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Fundamental Properties and Applications of Dielect
Fundamental Properties and Applications of Dielect
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Chemie
Ingenieur Review Article 1
Technik
The combination of a nonthermal plasma and a heterogeneous catalyst provides unique opportunities for chemical trans-
formations. High densities of reactive species, such as ions, radicals or vibrationally excited molecules, are generated by
electron collisions and initiate a multitude of chemical reactions in the gas phase. By shifting the reaction site from the gas
phase to the surface of the catalyst, the selectivity of these reactions can be significantly enhanced. Dielectric barrier dis-
charges (DBDs) are a promising plasma source for these kinds of applications due to their non-equilibrium conditions
and their simple construction. This review provides a brief introduction to the breakdown mechanism and the various
geometries of DBDs and presents several plasma-catalytic DBD applications.
Keywords: Atmospheric pressure plasma, Dielectric barrier discharge, Hydrogen plasma, Plasma catalysis, VOC abatement
Received: April 07, 2020; revised: July 10, 2020; accepted: July 14, 2020
Chem. Ing. Tech. 2020, 92, No. 10, 1–18 ª 2020 The Authors. Published by Wiley-VCH GmbH www.cit-journal.com
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This review provides a brief introduction to the applica- sure, breakdown mechanism or the geometry of the setup.
tion of DBDs for chemical conversion and plasma catalysis. In general, two major categories are defined: thermal plas-
The fundamental properties of nonthermal plasmas and the mas and nonthermal plasmas (NTP) [5]. Thermal plasmas,
typical breakdown mechanism of DBDs are discussed to e.g., arc discharges, are in thermodynamic equilibrium and
provide an understanding of the complex chemical reac- all particles have the same temperature. They can be gener-
tions and interactions. The main configurations of DBDs ated by increasing the temperature of the gas. In contrast,
and their unique properties are presented followed by a NTPs like dielectric barrier discharges or corona discharges
short description of the principles of plasma catalysis and are not in thermodynamic equilibrium, and different tem-
the interactions between plasma and catalyst. Based on the peratures are associated with different particles or degrees
oxidation of VOCs the basic mechanisms are discussed. As of freedom [38]. They require a smaller energy input and
part of the Carbon2Chem project the plasma-catalytic are generated by applying electric fields. The electron tem-
removal of oxygen traces from coke oven gas (COG) is perature Te can be several orders of magnitude higher than
investigated, as conventional techniques for the removal of the temperature of the ions Ti or the temperature of the
oxygen traces may be overstrained by the complex gas mix- neutral gas Tg. An equilibration of these temperatures by
tures and numerous impurities. The similar plasma-catalyt- Joule heating is prevented by limiting discharge time or
ic synthesis of H2O2 and its mechanisms are discussed energy input. Typical electron temperatures can be in the
[32, 33]. One main goal of Carbon2Chem is the conver- range of 1–10 eV (1 eV approx. equals 11 600 K), while the
sion of steel mill gases to basic chemicals such as methanol heavy particles stay close to ambient temperature. The elec-
or ammonia to reduce the net CO2 emission of steelmaking trons are accelerated in the electric field and can induce
[34–36]. The future possibilities of plasma catalysis for these vibrational or rotational excitation and chemical reactions
reactions are summarized as well. like ionization, bond dissociation, radical formation and
many others. These chemical reactions do usually not occur
under equilibrium conditions at comparable gas tempera-
2 Nonthermal Atmospheric Pressure Plasma: tures and are directly controlled by the electron temperature
Properties and Breakdown Mechanism and density, or more accurately by the electron energy dis-
tribution function. [8]
In order to gain a deeper understanding of the plasma-
chemical processes, detailed information about plasma for-
mation, the variety of particles and their interactions with 2.2 Electric Breakdown: Townsend Mechanism and
each other are crucial. Therefore, a brief introduction to the Paschen Curves
fundamental properties of nonthermal atmospheric pres-
sure plasmas and to the most significant breakdown mecha- Chemical reactions applied in industry are usually operated
nisms is given in this section. A more detailed description at atmospheric or elevated pressure. The applied pressure
of the physical processes during gas breakdown and plasma influences the mean free path of the gas particles and can,
formation can be found in textbooks [8, 37]. therefore, significantly change the properties of the plasma.
In high vacuum at 10–3 mbar to 10–7 mbar, the mean free
path is in the order of centimeters to kilometers, whereas at
2.1 Definition atmospheric pressure at approx. 1000 mbar, the mean free
path is in the order of tens of nanometers [39, 40]. The short
Matter is commonly thought of to exist in one of three mean free path is associated with a higher collision fre-
states: solid, liquid or/and gas. By increasing the kinetic quency, which is relevant for processes that rely on collisions
energy of the particles, matter can change its state in the such as chemical reactions. However, the pressure is not
given sequence. However, when enough energy is added to only relevant for the mean free path, but also for the voltage
a gas, it starts to get (partially) ionized and transforms into needed to ignite and sustain the plasma. For a simple geom-
a plasma, which is often referred to as the fourth state of etry of two planar metal electrodes separated by a gas, the
matter. A plasma is quasi-neutral as the number of positive- breakdown voltage required to start the discharge in a con-
ly and negatively charged particles is equal, distinguishing it stant electric field is given by Paschen’s law (Eq. (1)). It is an
from similar phenomena such as ion beams. Due to these empirical formula discovered by Paschen in 1889 [41] that
free charges a plasma is electronically conductive and chem- describes the influence of pressure, gap distance and the gas
ically active. It contains a variety of highly reactive species, composition on the breakdown voltage [42, 43].
such as electrons, ions, atoms, radical or metastable species.
Accordingly, it emits electromagnetic radiation. Each of Bpd
UB ¼ (1)
these components may participate in chemical reactions or lnðApd Þ lnð lnð1 þ g1 ÞÞ
interact with the surface of the catalyst [8].
Several types of plasmas and discharges can be distin- with the breakdown voltage UB, the pressure p, the gap dis-
guished according to a variety of parameters such as pres- tance d and g the ion-induced secondary electron emission
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coefficient of the electrode material. A and B are empirically cules. By repetition of these processes the number of elec-
determined values for each gas. The resulting Paschen trons increases exponentially, and avalanches are generated
curves for several gases are shown in Fig. 1. The required as illustrated in Fig. 2. These ionization avalanches may lead
breakdown voltage at a given pd strongly depends on the to electron densities in the range of 1013 cm–3 and are often
type of gas, because the ionization potential as well as the described by the Townsend ionization coefficient a. On the
mean free path differ for each gas. At larger gap distances other hand, the positively charged ions are accelerated
and higher pressures, the breakdown voltage is approxi- towards the cathode and lead to the emission of secondary
mately proportional to the product of gap distance and electrons from the cathode material according to g. The sec-
pressure. For very small pd the curves tend towards infinity, ondary electrons can then initiate additional avalanches. All
suggesting that it is impossible to create a discharge. How- these processes lead to a rather homogeneous breakdown
ever, this is not necessarily the case and discharges can still and are called Townsend breakdown mechanism provided
occur due to effects that were neglected by Paschen [44, 45]. that a self-sustaining current between both electrodes is
In general, all curves reveal a minimum corresponding to established [8, 47].
the lowest breakdown voltage. Differentiating Eq. (1) leads
to Eq. (2), allowing to identify the gap distance and pressure
of this minimum. At atmospheric pressure p is fixed and
the breakdown voltage primarily depends on the dimen-
sions of the discharge gap.
lnð1 þ g1 Þ
pd ¼ e (2)
A
Argon
Carbon dioxide
for a parallel plate configuration and heavily relies on the
10000
emission of secondary electrons from the cathode to sustain
the discharge. In case of atmospheric pressure, a more accu-
rate description of the breakdown mechanism is provided
by the so-called streamer or spark mechanism. It is also pri-
1000
marily based on ionization avalanches, additionally taking
the interactions between individual avalanches into account.
The electrons in the head of the avalanche drift away from
the heavier ions in the trail because of their higher mobility,
100
0.1 1 10 100 1000 thereby creating a strong local space charge at the front of
pd / Pa m the avalanche and consequently an additional electric field
ESc. This additional electric field ESc superimposes with the
Figure 1. Breakdown Paschen curves for different gases. The external electric field E0 in such a way that the resulting
data is plotted with Paschen coefficients A and B from [46] and field in front of the avalanche is enhanced. Due to the
[43]. enhanced electric field in front of the primary avalanche,
ionization processes are accelerated, and secondary ava-
The predominant breakdown mechanism for this paral- lanches predominantly grow in this region. If ESc is in the
lel-plate configuration was described by Townsend [47]. same order of magnitude as the external electric field, then
The applied DC (direct current) voltage U generates a cor- the avalanche transforms into a streamer, which can be best
responding constant electric field E = U/d. Primary elec- described as a thin ionized channel growing between the
trons generated naturally near the cathode, e.g., by cosmic electrodes [8, 37]. At short gap distances and relatively low
radiation, are accelerated in the electric field and collide voltages the avalanche-to-streamer transition is only possi-
with gas molecules. Bound electrons are removed from the ble when the avalanche reaches the surface of the anode.
gas molecules by impact ionization and positively charged There are two types of streamers that can evolve: positive
ions are formed. The ejected electrons are again accelerated streamers and negative streamers (Fig. 3). Positive streamers
by the external electric field and ionize further gas mole- propagate towards the cathode. Photons are emitted in the
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density are generated due to the high relative permittivity. catalytically active nanoparticles on the oxidation of ben-
The effect of the increased surface area can be neglected, zene, it is assumed that the expansion of the plasma area is
because the presence of glass beads does not change the also beneficial [69].
energy input. Furthermore, the composition of the gas On the other hand, various properties of the catalyst can
phase is greatly affected by BaTiO3. Without BaTiO3 the O3 be changed by the atmospheric-pressure plasma. Some of
mole fraction in the exhaust gas linearly increases as a func- these are the morphology of the surface or the electronic
tion of the energy input, whereas for BaTiO3 a maximum properties, like the work function or oxidation state
O3 mole fraction is achieved for medium power densities, [70, 71]. In general, these changes may be caused by (ir)re-
because the generated O3 is thermally decomposed due to versible adsorption of species blocking active sites, implan-
the elevated temperatures of BaTiO3. It was shown that the tation of energetic ions in the bulk of the catalyst, sputtering
energy efficiency for the oxidation of both toluene and or etching [61]. One of the most impressive examples for
methyl-tert-butyl ether is substantially improved by BaTiO3, the extent of structural changes of the catalyst can be found
while the selectivity to CO2 is unchanged. In order to also when a plasma is utilized to prepare catalysts prior to the
improve selectivity, BaTiO3 was combined with the catalyti- reaction. In these cases, the improved activity cannot be
cally active material LaCoO3, which increases the formation related to the reactive species generated by the plasma, but
of CO2 [65]. solely to the structural and electronic modifications of the
Another drastic change of the discharge properties caused catalyst. Gao et al. [70] reported that a pretreatment of Cu
by a porous catalyst is the formation of microdischarges in nanotubes with an O2 plasma can significantly improve
the pores of the catalyst, which was shown experimentally their catalytic activity in the carbon dioxide electroreduc-
[66] and by modeling [67]. Ion and electron densities can tion. They propose that the plasma treatment creates defect
significantly exceed the values outside of the pores, as the sites and stabilizes surface and subsurface oxygen species,
local electric field inside the pores is enhanced. Pore sizes in which modify the adsorption of molecules on the surface
the range of tens to hundreds of micrometers seemed to be [70]. Transferring these observations to an in situ modifica-
the most beneficial [67]. Due to the enhanced electric field tion of the catalyst during the reaction may prevent catalyst
the mean electron energy is increased resulting in a modi- deactivation. Most of the studies on plasma catalysis use the
fied energy pattern of the reactive species as well as a higher same catalysts applied in conventional catalysis. However,
number of reactive species, which may strongly influence plasma-induced modification of the electronic properties
the plasma-chemical kinetics. The enhancements of the may lead to new catalyst systems. Bal et al. [71] investigated
electric field, which may also form at nonporous materials, supported single-atom catalysts containing Ti, Ni or Cu and
are usually caused by two different effects. The local electric reported based on a quantum-chemical model that negative
field is always enhanced at tip-like structures, depending on surface charges not only improve the reductive potential of
the aspect ratio according to Eq. (3) [61]. the catalysts, but also change their relative activity. Further-
more, the trapped surface charges initiate the formation of
E ¼ bE0 (3) streamers as the trapped surface charges are released by
photons emitted from a single filament [72].
Here, E0 is the initial electric field and b is the field
enhancement factor, which is typically in the range of tens
or hundreds. For materials such as carbon nanotubes it can
5 Plasma-Assisted Oxidation of Volatile
even be in the range of thousands. The second effect is
Organic Compounds
caused by the relative permittivity of the packing material
and the gas, which leads to further enhancements of the
Some of the most prominent applications of atmospheric
electric field. This is shown in Eq. (4) [68].
pressure DBDs include the plasma-catalytic purification of
3ep exhaust gas streams by removing CO [15], NOx [16], SO2
E ¼ Eex (4) [17] and VOCs [18]. Especially the total oxidation of VOCs
2ep þ eg
to CO2 and H2O is one of the major challenges in environ-
Here, Eex is the external electric field, ep is the relative per- mental protection and can be used to obtain fundamental
mittivity of the pellet and eg is the relative permittivity of insight into the plasma-chemical mechanisms. During the
the void between the pellets. last decades, numerous studies have been performed on the
Furthermore, supported metal catalysts are widely used oxidation of different types of VOCs, such as cyclohexane
for plasma-catalytic processes. In addition to the influence [73], benzene [12] dichloromethane [74], toluene [75] or
of the support material, Kim et al. [69] reported that dis- formaldehyde [76]. An overview about the performance
persed metal nanoparticles influence the propagation of and conditions of the plasma-assisted oxidation of different
surface streamers. Due to the supported metal nanoparticles VOCs over heterogeneous catalysts is provided in Tab. 1.
the discharge expanded over a wider surface area, while it More extended lists can be found in reviews primarily
was limited to the edges of the bare support material with- focusing on the application of plasma-catalytic processes in
out nanoparticles. In addition to the chemical aspects of the the abatement of VOCs [77, 78].
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VOC Catalyst Flow rate VOC mole fraction Conversion CO2 selectivity Energy Ref.
[mL min–1] [ppm] [%] [%]
Figure 6. Photograph of a discharge inside a packed-bed DBD. catalyst is supported by other studies [89, 90]. In addition to
Reprinted with permission from [74]. Copyright 2014, American ozone, also pre-oxidized VOC molecules and dissociation
Chemical Society.
products can interact with the surface of the catalyst in a
PPC configuration [91].
From the chemical point of view, Futamura et al. [12] A study on the role of ozone was performed by Harling
proposed a mechanism for the oxidation of benzene using et al. [73], in which toluene and cyclohexane were added to
manganese oxide catalysts. They assume that atomic oxygen the gas flow between the plasma stage and the catalyst stage
is formed as a product of ozone decomposition on the sur- in a PPC reactor, eliminating any effect of direct exposure
face of the catalyst. Atomic oxygen can be present as O(3P) to the plasma on the oxidation process. A commercial
in the gas phase, or it can adsorb on the surface of the cata- MnO2-CuO catalyst, which was specifically designed for the
lyst denoted as O*. In the latter case, it can interact with thermal oxidation of contaminants and the decomposition
VOC molecules via Eley-Rideal-type reactions as shown in of ozone, was used to facilitate the assumed oxidation reac-
Fig. 7, leading to a plausible explanation for the higher deg- tions. The system showed a significant degree of toluene
radation rates observed in IPC configurations. Atomic oxy- and cyclohexane conversion even when every other possible
gen formed in the active plasma volume is directly gener- interaction apart from the reactions of the long-lived plas-
ated near the surface of the catalyst, where it can adsorb ma-generated species with the toluene and cyclohexane
and react with the VOC molecules. In PPC only the atomic molecules on the surface of the catalyst was excluded. Fur-
oxygen originating from the dissociation of ozone is avail- thermore, almost no oxidation of toluene and cyclohexane
able for VOC oxidation. Hence, in IPC larger quantities of was observed in the absence of the catalyst, confirming that
atomic oxygen are present on the surface of the catalyst the high degree of degradation observed in the former case
resulting in a much higher oxidation capacity [12]. The did not primarily originate from gas-phase reactions with
importance of atomic oxygen formed at the surface of the ozone. Comparing the rate constants for the gas-phase
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reaction of ozone with toluene (1.2 10–20 cm3molecule–1s–1) The properties of the surface of the catalyst play a crucial
and for the reaction of atomic oxygen with toluene role in the plasma-catalytic oxidation of VOCs, because the
(5.7 10–14 cm3molecule–1s–1) [NIST, Chem. Kin. Datab.] applied plasma may change the surface, and the presence of
further helped to deduce that the mechanism of the the surface changes the discharge properties. Lu et al. [86]
observed process is based on the adsorption and dissocia- reported the transition of Mn2O3 to Mn3O4 during the plas-
tion of ozone. However, ozone is only one species out of a ma-catalytic oxidation of toluene at ambient temperature,
large variety of reactive oxygen species generated in a di- which not only improved the oxidation potential, but also
electric barrier discharge. the CO2 selectivity. Each of the manganese oxidation states
A preliminary study performed by the same group was crucial for the oxidation. It was assumed that the active
addressed the effect of plasma treatment on the operating oxygen of Mn2O3 was transferred to Mn3O4, where it oxi-
temperature of the catalyst [92]. In this case, benzene in dized toluene adsorbed on the catalyst surface. The result-
synthetic air was passed through a PPC reactor. The down- ing oxygen vacancies in Mn2O3 were immediately refilled
stream catalyst stage was filled with Ag/g-Al2O3 and heated by gas-phase oxygen species. Moreover, the presence of the
from 50 C to 600 C in order to determine the onset tem- plasma can increase the degree of crystallinity and the active
perature of the catalyst from simultaneously recorded FTIR site dispersion by decreasing the particle size, which
spectra. For mere thermal catalysis, first signs of benzene increased the removal of toluene over manganese oxide/alu-
destruction occurred at 200 C, but prominent changes to mina/nickel foam catalysts [97]. In addition, a ‘‘cleaning
the spectrum were only monitored from 300 C onwards effect’’ of the surface has been reported, which may prevent
and an almost complete disappearance of the benzene IR catalyst deactivation [98]. Ni-based catalysts showed an
bands was only observed in the range from 500 C to enhanced coke resistance after treatment with a DBD plas-
600 C. On the other hand, for plasma-assisted catalysis, the ma.
onset temperature shifted to 100 C, and full conversion of Apart from the goal of high degrees of conversion, a high
benzene was observed for 150 C to 200 C and higher tem- selectivity to the total oxidation products CO2 and H2O is
peratures. There is no detailed information available so far required. In addition to CO2, CO is often formed as well as
about the mechanisms inducing the shift in the catalytic on- a result of incomplete oxidation. Thevenet et al. [99] report-
set temperature, but it was stated that plasma-catalytic sys- ed that the addition of water vapor can improve the CO2
tems for both IPC and PPC configurations are always found selectivity in the plasma-catalytic oxidation of C2H2, while
and reported to be more efficient than thermal catalysis at the same time the degree of conversion is decreased. The
[92]. Similar results were reported by Blackbeard et al. [11] decrease in conversion is attributed to the dissociation of
for the plasma-catalytic oxidation of propane and propene H2O to OH and H by electron impact. Due to this process
over supported MnO2 and Pt catalysts. By using a heatable the electron density and consequently the density of atomic
packed-bed reactor in an IPC configuration, up to 40 % O and O3, which are assumed to be crucial for the oxida-
higher degrees of conversion were obtained at lower tem- tion, are decreased. The improved CO2 selectivity may be
peratures than in thermal catalysis. attributed to different effects such as an improved CO oxi-
Another concept under discussion for the interaction dation or a shift of the CO/CO2 equilibrium by OH [99]. A
between the plasma and the catalysts is whether UV emis- similar improvement of the CO2 selectivity can be achieved
sion in atmospheric pressure plasma can induce photocatal- by the utilization of a catalytic material capable of oxidizing
ysis when paired with a semiconducting catalyst such as CO such as MnOx [86] or LaCoO3 [65]. In addition to CO,
TiO2. It has already been established that the photocatalytic a multitude of organic reaction intermediates and by-prod-
activity of TiO2 in oxidation reactions can be improved by ucts can be found for several reactions. The oxidation of tol-
the addition of precious metals such as Au and Pd [93]. uene was reported to produce formic acid, acetic acid as
Nitrogen molecular photoemission stemming from the so- well as other acids, ketones and aromatics [75, 100].
called second positive system (SPS) in the wavelength range Since products of the incomplete oxidation are undesir-
from 300 nm to 400 nm covers the band gap of TiO2. How- able, their production needs to be suppressed. This role can
ever, the UV doses occurring in a DBD reactor are usually be fulfilled by the catalyst choice [86]. Since the abatement
in the range of mW, which has been reported by some of VOCs is usually performed in (synthetic) air, undesired
researchers to be too low for photoactivation, requiring UV nitric oxides may be formed as O2 and N2 can react with
doses in the range of mW [27]. Nevertheless, there are sev- each other after plasma activation. Guo et al. [101] found
eral publications that report indications of photocatalytic that the NOx formation during toluene oxidation can be
effects induced by DBD plasmas [94, 95]. Furthermore, oxy- limited by the choice of the catalyst. While all investigated
gen vacancies and Ti3+ defects on the surface of TiO2 catalysts decreased the NOx amount, CuO showed the most
induced by an Ar DBD plasma decreased the band gap significant effect. However, CuO exhibited a lower degree of
and enhanced the photocatalytic degradation ability of toluene conversion and a lower CO2 selectivity than FeOx
organic dyes [96]. Therefore, more research on this topic is and MnOx catalysts. Several effects may contribute to the
needed. decrease of NOx formation such as microdischarges in
pores, a shift of the electron energy distribution function by
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the catalyst or adsorption of NOx. The presence of the cata- over Pt-based catalysts. Photographs of the reactor and the
lyst may furthermore suppress the formation of O3 [97]. ignited plasma are shown in Fig. 9.
To sum up, a variety of different effects and interactions The electrode configuration consists of an Al2O3 plate
are reported for plasma-catalytic VOC oxidation (Fig. 8). In with conducting metal paths on both sides, and the plasma
general, short-lived reactive oxygen species (IPC) and long- is ignited along these conducting paths. In comparison to
lived reactive oxygen species (PPC) are generated in the typical packed-bed reactors, this setup has distinct advan-
plasma and may interact with the surface of the catalyst. tages for both basic research and industrial application. Due
These species may change the reaction pathway, suppress to the optical access to the reactor provided by windows,
coke formation, or lower the activation barrier. Further- the plasma parameters and reactive species can be moni-
more, photoemission from the plasma is discussed to acti- tored in the discharge zone. Therefore, the performance of
vate photocatalysts. The presence of the catalyst can lead to the process can be directly correlated to the plasma proper-
the formation of surface discharges or significant field ties providing detailed insights on the ongoing reaction.
enhancements inside of pores. On the other hand, the The Pt-based catalyst is introduced into the discharge zone
applied plasma can also change the surface morphology of by spray coating maintaining the low flow resistance of the
the catalyst and change its electronic structure such as the reactor even in an IPC configuration.
oxidation state. Up to now plasma catalysis has not been applied to deox-
ygenation, but plasma-assisted catalysis was studied for
similar systems. As part of the hydrogen peroxide synthesis
plasma-induced reactions between oxygen and hydrogen
were investigated at atmospheric pressure. Information that
was already gained can be valuable for further research in
the Carbon2Chem framework. The synthesis of ammonia
and methanol are also interesting research topics for the
project, as they are not only widely used base chemicals, but
also target products for the conversion of steel mill gases to
valuable products.
Figure 8. Interactions between the catalyst and the plasma. 6.2 Hydrogen Peroxide Synthesis
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O2 fi O2 * (9) H2 O4 * fi H2 O2 þ O2 (15)
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HO2 þ HO2 H2 O fi H2 O2 þ O2 Table 2. Comparison of NH3 yield and energy yield/cost for various DBD processes with
different catalysts published in the last 5 years.
þ H2 O (17)
Catalyst NH3 yield Energy yield Energy cost Ref.
HO2 H2 O þ HO2 H2 O fi H2 O2 [%] [gNH3kWh–1] [MJ mol–1]
þ O2 þ 2H2 O (18) BaTiO3/Pb[ZrxTi1–x]O3 2.75 0.72 136 [124]
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