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(19)

*EP004027135A1*
(11) EP 4 027 135 A1
(12) EUROPEAN PATENT APPLICATION

(43) Date of publication: (51) International Patent Classification (IPC):


13.07.2022 Bulletin 2022/28 G01N 23/04 (2018.01)

(21) Application number: 22150304.8 (52) Cooperative Patent Classification (CPC):


G01N 23/04
(22) Date of filing: 05.01.2022

(84) Designated Contracting States: (72) Inventors:


AL AT BE BG CH CY CZ DE DK EE ES FI FR GB • SUGIMOTO, Kazuyuki
GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO Ritto-shi, Shiga, 520-3026 (JP)
PL PT RO RS SE SI SK SM TR • KUDO, Daisuke
Designated Extension States: Ritto-shi, Shiga, 520-3026 (JP)
BA ME
Designated Validation States: (74) Representative: Global IP Europe
KH MA MD TN Patentanwaltskanzlei
Pfarrstraße 14
(30) Priority: 08.01.2021 JP 2021002308 80538 München (DE)

(71) Applicant: ISHIDA CO., Ltd.


Kyoto-shi,
Kyoto 606-8392 (JP)

(54) X-RAY INSPECTION SYSTEM, X-RAY INSPECTION DEVICE, AND X-RAY INSPECTION
METHOD

(57) PROBLEM TO BE SOLVED BY THE INVEN- sor, an inspection unit 28c that inspects for poor quality
TION in the inspected objects based on the transmitted X-ray
An object of the present invention is to suppress the image, a position information generation unit 28e that
number of rejected good-quality products in an X-ray in- generates position information E relating to positions of
spection system in which articles assessed to be poor the inspected objects on the conveying unit determined
quality are rejected. to be poor quality, a robot 30 that take the inspection
SOLUTION objects P away from the conveying unit with a suction
A X-ray inspection system 100 includes a conveying ejector, and a robot control unit 40 that controls the action
unit 10 that continuously conveys inspected objects at of the robot. The robot control unit, based on the position
random positions, an X-ray irradiator 22 that irradiates information and a fixed-interval reference signal S issued
the conveying unit with X-rays, a line sensor 24 that sens- every time the conveying unit advances a first distance,
es X-rays transmitted through the inspected objects, an controls the action of the robot so that the suction ejector
image generation unit 28b that generates a transmitted comes near to and takes away the inspected objects de-
X-ray image based on a sensing result from the line sen- termined to be poor quality.
EP 4 027 135 A1

Processed by Luminess, 75001 PARIS (FR)


1 EP 4 027 135 A1 2

Description is performed on a large number of articles continuously


conveyed by a conveying unit, and as a result of the X-
TECHNICAL FIELD ray inspection, articles assessed to be poor quality are
rejected from the conveying unit, the X-ray inspection
[0001] The present invention relates to an X-ray in- 5 system being capable of suppressing the number of re-
spection system, and more specifically, relates to an X- jected good-quality products.
ray inspection system in which a large number of articles [0007] It is another object of the present invention to
continuously conveyed by a conveying unit are subjected provide an X-ray inspection apparatus and an X-ray in-
to X-ray inspection, and as a result of the X-ray inspec- spection method that are used in such an X-ray inspec-
tion, articles assessed to be poor quality are rejected 10 tion system.
from the conveying unit. The present invention also re-
lates to an X-ray inspection apparatus and an X-ray in- <Solution to Problem>
spection method that are used in the X-ray inspection
system. [0008] An X-ray inspection system according to a first
15 aspect of the present invention includes a conveying unit,
BACKGROUND ART an X-ray irradiation unit, a transmitted X-ray sensing unit,
an image generation unit, an inspection unit, a position
[0002] There are known in the prior art X-ray inspection information generation unit, a robot, and a first control
systems in which an X-ray inspection is performed on a unit. The conveying unit continuously conveys a large
large number of articles continuously conveyed in ran- 20 number of articles at random positions. The X-ray irradi-
dom positions by a conveying unit, and articles assessed ation unit irradiates the articles on the conveying unit with
to be poor quality (referred to hereinafter as poor-quality X-rays. The transmitted X-ray sensing unit senses X-rays
products) are rejected from the conveying unit by, for transmitted through the articles. The image generation
example, an arm-type rejection apparatus. In such an X- unit generates a transmitted X-ray image based on a
ray inspection system, there is a risk that even if, for ex- 25 sensing result from the transmitted X-ray sensing unit.
ample, there is only one poor-quality product, articles on The inspection unit inspects for poor quality in the articles
the conveying unit that surround that poor-quality product based on the transmitted X-ray image. The position in-
and that are not assessed to be poor quality (referred to formation generation unit, based on an inspection result
hereinafter as good-quality products) will also be rejected from the inspection unit, generates position information
in a large amount. 30 relating to a position of the article determined to be poor
[0003] In the X-ray inspection system of Patent Liter- quality on the conveying unit. The robot has a removal
ature 1 (Japanese Laid-open Patent Publication No. mechanism for removing the article. The robot is config-
2004-279059), to reduce the number of rejected good- ured to move the removal mechanism in at least a first
quality articles, a plurality of inspection regions are es- direction orthogonal to a conveying direction of the con-
tablished in a direction orthogonal to the conveying di- 35 veying unit. The robot, by using the removal mechanism,
rection of the conveying unit, an arm-type rejection ap- takes the article determined by the inspection unit to be
paratus is provided separately for each of the inspection poor quality away from the conveying unit. The first con-
regions, and only the rejection apparatus corresponding trol unit, based on at least the position information and a
to the inspection region containing a poor-quality product fixed-interval reference signal issued every time the con-
is activated. 40 veying unit advances a first distance, controls the action
[0004] The X-ray inspection system of Patent Litera- of the robot so that the removal mechanism comes near
ture 1 (Japanese Laid-open Patent Publication No. to and takes away the article determined by the inspec-
2004-279059) makes it possible for the number of good- tion unit to be poor quality.
quality products rejected from the conveying unit to be [0009] In the X-ray inspection system according to the
less than when a single arm-type rejection apparatus is 45 first aspect, the amount of good-quality products taken
provided for all of the inspection regions. away along with poor-quality products can be reduced
because the action of the robot is controlled to take poor-
SUMMARY OF THE INVENTION quality products away from the conveying unit based on
position information relating to positions of poor-quality
<Technical Problem> 50 products on the conveying unit.
[0010] The step in which poor quality in the articles is
[0005] However, even in the X-ray inspection system inspected and position information is generated based
of Patent Literature 1 (Japanese Laid-open Patent Pub- on the transmitted X-ray image requires a certain amount
lication No. 2004-279059), there is a risk that a consid- of computation and processing time, and the computation
erable number of good-quality products will still be re- 55 and processing time is not the same every time. There-
jected. fore, when the robot is controlled according to the timing
[0006] It is an object of the present invention to provide at which the position information is generated, there is a
an X-ray inspection system in which an X-ray inspection risk of misalignment between a position where the robot

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3 EP 4 027 135 A1 4

moves to take an article and a position where a poor- when, for example, the number of poor-quality products
quality product is actually present. present in the first predetermined region is large and can-
[0011] As a countermeasure to this, in the X-ray in- not be processed by the robot at the conveying velocity
spection system according to the first aspect, the first of the given moment. In addition, the conveying velocity
control unit controls the robot based on the fixed-interval 5 can be increased when the number of poor-quality prod-
reference signal issued every time the conveying unit ucts present in the predetermined region is low and there
advances a first distance. Therefore, even if there is var- is leeway in the processing capability of the robot. There-
iation in the computation and processing time required fore, the conveying velocity can be increased and the
for poor quality in the articles to be inspected and position processing capability of the X-ray inspection system can
information to be generated based on the transmitted X- 10 be improved when the number of poor-quality products
ray image, it is possible to suppress misalignment be- present in the predetermined region is low, while realizing
tween a position where the robot moves to take an article a highly reliable X-ray inspection system that does not
and a position where a poor-quality product is actually fail to remove any poor-quality products.
present. [0018] An X-ray inspection system according to a fifth
[0012] An X-ray inspection system according to a sec- 15 aspect of the present invention is the X-ray inspection
ond aspect of the present invention is the X-ray inspection system according to the fourth aspect, wherein the image
system according to the first aspect, wherein the robot generation unit corrects the transmitted X-ray image in
is also configured to move the removal mechanism in a accordance with the conveying velocity of the conveying
direction parallel to the conveying direction of the con- unit.
veying unit. 20 [0019] The transmitted X-ray image generated, when
[0013] In the X-ray inspection system according to the the conveying velocity of the conveying unit is a certain
second aspect, the removal mechanism can move not predetermined velocity (referred to as a reference veloc-
only in the first direction orthogonal to the conveying di- ity), by the image generation unit based on the sensing
rection, but also in a direction parallel to the conveying result from the transmitted X-ray sensing unit in a prede-
direction. Therefore, a plurality of poor-quality products 25 termined time interval is provisionally referred to as a
can be removed from the conveying unit without stopping reference transmitted X-ray image. It is assumed that
the conveying performed by the conveying unit even only the conveying velocity of the conveying unit is in-
when a plurality of poor-quality products are present on creased or reduced in relation to the reference velocity
the conveying unit in substantially the same position in without changing the distribution of articles on the con-
the conveying direction and in different positions in the 30 veying unit and the transmitted X-rays are sensed by the
first direction. transmitted X-ray sensing unit at predetermined time in-
[0014] An X-ray inspection system according to a third tervals, and the image generation unit generates a trans-
aspect of the present invention is the X-ray inspection mitted X-ray image (referred to as a first transmitted X-
system according to the first or second aspect, further ray image) based on the sensing result. In this case, the
includes a counting unit. Based on the result of the in- 35 first transmitted X-ray image is the result of stretching or
spection of the inspection unit, the counting unit counts shrinking the reference transmitted X-ray image in the
the number of articles determined to be poor quality and conveying direction of the conveying unit. Therefore, as-
present in a first predetermined region of the conveying suming that the position information generation unit has
unit. generated position information based on the first trans-
[0015] In the X-ray inspection system according to the 40 mitted X-ray image, the distribution of articles on the con-
third aspect, because the number of articles determined veying unit has not changed, but the obtained position
to be poor quality and present in the first predetermined information will be different from the position information
region of the conveying unit are counted, it is possible to generated based on the reference transmitted X-ray im-
assess, inter alia, that the robot can take away all of the age.
poor-quality products at, for example, the conveying ve- 45 [0020] Accordingly, in the X-ray inspection system of
locity of the conveying unit at the given moment. the fifth aspect, the image generation unit corrects the
[0016] An X-ray inspection system according to a transmitted X-ray image in accordance with the convey-
fourth aspect of the present invention is the X-ray inspec- ing velocity of the conveying unit, and the position infor-
tion system according to the third aspect, further includes mation generation unit generates position information
a velocity control unit. The velocity control unit changes 50 based on the corrected transmitted X-ray image. There-
a conveying velocity of the conveying unit. The velocity fore, in the X-ray inspection system of the fifth aspect,
control unit controls the conveying velocity based on a the first control unit can activate the robot at a proper
counting result from the counting unit. timing irrespective of the conveying velocity of the con-
[0017] In the X-ray inspection system of the fourth as- veying unit, and poor-quality products can be taken away
pect, the conveying velocity of the conveying unit is 55 from the conveying unit with precision.
changed based on the number of poor-quality products [0021] An X-ray inspection system according to a sixth
present in a predetermined region of the conveying unit, aspect of the present invention is the X-ray inspection
and the conveying velocity can therefore be reduced system according to any of the third to fifth aspects, fur-

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ther includes an article removal apparatus and a second and a second sending unit. The conveying unit continu-
control unit. The article removal apparatus collectively ously conveys a large number of articles at random po-
takes away the articles present on the conveying unit in sitions. The X-ray irradiation unit irradiates the articles
a second predetermined region in the conveying direc- on the conveying unit with X-rays. The transmitted X-ray
tion. The second control unit controls the action of the 5 sensing unit senses X-rays transmitted through the arti-
article removal apparatus. The second control unit acti- cles. The image generation unit generates a transmitted
vates the article removal apparatus in a case where the X-ray image based on a sensing result from the trans-
number of articles determined to be poor quality and mitted X-ray sensing unit. The inspection unit inspects
present in the first predetermined region, counted by the for poor quality in the articles based on the transmitted
counting unit, exceeds a predetermined value. 10 X-ray image. The position information generation unit,
[0022] In the X-ray inspection system of the sixth as- based on an inspection result from the inspection unit,
pect, poor-quality products can be collectively removed generates position information relating to positions of the
by the article removal apparatus when the number of article determined to be poor quality on the conveying
poor-quality products present in a predetermined region unit . The first sending unit sends a fixed-interval refer-
of the conveying unit is comparatively large and cannot 15 ence signal, which is issued every time the conveying
be processed by the robot. Therefore, a highly reliable unit advances a first distance, to a control unit that con-
X-ray inspection system that does not fail to remove any trols the action of a robot. The second sending unit sends
poor-quality products can be realized without temporarily the position information to the control unit. The robot has
stopping the X-ray inspection system (without taking the a removal mechanism for removing the article. The robot
time required to stop/restart operation of the X-ray in- 20 is configured to move the removal mechanism in at least
spection system). a first direction orthogonal to a conveying direction of the
[0023] An X-ray inspection system according to a sev- conveying unit, and by using the removal mechanism,
enth aspect of the present invention is the X-ray inspec- the robot takes the article determined by the inspection
tion system according to any of the first to sixth aspects, unit to be poor quality away from the conveying unit. The
wherein the first control unit controls the action of the 25 control unit controls the action of the robot so that the
robot such that a movement distance of the removal removal mechanism comes near to and takes away the
mechanism that takes away the articles determined to article determined by the inspection unit to be poor qual-
be poor quality reaches a minimum in a case where three ity.
or more articles determined to be poor quality are present [0029] An X-ray inspection method according to an
in a predetermined region of the conveying unit. 30 eleventh aspect of the present invention includes an X-
[0024] In the X-ray inspection system of the seventh ray irradiation step, a transmitted X-ray sensing step, an
aspect, because the removal mechanism is controlled image generation step, an inspection step, a position in-
so as to move a minimum distance, a greater number of formation generation step, a sending step, and a control
poor-quality products can be taken away from the con- step. In the X-ray irradiation step, X-rays is irradiated to
veying unit in the same processing time in comparison 35 a conveying unit that continuously conveys a large
to cases in which the movement distance of the removal number of articles at random positions. In the transmitted
mechanism is not taken into consideration. X-ray sensing step, transmitted X-rays transmitted
[0025] An X-ray inspection system according to an through the articles are sensed. In the image generation
eighth aspect of the present invention is the X-ray inspec- step, a transmitted X-ray image is generated based on
tion system according to any of the first to seventh as- 40 a result of sensing the transmitted X-rays. In the inspec-
pects, wherein at the same point in time, the conveying tion step, poor quality in the articles is inspected based
velocity of the conveying unit in the region irradiated with on the transmitted X-ray image. In the position informa-
X-rays by the X-ray irradiation unit and the conveying tion generation step, based on an inspection result from
velocity of the conveying unit in the region where the the inspection step, position information relating to a po-
robot takes away the article are the same. 45 sition of the article determined to be poor quality on the
[0026] The X-ray inspection system according to the conveying unit is generated. In the sending step, the po-
ninth aspect of the present invention is the X-ray inspec- sition information and a fixed-interval reference signal
tion system according to any of the first to eighth aspects, issued every time the conveying unit advances a first
wherein the removal mechanism uses suction to remove distance are sent to a control unit that controls the action
the article determined to be poor quality. 50 of a robot. The robot has a removal mechanism for re-
[0027] In the X-ray inspection system of the ninth as- moving the article. The robot is configured to move the
pect, poor-quality products can be quickly removed from removal mechanism in at least a first direction orthogonal
the conveying unit. to a conveying direction of the conveying unit, and, by
[0028] An X-ray inspection apparatus according to a using the removal mechanism, take the article deter-
tenth aspect of the present invention includes a convey- 55 mined to be poor quality in the inspection step away from
ing unit, an X-ray irradiation unit, a transmitted X-ray the conveying unit. In the control step, the control unit,
sensing unit, an image generation unit, an inspection unit, based on at least the reference signal and the position
a position information generation unit, a first sending unit, information, controls the action of the robot such that the

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7 EP 4 027 135 A1 8

removal mechanism comes near to and takes away the of the invention. It should be understood that various
article determined in the inspection step to be poor qual- changes can be made to the following embodiment with-
ity. out deviating from the scope and range of the invention.
[0034] The following descriptions sometimes use the
<Effect of the Invention> 5 expressions "front (front surface)," "rear (back surface),"
"upper," "lower," "left," "right," etc., for the sake of con-
[0030] In the X-ray inspection system according to the venience in order to represent directions, etc. Unless oth-
present invention, the amount of good-quality products erwise specified, the directions indicated by these ex-
taken away along with poor-quality products can be re- pressions corresponds with the directions of the arrows
duced because poor-quality products are taken away 10 shown in the drawings.
from the conveying unit by a robot based on position in-
formation relating to positions of poor-quality products (1) Overall configuration
on the conveying unit.
[0035] An X-ray inspection system 100 according to
BRIEF DESCRIPTION OF THE DRAWINGS 15 one embodiment of the present invention shall be de-
scribed with reference to FIGS. 1-3. FIG. 1 is a schematic
[0031] plan view of an X-ray inspection system 100. FIG. 2 is a
block diagram of the X-ray inspection system 100. FIG.
FIG. 1 is a schematic plan view of an X-ray inspection 3 is a schematic front view of the X-ray inspection system
system according to one embodiment of the present 20 100.
invention; [0036] The X-ray inspection system 100 is a system in
FIG. 2 is a block diagram of the X-ray inspection which an X-ray inspection is performed on a large number
system of FIG. 1; of inspection objects P (articles) continuously conveyed
FIG. 3 is a schematic front view of the X-ray inspec- at random positions to sense poor-quality products, in-
tion system of FIG. 1; 25 spection objects P determined to be poor-quality prod-
FIG. 4 is an external perspective view of a shield ucts are rejected, and inspection objects P determined
box for an X-ray inspection unit of an X-ray inspection to be good-quality products are conveyed to the next
apparatus included in the X-ray inspection system process.
of FIG. 1; [0037] The expression "inspection objects P are con-
FIG. 5 is a simplified structural drawing of the interior 30 tinuously conveyed" means that inspection objects P are
of the shield box of FIG. 4; not conveyed intermittently one-by-one with predeter-
FIG. 6 is an example of a graph of the quantity of mined spaces in between, but that inspection objects P
transmitted X-rays sensed by a line sensor of the X- are continuously conveyed (without intentional spacing).
ray inspection unit of the X-ray inspection apparatus [0038] The expression "inspection objects P are con-
of FIG. 4; 35 veyed at random positions" means that, in a plan view,
FIG. 7 is a drawing of a transmitted X-ray image the inspection objects P are conveyed in a state of having
generated by the X-ray inspection unit of the X-ray been distributed to random positions on a flat surface
inspection apparatus of FIG. 4; spreading out in a direction D2 in which the inspection
FIG. 8 is a drawing for describing a process of gen- objects P are conveyed and a direction orthogonal to the
erating position information for the X-ray inspection 40 conveying direction (referred to as a first direction D1)
apparatus included in the X-ray inspection system (see FIG. 1). In short, the inspection objects P are not
of FIG. 1, and describing a sequence by which a conveyed at the same position in the first direction D1,
robot included in the X-ray inspection system re- but are conveyed at any position in a range having a
moves poor-quality products; predetermined width (a width of a conveyor belt 13a of
FIG. 9 is a flowchart of a poor-quality product in- 45 a conveying unit 10 in forward-backward-direction, de-
spection executed by the X-ray inspection system of scribed hereinafter). In addition, inspection objects P are
FIG. 1; and not conveyed at an established distance apart from each
FIG. 10 is a flowchart of a poor-quality product re- other in the conveying direction D2, but are conveyed in
jection process during the poor-quality product in- any positional relationship. For example, there are cases
spection shown in FIG. 9. 50 in which two or more inspection objects P are conveyed
at the same position in the conveying direction D2 (in
DESCRIPTION OF EMBODIMENTS other words, at the same timing).
[0039] The inspection objects P in the present embod-
[0032] An embodiment of an X-ray inspection system iment are pieces of chicken meat. Chicken meat is not
according to the present invention shall be described be- 55 provided by way of limitation as to the type of the inspec-
low with reference to the drawings. tion objects P; the inspection objects P may be food prod-
[0033] The following embodiment is merely a specific ucts other than chicken meat, or articles other than food
example and is not intended to limit the technical range products.

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9 EP 4 027 135 A1 10

[0040] The X-ray inspection in the present embodi- be poor-quality products as a result of the inspection per-
ment is an inspection that detects foreign objects (e.g., formed by the X-ray inspection apparatus 200. The robot
in the present embodiment, bone fragments, etc.) in the 30 has a removal mechanism (in the present embodi-
inspection objects P, and determines inspection objects ment, a suction ejector 34a, described hereinafter) that
P including foreign objects to be poor-quality products 5 takes away inspection objects P. The robot 30 brings the
(foreign object inspection). Inspection objects P, which removal mechanism near an inspected object P deter-
are determined to not include foreign objects as a result mined to be a poor-quality product, and, using the re-
of the foreign object inspection, are determined to be moval mechanism, takes the inspected object P deter-
good-quality products. To avoid complicating the de- mined to be a poor-quality product away from the con-
scription below, inspection objects P determined to be 10 veying unit 10.
poor-quality products as a result of the foreign object in- [0045] The robot control unit 40 controls the actions of
spection are sometimes referred to simply as "poor-qual- the robot 30 based on at least position information E and
ity products," and inspection objects P determined to be a reference signal S (described hereinafter) sent by the
good-quality products (not determined to be poor-quality X-ray inspection apparatus 200. Particularly, in the
products) are sometimes referred to simply as "good- 15 present embodiment, the robot control unit 40 controls
quality products." the actions of the robot 30 based on position information
[0041] The foreign object inspection is merely one ex- E, a reference signal, and velocity information V (de-
ample of the X-ray inspection; the X-ray inspection may scribed hereinafter) sent by the X-ray inspection appa-
be an inspection other than a foreign object inspection. ratus 200.
For example, the X-ray inspection may be a dimension 20
inspection in which inspection objects P having a size (2) Detailed configuration
(surface area of inspection objects P in a transmitted X-
ray image) within a predetermined range are determined [0046] Details of the X-ray inspection apparatus 200,
to be good-quality products, and inspection objects P the robot 30, and the robot control unit 40 shall be de-
having a size outside of the predetermined range are 25 scribed.
determined to be poor-quality products. In addition, for
example, the X-ray inspection may be a weight inspection (2-1) X-ray inspection apparatus
in which inspection objects P having an estimated weight
(the weight of the inspection objects P estimated based [0047] The X-ray inspection apparatus 200 shall be de-
on a transmitted X-ray image) within a predetermined 30 scribed with reference to FIGS. 4-7 as well, in addition
range are determined to be good-quality products, and to FIGS. 1-3. FIG. 4 is an external perspective view of a
inspection objects P having an estimated weight outside shield box 21 for the X-ray inspection unit 20 of the X-
of the predetermined range are determined to be poor- ray inspection apparatus 200. FIG. 5 is a simplified struc-
quality products. In addition, for example, the X-ray in- tural drawing of the interior of the shield box 21. FIG. 6
spection may be a shape inspection in which inspection 35 is an example of a graph of the quantity of transmitted
objects P having no chipping, cracking, or other shape X-rays sensed by a line sensor 24 of the X-ray inspection
abnormalities are determined to be good-quality prod- unit 20 of the X-ray inspection apparatus 200 of FIG. 4.
ucts, and inspection objects P having shape abnormali- FIG. 7 is a drawing of a transmitted X-ray image gener-
ties are determined to be poor-quality products. ated by the X-ray inspection unit 20 of the X-ray inspec-
[0042] The X-ray inspection system 100 mainly in- 40 tion apparatus 200.
cludes an X-ray inspection apparatus 200, a robot 30,
and a robot control unit 40 (see FIG. 2). The X-ray in- (2-1-1) Conveying unit
spection apparatus 200 mainly has a conveying unit 10
and an X-ray inspection unit 20. [0048] The conveying unit 10 is one example of a con-
[0043] The X-ray inspection apparatus 200 receives 45 veying unit that conveys inspection objects P, which are
inspection objects P conveyed in by an upstream con- one example of articles. The conveying unit 10 continu-
veying apparatus 60, and conveys the received inspec- ously conveys a large number of inspection objects P at
tion objects P in the conveying direction D2 on the con- random positions.
veying unit 10 (see FIG. 3). The X-ray inspection unit 20 [0049] The conveying unit 10 receives inspection ob-
of the X-ray inspection apparatus 200 performs an X-ray 50 jects P conveyed by the upstream conveying apparatus
inspection on the inspection objects P conveyed by the 60, and conveys the inspection objects P such that the
conveying unit 10. The conveying unit 10 further conveys objects pass through the interior of the shield box 21 of
the inspection objects P inspected by the X-ray inspec- the X-ray inspection apparatus 200. In addition, the con-
tion unit 20 in the conveying direction D2, and the inspec- veying unit 10 conveys inspection objects P that have
tion objects P are delivered to a downstream conveying 55 passed through the interior of the shield box 21 to the
apparatus 70 (see FIG. 3). area downstream of the X-ray inspection apparatus 200.
[0044] The robot 30 takes away from the conveying The conveying unit 10 conveys inspection objects P that
unit 10 the inspection objects P that were determined to have passed through the interior of the shield box 21

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11 EP 4 027 135 A1 12

such that the objects pass through the vicinity of the robot the belt conveyor 12 has an extension/retraction drive
30. Furthermore, the conveying unit 10 delivers inspec- unit 18 that moves the roller 13b disposed at a down-
tion objects P that have not been removed by the robot stream end 12a (the end part on the side near the down-
30 or an article removal apparatus (in the present em- stream conveying apparatus 70) of the belt conveyor 12
bodiment, an extension/retraction drive unit 18, de- 5 along a direction parallel to the conveying direction D2.
scribed hereinafter), or in other words, inspection objects The extension/retraction drive unit 18 is one example of
P determined by the X-ray inspection to be good-quality an article removal apparatus.
products, to the downstream conveying apparatus 70 dis- [0056] The extension/retraction drive unit 18 switches
posed downstream of the conveying unit 10. the state of the belt conveyor 12 between a first state and
[0050] There is no limitation on the type of conveying 10 a second state by moving the roller 13b disposed at the
apparatus of the conveying unit 10, but in the present downstream end 12a of the belt conveyor 12 along a
embodiment, the conveying unit 10 has a belt conveyor direction parallel to the conveying direction D2. When
12. In the present embodiment, the conveying unit 10 the belt conveyor 12 is in the first state, the downstream
has only one belt conveyor 12, but this example is not end 12a of the belt conveyor 12 is adjacent to the down-
provided by way of limitation. For example, the conveying 15 stream conveying apparatus 70 (see the solid line in FIG.
unit 10 may have a plurality of belt conveyors 12 linked 3). When the belt conveyor 12 is in the second state, the
to each other and disposed in series along the conveying downstream end 12a of the belt conveyor 12 is away
direction D2. In addition, the conveying unit 10 may have from the downstream conveying apparatus 70 (see the
multiple types of conveying apparatuses linked to each broken line in FIG. 3).
other and disposed in series along the conveying direc- 20 [0057] When the belt conveyor 12 is in the first state,
tion D2. In the conveying unit 10, at the same point in the inspection objects P conveyed to the downstream
time, the conveying velocity of the conveying unit 10 in end 12a by the belt conveyor 12 are delivered to the
a region irradiated with X-rays by an X-ray irradiator 22 downstream conveying apparatus 70.
and the conveying velocity of the conveying unit 10 in a [0058] When the belt conveyor 12 is in the second
region (described in detail hereinafter) where the robot 25 state, the inspection objects P conveyed to the down-
30 takes away inspection objects P are the same. stream end 12a of the belt conveyor 12 are not delivered
[0051] The belt conveyor 12 has an endless conveyor to the downstream conveying apparatus 70, but instead
belt 13a, rollers 13b around which the conveyor belt 13a fall into a recovery box 50 disposed underneath the belt
is wound, and a conveyor motor 14 (see FIGS. 2 and 3). conveyor 12 (see FIG. 3). Due to the belt conveyor 12
[0052] At least one of the rollers 13b around which the 30 being put in the second state, inspection objects P
conveyor belt 13a is wound is driven by the conveyor present in a second predetermined region in the convey-
motor 14. When the roller 13b is driven by the conveyor ing direction D2 on the conveying unit 10 (on the conveyor
motor 14, the conveyor belt 13a rotates and the inspec- belt 13a) can be collectively taken away from the con-
tion objects P carried on the conveyor belt 13a are con- veying unit 10. The term "second predetermined region"
veyed in the conveying direction D2. In the present em- 35 means a region on the conveying unit 10 containing in-
bodiment, the conveying direction D2 is rightward. spection objects P that reach the downstream end 12a
[0053] The conveyor motor 14 is a motor in which the of the belt conveyor 12 in the time period when the belt
rotational speed can be controlled by an inverter. The conveyor 12 is in the second state.
rotational speed of the conveyor motor 14 is controlled
according to a command from a control apparatus 28 40 (2-1-2) X-ray inspection unit
(described hereinafter) of the X-ray inspection apparatus
200. As a result of the rotational speed of the conveyor [0059] The X-ray inspection unit 20 irradiates the in-
motor 14 being changed, the conveying velocity of the spection objects P conveyed by the conveying unit 10
inspection objects P carried on the conveyor belt 13a is with X-rays, generates a transmitted X-ray image based
changed. 45 on the result of sensing the X-rays transmitted through
[0054] An encoder 16 is installed in the conveyor motor the inspection objects P, and inspects for poor quality in
14 (see FIG. 2). The encoder 16 detects the distance the inspection objects P based on the transmitted X-ray
over which the conveying unit 10 advances (in other image.
words, the distance over which the inspection objects P [0060] The X-ray inspection unit 20 mainly has the
conveyed by the conveying unit 10 move) and the velocity 50 shield box 21 (see FIG. 4), the X-ray irradiator 22 (see
at which the conveying unit 10 advances (in other words, FIG. 5), the line sensor 24 (see FIG. 5), a monitor 26 with
the velocity at which the inspection objects P conveyed a touch panel function (see FIG. 4), and the control ap-
by the conveying unit 10 move). The encoder 16 sends paratus 28 (see FIG. 2).
the detected distance and velocity by which the convey-
ing unit 10 advances to the control apparatus 28 of the 55 (2-1-2-1) Shield box
X-ray inspection apparatus 200.
[0055] The belt conveyor 12 of the present embodi- [0061] The shield box 21 is a casing that internally
ment is a shuttle conveyor of variable length. Specifically, houses the X-ray irradiator 22, the line sensor 24, the

7
13 EP 4 027 135 A1 14

control apparatus 28, etc. Disposed in the upper part of [0066] FIG. 6 is a graph of an example of the quantity
the front surface of the shield box 21 are the monitor 26, of transmitted X-rays sensed by the X-ray-sensing ele-
as well as a key insertion hole, a power source switch, ments 24a of the line sensor 24. The horizontal axis of
etc. (see FIG. 4). Openings 21a are formed in left and the graph corresponds to the positions of the X-ray-sens-
right side surfaces of the shield box 21 (see FIG. 4). 5 ing elements 24a. In addition, the horizontal axis of the
[0062] The conveyor belt 13a of the conveying unit 10 graph corresponds to positions in the first direction D1
is disposed inside the shield box 21 (see FIG. 3). Spe- orthogonal to the conveying direction D2 of the conveying
cifically, the conveyor belt 13a is disposed so as to pass unit 10. The vertical axis of the graph represents the
through the openings 21a formed in both side surfaces quantity of transmitted X-rays sensed by the X-ray-sens-
of the shield box 21. The opening 21a on the upstream 10 ing elements 24a. In a transmitted X-ray image generated
side in the conveying direction D2 of the conveying unit by the control apparatus 28 based on the sensing result
10 functions as a hole for inspection objects P conveyed from the line sensor 24, locations with a large quantity of
by the conveyor belt 13a to be conveyed into the shield transmitted X-rays are displayed brightly (light) and lo-
box 21. The opening 21a on the downstream side in the cations with a small quantity of transmitted X-rays are
conveying direction D2 of the conveying unit 10 functions 15 displayed darkly (shaded). Specifically, the brightness
as a hole for inspection objects P conveyed by the con- and darkness (light and shade) of the transmitted X-ray
veyor belt 13a to be conveyed out from the shield box image correspond to the sensed quantity of transmitted
21. The openings 21a are closed by shielding curtains X-rays. As shown in FIG. 6, when a foreign object is
25 in order to prevent X-rays from leaking to the exterior present in an inspected object P, the quantity of trans-
of the shield box 21 (see FIG. 4). The shielding curtains 20 mitted X-rays is less at the position corresponding to the
25 are made of rubber containing lead, tungsten, etc. foreign object than in the periphery of that position.
The shielding curtains 25 are pushed aside by the in- [0067] Each X-ray-sensing element 24a senses X-rays
spection objects P when the inspection objects P are transmitted through an inspected object P and the con-
conveyed in and out through the openings 21a. veyor belt 13a, and outputs an X-ray transmission signal
25 indicating a voltage corresponding to the quantity of
(2-1-2-2) X-ray irradiator sensed transmitted X-rays (the intensity of the X-rays).
The X-ray transmission signal is sent to the control ap-
[0063] The X-ray irradiator 22 is one example of an X- paratus 28 and used to create a transmitted X-ray image
ray irradiation unit that irradiates the inspection objects of the inspected object P. The control apparatus 28 in-
P on the conveying unit 10 with X-rays. The X-ray irradi- 30 spects for poor quality in the inspected object P (in the
ator 22 is disposed above the conveyor belt 13a in the present embodiment, foreign object contamination)
shield box 21 (see FIG. 5). The X-ray irradiator 22 irra- based on the transmitted X-ray image generated based
diates X-rays in a fan-shaped irradiation range Ir toward on the X-ray transmission signal, or in other words, gen-
the line sensor 24 disposed below the conveying surface erated based on the sensing result from the line sensor
of the conveyor belt 13a (see the hatching part of FIG. 35 24.
5). The X-ray irradiation range Ir of the X-ray irradiator
22 extends so as to be orthogonal to the surface that (2-1-2-4) Monitor
conveys inspection objects P on the conveyor belt 13a.
In addition, the irradiation range Ir spreads in a fan shape [0068] The monitor 26 is a liquid crystal display. The
in the first direction D1, which intersects the conveying 40 monitor 26 displays, inter alia, the transmitted X-ray im-
direction D2 of the conveyor belt 13a. In other words, X- age of the inspected object P and the inspection result
rays radiated from the X-ray irradiator 22 spread in the of the inspected object P. The monitor 26 also has a touch
direction of the width of the conveyor belt 13a. panel function and receives input of operations per-
formed by an operator, inspection parameters, etc.
(2-1-2-3) Line sensor 45
(2-1-2-5) Control apparatus
[0064] The line sensor 24 is one example of a trans-
mitted X-ray sensing unit that senses X-rays transmitted [0069] The control apparatus 28 is a computer that ex-
through the inspection objects P. ecutes computations and processes related to X-ray in-
[0065] The line sensor 24 is disposed below the con- 50 spection and controls the actions of the individual parts
veying surface of the conveyor belt 13a, and senses X- of the X-ray inspection apparatus 200. The control ap-
rays transmitted through the inspection objects P and the paratus 28 is contained inside the shield box 21, but such
conveyor belt 13a. The line sensor 24 mainly has a large an arrangement is not provided by way of limitation; the
number of X-ray-sensing elements 24a. The X-ray-sens- control apparatus 28 may be an apparatus installed in-
ing elements 24a are disposed horizontally along the first 55 dependently of the shield box 21.
direction D1 orthogonal to the conveying direction D2 of [0070] Although not shown in the drawings, the control
the conveyor belt 13a, or in other words, along the direc- apparatus 28 has a central processing unit (CPU) that
tion of the width of the conveyor belt 13a (see FIG. 5). performs computations and controls, a read only memory

8
15 EP 4 027 135 A1 16

(ROM) that stores programs and information, a random inspection objects P at the second conveying velocity Z2
access memory (RAM), a hard disk, etc. The control ap- (m/sec). The second conveying velocity Z2 (m/sec) is a
paratus 28 is also provided with a display control circuit velocity slower than the first conveying velocity Z1
(not shown), a key input circuit, a communication port, (m/sec). No limitation is provided on the second convey-
etc. The display control circuit is a circuit that controls 5 ing velocity Z2 (m/sec); for example, the second convey-
what is displayed on the monitor 26. The key input circuit ing velocity Z2 (m/sec) is 1/2 of the first conveying velocity
is a circuit that imports key input data inputted by an op- Z1 (m/sec).
erator through the touch panel of the monitor 26. The [0077] Normally (when the second condition has not
communication port is a port capable of communicating been satisfied), the state of the belt conveyor 12 is a first
with an external device. 10 state in which the downstream end 12a is adjacent to the
[0071] The control apparatus 28 is electrically connect- downstream conveying apparatus 70. However, when
ed to the conveyor motor 14, the encoder 16, and the the second condition has been satisfied, the conveying
extension/retraction drive unit 18 of the conveying unit unit control unit 28a controls the extension/retraction
10. The control apparatus 28 is also electrically connect- drive unit 18 of the conveying unit 10 to switch the state
ed to the X-ray irradiator 22, the line sensor 24, and the 15 of the belt conveyor 12 to a second state in which the
monitor 26 of the X-ray inspection unit 20. downstream end 12a is separated from the downstream
[0072] The control apparatus 28 is also connected so conveying apparatus 70.
as to be capable of communicating with the robot control [0078] The first condition and the second condition
unit 40 (described hereinafter). The control apparatus 28 shall be described together in the description of the ac-
sends position information E, a reference signal S, ve- 20 tions of the X-ray inspection system 100 (described here-
locity information V (described hereinafter), etc., to the inafter).
robot control unit 40.
[0073] The control apparatus 28 has a storage unit 28i (b) Image generation unit
that stores, inter alia, parameters used in X-ray inspec-
tions, generated X-ray transmission images, and the in- 25 [0079] The image generation unit 28b generates a
spection results of X-ray inspections. In addition, due to transmitted X-ray image based on the sensing result from
the CPU executing programs stored in the ROM, the hard the line sensor 24, or more specifically, based on the
disk, etc., the control apparatus 28 functions as a con- quantity of transmitted X-rays sensed by the line sensor
veying unit control unit 28a, an image generation unit 24 (the quantity of X-rays transmitted through an inspect-
28b, an inspection unit 28c, a counting unit 28d, a position 30 ed object P).
information generation unit 28e, a position information [0080] Specifically, the image generation unit 28b ac-
sending unit 28f, a reference signal sending unit 28g, and quires, at short time intervals (intervals of t (ms)), data
a velocity information sending unit 28h. (X-ray transmission signals) relating to the intensity of
transmitted X-rays and being outputted from the X-ray-
(a) Conveying unit control unit 35 sensing elements 24a of the line sensor 24, and the im-
age generation unit 28b connects a predetermined
[0074] The conveying unit control unit 28a controls the number of data sets to a time series in matrix form to
actions of the conveying unit 10. generate a transmitted X-ray image. For example, the
[0075] For example, the conveying unit control unit 28a image generation unit 28b connects data, which is related
controls the conveying velocity of the conveying unit 10 40 to the intensity of transmitted X-rays and is outputted by
by controlling the rotational speed of the conveyor motor the X-ray-sensing elements 24a of the line sensor 24
14 of the conveying unit 10. For example, in normal cir- during the conveying unit 10 advances a predetermined
cumstances (when the first condition has not been sat- distance L (see FIG. 5), to a time series in matrix form to
isfied) the conveying unit control unit 28a controls the generate a transmitted X-ray image of an inspected ob-
conveying velocity of the conveying unit 10 to a first con- 45 ject P. The storage unit 28i stores the transmitted X-ray
veying velocity Z1 (m/sec). In other words, the conveying image generated by the image generation unit 28b.
unit control unit 28a normally controls the rotational [0081] The image generation unit 28b corrects the
speed of the conveyor motor 14 such that the conveying transmitted X-ray image in accordance with the convey-
unit 10 conveys the inspection objects P at the first con- ing velocity of the conveying unit 10. This shall be de-
veying velocity Z1 (m/sec). 50 scribed in detail.
[0076] When the first condition has been satisfied, the [0082] When the conveying velocity of the conveying
conveying unit control unit 28a controls the conveying unit 10 is the first conveying velocity Z1 (m/sec), the X-
velocity of the conveying unit 10 (the velocity at which ray transmission signals outputted from the X-ray-sens-
inspection objects P are conveyed) to a second convey- ing elements 24a of the line sensor 24 are signals cor-
ing velocity Z2 (m/sec). In other words, when the first 55 responding to the conveying distance of the conveying
condition has been satisfied, the conveying unit control unit 10, which is first conveying velocity Z1 (m/sec) 3 t
unit 28a controls the rotational speed of the conveyor (ms). When the conveying velocity of the conveying unit
motor 14 such that the conveying unit 10 conveys the 10 is the second conveying velocity Z2 (m/sec), the X-

9
17 EP 4 027 135 A1 18

ray transmission signals outputted from the X-ray-sens- containing foreign objects in the positions of the centers
ing elements 24a of the line sensor 24 are signals cor- of the pixel groups A, B, and C in the transmitted X-ray
responding to the conveying distance of the conveying image. The storage unit 28i stores the inspection result
unit 10, which is second conveying velocity Z2 (m/sec) from the inspection unit 28c.
3 t (ms) (for example, in this embodiment, second con- 5 [0085] The abovementioned binarization sensing
veying velocity Z2 (m/sec) = 0.5 3 first conveying velocity scheme is not provided by way of limitation as to the
Z1 (m/sec)). Accordingly, when data acquired within the method for determining foreign objects; the inspection
same time (e.g., t (ms) 3 M (M being an integer)) is con- unit 28c may detect the presence of foreign objects using
nected to generate a transmitted X-ray image of the in- another known method (e.g., a trace sensing scheme).
spected object P, the transmitted X-ray image for when 10 [0086] In this embodiment, the inspection unit 28c de-
the conveying velocity of the conveying unit 10 is the termines that there is an image representing inspection
second conveying velocity Z2 (m/sec) is an image objects P containing foreign objects in positions corre-
stretched in the conveying direction D2 of the conveying sponding to pixel groups in the transmitted X-ray image
unit 10 with respect to the transmitted X-ray image for indicating the presence of foreign objects, but such an
when the conveying velocity of the conveying unit 10 is 15 aspect is not provided by way of limitation. For example,
the first conveying velocity Z1 (m/sec). Conversely, when in addition to sensing foreign objects, the inspection unit
data acquired within the same time (e.g., t (ms) 3 M (M 28c may specify the contours of inspection objects P con-
being an integer)) is connected to generate a transmitted taining foreign objects (surrounding foreign objects) in
X-ray image of the inspected object P, the transmitted X- the transmitted X-ray image (in the example in FIG. 7,
ray image for when the conveying velocity of the convey- 20 contours Oa, Ob, and Oc are specified), and may deter-
ing unit 10 is the first conveying velocity Z1 (m/sec) is an mine that there is an image representing inspection ob-
image compressed in the conveying direction D2 of the jects P containing foreign objects in the positions at the
conveying unit 10 with respect to the transmitted X-ray centers (in the example in FIG. 7, the centers Ga, Gb,
image for when the conveying velocity of the conveying and Gc) of the inspection objects P specified by the con-
unit 10 is the second conveying velocity Z2 (m/sec). 25 tours.
Therefore, the image generation unit 28b corrects the
transmitted X-ray image based on information about the (d) Counting unit
conveying velocity of the conveying unit 10 sent by the
encoder 16 so that the transmitted X-ray image is not [0087] The counting unit 28d, based on the result of
stretched or compressed in the conveying direction of 30 inspecting the transmitted X-ray image from the inspec-
the conveying unit 10, even if the conveying velocity of tion unit 28c, counts the number of inspection objects P
the conveying unit 10 at the time of X-ray transmission determined to be poor quality and present in a unit in-
signal acquisition changes. spection region (one example of a first predetermined
region, a region of distance L in the conveying direction
(c) Inspection unit 35 D2 in the present embodiment) on the conveyor belt 13a
of the conveying unit 10 captured in the transmitted X-
[0083] Based on the transmitted X-ray image of the ray image. Specifically, the counting unit 28d counts the
inspection objects P generated by the image generation number of pixel groups darker than the reference level
unit 28b, the inspection unit 28c inspects for poor quality as a result of the inspection of the inspection unit 28c,
in the inspection objects P corresponding to the trans- 40 as the number of inspection objects P determined to be
mitted X-ray image (the inspection objects P captured in poor quality and present in the unit inspection region of
the transmitted X-ray image). the conveying unit 10.
[0084] For example, the inspection unit 28c deter- [0088] The counting result of the counting unit 28d is
mines foreign objects using a binarization sensing used, for example, by the conveying unit control unit 28a
scheme. Specifically, when the transmitted X-ray image 45 to control the conveying velocity of the conveying unit 10
generated by the image generation unit 28b contains a and the actions of the extension/retraction drive unit 18.
pixel group (a collection of dense pixels) darker than a The details shall be described hereinafter.
preset predetermined reference level relating to the
brightness of a transmitted X-ray image, the inspection (f) Position information generation unit
unit 28c determines that there is an image representing 50
an inspected object P containing a foreign object in a [0089] Based on the inspection result of the inspection
position corresponding to the center of the pixel group. unit 28c, the position information generation unit 28e gen-
For example, when the transmitted X-ray image gener- erates position information E relating to positions on the
ated by the image generation unit 28b is an image such conveying unit 10 (on the conveyor belt 13a) of inspection
as that of FIG. 7 and pixel groups darker than the refer- 55 objects P determined to be poor quality. The storage unit
ence level are detected at the positions of the black cir- 28i stores the position information E generated by the
cles denoted by the symbols A, B, and C, it is determined position information generation unit 28e.
that there is an image representing inspection objects P [0090] Specifically, the position information generation

10
19 EP 4 027 135 A1 20

unit 28e reads the positions of foreign objects in the trans- the contours to be the positions where inspection objects
mitted X-ray image as coordinates on the conveyor belt P are present, the position information generation unit
13a. A specific example of the process executed by the 28e may specify the coordinates of the xy coordinate
position information generation unit 28e shall be de- system that correspond to the coordinates of the centers
scribed with reference to FIGS. 7 and 8. 5 Ga, Gb, and Gc in the XY coordinate system, and may
[0091] For example, the transmitted X-ray image of designate information for these coordinates as position
FIG. 7 is considered to be a transmitted X-ray image of information E relating to positions on the conveying unit
a region R1 (see FIG. 8) on the conveyor belt 13a. The 10 of the inspection objects P determined by the inspec-
region R1 is the conveying surface of the conveyor belt tion unit 28c to be poor quality in the region R1 on the
13a passing underneath the irradiation range Ir of X-rays 10 conveyor belt 13a.
from the X-ray irradiator 22 within a certain time. In this
embodiment, the region R1 is a region of the conveyor (e) Position information sending unit
belt 13a in which the length is a distance L in the con-
veying direction D2 of the conveying unit 10. [0095] The position information sending unit 28f sends
[0092] In the transmitted X-ray image, an XY coordi- 15 the position information E generated by the position in-
nate system is set in which the origin is the lower right formation generation unit 28e (position information E
corner of a transmitted X-ray image such as is shown in stored in the storage unit 28i) to the robot control unit 40.
FIG. 7. In the region R1 on the belt conveyor 12, an xy
coordinate system is set in which the origin is the right (g) Reference signal sending unit
front end of the region R1 on the belt conveyor 12 such 20
as is shown in FIG. 8. The positive direction of the x-axis [0096] The reference signal sending unit 28g sends a
corresponds to the opposite of the conveying direction fixed-interval reference signal S issued every time the
D2 of the inspection objects P, and the positive direction conveying unit 10 advances a first distance. Specifically,
of the y-axis corresponds to rearward. The X-axis and Y- the reference signal sending unit 28g issues a reference
axis of the coordinate system shown in FIG.7 correspond 25 signal S to the robot control unit 40 every time the con-
respectively to the x-axis and y-axis of the coordinate veying unit 10 advances a distance 2L (every time the
system shown in FIG. 8. The origins and coordinate sys- movement distance of inspection objects P conveyed by
tems may be set as desired, and the origins and coordi- the conveying unit 10 reaches 2L) based on information
nate systems may be set in other aspects in the trans- relating to the advancing distance of the conveying unit
mitted X-ray image and the region R1. 30 10 outputted by the encoder 16. The reference signal S
[0093] In the example in FIG. 7, the inspection unit 28c is issued by the reference signal sending unit 28g inde-
determines the position (Xa, Ya) of the center of pixel pendently of the process of X-ray inspection.
group A in the XY coordinate system, the position (Xb, [0097] The reference signal sending unit 28g, based
Yb) of the center of pixel group B, and the position (Xc, on data acquired from the encoder 16 by the control ap-
Yc) of the center of pixel group C to be positions where 35 paratus 28, switches the reference signal S between on
there is an image representing an inspected object P and off every time the conveying unit 10 advances a dis-
containing a foreign object. The position information gen- tance L (e.g., the distance of a J row of one imaging width
eration unit 28e specifies coordinates (xa, ya), (xb, yb), u of the line sensor 24 when the conveying velocity of
and (xc, yc) of the xy coordinate system that correspond the conveying unit 10 is the first conveying velocity Z1
to coordinates (Xa, Ya), (Xb, Yb), and (Xc, Yc) of the XY 40 (m/sec)). Specifically, when the conveying unit 10 begins
coordinate system. The position information generation driving and moves the conveyor belt 13a a distance L,
unit 28e designates information for these coordinates from that time point until the conveying unit 10 further
(xa, ya), (xb, yb), and (xc, yc) as position information E moves the conveyor belt 13a by a distance L, the refer-
relating to positions on the conveying unit 10 of inspection ence signal sending unit 28g issues a reference signal
objects P determined by the inspection unit 28c to be 45 S. While the conveying unit 10 thereafter further moves
poor quality in the region R1 on the conveyor belt 13a. the conveyor belt 13a a distance L, the issuing of the
In other words, for the region R1 on the conveyor belt reference signal S is stopped and kept in standby, and
13a, the position information generation unit 28e gener- when the conveying unit 10 finishes moving the conveyor
ates position information E including information for the belt 13a a distance L, the issuing of the reference signal
coordinates (xa, ya), (xb, yb), and (xc, yc) of positions on 50 S is restarted. The reference signal sending unit 28g per-
the conveying unit 10 of the inspection objects P deter- forms this action repeatedly. That is, the reference signal
mined by the inspection unit 28c to be poor quality. S is a signal issued while the conveying unit 10 conveys
[0094] For example, when the inspection unit 28c has the conveyor belt 13a a distance L every time the con-
specified contours of inspection objects P containing for- veying unit 10 conveys the conveyor belt 13a a distance
eign objects (in the example in FIG. 7, specified contours 55 (distance 2L) twice the distance L. In other words, the
Oa, Ob, and Oc) and determined the positions of the reference signal S is a signal switched between on and
centers (in the example in FIG. 7, the positions of centers off every time the conveying distance of the conveying
Ga, Gb, and Gc) of the inspection objects P specified by unit 10 is the distance L.

11
21 EP 4 027 135 A1 22

(h) Velocity information sending unit end of the arm 32 of the robot 30. The arm 32 of the robot
30 of the present embodiment is a serial link robot having
[0098] The velocity information sending unit 28h is- a plurality of links that are linked by joints, the links being
sues information (velocity information V) about the con- connected in series. Though not provided as an example
veying velocity of the conveying unit 10 at the given mo- 5 by way of limitation, the robot 30 of the present embod-
ment to the robot control unit 40 based on information iment is a serial link robot having a 4-axial degree of
relating to the conveying velocity of the conveying unit freedom in activating the arm 32 in the horizontal direc-
10 outputted by the encoder 16. The velocity information tion, the drive source being a motor that serves as the
V need not be merely the conveying velocity of the con- arm drive unit 33. The robot 30 can move the suction
veying unit 10, but may be certain information about a 10 ejector 34a, which serves as one example of a removal
correlation with the conveying velocity of the conveying mechanism, in a direction (left-right in the present em-
unit 10. For example, the velocity information V may be bodiment) parallel to the conveying direction D2 of the
a conveying velocity level correlated with the conveying conveying unit 10 and in the first direction D1 (forward-
velocity of the conveying unit 10, or information related backward in the present embodiment) orthogonal to the
the conveying status of the conveying unit 10, which cor- 15 conveying direction D2 by activating the arm 32. The ro-
relates with the conveying velocity of the conveying unit bot 30 uses the suction ejector 34a to take inspection
10, such as the rotational speed of the conveyor motor objects P determined to be poor-quality products away
14 that drives the conveying unit 10. from the conveying unit 10, by bringing the suction ejector
[0099] In this embodiment, the velocity information 34a near to the inspection objects P determined by the
sending unit 28h of the control apparatus 28 sends ve- 20 inspection unit 28c to be poor quality (more specifically,
locity information V based on information relating to the by bringing the suction port of the suction ejector 34a
conveying velocity of the conveying unit 10 outputted by near to the inspection objects P determined to be poor-
the encoder 16, but this example is not provided by way quality products).
of limitation. For example, the encoder 16, rather than [0103] A serial link robot is not provided as an example
the velocity information sending unit 28h, may directly 25 by way of limitation as to the robot 30. For example, the
send information relating to the conveying status of the robot 30 may be a parallel link robot, and the suction
conveying unit 10 at the given moment as velocity infor- ejector 34a may be attached to a distal end of a parallel
mation V to the robot control unit 40. link. In addition, units that perform single-axis action
(units capable of moving the suction ejector 34a in only
(2-2) Robot 30 one direction) may be combined and the robot 30 may
be configured such that the suction ejector 34a can be
[0100] The robot 30 is mainly provided with an arm 32, moved in a direction parallel to the conveying direction
an arm drive unit 33, and a suction unit 34. D2 of the conveying unit 10 and in the first direction D1
[0101] The suction unit 34 is mainly provided with a orthogonal to the conveying direction D2.
suction ejector 34a serving as one example of a removal 35 [0104] The robot 30 moves the suction ejector 34a
mechanism, a hose 34b, and a suction drive unit 34c. within a predetermined movement region in a plan view.
The suction drive unit 34c causes the suction ejector 34a The movement region of the suction ejector 34a is sep-
to generate negative pressure by supplying compressed arated from the position irradiated by X-rays from the X-
air to the suction ejector 34a. The suction drive unit 34c ray irradiator 22 by the aforementioned distance L 3 K
is, for example, an electromagnetic valve provided to a 40 (K being an integer, e.g., 5) in the conveying direction
tube that supplies compressed air to the suction ejector D2 of the conveying unit 10. As shall be described here-
34a. The suction ejector 34a utilizes this negative pres- inafter, the action of the robot 30 is controlled such that
sure to remove inspection objects P conveyed by the a command generated based on the position information
conveying unit 10 by suctioning the inspection objects P E generated on the basis of the transmitted X-ray image
through a suction port (not shown) disposed on the lower 45 capturing the conveyor belt 13a over a distance L is start-
side of the suction ejector 34a (the side facing the con- ed at a timing decided based on the reference signal S
veyor belt 13a). The size of the suction port of the suction switched between on and off every time the conveying
ejector 34a is designed wide enough, within an accept- unit 10 advances a distance L. Specifically, the action of
able range (while avoiding situations in which a large the robot 30 is controlled so that a command generated
number of inspection objects P are sucked in all at once), 50 based on the position information E generated on the
such that even inspection objects P of an assumed max- basis of the transmitted X-ray image capturing the con-
imum size can be sucked in through the suction port. veyor belt 13a over a distance L in the conveying direction
Inspection objects P and air sucked in through the suction D2 of the conveying unit 10 is started at a timing of the
port of the suction ejector 34a and compressed air sup- falling or rising of the reference signal S. Therefore, the
plied by the suction drive unit 34c flow into the hose 34b. 55 robot 30 can take away inspection objects P containing
The inspection objects P flowing into the hose 34b are foreign objects without delay and with high precision by
recovered in a recovery receptacle (not shown). starting a command based on the position information E
[0102] The suction ejector 34a is attached to a distal generated based on a certain transmitted X-ray image

12
23 EP 4 027 135 A1 24

at the timing of the falling or rising of the reference signal (RAM), a hard disk, etc. The robot control unit 40 is also
S after (K-1) times after the final set of data (X-ray trans- provided with a communication port (not shown), etc. The
mission signals) for generating the transmitted X-ray im- communication port is a port that enables communication
age has been acquired. In short, in this embodiment, the with a device outside of the robot control unit 40.
robot 30 can take away inspection objects P containing 5 [0109] The robot control unit 40 is electrically connect-
foreign objects without delay and with high precision be- ed to the arm drive unit 33 and the suction drive unit 34c
cause the robot 30 starts the process of removing inspec- of the robot 30. In addition, the robot control unit 40 is
tion objects P containing foreign objects from the moment connected so as to be capable of communicating with
when, in a plan view, the region on the conveyor belt 13a the control apparatus 28. The robot control unit 40 re-
corresponding to a certain transmitted X-ray image 10 ceives, for example, position information E, reference
reaches a predetermined movement region of the suction signals S, and velocity information V from the control ap-
ejector 34a. paratus 28.
[0105] Theoretically, the movement region of the suc- [0110] Due to the CPU executing programs stored in
tion ejector 34a may be disposed at a distance L 3 K the ROM, the hard disk, etc., the robot control unit 40
apart from the position irradiated by X-rays from the X- 15 functions as a command generation unit 42, a command
ray irradiator 22, but in reality, there is a time lag between revision unit 44, and a command sending unit 46. A com-
when the robot 30 receives a command and when the mand storage unit 48 stores commands generated by
robot actually activates. Therefore, in consideration of the command generation unit 42. The individual function-
the time lag, it is preferable that the movement region of al units shall be described.
the suction ejector 34a is disposed at a distance L 3 M 20
+ α (distance considering the time lag) apart from the (a) Command generation unit
position irradiated by X-rays from the X-ray irradiator 22.
In order to avoid complicated description below, the de- [0111] The command generation unit 42 generates a
scription shall be made assuming an ideal state in which command for controlling the action of the robot 30 based
there is no time lag between the time when the robot 30 25 on the position information E sent by the position infor-
receives the command and the time when the robot 30 mation sending unit 28f of the control apparatus 28.
actually activates. [0112] Specifically, the command generation unit 42
decides how to move the suction ejector 34a when the
(2-3) robot control unit region of the conveyor belt 13a corresponding to the po-
30 sition information E has moved into the movement region
[0106] The robot control unit 40 is, e.g., a computer of the suction ejector 34a. The command generation unit
that controls the actions of the robot 30. The functions of 42 decides how to move the suction ejector 34a so that
the robot control unit 40 are not limited to being realized in a plan view, the suction port (not shown) of the suction
by software; the functions may be realized by hardware ejector 34a will overlap the coordinates specified by the
and may be realized by both hardware and software 35 position information E in the region of the conveyor belt
working together. 13a corresponding to the position information E. The
[0107] In FIG. 2, the robot control unit 40 is drawn at command generation unit 42 then generates a command
a position independent of both the X-ray inspection ap- for the arm drive unit 33 in order to move the suction
paratus 200 and the robot 30, but this example is not ejector 34a as decided.
provided by way of limitation. For example, the control 40 [0113] Preferably, the command generation unit 42
apparatus 28 of the X-ray inspection apparatus 200 may controls the action of the robot 30 (specifically, the action
function as the robot control unit 40. Moreover, for ex- of the arm drive unit 33) so as to minimize the movement
ample, the robot control unit 40 may be installed in the distance of the suction ejector 34a taking away the in-
robot 30. Moreover, the robot control unit 40 may be an spection objects P determined to be poor quality from
apparatus independent of both the X-ray inspection ap- 45 the region of the conveyor belt 13a (unit inspection re-
paratus 200 and the robot 30. Moreover, some of the gion) corresponding to the position information E.
functions of the robot control unit 40 may be realized by [0114] For example, specifically, the command gener-
the control apparatus 28 of the X-ray inspection appara- ation unit 42 decides the movement route of the suction
tus 200, and other functions of the robot control unit 40 ejector 34a in the following manner. As a premise, three
may be realized by a computer installed in the robot 30. 50 or more inspection objects P determined to be poor qual-
In the present embodiment, the following description is ity are present in the unit inspection region of the con-
given assuming that the robot control unit 40 is an appa- veyor belt 13a corresponding to the position information
ratus independent of both the X-ray inspection apparatus E (in the region where the length in the conveying direc-
200 and the robot 30. tion D2 is the distance L). For example, in the region of
[0108] The robot control unit 40 has (not shown), a 55 the conveyor belt 13a corresponding to the position in-
central processing unit (CPU) that performs computa- formation E, it is assumed that the position information
tions and controls, a read only memory (ROM) that stores E specifies that inspection objects P determined to be
programs and information, a random access memory poor quality are present in the positions (xa, ya), (xb, yb),

13
25 EP 4 027 135 A1 26

and (xc, yc) shown in FIG. 8. In this case, the command veying unit 10 will temporarily be a velocity between the
generation unit 42 decides, for example, to move the suc- first conveying velocity Z1 (m/sec) and the second con-
tion port (not shown) of the suction ejector 34a to (xa, veying velocity Z2 (m/sec). In such cases, when the arm
ya), which is the farthest downstream in the conveying drive unit 33 is activated by a command generated based
direction D2. Next, the command generation unit 42 de- 5 on the premise that the conveying velocity of the convey-
cides, for example, to move the suction port (not shown) ing unit 10 is the first conveying velocity Z1 (m/sec), there
of the suction ejector 34a to (xc, yc) and (xb, yb) in se- is a possibility that inspection objects P containing foreign
quence, so as to minimize the movement distance of the objects cannot be properly removed. In view of this, the
suction ejector 34a. command revision unit 44 revises the details of the com-
[0115] The method described above is not provided by 10 mand stored in the command storage unit 48 so as to
way of limitation as to the manner in which the movement match the velocity information V of the conveying unit 10.
route of the suction ejector 34a is decided by the com-
mand generation unit 42. For example, the command (c) Command sending unit
generation unit 42 may decide the movement route of
the suction ejector 34a so that the suction port (not 15 [0120] The command sending unit 46 is a functional
shown) of the suction ejector 34a moves from the down- unit that sends commands to the robot 30. At a timing
stream-side coordinates to the upstream-side coordi- decided based on the reference signal S, the command
nates in the conveying direction D2 (for example, in the sending unit 46 starts the control of the robot 30 according
example in FIG. 8, so that the suction port (not shown) to the details of a command generated by the command
of the suction ejector 34a moves to (xa, ya), (xb, yb), and 20 generation unit 42 and stored in the command storage
(xc, yc) in sequence). unit 48.
[0116] The command generation unit 42 decides the [0121] For example, as previously described, when the
action timing for the suction drive unit 34c (the timing for movement region of the suction ejector 34a is separated
the blowing in of compressed air) so that the suction ejec- from the position irradiated by X-rays from the X-ray ir-
tor 34a performs suction at least at the timing at which 25 radiator 22 by a distance L 3 K in the conveying direction
the suction port (not shown) of the suction ejector 34a D2, the command sending unit 46 starts a command
overlaps the coordinates specified by the position infor- based on the position information E generated based on
mation E in the region of the conveyor belt 13a corre- a certain transmitted X-ray image at the timing of the
sponding to the position information E. The command falling or rising of the reference signal S after (K-1) times
generation unit 42 then generates a command for the 30 after the final set of data (X-ray transmission signals) for
suction drive unit 34c for driving the suction drive unit generating the transmitted X-ray image has been ac-
34c at the decided action timing. quired (in other words, after the detection of the rising or
[0117] The command generation unit 42 generates falling of the reference signal S at the time of the acqui-
commands for the arm drive unit 33 and the suction drive sition of the final set of data for generating the transmitted
unit 34c based on the premise that the conveying velocity 35 X-ray image).
of the conveying unit 10 is the first conveying velocity Z1 [0122] When the conveying velocity of the conveying
(m/sec). unit 10 has been changed from the first conveying veloc-
ity Z1 at the point in time when the command is sent, the
(b) Command revision unit command sending unit 46 does not send the command
40 stored in the command storage unit 48 to the arm drive
[0118] The command revision unit 44, based on the unit 33 and the suction drive unit 34c of the robot 30
velocity information V, revises the details of the com- without revision, but sends a command revised by the
mands generated by the command generation unit 42 command revision unit 44 to the robot 30.
and stored in the command storage unit 48.
[0119] Specifically, the command generation unit 42 45 (3) Actions of X-ray inspection system
generates commands for the arm drive unit 33 and the
suction unit 34 based on the premise that the conveying [0123] The process of the poor-quality product inspec-
velocity of the conveying unit 10 is the first conveying tion (a foreign object inspection in this embodiment) ex-
velocity Z1 (m/sec) as previously described. However, ecuted by the X-ray inspection system 100 shall next be
there are cases in which the conveying unit control unit 50 described with reference to the flowcharts of FIGS. 9 and
28a changes the conveying velocity of the conveying unit 10. The poor-quality product inspection in this embodi-
10 to the second conveying velocity Z2 (m/sec) when a ment includes not only an X-ray inspection step, but also
first condition (described hereinafter) is satisfied. In ad- a step for rejecting inspection objects P assessed to be
dition, when the conveying velocity of the conveying unit poor quality from the conveying unit 10 after the X-ray
10 is changed from the first conveying velocity Z1 (m/sec) 55 inspection. FIG. 9 is a flowchart of a poor-quality product
to the second conveying velocity Z2 (m/sec), or from the inspection executed by the X-ray inspection system 100.
second conveying velocity Z2 (m/sec) to the first convey- FIG. 10 is a flowchart of a poor-quality product rejection
ing velocity Z1 (m/sec), the conveying velocity of the con- process during the poor-quality product inspection.

14
27 EP 4 027 135 A1 28

[0124] The flowcharts of FIGS. 9 and 10 are merely X-ray inspection is executed and the timing of the process
one example of the poor-quality product inspection proc- of rejecting inspection objects P determined to be poor
ess and may be changed as appropriate. For example, quality in the X-ray inspection from the conveying unit 10.
the order in which the process is executed may be [0131] When the counting unit 28d has determined that
changed within a consistent range. In addition, a plurality 5 inspection objects P determined to be poor quality are
of processes may be executed simultaneously within a not present in the unit inspection region (No in step S5),
consistent range. the process of step S10 is not executed and the process
[0125] As a premise, though not mentioned in the flow- advances to step S6.
charts of FIGS. 9 and 10, the robot control unit 40 receives [0132] In step S6, the data on the X-ray transmission
the reference signal S sent by the reference signal send- 10 signals in the storage unit 28i used to generate the trans-
ing unit 28g and the velocity information V sent by the mitted X-ray image in step S3 is deleted. After the exe-
velocity information sending unit 28h independently of cution of step S6, the process returns to step S1.
the X-ray inspection.
[0126] When the X-ray inspection system 100 is driven, <Poor-quality product rejection process>
the X-ray irradiator 22 irradiates the conveying unit 10 15
(the conveyor belt 13a of the conveying unit 10), which [0133] The following is a description of the process ex-
continuously conveys a large number of inspection ob- ecuted when the process has advanced to step S10 in
jects P at random positions, with X-rays. In other words, the flowchart of FIG. 9.
the X-ray irradiator 22 irradiates the inspection objects P [0134] When the process has advanced to step S10,
carried on the conveyor belt 13a with X-rays. The X-ray- 20 the counting unit 28d, based on the result of the inspec-
sensing elements 24a of the line sensor 24 sense X-rays tion performed by the inspection unit 28c, counts the
transmitted through the inspection objects P. The X-ray- number of inspection objects P determined to be poor
sensing elements 24a send data (X-ray transmission sig- quality and present in the unit inspection region of the
nals) obtained at a predetermined unit time (t (ms)) and conveying unit 10 (the region on the conveyor belt 13a
related to the intensity of the transmitted X-rays to the 25 of the conveying unit 10 that has a length of a distance
control apparatus 28. The storage unit 28i of the control L in the conveying direction D2 and that corresponds to
apparatus 28 stores the received data related to the in- the transmitted X-ray image generated in step S3).
tensity of the transmitted X-rays (step S1). [0135] When the counted number of inspection objects
[0127] When data related to the intensity of the trans- P is equal to or greater than a first threshold value N1
mitted X-rays for a distance L in the conveying direction 30 (e.g., 10) (Yes in step S11), the conveying unit control
D2 (for a unit inspection region) is collected (Yes in step unit 28a controls the extension/retraction drive unit 18 of
S2), the image generation unit 28b generates a transmit- the conveying unit so that the inspection objects P in the
ted X-ray image using the data related to the intensity of unit inspection region all fall into the recovery box 50
the transmitted X-rays for the unit inspection region (step S20). In other words, the conveying unit control unit
stored in the storage unit 28i (step S3). 35 28a assesses that the previously described second con-
[0128] Next, in step S4, the inspection unit 28c inspects dition has been satisfied when the number of inspection
for poor quality in the inspection objects P (in this em- objects P determined to be poor quality and present in
bodiment, contamination of the inspection objects P with the unit inspection region of the conveying unit 10 (the
foreign objects) based on the transmitted X-ray image. region on the conveyor belt 13a of the conveying unit 10
[0129] In step S5, the counting unit 28d determines if 40 that has a length of a distance L in the conveying direction
inspection objects P determined to be poor quality are D2 and that corresponds to the transmitted X-ray image
present in the unit inspection region (determines if pixel generated in step S3) is equal to or greater than the first
groups determined to be foreign objects are present in threshold value N1 and the timing has come that the unit
the transmitted X-ray image), and when inspection ob- inspection region of the conveying unit 10 passes above
jects P determined to be poor quality are present in the 45 the recovery box 50. The conveying unit control unit 28a
unit inspection region (Yes in step S5), the process ad- then controls the extension/retraction drive unit 18 to
vances to step S10 and the process of step S6 is simul- switch the state of the belt conveyor 12 from the first state
taneously executed. In step S10, the process of rejecting to the second state in which the downstream end 12a is
inspection objects P determined to be poor quality from separated from the downstream conveying apparatus 70
the conveying unit 10 is performed. The process of re- 50 so that the inspection objects P in the unit inspection
jecting inspection objects P from the conveying unit 10 region of the conveying unit 10 all fall into the recovery
shall be described hereinafter. box 50.
[0130] The process of step S10 and the process of step [0136] After the inspection objects P in the unit inspec-
S6 are executed in parallel because the X-ray inspection tion region of the conveying unit 10 have all fallen into
unit 20 and the location where the process of removing 55 the recovery box 50, the conveying unit control unit 28a
inspection objects P from the conveying unit 10 is per- controls the extension/retraction drive unit 18 to switch
formed are separated by a predetermined distance, and the state of the belt conveyor 12 from the second state
there is therefore a lag between the timing at which the to the first state in which the downstream end 12a is ad-

15
29 EP 4 027 135 A1 30

jacent to the downstream conveying apparatus 70. The ed by the counting unit 28d is equal to or greater than
execution of this control ends the poor-quality product the second threshold value N2 and less than the first
rejection process for cases in which the number of in- threshold value N1, has passed through the movement
spection objects P determined to be poor quality is equal region of the suction ejector 34a.
to or greater than the first threshold value N1 (e.g., 10). 5 [0139] Such a process is performed because when the
[0137] Such a process is performed because when the number of inspection objects P determined to be poor
number of inspection objects P determined to be poor quality and present in the unit inspection region of the
quality and present in the unit inspection region of the conveying unit 10 (a region having a length of a distance
conveying unit 10 (a region having a length of a distance L in the conveying direction D2) is equal to or greater
L in the conveying direction D2) is equal to or greater 10 than the second threshold value N2, it is difficult in terms
than the first threshold value N1, it is difficult in terms of of the capability of the robot 30 for all of these inspection
the capability of the robot 30 for all of these inspection objects P to be removed by the robot 30 while the inspec-
objects P to be removed by the robot 30 while the inspec- tion objects P are being conveyed by the conveying unit
tion objects P are being conveyed by the conveying unit 10 at the first conveying velocity Z1 (m/sec). The second
10. The first threshold value N1 may be decided as ap- 15 threshold value N2 may be decided as appropriate.
propriate. [0140] Upon having advanced to step S13, the process
[0138] When the number of inspection objects P count- then advances to step S14.
ed by the counting unit 28d is less than the first threshold [0141] When the number of inspection objects P count-
value N1 and equal to or greater than a second threshold ed by the counting unit 28d is less than the second thresh-
value N2 (e.g., 5) less than the first threshold value N1 20 old value N2 (No in step S11 and No in step S12), the
(No in step S11 and Yes in step S12), the conveying unit process advances to step S14.
control unit 28a controls the action of the conveyor motor [0142] In step S14, the position information generation
14 so that the conveying velocity of the conveying unit unit 28e generates position information E as described
10 when the inspection objects P in the unit inspection above.
region (the region on the conveyor belt 13a of the con- 25 [0143] Next, in step S15, the position information send-
veying unit 10 that has a length of a distance L in the ing unit 28f sends the position information E generated
conveying direction D2 and that corresponds to the trans- by the position information generation unit 28e to the ro-
mitted X-ray image generated in step S3) pass through bot control unit 40.
the movement region of the suction ejector 34a (in other [0144] In step S16, the robot control unit 40 controls
words, the region where inspection objects P are rejected 30 the action of the robot 30 based on the position informa-
by the robot 30) reaches the second conveying velocity tion E sent in step S14, and the reference signal S and
Z2 (m/sec), which is slower than the first conveying ve- velocity information V sent independently of the X-ray
locity Z1 (m/sec). The conveying unit control unit 28a inspection. How the robot control unit 40 controls the ac-
may decide the timing of the control of the rotational tion of the robot 30 using the command generation unit
speed of the conveyor motor 14 based on the reference 35 42, the command revision unit 44, the command sending
signal S sent by the reference signal sending unit 28g unit 46, and the command storage unit 48 has already
and the information about the movement distance of the been described and shall therefore not be described
conveying unit 10 sent by the encoder 16. In this embod- here.
iment, in other words, the conveying unit control unit 28a
assesses that the previously described first condition has 40 (4) Characteristics
been satisfied when the number of inspection objects P
determined to be poor quality and present in the unit in- [0145] (4-1) The X-ray inspection system 100 of the
spection region of the conveying unit 10 (the region on present embodiment includes a conveying unit 10, an X-
the conveyor belt 13a of the conveying unit 10 that has ray irradiator 22 serving as one example of an X-ray ir-
a length of a distance L in the conveying direction D2 and 45 radiation unit, a line sensor 24 serving as one example
that corresponds to the transmitted X-ray image gener- of a transmitted X-ray sensing unit, an image generation
ated in step S3) is equal to or greater than the second unit 28b, an inspection unit 28c, a position information
threshold value N2 and less than the first threshold value generation unit 28e, a robot 30, and a robot control unit
N1 and the timing when the unit inspection region of the 40 serving as one example of a first control unit. The
conveying unit 10 passes through the movement region 50 conveying unit 10 continuously conveys a large number
of the suction ejector 34a has come. The conveying unit of inspection objects P at random positions. The X-ray
control unit 28a then controls the rotational speed of the irradiator 22 irradiates the inspection objects P on the
conveyor motor 14 so that the conveying velocity of the conveying unit 10 with X-rays. The line sensor 24 senses
conveying unit 10 reaches the second conveying velocity X-rays transmitted through the inspection objects P. The
Z2 (m/sec). The conveying unit control unit 28a returns 55 image generation unit 28b generates a transmitted X-ray
the conveying velocity of the conveying unit 10 to the first image based on a sensing result from the line sensor 24.
conveying velocity Z1 (m/sec) when this unit inspection The inspection unit 28c inspects for poor quality in the
region, in which the number of inspection objects P count- inspection objects P based on the transmitted X-ray im-

16
31 EP 4 027 135 A1 32

age. The position information generation unit 28e, based 10 without stopping the conveying performed by the con-
on an inspection result from the inspection unit 28c, gen- veying unit 10 even when a plurality of poor-quality prod-
erates position information E relating to positions of the ucts are present on the conveying unit 10 in substantially
inspected object P determined to be poor quality on the the same position in the conveying direction D2 and in
conveying unit 10. The robot 30 has a suction ejector 34a 5 different positions in the first direction D1.
serving as a removal mechanism for removing the in- [0151] (4-3) The X-ray inspection system 100 of the
spected object P. The robot 30 can move the suction present embodiment includes a counting unit 28d. Based
ejector 34a in at least a first direction D1 orthogonal to a on the result of the inspection of the inspection unit 28c,
conveying direction D2 of the conveying unit 10. By using the counting unit 28d counts the number of inspection
the suction ejector 34a, the robot 30 takes the inspected 10 objects P determined to be poor quality and present in a
object P determined by the inspection unit 28c to be poor first predetermined region of the conveying unit 10 (a
quality away from the conveying unit 10. The robot control region on the conveyor belt 13a of a distance L in the
unit 40, based on at least the position information E and conveying direction D2, this region corresponding to one
a fixed-interval reference signal S issued every time the transmitted X-ray image).
conveying unit 10 advances a distance 2L, controls the 15 [0152] In the X-ray inspection system 100 of the
action of the robot 30 so that the suction ejector 34a present embodiment, because the number of inspection
comes near to and takes away the inspected object P objects P determined to be poor quality and present in
determined by the inspection unit 28c to be poor quality. the first predetermined region of the conveying unit 10
[0146] In the X-ray inspection system 100 of the are counted, it is possible to assess that, inter alia, the
present embodiment, the amount of good-quality prod- 20 robot 30 can take away all of the poor-quality products
ucts taken away along with poor-quality products can be at, for example, the conveying velocity of the conveying
reduced because the action of the robot 30 is controlled unit 10 at the given moment.
to take poor-quality products away from the conveying [0153] (4-4) The X-ray inspection system 100 of the
unit 10 based on position information relating to positions present embodiment includes a conveying unit control
of poor-quality products on the conveying unit 10. 25 unit 28a serving as one example of a velocity control unit.
[0147] The step in which poor quality in the inspection The conveying unit control unit 28a changes a conveying
objects P is inspected and position information E is gen- velocity of the conveying unit 10. The conveying unit con-
erated based on the transmitted X-ray image requires a trol unit 28a controls the conveying velocity based on a
certain amount of computation and processing time, and counting result from the counting unit 28d.
the computation and processing time is not the same 30 [0154] In the X-ray inspection system 100 of the
every time. Therefore, when the robot 30 is controlled present embodiment, the conveying velocity of the con-
according to the timing at which the position information veying unit 10 is changed based on the number of poor-
E is generated, there is a risk of misalignment between quality products present in a first predetermined region
a position where the robot 30 moves to take an inspected of the conveying unit 10, and the conveying velocity can
object P and a position where a poor-quality product is 35 therefore be reduced when, for example, the number of
actually present. poor-quality products present in the first predetermined
[0148] As a countermeasure to this, in the X-ray in- region is large and cannot be processed by the robot 30
spection system 100 of the present embodiment, the ro- at the conveying velocity of the given moment. In addition,
bot control unit 40 controls the robot 30 based on the the conveying velocity can be increased when the
fixed-interval reference signal S issued every time the 40 number of poor-quality products present in the predeter-
conveying unit 10 advances a distance 2L. Therefore, mined region is low and there is leeway in the processing
even if there is variation in the computation and process- capability of the robot 30. Therefore, the conveying ve-
ing time required for poor quality in the inspection objects locity can be increased and the processing capability of
P to be inspected and position information E to be gen- the X-ray inspection system 100 can be improved when
erated based on the transmitted X-ray image, it is possi- 45 the number of poor-quality products present in the pre-
ble to suppress misalignment between a position where determined region is low, while realizing a highly reliable
the robot 30 moves to take an inspected object P and a X-ray inspection system 100 that does not fail to remove
position where a poor-quality product is actually present. any poor-quality products.
[0149] (4-2) In the X-ray inspection system 100 of the [0155] (4-5) In the X-ray inspection system 100 of the
present embodiment, the robot 30 can also move the 50 present embodiment, the image generation unit 28b cor-
suction ejector 34a in a direction parallel to the conveying rects the transmitted X-ray image in accordance with the
direction D2 of the conveying unit 10. conveying velocity of the conveying unit 10.
[0150] In the X-ray inspection system 100 according [0156] In the X-ray inspection system 100 of the
to the present embodiment, the suction ejector 34a can present embodiment, the robot control unit 40 can acti-
move not only in the first direction D1 orthogonal to the 55 vate the robot 30 at a proper timing irrespective of the
conveying direction D2, but also in a direction parallel to conveying velocity of the conveying unit 10, and poor-
the conveying direction D2. Therefore, a plurality of poor- quality products can be taken away from the conveying
quality products can be removed from the conveying unit unit 10 with precision.

17
33 EP 4 027 135 A1 34

[0157] (4-6) The X-ray inspection system 100 of the poor quality.
present embodiment includes an extension/retraction [0163] In the X-ray inspection system 100 of the
drive unit 18 serving as an article removal apparatus, and present embodiment, inspection objects P determined to
a conveying unit control unit 28a serving as one example be poor quality can be quickly removed from the convey-
of a second control unit. The extension/retraction drive 5 ing unit 10.
unit 18 collectively takes away the inspection objects P [0164] (4-10) An X-ray inspection apparatus 200 of the
present on the conveying unit 10 in a second predeter- present embodiment includes a conveying unit 10, an X-
mined region in the conveying direction D2 (the inspec- ray irradiator 22 serving as one example of an X-ray ir-
tion objects P present in a region where inspection ob- radiation unit, a line sensor 24 serving as one example
jects P containing therein reach the downstream end 12a 10 of a transmitted X-ray sensing unit, an image generation
of the belt conveyor 12 in a case where the state of the unit 28b, an inspection unit 28c, a position information
belt conveyor 12 were set to the second state). The con- generation unit 28e, a reference signal sending unit 28g
veying unit control unit 28a controls the action of the ex- serving as one example of a first sending unit, and a
tension/retraction drive unit 18. The conveying unit con- position information sending unit 28f serving as one ex-
trol unit 28a activates the extension/retraction drive unit 15 ample of a second sending unit. The conveying unit 10
18 in a case where the number of inspection objects P continuously conveys a large number of inspection ob-
determined to be poor quality and present in the first pre- jects P at random positions. The X-ray irradiator 22 irra-
determined region, counted by the counting unit 28d, ex- diates the inspection objects P on the conveying unit 10
ceeds a first threshold value N1. with X-rays. The line sensor 24 senses X-rays transmit-
[0158] In the X-ray inspection system 100 of the 20 ted through the inspection objects P. The image gener-
present embodiment, poor-quality products can be col- ation unit 28b generates a transmitted X-ray image based
lectively removed by the extension/retraction drive unit on a sensing result from the line sensor 24. The inspec-
18 when the number of poor-quality products present in tion unit 28c inspects for poor quality in the inspection
a predetermined region of the conveying unit 10 is com- objects P based on the transmitted X-ray image. The
paratively large and cannot be processed by the robot 25 position information generation unit 28e, based on an
30. Therefore, a highly reliable X-ray inspection system inspection result from the inspection unit 28c, generates
100 that does not fail to remove any poor-quality products position information E relating to positions of the inspec-
can be realized without temporarily stopping the X-ray tion objects P determined to be poor quality on the con-
inspection system 100 (without taking the time required veying unit 10. The reference signal sending unit 28g
to stop/restart operation of the X-ray inspection system 30 sends a fixed-interval reference signal S, which is issued
100). every time the conveying unit 10 advances a distance
[0159] (4-7) In the X-ray inspection system 100 of the 2L, to a robot control unit 40 that controls the action of a
present embodiment, the robot control unit 40 controls robot 30. The position information sending unit 28f sends
the action of the robot 30 such that a movement distance the position information E to the robot control unit 40.
of the suction ejector 34a that takes away the inspection 35 The robot 30 has a suction ejector 34a as a removal
objects P determined to be poor quality reaches a mini- mechanism for removing the inspection objects P. The
mum in a case where three or more inspection objects robot 30 can move the suction ejector 34a in at least a
P determined to be poor quality are present in a prede- first direction D1 orthogonal to a conveying direction D2
termined region (a unit inspection region having a length of the conveying unit 10, and by using the inspection unit
of a distance L in the conveying direction D2) of the con- 40 28c, the robot 30 takes the inspection objects P deter-
veying unit 10. mined by the inspection unit 28c to be poor quality away
[0160] In the X-ray inspection system 100 of the from the conveying unit 10 using the suction ejector 34a.
present embodiment, because the suction ejector 34a is The robot control unit 40 controls the action of the robot
controlled so as to move a minimum distance, a greater 30 so that the suction ejector 34a comes near to and
number of poor-quality products can be taken away from 45 takes away the inspected object P determined by the
the conveying unit 10 in the same processing time in inspection unit 28c to be poor quality.
comparison to cases in which the movement distance of [0165] (4-11) An X-ray inspection method of the
the suction ejector 34a is not taken into consideration. present embodiment comprises an X-ray irradiation step,
[0161] (4-8) In the X-ray inspection system 100 of the a transmitted X-ray sensing step, an image generation
present embodiment, at the same point in time, the con- 50 step, an inspection step, a position information genera-
veying velocity of the conveying unit 10 in the region ir- tion step, a sending step, and a control step. In the X-ray
radiated with X-rays by the X-ray irradiator 22 and the irradiation step, X-ray is irradiated to a conveying unit 10
conveying velocity of the conveying unit 10 in the region that continuously conveys a large number of inspection
where the robot 30 (movement region of the suction ejec- objects P at random positions. In the transmitted X-ray
tor 34a) takes away the inspected object P are the same. 55 sensing step, transmitted X-rays transmitted through the
[0162] (4-9) In the X-ray inspection system 100 of the inspection objects P are sensed. In the image generation
present embodiment, the suction ejector 34a uses suc- step, a transmitted X-ray image is generated based on
tion to remove the inspection objects P determined to be a result of sensing the transmitted X-rays. In the inspec-

18
35 EP 4 027 135 A1 36

tion step, poor quality in the inspection objects P is in- (5-3) Modification C
spected based on the transmitted X-ray image. In the
position information generation step, based on an inspec- [0169] In the above embodiment, a case was de-
tion result from the inspection step, position information scribed in which the rotational speed of the conveyor mo-
E relating to the positions of the inspection objects P de- 5 tor 14 (the conveying velocity of the conveying unit 10)
termined to be poor quality on the conveying unit 10 is can be varied, but the rotational speed may be constant.
generated. In the sending step, the position information In this case, the conveying unit control unit 28a does not
E and a fixed-interval reference signal S issued every control the rotational speed of the conveyor motor 14,
time the conveying unit 10 advances a distance 2L are and the inspection objects P are conveyed at a constant
sent to a robot control unit 40 that controls the action of 10 velocity. In addition, when the inspection objects P are
a robot 30. The robot 30 has a suction ejector 34a as a always conveyed at a constant velocity, there is no par-
removal mechanism for removing the inspection objects ticular need for the image generation unit 28b to correct
P. The robot 30 can move the suction ejector 34a in at the transmitted X-ray image in accordance with the con-
least a first direction D1 orthogonal to a conveying direc- veying velocity of the conveying unit 10 or for the com-
tion D2 of the conveying unit 10, and, by using the suction 15 mand revision unit 44 to perform the command revision
ejector 34a, takes the inspected object P determined in process.
the inspection step to be poor quality away from the con-
veying unit 10. In the control step, the robot control unit (5-4) Modification D
40, based on at least the reference signal S and the po-
sition information E, controls the action of the robot 30 20 [0170] In the above embodiment, a case was de-
such that the suction ejector 34a comes near to and takes scribed in which the rotational speed of the conveyor mo-
away the inspected object P determined in the inspection tor 14 (the conveying velocity of the conveying unit 10)
step to be poor quality. is changed in two levels, but this example is not provided
by way of limitation; the rotational speed of the conveyor
(5) Modifications 25 motor 14 may be changed in multiple levels. For example,
the rotational speed of the conveyor motor 14 may be
[0166] Modifications of the present embodiment are changed in three or more levels based on the counting
presented below. Parts or all of individual modifications result from the counting unit 28d.
may be combined with other modifications as appropriate
as long as the modifications do not contradict each other. 30 (5-5) Modification E

(5-1) Modification A [0171] In the above embodiment, a mechanism where-


by the length of the belt conveyor 12 can be varied by
[0167] In the above embodiment, there is one robot the extension/retraction drive unit 18 was described as
30, but this example is not provided by way of limitation; 35 an article removal apparatus, but this example is not pro-
the X-ray inspection system 100 may have a plurality of vided by way of limitation. For example, another type of
robots 30. For example, individual robots 30 may be con- article removal apparatus, such as a conveyor that tilts
trolled so as to take away the inspection objects P in a conveyor downward to drop the inspection objects P,
regions that differ in the first direction D1. may be used as the article removal apparatus.
40 [0172] In addition, in the above embodiment, a case
(5-2) Modification B was described in which an article removal apparatus is
provided, but this example is not provided by way of lim-
[0168] In the above embodiment, the robot 30 uses itation; installation of the article removal apparatus may
suction to remove the inspection objects P via the suction be omitted. In this case, for example, when the quantity
unit 34, but the robot 30 may take the inspection objects 45 of inspection objects P determined to be poor quality ex-
P away from the conveying unit 10 via a means other ceeds a first threshold value N1, the X-ray inspection
than suction. For example, the robot 30 may have a grip- system 100 may temporarily stop the conveying of in-
per that grips the inspection objects P or a suction cup spection objects P performed by the conveying unit 10
that holds the inspection objects P by suction, and the so that a worker, etc., can remove the inspection objects
robot 30 may grip poor-quality inspection objects P on 50 P.
the conveying unit 10 to take away the objects from the
conveying unit 10. In a case of gripping a poor-quality (5-6) Modification F
inspected object P on the conveying unit 10, a series of
actions is required; namely, gripping the inspected object [0173] In the above embodiment, the robot 30 moves
P, moving the inspected object P, and releasing the grip 55 the suction ejector 34a, which services as a removal
on the inspected object P. Therefore, it is generally more mechanism, in a direction parallel to the conveying di-
efficient to use suction to remove inspection objects P. rection D2 as well as in the first direction D1 orthogonal
to the conveying direction D2, but this example is not

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37 EP 4 027 135 A1 38

provided by way of limitation. For example, the robot 30 a conveying unit configured to continuously con-
may be capable of moving the suction ejector 34a in only vey a large number of articles at random posi-
the first direction D1. tions;
[0174] From the standpoint of suppressing leftover in- an X-ray irradiation unit configured to irradiate
spection objects P determined to be poor quality, the suc- 5 the articles on the conveying unit with X-rays;
tion ejector 34a can preferably move not only in the first a transmitted X-ray sensing unit configured to
direction D1 but also in a direction parallel to the convey- sense X-rays transmitted through the articles;
ing direction D2. an image generation unit configured to generate
a transmitted X-ray image based on a sensing
INDUSTRIAL APPLICABILITY 10 result from the transmitted X-ray sensing unit;
an inspection unit configured to inspect for poor
[0175] The present invention is widely applicable and quality in the articles based on the transmitted
useful in X-ray inspection systems in which an X-ray in- X-ray image;
spection is performed on a large number of articles con- a position information generation unit configured
tinuously conveyed by a conveying unit, and articles as- 15 to generate, based on an inspection result from
sessed to be poor quality are rejected from the conveying the inspection unit, position information relating
unit as a result of the X-ray inspection. to a position of the article determined to be poor
quality on the conveying unit;
REFERENCE SIGNS LIST a robot having a removal mechanism for remov-
20 ing the articles, configured to move the removal
[0176] mechanism in at least a first direction orthogonal
to a conveying direction of the conveying unit,
10 Conveying unit and configured to take, by using the removal
18 Extension/retraction drive unit (article removal mechanism, the article determined by the in-
apparatus) 25 spection unit to be poor quality away from the
22 X-ray irradiator (X-ray irradiation unit) conveying unit; and
24 Line sensor (transmitted X-ray sensing unit) a first control unit configured to control, based
28a Conveying unit control unit (velocity control unit, on at least the position information and a fixed-
second control unit) interval reference signal issued every time the
28b Image generation unit 30 conveying unit advances a first distance, the ac-
28c Inspection unit tion of the robot so that the removal mechanism
28d Counting unit comes near to and takes away the articles de-
28e Position information generation unit termined by the inspection unit to be poor qual-
28f Position information sending unit (second send- ity.
ing unit) 35
30 Robot 2. The X-ray inspection system according to claim 1,
34a Suction ejector (removal mechanism) wherein
40 Robot control unit (first control unit, control unit) the robot is also configured to move the removal
100 X-ray inspection system mechanism in a direction parallel to the conveying
200 X-ray inspection apparatus 40 direction of the conveying unit.
D1 First direction
D2 Conveying direction 3. The X-ray inspection system according to the claim
E Position information 1 or 2, further comprising
P Inspection object (article) a counting unit configured to count, based on the
S Reference signal 45 result of the inspection of the inspection unit, the
number of articles determined to be poor quality and
CITATION LIST present in a first predetermined region of the con-
veying unit.
PATENT LITERATURE
50 4. The X-ray inspection system according to claim 3,
[0177] Patent Literature 1: Japanese Laid-open Patent further comprising
Publication No. 2004-279059 a velocity control unit configured to change a con-
veying velocity of the conveying unit, the velocity
control unit configured to control the conveying ve-
Claims 55 locity based on a counting result from the counting
unit.
1. An X-ray inspection system comprising:
5. The X-ray inspection system according to claim 4,

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39 EP 4 027 135 A1 40

wherein X-ray image;


the image generation unit is configured to correct the a position information generation unit configured
transmitted X-ray image in accordance with the con- to generate, based on an inspection result from
veying velocity of the conveying unit. the inspection unit, position information relating
5 to a position of the article determined to be poor
6. The X-ray inspection system according to any one quality on the conveying unit;
of claims 3 to 5, further comprising a first sending unit configured to send a fixed-
interval reference signal, which is issued every
an article removal apparatus configured to col- time the conveying unit advances a first dis-
lectively take away the articles present on the 10 tance, to a control unit that controls the action
conveying unit in a second predetermined re- of a robot, the robot having a removal mecha-
gion in the conveying direction, and nism for removing the article, configured to move
a second control unit configured to control the the removal mechanism in at least a first direc-
action of the article removal apparatus, tion orthogonal to a conveying direction of the
the second control unit is configured to activate 15 conveying unit, and configured to take, by using
the article removal apparatus in a case where the removal mechanism, the article determined
the number of articles determined to be poor by the inspection unit to be poor quality away
quality and present in the first predetermined re- from the conveying unit, the control unit config-
gion, counted by the counting unit, exceeds a ured to control the action of the robot such that
predetermined value. 20 the removal mechanism comes near to and
takes away the article determined by the inspec-
7. The X-ray inspection system according to any one tion unit to be poor quality; and
of claims 1 to 6, wherein a second sending unit configured to send the
the first control unit is configured to control the action position information to the control unit.
of the robot such that a movement distance of the 25
removal mechanism that takes away the articles de- 11. An X-ray inspection method comprising:
termined to be poor quality reaches a minimum in a
case where three or more articles determined to be an X-ray irradiation step in which X-rays is irra-
poor quality are present in a predetermined region diated to a conveying unit that continuously con-
of the conveying unit. 30 veys a large number of articles at random posi-
tions;
8. An X-ray inspection system according to any one of a transmitted X-ray sensing step in which trans-
claims 1 to 7, wherein mitted X-rays transmitted through the articles
at the same point in time, the conveying velocity of are sensed;
the conveying unit in the region irradiated with X- 35 an image generation step in which a transmitted
rays by the X-ray irradiation unit and the conveying X-ray image is generated based on a result of
velocity of the conveying unit in the region where the sensing the transmitted X-rays;
robot takes away the article are the same. an inspection step in which poor quality in the
articles is inspected based on the transmitted X-
9. An X-ray inspection system according to any one of 40 ray image;
claims 1 to 8, wherein a position information generation step in which,
the removal mechanism is configured to use suction based on an inspection result from the inspec-
to remove the articles determined to be poor quality. tion step, position information relating to a posi-
tion of the article determined to be poor quality
10. An X-ray inspection apparatus comprising: 45 on the conveying unit is generated;
a sending step in which the position information
a conveying unit configured to continuously con- and a fixed-interval reference signal issued eve-
vey a large number of articles at random posi- ry time the conveying unit advances a first dis-
tions; tance are sent to a control unit that controls the
an X-ray irradiation unit configured to irradiate 50 action of a robot that has a removal mechanism
the articles on the conveying unit with X-rays; for removing the article, that is configured to
a transmitted X-ray sensing unit configured to move the removal mechanism in at least a first
sense X-rays transmitted through the articles; direction orthogonal to a conveying direction of
an image generation unit configured to generate the conveying unit, and that is configured to take,
a transmitted X-ray image based on a sensing 55 by using the removal mechanism, the article, de-
result from the transmitted X-ray sensing unit; termined to be poor quality in the inspection
an inspection unit configured to inspect for poor step, away from the conveying unit; and
quality in the articles based on the transmitted a control step in which the control unit, based

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41 EP 4 027 135 A1 42

on at least the reference signal and the position


information, controls the action of the robot such
that the removal mechanism comes near to and
takes away the article determined to be poor
quality in the inspection step. 5

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REFERENCES CITED IN THE DESCRIPTION

This list of references cited by the applicant is for the reader’s convenience only. It does not form part of the European
patent document. Even though great care has been taken in compiling the references, errors or omissions cannot be
excluded and the EPO disclaims all liability in this regard.

Patent documents cited in the description

• JP 2004279059 A [0003] [0004] [0005] [0177]

35

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