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Negative Capacitance from the Inhomogenous Stray Field in a Ferroelectric–


Dielectric Structure

Article  in  Advanced Functional Materials · February 2022


DOI: 10.1002/adfm.202200389

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Research Article
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Negative Capacitance from the Inhomogenous Stray Field


in a Ferroelectric–Dielectric Structure
Hyeon Woo Park, Minsik Oh, and Cheol Seong Hwang*

This corresponds to a negative permittivity


The phenomenological Landau–Ginzburg–Devonshire model provides a region when the U–P curve is converted
fundamental background for an understanding of the peculiar charge–voltage into a polarization–voltage (P–V) curve.
behavior of ferroelectric (FE) materials. However, the model cannot explain This peculiar property of FE materials has
the polarization behavior of multidomain FE materials. The experimentally generated several novel ideas,[4] including
the negative capacitance (NC) effect[5–11] in
observed negative capacitance (NC) effect, which is interpreted as an emer-
DE/FE stacked structures.
gence of the Landau barrier effect, involves particular conceptual difficulty. The FE material’s polarized state
This work provides a new conceptual framework to explain the quasi-static induces an additional electrostatic energy
NC effect based on the energy formula for a stacked dielectric/ferroelectric effect when its crystal bound charges
(DE/FE) layer structure with the multidomain configuration with arbitrary are not compensated, which was not
addressed well in the original LGD theory.
shape. The presence of such domain configuration causes the energy–dis-
This additional electrostatic energy could
placement curve of the inhomogenous Helmholtz energy term to have be mitigated in bulk-FE materials by FE
negative curvature. This is caused by the stray field between the neighboring domain formation due to the lateral stray
domains. The model can be further extended to the DE/FE system with poly- field effect.[12–14] In FE thin films with
crystalline FE grains using the advanced phase-field analysis. It is determined intimate metal contacts (i.e., metal–fer-
that the NC effect from the stray field is a universal phenomenon. These roelectric–metal structures), the high car-
rier (electron and hole) concentrations in
models provide quantitative explanations for the previously reported short-
the metals compensate efficiently for the
pulse measurement results for various DE/FE material systems, which have bound charges. Therefore, in both cases,
lacked accurate interpretations. the FE materials can remain in their polar-
ized state stably.
Salahuddin and Datta argued[5] that
1. Introduction such a polarized state could be converted into a depolarized
state by hindering the charge compensation effect that occurs
The phenomenological Landau–Ginzburg–Devonshire (LGD) when a DE layer intervenes between the FE and metal layers.
model[1–3] has provided a theoretical foundation for the explana- In terms of LGD theory, this can be understood as having a
tion of the peculiar internal energy–polarization (U–P) relation- positive curvature for the entire DE/FE stack, thus making
ships of ferroelectric (FE) materials. In normal dielectric (DE) the stack thermodynamically stable (blue curve in Figure  1a).
materials, the polarized state involves electrostatic energy; there- This indicates that the FE layer’s energy contribution to the
fore, in the absence of an electric field, DE materials remain total energy is lower than that of the DE layer (red curve in
depolarized. In contrast, FE materials have a polarized state Figure  1a) because of its small thickness (< critical thickness).
as their minimum energy state, the atomistic origin of which This effect could be used to boost the stack voltage internally,
has been ascribed to extreme softening of its optical phonons. which may be useful in improving the performance of field-
Within the LGD theory framework, the depolarized state (P = 0) effect transistors.[15,16]
coincides with the local energy maximum, at which the local However, it has been proven theoretically that the DE/
curvature has a negative value (the yellow curve in Figure  1a). multidomain-polarized FE stacked system is energetically more
favorable than the DE/depolarized-FE system as long as the
domain wall (DW) energy is not too high.[12–14,17–20] In a multi-
H. W. Park, M. Oh, C. S. Hwang domain FE thin film, all parts of the FE film remain almost
Department of Materials Science and Engineering fully polarized. Therefore, the original concept of the NC effect
and Inter-University Semiconductor Research Center from the depolarized FE material in the DE/FE stacked struc-
College of Engineering ture becomes difficult to prove. Nevertheless, the introduction
Seoul National University
Seoul 08826, Republic of Korea of a superlattice (SL) structure composed of atomically thin
E-mail: cheolsh@snu.ac.kr epitaxial DE/FE layers, e.g., SrTiO3/PbTiO3 (STO/PTO), pro-
vided a new avenue to use this particular idea and indeed has
The ORCID identification number(s) for the author(s) of this article
can be found under https://doi.org/10.1002/adfm.202200389.
shown enhancement of the static dielectric constant (ε) when
compared with that of a single DE layer.[8,21–23] It was initially
DOI: 10.1002/adfm.202200389 suggested that this represented proof of the depolarized state

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Figure 1.  Free energy density versus displacement field diagrams for the two models. a) Helmholtz energy density versus displacement field diagram
that describes stabilization of the NC in the 1D LGD model. b) Helmholtz energy density versus displacement field diagram in the ISE model. The
green curve represents the homogenous electrostatic energy density of the DE/FE stacked device. The red curve represents the electrostatic energy
density of the DE layer. The yellow curve represents the inhomogenous electrostatic energy of the DE/FE stacked device. The blue curve represents the
total electrostatic energy of the DE/FE stacked device. c) Distributions of the inhomogenous potential (except for the mean potential) inside the DE/
FE stacked structure. Each figure corresponds to the distribution with the relative ratio of domain width ε denoted by the corresponding purple dot in
(b). The arrows in these figures represent the polarization directions in each domain. See the Experimental Section for detailed derivations.

of the FE material within the SL.[8] However, more recent atom- DE/FE system. Both works acknowledged the role of the
istic structural investigations[21–23] showed that the thin FE layer injected charge (more precisely, the change with FE polarization
retains the multidomain structure, even below the critical thick- switching) involved at the DE/FE interface, which was described
ness, but the DWs have diffused configurations. In such dif- previously by Jiang et  al.[26,27] (called the tunnel-switch mecha-
fused DWs, which take a significant portion of the material, the nism). In this mechanism, the FE bound charge compensation,
effective ε value should be negative because the DWs are natu- with which the intervening thin DE layer was supposed to inter-
rally depolarized. However, the SL is of lower relevance to many fere, could be achieved fluently using the trapped charges at the
applications, particularly microelectronics. DE/FE interface, which could be varied synchronously by polari-
In this context, two recent reports on the charge-boosting zation switching via the tunneling mechanism. Because the NC
effect in DE/FE stacked structures are notable; the first considers effect, or internal voltage boosting, must suppress such fluent
an 8 or 10 nm thick amorphous Al2O3/150 nm thick epitaxial polarization switching,[28] the two reports above[24,25] used a short
BaTiO3 (AO/BTO) system,[24] and the second considers 4 nm pulse measurement technique to suppress the trapped charge
thick amorphous AO/7.7 nm thick polycrystalline (Hf,Zr)O2 (AO/ exchange. The experimental results, which will be discussed in
HZO) and 13.5 nm thick amorphous Ta2O5/11.6 nm thick poly- greater detail later, demonstrated the temporal NC effect, where
crystalline HZO (TO/HZO)[25] systems. The former represents a charge boosting was observed over the single DE layer. The two
conventional DE/FE stack structure where the FE layer thickness previous works then interpreted their results based on the con-
is much greater than the critical thickness, while the latter is a ventional LGD theory and presented Landau-type potential curves
complementary metal–oxide–semiconductor ­(CMOS)-compatible (W-shaped, as shown in Figure 1a) and S-shaped P–V curves.

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However, several critical problems arise when the results are is the energy density corresponding to the DW surface ten-
examined in a more quantitative manner. In the former case sion. The third term represents the electrostatic energy density
(AO/BTO), fitting the experimental data to the LGD theory only generated by the electric fields. Because of the multidomain
worked within a limited voltage range; the low-voltage region structure, this electrostatic energy fes can be subdivided into the
showed a severe mismatch. In the latter cases (AO/HZO, TO/ average homogenous term fes,h and the inhomogenous term
HZO), the extracted potential barrier height was lower than the fes,ih, depending on the DW location. The inhomogenous fes,ih is
theoretical value for the HfO2-based FE material from the den- composed of an inhomogenous term fes,δ that is dependent on
sity functional theory (DFT) calculation by one or two orders of δ, which is the relative fraction of the antiparallel domains (i.e.,
magnitude,[29–31] indicating that the estimated potential barrier the relative difference between the upward domain width a1
could not be the Landau potential barrier from LGD theory. a1 − a 2
and the downward domain width a2; δ = ), and the Kittel
In this work, a new conceptual framework was suggested a1 + a 2
to solve the problems that arise in explaining the fundamental energy density fes,K, which corresponds to fes,ih in the antipar-
mechanism of the observed NC effect from the multidomain allel-polarized state with a1 = a2 (δ = 0), as follows
ferroelectric film. Section  2.1 describes the theoretical back-
f es ,ih = f es ,K + f es ,δ (2)
ground of the analytical model based on the total energy argu-
ments containing the inhomogenous stray-field energy term Although the BL model helped understand the static nega-
at the domain walls. Section 2.2 shows that the suggested ana- tive ε effect near equilibrium ( δ ∼ 0 ), it cannot explain the
lytical model can explain well the observed NC effect in AO/ dynamic behavior that occurs under varying or pulsing voltage
BTO system and AO (TO)/HZO system. In Section 2.3, the NC conditions. The present work extends the theoretical BL model
effect in a practically viable AO/polycrystalline-multidomain- further to the cases where the system is under a varying elec-
HZO system is thoroughly investigated by using the phase-field tric potential (or voltage), based on the minimization of the
model. The coincidence with the numerical simulation further total energy. In this model, which is called inhomogenous stray
validates the accuracy and generality of the suggested analytical energy (ISE) model, the DW moves following the application
model. Furthermore, this numerical simulation elucidates the of the driving force to minimize the total energy with a velocity
importance of nucleating domain walls in the P–V behavior, proportional to its magnitude. This approach is consistent with
which is consistently explained in the analytical model. the drift motion in both the dynamic formalism of the Landau–
Khalatnikov model[34] and the more generalized phase-field
model.[35] In the ISE model, the variable that represents the
2. Results overall switching corresponds to the relative fraction δ and the
average polarization Pavg corresponds to Psδ. Therefore, in the
2.1. Theoretical Model of Quasi-Static NC from ISE formalism, the switching kinetics equation is derived in the
Antiparallel Domains form of a drift motion, as follows

Park et  al. recently reported that a stripe domain configura- ∂Pavg ∂ f
= −Γ avg (3)
tion for the FE layer in the DE/FE structure could produce a ∂t ∂Pavg
hysteresis-free S-shaped P–V curve, according to numerical
simulations based on the time-dependent Ginzburg–Landau where Γavg is the macroscopic conductivity of the averaged
formalism.[19] The present work uses this theoretical back- polarization Pavg. Equation  (3) can then be developed further
ground further to unveil the mechanism underlying the into the following form
W-shaped potential profile of the multidomain FE system,
in which the material remained in the fully polarized state  C d  U  1  Psδ 
throughout the entire voltage-sweep step and thus could not
∂δ t

 C + C  t +  C + C  t 
follow the Landau-type potential profile. In this context, the ear- Ps = −Γ avg f  d fb f d fb f  (4)
lier work by Bratkovsky and Levanyuck (BL)[32,33] was notable. ∂t tf + td  ∞ 8Ps 
 + ∑ ( −1) sin (π nδ )  
n

They derived theoretical backgrounds showing that the FE layer   n =1 ε 0kn2Ttf Dn  


can have a negative ε value within the DE/FE stacked structure
when the FE layer has an antiparallel domain pattern from the where ε0 is the vacuum permittivity, tf (td) is the FE (DE) thick-
Gibbs free energy formalism of the system. Nonetheless, the ness, U is the applied voltage, T is the domain period, kn is
BL model can only explain the (static) negative ε value for the the wave number, and Dn is the coupled effective dielectric
case where there are equal portions of the antiparallel domains. constant. Cfb and Cd are the background capacitance along
The Gibbs free energy density f of the entire structure can the vertical direction of the FE layer and the DE layer linear
be divided into three terms as follows[33] capacitance, respectively. A detailed derivation and related dis-
cussion can be found in Section S1 (Supporting Information).
f = f LGD (Ps ) + f DW + f es (1) This analytical formula is similar to the previously introduced
NC model,[19] but the derivation method of the equations
where the first term refers to the LGD bulk free energy of the in this model is different. While Equation  (4) was directly
FE layer. Unlike the 1D LGD model, this value is independent derived from the local field applied on the DW in the prior
of the voltage because it assumes that there is a fully developed work, the ISE model indicates that they can be formulated by
spontaneous polarization (Ps) in each domain. The second term a more generalized approach based on the total free energy.

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In Equation (4), the antiparallel domain period T is a variable 2.2. Revisiting the Experimental ‘S’-Curves in
that is not predetermined, which is one of the crucial varia- DE/FE Stacked Structures
bles for the theoretical modeling, although the other variables
were predetermined for the given material system. In the ISE Based on this new finding, the previous works by Kim et al.[24]
model, the domain period can be determined by the general- for AO/BTO and Hoffmann et  al.[25] for AO/HZO and TO/
ized Kittel’s law. A detailed discussion of the determination HZO are reinterpreted. The material parameters in Table S1
of T can be found in Section S2 and Figure S1 (Supporting (Supporting Information) were used to perform short pulse sim-
Information). ulations for the AO/BTO using the ISE model. The spontaneous
It should be noted that Kittel’s law finds the optimum T polarization and the compensation charge at the interface were
based on the balance between the electrostatic energy due to assumed to be 0.175 and −0.170 C m−2, respectively, indicating
the uncompensated polarization charge and total DW energy. that the interfacial charge initially compensated almost fully
Therefore, it requires information on the DW energy of the for the FE polarization charge. Short pulse simulations were
material under discussion. The DW energy has been reported conducted by assuming the same circuit and voltage source as
for BTO, rendering applying the ISE model to the AO/BTO the actual measurements. The results and schematics for the
system feasible. However, the available DW energy data of FE polarization states at the first and last data points are shown
HfO2 (or HZO) are highly anisotropic, i.e., dependent on the in Figure  2a. The model fitted the experimental results accu-
specific DW type.[36] It is even negative for one DW type, and rately over the entire tested voltage region. This demonstrates
other DW types have one to two orders of magnitude higher that the charge boosting over the single AO layer was due to
than BTO, making applying the ISE model to the AO/HZO and the reversible motion of the DW and not caused by the homog-
TO/HZO cases challenging. However, this was not a serious enous polarization switching behavior of the FE layer according
problem because the general HZO film has a polycrystalline to LGD theory. The P–E relationship of the FE layer immedi-
structure with a grain size smaller than the equilibrium T. This ately before termination of the pulses can be extracted from
will be discussed in detail in Section 2.2. Figure 2a and is plotted in Figure 2b. A detailed derivation of the
Interestingly, the ISE model resulted in an energy curve P–E values is addressed in the Experimental section. Surpris-
with negative curvature near P  ∼ 0, (more precisely, the dis- ingly, the experimental S-shaped P–E curves that were extracted
placement field D ∼ 0, because this model treats the entire DE/ from two different samples with different DE thicknesses had
FE system as a combined entity; therefore, the P of the only almost identical shapes that can be reproduced precisely using
FE layer can hardly be separated) as indicated by the yellow the ISE model. The independence of P–E curve for the different
curve in Figure 1b. For ease of comparison with Figure 1a, the DE thicknesses was theoretically driven by defining an effective
Helmholtz energy h was plotted, although f was introduced dielectric constant, which corresponds to the slope in P–E curve
(methods for the conversion between these quantities via the at P  = 0 (Section S3 in Supporting Information). Figure S2 in
Legendre transformation). Among the energy contributions, the Supporting Information shows that the effective dielectric
hih has negative curvature, whereas hh (green curve) and hDE constant and the shape of the P–E curve do not vary with DE
(red curve) have normal positive curvatures. Therefore, htotal thicknesses, which is consistent with the extracted result from
(blue curve) could have a minimum near D  ∼ 0. Figure  1c, the experiment. Moreover, U–P curves can be obtained from
which shows the inhomogenous potential distribution within the experiment as shown in Figure 2c, and they were explained
the device for different δ (or D), hints at the negative curva- well by the ISE model as well. Section S4 (Supporting Informa-
ture of hih. As the figure shows, the overall magnitude of the tion) identifies that these free energy curves are not related to
inhomogenous potential (apart from the mean internal poten- the intrinsic LGD barrier but the inhomogenous electrostatic
tial) decreases as the polarization is poled into one direction. energy. Therefore, these curves must be different from the DFT
This is because the stray field intensity decreases as the width result, as shown in Figure S4a in the Supporting Information.
of the domains oriented according to the poling direction The results in Figure 2 show that the ISE model, represented
increases. by Equation (4), which assumes the simple antiparallel domain
In the 1D LGD model, the energies of the DE and FE layers structure, can fully simulate the NC effect in the AO/BTO
were treated independently, and the NC effect was attributed system where the BTO film is epitaxial on the SuRuO3/DyScO3
to the FE layer’s double-well potential. In contrast, the ISE substrate. The epitaxial BTO film had a compressive strain
model shows that the total energy generated by the DE/FE (ε = −0.01) due to the lattice mismatch with the substrate, which
stacked structure is a coupled property of both layers, and favored the formation of the antiparallel DW.[24] On the other
thus, cannot be divided into independent energies for each hand, to apply this model for the DE/polycrystalline FE struc-
layer. In this case, the NC phenomenon originates from the ture, it should be guaranteed that a similar NC effect can be
inhomogenous stray field distributed within both layers. This reproduced in the more complex domains. This was proven for
indicates the possibility that the recently observed double- the AO/HZO and TO/HZO structures, as shown in Section 2.3.
well potential was not caused by the LGD-type anisotropic The results for the AO/HZO and TO/HZO structures are
energy of the FE layer. Instead, it could be originated from summarized in Figure  3. The spontaneous polarization was
the inhomogenous potential in the antiparallel domain struc- assumed to be 0.14 C m−2 for both samples, and the compen-
ture. Another significant merit of the ISE model is that it can sation charges were assumed to be −0.135 and −0.132 C m−2
quantitatively treat the effects of the various parameters of for AO/HZO and TO/HZO samples, respectively. As discussed
the DE and FE layers, including their thicknesses, ε values, before, the equilibrium domain width (aeq) values for these sam-
and Ps values. ples were predetermined to be 5–7 nm due to its considerable

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Figure 2.  Analysis of Kim et al.’s work[24] (AO/BTO system) using the ISE model. a) Discharging amounts of AO/BTO capacitors for various pulse
heights and schematics of the polarization states at two data points. Dotted lines represent the calculated charge density–voltage curves of the AO
single layer. b) Extracted FE layer electric field versus polarization curves for the AO/BTO capacitors. c) Extracted polarization–free energy curves for
the AO/BTO capacitors. In all subgraphs, the data for the 8 nm AO/150 nm BTO capacitor are plotted in blue, and the data for the 10 nm AO/150 nm
BTO capacitor are plotted in red. Circles represent the experimental results, and solid lines represent the simulation results from the model.

DW energy and small grain size, and these domain width the experimental result. Figure S3 in the Supporting Infor-
values are small enough for the antiparallel domains to be mation shows the dependence of the effective dielectric con-
present within a single grain.[37,38] The other material para­­­­ stant and P–E curve on the dielectric constants of both layers.
meters shown in Section S5 and Table S2 (Supporting Informa- Because the effective dielectric constant is almost constant for
tion) were used to perform the fitting. Note that the original different dielectric constants of the DE layer (Figure S3c, Sup-
data were plotted until charge injection was induced by the porting Information), it can be concluded that the difference
high voltage. The results show that the model again produces in the S-curves in Figure  3c resulted from the different FE
excellent predictions, even for the polycrystalline FE layer, in thicknesses, not from the different types of DE materials. The
which the domain configuration cannot be single and homog- energy barrier shown in Figure 3d is also dependent on the FE
enous. Also, the model can predict all the electrical behavior, layer thickness, which cannot be explained by the LGD model
although the DE and FE layers have different thicknesses and ε but can only be explained by the ISE model. Additionally, as
values. As shown in Figure 3c, the S-curves of the two samples illustrated in Figure S4b in the Supporting Information, the
are quite different, even when the same FE material was used. value of the barrier height generally being much smaller than
This difference in the S-curves cannot be explained using the the theoretical LGD barrier height is no longer problematic
LGD model, which regards the S-curve as an intrinsic property because it does not represent the intrinsic LGD barrier. Instead,
of the FE material. In the ISE model, however, this critical dif- it represents the inhomogenous electrostatic energy for DW
ference was anticipated based on the different FE layer thick- migration with the antiparallel domain configuration.
nesses. Figure S2b in the Supporting Information shows how Additional proof for accurate application of the model to
the S-curves vary with FE thicknesses, which is consistent with another AO/HZO system, reported by Kim et  al.,[39] can be

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Figure 3.  Analysis of Hoffmann et al.’s work[25] using the ISE model. a) Discharging amounts of AO/HZO capacitor for various pulse heights. b) Dis-
charging amounts of TO/HZO capacitor for various pulse heights. In (a) and (b), dotted lines indicate the calculated charge density–voltage curves
for the DE (AO or TO) single layer. c) Extracted FE layer electric field versus polarization curves for the two capacitors. d) Extracted polarization versus
free energy curves for the two capacitors. In all subgraphs, circles represent experimental results, and solid lines represent simulation results from
the model.

found in Section S6 and Figure S6 (Supporting Information), nonpolar monoclinic (P21/c) and tetragonal (P42/nmc) phases,
where the HZO film has a Hf:Zr ratio of 3:7 and severely may coexist with the polar orthorhombic phase (Pca21) in the
imprinted behavior. The AO layers had thicknesses of 5.5, 7.3, HZO thin film.[41] In this regard, the validity of the analytical
and 10.1 nm. Even for these materials, the ISE model accurately model based on the simple antiparallel domain structure in the
predicts the material behavior and provides valuable informa- out-of-plane direction might be limited. Therefore, to examine
tion about the NC properties. the validity of this claim, a more realistic numerical model for
It should be noted that the discussions in this section AO/polycrystalline-multidomain-HZO (AO/p-m-HZO) thin
assumed the simple antiparallel domain configuration as for films was developed, and their charge–voltage responses were
the epitaxial BTO case, which may be impractical for the poly- numerically simulated. For this purpose, the previous phase-
crystalline-multidomain HZO system. However, the following field model[19] was modified to incorporate the multigrain, mul-
section justifies applying the ISE model even for this case. tiphase, and multidomain configurations by taking the crystal
orientation and the coefficients of the free energy function of
the phases into consideration. In this modified simulation, the
2.3. Numerical Model Analysis on the NC Effect in crystal angle and the first coefficient of the LGD polynomials
AO/HZO System are the additional order parameters that distinguish each order
(or phase) from others.[42] A detailed description of this model
In polycrystalline ferroelectric HZO thin films, domains with can be found in Section S7 (Supporting Information). The NC
random polar axes exist due to independent crystal orienta- effect in the AO/p-m-HZO bilayer structure can be system-
tion in each grain. Also, nonferroelectric phases, such as atically investigated by adding each order parameter. In this

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Figure 4.  Simulated NC effect in the phase-field model of the single-crystal ferroelectric HZO thin film with slanted domains (AO/HZO system).
a) Polarization–electric field (P–E) curves of the FE layer in the local coordinate of the crystal orientation. b) Magnified version of the P–E curves.
c) Snapshot images of the domain distribution in each step denoted by the circles on the P–E curves. White arrows in the images indicate the direction
of the FE polarization. The local conductivity, Γloc was assigned as 1.14 S m−1 in the model so that the scale of the domain wall velocity (≈0.15 m s−1)
is consistent with the experiment.[40]

section, two model cases were dealt with; One is slanted multi- effect appears due to the stray field between domains regard-
domain in a single-crystal HZO (Figure 4), and the other is ran- less of the orientation of the domains. As a result, the quasi-
domly oriented multiple domains in polycrystalline HZO with static NC effect exists in this AO/HZO thin film but within a
columnar grain shape (Figure 5). limited sweep range (± 6.72 V).
Figure  4a shows that the NC effect can also be found in An analytical NC model which explained such a circum-
the slanted domain structure, in which the polar axis of the stance could also be derived through the energy framework
single-crystal ferroelectric HZO thin film has an angle of 60° of the ISE model. This extended model mathematically veri-
with the out-of-plane direction in a 5 nm  AO/10 nm  HZO fied that the same principle holds even for a domain structure
structure. The P–E curve (the sky-blue curve in Figure  4a) having an arbitrary direction. A detailed description of this ana-
following the LGD formula was extracted from the intrinsic lytical model and the quantitative analysis on the tilted angle
double-well potential of HZO obtained from the DFT calcula- are addressed in Section S8 (Supporting Information).
tion.[36,43,44] Other material parameters for the numerical sim- Next, the possible NC effect in the 5 nm  AO/10 nm  p-m-
ulation are listed in Table S3 (Supporting Information). DFT HZO thin films was investigated by adding a spatial order
studies of HZO revealed that the intrinsic coercive field (Ec) parameter for crystal orientation to this model. Figure  5a
representing homogenous switching of HZO (> ≈10 MV cm−1) shows the hysteretic S-shaped P–E curves of a polycrystal-
is larger than the experimentally observed Ec (≈1 MV cm−1) line HZO thin film with five columnar grains (each width
by approximately one order of magnitude.[36,43] The purple of 20  nm). Figure  5b shows the domain distribution during
dotted curve in Figure 4a (and a magnified version, Figure 4b) sweeping the voltage (Vpol) from −20 to +20  V. As shown
shows the P–E curve of the FE layer when a voltage sweep in state (1) of Figure  5b, most domains are initially poled
of ± 20  V  is applied from the initial depoled state. The P–E pointing upward by a highly negative voltage of −20 V except a
curves were calculated by averaging the local polarization and few reversed domains in the outermost grains. As the voltage
electric field along the crystal orientation. Figure  4c shows increases toward the positive value, the domains with effec-
the snapshots of the (slanted) domain configuration at the tively pointing downward polarization (blue region) expand
corresponding points in Figure  4b. In this case, the initially while the effectively pointing upward polarization (red region)
(mostly) pointing-upward-polarized multidomain structure shrinks. Nonetheless, the corresponding P–E curve still
(state (1)) is being polarized pointing-downward by applying shows a positive slope, suggesting the positive capacitance
a voltage of +20 V to the top part of the figure. This operation between the states (1) and (2), even though the DW motion
transits the multidomain (MD) state to the single domain (SD) occurs from the residual domains in outer grains. As shown
state (state (5)). Once the SD state is reached, the P–E curve in Figure 5c, this is because alternating bound charges are not
follows the homogenous switching path (sky-blue curve). generated at the DE/FE interface from these residual domains.
Note that at state (4) of Figure 4c, the stripe domain structure Thus, the influence of the stray field is insignificant at state
disappears through a vertical DW motion. At this point, an (1) in Figure  5c. As the positive bias increases, a reversed
abrupt and hysteretic NC effect (blue dot in Figure  4b), devi- domain is nucleated, denoted by the green circle in state
ating from the original switching path, appears. However, (2) of Figure  5b. At this state, notably, the capacitance of the
when the sweep voltage range is decreased from ± 20  to ± FE HZO film is converted from positive to negative. At this
6.72  V,  the (slanted) stripe domain structure remains. This state, a strong stray field is generated between the domains
renders the hysteresis-free NC operation (red dotted curve) by grown from the nucleus and the adjacent opposite domains.
the reversible lateral domain wall motion possible, as shown Hence, a distinct NC effect can be attributed to the inho-
in Figure  4b,c (state (1) to (3), and vice versa). Such an NC mogenous electrostatic energy. Note that the nucleus of this

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Figure 5.  Simulated NC effect in the phase-field model of the polycrystalline-multidomain ferroelectric HZO thin film (AO/p-m-HZO layer). a) Dis-
placement field–electric field curve of the polycrystalline HZO layer in the bilayer structure during the voltage sweep from −20 to +20 V. b) Snapshot
images of the domain distributions. Each step is denoted by the yellow square with the number on the blue square curves in (a). c) Snapshot images
of the electrical potential. Note that the lateral stray field distribution is denoted by the magenta arrows. d) Displacement field–electric field curves
of the polycrystalline HZO layer in the bilayer structure during the voltage sweep from −15 to +15 V. e) Snapshot images of the domain distributions.
Each step is denoted by the sky-blue circle with the number on the red dotted curve in (d). f) Snapshot images of the electrical potential. g) Profile
of the energy density of the lateral electric field (Ex) in each step of (d). The figures below the distribution of the energy density represent the domain
distribution in each step. h) Averaged electric energy density of the lateral stray field (Ex) for the displacement field (D). The dashed line corresponds
to the energy density with the opposite sweep direction.

reversed domain is formed at the tail to tail charged domain the LGD theory (sky-blue curve) in Figure  4a shows that the
wall (CDW), which has been observed in polycrystalline HZO polarization switching occurs at a field much smaller than
thin films.[36,45] Since the opposing bound charges in the CDW the intrinsic Ec through a nucleation and growth mechanism
are not compensated, a depolarization field can be enhanced in this p-m-HZO. When such a new domain is nucleated, a
in this region. Therefore, a nucleus of the reversed domain strong stray field is produced (states (2)–(4) in Figure  5c) at
is mostly formed at the CDWs. Comparing the P–E curve the DE/FE interface, which induces the inhomogenous field
(navy square curve) in Figure 5a with the P–E curve based on energy, and thus, the NC effect.

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Nonetheless, in this case, the S-curve occurs with hysteresis damping effect by DW motion of the multidomain in the DE/
because the nucleation field (≈  ±3.74 MV cm−1) is required in FE bilayer can be minimized. This circumstance can be defined
both sweep directions once the FE film reached a uniformly as a “quasi-static” NC in the multidomain structure.
polarized state. Interestingly, this hysteresis is significantly
It is possible to reach a quasi-static state  f ∼ 0  for a
dQ
diminished as the Vpol decreases to ± 15 V, as shown by the green  dt 
diamond curve in Figure 5d. During the simulation, the intrinsic given voltage condition by increasing the mobility of the DW.
Ec is fixed at ≈12 MV cm−1. This result indicates that the hys- Reducing the voltage sweep rate also provides a similar effect.
teresis of the S-curve is determined by not only the (apparent) The red dotted curve in Figure 5d shows that the hysteresis by
Ec but also Vpol, which is consistent with general experiments. the damping effect can be substantially reduced as the conduc-
Figure 5e shows the change of domain distribution during this tivity of local polarization (Γloc), which is proportional to DW
voltage sweep. State (1) retains a much larger portion of the mobility, increases by ten times. This indicates the possibility
reversed domains than state (1) in Figure 5b. In particular, most of a hysteresis-free NC effect even in the p-m-HZO. The solid
residual domains are found near the grain boundaries because red curve in Figure 5d shows that this quasi-static S-curve can
they have a relatively large depolarization field. This result also be safely approximated by the analytical ISE model assuming
justifies the presumption that the domain period is determined the simple antiparallel domain configuration, presented in Sec-
by the grain size of the p-m-HZO film. As the bias voltage tion  2.2. Again, this consistency stresses that the NC effect is
increases into the positive direction up to 15 V, switching in each essentially due to the consistent change of the inhomogenous
grain proceeds by the DW motion of the residual 2–3 domains stray field energy during the switching process. The following
without involving the nucleation and growth of new domains. explains this NC effect more precisely.
These results are also consistent with the recent ab initio calcula- Figure 5f shows the variation in the electric potential during
tion results, which showed that fast DW motion is possible even the switching process denoted by the sky-blue circles on the
in HZO via the specific topological path of DW motion.[46] Nev- quasi-static S-curve in Figure 5d. The stray field (indicated by the
ertheless, there is an NC region between the states (2) and (4). magenta arrows) is concentrated at the DE/FE interface, where
Because there is no involvement of reverse domain nucleation alternative FE bound charges are exposed. While all the stray
and growth, the switching process, in this case, can be described fields are not necessarily along the x-axis (Ex), it is clear that Ex
by Equation  (4). Equation  (4) assumes a drift motion in which constitutes a large portion of the stray field. Therefore, to visu-
the domain wall velocity is proportional to the electric field.[47] alize the change of inhomogenous energy due to the stray field,
Therefore, the voltage of the FE layer can be expressed as follows 1
the electrostatic energy density  h = ε 0 ε f E x2  associated with
 2 
dQ f  ∞ 8Ps  Q f   the Ex in each state was displayed three-dimensionally. Figure 5g
Vf = ρDW + ∑ ( −1) sin  π n
n
 (5) shows that the field energy density increases rapidly when the
ε 0knTDn  Q s  
2
dt  n =1 one polarization portion of the domain is much smaller than the
other (states (1) to (2) in Figure  5g). However, as it approaches
where A is the area of the device, ρDW  = (tf  + td)/ΓavgA is the the depoled state (the two portions of the opposite domains were
macroscopic damping resistance of the DW motion, Qs  = PsA similar), the rate of increase of the stray field energy decreases
is the saturated charge, and Qf  = PsδA  = Qsδ is the ferroelec- and eventually reaches the maximum value (States (2) to (3) in
tric polarization charge. As shown in the first term of Equa- Figure 5g). Subsequently, the stray field energy decreases again
tion (5), the damping effect resulting from the DW motion with as the switching progresses further to the SD state with the
finite mobility induces an additional voltage drop, which can be opposite polarity. Consequently, the change in inhomogenous
expressed as a series resistance (ρDW) in Figure S12 in Section S9 electrostatic energy manifests as a negative curvature concerning
(Supporting Information). The second term in Equation (5) rep- the displacement field near the depoled state, as in Figure  5h.
resents the nonlinear change of the voltage as the Qf changes This result is also consistent with the energy curve of the simple
through DW motion, which can be expressed as a nonlinear model in Figure 1b. It should be noted that the NC effect is not
capacitor (Cinh(Qf )) in the equivalent circuit of Figure S12a in necessarily attributed to only the appearance of the stray field
the Supporting Information. Cinh(Qf ) is responsible for the but how the field energy evolves during the switching. Since the
S-curve in the P–E curve. The parallel capacitor (Cfb) is attrib- underlying physics must be identical, the NC effect of a com-
uted to the background dielectric constant of the FE layer. The plex domain structure can also be approximated by adjusting the
red dotted curve in Figure S12b in the Supporting Information parameters of the simple analytical model.
shows the D–V curve of the equivalent circuit. The hysteresis Furthermore, the NC effect due to the stray field in the DE/
of the D–V curve is attributed to the first term in Equation (5), FE bilayer, where the FE layer contains a nonpolar phase, can
meaning that the hysteretic green diamond curve in Figure 5d be addressed in essentially the same manner. Of course, the
originates from the damping effect by the movement of the average NC effect must be decayed due to the parallel posi-
DW, not by the reversed domain nucleation. If the fraction of tive capacitance of the nonpolar phase. However, as shown in
multidomain changes without involving the damping effect Figure S8 in Section S7 (Supporting Information), the alterna-
 dQ f  tive bound charges can also be located at the interface between
∼ 0  , the D-internal voltage (Vint) relationship appears as
 dt  the polar and the nonpolar grains, generating a vertical stray
the blue S-curve (Figure S12b, Supporting Information) from field. Because of this reason, the NC effect due to the inho-
the nonlinear capacitor. Therefore, Equation  (5) indicates that mogenous electrostatic energy can be expected not only at the
the FE layer shows the hysteresis-free NC behavior when the DE/FE interface but also at the different phase boundaries.

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3. Conclusion In the LGD model, the Helmholtz free energy of the stacked structure
could be expressed as follows
In conclusion, this study developed the analytical model for the
htot = hFE + hDE (9)
quasi-static NC phenomenon in the DE/FE stacked structure
with the antiparallel domain configuration. It also provided
quantitative explanations for the several experimental results 1 
hFE = HFE = a1Pf2 + a11Pf4 + a111Pf6 +
(D − Pf )2  t
(10)
and revealed that the origin of the observed NC effects was not A 2ε 0ε c  f
 
the intrinsic LGD barrier of the FE layer, but the inhomogenous
electrostatic energy caused by the stray field between the neigh-
D2
hDE =
boring domains. Moreover, the advanced phase-field model anal- 2C d (11)
ysis showed that the NC effect from the stray field is a universal
The electric field in the FE layer for which Pf can be stabilized
phenomenon. The analytical model could further be extended ∂P
(i.e., ∂tf = 0 ) could be obtained in the form of Equation  (12), and the
to the DE/FE system with polycrystalline and multidomain FE
film. It could also be adopted to identify the possible NC effect relationship between D and Pf could then be obtained by inserting
Equation (12) into Equation (8)
from the thin films composed of polar and nonpolar phases.
Finally, the experimental circumstances under which this new E f = 2a1Pf + 4a11Pf3 + 6a111Pf5 (12)
ISE model cannot be applied are described briefly. This model
assumes that if the charge injection occurs, the interfacial trap
charge follows the FE layer’s polarization switching behavior D = ε 0ε c ( 2a1Pf + 4a11Pf3 + 6a111Pf5 ) + Pf (13)
instantaneously. Therefore, if there is a time lag between the Insertion of Equation (13) into Equations (10) and (11) allowed every
changes, a hysteretic P–V curve would be achieved that would Helmholtz free energy term and displacement field to be expressed
complicate the application of the model. Additionally, if the FE in terms of Pf. Therefore, using Pf as a parameter, the relationships
layer is fully and homogenously switched into one direction, between the displacement field D and the Helmholtz free energy
then switching into the reverse direction requires nucleation terms htot, hFE, and hDE could be plotted as shown in Figure  1a. The
of the reverse domains, which requires nucleation time (or a following values for BTO were used for effective display of the results:
a1 = − 2.26 × 107 V ⋅ m C−1, a11 = 1.37 × 108 V ⋅ m5 C−2, a111 = 2.76 × 109 V ⋅ m9 C−5,
delay). This was not taken into account in the model since the εc = 50, εd = 8.9, tf = 100 nm, and td = 1 nm.
actual FE layer almost always retains nuclei of opposite Ps, even In the model, the Helmholtz free energy could be expressed as follows
in the almost fully switched configuration, which then serves as using Equation (S1.2) and Equation (S1.3) (Supporting Information)
nuclei for reverse domain growth. In the short pulse measure-
ments, the assumptions of unvaried interfacial trap charges and 1 1  1 1 
h = H = FLGD (Ps ) + FDW + ∫ dAσϕ + ∑e aϕ a  (14)
retained reverse domain nuclei in even saturation-level switched A A

2 F /D 2
a 
FE films were fulfilled well, and the model thus applies without
The only difference between the expressions for the Helmholtz
any conceptual difficulty. The ISE model fundamentally assumes
free energy and the Gibbs free energy was the sign of the last term in
a hard domain (abrupt domain wall). For the material with the Equation (14). This difference led to the change in the sign of the second
dominant soft domain (gradual domain wall), the depoled state term in fes,h (Equation (S1.5) in Supporting Information), while the other
of the domain walls may constitute the main reason for the NC Helmholtz free energy terms, which corresponded to the LGD energy,
effect, not the stray field-induced inhomogenous energy. the DW surface energy, and the inhomogenous electrostatic energy,
respectively, were the same as the corresponding terms for the Gibbs
free energy. Only hes,h, and hes,δ were considered here because the other
terms were independent of δ and thus did not affect the capacitance in
4. Experimental Section this case
Derivation of the Helmholtz Free Energy Density–Displacement Field htot = hh + hih (15)
Curves in Terms of Energy: To extract the capacitance of the structure from
the free energy density–displacement field curve, the Gibbs free energy
must be transformed into the Helmholtz free energy using the Legendre ε 0ε dU + λPsδ td  t f  1 ε ε U 2 − λPsδ t f U
hh = hes,h = λPsδ + ε ε 0 c (16)
transformation as follows[48] ε 0ε c td + ε 0ε dt f  2  2 0 d ε 0ε c td + ε 0ε dt f
−1
 ∂ 2 h 
4( λPs )2 a ∞ ( −1) (1− cos (π nδ ))
n
C =  2 (6)
 ∂D  hih = hes,δ = ∑
ε 0π n=1 n
3 3 Dn
(17)

The displacement field D could be obtained from the applied voltage


1 1 
h = H =  F + ∑e aϕ a  (7) U and the equation for the displacement continuity at the DE/FE
A A  interface, as follows
a

where C is the differential capacitance of the structure, D is the U = −E dtd − E f t f (18)


displacement field in the structure, H is the Helmholtz free energy of
the structure, and h is the Helmholtz free energy of the structure per
unit area. The displacement field D could be obtained using the equation ε 0ε dE d = ε 0ε cE f + λPsδ (19)
for the displacement continuity at the DE/FE interface, as follows

D = ε 0ε dE d = ε 0ε cE f + Pf (8)
D = ε 0ε dE d =
Cd
(
C d + C fb
λPsδ − C fbU ) (20)

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The final step here was to determine the value of U at which the value initial state, the equations then became the same as those reported in
of δ can be stabilized  i.e., ∂∂δt = 0 using Equation (S1.21) (Supporting the previous work.[25]
Information) The double-well potential of the stacked structure could be obtained
from the S-curve as follows

 Cd  U  1  λPsδ  ∞ 8λPs  1 Pf
 C d + C fb  t f +  C d + C fb  t f + ∑ ( −1) ε k 2Tt D sin(π nδ )  = 0 (21) f (Pf ) = f 0 +
L ∫0 f
n
V dP (29)
 n=1 0 n f n 
where f is the free energy per unit volume of the stacked structure.


λPsδ C d + C fb  
U=− −  ∑ ( −1) n 8λ2Ps sin(π nδ ) (22)
Cd Cd 
 n=1 ε 0 k n TDn  Supporting Information
Supporting Information is available from the Wiley Online Library or
Insertion of Equation  (22) into Equations  (16) and (20) allowed
from the author.
all the Helmholtz free energy terms and the displacement field to be
expressed using δ. Therefore, the relationship between the displacement
field D and the Helmholtz free energy terms htot, hh, and hih could
be acquired, as shown in Figure  1b, by using δ as a parameter. hDE Acknowledgements
in Figure  1b was plotted using Equation  (11) while assuming that the
single DE layer had the same displacement field. The following values H.W.P. and M.O. contributed equally to this work. This study
were used for effective display of the results: a1 = − 2.26 × 107 V ⋅ m C−1, was supported by the National Research Foundation of Korea
a11 = 1.37 × 108 V ⋅ m5 C−2, a111 = 2.76 × 109 V ⋅ m9 C−5, εa = 50, εc = 50, (2020R1A3B2079882). The authors thank David MacDonald, MSc, from
εd = 8.9, tf = 25 nm, td = 5 nm, Ps = 0.2 C m−2, and λ = 0.1. The value of Edanz Group (https://en-author-services.edanz.com/) for editing a draft
εa was intentionally set to be equal to that of εc for the sake of schematic of this manuscript.
clarity. Note that the values of the displacement field and the Helmholtz
energy in Figure 1b were quite small because a considerable amount of
charge compensation (λ = 0.1) was assumed for effective display.
Derivation of S-Curve and Double-Well Potential from the Short Pulse Conflict of Interest
Measurements:[25] From the pulse height-discharging amount graph
The authors declare no conflict of interest.
shown in Figure  2a, the voltage across the FE layer and the apparent
polarization at the end of each short pulse could be extracted as follows.
Before application of a short pulse, the voltage across the stacked
structure was zero
Data Availability Statement
Vf + Vd = 0 (23) Research data are not shared.
where Vf  (Vd) is the voltage across the FE (DE) layer. From the equation
for the displacement continuity at the DE/FE interface

σ comp + C dVd = C fbVf − Ps (24) Keywords


where − Ps is the initial spontaneous polarization of the FE layer. In domain wall, ferroelectric devices, inhomogenous energy, negative
this section, a positive sign for the polarization referred to the direction capacitance, stray field
in which the polarization was switched when a positive voltage was
applied, which was opposite to the way used in the main results section Received: January 11, 2022
above. Therefore, the amount of charge in the electrode near the DE Published online:
layer, which was denoted by Qd, was as follows

Qd = −
Cd
(
P + σ comp
C d + C fb s ) (25)
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