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Abstract
The electromagnetic piezoelectric hybrid-driven 3-degree-of-freedom motor is a new multi-degree-of-freedom motor.
To further analyze the torque characteristics of the electromagnetic piezoelectric hybrid-drive 3-degree-of-freedom
motor. First, the principle and basic structure of the hybrid-drive motor are introduced, and the displacement and pres-
sure distribution of the stator–rotor contact surface are obtained by analytical method. Based on this, the torque model
of the piezoelectric stator-drive motor is obtained. Then, the air-gap magnetic field model of the permanent magnet
rotor is obtained by analytical method, and the electromagnetic stator-torque model is obtained. Finally, the torque
model of the electromagnetic piezoelectric hybrid-drive 3-degree-of-freedom motor is established by vector synthesis.
The effects of piezoelectric stator mounting position angle, stator–rotor contact materials, and preload on motor torque
are analyzed by simulation. The advantages of electromagnetic piezoelectric hybrid drive are analyzed, and the rationality
of the model is preliminarily verified. It lays the foundation for further optimization design and performance improve-
ment of electromagnetic piezoelectric hybrid-drive 3-degree-of-freedom motor.
Keywords
Torque model, piezoelectric motor, hybrid drive, 3 -degree-of-freedom, electromagnetic characteristics
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2 Advances in Mechanical Engineering
freedom motor. The hollow cylinder of the stator of the has high mechanical integration and simple transmis-
motor acts to conduct amplifying vibration, and the sion, the structure of electromagnetic-drive multi-
vibration is provided by a piezoelectric layer below the degree-of-freedom motor is relatively complicated, and
cylinder. Muroran Institute of Technology proposed a the magnetic field is difficult to control. The improve-
disk-type multi-degree-of-freedom ultrasonic motor ment of control and positioning accuracy is always a
and conducted in-depth comparative studies on differ- difficult point. The torque output produced by the
ent bearing lubrication methods.4,5 Zhejiang University rotor is very difficult and the loss is large during torque
conducts in-depth research on mathematical models output. At present, the structure of electromagnetic-
and motion control of traveling wave multi-degree-of- drive multi-degree-of-freedom motor is more compli-
freedom motors.6,7 Shanghai University proposed a cated, and the reliability still falls short of the required
sandwich motor of more than 10 degrees of freedom8 state.19
and established a fixed-rotor contact model. Nanjing The development of electromagnetic piezoelectric
University of Aeronautics and Astronautics proposed a hybrid-drive motors has gradually become a develop-
circular standing wave multi-degree-of-freedom motor9 ment trend.20–23 Piezoelectric-drive multi-degree-of-
and reviewed the current problems in the design of this freedom motor is immune to external electromagnetic
type of motor. Harbin Institute of Technology pro- interference, which provides the possibility of electro-
posed a sandwich ultrasonic multi-degree-of-freedom magnetic piezoelectric hybrid-drive multi-degree-of-free-
hybrid-drive motor,10 and they produced a prototype dom motor development. The electromagnetic-drive
and analyzed the characteristics of the variable excita- multi-degree-of-freedom motor24,25 has relatively com-
tion mode of multi-degree-of-freedom ultrasonic plicated structure, the magnetic field is difficult to con-
motor. Southeast University has designed a multi- trol, the control and positioning accuracy is low, the
degree-of-freedom ultrasonic motor with a double sta- torque output by the rotor is difficult, and the torque
tor clamping structure,11 which has improved drive tor- loss is large. Piezoelectric-drive multi-degree-of-freedom
que and improved output performance and stability. motors have problems such as low lifetime and perfor-
Piezoelectric-driven motors have received the widest mance affected by fixed-rotor friction materials. The
attention because of their high power density, stable multi-degree-of-freedom motor with electromagnetic
efficiency at very small dimensions, high positioning drive is suitable for working at high speed and low tor-
accuracy, fast response, and power-off interlocking.12 que, but its structure is complicated and it is difficult to
However, since the piezoelectric-driven motor is based achieve miniaturization, and the control-positioning
on friction transmission, its performance and life accuracy is low, which is not suitable for precise work.
depend on the performance of the friction interface.13 Multi-degree-of-freedom motor with piezoelectric drive
Electromagnetic-drive multi-degree-of-freedom is compact in structure, flexible in design, easy to realize
motors were developed first by the Soviets. In recent miniaturization, self-locking, fast response, and free
years, international scholars have done a lot of research from external electromagnetic interference. It is espe-
on electromagnetically driven multi-degree-of-freedom cially suitable for low-speed and high-torque applica-
motors. For example, Tianjin University applied tions; but the life of piezoelectric-driven motor is short,
Halnach array structure to spherical multi-degree-of- and it is not suitable for continuous operation.
freedom motors to improve the complexity of motor Therefore, combining the electromagnetic drive and the
magnetic field distribution and motor performance.14 piezoelectric drive can not only avoid the problems of
Hefei University of Technology proposed a new spheri- the two drive modes but also improve the speed, accu-
cal multi-degree-of-freedom stepper motor15 and ana- racy, and torque of the motor.
lyzed the magnetic field, torque, and mechanical model In order to further study the electromagnetic piezo-
of the motor in detail. On the basis of summarizing the electric hybrid-drive multi-degree-of-freedom motor, a
advantages and disadvantages of the predecessors, 3-degree-of-freedom electromagnetic piezoelectric
Hebei University of Science and Technology proposed hybrid-drive motor was modeled and analyzed. First,
a new 3-degree-of-freedom motor with double-layer coil the piezoelectric-driven stator–rotor contact model and
rotor single-layer permanent magnet structure and opti- the electromagnetically driven air-gap magnetic field
mized the motor structure by particle swarm optimiza- model are established by combining the piezoelectric
tion.16 Hanyang University proposed a new 3-degree- drive and electromagnetic-drive principle. Then the tor-
of-freedom motor with a double-excitation source of que model of the electromagnetic piezoelectric hybrid-
sandwich structure.17 This motor greatly reduces the drive 3-degree-of-freedom motor is established by
cost of the motor because the rotor no longer uses per- vector synthesis method. The simulation software ana-
manent magnets. Nanyang Technological University lyzes the influence of piezoelectric-drive stator position,
proposed a spherical motor for conformal printing,18 stator–rotor contact material, and preload on motor
which greatly improves the reliability of the printing torque and verifies the rationality of the analysis results
system. Although the multi-degree-of-freedom motor by finite element analysis.
Li et al. 3
Figure 2. Electromagnetic piezoelectric hybrid-drive 3-degree-of-freedom motor rotor and piezoelectric stator.
4 Advances in Mechanical Engineering
The above assumptions are brought into the piezo- Contact model of stator and rotor
electric equation to obtain
It is assumed that the contact layer of the stator is an
X1 = c11 x1 e13 E3 ð7Þ elastomer. The stator is displaced to the maximum dis-
placement in the Z-axis direction when the stator is in
According to Newton’s second law, the equation of contact. The stator is a rigid body and does not dis-
motion of ceramic sheets can be known place, and the friction between the stator and rotor is
ignored. The stator–rotor contact is equivalent to the
∂2 u ∂X1 contact of the parabolic indenter with the contact layer
r = c11 2 ð8Þ
∂t2 ∂x (elastomer) as shown in Figure 4.
The preload applied by each stator is F, then the
Equation (7) is brought into equation (8) to obtain
one-dimensional pre-stress experienced by each peak is
P = (F=nb), the number of waves is n, and b is the
∂2 u ∂u ∂E3
r = c11 2 e13 ð9Þ equivalent width of the fixed-rotor contact.
∂t2 ∂x ∂x The waveform of the stator waveform at a certain
The electric field component E3 is a uniform electric time is u1 = AcosðkxwtÞ, and the radius of curvature
field of the waveform
Li et al. 5
h i3
ð1
1 + du1 2 2 1 1
dx 1 t2 2 lnjt xjTn ðt Þdt = n1 Tn ð xÞ ð23Þ
R = 2
d u1
ð15Þ p
dx 2 1
Form obtained p(j) according to equation (23)
The stator–rotor contact zone displacement function
can be set to E 1 j E 1
p ðj Þ = a0 a a2 j2 2 T0 + a1 a a2 j2 2
2 a 2
x2
w= + d0 , z = 0, j xj ł a ð16Þ j E
1 j
2R T1 + a2 a a2 j2 2 T2
a 2 a
where d0 is an unknown constant. ð24Þ
When the stator friction is neglected, the stator and
rotor boundary shear force is 0: x = 0, t xy = 0. The contact pressure of the contact point of the con-
The normal stress distribution of the fixed rotor is: tact zone is 0, so, pð 6 aÞ = 0, a0 = a2 , a1 = 0
p(x), z = 0, jxj ł a. Where E is the elastic modulus of Equation (24) is taken into equation (17) to
the contact layer.
2P
According to the balance of the stator and rotor a0 = ð25Þ
paE
ða
Equation (24) is taken into equation (19) to
pð xÞdx = P ð17Þ
a 1 2x2 x2
a0 a ln 2 + a2 a 2
1 = + d0 ð26Þ
2 a 2R
a is half of the fixed-rotor contact distance for one
wavelength of the stator. Therefore, a2 = (1=2R), d0 = (1=2)að2a0 ln 2 a2 Þ,
When the stator’s normal contact force p(j) acts, the it is further known that P = (pEa2 )=4R,
vertical displacement expression27 The stator-torque contact surface force distribution
ða equation
1
w= lnðx jÞ2 pðjÞdj + B00 ð18Þ 1
pE PE 2 1
a pð xÞ = a2 x2 2 , z = 0, j xj ł a ð27Þ
pRa2
Suppose the rigid body does not shift, so B" = 0.
So we get The displacement equation of the stator–rotor con-
tact surface
ða
1 x2
lnðx jÞ2 pðjÞdj = + d0 ð19Þ x2 P
pE 2R u= + ð2 ln 2 + 1Þ, z = 0, j xj ł a ð28Þ
a 2R pE
2c 3
ða ð ða According to the structure of the permanent magnet,
F= sign(vrel )md p(x)dx = 2md 4 p(x)dx p(x)dx5 the residual magnetization of the motor in the spherical
a 0 c coordinate system can be expressed as
ð31Þ 8 9 8 9
< Mrr = < cos f ap sin u =
where c is the point at which the relative sliding speed Mr = Mru = ( 1)p1 jMr j cos f ap cos u;
: ; :
of the rotor is zero. When c = a, the maximum tangen- Mru sin f ap
tial thrust is obtained, and the single stator obtains the ð38Þ
maximum output torque
where p (p = 1, 2, 3, 4) is the permanent magnet num-
Tj = nR1 F ð32Þ ber, L is the total number of permanent magnets.
where n is the number of traveling wave peaks; R1 is the ap = a=2 + 2p(p 1)=L, p=2 b=2 ł u ł p=2 + b=2,
radius of the stator rotor contact surface; j = 1, 2, 3. pðp 1Þ=L ł f ł a + pðp 1Þ=L, a is a permanent
magnet with a longitude angle of 90°, and b is a perma-
nent magnet with a latitude angle of 50°.
Electromagnetic stator-drive model In the spherical coordinate system, the magnetic
position V can be expressed as a function of the spatial
Electromagnetic-drive stator–rotor air-gap magnetic point (r, u, u), that is, V(r, u, u), where r is the coordi-
field nate radial distance of the point, u is the latitude, and
According to the boundary condition of the magnetic u is longitude.
medium, the magnetic field generated by the rotor per- The Laplace equation of the magnetic position V can
manent magnet can be divided into three parts be expressed as the Laplace equation of the scalar mag-
8 netic position
< B1 = m0 H1 0 ł r ł Ri
B = B2 = m0 mm H2 + m0 Mr Ri ł r\Ro ð33Þ 1 ∂ 2 ∂V 1 ∂ ∂V 1 ∂2 V
: r + sin u + =0
B3 = m0 mr H3 røRo 2
r ∂r ∂r 2
r sin u ∂u ∂u r sin2 u ∂f2
2
ð39Þ
where m0 is the magnetic permeability value in the air
(m0 = 1), mm is the relative magnetic permeability Assume V (r, u, f) = R(r)Y (u, f), brought it into
(mm = 1:02), the permanent magnet of the motor is equation (39)
NdFeB, and Mr,(Mr = Br =m0 ),is the residual magneti-
zation, and Br is the residual magnetic induction
Y (u, f) ∂ 2 ∂R(r) R(r) ∂ ∂Y (u, f)
(Br = 1 T), which is the relative magnetic permeability r + sin u
r2 ∂r ∂r r2 sin u ∂u ∂u
of the rotor material. mr is the relative magnetic perme-
ability (mr = 1). R(r) ∂2 Y (u, f)
+ =0
According to the principle of the motor, there is no r2 sin2 u ∂f2
current excitation in the rotor area, which can be ð40Þ
obtained
Equation (40) is divided by R(r) Y(u, u)
r 3 Hk = 0, k = 1, 2, 3 ð34Þ
1 ∂ 2 ∂R(r) 1 ∂ ∂Y (u, f)
The negative value of the gradient of the scalar mag- r + sin u
r2 R(r) ∂r ∂r Y (u, f)r2 sin u ∂u ∂u
netic position can represent the magnetic field strength
1 ∂2 Y (u, f)
+ =0
Hk = rVk , k = 1, 2, 3 ð35Þ Y (u, f)r sin u ∂f2
2 2
ð41Þ
According to the structure of the motor, the perma-
nent magnets are symmetrically distributed, so Equation (41) is multiplied by r2 on both sides, and
the variables are adjusted
r Mr = 0 ð36Þ
Then the scalar magnetic positions of the three 1 ∂ 2 ∂R(r) 1 ∂ ∂Y (u, f)
r = sin u
regions satisfy the Laplace equation R(r) ∂r ∂r Y (u, f) sin u ∂u ∂u
8 1 ∂2 Y (u, f)
< 2
r V1 = 0 =m
Y (u, f)sin2 u ∂f2
r2 V2 = m1 r Mr = 0 ð37Þ
: 0 ð42Þ
r2 V3 = 0
Li et al. 7
b
1. The magnetic mark is 0 at infinity p
2+2
ð
2
cmn = Snm Pm
n cos usin udu ð57Þ
V1 jr!‘ = 0 ð48Þ
p b
2 2
so, Cn, 1 = 0. 2 P 3
‘ Pn m
2. The magnetic mark is finite at the origin of the m 1
(n + 1)mr Dn1 rn + 2 Yn (u, f)
magnetic field 2 3 6 n = 0 m = n 7
B1r 6 ‘ 7
6 P P n m
∂Yn (u, f) 7
4 5
B1 = B1u =6 6 m 1
mr Dn1 rn + 2 7
V3 jr!0 6¼ ‘ ð49Þ ∂u 7
B1f 6 n = 0 m = n 7
4 P ‘ Pn m 5
m 1 1 ∂Yn (u, f)
mr Dn1 rn + 2 sin u ∂f
so, Dn, 3 = 0. n = 0 m = n
3. The tangential and radial components of the ð58Þ
magnetic induction at the interface of the
8 Advances in Mechanical Engineering
2 P
‘ P
n 3
m n1 m 1 m
m0 mm nCn, r (n + 1)D Y (u, f)
2 3 6 n = 0 m = n
2 n, 2 rn + 2 n 7
B2r 6 7
6 P‘ Pn 7
6 7 6 m m m n1 m 1
Cn, 2 r + Dn, 2 rn + 2
m
∂Yn (u, f) 7
B2 = 4 B2u 5 = 6 0 m ∂u 7
6 n = 0 m = n 7
Brf 6 7
4 P‘ Pn m 5
m n1 m 1 1 ∂Yn (u, f)
m0 mm Cn, 2 r + Dn, 2 rn + 2 sin u ∂f
n = 0 m = n
2 P
‘ Pn 3
m jM j( 1)p1 Cnm Ynm (u, f)
6 0 r n = 0 m = n
7
6 7
6 7
p1 P P
‘ n
6 m ∂Yn (u, f) 7
m
+ 6 m0 jMr j( 1) Cn ∂u 7
6 n = 0 m = n 7
6 7
4 P‘ Pn m 5
p1 m ∂Yn (u, f)
m0 jMr j( 1) Cn ∂f
n = 0 m = n
ð59Þ
2 3
B3r
6 7
B3 = 4 B3u 5
B3f
2 P ‘ Pn 3
( nm0 mm Cn,m 3 rn1 )Ynm (u, f)
6 n = 0 m = n 7 ð60Þ
6 7
6 P 7
6 ‘ P n m
m n1 ∂Yn (u, f)
( m0 mm Cn, 3 r ) ∂u 7
=6 7
6 n = 0 m = n 7
6 7
4 P ‘ Pn m 5
m n1 1 ∂Yn (u, f)
( m0 mm Cn, 3 r ) sin u ∂f
n = 0 m = n
ðr1 dð1 2p
ð
Ti = J i B11r (r, ui , fi , u, d) sin d
r0 d0 0
ð70Þ Electromagnetic piezoelectric hybrid-
drive 3-degree-of-freedom motor torque
( cos ueui sin ueui )dudrdd
synthesis
The torque decomposition can be used to decom-
The line passing through the No. 2 stator is defined as
pose the electromagnetic torque to obtain the single-
the Y-axis, the axis perpendicular to the Y-axis is the
coil rotation torque.
X-axis, and the line perpendicular to the X-Y plane and
Rotational torque
passing through the origin is defined as the Z axis. The
three traveling wave stators are mounted at 120° and
ðr2 dð1 2p
ð
are a1° to the X-Y plane as shown in Figures 8–10. The
T i = Ji B11r (r, ui , fi , u, d) sin d sin ududrdd ð71Þ
electromagnetically driven stator is mounted outside
r 1 d0 0 the spherical rotor to provide torque to the rotor about
10 Advances in Mechanical Engineering
R1 30 mm
b 2 mm
h 0.5 mm
l 12p
v 37286 Hz
V 110 V
Ji 0.5mA/mm2
d0 2°
d1 7°
q 30 mm
PTFE: polytetrafluoroethylene.
Figure 15. Maximum output deflection torque Ty when the Figure 18. Maximum output rotation torque Tz when the
rotor contact is PTFE. rotor contact is nylon.
Figure 16. Maximum output deflection torque Ty when the Figure 19. Maximum output rotation torque Tz when the
rotor contact is steel. rotor contact is steel.
Figure 20. Output rotation torque Tz when the piezoelectric Figure 22. Comparison of analytic method and finite element
stator is separately driven to contact nylon. method when the rotor contact is nylon.
Conclusion
First, the principle and basic structure of the hybrid-
drive motor are introduced and the displacement and
pressure distribution of the stator–rotor contact surface
are obtained by analytical method. Based on this, the
torque model of the piezoelectric stator-drive motor is
obtained. Then, the air-gap magnetic field model of the
permanent magnet rotor is obtained by analytical
method, and the electromagnetic stator-torque model is
Figure 21. Electromagnetic piezoelectric hybrid-drive contact obtained. Finally, the torque model of the electromag-
is nylon when output rotation torque Tz. netic piezoelectric hybrid-drive 3-degree-of-freedom
motor is established by vector synthesis.
The influence of different contact layer materials on
comparison, it can be seen that the maximum rota- the contact pressure distribution of the stator and rotor
tional torque of the piezoelectric single drive can reach and the contact distance on the torque characteristics
7.03 Nm, and the maximum rotational torque of the were analyzed by MATLAB. It can be seen from the
electromagnetic piezoelectric hybrid-drive motor can analysis that the larger the position angle of the No.1,
reach 13.6 Nm. In addition, the piezoelectric-drive No.2, and No.3 stators, the larger the deflection torque.
motor has a compact structure, flexible design, easy The larger the position angle of the No.1 and No.2
miniaturization, self-locking, and fast response. The piezoelectric stators and No.3 stator, the smaller the
motor with electromagnetic drive has a complicated self-rotation torque. In order to achieve a higher preci-
structure, and it is difficult to achieve miniaturization, sion in the output reliability of the motor, the positional
and it has low control-positioning accuracy, and it is angle of the No.1, No.2, and No.3 stators can not be
difficult to be applied in a precision working place. It is 0°. When the position angle of the No.1, No.2, and
found by calculation that the combination of No.3 stators is 0, the motor rotates only for the electro-
electromagnetic-drive and piezoelectric drive increases magnetically driven rotor, which greatly reduces the
the torque of the motor. precision of the rotor drive. By comparing and analyz-
The reliability of the motor is improved by a combi- ing the piezoelectric driving motor and the electromag-
nation of two drive methods. In order to further verify netic piezoelectric hybrid driving motor, it is known
the rationality of the analytical calculation, the influ- that the combination of piezoelectric and electromag-
ence of the piezoelectric stator position angle on the netic driving not only improves the torque of the motor
rotation torque was verified by the finite element but also improves the reliability of the motor. It
14 Advances in Mechanical Engineering
provides a theoretical basis for the design and torque 9. Li Z, Huang W and Zhao C. On design of a cylinder-
optimization and improvement of the electromagnetic sphere ultrasonic motor with multi-degree of freedom.
piezoelectric hybrid-drive 3-degree-of-freedom motor. Mech Sci Technol Aerospace Eng 2004; 23: 157–160.
10. Yang X, Liu Y, Chen W, et al. Sandwich-type multi-
degree-of-freedom ultrasonic motor with hybrid excita-
Declaration of conflicting interests tion. IEEE Access 2017; 4: 905–913.
The author(s) declared no potential conflicts of interest with 11. Xu Z, Jin L, Hu M, et al. Research on a novel 3-DOF
respect to the research, authorship, and/or publication of this ultrasonic motor with two cylinder stators. Micromotors
article. 2009; 42: 27–29.
12. Chen Z. Research on the in-plane bending-mode travelling
wave ultrasonic motors. PhD Thesis, Tsinghua University,
Funding Beijing, China, 2016.
The author(s) disclosed receipt of the following financial sup- 13. Zhou S. Designing and modeling of the bi-vibrator standing
port for the research, authorship, and/or publication of this wave linear ultrasonic motor. PhD Thesis, Nanjing Uni-
article: This work was supported by the National Natural versity of Aeronautics and Astronautics, Nanjing, China,
Science Foundation of China (grant no.: 51577048, 51877070, 2014.
and 51637001), the Natural Science Foundation of Hebei 14. Li H. 3-D magnetic field analysis of a Halbach array PM
Province of China (grant no.: E2018208155), the Overseas spherical motor. PhD Thesis, Tianjin University, Tianjin,
Students Science and Technology Activities Funding Project China, 2008.
of Hebei Province (grant no.: C2015003044), the Hebei 15. Li Z. Basic research on permanent magnet spherical step-
Industrial Technology Research Institute of Additive ping motor for humanoid robot joint. PhD Thesis, Hefei
Manufacturing (Hebei University of Science and Technology) University of Technology, Hefei, China, 2007.
open projects funding, the National Engineering Laboratory 16. Li Z, Guo Z and Zhang Y. Magnetic field analysis of a
of Energy-saving Motor & Control Technique, Anhui novel 3-DOF deflection type PM motor. J Hebei Univ Sci
University (grant no.: KFKT201804), and Key project of sci- Technol 2012; 33: 422–428.
ence and technology research in Hebei provincial colleges and 17. Kwon BI and Kim YB. Design and analysis of double
universities (grant no.: ZD2018228). excited 3-degree-of-freedom motor for robots. J Electr
Eng Technol 2011; 6: 618–625.
18. Bai K, Xu R, Lee KM, et al. Design and development of
ORCID iD
a spherical motor for conformal printing of curved elec-
Zheng Li https://orcid.org/0000-0003-2383-7607 tronics. IEEE T Ind Electron 2018; 65: 9190–9200.
19. Li Z, Wang Y, Ge R, et al. The summary and latest
References research of PM spherical M-DOF motor. Micromotors
2011; 44: 66–70.
1. Sun X, Shen Y, Wang S, et al. Core losses analysis of a 20. Sang Y, Huang X, Liu H, et al. A vibration-based hybrid
novel 16/10 segmented rotor switched reluctance BSG energy harvester for wireless sensor systems. IEEE T
motor for HEVs using nonlinear lumped parameter Magn 2012; 48: 4495–4498.
equivalent circuit model. IEEE/ASME T Mech 2018; 23: 21. Siddique ARM, Mahmud S and Heyst BV. A compre-
747–757. hensive review on vibration based micro power genera-
2. Wan L, Yang Z, Sun X, et al. Decoupling control of a 5- tors using electromagnetic and piezoelectric transducer
degree-of-freedom bearingless induction motor based on mechanisms. Energ Convers Manag 2015; 106: 728–747.
least squares support vector machine inverse. Adv Mech 22. Zhang XY, Uchiyama K and Ishizuka T. High-speed,
Eng 2016; 8: 672120. high-precision magnetic/piezoelectric hybrid drive actua-
3. Toyama S and Hatae S. Multi-degree of freedom spherical tor for micro electrical discharge machining. Adv Mater
ultrasonic motor. Berlin: Springer, 1993, pp.243–252. Res 2014; 941–944: 2112–2115.
4. Aoyagi M, Beeby SP and White NM. A novel multi- 23. Khaligh A, Zeng P and Zheng C. Kinetic energy harvest-
degree-of-freedom thick-film ultrasonic motor. IEEE T ing using piezoelectric and electromagnetic technologies—
Ultrason Ferr 2002; 49: 151–158. state of the art. IEEE T Ind Electron 2010; 57: 850–860.
5. Aoyagi M, Nakajima T, Tomikawa Y, et al. Examina- 24. Sun X, Chen L and Yang Z. Overview of bearingless
tion of disk-type multidegree-of-freedom ultrasonic permanent-magnet synchronous motors. IEEE T Ind
motor. Jpn J Appl Phys 2004; 43: 2884–2890. Electron 2013; 60: 5528–5538.
6. Fu P, Guo J and Shen R. The driving mathematic model 25. Sun X, Su B, Chen L, et al. Precise control of a four
of spherical traveling-wave type ultrasonic motor. Proc degree-of-freedom permanent magnet biased active mag-
CSEE 2006; 26: 115–119. netic bearing system in a magnetically suspended direct-
7. Hu X. Research on the structure, model and control of driven spindle using neural network inverse scheme.
multi-degree of freedom spherical travel ultrasonic motor. Mech Syst Signal Pr 2017; 88: 36–48.
PhD Thesis, Zhejiang University, Hangzhou, China, 2010. 26. Wang C, Li J and Zhao M. The piezoelectric ferroelectric
8. Liu Y and Zhang J. An examination on analytical model physical. Alexandria, NSW, Australia: Science Press, 2009.
for contacts of cross-type multi-DOF ultrasonic motor. 27. Kong X, Jiang X and Jin X. Solid contact mechanics. Uiti-
Machinery 2015; 53: 6–11. kon: China Railway Publishing House, 1999.
Li et al. 15
28. Popov GI. Some properties of classical polynomials and 33. Liang Y, Chen IM, Chee Kian L, et al. Torque modeling
their application to contact problems. J Appl Math Mech of a spherical actuator based on Lorentz force law. In:
1963; 27: 1255–1271. Proceedings of the 2005 IEEE international conference on
29. Popov GI. On the method of orthogonal polynomials in robotics and automation, Barcelona, 18–22 April 2005,
contact problems of the theory of elasticity. J Appl Math pp.3646–3651. New York: IEEE.
Mech 1969; 33: 503–517. 34. Takesue N, Ohara T, Ishibashi R, et al. Position control
30. Goryacheva IG. Contact mechanics in tribology. Dor- methods of spherical ultrasonic motor. In: Proceedings of
drecht: Springer, 1998, pp.135–142. the IEEE/RSJ international conference on intelligent
31. Zhu M. Contact analysis and mathematical modeling of robots and systems, Taipei, Taiwan, 18–22 October 2010,
traveling wave ultrasonic motors. IEEE T Ultrason Ferr pp.3061–3066. New York: IEEE.
2004; 51: 668. 35. Mashimo T, Awaga K and Toyama S. Development of a
32. Yan L, Chen IM, Lim CK, et al. Torque modeling of spherical ultrasonic motor with an attitude sensing system
spherical actuators with double-layer poles. In: Proceed- using optical fibers. In: Proceedings of the IEEE interna-
ings of the 2006 IEEE/RSJ international conference on tional conference on robotics and automation, Roma, 10–
intelligent robots and systems, Beijing, China, 9–15 Octo- 14 April 2007, pp.4466–4471. New York: IEEE.
ber 2006, pp.5447–5452. New York: IEEE.