Professional Documents
Culture Documents
Abstract
This article reviews shearography and its applications. Shearography is a laser-based technique for full-field, non-
contacting measurement of surface deformation (displacement or strain). It was developed to overcome several
limitations of holography by eliminating the reference beam. It does not require special vibration isolation; hence, it is
a practical tool that can be used in a field/factory environment. Shearography has already received considerable
industrial acceptance, in particular, for non-destructive testing. In non-destructive testing, shearography reveals
defects in an object by identifying defect-induced deformation anomalies. Other applications of shearography include
strain measurement, material characterization, residual stress evaluation, leak detection, vibration studies and 3-D
shape measurement.
# 2005 Elsevier B.V. All rights reserved.
Keywords: Shearography; Interferometry; Speckle pattern; Phase determination; Non-destructive testing; Deformation
measurement; Residual stress measurement; Vibration study; Leakage detection; Surface profiling; 3-D shape measurement
1. Introduction
* Corresponding author. Tel.: +852 2788 9527; fax: +852 2788 7498.
E-mail addresses: mehead@cityu.edu.hk (Y.Y. Hung), hpho@ee.cuhk.edu.hk (H.P. Ho).
0927-796X/$ – see front matter # 2005 Elsevier B.V. All rights reserved.
doi:10.1016/j.mser.2005.04.001
62 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
Fig. 1. Schematic diagram of photographic shearography. (a) The image-shearing camera is equipped with a roof-shape
prism, which produces a pair of laterally sheared images. (b) Conversely, the roof-shape prism (as shearing device) brings
rays scattered from two neighboring object points to meet and interfere in the image plane.
the image plane (illustrated in Fig. 1(b)). The direction of the sheared images is known as the direction
of image-shearing. Since the object is illuminated with laser light (light capable of interference), the
two sheared images interfere with one another, forming a shearographic image containing a random
interference pattern known as a speckle pattern. Shearographic measurement requires sequential
recording of two speckle patterns on the same photographic plate, one before and another after the
object is slightly deformed. After being developed and chemically fixed, the photographic plate is
optically Fourier-filtered for the reconstruction of a visible fringe pattern that depicts the derivatives of
displacement with respect to the direction of image-shearing. This technique is also known as double-
exposure shearography. Since double-exposure shearography requires subsequent Fourier filtering, it
does not permit real-time applications. Another technique known as real-time shearography [2]
eliminates the Fourier filtering process and allows object deformation to be observed continuously in
real-time. It involves recording of a single speckle pattern on a photographic plate before deformation.
The photographic plate after being processed is returned to the original position in the camera, which
serves as a filter for the live image of the object. When the object is deformed, a ‘‘live’’ fringe pattern is
observed behind the plate. It is difficult to practice real-time shearography as it requires precise
reposition of the plate after developing. A major drawback of photographic recording lies with the
laborious and time-consuming wet photographic process. The cost of high-resolution photographic
plates has further discouraged industrial implementation.
The thermoplastic version [3] uses a similar optical setup (Fig. 1), except that the photographic
plate is replaced by a reusable thermoplastic plate, which may be instantly processed after recording.
This bypasses the inconvenient wet photographic process, but Fourier filtering is still required. Hence,
the thermoplastic version does not allow real-time measurements. The cost of the thermoplastic plates
has deterred industrial use of the thermoplastic version. Furthermore, the production of thermoplastic
plates of consistent quality is very difficult.
Digital shearography [4] uses video sensors (such as CCD) as the recording media and digital
processing technology for data acquisition and analysis. In addition to avoiding the use of con-
sumables needed in the photographic and thermoplastic versions, digital shearography does not
rely on Fourier filtering for fringe pattern reconstruction, thus enabling real-time measurements and
Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87 63
inspection. The cutting edge of digital shearography is in direct and automated measurement of phase-
changes (and hence, strains) without having to rely on fringe pattern reconstruction. In this paper,
digital shearography and its applications will be discussed.
As illustrated in Fig. 2, digital shearography requires the use of a laser point source for
illuminating the test object and a video image-shearing camera connected to a microcomputer for
recording and processing. The camera comprises a CCD image sensor and a double-refractive prism
(a Wollaston prism, for instance) as the image-shearing device. The principle of image-shearing using
a doubly-refractive prism is illustrated in Fig. 3. Fig. 3(a) shows that a light beam passing through this
prism is split into two angularly separated beams. Conversely, through the image-shearing device, two
non-parallel beams of light scattered from two different object points become nearly collinear, and the
resulting low spatial frequency of the interference fringes can be resolved with a low resolution image
sensor such as CCD. This is illustrated in Fig. 3(b). The two sheared wavefronts transmitted by the two
axes of the image-shearing device, however, are orthogonally polarized, hence they will not interfere
with each other. To enable interference, a polarizer with its polarization axis oriented at an azimuth of
458 is required. As the illuminated object surface is generally optically rough, interference of the two
sheared wavefronts will result in a speckle pattern embedded in the shearographic image. Fig. 4 shows
a magnified speckle pattern of a shearographic image.
The speckle pattern is slightly altered when the object is deformed. Practice of digital shearography
involves digitizing sequentially two speckle patterns of the test object, one before and another after it is
slightly deformed, into the microcomputer via a frame grabber (Fig. 2). As will be shown in Section 2.2,
the difference of the two speckle patterns will enable reconstruction of a visible fringe pattern that depicts
displacement-derivatives with respect to the direction of image-shearing. The use of a frame grabber with
on-board processing capability further allows real-time fringe pattern reconstruction at video rate.
Although digital shearography may also be achieved using a Michelson shearing interferometer [5,6],
the authors have preference for a double-refractive prism, as it is more light efficient; having wider field
of view, and it produces higher quality fringes. Recently, a unified approach [7] using a Wollaston prism
to practice both shearographic and holographic measurement is reported.
I ¼ I0 ½1 þ m cos f (1)
Fig. 2. Schematic diagram of digital shearography. Note that a double-refractive prism is used as a shearing device.
64 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
Fig. 3. Illustration of the doubly refractive prism as a shearing device. (a) One light beam is split into two angularly separated
and orthogonally polarized beams. (b) Conversely, two non-parallel rays scattered from two different points on the object are
combined and become collinear.
where I is the intensity distribution of the speckle pattern received at the image plane of the camera, I0
the intensity of the laterally sheared images (which may be perceived as the dc term), m the amplitude
of modulation of the speckle pattern, and f is a random phase-angle. After the object is deformed, the
intensity distribution of the speckle pattern is changed slightly to I0 , which is described by the
following equation:
I 0 ¼ I0 ½1 þ m cos ðf þ DÞ (2)
where D denotes phase-change due to surface deformation.
Note that both Eqs. (1) and (2) contain the random phase-angle f; therefore, no readily
interpretable information can be deduced by looking at the images. However, computing the
difference of the intensities of the two speckle patterns (Eqs. (1) and (2)) yields a visible fringe
The phase-change D in Eq. (2) is induced by the change in the relative optical path length of light
scattered from two neighboring object points, P(x, y, z) and P(x + dx, y, z), considering that the
direction of image-shearing is parallel with the x-axis and the amount of shearing is dx. It may be
shown that D is related to the relative displacement (du, dv; dw) of the two neighboring points as
follows.
2p
D¼ ðA du þ B dv þ C dwÞ (4)
l
where (u, v, w) and (u + du, v + dv, w + dw) are, respectively, the displacement vectors of P(x, y, z) and
P(x + dx, y, z), l the wavelength of the laser, and A, B, C are sensitivity factors that are related to the
positions of the illumination point S(xs, ys, zs) and the camera O(x0, y0, z0) in the following manner:
ðx x0 Þ ðx xs Þ
A¼ þ
R0 Rs
ðy y0 Þ ðy ys Þ
B¼ þ (5)
R0 Rs
ðz z0 Þ ðz zs Þ
C¼ þ
R0 Rs
Fig. 5. Fringe patterns depicting the deflection-derivatives of a rectangular plate clamped along its boundaries and subjected
to uniform pressure: (a) @w/@x and (b) @w/@y.
66 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
with
R20 ¼ x20 þ y20 þ z20 and R2s ¼ x2s þ y2s þ z2s
It is noted that z = z(x, y) describes the object surface and is not an independent variable when surface
points are considered. Eq. (4) may be rewritten in the following form:
2p du dv dw
D¼ A þB þC dx (6)
l dx dx dx
Slight image-shearing gives rise to a small value of dx. The relative displacement terms in Eq. (6)
may subsequently be treated as the partial derivatives of u, v and w with respect to the direction of
image-shearing x. Thus, Eq. (6) becomes:
2p @u @v @w
D¼ A þB þC dx (7)
l @x @x @x
Rotating the image-shearing device (Fig. 2) about its optical axis will alter the direction of image-
shearing, resulting in fringe patterns depicting displacement-derivatives with respect to the current
direction of image-shearing. Hence, if image-shearing is along the y-axis by an amount dy, Eq. (7) is
modified to the following:
2p @u @v @w
D¼ A þB þC dy (8)
l @y @y @y
The fringe patterns in Fig. 4(a and b) for a laterally deflected plate therefore represent,
respectively, @w/@x and @w/@y. Subsequently, it is possible to use a multiple image-shearing camera
[8] for simultaneous recording of displacement-derivatives with respect to x and y.
Traditional methods of shearographic analysis rely on the reconstruction of visible fringes and the
correct identification of fringe orders (Eq. (3)). Therefore, only at locations where the dark and bright
fringes appear can the fringe orders be correctly determined; elsewhere the fringe orders are generally
estimated using linear interpolation, although the fringe-carrier method has been developed to
alleviate the uncertainty. The following describes an automated process in which the phase-change
D is directly determined at every digitized points without having to rely on fringe reconstruction and
fringe order identification. It will be seen that this has constituted a significant advantage of digital
shearography.
Perusal of Eqs. (1) and (2) shows four unknowns, namely, I0, m, f, and D; and by superimposing
known phases to Eqs. (1) and (2), additional equations are generated to solve for these unknowns. This
forms the basis of the phase-shift technique for automated phase determination in digital shearo-
graphy. Several methods are available for effecting phase-shifting: (1) tilting the object, (2) tilting the
object beam, (3) translating the image-shearing device, (4) wavefronts manipulation by polarization,
and (5) using a variable wave retarder. Among these methods, the authors prefer the use of variable
wave retarder.
Fig. 6 shows an optical layout for phase-shifting using a variable wave retarder that is made of
liquid crystal and controlled by a computer. The wave retarder is placed in front of the image-shearing
device, and at the same time, its slow and fast axes are aligned with the two polarization axes of
the image-shearing device. This allows manipulation of the phase difference between two sheared
wavefronts (see Eq. (9) below). Various algorithms for phase determination from multiple
Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87 67
Fig. 6. Digital shearography with phase-shift capability. The phase-shift device is a computer-controlled variable wave
retarder made of liquid crystal.
phase-shifted speckle images are available [9]. In this paper, only the four-frame algorithm is
described. Digitizing four speckle patterns of Eq. (1) with a phase-shift increment of p/2 generates
the following four equations:
I1 ¼ I0 ½1 þ m cosðf þ 0Þ
fþp
I2 ¼ I0 1 þ m cos
2
(9)
I3 ¼ I0 ½1 þ m cosðf þ pÞ
f þ 3p
I4 ¼ I0 1 þ m cos
2
The phase distribution f is thus determined using the following equation:
ðI2 I4 Þ
f ¼ arctan (10)
ðI3 I1 Þ
The process is repeated for the deformed speckle pattern of Eq. (2), yielding:
ðI20 I40 Þ
f þ D ¼ arctan (11)
ðI30 I10 Þ
The phase-change distribution D due to deformation is subsequently determined by subtracting
Eq. (10) from Eq. (11). However, the computed phase-change D is wrapped into the range of p
and +p, and the phase unwrapping algorithm proposed by Macy [10] may be used to unwrap the
phase. It should be noted that the determination of D is based upon the assumption that the random
phase f remains unchanged during deformation; otherwise f cannot be totally cancelled from
68 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
Fig. 7. Three-dimensional plot of: (a) @w/@x, (b) @w/@y of the plate deformation of Fig. 5 obtained by the automated phase
determination algorithm.
Eqs. (10) and (11). A problem likely to encounter during the phase unwrapping process is the
presence of noise. The iterative noise suppression algorithm [11] is found to be very effective in
alleviating the problem. Fig. 7 shows a 3-D phase-change distribution plot for the fringe patterns of
Fig. 5(a and b).
3. Applications
Eq. (7) contains three displacement-derivatives, namely, @u/@x, @v/@x and @w/@x so that three
measurements with different sensitivity factors A, B, C are required to separate these displacement-
derivatives. However, if the geometrical dimensions of the object are small compared to the distances
of illumination and recording, the sensitivity factors may be approximated as follows:
A ¼ sina
B ¼ sinb (12)
C ¼ ð1 þ cosgÞ
where a and b are the angles of illumination made, respectively, with the yz-plane and the xz-plane, g
is the angle between the illumination beam and the z-axis, which is designated as the imaging
direction.
Arranging the optical layout so that b = 0, the sensitivity factor B becomes zero and the
measurement is insensitive to @v/@x. Therefore, the optical system measures the combination of
@u/@x and @w/@x. Likewise, for an optical layout with a = 0, the combination of @v/@x and @w/@x is
measured. However, it is not possible to isolate @v/@x, as the sensitivity factor C can never attain a zero-
value.
Using a similar optical setup, the three displacement-derivatives in Eq. (8) may also be
determined. Thus, three-beam shearography is developed for the measurement of general surface
deformation [12].
If the illumination and imaging directions are both made parallel with the z-axis, the sensitivity
factors A and B attain a zero-value. This optical arrangement, therefore, measures only @w/@x. The
deformation fringes shown in Fig. 5 are obtained with this optical arrangement.
Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87 69
In-plane strains are expressed by the following two normal surface strain components and a
shear strain component:
@u
ex ¼
@x
@v
ey ¼ (13)
@x
@u @v
gxy ¼ þ
@x @x
It is not possible to measure in-plane displacement-derivatives free of out-of-plane displacement-
derivatives with the use of single-beam illumination (Section 3.1). This, however, is made possible
with dual-beam shearography [13]. As illustrated in Fig. 8, the test object is alternately illuminated
with two collimated laser beams inclined at equal angles with the z-axis (direction of recording), and
the orientation of the beams depends on the in-plane strain component to be measured. In Fig. 8, the
directions of the illuminating beams are made symmetrical with respect to the yz-plane so that only ex
is measured. During measurement, the deformation-related phase-change is determined for each
illuminating beam using the phase-shift technique described in Section 2.4. With the same deforma-
tion, the difference of the two phase-changes due to different directions of illumination yields ex.
Fig. 9(a) shows the ex-fringes of an end-loaded cantilever. The theoretical fringe pattern in Fig. 9(b)
shows good agreement with the experiment.
The principle of dual-beam shearography is outlined as follows. The phase-change due to
illumination from the right-hand side is given by the following equation:
2p @u @w
Dr ¼ ðsin aÞ þ ð1 þ cos aÞ dx (14)
l @x @x
Fig. 9. Fringe patterns depicting ex, the horizontal in-plane strain component of the cantilever beam. (a) Result of the dual-
beam shearography and (b) theoretical result.
With the same deformation, the phase-change due to illumination from the left-hand side modifies
Eq. (14) to the following expression:
2p @u @w
Dl ¼ ðsin aÞ þ ð1 þ cos aÞ dx (15)
l @x @x
Subtracting Eq. (15) from Eq. (14) yields the difference of phase-change Dd due to different
illuminating directions. Thus:
4p @u
Dd ¼ Dr D l ¼ ðsin aÞðdxÞ (16)
l @x
which, with reference to Eq. (13), is related to the normal strain component ex. Should the illuminations
be made symmetrical with the xz-plane and the image-shearing direction parallel with y, the term @u/@x in
Eq. (16) is replaced by @v/@y, which represents ey. In a similar manner, in-plane strain components along
any direction may be measured through adjusting the orientation of the illuminating beams. With three
different orientations of illumination, the measurement system is equivalent to a full-field strain rosette
that enables determination of the complete state of in-plane strain.
The dual-beam scheme also allows the out-of-plane displacement-derivatives to be deduced. This
is achieved by adding Eqs. (14) and (15) together, allowing direct measurement of @w/@x, from the
phase sum Ds that is given by:
4p @w
Ds ¼ Dr þ Dl ¼ ð1 þ cos aÞðdxÞ (17)
l @x
and @w/@y may also be determined in a similar manner.
The optical arrangement of Fig. 10 can be used to compare the deformation of two different
objects. In the setup, a point coherent light source simultaneously illuminates two different objects (a
test object and a reference object), and a doubly refractive shearing crystal with a large shear is used to
bring the images of the two objects to combine and interfere in the CCD sensor of the camera. In this
arrangement, one object serves as a reference for the other. When both objects are deformed, the fringe
pattern generated depicts the difference of the deformations between the two objects. If only one
object (test object) is deformed, the setup measures the surface displacement of the test object. Indeed,
this yields the same results of holography or electronic speckle pattern interferometry (ESPI).
Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87 71
Fig. 10. Optical arrangement for comparing deformations of two different objects. Note that if the reference object is not
deformed, the setup is equivalent to ESPI which measures surface displacement of the test object.
The optical setup, however, is greatly simplified. Fig. 11 shows a fringe pattern obtained with this
method, which measures the deflection of a rectangular plate clamped along its boundaries and
objected to a point load at the center.
The use of strain gage rosettes to determine the amount of strain released through controlled
drilling of a blind hole is a common practice in residual stress measurement. This requires mounting of
special strain gage rosettes and critical alignment of the drilled hole with respect to the positions of the
gages. The finite size of the rosette discourages measurements close to the boundary of the drilled
holes. For small test objects, such as those found in microelectronic packages, bonding of these
rosettes is not possible. And for materials with low stiffness, strain gages would alter the real structural
behavior. Shearography, being equivalent to a non-contacting optical strain rosette, has been applied to
the measurement of residual stresses in plastics and composites [16]. Fig. 12 shows three fringe
patterns, revealing different extent of residual stresses in the test structure when it is stress-released
using hole-drilling.
Rapid shearographic residual stress measurement may be achieved using micro-indentation
instead of hole-drilling. An image-shearing device with large shearing is used so that the speckle
72 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
Fig. 11. Fringe pattern depicting the deflection of a rectangular plate using the setup of Fig. 10 with the reference object not
deformed.
pattern is formed by optical wavefronts emitted from two remotely located areas on the test object.
This is equivalent to comparing the deformation of two different areas with one acting as reference
to the other. With localized deformation due to stress releasing by micro-indentation, the area outside
the indentation will hardly be affected by the stress-release and, hence, it appropriately acts as a
reference surface. Thus, this technique measures absolute displacements in the neighborhood of the
indentation.
Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87 73
Fig. 12. (a–c) Fringe patterns depicting three different levels of residual stresses in a composite panel.
Using micro-indentation, Fig. 13(a) shows that, for a test object without residual stresses, the
fringes are nearly axially symmetrical. However, the presence of residual stresses will give rise to an
asymmetrical fringe pattern (Fig. 13(b)). The directions of the principal stresses are those of the axes
of symmetry, and the magnitude of the residual stresses is related to the degree of deviation from axis-
symmetry. As the mechanics of stress redistribution due to stress releasing by micro-indentation is
74 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
Fig. 13. Fringe patterns using micro-indentation as a means of stress release: (a) without residual stress and (b) with residual
stress.
highly complex, research is currently being conducted to quantitatively determine the residual
stresses. Nonetheless, this technique provides a quick means of qualitative analysis of residual
stresses, and may be used in a field/production environment. Moreover, the indentation is so small and
shallow (only several micrometers depth) that this technique may be considered as being non-
destructive.
which readily shows a visible fringe pattern. Dark fringes are formed when the following condition is
satisfied:
@A
J0 k ¼0 (21)
@x
The variable @A/@X is determined by equating the argument of the Bessel function to its roots.
Fig. 14 shows typical fringe patterns and the corresponding plots depicting the amplitude and the
amplitude derivative of a fully clamped rectangular vibrating at its fundamental mode of 630 Hz.
Fig. 14. Time-integrated fringe patterns depicting (a) the vibrational amplitude and (b) the amplitude derivative with respect
to x of a rectangular plate vibrating at its fundamental mode; their corresponding plots along the plate’s horizontal center line
are shown in (c) and (d), respectively.
76 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
Fig. 15. Result of stroboscopic shearography of a vibrating plate at 3.07 KHz. (a–b) Phase maps before and after
unwrapping, (c–d) 2-D and 3-D display of the amplitude-derivative with respect to x.
Time-dependent deformation may be measured by the technique [20] which continuously digitizes
the speckle patterns of a deforming object. The relationship between displacement-derivative and time at
a point of interest is extracted from the time-varying phase-change map that is recorded and stored in the
computer memory, and the total phase-change is subsequently obtained by integrating the phase-change
curve with respect to time. For low strain-rates, a commercial video-cassette recorder may be used to
record the speckle patterns at the speed of 30 frames/s. For deformation with high strain-rates, high-
speed shearography [21] is developed using a high-speed digital image acquisition system. The image
acquisition system used by the authors is a Kodak EktaPro Model 4540 High-Speed Motion Analyzer,
which has the maximum frame speed of 40,500 frames/s. After recording, the images can be played-back
at variable rates ranging from 2 to 30 frames/s. The playback images are then digitized with a
microcomputer through a frame grabber. A fringe pattern may also be reconstructed from the difference
of any two speckle patterns. Besides the measurement of time-dependent deformation, high-speed
shearography has been used for rapid evaluation of hermetic seals in microelectronic packages [22].
would cause anomalies in the surface strain distribution. Subsequently, these anomalies are translated
into fringe-anomalies if two speckle patterns, taken one before and another after loading, of the object
are compared. Thus, shearography reveals flaws, both surface and internal, through identification of
anomalies in the fringe pattern; it also permits non-contacting full-field inspection.
Fig. 16. Comparison of shearography with C-scan ultrasound. An edge pullout and a delamination in a composite panel are
revealed by both techniques. Time required: 10 min for ultrasound and 1 s for shearography. Moreover, fluid coupling is
needed in ultrasonic testing.
78 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
Fig. 17. The use of internal pressurization detects two internal cracks in a steel pressure vessel.
Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87 79
Fig. 18. Fringe pattern reveals several areas of separation in a large cord-reinforced rubber panel. The method of stressing is
partial vacuum.
Shearography has been widely adopted by the rubber industry for inspecting debonds and other
imperfections in tires. The technique was specified by the US Federal Aviation Administration (FAA)
for inspecting aircraft tires. Tires are complex laminated composite structures and vacuum stressing is
well suited for testing tires. The test tire without mounting wheel is placed inside the vacuum chamber
in which the pressure can be reduced. During testing, the tire interior is illuminated with laser light and
imaged by a shearographic camera; two shearographic images are sequentially digitized with the
chamber pressure slightly reduced (by around 50 mmHg). Computing the difference of the two images
produces a fringe pattern allowing tire imperfections to be identified. Fig. 21 shows a sample fringe
pattern revealing separations along the steel belt-edge of a truck tire.
Fig. 19. Detection of a crack on a composite turbine blade using thermal stressing. The object was heated with a hair dryer.
proportional to the flexural rigidity of the plate, and the flexural rigidity is proportional to the cube of the
plate thickness. The model considers an equivalent plate of thickness equal to the depth of the debond
measured from the illuminated surface, and the shape and size of the equivalent plate follows that of the
debond. Furthermore, the equivalent plate is treated as elastically supported along its boundary and is
subjected to a uniform lateral pressure equal to the applied vacuum. This means, for equal size debonds,
the density of the fringes is inversely proportional to the cube of the depth. An in-depth analysis of the
response of debonds can be found in Refs. [28,29].
Shearography can be used to measure surface slopes @Z/@X and @Z/@Y of a three-dimensional
object surface, Z(x, y). The following describes three shearographic methods for shape measurement.
Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87 81
Fig. 20. Shearographic inspection of adhesive-bonded lines in composite assemblies using multi-frequency vibrational
excitation. There are two bonded lines. Perfect bond lines should dark, and any deviation from darkness is indicative of weak
bond.
This method requires the use of a laser of variable wavelength. A diode laser is one such laser
whose wavelength varies with the controlling current. Using an optical arrangement similar to that
shown in Fig. 2, two speckle patterns of the test surface are sequentially digitized, one before and the
Fig. 21. Shearographic fringe pattern revealing separation along the steel belt-edge of a truck tire.
82 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
Fig. 22. Fringe patterns of debonds at the various depths (3, 6, 9 and 12 mm). Note that the one closest to the surface has the
highest fringe density and vice versa.
other after the wavelength of the laser is changed incrementally from l to l + dl. The difference of the
two speckle patterns produces a fringe pattern depicting the derivative of the surface depth Z(x, y) with
respect to the direction of image-shearing, since the phase-change D is related to the surface slope by
the following equation:
dl @Z
D ¼ 4pdx 2 (22)
l @x
where x has been considered as the direction of image-shearing.
As the surface slope along any direction may be measured through adjusting the direction of
image-shearing, the @Z/@X-term in Eq. (22) becomes @Z/@Y when the direction of image-shearing is
made parallel with the y-axis. The phase-change D, and hence the surface slope, are automatically
determined using the phase-shift technique described in Section 2.4. Fig. 23(a) shows a fringe pattern
depicting @Z/@X of a light bulb, and Fig. 23(b) is a 3-D plot of the Z(x, y) obtained by integrating the
slope information of (a).
two digitized images. With image-shearing directed along the x-direction and with both the
illumination and imaging directions along the z-axis, the phase-change D is related to the surface
slope by the following equation:
4p @Z
D¼ ðdxÞðdnÞ (23)
l @x
Again, the surface slope in any direction may be obtained by varying the direction of image-shearing,
and the phase-shift technique can be used to automate the phase determination.
Fig. 23. (a) Fringe pattern depicting @Z/@x of a light bulb using the double wavelength method and (b) a 3-D plot of the
surface shape (Z) obtained by integrating the fringe-phase of (a).
84 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
Micro-electronic devices are key components in many industrial products. A common cause of
device failures is the malfunction of the device due to imperfect hermetic packaging. Imperfect sealing of
the devices allows moisture and other impurities to migrate into the package thereby causing micro-
circuit malfunctions. To date, testing of hermetic seals of microelectronic packages is achieved primarily
through helium leak detection, which is slow, cumbersome, and cannot be employed in production lines.
Shearography can be used for rapid evaluation of hermetic seals in microelectronic packages Evaluation
of hermetic seals in microelectronic packages is based on measuring the time-dependent deformation of
the package’s surface using shearography. The package to be tested is placed in an enclosure inside which
the pressured can be varied. When a change of pressure is applied, the package surface will be deformed.
If the package is perfectly sealed, the deformation will remain constant. Whereas, if the package leaks,
the deformation of package surface will gradually recover, causing a time-dependent deformation.
Hence, by measuring the deformaton of the package’s surface as a function of time with shearography,
leaky packages can be revealed. This process of detecting leaks in microelectronic packages is extremely
fast, typically within a couple of seconds. The conventional methods would probably require a couple of
hours. Fig. 24 shows a sample result of a leaky package.
The principle of this application is based on the phenomenon that gas leaking would change the
refractive index of the ambient air around the leak, thus producing a phase-change that manifests as a
visible fringe pattern. Fig. 25 shows a leakage from the valve of a pressure vessel containing helium.
It is seen that shearography not only detects gas leaks, but also reveals the location of leakage.
Fig. 25. A leakage from the valve of a pressure vessel. The escaping gas is helium.
To enhance the change in refractive index during inspection, it is preferable to use gas at the
surrounding of the test object different from the gas within the object. A good combination is helium
and air.
Being an optical method, shearography enjoys the desirable features of non-contact and full-field.
Although the method is based on interferometric principles, it does not require critical optical
alignment and extreme environmental stability. However, shearography suffers a severe drawback that
is inherent in all speckle interferometric techniques. This drawback is the limited tolerance to rigid-
body motion. Excessive rigid motion including object translation and rotation produces a de-
correlation of speckle patterns and it results in the deterioration of fringe visibility. The conventional
speckle de-correlation theory [34,35] predicts that total de-correlation will occur when the rigid-body
translation orthogonal to the line of sight exceeds a speckle size. (A speckle size is approximately 1.2
times the product of the f-number of the camera lens and the wavelength of laser light.) The authors’
experience has found that shearography’s tolerance to rigid-body translation is at least an order of
magnitude greater than that predicted by theory. Generally, this tolerance depends on surface
characteristics such as surface roughness, and magnitude of strain. Though more tolerant, de-
correlation of speckle patterns limits its use for many real-world applications, especially for large
objects as excessive rigid-body motion due to the deformation of large structures is unavoidable.
Rigid-body translation in shearography may be negated by translating the image sensor or digital
image shifting in the computer, as reported in Ref. [36]. However, de-correlation due to rigid-body
rotation is very difficult to compensate, unless the axis of rotation is known.
One effective method to alleviate the de-correlation problem is to attach the shearographic system
(camera and illumination) to the test object. This eliminates the relative rigid motion (both translation
and rotation) between the measurement system and the object, and hence only the deformation is
86 Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87
measured. Of course, this arrangement requires the miniaturization of the shearographic equipment,
which can be achieved by using a diode laser and a micro-camera.
5. Conclusion
A review of shearography and its applications is given in this paper. Shearography is a practical
technique and therefore, it has gained rapid acceptance by the industries as a useful tool for
measurement and non-destructive testing. However, this technique is still relatively young and its
full capability deserves further exploration.
Acknowledgement
The work described in this paper has been supported by the Central Allocation Grant Scheme of
the Research Grants Council of Hong Kong, China (CityU 1/01C).
References
[1] Y.Y. Hung, Shearography: a new optical method for strain measurement and nondestructive testing, Opt. Eng. 21 (3)
(1982) 391–395.
[2] Y.Y. Hung, S. Tang, J.D. Hovanesian, Real-time shearography for measuring time-dependent displacement derivatives,
Exp. Mech. 34 (1) (1994) 89–92.
[3] Y.Y. Hung, J.D. Hovanesian, Fast detection of residual stresses in an industrial environment by thermoplastic-based
shearography, in: Proceedings of the 1990 SEM Spring Conference on Experimental Mechanics, Albuquerque, New
Mexico, June 4–6, 1990, pp. 769–775.
[4] Y.Y. Hung, Nondestructive Evaluation by Electronic Shearography, Presented at the 16th Symposium on Nondes-
tructive Evaluation, San Antonio, Texas, April 21–23, 1987, also, Apparatus and Method for Electronic Analysis of Test
Object. US Patent 4,887,899, 1989.
[5] Y.Y. Hung, A speckle-shearing interferometer: a tool for measuring derivatives of surface displacement, Opt. Commun.
11 (2) (1974) 132–135.
[6] J.A. Leendertz, J.N. Butters, An image shearing speckle pattern interferometer for measuring bending moments, J.
Phys.: E Sci. Instrum. 6 (11) (1973) 1107–1110.
[7] M.Y.Y. Hung, H.M. Shang, L. Yang, Unified approach for holography and shearography in surface deformation
measurement and nondestructive testing, Opt. Eng. 42 (5) (2000) 1197–1207.
[8] Y.Y. Hung, A.J. Durelli, Simultaneous measurement of three displacement-derivatives using a multiple image shearing
interferometric camera, J. Strain Anal. 14 (3) (1979) 81–88.
[9] K. Creath, Phase-measurement techniques for nondestructive testing, in: Proceedings of SEM Conference on Hologram
Interferometry and Speckle Metrology, Baltimore, Maryland, November 5–8, 1990, pp. 473–478.
[10] W.W. Macy, Two-dimensional fringe pattern analysis, Appl. Opt. 22 (23) (1983) 3898–3901.
[11] Jie Gu, Y.Y. Hung, F. Chen, Iteration algorithm for computer-aided speckle interferometry, Appl. Opt. 33 (23) (1994)
5308–5317.
[12] K.W. Long, 3-Beam phase shift shearography for simultaneous measurement of in-plane and out-of-plane displace-
ments and its applications to residual stress measurements, Ph.D. Dissertation, Oakland University, 1996.
[13] Y.Y. Hung, J.Q. Wang, Dual-beam phase shift shearography for measurement of in-plane strains, Opt. Lasers Eng. 24
(5–6) (1996) 403–413.
[14] Y.Y. Hung, K.W. Long, J.W. Wang, Measurement of residual stress by phase shift shearography, Opt. Lasers Eng. 27 (1)
(1997) 61–73.
[15] Y.Y Hung, K.W. Long, J.D. Hovanesian, R. Hathaway, Fast detection of residual stresses by shearography, in: Proc.
SPIE Ind. Laser Interferometry, vol. 955, Detroit, Michigan, June 27–28, 1988, pp. 26–35.
Y.Y. Hung, H.P. Ho / Materials Science and Engineering R 49 (2005) 61–87 87
[16] Y.Y. Hung, H.M. Shang, L. Lin, Y. Zhang, X. Wen, Evaluation of residual stresses in plastics and composites by
shearography, SAE Paper #1999-01-1254, 1999 SAE International Congress and Exposition, Detroit, Michigan, March
1–4, 1999.
[17] J.D. Hovanesian, Y.Y. Hung, A.J. Durelli, New optical method to determine vibration induced strains with variable
sensitivity after recording, in: Proceedings of the Conference on Experimental Stress Analysis, Smolenice, Czecho-
slovakia, October 16–18, 1978.
[18] Y.Y. Hung, C.T. Griffen, Digital shearography versus TV-holography for vibration measurement, in: Proceedings of the
15th Biennial Conference on Mechanical Vibration and Noise and 1995 ASME Design Engineering Technical
Conferences, vol. 3, part C, Boston, Massachusetts, September 17–20, 1995, pp. 1461–1470.
[19] F. Chen, C.T. Griffen, Y.Y. Hung, Stroboscopic phase shifting shearography for automated vibration measurement, in:
Proceedings of the 15th Biennial Conference on Mechanical Vibration and Noise and 1995 ASME Design Engineering
Technical Conferences, vol. 3, part C, Boston, Massachusetts, September 17–20, 1995, pp. 1399–1415.
[20] Y.Y. Hung, Electronic shearography for measurement of time-dependent deformation, in: Proceedings of the VII
International Congress on Experimental Mechanics, vol. 2, Las Vegas, Nevada, June, 1992, pp. 674–678.
[21] Y.Y. Hung, C.T. Griffen, F. Chen, High speed shearography for measuring transient deformation and vibration, in:
Proceedings of the VIII International Congress on Experimental Mechanicals, Nashville, Tennessee, June 10–13, 1996,
pp. 206–207.
[22] Y.Y. Hung, Dahuan Shi, Technique for rapid inspection of hermetic seals of microelectronic packages using
shearography, Opt. Eng. 37 (5) (1998) 1406–1409.
[23] Y.Y. Hung, Shearography: a novel and practical approach to nondestructive testing, J. Nondestructive Eval. 8 (2) (1989)
55–68.
[24] Y.Y. Hung, Automated shearography for nondestructive testing and strain measurement, in: Proceedings of the SPIE
Conference on Nondestructive Eavaluation of Aircraft, Airports, Aerospace Hardware and Materials, vol. 2455,
Oakland, California, June 6–8, 1995, pp. 238–249.
[25] Y.Y. Hung, Computerized shearography and its application for nondestructive evaluation of composites, in: C.H.
Jenkins (Ed.), Manual on Experimental Methods of Mechanical Testing of Composites, Society for Experimental
Mechanics, 1998 (Chapter 17).
[26] R.K. Erf (Ed.), Holographic Nondestructive Testing, Academic Press, 1974.
[27] Y.Y. Hung, Automated nondestructive shearographic inspection of debonds in composites using multi-frequency
vibrational stressing, in: Proceedings of the 1997 SEM Spring Conference, Bellevue, Washington, June 2–4, 1997, pp.
98–99.
[28] H.M. Shang, S.L. Toh, F.S. Chau, V.P.W. Shim, C.J. Tay, Locating and sizing disbonds in glassfibre-reinforced plastic
plates using shearography, Trans. ASME J. Eng. Mater. Technol. 113 (1) (1991) 99–103.
[29] H.M. Shang, L.M. Tham, F.S. Chau, Shearographic and holographic assessment of defective laminates with bond-lines
of different elasticities, Trans. ASME J. Eng. Mater. Technol. 117 (3) (1995) 322–329.
[30] J.R. Huang, H.D. Ford, R.P. Tatam, Slope measurement by two-wavelength electronic shearography, Opt. Lasers Eng.
27 (3) (1997) 321–333.
[31] Y.Y. Hung, J.L. Turner, M. Tafralian, J.D. Hovanesian, C.E. Taylor, Optical method for measuring contour slopes of an
object, Appl. Opt. 17 (1) (1978) 128–131.
[32] C.J. Tay, F.S. Chau, H.M. Shang, V.P.W. Shim, S.L. Toh, The measurement of slope using shearography, Opt. Lasers
Eng. 14 (1) (1991) 13–24.
[33] C.J. Tay, H.M. Shang, A.N. Poo, M. Luo, On the determination of slope by shearography, Opt. Lasers Eng. 20 (3) (1994)
207–217.
[34] M.O. Petersen, Decorrelation and fringe visibility: on the limiting behaviour of various electronic speckle pattern
correlation interferometers, J. Opt. Soc. Am. A 8 (7) (1991) 1082–1089.
[35] H.T. Yura, S.G. Hanson, T.P. Grum, Speckle statistics and interferometric decorrelation effects in complex ABCD
optical systems, J. Opt. Soc. Am. A 10 (2) (1993) 316–323.
[36] Y.Y. Hung, J.Q. Wang, Technique for compensating excessive rigid body motion in NDT of large structures using
shearography, Opt. Lasers Eng. 26 (2–3) (1997) 249–258.