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Packaging??

• Packaging of Microelectronics circuits is the


science and art of establishing interconnections
and an appropriate operating environment for
predominantly electrical (and in the case of
MEMS–-- Electro-Mechanical) circuits to
process and/or store information.
Why is packaging necessary?

MEMS/Microsystems Packaging:
(common functions as in microelectronic packaging)
• provision of signal, voltage, and ground connections
• facilitation of thermal energy dissipation
• provision of stress-minimized mechanical support.
• protection of the components from potentially harmful
physical, chemical and other environmental influences
Simplified Process Flow For MEMS Packaging:

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