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Research Article

Advances in Mechanical Engineering


2018, Vol. 10(10) 1–15
Ó The Author(s) 2018
Torque modeling and characteristic DOI: 10.1177/1687814018804743
journals.sagepub.com/home/ade
analysis of electromagnetic
piezoelectric hybrid-driven
3-degree-of-freedom motor

Zheng Li1 , Peng Guo1, Ruihua Han1 and Qunjing Wang2

Abstract
The electromagnetic piezoelectric hybrid-driven 3-degree-of-freedom motor is a new multi-degree-of-freedom motor.
To further analyze the torque characteristics of the electromagnetic piezoelectric hybrid-drive 3-degree-of-freedom
motor. First, the principle and basic structure of the hybrid-drive motor are introduced, and the displacement and pres-
sure distribution of the stator–rotor contact surface are obtained by analytical method. Based on this, the torque model
of the piezoelectric stator-drive motor is obtained. Then, the air-gap magnetic field model of the permanent magnet
rotor is obtained by analytical method, and the electromagnetic stator-torque model is obtained. Finally, the torque
model of the electromagnetic piezoelectric hybrid-drive 3-degree-of-freedom motor is established by vector synthesis.
The effects of piezoelectric stator mounting position angle, stator–rotor contact materials, and preload on motor torque
are analyzed by simulation. The advantages of electromagnetic piezoelectric hybrid drive are analyzed, and the rationality
of the model is preliminarily verified. It lays the foundation for further optimization design and performance improve-
ment of electromagnetic piezoelectric hybrid-drive 3-degree-of-freedom motor.

Keywords
Torque model, piezoelectric motor, hybrid drive, 3 -degree-of-freedom, electromagnetic characteristics

Date received: 23 July 2018; accepted: 11 September 2018

Handling Editor: Xiaodong Sun

Introduction Piezoelectric-driven multi-degree-of-freedom ultraso-


nic motors were first proposed by the Tokyo University
With the development of modern intelligent industry, of Agriculture and Technology.3 In recent years, inter-
the requirements for precision of multi-degree-of-free- national scholars have conducted extensive research on
dom drive devices are constantly increasing. The ultrasonic multi-degree-of-freedom motors.4 Yamagata
multi-degree-of-freedom motion actuator composed University proposed a small cylindrical 3-degree-of-
of the traditional single-degree-of-freedom motor has
complicated mechanical structure,1 large volume, and 1
School of Electrical Engineering, Hebei University of Science and
low positioning control precision, which cannot meet Technology, Shijiazhuang, China
the requirements of intelligent precision driving. 2
National Engineering Laboratory of Energy-Saving Motor & Control
The multi-degree-of-freedom motor has a simple Technique, Anhui University, Hefei, China
structure and high integration, which can be applied
Corresponding author:
in a precise drive system.2 There are two main driving Zheng Li, School of Electrical Engineering, Hebei University of Science
methods for multiple free motors: piezoelectric and and Technology, Shijiazhuang 050018, China.
electromagnetic. Email: Lzhfgd@163.com

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open-access-at-sage).
2 Advances in Mechanical Engineering

freedom motor. The hollow cylinder of the stator of the has high mechanical integration and simple transmis-
motor acts to conduct amplifying vibration, and the sion, the structure of electromagnetic-drive multi-
vibration is provided by a piezoelectric layer below the degree-of-freedom motor is relatively complicated, and
cylinder. Muroran Institute of Technology proposed a the magnetic field is difficult to control. The improve-
disk-type multi-degree-of-freedom ultrasonic motor ment of control and positioning accuracy is always a
and conducted in-depth comparative studies on differ- difficult point. The torque output produced by the
ent bearing lubrication methods.4,5 Zhejiang University rotor is very difficult and the loss is large during torque
conducts in-depth research on mathematical models output. At present, the structure of electromagnetic-
and motion control of traveling wave multi-degree-of- drive multi-degree-of-freedom motor is more compli-
freedom motors.6,7 Shanghai University proposed a cated, and the reliability still falls short of the required
sandwich motor of more than 10 degrees of freedom8 state.19
and established a fixed-rotor contact model. Nanjing The development of electromagnetic piezoelectric
University of Aeronautics and Astronautics proposed a hybrid-drive motors has gradually become a develop-
circular standing wave multi-degree-of-freedom motor9 ment trend.20–23 Piezoelectric-drive multi-degree-of-
and reviewed the current problems in the design of this freedom motor is immune to external electromagnetic
type of motor. Harbin Institute of Technology pro- interference, which provides the possibility of electro-
posed a sandwich ultrasonic multi-degree-of-freedom magnetic piezoelectric hybrid-drive multi-degree-of-free-
hybrid-drive motor,10 and they produced a prototype dom motor development. The electromagnetic-drive
and analyzed the characteristics of the variable excita- multi-degree-of-freedom motor24,25 has relatively com-
tion mode of multi-degree-of-freedom ultrasonic plicated structure, the magnetic field is difficult to con-
motor. Southeast University has designed a multi- trol, the control and positioning accuracy is low, the
degree-of-freedom ultrasonic motor with a double sta- torque output by the rotor is difficult, and the torque
tor clamping structure,11 which has improved drive tor- loss is large. Piezoelectric-drive multi-degree-of-freedom
que and improved output performance and stability. motors have problems such as low lifetime and perfor-
Piezoelectric-driven motors have received the widest mance affected by fixed-rotor friction materials. The
attention because of their high power density, stable multi-degree-of-freedom motor with electromagnetic
efficiency at very small dimensions, high positioning drive is suitable for working at high speed and low tor-
accuracy, fast response, and power-off interlocking.12 que, but its structure is complicated and it is difficult to
However, since the piezoelectric-driven motor is based achieve miniaturization, and the control-positioning
on friction transmission, its performance and life accuracy is low, which is not suitable for precise work.
depend on the performance of the friction interface.13 Multi-degree-of-freedom motor with piezoelectric drive
Electromagnetic-drive multi-degree-of-freedom is compact in structure, flexible in design, easy to realize
motors were developed first by the Soviets. In recent miniaturization, self-locking, fast response, and free
years, international scholars have done a lot of research from external electromagnetic interference. It is espe-
on electromagnetically driven multi-degree-of-freedom cially suitable for low-speed and high-torque applica-
motors. For example, Tianjin University applied tions; but the life of piezoelectric-driven motor is short,
Halnach array structure to spherical multi-degree-of- and it is not suitable for continuous operation.
freedom motors to improve the complexity of motor Therefore, combining the electromagnetic drive and the
magnetic field distribution and motor performance.14 piezoelectric drive can not only avoid the problems of
Hefei University of Technology proposed a new spheri- the two drive modes but also improve the speed, accu-
cal multi-degree-of-freedom stepper motor15 and ana- racy, and torque of the motor.
lyzed the magnetic field, torque, and mechanical model In order to further study the electromagnetic piezo-
of the motor in detail. On the basis of summarizing the electric hybrid-drive multi-degree-of-freedom motor, a
advantages and disadvantages of the predecessors, 3-degree-of-freedom electromagnetic piezoelectric
Hebei University of Science and Technology proposed hybrid-drive motor was modeled and analyzed. First,
a new 3-degree-of-freedom motor with double-layer coil the piezoelectric-driven stator–rotor contact model and
rotor single-layer permanent magnet structure and opti- the electromagnetically driven air-gap magnetic field
mized the motor structure by particle swarm optimiza- model are established by combining the piezoelectric
tion.16 Hanyang University proposed a new 3-degree- drive and electromagnetic-drive principle. Then the tor-
of-freedom motor with a double-excitation source of que model of the electromagnetic piezoelectric hybrid-
sandwich structure.17 This motor greatly reduces the drive 3-degree-of-freedom motor is established by
cost of the motor because the rotor no longer uses per- vector synthesis method. The simulation software ana-
manent magnets. Nanyang Technological University lyzes the influence of piezoelectric-drive stator position,
proposed a spherical motor for conformal printing,18 stator–rotor contact material, and preload on motor
which greatly improves the reliability of the printing torque and verifies the rationality of the analysis results
system. Although the multi-degree-of-freedom motor by finite element analysis.
Li et al. 3

Electromagnetic piezoelectric hybrid-


driven 3-degree-of-freedom motor
structure and operation mechanism
The electromagnetic piezoelectric hybrid-drive 3-
degree-of-freedom motor is mainly composed of four
stators and one rotor. The structure diagram is shown
in Figure 1. As shown in Figure 2, the stator is com-
posed of three piezoelectric stators (No. 1 stator, No. 2
stator, and No. 3 stator) and one electromagnetically
driven stator (No. 4 stator) in Figure 3. The piezoelec-
tric ceramic piece on the piezoelectric stator is applied
with an alternating voltage. This voltage phase differ-
ence is 90°, the frequency is the same, and the ampli-
tude is the same. Due to the inverse effect principle of
piezoelectric ceramics, two-phase standing waves are
reflected. The two-phase standing wave amplitudes are Figure 1. Electromagnetic piezoelectric hybrid-drive 3-degree-
equal and the phase difference in time and space is 90°. of-freedom motor overall structure diagram.
The two-phase standing waves are superimposed to
form a circular traveling wave. At this time, the rotor
of the motor rotates in the tangential direction of the phase difference is 90°, the frequency is the same, and
particle surface of the stator surface, and the direction the amplitude is the same. Due to the inverse effect
of rotation of the rotor is opposite to the direction of principle of piezoelectric ceramics, two-phase standing
the traveling wave. waves are reflected. The two-phase standing wave
As shown in Figure 3, the spherical rotor surface is amplitudes are equal and the phase difference in time
mounted with four permanent magnets. The and space is 90°. The two-phase standing waves are
electromagnetic-drive torque is generated by the inter- superimposed to form a circular traveling wave. The
action of the surface-mounted permanent magnets and inverse piezoelectric effect can be expressed by the
the fourth stator. Through the coordinated control of piezoelectric equation26
the four stators and the two drive modes being sequen-
X = cE x  e  E ð1Þ
tial in this process, the motor can finally achieve 3-
degree-of-freedom motion. D = eT :x + eS E ð2Þ
where e is the piezoelectric constant matrix (eT is the
Piezoelectric stator-drive model transposition of the piezoelectric constant matrix), X is
the stress vector, x is the strain vector, cE is the piezo-
Stator traveling wave generation electric ceramic short-circuit stiffness matrix, es is the
The piezoelectric ceramic piece on the piezoelectric sta- clamping dielectric constant, D is the electricity displa-
tor is applied with an alternating voltage. This voltage cement vector

Figure 2. Electromagnetic piezoelectric hybrid-drive 3-degree-of-freedom motor rotor and piezoelectric stator.
4 Advances in Mechanical Engineering

Figure 4. Stator and rotor contact diagram.

Figure 3. Electromagnetic piezoelectric hybrid-drive 3-degree- ∂E3


=0 ð10Þ
of-freedom motor rotor and electromagnetic stator. ∂x3

Therefore, the piezoelectric wave equation is


x = ½ x1 x2 x3 x4 x5 x6  T ð3Þ
∂2 u c11 ∂u
2
=  ð11Þ
∂t r ∂x2
X = ½ X1 X2 X3 X4 X5 X6  T ð4Þ
where r is the density of the piezoelectric ceramic.
D = ½ D1 D2 D3 T ð5Þ
The special solution for obtaining the traveling wave
E = ½ E1 E2 E3 T ð6Þ equation is

u is a position function of the point on the ceramic ua = AsinðkxÞsinðvtÞ ð12Þ


piece, and (x, y, z) is the position vector. There is no
ub = AcosðkxÞcosðvtÞ ð13Þ
displacement of the ceramic piece in the Y-axis direc-
tion, only the force in the X1 direction is considered, where, k = (2p=l), l is the wavelength, and the displa-
and the electric field obtained by the ceramic piece is a cement at the 0 point of the ceramic piece is 0.
uniform electric field. The ceramic sheets are polarized Equations (12) and (13) are brought into equation
in the thickness direction, and the length of the ceramic (7): A = je13 E0 =c11 kj
sheets is greater than the radial width. The traveling wave is obtained by superposition of
From the above assumptions the two-phase standing waves of a and b

D1 = D2 = 0, E1 = E2 = 0, x4 = x5 = x6 = 0, u = Acosðkx  vtÞ ð14Þ


E3 = E0 sin vt

The above assumptions are brought into the piezo- Contact model of stator and rotor
electric equation to obtain
It is assumed that the contact layer of the stator is an
X1 = c11 x1  e13 E3 ð7Þ elastomer. The stator is displaced to the maximum dis-
placement in the Z-axis direction when the stator is in
According to Newton’s second law, the equation of contact. The stator is a rigid body and does not dis-
motion of ceramic sheets can be known place, and the friction between the stator and rotor is
ignored. The stator–rotor contact is equivalent to the
∂2 u ∂X1 contact of the parabolic indenter with the contact layer
r = c11 2 ð8Þ
∂t2 ∂x (elastomer) as shown in Figure 4.
The preload applied by each stator is F, then the
Equation (7) is brought into equation (8) to obtain
one-dimensional pre-stress experienced by each peak is
P = (F=nb), the number of waves is n, and b is the
∂2 u ∂u ∂E3
r = c11 2  e13 ð9Þ equivalent width of the fixed-rotor contact.
∂t2 ∂x ∂x The waveform of the stator waveform at a certain
The electric field component E3 is a uniform electric time is u1 = AcosðkxwtÞ, and the radius of curvature
field of the waveform
Li et al. 5

h i3 
 ð1
 1 + du1 2 2  1  1
 dx   1  t2 2 lnjt  xjTn ðt Þdt = n1 Tn ð xÞ ð23Þ
R =  2
d u1

 ð15Þ p
 dx 2  1
 
Form obtained p(j) according to equation (23)
The stator–rotor contact zone displacement function  
can be set to E   1 j E   1
p ðj Þ = a0 a a2  j2 2 T0 + a1 a a2  j2 2
2 a 2
x2    
w=  + d0 , z = 0, j xj ł a ð16Þ j E   
1 j
2R T1 + a2 a a2  j2 2 T2
a 2 a
where d0 is an unknown constant. ð24Þ
When the stator friction is neglected, the stator and
rotor boundary shear force is 0: x = 0, t xy = 0. The contact pressure of the contact point of the con-
The normal stress distribution of the fixed rotor is: tact zone is 0, so, pð 6 aÞ = 0, a0 =  a2 , a1 = 0
p(x), z = 0, jxj ł a. Where E is the elastic modulus of Equation (24) is taken into equation (17) to
the contact layer.
2P
According to the balance of the stator and rotor a0 = ð25Þ
paE
ða
Equation (24) is taken into equation (19) to
pð xÞdx = P ð17Þ
  
a 1 2x2 x2
a0 a ln 2 + a2 a 2
 1 = + d0 ð26Þ
2 a 2R
a is half of the fixed-rotor contact distance for one
wavelength of the stator. Therefore, a2 =  (1=2R), d0 = (1=2)að2a0 ln 2  a2 Þ,
When the stator’s normal contact force p(j) acts, the it is further known that P = (pEa2 )=4R,
vertical displacement expression27 The stator-torque contact surface force distribution
ða equation
1
w= lnðx  jÞ2 pðjÞdj + B00 ð18Þ  1
pE PE 2 1
a pð xÞ = a2  x2 2 , z = 0, j xj ł a ð27Þ
pRa2
Suppose the rigid body does not shift, so B" = 0.
So we get The displacement equation of the stator–rotor con-
tact surface
ða
1 x2
lnðx  jÞ2 pðjÞdj =  + d0 ð19Þ x2 P
pE 2R u=  + ð2 ln 2 + 1Þ, z = 0, j xj ł a ð28Þ
a 2R pE

The method of solving the first type of Freehold


equation by the Chebyshev polynomial of Popov28,29 Friction model of stator and rotor
ð1 ð1 According to the Coulomb friction model30,31
1  1
 1 t2 2 lnjt  xjTn ðtÞdt = Un1 ð xÞdx
p F\ms pð xÞ, vrel = 0 ð29Þ
1 1
ð20Þ F = md pð xÞsignðvrel Þ, vrel 6¼ 0 ð30Þ
8
> T0 ð xÞ = 1 where md is the dynamic friction factor; ms is the static
>
> T ð xÞ = x
>
> friction factor; vrel is the relative sliding speed of the sta-
< 1
T2 ð xÞ = 2x2  1 ð21Þ tor; p(x) is the normal
 pressure, and F is the tangential
>
> .. 1 vrel .0
>
> . thrust sign(vrel ) = .
>
: 1 vrel \0
Tn + 1 ð xÞ = 2Tn ð xÞ  Tn1 ð xÞ
In the contact region within the normal contact pres-

Tn ð xÞ  Tn + 2 ð xÞ = 2ð1  x2 ÞUn ð xÞ sure, on the cut synthetic rotor thrust F
0 ð22Þ
Tn ð xÞ = nUn1 ð xÞ
6 Advances in Mechanical Engineering

2c 3
ða ð ða According to the structure of the permanent magnet,
F= sign(vrel )md p(x)dx = 2md 4 p(x)dx  p(x)dx5 the residual magnetization of the motor in the spherical
a 0 c coordinate system can be expressed as
ð31Þ 8 9 8   9
< Mrr = < cos f  ap sin u =
where c is the point at which the relative sliding speed Mr = Mru = (  1)p1 jMr j cos f   ap cos u;
: ; :
of the rotor is zero. When c = a, the maximum tangen- Mru  sin f  ap
tial thrust is obtained, and the single stator obtains the ð38Þ
maximum output torque
where p (p = 1, 2, 3, 4) is the permanent magnet num-
Tj = nR1 F ð32Þ ber, L is the total number of permanent magnets.
where n is the number of traveling wave peaks; R1 is the ap = a=2 + 2p(p  1)=L, p=2  b=2 ł u ł p=2 + b=2,
radius of the stator rotor contact surface; j = 1, 2, 3. pðp  1Þ=L ł f ł a + pðp  1Þ=L, a is a permanent
magnet with a longitude angle of 90°, and b is a perma-
nent magnet with a latitude angle of 50°.
Electromagnetic stator-drive model In the spherical coordinate system, the magnetic
position V can be expressed as a function of the spatial
Electromagnetic-drive stator–rotor air-gap magnetic point (r, u, u), that is, V(r, u, u), where r is the coordi-
field nate radial distance of the point, u is the latitude, and
According to the boundary condition of the magnetic u is longitude.
medium, the magnetic field generated by the rotor per- The Laplace equation of the magnetic position V can
manent magnet can be divided into three parts be expressed as the Laplace equation of the scalar mag-
8 netic position
< B1 = m0 H1 0 ł r ł Ri    
B = B2 = m0 mm H2 + m0 Mr Ri ł r\Ro ð33Þ 1 ∂ 2 ∂V 1 ∂ ∂V 1 ∂2 V
: r + sin u + =0
B3 = m0 mr H3 røRo 2
r ∂r ∂r 2
r sin u ∂u ∂u r sin2 u ∂f2
2

ð39Þ
where m0 is the magnetic permeability value in the air
(m0 = 1), mm is the relative magnetic permeability Assume V (r, u, f) = R(r)Y (u, f), brought it into
(mm = 1:02), the permanent magnet of the motor is equation (39)
NdFeB, and Mr,(Mr = Br =m0 ),is the residual magneti-
zation, and Br is the residual magnetic induction    
Y (u, f) ∂ 2 ∂R(r) R(r) ∂ ∂Y (u, f)
(Br = 1 T), which is the relative magnetic permeability r + sin u
r2 ∂r ∂r r2 sin u ∂u ∂u
of the rotor material. mr is the relative magnetic perme-
ability (mr = 1). R(r) ∂2 Y (u, f)
+ =0
According to the principle of the motor, there is no r2 sin2 u ∂f2
current excitation in the rotor area, which can be ð40Þ
obtained
Equation (40) is divided by R(r) Y(u, u)
r 3 Hk = 0, k = 1, 2, 3 ð34Þ    
1 ∂ 2 ∂R(r) 1 ∂ ∂Y (u, f)
The negative value of the gradient of the scalar mag- r + sin u
r2 R(r) ∂r ∂r Y (u, f)r2 sin u ∂u ∂u
netic position can represent the magnetic field strength
1 ∂2 Y (u, f)
+ =0
Hk =  rVk , k = 1, 2, 3 ð35Þ Y (u, f)r sin u ∂f2
2 2

ð41Þ
According to the structure of the motor, the perma-
nent magnets are symmetrically distributed, so Equation (41) is multiplied by r2 on both sides, and
the variables are adjusted
r  Mr = 0 ð36Þ
   
Then the scalar magnetic positions of the three 1 ∂ 2 ∂R(r) 1 ∂ ∂Y (u, f)
r = sin u
regions satisfy the Laplace equation R(r) ∂r ∂r Y (u, f) sin u ∂u ∂u
8 1 ∂2 Y (u, f)
< 2
r V1 = 0  =m
Y (u, f)sin2 u ∂f2
r2 V2 = m1 r  Mr = 0 ð37Þ
: 0 ð42Þ
r2 V3 = 0
Li et al. 7

dR2 dR medium are continuous


r2 + 2r  mR = 0 ð43Þ
dr2 dr
  B1r = B2r , B2r = B3r ð50Þ
1 ∂ ∂Y 1 ∂2 Y
sin u + + mY = 0 ð44Þ
sin u ∂u ∂u sin2 u ∂f2
where m is the parameter introduced by the separation H1u = H2u , H2u = H3u ð51Þ
variable method.
The spherical harmonic equation further separates
H1f = H2f , H2f = H3f ð52Þ
the variables, assume Y(u, f) = Y(u)F(f), substituting
equation (44)
    The expression of magnetic induction in spherical
1 d dY l
sin u + u  2 Y=0 ð45Þ coordinates is
sin u du du sin u

d2F T ∂V 1 ∂V 1 ∂V T
+ lF = 0 ð46Þ H = ½Hr er , Hu eu , Hf ef  =  , ,
df2 ∂r r ∂u r sin u ∂f
ð53Þ
where l is the parameter introduced by the separation
variable method. The radial component of the residual magnetization
Obtained by simultaneous equations (43), (45), and (46) is expressed in the form of a spherical harmonic func-
tion. Any single-valued and finite function f (u, u) in the
V (r, u, f) = R(r)Y (u, f) (0 ł u ł p, 0 ł u ł 2p,) interval can be expanded into
X+‘ X n   the generalized Fourier series form of Ynm (u, f) form
Dn
= Cn r + n + 1 Pm
n
n ( cos u)
r
n=0 m=0
ð47Þ X
‘ X
n

(Am cos mf + Bm sin mf) f ðu, fÞ = Cnm Ynm ðu, fÞ ð54Þ


X
+‘ X n   n = 0 m = n
Dn Ð p Ð 2p
= Cn r + n + 1 Ynm ðu, fÞ
n
r where, Cnm = 0 0 f (u, f)Ynm* (u, f) sin udfdu, Ynm* (u, f)
n=0 m = n
is the conjugate complex number of Ynm (u, f)
where Ynm (u, f) = Snm Pm n ( cos u)e
imf
m = 0, 1, . . . , n;
qffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi
+1 ð nm Þ! Cnm = jMr jcmn ðam 6 bm iÞ ð55Þ
Snm = 2n4p m
ðnmÞ!; (x = cos u), Yn (u, f) is spherical
harmonic function. Pm
n ( cos u) is a Legendre function. X
2p
ðp1Þ=L
a + 2pð
 
The permanent magnet rotor boundary conditions am 6 bm i = cos f  ap eimf df ð56Þ
are: j=1
2pðp1Þ=L

b
1. The magnetic mark is 0 at infinity p
2+2
ð
2
cmn = Snm Pm
n cos usin udu ð57Þ
V1 jr!‘ = 0 ð48Þ
p b
2 2
so, Cn, 1 = 0. 2 P 3
‘ Pn   m
2. The magnetic mark is finite at the origin of the m 1
(n + 1)mr Dn1 rn + 2 Yn (u, f)
magnetic field 2 3 6 n = 0 m = n 7
B1r 6 ‘ 7
6 P P  n  m
∂Yn (u, f) 7
4 5
B1 = B1u =6 6 m 1
mr Dn1 rn + 2 7
V3 jr!0 6¼ ‘ ð49Þ ∂u 7
B1f 6 n = 0 m = n 7
4 P ‘ Pn   m 5
m 1 1 ∂Yn (u, f)
mr Dn1 rn + 2 sin u ∂f
so, Dn, 3 = 0. n = 0 m = n
3. The tangential and radial components of the ð58Þ
magnetic induction at the interface of the
8 Advances in Mechanical Engineering

2 P
‘ P
n 3
m n1 m 1 m
m0 mm nCn, r  (n + 1)D Y (u, f)
2 3 6 n = 0 m = n
2 n, 2 rn + 2 n 7
B2r 6 7
6 P‘ Pn 7
6 7 6 m m m n1 m 1
Cn, 2 r + Dn, 2 rn + 2
m
∂Yn (u, f) 7
B2 = 4 B2u 5 = 6 0 m ∂u 7
6 n = 0 m = n 7
Brf 6 7
4 P‘ Pn m 5
m n1 m 1 1 ∂Yn (u, f)
m0 mm Cn, 2 r + Dn, 2 rn + 2 sin u ∂f
n = 0 m = n
2 P
‘ Pn 3
m jM j( 1)p1 Cnm Ynm (u, f)
6 0 r n = 0 m = n
7
6 7
6 7
p1 P P
‘ n
6 m ∂Yn (u, f) 7
m
+ 6 m0 jMr j( 1) Cn ∂u 7
6 n = 0 m = n 7
6 7
4 P‘ Pn m 5
p1 m ∂Yn (u, f)
m0 jMr j( 1) Cn ∂f
n = 0 m = n
ð59Þ
2 3
B3r
6 7
B3 = 4 B3u 5
B3f
2 P ‘ Pn 3
( nm0 mm Cn,m 3 rn1 )Ynm (u, f)
6 n = 0 m = n 7 ð60Þ
6 7
6 P 7
6 ‘ P n m
m n1 ∂Yn (u, f)
( m0 mm Cn, 3 r ) ∂u 7
=6 7
6 n = 0 m = n 7
6 7
4 P ‘ Pn m 5
m n1 1 ∂Yn (u, f)
( m0 mm Cn, 3 r ) sin u ∂f
n = 0 m = n

The special solution of the specific magnetic mark


can be obtained by the above boundary conditions. The
air-gap magnetic-tight fundamental wave of the motor
can be obtained by calculation
2 3 2 3 Figure 5. Stator and rotor section equivalent diagram.
B11r 3(sin u)2 sin 2f
B11 = 4 B11u 5 = mr r4 Dm 4
n1 Sn 2 sin u cos u sin 2f
5
B11f 2 sin u cos 2f
ð61Þ rð1 dð1 ð
Ti =  J i rer 3 ½B11r (r, u, f) 3 dl rdrdd ð64Þ
C
Electromagnetic coil–drive torque model ro d0

The magnetic field generated by the energized coil rð1 dð1 ð


(radial length q (mm)) interacts with the magnetic field Ti = Ji rB11r (r, u, f)dlrdrdd ð65Þ
generated by the permanent magnet, which produces r o d0
C
the Lorentz force of the interaction (the force is macro-
scopically expressed as Ampere); the electromagnetic where Ji is the surface current density of the coil, and ro
force generated by a certain coil dl micro-element that r1 is the coil radial length, d0 d1 is the coil thickness. To
can be obtained by the law32,33 simplify the calculation, the current surface is equiva-
lent to that shown in Figure 5.
dFi =  Ji rdrdddl 3 B11r (r, u, f) ð62Þ Since the integral operation of the equation (65) can-
The electromagnetic torque generated by the dl not be directly performed in the spherical coordinate
micro-element system, it is necessary to convert the components in the
spherical coordinate system to the Cartesian coordinate
dTi = ½Ji rdrdddl 3 B11r (r, u, f) 3 rer ð63Þ system

The torque generated by the single coil is obtained x y


cos f = , sin f = ð66Þ
by integrating the torque micro-element on a single coil r sin u r sin u
Li et al. 9

Figure 6. Electromagnetic stator projected on the rotor.

After converting each component of the spherical


coordinate system into a Cartesian coordinate system,
the expression of each unit of the coil

x = r cos d sin ui cos fi  r sin d cos u cos ui cos fi


ð67Þ
+ r sin d sin u sin fi
y = r cos d sin ui cos fi  r sin d cos u cos ui cos fi
ð68Þ
 r sin d sin u sin fi
z = r cos d cos ui + r sin d cos u sin ui ð69Þ
where r is the distance from the point on the coil bound-
ary to the center of the sphere. ui is the projection of the
coil boundary point below the spherical coordinate u
axis. ui is the projection of the coil boundary point on
the spherical coordinate u axis. d is the angle between
the line from the point on the coil to the center of the
ball and the line from the center of the coil to the center Figure 7. Electromagnetic stator equatorial plane distribution
of the ball. u is the angle between the radius of the coil map.
boundary point in the local coordinate system and the
negative half-axis of eui. Electromagnetic stator position
and projection on the rotor are as shown in Figure 6. where i is the coil number (i = 1, 2, 3,.,18)
In the local rectangular coordinate system, the As shown in Figure 7, the total torque produced by
resulting derivative is converted to dl element: all coils is calculated from the distribution of the coils
dl = r sin ddf( cos uefi  sin ueui )
The electromagnetic torque can be obtained by com- X
18

bining the above formulas T4 = Ti ð72Þ


i=1

ðr1 dð1 2p
ð
Ti = J i B11r (r, ui , fi , u, d) sin d
r0 d0 0
ð70Þ Electromagnetic piezoelectric hybrid-
drive 3-degree-of-freedom motor torque
( cos ueui  sin ueui )dudrdd
synthesis
The torque decomposition can be used to decom-
The line passing through the No. 2 stator is defined as
pose the electromagnetic torque to obtain the single-
the Y-axis, the axis perpendicular to the Y-axis is the
coil rotation torque.
X-axis, and the line perpendicular to the X-Y plane and
Rotational torque
passing through the origin is defined as the Z axis. The
three traveling wave stators are mounted at 120° and
ðr2 dð1 2p
ð
are a1° to the X-Y plane as shown in Figures 8–10. The
T i = Ji B11r (r, ui , fi , u, d) sin d sin ududrdd ð71Þ
electromagnetically driven stator is mounted outside
r 1 d0 0 the spherical rotor to provide torque to the rotor about
10 Advances in Mechanical Engineering

Figure 8. Piezoelectric stator–rotor structure top view.

Figure 10. Top view of the electromagnetic stator–rotor


structure.

of the 3-degree-of-freedom motor driven by the electro-


magnetic piezoelectric hybrid is affected by the mount-
ing position angle a1 of the No.2 stator of the No.1
stator of the No.1 stator. According to the stator mate-
rial parameters of Tables 1 and 2, the torque character-
istics were analyzed by MATLAB.
Figure 9. Front view of the piezoelectric stator–rotor Piezoelectric ceramic piezoelectric constant matrix:
structure. 2 3
0 0 4:3
6 0 0 4:3 7
the Z-axis. Therefore, the hybrid-drive motor realizes 3- 6 7
6 0 0 14:1 7
degree-of-freedom motion by multi-degree-of-freedom ½e = 6 6 7C=m2 .
6 0 0 0 7 7
motion through four stator synthesis. Tx, Ty, and Tz 4 0 10:5 0 5
are vectors of the rotor rotating around the X, Y, and 10:5 0 0
Z axes, respectively. The torque of the 3-degree-of-free-
Clamping
2 dielectric 3 constant matrix:
dom motor is T, and the torque vectors T1, T2, T3, and
7:124 0 0
T4 of the four stators are combined to obtain34,35
½es  = 4 0 7:124 0 5 3 109 F=m.
2 3 2 pffiffi pffiffi 3 0 0 5:841
Tx 3 3
2 T1 cosa1  2 T2 cosa1 Piezoelectric ceramic short-circuit stiffness matrix:
T = 4 Ty 5 = 4 12T1 cosa1 + T2 cosa1  12T3 cosa1 5 2 3
13:2 7:1 7:3 0 0 0
Tz T1 sina1 + T2 sina1 + T3 sina1 + T4 6 7:1 13:2 7:3 0 0
6 0 77
ð73Þ 6 7:3 7:3 11:5 0 0 0 7
½cE  = 66 0
7 3 1010 Pa.
7
6 0 0 3 0 0 7
4 0 0 0 0 2:6 0 5
Numerical simulation and analysis 0 0 0 0 0 2:6
It can be seen from the formula (71) that the yaw tor-
que TX is obtained by the torque synthesis generated Influence of materials on torque characteristics of
by the No.1 and No.2 stators. The deflection torque Ty 3-degree-of-freedom motor driven by electromagnetic
is obtained by the torque synthesis generated by the
piezoelectric hybrid drive
No.1, No.2, and No.3 stators. The rotation torque Tz
is obtained by torque synthesis of the No.1, No.2, Influence of material on deflection torque characteristics. In
No.3, and No.4 stators. The magnitude of the torque order to further analyze the torque of the
Li et al. 11

Table 1. Piezoelectric stator structure parameters.

Parameter value (unit)

R1 30 mm
b 2 mm
h 0.5 mm
l 12p
v 37286 Hz
V 110 V
Ji 0.5mA/mm2
d0 2°
d1 7°
q 30 mm

Figure 12. Maximum output deflection torque Tx when the


Table 2. Friction material parameters of piezoelectric stator rotor contact is PTFE.
and rotor contact layer.

Contact layer Dynamic friction Elastic


material factor (md) modulus

Steel 0.3 210 GPa


Nylon 0.25 2.6 GPa
PTFE 0.04 0.4 GPa

PTFE: polytetrafluoroethylene.

Figure 13. Maximum output deflection torque Tx when the


rotor contact is steel.

Figure 11. Maximum output deflection torque Tx when the


rotor contact is nylon.

electromagnetic piezoelectric hybrid-drive 3-degree-of-


freedom motor, the maximum output deflection torque
characteristics of different preload, different contact
materials and piezoelectric stator mounting position
angle rotors were calculated using MATLAB, as shown
in Figures 11–16. When the piezoelectric stator mount-
Figure 14. Maximum output deflection torque Ty when the
ing position angle is constant, the deflection torque TX
rotor contact is nylon.
increases as the preload F increases. At this time, the
maximum deflection torque can reach 4.871 Nm; when
the preload is constant, the deflection torque Tx of the the rotor is constant, the deflection torque Ty is pre-
motor decreases as the installation angle of the piezo- adjusted. The pressure F increases as the pressure
electric stator increases; when the installation angle of increases. At this time, the maximum yaw torque can
12 Advances in Mechanical Engineering

Figure 15. Maximum output deflection torque Ty when the Figure 18. Maximum output rotation torque Tz when the
rotor contact is PTFE. rotor contact is nylon.

Figure 16. Maximum output deflection torque Ty when the Figure 19. Maximum output rotation torque Tz when the
rotor contact is steel. rotor contact is steel.

Influence of material on rotation torque. In order to further


analyze the torque of the electromagnetic piezoelectric
hybrid-drive 3-degree-of-freedom motor, the maximum
output rotation torque characteristics of the rotor with
different preload, different contact materials and stator
installation position angle are calculated using
MATLAB, as shown in Figures 17–19. When the
rotor-mounting position angle is constant, the rotation
torque Tz increases as the preload F increases. When
the preload is constant, the rotation torque Tz increases
as the angular position of the piezoelectric stator is
increased. The maximum rotation torque reaches
15.1 Nm.

Figure 17. Maximum output rotation torque Tz when the


rotor contact is PTFE. Influence of driving mode on rotation torque
reach 5.625 Nm; when the preload is constant, the yaw When the stator contact material is nylon, the rotation
torque Ty decreases with the increase of the piezoelec- torque of the motor when piezoelectric drive is
tric stator mounting position angle; when the material obtained (as shown in Figure 20) and the rotation tor-
is the same, the yaw torque Tx is greater than the yaw que of the motor when electromagnetic piezoelectric
torque Ty. hybrid drive are performed (Figure 21). By
Li et al. 13

Figure 20. Output rotation torque Tz when the piezoelectric Figure 22. Comparison of analytic method and finite element
stator is separately driven to contact nylon. method when the rotor contact is nylon.

software for the nylon material at the preload of 25 N,


as shown in Figure 22.

Conclusion
First, the principle and basic structure of the hybrid-
drive motor are introduced and the displacement and
pressure distribution of the stator–rotor contact surface
are obtained by analytical method. Based on this, the
torque model of the piezoelectric stator-drive motor is
obtained. Then, the air-gap magnetic field model of the
permanent magnet rotor is obtained by analytical
method, and the electromagnetic stator-torque model is
Figure 21. Electromagnetic piezoelectric hybrid-drive contact obtained. Finally, the torque model of the electromag-
is nylon when output rotation torque Tz. netic piezoelectric hybrid-drive 3-degree-of-freedom
motor is established by vector synthesis.
The influence of different contact layer materials on
comparison, it can be seen that the maximum rota- the contact pressure distribution of the stator and rotor
tional torque of the piezoelectric single drive can reach and the contact distance on the torque characteristics
7.03 Nm, and the maximum rotational torque of the were analyzed by MATLAB. It can be seen from the
electromagnetic piezoelectric hybrid-drive motor can analysis that the larger the position angle of the No.1,
reach 13.6 Nm. In addition, the piezoelectric-drive No.2, and No.3 stators, the larger the deflection torque.
motor has a compact structure, flexible design, easy The larger the position angle of the No.1 and No.2
miniaturization, self-locking, and fast response. The piezoelectric stators and No.3 stator, the smaller the
motor with electromagnetic drive has a complicated self-rotation torque. In order to achieve a higher preci-
structure, and it is difficult to achieve miniaturization, sion in the output reliability of the motor, the positional
and it has low control-positioning accuracy, and it is angle of the No.1, No.2, and No.3 stators can not be
difficult to be applied in a precision working place. It is 0°. When the position angle of the No.1, No.2, and
found by calculation that the combination of No.3 stators is 0, the motor rotates only for the electro-
electromagnetic-drive and piezoelectric drive increases magnetically driven rotor, which greatly reduces the
the torque of the motor. precision of the rotor drive. By comparing and analyz-
The reliability of the motor is improved by a combi- ing the piezoelectric driving motor and the electromag-
nation of two drive methods. In order to further verify netic piezoelectric hybrid driving motor, it is known
the rationality of the analytical calculation, the influ- that the combination of piezoelectric and electromag-
ence of the piezoelectric stator position angle on the netic driving not only improves the torque of the motor
rotation torque was verified by the finite element but also improves the reliability of the motor. It
14 Advances in Mechanical Engineering

provides a theoretical basis for the design and torque 9. Li Z, Huang W and Zhao C. On design of a cylinder-
optimization and improvement of the electromagnetic sphere ultrasonic motor with multi-degree of freedom.
piezoelectric hybrid-drive 3-degree-of-freedom motor. Mech Sci Technol Aerospace Eng 2004; 23: 157–160.
10. Yang X, Liu Y, Chen W, et al. Sandwich-type multi-
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Declaration of conflicting interests tion. IEEE Access 2017; 4: 905–913.
The author(s) declared no potential conflicts of interest with 11. Xu Z, Jin L, Hu M, et al. Research on a novel 3-DOF
respect to the research, authorship, and/or publication of this ultrasonic motor with two cylinder stators. Micromotors
article. 2009; 42: 27–29.
12. Chen Z. Research on the in-plane bending-mode travelling
wave ultrasonic motors. PhD Thesis, Tsinghua University,
Funding Beijing, China, 2016.
The author(s) disclosed receipt of the following financial sup- 13. Zhou S. Designing and modeling of the bi-vibrator standing
port for the research, authorship, and/or publication of this wave linear ultrasonic motor. PhD Thesis, Nanjing Uni-
article: This work was supported by the National Natural versity of Aeronautics and Astronautics, Nanjing, China,
Science Foundation of China (grant no.: 51577048, 51877070, 2014.
and 51637001), the Natural Science Foundation of Hebei 14. Li H. 3-D magnetic field analysis of a Halbach array PM
Province of China (grant no.: E2018208155), the Overseas spherical motor. PhD Thesis, Tianjin University, Tianjin,
Students Science and Technology Activities Funding Project China, 2008.
of Hebei Province (grant no.: C2015003044), the Hebei 15. Li Z. Basic research on permanent magnet spherical step-
Industrial Technology Research Institute of Additive ping motor for humanoid robot joint. PhD Thesis, Hefei
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open projects funding, the National Engineering Laboratory 16. Li Z, Guo Z and Zhang Y. Magnetic field analysis of a
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