2018 3rd Asia-Pacific Conference on Intelligent Robot Systems
Design of an Electrothermally Actuated SU-8 Based Microgripper for Biomedical
Applications
Muhammad Zaeem Abbas, Muhammad Umar Masood, Muhammad Mubasher Saleem, Muhammad Fahad Sheikh
National University of Sciences and Technology
Islamabad, Pakistan
e-mail: muhammad.zaeemabbas86@mts.ceme.edu.pk, mumarmasood@ceme.nust.edu.pk,
mubasher.saleem@ceme.nust.edu.pk, fahad.sheikh86@mts.ceme.edu.pk
Abstract—Micromanipulation has become a significant task in
the fields of microelectromechanical systems, cell biology and
cell mechanics in past few decades. To study cell mechanics
and cell biology, samples are required. In general, these
samples are taken with the help of a microgripper, also known
as micro-tweezer and micromanipulator. In this paper, a
biocompatible microgripper design is presented for single cell
manipulation. SU-8 material is selected due to biocompatibility
and thermal properties for microgripper design.
Electrothermal actuators are used to provide input
displacement and force to compliant mechanism. Compliant
mechanism include Scott Russell mechanism, Multi-stage
Compound Radial Flexure and leverage mechanism, which
provide amplification in output displacement at low power.
Response of microgripper is close to linear for accurate and
intelligent manipulation task. Jaws are designed to grip cells
and objects of various shapes and sizes. Results are produced
using finite element analysis software, to check the usability of
design for biomedical applications. 30 m displacement is
achieved at low voltage of 50 mV, keeping temperature of
gripping jaws at room temperature.
Keywords-microgripper; electrothermal; cell manipulation
I. INTRODUCTION
In recent years, microgrippers are commonly used for
micromanipulation in multiple fields of science. Gripping
objects, pick and place, translate, rotate, manipulating,
assembling, they have a wide range of applications. From
assembly of complex micro-machines in the field of
microelectromechanical systems (MEMS) to manipulating
and taking samples of cells and tissues in the field of cell
biology, their applications exist in multiple domains. Design
characteristics of a microgripper are based on its application
and use. Actuator type, power consumption, compliant
mechanisms, gripping jaws, displacement and force at jaws,
and material type are some of the important characteristics to
look for while designing a microgripper.
Before the development of microgrippers, micropipettes
[1] and optical tweezers [2] were used for taking samples,
isolated particles and cells, for experimentation and use
purposes. Silicon based electrostatically driven
microgrippers were presented, with large number of
electrostatic comb drives, which require high voltage and
increases the overall size of the microgrippers [3]. Capacitive
transverse comb drive sensors, Piezoresistive sensors and
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electrothermal resistive sensors were used to measure force
and displacement. High actuating voltage cause objects to
stick to the jaws, which required releasing mechanism [4]
and cause electrolysis [5]. Microgrippers with piezoelectric
actuator are large in size due to displacement amplification
mechanism, as piezoelectric actuators provide high force and
low displacement when actuated. These mechanisms are
considered as pseudo rigid body models (PRBM) with
flexure hinges and springs. Parasitic motion principle [6],
parallelogram mechanism, leverage mechanism, Scott
Russell mechanism [7], parallelogram flexure mechanism [8],
differential amplification mechanism, parallel cantilever
beam springs [9] and homothetic bridge mechanism [10], are
some of the mechanisms used in piezoelectric microgrippers
to achieve single axis or dual axis in-plane motion at jaws.
High temperature and hysteresis are difficult to control,
hence, increasing the cost of microgrippers. Electromagnetic
actuator based microgrippers have large sizes [11]. Shape
memory alloy also show hysteresis and increases the overall
cost [12].
Electrothermally actuated microgrippers provide solution
to the problems faced during micromanipulation, if carefully
designed. Silicon based electrothermal microgrippers
required high voltage [13], enough to cause electrolysis in
aqueous medium [5] and have high temperature. The output
displacement of silicon based microgrippers is satisfactory at
high temperatures [14], making is unsuitable for biomedical
applications due to its high coefficient of thermal
conductivity. Metal based microgrippers show good
displacement to low voltage [15] with high temperature, is
not suitable for bio-manipulation. The microgrippers made
from SU-8 polymer shows favorable results due to high
coefficient of thermal expansion and low coefficient of
thermal conductivity, making it suitable for bio-manipulation.
Thin electrothermal heaters embedded in polymer based
microgrippers required low actuation power [16]. High
coefficient of thermal expansion provides good actuation
displacement [17] while low coefficient of thermal
conductivity gives advantage, to avoid high temperature
reaching at gripping jaws. SU-8 based microgrippers shows
small gripping range with no amplification mechanism.
However, leverage mechanism was used to increase
displacement [5]. Compact size of electrothermal actuator
gives an advantage to reduce the overall size of microgripper.
Electrothermal actuators can be used in various forms and
can be modified, if needed, to increase force or displacement.
Cells and tissues vary in size, so a microgripper with
wide gripping range is desired. Unlike silicon, SU-8 does not
cause cell to stick at jaws of the microgripper upon release.
Actuation voltages are lower than electrolysis voltage i.e.,
1.29 V, are used to actuate SU-8 and gold electro thermal
actuator. The compliant mechanism, like the ones used in
piezoelectric microgrippers, are seldom used in
electrothermal microgrippers, to improve output
displacement at jaws. Using such mechanisms, improves the
functionality of microgripper and becomes applicable in
fields other than cell biology.
II. MICROGRIPPER DESIGN
To design an electrothermally actuated microgripper for Figure 2. Important parameters of microgripper.
bio-manipulation, there are some constraints. To manipulate
cell without damaging it, temperature at jaws of the TABLE I. PARAMETERS WITH VALUES
microgripper must be close to room temperature, so that the Parameter Representation Value Unit
cell does not burn. Actuating voltage must be kept below Length of microgripper arm Larm 500 m
1.29 V to avoid electrolysis, as the cells exist in aqueous
Outer radius of MCRF structure Ror 280 m
mediums and contains water itself. Materials used in
microgripper should be compatible and must not react with Length of MCRF springs lR 160 m
cells and its environment. Microgripper jaws have enough Width of MCRF springs wR 5 m
displacement to grip the type of cells under consideration.
Compliant mechanism used in the design used for Length of Scott Russell link l 139.7 m
amplification and certain type of motions, should not damage Scott Russell mechanism angle  15 
cells or any object under manipulation. To design an Ellipse major axis (ax > ay) ax 25 m
electrothermal actuator, electrical, thermal and mechanical
properties of a material are considered. Polymer like SU-8 Ellipse minor axis ay 7.5 m
with low melting point, overall temperature of microgripper Vertical length of actuator beam lbeam 200 m
should be kept below melting point to avoid any damage to
Width of actuator beam bbeam 10 m
microgripper. Using high coefficient of thermal expansion to
achieve maximum displacement and using low thermal Length of shuttle lsh 20 m
conductivity to avoid high temperature at jaws. Minimum Angle of actuator beam b 1.43 
feature size is kept 5 m as fabrication of SU-8 based design
becomes difficult. All the parts of the microgripper are A. Electrothermal Actuator
modeled and assembled using SolidWorks software. To
To actuate a microgripper, an actuator is required to
reduce the cost of fabrication process, this design requires
transform electrical energy to mechanical energy. Electro-
only two masks to fabricate it. All the main components of
thermal actuators are compact in size and have low power
microgripper are shown in Figure 1. The overall size of
consumption. Hot and cold arm actuator, U-shaped actuator
microgripper is 1112  759  20 m3. Important parameters
and V-shaped actuator are some of the types of
of this microgripper are shown in Figure 2 and dimensions
electrothermal actuator. Among various electrothermal
are given in Table I.
actuators, V-shaped electrothermal actuators are preferred
when linear motion is required. V-shaped actuators, also
known as chevron actuators, are compact in size and can be
used in both series and parallel combination.
A pair of V-shaped actuators are used to actuate each arm
of microgripper. This pair of chevron actuators are connected
in parallel to provide enough force to grip objects. Each
actuator consist of a 300 m thin gold heater, embedded in
between two layers of SU-8 polymer. When electrical power
is applied to both ends of gold heater in actuator, temperature
increases due to joule heating effect. Adhesion of gold with
SU-8 is poor. Therefore, a thin layer of chromium to top and
bottom of gold is added to improve adhesion with SU-8. SU-
8 has large coefficient of thermal expansion, which upon
Figure 1. Complete microgripper with components and anchored points.

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heating, expands and actuator shows displacement in
outward direction.
B. Compliant Mechanisms
Among various displacement amplification mechanisms,
a few have been implemented for displacement amplification
of polymer based microgrippers. Generally, class 3 leverage
mechanism is used for amplification of due to its simple
design. Scott Russell mechanism and leverage mechanism
are used in this design.
The mechanical work done by the actuator is transmitted
to Scott Russell mechanism as it provides good displacement
amplification. This mechanism is compact in size and
changes the direction of motion. The links of Scott Russell
mechanism are considered as PRBM. It consist of four
notches and remaining body is assumed rigid. Each notch is
elliptical in shaped and modeled as revolute joint at center of
notch with a torsional spring. All four notches used in this
mechanism are of same size. Dimensions of Scott Russell
mechanism are optimized to minimize the overall size as
well as keep the links rigid. This mechanism provides
amplification in displacement while keeping input and output
displacement unidirectional. It is further connected to a
leverage mechanism through multi-stage compound radial
flexure (MCRF). To change direction of displacement,
MCRF is used, which also acts as a torsional spring. One end
of the MCRF is connected to output of Scott Russell
mechanism and the other end is connected to the gripping
arm. This gripping arm acts as a leverage mechanism,
providing amplification in displacement at the jaws of
microgripper. Both, Scott Russell mechanism and leverage
mechanism are connected in series, hence amplifying the
input displacement by the product of both amplification
factors. The leverage mechanism resembles class 3 lever.
Force is applied between load and pivot. Small displacement
as input, results in large displacement as output, resultant
force is the reciprocal of displacement amplification factor.
MCRF is flexure spring based structure provides motion
around a pivot to the lever.
MCRF is used where high precision radial motion is
required. Moveable parts are separated from anchored parts
through flexure springs. Flexure springs provide torsional
stiffness when force is applied to one end of MCRF. It has
multiple advantages over conventional radial flexures. It can
provide large rotations while keeping the stress very low due
to its multi-stage design. In MCRF, multiple layers of
flexures springs are added in series, increasing the length of
springs and keeping the overall size of radial bearing equal
as compared to conventional bearings. Due to increase in
length of springs, MCRF can rotate at large angles, keeping
the stress very low. Stage 2 MCRF is used in this design to
achieve large rotations with low stress. All the springs are
same in size, hence, provide precise radial motion.
C. Gripping Jaws
Jaws of the microgripper vary with its application and
type of objects to be manipulated. A microgripper jaws
should not damage the object or lose grip under any
circumstances, during micromanipulation. Some objects,
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during manipulation, develop forces of attraction with the
jaws of the microgripper. This results in addition of release
mechanism to remove the object from the jaws, hence
increasing the overall size of the microgripper. For
Biomedical applications and manipulation purposes,
temperature at the microgripper jaws should be at ambient
temperature to avoid any damage. Cells vary in size,
microgripper jaws must be able to grip and hold cell without
damaging it during micromanipulation. To grip wide range
of cells, there are two sets of elliptical jaws shown in Figure
3. The small set of jaws are designed to grip small cells with
diameter ranging from 3 m to 10 m while large set of jaws
can grip cells with diameter ranging from 11 m of 90 m.
Figure 3. Elliptical jaws with wide gripping range.
III. FINITE ELEMENT ANALYSIS
To verify the validity of this microgripper design, finite
element analysis (FEA) is done on commercially available
tool ANSYS. To ease the process of simulation, only half of
the microgripper is simulated, since both halves are the same.
Figure 1 shows locations of anchored parts of microgripper.
Parts of microgripper other than notch hinges, flexure
springs and actuator are considered as rigid bodies. Ambient
temperature conditions are applied to the microgripper at
anchored points. Voltage difference is applied to the ends of
chevron actuator, resulting in joule heat.
Two type of analysis are carried out to verify the design.
Thermal-electric analysis is used to get temperature profile
and current density. Static structural analysis is used to
understand the deformations in structure and movement at
the jaws of the microgripper. Material properties used for
simulation are given in Table II.
TABLE II. MATERIAL PROPERTIES USED IN FEA
Material Property (Unit) SU-8 Gold
Young’s Modolus (GPa) 4.6 57
Poison Ratio 0.22 0.35
Density (Kg m-3) 1200 19300
Specfic Heat (J Kg-1 K-1) 1674.8 128.7
Thermal Conductivity (W m-1 K-1) 0.2 297
Coefficient of Thermal Expansion (K-1) 5210-6 14.210-6
Electrical Resistivity ( m) - 2.410-8
A. Thermal-Electric Analysis
This dual domain analysis aids in studying the effects of
the electric current, joule heat and ambient temperature on
the microgripper. When 50 mV voltage is applied to opposite
ends to chevron actuator heater, joule heat is produced,
causing the temperature of actuator to increase and joining
parts of microgripper. A single arm of microgripper is
anchored at four locations and at ambient temperature of 25
C.

Figure 5(b). Displacement along Y-axis.

Figure 4. Temperature profile showing heat sinking at anchored points.

Temperature profile in Figure 4 is showing low

temperature of 67 C at actuator. Some of the heat generated
sinks in to the substrate at anchored points and temperature
drops to the ambient temperature. Convection has a minute
effect on MEMS devices. Results showed current density of
4.7 mA/um2 through single actuator beam at 50 mV. Current
density profile shows uniform current through the actuator
beams. Current and power can be calculated using this
profile.
B. Static Structural Analysis
Static structural analysis takes temperature as input data
from thermal-electric analysis to simulate the effects of
thermal expansion in actuator and other parts of the
microgripper. Only half of microgripper is simulated and
anchored at four points. Displacement from the actuator,
amplifications from the Scott Russell mechanism and
leverage mechanisms, and deformation of elliptical notch Figure 6. Maximum stress at central notch hinge of Scott Russell
hinges and flexure springs are seen in this analysis. Figures mechanism.
5(a) and 5(b) shows deformation along X-axis and Y-axis
respectively. Tip of gripping jaws shows displacement of 15 m along
X-axis at single jaw. Due to large gripping arm radius, dis-
placement along Y-axis is less than a micron. Hence, it does
not affect the tasks of micromanipulation. Stress analysis is
one important feature of simulation to check the validity of a
microgripper structure. It show stresses in flexure springs
and notch hinges. Figure 6 shows maximum stress of 22
MPa at central notch hinge of Scott Russell mechanism.
Stress above 25 MPa would decrease the operating cycles of
microgripper significantly.
IV. RESULTS
Results are compiled from data collected from analysis.
Microgripper is simulated using voltage range from 5 mV to
50 mV. Voltage versus displacement graph for single arm in
Figure 7. The relation between voltage and displacement is
not linear. Total displacement of 30 m is achieved at 50 mV
voltage. Gripping jaws can easily grip micro objects with
Figure 5(a). Displacement along X-axis. diameter ranging from 62 m to 92 m, due to large jaw

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displacement and multi-purpose jaw design. In Figure 8,
graph between voltage and temperature shows a nonlinear
behaviour. Maximum temperature at the middle of actuator
is 67 C, however, the temperature at the jaws is 25 C.
Melting point of SU-8 is 210 C, so temperature above the
210 C will damage the microgripper structure. Voltage
above 50 mV will result in higher stress values.
Figure 7. Voltage vs displacement graph for single arm.
Figure 8. Voltage vs maximum temperature at actuators.
Figure 9. Power vs displacement graph of complete microgripper.
Power vs displacement graph in Figure 9 is important to
ensure the minimum power consumption of the microgripper.
It shows nonlinear behavior similar trend to voltage vs
displacement graph. Power consumption of the complete
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microgripper is 3 mW at fully actuated state at the
temperature of 67 C, giving output displacement of 30 m.
However, power consumption will vary, if actuated in a
different medium.
V. CONCLUSION
A biocompatible microgripper for bio manipulation with
compliant mechanisms is reported in this paper.
Electrothermal actuator with amplification mechanisms
provide large dis-placement with low input power.
Electrothermal actuators with low power consumption and
compact size, they also add the risk of damaging cell with its
high temperature. However, with proper design and making
sure that high temperature does not reach the jaws of the
microgripper makes it viable for use. MCRF springs have
low stresses but elliptical hinges in Scott Russell mechanism
show high stresses limiting the functionality of the
microgripper. However, Scott Russell mechanism provides
large amplification in displacement. Due to low voltage,
electrolysis is not possible while actuating in aqueous
medium, as cells exist in such mediums. Gripper jaws are
designed to manipulate objects of various shapes and sizes,
keeping forces low, to avoid any damage during
micromanipulation. For our future work, an electrothermal or
a piezo-resistive force and displacement sensor will be
implemented intelligent gripping process and reduce non-
linearity.
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