XGT - 9000 Series

μXRF Analytical Microscope

Sample type Solids, Liquids, Particles

Detectable elements C – Am

Optical observation Two high resolution cameras with

objective lens
Specification

Optical design Vertical-Coaxial X-ray and Optical

observation

Sample Top, Bottom, Side illuminations/Bright

illumination/observation and Dark fields

Number of probes Up to 4

Primary X-ray filters for 5 positions

spectrum optimization

Mapping area 100 mm x 100 mm

Unique features
Simultaneous imaging of fluorescent X-rays and transmission X-rays
Elemental images Transmission image Layered image

1mm 1mm
1mm

Voids in solder detected Foreign particle detected

(voids in solder are not seen and identified
with elemental image only)

Clear and flexible optical image

Key features
Multi-probes including most advanced 15 μm ultra-high intensity
<Multiple probes for the XGT-9000 Series to select> (a) (b)
- 10 µm probe
- 50 µm probe 30 µm
- 100 µm probe 30 µm
- 400 µm probe
- 1.2 mm probe
- 15 µm ultra-high intensity probe
- 100 µm ultra-high intensity probe
(a) Cu image on Copper mesh with 30 µm holes
(b) Transmission X-ray image of wire patterns inside a IC chip

Wide detectable element range: from carbon to americium

(b)
The XGT-9000 Series can be equipped with a
light elements detector (optional) that allows the
measurement down to carbon. With this detector,
the XGT-9000 Series offers more possibilities for
analysis of polymers and biological samples, or
for applications in geoscience, mineralogy, arche- Fluorite stone
ology, and ceramics.

(b) Fluorite stone

Multiple measurement environments for your analysis

(021) 4516222 (Jakarta)

w w w. i t s - i n d o n e s i a . c o m info@its-indonesia.com
(031) 7323631 (Surabaya)