Vision Machine Safety - Guide - Rev - C

SAFETY GUIDE
Inspection Business Unit Systems

AXi, NSX, Edge/Back, Frontside Module, Waferscanner
March 2011
Part Number: 719209 Rev C
www.rudolphtech.com
Copyright Information
Inspection Business Unit Systems Safety Guide
Part Number 719209, Revision C
Copyright © March 2011 Rudolph Technologies, Inc. All Rights Reserved.
No portion of this material may be reproduced, stored in a retrieval system, distributed, or altered in any
fashion or by any means (including, but not limited to electronic, mechanical, photocopying, recording,
filming, photographing, or otherwise), by any entity (either internal or external to Rudolph Technologies,
Inc.), except in accordance with applicable agreements, contracts, or licensing, without the express written
consent of the Rudolph Technologies Director of Marketing.
This document and any accompanying software are provided under license and may only be used in
accordance with the terms of the respective license agreements of the owners of the same software, which
include, but are not limited to, Rudolph Technologies, Inc. Where applicable, refer to on-line license
agreements provided with the software.
For permission to reproduce or distribute this material, send the written request via e-mail to
info@rudolphtech.com. The request should include contact information and a description of the request
(including the intent of the request and the exact material to which the request applies).
Disclaimer
Every attempt has been made to make the information in this document complete, accurate, and current.
However, Rudolph Technologies reserves the right to make changes and improvements without notice, and
shall not be responsible for any damages (including consequential) caused by reliance on the material
presented, including, but not limited to typographical, arithmetical, or listing errors.
Trademarks
MetaPULSE-II, PULSE Technology, VANGUARD, Explorer, AXi, NSX, 3Di, E25, and B20, among others,
are trademarks or registered trademarks of Rudolph Technologies, Inc. No use may be made of these or any
other trademarks owned by Rudolph Technologies, Inc. without the express written consent of the Rudolph
Technologies Director of Marketing. OS/2 is a registered trademark of International Business Machines
Corporation. jaz is a trademark of Iomega Corporation. Kodiak is a registered trademark of Lytron. Mai Tai
is a trademark of Spectra-Physics, Incorporated. Verdi and Vitesse are trademarks of Coherent, Incorporated.
All other brand and product names are trademarks or registered trademarks of their respective owners in the
United States and other countries.
Safety Guide Rudolph Technologies
ii
Technical Support
Rudolph Technologies provides comprehensive after-sale support services to ensure that your automated
inspection equipment operates efficiently. The services are designed to meet your requirements and to
maximize system performance.
The following support services are available:
• Extended warranties
• Telephone/Fax/E-mail support
• System installation, operation, and maintenance training classes
• Field and factory services
How to Contact Rudolph Technologies

When calling, faxing, or e-mailing Rudolph Technologies, make sure to provide the serial number of your
system. Rudolph Technologies uses the serial number to track your system’s performance.
Rudolph Technologies Corporation

Inspection Business Unit
Address
4900 West 78th Street
Bloomington, MN 55435
Phone 001 (952) 259-1666
Fax 001 (952) 820-0060
Web site www.rudolphtech.com
E-mail Inspection.Support@Rudolphtech.com
Hours Phone support provided seven days per week and 24 hours per day
Standard Terms and Conditions.

Service time, parts, transportation, and living costs are charged to the
customer.
Service Calls The minimum charge for services performed on any call to a
customer’s facility is four hours domestically or eight hours
internationally (outside the lower 48 United States).
All pricing is subject to change without notice.
iii
CONTENTS
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
Safety Message Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
Danger . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
Warning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
Caution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
Safety Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
Pressurized Air . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8
Mechanical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9
Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10
Stored Electrical Energy Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
Laser Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12
Light Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14
Static Magnetic Discharge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
Ergonomic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .16
Ventilation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17
Environmental/Hazardous Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18
Equipment Safety Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .19
Equipment Safety Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20
Panel/Door Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21
Emergency Off Push and ESTOP Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .22
Vacuum Leak Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .23
Teach Pendant Robot Stops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .24
Alarm Status Indicator Lights and Audible Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .25
Equipment Safety Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .26
Energy Isolation (Lockout/Tagout) Device Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .30
Personal Protective Equipment (PPE) Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .31
Material Safety Data Sheets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .32
Fuse Ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .33
Specificiations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .34
Facility Vacuum to XPort/UltraPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .35
Facility Vacuum to Explorer/WHS220 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .36
Cabling XPort to AXi/NSX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .37
Cabling UltraPort to AXi . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .38
Cabling UltraPort to NSX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .39
Cabling XPort to Edge/Backside . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .40
Cabling UltraPort to Edge/Backside . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .41
Cabling XPort to F30/NSX320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .42
Cabling XPort to WaferScanner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .43
Cabling WHS220 to WaferScanner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .44
Cabling AXi/NSX Facilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .45
Cabling WaferScanner Facilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .46
Cabling XPort Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .47
Cabling UltraPort Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .48
Cabling WHS220 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .49
CE Declaration of Conformity and Incorporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .50
AXi/NSX Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .51
iv
AXi/NSX Safety Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .52
AXi/NSX Safety Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .53
AXi Safety Label & EMO/EStop Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .54
NSX Safety Label & EMO/EStop Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .57
Light Tower . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .61
Cleanroom Hood & Hazardous Energy Barriers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .64
Power Standby Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .65
EMO and ESTOP Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .66
Circuit Breaker Lockout Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .67
Air/Pressure Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .69
AXi/NSX Door Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .70
How to power up an AXi/XPort/XTool from a completely powered down state . . . . . . . . . . . . . . . . . . . . .71
How to power up an UltraPort from a completely powered down state . . . . . . . . . . . . . . . . . . . . . . . . . . . .72
XTool SYSTEM SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .73
Integration with Rudolph Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .74

XTool System Safety Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .75
Safety Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .76
Clean Room Hoods and Hazardous Energy Barrier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .77
Power Standby Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .78
Door Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .79
WAFER HANDLING SYSTEM SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .80
XPort/UltraPort System Safety Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .81

Safety Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .82
Safety Label & EMO/EStop Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .83
Robot Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .85
Robot Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .86
Power Standby Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .88
Circuit Breakers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .89
Door Inter Lock Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .90
Key Override Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .91
Teach Pendant . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .92
Remote User Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .93
EMO & Estop . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .94
Frontside Module Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .95
Frontside Module Safety Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .96

Frontside Module Safety Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .97
F30 Safety Label & EMO/EStop Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .98
NSX320 Safety Label & EMO/EStop Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .101
Cleanroom Hood & Hazardous Energy Barriers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .104
Power Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .105
EMO and ESTOP Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .106
Circuit Breaker Lockout Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .107
Air/Pressure Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .109
Frontside Inspection System Door Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .110
How to power up an NSX320/WHS220 from a completely powered down state . . . . . . . . . . . . . . . . . . .111
How to power up a Frontside Module/Explorer/XTool from a completely powered down state . . . . . . . .112
NSX320 CE Declaration of Incorporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .113
v
F30 CE Declaration of Incorporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .114
WaferScanner Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .115
WaferScanner Safety Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .116

WaferScanner Safety Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .117
WaferScanner Safety Label & EMO/EStop Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .118
Cleanroom Hood & Hazardous Energy Barriers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .121
Power Standby Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .122
EMO and ESTOP Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .123
Circuit Breaker Lockout Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .124
Air/Pressure Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .126
WaferScanner Door Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .127
How to power up a WaferScanner/WHS220 from a completely powered down state . . . . . . . . . . . . . . . .128
How to power up a WaferScanner/XPort/XTool from a completely powered down state . . . . . . . . . . . . .129
WaferScanner CE Declaration of Incorporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .130
vi
CHAPTER 1: INTRODUCTION
Here are the main topics discussed in this chapter:
• “Overview” on page 2
• “Safety Message Conventions” on page 3
• “Safety Hazards” on page 7
• “Equipment Safety Devices” on page 19
• “Energy Isolation (Lockout/Tagout) Device Overview” on page 30
• “Personal Protective Equipment (PPE) Overview” on page 31
• “Material Safety Data Sheets” on page 32
• “Fuse Ratings” on page 33
• “Specificiations” on page 34
• “CE Declaration of Conformity and Incorporation” on page 50

Introduction
1
OVERVIEW
The information in this guide is intended for use only by personnel trained and certified by Rudolph
Technologies (or their authorized representative). Only trained personnel knowledgeable of the safety
practices outlined in this guide should maintain this equipment. When using this equipment, be sure to
follow the safety procedures outlined by your facility. These safety procedures should cover the two primary
types of hazard training: (1) equipment hazards and (2) facility-related hazards.
This guide describes important safety-related information for safe equipment operation. Included is a listing
of message conventions used in this guide as well as equipment safety interlocks and labels.
Rudolph Technologies’ wafer inspection systems are composed of multiple hardware modules, optical
components, automation, and control electronics that require a maintained-level of safety awareness during
operation. The main operator interface consists of two monitors, keyboard and mouse. The following topics
are covered in this section:
• “Safety Message Conventions” on page 3
• “Safety Hazards” on page 7
• “Equipment Safety Devices” on page 19
• “Fuse Ratings” on page 33
• “CE Declaration of Conformity and Incorporation” on page 50

Overview
2
SAFETY MESSAGE CONVENTIONS
Safety messages contained in this manual, DANGER, WARNING, and CAUTION, are highlighted in bold
for quick identification.

Safety Message Conventions
3
Danger
A Danger message indicates an imminently hazardous situation which, if not avoided, will result in death or
serious injury. Messages identified by the word DANGER are used sparingly and only for those situations
presenting the most serious hazards.
The following is a typical example of a Danger message as it appears in this manual:
HAZARDOUS VOLTAGE—RISK OF SHOCK OR DEATH

480 Vac at the Power Distribution Control Panel can kill on contact. Exercise extreme
caution when panel door is open.

Danger
4
Warning
A Warning message indicates a potentially hazardous situation which, if not avoided, could result in death or
serious injury.
The following is a typical example of a Warning message as it appears in this manual:
INJURY CAN RESULT FROM CONTACT WITH HIGH VOLTAGES OR MOVING

PARTS OF THIS EQUIPMENT.
Power-up operations are to be performed only by trained personnel.

Warning
5
Caution
A Caution message indicates a potentially hazardous situation which, if not avoided, could result in minor or
moderate injury. It may also be used to alert against unsafe practices. The following is a typical example of a
Caution message as it could appear in a manual:
Removing the mini environment and defeating the handler panel interlocks creates a pinch
hazard. Do not place hands into the path of moving assemblies. Failure to comply may
result in bodily injury.

Caution
6
SAFETY HAZARDS
Personnel working in and around the system are potentially exposed to safety hazards. When performing
maintenance, always use the appropriate Hazardous Energy Isolation (Lockout/Tagout) procedures. Only
trained maintenance personnel should work on the system. See “Equipment Safety Devices” on page 19 and
the “Energy Isolation (Lockout/Tagout) Device Overview” on page 30.
Be aware of the following hazards while working on the system:
Component Hazard
Load Ports Mechanical
Inspection Station Electrical, Pressurized Air, Laser and Mechanical
Power Distribution System Electrical
Robot Handler Laser and Mechanical

Safety Hazards
7
Pressurized Air
Air Hazards are those involving exposure to dangerous pressures. Small amounts of compressed air will
remain in manifolds.
See Related Topics for procedures needed to reduce exposure to Pressurized Air hazards:
• “Air/Pressure Interlock” on page 68
• “To lockout/tagout (LOTO) the system” on page 66
• “To lockout/tagout (LOTO) Air/Pressure” on page 68

Pressurized Air
8
Mechanical
Mechanical Hazards (i.e., electro-mechanical and/or pneumatically driven components) are those involving
exposure to moving parts that can cause injury by crushing, pinching, etc. This includes exposure to robots,
which can cause serious injury or death. Be sure to use the Energy Isolation (Lockout/Tagout) procedure
when working within these areas.
See Related Topics:
• “EMO and ESTOP Buttons” on page 65
• “Circuit Breaker Lockout Device” on page 66

Mechanical
9
Electrical
Electrical safety hazards exist anywhere power enters the system or is distributed throughout the system, and
exposed electrical connections are present (such as the Facility Distribution Box, Robot Module, Inspection
Module, and the Electrical Module Power Distribution Box and UPS). Electrical Hazards are those
involving exposure to dangerous voltages. Working on the equipment may involve exposure to these high
voltages. Make sure you are aware of the level of electrical hazard when working on the system. Observe all
electrical Warning and Caution labels when working on the system. Train maintenance personnel in the
proper use of electrical handling procedures.
The following are standard power switch and safety ground icons:
Power off Power on Safety ground
Types of Electrical Tasks

The following are the four types of electrical tasks defined by this guideline:
Equipment is fully de energized.
Equipment is energized. Energized circuits are covered or insulated. (NOTE: Type 2 work
includes tasks where the energized circuits are or can be measured by placing probes
through suitable openings in the covers or insulator).
Equipment is energized. Energized circuits are exposed and inadvertent contact with
uninsulated energized parts is possible. Potential exposures are not greater than 30 volts
rms, 42.4 volts peak, 60 volts dc or 240 volt-amps in dry locations.
Equipment is energized. Energized circuits are exposed and inadvertent contact with
uninsulated energized parts is possible. Potential exposures are not greater than 30 volts
rms, 42.4 volts peak, 60 volts dc or 240 volt-amps in dry locations. Potential exposures to
radiofrequency currents, whether induced or via contact, exceed the limits in Appendix 5
of SEMI S2-0200.

Electrical
10
Stored Electrical Energy Device
The System has an AC UPS that has stored energy after shutdown. The AC powered UPS for the System is
isolated and labeled indicating that stored energy is present and care must be taken during service or
maintenance.

Stored Electrical Energy Device
11
Laser Safety
All of Rudolph Technologies’ products containing lasers are considered to be Class I Laser Products in
accordance with the CDRH and FDA.
No special measures are required to protect the operator from laser radiation under normal operating
conditions when all access panels and doors to the Robot Module are closed.
In certain maintenance modes however, service personnel may have access to the laser. Appropriate safety
precautions must be taken when servicing the Robot Module while the laser is, or may become, energized.
This includes, but may not be limited to, wearing appropriate protective eye wear and taking precautions to
ensure the laser beam does not exit the system (such as erecting a temporary laser safety barrier). See
Related Topics:
• “Robot Safety” on page 85
• “Robot Hazards” on page 86
There are two laser classification systems currently in use, one based on the FDA laser regulations, which is
still in use in the USA. The other is based on the international standard IEC 60825, which in used in most
other countries worldwide. All references to lasers used in Rudolph Technologies’ products will reference
the USA classification system used by the Center for Devices and Radiological Health.
USA Laser Classifcation

Class I - Inherently safe; no possibility of eye damage. This can be either because of a low output power (in
which case eye damage is impossible even after hours of exposure), or due to an enclosure preventing user
access to the laser beam during normal operation, such as in CD players or laser printers.
Class II - The blink reflex of the human eye (aversion response) will prevent eye damage, unless the person
deliberately stares into the beam for an extended period. Output power may be up to 1 mW. This class
includes only lasers that emit visible light. Some laser pointers are in this category.
Class IIa - A region in the low-power end of Class II where the laser requires in excess of 1000 seconds of
continuous viewing to produce a burn to the retina. Supermarket laser scanners are in this subclass.
Class IIIa - Lasers in this class are mostly dangerous in combination with optical instruments which change
the beam diameter or power density. Output power does not exceed 5 mW. Beam power density may not
exceed 2.5 mW/square cm. Many laser sights for firearms and laser pointers are in this category.
Class IIIb - Lasers in this class may cause damage if the beam enters the eye directly. This generally applies
to lasers powered from 5–500 mW. Lasers in this category can cause permanent eye damage with exposures
of 1/100th of a second or less depending on the strength of the laser. A diffuse reflection is generally not
hazardous but specular reflections can be just as dangerous as direct exposures. Protective eyewear is
recommended when direct beam viewing of Class IIIb lasers may occur. Lasers at the high power end of this
class may also present a fire hazard and can lightly burn skin.
Class IV - Lasers in this class have output powers of more than 500 mW in the beam and may cause severe,
permanent damage to eye or skin without being magnified by optics of eye or instrumentation. Diffuse
reflections of the laser beam can be hazardous to skin or eye within the Nominal Hazard Zone. Many
industrial, scientific, military, and medical lasers are in this category.

Laser Safety
12
IEC 60825 Laser Classification
Class 1 - A class 1 laser is safe under all conditions of normal use. This means the maximum permissible
exposure (MPE) cannot be exceeded. This class includes high-power lasers within an enclosure that
prevents exposure to the radiation and that cannot be opened without shutting down the laser. For example, a
continuous laser at 600 nm can emit up to 0.39 mW, but for shorter wavelengths, the maximum emission is
lower because of the potential of those wavelengths to generate photochemical damage. The maximum
emission is also related to the pulse duration in the case of pulsed lasers and the degree of spatial coherence.
Class 1M - A Class 1M laser is safe for all conditions of use except when passed through magnifying optics
such as microscopes and telescopes. Class 1M lasers produce large-diameter beams, or beams that are
divergent. The MPE for a Class 1M laser cannot normally be exceeded unless focusing or imaging optics are
used to narrow the beam. If the beam is refocused, the hazard of Class 1M lasers may be increased and the
product class may be changed. A laser can be classified as Class 1M if the total output power is below class
3B but the power that can pass through the pupil of the eye is within Class 1.
Class 2 - A Class 2 laser is safe because the blink reflex will limit the exposure to no more than 0.25
seconds. It only applies to visible-light lasers (400–700 nm). Class-2 lasers are limited to 1 mW continuous
wave, or more if the emission time is less than 0.25 seconds or if the light is not spatially coherent.
Intentional suppression of the blink reflex could lead to eye injury. Many laser pointers are class 2.
Class 2M - A Class 2M laser is safe because of the blink reflex if not viewed through optical instruments.
As with class 1M, this applies to laser beams with a large diameter or large divergence, for which the amount
of light passing through the pupil cannot exceed the limits for class 2.
Class 3R - A Class 3R laser is considered safe if handled carefully, with restricted beam viewing. With a
class 3R laser, the MPE can be exceeded, but with a low risk of injury. Visible continuous lasers in Class 3R
are limited to 5 mW. For other wavelengths and for pulsed lasers, other limits apply.
Class 3B - A Class 3B laser is hazardous if the eye is exposed directly, but diffuse reflections such as from
paper or other matte surfaces are not harmful. Continuous lasers in the wavelength range from 315 nm to far
infrared are limited to 0.5 W. For pulsed lasers between 400 and 700 nm, the limit is 30 mJ. Other limits
apply to other wavelengths and to ultra-short pulsed lasers. Protective eyewear is typically required where
direct viewing of a class 3B laser beam may occur. Class-3B lasers must be equipped with a key switch and
a safety interlock.
Class 4 - Class 4 lasers include all lasers with beam power greater than class 3B. By definition, a class-4
laser can burn the skin, in addition to potentially devastating and permanent eye damage as a result of direct
or diffuse beam viewing. These lasers may ignite combustible materials, and thus may represent a fire risk.
Class 4 lasers must be equipped with a key switch and a safety interlock. Many industrial, scientific,
military, and medical lasers are in this category.

Laser Safety
13
Light Source
Some systems use high-intensity Xenon flash lamps to provide brightfield and darkfield wafer illumination.
Under normal operating conditions when all access panels are closed, no special measures are required to
protect the operator from the high-intensity flash lamps.
In certain maintenance modes, service personnel may have access to the high intensity flash lamps.
Appropriate safety precautions must be taken when servicing while the flash lamps are, or could become,
energized.

Light Source
14
Static Magnetic Discharge
In certain maintenance modes, service personnel may have access to the static magnetic fields. Appropriate
safety precautions should be taken to minimize or avoid the hazard.

Static Magnetic Discharge
15
Ergonomic
During certain maintenance procedures, service personnel may have a need to move or lift heavy
components (or are top heavy under certain conditions) that could cause crush injuries, muscle strain, or
back injuries if improperly moved or lifted. Appropriate safety precautions should be taken to minimize or
avoid the hazards. Also, care should be taken to ensure the user interface workstations are properly adjusted
to avoid repetitive motion injuries.

Ergonomic
16
Ventilation
Exhaust ports equipped with fans provide airflow through the system. These ports are necessary to expel
heat generated by the system and must be properly vented or ducted away from the system. Observe all
electrical Warning and Caution labels when working on the system.

Ventilation
17
Environmental/Hazardous Materials
Environmental safety involves the safe use of products and compounds when operating and maintaining the
system, and the proper disposal of hazardous and non-hazardous materials. During normal operations,
Rudolph Technologies’ systems use no hazardous materials and produce no toxic waste.
However, when performing certain maintenance or service procedures, such as cleaning or lubricating
system components, potentially hazardous materials may be required. The following is a list of items that
become solid waste as a result of the operation, maintenance and servicing of the equipment, and that are
constructed of or contain substances whose disposal might be regulated:
• Clean room grease • Isopropyl alcohol • Lens cleaning • Viton O-rings

solution
• Teflon spring • Stainless steel gas • Ionization emitter • Wipes

energized seals components such tips contaminated with
contaminated with as gaskets teflon grease
teflon grease
• Lithium batteries
Extreme care must be taken when handling hazardous materials to minimize the risk of
contaminating personnel or equipment. This includes wearing appropriate protective
equipment (such as protective gloves, safety glasses, and/or breathing apparatus) as
necessary.
See Related Topics:

Environmental/Hazardous Materials
18
EQUIPMENT SAFETY DEVICES
Safety devices may consist of panel interlocks, push-button switches, vacuum leak detectors, sensors, and
tool removable panels and guards. Safety panel interlocks cause an alarm to sound when the operator opens
an access door where exposed to a mechanical or electrical hazard. An Alarm dialog will appear on the
system screen. This subsection provides a general description of Equipment Safety Devices. For wiring
diagrams of all the interlocks and safety sensors, refer to the wiring diagram in the Prints and Product
Structures Manual.

Equipment Safety Devices
19
Equipment Safety Features
A number of additional features have been built into the machine to contribute to safe operation. The
software controlling the computer functions includes a safety manager to monitor various sensors and report
on their condition. In many instances, a negative reading prevents operation of the machine, forcing the
operator or maintenance personnel to correct the condition. Sensing these various parameters helps protect
the operator as well as the equipment and process integrity.
See Related Topics:
• “Panel/Door • “Alarm Status • “Light Tower” on • “Cleanroom Hood

Interlocks” on Indicator Lights page 60 & Hazardous
page 21 and Audible Energy Barriers”
Alarms” on on page 63
page 25
• “Power Standby • “EMO and • “Circuit Breaker • See “To lockout/

Switches” on ESTOP Buttons” Lockout Device” tagout (LOTO)
page 64 on page 65 on page 66 the system” on
page 66.
• “Air/Pressure • “AXi/NSX Door

Interlock” on Interlocks” on
page 68 page 69

20
Panel/Door Interlocks
The panel/door interlocks provide protection from inadvertent exposure to the mechanical motion of the
robot and to hazardous voltage of Process Modules. Each panel/door interlock used in the system will reset
and become active when the door is closed (or when the panel is replaced) and the alarm is acknowledged.
The panel/door interlocks switch contacts open when the interlocked door is opened (or when the panel is
removed) and then close when the door is closed (or when the panel is replaced). The following illustration
alarms the operator of a Door Open machine status.
See Related Topics:
• See “AXi/NSX Door Interlocks” on page 69.
• See “Frontside Inspection System Door Interlocks” on page 110.
• See “Door Inter Lock Switch” on page 90.
• See “Key Override Switch” on page 91.

Panel/Door Interlocks
21
Emergency Off Push and ESTOP Buttons
The EMERGENCY OFF or EMO push button switches consist of 40 mm diameter red push buttons
surrounded by a yellow guard ring on a yellow label background. They are located at several points around
the system. Activating an EMO switch shuts down the entire system. All air flow and motion (Stage, Optics
Head, Robot, and Loadports) will stop, and power is removed from the system. If a wafer is present on the
Stage or the Robot Arm, a vacuum ballast will hold the wafer in place (depending upon system
configuration).
For normal power shutdowns, using the EMERGENCY OFF push button is the least advisable method. To
recover from an EMO condition and restore power to the system, release the particular EMO "twist-to-
release" push button, then complete the recovery procedure.
The ESTOP stops system motion and disables motion control and are located at several points around the
system. The system performs an ESTOP when an operator presses the ESTOP button or opens a component
door while the system is operating. Pressing ESTOP on a single component performs ESTOP functions for
all system components.
See Related Topics:
• See “AXi Safety Label & EMO/EStop Locations” on page 53.
• “How to power up an AXi/XPort/XTool from a completely powered down state” on page 70.
• “How to power up an UltraPort from a completely powered down state” on page 72.
• See “Safety Label & EMO/EStop Locations” on page 83.
• See “EMO & Estop” on page 94.
NOTE: When the XPort/UltraPort/XTool System is docked to an Inspection System, the XPort/UltraPort/XTool is
effectively integrated into the Inspection System’s EMO circuit.
EMO (Emergency Off) Push ESTOP Buttons

Emergency Off Push and ESTOP Buttons
22
Vacuum Leak Sensor
Vacuum pressure should be maintained in the range of 20-25 inches (500-625 mm) Hg, with a flow of up to
0.25-CFM (1.0 liter per minute), depending on the top plate selection. Both the Inspection System and Wafer
Handler sense vacuum interruptions, then pause operation and notify the operator, thus preventing damage
either to the wafer or die package under inspection. The ASI system monitors system vacuum and gives the
following error if it drops low:
Loss of Vacuum

Vacuum Leak Sensor
23
Teach Pendant Robot Stops
The teach pendant for the robot incorporates a “deadman” switch on the side of the pendant and a push
button to initiate an immediate robot stop. The teach pendant is a hand-held terminal used to execute
commands and macros to the robot system. The teach pendant is used to teach the robot the drop-off
locations within the handler and for various other maintenance tasks. When using the teach pendant, the
deadman switch on the side of the pendant must be continuously depressed. Once the deadman switch is
released, the robot servos are disabled causing the robot to stop immediately. Additionally, the teach pendant
has a button on top of the pendant which can be used to stop the robot immediately (see See “Teach
Pendant” on page 92.).
Teach Pendant

Teach Pendant Robot Stops
24
Alarm Status Indicator Lights and Audible Alarms
A number of colored status indicator lights are located on the Inspection and Wafer Handling System. When
lit, each colored light indicates the present operating status. Some light indications, such as a process alarm,
may flash and include an audible alarm. The colors, flashing ability, and audible alarm configuration depend
on the user’s requirements. Typically red is used as an alarm indication and amber for an alert. Alarms also
appear on the computer screen.
See Related Topics:
• “Light Tower” on page 60
• “Light Tower States” on page 60

Alarm Status Indicator Lights and Audible Alarms
25
Equipment Safety Labels
Safety labels identify hazards. Use caution and always follow established safety procedures for your
facilities when working around the equipment. Review the definitions of each of these safety symbols before
you operate the system.
The following figures illustrate the safety labels:
LOCKOUT/TAGOUT: This icon is displayed for each maintenance procedure

that includes potential exposure to hazardous energy, and indicates to personnel
that Energy Isolation procedures must be employed.
DANGER: A Danger message indicates an imminently hazardous situation

which, if not avoided, will result in death or serious injury.
CAUTION: Alerts you to potentially unsafe situations or practices which, if not

avoided, may result in minor injury, machine damage or downtime, or corruption
or loss of software or data.
WARNING: Risk of electric shock. Alerts you to potentially unsafe situations or

practices which, if not avoided, could result in electric shock or burns
DANGER: Hazardous voltage enclosed. Voltage or current hazard sufficient to

cause shock, burn, or death. Disconnect and lockout power before servicing.
DANGER: Hazardous voltage enclosed. Voltage or current hazard sufficient to

WARNING: Hazardous voltage enclosed. Voltage or current hazard sufficient to


26
WARNING: Hazardous voltage enclosed. 208 VAC present. Contact may cause
electrical shock or burn. Turn off and lockout power before servicing.
WARNING: Lifting hazard. Two people are required to lift or to move the object.
Single-person lifting could cause injury. Use assistance when moving or lifting.
CAUTION: Pinch point. Keep hands and fingers clear during installation and
operation.
CAUTION: Pinch point. Keep hands and fingers clear during installation and
operation.
WARNING: Pinch point. Can pinch fingers. Keep hands out of machinery.
WARNING: Crush. Can cause injury. Do not enter robot work area.

27
DANGER: Pinch point. Keep hands and fingers clear during installation and
operation.
CAUTION: Indicates where seismic restraints should be attached
CAUTION: Indicates when moving robot arm by hand to not exceed that
movement by more than 10 degrees/sec
NOTE: Consult this guide and Original Equipment Manufacturer (OEM)

documentation for maintenance and troubleshooting information.
CAUTION: Laser is used or is in use.
CAUTION: Laser radiation when open and interlocks defeated. Do not stare into
the laser beam.
DANGER: Laser radiation when open. Avoid exposure to the laser beam.
DANGER: Laser radiation when open and interlocks defeated. Avoid exposure to
the laser beam.

28
CAUTION: Laser radiation when open. Do not stare into the laser beam.
WARNING: UV Light. Do not look directly at light.
WARNING: Static magnetic fields are located within this enclosure. Magnetic
fields can be harmful to pacemaker wearers. Pacemaker wears need to stay back
from this area at least 30cm (12 in.).
WARNING: Static magnetic fields are located within this enclosure.
CAUTION: Hot Surface. Do not touch indicates a potentially hazardous situation

which, if not avoided, could result in minor or moderate injury.
CAUTION: Pressurized Device. Release air pressure before servicing indicates a

potentially hazardous situation which, if not avoided, could result in minor or
moderate injury.

29
ENERGY ISOLATION (LOCKOUT/TAGOUT) DEVICE OVERVIEW
Safety hazards exist anywhere power enters the system or is distributed throughout the system (i.e.,
electrical, electro-mechanical and/or pneumatically driven components). Hazardous energy isolation
(lockout/tagout) ensures that the equipment’s energy source is removed by an isolating device and cannot be
operated until a locking device is withdrawn.
Lockout is accomplished by installing a lockout device at the power source so that equipment powered by
that source cannot be operated. A lockout device is a lock, block, or chain that keeps a switch, valve, or
lever in the off position.
Tagout is accomplished by placing a tag on the power source. The tag acts as a warning not to restore energy
- it is not a physical restraint. Tags must clearly state: in affect, Do not operate.
There are four main potentially hazardous energies within Load Ports, Inspection Station, Power
Distribution System and the Robot Handler that must be given Energy Isolation (Lockout/Tagout)
consideration. They are:
• Electrical
• Pressurized Air
• Laser
• Mechanical

Energy Isolation (Lockout/Tagout) Device Overview
30
PERSONAL PROTECTIVE EQUIPMENT (PPE) OVERVIEW
IMPROPER USE OF PERSONAL PROTECTIVE EQUIPMENT (PPE) MAY RESULT IN

PERSONAL INJURY.
When using any PPE, refer to the specific instructions provided by the PPE supplier.
Use the following Personal Protective Equipment (PPE) and supplies when performing maintenance
involving exposure to energized circuits, laser radiation or pressurized air hazards:
• Protective glasses
• Protective face shield
• Rated Safety Gloves
• Rated Safety Apron
Personal Protection Equipment should also be identified for each maintenance procedure.
RISK OF ELECTRICAL SHOCK OR ARC FLASH BURN

Electrical troubleshooting (e.g., voltage checks) might expose you to energized electrical
conductors or circuit parts. Use appropriate tools, PPE (Personal Protective Equipment),
and procedures to reduce the risk of shock or arc flash burns.

Personal Protective Equipment (PPE) Overview
31
MATERIAL SAFETY DATA SHEETS
Material Safety Data Sheets (MSDS) provide detailed information for any chemical used to operate or
maintain the system that may pose a potential health or environmental hazard.
MSDS provide detailed information about the material, including proper procedures for handling or working
with the material, physical data (melting point, boiling point, flash point, etc.), toxicity, health affects, first
aid, reactivity, storage, disposal, protective equipment, and spill/leak procedures.
The Material Safety Data Sheets provided by Rudolph Technologies are provided for reference only.
Rudolph Technologies recommends that MSDS for these materials be obtained directly from the materials’
manufacturer.
NOTE: Neither Rudolph Technologies, nor any of its agents, are liable for the accuracy of the Material Safety Data
Sheets.

Material Safety Data Sheets
32
FUSE RATINGS
Three fuses protect the Inspection Station from over-current failures. The fuses are visible in the back of the
base of the Inspection Station, and can be replaced without opening any doors or panels. Fuse ratings differ
for United States and European installations, depending on whether power is supplied at 100-120V AC
60Hz or 200-240V AC 50 Hz. Always shut down the system and unplug the main power cable from the
power source when replacing fuses.
Use only fuses rated for the current levels (amperage) shown below for standard U.S. and
European frequency and voltage ranges. Using the wrong fuses, operating the system at
voltage ranges or frequencies outside of those below, or otherwise defeating circuit
protection provided by the fuses will make the system unsafe and hazardous.
United States Fuse Ratings (100-120V AC, 60 Hz)

10 A Main in AC power in to the main transformer
10 A Secondary AC power to the secondary windings of the main
transformer
3A Workstation AC extension power to the two monitors at the operation
console
European Fuse Ratings (200-240V AC, 50 Hz)

5A Main in AC power in to the main transformer
10 A Secondary AC power to the secondary windings of the main
transformer
3A Workstation AC extension power to the two monitors at the operation
console

Fuse Ratings
33
SPECIFICIATIONS
Component Weights
Component Weight
2-wide XPort Wafer Handler 635kg
4-wide XPort Wafer Handler 1009 kg
WHS220 331 kg
AXi Inspection System 1111 kg
E3x/B3x Inspection System 256 kg
F30/NSX320 1220 kg
WS3840 Inspection Module 1315 kg
Noise Level
The noise level for all inspection system components is less than 70.0dB(A).

Specificiations
34
Facility Vacuum to XPort/UltraPort
If necessary perform the following to re-establish vacuum:
1 Connect 10 mm diameter tubing from the facility vacuum source to a Rudolph-supplied Y fitting (PN
718517).
2 Connect two lengths of Rudolph-supplied 8 mm diameter tubing to the Y fitting.
3 Connect the end of the 8 mm diameter tubing to the XPort/UltraPort system’s lower rear vacuum
connector.
4 Connect the end of the 8 mm diameter tubing to the Inspection System’s bulkhead vacuum connector.
5 To disconnect pneumatic power to the system, disconnect all previous mentioned connections.
Connections are shown below.
XPort/UltraPort
Vacuum Connections

Facility Vacuum to XPort/UltraPort
35
Facility Vacuum to Explorer/WHS220
If necessary perform the following to re-establish vacuum:
1 Connect two lengths of Rudolph-supplied 8 mm diameter tubing to the to the facility vacuum source.
2 Connect the end of the 8 mm diameter tubing to the Explorer/WHS220 system’s Facility Vacuum 1
fitting.
3 Connect the end of the 8 mm diameter tubing to the Explorer/WHS220 system’s Facility Vacuum 2
fitting.
4 To disconnect pneumatic power to the system, disconnect all previous mentioned connections.
Connections are shown below:

Facility Vacuum to Explorer/WHS220
36
Cabling XPort to AXi/NSX
If necessary perform the following to re-establish cabling XPort to AXi/NSX system:
1 On the lower left side of the XPort system near the rear, locate the interface cables.
2 Make these blue cable connections from the XPort system robot to the AXi/NSX system bulkhead:
• 716512 to INTERNAL NET connector
• 716456 to EXTERNAL NET connector
3 Make these green cable connections from the XPort system robot to the AXi/NSX system bulkhead:
• 716448 to KVM IN connector
• 716455 to KVM OUT connector
4 Make these connections from the XPort system to the AXi/NSX system bulkhead:
• 717235 to HANDLER INTERLOCK connector
• 716520 to 711420 to UFH EMO/ESTOP connector
• 716633 to REMOTE UI connector
• 716446 to AC IN connector
or
• Route the AXi system external power cable into the XPort system and connect 716446. This
connection makes AXi/NSX system TOOL2 on the XPort system power distribution.
5 Connect the blue air hose extending from XPort system’s air distribution panel to the AXi/NSX system
bulkhead.
6 Make these cabling changes to the AXi/NSX power distribution board if not already done:
a Disconnect 707876 from the board’s EMO1 connector. Place jumper 717951 onto the EMO1
connector.
b Disconnect 707881 from the board’s UFH EMO J3 connector. Place jumper 708690 onto the J3
connector.
c Connect 707876 to 707881 using adapter cable 718182.
7 To disconnect cabling XPort to AXi/NSX, disconnect all previous mentioned connections.

Cabling XPort to AXi/NSX
37
Cabling UltraPort to AXi
If necessary perform the following to re-establish cabling UltraPort to AXi system:
1 On the lower left side of the UltraPort system near the rear, locate the interface cables.
2 Make these blue cable connections from the UltraPort system robot to the AXi system bulkhead:
• COM 4 710417 to 716583 (this is an adapter) to COM 4 connection
3 Make these green cable connections from the UltraPort system robot to the AXi system bulkhead:
4 Make these connections from the UltraPort system to the AXi system bulkhead:
• 712819 to RUI connection
• 710390 AXi side bulkhead
• 712038 to Handler INTLK connection
• 710714 to 702082 on AWH INTLK connection
5 Connect the blue air hose extending from UltraPort system’s air distribution panel to the AXi system
bulkhead.
6 To disconnect cabling UltraPort to AXi, disconnect all previous mentioned connections.

Cabling UltraPort to AXi
38
Cabling UltraPort to NSX
If necessary perform the following to re-establish cabling UltraPort to NSX system:
1 On the lower left side of the UltraPort system near the rear, locate the interface cables.
2 Make these blue cable connections from the UltraPort system robot to the NSX system bulkhead:
• COM 4 710417 to 716583 (this is an adapter) to COM 4 connection
3 Make these green cable connections from the UltraPort system robot to the NSX system bulkhead:
4 Make these connections from the UltraPort system to the NSX system bulkhead:
• 710704 to 711420 (this is a cable extension) to back of bulkhead of UFH INTLK connection
• 712819 to RUI connection
• 710390 to 711350 to back of NSX power bay
• Leave bypass jumper 702517 on AWH INTLK port
• Leave bypass jumper 703758 on Handler INTLK connection
5 Connect the blue air hose extending from UltraPort system’s air distribution panel to the NSX system
bulkhead.
6 To disconnect cabling UltraPort to NSX, disconnect all previous mentioned connections.

Cabling UltraPort to NSX
39
Cabling XPort to Edge/Backside
If necessary perform the following to re-establish cabling XPort to Edge/Backside system:
1 At the bottom right of the XPort system, locate the Edge/Backside system cables.
2 Ensure that the Edge/Backside system is moved close to the XPort system.
3 Make these connections from the XPort system to the Edge/Backside system:
• 716504 to the FACTORY 1 connector
• 716513 to the E-STOP connector
• 710360 to the VAC connector. This connection makes the Edge/Backside system TOOL1 on the
XPort system power distribution.
• 716453 to the KVM IN connector
• 716454 to the KVM OUT connector
4 Connect the blue air hose from the XPort system to the Edge/Backside system.
5 Connect the black vacuum hose from the XPort system to the Edge/Backside system.
6 To disconnect cabling XPort to Edge/Backside, disconnect all previous mentioned connections.

Cabling XPort to Edge/Backside
40
Cabling UltraPort to Edge/Backside
If necessary perform the following to re-establish cabling UltraPort to Edge/Backside system:
1 At the bottom right of the UltraPort system, locate the Edge/Backside system cables.
2 Ensure that the Edge/Backside system is moved close to the UltraPort system.
3 Make these connections from the UltraPort system to the Edge/Backside system:
• 710358 to the E-STOP connector
• 710360 to the VAC connector. This connection makes the Edge/Backside system TOOL1 on the
UltraPort system power distribution.
• 716469 to the KVM IN connector
• 716470 to the KVM OUT connector
• 713078 to Ethernet connector
4 Connect the blue air hose from the UltraPort system to the Edge/Backside system.
5 Connect the black vacuum hose from the UltraPort system to the Edge/Backside system.
6 To disconnect cabling UltraPort to Edge/Backside, disconnect all previous mentioned connections.

Cabling UltraPort to Edge/Backside
41
Cabling XPort to F30/NSX320
If necessary perform the following to re-establish cabling XPort to F30/NSX320:
2 Make these connections from the XPort system to the F30/NSX320 system:
• 721454 to 721473.
• 716514 to the E-STOP connector.
• 724879 to the EMO connector.
• 716446 to the VAC connector.
• 723729 to the KVM 1 connector.
• 721437 to the ENET 1 connector.
• 719698 to the IONIZER connector.
3 Connect the blue air hose extending from XPort system’s air distribution panel to the F30/NSX320
system bulkhead.
4 To disconnect cabling XPort to F30/NSX320, disconnect all previous mentioned connections.

Cabling XPort to F30/NSX320
42
Cabling XPort to WaferScanner
If necessary perform the following to re-establish cabling XPort to WaferScanner system:
2 Make these connections from the XPort system to the WaferScanner system:
• 721900 to the BEACON connector.
• 721437 to the ETHERNET connector.
• 721676 to the KVM connector.
• 721682 to the REVIEW VGA connector.
• 721681 to the VGA connector.
• 721679 to the KEYBOARD connector.
• 721680 to the MOUSE connector.
• 724684 to the CONTROLS/INTERLOCK/EMO connectors.
• 721670 to the AC IN connector.
3 Connect the blue air hose extending from XPort system’s air distribution panel to the WaferScanner
system bulkhead.
4 To disconnect cabling XPort to WaferScanner, disconnect all previous mentioned connections.

Cabling XPort to WaferScanner
43
Cabling WHS220 to WaferScanner
If necessary perform the following to re-establish cabling XPort to WaferScanner system:
1 On the lower left side of the WHS220 system near the rear, locate the interface cables.
2 Make these connections from the WHS220 system to the WaferScanner system:
• 721900 to the BEACON connector.
• 719698 to the IONIZER connector.
• 721437 to the ETHERNET connector.
• 721676 to the KVM connector.
• 726794 to the UPS AC OUT
• 721682 to the REVIEW VGA connector.
• 721681 to the VGA connector.
• 721679 to the KEYBOARD connector.
• 721680 to the MOUSE connector.
• 724684 to the CONTROLS/INTERLOCK/EMO connectors.
3 Connect the blue air hose extending from WHS220 system’s air distribution panel to the WaferScanner
system bulkhead.
4 To disconnect cabling WHS220 to WaferScanner, disconnect all previous mentioned connections.

Cabling WHS220 to WaferScanner
44
Cabling AXi/NSX Facilities
If necessary perform the following to re-establish cabling AXi/NSX Facilities:
1 Make ethernet connections between the facility and the AXi/NSX system facilities panel.
2 If installing a DCS computer, make these connections:
• DCS 717292 to KVM IN connector on AXi/NSX system facilities panel
• DCS 717293 to KVM OUT connector on AXi/NSX system facilities panel
• DCS power cable to facility supply
• Customer’s network cable to the DCS computer
3 Connect air (blue) and vacuum (black) hoses between the AXi/NSX system facilities panel and
bulkhead.
4 To disconnect cabling AXi/NSX Facilities, disconnect all previous mentioned connections.

Cabling AXi/NSX Facilities
45
Cabling WaferScanner Facilities
If necessary perform the following to re-establish cabling WaferScanner Facilities:
1 Make ethernet connections between the facility and the WaferScanner system facilities panel.
2 Connect air (blue) and vacuum (black) hoses between the WaferScanner system facilities panel and
bulkhead.
3 To disconnect cabling WaferScanner Facilities, disconnect all previous mentioned connections.

Cabling WaferScanner Facilities
46
Cabling XPort Power
If necessary perform the following to re-establish cabling XPort Power:
To prevent electric shock, do not power up the XPort system until all connections have
been made between the facilities, Inspection system, XPort system, and Edge/Backside
system, if present.
1 Ensure that the customer-provided AC power source meets these requirements:
• Is positioned within 10 feet of the XPort system
• Provides 208 VAC, 50/60 Hertz, 50 amp, 3-wire service
2 Locate the main power cable bundled within the XPort system. It is pre-wired to XPort system’s main
AC power distribution box.
3 Important! Verify main incoming power at the customer’s AC power source before connecting the
power cable and powering up the system.
4 Important! Have the customer connect the XPort system power cable to the verified AC power source.
5 To disconnect XPort power cabling, disconnect all previous mentioned connections.

Cabling XPort Power
47
Cabling UltraPort Power
If necessary perform the following to re-establish cabling UltraPort Power:
To prevent electric shock, do not power up the UltraPort system until all connections
have been made between the facilities, AXi/NSX system, UltraPort system, and Edge/
Backside system, if present.
1 Locate the main power cable bundled within the UltraPort system. It is pre-wired to XPort system’s
main AC power distribution box.
2 UltraPort power comes from the side bulkhead of the AXi/NSX system. Make this connection. All
voltages must be correct for the AXi/NSX system, the AXi/NSX system then supplies proper voltage to
the UltraPort.
3 To disconnect UltraPort power cabling, disconnect all previous mentioned connections.

Cabling UltraPort Power
48
Cabling WHS220 Power
If necessary perform the following to re-establish cabling WHS220 Power:
To prevent electric shock, do not power up the WHS220 system until all connections
have been made between the facilities, Inspection system and WHS220 system.
1 Ensure that the customer-provided AC power source meets these requirements:
• Is positioned within 10 feet of the WHS220 system
• Provides 200 VAC, 50/60 Hertz, 50 amp, 3-wire service
2 Locate the main power cable bundled within the WHS220 system. It is pre-wired to WHS220 system’s
main AC power distribution box.
3 Important! Verify main incoming power at the customer’s AC power source before connecting the
power cable and powering up the system.
4 Important! Have the customer connect the WHS220 system power cable to the verified AC power
source.
5 To disconnect WHS220 power cabling, disconnect all previous mentioned connections.

Cabling WHS220 Power
49
CE DECLARATION OF CONFORMITY AND INCORPORATION
Rudolph Technologies states that the AXi system defined in this guide is in compliance
with the standards for the Low Voltage Directive (73/23/EEC, 93/68/EEC), Machinery
(89/392/EEC), and Electromagnetic Compatibility (EMC) (89/336/EEC, 92/31/EEC, 93/
68/EEC) directives. Rudolph Technologies has completed the development of a
Technical Construction File and has participated in the performance of tests, when
required.
• EN 292-2 Part 21991/A1: Safety of Machinery, General Principles for Design/Technical Principles and
Specifications.
• EN 1050: Safety of Machinery—Principles for Risk Assessment.
• EN 60204-1/A3: Safety of Machinery—Electrical equipment of machines.
• EN 61010-1/A3: Safety requirements for electrical equipment for measurements, control, and
laboratory use
• EN 50081-2: Electromagnetic compatibility generic emission standard residential, commercial, and
light industrial.
- CISPR 22: Class A standard for radiated emission.
- EN55011-Group 1 Class A: Conducted emissions.
• EN 50082-1: Electromagnetic compatibility generic immunity standard residential, commercial, and
light industrial.
- EN61000-4-2: Electrostatic discharge immunity test.
- ENV50140, ENV50204: Radiated radio frequency
electromagnetic field immunity test.
- EN61000-4-4: Fast transient/burst immunity test.
- ENV50141: Radio Frequency common mode.
- EN61000-4-8: Power-frequency magnetic field.
• CE Marking (1997)
• Indoor Use: Altitude of up to 2000 meters. Main voltage fluctuation must not exceed ±10%.
• Pollution Degree 1: No pollution or only non-conductive dry pollution occurs. The pollution has no
influence.
• Installation Category (Overvoltage Category) II: Local level appliances, portable equipment, etc., with
smaller transient over voltages than Installation Category (Overvoltage Category) III.
• Laser Radiation: Laser Radiation is emitted from the laser mapping head on the robot arm. This laser
source complies with FDA Class I and IEC 825 Class I regulations provided that robot motion control
interlocks are not tampered with or disabled. The laser implementation does not permit human access to
laser radiation in excess of the emission limits of FDA or IEC Class I for IR wavelengths and emission
durations. This laser is safe under reasonably foreseeable conditions of operation.
CE Responsible Person Manufactured by

European Manager Rudolph Technologies, Inc.
Rudolph Technologies 4900 W. 78th Street
Suite 7, Stuart House Bloomington MN 55435 USA
Eskmills Business Park
Musselburgh EH21 7PB
Scotland, U.K.

CE Declaration of Conformity and Incorporation
50
CHAPTER 2: AXI/NSX SAFETY
This chapter describes important safety-related information for safe AXi/NSX-tool specific operation.
The main topics discussed in this chapter include the following:
• “AXi/NSX • “Cleanroom Hood & • “To lockout/tagout

Safety Rules” on Hazardous Energy Barriers” (LOTO) the system” on
page 52 on page 64 page 68
• “AXi/NSX • “Power Standby Switches” • “Air/Pressure

Safety Features” on page 65 Interlock” on page 69
on page 53
• “AXi Safety • “EMO and ESTOP • “To lockout/tagout

Label & EMO/ Buttons” on page 66 (LOTO) Air/Pressure”
EStop Locations” on page 69
on page 54
• “Light Tower • “Circuit Breaker Lockout • “AXi/NSX Door

States” on Device” on page 67 Interlocks” on page 70
page 62
Before proceeding, read and understand the safety information contained within
“Introduction” on page 7 of this guide. Failure to observe specific safety practices and
procedures, warnings, or overriding system safety features, may expose personnel to
hazards that could result in severe personal injury (including death) or damage the
equipment.
51
AXI/NSX SAFETY RULES
Observe the following safety rules whenever you operate the AXi/NSX:
• Review and fully understand all safety information contained in this manual.
• Whenever possible remove all power to the system during maintenance procedures and use the
appropriate Energy Isolation (Lockout/Tagout) procedures when the system is not in use.
• See “Energy Isolation (Lockout/Tagout) Device Overview” on page 35.
• See “Circuit Breaker Lockout Device” on page 67 and “To lockout/tagout (LOTO) the system”
on page 68.
• See “Air/Pressure Interlock” on page 69 and “To lockout/tagout (LOTO) Air/Pressure” on
page 69.
• Review all rules and procedures set up by your in-house safety department and follow them when
working around the system.
• Have all non-essential personnel leave the system area while performing maintenance procedures.
• Use extreme caution when working around electrical equipment. Always assume an electrical hazard is
present. Whenever possible, use the appropriate Energy Isolation (Lockout/Tagout) Procedure.
• See “Circuit Breaker Lockout Device” on page 67 and “To lockout/tagout (LOTO) the system”
on page 68.
page 69.
• In emergency situations (for example, in case of serious mechanical failure), press the red EMO button
and disconnect main power at the service entrance. See “AXi Safety Label & EMO/EStop Locations”
on page 54 and “NSX Safety Label & EMO/EStop Locations” on page 57.
• Keep your hands, fingers, and other objects off of the top plate while the system is inspecting a product.
Keep hands, fingers, and other objects away from the stage, top plate, optics, robotic arm, and other
moving parts of the Inspection Station.
• Operate the system in a cleanroom only.
• Do not modify or misuse the system—doing so can render the system unsafe.
• Do not operate the system near explosive or flammable substances. Locate the system on a
nonflammable floor surface.
• Obtain an assistant to help you lift the Inspection Station clean room hood. Attempting to lift or move it
alone could result in serious injury.
• Do not disable the safety features that are designed into the AXi/NSX system (see “AXi/NSX Safety
Features” on page 53.)
• To power down the entire system, turn off power switches for both the inspection and automated
handling station and then disconnect the main power cable from the wall outlet.
NOTE: Turning off the power switches alone will not power down the system—the main power supply transformer
remains energized.
• Do not disconnect the safety interlock cable that links the Automated Handling Station to the Inspection
Station.

AXi/NSX Safety Rules
52
AXI/NSX SAFETY FEATURES
Safety features for the AXi/NSX include:
• “AXi Safety Label & EMO/EStop Locations” on page 54
• “NSX Safety Label & EMO/EStop Locations” on page 57
• “Cleanroom Hood & Hazardous Energy Barriers” on page 64
• “Power Standby Switches” on page 65
• “AXi/NSX Door Interlocks” on page 70

AXi/NSX Safety Features
53
AXI SAFETY LABEL & EMO/ESTOP LOCATIONS
The following are AXi Inspection System safety label & EMO/EStop locations:
Skins Removed
AXi Inspection System (Front View)

AXi Safety Label & EMO/EStop Locations
54
Four
Locations
AXi Inspection System (Side View)

55
AXi Inspection System (Back View)

56
NSX SAFETY LABEL & EMO/ESTOP LOCATIONS
The following are NSX Inspection EMO/EStop locations:
NSX Inspection EMO/EStop locations (Front of system)
NSX Inspection EMO location (Back of system)
NSX Inspection EMO/EStop Locations

NSX Safety Label & EMO/EStop Locations
57
Inside near Interlock Switch
Inside on Plexiglass Panel
Inside on Power Switch
NSX Inspection System (Front View)

58
Inside under Window
NSX Inspection System (Side View)

59
Outside Back Location
Inside on Flat Panel
Inside Power Entry Box
Four Locations
NSX Inspection System (Back View)

60
Light Tower
The Inspection Station has a light tower that is mounted on the handler attached to the inspection tool. The
light tower displays the operating state of the Rudolph Technologies Inspection Tools. Operating states are
indicated by red, yellow, green, and blue status lights. Generally speaking, only one light will be on at a
time: the light with the higher priority will disable the other lights.
Light State Condition
Red Blinking • Serious hardware failure. System needs immediate attention.
Amber Blinking • System needs attention.

• System displays an important message dialog and needs operator
intervention.
• Error event occurs that requires operator intervention to correct.
• System cannot locate a feature automatically and needs the operator to
locate it.
• System needs operator to manually move to a desired focus point
location and manually focus the image.
• During ink dot verification, the system displayed the message “Ink dot
verification failed! Is this die inked correctly?”
Green Solid • System is operating error-free.

• System enters a new “state,” such as the start of a task (for example,
clicking Run or Load, or successful completion of a task.) Operator just
closed the door and there is no application error.

Light Tower
61
Light Tower States
The following tables describes the meaning of each light tower state in a four-color light tower. They are
listed in order of descending priority.
Operator
Action
Light/State Conditions Required
Red/Steady Hazardous condition. Correct the

One or more of the following hazardous conditions has occurred: condition
• General vacuum fault on the system. displayed
on-screen.
• PIAB vacuum fault (this is the vacuum to the air-bearing stage).
• Pressure fault to the air-bearing stage.
• X or Y encoder fault.
• Amp fault detected from the software.
• Power supply fault (24V, 12V, or 5V) that caused the system to ESTOP.
Yellow/ Service mode: key override. Remove the key

Blinking One or more doors are overridden (that is, key switches are turned): electronics override.
drawer, wafer entry door, rear upper axis door, or left upper service door.
This light may be on when the red light is on.
Yellow/ Abnormal condition. Correct the

Steady One or more of the following conditions has occurred: condition
• Estop displayed
on-screen.
• DOOR STOP (that is, a door is open but not overridden)
• Loss of target
• Hard disk space is low
• Temperature fault such as over-temperature
• fan fault
• Watchdog timeout
Blue/ Hardware in control and waiting for operation. Start the

Blinking Normal state of the system when the software is not running. software.
This light may be on when another light is on.

Light Tower
62
Blue/Steady Software request. Perform the
System is requesting an action, such as: function
• manual wafer load requested
on-screen.
• manual focus map points
• enter lot code
• enter wafer ID
Green/ Normal operation. None.

Steady System is operating normally and without errors.

Light Tower
63
Cleanroom Hood & Hazardous Energy Barriers
Clean room hoods and hazardous energy barriers provide the following kinds of protection:
• Fully-enclosed clean room hoods—over Inspection Station and Automated Wafer Handling Station.
Protect operators from moving parts and create a controlled environment that enclose optics and top
plate (Inspection Station) and robotic arms (Automated Wafer Handling Station).
• Hazardous energy barriers—clear plastic barriers over the Inspection Station controller and Universal
Flex Handler internal components. Protects service technicians from electric shock.
Other features of cleanroom hoods generally include:
• control panel buttons that let you EMO or ESTOP the system or request that the system unlock the
wafer entry door.
• a four-inch outer diameter (OD) opening that allows for a filtered temperature-controlled air source. As
an option, an ionizer may be installed below the opening.
• Depending upon the wafer handling device you are using: 1). the front door allows you to manually load
and unload wafers while the top plate is stopped in the load position. Opening this door while the
machine is running has the same affect as pressing ESTOP; or 2). an Access Requested button on the
Control Panel allows you to open the wafer entry door and manually load or unload wafers while the top
plate is stopped in the load position.

64
Power Standby Switches
Power standby switches are located on the Inspection Station ( ), and the Automated Handling Station
( ). These switches turn on component power when rotated clockwise and turn off component power
when rotated to counterclockwise. These switches return the center position after they are rotated, as shown
in the following illustration:
AXi Location
Power Switch for NSX is Power standby switch (XPort)

located inside Inspection System
Power standby switch (UltraPort)
NOTE: To shut down system power completely, rotate the Power Standby Switches on both the Inspection Station and the
optional Automated Handling Station counterclockwise, and then disconnect the main power cable from the wall
outlet.

65
EMO and ESTOP Buttons
EMO and ESTOP buttons provide these safety controls to the system:
• EMO — shuts down all system electrical power except for the input terminals of the main circuit
breaker. Pressing EMO on a single component performs EMO functions for all system components.
• ESTOP — stops system motion and disables motion control. The system performs an ESTOP when an
operator presses the ESTOP button or opens a component door while the system is operating. Pressing
ESTOP on a single component performs ESTOP functions for all system components.
Buttons are located on the front and sides of the system.
See Related Topics

66
Circuit Breaker Lockout Device
A circuit breaker lockout device is located at the rear of the inspection system. The circuit breaker shuts off
power to the entire system when either of the following occurs:
• The breaker is set to the OFF position, or
• There is a power surge.
Lockout/tagout ensures that the inspection system and handling station are safely disconnected from your
facility’s main AC input source.
See the following related topic for details:
• “Circuit Breakers” on page 89
Perform a system lockout/tagout before you begin any electrical system maintenance tasks
of Type 1 (fully de-energized)

67
To lockout/tagout (LOTO) the system
1 Exit all inspection system software.
2 Shut down Windows.
3 At the rear of the inspection system, locate the main circuit breaker on the AC power box.
4 Push the circuit breaker down to its OFF position as shown below at left.
5 Remove the breaker lockout device from the bag attached to the AC power cable.
6 Pull the two halves of the lockout device apart as shown below at middle.
7 Insert the clips of the lockout device into the circuit breaker as shown on page 68.
8 Fold the two halves of the lockout device back together and secure with a lock.
Breaker and Lockout Device
To verify that lockout/tagout is engaged and in effect, visually observe that the lights on
Inspection Station/Wafer Handler controllers, Power Standby Switches and the SIO
board on the XTool are no longer lit.

68
Air/Pressure Interlock
The air/pressure interlock valve ensures that the Inspection System locks out any outside sources of air to
optional system(s).
To lockout/tagout (LOTO) Air/Pressure
1 Turn the valve counterclockwise to place it in the locking position.
2 Attach a padlock as shown below.
Air/Pressure Interlock on AXi/NSX System (Back of the System)
To verify that lockout/tagout is engaged and in effect, visually observe that Main
Pressure and Main Vacuum readouts on the backside of the inspection station have
fallen to 0.

69
AXi/NSX Door Interlocks
If an operator opens a clean room hood door while the Inspection System is operating, the interlock on that
door signals the system to stop all motion and disable motion control (ESTOP). In order to service the
system, the technician inserts a key into the lockout, as shown in the following illustration. The interlock
LED illuminates to inform the technician that the door interlock safety feature has been overridden on the
system component.
Door Interlock over ride

Door Interlock over ride
switch is located inside
switch is located inside
Interlock LED Key

70
HOW TO POWER UP AN AXI/XPORT/XTOOL FROM A COMPLETELY
POWERED DOWN STATE
1 Plug the 50 amp plug from the XPort into the outlet.
2 Restore air pressure to the system.
3 Restore vacuum to both the AXi and XPort.
4 Clear the EMO buttons if either one is tripped.
5 Turn on the breaker labeled “Main” on the XPort power distribution module.
6 Turn on the breaker labeled “XPort” on the XPort power distribution module.
7 Turn on the breaker labeled “Inspection Tool 1” on the XPort power distribution module (this is
assuming that the Edge/Backside is on the tool 1 circuit).
assuming that the AXi is on the tool 2 circuit).
9 Turn on the breaker labeled “Robot” on the XPort power distribution module.
10 Rotate the “Power On” switch clockwise on the XPort power distribution module.
11 Turn on the green “Tool 1” switch (this is assuming that the Edge/Backside is on the Tool 1 circuit).
12 Turn on the green “Tool 2” switch (this is assuming that the AXi is on the Tool 2 circuit).
13 Rotate the “Power On” switch clockwise on the AXi.
14 Wait for all the computers to boot-up. The XPort computer will automatically login and launch the
XPort application.
15 Login to the Bacskside and start the Backside application. The Backside application will most likely
generate an error. Permit the software to continue to run. At this point, we need to get the EStop
cleared on the entire tool.
16 Login to the Edge and start the Edge application.
17 Login to the AXi and start the ASI application.
18 Wait for the Yaskawa robot controller to change to a status of 1000/2000. (This is a way to verify when
the EStop has been cleared on the tool.)
19 Smite the Edge software.
20 Smite the Backside software.
21 Start the Backside software.
22 Start the Edge software.
23 Home the system.
24 Complete.

How to power up an AXi/XPort/XTool from a completely powered down state
71
HOW TO POWER UP AN ULTRAPORT FROM A COMPLETELY POWERED
DOWN STATE
1 Plug the amp plug from the AXi/NSX into the outlet.
3 Restore vacuum to the AXi/NSX.
5 Turn on the breaker on the back of the AXi/NSX.
6 Rotate the “Power On” switch clockwise on the AXi/NSX.
7 Rotate the “Power On” switch clockwise on the UltraPort.
8 Wait for all the computers to boot-up. The UltraPort computer will automatically login and launch the
UltraPort application.
9 Login to the AXi/NSX and start the ASI application.
10 Complete.

How to power up an UltraPort from a completely powered down state
72
CHAPTER 3: XTOOL SYSTEM SAFETY
This chapter describes important safety-related information for safe XTool System specific operation.
• “Integration with • “Safety Features” on • “Power Standby

Rudolph Systems” page 76 Switch” on page 78
on page 74
• “XTool System • “Clean Room Hoods and • “Door Interlock” on

Safety Rules” on Hazardous Energy Barrier” page 79
page 75 on page 77
“Introduction” on page 7 and “AXi/NSX Safety” on page 49 of this book. Failure to observe
specific safety practices and procedures, warnings, or overriding system safety features, may
expose personnel to hazards that could result in severe personal injury (including death) or
damage the equipment.
73
INTEGRATION WITH RUDOLPH SYSTEMS
The AXi/NSX Automated Defect Inspection Station consists of two main components: the Inspection
Station and the ergonomic workstation. The AXi/NSX may be equipped with an optional EdgeTM system
that analyzes the top and side edges of patterned and bare wafers for defects and with an optional wafer
handling system. An optional BacksideTM system that inspects the underside of wafers for defects caused by
equipment chucks and pallets may be included. These systems combined share the following connections:
• Air
• Emergency stop (ESTOP)
• Ethernet
• Facilities
• Keyboard, video, and mouse (KVM)
• Power
• Vacuum
NOTE: When the Wafer Handler/XTool System is docked to an Inspection System, the Wafer Handler/XTool is effectively
integrated into the Inspection System’s EMO circuit.
Integration with Rudolph Systems

Integration with Rudolph Systems
74
XTool System Safety Rules
Observe the following safety rules whenever you use the XTool System:
• Pinch points exist in and around the XTool System’s edge normal and edge top axes.
• Operate the system in a clean room only.
• Do not modify or misuse the system — doing so can render the system unsafe.
• Do not disable the safety features that are designed into the system.
• To power down the entire system, turn off power switches for the XTool System, handling station, and
AXi/NSX system, and then lockout/tagout the system as described in “To lockout/tagout (LOTO) the
system” on page 66.
• Always operate the XTool System with safety doors and covers properly installed.
• For AXi and Wafer Handler Safety Rules information, please refer to “AXi/NSX Safety Rules” on
page 50 and “XPort/UltraPort System Safety Rules” on page 81.

XTool System Safety Rules
75
SAFETY FEATURES
Safety features for the XTool System include:
• “Clean Room Hoods and Hazardous Energy Barrier” on page 77
• “Power Standby Switch” on page 78
• “Door Interlock” on page 79
Safety features of the AXi/NSX system additionally include:
See Related Topic:
• “How to power up an AXi/XPort/XTool from a completely powered down state” on page 70
• “How to power up an UltraPort from a completely powered down state” on page 72

Safety Features
76
Clean Room Hoods and Hazardous Energy Barrier
The XTool System’s clean room hoods and hazardous energy barrier provide the following types of
protection:
• Fully-enclosed clean room hoods — A removable three-piece hood covers the XTool System. That
hood protects operators from moving parts and creates a controlled environment around the system’s
optics, top plate, and robot.
• Hazardous energy barrier — A clear plastic barrier covers the front door of the XTool System control
bay. That barrier protects service technicians from electric shock.
Control Bay Barrier

Clean Room Hoods and Hazardous Energy Barrier
77
Power Standby Switch
The XTool System power standby switch is located within the lower right corner of the control bay. The
switch turns the XTool System power when set to 1 and turns off power when set to 0.
XTool System Power Standby Switch
Power standby switches are located on the AXi/NSX system (see “Power Standby Switches” on page 64 and
handling station). Similar to the XTool System, the switches turn on component power when set to 1 and
turn off component power when set to 0.
In order for system power to be turned off completely, switches for the AXi/NSX System
and Handling Station, if present, must be set to 0. Additionally, the XTool System power
switch must be set to off as described above.

Power Standby Switch
78
Door Interlock
If an operator opens a door while the Inspection system is operating, the interlock on that door signals the
system to stop all motion and disable motion control (ESTOP).
In order to service the system, the technician inserts a key into the lockout. The red interlock LED
illuminates to inform the technician that the door interlock safety feature has been overridden on the system
component.
Red LED, Key, and Interlock on E20/25 System (inside front, panels removed)

Door Interlock
79
CHAPTER 4: WAFER HANDLING SYSTEM SAFETY
This chapter describes important safety-related information for safe XPort/UltraPort System specific
operation.The main topics discussed in this chapter include the following:
• “XPort/ • “Robot Hazards” on • “Teach Pendant” on

UltraPort page 86 page 92
System Safety
Rules” on
page 81
• “Safety • “Power Standby • “Remote User

Features” on Switches” on page 88 Interface” on
page 82 page 93
• “Safety Label • “Door Inter Lock • “EMO & Estop” on

& EMO/ Switch” on page 90 page 94
EStop
Locations” on
page 83
• “Robot • “Key Override Switch”

Safety” on on page 91
page 85
“Introduction” on page 7, “AXi/NSX Safety” on page 49 and “XTool SYSTEM SAFETY”
on page 73 of this book. Failure to observe specific safety practices and procedures,
warnings, or overriding system safety features, may expose personnel to hazards that could
result in severe personal injury (including death) or damage the equipment.
80
XPort/UltraPort System Safety Rules
Observe the following safety rules whenever you use the XPort/UltraPort system:
and disconnect main power at the service entrance.
• Do not look directly into an automated handling station laser mapper while it is in operation (indicated
by a red light when the laser is on). Laser light can cause eye damage and blindness (see “Class II
Laser” on page 18).
• Do not disable the safety features that are designed into the system.
remains energized.
• Do not disconnect the safety interlock cable that links the automated handling station to the Inspection
Station.
• Keep hands, fingers, and other objects out of the way of robotic arms while they are in operation.
• Be aware of sharp edges near the robot on the XPort/UltraPort.
• Always operate the XPort/UltraPort with its safety doors and covers properly installed.
• Do not lift the XPort/UltraPort robot by the armset or end effectors.
• Always operate the Loadport with its safety doors and covers properly installed.
• Disconnect power to the XPort/UltraPort by following the lockout/tagout procedures before you attempt
to service the robot (see “Energy Isolation (Lockout/Tagout) Device Overview” on page 35 and “To
lockout/tagout (LOTO) the system” on page 66).
• See “AXi/NSX Safety Rules” on page 50.

XPort/UltraPort System Safety Rules
81
SAFETY FEATURES
Safety features for the XPort/UltraPort system include:
• “Safety Label & EMO/EStop Locations” on page 83
• “Door Inter Lock Switch” on page 90
• “Key Override Switch” on page 91
• “Teach Pendant” on page 92
• “Remote User Interface” on page 93
• “EMO & Estop” on page 94
Safety features of the AXi/NSX system additionally include:

Safety Features
82
SAFETY LABEL & EMO/ESTOP LOCATIONS
The following are XPort System safety label & EMO/EStop locations:
EMO/ESTOP LOCATIONS
XPort System

Safety Label & EMO/EStop Locations
83
The following are UltraPort System safety label & EMO/EStop locations:
EMO/ESTOP LOCATIONS
UltraPort System

Safety Label & EMO/EStop Locations
84
Robot Safety
Observe the following safety rules:
• Do not look directly into a Wafer Handler laser mapper while it is in operation (indicated by a red light
when the laser is on). Laser light can cause eye damage and blindness.
• Wafer handler station robotics use Class II lasers and as such do not pose a hazard; however, do not
stare directly into the laser beam or place your hands, arms, or head near the laser beam.
• Wafer Handler station robotics have an ESTOP button. When you push the ESTOP button, the system
stops all motion on the Wafer Handler, overrides all other controls, and removes power to motor
amplifiers.
• To recover the system from an ESTOP or EMO, first inspect the system for damage or obstructions. Then
pull out the ESTOP button, start up the system, turn on servo motors for all axes, and home the system.
• Do not remove high-voltage barriers. These barriers shield areas with voltages greater than 30 VRMS.
Only trained service technicians may remove these barriers with the proper tools. Safety labels are
affixed to the robot, controller, and optional pre-aligner to alert service technicians to high-voltage
areas.

Robot Safety
85
Robot Hazards
The robot is a complex electromechanical device. Do not attempt to service or operate the robot unless you
have been properly trained. Always disconnect power to the robot before servicing it to prevent injury to
yourself. Follow these safety precautions when operating automated handling stations:
NOTE: The greatest judgment error result from personnel becoming so familiar with the robot's redundant motions that it
is assumed these motions will not deviate. This assumption can place personnel in jeopardy while programming or
performing maintenance within the robot's work envelope.
• Moving mechanisms have no obstruction sensors and can cause serious personal injury or death. When
power is applied to the robot the possibility of automatic movement of the robotic arm exists, which
could result in personal injury.
• Failure to take proper precautions before moving the robot could result in personal injury.
• Do not operate the robot without the protective covers in place. Moving parts can squeeze or compress
fingers or hands and lead to serious injury.
See the following figure for an illustration of hazardous points on the robot. Possible pinch points are
located near any moving arm extension or the Z axis. It is hazardous to put your hand in the space at either
end of the robot.
NOTE: The illustration of the robot in the following figure may be for a tool that is different from yours. However, all
robots have the same general purpose, and the hazards listed next still apply to your equipment.

Robot Hazards
86
Laser Hazard: laser location in robot wrist Mechanical Hazard Pinch Points:
with beam shining to cassette stations
(extend/retract)
Mechanical Hazard: robot arms

moving parts; pinch points
Automatic Movement Hazard:

moving mechanism travel limits
Removing protective
covers exposes
Electrical Shock
Hazard
Vacuum Hazard:
to vacuum supply
vacuum line attaches
Removing protective
covers exposes
Electrical Shock
Hazard
Robot Hazards

Robot Hazards
87
Power standby switches are located on the Inspection Station ( ), and the Automated Handling Station
( ). These switches turn on component power when rotated clockwise and turn off component power
when rotated to counterclockwise. These switches return the center position after they are rotated, as shown
in the following illustration:
AXi Location
Power Switch for NSX is Power standby switch (XPort)

located inside Inspection System
outlet.

88
Circuit Breakers
The Circuit Breakers are located on the XPort power bay as shown in the following illustration:
Component
Breakers switches
Power standby
switch
Main XPort XTool AXi/NSX Robot
Circuit Breakers
Breaker / Component Switch Function
Main 10K AIC Rated Powers down all tools
XPort EMOs the XPort system and powers down

all tools
Robot Powers down the robot controller
Tool 1 Powers down the XTool System
Tool 2 Powers down the Inspection system
Tool 3 For future use
NOTE: The current interrupting capacity of the equipment main circuit breaker is 5 KAIC.
See the following related topics for details:

Circuit Breakers
89
Door Inter Lock Switch
There are two main access doors for the XPort Tool (i.e., upper and lower doors). The design of the two
doors is such that the upper door is interlocked to prevent anyone from entering the tool while the robot is in
motion. The lower door is not interlocked, but is secured by a hex wrench access key. The lower door
ONLY provides access to the area of the XPort where the computer, power bay and controls are located.
There is NO way to access the area where the robot is moving via the lower door.
The upper door interlock consists of a CE approved interlock contact with key override (see “Key Override
Switch” on page 91).
The XPort door interlock is designed to prevent any person from entering the XPort while the Robotic
Handler is in motion. Any attempt to open the upper door will result in a system wide EStop condition.
The UltraPort has one main access door and provides similar functionality for accessing the robot, the
computer, power bay and controls; and also has a door interlock design to prevent any person from entering
the UltraPort while the Robotic Handler is in motion. Any attempt to open the main access door will also
result in a system wide EStop condition.
XPort UltraPort
Main Access XPort/UltraPort Doors

Door Inter Lock Switch
90
Key Override Switch
The door interlock can be overridden by use of the Key Override Switch. With the door open, a key can be
inserted into the key switch and turned clockwise. When the interlock override is active, a red light next to
the key switch will be illuminated. During this override mode, the EStop and EMO still function normally,
but the door can now remain open. Another safety feature of the key override is that the door CANNOT be
locked or closed with the key in place; the key must be removed in order to lock the Wafer Handler door.
Key Override Switch

Key Override Switch
91
Teach Pendant
The robot can now be trained and operated at a pre-set slower speed via the Robot Teach Pendant (See
“Teach Pendant” on page 92). The Teach Pendant is equipped with a "squeeze to Run" switch and an EStop
Switch. The robot will only move if the squeeze switch is depressed.
Servo On
ready switch
Mode Selector
switch
Emergency
Stop Button
Teach Pendant
Observe the following precautions when performing teaching operations:

- Always follow the predetermined operating procedure.
- Ensure that you have a safe place to retreat in case of emergency.
- Improper or unintended operation may result in injury.
Confirm that no persons are present in the motion range of the robot and that you are in a
safe location before:
- Turning ON the robotic system power.
- Moving the robot with the teaching pendant.
- Running check operations.
- Performing automatic operations.
Always press an emergency stop button immediately if there are problems.

Teach Pendant
92
Remote User Interface
Safety features for the Remote User Interface include:
• Remote User Interface light tower, KVM key switch, and buttons
• Circuit breaker lockout device
• EMO & Estop
Light tower
ESTOP
EMO
Remote User Interface Light Tower, KVM Key Switch, and Buttons
The Remote User Interface has a light tower that displays the operating state of the system to system
operators. Light tower states discussed are the same as those for the Inspection Station. See “Light Tower
States” on page 60 for details.
The Remote User Interface’s KVM switch lets you transfer control of the keyboard, video display, and
mouse to the Wafer Handler system.

Remote User Interface
93
EMO & Estop
The Remote User Interface EMO & Estop buttons are described in the following table:
Button Function Location
EMO Shuts down all system power. Inspection Station and

Pressing EMO on a single component performs EMO automated handling
functions for all system components. stations
Estop Stops system motion and disables motion control. The Inspection Station and
system performs an Estop when you open a component door automated handling
while the system is operating or when you press the Estop stations
button.
Pressing Estop on a single component performs Estop
functions for all system components.
See Related Topic:
• “How to power up an AXi/XPort/XTool from a completely powered down state” on page 70
• “How to power up an UltraPort from a completely powered down state” on page 72

EMO & Estop
94
CHAPTER 5: FRONTSIDE MODULE SAFETY
This chapter describes important safety-related information for safe Frontside Inspection System operation.
• “Frontside • “Cleanroom Hood & • “To lockout/tagout

Module Safety Hazardous Energy Barriers” (LOTO) the system” on
Rules” on on page 104 page 108
page 96
• “Frontside • “Power Switch” on • “Air/Pressure

Module Safety page 105 Interlock” on page 109
Features” on
page 97
• “F30 Safety • “EMO and ESTOP • “To lockout/tagout

Label & EMO/ Buttons” on page 106 (LOTO) Air/Pressure”
EStop Locations” on page 109
on page 98
• “NSX320 Safety • “Circuit Breaker Lockout • “Frontside Inspection

Label & EMO/ Device” on page 107 System Door
EStop Locations” Interlocks” on
on page 101 page 110
equipment.
95
FRONTSIDE MODULE SAFETY RULES
Observe the following safety rules whenever you operate the Frontside Inspection System:
• See “Circuit Breaker Lockout Device” on page 107 and “To lockout/tagout (LOTO) the
page 109.
page 109.
and disconnect main power at the service entrance. See “F30 Safety Label & EMO/EStop Locations”
on page 98 and “NSX320 Safety Label & EMO/EStop Locations” on page 101.
• Do not disable the safety features that are designed into the Frontside Inspection system (see “Frontside
Module Safety Features” on page 97.)
remains energized.
Station.

Frontside Module Safety Rules
96
FRONTSIDE MODULE SAFETY FEATURES
Safety features for the Frontside Inspection System include:
• “F30 Safety Label & EMO/EStop Locations” on page 98
• “NSX320 Safety Label & EMO/EStop Locations” on page 101
• “Power Switch” on page 105
• “Frontside Inspection System Door Interlocks” on page 110

Frontside Module Safety Features
97
F30 SAFETY LABEL & EMO/ESTOP LOCATIONS
The following are F30 Inspection System safety label & EMO/EStop locations:
Inside of Panel
F30 Inspection System (Front View))

F30 Safety Label & EMO/EStop Locations
98
F30 Inspection System (Side View)

99
Inside of Door
F30 Inspection System (Back View)

100
NSX320 SAFETY LABEL & EMO/ESTOP LOCATIONS
The following are NSX320 Inspection safety label and EMO/EStop locations:
Inside on Frame Inside on Frame
NSX320 Inspection System (Front View)

NSX320 Safety Label & EMO/EStop Locations
101
Inside on Frame
NSX320 Inspection System (Side View)

102
Inside of Door
NSX320 Inspection System (Back View)

103
wafer entry door.

104
Power Switch
The power switch is located on the Inspection Station. Push the green button to turn the component power
On. Push the red button to turn the component power off. See the following image for more detail:
Power Switch

Power Switch
105
ESTOP on a single component performs ESTOP functions for all system components.
Buttons are located on the front and sides of the system.
See Related Topics
• “F30 Safety Label & EMO/EStop Locations” on page 98
• “NSX320 Safety Label & EMO/EStop Locations” on page 101

106

107
3 At the rear of the inspection system, locate the main circuit breaker on the AC power box.
4 Push the circuit breaker down to its OFF position as shown below at left.
5 Remove the breaker lockout device from the bag attached to the AC power cable.
6 Pull the two halves of the lockout device apart as shown below at middle.
7 Insert the clips of the lockout device into the circuit breaker as shown on page 108.
8 Fold the two halves of the lockout device back together and secure with a lock.
Breaker and Lockout Device

108
The air/pressure interlock valve ensures that any outside sources of air are locked out to optional system(s).
The valve is located in the service door of the Explorer system.
fallen to 0.

109
Frontside Inspection System Door Interlocks
If an operator opens a clean room hood door while the Inspection System is operating, the interlock on that
door signals the system to stop all motion and disable motion control (ESTOP). In order to service the
system, the technician inserts a key into the lockout, as shown in the following illustration. The interlock
LED illuminates to inform the technician that the door interlock safety feature has been overridden on the
system component.

110
HOW TO POWER UP AN NSX320/WHS220 FROM A COMPLETELY
POWERED DOWN STATE
1 Plug the 50 amp plug from the WHS220 into the outlet.
3 Restore vacuum to both the NSX320 and WHS220.
5 Turn on the breaker labeled “Main” on the WHS220 power distribution module.
6 Turn on the breaker labeled “Handler” on the WHS220 power distribution module.
7 Turn on the breaker labeled “Inspection Tool 1” on the WHS220 power distribution module.
8 Rotate the “Power On” switch clockwise on the WHS220 power distribution module.
9 Rotate the “Power On” switch clockwise on the NSX320.
10 Wait for all computers to boot up. The PC’s should automatically login to Windows XP.
11 XCluster will automatically launch and start all the applications on all systems.
12 All systems will automatically home as needed.
13 Complete.

How to power up an NSX320/WHS220 from a completely powered down state
111
HOW TO POWER UP A FRONTSIDE MODULE/EXPLORER/XTOOL FROM A
COMPLETELY POWERED DOWN STATE
1 Plug the 50 amp plug from the Explorer into the outlet.
3 Restore vacuum to both the Frontside Module and Explorer.
5 Turn on the breaker labeled “Main” on the Explorer power distribution module.
6 Turn on the breaker labeled “XPort” on the Explorer power distribution module.
7 Turn on the breaker labeled “Inspection Tool 1” on the Explorer power distribution module (this is
8 Turn on the breaker labeled “Inspection Tool 2” on the Explorer power distribution module (this is
assuming that the Frontside Module is on the tool 2 circuit).
9 Turn on the breaker labeled “Robot” on the Explorer power distribution module.
10 Rotate the “Power On” switch clockwise on the Explorer power distribution module.
12 Turn on the green “Tool 2” switch (this is assuming that the Frontside Module is on the Tool 2 circuit).
13 Push the “Power On” switch on the Frontside Module.
15 XCluster will au tomatically launch and start all the applications on all systems.
17 Complete.

How to power up a Frontside Module/Explorer/XTool from a completely powered down
112
NSX320 CE DECLARATION OF INCORPORATION
Rudolph Technologies states that the NSX 320 system defined in this manual is in
compliance with the standards for the Low Voltage Directive (2006/95/EC), Machinery
Directive (2006/42/ EC), and Electromagnetic Compatibility (EMC) (2004/108/EC)
Directive. Rudolph Technologies has completed the development of a Technical
Construction File and has participated in the performance of tests, when required. This
product is intended to be used with a robotic material handler.
• EN ISO 12100-1:2003 + A1:2009 Safety of machinery - Basic concepts, general principles for design –
Part 1: Basic terminology, methodology
Part 2: Technical principles
• EN 60204-1:2006 – Safety of machinery - Electrical equipment of machines.
• EN 13857:2008 - Safety of machinery – Safety distances – upper / lower limbs.
• EN 349: 1993 + A1:2008 - Safety of machinery – Minimum crush gaps.
• EN 983: 1996 - Safety of machinery – Pneumatics.
• EN 13732-1:2006 – Ergonomics of the thermal environment – Touch Temps
• EN ISO 14121-1:2007Safety of machinery – Risk assessment –Part 1: Principles
• EN 13850:2008 – Safety of machinery – Emergency stops
• EN 61000-6-2:2001 Electromagnetic compatibility (EMC). Generic Standards. Immunity Standard for
Industrial Environments.
Indoor Use: Altitude of up to 2000 meters. Main voltage fluctuation must not exceed ±10%.
Pollution Degree 1: No pollution or only non-conductive dry pollution occurs. The pollution has no
influence.
Installation Category (Over-voltage Category) II: Local level appliances, portable equipment, etc., with
smaller transient over voltages than Installation Category (Over-voltage Category) III.
Laser Radiation: Laser Radiation is emitted from the laser mapping head on the robot arm and the Laser
within the sensor. These laser sources comply with FDA Class I Laser Product regulations and IEC 825
Class I regulations provided that the robot motion control and tool interlocks are not tampered with or
disabled. The laser implementation does not permit human access to laser radiation in excess of the emission
limits of FDA or IEC Class I for IR wavelengths and emission durations. This laser is safe under reasonably
foreseeable conditions of operation.

Scotland, U.K.

NSX320 CE Declaration of Incorporation
113
F30 CE DECLARATION OF INCORPORATION
Rudolph Technologies states that the NSX 320 system defined in this manual is in
compliance with the standards for the Low Voltage Directive (2006/95/EC), Machinery
Directive (2006/42/ EC), and Electromagnetic Compatibility (EMC) (2004/108/EC)
Directive. Rudolph Technologies has completed the development of a Technical
influence.

Scotland, U.K.

F30 CE Declaration of Incorporation
114
CHAPTER 6: WAFERSCANNER SAFETY
This chapter describes important safety-related information for safe WaferScanner-tool specific operation.
• “WaferScanner • “Power Standby Switches” • “Air/Pressure

Safety Rules” on on page 122 Interlock” on page 126
page 116
• “WaferScanner • “EMO and ESTOP • “To lockout/tagout

Safety Features” Buttons” on page 123 (LOTO) Air/Pressure”
on page 117 on page 126
• “WaferScanner • “Circuit Breaker Lockout • “WaferScanner Door

Safety Label & Device” on page 124 Interlocks” on
EMO/EStop page 127
Locations” on
page 118
• “Cleanroom • “To lockout/tagout (LOTO)

Hood & the system” on page 125
Hazardous
Energy Barriers”
on page 121
equipment.
115
WAFERSCANNER SAFETY RULES
Observe the following safety rules whenever you operate the WaferScanner:
page 126.
page 126.
and disconnect main power at the service entrance. See “WaferScanner Safety Label & EMO/EStop
Locations” on page 118.
• Do not disable the safety features that are designed into the WaferScanner system (see “WaferScanner
Safety Features” on page 117.)
remains energized.
Station.

WaferScanner Safety Rules
116
WAFERSCANNER SAFETY FEATURES
Safety features for the WaferScanner include:
• “WaferScanner Safety Label & EMO/EStop Locations” on page 118
• “WaferScanner Door Interlocks” on page 127

WaferScanner Safety Features
117
WAFERSCANNER SAFETY LABEL & EMO/ESTOP LOCATIONS
The following are WaferScanner Inspection System safety label & EMO/EStop locations:
WaferScanner Inspection System (Side View)

WaferScanner Safety Label & EMO/EStop Locations
118
Top Side of Panel Top Side of Panel
WaferScanner Inspection System (Back View)

119
WaferScanner Inspection System (Front View)

120
wafer entry door.

121
Power standby switches are located on the Automated Handling Station. These switches turn on component
power when rotated clockwise and turn off component power when rotated to counterclockwise. These
switches return the center position after they are rotated, as shown in the following illustration:
Power standby switch (XPort)
outlet.

122
ESTOP on a single component performs ESTOP functions for all system components. The ESTOP
button is located on the handler.
EMO Button is located on the front of the system.
See Related Topics
• “WaferScanner Safety Label & EMO/EStop Locations” on page 118

123

124
3 Press the UPS CONTROL, POWER switch to the OFF position and hold the switch for at least five (5)
seconds. This action will turn the UPS OFF.
4 At the rear electronics cabinet, electrical bulkhead, set the circuit breakers, CB1-CB6 to the OFF
position.
5 Insert a locking device (any type of padlock or combination lock) in the AC Bulkhead lockout bracket
to ensure that the main Circuit Breaker CB1 remains in the OFF position..
Breaker Lockout

125
The air/pressure interlock valve ensures that any outside sources of air are locked out to optional system(s).
The valve is located in the service door of the XPort system.
fallen to 0.

126
WaferScanner Door Interlocks
Wafer-loading safety door interlock
An interlocked wafer-loading safety-door is provided for automatic transfer of wafers into and out of the
inspection cabinet.
The wafer loading door has two optical interrupter switches. An interrupting flag covers both optical
switches only if the wafer loading door is closed and no laser light can escape from the door. Both optical
switches must be interrupted to enable laser power. As the wafer loading door opens, the interrupting flag
moves away from the optical switch and the laser is automatically turned off. This action prohibits laser
radiation from being emitted from the inspection cabinet..
Service panel interlock

Each interlocked service panel has two interlocks (redundant interlocks) that are activated when the access
panel is closed. The interlocks are wired in series with the laser power and X,Y motion control motor. The
switches are fastened to the access panel frame, if any of the contacts are open, power to the laser and X,Y
motion control motor is removed.

WaferScanner Door Interlocks
127
HOW TO POWER UP A WAFERSCANNER/WHS220 FROM A COMPLETELY
POWERED DOWN STATE
1 Plug the 50 amp plug from the WHS220 into the outlet.
3 Restore vacuum to both the WaferScanner and WHS220.
5 Turn on the breaker labeled “Main” on the WHS220 power distribution module.
6 Turn on the breaker labeled “Handler” on the WHS220 power distribution module.
7 Turn on the breaker labeled “Inspection Tool 1” on the WHS220 power distribution module.
8 Rotate the “Power On” switch clockwise on the WHS220 power distribution module.
9 Turn on the breaker labeled “CB2” to enable the PC’s on the WaferScanner
10 Turn on the breaker labeled “CB3” to enable the XY stage on the WaferScanner
11 Turn on the breaker labeled “CB4” to enable the System AC power on the WaferScanner.
15 Complete.

How to power up a WaferScanner/WHS220 from a completely powered down state
128
HOW TO POWER UP A WAFERSCANNER/XPORT/XTOOL FROM A
COMPLETELY POWERED DOWN STATE
1 Plug the 50 amp plug from the XPort into the outlet.
3 Restore vacuum to both the WaferScanner and XPort.
5 Turn on the breaker labeled “Main” on the XPort power distribution module.
6 Turn on the breaker labeled “XPort” on the XPort power distribution module.
7 Turn on the breaker labeled “Robot” on the XPort power distribution module.
assuming that the WaferScanner is on the tool 2 circuit).
10 Rotate the “Power On” switch clockwise on the XPort power distribution module.
12 Turn on the green “Tool 2” switch (this is assuming that the WaferScanner is on the Tool 2 circuit).
13 Turn on the breaker labeled “CB2” to enable the PC’s on the WaferScanner
14 Turn on the breaker labeled “CB3” to enable the XY stage on the WaferScanner
15 Turn on the breaker labeled “CB4” to enable the System AC power on the WaferScanner.
19 Complete.

How to power up a WaferScanner/XPort/XTool from a completely powered down state
129
WAFERSCANNER CE DECLARATION OF INCORPORATION
Rudolph Technologies states that the Waferscanner system (WS) defined in this manual
is in compliance with the standards for the Low Voltage Directive (2006/95/EC),
Machinery Directive (2006/42/ EC), and Electromagnetic Compatibility (EMC) (2004/
108/EC) Directive. Rudolph Technologies has completed the development of a Technical
influence.

Scotland, U.K.

WaferScanner CE Declaration of Incorporation
130
Index
INDEX Equipment Safety Devices 19

Equipment Safety Features 20
A Alarm Status Indicator Lights and Audible Alarms 25
Emergency Off Push and ESTOP Buttons 22
Air/Pressure Interlock 69, 109, 126
Panel/Door Interlocks 21
Air/pressure interlock 69, 109, 126
Safety Labels 26
Alarm Status Indicator Lights and Audible Alarms 25
Teach Pendant Robot Stops 24
AXi Inspection System safety label & EMO/EStop locations 54
Vacuum Leak Sensor 23
AXi Safety Label & EMO/EStop Locations 54
Equipment Safety Labels 26
AXi Safety Rules 52
AXi/NSX Safety 51 F
AXi/NSX Safety Features 53 Facility Vacuum to Explorer/WHS220 36
AXi/NSX Safety Rules 52 Facility Vacuum to XPort 35
C Facility Vacuum to XPort/UltraPort 35, 36
Fuse Ratings 33
Cabling AXi Facilities 41
European Fuse Ratings 33
Cabling AXi/NSX Facilities 45
United States Fuse Ratings 33
Cabling UltraPort Power 48
fuse ratings 33
Cabling UltraPort to AXi 38
Cabling UltraPort to EB20 41 H
Cabling UltraPort to NSX 39 hazards
Cabling WaferScanner Facilities 46 robot 86
Cabling WHS220 Power 49 I
Cabling WHS220 to WaferScanner 44
Inspection System safety label & EMO/EStop locations
Cabling XPort Power 47, 48
F30 98
Cabling XPort to AXi 37, 38, 39
NSX320 101
Cabling XPort to AXi/NSX 37
WaferScanner 118
Cabling XPort to EB20 38, 39, 40
Integration with Rudolph Systems 74
Cabling XPort to Frontside 42
Introduction 1
Cabling XPort to WaferScanner 43
CE Declaration of Conformity 50 K
Circuit Breaker 94 Key Override Switch 91
Circuit breaker lockout L
procedure 68, 108, 125
Light Tower 61
Circuit Breaker Lockout Device 67, 107, 124
Light Tower States 62
Circuit Breakers 89
Load Port Wafer Handler
Clean Room Hoods and Hazardous Energy Barrier 77
Circuit Breaker Lockout Device 94
Cleanroom Hood & Hazardous Energy Barriers 64, 103, 121
lockout/tagout (LOTO) Air/Pressure 69, 109, 126
Component Weights 34
lockout/tagout (LOTO) the system 68, 108, 125
Control bay hazardous energy barrier 77
M
D
Material Safety Data Sheets 32
Door Inter Lock Switch 90
Door Interlock 79 N
Door interlock switch 79, 90 Noise Level 34
Door Interlocks 70, 110, 127 NSX Safety Label & EMO/EStop Locations 57
E O
Emergency Off Push Buttons 22 Overview 2
EMO & Estop 94 P
EMO and ESTOP Buttons 66, 106, 123
Panel/Door Interlocks 21, 23
Energy Isolation (Lockout/Tagout) Device Overview 30
Personal Protective Equipment (PPE) 31
Environmental/Hazardous Materials 18
Personal Protective Equipment (PPE) Overview 31
Equipment Safety 19
Power Standby Switch 78
131
Index
Power standby switch 78 XTool System Safety Rules 75

Power Standby Switches 65, 88, 105, 122
power up a from a completely powered down state 71, 72, 111,
112, 128, 129
R
Remote User Interface 93
robot
hazards 86
Robot Hazards 86
Robot Safety 85
S
Safety
air/pressure interlock on AXi/NSX/3Di 69, 109, 126
circuit breaker lockout procedure 68, 108, 125
control bay hazardous energy barrier 77
door interlock switch 79, 90
power standby switch 78
safety
fuse ratings 33
Safety Features 76, 82
Safety Hazards 7
Electrical 10
Ergonomic 16
Laser Safety 12
Light Source 14
Mechanical 9
Pressurized Air 8
Static Magnetic Discharge 15
Stored Electrical Energy Device 11
Ventilation 17
Safety Message Conventions 3
Caution 3, 6
Danger 3, 4
Warning 3, 5
Safety Rules 81
Service contact numbers iii
Stored Energy Devices 32
Stored Energy Devices Electrical 11
System
circuit breaker lockout procedure 68, 108, 125
door interlock switch 79, 90
power standby switch 78
T
Teach Pendant 92
Teach Pendant Robot Stops 24
Technical support iii
Troubleshooting 80
Types of Electrical Tasks 10
X
XPort System safety label & EMO/EStop locations 83, 84
132

Vision Machine Safety - Guide - Rev - C

Uploaded by

Document Information

Original Title

Copyright

Available Formats

Share this document

Share or Embed Document

Sharing Options

Did you find this document useful?

Is this content inappropriate?

Copyright:

Available Formats

Vision Machine Safety - Guide - Rev - C

Uploaded by

Copyright:

Available Formats

SAFETY GUIDE

Inspection Business Unit Systems

Part Number 719209, Revision C

Copyright © March 2011 Rudolph Technologies, Inc. All Rights Reserved.

Safety Guide Rudolph Technologies

The following support services are available:

How to Contact Rudolph Technologies

Rudolph Technologies Corporation

Phone 001 (952) 259-1666

Fax 001 (952) 820-0060

Web site www.rudolphtech.com

Standard Terms and Conditions.

Safety Guide Rudolph Technologies

AXi/NSX Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .51

Safety Guide Rudolph Technologies

XTool SYSTEM SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .73

Integration with Rudolph Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .74

WAFER HANDLING SYSTEM SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .80

XPort/UltraPort System Safety Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .81

Frontside Module Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .95

Frontside Module Safety Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .96

Safety Guide Rudolph Technologies

WaferScanner Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .115

WaferScanner Safety Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .116

Safety Guide Rudolph Technologies

• “Safety Message Conventions” on page 3

• “Safety Hazards” on page 7

• “Equipment Safety Devices” on page 19

• “Energy Isolation (Lockout/Tagout) Device Overview” on page 30

• “Personal Protective Equipment (PPE) Overview” on page 31

• “Material Safety Data Sheets” on page 32

• “Fuse Ratings” on page 33

• “CE Declaration of Conformity and Incorporation” on page 50

Safety Guide Rudolph Technologies

• “Safety Message Conventions” on page 3

• “Safety Hazards” on page 7

• “Equipment Safety Devices” on page 19

• “Energy Isolation (Lockout/Tagout) Device Overview” on page 30

• “Personal Protective Equipment (PPE) Overview” on page 31

• “Material Safety Data Sheets” on page 32

• “Fuse Ratings” on page 33

• “CE Declaration of Conformity and Incorporation” on page 50

Safety Guide Rudolph Technologies

Safety Guide Rudolph Technologies

The following is a typical example of a Danger message as it appears in this manual:

HAZARDOUS VOLTAGE—RISK OF SHOCK OR DEATH

Safety Guide Rudolph Technologies

The following is a typical example of a Warning message as it appears in this manual:

INJURY CAN RESULT FROM CONTACT WITH HIGH VOLTAGES OR MOVING

Safety Guide Rudolph Technologies

Safety Guide Rudolph Technologies

Be aware of the following hazards while working on the system:

Load Ports Mechanical

Inspection Station Electrical, Pressurized Air, Laser and Mechanical

Power Distribution System Electrical

Robot Handler Laser and Mechanical

Safety Guide Rudolph Technologies

• “Energy Isolation (Lockout/Tagout) Device Overview” on page 30

• “Air/Pressure Interlock” on page 68

• “To lockout/tagout (LOTO) the system” on page 66

• “To lockout/tagout (LOTO) Air/Pressure” on page 68

Safety Guide Rudolph Technologies

See Related Topics: