01 CONVUM

Standard CONVUM
CV シリーズ
CONVUM Standard CONVUM

Series

01
CONVUM

SC1
SC2
SC3
MC22
MC72
MC72

Standard vacuum ejector, extensive line up

CCV
MCV
CV Various size of nozzle, from low to high vacuum flow
CVSUS
CVA2
CVA2
EC1
DS-01AN
MCA SUS type and PTFE type are available
CVF
HDV
Body and nozzle made of SUS303/316, PTFE,
HDV
HFV
can be used in semiconductor manufacture process
HFV
CVZ
HFV-25M
000 Long life
CVZ
No moving parts, simple construction
000

Prevent the dust from getting into the silencer and supply port
Dust-proof mesh mounted
※ Please refer to silencer / mesh for supply port available list

Mechanical switch can be mounted for aluminum body type

107
 CV
Standard CONVUM

CONVUM Standard CONVUM

How to Order

Aluminum Type
※①②③④ Applicable Models
CV ー 05 H S CK ③ ④
① ②
① ② ③ ④
S R CK
H ○ ×
05 ○
L ○ ×
② Maximum Vacuum H ○ ○
① Nozzle Type Pressure［ kPa］ ④ Switch 10
L ○ ×
○

Symbol
Nozzle size
［mm］
Symbol Type
Vacuum
pressure
Blank
CK
N/A
With
15
H
L
○
○
○
×
○ 01
CONVUM
05 0.5 H High vacuum type -87 ※Switch is not H ○ ○
10 1.0 L High flow type -53 mountable with 20 ○
nozzle type 25 and L ○ × SC1
15 1.5 30A. H ○ ×
25 × SC2
20 2.0
③ Rated pressure［MPa］ ※Switch can not
be mounted
L ○ ×
25 2.5 H ○ × SC3
S 0.5 afterwards.
30A 3.0 30A ×
R 0.35 L ○ ×
MC22
MC72
CCV
CCV
SUS/PTFE Type MCV
CV
CV ー 10 H S T S3
CVSUS
CVA2
① ② ③ ④ ⑤ CVA2
EC1
DS-01AN
MCA
②M
 aximum Vacuum
① NozzleType Pressure［ kPa］ ④ Body Material ※①②③ Applicable Models CVF
HDV
Nozzle size Vacuum Symbol Material ③ HDV
HFV
Symbol Symbol Type ① ②
［mm］ pressure Ｔ PTFE S R
10 1.0 H High vacuum type -87 S3 SUS303 H ○ ○ HFV
CVZ
15 1.5 L High flow type -53 10
S6 SUS316 L ○ × HFV-25M
20 2.0 H ○ ○
15 000
③ Rated pressure［MPa］ ⑤ Nozzle Material L ○ ×
H ○ ○ CVZ
S 0.5 Symbol Nozzle 20
L ○ ×
R 0.35 S3 SUS303
000
S6 SUS316

Specifications by Nozzle（common for all material） ※ Silencer/ Mesh for Supply Port Available List
Maximum Nozzle size
Rated Air Material Item
Nozzle pressure
vacuum Suction flow
consumption
type pressure ［L/min（ANR） ］ 05 10 15 20 25 30A
［MPa］ ［L/min（ANR） ］
［kPa］ Mesh ○ ○ ○ × × ×
05HS -87 6 Aluminum
13 Silencer ○ ○ ○ ○ ○ ○
05LS -57 9 Mesh - ○ ○ × - -
0.5 SUS
10HS -92 27 Silencer - ○ ○ ○ - -
10LS -57 36 44 Mesh - ○ ○ × - -
10HR 0.35 -91 25 PTFE
Silencer - ○ ○ ○ - -
15HS -92 63
0.5
15LS -57 95 100
15HR 0.35 -91 54
20HS -92 110
0.5
20LS -57 155 180
20HR 0.35 -91 88
25HS -92 160
265
25LS -57 250
0.5
30AHS -92 225
385
30ALS -57 350

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 CV Standard CONVUM
CONVUM

Maintenance Parts
保守部品形式番号
Standard CONVUM

Silencer Switch Switch

Model number Applicable body
CV ー CK
MSS-01 CV-05, 10
MSM-01 CV-15
MSL-02 CV-20
MS6-01 CV-25, 30A

Silencer

01
CONVUM

SC1
SC2
SC3
These model number below satisfy general needs and functions with
MC22 Recommend ! product advantages. ※Please feel free to contact us.
MC72
Specifications
CCV Product code Model number
Nozzle size（mm) Switch
MCV
200100001 CV-05HS 0.5 N/A
CV
200100002 CV-05LS 0.5 N/A
CVA2
200100003 CV-10HS 1.0 N/A
EC1
200100005 CV-10LS 1.0 N/A
MCA
200100006 CV-15HS 1.5 N/A
HDV
200100008 CV-15LS 1.5 N/A
HFV
200100009 CV-20HS 2.0 N/A
CVZ
200100011 CV-20LS 2.0 N/A

200100012 CV-25HS 2.5 N/A

200100014 CV-30AHS 3.0 N/A

200100033 CV-05HSCK 0.5 With

200100035 CV-10HSCK 1.0 With

200100038 CV-15HSCK 1.5 With

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 CV
Standard CONVUM

CONVUM
CONVUM Specifications

Description ＼ CV-05 CV-10 CV-15 CV-20 CV-25 CV-30A

Standard CONVUM
Model number
Unit
HS LS HS LS HR HS LS HR HS LS HR HS LS HS LS
Nozzle size mm 0.5 1.0 1.5 2.0 2.5 3.0
Fluid Non-lubricated compressed air
Ambient temperature ℃ 0～60（No Freezing）
Operating pressure range MPa 0.1～0.6
Rated pressure MPa 0.5 0.35 0.5 0.35 0.5 0.35 0.5
Maximum vacuum pressure kPa -87 -57 -92 -57 -91 -92 -57 -91 -92 -57 -91 -92 -57 -92 -57
Suction flow L/min(ANR) 6 9 27 36 25 63 95 54 110 155 88 160 250 225 350
Air consumption L/min(ANR) 13 44 100 180 265 385

Switch Specifications Silencer Specifications

01
CONVUM
Description ＼ Description ＼
Model number
Unit CV-CK Unit MSS-01 MSM-01 MSL-02 MS6-01
Model number
Fluid Air Fluid Non-lubricated compressed air
SC1
Operating pressure range kPa -20～-53 Ambient temperature range ℃ 0～60（No freezing）
SC2
Withstand pressure MPa 0.5 Operating pressure range MPa 0～0.5
Ambient temperature range ℃ 0～60（No freezing） Port size G1/8 G1/4 R1/2 G3/4 SC3
Ambient humidity range ％RH 35～85（No condensation） Noise reduction dB More than 20
Switch type Reed switch, normally opened（N.O） Applicable CONVUM CV-05,10 CV-15 CV-20 CV-25, 30A MC22
Rated voltage V AC125, 250
Maximum load AC125 A 5 MC72
current AC250 A 3
Repeatability kPa ±5.3 CCV
Hysteresis kPa 4.0～13.3
Cable length mm 100 MCV
CV
Weight（g）CONVUM Body (with silencer, without switch) CVA2

Nozzle size Pressure Switch (with cable) Silencer EC1

Material
05 10 15 20 25 30A Nozzle size 05 10 15 20 Model number Weight
Aluminum 78 139 343 730 870
MCA
Weight 40 40 50 110 MSS-01 5
SUS - 189 334 793 - - MSM-01 7 HDV
PTFE - 66 116 295 - - MSL-02 25
MS6-01 54 HFV
CVZ
Construction
Component Parts
Aluminum Body SC1エア回
1 2 3 P
No. Parts name Material
1 Supply port Brass
2 Body Aluminum
3 Silencer POM, felt

SUS Body
No. Parts name Material
P 1 Supply port SUS
2 Body SUS
ＣＶ、CK（圧力スイッチ付）
3 Silencer POM, felt
ＣＶ、MCV共通（標準） MCV（圧力スイッチ付）
PTFE Body
No. Parts name Material
1 Supply port SUS
V
2 Body PTFE
3 Silencer POM, felt

Symbol

Without switch With switch

P P

V V
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 CV Standard CONVUM CV1/2
CONVUM

Performance Charts
Standard CONVUM

05HS 05LS
-100 30 -100 30
Maximum vacuum pressure

Air consumption, suction flow L/min (ANR)

Air consumption, suction flow L/min (ANR)

-90 -90
25 25
-80 -80
Maximum vacuum pressure
-70 -70
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

20 20
-60 -60

-50 15 -50 15
Air consumption

01
-40 -40
Suction flow
10 10
-30 -30
CONVUM
-20 -20
5 5
SC1 -10 Suction flow -10 Air consumption

SC2 0 0 0 0
0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6
SC3 Supply pressure MPa Supply pressure MPa

MC22
MC72
CCV
10HS 10LS 10HR
MCV
-100 100 -100 100 -100 100
CV Maximum vacuum pressure Maximum vacuum pressure
Air consumption, suction flow L/min (ANR)

Air consumption, suction flow L/min (ANR)

Air consumption, suction flow L/min (ANR)

-90 90 -90 90 -90 90
CVA2 -80 80 -80 80 -80 80
EC1 -70 70 -70 70 -70 70
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

Maximum vacuum pressure

MCA -60 60 -60 60 -60 60

Air consumption
-50 50 -50 50 -50 50
HDV Suction flow
-40 40 -40 40 -40 40
HFV Air consumption
-30 30 -30 30 -30 30
CVZ -20 20 -20 20 -20 20
Suction flow
-10 10 -10 Air consumption 10 -10 Suction flow 10
0 0 0 0 0 0
0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6
Supply pressure MPa Supply pressure MPa Supply pressure MPa

15HS 15LS 15HR

-100 200 -100 200 -100 200
Maximum vacuum pressure
Air consumption, suction flow L/min (ANR)

Air consumption, suction flow L/min (ANR)

Air consumption, suction flow L/min (ANR)

Maximum vacuum
-90 pressure 180 -90 180 -90 180
-80 160 -80 Maximum vacuum pressure 160 -80 160
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

-70 140 -70 140 -70 140

-60 120 -60 Suction flow 120 -60 120
Air consumption
-50 100 -50 100 -50 100
-40 80 -40 80 -40 80
Air consumption
-30 60 -30 60 -30 60
-20 40 -20 Air consumption 40 -20 40
Suction flow
-10 20 -10 20 -10 Suction flow 20
0 0 0 0 0 0
0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6
Supply pressure MPa Supply pressure MPa Supply pressure MPa

111
 CV
Standard CONVUM

CONVUM
Standard CONVUM
20HS 20LS 20HR
-100 400 -100 400 -100 400
Maximum vacuum pressure Maximum vacuum pressure

Air consumption, suction flow L/min (ANR)

Air consumption, suction flow L/min (ANR)

Air consumption, suction flow L/min (ANR)

-90 -90 350 -90
350 350
-80 -80 -80
300 Maximum vacuum pressure 300 300
-70 -70 -70
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

250 -60 250 250
-60 -60
-50 Air consumption 200 -50 200 -50 200
-40 -40 Suction flow -40
150 150 150
-30
-20
100
-30
-20
100
-30
Air consumption
100 01
CONVUM
Air consumption -20
Suction flow
50 -10 50 50
-10 -10 Suction flow SC1
0 0 0 0 0 0
0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 SC2
Supply pressure MPa Supply pressure MPa Supply pressure MPa
SC3
MC22
MC72
CCV
25HS 25LS
MCV
-100 Maximum vacuum pressure
600 -100 600
CV
Air consumption, suction flow L/min (ANR)

Air consumption, suction flow L/min (ANR)

-90 -90

-80
500
-80
500 CVA2
Maximum vacuum pressure
-70 -70 EC1
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

400 400
-60 -60 MCA
Air consumption
-50 300 -50 300
Suction flow HDV
-40 -40
200 200 HFV
-30 -30
CVZ
-20 -20
100 Air consumption 100
Suction flow
-10 -10

0 0 0 0
0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6
Supply pressure MPa Supply pressure MPa

30AHS 30ALS

-100 600 -100 600

Maximum vacuum pressure
Air consumption, suction flow L/min (ANR)

Air consumption, suction flow L/min (ANR)

-90 -90
500 500
-80 -80
Air consumption
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

-70 -70 Suction flow

400 400
-60 -60 Air consumption

-50 300 -50 300

-40 -40
200 200
-30 -30
Suction flow
-20 -20
100 100
-10 -10 Maximum
vacuum pressure
0 0 0 0
0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6
Supply pressure MPa Supply pressure MPa

112
 CV Standard CONVUM CV1/2
CONVUM

Suction Flow / Vacuum Pressure Characteristics

Standard CONVUM

05HS 05LS

-100 -100
-90 -90
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

-80 -80
-70 -70
-60 -60
-50 -50
-40 -40
01
CONVUM
-30 -30
-20 -20
SC1 -10 -10

SC2 0 0
0 2 4 6 8 10 0 2 4 6 8 10
SC3 Suction flow L/min(ANR) Suction flow L/min(ANR)

MC22
MC72
CCV
10HS 10LS 10HR
MCV
-100 -100 -100
CV
-90 -90 -90
CVA2
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

-80 -80 -80

EC1 -70 -70 -70

MCA -60 -60 -60

-50 -50 -50
HDV
-40 -40 -40
HFV -30 -30 -30
CVZ -20 -20 -20
-10 -10 -10
0 0 0
0 10 20 30 40 0 10 20 30 40 0 10 20 30 40
Suction flow L/min(ANR) Suction flow L/min(ANR) Suction flow L/min(ANR)

15HS 15LS 15HR

-100 -100 -100

-90 -90 -90
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

-80 -80 -80

-70 -70 -70
-60 -60 -60
-50 -50 -50
-40 -40 -40
-30 -30 -30
-20 -20 -20
-10 -10 -10
0 0 0
0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100
Suction flow L/min(ANR) Suction flow L/min(ANR) Suction flow L/min(ANR)

113
 CV
Standard CONVUM

CONVUM
Standard CONVUM
20HS 20LS 20HR

-100 -100 -100

-90 -90 -90
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

-80 -80 -80
-70 -70 -70
-60 -60 -60
-50 -50 -50
-40 -40 -40
-30 -30 -30 01
CONVUM
-20 -20 -20
-10 -10 -10 SC1
0 0 0 SC2
0 50 100 150 0 50 100 150 0 50 100 150
Suction flow L/min(ANR) Suction flow L/min(ANR) Suction flow L/min(ANR) SC3
MC22
MC72
CCV
25HS 25LS
MCV
-100 -100
CV
-90 -90
CVA2
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

-80 -80
-70 -70 EC1
-60 -60
MCA
-50 -50
HDV
-40 -40
-30 -30
HFV
-20 -20 CVZ
-10 -10
0 0
0 50 100 150 200 250 300 0 50 100 150 200 250 300
Suction flow L/min(ANR) Suction flow L /min(ANR)

30AHS 30ALS

-100 -100
-90 -90
Maximum vacuum pressure kPa

Maximum vacuum pressure kPa

-80 -80
-70 -70
-60 -60
-50 -50
-40 -40
-30 -30
-20 -20
-10 -10
0 0
0 100 200 300 400 0 100 200 300 400
Suction flow L/min(ANR) Suction flow L/min(ANR)

114
 CV Standard CONVUM
CONVUM

Dimensions
（mm）
Standard CONVUM

CV- □□ Standard（without switch）

E
（
J Vacuum port）

L（Supply port）

01
CONVUM （
I Mounting hole）

SC1
B

SC2

N
D

SC3
O F G

H
MC22
C K A M
MC72
P
CCV
MCV Model Silencer
A B C D E F G H I J K L M N O P port
number screw
CV CV-05
45 33 16 10 8 14 20 4.5 2-φ4.2 Rp1/8 10 Rp1/8 35 φ18.5 14 90 Rp1/8
CVA2 CV-10
CV-15 63 35 20 11 10 20 25 5 2-φ4.5 Rp1/4 15 45.5 φ20 17 123.5 Rp1/4
EC1 Rp1/4
CV-20 85 40 30 15 13 28 32 7 Rp3/8 20 60.5 φ30 24 165.5 Rp1/2
CV-25 100
CV標準(圧力スイッチ無し)(S=0.68)
16 20 2-φ6 Rc1/2 17 Rc3/8 28 213
MCA 60 40 20 50 5.5 96 φ40 Rp3/4
CV-30A 118 20 33 Rc3/4 20 Rc1/2 30 234
HDV
HFV
CVZ
CV- □□ CK(with switch)
14

Lead wire length：100

MAX:33.5
23

39 M

Model M B
number
CV-05
36 33
CV-10
CV-15 46.5 35
CV-20 60.5 50

115
CV標準(圧力スイッチ付き)(S=0.68)