Maintains Optimum
Actuators Throughput Indefinitely
Controllers
■ Two Piezo-Actuator Output Channels
Provide Closed-Loop Feedback
▼ SECTIONS ■ InGaAS Detector, or External Inputs
(FC/PC for Optical and BNC for Voltage)
T-Cube Overview
■ NTA009 Si Detector Available Separately
Benchtop ■ USB Plug-and-Play Connectivity
Overview
Rack System
■ Full GUI Control Suite
Overview ■ ActiveX® Graphical Panel Controls
DC Servo BNT001/IR and Programming Interfaces
■ Seamless Software Integration with
Stepper Motor
Entire apt™ Family of Products
Piezo/Strain
Gauge
Auto-Alignment The benchtop NanoTrak™ auto-alignment controller combines an intelligent active achieve optimal alignment via piezo actuation.
feedback alignment control system and a two-channel piezoelectric controller into a Many of our piezo-actuated stages can also be
Solenoid
single benchtop unit. As part of the apt™ series, this unit can be integrated with all motorized to support this initial first alignment
apt Control of our apt™ controllers and drives. This system is a basic building block from step (see our NanoMax™ stages starting on
Software
which advanced alignment systems can be quickly configured. It can be fully page 546).
Tutorials integrated with our extensive selection of Max Series piezo-driven positioning Once first-light detection is accomplished, the
systems. NanoTrak™ system begins its alignment process
Although used primarily for aligning optical fibers and integrated optical devices, the using advanced phase-sensitive detection and
NanoTrak™ is ideal for automating just about any labor-intensive alignment tasks digital filtering techniques to generate correction
such as waveguide characterization, fiber pigtailing of active and passive devices, as well voltages, which are then directly applied to the
as a multitude of other R&D applications. piezoelectric actuators in the stage.
Auto-Alignment Highly Adaptable Operation
When combined with a positioning stage outfitted with at least two piezoelectric There are an infinite variety of device alignment
actuators, the NanoTrak™ auto-alignment system is designed to optimize the scenarios, each with potentially different optical
coupling through an optical assembly. Refer to the NanoTrak™ tutorial (pages 657 and physical characteristics: half widths, coupled
– 659) for a more detailed explanation of the principle of operation of this unit. peak powers, misalignment sensitivity, and
In a typical, automated-alignment setup, it is common to align for initial first-light mechanical phase lags. Given the range of
detection using motor control before allowing the NanoTrak™ to take over and applications, it is important that NanoTrak™ be
easily configured for a specific task.
To achieve this adaptability, NanoTrak’s operation
Block Diagram: With one fiber fixed and the other is fully configurable with many of the parameters
mounted on a piezo-actuated stage capable of moving
of the system accessible through easy-to-use
the fiber perpendicular to its endface, the NanoTrak™
NanoTrak Unit controls the position of the moving fiber. graphical software panels.
Vertical
For example, when operating in tracking mode,
Piezo
Control the system applies a small sinusoidal dither to the
and The NanoTrak’s piezoelectric actuators as part of the alignment
Auto- Amp auto-alignment
Optical
process. To accommodate the specific optical
Alignment Stage circuit controls the
Circuit
Piezo
Fibers
position of the characteristics of the elements in the system, the
Control fiber as it optimizes dithering amplitude and frequency can be
and the efficiency of the
Amp
adjusted via the Circle Diameter and Circle
Horizontal butt-coupling. Frequency settings, respectively. Additionally, to
deal with a potentially wide range of optical signal
Detector
levels and sensitivities, the overall closed-loop gain
In many applications, a planar waveguide or other device can be adjusted via the Gain parameter.
replaces one of the fibers; however, the basic principles
remain the same.
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Motion Control
CHAPTERS ▼
Benchtop NanoTrak™ Controller (Page 2 of 2)
Manual Stages
A few other important parameters are also worth covering in this brief summary of the NanoTrak™ system. The electromechanical phase
lags associated with any moving device under piezoelectric control can be compensated by using phase correction parameters. A wide Motorized Stages
range of feedback signal (coupled power) noise levels can be accommodated by altering the input amplifier gain and filtering parameters.
Multi-Axis
There are many more settings and adjustments that can be made to fully optimize operation of the unit. Platforms
All such settings and parameters are also accessible through the ActiveX® programmable interfaces for automated alignment sequences. Actuators
See pages 654 – 656 for a full description of the apt™ system software.
Controllers
SECTIONS ▼
Specifications
T-Cube Overview
■ Optical Power Measurement ■ Piezoelectric Input/Output ■ Other Input/Output
• PIN Photodiode: 1 nA to 10 mA • Two Output Connectors • Optical Power Monitor Benchtop
Photocurrent (SMC Male): (BNC): 0 – 10 VDC Overview
• InGaAs Detector: – Voltage Output: • User Control (37-Pin, D-Type)
Rack System
FC/PC Fiber Input 0 – 75 VDC/Channel Overview
– Isolated Digital I/O
• Optical Power Monitor (BNC): – Voltage Stability: 100 ppm • Trigger In/Out (BNC): DC Servo
Multiple Ranges Over 24 Hours 0 – 10 VDC
• Signal Phase Compensation: – Noise: <3 mVRMS • USB Port Stepper Motor
-180° to 180° – Output Current:
500 mA/Channel ■ Power Requirements Piezo/Strain
■ NanoTraking • Voltage: 85 – 264 VAC Gauge
• Circle Scanning Frequency: • Output Monitors (BNC):
0 – 10 VDC • Frequency: 47 – 63 Hz Auto-Alignment
1 – 300 Hz • Power: 200 W
• Circle Diameter Adjustment • Analog Inputs (BNC): 0 – 10
VDC • Fuse: 3 A Solenoid
Modes: Automatic and Manual
(Used in Piezo Amp Mode) ■ General apt Control
• Strain Gauge Position Feedback: • Dimensions (W x D x H): Software
(Two 9-Pin, Female D-Type) Standard 9.67" x 13.0" x 5.1"
Tutorials
(245 mm x 300 mm x 130 mm)
The InGaAs Detector (800-1800 nm) that comes with the BNT001/IR is packaged just like the NTA009 Si
detector shown to the right. For applications in the 320 – 1000 nm wavelength range simply unplug the InGaAs
detector and plug in the NTA009.
WAVELENGTH
SENSOR RANGE DESCRIPTION RISE TIME INPUT NEP DARK CURRENT
Comes Standard with the
InGaAs 800 – 1800 nm 100 ps @ 12 V FC/PC 1.5 x 10-15 W/Hz 0.5 nA @ -5 V NTA009
BNT001/IR Nanotrak Contoller
Si Detector for a
Si 320 – 1000 nm Item # NTA009 100 ps @ 12 V FC/PC 3.1 x 10-15 W/Hz 0.5 nA @ 10 V BNT001 Controller
www.thorlabs.com 649
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Motion Control
▼ CHAPTERS
Modular Rack System NanoTrak™
Manual Stages Auto-Alignment Module (Page 1 of 2)
Motorized Stages
Multi-Axis
Platforms
Actuators
Controllers
▼ SECTIONS
T-Cube Overview
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Motion Control
CHAPTERS ▼
Modular Rack System NanoTrak™
Auto-Alignment Module (Page 2 of 2) Manual Stages
Highly Adaptable Operation many of the parameters of the system accessible through easy-to-use graphical Motorized Stages
There are an infinite variety of alignment software panels. For example, when operating in Tracking Mode, the system Multi-Axis
scenarios, each with potentially different optical applies a small sinusoidal dither to the piezoelectric actuators as part of the Platforms
and physical characteristics such as half widths, alignment process (see the NanoTrak™ tutorial on pages 651 - 659). To Actuators
coupled peak powers, misalignment power accommodate the specific optical characteristics of the elements in the system, the
response, and mechanical phase lags. dithering amplitude and frequency can be adjusted via the Circle Diameter and Controllers
To deal with this range of applications, the Circle Frequency settings, respectively. Additionally, to deal with a potentially wide
range of optical signal levels and sensitivities, the overall closed-loop gain can be SECTIONS ▼
NanoTrak’s operation is fully configurable with
adjusted via a gain parameter.
T-Cube Overview
All such settings and parameters are also
accessible through the ActiveX® programmable Benchtop
Specifications interfaces for automated alignment sequences.
Overview
■ Optical Power Measurement: ■ User I/O Port (26-Pin D-Type See pages 654 - 656 for a full description of
Rack System
• PIN Photodiode: Female): Overview
1 nA to 10 mA Photocurrent the apt™ system software.
• Optical Power Monitors: DC Servo
• InGaAs Detector: 0 - 10 VDC Extensive Software Support Tools
FC/PC Fiber Input • Two Differential Analog Inputs: The apt™ software library contains a number Stepper Motor
• Ext. Power Meter Input (BNC): 0 - 10 VDC
Multiple Ranges of optional features, with many different Piezo/Strain
• Trigger Input/Output: TTL graphical user interfaces, operational
• Signal Phase Compensation: Gauge
-180° to 180° • Digital I/O Lines: Opto-Isolated parameters, and programming functions. To
Auto-Alignment
■ NanoTraking: ■ General: assist in using the software, comprehensive,
• Circle Scanning Frequency: • One Slot apt™ Rack fully context-sensitive online help is provided. Solenoid
1 - 300 Hz • Dimensions (W x D x H):
• Circle Diameter Adjustment 7.5" x 10.6" x 2.0" The NTA009 is a Si Detector, designed for use apt Control
Modes: Automatic and Manual (190 mm x 270 mm x 50 mm) in the visible spectral region, that can be used Software
■ Piezoelectric Input/Output: • Weight: 3.3 lbs (1.5 kg) as a replacement of the InGaAs detector that Tutorials
• Two Output Connectors comes with the BNT011/IR.
(SMC male):
- Voltage Output: 0 - 75 VDC
per Channel
- Voltage Stability: User I/O Piezo In
100 ppm over 24 Hours
- Noise: <3 mV RMS
- Output Current:
500 mA/Channel
• Two Output Monitors (BNC):
0 - 10 VDC
• Position Feedback
(9-Pin, D-Type Female):
– Strain Gauge Feedback
– Voltage Feedback:
0 - 10 VDC
The InGaAs Detector (800-1800 nm) that comes with the MNA601/IR is packaged just like the NTA009 Si
detector shown to the right. For applications in the 320-1000 nm wavelength range simply unplug the InGaAs
detector and plug in the NTA009.
WAVELENGTH
SENSOR RANGE DESCRIPTION RISE TIME INPUT NEP DARK CURRENT
Comes Standard with the
InGaAs 800 - 1800 nm 100 ps @ 12 V FC/PC 1.5 x 10-15 W/Hz 0.5 nA @ -5 V NTA009
MNA601/IR Nanotrak Contoller
Si Detector for a
Si 320 - 1000 nm Item # NTA009 100 ps @ 12 V FC/PC 3.1 x 10-15 W/Hz 0.5 nA @ 10 V BNT001 Controller
www.thorlabs.com 651
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Motion Control
▼ CHAPTERS
T-Cube™ Solenoid/Shutter Controller (Page 1 of 2)
Manual Stages
Motorized Stages
Features
■ Compact Footprint
Multi-Axis
Platforms ■ Full apt™ Software Control Suite Included
Actuators ■ Automatic, Single, Manual, and Triggered
Operating Modes
Controllers ■ Operates Thorlabs’ Solenoid-Actuated SH05 Shutter
■ Manual- or PC-Controlled Operation via USB
▼ SECTIONS
■ Input/Output Triggering (Daisy Chaining)
T-Cube Overview ■ Safety Enabled Key Switch
Benchtop ■ Laser Safety Interlock Jack
Overview ■ Extensive ActiveX® Programming Interfaces
Rack System
Overview
■ Software Compatible with Other apt™ Controllers
DC Servo
Stepper Motor
Piezo/Strain TSC001
Specifications
Gauge ■ Timing Resolution: 250 µs
Auto-Alignment ■ On/Off Times: 100 ms to 10 s
■ Maximum Repetition Rate: up to 10 Hz
Solenoid
■ Trigger In/Out (SMA Connected): TTL
apt Control ■ Output Enable: Key Switch and Interlock Jack Plug
Software The T-Cube™ Solenoid Controller (TSC001) is a compact, single- ■ Operating Modes:
Tutorials channel controller that provides easy manual and automated
control of solenoid-operated shutters, flipper mounts, and other • Manual: User-Controlled On/Off
similar devices. Designed to operate 15 V solenoid-actuated • Single: DSP-Controlled Single On/Off Cycle
devices, this miniature controller offers a complete set of control • Auto: DSP-Controlled Multiple On/Off Cycles
features via an embedded DSP processor, which provides a • Triggered: Externally Triggered On/Off
multitude of flexible operating modes. Embedded software ■ Output (6-Way Hirose Connectors):
functionality allows this unit to be used to control solenoid devices • Solenoid Drive: 15 V Pulse (10 V Hold)
manually (using panel buttons), automatically with DSP-timed
• Position Sensor Feedback: Photodiode
operation, or with external trigger signals for operation with third-
party equipment. A trigger out connection allows multiple T- ■ Input Power Requirements:
Cube™ controllers to be connected together for multichannel • Voltage: 15 V Regulated DC
synchronized operation. • Current: 1 A Peak, 300 mA Steady State
The TSC001 may be used as a stand-alone device or combined ■ Housing Dimensions (W x D x H):
with the T-Cube™ Controller Hub (TCH002) for applications 2.36" x 2.36" x 1.87" (60.0 mm x 60.0 mm x 47.5 mm)
utilizing multiple T-Cubes. The manual controls for this unit are ■ Weight: 5.5 oz (160 g)
conveniently located on the upper surface. The mode button
switches the unit between the various operating modes, while the
enable button is used to initiate manual or automatic operation of
the solenoid controller output. There is also a safety key switch and
interlock plug fitted to this compact unit for use in laser safety
applications. USB connectivity provides easy plug-and-play, PC-
controlled operation.
Coupling the controller with the very user-friendly apt™ software
(supplied) allows the user to get set up quickly. Advanced custom
control sequences are also possible using the extensive ActiveX®
programming environment.
For multi-channel applications, the TCH002 USB Controller Hub
contains a fully compliant USB 2.0 hub circuit, providing power
and communications for up to six T-Cubes – a single USB
connection to the Controller Hub is all that is required for PC
control. See pages 620 - 621 for more details. TSC001
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Motion Control
CHAPTERS ▼
T-Cube™ Solenoid/Shutter Controller (Page 2 of 2)
Manual Stages
TSC001 Solenoid Controller Applications
The TSC001 Solenoid Controller has been designed to also control Motorized Stages
third-party, solenoid-operated devices with a maximum voltage of Multi-Axis
15 V and a maximum current of 1 A. Thorlabs offers a solenoid- Platforms
operated beam shutter (SH05, see page 361) that is compatible with
Actuators
the TSC001 Solenoid Controller.
Controllers
DC Servo
Stepper Motor
apt Control
Software
Tutorials
2.36" 2.10"
(60.0 mm) (53.0 mm)
3.66" ENABLE
0.25"
Please refer to our website for complete models and drawings. (6.4 mm)
See pages 620 - 621
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Motion Control
▼ CHAPTERS
apt™ Control Software Overview (Page 1 of 3)
Manual Stages
Constructing automated photonics or custom-alignment and positioning solutions in programming automative alignment sequences,
Motorized Stages a speedy and efficient manner is becoming increasingly important in today's learning how to operate the equipment manually
competitive environment. Timescales are often short; yet the nature of the solutions, is an important first step. Every apt™ controller
Multi-Axis particularly at the software level, are becoming more complex and demanding. can be manually operated using the supplied
Platforms
We have worked very closely with a large number of system engineers and research APTUser utility. This utility gives access to all
Actuators specialists in order to gain a detailed understanding of the specific requirements for settings, parameters, and operating modes. With
sophisticated, yet easy-to-use electronics and software controller products. this, most automated sequences can be first tested
Controllers
Out-of-the-Box Operation and verified without writing a single line of
When faced with an automated integration project, the system engineer or researcher custom software by first using APTUser.
▼ SECTIONS
will often face a steep learning curve, and when the end requirement involves Time-Saving Pre-Configuration
T-Cube Overview In order to further reduce the time required to
Benchtop configure our range of apt™ controllers, an offline
Overview pre-configuration utility, APTConfig, is supplied
Rack System with all units.
Overview
As an example, this utility can be used to associate
DC Servo
Thorlabs’ stages and actuators with individual
Stepper Motor
motor drive channels, thus allowing the system to
automatically set a large number of system
Piezo/Strain parameter defaults. This offline configuration
Gauge
eliminates the need to write the large amounts of
Auto-Alignment initialization code often required when using other
control systems, greatly reducing the time taken
Solenoid
when developing custom applications. Many other
apt Control preconfigured settings can be made by using the
Software
APTConfig utility.
Tutorials apt™ Server – The Engine for Integration
Software Solutions
The apt™ Server lies at the heart of the apt™
system. This software engine sits underneath the
operation of both APTUser and APTConfig and
makes the functionality of both utilities easily
Full Version Available accessible. The apt™ Server actually comprises a
in the Download collection of cooperating ActiveX® Controls (see
Section at aside) and associated support libraries that provide
www.thorlabs.com a tool kit of graphical instrument panels and
associated programming interfaces. It is this set of
ActiveX® Controls that allow apt™ functionality
to be incorporated quickly and easily into custom
applications.
ActiveX® Controls allow apt™ motion control and alignment functionality to be incorporated quickly and easily
into custom applications. ActiveX® Controls are pre-compiled software functional blocks (or components) that
typically include both a graphical user interface (GUI) and programming
(software function) interface. There are many such ActiveX®
Controls available to the Windows software developer,
providing an enormous range of pre-compiled functionality
for use in their own custom (or client) applications. The
ActiveX® Controls supplied with the apt™ system provide
all of the GUI and programmability required to operate and
control the full range of apt™ controllers (T-Cube,
benchtop, and rack-based variants). For example, the Motor
ActiveX® Control provides a complete instrument panel
allowing for full manual control of our stepper motor driver units. In
addition, the associated programming interface allows the software developer to
automate the operation of the motor in an integration application.
654 www.thorlabs.com
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CHAPTERS ▼
apt™ Control Software Overview (Page 2 of 3)
Manual Stages
Multiple Development Environment Taking Visual Basic as an example, a fully functional apt™ motor control
Support – Your Choice instrument panel can be incorporated into an end application literally within a Motorized Stages
Language compatibility is one of the first minute with a single drag-and-drop operation, a single serial number setting, and a
Multi-Axis
questions often posed by a system developer. single line of code. Unlike many other motion control software libraries available, Platforms
Anticipating that our customers will want to use a the apt™ system provides complete prewritten GUIs for use in custom applications.
Actuators
wide variety of software development languages Consequently, a large amount of development time is saved by eliminating the need
and tools when architecting their solutions, we to write code to provide essential end user interface capability. These instrument Controllers
have engineered the apt™ Server to be ActiveX® panels can also be used during software development or when commissioning and
compliant. ActiveX® is a language independent configuring the system to alter essential settings. In the finished application, it is also SECTIONS ▼
interfacing technology supported by a large very easy to hide these full parameter access graphical panels from the end user in
number of Windows-based software development order to prevent inadvertent changes to parameters. T-Cube Overview
environments. Using our apt™ controllers, it is Comprehensive Programming Interfaces Benchtop
possible to create custom alignment applications We recognize that it is crucially important that the apt™ Server makes available all Overview
with environments such as LabVIEW™, Visual required parameters and operating modes through its programming interfaces. Rack System
Basic, Visual C++, Borland C++, HP VEE, Overview
Matlab, and even Microsoft Office via VBA We have taken every available system setting and command and exposed them to
DC Servo
(Visual Basic for Applications). Certain .NET support the vast range of integrated software applications that can be built around
environments (e.g. VB.NET, C#.NET) will also the apt™ system. Hundreds of software commands and settings exist to ensure full Stepper Motor
support ActiveX® through Microsoft interop flexibility and adaptability when automating the operation of our controllers.
Piezo/Strain
technology. Multithreading Gauge
When developing custom applications on a PC, it is important to ensure that the Auto-Alignment
automated process itself can execute without disruption (to maintain required
alignment time for example). Additionally, a well-written client application will also Solenoid
provide feedback to the user via its GUI and allow operator intervention at any time
apt Control
should an error condition or other event occur. In many cases, a Software
motion control application will also be required to interact with
Tutorials
other system hardware such as device characterization and
acquisition systems, laser sources, robotic units, and environment
control units. The system engineer is faced with supporting all of
the above within a single
application while also overcoming
the consequent issues of software
latency from the end user’s
perspective (e.g. due to polling
of equipment).
To address these fundamental
application issues, we have built a
multithreading and event
triggering capability into the
apt™ Server. Multithreading is
deployed to isolate operation of
the apt™ hardware completely
from that of the end application.
In this way, an end client application can engage in intensive
processing (such as data acquisition or number crunching) without affecting
the operation of the apt™ controllers. Additionally, we have ensured that
the graphical instrument panels are themselves executed in a separate
processing thread. This unique approach taken in the apt™ Server ensures
that the graphical panels remain fully responsive even when the end
application is busy on some intensive processing activity. Always being able
to access apt™ controller settings via their GUI panels is extremely useful when
Rapid Application Development – trying to optimize software routines, even if an automated sequence is running.
Drag and Drop Event triggering is the software mechanism by which an apt™ ActiveX® Control
One of the key benefits using the apt™ ActiveX® can inform the client application of some event or occurrence. In the apt™ system,
Controls is the speed with which the associated this mechanism is effectively used to end motor movement and other lengthy
apt™ functionality can be incorporated into a operations. By responding to these events, a custom end application does not need
custom alignment application. to sit and poll for lengthy operations, which improves the overall system
performance.
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Motion Control
The gradient search algorithm allows the NanoTrak™ to operate similar to a DC Servo
Max
compass finding the North Pole, pointing in the direction of peak power. The
sensitivity of the search is such that even with small power gradients (far away Stepper Motor
from the peak power) the NanoTrak™ will decide in which direction the peak Piezo/Strain
power is located. This information can then be used to make large movements in Gauge
the correct direction without having to map or search a large area. Gradient Auto-Alignment
Aligning
Horizontal Scan Circle Solenoid
In the proximity of the peak power, the gradient of the optical profile is much
smaller, indicating that smaller corrective or compensating movement is required apt Control
to align the components. NanoTrak™ automatically adjusts the magnitude of By detecting the gradient of the power at any Software
the movements. With the components aligned at the peak power position, the given position, the NanoTrak™ can adjust that
Tutorials
gradient changes to zero, indicating that optimum coupling position until the power is maximized and the
is achieved. gradient becomes zero. This is achieved by
scanning over the contours in a circular path to
Maintaining establish the position of the maximum signal
The dynamic behavior of the NanoTrak™ allows it to continue the alignment on the circular trajectory. The origin of the scan
process indefinitely. Should the components change position, the gradient search circle is then moved in the direction of the
detects the change and makes a corrective move. maximum signal.
Patent
6,467,762
BNT001/IR
(See Pages 648 – 649)
MAX609
(See Page 570)
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Motion Control
Amplitude
requirements or dithering continued at smaller Controllers
amplitudes for active continuous alignment in
applications that suffer from drift. SECTIONS M
The speeds of response of the control unit and the
T-Cube Overview
piezo-controlled nanopositioners are measured in
milliseconds, and consequently, the time taken Time Benchtop
Overview
from signal acquisition (when the scanning covers
Rack System
the maximum area) to achieve alignment and Overview
maximum optical transmission is of the order of Optical Power
tens of milliseconds. DC Servo
Stepper Motor
Phase Sensitive Detection
Figure 4 By considering only the vertical component of Piezo/Strain
Gauge
Phase Angle Between Optical Power the motion and plotting the amplitude against
and Vertical Motion time, this produces a sine wave, as shown above Auto-Alignment
(Figure 3). At t0, the vertical motion is at the
maximum, however, the power does not reach Solenoid
Optical Power
a maximum until t1. Similarly, the motion is at apt Control
a minimum at time t2, whereas the minimum Software
Toward Maximum power is not reached until t3. Therefore, the Tutorials
optical power lags the vertical motion by a
phase angle (Figure 4).
By detecting the phase of the optical power
Phase Angle
signal, the NanoTrak™ can automatically align
two components. Once the NanoTrak™ has
Vertical Motion
found the maximum signal, it locks on to it, and
even if one of the components is moved slightly,
the NanoTrak™ corrects for the movement to
maintain the maximum power.
Summary
The NanoTrak™ from Thorlabs can automatically align fibers to
devices such as waveguides in less than one second. It can dramatically
Multi-Axis Platforms simplify characterization and pigtailing procedures, and can ensure
drift-free positioning and accurate data acquisition. By using the
NanoTrak™ in auto-alignment systems there are significant
advantages to be gained because of the improvement in the alignment
process.
Available
I Scanning and Searching to Find a Transmitted Optical Signal
I Rapidly Acquiring a Throughput Optical Signal
I
in Three,
Four, Maximizing the Optical Signal Through Constant Adjustment
Five, and of the Appropriate Position of the Piezo Actuators
Six Axis I Active Real-Time Compensating of Mechanical Crosstalk on
Fully Customizable
Environmental Disturbances Such as Temperature Change and
Vibration
I Countering Bonding Forces During Pigtailing Operation,
Eliminating Erratic UV Curing and Other Undesirable Effects
See pages 541 - 588
www.thorlabs.com 659