Solution case study No.

2
Digital equipment industry

Proposals for advanced temperature control

Coexistence of quality and production

capacity in processes requiring precise
temperature control
The importance of temperature control is increasing due to the miniaturization and lamination of semiconductors and the
high capacity of rechargeable batteries. More precise temperature control is required to improve machining accuracy since
temperature variations and fluctuations affect quality of products, but to make it possible it takes more time and effort.

Automatically minimizes surface temperature variation and

temperature fluctuations caused by disturbances
In the multipoint control, the surface temperature
BEFORE
variation of the wafer occurs due to the thermal
interference of the heater, and it was necessary to
adjust the temperature uniformity control by taking a
lot of time to suppress it. In addition, the temperature
fluctuated due to the routine disturbance＊1 during
production, and a long waiting time was required until
the temperature stabilized.
When the "Temperature Uniformity Control" is used,
AF TER
the optimized temperature setting that uniformizes
the surface temperature of the wafer is automatically
calculated. In addition, the "Disturbance suppression
function" suppresses temperature fluctuation caused
by routine disturbance. With these technologies, we can
improve quality and productivity without spending much
engineering effort.

Yield deteriorated due to surface temperature Improvement of yield by equalizing wafer surface
variation of wafer temperature. with "Temperature Uniformity Control" FB＊2
wafer wafer
temperature temperature
Temperature
W2 W1 W2 W1 Uniformity
W1 W4 W2 W1 W4 W2
Control
W3 W3 W3 W3
W4 W4 Machine
Automation Controller
Time Time NJ/NX Series

Waiting time is generated by temperature fluctuation Reduced takt time by suppressing temperature
caused by routine disturbance＊1 fluctuation with "Disturbance suppression function"

Temperature Waiting time Temperature Disturbance

Waiting Reduce
time stabilization Suppression
wait time Function

Temperature Temperature Temperature

control range control range Control Unit
Time Time NX-TC

＊1. Predictable disturbance such as process gas injection and work input ＊2. Function Block
I AB カタログ・マニュアル 表 4 パターン ( 英 文 ) _I AB 基 本 ( カタログテクニカルガイド用 )

Automatic minimization of fluctuations in temperature and

manipulated variable by heating and cooling control
There is a great difference between the heating
BEFORE
and cooling capacity of the facility, and it is a
challenge to determine the optimum heating and
cooling PID.
As a result, it took a long time to adjust, and PID
was inappropriate. This resulted in excessive
cooling, resulting in poor-quality operation and
wasted power.
With "Heating/Cooling AT (Auto-Tuning)", the
AF TER
optimum PID can be calculated automatically
even if the heating and cooling capacities are
different significantly.
"Heating/Cooling AT" eliminates over-cooling and
optimize temperature and manipulated variable.

Non optimized heating and cooling cycles cause temperature Temperature is stabilized by optimized heating
fluctuations and it consumes excess energy. and cooling control.

Temperature Temperature

Time Time

Manipulated Manipulated
variable Heating variable Heating
Cooling Cooling

Time Time

Range of products that achieve advanced temperature control

Machine Automation NX Series NX Series Solid State Relays for Single-phase

Controller EtherCAT® Coupler Unit/ Temperature Heaters Power Controller
NJ/NX Series EtherNet/IP TM Control Unit G3PJ G3PW
＋ Coupler Unit NX-TC
Temperature Uniformity
Control FB
(Function Block)

・The product photographs and figures that are used in this catalog may vary somewhat from the actual products.
・Some images are used under license from Shutterstock.com.
・EtherCAT® and Safety over EtherCAT® are the registered trademarks and patented technology, licensed by Beckhoff Automation GmbH, Germany.
・EtherNet/IPTM is the trademark of ODVA.
・Other company names and product names in this document are the trademarks or registered trademarks of their respective companies.

Note: Do not use this document to operate the Unit.

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In the interest of product improvement,
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Cat. No. Y257-E1-01 1222(1222)