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7. RF RESISTOR MODEL
The measurement results from the testchip are listed below:
* RSH values for N+ and P+ diff. w/i silicide are geometry dependent.
* Rint and Rgrain of N+/P+ poly w/o silicide are described in the section “Resistor Equivalent Circuit Model”.
* The resistor values can be written as follows for the resistors: N+/P+ poly w/i silicide, N+ diff, P+ diff:
R= R0*[1+ VC1 * dV + VC2 * (dV)2]*[1+ TC1 * dT + TC2 * (dT)2]; where dT = T - Tnominal (25 °C).
The resistors are function of temperature and the valid range is -40 °C ~ 125 °C.
Also, the resistors are function of voltage and the valid range: N+/P+ poly w/i silicide : -3.3 ~ 3.3V
N+ diff : 0 ~ 3.3V
P+ diff : -3.3 ~ 0 V
The resistance is measured with one node of resistor grounded, whereas the other node is applied by V and dV is the
voltage across the resistor.
R0 is layout-dependent and calculated from sheet resistance. The equation is:
R0 = Rsh * (L –deltaL)/ ( W – deltaW ) ; L is the drawn Length and W is the drawn width.
* The resistor values can be written as follows for the resistors: N+/P+ poly w/o silicide:
R= 2*Rc+2*Rint+2*Rgrain+Rp;
where Rint=R2*[1+ VCX1 * |dV| + VCX2 * (dV)2]*[1+ TCX1 * dT + TCX2 * (dT)2]
Rgrain=R3*[1+VCG1 * |dv|+VCG2* (dV)2]*[1+ TCG1 * dT + TCG2 * (dT)2]
Rp=R0*[1+ VCP1 * |dV| + VCP2 * (dV)2]*[1+ TCP1 * dT + TCP2 * (dT)2]
where dT = T - Tnominal (25 °C).
The resistors are function of temperature and the valid range is -40 °C ~ 125 °C.
Also, the resistors are function of voltage and the valid biasing range: N+/P+ poly w/o silicide : 0~0.5mA/um
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The information contained herein is the exclusive property of TSMC and shall not be distributed, reproduced, or disclosed in whole or in
part without prior written permission of TSMC.