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IEEE SENSORS JOURNAL, VOL. 15, NO.

7, JULY 2015 3947

An Inductive Angular Displacement Sensor Based


on Planar Coil and Contrate Rotor
Qifu Tang, Donglin Peng, Liang Wu, and Xihou Chen

Abstract— This paper introduces a noncontact, low-cost, and resolution, accuracy or miniaturization, they have superior
reliable inductive sensor for angular displacement measurement. performance and hence are widely used in harsh working
It is suitable to work in harsh industrial environments. environments [7]–[14], for that inductive techniques are less
The sensor has simple structure consisting of three key
parts: 1) a ferromagnetic stator, which is a pure plane; affected by undesired matter like water, dust, or oil, and
2) a ferromagnetic rotor, which has face slots; and 3) four usually use symmetrical structure to cancel electromagnetic
layers of planar copper coils, including primary and secondary noise [15], [16]. Recent inductive sensors trend to use printed
coils. Primary coils are supplied with two orthogonal 4000-Hz ac, circuit board (PCB) [17] or other technologies [18], [19] to
and secondary coils output a signal whose phase is proportional lower sensor cost, improve compactness, etc. References [15],
to angular displacement. Primary coils are designed with
sinusoidal shape, so that magnetic field between the stator [20], and [21] introduce three types of inductive sensors, an
and rotor has approximately sinusoidal distribution, and absolute linear position sensor, an absolute angular position
finally linearity between the phase variation of output signal and sensor and an incremental angle sensor, which are all based
angular displacement is well helped by this design. The structure on PCB technology. PCB technology has a strength that it
and working principles of the sensor are explained in detail. can easily control coil layout to meet special requirement that
Moreover, a sensor model was simulated to verify the feasibility
of the sensor working principles and a sensor prototype was traditional coil-making technology can’t. The planar angular
designed for actual experiment. At last actual experiment results displacement sensor presented in this paper also works on
are given and analyzed, showing that the sensor prototype inductive techniques and it utilizes a PCB to make coils of
has achieved accuracy better than ±12 arcsec in the range of which primary coils have sinusoidal shape. Besides common
0°–360°, and this kind of sensor may have a better performance advantages inductive sensors have, this sensor has other advan-
by improving the layout of primary coils and front-end
signal-process circuit. tages compared with traditional angular displacement sensors,
e.g., resolvers and round inductosyns. Resolvers have trouble
Index Terms— Non-contact inductive sensor, angular to make uniform coils, especially complex coils to overcome
displacement, planar coils, contrate rotor, sinusoidal shape.
harmonics [22]–[24] introduced by sensor mechanical struc-
ture or unsymmetrical coils or excitations. Though inductosyns
I. I NTRODUCTION have no trouble like resolvers, they have very weak output
voltage [25], [26] which is even in microvolt scale, as a result
T HERE are various sensors for angular displacement mea-
surement, such as optical encoders that can realize high
resolution and accuracy [1], [2], microwave-based devices
electrical part has heavy work to get smooth signals from sen-
sor output signals. Relatively, this paper presents a new sensor
structure which can avoid disadvantages that exist in resolvers
that have high sensitivity, resolution and the advantage of
and inductosyns. The sensor integrates primary and secondary
miniaturization [3]–[5], capacitive sensors that also have high
sensitivity and resolution [6], and inductive sensors that have coils into a single PCB which can offer fairly uniform repeated
coil cells compared with resolvers. Moreover, primary coils
strengths in applications for rough industrial conditions [7].
Though inductive sensors don’t have superiority in sensitivity, are designed with sinusoidal shape in order to get magnetic
field with sinusoidal distribution between the stator and rotor.
Manuscript received November 26, 2014; revised January 11, 2015; What’s more, the sensor employs a ferromagnetic stator as
accepted February 11, 2015. Date of publication February 16, 2015; date the base plane to fix the PCB and meanwhile help enhance
of current version May 19, 2015. This work was supported in part by magnetic field density and form sinusoidal distribution.
the National High Technology Research and Development Program (863
Program) of China under Grant 2012AA041202, in part by the National Following section I, section II introduces the sensor
Natural Science Foundation of China under Grant 51127001, and in part by structure and working principles in detail. Section III
the Major National Scientific Instrument and Equipment Development Project introduces the simulation of a sensor model. Section IV
under Grand 2013YQ220893. The associate editor coordinating the review of
this paper and approving it for publication was Prof. Zeynep Celik-Butler. introduces the experiment of a sensor prototype and according
(Corresponding author: Donglin Peng.) results. At last, conclusions are summarized and discussed
Q. Tang is with the State Key Laboratory of Mechanical Transmission, in section V.
Chongqing University, Chongqing 400044, China (e-mail: sealyl@126.com).
D. Peng, L. Wu, and X. Chen are with the Engineering Research Center
of Mechanical Testing Technology and Equipment, Ministry of Education, II. S TRUCTURE AND M EASUREMENT P RINCIPLES
Chongqing University of Technology, Chongqing 400054, China (e-mail:
pdl@cqut.edu.cn; wh0219@cqut.edu.cn; cxh0458@cqut.edu.cn). A. Structure of the Sensor
Color versions of one or more of the figures in this paper are available
online at http://ieeexplore.ieee.org. As shown in Fig.1, the sensor mainly consists of three
Digital Object Identifier 10.1109/JSEN.2015.2404349 components, including a stator, a rotor and four layers of
1530-437X © 2015 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
See http://www.ieee.org/publications_standards/publications/rights/index.html for more information.
3948 IEEE SENSORS JOURNAL, VOL. 15, NO. 7, JULY 2015

Fig. 1. Structure diagram of the angular displacement sensor. (a) Overall view. (b) Exploded view.

Fig. 2. The magnetic field between the stator and rotor.

copper coils. The stator is a pure plane while the rotor has and rotor will have a distribution as Fig.2 shows. Because the
slots evenly divided in its face. They are both made of the rotor is made of ferromagnetic material, the magnetic density
same ferromagnetic material steel_1010. All coils are placed of the area covered by rotor tooth, BT , is greater than B S ,
between the stator and rotor, and they keep stationary as well that of the area covered by rotor slot. Taking the shape of
as the stator when making measurement. Primary coils have C1 and C3 into consideration, the magnetic flux φa (t, θ ) in
four circles, named coil C1, C2, C3 and C4 in Fig. 1. They are secondary coils coming from the excitation ea (t) is calculated
all designed with sinusoidal shape, and in space there is 1/4 of by Eq. (1).
the sinusoidal period difference between adjacent circles. The ⎛ ⎞
θ+π / N
number of sinusoidal periods in each circle of primary coil θ 2h B T h sin(Nθ )dθ
is equal to the number of slots in the rotor. C1 and C2 have φa (t, θ ) = N ⎝  ⎠ (1)
θ+2π N
+ θ+π / N/ 2h B S h sin(Nθ )dθ
the same wound direction but different from C3 and C4. C1
and C3 are supplied with the excitation of alternating current where N is the number of sinusoidal periods in each circle of
(AC) which has 90° phase difference from the excitation for primary coil, θ is the angular displacement, h is the radius of
C2 and C4. Secondary coils are theoretically in the same middle line of primary sinusoidal coils, h is the amplitude
plane as primary ones, including inner and outer circles of of the sinusoidal coils.
coils. Inner and outer secondary coils have different wound Together with ea (t), Eq. (1) can be expressed as
directions.
4 Ahh sin(ωt) · cos(Nθ ) · (R S − RT )
φa (t, θ ) = (2)
B. Measurement Principles of the Sensor r a RT R S
Like other phase-detect-based angular sensors, this sensor is where ra is the AC impedance of C1 and C3, RT and R S are
designed to produce a sinusoidal signal whose phase is propor- the reluctance between the stator and rotor where there is a
tional to the angular displacement. Coils C1 and C3 are driven rotor tooth and a rotor slot respectively.
by the excitation ea (t) = Asin(ωt), while coils C2 and C4 According to the Faraday’s law, the electromotive
are driven by the excitation eb (t) = Acos(ωt). When only force (EMF) ea (t, θ ) of secondary coils induced singly from
ea (t) works in the sensor, the magnetic field between the stator the magnetic field generated by C1 and C2 is expressed
TANG et al.: INDUCTIVE ANGULAR DISPLACEMENT SENSOR BASED ON PLANAR COIL AND CONTRATE ROTOR 3949

Fig. 3. Diagram of processing circuit for output signal of the sensor and angle information obtaining method based on the sensor signal and reference signal.

as Eq. (3). Using Eq. (2) and (3), ea (t, θ ) can be written  (t,θ ), the method employed for this sensor is to
signal eab
as Eq. (4). make comparison between eab  (t,θ ) and a reference signal.

dφa (t, θ ) The comparison is carried out using digital rather than analog
ea (t, θ ) = (3)  (t,θ ) is an analog signal, so firstly it is transformed
signals. eab
dt
4ω Ahh cos(ωt) · cos(Nθ ) · (R S − RT ) to a square signal, named Sm , by the weak signal conditioning
ea (t, θ ) = (4) and zero-cross detecting circuit, then Sm is compared with the
r a RT R S
reference signal Sr as shown in Fig.3. Sr is also a square signal
Likewise, when only one excitation eb (t) works in the and it has the same period T as excitations ea (t) and eb (t).
sensor, the magnetic flux φb (t, θ ) in secondary coils can The comparison between Sm and Sr is actually to count time
be calculated similarly as Eq. (1). However, φb (t, θ ) has from rising edge of Sr to that of Sm . The time interval
90° phase difference from φa (t, θ ) in θ because of the 1/4 of t varies with the rotation of rotor and has a relation with θ
the sinusoidal period difference between adjacent primary as shown by Eq. (9).
circles, therefore φb (t, θ ) is expressed as  
⎛ ⎞ n t
θ+3π / 2N θ = 2π + (0 ≤ n < N) (9)
θ+π / 2N 2h BT h sin(Nθ )dθ N T
φb (t, θ ) = N ⎝  ⎠ (5)
θ+5π 2N
+ θ+3π //2N 2h B S h sin(Nθ )dθ where n is the number of T that Sm travels relative to Sr .
Together with eb (t), Eq. (5) and EMF eb (t, θ ) of secondary
III. S IMULATION OF THE S ENSOR M ODEL
coils induced singly from the magnetic field generated
by C2 and C4 can be expressed as A simulation model of the sensor was designed in magnetic
4 Ahh cos(ωt) · sin(Nθ ) · (R S − RT ) finite element analysis (FEA) software Ansoft Maxwell 12.1
φb (t, θ ) = − (6) and its structure is the same as Fig.1 shows. Primary coils
r b RT R S have 24 sinusoidal periods in a circle, the rotor accordingly has
4ω Ahh sin(ωt) · sin(Nθ ) · (R S − RT )
eb (t, θ ) = (7) 24 slots. The radius of middle line of primary sinusoidal coils
r b RT R S is 41mm and the amplitude of these sinusoidal coils is 4mm.
where rb is the AC impedance of C2 and C4, it is equal to ra . Radiuses of middle lines of inner and outer secondary coils
Therefore, when excitations ea (t) and eb (t) both work are 32.5mm and 50mm. Two excitations for primary coils,
in the sensor, the magnetic flux in secondary coils is the ea (t) and eb (t), have the frequency of 4000Hz and amplitude
superposition of φa (t, θ ) and φb (t, θ ), and then total EMF of 5V. Material of all coils is set to copper. Material of stator
is the sum of ea (t, θ ) and eb (t, θ ), written as Eq. (8). and rotor is set to steel_1010. The distance between stator and
 rotor is set to 1mm. Inner and outer radiuses of stator and rotor
eab (t, θ ) = ea (t, θ ) + eb (t, θ )
are 30mm and 60mm respectively. Rotor slot depth is 2.8mm.
4ω Ahh · (R S − RT ) · cos(ωt − Nθ )
= (8) To reduce calculation time, thicknesses of stator and rotor are
r a RT R S set to only 0.5mm and 5mm. However, sizes mentioned above
From Eq. (8), it is concluded that eab (t,θ ) is a time- of the sensor model are not strict very much, because this
varying sinusoidal signal whose phase is proportional to model aims to obtain the more accurate relation between EMF
the angular displacement. To obtain angle information from of secondary coils and angular displacement qualitatively,
3950 IEEE SENSORS JOURNAL, VOL. 15, NO. 7, JULY 2015

Fig. 4. EMF of secondary coils under different working conditions of two excitations when rotor makes 15° rotation with a step of 0.5°; different curves
in (a), (b) and (d) represent secondary EMFs of different positions of the rotor. (a) Secondary EMF when ea (t) is effective only. (b) Secondary EMF when
eb (t) is effective only. (c) Contrast between theoretical and actual amplitude variation of EMFs in (a) and (b). (d) ea (t) and eb (t) are both effective.

Fig. 5. Variation of phase (θ  ) of secondary EMF eab


 (t, θ ) with the rotation of rotor, where θ  = 24θ .


i.e. eab (t, θ ) and θ , than simple mathematical analysis. of 15° rotation of rotor with a step of 0.5°, there are output
According to measurement principles of the sensor, when there EMF curves of secondary coils as shown in Fig.4 (a) and (b).
is only one excitation working, EMF of secondary coils has Theoretically when the rotor rotates, the amplitude of sec-
the forms as Eq. (4) and (7) indicate. In the simulation of this ondary EMF under single excitation should vary following a
sensor model, two excitations are set singly and as a result sinusoidal curve, therefore amplitude variations of secondary
TANG et al.: INDUCTIVE ANGULAR DISPLACEMENT SENSOR BASED ON PLANAR COIL AND CONTRATE ROTOR 3951

Fig. 6. Density and distribution of magnetic field when stator is set to non-ferromagnetic and ferromagnetic material, respectively. (a) Stator material is set
to vacuum. (b) Stator material is set to steel_1010.

EMF curves of Fig.4 (a) and (b) are extracted and given are shown as Fig.6. When stator is set to steel_1010, magnetic
in Fig.4 (c), named actual curves, while standard sinusoidal field has higher density and area-bigger distribution than that
curves corresponding to two actual curves are also given, when stator is set to vacuum. The distribution of magnetic
named theoretical curves. It should be noted that theoretical field has clearer space periods along the sensor.
curves are added a +2mV offset deliberately for clear identi-
fication from actual curves because actual curves are close to IV. E XPERIMENT AND R ESULTS
theoretical ones. The deviations shown in Fig.4 (c) of actual A sensor prototype was designed according to the simula-
curves from theoretical ones can cause nonlinearity from tion model, as shown in Fig.7 (a). Primary and secondary coils
t to θ in Eq. (9), but this kind of deviation may be reduced are made in an annular PCB whose thickness is about 0.8mm.
easily by adjusting the shape of primary coil of a given sensor. The stator has a 0.8mm-thick countersink to install the PCB
However, here this paper won’t introduce the detail about and 6 pylomes to allow it to be mounted on the marble frame
adjusting primary coil shape. When two excitations are both of the experiment platform. Key dimensions of the sensor
set to be effective, the output EMF curves of secondary coils prototype are given in Fig.7 (a). The rotor has the nearly same
with the same rotation of rotor are shown as Fig.4 (d) where structure to that shown in Fig.1, but it is different from the
curves have nearly identical amplitude but different phase. configuration in Fig.1 that the rotor is configured above the
If the phase of secondary EMF eab  (t, θ ) is expressed with
stator in the experiment due to the platform structure. Fig.7 (b)
  
θ , then θ has the relation θ = 24θ with θ according to shows the overall view of the experiment. The marble frame
Eq. (8) and the number of sinusoidal periods in each circle of is used to install a motor, a rotary table, an angle encoder
 (t, θ ) varies for 24 periods as
primary coil. In other words, eab and the sensor prototype. An industrial computer is equipped
θ varies from 0° to 360°. Fig.5 shows that θ  keeps almost for the motor servo system and data acquisition (DAQ). The
constant as rotor rotates with a constant step, thus t, gained circuits for the sensor were integrated into a box in order
by processing secondary EMF using the method illustrated in to keep reliable connections. The rotary shaft for connecting
Fig.3, can have good linearity with θ. sensor rotor is coaxial to the shaft that connects the angle
Though the sensor has a lot of parameters that can affect encoder which is used to examine and correct the sensor.
the relation between EMF of secondary coils and angular The sensor and angle encoder are driven by the rotary table
displacement, such as rotor slot depth, distance between stator in the experiment platform. Position data of the sensor and
and rotor, distance between primary and secondary coils, it angle encoder are synchronously acquired by the circuit and
needs to be emphasized that the material of stator is a key then transmitted to the computer via a RS232 port.
factor to the sensor. The stator, if made of ferromagnetic The error of the sensor has been tested before and after
material, not only can enhance the magnetic field received correction respectively in the range of 0° to 360°, and
by secondary coils, but also can improve the distribution test results are shown in Fig.8. The experiment adopts
of magnetic field between stator and rotor. That is because HEIDENHAIN RON886 angle encoder which has 1 arcsec
ferromagnetic stator attracts more magnetic filed generated by accuracy to perform examination and correction for the sensor.
primary coils to transmit in the direction vertical to stator Before correction, as shown in Fig.8 (a) and (b), test results
plane and meanwhile reduces reluctance of closed path of indicate that the sensor has very regular error. From 0° to 360°,
the magnetic field. Contrast simulations were made and the the error varies 24 times obviously because primary coils
density and distributions of magnetic field in two simulations have 24 sinusoidal periods, and in the range of 0° to 15°
3952 IEEE SENSORS JOURNAL, VOL. 15, NO. 7, JULY 2015

Fig. 7. Configuration of the sensor prototype and pictures of experiment. (a) Configuration of the sensor prototype. (b) Overall view of experiment.

Fig. 8. Error of the sensor compared with HEIDENHAIN RON886 angle encoder: (a) original error in (0°-360°); (b) original error in one period
(0°-15°); and (c) error after correction.

the sensor mainly has first- and second-order error. Therefore, and actual experiment. The sensor takes use of planar
the sensor can be corrected easily. After correction, as shown sinusoidal-shape primary coils to generate magnetic field
in Fig.8 (c), test result indicates that the sensor achieves which has sinusoidal distribution between the stator and rotor.
accuracy of less than 12 arcsec in the full range. It was proved by the simulation that this sinusoidal layout
offers good linearity between the phase of output signal and
V. C ONCLUSION angular displacement. However, because of the asymmetric
The structure of a non-contact inductive angular layout of primary coils in PCB, the experiment shows that the
displacement sensor is described and its working principle sensor prototype has big original error. According to the error
is verified feasible by theoretical analysis, model simulation regularity, this kind of error may be reduced by reorganizing
TANG et al.: INDUCTIVE ANGULAR DISPLACEMENT SENSOR BASED ON PLANAR COIL AND CONTRATE ROTOR 3953

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3954 IEEE SENSORS JOURNAL, VOL. 15, NO. 7, JULY 2015

Liang Wu received the B.Eng. and M.Eng. degrees Xihou Chen received the M.Eng. and
in measurement and instrumentation from the Ph.D. (Eng.) degrees from Chongqing University, in
Chongqing University of Technology, Chongqing, 2004 and 2007, respectively. Since 2007, he has been
China, in 2008 and 2011, respectively. He is a Professor with the Chongqing University of
currently pursuing the Ph.D. degree at Chongqing Technology. He mainly focuses on the research of
University. Since 2012, he has been a Research displacement sensors and technologies of precision
Assistant with the Engineering Research Center mechanical measurement.
of Mechanical Testing Technology and Equipment,
Ministry of Education, Chongqing University of
Technology. His research interests are modeling and
simulation of sensors for displacement measurement.

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