Proceedings of The 2019 IEEE International

Conference on Real-time Computing and Robotics

August 4-9, 2019, Irkutsk, Russia

Design and Development of a Robotic Arm for Evaluation of Medical MEMS

Sensors
Heng Li, Meixuan Zhang, Juntao Li, Guangyi Shi, and Yufeng Jin*
TSV 3D Integrated Micro/Nano System Lab, Peking University Shenzhen Graduate School, Shenzhen, China.
*Contact Author: yfjin@pku.edu.cn

system and the composition of the entire control system. In the

Abstract--This paper presents a robotic arm for evaluating third part, we simulated the robot arm that has a good motion
the multiple-physical information sensing array for the purpose
of detecting the edge of blood clots and tumors. The robot arm ability when a drive is applied to it. And then we use Adams
has six degrees of freedom, of which the first four degrees of and MATLAB union simulation that shows that it has a good
freedom are used to control the movement position of the robot position tracking feature. In the fourth part, the multiple-
to achieve fast and conformal touching of the target object; the physical information sensing array is simulated, which has
latter two degrees of freedom are used to control the motion good sensitivity and pressure output characteristics that is
posture of the robot end effector, achieving a uniform speed promising to be used to improve haptic feedback.
mobile detection. The Adams and MATLAB union simulation
is then used, which shows that it has an ability of good position 
tracking. At the same time, we simulated a silicon-based II. MECHANICAL SYSTEM
piezoresistive pressure sensing array, which has a good voltage
output characteristic for medical detection.
A. Functional Concept Map
I. INTRODUCTION
In recent years, with the development of minimally
invasive surgery in the direction of mechanization and
automation, minimally invasive surgery robots have emerged.
Compared with open surgery, robot assisted surgery have the
advantages of small patient pain, small body strain, fast
recovery, and small damage [1,2]. The surgical tool is
transported to the lesion location according to a predetermined
trajectory, and the minimally invasive surgical robot leads the
surgeon in accuracy and reliability [3,4]. In addition, robots
can perform many surgical tasks, such as accurately
positioning and repositioning surgical tools, applying precise
calibration and control power, reducing physiological tremors
in human hands, scaling power and motion size [5]. Palpation
is common in robotic assisted careˈand has been used to
detect diseased tissue [6], distinguishing between tumor and
normal tissue by differences in muscle tissue. Because the
stiffness of the tumor is different from the surrounding intact
tissue [7], surgeons can distinguish between tumors and
healthy tissue by palpation [8]. The use of robot-assisted
palpation has become a research hotspot, but most surgical 
operation robots cannot provide direct tactile feedback [9]. ‹‰ǤͳŠ‡• Š‡ƒ–‹ ‘ˆƒ”‘„‘–‹ ƒ”–‘‡˜ƒŽ—ƒ–‡‡†‹ ƒŽ•‡•‘”•Ǥ

Surgical robot is one of the important service robots, but it ‹‰—”‡ ͳ •Š‘™• –Š‡ •’‡ ‹ˆ‹  ’”‹ ‹’Ž‡ ‘’‡”ƒ–‹‘
faces the bottleneck problem that the tactile feedback ability
can not meet the needs of palpation judgment in clinical †‹ƒ‰”ƒ ƒ• ˆ‘ŽŽ‘™•Ǥ Š‡ ‹–‡‰”ƒ–‡† ‡†‹ ƒŽ —Ž–‹’Ž‡
practice. Therefore, it is urgent to find a better pressure sensor ’Š›•‹ ƒŽ “—ƒ–‹–› ƒ””ƒ› •‡•‘”• ƒ”‡ ‘—–‡† ‘ –Š‡
to improve the haptic feedback ability. Because the suspended ˆ‹‰‡”‘ˆ–Š‡‘˜‹‰ƒ”–Šƒ–Šƒ•ƒ—‹ˆ‘”•’‡‡†Ǥ†
silicon-based piezoresistive pressure sensing array has the –Š‡‘˜‡‡–‘ˆ–Š‡‡†‡ˆˆ‡ –‘”‘ˆ–Š‡ƒ”‹•’”‡ ‹•‡Ž›
advantage of high sensitivity to pressure, we intend to use it as ‘–”‘ŽŽ‡†ǡ ƒ† –Š‡ ƒ”–‡”‹ƒŽ ’”‡••—”‡ ‹• ”‡ƒŽ‹œ‡† „› –Š‡
haptic feedback system. We intend to use the sensing array ’‹‡œ‘”‡•‹•–‹˜‡ ‹†— –‹‘ ‘ˆ –Š‡ •—•’‡†‡† •‹Ž‹ ‘ǡ
attached to the finger of a surgical robot to perform tactile ƒ Š‹‡˜‹‰ –Š‡ †‡–‡ –‹‘ ‘ˆ „Ž‘‘† ˜‡••‡Ž•Ȁ–—‘”•Ǥ Š‡
detection of the patient's tumor and arterial blood vessel •ƒŽŽ ‰‘ƒŽ ‘ˆ –Š‹• ’ƒ’‡” ‹• –‘ ‡˜ƒŽ—ƒ–‡ –Š‡ ‹–‡‰”ƒ–‡†
diagnostic test. ˆŽ‡š‹„Ž‡—Ž–‹Ǧ’Š›•‹ ƒŽ•‡•‹‰ƒ””ƒ›†‡˜‡Ž‘’‡†ǡƒ†–Š‡
The paper focuses on the mechanical systems used to Žƒ”‰‡‰‘ƒŽ‹•–‘ƒ’’Ž›‹––‘”‘„‘–•›•–‡•–Šƒ–”‡“—‹”‡ˆ‹‡
evaluate medical MEMS sensors and some properties of the –ƒ –‹Ž‡’‡” ‡’–‹‘Ǥ
suspended silicon piezoresistive pressure sensor used to detect. 
In the second part, we describe the concept map of the medical

978-1-7281-3726-1/19/$31.00 © 2018 IEEE 305

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B. Complete Mechanical System

‘” –Š‡ ”‡“—‹”‡‡–• ‘ˆ ‘—” ’”‘Œ‡ –ǡ –Š‡ • Š‡ƒ–‹ 
†‹ƒ‰”ƒ ‘ˆ –Š‹• ”‘„‘– ‘’‡”ƒ–‹‰ •›•–‡ ‹• •Š‘™ ‹
‹‰—”‡ ʹǤ Š‡ •—„Œ‡ – ‘ˆ –Š‡ ‡ Šƒ‹ ƒŽ •›•–‡ ƒ‹Ž›
‹ Ž—†‡• –Š‡ ”‘„‘– ƒ” ƒ† –Š‡ ‘–”‘Ž •›•–‡Ǥ 
‘’Ž‡–‡ ‡ Šƒ‹ ƒŽ ƒ” ‹ Ž—†‡• ƒ •–ƒ–‡ ƒ†Œ—•–‡–
†‡˜‹ ‡ƒ†ƒ‡†‡ˆˆ‡ –‘”ǤŠ‡‡›’‘‹–‹•–Šƒ––Š‡‡†
‡ˆˆ‡ –‘”ˆ‹–•’‡”ˆ‡ –Ž›™‹–Š–Š‡‡†‹ ƒŽ—Ž–‹’Ž‡’Š›•‹ ƒŽ
“—ƒ–‹–› ƒ””ƒ› •‡•‘”• –‘ ’”‘˜‹†‡ ƒ ˆ‹š‡† •—’’‘”–ǡ ƒ†
–Š‡ ‹–‡” ‘‡ –• ™‹–Š –Š‡ ’”‘ ‡••‹‰ ‹” —‹– –Š”‘—‰Š
–Š‡Ž‡ƒ†™‹”‡–‘†‡–‡ ––Š‡–ƒ”‰‡–‘„Œ‡ –ƒ†‘„–ƒ‹ –Š‡
†‹ˆˆ‡”‡–•ƒ’Ž‡†•‹‰ƒŽǤ‘•‹†‡”‹‰–Šƒ––Š‡†‡–‡ –‹‘
ˆ— –‹‘‹•–‘„‡’‡”ˆ‘”‡†‘–Š‡–ƒ”‰‡–ǡ–Š‡”‘„‘–ƒ”
‡‡†•–‘‘˜‡“—‹ Ž›™Š‡‹–‹•ˆƒ”ƒ™ƒ›ˆ”‘–Š‡–ƒ”‰‡–ǡ
ƒ†‹–‡‡†•–‘‘˜‡•Ž‘™Ž›ƒ†‡˜‡Ž›ƒ†ˆŽ‡š‹„Ž›™Š‡
ƒ’’”‘ƒ Š‹‰ –Š‡ –ƒ”‰‡– ‘„Œ‡ –Ǥ Š‡ ‘–”‘Ž •›•–‡ ‹•
ƒ‹Ž› †‹˜‹†‡† ‹–‘ Šƒ”†™ƒ”‡ ‘–”‘Ž ƒ† •‘ˆ–™ƒ”‡
‘–”‘ŽǤ Š‡ Šƒ”†™ƒ”‡ ƒ‹Ž› ‹ Ž—†‡• –Š‡ ‹–‡‰”ƒ–‡†
‘–”‘Ž ‘ˆ –Š‡ Šƒ”†™ƒ”‡ •›•–‡ ƒ† ‹–• †”‹˜‹‰ ‹” —‹–Ǥ
Š‡ •‘ˆ–™ƒ”‡ ‘–”‘Ž ƒ‹Ž› ‘–”‘Ž• –Š‡ ‘–‹‘
†‡–‡ –‹‘‘ˆ–Š‡”‘„‘–ƒ”–Š”‘—‰Š–Š‡Š—ƒǦ ‘’—–‡”
‹–‡”ƒ –‹‘ ‹–‡”ˆƒ ‡Ǥ Š‡ ‘’–‹‹œƒ–‹‘ ƒŽ‰‘”‹–Š ƒ
ƒŽ•‘‘’–‹‹œ‡–Š‡‘–‹‘–”ƒŒ‡ –‘”›‘ˆ–Š‡‡†‡ˆˆ‡ –‘”•‘
–Šƒ––Š‡‡†‡ˆˆ‡ –‘” ƒ†‡–‡ –ƒŽŽ–Š‡”ƒ‰‡•ǡ™Š‹ Š ƒ
”‡ƒ Š–Š‡’—”’‘•‡‘ˆƒ„‡––‡”†ƒ–ƒ ‘ŽŽ‡ –‹‘Ǥ
 ƒ†Œ—•–‡–‘ˆ–Š‡ƒ”™‹–Š–Š‡‡†’‘•‹–‹‘ƒ•–Š‡‘—–’—–Ǣ
 Œ‘‹– ‘–”‘Žǡ ‘–”‘Ž–Š‡’‘•‹–‹‘‘ˆ–Š‡‡†‘ˆ–Š‡ƒ”„›


Fig. 2 The entire control system of the information acquisition system
including a robot arm and a control system.

C. Robot Arm Construction

Š‡ •—”‰‹ ƒŽ ”‘„‘– •–”— –—”‡ •Š‘—Ž† Šƒ˜‡ ƒ– Ž‡ƒ•– •‹š
†‡‰”‡‡•‘ˆˆ”‡‡†‘–‘‡‡––Š‡ˆ— –‹‘ƒŽ”‡“—‹”‡‡–•
–‘ ƒ Š‹‡˜‡ ˆƒ•–‡” ‘–‹‘ •’‡‡† ƒ† Š‹‰ŠǦ’”‡ ‹•‹‘
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‘–”‘Ž ’‡”ˆ‘”ƒ ‡ ȏͳͲȐǤ † –Š‡ ˆ‹”•– ˆ‘—” †‡‰”‡‡• ‘ˆ
ˆ”‡‡†‘ƒ”‡—•‡†–‘ ‘–”‘Ž–Š‡”‘„‘–̵•‘–‹‘’‘•‹–‹‘ǡ
ƒ Š‹‡˜‹‰ˆƒ•–ƒ†ˆŽ‡š‹„Ž‡‘˜‡‡–Ǥ†–Š‡Žƒ––‡”–™‘
†‡‰”‡‡• ‘ˆ ˆ”‡‡†‘ ƒ”‡ —•‡† –‘ ‘–”‘Ž –Š‡ ‘–‹‘
ƒ––‹–—†‡‘ˆ–Š‡”‘„‘–̵•‡†‡ˆˆ‡ –‘”–‘ƒ Š‹‡˜‡ƒ—‹ˆ‘”
ƒ†•Ž‘™‘–‹‘†‡–‡ –‹‘Ǥ‘ƒ˜‘‹†ƒŽƒ”‰‡‹’ƒ –‘–Š‡
’‘•‹–‹‘„› Šƒ‰‹‰–Š‡ƒ––‹–—†‡ǡ•‹š†‡‰”‡‡•‘ˆˆ”‡‡†‘
ƒ”‡ †‡•‹‰‡† ‹ •‡”‹‡• ƒ• •Š‘™ ‹ ‹‰—”‡ ͵Ǥ Š‡”‡ˆ‘”‡ǡ
–Š‡ ƒ‹ ‘’‡”ƒ–‹‰ ƒ” ‘ˆ –Š‡ •—”‰‹ ƒŽ ”‘„‘– ‹• ˆ‘—”
†‡‰”‡‡• ‘ˆ ˆ”‡‡†‘ǡ ƒ† –Š‡ ˆ‹”•– †‡‰”‡‡ ‘ˆ ˆ”‡‡†‘ ‹•
”‘–ƒ–‡† Š‘”‹œ‘–ƒŽŽ› –Šƒ– ‹• –Š‡ •Š‘—Ž†‡” ƒ† –Š‡ –”—
ƒ”‡ ‘‡ –‡†Ǣ–Š‡•‡ ‘†Œ‘‹–‹•”‘–ƒ–‡†‹–Š‡˜‡”–‹ ƒŽ
†‹”‡ –‹‘–Šƒ– ‹•–Š‡•Š‘—Ž†‡”Œ‘‹–‹•˜‡”–‹ ƒŽŽ›”‘–ƒ–‡†Ǣ
–Š‡–Š‹”††‡‰”‡‡‘ˆˆ”‡‡†‘‹•–Š‡Š‘”‹œ‘–ƒŽ”‘–ƒ–‹‘‘ˆ
–Š‡„‘‘ǡƒ†–Š‡ˆ‘—”–Š†‡‰”‡‡‘ˆˆ”‡‡†‘‹•–Š‡˜‡”–‹ ƒŽ
”‘–ƒ–‹‘ ‘ˆ –Š‡ ‡Ž„‘™ Œ‘‹–Ǥ Š‡ ™Š‘Ž‡ ‘‡ –‹‘• ƒ”‡
†‡•‹‰‡† ƒ• –Š‡ •–”— –—”‡ ‘ˆ –Š‡ ”‘–ƒ–‹‰ ’ƒ‹”ǡ ‡•—”‹‰
–Š‡ “—‹  ƒ† ˆŽ‡š‹„Ž‡ ‘˜‡‡– ƒ† Žƒ”‰‡ ”ƒ‰‡ ‘ˆ
‘–‹‘Ǥ Š‡ ™”‹•– ’‘”–‹‘ ‹• –™‘ †‡‰”‡‡• ‘ˆ ˆ”‡‡†‘ǡ
‹ Ž—†‹‰ Š‘”‹œ‘–ƒŽ ”‘–ƒ–‹‘ ƒ† ˜‡”–‹ ƒŽ ”‘–ƒ–‹‘ǡ ƒ†
–Š‡‹”‘˜‡‡–†‹”‡ –‹‘ƒš‡•ƒ”‡’‡”’‡†‹ —Žƒ”–‘‡ƒ Š
‘–Š‡”ƒ†‹–‡”•‡ –ƒ–ƒ’‘‹–ǤŠ‡’‘•‹–‹‘ ‘–”‘Ž‘ˆ–Š‡
•‹šǦ†‡‰”‡‡Ǧ‘ˆǦˆ”‡‡†‘ƒ‹’—Žƒ–‘”‹•–‘„”‹‰‹–•‡†–‘
–Š‡•’‡ ‹ˆ‹‡†’‘•‹–‹‘‘”–‘–”ƒ –Š‡•’‡ ‹ˆ‹‡†–”ƒŒ‡ –‘”›Ǥ
Š‡”‡ ƒ”‡ —•—ƒŽŽ› –™‘ ‡–Š‘†• ˆ‘” ƒ Š‹‡˜‹‰ –Š‹• ‰‘ƒŽǣ
‡† ‘–”‘Žǡ ™Š‹ Š ’‡”ˆ‘”• ‘—–’—– –”ƒ ‹‰ ƒ†
‘–”‘ŽŽ‹‰–Š‡Œ‘‹–ƒ‰Ž‡ȏͳͳȐǤŠ‡ƒ‹‘’‡”ƒ–‹‰Šƒ†
‘ˆ –Š‡ •—”‰‹ ƒŽ ”‘„‘– ™‹–Š –Š‹• •–”— –—”‡ ƒ ƒ˜‘‹† –Š‡
‹ƒ —”ƒ–‡’‘•‹–‹‘‹‰‘ˆ–Š‡”‘„‘–†—”‹‰–Š‡‘’‡”ƒ–‹‘ǡ
•‘ –Šƒ– –Š‡ ‡† ‡ˆˆ‡ –‘” ‘ˆ –Š‡ ”‘„‘– ƒ ‡‡– –Š‡
”‡“—‹”‡‡–• ‘ˆ ˆŽ‡š‹„Ž‡ ‘˜‡‡–ǡ ˆ—”–Š‡” –‘ ƒ Š‹‡˜‡
–Š‡’—”’‘•‡‘ˆ†‡–‡ –‹‘Ǥ
Fig. 3 A mechanical arm sketch that has six degrees of freedom.


 velocity variables as shown in Figure 5. Adams can use its
proprietary function to call the value of the torque variable
III. SIMULATION output by the control system in real time and use it as the
torque command at that moment to drive the joint motion of
The robot arm is a complex electromechanical system. If the arm. The joint variables of the arm can be fed back the
the traditional design mode is adopted and the test is repeated control system in real time, and then a complete closed-loop
after the prototype is processed, it is not only difficult to control system is formed to achieve precise control of the
effectively improve the performance of the manipulator, but joint position.
also consumes a lot of materials and time. In order to improve
the design efficiency of the robot arm, the virtual simulation
system was fully utilized, and the virtual simulation system of
the robot arm was built. The system was simulated with a 6-
DOF manipulator using Adams software, with drivers added
to the end and constraints added. Kinematics and dynamics
simulations can be performed by defining a rotating joint at
each joint of the robot arm. When a drive is applied to the
defined joints, we obtain the motion of the arm end actuators
as shown in Figure 4 by performing simulation calculations
and using Adams' post-processing module.

Fig.5 Mechanical subsystem in union simulation system.

In order to verify the performance of the robotic joint

Fig. 4 The speed of the end when a drive was applied to it.
simulation system, the simulation result curve is shown in
Fig. 6. It can be seen that when a command of a sinusoidal
signal is given, the end effector can accurately track a given
sinusoidal command with only a small time delay. This
shows that the end joint can track a given trajectory curve
well and has better trajectory tracking characteristics. This
also shows that the robot arm we designed is moving as
required and is expected to be used for palpation detection.

Adams can easily realize the kinematics and dynamics

simulation of multi-rigid systems. MATLAB has powerful
calculation functions and can easily construct control
systems. Using these two softwares to establish a joint
simulation system of the manipulator, the kinematics and
dynamics of the manipulator can be simulated and analyzed,
and the control system of the manipulator can be built.
Through interactive union simulation, the performance of
the mechanical arm can be effectively improved, providing
a technical basis for the development of the actual physical
prototype. Importing the mechanical system from Adams
into MATLAB requires the Adams/control module in Adams,
which can be used to transfer data between Adams and
MATLAB. In order to achieve the parameter transfer
between the mechanical system and the control system, the
18 variables required for the union simulation system need
to be established in Adams, including 6 control torque
variables, 6 joint position variables and 6 joint angular Fig.6 Union simulation system tracking characteristics.

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IV. DESIGN AND SIMULATION OF SI SENSING
ARRAY
At the same time, we simulated the silicon piezoresistive
pressure sensor and explored its feasibility as a medical
detection application. The silicon piezoresistive sensor we
designed is shown in Figure 7, which mainly consists of a
support frame, a cantilever beam, and suspended silicon.
Firstly, the surface volume strain of the array sensor was
simulated. The results are shown in Figure8᧨which is found
that it has a good pressure volume strain.
Fig.7 The structure of the pressure sensing array.
Fig. 8 Surface strain simulation results of the sensing array.
The midpoint stress at the junction of the cantilever beam
and the support frame is then simulated. The surface stress
of a single sensor is shown in Figure 9(a). Figure 9(b) is a
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simulation result of the midpoint stress at the junction of the
cantilever beam and the support frame with various
conditions, which shows that it is less affected by the width
of the support frame and is greatly affected by the cantilever
beam.
(a)
(b)
Fig.9. (a) The surface stress of a sensor unit. (b) The stress at the midpoint
of the joint between the cantilever beam and the support frame varies with
the support frame width, the length of the cantilever beam, and the length
of the side of the suspended silicon block.
Then by means of changing the relative position of the two
piezoresistors, their position gradually approaches as shown
in Figure 10. As the distance approaches, the Table 1 shows
that the sensitivity increases from 5.50 to 7.98, and the
nonlinear error decreases from -0.83% to -0.52. We can
increase the voltage output sensitivity of the sensor by
approaching the position of the two piezoresistors. Figure 11
shows the sensitivity and nonlinearity error as a function of
film thickness, indicating that sensor sensitivity decreases as
the film thickness increases, and the maximum nonlinearity
increases as the film thickness increases. Finally, the output
voltage was simulated as shown in Figure 12, indicating that
there is a good voltage output curve. That also shows sensing
array is expected to be used in tactile feedback systems on
robotic assisted surgery.

Fig.12 Voltage output curve changes with loading pressure

Fig.10 Piezoresistive position diagram.

V. CONCLUSION

TABLE I. THE EFFECT OF PIEZORESISTIVE POSITION ON OUTPUT

CHARACTERISTICS
In this paper, an experimental robot arm for evaluating
performance of multi-MEMS sensing array has been
designed and discussed. The medical MEMS sensors are
Piezoresistive Sensitivity Maximum mounted on the robot arm to simulate the application of
position ͣmV/MPaͤ nonlinearity sensors in surgical robots. Therefore, we proposed a 6-DOF
robotic arm that is simulated on Adams software, and its end
effector had a good motion performance when a drive was
1 5.50 -0.83% applied to it. Then, the mechanical system in Adams is
imported into MATLAB, and Adams and MATLAB are used
for union simulation. When a sinusoidal drive signal is
2 6.90 -0.7% applied to it, there is a good trajectory tracking capability at
the end of the hand. Finally, we also simulated a silicon-
based piezoresistive pressure sensing array with a good
3 7.98 -0.52% voltage output characteristic with applied pressure. At the
same time, we found that the voltage output sensitivity will
increase as the position of the two piezoresistors approaches.
We intend to mount the medical sensor on the robot arm to
detect the edge of arterial blood clots and tumor palpation in
the human body. In the future, we will speed up the
production of the robotic prototype and further optimize its
motion performance that can be used to evaluate medical
MEMS sensing array.

ACKOWLEDGMENTS

This work was funded from National Natural Science

Foundation of China with No. U1613215, and TSV 3D
Integrate Micro/Nanosystem Lab (ZDSYS2018020 618051
05).
Fig.11 The sensor sensitivity and nonlinearity as a function of film thickness.

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