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ABSTRACT
1. INTRODUCTION
- \
2(7uS04 + K$@ -r &P3O7 + 2 ~ ~ ~
*
0
(1) ~
cathodic (5)
anodic (6)
- 5
Pyrophosphate Bath for Copper Electroplating 121
increases the anode corrosion and acts as a grain refiner for the deposits.
After long plating periods, pyrophosphate hydrolyses to orthophosphate as
3. EXPERIMENTAL
Table 1. EKect of P,O, :Cu ratio on performance of copper pyrophosphute electroplating baths
The quantity of K,P207 required for complete precipitation was 80 g and the
weight of Cu2P,0, .3H20 produced was 82 g. If reaction (1) is valid, the expected
yield of Cu2P207.3H20should be 85 g. However, the difference of 3 g might be
a t t ~ b u t e dto the losses during washings. As mentioned under section 3, this reaction
is complete at pH : 5.0.
It will be evident from Table 1 that Cu2P207dissolves in K4P207for a weight
ratio of P207 : Cu = 5.5. This value corresponds to the formation of a hexavalent
anion viz, Cu (P,o,)", which results from the dissociation of the complex produced
as per the reaction,
It is also seen that the weight of copper deposited per unit quantity of electricity is
minimum for the above bath No. 1. Besides, the anodes were black possibly due to
formation of cupric oxides causing a decrease in anode efficiency. As the P,07 : Cu
ratio iccrei~sedto 6.5 for bath 2, the quantity of copper deposited ;rlso increased more
rll~t11t w ~ Ltbltlu.
, Still, tlrc irl~otlcuw c r c p l ~ l kI ~ ~ t l~ t It ~ I r II kIt ~101I I I O I I ~ ) I I01 I III~IOII:A~~ni(lc.
However, for the ratio of 7.5 although the weight of copper decreased a little, the
i ~ ~ ~ o tco~rotlctl
lcs I)ri~htly.l'hiu w v r s ilt nc;lrly I00 pcr cclrl i~notlccflicictlcy i111tl
rericlcrs the bath economical, since it docs 1101 bcco~rrcllccessilly to lcl)lceisI~t l ~ c
Pyrophosphate Bath for Copper Electropl(~ring 123
expensive pyrophosphate salt. The adhesivity of copper electroplate was meeting the
specification laid down for subsequent processing of the plated substrates.
5. CONCLUSIONS
ACKNOWLEDGEMENT
The authors are thankful to DRDO, Ministry of Defence, for their financial
support.
REFERENCES
1 Lowenheim, F.A., Electroplating (McGraw Hill Book Co., New York), 1978,
pp. 194-204.
2. Anthony, S. & Ramualdas, B., Metal Finishing Guide Book and Directory (Metals
and Plastics Publications, Inc., N.J.),1986, pp. 217-219.
3 Seliverstov,V.P., Zzv. Vyssh. Uchebn. Zaved. Khim Teknol, 26 (1983), 883-884.
4, Minakawa, Todashi, et al., Japanese Patent, 78, 109, 826, 1978.
5 Loschkarev, M.A., et al. , Vapr. Khim. Khim. Tckhnol, 56 (1979), 55-58.
6. Pilavov, Sh. G., & Egarova, A.L., Zashch. Met., 13 (1977), 734-73.
7. Raljewicz, Z. et al., Polish Patent, 120, 289, 1983.