ASSIGNMENT NO : 4

MEMS NEMS LAB

NAME: TANUJ KUMAR
ENROLLMENT NO/ROLL NO : MT22MVD018
DATE OF SUBMISSION : 20/04/2023
Design two MEMS Cantilever beams keeping air between them with a gap of 10 μm.
Top beam dimensions:
(i) Rectangular: 100 μm x 10 μm x 1 μm (L x w x t)
(ii) Perforated rectangular: 100 μm x 12 μm x 1 μm with circles of diameter 10 μm
spaced at 10 μm and
(iii) Trapezoidal: 100 μm x 1 μm (L x t), width- 12 μm on clamped side to 8 μm on
free side.

Bottom beam is rectangular for all three questions.

For structure (i), (ii) and (iii), simulate and find the voltage required to bend top beam
for
a deflection of 2% of length of cantilever by varying the voltage to the top beam keeping
the bottom beam fixed and at ground. Also keep one face of the top beam fixed.
Comment on the difference in the voltage applied for all the structures.

(i) Rectangular
The voltage required to get 2µm deflection is 184V.
(ii) Perforated rectangular

The voltage required to get 2µm deflection is 115V.

(iii) Trapezoidal

The voltage required to get 2µm deflection is 188V.

Conclusion:
This homework taught me about electromechanical physics, which is utilised to see how two
cantilevers deflect when a potential difference is applied. The voltage needed to achieve 2%
deflection, or 2 m of deflection, in the case of a perforated rectangular cantilever is low
(115V), in contrast to the 184V and 188V needed for rectangular and trapezoidal cantilevers,
respectively, to achieve the same amount of deflection. Because of the perforated structure, a
perforated rectangular cantilever can deflect with less and less mass and voltage.