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Journal of Materials Processing Technology 169 (2005) 485–492

Experimental study on electrochemical micromachining


B. Bhattacharyya, M. Malapati, J. Munda
Department of Production Engineering, Jadavpur University, Kolkata, India

Received 14 June 2004; received in revised form 4 April 2005; accepted 8 April 2005

Abstract

Electrochemical micromachining (EMM) appears to be very promising as a future micromachining technique since in many areas of
applications it offers several advantages that include higher machining rate, better precision and control and a wide range of materials that
can be machined. Present paper will highlight the influence of various electrochemical micromachining parameters like machining voltage,
electrolyte concentration, pulse period and frequency on material removal rate, accuracy and surface finish in microscopic domain. According
to the present experimental study, the most effective values for micromachining parameters have been considered as 3 V machining voltage,
55 Hz frequency and 20 g/l electrolyte concentration that can enhance the accuracy with highest possible amount of material removal. It has
been observed through SEM micrographs that low voltage, moderate electrolyte concentration and high frequency can improve the accuracy
with lesser number of micro-sparks. Radial stray cut and on-line pulse pattern during generation of micro-sparks are also considered for
selecting the effective zone of EMM parameters. This research development made in this area of EMM will open up many challenging
possibilities for effective utilization of electrochemical material removal mechanism in the area of micro-manufacturing.
© 2005 Elsevier B.V. All rights reserved.

Keywords: Micromachining; EMM; Machining parameters

1. Introduction generally faced are, such as tool wear, rigidity problem of the
tool, heat generation at the tool–work piece interface. Some-
Micromachining refers to small amount of material times, it is difficulty to produce complex shapes by using
removal that ranges from 1 to 999 ␮m. Recent changes in conventional techniques [1].
societies demand have forced us to introduce more and more Non-traditional machining processes are getting their
micro-parts into various types of industrial products. For importance due to its versatility and controlled parameters. In
example, the fuel injection nozzle for automobiles, several non-conventional machining, most of the processes are ther-
regulations arising from environmental problems have forced mal oriented, e.g. Electro discharge machining (EDM), laser
manufacturers to improve the design of the nozzle towards beam machining (LBM), Electron beam machining (EBM),
those of smaller, compact with high accuracy. Inspection of etc., which may cause thermal distortion of the machined sur-
internal organs of human body and surgery without pain are face. Chemical machining and Electrochemical machining
universally desired. Miniaturization of medical tools is one are thermal free processes, but chemical machining cannot be
of the effective approaches to arrive at this target. Micro- controlled properly in this micromachining domain [2]. Elec-
machining technology plays an increasing decisive role in trochemical micromachining (EMM) appears to be a very
the miniaturization of components ranging from biomedical promising micromachining technology due to its advantages
applications to chemical micro-reactors and sensors. Slots, that include high MRR, better precision and control, rapid
complex surfaces and micro-holes used to be produced in machining time and environmentally acceptable and it also
large numbers, sometimes in a single work piece, especially permits machining of chemically resistant materials like tita-
in electronic industries. These things are performed by using nium, copper alloys, super alloys and stainless steel, which
conventional machining techniques also, but the problems are widely used in biomedical, electronic and MEMS applica-
tions [3–5]. Gusseff first patented electrochemical machining
E-mail address: bb13@rediffmail.com (B. Bhattacharyya). (ECM) in 1929. But electrochemical machining was intro-

0924-0136/$ – see front matter © 2005 Elsevier B.V. All rights reserved.
doi:10.1016/j.jmatprotec.2005.04.074
486 B. Bhattacharyya et al. / Journal of Materials Processing Technology 169 (2005) 485–492

duced in the early 1960s in aerospace industries for shaping, order to achieve proper EMM, the current density is main-
finishing of larger parts. ECM machining process is applied to tained as low and operating voltages of less than 5 V are
the micromachining range of applications for manufacturing required. If the current density and the voltage is high, con-
of ultra precision shapes; it is called electrochemical micro- centration of reaction products are high and these reaction
machining. EMM is an effective method of producing variety products cannot be removed properly due to narrow small
of components for the aerospace, automotive, defense, elec- inter electrode gap. The increasing contaminations of reac-
tronic and biomedical industries. Attempts have already been tion products are caused to deposit in-between micro-tool
made to develop an EMM experimental set up and carrying and work piece, so that the work piece material no longer
out pilot experimentation for achieving satisfactory control dissolves properly [10]. Furthermore, change in electrolyte
of EMM process parameters to meet the micromachining concentration and temperature increases the electrical resis-
requirements [6]. A better understanding of the high-rate tivity, which in turn affects the accuracy. For improving shape
dissolution is urgently required for EMM to become widely accuracy and finish, the IEG should be kept as small as possi-
employed manufacturing process in the micro-manufacturing ble. The small IEG is limited by the generation of unwanted
domain [7]. Although research institute and researchers have electrical discharges, which can reduces the surface quality,
already initiated some research in this area of machining, it accuracy and surface finish. High off-time ultra short pulses
still requires lot of research. However, to exploit full poten- improve the localization of dissolution to sub-micrometer,
tial of EMM, in depth research is needed to improve the i.e. enhance the accuracy. The anodic electrochemical dis-
material removal, surface quality and accuracy by optimiz- solution occurs during the ultra short pulse on-time and the
ing the various EMM process parameters. Keeping in view dissolved products, i.e. sludge, gas bubbles and heat can be
of these requirements, experimental set up has been devel- flushed away from the inter electrode gap completely by the
oped to achieve precise micro-tool motion for investigating flow of electrolyte during pulse off-time. Pulses are used in
the influence of various major process characteristics, such the form of single pulses or multiple/group pulses to achieve
as machining voltage, electrolyte concentration, frequency, necessary accuracy in the micromachining. Group pulses are
pulse period, pulse on–off-time and micro-tool feed rate on preferred because of its ability to achieve the required dimen-
the material removal and accuracy. Radial stray current effect sion quickly with higher accuracy. For improving accuracy
and micro-sparks phenomena are also been considered for and surface finish, short pulse voltage with high off-time is
deriving most suitable process parameters. preferred. 3D-micromachining is also achieved by the appli-
cation of ultra short voltage pulses [11–13]. The accuracy can
be improved by the application of high off-time ultra short
2. Major characteristics of EMM pulse DC power supply.

EMM offers several advantages as compared to chemical 2.2. Role of electrolyte


micromachining (CMM), such as higher unit removal, use
of ecologically safe etchant, faster rate of material removal The electrolyte not only completes the electric circuit
and machining of chemically resistant materials, i.e. titanium, between the tool and work piece, but also allows the desired
super alloys and stainless steel, etc. The influence of cur- machining reactions to occur. Electrolyte must possess less
rent density, current distribution, anodic reactions and mass throwing power apart from basic properties to increase the
transport effects on unit removal and accuracy is very cru- machining accuracy. EMM electrolytes are basically classi-
cial. The shape of feature to be generated and its dimension fied into two categories, such as passive electrolytes contain-
depends not only on the dimensional features like micro-tool ing oxidizing anions, i.e. sodium nitrate (NaNO3 ), sodium
electrode and inter electrode gap (IEG) but also on position chlorate, etc., and non-passive electrolytes containing aggres-
features, such as electrolyte flow direction, machining volt- sive anions, i.e. sodium chloride. Passive electrolytes are
age and hydrodynamic conditions [8]. In order to achieve the known to give better machining precision. This is due to
effective and efficient micromachining, the role of following formation of oxide films and oxygen evolution in the stray
major EMM characteristics are to be investigated thoroughly current region. It is usual to work with NaNO3 (pH 7) that
through planned experimental study. can improve the dissolution of material without affecting the
micro-tool. However, acidic electrolytes are advantageous
2.1. Role of power supply due to formation of soluble reaction products, which can com-
pletely swept clean from the narrow IEG during machining
Generally the nature of the power supply is either DC full without micro-tool being affected. By decreasing the elec-
wave rectified or pulsed DC. A full wave rectified DC supplies trolyte concentration, inter electrode gap can be reduced to
continuous voltage, where the current efficiency depends on a lower value for improving the micromachining efficiency.
the current density. Decrease in current density decreases the Additive chemicals, gas mixed electrolyte, acidic electrolyte,
current efficiency, which can improve the surface finish and hot electrolyte, etc., are preferred to achieve better dimen-
accuracy of form of the work piece. In pulsed DC, current sional accuracy. Addition of additive chemicals like NaHSO4
efficiency is much more dependent on current density [9]. In to the electrolyte to reduce the concentration of dissolved
B. Bhattacharyya et al. / Journal of Materials Processing Technology 169 (2005) 485–492 487

reaction products that in turn improve the accurate shape hydrogen due to high voltage may cause onset of unwanted
generation. Machining reactions can speeds up by using hot electrical discharges. These draw backs can be controlled by
electrolytes too, that reduces the requirement of over volt- selecting optimal parametric combination through optimiz-
ages. Most of the researchers recommended the NaClO3 , ing the values of IEG, electrolyte concentration, voltage and
NaNO3 and NaCl electrolyte solution with different concen- pulse period, etc.
trations for EMM.

2.3. Role of inter electrode gap 3. Experimental planning

For accurate EMM shape generation, the IEG control plays Keeping in view of the present research objectives, exper-
a vital role. If the inter electrode gap is kept to a small value, imental investigation and analysis has been carried out in dif-
i.e. 10–50 ␮m, the resolution of machined shape becomes ferent parametric combinations, for deriving effective para-
better and the possibility of applying ECM to micromachin- metric combination, which can be useful for achieving better
ing increases, and it can also increases the shape accuracy micromachining. To analyze the influence of the desired per-
and unit removal [6,14]. In EMM, the IEG can be reduced formance characteristics on material removal and machining
to several microns by lowering the machining voltage and accuracy, proper scheme has been designed with the uti-
electrolyte concentration [15]. For reducing non-uniformity lization of developed EMM experimental set up, which is
in the electrolyte conductivity, which is significant for disso- shown in Fig. 1. The EMM experimental set up consists
lution process, a more stable IEG is necessary. Maintaining of mechanical machining unit, electrolyte flow system and
the stable stage of IEG uniformly is an important requirement power supply unit that includes microprocessor control unit
in EMM for achieving high accuracy and surface finish. and stepper motor control unit. The microprocessor pro-
grammes are so developed to control the micro-tool move-
2.4. Role of micro-tool ment as per the micromachining requirements. Three types
of micro-tools have been chosen for the experimentation, i.e.
The accuracy of the micro-tool shape and surface fin- Ø 275 ␮m platinum tool, Ø 596 ␮m stainless steel tool and
ish directly affects the work piece accuracy. The micro-tool Ø 357 ␮m stainless steel tool. The work piece specimens
materials should have good thermal and electrical conduc- are 15 mm × 10 mm × 0.15 mm maskless copper plates. The
tivity, corrosive resistant and high machinability, stiffness electrolyte used for experimentation is fresh aqueous solution
to withstand electrolyte pressure without vibration and less of sodium nitrate having different concentrations. Variable
stray current effect. Suitable materials for micro-tool are plat- rectangular DC pulsed supply has been used for experimen-
inum, tungsten, titanium, stainless steel and molybdenum. tation. The unit removal (UR), which is defined as material
However, micro-tool material selection mainly depends on removed per pulse or material removal per unite time and
electrochemical and mechanical properties, shape to be pro- accuracy have been measured for set of experiments with var-
duced and material of the work piece. For achieving higher ious combinations of process parameters. Applied machining
accuracy, insulated micro-tool, dual pole tool, etc., are pre- voltages of 3, 5 and 7 V have been selected for experiments.
ferred. In dual pole tool, the insulated micro-tool is covered Electrolyte concentrations of 10, 20 and 30 g/l have been cho-
with anodic metal bush to enhance the accuracy. For reducing sen for experiments. Frequency of pulsed power supply of
the effect of stray current, the micro-tool should be insulated 35, 45 and 55 Hz has also been considered for various exper-
properly so that current flows only through the front face, iments. Machining accuracy is measured with the help of
which in turn causes less side gap [16]. Insulated materials side gap. The side gap phenomena of the machined work
like SiC, Si3 N4 can be coated on the side wall of the micro- piece have been observed with the help of measuring micro-
tool by chemical vapour deposition (CVD) process. scope (Olympus, Japan). Values of various parameters are
measured with the help of digital storage oscilloscope (DL
2.5. Role of micro-spark generation 1520 Yokogawa, Japan), pH meter (Mettler Toledo, Switzer-
land), Multimeter (TX3 Tektronix, USA), Precision weighing
In EMM, micro-sparks are generated at higher machining machine (Mettler Toledo, Switzerland) and precision stop-
voltage and at lower electrolyte concentration due to small watch (Baker, India). Unit removal is calculated as the mate-
narrow IEG, which can adversely affect the accuracy and rial removed, i.e. the difference of initial and final weight of
surface finish of the machined micro-hole. Micro-tool feed the work piece, per unit time. Digital storage oscilloscope
rate should be maintained above the material removal rate has been utilized for on-line observation of the voltage pulse
to avoid micro-spark generation. Reduction in IEG increases pattern during micromachining operation. The analysis of
the unwanted electrical discharges that may cause for short the stored pulse patterns has been carried out with the help
circuit. These short circuits reduce the accuracy and sur- of waveform viewer software (Yokogawa, Japan) for investi-
face finish of the work piece and lead to electro-erosion of gating the causes of the onset of micro-sparks during various
the micro-tool. At narrow machining zone of EMM, Joule sets of micromachining experiments. For studying the effects
heating, generation of hydrogen and subsequent breaking of of various predominant process parameters on the shape
488 B. Bhattacharyya et al. / Journal of Materials Processing Technology 169 (2005) 485–492

Fig. 1. Photographic view of the experimental EMM set up.

accuracy, micromachined holes have been viewed through gap. An attempt has also been made to find out an optimal
scanning electron microscopy (SEM), and SEM micrographs combination of EMM parameters for effective and efficient
are further analyzed. micromachining.

4.1. Influence of machining parameters on unit removal


4. Experimental results and discussions
It is observed from previous experiments that the highest
Experiments have been carried out on the developed EMM amount UR is achievable at 30 g/l electrolyte concentration.
experimental set up to predict the influence of the predom- Hence, influence of machining voltage on UR is experimen-
inant process characteristics, i.e. machining voltage, elec- tally observed at 30 g/l concentration as shown in Fig. 2
trolyte concentration, frequency of pulsed power supply, and keeping other parametric conditions same. It has been
micro-tool feed rate, etc., on unit removal and side gap. Exper- observed from Fig. 2 that the UR increases with voltage and
imental results are plotted in the form of graphs to exhibit frequency at all the set of parametric combinations. Due to
the influence of different process parameters on UR and side the increase in machining voltage and frequency machining

Fig. 2. Influence of machining voltage on unit removal.


B. Bhattacharyya et al. / Journal of Materials Processing Technology 169 (2005) 485–492 489

Fig. 3. SEM micrographs of machined micro-holes at different parametric conditions: (a) 3 V, 45 Hz and 30 g/l; (b) 7 V, 45 Hz and 30 g/l; (c) 3 V, 55 Hz and
30 g/l.

current increases that leads to increase in current density. due to lower machining voltage though concentration of elec-
According to Faraday’s law, material removal is directly pro- trolyte is as the previous machining combination. At higher
portional to the machining current. However, Faraday’s law electrolyte concentration, variable local current distribution
is slightly deviated due to small narrow IEG, i.e. 5–15 ␮m, results in stray current effect. Reducing the electrolyte con-
where polarization voltage is not constant, and it may lead centration eliminates this type of effect. Again, the higher
to non-uniform UR. Hence, Faraday’s law cannot be applied accuracy of the machined micro-hole has been observed
directly in the micromachining without considering the value because of higher frequency. At higher frequency, number
of the IEG. In 55 Hz frequency, UR increases slowly from 3 to of pulse off-time increases which helps to remove machined
5 V as compared to other combinations. Increase in machin- products from IEG results in controlled machining, which
ing voltage leads to high dissolution rate, i.e. unit removal. improves accuracy.
The figure represents the chances of overtaking the curves
each other slightly due to the occurrence of shortcomings 4.2. Influence of machining parameters on accuracy
during experiments, e.g. micro-sparks, improper electrolyte
flow and other constraints in the mechanical unit. Fig. 4 shows the influence of machining voltage on side
Fig. 3(a) exhibits the SEM micrograph of a machined gap. From graph, it is noted that in 35 Hz frequencies, the
micro-hole at a particular parametric condition, i.e. 3 V side gap is almost same and slightly varied for different
machining voltage, 45 Hz frequency, 30 g/l electrolyte con- voltages, i.e. 3, 5 and 7 V. In 55 Hz frequencies condition,
centration, 0.144 mm/min feed rate and pulse on–off ratio side gap increases almost linear with higher slope with volt-
of 2:1. In this condition, unit removal is less and stray cur- age and in case of 45 Hz frequencies, side gap is increased
rent effect also low. Small irregularities can be observed slightly from 3 to 5 V, after that it rapidly increased. Due to
at the circumference of the machined micro-hole from the the increase of machining voltage, the localization effect of
micrograph. These irregularities are caused by the genera- current flux flow decreases. Stray current flow increases in
tion of micro-sparks. At this low parametric condition, i.e. the machining zone due to the poor localization effect, in
3 V, 45 Hz and 30 g/l, unit removal is less than the micro-tool turn affecting the more material removal from the larger sur-
feed rate and leads to increase chances of contact between face area of the work piece, which cause the increment in
micro-tool and job, which generates micro-sparks initially, side gap. The side gap is also due to generation of micro-
and finally, it tends towards short circuit. At higher paramet- sparks. In higher voltage and frequencies, electrochemical
ric condition, i.e. 7 V machining voltage, 45 Hz frequency, reactions generate hydrogen gas bubbles and those bub-
30 g/l electrolyte concentration, 0.144 mm/min feed rate and bles breakdown resulting in the occurrence of micro-sparks.
pulse on–off ratio of 2:1, higher stray current affected area and This sparking causes uncontrollable material removal in the
irregularities like pitting are observed in work piece machined larger area of work piece which in turn produces larger side
surface as shown in Fig. 3(b). Higher voltage and higher elec- gap.
trolyte concentration increases the dissolution process and it Fig. 5 shows the effect of machining voltage and frequency
generate larger amount of hydrogen. This hydrogen bubbles on accuracy and surface integrity in the form of stray current
disrupt the electrolyte flow in the narrow IEG, due to for- affected area at a particular parametric condition, i.e. 30 g/l
mation of cavitations at higher voltage and frequency, cause electrolyte concentration, 0.144 mm/min feed rate and pulse
the onset of micro-sparks. These micro-sparks increase mate- on–off ratio of 2:1. In 30 g/l electrolyte concentration, stray
rial removal from the larger job surface. Fig. 3(c) exhibits the current effect on machined surface is more predominant. Feed
SEM micrograph at a particular parametric condition, i.e. 3 V rate is selected as low as possible to achieve higher accuracy
machining voltage, 55 Hz frequency, 30 g/l electrolyte con- and surface finish. Pulse period in the ratio of 2:1, increases
centration, 0.144 mm/min feed rate and pulse on–off ratio unit removal. From graph, it is noted that the radial stray
of 2:1 that produces higher shape accuracy, i.e. less stray current affected area, i.e. radial stray cut is increased with
current affected area and irregularities and maximum pos- increase in frequency. Increase in frequency causes reduc-
sible amount of unit removal. From the micrograph, it is tion in pulse period and number of pulses is increased. The
observed that a little amount of stray current effect, which is average pulse on time is increased because it is twice the off-
490 B. Bhattacharyya et al. / Journal of Materials Processing Technology 169 (2005) 485–492

Fig. 4. Influence of machining voltage on side gap.

time. Due to the increment in average on time period during the onset of micro-spark, which results in larger area of mate-
machining effect of localization of electrochemical dissolu- rial removal.
tion reduces, which in turn increases the larger area of stray
current effect. In high frequency, number of short pulses is 4.3. Effect of micro-sparks phenomena on machining
more and pulse off-time is less, i.e. half of the on time, to accuracy
remove the reaction products. All the reaction products are
not removed within the short span of off-time. These reaction EMM machining accuracy, i.e. dimension, shape, surface
products stuck in-between job and micro-tool during pulse on finish and surface integrity will be influenced by the occur-
time and cause the onset of micro-sparks generation and it rence of micro-sparks in the narrow micromachining zone,
finally tends towards larger area of material removal. In 35 Hz which may not be possible to eliminate completely through
condition, line representing 5 and 7 V is showing higher radial the existing EMM set up. These sparks are occurring due
stray cut, which is due to micro-sparks. In 45 Hz, 3 V condi- to the variation in the machining parameters apart from tool
tion, higher radial stray cut area has been observed compared feed rate, accumulation of sludge and gas bubbles in the very
to 5 V. In 3 V and 45 Hz, linear material removal is low and it small inter electrode gap, etc. Fig. 6 shows the nature of
falls beyond the micro-tool feed rate sometimes and causes pulse pattern during the onset of micro-sparks phenomena

Fig. 5. Influence of machining voltage on radial stray cut.


B. Bhattacharyya et al. / Journal of Materials Processing Technology 169 (2005) 485–492 491

for finding out most optimal value of micro-tool feed rate at


different parametric combinations.

4.3.2. Electrolyte flow


Improper flow of electrolyte will also result in micro-
sparks. During micromachining, the hydrogen gas generation
and evaporation of water in the small IEG due to heating
increase the electrolyte concentration and viscosity. The high
concentrated viscous electrolyte is not able to remove all the
reaction products from the narrow machining zone. Hydro-
dynamic disturbance due to change in viscosity affects the
distribution for diffusion layer thickness on the micromachin-
ing zone, which influence the electrochemical dissolution
process to a great extent. There is a possibility of forming
reaction products in-between micro-tool and work piece that
result in the generation of micro-sparks and short circuit-
ing. Low-pressure electrolyte jet from two nozzles directing
the flow of the electrolyte just to the micromachining zone
was utilized for the present set of experiments. This type of
micro-sparks can be avoided by using only fresh electrolyte
with effective flow path design.

4.3.3. Inter electrode gap


In EMM, the IEG should be maintained very small and nar-
row for achieving higher machining accuracy in the microma-
chining domain. The IEG should be maintained in the range
of 5–15 ␮m for effective micromachining operation. Reac-
tion products that are formed during machining are removed
Fig. 6. On-line pulse pattern during micro-sparks at 7 V, 55 Hz and 20 g/l. from IEG by means of low-pressure electrolyte jet. During
this process, there be possibility of sticking reaction prod-
ucts in-between micro-tool and work piece, which cause for
during micromachining. Some of the reasons, which cause generation of micro-sparks. These sparks could be reduced
the occurrence of micro-sparks are observed and monitored by using acidic electrolyte and vibration of the micro-tool.
during experimentation are enumerated below. Acidic electrolyte does not produce any insoluble reaction
products during machining. Piezoelectric transducer (PZT)
4.3.1. Micro-tool feed rate is used for vibrating micro-tools, which can enhance the end
Micro-tool feed rate should be always less than the linear gap during pulse off-time that will result in reduction or elim-
material removal rate, for performing effective microma- ination of micro-sparks generation.
chining. For the present set of experiments, the feed rate is Fig. 6 shows pulsed voltage fluctuation during micro-spark
maintained constant, i.e. 0.144 mm/min, for different combi- generation at a condition of 7 V machining voltage, 55 Hz
nations of machining parameters like frequency, machining frequency and 20 g/l electrolyte concentration. It shows the
voltage and electrolyte concentration. Machining performed nature of DC pulsed voltage during micromachining oper-
with higher rate of parameter setting, i.e. 55 Hz frequency, ation obtained from high-speed digital storage oscilloscope
7 V machining voltage and 30 g/l of electrolyte concentration and further analyzed with the help of Wave Form software.
produces higher linear material removal rate, i.e. higher Fig. 6 also shows the occurrence of micro-sparking during
than the present micro-tool feed rate. This increases the machining and the influence of it on the voltage pulse in
chances of onset of micro-sparks initially and finally, it larger scale (zoom). From figure, it has been observed that the
tends towards short circuit. But with 35 Hz frequency, 3 V sparks are less. In this condition, linear material removal rate
machining voltage, 10 g/l of electrolyte concentration, linear is higher than tool feed rate 0.144 mm/min. However, some
material removal rate is drastically reduced and fall beyond sparks occur during machining due to hydrogen gas bubble
the micro-tool feed rate. When the process parameters are formation. In high voltage and frequency, machining reac-
reduced to a lower value, the possibilities of micro-sparks tions are more and it can generate large amount of hydrogen
in the existing experimental procedure, i.e. constant tool gas, these hydrogen gas bubbles breaks up at high voltage and
feed rate might be reduced to a grater extent. Selection of causes the onset of sparking. From SEM micrograph (Fig. 7),
suitable tool feed rate will reduce the chance of occurrence it is clearly visible that the effect of stray current and spark-
of micro-sparks. Further experiments are to be carried out ing, which leads to uneven material removal and irregularities
492 B. Bhattacharyya et al. / Journal of Materials Processing Technology 169 (2005) 485–492

investigation for better control of the EMM system during


machining operation, i.e. precise control of inter electrode
gap and micro-tool feed rate. This experimentation can be fur-
ther improved by eliminating some of the shortcomings like
generation of micro-sparks, precise motion of the work piece,
proper design of electrolyte flow path and proper coating of
micro-tools, etc. Finally, the research in the area of micro-
machining will be an important substitution and will fulfill
various urgent needs of the modern electronic and related pre-
cision industries especially in the area of microfabrication and
micromanufacturing. Hence, the present experimental values
and subsequent discussions and analysis of EMM process
Fig. 7. SEM micrograph of machined micro-hole at a particular parametric characteristics will provide the basic incite to the researchers
condition, i.e. 7 V, 55 Hz and 20 g/l. for working in the area of micromachining and precision man-
ufacturing industries.
in the edge surface at high parametric combination, i.e. 7 V,
55 Hz and 20 g/l. The edge of the machined micro-hole is
uneven and not smooth due to the generation of micro-sparks References
during machining.
[1] B. Bhattacharyya, B. Doloi, P.S. Sridhar, Electrochemical microma-
chining: new possibilities for micro manufacturing, J. Mater. Process.
Technol. 113 (2001) 301–305.
5. Conclusions [2] M. Datta, L.T. Romankiw, Applications of chemical and electro-
chemical micromachining in the electronic industry, J. Electrochem.
Process parameters, such as micro-tool feed rate, elec- Soc. 136 (6) (1989) 2850–2857.
trolyte flow, pulse period and pulse on–off ratio have been [3] M. Datta, D. Harris, Electrochemical micromachining: an environ-
successfully maintained at the desired values during all sets of mentally friendly, high speed processing technology, Electrochim.
Acta 42 (20–22) (1997) 3007–3013.
experiments. Experimental study is successfully conducted [4] M. Datta, D. Landolt, Fundamental aspects and applications of
on the developed EMM system to know the influence of electrochemical microfabrication, Electrochim. Acta 45 (2000)
predominant process parameters on material removal and 2535–2558.
accuracy. Process parameters like applied machining volt- [5] D. Landolt, P.F. Chauvy, O. Zinger, Electrochemical micromachin-
age, electrolyte concentration and frequency have significant ing, polishing and surface structuring of metals: fundamental aspects
and new developments, Electrochim. Acta 48 (2003) 3185–3201.
effect on UR and accuracy. UR increases with the increase [6] B. Bhattacharyya, J. Munda, Experimental investigation on the influ-
of electrolyte concentration, applied machining voltage and ence of electrochemical machining parameters on machining rate and
frequency, but the increment of unit removal detoriates the accuracy in micromachining domain, Int. J. Mach. Tools Manuf. 43
accuracy of the product. It is observed from the experimental (2003) 1301–1310.
analysis that at higher frequency, medium concentrated elec- [7] M. Datta, R.V. Shenoy, L.T. Rominkiw, Recent advances in the study
of electrochemical micromachining, Trans. ASME 118 (1996) 29–36.
trolyte and average machining voltage, i.e. 55 Hz, 20 g/l and [8] J. Kozak, K.P. Rajurkar, Y. Makkar, Selected problems of micro-
3 V, respectively, the desired accuracy can be achieved with electrochemical machining, J. Mater. Process. Technol. 149 (2004)
highest possible amount of material removal. It is evitable 426–431.
from SEM micrographs that higher accuracy at moderate [9] C.V. Osenbreggen, C.A. Regt, Electrochemical micromachining,
material removal is achieved through short machining volt- Philips Tech. Rev. 42 (1985) 22–32.
[10] A.K.M. De Silva, J.A. McGough, Process monitoring of electro-
age pulses, i.e. at 55 Hz frequency of machining voltage. The chemical micromachining, J. Mater. Process. Technol. 76 (1998)
detail analysis of micro-sparks phenomena in the machining 165–169.
gap with the help of digital storage oscilloscope and wave- [11] R. Schuster, M. Kock, V. Kirchner, Electrochemical micromachining
form viewer software, and various SEM micrographs of the with ultra short voltage pulses: a versatile method with lithographical
machined micro-holes establish the fact that the selection precision, Electrochim. Acta 48 (2003) 3213–3219.
[12] R. Schuster, V. Kirchner, P. Allongue, G. Ertl, Electrochemical
of optimal parametric setting is essential to achieve higher micromachining, Science 289 (2000) 98–101.
machining accuracy and better surface integrity of the micro- [13] S.H. Ahn, S.H. Ryu, D.K. Choi, C.N. Chu, Electro-chemical micro-
machined products. drilling using ultra short pulses, Precis. Eng. (2003).
The research activities on electrochemical micromachin- [14] K. Chikamori, Possibilities of electrochemical micromachining, Int.
ing will open up many challenging possibilities for effective J. Jpn. Soc. Precis. Eng. 32 (1) (1998) 37–38.
[15] L. Yong, Z. Yenfei, Y. Guang, P. Liangqiang, Localized electrochem-
utilization of electrochemical material removal mechanism in ical micromachining with gap control, Sens. Actuators A Phys. A
micromanufacturing. The ultra short pulses also significantly 108 (2003) 144–148.
increase the machining accuracy. High off-time group pulses [16] D. Zhu, H.Y. Xu, Improvement of electrochemical machining accu-
are recommended for enhancing the accuracy and surface racy by using dual pole tool, J. Mater. Process. Technol. 129 (2002)
finish. However, this area of research still requires further 05–18.

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