Home Search Collections Journals About Contact us My IOPscience

Development and testing of a synchronous micropump based on electroplated coils and

microfabricated polymer magnets

This article has been downloaded from IOPscience. Please scroll down to see the full text article.

2012 J. Micromech. Microeng. 22 065027

(http://iopscience.iop.org/0960-1317/22/6/065027)

View the table of contents for this issue, or go to the journal homepage for more

Download details:
IP Address: 134.169.64.50
The article was downloaded on 04/06/2012 at 13:48

Please note that terms and conditions apply.

IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING
J. Micromech. Microeng. 22 (2012) 065027 (8pp) doi:10.1088/0960-1317/22/6/065027

Development and testing of a synchronous

micropump based on electroplated coils
and microfabricated polymer magnets
A T Al Halhouli 1 , M I Kilani 2 , A Waldschik 1 , A Phataralaoha 1
and S Büttgenbach 1
1
Institute for Microtechnology, Technische Universität Braunschweig, Langer Kamp 8,
38106 Braunschweig, Germany
2
Mechatronics Engineering Department, University of Jordan, Amman 11942 Jordan
E-mail: a.al-halhouli@tu-bs.de

Received 11 January 2012, in final form 19 March 2012

Published 25 May 2012
Online at stacks.iop.org/JMM/22/065027

Abstract
In this paper, the concept, fabrication, activation and testing of a novel synchronous micropump
based on microfabricated copper coils and polymer magnets are presented. The pump works
by the synchronized rotation of two polymer magnets in an annular SU-8 microfluidic channel.
Magnet rotation is achieved by sequentially activating a set of planar coils to repel or attract
the first magnet (traveling magnet) through the channel, while the second one is anchored
between the inlet and the outlet ports. At the end of each pumping cycle, the magnets exchange
their anchored and traveling functions. The synchronization of magnet rotation has been
achieved through programming two activation schemes that proved the high dependence of the
pump operation and performance on employed activation scheme parameters. The magnetic
forces exerted from electroplated coils on the polymer magnet were tested experimentally
using a three-dimensional force sensor. Different coil dimensions have been investigated. A
maximum force of 658 μN at an applied current of 138 mA was achieved. The micropump has
successfully pumped water with rotational speeds up to 83.33 rpm. Water flow rates in the
range of 17.3 μL min−1 at 31.25 rpm to 158.7 μL min−1 at 83.33 rpm were achieved.
(Some figures may appear in colour only in the online journal)

1. Introduction an open channel and is therefore less efficient. In addition,

Miniaturized pumps are key components in microfluidic
systems and play an important role in biological fluid handling
applications [1]. Biomedical pumping applications are often
concerned with particle-laden fluids and, since the particles
may be sensitive to abnormal stress, gentle pumping methods
have to be applied. On the other hand, solid particles may
inhibit the function of the valves of membrane micropumps
by either clogging the valves opening or damaging the seals
[2]. Therefore, a number of research efforts have been made
addressing valveless designs, for example, micropumps using
diffuser/nozzle elements, spiral-channel viscous pumps [3]
and peristaltic micropumps [4]. However, such pumps have not
generally met the demands imposed by biomedical systems
(see, e.g., [5, 6]). The diffuser/nozzle pump is essentially
a number of critical parameters such as pressure difference
and switching speed have to be kept under tight control in
order to prevent reverse flow. Viscous micropumps depend on
generating shear stress to produce the pumping action, and this
stress may cause damage to sensitive particles in the pumped
fluid.
An interesting approach to achieve valveless pumping has
been presented by Hatch et al [7], who used ferromagnetic
plugs driven in an annular channel by an external magnet. A
similar ferrofluid-driven micropump using a series of actuating
solenoids has been reported by Nguyen and Chai [8]. The
ferrofluidic pump is advantageous over membrane pumps
because the pumping action results from piston motion in
the wafer plane, and not perpendicular to the wafer plane.
This allows a much higher stroke volume and compression

0960-1317/12/065027+08$33.00 1 © 2012 IOP Publishing Ltd Printed in the UK & the USA
J. Micromech. Microeng. 22 (2012) 065027
Outlet Inlet
Coil
N activation time step and the switching scheme between the
Anchored magnet
N by managing the magnetic field in planar microcoils in order
Travelling magnet
Figure 1. Synchronous electromagnetic micropump concept.
ratio without compromising power and voltage requirement
of the drive. Pump dosing correlates highly with the velocity
of the translating plug and flow saturation phenomena are
not observed. The pump is also self-priming and bubble
tolerant, which gives it the potential of successful application
in highly demanding biological and biomedical microsystems.
However, degradation of the ferrofluid in the annular channel
is a disadvantage of such pumps. The concept of the
ferrofluidic pump has been modified resulting in a miniaturized
electromagnetic pump based on commercial magnets instead
of ferrofluid [9].
Recently, much progress has been achieved concerning
the fabrication of magnetic microactuators. Applying deep
UV lithography based on new types of photoresists [10],
microelectroplating techniques and micromachined polymer
magnets, linear and rotational micromotors have been
developed [11].
This work introduces the synchronous electromagnetic
pump concept, operation and testing and reports on the
microfabrication of its components. It presents developed
(a)
Figure 2. Pumping cycle and switching sequence for the synchronous micropump [12].
A T Al Halhouli et al
activation schemes for driving two magnets in a fluidic channel
using 8 and 12 electroplated coils. The activation schemes
demonstrate the high dependence of the pump operation and
performance on the activation scheme parameters: number
of active coils, coil activation mode (attractive or repulsive),
anchored and traveling magnets.
2. Conceptual design of the pump
The electromagnetic micropump (EMMP) consists of two
permanent magnets set in a fluidic channel that includes the
inlet and outlet ports, a glass cover and planar microcoils
electroplated below the channel (figure 1).
The main pumping concept of the EMMP depends on
controlling the movement of two magnets in the fluidic channel
to achieve pumping action. The magnets are inserted into the
channels so that they are located with same polarity direction
(figure 1) to avoid any magnets sticking during the switching
off condition. The coils located between the inlet and outlet
ports hold one of the magnets and are called anchoring coils.
The rest of the coils employ a moving magnetic field on the
traveling magnet to create actuation of the fluid. The anchored
magnet directs the flow out of the channel (acts as a valve)
and separates the inlet flow from the pumped one, while the
traveling magnet rotates clockwise along the channel through
successive activation of the coils that attract/repel it due to
their magnetic force in steps.
Figure 2 depicts in detail the pumping cycle, and the
switching sequence employed in driving the traveling and
anchored magnets. As shown in figure 2(a), one of the magnets
is held stationary (anchored) between the inlet and outlet
ports by activating the coil in that location with an attractive
field, and the second magnet (traveling) rotates clockwise by
successive activation of the coils below the channel with an
attractive field to that magnet (figures 2(a) and (b)). Due to the
magnet movement, the fluid is pumped out of the outlet port
and withdrawn into the channel from the inlet.
As the traveling magnet approaches the channel exit
from the left, a successive attractive field to the anchored
magnet starting from the coil near to it is applied to move it
(b) (c)
2
J. Micromech. Microeng. 22 (2012) 065027
Adapter with spring contact probes
N for plastic molds or electroplated metal micromolds [13–15].
N for silicon, Pyrex and SU-8. The relatively low values of
Inlet Outlet
Figure 3. A microfabricated EMMP with SU-8 channel, and double
layer electroplated copper coils.
clockwise from the anchoring position and past the channel
inlet (figure 2(c)). At the same time the moving magnet
is attracted toward the anchoring position (figure 2(a)). The
successive activation for the new traveling magnet and the
exchange of roles will be continually repeated and a pumping
action obtained.
3. Fabrication and optimization
The final EMMP comprised a pump chamber chip, a
glass cover and two polymer magnets (see figure 3). The
fabrication processes and dimensions of pump components
are summarized in the following sections.
The polymer magnet molds and the fluidic channels were
patterned using EPON SU-8 (from Shell Chemical). SU-8 is
a thick, epoxy-photo-plastic, high-aspect ratio UV-sensitive
negative resist. It can be spin coated in a conventional spinner
in thicknesses ranging from 1 to 300 μm. Up to 2 mm
thickness can be obtained with multilayer coatings. Due to
its chemical stability and favorable mechanical and optical
properties, it has been used successfully in MEMS fabrication
(i)
(ii)
(iii)
(iv)
(a)
Figure 4. (a) Pump chamber fabrication process plan, and (b) resulting chamber.
3
A T Al Halhouli et al
Table 1. Mechanical properties for common MEMS materials [11].
Material Hardness Young’s modulus
Si 11.8 ± 0.5 GPa 155 ± 5 GPa
Pyrex 7.3 ± 0.3 GPa 65.8 ± 3.9 GPa
SU-8 0.55 GPa 5.2 ± 0.2 GPa
SU-8 MEMS structures have also been used for microfluidic
channels and biological applications [16].
Table 1 lists the values for hardness and Young’s modulus
Young’s modulus allows for better sealing with SU-8 than can
be achieved with silicon or Pyrex. Also, a lower hardness could
be advantageous when dealing with stress-sensitive fluids.
3.1. Chamber chip
The pump chamber chip consists of an SU-8 fluidic channel,
and double layer electroplated copper coils. The fluidic
channel includes inlet and outlet channels of 813 μm height
and inner and outer diameters of 5550 μm, and 8550 μm,
respectively. The copper coils have two layers that contain
35 turns/layer (figure 3).
The pump chamber fabrication process begins with the
lower conductors of the double-layer coil (see figure 4, left).
After depositing a seed layer of 10 nm Cr and 275 nm Cu
onto the ceramic substrate in an LS440 sputtering machine
(Von Ardenne Anlagentechnik GmbH), a mold of AZ9260 is
patterned and filled with a 13–15 μm thick copper layer by
electroplating. (i) After stripping the AZ9260 mold, an SU-8
layer is spun onto these structures as insulation. This layer
provides openings for through connections to the upper coil
layer. (ii) Both connections and upper conductors are likewise
structured by AZ9260 molding and copper electroplating.
After that, a second SU-8 layer serves both as insulation
between upper conductors and rotating magnets and as a
bearing layer for the rotor. (iii) Finally, the circular pump
channels are patterned with thick SU-8 layer. (iv) An example
of a fabricated chamber is shown in figure 4 (right).
(b)
J. Micromech. Microeng. 22 (2012) 065027 A T Al Halhouli et al

(i)

(ii)

(iii)

(iv)

(v)
(a) (b)

Figure 5. (a) Polymer magnet fabrication process plan, and (b) resulting magnets.

3.2. Polymer magnets MQP, 90%wt, h=389µm

600
The permanent magnets are realized by embedding a viscous Magnetiation J [T] 450
polymer magnet in a microfabricated SU-8 mold. The 300
viscous polymer magnet consists of a hard magnetic powder
150
(MQP-S-11-9-20001-070, www.magnequench.com) which is
0
embedded in an epoxy polymer matrix according to different -2000 -1500 -1000 -500 0 500 1000 1500 2000
-150
weight ratios. This magnetic powder has a residual induction of
744 mT, 716 kA m−1 intrinsic coercivity and 84 kJ m−3 energy -300

product.
The mold is fabricated (figure 5(a)) by first electroplating
a 2 μm sacrificial copper layer onto a ceramic substrate
(figure 5(a)) (i). A 50 μm SU-8 layer which serves as a base
plate is then patterned (ii). After that, a thick SU-8 layer is spun
on and structured to provide a filling form for the polymer
magnet (iii). The viscous polymer magnet is then inserted
into the mold and baked out (iv). After baking, a polishing
process follows to level the compound structure and to remove
waste residue. By etching the sacrificial layer the magnets are
detached from the substrate (v). Samples of fabricated polymer
magnets with different shapes are shown in figure 5(b).
Applying this method allows the fabrication of magnets
with arbitrary shape and properties, ensuring complete
compatibility with existing process chains. Fabricated
polymer magnets are then axially magnetized using special
magnetization equipment [19].
3.3. Polymer magnets and coil characterization
In order to examine the magnetic flux density of
microfabricated polymer magnets, their magnetization curve
has been experimentally plotted using a vibrating sample
magnetometer (LakeShore Inc.). A total of 90% wt powder
ratio at a structure height of 389 μm has been used.
The hysteresis curve (figure 6) shows that the
microfabricated magnets retain stronger residual magnetic
flux density of 342 mT than previously published data [11].
Strong residual magnetic flux density is essential to obtain
enough repel/attracting magnetic force required for successful
pumping action.
-450
-600
Field strength [kA/m]
Figure 6. Magnetization curve of a microfabricated polymer
magnet.
The functional capability of the magnets is another
dominant parameter. The tests have been conducted after
mounting several polymer magnets with different tolerances
and lengths into the pump channels and running them with
or without glass cover. Such tests have the main objective of
stable magnet rotation in the channel (low friction) for a wide
range of rotational speeds.
Tests were extensively performed in a channel of 1500 μm
width and 813 μm height. Tolerances between magnet and
channel walls were between 50 μm and 150 μm and
magnet lengths were considered as a function of coil length:
1 × length, 1.25 × length, 1.5 × length and 2 × length.
Results showed that an optimal tolerance is in the range of 50–
60 μm and that the 1.5 × length magnet provides the most
stable and smooth travel.
Lastly, the magnetic force generated from a electroplated
copper coil on a polymer magnet has been measured. Since the
coil fabrication area available on the chip is limited, different
geometrical design parameters (wire width, gap between
simultaneous turns (g) and different number of turns (n) see
table 2) that maximize the theoretical magnetic field intensity
within the required area were fabricated. Such parameters
were selected according to a previously published study that
estimates for the magnetic field intensity in such slightly
curved microcoils [17].

4
J. Micromech. Microeng. 22 (2012) 065027
Polymer magnet
Sensor ball tip
Fluidic channel
Figure 7. Magnetic force measurement setup (3D force sensor).
Figure 8. Measured coil magnetic force against coil current.
Table 2. Copper coils geometrical dimensions and number of turns.
Model Wire width (μm) g (μm) n
w 10 10 15 40
w 15 15 15 34
The forces generated from these coils on a microfabricated
polymer magnet were tested using a three-axis force sensor
[18] developed at IMT (figure 7). The attracting magnetic
force on the magnet was varied by changing the employed
current between 50 μm and 150 μm.
Results showed that the force is increasing nearly linearly
with applied current (figure 8). A maximum force of 658 μN
was achieved at 138 mA for the w 10 model. This can be related
mainly to the higher number of turns for w 10. Accordingly,
the w 10 coils are selected for the final pump design.
4. Activation scheme
In order to obtain a successful pumping action, the
management of magnet movement in the microfluidic channel
is a critical issue. Therefore, a flexible energization scheme that
controls the traveling magnet movement through the fluidic
channel, holds the anchored magnet between the inlet and
the outlet ports, switches the magnets function each pumping
cycle, and allows inverting current direction (attraction/repel)
5
A T Al Halhouli et al
was developed. Accordingly, a digital electronic circuit that
inverts the current direction and amplifies its strength was
designed, fabricated and connected to an Atmel ATmega8515
AVR microcontroller.
The activation program is written in C. It considers
the following parameters: activation time step, number of
activated coils, switching scheme between the anchored and
traveling magnets and the activation mode (according to
current direction: repulsive or attractive). This program allows
flexible changes of the active magnet rotational speed and
magnetic force direction.
Several activation schemes were tested using chips with 8
and 12 planar electroplated coils (figure 9). The best scheme
for exciting the 8-coil chip (figure 9, left) was found to be the
generation of an attractive magnetic force in the holding coils
(S0 and S1) and on one of the activation coils (e.g. S4) while
the rest of the coils repel. This prevents magnets from slipping,
adds force to the anchored magnet and defines the magnets’
position. In addition, two separation coils are needed between
the anchored and traveling magnets in order to achieve smooth
functioning exchange between pumping and valving without
slipping.
As for the 12-coil chip, best results were achieved when
the anchored magnet is attracted by applying the attractive
force on the holding coils C0 and C1 and is repelled from
coils C2 and C11. This combination of forces employs
enough holding force against the pumped fluid and squeezes it
between the inlet and outlet ports. The coils (C2–C11) create
a simultaneous moving magnetic field on the traveling magnet
to create pumping action on the fluid. An important step in the
activation scheme was the switching between anchored and
traveling magnet function. It has been found experimentally
that at least two separating coils before switching are required.
This minimum of two separating coils was important to
avoid uncontrolled movement (slipping) of the anchored or
traveling magnets due to the repelling forces between the
magnets themselves. Successful results were obtained when
the switching was employed at coil C9.
5. Experimental tests and flow performance
Before starting the tests, all pump components were adjusted
together, fixed with a special adhesive and fluidic tubes were
connected to the pump. The pump was then connected with the
electronic circuit and microcontroller through spring contact
probes.
5.1. Activation scheme tests
The activation scheme tests began first by controlling the
movement of a single magnet using the 8-coil chip in a fluidic
channel filled with water. Results showed that simultaneous
activation of two coils in steps, one attracting the magnet from
the front and the other repelling it from the back, results in a
rotating action. During tests the current values were changed
between 50 mA and 200 mA and the coil activation time step
(rotational speed) was changed between 10 ms and 200 ms. At
200 mA a maximum rotational speed of about 600 rpm was
J. Micromech. Microeng. 22 (2012) 065027 A T Al Halhouli et al

Figure 9. Coil labels used in the activation scheme. (Left) 8-coil chip and labels and (right) 12-coil chip and labels.

obtained. Increasing the current further can possibly damage

the pump due to the generated heat.
The same chip was used for controlling the movement
of two magnets for micropumping tests. Successful pumping
cycles have been achieved. However, no flows were observed.
This may be related to the internal leak between magnets
and chamber walls and to the low real pumping volume.
As shown in figure 9 (left), the magnets occupied 3/8 of
the chamber volume. In addition, during switching between
magnet functions, the two magnets are traveling together and
no fluid is displaced.
The movement of the two magnets has also been tested
successfully in a 12-coil chip where magnets occupying 3/12
of the pumping volume have been integrated and controlled
(figure 9, right). Flow rates have been successfully reported.

5.2. Flow rate and volumetric efficiency Figure 10. Flow rate at various rotational speeds in the EMMP.
The flow performance in the pump is influenced by its
geometrical parameters: channel height, width and radii and its
activation parameters: activation time step and driving voltage.
The activation time step determines the pump rotational speed
and the magnetic flux overcomes the friction and inertia
forces to move the traveling magnet along the channel.
The pump rotational speed is proportional to the driving
voltage (magnetic flux), which should be adjusted to employ
simultaneous attraction/repulsion force on the magnet.
The pump was run for rotational speeds up to 83.33 rpm.
Successful flow rates in the range of 17.3 μL min−1 at 31 rpm
to 158.7 μL min−1 at 83.33 rpm were achieved (figure 10).
The flow rate shows a linear relationship with the
rotational speed above 30 rpm. Below this value, no flow
was observed. This is due to the internal leak of the working
fluid through the gap between the traveling parts and the chip Figure 11. Schematic of the pumping cycle phases.
channel’s surface. This leak shows nonlinear behavior with the
rotational speed, since the amount of working fluid flowing in where QT is the theoretical volumetric flow rate (μL min−1),
the gap depends on the activation time step given that the Vd is the fluid displaced volume per magnet revolution
pressure drop across the pump ports is constant. (μL revolution−1), and ωp is the pump rotational speed (rpm).
To estimate the pump performance, the volumetric The fluid displaced volume (Vd ) is a critical value for the
efficiency is considered and therefore the theoretical calculation of QT . It depends on the timing of when magnets
volumetric flow rate, QT, should be estimated. QT assumes no exchange their function between anchoring and moving. To
leakage and is simply the result of the fluid displaced volume clarify the calculation of this parameter, a schematic of the
(Vd) multiplied by pump rotational speed (ωp): pump activation concept considered in this work is shown in
QT = Vd ∗ ωp (1) figure 11.

6
J. Micromech. Microeng. 22 (2012) 065027 A T Al Halhouli et al

Table 3. Experimental flow rate and volumetric efficiency.

Volumetric efficiency Pressure head
ω (rpm) QT (μL min−1) QA (μL min−1) (%) (Pa)
31.25 93.78 17.30 18.45 0.21
35.71 107.17 31.60 29.49 0.38
41.67 125.06 45.64 36.49 0.55
50.00 150.05 72.31 48.19 0.88
62.50 187.57 104.12 55.51 1.26
83.33 250.08 158.72 63.47 1.93

Table 4. Comparison of various micropump concepts.

Reference Actuation Fluid w (μm) Height (μm) D (μm) Frequency Qmax (μl min−1)

Ahn and Kim [21] EHD Ethyl alcohol 3000 200 50

Yamahata et al [22] EM, membrane Water 500 7000 12 Hz 400
Hatch et al [7] EM, ferrofluidic Water 250 2000 8 rpm 47.8
Lemoff and Lee [23] AC MHD NaCl 800 – 1 kHz 18.3
Zhou [24] EM, membrane Water 450 7000 36.9 Hz 319.6
This work EM, magnets Water 1500 800 83.33 rpm 158

The pumping cycle has two phases. The first phase is the
pumping phase and it begins when the traveling magnet (MT)
is located at coil 5 and the anchoring magnet (MA) is set at
coil 1 (figure 11, left). During this phase the MT moves in steps
from coil 5 to coil 9 while MA is stationary (figure 11, right).
The second phase is the switching phase. During this phase,
the two magnets exchange their function between anchoring
and traveling. The traveling magnet moves from coil 9 to coil
1 and stops there (becomes anchored), while the anchored one
moves toward coil 5 and becomes the traveling magnet which
is the same situation as in figure 11, left.
The displaced volume per revolution Vd can be calculated
from the volume of the fluid displaced by the magnet piston MT
as it rotates between coil 5 and coil 9. Referring to figure 11,
Vd is given by
  θ Figure 12. The pump volumetric efficiency as a function of its
Vd = ro2 − ri2 h (2) rotational speed.
2
where ro and ri are, respectively, the outer and inner radii
of the flow channel, h is its height and θ is the included the pump speed is explained with equation (1). The internal
angle in radians between the leading edges of MT in the two leakage decreases at high speed.
locations. For a flow channel with ro = 4275 μm, ri = 2775 μm, In comparison with other pumping concepts, achieved
h = 813 μm, θ = 23 π , Vd was found to be 9.0 μL. flow rates proved to be comparative (see table 4). For
The volumetric efficiency, ηv , is an important performance more information, a comprehensive overview of major
parameter that describes the amount of leakage or losses in issues, working principles and performance parameters of
macroscale positive displacement pump. It refers to the ratio micropumps for biomedical applications has been recently
of actual volumetric flow rate to that obtained without leakage, presented in [20].
and is defined as An important observation that has been noticed during
QA testing is that the moving magnet pushes the small bubbles
ηv = (3) entering the pump chamber through the fluidic channel without
QT
any problems. This opens the way to a near-future study on
where QA is the actual (experimental) volumetric flow rate (μL
the pump capability for working as self-priming and bubble
min−1). Table 3 lists the flow rates, the volumetric efficiency
tolerance.
and the calculated pump pressure head. Figure 12 shows the
volumetric efficiency as a function of the pump speed.
The shape of the plot shown in figure 12 is typical for 6. Conclusions
macroscale positive displacement pumps and indicates the
internal leakage effect. At low speed the internal leakage is The paper introduced the concept, fabrication, activation
high and becomes dominant, while the theoretical flow out of and testing of a novel synchronous micropump based on
the pump is low. The dependence of the theoretical flow on microfabricated copper coils and polymer magnets. The pump

7
J. Micromech. Microeng. 22 (2012) 065027
works by the synchronized rotation of two polymer magnets
in an annular microfluidic channel. An 8-coil model and a
12-coil model were fabricated and tested in this work. EPON
SU-8 was used for patterning the polymer magnet molds and
the fluidic channels. The permanent magnets are realized by
embedding a viscous polymer magnet in a microfabricated
SU-8 mold. The mold is fabricated onto a 2 μm sacrificial
copper layer electroplated onto a ceramic substrate.
The forces generated from the coils on the microfabricated
polymer magnet were tested using a three-axis force sensor
and were found to vary almost linearly with applied current.
A maximum force of 658 μN was achieved at 138 mA.
A number of activation schemes were tested using the 8
and 12 planar electroplated coils chips. The best scheme for
exciting the 8-coil chip was found to be the generation of an
attractive magnetic force in the holding coils and on one of
the activation coils while the rest of coils repel. As for the
12-coil chip, best results were achieved when the anchored
magnet is attracted by applying on attractive force on the
holding coils and is repelled from the two neighboring front
and back coils (C2, C11). This combination of forces employs
enough holding force against the pumped fluid and squeezes it
between the inlet and outlet ports. The coils (C2–C11) create
a simultaneous moving magnetic field on the traveling magnet
to create pumping action on the fluid. It has been found that at
least two separating coils before switching are required in order
to avoid uncontrolled movement (slipping) of the anchored
or traveling magnets due to the repelling forces between the
magnets themselves.
The pump was run for rotational speeds up to 83.33 rpm.
Successful flow rates in the range of 17.3 μL min−1 at 31 rpm
to 158.7 μL min−1 at 83.33 rpm were achieved. The volumetric
efficiency was found to increase with rotational speed due to
the diminishing relative effect of internal pump leakage.
Acknowledgments
This work has been funded by the German Research
Foundation (DFG) within the framework of the Research Grant
BU 340/28-1 ‘Development of an Integrated Electromagnetic
Micropump for Biomedical Applications’. One of the authors
(SB) gratefully acknowledges the financial support of the
Volkswagen Foundation.
References
[1] Zhang C, Xing D and Li Y 2007 Micropumps, microvalves,
and micromixers within PCR microfluidic chips: advances
and trends Biotechnol. Adv. 25 483–514
[2] Andersson H, van der Wijngaart W, Nilsson P, Enoksson P
and Stemme G 2001 A valve-less diffuser micropump for
microfluidic analytical systems Sensors Actuators B
72 259–65
[3] Al-Halhouli A T, Demming S, Feldmann M, Büttgenbach S,
Kilani M I and Al-Salaymeh A 2008 Performance
characterization of a miniature spiral-channel viscous pump
Sensors Actuators A 142 256–62
A T Al Halhouli et al
[4] Rhie W and Higuchi T 2010 Design and fabrication of
a screw-driven multi-channel peristaltic pump for
portable microfluidic devices J. Micromech. Microeng.
20 085036
[5] Woias P 2005 Micropumps—past, progress and future
prospects Sensors Actuators B 105 28–38
[6] Al-Halhouli A T 2009 Recent advances in on-disk viscous
micropumps J. Microelectron. Electron. Packag. 6 240–9
[7] Hatch A, Kamholz A E, Holman G, Yager P
and Böhringer K F 2001 A ferrofluidic magnetic
micropump J. Microelectromech. Syst. 10 215–21
[8] Nguyen N T and Chai M F 2009 A stepper micropump for
ferrofluid driven microfluidic systems Micro Nanosystems
1 17–21
[9] Al-Halhouli A T, Kilani M I and Büttgenbach S 2010
Development of a novel electromagnetic pump for
bio-medical applications Sensors Actuators A 162 172–6
[10] Lorenz H, Despont M, Fahrni N, Brugger J, Vettiger P
and Renaud P 1998 High-aspect-ratio, ultrathick,
negative-tone near-UVB photoresist and its application for
MEMS Sensors Actuators A 64 33–9
[11] Büttgenbach S, Burisch A and Hesselbach J 2011 Design and
Manufacturing of Active Microsystems (Berlin: Springer)
[12] Al-Halhouli A T and Büttgenbach S 2010 Numerical analysis
of mixing in a multifunction electromagnetic micropump
ICNMM 2010 (Montreal, Canada) FEDSM-
ICNMM2010-30971
[13] Lorenz H, Despont M, Fahrni N, Brugger J, Vettiger P
and Renaud P 1998 High-aspect ratio, ultrathick,
negative-tone near-UV photoresist and its applications for
MEMS Sensors Actuators A 64 33–9
[14] Conradie E H and Moore D F 2002 SU-8 thick photoresist
processing as a functional material for MEMS applications
J. Micromech. Microeng. 12 368–74
[15] Al-Halhouli A T, Kampen I, Krah T and Büttgenbach S 2008
Nanoindentation testing of SU-8 photoresist mechanical
properties Microelectron. Eng. 85 942–4
[16] Choi Y, Powers R, Vernekar V, Frazier A B, LaPlaca M C
and Allen M G 2003 High aspect ratio SU-8 structures for
3-D culturing of neurons ASME Micro-Electromechanical
Systems Division Publication (MEMS) pp 651–4
[17] Al-Halhouli A T 2009 Electromagnetic field analysis on a
novel electromagnetic actuator for fluid handling
applications PowerMEMS 2009 (Washington, DC, USA)
pp 308–11
[18] Tibrewala A, Phataralaoha A and Büttgenbach S 2009
Development, fabrication and characterization of a 3D
tactile sensor J. Micromech. Microeng. 19 125005
[19] Waldschik A, Feldmann M and Büttgenbach S 2008 Novel
synchronous linear and rotatory micro motors based on
polymer magnets with organic and inorganic insulation
layers Sensors Transducers J. 3 3–13
[20] Ashraf M, Tayyaba S and Afzulpurkar N 2011 Micro
electromechanical systems (MEMS) based microfluidic
devices for biomedical applications Int. J. Mol. Sci.
12 3648–704
[21] Ahn S and Kim Y 1998 Fabrication and experiment of a planar
micro ion drag pump Sensors Actuators A 70 1–5
[22] Yamahata C, Lotto C, Al-Assaf E and Gijs M 2005 A PMMA
valveless micropump using electromagnetic actuation
Microfluid Nanofluid 1 197–207
[23] Lemoff A and Lee A 2000 An ac magnetohydrodynamic
micropump Sensors Actuators B 63 179–85
[24] Zhou Y and Amirouche F 2011 An
electromagnetically-actuated all-PDMS valveless
micropump for drug delivery Micromachines
2 345–55