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Basic Principle
Basic Principle
INTRODUCTION
Mass Spectroscopy
Mass spectrometry (MS) is an analytical technique that measures
mass to charge ratio of charged
particles.
Secondary ion mass spectrometry
Secondary ion mass spectrometry (SIMS) is based on the
observation of charged particles (Secondary
Ions) are ejected from a sample surface when bombarded by a
primary beam of heavy particles.
OUTLINE
Introduction
Basic principle
Basic overview
Ion gun
Energy and Mass Analyzer
Ion Detectors
Advantages and limitations
Applications